Gauges

Total Pressure Gauges
Vacuum Gauges and Control Instruments 10-12 - 2000 mbar (10-12 Torr) Calibration Service
179.01.02 Excerpt from the Oerlikon Leybold Vacuum Full Line Catalog Product Section C16 Edition 2010
Contents
General Applications for Vacuum Gauges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Select the Combination of Sensor and Gauges which is ideal for your Application . . . . . . . . . . . . . . . . . Basic Terms of Vacuum Metrology . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Connection Accessories for Small Flanges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Products Mechanical Gauges (Vacuum Gauges Analog Readout) Bourdon Vacuum Gauges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C16.09 Capsule Vacuum Gauges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C16.10 Diaphragm Vacuum Gauge DIAVAC DV 1000 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C16.12 Handheld Measurement Instruments THERMOVAC Sensor TM 90 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C16.14 THERMOVAC Sensor TM 100 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C16.16 Active Sensors / Transmitters CERAVAC Transmitters CTR 100/CTR 91 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C16.18 THERMOVAC Transmitters TTR 91/TTR 91S/TTR 96S . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C16.22 THERMOVAC Transmitters with Fieldbus Interface TTR 211 D/PB / TTR 216 D/PB . . . . . . . . . . . . . . . . C16.26 THERMOVAC Transmitters TTR 100/TTR 100 S2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C16.30 PENNINGVAC Transmitters PTR 225/PTR 225 S/PTR 237 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C16.34 PENNINGVAC Transmitter PTR 90 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C16.38 IONIVAC-Transmitter ITR 90 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .C16.42 IONIVAC-Transmitter ITR 200 S . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .C16.46 Spiral Tube . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C16.50 Connection Cables for Active Sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C16.52 Operating Units for Active Sensors DISPLAY ONE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . DISPLAY TWO / THREE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . CENTER ONE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . CENTER TWO / THREE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Operating Units for Passive Sensors PIEZOVAC PV 20 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C16.62 Ultra High Vacuum Gauges IONIVAC IM 540 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C16.64 COMBIVAC CM 51 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .C16.68 Additional Sensors IONIVAC Sensors IE 414/IE 514 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . THERMOVAC Sensors TR 211/TR 211 NPT/TR 212/TR 216 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . PENNINGVAC Sensors PR 25/PR 26/PR 27/PR 28 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Linear Pressure Sensors DI 200/DI 201/DI 2000/DI 2001/DI 2001 rel . . . . . . . . . . . . . . . . . . . . . . . . . . . Spare Sensors for Older Operating Units . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Pressures Switches and Control Instruments Pressure Regulation Valves Move . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Low Pressure Safety Switch PS 113 A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Pressure Switches PS 115 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Switching Amplifier SV 110 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Diaphragm Pressure Regulators MR 16/MR 50 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Miscellaneous Oerlikon Leybold Vacuum Calibration Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C16.98
C16 02
Oerlikon Leybold Vacuum Full Line Catalog
C16.03 C16.04 C16.06 C16.08
C16.54 C16.56 C16.58 C16.60
C16.72 C16.74 C16.76 C16.78 C16.80 C16.82 C16.90 C16.92 C16.94 C16.96
General Applications for Vacuum Gauges

BO UR BO DO U NV Ca RD AC ps ON A V u DI le AC AV va cu C Ha AC u nd DV m g he 10 au CE ld ge RA M 00 ea Li VA ne C sur a tr ing TH r pr ans In es m st ER ru s i PE MO ure tter me CT nts NN VA se n IO ING C t so R NI VA ran r D V I IO AC C t smi NI tra ran tte V r Pr AC nsm sm TT es IM itt itte R s r e Pr ure 54 r IT PT es R R sw 0 Di sur itc ap e s h hr w PS ag itc m h 113 re PS gu 1 A lat 15 or M R
Mechanical engineering
Car industry; filling of brake and air conditioning systems Vacuum conveying technology Packaging technology Isolation vacuum
G au ge s
Chemical processes
Absolute pressure measurements in gas mixtures Drying and degassing processes Solvent recovery Vacuum pressure control in existing central vacuum supply systems
Electrics/electronics/optics
Evaporation and coating systems Monitoring and controlling of sputter systems Semiconductor technology (CVD, plasma etching etc.) Ion implantation Lamp production
Analytical instruments and surface physics

ESCA, SIMS, AES, XPS Electron microscopy Crystal growing Gas analysis systems, mass spectrometers
Research
Measurement of ultimate pressure in UHV systems Application in MBE systems Particle accelerators Beam guidance systems, cyclotron Fusion experiments Space simulation chamber
System control/pressure control

Pressure checks on backing pumps and vacuum systems Safety circuits in vacuum systems, protection of vacuum gate valves Control of ionization vacuum gauges Pressure measurements on HV pump systems, e.g. diffusion, TMP, cryopump systems Venting systems Valve control, pressure dependant systems control Simple pressure control arrangements
Calibration
Calibration of vacuum gauges and mass spectrometers Reference instruments for the determination of the physical properties of gases Precision measurements of low pressures also in the presence of corrosive or reactive gases
Miscellaneous
Vacuum annealing, melting, soldering and hardening furnaces Cooling and air conditioning technology Electron beam welding Metallurgy
03 C16
Select the Combination of Sensor and

Operating Range
mbar 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 100 1000
Capacitance Diaphragm CERAVAC Transmitters (x = 2, 3, 4 or 5) 1) CTR 91 / CTR 101 CTR 91 / CTR 101 CTR 91 / CTR 101 CTR 91 / CTR 101 CTR 91 / CTR 101 CTR 100 CTR 100 CTR 100 CTR 100 Thermal Conductivity (according to Pirani) THERMOVAC Transmitters 1) TTR 100 (Pirani combined with capacitance diaphragm) TTR 91 TTR 96 S TTR 211 Profibus/DeviceNet TTR 216 Profibus/DeviceNet Handheld Measurement Instruments THERMOVAC Sensors TM 90 + 100 Cold Cathode Ionization (according to Penning) PENNINGVAC Transmitters PTR 225, DN 25 KF PTR 237, DN 40 CF PTR 90, DN 40 CF PTR 90, DN 40 KF PTR 90, DN 25 CF Hot Cathode Ionization IONIVAC Transmitters (Bayard-Alpert combined with Pirani) 1) ITR 90 / ITR 200 ITR 90 / ITR 200 with Display IONIVAC Sensors IE 414 (Bayard-Alpert) IE 514 (Extractor) Linear Diaphragm Sensors 2) DI 200 DI 201 DI 2000 DI 2001 DI 2001 rel.
2 x 10-11 0.01 0.0001 5 x 10-10 5x 10-10 1000 1000 1 x 10-9 1x 10-9 0.01 0.01 1000 1000 1000 0.0005 0.0005 0.0005 0.0005 0.0005 1500 1000 1000 1000 1000 0.00013 0.013 0.0013 1.3 13 0.013 0.0013 0.00013 0.000013 0.13 0.13 1330 133 1.3 13 0.13 1330 133
5 x 10-9 5x 5x 10-9 10-9
1 x 10-12 1 10-12
0.1 0.1 1 1 -1000
200 200 2000 2000 +1000
mbar
1) 2)
10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1
10
100 1000
Different Part Numbers depend on the vacuum connection Differences of the sensors in the same operating range caused by the materials in contact with the medium
C16 04
Gauges which is ideal for your Application

Operating Units
ONE Part No. EURO Part No. US 230 001 235 001 DISPLAY TWO 230 024 235 024 THREE 230 025 235 025 ONE 230 002 235 002 CENTER TWO 230 004 235 004 THREE 230 003 235 003 IONIVAC IM 540 230 100 230 100
1 1 1 1 1 1 1 1 1
1, 2 1, 2 1, 2 1, 2 1, 2 1, 2 1, 2 1, 2 1, 2
1, 2, 3 1, 2, 3 1, 2, 3 1, 2, 3 1, 2, 3 1, 2, 3 1, 2, 3 1, 2, 3 1, 2, 3
3, 4 3, 4 3, 4 3, 4 3, 4 3, 4 3, 4 3, 4 3, 4
1 1 1 1 1
1, 2 1, 2 1, 2 1, 2 1, 2
1, 2, 3 1, 2, 3 1, 2, 3 1, 2, 3 1, 2, 3
1 1 1 1 1
1, 2 1, 2 1, 2 1, 2 1, 2
1, 2, 3 1, 2, 3 1, 2, 3 1, 2, 3 1, 2, 3
3, 4 3, 4 3, 4 3, 4 3, 4
1, 2 1, 2 1 1 1 1, 2 1, 2 1, 2
1, 2, 3 1, 2, 3 1, 2, 3 1, 2, 3 1, 2, 3
1 1 1 1 1
1, 2 1, 2 1, 2 1, 2 1, 2
1, 2, 3 1, 2, 3 1, 2, 3 1, 2, 3 1, 2, 3
1, 2
1, 2, 3
1, 2 1, 2
1, 2, 3 indicate the channel to which the sensor may be connected
05 C16
Basic Terms of Vacuum Metrology

Today, the total range of vacuum pressure accessible to measurement extends from atmospheric pressure (about 1000 mbar (750 Torr)) down to 10-12 mbar/Torr, i.e. it extends over 15 powers of ten. The instruments used for measuring the pressure within this wide range are called vacuum gauges. For physical reasons it is not possible to create a single vacuum sensor through which it might be possible to perform quantitative measurements within the entire pressure range. Therefore, a variety of different vacuum gauges are available, each with their own characteristic measurement range which commonly extends over several powers of ten. A difference is made between direct and indirect pressure measurements. In the case of direct (or absolute) pressure measurements, the readings obtained through the vacuum gauge are independent of the type of gas and the pressure which is to be measured. Common are so-called mechanical vacuum gauges where the pressure is determined directly by recording the force acting on the surface of a diaphragm. In the case of so-called indirect pressure measurements the pressure is determined as a function of a pressure dependant property of the gas (thermal conductivity, ionization probability, for example). These pro-perties do not only depend on the pressure, but also on the molar mass of the gases. For this reason, the pressure readings obtained through vacuum gauges which rely on indirect pressure measurements, depend on the type of gas. The readings usually relate to air or nitrogen as the measurement gas. For the measurement of other vapors or gases the corresponding correction factors must be applied.
Vacuum Gauges where the Pressure Readings are Independent of the Type of Gas (Mechanical Vacuum Gauges) BOURDON Vacuum Gauge
The inside of a tube which is bent into a circular arc (the so-called Bourdon tube) is connected to the vacuum system. Due to the effect of the external atmospheric pressure, the end of the tube bends more or less during the evacuation process. This actuates the pointer arrangement which is attached to this point. The corresponding pressure can be read off on a linear scale. With Bourdon gauges it is possible to roughly determine pressures between 10 mbar (7.5 Torr) and atmospheric pressure.
sing evacuation, the difference between the pressure which is to be measured and the pressure within the reference chamber becomes less, causing the diaphragm flex. This flexure may be transferred by mechanical means like a lever, for example, to a pointer and scale, or electrically by means of a strain gauge or a bending bar for conversion into an electrical measurement signal. The measurement range of such diaphragm vacuum gauges extends from 1 mbar (0.75 Torr) to over 2000 mbar (1500 Torr).
Capacitance Vacuum Gauge

The pressure sensitive diaphragm of these capacitive absolute pressure sensors is made of Al2O3 ceramics. The term capacitive measurement means that a plate capacitor is created by the diaphragm with a fixed electrode behind the diaphragm. When the distance between the two plates of this capacitor changes, a change in capacitance will result. This change, which is proportional to the pressure, is then converted into a corresponding electrical measurement signal. Here too, an evacuated reference chamber serves as the reference for the pressure measurements. With capacitance gauges it is possible to accurately measure pressures from 10-5 mbar/Torr to well above atmospheric pressure, whereby different capacitance gauges having diaphragms of different thickness (and therefore sensitivity) will have to be used.
Capsule Vacuum Gauge

This vacuum gauge contains a hermetically sealed, evacuated, thinwalled diaphragm capsule which is located within the instrument. As the vacuum pressure reduces, the capsule bulges. This movement is transferred via a system of levers to a pointer and can then be read off as the pressure on a linear scale.
Diaphragm Vacuum Gauge

In the case of the diaphragm vacuum gauge which is capable of absolute pressure measurements, a sealed and evacuated vacuum chamber is separated by a diaphragm from the vacuum pressure to be measured. This serves as the reference quantity. With increa-
C16 06
Vacuum Gauges where the Pressure Readings depend of the Type of Gas Thermal Conductivity Gauge (Pirani)
This measurement principle utilizes the thermal conductivity of gases for the purpose of pressure measurements in the range from 10-4 mbar/Torr to atmospheric pressure. Today, only the principle of the controlled Pirani gauge is used by Oerlikon Leybold Vacuum in order to attain a quick response. The filament within the gauge head forms one arm of a Wheatstone bridge. The heating voltage which is applied to the bridge is controlled in such a way, that the filament resistance and thus the temperature of the filament remains constant regardless of the quantity of heat given off by the filament. Since the heat transfer from the filament to the gas increases with increasing pressures, the voltage across the bridge is a measure of the pressure. Improvements with regard to temperature compensation have resulted in stable pressure readings also in the face of large temperature changes, in particular when measuring low pressures.
Cold Cathode Ionization Vacuum Gauge (Penning)

Here the pressure is measured through a gas discharge within a gauge head whereby the gas discharge is ignited by applying a high tension. The resulting ion current is output as a signal which is proportional to the prevailing pressure. The gas discharge is maintained also at low pressures with the aid of a magnet. New concepts for the design of such sensors permit safe and reliable operation of these so-called Penning sensors in the pressure range from 10-2 to 1 x 10-9 mbar/Torr.
Other electrode arrangements permit access to a higher range of pressures from 10-1 mbar/Torr down to 10-10 mbar/Torr. For the measurement of pressures below 10-10 mbar/Torr so-called extractor ionization sensors after Redhead are employed. In extractor ionization gauges the created ions are focused onto a very thin and short ion detector. Due to the geometrical arrangement of this system, interfering influences such as X-ray effects and ion desorption can be almost completely eliminated. The extractor ionization gauge permits pressure measurements in the range from 10-4 to 10-12 mbar/Torr.
Hot Cathode Ionization Vacuum Gauge

These sensors commonly use three electrodes. A hot cathode emits electrons which impinge on an anode. The gas, the pressure of which is to be measured, is thus ionized. The resulting positive ion current is detected through the third electrode - the socalled ion detector - and this current is used as the signal which is proportional to the pressure. The hot cathode sensors which are mostly used today, are based on the Bayard-Alpert principle. With this electrode arrangement it is possible to make measurements in the pressure range from 10-10 to 10-2 mbar/Torr.
Selection of the right Vacuum Gauge

When selecting a suitable instrument for pressure measurements, the pressure range is not the only critera. The operating conditions for the instrument play an important part. If, for example, there is the risk of excessive contamination, vibrations, or if air inrushes are to be expected etc., the instrument must be rugged enough. Thus for industrial applications diaphragm gauges, controlled thermal conductivity gauges as well as cold cathode ionization gauges after Penning are strongly recommended. Precision instruments are very often quite sensitive to rough operating conditions. These should therefore only be used while observing the corresponding applications information.
07 C16
Connection Accessories for Small Flanges

Ordering Information
Outer centering ring with O-ring Aluminum / FPM (FKM) ((Viton)) Fine filter on centering ring with O-ring Stainless steel / FPM (FKM) ((Viton)) Baffle with centering ring (FPM (FKM)) Connection accessories for metal seals or bake out room up to 150 C Ultra sealing ring, aluminum (Set of 3) Outer support ring Clamping ring
DN 10 KF
Part No. 183 53 Part No. 883 95
DN 16 KF
Part No. 183 53 Part No. 883 96
DN 25 KF
Part No. 183 54 Part No. 883 97
Part No. 230 078
Part No. 883 73 Part No. 883 74 Part No. 882 75
Outer centering ring with O-ring Aluminum / FPM (FKM) ((Viton)) Fine filter on centering ring with O-ring Stainless steel / FPM (FKM) ((Viton)) Baffle with centering ring (FPM (FKM)) Connection accessories for metal seals or degassing room up to 150 C Ultra sealing ring, aluminum (Set of 3) Outer support ring Clamping ring Connection accessories for CF connections Copper seals, (set of 10 pieces) Screw (set of 25 pieces) Replacement sinter filter with centering ring
DN 40 KF
Part No. 183 55
DN 16 CF
DN 40 CF
Part No. 883 98 Part No. 230 079
Part No. 231 93 515
Part No. 839 41 Part No. 839 00
Part No. 839 43 Part No. 839 01
C16 08
Products Mechanical Gauges Bourdon Vacuum Gauges

Rugged relative pressure vacuum gauges based on the Bourdon principle covering the pressure range from 1 to 1020 mbar (0.75 to 765 Torr).
80 105 64
30
Advantages to the User

- Highly reliable, rugged, insensitive to vibrations - Linear readout, independent of the type of gas - Excellent media compatibility owing to the stainless steel movement (BOURDONVAC C) - IP 54 protection (BOURDONVAC C)
Typical Applications
- Vacuum distillation
140
101
50
- Drying processes - For explosion hazard applications - Vacuum conveying systems

81
Dimensional drawing for the BOURDONVAC A (top) and the BOURDONVAC C (bottom)
Technical Data
Measurement range Measurement uncertainty Class 1 (EN 837) Overload range (abs. briefly) Storage temperature range Nominal temperature range Flange connection Length of scale Diameter Overall weight Weight Leak tightness mbar % FS % FS bar C C DN mm mm mm kg (lbs) mbar x l/s
BOURDONVAC A
1 to 1020 1 1 1.5 -25 to +60 10 to 60 16 KF 207 80 105 0.25 (0.55) 1 x 10-8 nickel plated standard steel, bronze, soft solder
BOURDONVAC C
1 to 1020 1 1 1.3 -25 to +60 10 to 100 (max.) 16 KF 188 101 140 0.5 (1.10) 1 x 10-8 stainless steel 1.4404
Materials in contact with the medium
Bourdon vacuum gauge
BOURDONVAC A
Part No. 160 40
BOURDONVAC C
Part No. 161 20
09 C16
Capsule Vacuum Gauges

Rugged absolute pressure gauges for the pressure range from 1 to 1000 mbar (0.75 to 750 Torr).

- Rugged and insensitive to vibrations - Models available for two measurement ranges (1 to 100 mbar and 1 to 1000 mbar) - Readout independent of the type of gas and changes in atmospheric pressure - Linear pressure readout - Installation direct via the connection flange or panel mounting - Model with integrated isolation valve for use on packaging machines (Part No. 160 68)
- Measurement of absolute pressures (for inert gases only) - Vacuum conveying systems - Operation monitoring - Packaging
132 14,5 116 60 73 68
110
10 100 40 53 3,5 53
101+1
92
4,5 120 13
Dimensional drawings and panel cut-outs for the capsule vacuum gauges Part Nos. 160 63/64 (left) and Part No. 160 68 (right)
C16 10
Technical Data
Measurement range Measurement uncertainty Overload range (abs. briefly) Storage temperature range Nominal temperature range Length of scale Dead volume, approx. Diameter Weight Vacuum Connection mbar % FS bar C C mm cm3 mm kg (lbs) DN 1 to 100 1.0 1.5 -25 to +60 10 to 50 205 235 132 0.7 (1.54) 16 KF

1 to 100 2.5 1.5 -25 to +60 10 to 50 180 167 110 0.6 (1.32) 10 mm dia. hose nozzle with integrated isolation valve 45 brass standard steel nickel plated glass NBR aluminum copper beryllium soft and hard solder resin 1 to 1000 1.6 1.5 -25 to +60 10 to 50 205 235 132 0.7 (1.54) 16 KF
Max. inclination when installed Materials in contact with the medium
45 brass standard steel nickel plated glass NBR aluminum copper beryllium soft and hard solder resin
45 brass standard steel nickel plated glass NBR aluminum copper beryllium soft and hard solder resin
Capsule vacuum gauge Part No. 160 63

Part No. 160 68 Part No. 160 64
11 C16
Diaphragm Vacuum Gauge DIAVAC DV 1000

Rugged mechanical diaphragm vacuum gauge of high accuracy for the rough vacuum range from 1 to 1000 mbar (1 to 750 Torr).

- Wide measurement range from 1 to 1000 mbar (1 to 750 Torr) with high resolution in the range from 1 to 100 mbar (1 to 75 Torr) - The scale of each gauge is individually calibrated - Absolute pressure gauge - Readout independent of the type of gas and changes in atmospheric pressure - Stainless steel diaphragm for excellent compatibility with most media - Laser welding technology for high precision diaphragm mount - Rugged table-top housing, can be freely mounted above the flange connection; also for panel mounting - Measurement chamber can be easily cleaned owing to the detachable measurement flange
- Chemical processes - Vacuum destillation - Absolute pressure measurements for gas mixtures - For use in explosion hazard rated areas - Drying processes - Lamp manufacture
45 170 166 4,5 203,5 152 156 155
180
166
166
Dimensional drawing and panel cut-out for the DIAVAC DV 1000
C16 12
Technical Data
Measurement range Measurement uncertainty 01 - 10 mbar (1.0 - 7.5 Torr) 10 - 1000 mbar (7.5 - 750 Torr) Storage temperature range Nominal temperature range Permissible overload (abs.) Lenght of scale / dead volume Vacuum Connection Dimension (W x H x D) Weight C C bar mm DN mm kg (lbs) mbar (Torr)
DIAVAC DV 1000
1 to 1000 (1 to 750)
1 mbar (Torr) 10% of meas. value -25 to +60 0 to 60 3 270 / 130 40 KF 180 x 166 x 100 2.7 (5.95) stainless steel 1.4301, 1.4310 (diaphragm), FPM (FKM)
Materials in contact with the medium
DIAVAC DV 1000 mbar readout Torr readout DKD calibration Replacement sintered filter with DN 40 KF centering ring Replacement housing, complete
1)
DIAVAC DV 1000
Part No. 160 67 1) Part No. 896 06 1) Part No. 157 12
Part No. 231 93 515 Part No. 240 000
Complete with centering ring and sintered filter
13 C16
Handheld Measuring Instruments THERMOVAC Sensor TM 90

The THERMOVAC TM 90 is a simple handheld vacuum measuring instrument for occasional use. Its operation is based on the Pirani principle and covers a measurement range from 1 x 10-2 mbar to atmospheric pressure. It is delivered in a rugged plastic box.

- Cordless power supply through a standard 9 V battery - Large 3 1/2 digit 7 segment display - Pressure unit of measurement selectable between mbar, Torr and Pascal
82,6
- Pressure measurements on refrigerating and air-conditioning systems before filling in the refrigerant - Pressure measurements during servicing assignments
29,3
172,6
23,7
30
Dimensional drawings for the THERMOVAC sensor TM 90
C16 14
Technical Data
Power source Battery life Connection Controls Indicated units of measurement Measurement range h DN
THERMOVAC Sensor TM 90
9 Volt battery (type 6 LR61) <5 16 KF or 25 KF On/Off/Unit selector mbar, microns, Pa atm. to 1 x 10-2 mbar (atm. to 1 Pa, atm. to 1 micron) after 15 minutes; last read out is displayed again after restarting mbar microns < 2 5%, > 2 10%, < 20.000 5%, > 20.000 microns 10% microns: in steps down to 1 micron Pascal: in steps down to 1 Pa mbar: in steps down to 0.01 mbar C C kg (lbs) bar abs. 0 to 50 -10 to +60 0.22 (0.49) 10
Automatic shutdown Reading accuracy
Resolution
Operating temperature Storage temperature Weight (including battery) Maximum overpressure
TM 90, DN 16 KF TM 90, DN 25 KF
Part No. 230 076 Part No. 230 077
15 C16

The handheld THERMOVAC TM 100 is capable of measuring pressures within the pressure range of 1200 to 5 x 10-4 mbar (900 to 3.75 x 10-4 Torr). By combining a piezo-resistive pressure sensor for the upper and a Pirani sensor for the lower pressure range, the measurements made by the THERMOVAC TM 100 are independent of the type of gas above pressures of 15 mbar. Especially noteworthy is the exceptionally long battery life.

- Utilization is directly possible in a vacuum (we recommend batteries made by Panasonic: 6LR61PM, 9 V/ 500 mAh) - Pressure measurements above 15 mbar are independent of the type of gas - Pressure unit of measurement selectable between mbar, Torr and Pascal - Large 4 digit 7 segment display - Cordless power supply through a standard 9 V battery - Protection category IP 40
- Mobile pressure measurements of all kinds - Pressure measurements on refrigerating and air-conditioning systems before filling in the refrigerant - Pressure measurements during servicing of vacuum pumps - Pressure measurements during the production of gas filled pressurised lamps, respectively refilling
60
25
36
120
30
44
Dimensional drawing for the THERMOVAC TM 100
C16 16
Technical Data
Measurement principle Indicated units of measurement Measurement range Maximum overload mbar (Torr) bar abs.

Piezo-resistive (gas-type independent) and thermal conductance Pirani mbar, Torr, microns, Pa 1200 to 5 x 10-4 (900 to 3.75 x 10-4) 2
Measurement uncertainty with reference to full-scale value (at 1200 - 10 mbar) % measured value (at 10 to 0.01 mbar) % Materials in contact with the vacuum Measurement cycle Settling time Operating temperature Storage temperature Supply voltage s ms C C
0.4 (full-scale) 10 (full-scale) Stainless steel, gold, tungsten, nickel, glass, Viton 1.6 400 +5 to +50 -20 to +60 Rechargeable 9 V battery (type 6LR61) or 12 V AC adaptor (miniature jack, + terminal at the tip)
Power consumption, approx. Operating duration Li battery 6LR61 alkaline Display Connection Dimensions (without flange) Protection class Weight (including battery)
mW
110 (pulse)
h h
< 100 < 40 LCD 12 mm
DN mm IP kg (lbs)
16 KF 60 x 120 x 25 40 0.23 (0.51)
TM 100, DN 16 KF

Part No. 230 080
17 C16
Active Sensors CERAVAC Transmitters CTR 100 / CTR 91

The CERAVAC Transmitter with its diaphragm made of pure aluminium oxide ceramics offers excellent accuracy and reproducibility.

- Excellent accuracy - Corrosion resistant - High resolution - Very good temperature stability - Electrically and mechanically compatible with the conventional capacitance manometers with stainless steel diaphragm - Heated and unheated types are available - RS 232 C interface (only CTR 100)
- General pressure measurements in the fine and rough vacuum range, also for corrosive process gases - Chemical process engineering - Semiconductor production processes - Suited as a reference sensor for monitoring test instruments in accordance with DIN/ISO 9000
The Ceramics Diaphragm

The stiffness of aluminium oxide ceramics is greater than that of metal so that the ceramics material offer improved long term stability characteristics when exposed to frequent pressure changes or overpressures. The aluminium oxide ceramics diaphragm of the CERAVAC sensors is capable of returning precisely to its initial position with respect to a certain pressure so that the measurements will be highly reproducible. Since the diaphragm is not impaired by overpressures or frequent pressure changes, no blocking valves will be required a significant contribution towards reducing costs. Moreover, aluminium oxide ceramics diaphragms return faster to their initial position compared to metal diaphragms; the time need between the processes for the measurement to stabilise is reduced. This is particularly important in the case of measurements close to Zero where metal diaphragms take several minutes to return to their rest position. Whereas metal diaphragms suffer from residual tensions and unavoidable irregularities due to their production process, diaphragms made of aluminium oxide ceramics are exceptionally homogeneous, and owing to the firing process at 2500 C entirely free of tensions. This considerably reduces part to part variations in the sensors.
C16 18
Technical Data
Full Scale (FS) / Measurement range
CERAVAC Sensor CTR 100 (Temperature Compensated)

1 Torr / 1 x 10-4 - 1 Torr 10 Torr / 1 x 10-3 - 10 Torr 100 Torr / 0.01 - 100 Torr 1000 Torr / 0.1 - 1000 Torr Pressure Units: 1 Torr = 1.33 mbar = 133 Pascal
Pressure Units: 1 Torr = 1.33 mbar = 133 Pascal Materials exposed to gases Max. overrange pressure
ceramic (Al2O3), stainless steel 316, Vacon 70 ceramic (Al2O3), stainless steel 316, Vacon 70 2000 Torr for 1/10/100 Torr sensors, 3000 Torr for 1000 Torr sensors 0.2% of reading temperature effect 0.003% of FS for 0.1/1 Torr sensors 2000 Torr for 1/10/100 Torr sensors, 3000 Torr for 1000 Torr sensors 0.2% of reading temperature effect 0.003% of FS for 10/100/1000 Torr sensors
Measurement uncertainty Resolution Temperature effects Zero coefficient Span coefficient Response time Nominal temperatur range Supply voltage Power consumption Signal Output Interface Weight approx. Dead Volume Connection cable kg (lbs) cm3
%/C %/C ms C V DC W V
0.015 of Full scale 0.01 of reading 30 +5 to +50 +14 to +30 1 0 - 10; linear 0.26 (0.57) RS 232 C 6 see section Connection Cable for active Sensors
0.005 of Full scale 0.01 of reading 30 +5 to +50 +14 to +30 1 0 - 10; linear 0.26 (0.57) RS 232 C 6 see section Connection Cable for active Sensors
Calibration
see section Miscellaneous, para. see section Miscellaneous, para. Oerlikon Leybold Vacuum Calibration Service Oerlikon Leybold Vacuum Calibration Service
1.1xF.S. 1.0xF.S. 0.9xF.S. 0.8xF.S. Pressure p 0.7xF.S. 0.6xF.S. 0.5xF.S. 0.4xF.S. 0.3xF.S. 0.2xF.S. 0.1xF.S. 0.0xF.S. 0 1 2 3 4 5 6 7 8 9 10 Measurement signal Uout [V]
Characteristic of the CERAVAC Transmitter CTR 100 Oerlikon Leybold Vacuum Full Line Catalog
19 C16
Technical Data
CERAVAC Sensor CTR 91 (45 C heated)

0.1 Torr / 1 x 10-5 - 0.1 Torr 1 Torr / 1 x 10-4 - 1 Torr 10 Torr / 1 x 10-3 - 10 Torr 100 Torr / 0.01 - 100 Torr 1000 Torr / 0.1 - 1000 Torr Pressure Units: 1 Torr = 1.33 mbar = 133 Pascal
Full Scale (FS) / Measurement range
Pressure Units: 1 Torr = 1.33 mbar = 133 Pascal Materials exposed to gases Max. overrange pressure
ceramic (Al2O3), stainless steel 316, Vacon 70 ceramic (Al2O3), stainless steel 316, Vacon 70 1000 Torr for 0.1 Torr sensors 2000 Torr for 1/10/100 Torr sensors, 3000 Torr for 1000 Torr sensors 0.15% of reading temperature effect 0.0025% of FS for 1 Torr sensors 0.0015% of FS for 10/100/1000 Torr sensors
Measurement uncertainty Resolution
0.2% of reading temperature effect 0.0025% of FS for 0.1 Torr sensors
Temperature effects Zero coefficient %/C Span coefficient Reaction time Nominal temperatur range Supply voltage Power consumption Signal Output Weight approx. Dead Volume Connection cable %/C ms C V DC W V kg (lbs) cm3 0.005 of Full scale 0.01 of reading 30 +15 to +40 either 15 or +24 19 0 - 10; linear 0.6 (1.32) 6 see section Connection Cable for active Sensors
1/10/100/1000 Torr sensor 0.0025 of Full scale 0.01 of reading 30 +15 to +40 either 15 or +24 19 0 - 10; linear 0.6 (1.32) 7 see section Connection Cable for active Sensors
Calibration
see section Miscellaneous, para. see section Miscellaneous, para. Oerlikon Leybold Vacuum Calibration Service Oerlikon Leybold Vacuum Calibration Service
1.1xF.S. 1.0xF.S. 0.9xF.S. 0.8xF.S. Pressure p 0.7xF.S. 0.6xF.S. 0.5xF.S. 0.4xF.S. 0.3xF.S. 0.2xF.S. 0.1xF.S. 0.0xF.S. 0 1 2 3 4 5 6 7 8 9 10 Measurement signal Uout [V]
Characteristic of the CERAVAC Transmitter CTR 91
C16 20
Ordering Information CTR 100

DN 16 ISO-KF 1000 Torr 100 Torr 10 Torr 1 Torr 0.1 Torr DN 16 CF-R 1000 Torr 100 Torr 10 Torr 1 Torr 0.1 Torr Cajon 8-VCR 1000 Torr 100 Torr 10 Torr 1 Torr 0.1 Torr 1/2" tube 1000 Torr 100 Torr 10 Torr 1 Torr 0.1 Torr Accessories Part Part Part Part No. 230 No. 230 No. 230 No. 230 300 301 302 303
CERAVAC Sensor CTR 91

Part Part Part Part Part No. No. No. No. No. 159 159 159 159 159 25 26 27 28 29
Part Part Part Part
No. 230 No. 230 No. 230 No. 230
305 306 307 308
Part Part Part Part Part
No. No. No. No. No.
159 159 159 159 159
35 36 37 37 39
Part Part Part Part
No. 230 No. 230 No. 230 No. 230
310 311 312 313
No. No. No. No. No.
159 159 159 159 159
45 46 47 48 49
Part Part Part Part
No. 230 No. 230 No. 230 No. 230
315 316 317 318
No. No. No. No. No.
159 159 159 159 159
55 56 57 58 59
The installation of a spiral tube is recommended in connection with applications involving contamination (oil vapors or dusts)
The installation of a spiral tube is recommended in connection with applications involving contamination (oil vapors or dusts)
A
3,8 89 117 113
View
CTR91
(26)
1/2" Tube DN 16 KF
44
DN 16 CF-R 8-VCR
Dimensional drawing for the CERAVAC Transmitter CTR 100
Dimensional drawing for the CERAVAC Transmitter CTR 91
21 C16
THERMOVAC Transmitters TTR 91 / TTR 91 S / TTR 96 S

THERMOVAC transmitters are active sensors (pressure to voltage converters) using thermal conductivity according to Pirani. The further developed THERMOVAC transmitters have optimized price-toperformance ratio. The value of the trigger point can be switched easily on the analog output and be shown on the display of the operating unit.

- Rugged sensing cells made of stainless steel - Compact design - Stable measurements within a wide temperature range - Highly resistant to overpressures - Exchangeable sensing cells - Fast response - Available with integrated switching relay (TTR 91 S, TTR 96 S)
- Analytical engineering - Safety circuits in vacuum systems - Controlling ionization gauges - General pressure measurement and control on systems in the fine and rough vacuum range pressure value (atmospheric, zero, reference pressure) by pressing a button. Integration of the transmitters in programmable control systems is facilitated by the linear characteristic, which can be defined by entering a simple equation into the computer. The transmitters TTR 91 / TTR 91 S / TTR 96 S are compatible to older TTR models like TTR 211, TTR 216 S or TTR 90. Built-in relays allow switching functions to be performed directly by the transmitter, without the need of a programmable control.
Sensor
The THERMOVAC transmitter has a Pirani sensing cell equipped with a tungsten (TTR 91/TTR 91 S) or nickel (TTR 96 S) filament. If required, the sensing cells can easily be aligned to any precisely known
50
65 22.2
70.4
10 9 8 7 6 5 4 3 2 1
1/8" NPT
Equation p = 10 0,778 (U(a) - 6,143) mbar
33
15
DN 16 ISO-KF DN 16 CF-R
14 29
U(a) / Volt
115
0 2 10-4
4 68
10-3
10-2
10-1
100
101
102 mbar 103
Pressure
DN 16 CF-R
Dimensional drawing for the TTR 91 / TTR 91 S / TTR 96 S
Characteristic of the THERMOVAC Transmitters
C16 22
Technical Data
Measurement range Measurement uncertainty Principle of measurement Supply voltage mbar (Torr)
THERMOVAC Transmitter TTR 91 / TTR 91 S / TTR 96 S

5 x 10-4 to 1000 (3.75 x 10-4 to 750) 15% in the range 1 x 10-3 to 100 mbar (0.75 x 10-3 to 75 Torr) Thermal conductivity according to Pirani 14 to 30 V DC Hum voltage 1 Vpp VA C C % n.c. 1 -20 to +65 5 to 60 80 IP 40
Power consumption Storage temperature range Nominal temperature range Max. rel. humidity Protection class Weight, approx., for DN 16 KF Sensor Bake out temperature, max. Dead volume, approx. Materials in contact with the medium - filament Over-pressure rating, abs. Signal output (Ra 10 k) Measurement signal Status signal
kg (lbs)
0.08 (0.18) Exchangeable sensing cell
C cm3
80 (250 with long tube) 2 (10 with long tube) Stainless steel, Ni, glass, NiFe Tungsten (TTR 91, TTR 91 S) or nickel (TTR 96 S)
bar
10 0 to 10.3 V DC 1.9 to 10 V DC, corresp. 5 x 10-4 to 1 x 103 mbar 1.286 V/decade, logarithmic Error: 0.5 V Normally open relay contact 2 x 10-3 to 500 (1.5 x 10-3 to 375) 10% 30 V, 0.5 A DC, floating Relay contact open Trigger (active): Green LED FCC-68/RJ45 socket, 8 way with shield
Trigger (only TTR 91 S / TTR 96 S) Adjustment range mbar (Torr) Hysteresis Rating Error status Status indicators (only TTR 91 S / TTR 96 S) Electrical connection Cable length, max. m
100
23 C16
Without switching threshold TTR 91, DN 16 KF TTR 91, 1/8" NPT TTR 91, DN 16 CF TTR 91, 1/2" Tube, DN 16 CF bakeable With switching threshold TTR 91 S, DN 16 KF TTR 91 S, 1/8" NPT TTR 91 S, DN 16 CF TTR 91 S, 1/2" Tube, DN 16 CF bakeable TTR 96 S, DN 16 KF TTR 96 S, 1/8" NPT TTR 96 S, DN 16 CF TTR 96 S, 1/2" Tube, DN 16 CF bakeable Replacement sensing cell for TTR 91 / TTR 91 S DN 16 KF 1/8" NPT DN 16 CF 1/2" Tube, DN 16 CF bakeable for TTR 96 S DN 16 KF 1/8" NPT DN 16 CF 1/2" Tube, DN 16 CF bakeable Calibration Connection cable, FCC 68 on both ends, 8 way, shielded 005 m 010 m 015 m 020 m 030 m 040 m 050 m 075 m 100 m Accessories
THERMOVAC Transmitter TTR 91 / TTR 91 S / TTR 96 S

Part No. 230 035 Part No. 230 038 Part No. 230 036 Part No. 230 037
Part No. 230 040 Part No. 230 043 Part No. 230 041 Part Part Part Part No. No. No. No. 230 230 230 230 042 045 048 046
Part No. 230 047
Part No. 230 050 Part No. 230 053 Part No. 230 051 Part No. 230 052 Part No. 230 055 Part No. 230 058 Part No. 230 056 Part No. 230 057 see section Miscellaneous, para. Oerlikon Leybold Vacuum Calibration Service
Type A Part No. 124 26 Part No. 230 012 Part No. 124 27 Part No. 124 28 Part No. 124 29 Part No. 124 30 Part No. 124 31 Part No. 124 32 Part No. 124 33 The installation of a spiral tube is recommended in connection with applications involving contamination (oil vapors or dusts)
Note
- Measurement errors caused by the increased conductance of the component need to be taken into account - Low vibration mounting must be ensured - The sensor must be connected at the upper end
C16 24
Notes
25 C16
THERMOVAC Transmitter with Field Bus Interface Profibus or DeviceNet TTR 211 PB/D / TTR 216 PB/D
The THERMOVAC transmitters have been developed especially for integration into vacuum systems. Being active sensors (pressure to voltage converters) with a well-proven Pirani sensing cell and new operating and processing electronics these units offer a measurement range which spans 5 x 10-4 to 1000 mbar (3.75 x 10-4 to 750 Torr).

- Rugged Pirani sensing cells also for corrosive media - Logarithmic signal output (algrithm supplied) - High reproducibility - Easily exchangeable sensing cells - Switching threshold adjustable over a wide range (1 x 10-3 to 500 mbar (1 x 10-3 to 375 Torr)) and relay contact - LED indicator for operation and trigger active - Easily accessible monitoring connection to check the measurement signal and the trigger setting (voltmeter) - High EMI compatibility through screened housing, FCC-68 connector and cables - Computer interface - Field bus: Profibus DP/DeviceNet - CE mark
- Analytical engineering - Safety circuits in vacuum systems - Controlling ionization gauges - Vacuum furnaces - General pressure measurement and control on systems in the fine and rough vacuum range which have the following requirements: - Immediate data transfer to a programmable control/computer via analog interface - Coverage of greater distances between the point of the measurement and processing location - Several locations which are to be monitored continuously - Low voltage supply - Simple, cost and space saving installation - Increased reliability - Simple operation - Increased requirements concerning electromagnetic compatibility (EMI)
C16 26
Sensor
The well-proven Pirani sensing cells with tungsten filament and a DN 16 KF flange are built into the TTR 211 PB/D THERMOVAC transmitters. The TTR 216 PB/D transmitter is equipped with a stainless steel sensing cell, with a platinum filament and an Al2O3 ceramics current feedthrough for use in connection with corrosive media or where much water vapor is present. The sensing cells can be easily exchanged on all transmitters. If required, the sensing cell can easily be aligned at atmospheric pressure and Zero pressure through two potentiometers. Integration of the transmitter in programmable control systems is facilitated by the straight characteristic which may be defined by entering a simple equation into the computer. Through the built-in relays it is possible to perform important switching functions directly through the transmitter without the need of a programmable control.
10 9 8 7 6 5 4 3 2 1 0 2 10-4 U(a)/Volt
Equation U(a) = lg (p/mbar) 1,286 + 6,143 Volt
56
73
0 Trigger
92 107 (116) 121
7 13 DN 16 KF 1/8" NPT
16
4 68
10
-3
10-2
10-1 100 Pressure
101
102 mbar 103
Characteristic of the TTR 211 PB/D and TTR 216 PB/D
Dimensional drawing for the TTR 211 PB/D and TTR 216 PB/D
27 C16
Technical Data
Display range Measurement uncertainty mbar (Torr)
THERMOVAC Transmitter TTR 211 PB/D / TTR 216 PB/D

5 x 10-4 to 1000 (3.75 x 10-4 to 750) 20% in the range 1 x 10-3 to 1 x 10-2 mbar (0.75 x 10-3 to 0.75 x 10-2 Torr) 15% in the range 1 x 10-2 to 30 mbar (0.75 x 10-2 to 22.5 Torr) Thermal conductivity acc. to Pirani 14.5 to 36 V DC, typ. 24 V DC Ripple voltage < 2 Vpp VA C % n.c. <2 -20 to +70 / +10 to +50 95 IP 40 mm kg (lbs) 106 x 73 x 56 0.29 (0.64) UL 94 - V 2 Exchangeable sensing cell Tungsten (TTR 211)/platinum (TTR 216) DN C cm3 16 KF 80 at the flange 11 TTR 211: Aluminum, nickel-plated steel, Vacon, tungsten, CrNi8020, glass, epoxy cement; TTR 216 S: Stainless steel, CrNi, Al2O3 ceramics, NiFe, Mo, Ni, platinum TTR 211: 3 bar, TTR 216: 10 bar 0 to 10.6 V 1.9 to 10 V, corresp. 5 x 10-4 to 1 x 103 mbar logarithmic divisions 1.286 V/decade broken filament 10.5 V n.o./changeover relay contact 1 x 10-3 to 500 (0.75 to 375) about 30% of the adjusted pressure < 50 60 V, 0.5 A DC contact open in case of broken filament or supply off Operation (Power): Orange LED Trigger (active): Green LED Jack socket (3.5 mm) at which the measurement signal and the trigger setting is available FCC-68 socket, 8 way with shield m 100
Principle of measurement Supply voltage
Power consumption Storage / nominal temperature range Max. rel. humidity (climatic class F) Protection class Dimensions (H x W x D) Weight, approx. Inflammability Sensor Filament Vacuum connection Bake out temperature, max Dead volume, max. Materials in contact with the medium
Over-pressure rating, abs. Signal output (Ra 10 k) Measurement signal Status signal Trigger Adjustment range Hysteresis Reaction time Rating Error status Status indicators Monitor output (Ra 100 k) Electrical connection Cable length, max. Interface TTR 211 D / 216 D TTR 211 PB / 216 PB
mbar (Torr) ms
DeviceNet Profibus DP
C16 28
TTR 211 D, DN 16 KF Tungsten filament (1 trigger) DeviceNet interface Replacement sensing cell TTR 211 PB, DN 16 KF Tungsten filament (1 trigger) Profibus DP interface Replacement sensing cell TTR 216 D, DN 16 KF Platinum filament (1 trigger) DeviceNet interface Replacement sensing cell TTR 216 PB, DN 16 KF Platinum filament (1 trigger) Profibus PB interface Replacement sensing cell Calibration Connecting cable, FCC 68 on both ends, 8 way with shield 005 m 010 m 015 m 020 m 030 m 040 m 050 m 075 m 100 m Accessories
THERMOVAC Transmitter TTR 211 PB/D / TTR 216 PB/D
Part No. 896 51 Part No. E 157 75
Part No. 896 50 Part No. E 157 75
Part No. 896 53 Part No. E 157 77
Part No. 896 52 Part No. E 157 77 see section Miscellaneous, para. LEYBOLD Calibration Service
Note
29 C16
THERMOVAC Transmitters TTR 100 / TTR 100 S2

The Pirani Capacitance Diaphragm Gauge is the first vacuum gauge which combines ceramic capacitance diaphragm and thermal conductivity technologies. Unlike standard heat transfer technology, the Oerlikon Leybold Vacuum TTR 100 offers superior accuracy and gas-type-independent readings between 100 mbar and 1500 mbar.

- Wide measurement range from 5 x 10-4 to 1500 mbar - Gas-type-independent pressure measurement between 100 mbar and 1500 mbar - Available with up to two integrated relays (TTR 100 S2) - Mounts in any orientation - 0 to 10.3 V analog output for easy system integration - Compact design - Flow independent - Rapid cycling - Follows true pressure in pump and vent
- Loadlock control - Forevacuum pressure monitoring - Safety circuits in vacuum systems - General measurement and control in the medium and rough vacuum range - Control of high vacuum ionization gauges
Option
Dust and other particles may cause increasing measurement errors and reduced lifetime. Therefore we recommend the installation of a fine filter in critical applications. Fine filters are listed in section General, para. Connection Accessories for Small Flanges.
~65 28
10 9 8 7 6 5 4 3 2 1 0 2 10-4
4 68
Equation p = 10 0,778 (U(a) - 6,143) mbar
68.3
U(a) / Volt
45
26.3 10
-3
10
-2
10
-1
10
10
10 mbar 10
DN 16 ISO-KF
45
1/8" NPT
Pressure
Characteristic of the THERMOVAC Transmitters
Dimensional drawing for the TTR 100
C16 30
Technical Data
Measurement principle Measurement range (air, O2, CO, N2) Accuracy 1 x 10-3 to 50 mbar 50 to 950 mbar ATM (atmospheric pressure) Repeatability Trigger (only TTR 100 S2) Setting range with potentiometer Relay contacts closed open Hysteresis Contact rating Relay status Output signal analog Measurement range Voltage vs. pressure Output impedance Minimum load impedance Response time Power supply Voltage (ripple 1 Vpp) Consumption, max. Fuse to be connected Electrical connection Cable length, max. Materials exposed to vacuum (process media) Vacuum connection Pirani filament Capacitance sensor cell Feedthrough Other materials Internal volume DN 16 ISO-KF 1/8" NPT Over-pressure rating, abs. Temperature Operation (ambient) Storage Bakeout at flange, max. Filament temperature Relative humidity Mounting orientation any Use Protection class Weight DN 16 ISO-KF 1/8" NPT IP kg (lbs) kg (lbs) cm3 cm3 bar C C C C m mbar (Torr)
THERMOVAC Transmitter TTR 100 / TTR 100 S2

Thermal conductance according to Pirani combined with capacitance diaphragm 5 x 10-4 to 1500 (3.8 x 10-4 to 1125) 15% of reading 5% of reading 2.5% of reading 2% of reading 2 1.5 x 10-3 to 1400 mbar N.O. / potential free at low pressure (lamp lit) at high pressure or no supply (lamp off) 10% of threshold 30 V DC / 1 A active: LED, green 0 to 10.3 V +1.9 to +10.23 V 1.286 V / decade, logarithmic 2 x 4.7 Ohm, short circuit-proof 10 kOhm 10 ms +15 to +30 V DC 2.5 W 1 AT (time delay) FCC-68, 8 way with shield 100
stainless steel tungsten AI2O3 glass Ni, Cu, NiFe, SnAg, AgPd 6 8 5 +10 to +50 -20 to +65 +80 < 160 < 80% at temperatures < +31 C, decreasing to 50% at +40 C any Indoors only, altitudes up to 2000 m NN 40 0.09 (0.20) 0.09 (0.20)
31 C16
Without switching threshold TTR 100, DN 16 KF TTR 100, 1/8" NPT With switching threshold TTR 100 S2, DN 16 KF TTR 100 S2, 1/8" NPT Calibration Connection cable, FCC 68 on both ends, 8 way, shielded 005 m 010 m 015 m 020 m 030 m 040 m 050 m 075 m 100 m Accessories
THERMOVAC Transmitter TTR 100 / TTR 100 S2

Part No. 230 026 Part No. 230 028
Part No. 230 027 Part No. 230 029 see section Miscellaneous,para. Oerlikon Leybold Vacuum Calibration Service
Note
C16 32
Notes
33 C16
PENNINGVAC Transmitters PTR 225 / PTR 225 S / PTR 237

The PENNINGVAC transmitters have been developed especially for integration in programmable control systems. As active sensors (pressure to voltage converters) - equipped with a rugged cold cathode sensing cell and with matched operating and processing electronics - these transmitters offer a wide measurement range of 1 x 10-9 to 1 x 10-2 mbar (0.75 x 10-9 to 0.75 x 10-2 Torr). The measurement signal may be transmitted over long distances without problems.

- All-metal cold cathode sensors (inverted Penning) - High reproducibility - Good ignition characteristics through the optimized design for the electrodes - Low tendency for contamination (also during argon operation) due to high voltage reduction after ignition of the plasma and due to the titanium cathodes - Switching threshold adjustable over a wide range (1 x 10-9 to 1 x 10-2 mbar (0.75 x 10-9 to 0.75 x 10-2 Torr)) and with a loadbearing relay contact (PTR 225 S) - Low stray magnetic field - High EMI compatibility through screened housing, FCC-68 connector and cables - LED indicator for operation - Logarithmic signal output (algrithm supplied) - Intelligent interface - CE mark - High resistance against sputtering due to titanium cathode plates
- Evaporation and sputtering systems - Analytical engineering - Vacuum furnaces - High vacuum systems - General pressure measurement and control on systems in the fine and rough vacuum range which have the following requirements: - Immediate data transfer to a programmable control/computer via analog interface - Coverage of greater distances between the point of the measurement and processing location - Several locations which are to be monitored continuously - Low voltage supply - Simple, cost and space saving installation - Increased reliability, also in argon processes (sputtering) - Simple operation - Increased requirements concerning electromagnetic compatibility (EMI)
Option
For protection of the sensors PTR 225 against contamination, radiation and other disturbing factors the installation of a baffle is recommmended.
Baffle DN 25 KF, Part No. 230 078
C16 34
Sensor
Cold cathode sensors - based on the well-proven principle of the inverted Penning - are built into the PENNINGVAC transmitters PTR 225/ 225 S/237 which have a DN 25 KF or DN 40 CF flange. The housing of the transmitter, including its electronics, as well as the magnet can easily be removed for degassing of the all-metal sensor with Al2O3 current feedthrough. The design of the Penning sensors with its closed magnetic field causes a negligible stray field. Thus the PTR 225/225 S/237 may also be installed close to sensitive parts within a system. The anode ring and the titanium cathode plates can be exchanged easily for quick maintenance of the sensors in case of contamination. The shape of the cathode plates is such that they also act as a baffle for the sensors.
73 80
POWER POWER READY
Integration of the transmitter in programmable control systems is facilitated by the linear characteristic which can be defined by entering a simple equation into the computer. Built-in relays (PTR 225 S) allow switching functions to be performed directly by the transmitter, without the need of a programmable control.
73
80
READY
114 130
114 144
17
30
Dimensional drawing for the PTR 225
Dimensional drawing for the PTR 237
10 9 8 7 6 5 4 3 2 1 0 2 10-9 U(a)/Volt
Equation U(a) = [1.33 * lg (p/mbar) + 12,66] Volt
4 68
10
-8
10-7
10-6 10-5 Pressure
10-4
10-3 mbar 10-2
Characteristic of the PTR 225/225 S/237
35 C16
Technical Data
Display range Measurement uncertainty Principle of measurement Supply voltage Power consumption Storage temperature range Nominal temperature range Max. rel. humidity (climatic class F) Protection class Dimensions (H x W x D) Weight, approx. Inflammability Sensor Vacuum connection Degassing temperature, max. Dead volume, max. Materials in contact with the medium Over-pressure rating (abs.) Signal output (Ra 10 k) Measurement signal bar DN C cm3 VA C C % n.c. IP mm kg (lbs) mbar (Torr)
PENNINGVAC Transmitter PTR 225 / PTR 225 S / PTR 237

1 x 10-9 to 1 x 10-2 (0.75 x 10-9 to 0.75 x 10-2) 30% in the range 1 x 10-8 to 1 x 10-4 mbar (0.75 x 10-8 to 0.75 x 10-4 Torr) Cold cathode ionization according to Penning 14.5 to 36 V DC typ. 24 V DC hum voltage < 2 Vpp <2 -20 to +70 +10 to +50 95 40 125 x 80 x 73 0.5 (1.1) UL 94 - V 2 Detachable for cleaning 25 KF or 40 CF 250 with electronics detached 21 Stainless steel, CrNi, Al2O3 ceramics, NiFe, Mo, Cu, Ni, titanium 10 0 to 10.6 V 0.66 to 10 V, corresponds to 1 x 10-9 to 1 x 10-2 mbar logarithm. divisions 1.333 V/decade mbar (Torr) Changeover relay contact 1 x 10-9 to 1 x 10-3 (0.75 x 10-9 to 0.75 x 10-3) About 30% of the adjusted pressure 60 V, 0.5 A DC Contact in its rest position when no ignition / HT off ON: At U < 2.9 V, or U > 12 V OFF: At U > 3 V, or U < 7 V Voltage level HIGH (typ. 24 V DC) LOW (0 V) Operation: Orange LED Ready to measure (ignited): Green LED Trigger (active): Green LED Jack socket (3.5 mm) at which the trigger setting is available FCC-68 socket, 8 way with shield m 100 Profibus DP DeviceNet
Trigger (PTR 225 S) Adjustment range Hysteresis Rating Error status High voltage control input Status output Ready to measure Error (no ignition) Status indicators
Monitor output (Ra 100 k) Electrical connection Cable length, max. Interface PTR 225 PB PTR 237 D
C16 36
PTR 225, DN 25 KF PTR 225 S, DN 25 KF PTR 225 PB, DN 25 KF Profibus interface PTR 237, DN 40 CF PTR 237 D, DN 40 CF DeviceNet interface Baffle, DN 25 KF, with centering ring Replacement cathode plates, titanium (set of 5 pieces) Replacement anode ring Calibration Connection cable, FCC 68 on both ends, 8 way, shielded 005 m 010 m 015 m 020 m 030 m 040 m 050 m 075 m 100 m
PENNINGVAC Transmitter PTR 225 / PTR 225 S / PTR 237

Part No. 157 36 Part No. 896 42
Part No. 230 078
Part No. EK 162 91 Part No. 200 28 711 see section Miscellaneous, para. Oerlikon Leybold Vacuum Calibration Service
Type A Part No. 124 26 Part No. 230 012 Part No. 124 27 Part No. 124 28 Part No. 124 29 Part No. 124 30 Part No. 124 31 Part No. 124 32 Part No. 124 33
37 C16
PENNINGVAC Transmitter PTR 90

The PENNINGVAC transmitter combines the cold cathode ionization principle with the Pirani principle. This allows for complete coverage of the pressure range from 5 x 10-9 mbar to atmospheric pressure by a single transmitter. The cold cathode system is ignited directly through switching on the internal high-voltage at the optimum ignition pressure.
75 60 60
75
55 110 28 63,5 110,5
55 116 63,5
28
18 DN 25 ISO-KF
18,5
24
DN 40 ISO-KF DN 40 CF-F
Dimensional drawing for the PENNINGVAC transmitters PTR 90

- High operational reliability through automatic ignition of the cold cathode - Low complexity for installation and wiring due to the integration of two principles of measurement in a single casing - Compact design - Good serviceability - Extra low voltage power supply - Simple, cost and space saving installation - Increased reliability also in connection with argon processes (sputtering) - Simple to operate - CE mark
- Sputtering and coating technology - Analytical technology - Vacuum furnaces - Multipurpose pressure measurement and control in the medium and high vacuum range
C16 38
Option
For protection of the sensor ITR 90 against contamination, radiation and other disturbing factors the installation of a baffle is recommmended. Two types of baffles are available: A build-in version for CF connections is mounted in the sensor; the baffle for KF connections is integrated in a centering ring.
Characteristic of the PTR 90
Baffle DN 25 KF, Part No. 121 07
39 C16
Technical Data
Display range Measrement uncertainty mbar (Torr) %
PENNINGVAC Transmitter PTR 90

5 x 10-9 1000 (3.75 x 10-9 ... 750) 30 in the range 1 x 10-8 100 mbar (in the range 0.75 x 10-8 75 Torr) Cold cathode measurement system based on the principle of the inverted magnetron and Pirani measurement system % 5 in the range 1 x 10-8 100 mbar (in the range 0.75 x 10-8 75 Torr)
Principle of measurement
Reproducibility
Output signal (measurement signal) Voltage range Measurement range Relationship voltage-pressure Error signal
0 - 10.5 1.828.6 Logarithmic, 0.6 V/decade < 0.5 V no power supply > 9.5 V Pirani sensor is defective (broken filament) V DC 15 - 30 FCC 68 socket, 8 way C C +5 to +55 -40 to +65 Stainless steel, ceramics, Mo, Ni, Au, W bar IP 10 40
Power supply Electrical connection Operating temperature Storage temperature Materials in contact with the medium Overpressure resistance (absolute) Protection class
PTR 90 DN 25 KF DN 40 KF DN 40 CF Baffle DN 25 KF DN 40 KF Calibration Connection cable, FCC 68 on both ends, 8 way, shielded 005 m 010 m 015 m 020 m 030 m 040 m 050 m 075 m 100 m
PENNINGVAC Transmitter
Part No. 230 078 Part No. 230 079 see section Miscellaneous, para. Oerlikon Leybold Vacuum Calibration Service
C16 40
Notes
41 C16
IONIVAC Transmitter ITR 90

The ITR 90 is a optimized combination transmitter. The combination of a hot cathode ionisation sensor according to Bayard-Alpert and a Pirani sensor permits vacuum pressure measurements of nonignitable gases and gas mixtures in the pressure range from 5 x 10-10 to 1000 mbar. If needed, the pressure can be displayed via the integrated display.

- Continuous pressure measurements from 10-10 mbar to atmospheric pressure - High degree of reproducibility within the typical range for process pressures of 10-2 to 10-8 mbar - Controlled switching on and off sequencing through the integrated double Pirani optimized the service life of the yttrium coated iridium cathodes - Compact design - Enclosed, rugged electrode geometry in a rugged metal housing - Efficient degassing by electron bombardment - Simple fitting of the sensor - Extension for higher bake out temperatures during the measurements - One signal covering 13 decades - One flange joint for 13 decade - ITR 90 model with built-in display for stand-alone operation without additional display components - RS 232 C interface
- Analytical - Evaporation and coating - Vacuum furnaces - General purpose pressure measurements in the fine and high vacuum ranges
C16 42
Sensor
The sensor of the ITR 90 contains a dual filament Pirani system as well as a Bayard-Alpert measurement system. When using the bake out extension, measurements will be possible also at flange temperatures up to 150 C.
10 Volt 8 Equation 7 p = 10(u-7,75)/ 0,75 6 5 4 3 2 1 0 2 468 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 U(a) Pressure
100
10 mbar 1000
Characteristic of the ITR 90
58 (2.28 )
67 (2.64 )
Top View
153 (6 ) ~105
48 (1.89 )
42 (1.65 )
DN 40 CF-R
DN 25 ISO-KF
40
Dimensional drawing for the ITR 90; dimensions in brackets ( ) are in inch
Dimensional drawing for the bake out extension
43 C16
Technical Data
Display range mbar (Torr)
IONIVAC Transmitter ITR 90

5x 10-10 to 1000 (3.75 x 10-10 to 750)
Measurement uncertainty, 10-8 - 10-2 mbar Reproducibility, 10-8 - 10-2 mbar Principles of measurement
15% of the meas. value 5% of the meas. value Hot cathode ionization according to Bayard-Alpert combined with thermal conductivity according to Pirani Electron bombardment 3 minutes, max. 20 to 28 V DC, typ. 24 V DC
Degas Supply voltage Power consumption, max. Storage / nominal temperature range Protection class Weight, approx. ITR 90, DN 25 KF ITR 90, DN 40 CF Sensor Bake out temperature, max. Dead volume, max. C cm3 W C
16 -20 to +70 / 0 to +50 IP 30
kg (lbs) kg (lbs)
0.285 (0.64) 0.550 (1.24) Fully sealed, exchangeable 150 1) 24 at DN 25 KF 34 at DN 40 CF Cu, W, Glas, NiFe, Mo, stainless steel, Aluminum, Iridium, Yttrium, NiCr,
Materials in contact with the medium Over-pressure rating (abs.) Signal output (Ra 10 k) Measurement signal Error signal Interface (standard / optional) Electrical connection Cable length, max. m bar
0 - 10 V, 0.774 - 10 V, 0.75 V pro decade < 0,5 V RS 232 C / ProfiBus 15 way Sub-D male connector / pin contacts 100 / 30 at RS 232 C
1)
Flange temperature when using the bake out extension
C16 44
IONIVAC Transmitter ITR 90 Without Display With Display

Part No. 120 91
ITR 90, DN 25 KF ITR 90, DN 25 KF Profibus interface ITR 90, DN 40 CF-R, rotatable CF flange ITR 90, DN 40 CF-R, rotatable CF flange Profibus interface Options Power supply for IONIVAC transmitter 100 V - 240 V AC / 24 V DC incl. 5 m connection cable and 5 m RS 232 C cable Bake out extension (100 mm, approx.) Baffle, DN 25 KF, with Installation baffle for CF/KF variant Replacement sensor IE 90, DN 25 KF 1) IE 90, DN 40 CF-R 1) Calibration
Part No. 120 90 Part No. 230 030
Part No. 120 92 Part No. 230 031
Part No. 120 94
Part No. E 121 02 Part No. E 121 03

see section Miscellaneous, para. Oerlikon Leybold Vacuum Calibration Service
Part No. E 121 02 Part No. E 121 03

see section Miscellaneous, para. Oerlikon Leybold Vacuum Calibration Service see section Connection Cable for active Sensors
Connection cable
see section Connection Cable for active Sensors
1)
including hex. socket screw key
45 C16
IONIVAC Transmitter ITR 200 S

The ITR 200 S is an optimised dual cathode combination transmitter on the basis of the well proven ITR 90. The combination of a hot cathode ionization sensor according to BayardAlpert and a Pirani sensor allows vacuum pressure measurements of non-ignitable gases and gas mixtures in the pressure range from 5 x 10-10 to 1000 mbar. Upon request, the pressure can be displayed on an integrated display.

- Service life increase and increased operational reliability through integration of a second hot cathode - Full coverage of the pressure range from 5 x 10-10 mbar to atmospheric pressure - High repeatability within the typical process pressure range of 10-2 to 10-8 mbar - Controlled switching on and switching off through the integrated dual Pirani optimized the service life of the yttrium-coated iridium cathodes - Compact design - Enclosed, stable electrode geometry in rugged metal casing - Efficient degassing through electron bombardment - Simple to install - Extension for higher bake out temperatures in the measurement mode - ITR 200 S version with built-in display allows for stand-alone operation without the necessity for additional displays - RS 232 C interface
- Analytical engineering - Sputtering and coating technology - Vacuum furnaces - Multipurpose pressure measurement in the medium and high vacuum range
Sensor
The sensor of the ITR 200 S includes besides the Pirani system a dual cathode measurement system according to Bayard-Alpert. If one of the hot cathodes should burn out during operation, then the second cathode is automatically switched on. Moreover, each sensor contains a memory chip with the relevant system data. Thus after having exchanged a sensor, an automatic alignment is performed between sensor and operating electronics (plug and play).
Options
Upon request, the ITR 200 S can be supplied with an integrated display, a Profibus or a DeviceNet interface.
C16 46
58 (2.28 )
67 (2.64 )
Top View
153 (6 )
107.8
48 (1.89 )
42 (1.65 )
DN 40 CF-R
DN 25 ISO-KF
Bakeout area
Dimensional drawing for the ITR 200; dimensions in brackets ( ) are in inch
Dimensional drawing for the bake out version
10 Volt 8 Equation 7 p = 10(u-7,75)/ 0,75 6 5 4 3 2 1 0 2 468 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 U(a) Pressure
Characteristic of the ITR 200
100
10 mbar 1000
47 C16
Technical Data
Display range mbar (Torr)
IONIVAC Transmitter ITR 200 S

5 x 10-10 to 1000 (3.75 x 10-10 to 750) 15% of the meas. value 5% of the meas. value Hot cathode ionization according to Bayard-Alpert combined with thermal conductivity according to Pirani Electron bombardment 3 minutes, max. 20 to 28 V DC, typ. 24 V DC W C 16 -20 to +70 / 0 to +50 IP 30
Measurement uncertainty, 10-8 - 10-2 mbar Reproducibility, 10-8 - 10-2 mbar Principles of measurement
Degas Supply voltage Power consumption, max. Storage / nominal temperature range Protection class Weight, approx. ITR 90, DN 25 KF ITR 90, DN 40 CF Sensor Bake out temperature, max. Dead volume, max. C cm3
kg (lbs) kg (lbs)
0.285 (0.64) 0.550 (1.24) Fully sealed, exchangeable 150 1) 24 at DN 25 KF 34 at DN 40 CF Cu, W, Glas, NiFe, Mo, stainless steel, Aluminum, Iridium, Yttrium, NiCr,
Materials in contact with the medium Over-pressure rating (abs.) Signal output (Ra 10 k) Measurement signal Error signal Interface (standard / optional) Switching function Standard Profibus or DeviceNet Electrical connection Cable length, max. m bar
0 - 10 V, 0.774 - 10 V, 0.75 V pro decade < 0,5 V RS 232 C / Profibus or DeviceNet
1 normally open contact 2 normally open contacts 15 way Sub-D male connector / pin contacts 100 / 30 at RS 232 C
1)
Flange temperature when using the bake out extension
C16 48
IONIVAC Transmitter ITR 200 S Without Display With Display

Part No. 230 251
ITR 200 S, DN 25 KF 1 switching function ITR 200 SP, DN 25 KF Profibus interface, 2 switching functions ITR 200 SD, DN 25 KF DeviceNet interface, 2 switching functions ITR 200 S, DN 40 CF-R, rotatable CF flange 1 switching function ITR 200 SP, DN 40 CF-R, rotatable CF flange Profibus interface, 2 switching functions ITR 200 SD, DN 40 CF DeviceNet interface, 2 switching functions DN 40 CF-R, ITR 200 SL rotatable CF flange, 1 switching function, 150 C bakeable Options Power supply for IONIVAC transmitter 100 V - 240 V AC / 24 V DC incl. 5 m connection cable and 5 m RS 232 C cable Baffle, DN 25 KF, with Installation baffle for CF/KF variant Replacement sensor IE 200, DN 25 KF 2) IE 200, DN 40 CF-R 2) IE 200 SL 1), DN 40 CF-R 2) Calibration
1),
Part No. 230 250
Part No. 230 252
Part No. 230 253
Part No. 230 254
Part No. 230 255
Part No. 230 256
Part No. 230 257
Part No. 230 258
Part No. 121 06 Part No. 121 07
Part No. 121 06 Part No. 121 07
Part No. 240 020 Part No. 240 021

see section Miscellaneous, para. Oerlikon Leybold Vacuum Calibration Service see section Connection Cable for active Sensors
Connection cable
see section Connection Cable for active Sensors
1) 2)
SL = long version (bake out extension) including hex. socket screw key
49 C16
Spiral Tube
Installation position of the sensor DN
65
51
Dimensional drawing for the spiral tube

Pressure sensors may through the use of the spiral tube be better protected against contamination like vapours and dusts. Thus measurement accuracy is improved and a longer service life of the pressure sensors is attained. Installation is recommended in connection with - measurement system TTR (preferred) - CERAVAC CTR
Operating Principle
Through the specially developed geometry which provides a constant slope, possibly occurring contamination is removed.
Note
Maintenance
Depending on the type of application regular maintenance on the spiral tube is recommended.
Technical Data
Materials
Spiral Tube
Stainless steel
Spiral Tube DN 16 ISO-KF DN 25 ISO-KF DN 40 ISO-KF
Spiral Tube
C16 50
Notes
51 C16
Connection Cables for Active Sensors

Active Sensors Operating Units for Active Sensors DISPLAY ONE DISPLAY TWO DISPLAY THREE CENTER ONE CENTER TWO CENTER THREE Type A Type A Type C Type C
THERMOVAC Transmitter TTR 91, TTR 91 S, TTR 96 S a. o. TTR 211 PB/D, TTR 216 PB/D PENNINGVAC Transmitter PTR 90, PTR 225, PTR 225 S, PTR 237 CERAVAC Transmitter CTR 100, CTR 101 (digital signal) IONIVAC Transmitter ITR 90, ITR 200 S
Type A Type A
(only PTR 90)
Type A Type A
Operating Units for Active Sensors Active Sensors

THERMOVAC Transmitter TTR 91, TTR 91 S, TTR 96 S a. o. CERAVAC Transmitter CTR 91, CTR 100, CTR 101 (analog signal) IONIVAC Transmitter ITR 90, ITR 200 S
IONIVAC IM 540 (Channel 3 and 4) Type A
CMove
Bare wire ends
Type A
Type B
Type B Type C
Type E
C16 52
Technical Data
Cables Type Type Type Type
Connection Cable
A B C E
FCC 68 (RJ45) on both ends, 8 way, shielded Sub-D 15 way female to FCC 68 (RJ45), 8 way, shielded Sub-D 15 way female to Sub-D 15 way male, shielded Sub-D 15 way female to bare wire ends, shielded
Ordering Information Type A

Cable length 005 m 010 m 015 m 020 m 030 m 040 m 050 m 075 m 100 m Part No. 124 26 Part No. 230 012 Part No. 124 27 Part No. 124 28 Part No. 124 29 Part No. 124 30 Part No. 124 31 Part No. 124 32 Part No. 124 33
Connection Cable Type B

Part Part Part Part Part Part Part Part Part No. No. No. No. No. No. No. No. No. 230 230 230 230 230 230 230 230 230 013 014 015 016 017 018 019 020 021
Connection Cable
Cable length 005 m 010 m 015 m 020 m 030 m 040 m
1)
Type C
Part No. 124 55 Part No. 230 022 Part No. 124 56 Part No. 124 57 Part No. 124 58
1)
Type E
Part Part Part Part Part Part No. No. No. No. No. No. 124 163 124 124 124 124 63 69 64 65 66 67
Longer cable runs are not specified because of the RS 232 C connection
53 C16
Operating Units for Active Sensors DISPLAY ONE

Cost-effective, compact single channel display unit for the transmitters from the THERMOVAC series and for PTR 90.

- Power supply voltage for the transmitters - Four digit mantissa in the range from 5 x 10-9 to 2000 mbar - Readout selectable between mbar, Torr or Pascal - 0 to 10 V chart recorder output via plug-in screw terminals - The switching threshold of the transmitters has been looped through to plug-in terminals - Transmitter threshold settings can be displayed by a single key press on the transmitter - Compact bench top enclosure (1/4 19 in., 2 HU) - For fitting into 19 in., 3 HU racks - Supply voltage 100 - 240 V
M3 - 3,2 mm
Connectable Sensors
THERMOVAC - TTR 100 - TTR 211 - TTR 216 S - TTR 90 - TTR 90 S - TTR 91 - TTR 91 S - TTR 96 S PENNINGVAC - PTR 90
66 78
85
91,5 105,5
106,5
102 170 172,5
Dimensional drawing and panel cut-out for the DISPLAY ONE
C16 54
Technical Data
Number of measurement channels Display for measured values Display range Unit of measurement (selectable) Switching thresholds Chart recorder output (Ra 2.5 k) Main connection EURO version US version V / Hz V / Hz mbar (Torr)
DISPLAY ONE
1 digital, 7 segment LED 5 x 10-9 to 2000 (3.8 x 10-9 to 1500) mbar, Torr, Pascal from the transmitter are run to a terminal strip 0 - 10 Volt, characteristic corresponds to the connected transmitter
100 - 240 / 50/60 100 - 240 / 50/60
EURO version, including mains cord US version, including mains cord THERMOVAC transmitter PENNINGVAC transmitter PTR 90 Connection cable, FCC 68 on both ends, 8 way, shielded 005 m 010 m 015 m 020 m 030 m 040 m 050 m 075 m 100 m Adapter panel for installation in a 3 HU, 19 in. rack
DISPLAY ONE
Part No. 230 001 Part No. 235 001
see section Active Sensors
Part No. 230 005
55 C16
DISPLAY TWO / THREE

Cost-effective, operating and display units for the transmitters from the THERMOVAC and PENNINGVAC series. All channels are displayed simultaneously.

- Power supply voltage for the transmitters - Display range from 1 x 10-9 to 2000 mbar (0.75 x 10-9 to 1500 Torr) - Readout selectable between mbar, Torr or Pascal - Adjustable switching thresholds with variable hysteresis, floating changeover contacts and visual indication of the switching status in the display - Option of entering gas correction factors for PENNINGVACs - Separate chart recorder outputs 0 - 10 V for each measurement channel - Compact bench top enclosure (1/4 19 in., 3 HU) - For fitting into 19 in., 3 HU racks
Connectable Sensors
THERMOVAC - TTR 211 - TTR 216 S - TTR 90 - TTR 91 - TTR 96 S - TTR 100 - TTR 100 S2 PENNINGVAC
M3 - 3,5 mm
- PTR 90 - PTR 225

122,4 106,0 122,4 162 164,5 128,4
- PTR 225 S - PTR 237
91,5 106,0
3,5 mm
91,5 106,5
Dimensional drawing and panel cut-out for the DISPLAY TWO and THREE
C16 56
Technical Data
Number of measurement channels Display for measured values Display range Unit of measurement (selectable) Gas type correction (for PTR) Sensor connection Sensor power supply Electrical outputs Switching threshold Number Adjustment range Hysteresis Relay contact Load rating Ready relay Relay contact Load rating V DC mbar (Torr) 1x
DISPLAY TWO
2 digital, 7 segment LED, 4 digits 10-10 to 2000 (0.75 x 10-10 - 1500)
DISPLAY THREE
3 digital, 7 segment LED, 4 digits 1 x 10-10 to 2000 (0.75 x 10-10 - 1500) mbar, Torr, Pascal factor adjustable FCC68 (RJ45) 24 screw terminal
mbar, Torr, Pascal factor adjustable FCC68 (RJ45) 24 screw terminal
2 (1 per channel) sensor dependent adjustable floating changeover contact 60 V, 1 A DC / 30 V, 1 A AC
3 (1 per channel) sensor dependent adjustable floating changeover contact 60 V, 1 A DC / 30 V, 1 A AC
Chart recorder output (Ra 10 k)
normally open contact 60 V, 1 A DC / 30 V, 1 A AC 0 - 10 V per measurement channel, output characteristic corresponds to the connected transmitter PENNINGVAC PTR: high voltage on
normally open contact 60 V, 1 A DC / 30 V, 1 A AC 0 - 10 V per measurement channel, output characteristic corresponds to the connected transmitter PENNINGVAC PTR: high voltage on 85 - 240 / 50 - 60 < 15 +5 to +50 1.4 (3.09) 40
Control input Mains connection Power consumption Nominal temperature range Weight Protection class V AC / Hz W C kg (lbs) IP
85 - 240 / 50 - 60 < 10 +5 to +50 1.3 (2.87) 40
EURO version, including mains cord US version, including mains cord THERMOVAC transmitter PENNINGVAC transmitter Connection cables for THERMOVAC and PENNINGVAC (Type A)
DISPLAY TWO
Part No. 230 024 Part No. 235 024 see section Active Sensors see section Active Sensors
DISPLAY THREE
Part No. 230 025 Part No. 235 025 see section Active Sensors see section Active Sensors
see section Connection Cables for Active Sensors
57 C16
CENTER ONE
Universal compact display and operating unit for the active sensors from the CERAVAC, THERMOVAC, PENNINGVAC and IONIVAC series.

- Power supply voltage for the transmitters - Display range from 1 x 10-10 to 2000 mbar - Automatic switchover to exponential readout of the measured data depending on the pressure range - Readout selectable between mbar, Torr or Pascal - Adjustable switching threshold with variable hysteresis, floating changeover contact and visual indication of the switching status on the display - Zero correction for both display and chart recorder output through a key when using CERAVAC transmitters - Option of entering gas correction factors for PENNINGVACs - Chart recorder output 0 - 10 Volt - RS 232 C interface with adjustable baud rate - Relay output for error signalling - Compact bench top enclosure (1/4 19 in., 2 HU) - For fitting into 19 in., 3 HU racks
Connectable Sensors
THERMOVAC - TTR 211 - TTR 216 S - TTR 90 - TTR 91 - TTR 96 S - TTR 100 - TTR 100 S2 PENNINGVAC - PTR 90 - PTR 225 - PTR 225 S
M3 - 3,2 mm
- PTR 237 CERAVAC

68 78 85
- CTR 90
91,2 105 106,5 204,5 285 287,5
- CTR 91 - CTR 100 IONIVAC
Dimensional drawing and panel cut-out for the CENTER ONE
- ITR 90 - ITR 100 - ITR 200 S - ITR 200 SL
C16 58
Technical Data
Number of measurement channels Display for measured values Display range Unit of measurement (selectable) Gas type correction Sensor connection Sensor power supply Electrical inputs and outputs Switching threshold Number Adjustment range Hysteresis Relay contact Load rating Error message Relay contact Load rating V DC mbar (Torr)
CENTER ONE
1 digital, 7 segment LED, 5 digits 1 x 10-10 to 2000 (0.75 x 10-10 to 1500) mbar, Torr, Pascal, Micron factor adjustable 15 way Sub-D socket FCC68 (RJ45) 24 9 way Sub-D plug
1 sensor dependent adjustable floating changeover contact 60 V, 0.5 A DC / 30 V, 0.5 A AC
Chart recorder output (Ra 10 k) Control input
floating normally open contact 60 V, 0.5 A DC / 30 V, 0.5 A AC 0 - 10 Volt, characteristic corresponds to the connected transmitter PTR: high voltage on ITR 100: emission on 9 way Sub-D socket
Interface RS 232 C Mains connection Power consumption Weight Protection class V AC / Hz W kg (lbs) IP
85 V - 264 / 50-60 < 30 0.85 (1.9) 30
EURO version with 2 m EURO mains cord US version with 2 m US mains cord THERMOVAC, PENNINGVAC, CERAVAC and IONIVAC transmitters Connection cables for THERMOVAC and PENNINGVAC (Type A), CERAVAC (Type B analog, Type C digital) and IONIVAC (Type C) Adapter panel for installation in a 3 HU, 19 in. rack Screw terminal for the 9 way output socket
CENTER ONE
Part No. 230 002 Part No. 235 002
Part No. 230 005
Part No. 230 006
59 C16
CENTER TWO / THREE

Universal display and operating units for the active sensors from the CERAVAC, THERMOVAC, PENNINGVAC and IONIVAC series. All channels are displayed simultaneously.

- Power supply voltage for the transmitters - Display range from 1 x 10-10 to 2000 mbar (0.75 x 10-10 to 1500 Torr) - Automatic switchover to exponential presentation of the measured data dependent on the pressure range - Readout selectable between mbar, Torr, Micron or Pascal - Adjustable switching thresholds with variable hysteresis, floating changeover contacts and visual indication of the switching status in the display, freely assignable to the individual measurement channels - Zero correction for both display and chart recorder output through a key when using CERAVAC transmitters - Option of entering gas correction factors for PENNINGVACs - Separate chart recorder outputs 0 - 10 V for each measurement channel - Additional chart recorder output 0 - 10 V programmable to several measurement channels - RS 232 C interface with adjustable baud rate - Relay output for error signalling - Compact bench top enclosure (1/4 19 in., 3 HU) - For fitting into 19 in., 3 HU racks
Connectable Sensors
THERMOVAC - TTR 211 - TTR 216 S - TTR 90 - TTR 91 - TTR 96 S - TTR 100 - TTR 100 S2 PENNINGVAC - PTR 90 - PTR 225 - PTR 225 S - PTR 237 CERAVAC - CTR 90 - CTR 91
M3 - 3,2 mm
- CTR 100 IONIVAC

122,5 128,5 112
- ITR 90 - ITR 200 S
91,5 104,5
106,5
206 290 293,5
- ITR 200 SL
Dimensional drawing and panel cut-out for the CENTER TWO and THREE
C16 60
Technical Data
Number of measurement channels Display for measured values Display range Unit of measurement (selectable) Gas type correction Sensor connection Sensor power supply Electrical outputs Switching threshold Number Adjustment range Hysteresis Relay contact Load rating Error message Relay contact Load rating V DC mbar (Torr) 1x
CENTER TWO
2 digital, 7 segment LED, 5 digits 10-10 to 2000 (0.75 x 10-10 to 1500)
CENTER THREE
3 digital, 7 segment LED, 5 digits 1 x 10-10 to 2000 (0.75 x 10-10 to 1500) mbar, Torr, Pascal, Micron factor adjustable 15 way Sub-D socket FCC68 (RJ45) 24 25 way Sub-D socket independently assignable 6 sensor dependent adjustable floating changeover contact 60 V, 0.5 A DC / 30 V, 0.5 A AC
mbar, Torr, Pascal, Micron factor adjustable 15 way Sub-D socket FCC68 (RJ45) 24 25 way Sub-D socket independently assignable 4 sensor dependent adjustable floating changeover contact 60 V, 0.5 A DC / 30 V, 0.5 A AC
Chart recorder output (Ra 10 k)
floating normally open contact 60 V, 0.5 A DC / 30 V, 0.5 A AC 0 - 10 V per measurement channel, output characteristic corresponds to the connected sensor, in addition one chart recorder output can be programmed PENNINGVAC PTR: high voltage on 9 way Sub-D socket
floating normally open contact 60 V, 0.5 A DC / 30 V, 0.5 A AC 0 - 10 V per measurement channel, output characteristic corresponds to the connected sensor, in addition one chart recorder output can be programmed PENNINGVAC PTR: high voltage on 9 way Sub-D socket 90 - 250 / 50 - 60 65 +5 to +50 1.2 (2.65) 20
Control input Interface RS 232 C Mains connection Power consumption Nominal temperature range Weight Protection class V AC / Hz W C kg (lbs) IP
90 - 250 / 50 - 60 45 +5 to +50 1.1 (2.43) 20
EURO version with 2 m EURO mains cord US version with 2 m US mains cord THERMOVAC, PENNINGVAC, CERAVAC and IONIVAC transmitters Connection cables for THERMOVAC and PENNINGVAC (Type A), CERAVAC (Type B) and IONIVAC (Type C) Screwed connection for 9 way Sub-D socket
CENTER TWO
Part No. 230 004 Part No. 235 004
CENTER THREE
Part No. 230 003 Part No. 235 003
Part No. 230 006
Part No. 230 006
Leybold Vacuum Full Line Catalog 2006
61 C16
PIEZOVAC PV 20
This complete vacuum gauge offers accurate and cost-effective measurements in the range between 1 and 2000 mbar (0.75 and 1500 Torr), or 0.1 and 200 mbar (0.075 and 150 Torr).

- Complete instrument: Sensor and cable included - Dual LCD display combines the advantages of analog and digital readouts - Clear display of pressure and operating status with analog trend indication, can also be read from a great distance - Logarithmic/linear 0 to 10 V chart recorder output - Compact bench-top unit (1/4 19 in., 3 HU), which may also be installed in panal cut-outs and 19 in. racks - Ceramic absolute pressure sensor which is highly corrosion resistant - THERMOVAC sensors TR 211, TR 212 and TR 216 may be alternativily connected - CE mark
- General pressure measurements in the fine and rough vacuum range, in connection with vacuum furnaces and analytical instruments - Monitoring the operation of backing pumps and vacuum systems - Replacement of mercury manometers in the lab and in production lines
Sensors
The PIEZOVAC PV 20 is delivered complete with a DI 2000 or DI 200 sensor. The sensor is supplied fully aligned for operation. For information on the THERMOVAC sensors, see chapter Activ Sensors.
C16 62
Technical Data
Display range Display mbar (Torr)
PIEZOVAC PV 20
0.1 to 2000 (0.075 to 1500) digital: 7 segment LCD, analog: LCD bar
Measurement uncertainty with DI 200/201/2000 Sensor Unit of measurement (selectable) Chart recorder output (Ra 2,5 k)
% FS
0.2 mbar, Torr, Pa, Micron 0 to 10 V, linear divisions for absolute pressure sensors, about 10.5 V during faults 0 to 10 V, logarithmic divisions for THERMOVAC sensors (1.67 V/decade)
Main connection 50/60 Hz (selectable) Power consumption Storage temperature range Nominal temperature range Max. rel. humidity Weight, approx. Dimensions (W x H x D) Cable length, max. Connectable sensors
V VA C C
90 to 130 / 180 to 250 9 -40 to +60 0 to 40 80 2 (4.4) 106.5 x 128.5 x 172 100 TR 211/212/216, DI 200/201/2000/2001
% n.c. kg (lbs) mm m
Complete with 2 m long main cord and DI 2000 sensor, with 5 m long cable, 230 V AC, Measurement range 1 - 2000 mbar (0.75 - 1500 Torr) Complete with 2 m long main cord and DI 200 sensor, with 5 m long cable, 230 V AC, Measurement range 0.1 - 200 mbar (0.075 - 150 Torr) Calibration
PIEZOVAC PV 20
Part No. 157 96
Part No. 157 97
Options 19" installation frame 1/4 19" blank panel
Part No. 161 00 Part No. 161 02
63 C16
Ultra High Vacuum Gauges IONIVAC IM 540

The 3-channel display and operating unit IONIVAC IM 540 offers, by combination of up to 4 different principles of measurement Pirani, capacitive, Bayard-Alpert and Extractor, complete coverage and control of the vacuum pressure in the range between 10-12 mbar and atmospheric pressure.

- Precise UHV pressure measurements with the Bayard-Alpert sensor IE 414 (offering excellent longterm stability) or the Extractor sensor IE 514 (offering an extremely low X-ray limit of < 1 x 10-12 mbar) - 1 measurement channel for IONIVAC sensor (Bayard-Alpert or Extractor) - Possibility of simultaneously connecting a second IONIVAC sensor - Degassing of the anode through electron bombardment with time-limit - Continuous UHV measurement also during the degassing phase (up to +250 C with bakeable gauge head cable) - 2 measurement channels for direct connection of transmitters from the series THERMOVAC TTR and CERAVAC CTR - Selectable pressure units (mbar, Torr, Pascal, Micron) - Display of a single measurement channel with pressure trend through analogue bargraph or simultaneous display of all measurement channels - Two adjustable thresholds with adjustable hysteresis and freely assignable to the measurement channels
198 209
Connectable Sensors
- Compact benchtop enclosure (1/2 19 in., 3 HU) - RS 232 C interface provided as standard - Simple software updates possible through the RS 232 interface - Profibus interface (optional) - CE mark - Bayard-Alpert sensor IE 414 - Extractor sensor IE 514 (see Chapter Additional Sensors) combined with - THERMOVAC TTR 211, TTR 216 S, TTR 90, TTR 91 and TTR 96 S - CERAVAC CTR 90, CTR 91 and CTR 100 (see Chapter Active Sensors) Two passive sensors working with ionization technology (IE 414 and/or IE 514) could be connected simuntaneously to the IONIVAC IM 540 while only one is in operation. A pressure dependent emission control of these sensors is possible if a THERMOVAC TTR or CERAVAC CTR 100/CTR 91 of suitable range overlap is connected.
- Pressure measurement and control in the UHV range - Measurement of ultimate pressure in UHV systems - Checking of ultimate pressure in semiconductor production - Total pressure measurements in the area of cryo technology - Total pressure measurements in calibration systems
228,6 213 355 2,5
Front panel cut out (left) and dimensional drawing (right) for the IONIVAC IM 540
C16 64
Technical Data
Number of measurement channels Bayard-Alpert / Extractor THERMOVAC / CERAVAC Display range Display range Extractor Display range Bayard-Alpert Measurement range switching Units of measurement (selectable) Measurement uncertainty Trend indication Measurement value display rate % mbar (Torr) mbar (Torr) mbar (Torr)
IONIVAC IM 540
3 Channel 1 or 2 Channel 3 and 4 1 x 10-12 to 1100 (0.75 x 10-12 to 825) 1 x 10-12 to 1 x 10-4 (0.75 x 10-12 to 0.75 x 10-4) 1 x 10-11 to 1 x 10-2 (0.75 x 10-11 to 0.75 x 10-2) automatic or decade pre-select mbar, Torr, Pa, Micron 10 of the value displayed bargraph to 1 x 10-2 mbar, 5 s-1 1x -12 to 1 x 10-10 mbar, 0.5 s-1 1 x 10 10-10
Emission current Extractor sensor Bayard-Alpert sensor Emission current shutdown at
mA mA
1.6 0.1 to 10; automatic control p > 1 x 10-2 mbar, broken cathode, short-circuit, interruption of the electric circuit
Bake out power Extractor / Bayard-Alpert Sensor supply, potential for
20 / 40 anode Extractor / Bayard-Alpert: 220 V, cathode Extractor / Bayard-Alpert: 100 V/80 V, Reflector Extractor: 205 V Bayard-Alpert and Extractor - single operation is possible 2 x Bayard-Alpert or Extractor (redundant operation) automatically automatically, pressure dependent, error dependent logarithmic 0 to 10 V (1 V / dec.) or linear 0 to 10 Volt, error indication U > 10.5 V RS 232 C / Profibus
Sensor connections
Measurement system detection Measurement system switchover Chart recorder outputs for Extractor/Bayard-Alpert (Ra 2.5 k) Interface (standard / optional) Switching thresholds (single operation or interval) Mains connection Storage temperature range Nominal temperature range V / Hz C C
2 with floating changeover contact 90 - 264 / 50/60 -40 to +60 +5 to +50
Dimensions of the benchtop instrument (W x H x D) mm Weight, approx. kg (lbs)
213 x 128.5 x 250 3.0 (6.62)
65 C16
IONIVAC IM 540 with 2 m long mains cord (EURO and US) Options Profibus DP interface DKD calibration IONIVAC sensors IE 414, DN 40 CF Replacement cathode IE 414 IE 514, DN 40 CF Replacement cathode IE 514 Gauge head cables for IE 414/514 05 m 10 m 05 m, bakeable up to 200 C Extension cables for IE 414/514 10 m 20 m THERMOVAC Transmitter TTR Connection cable for THERMOVAC (Type A) CERAVAC Transmitter CTR Connection cable for CERAVAC (Type B)
IONIVAC IM 540
Part No. 230 100
Part No. 230 101 see section Miscellaneous
Part Part Part Part
No. No. No. No.
158 158 158 158
66 63 67 61
Part No. 245 002 Part No. 200 02 937 see section Active Sensors see section Connection Cables for Active Sensors see section Active Sensors see section Connection cables for active sensors
C16 66
Notes
67 C16
COMBIVAC CM 51
The COMBIVAC CM 51 covers the complete pressure range between 10-9 and 1000 mbar by combining two measurement principles THERMOVAC and PENNINGVAC providing both monitoring and control functions.

- Compact three channel operating unit for a pressure range from 10-9 to 1000 mbar for passive sensors - Automatic switchover from THERMOVAC operation to Penning (cold cathode) operation - Easy to operate - Keyboard locking through SOFTLOCK - Two adjustable switching thresholds with a relay contact for each measurement channel - Logarithmic chart recorder output 0 - 10 V or 2 - 10 V - Wide range power supply 100 - 240 V - Unit of pressure selectable between mbar, torr und Pascal - Compact, rugged Penning sensor insensitive to operation at high pressures (see Section Sensors) - Aligned and temperature compensated THERMOVAC sensors (see Section Sensors) - Cost-effective replacement sensors and electrodes - Error message for each channel, for example in the case of broken filament, defective sensor line or failed plasma discharge - Compact benchtop enclosure (1/4 19 in., 3 HU) made of metal for installation in front panel cut outs and 19 in. racks - Fully remotely controllable through RS 232 C and Profibus interface - CE mark - RoHS-compliant
M3 - 3,5 mm
122,4 106,0 122,4 128,4
105
91,5 106,0
3,5 mm
91,5 106,5
162 164,5
105
Front panel cut out (left) and dimensional drawing (right) for the CM 51
C16 68
- Universal monitoring the operation of high vacuum pump systems like: Turbomolecular pump systems Diffusion pump systems Cryogenic pump systems - Annealing, melting, brazing and hardening furnaces - Coating systems - Analytical instrumentation - Deployment in thermal radiation resistant and degassable systems is possible - Particle accelerators
Connectable Sensors
THERMOVAC - TR 211 - TR 211 NPT - TR 212 - TR 216 PENNINGVAC - PR 25 - PR 26 - PR 27 - PR 28
69 C16
Technical Data
Number of measurement channels Display range Channels 1, 2 (THERMOVAC) Channel 3 (PENNINGVAC) Unit of measurement (selectable) Measurement uncertainty THERMOVAC PENNINGVAC Measured value display Type of gas (selectable) Switching thresholds Operating mode Adjustable switching thresholds THERMOVAC PENNINGVAC Switching relay hysteresis Relay contact load rating Chart recorder output (default) THERMOVAC PENNINGVAC Interface Mains connection 50/60 Hz Power consumption Storage temperature range Nominal temperature range Max. rel. atmospheric humidity Weight Dimensions (W x H x D) Installation depth Protection class V W C C % n.c. kg mm mm IP mbar mbar
COMBIVAC CM 51
3
mbar mbar
5 x 10-4 to 1000 10-9 to 10-2 mbar, Torr, Pa
20% of the measured value in the range 10-3 to 10-2 mbar / 15% of the measured value in the range 10-2 to 102 mbar 30% of the measured value in the range 10-8 to 10-4 mbar digital, 7 segment LCD, 4 digits factor adjustable 2 per channel single, interval-trigger 5 x 10-3 to 500 1 x 10-8 to 9.9 x 10-3 10% of the trigger value (default), freely adjustable for THERMOVAC and PENNINGVAC AC/DC, max. 30 V / 1 A 0 to 10 V, log. divisions linear: 3 decades, approximately 10.5 V in case of a failure, logarithmic: (1 x 10-3 mbar), 1.67 V/decade logarithmic: (1 x 10-9 mbar), 1.43 V/ decade RS 232 C, RS 485 and Profibus 100 - 240 < 10 -20 to +60 +5 to +50 80 1.4 106.4 x 128.5 x 164.5 approx. 220 40
C16 70
Operating unit COMBIVAC CM 51 including EURO and US mains cord, 2 m with RS 232 C/ 485 with Profibus DB Cable adapter CM 31 - CM 51 DKD calibration Options 19 in. installation frame 1/4 19 in. blank panel THERMOVAC sensors for CM 51 TR 211, DN 16 KF TR 211, 1/8" NPT TR 212, DN 16 KF TR 212, DN 16 CF TR 216, DN 16 KF Gauge head cables for TR sensors 005 m 010 m 015 m 020 m 030 m 040 m 050 m 075 m 100 m PENNINGVAC sensors for CM 51 PR 25, DN 25 KF PR 26, DN 40 KF PR 27, DN 40 CF PR 37, DN 40 CF, degassable Gauge cables for PR sensors 005 m 010 m 015 m 020 m 030 m 040 m 050 m 075 m 100 m
COMBIVAC CM 51
Part No. 230 110 Part No. 230 111 upon request see chapter Oerlikon Leybold Calibration Service
Part No. 161 00 Part No. 161 02
No. No. No. No. No.
157 896 158 157 157
85 33 52 86 87
Part Part Part Part Part Part Part Part Part
No. No. No. No. No. No. No. No. No.
162 162 124 162 124 124 124 124 124
26 27 34 28 35 36 37 38 39
Part Part Part Part
No. No. No. No.
157 136 136 136
52 46 47 48
Part Part Part Part Part Part Part Part Part
No. No. No. No. No. No. No. No. No.
162 162 124 157 124 124 124 124 124
88 89 49 56 50 51 52 53 54
71 C16
Additional Sensors IONIVAC Sensors IE 414/IE 514

These passive sensors use hot cathode ionization technology.
IE 414
- Bayard-Alpert sensing system - Measurement range to 2 x 10-11 mbar (1.5 x 10-11 Torr) - Protection shied welded in place
IE 514
- Extractor sensing system - Reliable to 1 x 10-12 mbar (0.75 x 10-12 Torr) - Significant reduction of X-ray and ion desorption effects

- Exchangeable cathode - High accuracy of the measurements due to individually calibrated sensing system
33 69,4
33 69,4
DN 40 CF 25 12,8
55 DN 40 CF 12,8
66 58 90 98
Dimensional drawing for the IE 414 (left) and IE 514 (right)
C16 72
Technical Data
Measurement range X-ray limit Operating temperature range Degassing temperature at the flange, max. Material Cathode Feedthrough pins Anode Vacuum connection Adjustment data Ion detector potential Cathode potential Anode potential Emission current Heating current for the hot cathode Heating voltage for the hot cathode Sensitivity for nitrogen Bake out operation Electron bombardment Operating units DN mbar (Torr) mbar (Torr) C
IE 414
2 x 10-11 to 10-2 (1.5 x 10-11 to 10-2) 10-11 ( 10-11)
IE 514
10-12 to 1 x 10-4 (10-12 to 7.5 x 10-5) 10-12 ( 10-12)
0 to +80
0 to +80
200 1) / 350 2)
200 1) / 350 2)
Iridium with yttric oxid coating NiFe 42 Pt/Ir 90/10/pt wire 40 CF
IIridium with yttric oxid coating NiFe 42 Mo and CoNiCr 40 CF
V V V mA A V mbar-1 V mA
0 80 220 0.06 to 0.6 1.4 2.7 17 700 30 IM 520, 510, 540
0 100 220 1.6 1.4 3.7 6.6 700 30 IM 520, 510, 540
IONIVAC sensors Replacement cathode
1) 2)
IE 414
Part No. 158 66 Part No. 158 63
IE 514
Part No. 158 67 Part No. 158 61
With bakeable gauge head cable With gauge head cable detached
73 C16
THERMOVAC Sensors TR 211/TR 211 NPT/TR 212/TR 216

These passive sensors use thermal conductivity technology according to Pirani.

- Measurement range 5 x 10-4 to 1000 mbar (3.75 x 10-4 to 750 Torr) - Tungsten or platinum filament - Cost-effective sensing cell - Fully aligned and temperature compensated 0 to +40 C - Constant filament temperature
TR 211
- Aluminum sensing cell with tungsten filament - Improved temperature compensation
TR 216
- Stainless steel sensing cell with platinum filament and ceramics feed through - Well suited for corrosive processes and water vapor atmospheres
TR 211 NPT/TR 212

- Stainless steel sensing cell with tungsten filament - Over-pressure resistant
35
135 (144)
133 (122)
20
40
Dimensional drawing for the TR 211, TR 212 and TR 216; TR 211 NPT in brackets
C16 74
Technical Data
Measurement range
TR 211
TR 211 NPT
TR 212
TR 216
mbar 5 x 10-4 to 1000 5 x 10-4 to 1000 5 x 10-4 to 1000 5 x 10-4 to 1000 -4 to 7.5 x 102) (3.8 x 10-4 to 7.5 x 102) (3.8 x 10-4 to 7.5 x 102) (3.8 x 10-4 to 7.5 x 102) (Torr) (3.8 x 10
Operating temperature range (compensated) Storage temperature range, max. Filament Filament temperature Permissible overload (abs.), max. Volume of the sensing cell, approx. Vacuum connection Materials in contact with the medium
C C
0 to +40 80 tungsten
0 to +40 80 tungsten 110 3 11 1/8" NPT
0 to +40 80 tungsten 110 10 11 16 KF/16 CF
0 to +40 80 platinum 110 10 11 16 KF
C bar cm3 DN
110 3 11 16 KF aluminum, Vacon, glass, tungsten CrNi 8020,
stainless steel, Vacon, stainless steel, Vacon, stainless steel 1.4301 glass, tungsten glass, tungsten (SS 304), CrNi 8020 CrNi 8020 Al2O3 ceramics, epoxy cement CrNi 8020, THERMOVAC TM 21, 22, 23 / COMBIVAC CM 31, 32, 33, 51 / PIEZOVAC PV 20 THERMOVAC TM 21, 22, 23 / COMBIVAC CM 31, 32, 33, 51 / PIEZOVAC PV 20 THERMOVAC TM 21, 22, 23 / COMBIVAC CM 31, 32, 33, 51 / PIEZOVAC PV 20
Operating units
THERMOVAC TM 21, 22, 23 / COMBIVAC CM 31, 32, 33, 51 / PIEZOVAC PV 20
THERMOVAC sensors Series 200 DN 16 KF DN 16 CF DN 1/8" NPT Replacement sensing cell
TR 211
TR 211 NPT
TR 212
TR 216
Part No. 157 85 Part No. E 157 75
Part No. 896 33 Part No. E 896 34
Part No. 158 52 Part No. 157 86
Part No. 157 87 Part No. E 157 77
75 C16
PENNINGVAC Sensors PR 25/PR 26/PR 27/PR 28

These passive sensors use cold cathode ionization technology according to Penning.

- Rugged - Insensitive to air inrushes and vibrations - Easy disassembly and cleaning of the measurement system - Exchangeable cathode plate - Improved ignition characteristic through titanium cathodes
Option
For protection of the PENNINGVAC sensors against contamination, radiation and other disturbing factors the in-stallation of a baffle is recommmended.
50
50
132 94
147 107
DN 25 KF / DN 40 KF
DN 40 CF
Dimensional drawing for the PENNINGVAC PR sensors
C16 76
Technical Data
Measurement range mbar (Torr) kV C C C bar cm3
PR 25
1 x 10-9 to 10-2 (0.75 x 10-9 to 10-2) +3.3/+1.6 -25 to +80 0 to +80 6 1) 21 stainless steel, nichrome, ceramics, titanium
PR 26
1 x 10-9 to 10-2 (0.75 x 10-9 to 10-2) +3.3/+1.6 -25 to +80 0 to +80 6 1) 21 stainless steel, nichrome, ceramics, titanium 0.75 (1.66) 40 KF
PR 27
1 x 10-9 to 10-2 (0.75 x 10-9 to 10-2) +3.3/+1.6 -25 to +80 0 to +80 6 1) 21 stainless steel, nichrome, ceramics, titanium 0.8 (1.66) 40 CF
PR 28
1 x 10-9 to 10-2 (0.75 x 10-9 to 10-2) +3.3/+1.6 -25 to +80 0 to +200 350 6 1) 21 stainless steel, nichrome, ceramics, titanium 0.8 (1.66) 40 CF
High voltage supply (anode potential) Storage temperature range Nominal temperature range Bake out temperature (flange) Permissible overload (abs.) Dead volume Materials in contact with the medium
Weight, approx. Vacuum connection Operating units
kg (lbs) DN
0.75 (1.66) 25 KF
COMBIVAC COMBIVAC COMBIVAC COMBIVAC CM 31, 32, 33 / CM 31, 32, 33 / CM 31, 32, 33 / CM 31, 32, 33 / PENNINGVAC PM 31 PENNINGVAC PM 31 PENNINGVAC PM 31 PENNINGVAC PM 31
PENNINGVAC sensors Replacement cathode plate, titanium (5 pcs., incl. 5 ceramics discs) Replacement anode ring Baffle, with centering ring
1)
PR 25
Part No. 157 52
PR 26
Part No. 136 46
PR 27
Part No. 136 47
PR 28
Part No. 136 48
Part No. EK 162 91 Part No. EK 162 91 Part No. EK 162 91 Part No. EK 162 91 Part No. 200 28 711 Part No. 200 28 711 Part No. 200 28 711 Part No. 200 28 711 Part No. 230 078 Part No. 230 079
When using an ultra sealing gasket at the vacuum connection
Note: PR 26 replaces PR 31, 32, 35 PR 27 replaces PR 36
77 C16
Linear Pressure Sensors DI 200/DI 201/DI 2000/DI 2001/DI 2001 rel

Capacitive pressure sensor based on ceramics technology. Available as absolute or relative pressure sensor.

- Pressure sensor of the two-wire type - Absolute pressure ranges from 0.1 to 200 mbar or 1 to 2000 mbar - Relative pressure range from -1000 mbar to +1000 mbar - Excellent overload characteristic due to the AI2O3 ceramics diaphragm - Highly corrosion resistant - Independent of the type of gas - Vibration resistant - Supply voltage range of 12 to 30 V DC - Linear output signal of 4 to 20 mA - Compact design
- Pressure measurements in the rough vacuum range, and for corrosive media - Chemical process engineering - Vacuum packaging - Drying processes - Measurement of operating and filling pressure, during the production of lamps - Filling systems for brake fluids (DI 201/DI 2001) - Filling systems for refrigerants - Measurement of pressure relative to atmospheric pressure (DI 2001 rel)
80 58
48,5
DN 16 KF
Dimensional drawing for the sensors DI 200/DI 201/DI 2000/DI 2001/DI 2001 rel
C16 78
Technical Data
Measurement range mbar (Torr)
DI 200
0.1 to 200 (0.075 to 150)
DI 201
0.1 to 200 (0.075 to 150)
DI 2000
1 to 2000 (0.75 to 1500)
DI 2001
1 to 2000 (0.75 to 1500)
DI 2001 rel
-1000 to +1000 (-750 to +750) relative pressure 10 0 to +60
Overload range, max. Nominal temperature range Measurement uncertainty 1) ( temperature error) Resolution Reproducibility Linearity Temperature error Zero drift Sensitivity drift Principle of measurement Sensing head supply Output signal Supply voltage Operating range % % % %
bar C
5 0 to +60
5 0 to +60
10 0 to +60
10 0 to +60
FS FS FS FS
0.2 0.05 0.1 0.2
0.2 0.05 0.1 0.2
0.2 0.05 0.1 0.2
0.2 0.05 0.1 0.2
0.2 0.05 0.1 0.2
% FS/10K % FS/10K
0.1 0.15 Capacitive
0.1 0.15 Capacitive
0.1 0.15 Capacitive
0.1 0.15 Capacitive
0.1 0.15 Capacitive
Two-wire system Two-wire system Two-wire system Two-wire system Two-wire system mA V DC V 4 to 20 +24 typ. 12 to 30, ripple 1 Vpp 3 16 KF 0.55 (1.2) 44 Stainless Steel 1.4305 Al2O3 (96 %) Ceramics FPM (FKM) 4 to 20 +24 typ. 12 to 30, ripple 1 Vpp 3 16 KF 0.55 (1.2) 44 Stainless Steel 1.4305 Al2O3 (96 %) Ceramics EPDM 4 to 20 +24 typ. 12 to 30, ripple 1 Vpp 3 16 KF 0.55 (1.2) 44 Stainless Steel 1.4305 Al2O3 (96 %) Ceramics FPM (FKM) 4 to 20 +24 typ. 12 to 30, ripple 1 Vpp 3 16 KF 0.55 (1.2) 44 Stainless Steel, 1.4305 Al2O3 (96 %) Ceramics, EPDM 4 to 20 +24 typ. 12 to 30, ripple 1 Vpp 3 16 KF 0.55 (1.2) 44 Stainless Steel 1.4305 Al2O3 (96 %) Ceramics EPDM
Dead volume Vacuum connection Weight, approx. Protection class Materials in contact with the medium
cm3 DN kg (lbs) IP
Operating units
MEMBRANOVAC MEMBRANOVAC MEMBRANOVAC MEMBRANOVAC MEMBRANOVAC DM 11, DM 12 / DM 11, DM 12 / DM 11, DM 12 / DM 11, DM 12 / DM 11, DM 12 / PIEZOVAC PIEZOVAC PIEZOVAC COMBIVAC COMBIVAC PV 20 / PV 20 / PV 20 / CM 32, 2T CM 32 COMBIVAC COMBIVAC COMBIVAC CM 32, 2T CM 32, 2T CM 32, 2T
Linear absolute pressure sensor, complete with 5 m long connection cable and connecting plug Extension cable 10 m 20 m
1)
DI 200
DI 201
DI 2000
DI 2001
DI 2001 rel
Part No. 158 12 Part No. 200 04 112 200 02 645
Part No. 158 14 Part No. 200 04 112 200 02 645
Part No. 158 13 Part No. 200 04 112 200 02 645
Part No. 158 15 Part No. 200 04 112 200 02 645
Part No. 245 000 Part No. 200 04 112 200 02 645
Sum of linearity, hysteresis and reproducibility
79 C16
Spare Sensors for Older Operating Units
Type
Replacement spare sensor IE 10 Replacement spare sensor IE 20 Replacement spare sensor IE 21 Replacement spare sensor IE 100 DN 25 KF DN 40 CF Replacement spare cathode Replacement spare sensor TR 301 Replacement sensing cell Replacement sensing cell Replacement sensing cell
1)
Corresponding Sensors/ Operating Units

IM 110, IM 110 D IM 210, IM 210 D, IT 230 IM 210, IM 221
ITR 100 ITR 100 IE 220 TM 320, CM 350, IM 520, DM 11, DM 12, CM 32 TR 201/901 DN 16 KF TR 201/901 NPT TR 301
Part No. E 163 61 Part No. E 163 67 Part No. 158 58 1) Part No. 157 40 Part No. 162 09 1) Part No. 896 76 1) Part No. 157 43
to be discontinued
C16 80
Notes
81 C16
Pressure Control System Move
e,g. PC, PLC, ... (optional)
Process Chamber
Sensor Controller CMove 1250 or
PLC, PC
Interface module IMove 1250
Control valve Move 1250
Control valve Move X
C16 82
Control Valves Move 1250 and Move X
Control valve Move X
Control Valve Move 1250 Advantages to the User

- Extended control range from 1 x 10-6 to 1250 mbar x l/s - High controllable gas throughput - Corrosion resistant owing to FPM (FKM)/stainless steel - In combination with CMove the valve closes automatically in the event of a power failure - Valve driven either by the controller CMove 1250 or by a PC or a PLC through the IMove interface - Electromotive pressure control with variable gas flow (upstream regulation) or with variable conductance (downstream regulation)
Control Valve Move X Advantages to the User

- 6 different valves for the gas flows ranging from 10 sccm FS to 5000 sccm FS - Fast response - Electromagnetic pressure regulation with variable gas flow (upstream regulation) - Normally closed - Many adapters are available
Gas flow [sccm] 49 23.5 35 2.8x0.5 M14x1
600
Control valve open

500 400 300
49
200
17
100
60
60
(17) 33
6.5 8
SW 17 Electrical connection Protection cap
Control valve closed

0 5 10 15 20 25 30 35 40 45 50 55 60 65 70 75 80
Coil current [mA]
DN 10 ISO-KF 18 OD 1/4"
Example of a gas flow curve (mean value of 500 sccm FS) at a differential pressure of Vp = 1 bar for Move X
Gas flow [mbar l/s]

1000 100
152 90
30
DN 16 ISO-KF
14.5 OD 6 mm
10 1 1E-1 1E-2 1E-3 1E-4 1E-5
35
14.5
1E-6 0 1 2 3 4 5 6 7 8 9 10
USTG [V]
Dimensional drawing for the Move 1250
Dimensional drawing for the Move X with connection adapter
Gas flow curve of the Move 1250
83 C16
Technical Data
Vacuum connection
Control Valve Move 1250

DN 16 ISO-KF
Move X
Threaded connection M 14 x 1 for accepting of: Flange connection DN 10 ISO-KF Pipe connection 1/4" Pipe connection 6 mm Any, preferably vertical 1 x 10-9 1 x 10-8 mbar to 1000 mbar (max. pressure in closing direction 2 bar) 10 sccm FS 2), 3) 50 sccm FS 2), 3) 100 sccm FS 2), 3) 500 sccm FS 2), 3) 1000 sccm FS 2), 3) 5000 sccm FS 2), 3)
Installation orientation Leak tightness Pressure range Gas flow 1) with filter, on the inlet side mbar x l/s
Any 1 x 10-9 1 x 10-8 mbar to 2.5 bar (absolute)
5 x 10-6 to 1250 mbar x l/s
with filter, on the inlet and the vacuum side Power supply Supply voltage Power consumption Current consumption Actuation Digital Analog Type of protection Closing time / opening time Response time Ambient temperature Bake out temperature Valve body Actuator Material Valve body Valve needle, valve disc Filter Seals Dosing sleeve Armature disc Guide tube Weight
1)
mbar x l/s
5 x 10-6 to 1000
V DC VA mA
24 ( 10%) 12 500, 20 to 30 (closed circuit current) Step motor CMove or IMove 1250 0 to 10 40 3/4 +5 to +40
0 to 24 2.5 max. Coil CMove 1250 51 < 30 +5 to +50
V DC IP s ms C
C C
80 60
+5 to +50 (during operation) 80 (without power supply)
Stainless steel 1.4435 Stainless steel 1.4301 Stainless steel 1.4404 FPM (FKM) Fluorplastomer kg (lbs) 0.5 (1.1)
Stainless steel 1.4301 FPM (FKM) Stainless steel 1.4510 Stainless steel 1.4105 0.08 (0.18)
2)
For air at a differential pressure of p = 1 bar mbar x l s 1 sccm = 1.69 x 10-2 Minimum flow: in each case 1% of FS (full-scale)
3)
C16 84
Ordering Information Move 1250

Control valve Move 1250 Move X with gas flow 1) 0010 sccm 0050 sccm 0100 sccm 0500 sccm 1000 sccm 5000 sccm Accessories Flange DN 10 KF Tube 1/4" Tube 6 mm Filter for the inlet or vacuum side consisting of filtering candle, O-ring and two securing rings Filter set consisting of 10 filter discs and 10 circular springs Connection cable CMove 1250 - Control valve Move 1250 03 m 05 m 10 m 15 m 20 m 25 m CMove 1250 - Control valve Move X 03 m 05 m 10 m 15 m 20 m 25 m
1)
Control Valve Move X

Part No. 230 202 Part No. 230 203 Part No. 230 204 Part No. 230 205 Part No. 230 206 Part No. 230 207
Part No. 230 219
Part No. 109 63
Part No. 109 64
To select the right components please ask us for information
85 C16
Controller CMove 1250
Technical Applications
- Simple to operate - Self-explanatory LCD display and function keys - Analog/digital inputs/outputs and interfaces - Digital input valve control, switchover Pressure and gas flow adjustment Digital output valve control, error message - Adjustable PID control algorithms - 99 pre-programmed PI control algorithms for fast and simple operation - For installation or tabletop use (1/4 19 in.)
The controller CMove in connection with the electric control valve Move 1250 or Move X is suited for applications in the areas like for example - Semiconductor industry - Analytical - Coating - Quality control - Surface treatment as well as in all applications where simple, fast and accurate pressure control is desired and necessary.
106 3,5 91 228,5 3 103
128
122.5
110
command
edit
Dimensional drawing for the CMove 1250
C16 86
Technical Data
Power supply Mains voltage, 50/60 Hz Power consumption Control types
V AC VA
90 - 250 50
Control inaccuracy Display Display units (selectable) Pressure Flow Display range Pressure control CERAVAC THERMOVAC PENNINGVAC IONIVAC with 0 bis 10 V linear Flow control with MOVE 1250 with MOVE X with analog output AA 2 Measurement uncertainty Operating mode
Auto = (PI) adjustable in 1 to 99 selectable steps PID = PID is user adjustable 5% F.S. sensor LCD 64 x 128 Pixel
mbar, Torr, Pa, mV mbar l/s, Torr l/s, Pa l/s, mV
mV
0 to 10.000 CLOSED, 5.0 x 10-6 to 1.25 x 10+3 mbar x l/s CLOSED, 1.0 x 10-5 to 1.0 x 10+2 mbar x l/s 0 to 10 000 0.2 FS Sensor Gas flow regulation (upstream regulation) Pressure regulation (downstream regulation) Local operation or remote control Flow matching, opening/closing of external valves / operating mode flow/regulation / switching on of emission/degas Valve position indication; valve fault; sensor fault; status message for sensor and valve; pressure regulation upstream/downstream 0 to 10 V DC setpoint pressure/flow 0 to 10 V DC, Pressure sensor signal, valve signal, valve position MOVE 1250 RS 232 C, RS 485 C 1/4 19", for installation or tabletop use
mV %
Operation Digital input
Digital output
Analog input Analog output
Serial interface Housing Weight Temperature Operation Storage Protection class kg (lbs)
1.65 (3.64)
C C IP
+5 to +50 -40 to +60 30 (EN 60 529)
87 C16
Controller CMove 1250 Control valve Move 1250 Move X with gas flow 0010 sccm 0050 sccm 0100 sccm 0500 sccm 1000 sccm 5000 sccm Connection cable CMove 1250 - Control valve Move 1250 03 m 05 m 10 m 15 m 20 m 25 m CMove 1250 - Control valve Move X 03 m 05 m 10 m 15 m 20 m 25 m Sensor cable TTR 90, TTR 100, TTR 211, TTR 216 PTR 225, PTR 237 005 m 015 m 020 m 030 m 040 m 050 m 075 m 100 m ITR 90, ITR 100, ITR 200 005 m 015 m 020 m 030 m CTR 90, CTR 91, CTR 100 005 m 010 m 015 m 020 m 030 m 040 m 050 m 075 m 100 m

Part No. 230 200 Part No. 230 219 Part Part Part Part Part Part No. No. No. No. No. No. 230 230 230 230 230 230 202 203 204 205 206 207
Part Part Part Part Part Part Part Part Part Part Part Part
No. No. No. No. No. No. No. No. No. No. No. No.
230 230 230 230 230 230 230 230 230 230 230 230
220 221 222 223 224 225 210 211 212 213 214 215
Part Part Part Part Part Part Part Part Part Part Part Part Part Part Part Part Part Part Part Part Part
No. No. No. No. No. No. No. No. No. No. No. No. No. No. No. No. No. No. No. No. No.
124 124 124 124 124 124 124 124 124 124 124 124 230 230 230 230 230 230 230 230 230
26 27 28 29 30 31 32 33 55 56 57 58 013 014 015 016 017 018 019 020 021
C16 88
Interface Module IMove 1250 for Move 1250

- Status query and valve position
The interface module IMove 1250 connects a RS 232C interface (for example from a computer or a PLC) to the digital interface of the Move 1250 control valve.
Technical Data
Temperature Operation Storage Protection class Operating voltage Current consumption IMove 1250 Move 1250 Provide upfront fusing Interface Mounting Support rails
Interface Module IMove 1250
C C IP V DC
+5 to +50 -10 to +65 30 24 10%
mA mA
< 50 (own consumption) < 500 1 AT RS 232 C
EN 50022-35 (symmetrical) EN 50035-G32 (asymmetrical) g (lbs) 40 (0.09)
Weight
Interface module IMove 1250
Interface Module IMove 1250

Part No. 230 201
54
18
Computer or PLC
62
Dimensional drawing for the IMove 1250
Connection of the IMove 1250
89 C16
Low Pressure Safety Switch PS 113 A

Switch indicating whether or not the pressure has reached the level of the atmospheric pressure after venting. Preset diaphragm pressure switch set to a trigger of 6 mbar (4 Torr) below atmospheric pressure.

- Rugged design - High switching capacity - Corrosion protected - Easy to use - IP 44 protection - Can be connected to a programmable control
- Venting facilities - Safety shutdown of vacuum systems - Load locks - Increased switching capacity when using the switching amplifier SV 110
Technical Note
Due to the diaphragm material used (EPDM) the PS 113 A is not suited for applications in which the process gas contains large quantities of helium. Owing to helium permeation, the leak rate of the diaphragm for helium amounts to values 1 x 10-4 mbar x l/s.
72 50
48,5
DN 16 KF
Dimensional drawing for the low pressure safety switch PS 113 A
C16 90
Technical Data
Switching pressure Return switching pressure Switching inaccuracy mbar (Torr) mbar (Torr) mbar (Torr)
Low Pressure Safety Switch

Approx. 6 (4.5) below atmospheric pressure 3 (2.3) below atmospheric pressure 2 (1.5)
Max. permissible operating pressure (abs.) mbar (Torr) Storage temperature range Nominal temperature range Switching contact Contact life Switching capacity C C
2000 (1500) -25 to +85 0 to +85 Changeover contacts, gold-plated, for prog. controls > 105 switching cycles 100 mA / 24 V AC 30 mA / 24 V DC 6.3 mm flat plug
Electrical connection Vacuum connection Helium permeation Internal volume Materials in contact with the medium DN mbar x l/s cm3
16 KF 1 x 10-4 2 Stainless steel 1.4305, Stainless steel 1.4310, Stainless steel 1.4300 PTFE coated, EPDM
Weight Protection class
g (lbs) IP
315 (0.70) 44
Low pressure safety switch PS 113 A, DN 16 KF; complete with 3 m long cable
Low Pressure Safety Switch
Part No. 230 011
91 C16
Pressure Switch PS 115

Rugged absolute pressure switch with electrical switching contact and a adjustable switching pressure between 0.5 and 2000 mbar (0.4 and 1500 Torr). Through the differential pressure adapter (optional) the PS 115 pressure switch may be converted to operate as a differential pressure switch. The adapter consists of a DN 16 KF flange with screw-in thread and a sealing arrangement, and it is screwed into the PS 115 instead of the adjustment valve. The operating range extends to 2000 mbar (1500 Torr). Brief overloading to 3000 mbar (2250 Torr) is permissible without impairing switching accuracy. In this operating range differential values of +5 to -20 mbar (+3.75 to -15 Torr) can be adjusted via the set screw.

- High switching accuracy ( 0.1 mbar) - Stable long term operating characteristics - Rugged, corrosion protected design - Increased switching capacity (floating) when using the switching amplifier SV 110 - Switching contact (n.c.) in the reference chamber and thus protected against corrosion - For operating pressures up to 3 bar - For high ambient temperatures - Upon request, the switching threshold may be set in the factory
Option: Differential pressure adapter DN 16 KF
21 133 105 19 51
14 18 DN 16 KF 85
Dimensional drawing for the pressure switch PS 115
C16 92
Technical Data
Switching range Overload limit Sensitivity Switching hysteresis Temperature coefficient Nominal temperature range briefly (max. 8 h) continuous Switching contact Switching voltage Switching current (max.) Contact resistance, max. Electrical connection Protection class Vacuum connection Materials in contact with the medium Measurement chamber Reference chamber Volume of the measurement chamber Volume of the reference chamber Weight cm3 cm3 kg (lbs) V mA k mbar (Torr) mbar (Torr) mbar (Torr) mbar (Torr) %/K
Pressure Switch
0.5 to 2000 (0.375 to 1500) 3000 (2250) 0.1 (0.75) 0.5 (0.375) 0.4 of the switching value
C C
120 0 to +90 Normally closed, gold-plated, for prog. controls 24 10 1 Plug (DIN 43 650) 65 16 KF
IP DN
Stainless steel 1.4301; 1.4401; 1.4310; 1.3541; FPM (FKM) Stainless steel 1.4301; 1.4401; 1.3541; glass; gold 4 20 1.3 (2.87)
Pressure Switch PS 115, DN 16 KF Pressure switch adjustment For floating installations without SV 110, Clamping ring DN 16 KF, plastic Centering ring, DN 16 KF, plastic Option Differential pressure adapter, DN 16 KF, for connection to the PS 115 Spare parts kit PS 115 SV 110 switching amplifier
Pressure Switch
Part No. 160 04 Part No. 160 05
Part No. 200 28 306 Part No. 200 28 307
Part No. 160 74
Part No. E 160 06 Part No. 160 78
93 C16
Switching Amplifier SV 110

The diaphragm contact of the pressure switches is connected on one side to ground and is rated to 24 V / 10 mA max. When wanting to switch higher voltages or currents, a switching amplifier will be needed. The switching amplifier is equipped with powerful floating changeover contacts. The output relay is energized as soon as the pressure drops below the switching threshold set up on the pressure switch. The electrical connections are provided via screw terminals and are run out of the plastic enclosure through PG fittings.

- Increased ratings for the switch - Changeover contact
55,5 15 4,2
121 109
80 Pg 9 Pg 9 21,5 163
21 50,5
Dimensional drawing for the switching amplifier SV 110
C16 94
Technical Data
Mains supply, 50/60 Hz Power consumption Output relay Switching voltage / current Switching power, max. Response time Relaise time Control circuit Ambient temperature, max. Weight, approx VA
Switching Amplifier
110/130/220/240 V, selectable 3
V/A VA ms ms V / mA C kg (lbs)
250 / 5 500 30 7 24 / 10 50 0.36 (0.79)
Switching amplifier SV 110
Switching Amplifier
Part No. 160 78
95 C16
Diaphragm Pressure Regulators MR 16/MR 50

The MR 16/50 diaphragm regulators are absolute pressure regulators which automatically adapt the pumping speed of a vacuum pump depending on the amount of gas, without the need for an external power supply.

- Non-incremental, automatic pressure control - Simple setting of the control pressures - High control accuracy - Corrosion protected stainless steel design - Easy to disassemble for cleaning and maintenance - Trouble-free operation in ex. areas - Built-in isolation valves for the process connection and the vacuum pump (MR 16)
- Distillation processes of all kinds - Solvent recovery - Drying processes - Temperature control on bath cryostats - Degassing of liquids and plastics
135
98 120 58,5
39
67 130
92,5 165
Dimensional drawing for the diaphragm regulator MR 16 (left) and MR 50 (right)
C16 96
Technical Data
Diaphragm Pressure Regulator MR 16 MR 50

10 to 1000 (7.5 to 750) 2% of the pressure control (10 - 90% of flow) 50 +5 to +100 -25 to +60 0.3 5 3 FPM (FKM)/EPDM stainless steel 1.4571 Any see dimensional drawing 40 KF 1/8" 8.0 (17.6) mbar (Torr) 10 to 1000 (7.5 to 750) 2% of the pressure control (10 - 90% of flow) m3/h C C %/K ms bar 16 +5 to +100 -25 to +60 0.3 5 3 FPM (FKM)/EPDM stainless steel 1.4571 Any see dimensional drawing 2x DN 3x thread R kg (lbs) 16 KF 1/8" 2.7 (6.0)
Control range Control inaccuracy
Throughput Nominal temperature range Storage temperature range Temperature coefficient Settling time Permissible overload for brief periods Diaphragm material Housing material Installation orientation Dimensions Vacuum connection Measurement connection Weight, approx.
Diaphragm Pressure Regulator MR 16 MR 50

Part No. 160 27
Diaphragm pressure regulator MR 16, DN 16 KF MR 50, DN 40 KF Options Stainless steel measurement flange, DN 16 KF, for connection to a reference and/or process chamber or pumping stud KALREZ diaphragm Spare Parts EPDM diaphragm and seal kit Viton diaphragm and seal kit Seal kit MR 50, incl. EPDM and Viton diaphragms Adjustment screw for the adjustable valve, complete with seal
Part No. 160 25
Part No. 160 26
Part No. 160 26 Part No. 200 28 597
Part No. EK 160 29 Part No. EK 160 31
Part No. EK 160 32
Part No. 240 001
97 C16
Miscellaneous Oerlikon Leybold Vacuum Calibration Service

Calibration of vacuum gauges in the pressure range from 10-9 to 1000 mbar (10-9 to 750 Torr) as DKD or factory calibration.

- Clear reference to the reference quantities - Reproducible measurements - Constantly high quality over time - Reliable checking of existing gauges - Unambiguous description of the process Since 1981 Oerlikon Leybold Vacuum has been offering to all customers an impartial calibration service for gauges and sensors of any make. A DKD calibration certificate or a factory calibration certificate is issued for every calibration. Instruments with insufficient long-term stability or such instruments where the principle of measurement is not suited for calibration, can not be calibrated. - If an unambiguous reference is required for a large number of pressure gauges - If an unambiguous description for processes is required - If for experiments and processes unambiguous traceability of the measured pressures to basic quantities is demanded by the authorities - If testing to DIN/ISO 9000 is required in the following areas - Research - Thin-film engineering - Manufacture of systems - Military - Energy - Chemistry production
DKD / Factory Calibration

It is the task of the German Calibration Service (DKD) to ensure traceability of industrial measurements and testing to national standards. The German Calibration Service is supported jointly by the Federal Institution for Physics and Technology (PTB), the industry, the Federal Minister for Economics and the Western European Metrology Club (WEMC). The transfer standards in the DKD calibration facility used by Oerlikon Leybold Vacuum are checked regularly (recalibrated) by the PTB. Within the framework of the German Calibration Service, the calibration system at Oerlikon Leybold Vacuum has been checked and approved by the PTB and the applied transfer standards have been calibrated by the PTB. Factory calibrations were performed with standards which have not been calibrated directly at the PTB; instead the transfer standards of the in-house DKD calibration service are used. Thus traceability to national standards is ensured in both cases.
Calibrated vacuum gauges are used under the following conditions: - If the requirements concerning reproducibility and comparability of experiment runs are high
- Production of pharmaceuticals and herbicides - Sputtering systems - Aircraft and space industry - Manufacture of lamp
C16 98
Technical Data
Calibration range mbar to 10-3
DKD Calibration
to 10-5 to 10-9
DKD calibration Part No. 157 12
DKD Calibration
Part No. 157 13 Part No. 157 14
Technical Data
Calibration range mbar to 10-3
Factory Calibration
to 10-5 to 10-8
Factory calibration Part No. 154 22
Factory Calibration
Part No. 154 23 Part No. 154 24
Calibration Systems are discribed in the Product Section C10.
99 C16
Sales and Service

Germany
Oerlikon Leybold Vacuum GmbH Bonner Strasse 498 D-50968 Cologne Phone: +49-(0)221-347 1234 Fax: +49-(0)221-347 1245 [email protected] www.oerlikon.com Oerlikon Leybold Vacuum GmbH Sales Area North/Northeast Branch Office Berlin Industriestrasse 10b D-12099 Berlin Phone: +49-(0)30-435 609 0 Fax: +49-(0)30-435 609 10 [email protected] Oerlikon Leybold Vacuum GmbH Sales Area South/Southwest Branch Office Munich Karl-Hammerschmidt-Strasse 34 D-85609 Aschheim-Dornach Phone: +49-(0)89-357 33 9-10 Fax: +49-(0)89-357 33 9-33 [email protected] [email protected] Oerlikon Leybold Vacuum GmbH Sales Area West & Benelux Branch Office Cologne Bonner Strasse 498 D-50968 Cologne Phone: +49-(0)221-347 1270 Fax: +49-(0)221-347 1291 [email protected] Oerlikon Leybold Vacuum GmbH Service Competence Center Emil-Hoffmann-Strasse 43 D-50996 Cologne-Suerth Phone: +49-(0)221-347 1439 Fax: +49-(0)221-347 1945 [email protected] Oerlikon Leybold Vacuum GmbH Mobil Customer Service Emil-Hoffmann-Strasse 43 D-50996 Cologne-Suerth Phone: +49-(0)221-347 1765 Fax: +49-(0)221-347 1944 [email protected] Oerlikon Leybold Vacuum Dresden GmbH Service Competence Center Zur Wetterwarte 50, Haus 304 D-01109 Dresden Service: Phone: +49-(0)351-88 55 00 Fax: +49-(0)351-88 55 041 [email protected]
Europe
Belgium Oerlikon Leybold Vacuum Nederland B.V. Belgisch bijkantoor Leuvensesteenweg 542-9A B-1930 Zaventem Sales: Phone: +32-2-711 00 83 Fax: +32-2-720 83 38 [email protected] Service: Phone: +32-2-711 00 82 Fax: +32-2-720 83 38 [email protected] France Oerlikon Leybold Vacuum France S.A. 7, Avenue du Qubec Z.A. de Courtaboeuf 1 - B.P. 42 F-91942 Courtaboeuf Cedex Sales and Service: Phone: +33-1-69 82 48 00 Fax: +33-1-69 07 57 38 [email protected] [email protected] Oerlikon Leybold Vacuum France S.A. Valence Factory 640, Rue A. Bergs B.P. 107 640 F-26501 Bourg-ls-Valence Cedex Service: Phone: +33-4-75 82 33 00 Fax: +33-4-75 82 92 69 [email protected] Great Britain Oerlikon Leybold Vacuum UK LTD. Silverglade Business Park Leatherhead Road Unit 2 KT9 2QL Chessington, Surrey (London) Sales: Phone: +44-13-7273 7300 Fax: +44-13-7273 7301 [email protected] Service: Phone: +44-20-8971 7030 Fax: +44-20-8971 7003 [email protected] Italy Oerlikon Leybold Vacuum Italia S.r.l. Via Trasimeno 8 I-20128 Milano Sales: Phone: +39-02-27 22 31 Fax: +39-02-27 20 96 41 [email protected] Service: Phone: +39-02-27 22 31 Fax: +39-02-27 22 32 17 [email protected] Netherlands Oerlikon Leybold Vacuum Nederland B.V. Proostwetering 24N NL-3543 AE Utrecht Sales and Service: Phone: +31-(30) 242 6330 Fax: +31-(30) 242 6331 [email protected] [email protected] Spain Oerlikon Leybold Vacuum Spain, S.A. C/ Huelva 7 E-08940 Cornell de Llobregat (Barcelona) Sales: Phone: +34-93-666 43 11 Fax: +34-93-666 43 70 [email protected] Service: Phone: +34-93-666 46 16 Fax: +34-93-685 43 70 [email protected] Sweden Oerlikon Leybold Vacuum Scandinavia AB Box 9084 SE-40092 Gteborg Sales and Service: Phone: +46-31-68 84 70 Fax: +46-31-68 39 39 [email protected] [email protected] Visiting/delivery address: Datavgen 57B SE-43632 Askim Switzerland Oerlikon Leybold Vacuum Schweiz AG Leutschenbachstrasse 55 CH-8050 Zrich Sales: Phone: +41-44-308 40 50 Fax: +41-44-302 43 73 [email protected] Service: Phone: +41-44-308 40 62 Fax: +41-44-308 40 60 [email protected]
Asia
P.R. China Oerlikon Leybold Vacuum (Tianjin) International Trade Co. Ltd. Beichen Economic Development Area (BEDA), No.8 Western Shuangchen Road Tianjin 300400 China Sales and Service: Phone: +86-22-2697 0808 Fax: +86-22-2697 4061 Fax: +86-22-2697 2017 [email protected] [email protected] [email protected] Oerlikon Leybold Vacuum (Tianjin) Co. Ltd. Beichen Economic Development Area (BEDA), No.8 Western Shuangchen Road Tianjin 300400 China Sales and Service: Phone: +86-22-2697 0808 Fax: +86-22-2697 4061 [email protected] [email protected] [email protected] Oerlikon Leybold Vacuum (Tianjin) International Trade Co. Ltd. Shanghai Branch: No.33 76 Fu Te Dong San Road Waigaoqiao Free Trade Zone Shanghai 200131 China Sales and Service: Phone: +86-21-5064-4666 Fax: +86-21-5064-4668 [email protected] [email protected] [email protected] Oerlikon Leybold Vacuum (Tianjin) International Trade Co. Ltd. Guangzhou Office and Service Center 1st F, Main Building Science City Plaza, No.111 Science Revenue, Guangzhou Science City (GZSC) 510663, Guangzhou, China Sales: Phone: +86-20-223 23 980 Fax:+86-20-223 23 990 [email protected] [email protected] [email protected] Oerlikon Leybold Vacuum (Tianjin) International Trade Co. Ltd. Beijing Branch: 1-908, Beijing Landmark Towers 8 North Dongsanhuan Road Beijing 100004 China Sales: Phone: +86-10-6590-7622 Fax: +86-10-6590-7607 [email protected] [email protected] India Oerlikon Leybold Vacuum India Pvt Ltd. EL 22, J-Block MIDC Bhosari Pune 411026 India Sales and Service: Phone: +91-20-3061 6000 Fax: +91-20-2712 1571 [email protected] [email protected] Japan Oerlikon Leybold Vacuum Japan Co., Ltd. Headquarter 23-3, Shin-Yokohama 3-chome Tobu A.K. Bldg. 4th Floor Kohoku-ku Yokohama-shi 222-0033 Sales: Phone: +81-45-471-3330 Fax: +81-45-471-3323 [email protected] [email protected] Oerlikon Leybold Vacuum Japan Co., Ltd. Osaka Sales Office 3F, Shin-Osaka Terasaki No.3 Bldg. 1-5-28 Nishi-Miyahara Yodogawa-ku, Osaka-shi Osaka 532-0004 Phone: +81-6-6399-6271 Fax: +81-6-6399-6273 [email protected] [email protected] Oerlikon Leybold Vacuum Japan Co., Ltd. Tsukuba Technical Service Center Kogyo Danchi 21, Kasuminosato, Ami-machi, Inashiki-gun Ibaraki-ken, 300-0315 Service: Phone: +81-298 89 2841 Fax: +81-298 89 2838 [email protected] [email protected] South Korea Oerlikon Leybold Vacuum Korea Ltd. 3F. Jellzone 2 Tower Jeongja-dong 159-4 Bundang-gu Sungnam-si Gyeonggi-do Bundang 463-384, Korea Sales: Phone: +82-31 785 1367 Fax: +82-31 785 1359 [email protected] Service: 623-7, Upsung-Dong Cheonan-Si Chungcheongnam-Do Korea 330-290 Phone: +82-41 589 3035 Fax: +82-41 588 0166 [email protected] Singapore Oerlikon Leybold Vacuum Singapore Pte Ltd. 1 Science Park Road Singapore Science Park 2 #02-12, Capricorn Building Singapore 117528 Sales and Service: Phone: +65-6303 7000 Fax: +65-6773 0039 [email protected] [email protected] Taiwan Oerlikon Leybold Vacuum Taiwan Ltd. No 416-1, Sec. 3 Chunghsin Road., Chutung Hsinchu County 310 Taiwan, R.O.C. Sales and Service: Phone: +886-3-500 1688 Fax: +886-3-583 3999 [email protected] [email protected]
America
USA Oerlikon Leybold Vacuum USA Inc. 5700 Mellon Road USA-Export, PA 15632 Phone: +1-724-327-5700 Fax: +1-724-325-3577 [email protected] Sales: Eastern & Central time zones Phone: +1-724-327-5700 Fax: +1-724-333-1217 Pacific, Mountain, Alaskan & Hawaiian time zones Phone: +1-408-436-2828 Fax: +1-408-436-2849 Service: Phone: +1-724-327-5700 Fax: +1-724-325-3577 Latin America Oerlikon Leybold Vacuum USA Inc. Brazilian Office Av. Dria 360 cj. 12 Campo Belo 04635-070 So Paulo SP BRAZIL Sales: Phone: +55 11-3554 3117 Fax: +55 11-3554 3117 [email protected]
08.09
Oerlikon Leybold Vacuum GmbH Bonner Strasse 498 D-50968 Cologne Phone: +49-(0)221-347 0 Fax: +49-(0)221-347 1250 [email protected]
LV_10029_2009
www.oerlikon.com/ leyboldvacuum

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Total Pressure Gauges

C16.03 C16.04 C16.06 C16.08

C16.54 C16.56 C16.58 C16.60

General Applications for Vacuum Gauges

Analytical instruments and surface physics

System control/pressure control

Oerlikon Leybold Vacuum Full Line Catalog

Select the Combination of Sensor and

5 x 10-9 5x 5x 10-9 10-9

0.1 0.1 1 1 -1000

200 200 2000 2000 +1000

Oerlikon Leybold Vacuum Full Line Catalog

Gauges which is ideal for your Application

1, 2, 3 indicate the channel to which the sensor may be connected

Oerlikon Leybold Vacuum Full Line Catalog

Basic Terms of Vacuum Metrology

Capacitance Vacuum Gauge

Capsule Vacuum Gauge

Diaphragm Vacuum Gauge

Oerlikon Leybold Vacuum Full Line Catalog

Cold Cathode Ionization Vacuum Gauge (Penning)

Hot Cathode Ionization Vacuum Gauge

Selection of the right Vacuum Gauge

Oerlikon Leybold Vacuum Full Line Catalog

Connection Accessories for Small Flanges

Part No. 230 078

Part No. 883 73 Part No. 883 74 Part No. 882 75

Part No. 883 75 Part No. 883 76 Part No. 882 77

Part No. 883 75 Part No. 883 76 Part No. 882 77

Part No. 883 98 Part No. 230 079

Part No. 883 77 Part No. 883 78 Part No. 882 78

Part No. 231 93 515

Part No. 839 41 Part No. 839 00

Part No. 839 43 Part No. 839 01

Oerlikon Leybold Vacuum Full Line Catalog

Products Mechanical Gauges Bourdon Vacuum Gauges

Advantages to the User

- Drying processes - For explosion hazard applications - Vacuum conveying systems

Materials in contact with the medium

Oerlikon Leybold Vacuum Full Line Catalog

Capsule Vacuum Gauges

Advantages to the User

132 14,5 116 60 73 68

Oerlikon Leybold Vacuum Full Line Catalog

Capsule Vacuum Gauges

Max. inclination when installed Materials in contact with the medium

Capsule Vacuum Gauges

Oerlikon Leybold Vacuum Full Line Catalog

Diaphragm Vacuum Gauge DIAVAC DV 1000

Advantages to the User

45 170 166 4,5 203,5 152 156 155

Dimensional drawing and panel cut-out for the DIAVAC DV 1000

Oerlikon Leybold Vacuum Full Line Catalog

Materials in contact with the medium

Part No. 160 67 1) Part No. 896 06 1) Part No. 157 12

Part No. 231 93 515 Part No. 240 000

Complete with centering ring and sintered filter

Oerlikon Leybold Vacuum Full Line Catalog

Handheld Measuring Instruments THERMOVAC Sensor TM 90

Advantages to the User