Modern Sensor Technologies
Modern Sensor Technologies
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RestFrame 静 坐标系
3. Accelerometers
Machin
Rotating 凝转机器 Accelerometer is a device that measures proper acceleration, which is the
acceleration (the rate of change of velocity) of a body in its own instantaneous rest
frame (but not coordinate acceleration, which is acceleration in a fixed coordinate
system). 坐标加速度 固定坐标
1
的加速度
Tablet Competers 平板电脑 Accelerometers paly a very important role in both industry and science. For examples,
Vehides vibration in rotating machines is monitored by accelerometers. Tablet computers and
UnmanndAerial
digital cameras use accelerometers to keep the images on screens displayed upright.
机 In unmanned aerial vehicles, accelerometers help to stabilize flight.
Acceleration is quantified in the SI unit metre per second per second (i.e., metre per
second squared; m/s2) or popularly in terms of standard gravity (g).
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人
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Fig. 2 Three basic capacitive acceleration sensors. (a) Moving plate against a spring.
(b) Beam-suspended plate. (c) Sideways moving plate against a spring. 4
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Fig. 3 Two basic forms of practical accelerometers. (a) Cantilever. (b) Bridge.
For a practical accelerometer, the plates must be prevented from touching by stoppers
and a damping mechanism must be added to prevent the springs or the beam from
oscillating.
As the change of capacitance in accelerometers is very small and therefore, indirect
methods using the capacitor in an LC or RC oscillator are often used. Then, the
frequency of oscillation is a direct measure of acceleration, which can be easily converted
into a digital reading at the output.
These accelerometers can be produced as semiconductor devices by etching both the
mass, fixed plate, and springs directly into silicon. By doing so, microaccelerometers can
be produced quite easily.
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ma
ma k x k [N/m],
x
where k is the spring constant, m is the mass of the moving plate, a is deceleration, and
Δx is the displacement of the plate. Thus we get
The calculation here is rather simple and doesn’t address issues such as keeping the
plates parallel.
Some acceleration sensors used for this purposes a contact sensors, that is, when the
necessary pressure has been achieved, a contact is closed (such as, e.g., the two plates
touching each other).
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Fig. 4 An accelerometer in which the beam bending is sensed by two strain gauges to
sense acceleration in both vertical directions.
Strain gauge sensors can be as sensitive as capacitive sensors and in some cases may be
easier to work with since the measurement of resistance is typically simpler than that of
capacitance.
The operation remains the same as for capacitive accelerometers.
On the other hand, strain gauges are temperature sensitive and must be properly
compensated.
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(a) (b)
Fig. 5 (a) An inductive accelerometer based on the inductance of a coil. (b) An accelerometer
based on a Hall element.
Fig. 5b shows another magnetic accelerometer using permanent magnet that acts as or
connected with a mass on a spring (or cantilever beam), and the varying field of the
permanent magnet is sensed by a Hall element or a magnetoresistive sensor.
As the Hall element can detect the magnitude of the magnetic field using the Hall effect,
the proximity of the mass changes the flux density, providing an indication of
acceleration.
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L ' n2 S [H/m].
where µ is permeability, n is the number of turns per unit length, and S is the cross-sectional
area of the coil. Calculate the change in voltage on the coil for an acceleration of ±10 g if
the coil is driven with a sinusoidal current of amplitude 0.5 A and a frequency of 1 kHz.
Hint: the voltage across an inductor is related to its current as V LdI (t ) / dt [V].
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Solution:
The maximum distance that the mass moves
according to the acceleration is
Fig. 6
ma 10 103 (10 9.81)
ma kx x = = 2.4525 mm
k 400
Then, the inductance can be calculated as
L L ' x n 2 Sx [H]
With the permeability in air μ0=4π×10-7 H/m, the change in inductance induced by
in and out a maximum of x can be obtained as
L r 0 n 2 S 2 x 4000 4 10-7 10002 2 10-3 2 2.4525 10-3
2
310 10-6 H
The change in voltage due to the change in inductance is therefore
dI ( t ) d
V L 310 10-6 [0.5sin 2 1000t ]
dt dt
310 10-6 0.5 2 1000cos(2 1000t )
0.974cos(2000 t ) [V]
Thus, the voltage across the coil changes by ± 0.974 V, a change sufficient for sensing.
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As the ground moves, the acceleration a produces a force on the mass and
cause a bending moment at the position of strain gauge as
M Fl mal [N m],
where l = 50 cm is the distance between the mass and the sensor.
Then, the strain on the surface of the square steel bar is:
6M 6mal
.
Ed 3 Ed 3
Therefore, the minimum detectable acceleration is
The sensitivity of the accelerometer can be further improved if one can use less “stiff” bar, or
use a thinner steel bar, or increase the mass.
The accelerometer can only to monitor acceleration perpendicular to the surface on which the
strain gain is placed.
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4. Pressure Sensors
Sensing of pressure, which is force per unit area, is perhaps only second in importance
to sensing of strain in mechanical systems:
i. One of the reasons for their prominence is that, in sensing of gases and fluids, direct
measurement of force is not an attractive option.
ii. Another reason is their widespread applications in e.g., cars, atmospheric weather
prediction, and other consumer-oriented devices.
There are four basic types of pressure sensors:
Absolute pressure sensor: pressure is sensed relative to absolute vacuum.
Differential pressure sensor: the difference between two pressures on two ports of the
sensor is sensed.
Gauge pressure sensor: senses the pressure relative to ambient pressure.
Sealed gauge pressure sensor: the pressure relative to a sealed pressure chamber (usually
1 atm at sea level or 14.7 psi) is sensed.
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Solution:
a) The graduation on stem is 700/50=14 kPa/mm (which is the sensitivity of the sensor).
b) The force generated by a pressure of 700 kPa on the piston is
The spring must compress 50 mm. This means the spring constant k, must be
F 54.978
F kx k 1100 N/m
x 0.05
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P
P0
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A different approach is to use a single strain gauge, as shown in Fig. 14, with a current
passing through it and pressure applied perpendicular to the current. The voltage across
the element is measured as an indication of the stress, and thus pressure.
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For a thin disk with thickness t, the strain on the disk then is
m 3r 2 P 3r 2 10045d r 2d
m 2
2
=7.5 103 2 [N/m 2 ].
E 4 Et 4 Et Et
With the strain-resistance equation, we get
r 2d
R R0 1 gs m =R0 1 7.5 103gs 2 [],
Et
where R0 is the nominal resistance of the strain gauge and gs is the gauge factor. Therefore,
the change in resistance due to depth is
g s r 2d
R 7.5 103 R0 [].
Et 2
With the values given here, we have
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Since the capacitance may be part of an oscillator, the change in its frequency may be
sufficiently large to make for a very sensitive sensor.
Another advantage of capacitive pressure sensors is that they are less temperature
dependent and they are less sensitive to overpressure because stops on motion of the
plate can be incorporated. Usually overpressures two to three orders of magnitude larger
than rated pressure may be easily tolerated without ill effects.
The sensors are linear for small displacements, but at greater pressures the diaphragm
tends to bow, causing nonlinear output.
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Fig. 17 A variable reluctance pressure sensor: (a) Structure and operation; (b) Equivalent
circuit; (c) Operation with an AC source.
Fig. 17b shows the equivalent circuit where RF indicates the inductances of paths in iron, Rg
indicates gaps, and Rd indicates paths in the diaphragm. This inductance can be sensed
directly, but more often the current in the circuit made of a fixed impedance and a variable
impedance due to the motion of the diaphragm is measured, as shown in Fig.17c.
More details about magnetic circuits will be discussed in Unit 5.
Advantages: 1) sensitive to small deflection; 2) devoid of temperature sensitivity.
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5. Velocity Sensing
We often need measure velocity or something proportional to it, such as the velocity of a
car from the rotation of wheels, the number of rotations of a shaft per unit time in an
electric motor, or the velocity of watercraft and aircraft can also be measured relative to
stationary or moving fluids.
The velocity of fluids and gasses can be sensed by using a relatively simple way. Here the
methods used to do so are often indirect, e.g. to sense the cooling of a thermistor relative
to a thermistor that is not (or less) exposed to the fluid flow, see Fig. 18.
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Pitot tube
Another common method of sensing speed is based on differential pressure:
the change in pressure due to motion in the fluid gives an indication of the speed.
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2 Pt Ps (8)
V [m/s].
The density, ρ, can be measured separately or may be known (such as in the case of water).
For flight speed purposes it is important to remember that density varies with pressure,
along with the increase of altitude. The density may approximately be deduced from
pressure as
P
t [kg/m 3 ], (9)
RT
where R is the specific gas constant (equal to 287.05 J/kg/K for dry air) and T [K] is the
absolute temperature. More accurate relations take into account humidity through the use of
vapor pressure, but this approximation is often sufficient in “dry air” conditions.
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Although this formula overestimates the pressure at height h, it is commonly used, and in
fact serves as the basis of many altimeters, including those in aircraft.
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Prandtl tube
Because the difference between the total
pressure and the static pressure is needed
to measure speed, the Pitot tube has been
modified to measure static pressure
independently. This is known as the
Prandtl tube.
Fig. 20 The Prandtl tube.
As shown in Fig. 20, Prandtl tube has an
additional port open to the side of the tube to measure the static pressure. A differential
pressure sensor measures the pressure difference between the total pressure (forward-
facing opening) and the static pressure (side-facing opening). The velocity then can be
measured directly from Eqn. 8.
The Pitot tube or Prandtl tube has narrow openings that, particularly in aircraft, are prone to
icing.
It is important to recognize that the sensor measures the relative fluid velocity, so in the case
of aircraft, the sensor gives the aircraft velocity relative to air (the airspeed).
The exact same idea can be used in water for surface watercraft or underwater for
submarines, again measuring the speed relative to the fluid.
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Solution:
a) Around the surface of water, the static pressure is essentially that of the atmosphere
which is known as 101.325 kPa. Then, the water speed of the flow can be calculated as
2 Pt Ps 2 102500 101325
V = =1.53 [m/s]
1000
b) The dynamic pressure remains the same as long as the speed and density remain constant.
At greater depths the density changes somewhat (increases) and the dynamic pressure at a
constant velocity increases as well.
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Fig. 23 (a) The Sagnac effect in an optical fiber ring rotating at an angular frequency ω.
(b) Implementation of the ring resonator using mirrors to ‘‘close’’ the ring.
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The time of a light beam traveling travel a ring with the radius of
R is known as:
t 2 Rn c , (14)
where n is the refractive index of the medium (e.g., optical fiber)
and c is the speed of light in vacuum. ω
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Classwork 3:
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References:
1. Sensors, actuators, and their interfaces: a multidisciplinary
introduction, Nathan Ida, SciTech Publishing, 2014.
2. Sensors for Mechatronics, 2nd edition, Paul P. L Regtien,
Edwin Dertien, Elsevier, 2018.
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