arXiv : Test beam measurement of ams H35 HV-CMOS capacitively coupled pixel sensor prototypes with high-resistivity substrate

Benoit, M.; Terzo, S.; Muenstermann, D.; Grinstein, S.; Ferrere, D.; Cavallaro, E.; Casanova, R.; Miucci, A.; Zaffaroni, E.; Lanni, F.; Merlassino, C.; Meng, L.; Braccini, S.; Xie, J.; Di Bello, F.A.; Wu, W.; Liu, H.; Gonzalez-Sevilla, S.; Nessi, M.; Xu, L.; Chen, H.; Weston, T.; Vicente Barrero Pinto, M.; Weber, M.; Zhang, M.; Golling, T.; Vilella Figueras, E.; Okawa, H.; Ristić, B.; Sultan, D.M.S.; Frizzell, D.; Iacobucci, G.; Rimoldi, M.; Metcalfe, J.; Kiehn, M.; Perić, I.; Chen, K.

doi:10.1088/1748-0221/13/12/P12009

Article
Report number	arXiv:1712.08338
Title	Test beam measurement of ams H35 HV-CMOS capacitively coupled pixel sensor prototypes with high-resistivity substrate
Related title	Test beam measurement of ams H35 HV-CMOS capacitively coupled pixel sensor prototypes with high-resistivity substrate
Author(s)	Benoit, M. (Geneva U.) ; Braccini, S. (U. Bern, AEC) ; Casanova, R. (Tsukuba U.) ; Cavallaro, E. (Tsukuba U.) ; Chen, H. (BNL, NSLS) ; Chen, K. (BNL, NSLS) ; Di Bello, F.A. (Geneva U.) ; Ferrere, D. (Geneva U.) ; Frizzell, D. (Oklahoma U.) ; Golling, T. (Geneva U.) ; Gonzalez-Sevilla, S. (Geneva U.) ; Grinstein, S. (Tsukuba U.) ; Iacobucci, G. (Geneva U.) ; Kiehn, M. (Geneva U.) ; Lanni, F. (BNL, NSLS) ; Liu, H. (BNL, NSLS ; Hefei, CUST) ; Metcalfe, J. (ANL, APS) ; Meng, L. (Geneva U. ; Liverpool U.) ; Merlassino, C. (U. Bern, AEC) ; Miucci, A. (U. Bern, AEC) ; Muenstermann, D. (Lancaster U.) ; Nessi, M. (Geneva U. ; CERN) ; Okawa, H. (Tsukuba U.) ; Perić, I. (KIT, Karlsruhe, IPE) ; Rimoldi, M. (U. Bern, AEC) ; Ristić, B. (Geneva U. ; CERN) ; Sultan, D.M.S. (Geneva U.) ; Terzo, S. (Tsukuba U.) ; Vicente Barrero Pinto, M. (Geneva U.) ; Vilella Figueras, E. (Liverpool U.) ; Weber, M. (U. Bern, AEC) ; Weston, T. (U. Bern, AEC) ; Wu, W. (BNL, NSLS) ; Xie, J. (ANL, APS) ; Xu, L. (BNL, NSLS) ; Zaffaroni, E. (Geneva U.) ; Zhang, M. (Illinois U., Urbana)
Publication	2018-12-04
Imprint	2017-12-22
Number of pages	18
Note	This project has received funding from the European Union’s Horizon 2020 research and innovation programme under grant agreement No 675587. This project has received funding from the European Union’s Horizon 2020 research and innovation programme under grant agreement No 675587.
In:	JINST 13 (2018) P12009
DOI	10.1088/1748-0221/13/12/P12009
Subject category	physics.ins-det ; Detectors and Experimental Techniques
Accelerator/Facility, Experiment	CERN LHC ; ATLAS CERN SPS
Abstract	In the context of the studies of the ATLAS High Luminosity LHC programme, radiation tolerant pixel detectors in CMOS technologies are investigated. To evaluate the effects of substrate resistivity on CMOS sensor performance, the H35DEMO demonstrator, containing different diode and amplifier designs, was produced in ams H35 HV-CMOS technology using four different substrate resistivities spanning from $\mathrm{80}$ to $\mathrm{1000 \Omega \cdot cm}$. A glueing process using a high-precision flip-chip machine was developed in order to capacitively couple the sensors to FE-I4 Readout ASIC using a thin layer of epoxy glue with good uniformity over a large surface. The resulting assemblies were measured in beam test at the Fermilab Test Beam Facilities with 120 GeV protons and CERN SPS H8 beamline using 80 GeV pions. The in-time efficiency and tracking properties measured for the different sensor types are shown to be compatible with the ATLAS ITk requirements for its pixel sensors.
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