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Design of A High Sensitivity FET Integrated MEMS Microphone: Procedia Chemistry
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Design of A High Sensitivity FET Integrated MEMS Microphone: Procedia Chemistry
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Microsystems
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Microsystems
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On The Equivalence of Acoustic Impedance and Squeeze Film Impedance in Micromechanical Resonators
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On The Equivalence of Acoustic Impedance and Squeeze Film Impedance in Micromechanical Resonators
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Micr Ophone Handbook: Test and Measur Ement Micr Ophones
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Micr Ophone Handbook: Test and Measur Ement Micr Ophones
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