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    Electron Microscopy: by Dr. Kaustab Ghosh

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    Nehal Aswani 19BEC1125
    The document discusses electron microscopy techniques. It describes how electrons interact with matter differently than photons, allowing for higher resolution imaging but requiring vacuum conditions. It also discusses electron beam generation through thermionic emission or field emission, and how brightness can be increased. Electron-specimen interactions produce secondary electrons, backscattered electrons, Auger electrons, and X-rays used for imaging and elemental analysis.

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    Electron Microscopy: by Dr. Kaustab Ghosh

    Uploaded by

    Nehal Aswani 19BEC1125
    29 views9 pages
    The document discusses electron microscopy techniques. It describes how electrons interact with matter differently than photons, allowing for higher resolution imaging but requiring vacuum conditions. It also discusses electron beam generation through thermionic emission or field emission, and how brightness can be increased. Electron-specimen interactions produce secondary electrons, backscattered electrons, Auger electrons, and X-rays used for imaging and elemental analysis.

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    nanotechnology electron microscopy

    Original Title

    Electron Microscopy

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    The document discusses electron microscopy techniques. It describes how electrons interact with matter differently than photons, allowing for higher resolution imaging but requiring vacuum conditions. It also discusses electron beam generation through thermionic emission or field emission, and how brightness can be increased. Electron-specimen interactions produce secondary electrons, backscattered electrons, Auger electrons, and X-rays used for imaging and elemental analysis.

    Copyright:

    © All Rights Reserved
    Download as PPT, PDF, TXT or read online from Scribd
    Download as ppt, pdf, or txt
    29 views9 pages

    Electron Microscopy: by Dr. Kaustab Ghosh

    Uploaded by

    Nehal Aswani 19BEC1125
    The document discusses electron microscopy techniques. It describes how electrons interact with matter differently than photons, allowing for higher resolution imaging but requiring vacuum conditions. It also discusses electron beam generation through thermionic emission or field emission, and how brightness can be increased. Electron-specimen interactions produce secondary electrons, backscattered electrons, Auger electrons, and X-rays used for imaging and elemental analysis.

    Copyright:

    © All Rights Reserved
    Download as PPT, PDF, TXT or read online from Scribd
    Download as ppt, pdf, or txt
    of 9

    Electron Microscopy

    By
    Dr. Kaustab Ghosh
    Differences from optical
    microscopy
     Wavelength of accelerated electrons is very
    much smaller than the wavelength of visible or
    UV photons.
    • Greater resolution for electron imaging.
     Electrons interact much more strongly with
    matter than photons.
    • Thus all optical paths in an electron microscope
    must usually be under a vacuum of at least 10-4
    Pa.
     Electrons are charged particles and may thus be
    focused by magnetic or electric fields.
    E-beam generation
    • Thermionic emission - Thermal energy is
    used to overcome the surface potential
    barrier (work function) of a solid source
    and so allow extraction of electrons from
    the conduction band of an emitter.

    • Field emission - Extremely high electric


    field is employed to reduce the surface
    potential barrier of an emitter.
    Brightness
    • Brightness of the source is the current density
    per unit solid angle.
    • Improves sensitivity and image contrast
    • Brightness can be increased by
    • Materials - Using a lanthanum hexaboride
    (LaB6 ) filament that possesses a lower work
    function than tungsten.
    • Smaller source size (1 μm)
    • Employing field emission - A brightness increase
    of 104 over a thermionic tungsten filament.
    Electron-specimen interaction
     Electron atom interaction - Secondary electrons
    • Any electrons that escape from the specimen with kinetic energies below
    about 50 eV.
    • They are most likely to arise from ionized electrons previously associated
    with atoms close to the surface of the solid
    • These electrons have gained a small amount of kinetic energy and escaped.
    • Secondary electrons are extremely abundant and the secondary electron
    yield, (the number emitted per primary electron), is dependent on the
    accelerating voltage and can even exceed 1.
    • Extensively used for imaging in SEM.

     Electron nucleus interaction – Backscattered electrons


    • Undergoes large deflection with little change in kinetic energy
    • Electron yield low compared to that of secondary electrons and is
    independent of accelerating voltage.
    • backscattered electrons are also used for imaging in SEM as is strongly
    dependent on atomic number Z
    ----Continuation

     Atomic excitation due to electronic excitation - Auger electrons and


    emitted X-rays
    • Atoms which have undergone inner shell ionization and have been
    promoted into an excited state by the primary electron beam relax
    when electrons from higher energy levels drop into the vacant inner
    shells.
    • This process results in the release of the excess energy between
    the electron energy levels involved in the transitions (E), producing
    low-energy (100–1000 eV) Auger electrons, or X-rays, or visible
    photons of wavelength, λ = hc/ΔE.
    • Auger yield is small and is extremely useful for surface analysis.
    • The energies and wavelengths of the emitted X-rays, which are
    characteristic of the atom involved, are used in elemental analysis.
    Scanning Electron Microscopy-
    Block Diagram

    Source: Nanoscale Science and Technology: Ed (Kelsall, Hamley and Geoghegan)


    Secondary and backscattered
    electron imaging

    Source: Nanoscale Science and Technology: Ed (Kelsall, Hamley and Geoghegan)

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