Humidity
Humidity
Controlling or monitoring humidity is of paramount importance in many industrial & domestic applications.
or moisture levels needs to be properly controlled &
In semiconductor industry, humidity
monitored during wafer processing. In medical applications, humidity control is required
for respiratory equipments, sterilizers, incubators, pharmaceutical processing, and
biological products. Humidity control is also necessary in chemical gas purification,
dryers, ovens, film desiccation, paper and textile production, and food processing. In
agriculture, measurement of humidity is important for plantation protection (dew
prevention), soil moisture monitoring, etc. For domestic applications, humidity control is
required for living environment in buildings, cooking control for microwave ovens, etc.
In all such applications and many others, humidity sensors are employed to provide an
indication of the moisture levels in the environment.
Humidity measurement determines the amount of water vapor present in a gas that can be a mixture,
such as air, or a pure gas, such as nitrogen or argon. Various terms used to indicate moisture levels
Most commonly used units for humidity measurement are Relative Humidity (RH), Dew/Frost point (D/F
PT) and Parts Per Million (PPM). RH is a function of temperature, and thus it is a relative measurement.
Dew/Frost point is a function of the pressure of the gas but is independent of temperature and is therefore
defined as absolute humidity measurement. PPM is also an absolute measurement.
Dew points and frost points are often used when the dryness of the gas is important. Dew point is also
used as an indicator of water vapor in high temperature processes, such as industrial drying.
Mixing ratios, volume percent, and specific humidity are usually used when water vapor is either an
impurity or a defined component of a process gas mixture used in manufacturing.
Sensing Principle
Humidity measurement can be done using dry and wet bulb hygrometers, dew point hygrometers, and
electronic hygrometers. There has been a surge in the demand of electronic hygrometers, often called
humidity sensors.
Electronic type hygrometers or humidity sensors can be broadly divided into two categories: one employs
Humidity sensors relying on this principle consists of a hygroscopic dielectric material sandwiched
between a pair of electrodes forming a small capacitor. Most capacitive sensors use a plastic or polymer
as the dielectric material, with a typical dielectric constant ranging from 2 to 15. In absence of moisture,
the dielectric constant of the hygroscopic dielectric material and the sensor geometry determine the value
of capacitance.
At normal room temperature, the dielectric constant of water vapor has a value of about 80, a value much
larger than the constant of the sensor dielectric material. Therefore, absorption of water vapor by the
By definition, relative humidity is a function of both the ambient temperature and water vapor pressure.
Therefore there is a relationship between relative humidity, the amount of moisture present in the sensor,
and sensor capacitance. This relationship governs the operation of a capacitive humidity instrument.
On Alumina substrate, lower electrode is formed using gold, platinum or other material. A polymer layer
such as PVA is deposited on the electrode. This layers senses humidity. On top of this polymer film, gold
layer is deposited which acts as top electrode. The top electrode also allows water vapour to pass
through it, into the sensing layer . The vapors enter or leave the hygroscopic sensing layer until the
vapour content is in equilibrium with the ambient air or gas.Thus capacitive type sensor is basically a
Resistive type humidity sensors pick up changes in the resistance value of the sensor element in
response to the change in the humidity. Basic structure of resistive type humidity sensor from TDK is
shown below
Thick film conductor of precious metals like gold, ruthenium oxide is printed and calcinated in the shape of
the comb to form an electrode. Then a polymeric film is applied on the electrode; the film acts as a
humidity sensing film due to the existence of movable ions. Change in impedance occurs due to the
Capactive type sensors are very linear and hence can measure RH from 0% to 100%, but require
complex circuit and also need regular calibration. Resistive type sensors find difficulty in measuring low
values (below 5%RH) , the change is impedance is too high and hence it is difficult to control the
dynamics, temperature effects the properties significantly. However, advances in electronics can mitigate
Capacitive RH sensors dominate both atmospheric and process measurements and are the only types of
full-range RH measuring devices capable of operating accurately down to 0% RH. Because of their low
temperature effect, they are often used over wide temperature ranges without active temperature
capacitive sensors, allow higher operating temperatures and provide better resistivity against chemical
liquids and vapors such as isopropyl, benzene, toluene, formaldehydes, oils, common cleaning agents,
etc.