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Scaling Laws: in Miniaturization

Scaling laws are important to consider when miniaturizing physical systems. Some key points about scaling laws include: - Scaling laws determine how size reduction impacts various physical phenomena like forces, power requirements, flows, and heat transfer. - Scaling relationships show that reducing size can significantly change behaviors - for example, a 10x reduction in size could result in a 1000x increase in pressure drop. - Different physical effects scale differently with size - electrostatic forces reduce more significantly with size than electromagnetic forces. - Understanding scaling is crucial for engineers to properly design miniaturized systems and components like in MEMS.

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103 views29 pages

Scaling Laws: in Miniaturization

Scaling laws are important to consider when miniaturizing physical systems. Some key points about scaling laws include: - Scaling laws determine how size reduction impacts various physical phenomena like forces, power requirements, flows, and heat transfer. - Scaling relationships show that reducing size can significantly change behaviors - for example, a 10x reduction in size could result in a 1000x increase in pressure drop. - Different physical effects scale differently with size - electrostatic forces reduce more significantly with size than electromagnetic forces. - Understanding scaling is crucial for engineers to properly design miniaturized systems and components like in MEMS.

Uploaded by

Safwan Shaikh
Copyright
© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
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Download as PPTX, PDF, TXT or read online on Scribd
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Scaling Laws in Miniaturization

Scaling Laws in Miniaturization


Scaling in Geometry
Scaling in Rigid-Body Dynamics
Scaling in Electrostatic Forces
Scaling in Electromagnetic Forces
Scaling in Electricity
Scaling in Fluid Mechanics
Scaling in Heat Transfer

WHY SCALING LAWS?


Miniaturization of physical systems is a lot more than just scaling
down device components in sizes
Some physical systems either cannot be scaled down favorably, or
cannot be scaled down at all!
Scaling laws thus become the very first thing that any engineer would
do in the design of MEMS and microsystems

TYPES OF SCALING LAWS


Scaling in Geometry
Scaling of physical size of objects

Scaling of Phenomenological Behavior


Scaling of both size and material characterizations

Scaling in Geometry
Volume (V)and surface (S) are two physical parameters that are
frequently involved in machine design.
Volume leads to the mass and weight of device components
Volume relates to both mechanical and thermal inertia
Surface is related to pressure and the buoyant forces in fluid
mechanics

Scaling in Geometry
When the physical quantity is to be miniaturized, the design engineer
must weigh the magnitudes of the possible consequences from the
reduction on both the volume and surface of the particular device

Scaling in Geometry
Since volume, V relates to mass and surface area, S relates to
buoyancy force

Scaling in Rigid-Body Dynamics


Forces are required to make parts to move such as in the case of micro
actuators
Power is the source for the generation of forces
An engineer needs to resolve the following issues when dealing with
the design of a dynamics system such as an actuator:
The required amount of a force to move a part,
How fast the desired movements can be achieved,
How readily a moving part can be stopped.

Scaling in Rigid-Body Dynamics


The resolution to the above issues is on the inertia of the actuating part
The inertia of solid is related to its mass and the acceleration that is
required to initiate or stop the motion of a solid device component
In the case of miniaturizing these components, one needs to
understand the effect of reduction in the size on the power (P), force
(F) or pressure (p), and the time (t) required to deliver the motion.

Scaling in Rigid-Body Dynamics


Rigid body dynamics is applied in the design of micro actuations and
micro sensors, e.g. micro accelerometers (inertia sensors)
It is important to know how size (scaling) affects the required forces (F),
and thus power (P) in the performances of these devices
The dynamic force (F) acting on a rigid body in motion with acceleration
(a) (or deceleration) can be computed from Newtons 2ndlaw:
F=Ma

Scaling in Rigid-Body Dynamics


The
acceleration (a) in the Newtons law can be expressed in the following
way In scaling:

Let the displacement of the rigid body, s (), in which = linear scale
But velocity, v = s/t, and hence v ()t -1, in which t is the required time
From particle kinematics, we have:
where vo= the initial velocity

Scaling in Rigid-Body Dynamics


By letting vo= 0, we may express,

Thus, the scaling of dynamic force, F is


()(3)t-3

Power Density
When
scaling down a MEMS or a microsystem, one must make sure

that the power used to drive the device or system is properly scaled
down too
Mathematically,

in which, F = force, s = the displacement of the mass moved by the force,


and t = time during which the energy is produced or consumed

Scaling in Electrostatic Forces


When
two parallel electric conductive plates are charged by voltage Electric

potential field
The corresponding potential energy is
Let = linear scale of the electrodes
We will use a linear scaling for the voltage: V l
U (3)
Scaling: A 10 times reduction of linear size of electrodes 103= 1000 times
reduction in Potential energy!!

Scaling in Electrostatic Forces


For misaligned Electrodes,
Fd, FW, and FL2
Scaling: A 10 times reduction in electrode linear dimensions 102=
100 times reduction in the magnitude of the electrostatic forces

Scaling in Electricity
Electric resistance
in which , L and A are respective electric resistivity of the material, the
length and across-sectional area of the conductor
Resistive power loss
where V is the applied voltage

Scaling in Electricity
Electric field energy
where is the permittivity of dielectric , and E is the electric field
strength (-1)

Ratio of power loss to available power

Scaling in Electricity

Scaling in Electromagnetic Forces


Electromagnetic forces are the principal actuation forces in macroscale,
or traditional motors and actuators
An electromagnetic force, F is generated when a conducting wire with
passing electric current, i subjected to an emf is exposed to a magnetic
field B with a flux, d.

Scaling in Electromagnetic Forces


Faradays law governs the induced force (or a motion) in the wire under the influence
of a magnetic field. One may find that the scaling of electromagnetic force follows:
F 4
in which = L, the length of the conducting wire
Scaling :Reducing the wire length by half (1/2) would result in reduction of F by 2 4=
16 times, whereas the reduction of electrostatic force with similar reduction of size
would result in a factor of 2 2= 4.
This is the reason why electromagnetic forces are NOT commonly used in MEMS
and microsystems as preferred actuation force

Scaling in Fluid Mechanics


Two important quantities in fluid mechanics in flows in capillary conduits:

A.Volumetric Flow, Q

Meaning a reduction of 10 in conduit radius 104= 10000 times reduction in volumetric flow!

Scaling in Fluid Mechanics


B. Pressure Drop, P:

Scaling: A reduction of 10 times in conduit radius 103= 1000 times


increase in pressure drop per unit length !!

Scaling in Heat Conduction


Two concerns in heat flows in MEMS:
A. How conductive the solid becomes when it is scaling down?
This issue is related to thermal conductivity of solids.

Scaling in Heat Conduction


B. How fast heat can be conducted in solids:
This issue is related to Fourier number defined as:

Scaling: A 10 times reduction in size 102= 100 time reduction in time


to heat the solid

Clean Room Classification


A typical cleanroom is designed to keep the outside environment from
getting in.
Once an environment has been built, the two things that cause
contamination in it are the people and the process.
So, what contamination is generated by people, and what
contamination is generated by the process is what needs to be
determined.

Clean Room Classification


There are a lot of determining factors involved in choosing a cleanroom
classification and every industry has a default standard to start with.
One of the most important factors to determine when constructing a
cleanroom is what size of particle will need to be filtered out.
An example of this would be someone that determines they need less than
100 particles per square foot within their cleanroom.
Based on this information, they determine that the classification will need
to be an ISO 5 (or class 100) cleanroom.

Clean Room Classification


However, an issue can arise if they do not take into account the size of the
particle they are trying to filter out.
Theres a significant difference in the classification that is needed if that
particle is 1/2 micron in size versus 5 microns in size.

From a cleanroom classification, this doesnt translate to an ISO 5


cleanroom (or class 100). This actually translates into an ISO 8 cleanroom
(or class 100,000)

Particle Size and Measurement (Microns)


In the cleanroom environment, air particles are measured in microns.
One micron equals one-millionth of a meter.
Micron-sized particles are smaller than a living cell and can be seen only with
the most powerful microscopes.
By comparison, an ISO class 5 cleanroom is designed to allow no more than
3,520 particles equal to or larger than 0.5 microns per cubic meter of air.
This equates to a Class 100 cleanroom under the Federal Standard 209E,
which allows for 100 particles (0.5 microns or larger) per cubic foot of air.

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