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Formation mechanism of sidewall striation in high-aspect-ratio hole etching

M Omura, J Hashimoto, T Adachi… - Japanese Journal of …, 2019 - iopscience.iop.org
We investigated the formation mechanism of sidewall striations in etched holes with high
aspect ratios, with focus on the roles of energetic ions and fluorocarbon radicals. Striations …
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[CITATION][C] Formation mechanism of sidewall striation in high-aspect-ratio hole etching

M Omura, J Hashimoto, T Adachi, Y Kondo… - Japanese Journal of …, 2019 - cir.nii.ac.jp
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[PDF] researchgate.net

[PDF][PDF] Formation mechanism of sidewall striation in high-aspect-ratio hole etching

YX Liu, I Korolov, E Schüngel - 2019 - researchgate.net
We investigated the formation mechanism of sidewall striations in etched holes with high
aspect ratios, with focus on the roles of energetic ions and fluorocarbon radicals. Striations …
Cite

Formation mechanism of sidewall striation in high-aspect-ratio hole etching

M Omura, J Hashimoto, T Adachi… - … Journal of Applied …, 2019 - ui.adsabs.harvard.edu
We investigated the formation mechanism of sidewall striations in etched holes with high
aspect ratios, with focus on the roles of energetic ions and fluorocarbon radicals. Striations …
Cite