SOLA2020-9006 Lecture 11 Assignments
SOLA2020-9006 Lecture 11 Assignments
Major Assignment: Efficiency (30 marks) Major Assignment: Explanation (50 marks)
• Total of 30 marks • For each detected problem:
• Marks based on average g efficiency.
y – Explain why the existing process parameters are non-optimal;
• The software is not 100% accurate. If you achieve – Describe the experiments you conducted (i.e., simulations) to
improve the process;
high efficiencies using non-sensible approaches then – Report the results of the experiments - include graphs where
it will be difficult to write an explanation. possible;
– Explanation is more important than efficiency! – Summarise results and conclude what are the optimal
• Marking scheme: parameters for the process.
>= 14% 30 marks • Conclusion
[13.5-14.0)% 25 marks – Tabulate your final parameters (highlight the changes);
[13.0-13.5)% 20 marks – Report your final efficiencies (highest and average);
[12.0-13.0)% 15 marks – Justify your sampling methodology (i.e., batch size, no of
[11.0-12.0)% 10 marks wafers processed, repeatability, etc.).
< 11% 0 marks