Sign in to use this feature.

Years

Between: -

Subjects

remove_circle_outline
remove_circle_outline
remove_circle_outline
remove_circle_outline
remove_circle_outline
remove_circle_outline
remove_circle_outline
remove_circle_outline
remove_circle_outline

Journals

Article Types

Countries / Regions

Search Results (136)

Search Parameters:
Keywords = piezoelectric stack

Order results
Result details
Results per page
Select all
Export citation of selected articles as:
8 pages, 2670 KiB  
Article
Co-Dominant Piezoelectric and Flexoelectric Effects in Twisted Double Bilayer Graphene
by Yuanhao Wei, Yuhao Li, Hanhao Zhang, Shengsheng Lin, Takashi Taniguchi, Kenji Watanabe, Cun-Fa Gao and Yan Shi
Symmetry 2024, 16(11), 1524; https://doi.org/10.3390/sym16111524 - 14 Nov 2024
Viewed by 294
Abstract
Controlling the balance between piezoelectric and flexoelectric effects is crucial for tailoring the electromechanical responses of a material. In twisted graphene, it is found that the electromechanical response near the domain walls (DWs) is dominated by either the flexoelectric effect as in twisted [...] Read more.
Controlling the balance between piezoelectric and flexoelectric effects is crucial for tailoring the electromechanical responses of a material. In twisted graphene, it is found that the electromechanical response near the domain walls (DWs) is dominated by either the flexoelectric effect as in twisted bilayer graphene (tBLG) or the piezoelectric effect as in twisted monolayer–bilayer graphene (tMBG). The codominance of both effects in a single system is rare. Here, utilizing lateral piezoresponse force microscopy (LPFM), we show that piezoelectric and flexoelectric effects can coexist and are equally important in twisted double bilayer graphene (tDBG), termed as the piezo-flexoelectric effect. Unlike tBLG and tMBG, distinctive two-step LPFM spatial profiles are captured across the moiré DWs of tDBG. By decomposing the LPFM signal into axisymmetric and antisymmetric components, we find that the angular dependence of both components satisfies sinusoidal relations. Quantitatively, the in-plane piezoelectric coefficient of DWs in tDBG is determined to be 0.15 pm/V by dual AC resonance tracking (DART) LPFM measurement. The conclusion is further supported by continuum mechanics simulations. Our results demonstrate that the stacking configuration serves as a powerful tuning knob for modulating the electromechanical responses of twisted van der Waals materials. Full article
(This article belongs to the Section Engineering and Materials)
Show Figures

Figure 1

18 pages, 19560 KiB  
Article
System Integration Design of High-Performance Piezo-Actuated Fast-Steering Mirror for Laser Beam Steering System
by Jung-Gon Kim
Sensors 2024, 24(21), 6775; https://doi.org/10.3390/s24216775 - 22 Oct 2024
Viewed by 661
Abstract
This paper presents an innovative piezo-actuated fast-steering mirror (FSM) that integrates control design and system operation to improve the tracking performance of laser beam steering (LBS) systems. The proposed piezoelectric FSM is centered on two pairs of stacked actuators functioning in the tip-tilt [...] Read more.
This paper presents an innovative piezo-actuated fast-steering mirror (FSM) that integrates control design and system operation to improve the tracking performance of laser beam steering (LBS) systems. The proposed piezoelectric FSM is centered on two pairs of stacked actuators functioning in the tip-tilt direction via novel flexible hinges with strain-gauge sensors for position measurement. The suggested flexible hinge scheme allows the first fundamental resonance mode with the optical mirror to exceed 400 Hz while achieving an actuation range of ±5 mrad. Thus, the design offers a wider mechanical actuation range than conventional piezoelectric FSMs. Moreover, LBS systems that use fast-steering motion controllers should be robust against dynamic disturbances, such as periodic external vibrations. Such disturbances, inherently associated with the operating conditions for LBS systems, typically reduce the stability of the tip-tilt motion. To attenuate the effects of such disturbances, a high-precision control system is necessary for the tip-tilt motion. Therefore, a control method integrating a proportional–integral controller with an adaptive feedforward control (AFC) algorithm is outlined to enhance tip-tilt tracking performance during high-speed scanning, compared with conventional LBS systems. Based on experimental findings, the AFC algorithm boosted control performance under dynamic disturbances, such as sinusoidal vibrations with multiple frequencies. Full article
Show Figures

Figure 1

15 pages, 6938 KiB  
Article
Equivalent Circuit of a Stacked Piezoelectric Cymbal Vibrator
by Zhaohan Gong, Yajun Zheng, Shuhan Yao, Xinhu Liu, Ningdong Hu and Hongping Hu
Micromachines 2024, 15(10), 1205; https://doi.org/10.3390/mi15101205 - 28 Sep 2024
Viewed by 543
Abstract
In order to provide a convenient and fast calculation method, the equivalent circuit of a novel stacked piezoelectric cymbal vibrator is studied. The equivalent circuit model of the piezoelectric stack is derived by combining the equivalent circuit models of the thin piezoelectric disk [...] Read more.
In order to provide a convenient and fast calculation method, the equivalent circuit of a novel stacked piezoelectric cymbal vibrator is studied. The equivalent circuit model of the piezoelectric stack is derived by combining the equivalent circuit models of the thin piezoelectric disk and electrode. The equivalent circuit of the cymbal structure is then derived. The equivalent circuit model of the stacked piezoelectric cymbal vibrator is further proposed. The output axial displacements and output forces of the cymbal vibrator under different excitation voltages are investigated using the equivalent circuit model. The effectiveness of the equivalent circuit has been verified by comparing it with the finite element method. Furthermore, the equivalent circuit method has a much faster calculation speed than the finite element method. Full article
(This article belongs to the Special Issue Piezoelectric Materials, Devices and Systems)
Show Figures

Figure 1

17 pages, 6478 KiB  
Article
Investigation of Innovative High-Response Piezoelectric Actuator Used as Smart Actuator–Sensor System
by Marko Šimic and Niko Herakovič
Appl. Sci. 2024, 14(18), 8523; https://doi.org/10.3390/app14188523 - 22 Sep 2024
Viewed by 1108
Abstract
This paper presents an experimental analysis of a high-response piezoelectric actuator system for the modular design of hydraulic digital fluid control units. It focuses on determining static and dynamic characteristics, forming the basis for developing a smart Industry 4.0 component that incorporates both [...] Read more.
This paper presents an experimental analysis of a high-response piezoelectric actuator system for the modular design of hydraulic digital fluid control units. It focuses on determining static and dynamic characteristics, forming the basis for developing a smart Industry 4.0 component that incorporates both actuator and sensor function. The design process examines the main challenges, advantages, disadvantages, and working principles to define parameters that impact the actuator’s behaviour and performance. The new piezoelectric actuator system features three piezoelectric stack actuators in series, enabling simultaneous actuation and sensing by applying and measuring the electrical voltage at each piezo element. The experimental setup and test methodology are explained in detail, revealing that the new design, combined with an appropriate open-loop or closed-loop control method, offers superior actuator stroke control, high stroke resolution, and a high-dynamic step response. This paper proposes a concept of a smart piezo actuator system focused on I4.0 and an actuator administration shell, integrated with 5G and RFID technology, which will allow automatic plug-and-play functionality and efficient interconnection, communication, and data transfer between the hydraulic valve and the piezoelectric actuator system. Full article
(This article belongs to the Special Issue Research Progress on Hydraulic Fluid and Hydraulic Systems)
Show Figures

Figure 1

33 pages, 13377 KiB  
Article
Research on Output Characteristics of a Non-Contact Piezoelectric Actuator’s Micro-Displacement Amplifying Mechanism
by Huaiyong Li, Dongya Zhang, Yusheng Lin, Zhong Chen, Zhiwei Shi, Chong Li and Liang Zhao
Actuators 2024, 13(8), 309; https://doi.org/10.3390/act13080309 - 10 Aug 2024
Viewed by 834
Abstract
A non-contact piezoelectric actuator is proposed. The non-contact power transfer between stator and rotor is realized by pneumatic transmission, characterized by fast response, long life, compact structure, and easy miniaturization and control. The structure of the non-contact piezoelectric actuator is designed and its [...] Read more.
A non-contact piezoelectric actuator is proposed. The non-contact power transfer between stator and rotor is realized by pneumatic transmission, characterized by fast response, long life, compact structure, and easy miniaturization and control. The structure of the non-contact piezoelectric actuator is designed and its working principle is elucidated. The equation of the relationship between the output displacements of the non-contact piezoelectric actuator’s micro-displacement amplifying mechanism and the input displacements of piezoelectric stack is deduced, and the simulation analysis method of output displacement of the micro-displacement amplifying mechanism is established. Using the equation and the simulation analysis, the output characteristics of micro-displacement amplifying mechanism for the non-contact piezoelectric actuator and their changes along with the system parameters are investigated. The detailed process of optimal design of the micro-displacement amplifying mechanism is given by means of mathematical statistics. The prototype is made and the performance test is carried out. The correctness of the theoretical calculation and simulation analysis is verified by comparing the experimental values with the theoretical and simulated values of the output displacement of the micro-displacement amplifying mechanism. The results show that the initial angle of bridge structure I has an obvious effect on the output characteristics of the micro-displacement amplifying mechanism in the range of 5°–15°. When the lever’s rod length is 13 mm–15 mm, the bridge structure II’s rod length is 6 mm–7 mm, and the power arm length of bridge structure I’s driving lever is 5 mm–7 mm, the bridge structure II’s rod horizontal projection length is 5 mm–6 mm and the output displacement of the micro-displacement amplifying mechanism is larger. Through the optimal design, it is obtained that the bridge structure I’s initial angle is 8°, the lever’s rod length is 15 mm, the bridge structure II’s rod length is 7 mm, and the power arm length of bridge structure I driving lever is 5 mm, the bridge structure II’s rod horizontal projection length is 6 mm, and the simulated output displacement of the micro-displacement amplifying mechanism is 0.1415 mm. The prototype test reveals that as the input excitation displacement decreases, the error increases, while as the input excitation displacement increases, the error decreases. Specifically, when the input excitation displacement is 0.005 mm, the measured output displacement of the micro-displacement amplifying mechanism is 0.1239 mm, resulting in a 19.8% deviation from the theoretical value and a 12.44% deviation from the simulated value. The research work in this paper enriches the research achievements of non-contact piezoelectric actuators, and also provides a reference for designing small structure and large travel micro-displacement amplifying mechanisms of this type of actuator. Full article
(This article belongs to the Special Issue Piezoelectric Actuators in MEMS)
Show Figures

Figure 1

13 pages, 3543 KiB  
Article
Search for Strange Quark Matter and Nuclearites on Board the International Space Station (SQM-ISS): A Future Detector to Search for Massive, Non-Relativistic Objects in Space
by Massimo Bianchi, Francesca Bisconti, Carl Blaksley, Valerio Bocci, Marco Casolino, Francesco Di Clemente, Alessandro Drago, Christer Fuglesang, Francesco Iacoangeli, Massimiliano Lattanzi, Alessandro Marcelli, Laura Marcelli, Paolo Natoli, Etienne Parizot, Piergiorgio Picozza, Lech Wiktor Piotrowski, Zbigniew Plebaniak, Enzo Reali, Marco Ricci, Alessandro Rizzo, Gabriele Rizzo and Jacek Szabelskiadd Show full author list remove Hide full author list
Sensors 2024, 24(16), 5090; https://doi.org/10.3390/s24165090 - 6 Aug 2024
Viewed by 664
Abstract
SQM-ISS is a detector that will search from the International Space Station for massive particles possibly present among the cosmic rays. Among them, we mention strange quark matter, Q-Balls, lumps of fermionic exotic compact stars, Primordial Black Holes, mirror matter, Fermi balls, etc. [...] Read more.
SQM-ISS is a detector that will search from the International Space Station for massive particles possibly present among the cosmic rays. Among them, we mention strange quark matter, Q-Balls, lumps of fermionic exotic compact stars, Primordial Black Holes, mirror matter, Fermi balls, etc. These compact, dense objects would be much heavier than normal nuclei, have velocities of galaxy-bound systems, and would be deeply penetrating. The detector is based on a stack of scintillator and piezoelectric elements which can provide information on both the charge state and mass, with the additional timing information allowing to determine the speed of the particle, searching for particles with velocities of the order of galactic rotation speed (v ≲ 250 km/s). In this work, we describe the apparatus and its observational capabilities. Full article
(This article belongs to the Section Physical Sensors)
Show Figures

Figure 1

14 pages, 10353 KiB  
Article
Energy Harvester Based on Mechanical Impacts of an Oscillating Rod on Piezoelectric Transducers
by Marco Antonio Islas-Herrera, David Sánchez-Luna, Jorge Miguel Jaimes-Ponce, Daniel Andrés Córdova-Córdova, Christopher Iván Lorenzo-Alfaro and Daniel Hernández-Rivera
Clean Technol. 2024, 6(3), 907-920; https://doi.org/10.3390/cleantechnol6030046 - 10 Jul 2024
Cited by 1 | Viewed by 903
Abstract
Energy harvesting is a clean technique for obtaining electrical energy from environmental energy. Mechanical vibrations are an energy source that can be used to produce electricity using piezoelectric energy harvesters. Vibrations and wind in bridges have the potential to produce clean energy that [...] Read more.
Energy harvesting is a clean technique for obtaining electrical energy from environmental energy. Mechanical vibrations are an energy source that can be used to produce electricity using piezoelectric energy harvesters. Vibrations and wind in bridges have the potential to produce clean energy that can be employed to supply energy to electronic devices with low consumption. The purpose of this paper was to validate the functioning of an energy harvester and test the electrical power generation potential of a system based on the oscillation of a rod with a tip mass to stimulate piezoelectric transducers by impact. The obtained results showed the electric energy productions for different test conditions. Experimentally, the proposed structure produced 0.337 µJ of energy after 14 s of testing. In addition, after one hour of operation, an estimated production of 10.4 mJ was obtained, considering four stacks of 25 piezoelectric disks each when periodic impacts of 50 N at 5.7 Hz stimulated the transducers. In future work, we will focus on taking advantage of the vibrations produced in the proposed structure induced by the mechanical vibration of bridges and vortex-induced vibration (VIV) through interaction with wind to produce clean energy that is useful for low-power applications. Full article
(This article belongs to the Collection Brilliant Young Researchers in Clean Technologies)
Show Figures

Figure 1

13 pages, 3102 KiB  
Article
A Frequency Up-Conversion Piezoelectric Energy Harvester Shunted to a Synchronous Electric Charge Extraction Circuit
by Xuzhang Peng, Hao Tang, Zhongjie Li, Junrui Liang, Liuding Yu and Guobiao Hu
Micromachines 2024, 15(7), 842; https://doi.org/10.3390/mi15070842 - 28 Jun 2024
Viewed by 689
Abstract
A frequency up-conversion piezoelectric energy harvester (FUC-PEH) consists of a force amplifier, a piezoelectric stack, a low-frequency oscillator (LFO), and a stop limiter. The force amplifier generates the amplification of stress on the piezoelectric stack. The LFO, comprising a spring and a mass [...] Read more.
A frequency up-conversion piezoelectric energy harvester (FUC-PEH) consists of a force amplifier, a piezoelectric stack, a low-frequency oscillator (LFO), and a stop limiter. The force amplifier generates the amplification of stress on the piezoelectric stack. The LFO, comprising a spring and a mass block, impacts the stop limiter during vibration to induce high-frequency oscillations within the piezoelectric stack. In this paper, we represent and simplify the FUC-PEH as a lumped-parameter model based on piezoelectric material constitutive equations and structural dynamic theories. Using the electromechanical analogy, we developed an equivalent circuit model (ECM) of the FUC-PEH. A parametric study was performed to investigate the impact of system parameters, such as spring stiffness and concentrated mass, on the FUC-PEH performance. The collision-induced amplitude truncation (AT) effect enlarges the operation bandwidth. ECM simulations show that low-frequency input excitation is converted into a high-frequency output response, enhancing the energy conversion efficiency. Furthermore, we aimed to improve the FUC-PEH’s performance using a synchronous electric charge extraction (SECE) circuit. Using the ECM approach, we established a system-level model that considers the electromechanical coupling behavior. The simulation results provide insights into the performance of FUC harvesters with SECE circuits and offer valuable design guidance. Full article
(This article belongs to the Topic Advanced Energy Harvesting Technology)
Show Figures

Figure 1

15 pages, 5617 KiB  
Article
Experimental Validation of Two Types of Force Actuators: A Performance Comparison
by Xishan Jiang, Ning Wang, Jing Zheng and Jie Pan
Sensors 2024, 24(12), 3950; https://doi.org/10.3390/s24123950 - 18 Jun 2024
Viewed by 545
Abstract
This paper experimentally investigates the performance of piezoelectric force actuators. Using the same encapsulated piezoelectric stack, an inertial-type actuator and a frame-type actuator are constructed for performance comparison. The experimental results are also used to validate the recently established actuator models, whilst the [...] Read more.
This paper experimentally investigates the performance of piezoelectric force actuators. Using the same encapsulated piezoelectric stack, an inertial-type actuator and a frame-type actuator are constructed for performance comparison. The experimental results are also used to validate the recently established actuator models, whilst the mechanical and piezoelectrical parameters of the models are experimentally identified. The performance of the actuators is described by the transmitted force(s) and input power flow from the actuators to the base structure with reference to the same electrical input voltage to the stack. The validation is deemed successful due to the strong agreement observed between the measured and predicted actuator performances. Additionally, it is discovered that the frame-type actuator has the capacity to produce significantly higher transmitted forces and input power flow to the base structure compared to the inertial-type actuator. The mechanism underlying the performance disparity between these two types of actuators is also examined. This paper clarifies the mechanism, shedding light on the design and optimization of piezoelectric actuators. Full article
Show Figures

Figure 1

13 pages, 4646 KiB  
Article
A Single-Clamp Inchworm Actuator with Two Piezoelectric Stacks
by Lu Liu, Zheyang Ji, Yue Zhang, Huan Chen, Weimin Lou and Ming Kong
Micromachines 2024, 15(6), 718; https://doi.org/10.3390/mi15060718 - 29 May 2024
Viewed by 849
Abstract
Inchworm piezoelectric actuators have attracted much attention in the field of precision positioning due to the advantages of a large stroke, high output force, and high resolution. However, traditional inchworm piezoelectric actuators use two sets of clamps and a set of drive structures [...] Read more.
Inchworm piezoelectric actuators have attracted much attention in the field of precision positioning due to the advantages of a large stroke, high output force, and high resolution. However, traditional inchworm piezoelectric actuators use two sets of clamps and a set of drive structures to achieve stepping motion, which generally requires at least three piezoelectric stacks, resulting in a complex structure and the control system. Several methodologies have been advanced to minimize the utilization of piezoelectric stacks. However, there still exists the issue of excessive volume. Therefore, an inchworm piezoelectric actuator with a single-clamp and single drive structure is proposed in the study, which provides a compact size and smaller volume. The clamping mechanism comprises two sets of clamping feet with opposite displacement, which alternate contact with the guide frame and adjustable plate to ensure that the clamping mechanism always has frictional force and accomplishes the stepping motion. The testing of the actuator’s step distance, output force, and other parameters was conducted utilizing a displacement sensor. Experimental results indicate that the actuator achieved a maximum speed of 174.3 μm/s and an output force of 8.6 N when the frequency and voltage were 19 Hz and 150 V. Full article
(This article belongs to the Special Issue Micro/Nanostructures in Sensors and Actuators)
Show Figures

Figure 1

18 pages, 1251 KiB  
Article
Structural Optimization Study on a Three-Degree-of-Freedom Piezoelectric Ultrasonic Transducer
by Zhizhong Wu, Zhao Zhang, Deguang Wu, Yuanhang Chen, Fan Hu, Chenxin Guo and Lijun Tang
Actuators 2024, 13(5), 177; https://doi.org/10.3390/act13050177 - 8 May 2024
Cited by 1 | Viewed by 1171
Abstract
A three-degree-of-freedom (3-DOF) piezoelectric ultrasonic transducer is a critical component in elliptical and longitudinal ultrasonic vibration-assisted cutting processes, with its geometric structure directly influencing its performance. This paper proposes a structural optimization method based on a convolutional neural network (CNN) and non-dominated sorting [...] Read more.
A three-degree-of-freedom (3-DOF) piezoelectric ultrasonic transducer is a critical component in elliptical and longitudinal ultrasonic vibration-assisted cutting processes, with its geometric structure directly influencing its performance. This paper proposes a structural optimization method based on a convolutional neural network (CNN) and non-dominated sorting genetic algorithm II (NSGA2). This method establishes a transducer lumped model to obtain the electromechanical coupling coefficients (X-ke and Z-ke) and thermal power (X-P) indicators, evaluating the bending and longitudinal vibration performance of the transducer. By creating a finite element model of the transducer with mechanical losses, a dataset of different transducer performance parameters, including the tail mass, piezoelectric stack, and dimensions of the horn, is obtained. Training a CNN model with this dataset yields objective functions for the relationship between different transducer geometric structures and performance parameters. The NSGA2 algorithm solves the X-ke and Z-ke objective functions, obtaining the Pareto set of the transducer geometric dimensions and determining the optimal transducer geometry in conjunction with X-P. This method achieves simultaneous improvements in X-ke and Z-ke of the transducer by 22.33% and 25.89% post-optimization and reduces X-P to 18.97 W. Furthermore, the finite element simulation experiments of the transducer validate the effectiveness of this method. Full article
Show Figures

Figure 1

25 pages, 14564 KiB  
Article
Bidirectional Multi-Spectral Vibration Control: Insights from Automotive Engine Mounting Systems in Two-Dimensional Structures with a Damaged Vertical Active Element
by Dongwoo Hong, Hojoon Moon and Byeongil Kim
Actuators 2024, 13(5), 171; https://doi.org/10.3390/act13050171 - 1 May 2024
Viewed by 1225
Abstract
Active mounting systems have become more prevalent in recent years to effectively mitigate structure-induced vibration across the automobile chassis. This trend is particularly evident in engine mounts. Considerable research has been dedicated to this approach owing to its potential to enhance the quietness [...] Read more.
Active mounting systems have become more prevalent in recent years to effectively mitigate structure-induced vibration across the automobile chassis. This trend is particularly evident in engine mounts. Considerable research has been dedicated to this approach owing to its potential to enhance the quietness and travel comfort of automobiles. However, prior research has concentrated on a limited spectrum of specific vibrations and noise control or has been restricted to vertical vibration control. This article describes the modeling, analysis, and control of a source structure employing a multidirectional active mounting system designed to closely simulate the position and direction of an actual automobile engine mount. A piezoelectric stack actuator is connected in series to an elastic (rubber) mount to form an active mount. The calculation of the secondary force required for each active mount is achieved through the application of harmonic excitation forces. The control signal can also reduce vibrations caused by destructive interference with the input signal. Furthermore, horizontal oscillations can be mitigated by manipulating the parameters via dynamic interconnections of the source structure. We specifically examined the level of vibration reduction performance in the absence of a vertical active element operation and determined whether the control is feasible. Simulation outcomes demonstrate that this active mount, which operates in both the vertical and horizontal directions, effectively mitigates excitation vibrations. Furthermore, a simulation was conducted to mitigate the vibrations caused by complex signals (AM and FM signals) and noise. This was achieved by monitoring the system response using an adaptive filter NLMS algorithm. Adaptive filter simulations demonstrate that the control efficacy degrades in response to complex signals and noise, although the overall relaxation trend remains unchanged. Full article
Show Figures

Figure 1

3 pages, 1754 KiB  
Abstract
Flexural Plate Wave Piezoelectric MEMS Pressure Sensor
by Alessandro Nastro, Stefano Bertelli, Marco Ferrari, Libor Rufer, Skandar Basrour and Vittorio Ferrari
Proceedings 2024, 97(1), 185; https://doi.org/10.3390/proceedings2024097185 - 15 Apr 2024
Cited by 1 | Viewed by 2966
Abstract
A piezoelectric MEMS pressure sensor that exploits the first antisymmetric vibration mode (A0) of Lamb waves is presented. The 6 mm × 6 mm diaphragm used to sense the applied pressure is composed of a stack of doped silicon (Si) and aluminum nitride [...] Read more.
A piezoelectric MEMS pressure sensor that exploits the first antisymmetric vibration mode (A0) of Lamb waves is presented. The 6 mm × 6 mm diaphragm used to sense the applied pressure is composed of a stack of doped silicon (Si) and aluminum nitride (AlN) layers with metal interdigital transducers (IDTs) to generate flexural plate waves (FPWs). The working principle has been validated through 2D finite element analysis within the frequency range 10–15 MHz and experimentally verified. A variable pressure has been applied across the diaphragm while measuring the electrical admittance of a single IDT. Experimental data are in good agreement with simulations showing a frequency shift of the admittance peaks when pressure acts on the MEMS diaphragm. For an applied pressure of 170 Pa, a relative frequency variation of 0.25% has been achieved. Full article
(This article belongs to the Proceedings of XXXV EUROSENSORS Conference)
Show Figures

Figure 1

17 pages, 11053 KiB  
Article
Development and Improvement of a Piezoelectrically Driven Miniature Robot
by Guangping Wu, Ziyang Wang, Yuting Wu, Jiaxin Zhao, Feng Cui, Yichen Zhang and Wenyuan Chen
Biomimetics 2024, 9(4), 226; https://doi.org/10.3390/biomimetics9040226 - 9 Apr 2024
Viewed by 1441
Abstract
In this paper, we proposed a miniature quadrupedal piezoelectric robot with a mass of 1.8 g and a body length of 4.6 cm. The robot adopts a novel spatial parallel mechanism as its transmission. Each leg of the robot has two degrees of [...] Read more.
In this paper, we proposed a miniature quadrupedal piezoelectric robot with a mass of 1.8 g and a body length of 4.6 cm. The robot adopts a novel spatial parallel mechanism as its transmission. Each leg of the robot has two degrees of freedom (DOFs): swing and lift. The trajectory necessary for walking is achieved by the appropriate phasing of these two DOFs. A new manufacturing method for piezoelectric actuators was developed. During the stacking process, discrete patterned PZT pieces are used to avoid dielectric failure caused by laser cutting. Copper-clad FR-4 is used as the solder pad instead of copper foil, making the connection between the pad and the actuator more reliable. The lift powertrain of the robot was modeled and the link length of the powertrain was optimized based on the model. The maximum output force of each leg can reach 26 mN under optimized design parameters, which is 1.38 times the required force for successful walking. The frequency response of the powertrain was measured and fitted to the second-order system, which enabled increased leg amplitudes near the powertrain resonance of approximately 70 Hz with adjusted drive signals. The maximum speed of the robot without load reached 48.66 cm/s (10.58 body lengths per second) and the payload capacity can reach 5.5 g (3.05 times its mass) near the powertrain resonance. Full article
(This article belongs to the Section Locomotion and Bioinspired Robotics)
Show Figures

Figure 1

3 pages, 1275 KiB  
Abstract
Piezoelectric Layer Transfer Process for MEMS
by Gwenael Le Rhun, Franklin Pavageau, Timothée Rotrou, Christel Dieppedale and Laurent Mollard
Proceedings 2024, 97(1), 114; https://doi.org/10.3390/proceedings2024097114 - 27 Mar 2024
Viewed by 565
Abstract
Piezoelectric MEMS devices were fabricated on 200 mm Si wafers using both deposited and layer-transferred PZT films. In both cases, the PZT-based devices showed ferroelectric and piezoelectric properties at the level of current state-of-the-art devices. The wafer-to-wafer piezoelectric layer transfer process that was [...] Read more.
Piezoelectric MEMS devices were fabricated on 200 mm Si wafers using both deposited and layer-transferred PZT films. In both cases, the PZT-based devices showed ferroelectric and piezoelectric properties at the level of current state-of-the-art devices. The wafer-to-wafer piezoelectric layer transfer process that was developed can thus be useful to bypass the thermal budgeting issue associated with the high crystallization temperature of PZT (~700 °C). It allows the integration of PZT capacitors on any kind of layer stack or substrate, for either actuator or sensor applications. Full article
(This article belongs to the Proceedings of XXXV EUROSENSORS Conference)
Show Figures

Figure 1

Back to TopTop