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Micro Milling Process for the Rapid Prototyping of Microfluidic Devices

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DOI: 10.5772/intechopen.96723

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Chapter

Micro Milling Process for the

Rapid Prototyping of Microfluidic
Devices
Muhammad Syafiq Rahim and Abang Annuar Ehsan

Abstract

Micro milling process has become an attractive method for the rapid prototyp-
ing of micro devices. The process is based on subtractive manufacturing method
in which materials from a sample are removed selectively. A comprehensive review
on the fabrication of circular and rectangular cross-section channels of microflu-
idic devices using micro milling process is provided this review work. Process and
machining parameters such as micro-tools selection, spindle speed, depth of cut, feed
rate and strategy for process optimization will be reviewed. A case study on the rapid
fabrication of a rectangular cross section channel of a microflow cytometer device
with 200 um channel width and 50 um channel depth using CNC micro milling pro-
cess is provided. The experimental work has produced a low surface roughness micro
channel of 20 nm in roughness and demonstrated a microflow cytometer device that
can produce hydrodynamic focusing with a focusing width of about 60 um.

Keywords: rapid prototyping, micro milling, microflow cytometer,

surface roughness, subtractive manufacturing

1. Introduction

The field of microfluidics refers to systems that use millimeter to nanometer-

sized fluids for analysis purposes [1]. The system analyzes small samples from
micro to nano. Microfluidics is a combination of several fields, such as molecular
analysis, molecular biology, biological defense and electronic electronics [2].
Each of these areas contributes to the advancement of microfluidic technology
and increased interest in microfluidics [1]. Microflow cytometer are used in the
microfluidic flow system, which is a system consisting of a combination of micro-
fluidic and optical, where optical systems are required for analysis purposes [3].
The latest technology for micro flow cytometers focuses on particle focusing to be
tested in microfluidics, fluid-controlled shrinkage, optical shrinkage and applica-
tion integration and integration [3, 4]. Microfluidics are very relevant as they
have several advantages, such as requiring only small-sized fluids, and indirectly
allowing microfluidics to be tested using micro-to-nano samples [5]. Also, the
advantage of microfluidics is that it can be used on small chips. This allows the
chip to be used as a portable tool, especially for point of care diagnostic devices
(Point of care) (POC). These advantages allow microfluidics to be able to analyze
the sample information quickly.

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Advances in Micro- and Nanofluidics

One of the rapidly evolving phenomena in microfluidic studies is hydrodynamic

focusing [6]. Hydrodynamic focusing is a technique that concentrates the flow in
the center of the device by manipulating the flow rate of the side [7, 8]. During
hydrodynamic focusing the middle path is concentrated by being narrowed by the
side path flow. This method of hydrodynamic focusing is important in increasing
microfluidic sensitivity [9]. Hydrodynamic focusing can be used to accurately posi-
tion positions of cells, particles and sensor targets [9]. This hydrodynamic focusing
method can be used for the purpose of manipulating cells found in blood composi-
tion such as white blood cells and red blood cells [10].
Microfluidic devices can initially be designed using Micro-Electro-Mechanical
(MEMS) method [11], the manufacture of silicon-based microfluidic devices
usually using this method of Micro-Electro-Mechanical System (MEMS) [3], where
its progress is in line with the advancement of semiconductor technology [11]. The
processes in this MEMS method involve processes such as oxidation, ion applica-
tion, low pressure chemical vapor deposition (LPCVD), diffusion, splash, etc. [11].
In addition, for the manufacture of microfluidic rapid prototypes, microfluidic
devices can be made using PDMS materials using soft lithographic manufacturing
methods or PMMA materials using micro milling.
However, micro milling for microfluidics using PMMA material although a simple
and inexpensive method, however, the manufacturing period is longer and not suit-
able for manufacturing devices in large quantities [12]. This micro milling method for
microfluidics is an automated process suitable for the rapid manufacture of prototype
devices [12]. Micro milling is a subtractive fermentation process, in which cutting
tools are used to remove bulk material from the workpiece. The micro-milling system
basically has a work table for XY positions for workpieces, cutting [12].

2. Theory

2.1 Microchannel geometrical shape

The advancement of microfabrication enables the construction of micro channels

with micrometer dimensions. Since microfluidic are usually integrated into micro-
systems, it is important to determine the characteristics of fluid flow in microfluidic
for better microfluidic design and operation. From Figures 1 and 2, microfluidics
can be designed using circular or rectangular shapes. Theoretically, the best form
of fluid flow mechanism is a circular channel. But, it is not so noticeable when the
device has reached the level of micro or nano scale. First of all, a circular duct has
a minimum surface area exposed to fluid that can reduce friction between the wall
surface and the liquid. So, the energy required is less to pump water for a given flow

Figure 1.
Microchannel with rectangular and circular geometrical shape [13].

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Micro Milling Process for the Rapid Prototyping of Microfluidic Devices
DOI: http://dx.doi.org/10.5772/intechopen.96723

Figure 2.
Microfluidic with rectangular and circular geometrical shape.

rate. Second, the shape of the circle is efficient for handling internal stress. Using
a circular channel, the pressure power distribution is uniform across the channel
circumference. The presence of sharp corners in the rectangular duct will focus on
the edges and sometimes this area needs to be strengthened to resist pressure.
Cell traps with hydrodynamic methods also show the advantage of a round
shape to isolate a cell by reducing the applied pressure. By doing this, cells will have
a higher percentage to survive in extreme flow conditions [14]. The purpose of
this study was to simulate the flow of fluid in the micro-channel using COMSOL
Microfluidic. The rectangle was chosen because it is widely used during the fabrica-
tion process of PDMS devices with soft lithography.

2.2 Surface roughnes of microchannel

The terms surface roughness and surface finish are widely used in the manufac-
turing sector to measure surface after machining. Average roughness is the arithme-
tic mean of the surface roughness profile measure of the mean line, and is the most
widely used and universally recognized surface roughness parameter. The surface
roughness of the machine in the final micro milling process depends on commonly
used process parameters such as tool geometry, spindle speed, feed rate and depth of
cut [15]. There are other factors of the micro milling process that affect the surface
roughness such as the tip of the micro milling, the breakdown of the tool, the break-
down of the tool (and the nature of the workpiece which has a high quality surface).
Therefore, factors such as vibration and chip removal where these factors are not
critical in the macro scale, can have a significant impact on the surface produced on
the micro scale. The surface produced after micro milling is found to be affected by
the end radius of the micro-tool and the feed rate. It is reported that when the 2 μm
of the end radius, and in the state of the feed rate is reduced, the surface roughness
increases, indicating that, the optimal feed rate can produce the lowest surface
roughness. Cutting speed d an cutting depth affects the surface roughness on the
PMMA material [16]. Further, it is found from previous studies as well, depth cut-
ting has the greatest impact while, cutting speed has the lowest effect [16]. Surface
roughness also depends on machining parameters and workpiece conditions, tool
and heat conditions were also found to affect surface roughness [16]. In addition,
the resulting surface quality after machining can be improved by increasing the
rigidity and accuracy of the equipment. Because there are various manufacturing
methods for polymer-based microfluidics, changes in the surface of the polymer
after the manufacture of microfluids attract the interest of many researchers. Many
researchers have tried various methods to reduce surface roughness for microfluid-
ics to improve optical quality and improve biological capabilities.
Table 1 shows the surface roughness produced using the micro milling
technique. Based on previous studies, it was found that the surface roughness
produced by the micro milling can reach up to as little as 38 nm. However, surface

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Advances in Micro- and Nanofluidics

Diameter Material Spindle speed Feed rate Depth of Surface Reference

cut roughness

0.8 mm Carbide 2000 rpm 2 mm/min 1.5 μm 0.352 μm [17]

0.45 mm Diamond 150,000 rpm 5 μm/flute 50 μm 38 nm [18]

Coated

0.2 mm N/A 20,000 rpm 300 mm/min 10 μm 0.13 μm [19]

0.1 mm to Carbide 10,000 rpm 20 mm/min 10–20 μm 70–85 nm [20]

0.5 mm

0.8 mm Carbide 30,000 rpm 2.65 mm/min 40 μm 128.24 nm [21]

Table 1.
Surface roughness using different of material, spindle speed, feed rate and depth of cut.

roughness can be achieved up to 38 nm if the micro tool used is coated with

the diamond. Micro–tool coated with high-cost diamond are not an option for
micro-manufacturing.

3. Case study

3.1 Design of microfluidic

Since this study uses a micro milling a microfluidic design with a rectangular
geometry will be used. From Figure 3, the designed depth is 50 um, 200 um wide,
and the circle on the inlet and outlet has a diameter of 0.6 um. Figure 3 shows
microfluidics with 2 layer PMMA to be fabricated. From Figure 3, the top layer
has 4 holes with a diameter of 0.8 mm, the design of the hole is based on the need
to place a tube with an outer diameter of 0.7 mm. While the design for the bottom
layer of microfluidics, there is a circular inlet and outlet with a diameter of 0.6 mm
which is smaller than the outer diameter of the tube, to allow the tube to be above
the microfluidic layer and the entire fluid can enter the micro flow.
The tool used in this research is a 0.2 mm diameter tool made of carbide mate-
rial, has 2 flutes and Aluminum coated. While the workpiece that will be used in
this research is Poly (methyl methacrylate) or referred to as acrylic which has a
thickness of 2 mm.

Figure 3.
Top and bottom layer of microfluidic.

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Micro Milling Process for the Rapid Prototyping of Microfluidic Devices
DOI: http://dx.doi.org/10.5772/intechopen.96723

3.2 Fabrication of microfluidic using micromilling

The Taguchi method as shown in Table 2 is used taking into account 3 main
parameters, namely, spindle speed, cutting depth, and feed rate to obtain the lowest
surface roughness. The Taguchi method which uses 3 parameters along with 3
stages is used as Table 2. Spindle speeds consisting of 4000 rpm, 5000 rpm, and
6000 rpm, and spindle speeds lower than 10,000 rpm are used because PMMA
material will burn when high speeds are used, as high speeds can increase the
temperature on the tool can cause micro flow size the result is greater than desired.
The cutting depths used for each cut are 0.01 μm, 0.025 μm, and 0.05. This is to
ensure that the discarded chip is smaller than the tip of the tool. While the feed rate
used is 10 mm/min, 15 mm/min, and 20 mm/min. Due to the high feed rate it can
cause the tool to break. The total number of experiments produced is 9 experiments
as shown in Table 3, each surface roughness average will be recorded, based on the
smallerer the better method, and the smallest surface roughness average parameter
will be taken. Then the optimal parameters will be repeated 10 times to ensure that
the parameters produce consistent and stable results.
After analyzing the experimental data from Table 4, the lowest surface rough-
ness can be obtained by using a spindle speed of 4000 rpm, a feed rate of 10 mm/
min and a depth cut of 0.01 mm. However, based on Table 4, it can be seen that
while the spindle speed is 6000 rpm, cutting depth and feed rate do not have a
significant impact on surface roughness, where the average surface roughness is
recorded around 100 nm to 200 nm, at the same time, increasing cutting depth
and feed rate, increasing average surface roughness resulting. Moreover, it can
be observed that all the resulting surface roughness is less than 450 nm. Next, to
validate the experiment, 10 microcontrollers were built on PMMA with spindle
speed parameters of 4000 rpm, feed rate of 10 mm/min and depth depth of 0.01.

Factors Level 1 Level 2 Aras 3

Spindle speed (rpm) 4000 5000 6000

Depth of cut (μm) 0.01 0.025 0.05

Feed rate (mm/min) 10 15 20

Table 2.
Machining parameter (Taguchi method).

Experiment number Spindle speed (rpm) Depth of cut (mm) Feed rate (mm/min)

1 4000 0.010 10

2 4000 0.025 15

3 4000 0.050 20

4 5000 0.010 15

5 5000 0.025 20

6 5000 0.050 10

7 6000 0.010 20

8 6000 0.250 10

9 6000 0.050 15

Table 3.
Experiment number (Taguchi method).

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Advances in Micro- and Nanofluidics

Number Spindle speed (rpm) Depth of cut (mm) Feed rate (mm/min) Surface roughness (nm)

1 4000 0.01 10 67.3018

2 4000 0.025 15 267.2102

3 4000 0.05 20 406.8926

4 5000 0.01 15 170.2524

5 5000 0.025 20 350.468

6 5000 0.05 10 442.6494

7 6000 0.01 20 119.4901

8 6000 0.025 10 139.6821

9 6000 0.05 15 170.2192

Table 4.
Surface roughness by using different machining parameters.

During the machining process, a drop of water is placed on the substrate to remove
debris during machining. The average surface roughness obtained from 10 valida-
tion experiments is shown in Table 5, where the average roughness is 24.0824 nm
with a standard deviation of 4.2509 nm.
Selecting the cutting depth range and the feed rate with less than the minimum
value will result in an increase in machining time, however, the cutting depth value,
spindle speed and high feed rate, can increase the risk of damaged tool as reported
[22]. From Table 4 a total of 9 microchannel with a depth of 50 μm and a width of
200 μm were tested using the Alicona Infinite Focus Microscopy (IFM) 3D Optical
Profiler used to measure the roughness of the surface on the cut of microchannels.
The area of surface roughness shown at Figure 4. Analytical factors can be used to
determine the main cutting parameters in the micro milling of the PMMA sub-
strate. Based on Table 4, the larger the resulting range, the greater the influence of
these factors on surface roughness, in this research, the depth of cutting indicates
the largest range. This shows that the depth of cutting has a great influence on
surface roughness. Whereas, the feed rate indicates a low range, this means that the
feed rate has the least influence on surface roughness.

Number Surface roughness (nm)

1 21.3106
2 20.1148

3 26.7489

4 23.628

5 19.3741

6 23.5145

7 22.9668

8 27.5627

9 33.6486

10 21.9548

Average 24.08238

Table 5.
Surface roughness by using optimal machining parameters.

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Micro Milling Process for the Rapid Prototyping of Microfluidic Devices
DOI: http://dx.doi.org/10.5772/intechopen.96723

Figure 4.
Area for surface roughness measurement using infinite focus microscopy.

Table 4 also shows the optimal cutting parameters for obtaining minimal
surface roughness. Table 4 shows the combination of machining parameters to
obtain the smallest surface roughness is the spindle speed 4000 rpm, cutting depth
0.01 μm and feed rate 10 mm/min. Based on Table 4, the average surface roughness
average achieved for this parameter is 67.3018 nm. Moreover, from this study, based
on Figure 5, if the study is compared by looking at the same parameter readings,
shows that the spindle speed of 6000 rpm can produce the lowest surface roughness
compared to the spindle speed of 4000 rpm and 5000 rpm. It shows that the cutting
depth of 0.01 μm produces the lowest surface roughness followed by 0.025 mm
and 0.05 mm. Furthemore, the feed rate of 15 mm/min produces the lowest surface
roughness followed by 10 mm/min and 20 mm/min. Based on Table 4, it shows that
the cutting depth most influences the roughness of the resulting surface followed by
spindle speed and feed rate. This is in line with the theory that low cutting depths
can result in low chip loads, this allows lower surface roughness to be achieved. As
previously discussed, low depth of cut can result in low surface roughness.

3.3 Hydrodynamic focusing experiment

After successful microfluidic installation, the experiment was continued

by testing the hydrodynamic focus. This feature is important to ensure that the
designed microfluidics can operate, there are several factors that can cause the
microfluidics to be unable to operate, firstly due to clogged microwaves, secondly
because the bond between the 2 wafers is not strong causing small holes that cause
leakage. Based on Table 6, the resulting focusing width is related to the sheath and
sample flow rate ratio. The resulting focusing width can be adjusted according to
the desired application. However, the sample flow width must be adjusted accord-
ing to the specific cell size for detection, at the same time, allowing cells to pass
through them one by one on the sample flow, this is to increase the sensitivity of
the constructed device. Reynold numbers are kept in low condition, this is to avoid
uninterrupted flow of microfluidics [23].
Based on this hydrodynamic focusing experiment shown at Figure 6, the side
path with a flow rate of 3000 μl/min and the flow rate for the sample path of
10 μl/min can produce a focusing width as low as 39 μm. However, with an sheath
flow rate of 3000 μl/min and a sample path flow rate of 100 μl/min, the result-
ing focusing width is 60 μm. Both of these results answer for the objective of the
study, namely the production of hydrodynamic focusing around 60 μm. Based on
Table 6 it can also be observed, that if a flow rate ratio of 10 and 100 is used, a

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Advances in Micro- and Nanofluidics

Figure 5.
Result of surface roughness by comparing same machining parameter.

Ratio Sheath flow rate Sample flow rate Width of hydrodynamic focusing

10 1000 μl/min 100 μl/min 89 μm

100 1000 μl/min 10 μl/min 67 μm

30 3000 μl/min 100 μl/min 60 μm

300 3000 μl/min 10 μl/min 39 μm

Table 6.
Width of hydrodynamic focusing.

focusing width of 67 μm and 89 μm can be produced. From the simulation results

show that effective hydrodynamic focusing occurs only when the sheath flow rate
is higher than the center flow rate.
Furthermore, from the simulation results of nonlinear behavior will occur
when too high a ratio is used. Increasing the ratio of sheath flow rate to large central

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Micro Milling Process for the Rapid Prototyping of Microfluidic Devices
DOI: http://dx.doi.org/10.5772/intechopen.96723

Figure 6.
Setup for hydrodynamic focusing experiment.

flow will only have a small effect on hydrodynamic focusing and may even cause
hydrodynamic focusing not to occur if too high a flow rate is used. As shown in
Figure 7, the hydrodynamic focusing that occurs is in the state of laminate and fully
developed. This experiment can also give the impression that the bonding technique
between 2 PMMA wafers using ethanol material was successfully performed, since
hydrodynamic focusing can be formed. However, it should be noted that the hydro-
dynamic focus that occurs is not only due to the inflow rate by the fluid only, but the
microfluidic geometry constructed also has a significant impact on the characteris-
tics of hydrodynamic focusing. Especially when taking into account the rectangular
geometry is easier to do by a micro milling than a round design. The forces formed
to control hydrodynamic focusing are more complex than hydrodynamic focusing
calculated only on the flow rate ratio [24].
An important aspect of designing and operating for the purpose of hydrody-
namic focusing is to identify the position of the focus flow formed. Both lateral
flows should have the same flow rate to ensure that the focusing flow flows in the
middle of the micro flow. If the asymmetric focusing flow, the focusing flow will
be deducted from the flow axis. Based on Figure 7, it can be observed that the

Figure 7.
Hydrodynamic focusing.

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Advances in Micro- and Nanofluidics

hydrodynamic focusing width will decrease if the ratio (sheath flow rate to the main
flow rate) increases. It can also be observed from the experiment, it shows that the
results of focusing will shrink if a larger ratio is used.

4. Conclusion

In this study, simple, low-cost and real-time methods have been used to detect
touch between tools and workpieces. The objective of this study is to find the
optimal parameters to achieve low surface roughness using a micro milling, from
the data trends obtained, the parameters to obtain the lowest surface roughness
are 4000 rpm spindle speed, 10 mm/min billing rate and 0.01 μm cutting depth.
However, from the data obtained as well, it shows that water droplets placed on the
tool during cutting also contribute to the reduction of surface roughness. In addi-
tion, there are several other parameters that can be studied in the future, namely
the tool material (e.g. diamond), the smaller tool size, and the type of coolant used.
Since microfluidics manufacturing studies designed using micro milling are still
limited, its function can be tested by looking at the hydrodynamic focusing that
occurs. This study uses 2 PMMA-based wafers and is bonded using thermal-assisted
ethanol. Based on the experiments conducted, the resulting hydrodynamic focusing
has a width as small as 39 μm if the sheath flow rate and the center flow rate used
are 3000 μl/min and 100 μl/min. Apart from using fluids such as water and dyes,
fluids that have properties such as blood can also be used so that more accurate
results can be produced.

Acknowledgements

The authors would like to thank Universiti Kebangsaan Malaysia, in particu-

lar the Nanophotonics Lab, Institute of Microengineering and Nanoelectronics
(IMEN) for providing the facilities and for supporting this research through the
Research University Grant scheme, GUP-2019-071.

Author details

Muhammad Syafiq Rahim and Abang Annuar Ehsan*

Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan
Malaysia (UKM), Bangi, Malaysia

*Address all correspondence to: [email protected]

© 2021 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms
of the Creative Commons Attribution License (http://creativecommons.org/licenses/
by/3.0), which permits unrestricted use, distribution, and reproduction in any medium,
provided the original work is properly cited.

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Micro Milling Process for the Rapid Prototyping of Microfluidic Devices
DOI: http://dx.doi.org/10.5772/intechopen.96723

References

[1] E. K. Sackmann, A. L. Fulton, and D. [10] A. Rajawat and S. Tripathi, “Disease

J. Beebe, “The present and future role of diagnostics using hydrodynamic flow
microfluidics in biomedical research.,” focusing in microfluidic devices: Beyond
Nature, vol. 507, no. 7491, pp. 181-189, flow cytometry,” Biomed. Eng. Lett.,
Mar. 2014, doi: 10.1038/nature13118. no. 0123456789, 2020, doi: 10.1007/
s13534-019-00144-6.
[2] G. M. Whitesides, “The origins and
the future of microfluidics.,” Nature, [11] F. J. Galindo-Rosales, “Complex
vol. 442, no. 7101, pp. 368-373, Jul. fluid-flows in microfluidics,” Complex
2006, doi: 10.1038/nature05058. Fluid-Flows Microfluid., pp. 1-111, 2017,
doi: 10.1007/978-3-319-59593-1.
[3] R. J. Yang, L. M. Fu, and H. H.
Hou, “Review and perspectives on [12] D. J. Guckenberger, T. de Groot, A.
microfluidic flow cytometers,” Sensors M.-D. Wan, D. Beebe, and E. Young,
Actuators, B Chem., vol. 266, pp. 26-45, “Micromilling: A method for ultra-rapid
2018, doi: 10.1016/j.snb.2018.03.091. prototyping of plastic microfluidic
devices,” Lab Chip, vol. 15, no. 11, 2015,
[4] D. A. Ateya, J. S. Erickson, P. B.
doi: 10.1039/C5LC00234F.
Howell, L. R. Hilliard, J. P. Golden, and
F. S. Ligler, “The good, the bad, and the [13] T. Nguyen and W. Park, “Rapid,
tiny: A review of microflow cytometry,” Low Cost Fabrication Of Circular Cross-
Analytical and Bioanalytical Chemistry, Section Microchannels By Thermal Air
vol. 391. pp. 1485-1498, 2008, doi: Molding,” pp. 348-350, 2015.
10.1007/s00216-007-1827-5.
[14] M. F. M. R. Wee, M. R. Buyong, and
[5] B. K. Gale et al., “A review of
B. Y. Majlis, “Effect of microchannel
current methods in microfluidic device
geometry in fluid flow for PDMS based
fabrication and future commercialization
device,” RSM 2013 IEEE Reg. Symp.
prospects,” Inventions, vol. 3, no. 3, 2018,
Micro Nanoelectron., pp. 391-393, Sep.
doi: 10.3390/inventions3030060.
2013, doi: 10.1109/RSM.2013.6706573.
[6] M. A. Daniele, D. A. Boyd,
[15] P. Maurya, P. Sharma, and B.
D. R. Mott, and F. S. Ligler, “3D
hydrodynamic focusing microfluidics Diwaker, “Implementation of Taguchi
for emerging sensing technologies,” methodology to Optimization of CNC
Biosens. Bioelectron., vol. 67, pp. 25-34, end milling process parameters of
2015, doi: 10.1016/j.bios.2014.07.002. AL6351 – T6,” vol. 2, pp. 3530-3533, 2012.

[7] M. Lu et al., “Microfluidic [16] P.-C. Chen, C.-W. Pan, W.-C.

hydrodynamic focusing for synthesis of Lee, and K.-M. Li, “An experimental
nanomaterials,” Nano Today. 2016, doi: study of micromilling parameters to
10.1016/j.nantod.2016.10.006. manufacture microchannels on a PMMA
substrate,” Int. J. Adv. Manuf. Technol.,
[8] M. Dziubinski, “Hydrodynamic vol. 71, no. 9-12, pp. 1623-1630, Jan.
Focusing in Microfluidic Devices,” in 2014, doi: 10.1007/s00170-013-5555-z.
Advances in Microfluidics, 2012.
[17] M. Y. Ali, A. R. Mohamed, B.
[9] J. P. Golden, G. A. Justin, M. Nasir, Asfana, M. Lutfi, and M. I. Fahmi,
and F. S. Ligler, “Hydrodynamic “Investigation of Vibration and
focusing-a versatile tool,” Anal. Surface Roughness in Micro Milling
Bioanal. Chem., 2012, doi: 10.1007/ of PMMA,” Appl. Mech. Mater., vol.
s00216-011-5415-3. 217-219, no. November, pp. 2187-2193,

11
 Advances in Micro- and Nanofluidics

2012, doi: 10.4028/www.scientific.net/

amm.217-219.2187.

[18] E. Korkmaz, R. Onler, and O.

B. Ozdoganlar, “Micromilling of
Poly(methyl methacrylate, PMMA)
Using Single-Crystal Diamond Tools,”
Procedia Manuf., vol. 10, pp. 683-693,
2017, doi: 10.1016/j.promfg.2017.07.017.

[19] P. C. Chen, Y. C. Chen, C. W. Pan,

and K. M. Li, “Parameter optimization
of micromilling brass mold inserts for
microchannels with Taguchi method,”
Int. J. Precis. Eng. Manuf., vol. 16,
no. 4, pp. 647-651, 2015, doi: 10.1007/
s12541-015-0086-1.

[20] A. Aramcharoen, S. K. C. Sean,

and L. Kui, “An experimental study of
micromilling of polymer materials for
microfluidic applications,” Int. J. Abras.
Technol., vol. 5, no. 4, p. 286, 2013, doi:
10.1504/ijat.2012.052037.

[21] N. Atiqah, M. Y. Ali, A. R.

Mohamed, and M. S. H. Chowdhury,
“Investigation of Surface Roughness
and Material Removal Rate for High
Speed Micro End Milling on PMMA,”
Adv. Mater. Res., vol. 1115, no. November
2016, pp. 12-15, 2015, doi: 10.4028/
www.scientific.net/amr.1115.12.

[22] E. Kuram and B. Ozcelik,

“Optimization of machining parameters
during micro-milling of Ti6Al4V
titanium alloy and Inconel 718 materials
using Taguchi method,” Proc. Inst. Mech.
Eng. Part B J. Eng. Manuf., 2015, doi:
10.1177/0954405415572662.

[23] M. Nasir, D. R. Mott, M. J. Kennedy,

J. P. Golden, and F. S. Ligler, “Parameters
affecting the shape of a hydrodynamically
focused stream,” pp. 119-128, 2011, doi:
10.1007/s10404-011-0778-5.

[24] S. Torino, “Engineering of

Microfluidic Devices For Cell
Hydrodynamic Manipulation (Thesis),”
p. 124, 2015.

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