Portable Mass

Spectrometer
Munish Kumar Jain
2013JVL2815

Adviser
Prof. Jayadeva
Department of Electrical Engg.
IIT Delhi

Co-Adviser
Prof. Bhaskar Mitra
Department of Electrical Engg.
IIT Delhi

Design

Initial Design of Mass Spectrometer #

# Portable Mass spectrometer M.Tech Thesis- 2012-2014 Kranthi Kundla IIT Delhi

Modified Design

Initial Design of Mass Spectrometer

Modified Design of Mass Spectrometer

Ionizer
Hollow Cathode ionizer
Easy to Integrate
DC Power supply
Simplicity of Design
No Radio Activity
Hard Ionization

Hollow Cathode Ionizer [1]

Accelerator
Electrode 1 = 4um
Electrode 2 = 4um
Gap Between Electrodes =3um
Electrode 1 Potential =0.01V
Electrode 2 Potential = -10V
Particle Mass = 1*10^(-27)Kg
Initial particle velocity = 100m/s
Initial Beam width= 0.5um
Final Beam spread at distance of
20um from the edge of electrode 2
= 1.6um

Ion Accelerator

Optimized Design
Use of Ground Plates across/around the source.
Using COMSOL Live Link for MATLAB.
Optimization to get minimum Ion Beam broadening.
Optimization For Small Gaps and Large Gaps.
Exhaustive Search of Sample Space is used to get
optimized design.

Optimized Design

Design Parameters (used as sample space)

g = gap between Electrodes pair 1 and Electrode pair
2
l1= Length of Electrode pair 1
l2= Length of Electrode pair 2
d = Distance between electrodes
V1=Potential at electrode pair 1
V2=Potential at electrode pair 2

Optimized Design (Design Matrix)

Design Parameters (used as sample space)

g = gap between Electrodes pair 1 and Electrode pair
2
l1= Length of Electrode pair 1
l2= Length of Electrode pair 2
d = Distance between electrodes
V1=Potential at electrode pair 1
V2=Potential at electrode pair 2

Electric Field (s/c) Pattern

(Effect of Ground Plane)

Electric Field Pattern without Ground Plane

Electric Field Pattern with Ground Plane

Optimized Design

Fixed Parameters
Particle Mass = 10 amu
Initial particle velocity = 100m/s
Initial Ion Beam width (st) = 5um
Gap1 =5um
Gap2 =10um

Optimized Design (Design Matrix)

Design Parameters (used as sample space)

g = gap between Electrodes pair 1 and Electrode pair
2
l1= Length of Electrode pair 1
l2= Length of Electrode pair 2
d = Distance between electrodes
V1=Potential at electrode pair 1
V2=Potential at electrode pair 2

Simulation Results for Small Gap

Range
Gap (g)
(in um)

Length
Electrod
e1 (l1)
(in um)

Length
Electrod
e1 (l2)
(in um)

Length
between
Electrode
s (d)
(in um)

Voltage at
Electrode
1 (V1)
(Volt)

Voltag
e at
Electro
de1
(V2)
(Volt)

Final
Beam
Width
(in
um)

Final
Velocity
in X
directio
n
(in
m/sec)

10

60

90

70

-1.2

40

1.22

35281.64

20

50

80

70

-1.5

40

3.85

35201.64

30

50

80

70

-1.8

50

2.97

39557.52

40

50

80

70

-1.8

50

3.41

39574.35

50

50

80

70

-2

70

1.85

39731.91

Without any variation in length of plates or distance

Small variation in
final velocity

Simulation Results for Large Gap

Range
Gap
(g)
(in
um)

Length
Electrod
e1 (l1)
(in um)

Length
Electrod
e1 (l2)
(in um)

Length
between
Electrodes
(d)
(in um)

Voltage at
Electrode1
(V1)
(Volt)

Voltage
at
Electro
de1
(V2)
(Volt)

Final
Beam
Width
(in
um)

Final
Velocity
in X
direction
(in
m/sec)

50

50

80

70

-2

70

1.85

39731.91

100

40

70

70

-2

80

3.33

50516.82

150

40

70

70

-2

100

3.22

50429.8

200

40

70

70

-2

120

4.52

61661.5

Without any variation in length of plates or distance

Small variation in final

Simulation For Different Mass Ions

Mass(
m)
(in
amu)

Gap (g) Length

(in
Electro
um)
de1
(l1)
(in
um)

Length
Electro
de1
(l2)
(in
um)

Length
between
Electrod
es (d)
(in um)

Voltage
at
Electrod
e1 (V1)
(Volt)

Voltag
e at
Electr
ode1
(V2)
(Volt)

Final
Beam
Width
(in
um)

Final
Velocit
y in X
directi
on
(in
m/sec)

30

50

80

70

-1.8

50

2.97

39557.5
2

50

30

50

80

70

-1.8

50

3.26

15958.1
7

100

30

50

80

70

-1.8

50

3.551

11231.5
6

10

150

40

70

70

-2

100

3.22

50429.8

50

150

40

70

70

-2

100

3.165

23942.0
8

70

70

-2

100

Mass
Variatio
n
10

100
150
40
Simulation for two optimized

3.275 15889.9
Variation in2velocity with

Fabrication of Device
Integrated Ionizer and Accelerator
Next Task : To prepare Mask for Hollow Cathode Ionizer and
Accelerator
Accelerator Fabrication Procedure will be similar to those of micro
TOF mass spectrometer [2]

Hollow Cathode Ionizer [1]

Micro TOF mass spectrometer [3]

References
1.Frame, J. W., D. J. Wheeler, T. A. DeTemple, and J. G. Eden. Microdischarge Devices Fabricated in Silicon. Applied Physics Letters 71, no. 9
(September 1, 1997): 116567. doi:10.1063/1.119614.

2.Yoon, Hyeun Joong, Jung Hoon Kim, Eun Soo Choi, Sang Sik Yang, and Kwang Woo Jung. Fabrication of a Novel Micro Time-of-Flight Mass
Spectrometer. Sensors and Actuators A: Physical, Selected papers from Eurosenors XV, 9798 (April 1, 2002): 44147. doi:10.1016/S09244247(02)00032-8.
3.Wapelhorst, Eric, Jan-Peter Hauschild, and Jrg Mller. Complex MEMS: A Fully Integrated TOF Micro Mass Spectrometer. Sensors and Actuators A:
Physical 138, no. 1 (July 20, 2007): 2227. doi:10.1016/j.sna.2007.04.041.

Thank You.

Major Part 1

Contents
Motivation for Portable Design
Components of Mass Spectrometer
Initial Design
Modified Design
Simulations Results

Why Potable one

Miniature Mass Spectrometer

Quadrupole Mass Spectrometer #

Cross Field Wien Filter Mass Spectrograph [1]

Time of Flight Based Mass Spectrometer ##

Ion Mobility based Mass Spectrometer ###

# http://www3.imperial.ac.uk/opticalandsemidev/microsystems/sensors/massfilter
### http://electronicdesign.com/test-amp-measurement/mems-sampling-device-promises-big-results-detection-and-

##http://hems-workshop.org/8thWS/Posters/Tassetti.pdf

Applications

Medicine ##

IED Detection ##

Space Exploration *

Genomics **

# http://blogs.nature.com/spoonful/2014/06/real-time-tissue-analysis-could-guide-brain-tumor## http://www.bizjournals.com/boston/blog/techflash/2013/01/block-mems-gets-multi-millionsurgery.html
dollar.html
**http://www.thesciencesquad.ie/episodes/series-2-episode-3/
*http://www.computing.co.uk/ctg/news/2197432/the-technology-powering-the-mars-curiosity-rover

Main Components of a Mass

Spectrometer
Ionizer
Particle Accelerator
Separator ( Deflection )
Detector

Components of Mass Spectrometer #

# http://www.swa.flintschools.org/?PageName=%27TeacherPage%27&Page=%27Assignments%27&StaffID=%27221353%27&Archive=%27yes%27

Design

Initial Design of Mass Spectrometer #

# Portable Mass spectrometer M.Tech Thesis- 2012-2014 Kranthi Kundla IIT Delhi

Analysis of design issues

Alignment of ion source and accelerator to micro meter
tolerance
Shielding of Magnetic Field
Broadening of Ion Beam due to collision of ions
Requirement of Integrated Ion source

Modified Design

Initial Design of Mass Spectrometer

Modified Design of Mass Spectrometer

Ionizer
Hollow Cathode ionizer
Easy to Integrate
DC Power supply
Simplicity of Design
No Radio Activity
Hard Ionization

Hollow Cathode Ionizer [5]

Achieving Soft Ionization with

Hollow Cathode Ionizer

Hollow Cathode Ionizer For Soft Ionization [4]

Accelerator
Electrode 1 = 4um
Electrode 2 = 4um
Gap Between Electrodes =3um
Electrode 1 Potential =0.01V
Electrode 2 Potential = -10V
Particle Mass = 1*10^(-27)Kg
Initial particle velocity = 100m/s
Initial Beam width= 0.5um
Final Beam spread at distance of
20um from the edge of electrode 2
= 1.6um

Ion Accelerator

Accelerator Design Equations

Electric field equations using conformal
mapping [6]
Conformal Mapping of Coplanar electrodes to
parallel plate electrodes
Closed Form Expression of Electric Field
Validation of Comsol Model with closed form
Expression

Conformal Mapping(Schwarz
Christoffel mapping)

Schwarz Christoffel Transform of Coplanar Electrodes to Parallel Plate Electrodes #

# http://en.wikipedia.org/wiki/Schwarz%E2%80%93Christoffel_mapping

Electric Field Equations

Contour plot of Magnitude of E Field Equation using Conformal

Mapping (Mathmatica )

Contour plot of Magnitude of E field with Comsol Simulations

Design Parameters For Accelerator

Final Velocity of Particles

Final Particle Beam Width

Parameters Affecting design of

Initial Beam width
accelerator

Minimum Divergence Configuration

Increased Initial Beam Width

Initial Beam width

Curve of Final Beam Width vs Initial Beam Width (from Comsol simulations)

Parameters Affecting design of

accelerator
Gap between electrodes

Minimum Divergence Configuration

Increased Gap Between Electrodes

Gap between electrodes

Curve for Beam Width vs Electrode Gap (from Comsol Simulations)

Parameters affecting design of

accelerator
Length of Electrodes

Minimum Divergence Configuration

Increased Length of Electrodes

Length of Electrodes

Curve for Beam Width vs Length of Electrodes (um) (from Comsol Simulations)

Other parameters
Electrode Voltages
Particle initial Energy
Distance between ion source and electrodes
Width between Electrodes

Work Plan For Next Semester

Design of Separator
Design of Mask

Device Fabrication (In External

Foundry)
Test and Evaluation

References
1. Syms, R. R. A. Advances in Microfabricated Mass Spectrometers. Analytical and Bioanalytical Chemistry 393, no. 2 (January 1, 2009): 42729.
doi:10.1007/s00216-008-2212-8.

2. Wapelhorst, Eric, Jan-Peter Hauschild, and Jrg Mller. Complex MEMS: A Fully Integrated TOF Micro Mass Spectrometer. Sensors and Actuators
A: Physical 138, no. 1 (July 20, 2007): 2227. doi:10.1016/j.sna.2007.04.041.

3. Cumeras, R., E. Figueras, C. E. Davis, J. I. Baumbach, and I. Grcia. Review on Ion Mobility Spectrometry. Part 1: Current Instrumentation. The
Analyst, December 3, 2014. doi:10.1039/C4AN01100G.

4. Kushner, Mark J. Modelling of Microdischarge Devices: Plasma and Gas Dynamics. Journal of Physics D: Applied Physics 38, no. 11 (June 7,
2005): 1633. doi:10.1088/0022-3727/38/11/001.

5. Frame, J. W., D. J. Wheeler, T. A. DeTemple, and J. G. Eden. Microdischarge Devices Fabricated in Silicon. Applied Physics Letters 71, no. 9
(September 1, 1997): 116567. doi:10.1063/1.119614.

6. Sun, Tao, Nicolas G. Green, and Hywel Morgan. Electric Field Analysis Using Schwarz-Christoffel Mapping. Journal of Physics: Conference Series
142, no. 1 (December 1, 2008): 012029. doi:10.1088/1742-6596/142/1/012029.

7. Slade, P.G., and E.D. Taylor. Electrical Breakdown in Atmospheric Air between Closely Spaced (0.2 Mu;m-40 Mu;m) Electrical Contacts. IEEE
Transactions on Components and Packaging Technologies 25, no. 3 (September 2002): 39096. doi:10.1109/TCAPT.2002.804615.

Thank You.

Paschens Law analysis

V = (a*pd)/(b+ln(pd))
p =pressure (atm)

d = distance between electrodes (met

a,b = constant depends on compositio

For air a=4.36x107 V/(atm-m)
For air b=12.8

Paschens Curve for air