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E-Beam Testing of Vlsi Chip

This document discusses digital VLSI testing and e-beam testing. It provides an introduction and overview of e-beam testing, how an e-beam tester works, and its drawbacks. E-beam testing allows direct access to internal nodes of a device under test using secondary electrons generated by primary electrons to determine voltage values. It improves observability compared to conventional testing but is an expensive specialized technique that converts testing into an image processing problem. The document lists two references for further information.

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61 views10 pages

E-Beam Testing of Vlsi Chip

This document discusses digital VLSI testing and e-beam testing. It provides an introduction and overview of e-beam testing, how an e-beam tester works, and its drawbacks. E-beam testing allows direct access to internal nodes of a device under test using secondary electrons generated by primary electrons to determine voltage values. It improves observability compared to conventional testing but is an expensive specialized technique that converts testing into an image processing problem. The document lists two references for further information.

Uploaded by

zoysameena
Copyright
© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
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Download as PPTX, PDF, TXT or read online on Scribd
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DIGITAL VLSI TESTING

Course code - MVEE03


Credits - 4:0:0

MAHAMMED HUSSAIN
1MS19LVS12-T
VLSI DESIGN AND EMBEDDED SYSTEMS

Department of Electronics and Communication


 INTRODUCTION
 E-BEAM TESTING
 WORKING OF E-BEAM TESTER
 DRAWBACKS
REFERENCES
• The increasing integration and complexity of very large scale
integrated(VLS1) circuits makes the test generation process
more and more difficult, time consuming and expensive.

• The main difficulty in the test generation is due to the poor


controllability and observability of VLSI circuits.

• Under highly observable condition , the number of test


vectors should be reduced . Hence the use of E-beam for
testing chip has become increasingly important.
• In the conventional testing, the response of a device under
test(DUT) under a test vector is observed through primary
outputs only. The E-Beam tester improves the observability of
the DUT by providing the ability to access internal nodes.

• E-beam tester is a tool for observing logic values of internal


nodes. Using electron beam prober, the logical value of the
internal signal lines running in the top-level metal of a circuit
can be measured directly.

• E-beam testing allows both direct and random access to


internal nodes of device-under-test(DUT).
• During e-beam testing the primary electrons (PE) generate
secondary electrons (SE) at the measurement points on the IC
using these SE the voltage can be determined.

• E-Beam tester qualitatively visualizing the local distributed


voltages.

• Parameters voltage, time and position can be combined and


depicted fig(1)shows typical setup of e-beam testing.
• A voltage was applied to
interconnection A on the
test IC appears darker than
the grounded B, C and D.

• The higher the voltage the


darker these areas all seem
as shown in fig(2).
• The voltages in an integrated circuit set up
electrostatic fields on its surface which influence the
paths of the SE. As the voltage increases , more and
more SE are attracted in this way voltage contrast
micrograph can be build as in fig(2) .
 Expensive can be used for specialized
applications.

 converts intractable testing problem into image


processing problem.

 Need a mechanism to test vlsi chip images.

 Hardware complexity.
• Test Generation for E-beam Testing of VLSI
Circuits Oliver C. S. Choy, L. K. Chan, Ray Chan
and C. F. Chan The Chinese University of Hong
Kong IEEE paper.
• Essentials of Electronic Testing for Digital
Memory and Mixed Signal VLSI Circuits by
bushnell

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