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VLSI Manufacturing Technology

This document provides an introduction to VLSI manufacturing technology. It discusses the history and development of transistors and integrated circuits, from the first transistor created in 1947 to the advancement of semiconductor technology following Moore's Law. Key topics covered include the definition of a transistor, the replacement of vacuum tubes with solid state devices, the creation of the first integrated circuits, Moore's Law and technology nodes, and factors that impact the scaling of integration. The document also outlines the grading policy for a course on VLSI manufacturing technology.

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Bùi Thu Hương
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51 views

VLSI Manufacturing Technology

This document provides an introduction to VLSI manufacturing technology. It discusses the history and development of transistors and integrated circuits, from the first transistor created in 1947 to the advancement of semiconductor technology following Moore's Law. Key topics covered include the definition of a transistor, the replacement of vacuum tubes with solid state devices, the creation of the first integrated circuits, Moore's Law and technology nodes, and factors that impact the scaling of integration. The document also outlines the grading policy for a course on VLSI manufacturing technology.

Uploaded by

Bùi Thu Hương
Copyright
© © All Rights Reserved
Available Formats
Download as PPTX, PDF, TXT or read online on Scribd
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VLSI Manufacturing

Technology
Introduction
Chin-Han Chung, PhD
鍾錦翰
Chin-Han Chung, PhD
鍾錦翰
BS: NCKU, EE (2008-2012)
MS: NCKU, EE (2012-2015)
PhD: UTokyo, EE (2015-
2018)
Chin-Han Chung, PhD
鍾錦翰
BS: NCKU, EE (2008-2012)
MS: NCKU, EE (2012-2015)
PhD:
Not too long ago 　
UTokyo, EE (2015-
2018)
Chin-Han Chung, PhD
鍾錦翰
BS: NCKU, EE (2008-2012)
MS: NCKU, EE (2012-2015)
PhD: UTokyo, EE (2015-
2018)
Assistant Professor
ICST, NYCU (2020-NOW)
 GaN device
 Non-volatile memory
 Device reliability

including

Radiation hardness
 Device reliability

including

Radiation hardness

Robust device for low earth orbit (LEO) satellites, nuclear


facilities, and accelerators facilities
Chin-Han Chung, PhD
鍾錦翰
BS: NCKU, EE (2008-2012)
MS: NCKU, EE (2012-2015)
PhD: UTokyo, EE (2015-
2018)
Assistant Professor
ICST, NYCU (2020-NOW)
Chin-Han Chung, PhD
鍾錦翰
BS: NCKU, EE (2008-2012)
MS: NCKU, EE (2012-2015)
PhD: UTokyo, EE (2015-
2018)
Assistant Professor
ICST, NYCU (2020-NOW) Japan Aerospace Exploration
Agency
日本宇宙航空研究開発機構
ng
to
What is VLSI?
Very Large-Sale Integration
The integration of what?

Transistors
Transistors
What are transistors?
Transistors Trans+ resistors
Trans+ resistors

A device with variable resistance (voltage/current)


^
3 terminal
The very first transistor (1947)
The very first transistor (1947)
William Shockley, John Bardeen, and Walter Brattain of Bell
Laboratory
1956 Nobel Prize Laureates
WWII (1939-1945)
The very first transistor (1947)
What device did they use for radio, phones, etc.?

WWII (1939-1945)
The very first transistor (1947)

Vacuum tubes
Solid state devices replaced vacuum tubes for
their smaller size, lower power consumption,
and speed

Vacuum tubes
Discrete devices
Why stop here?
If all transistors are made on
germanium, why not make them all on a
same piece of germanium?
------Jack Kilby of Texas Instruments
In 1958, Jack Kilby
of created the first
integrated circuit
using a Ge transistor,
a capacitor and a
strip of germanium
bar as resistor.
With the introduction of
Si substrate and
aluminum patterning,
Robert Noyce of
Fairchild Semiconductor
made an IC chip that set
the foundation for the
technology
Intel was founded in 1968 by
The beginning of the Gordon Moore and Robert Noyce
semiconductor era
Fun fact: Moore Noyce was once
considered to become the company’s name

1950s 1960s 2000s Now

Rapid development

Every 12-18 months the number of


components on an integrated chip will double
---Moore’s Law
Gordon Moore
For decades, Moore’s Law has been true
Feature size/technology node
The beginning of the
semiconductor era μm
nm

1950s 1960s 2000s Now

Rapid development

Every 12-18 months the number of


components on an integrated chip will double
---Moore’s Law
Gordon Moore
What is the definition of technology node?
What is the definition of technology node?

The pitch of the gate pattern

Making devices closer not just smaller


Wafer size also increases for
higher production efficiency

300 mm = 12 inch
200 mm = 8 inch
150 mm = 6 inch
100 mm = 4 inch
Feature size/technology node
The beginning of the
semiconductor era μm
nm 3 nm

1950s 1960s 2000s Now

Rapid development

Every 12-18 months the number of


components on an integrated chip will double
---Moore’s Law
Gordon Moore
Feature size/technology node
The beginning of the
semiconductor era μm
nm 3 nm

1950s 1960s 2000s Now

Rapid development

Every 12-18 months the number of


components on an integrated chip will double Beyond Moore; 3D integration
---Moore’s Law
e
VLSI manufacturing
technology is like
making a cake
VLSI manufacturing
technology is like
making a cake

Process
&
design
Equipment
and
material
And eventually we stack the cake
vertically
A good party cake should have:
-A large size (to satisfy more guests)
-Many decorations & details
-Many layers
In this course, you’ll obtain fundamental
knowledge on:

Semiconductor devices
Manufacturing process
Grading policy
Midterm exam (open book): 30%
Final exam (open book): 30%
Case study: 30%
Homework: 10%
CASE STUDY

Introduce a device technology you are working on or


one that interests you. Show its general fabrication
process, application and future development
progress. Give a slide presentation about 10 min.
HOMEWORK
(submission through E3 mailing system in pdf format)
Q1. In your own words, explain the meaning of VLSI and its
importance.

Q2. What are the factors that limit the scaling of integration?

Q3. Watch the video:


https://www.youtube.com/watch?v=CUnQNTwmHHo
In your own words, explain the meaning of Moore’s Law and its
significance.

Q4. (Bonus) Is Moore’s Law dead? List 2 directions that will take the

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