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Module 3 Lecture 4 (1)

The document outlines the N-Well CMOS fabrication process, detailing the structure consisting of both NMOS and PMOS transistors. It describes the steps involved in transforming a P-substrate into a P-type substrate, the growth of a thick oxide layer, and the application of photoresist layers. Additionally, it covers the diffusion of N-type and P-type impurities to create the necessary components for NMOS and PMOS devices.

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Mohammad Sania 22221882101
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7 views31 pages

Module 3 Lecture 4 (1)

The document outlines the N-Well CMOS fabrication process, detailing the structure consisting of both NMOS and PMOS transistors. It describes the steps involved in transforming a P-substrate into a P-type substrate, the growth of a thick oxide layer, and the application of photoresist layers. Additionally, it covers the diffusion of N-type and P-type impurities to create the necessary components for NMOS and PMOS devices.

Uploaded by

Mohammad Sania 22221882101
Copyright
© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
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Download as PDF, TXT or read online on Scribd
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Course: Introduction to VLSI design (19EEC334)

Unit-III: N-Well CMOS Fabrication process

Y.V.Appa Rao
Assistant Professor
Department of EECE.
GITAM Institute of Technology (GIT)
Visakhapatnam – 530045
Email: [email protected]
•STRUCTURE OF THE CMOS in N-Well
•CONSISTS OF BOTH NMOS & PMOS

NMOS PMOS

S G D S G D

N-Diff N-Diff P-Diff P-Diff

N-Well

P-Substrate
Substrate
P-TYPE IMPURITIES ARE DIFFUSED INTO SUBSTRATE

Substrate
SUBTRATE IS TURNED INTO P-TYPE

P-Substrate
A THICK OXIDE LAYER IS OF THICKNESS 1um is GROWN OVER P-SUBTRATE

Thick Oxide layer

P-Substrate
P-Substrate
THE SURFACE OF OXIDE LAYER IS COVERED WITH PHOTO
RESIST LAYER

Photo resist layer

P-Substrate
Transparent
Opaque Mask

P-Substrate
UV Rays

P-Substrate
P-Substrate
P-Substrate
P-Substrate
P-Substrate
N-Well

P-Substrate
N-Well

P-Substrate
Thin oxide layer

N-Well

P-Substrate
Polysilicon layer

N-Well

P-Substrate
Photo Resist

N-Well

P-Substrate
UV Rays

Mask

N-Well

P-Substrate
N-Well

P-Substrate
N-Well

P-Substrate
N-Well

P-Substrate
Gate Terminals

N-Well

P-Substrate
N-Well

P-Substrate
N-type impurity gas particles

N plus mask

N-Well

P-Substrate
N-Diff N-Diff

N-Well

P-Substrate
P-type impurity gas particles

N -ve mask

N-Diff N-Diff

N-Well

P-Substrate
N-Diff N-Diff P-Diff P-Diff

N-Well

P-Substrate
N-Diff N-Diff P-Diff P-Diff

N-Well

P-Substrate
Contact Cuts

N-Diff N-Diff P-Diff P-Diff

N-Well

P-Substrate
NMOS PMOS

Metal Contacts
S G D S G D

N-Diff N-Diff P-Diff P-Diff

N-Well

P-Substrate

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