BITS F415 & ME F423

(Introduction to MEMS & Microfluidics)

Experiment 1: Cantilever Beam (Solid Mechanics)

Name Samay Goel BITS ID 2024H1240173H

Program Communication Ph. No. 8309941793

Engineering

1. Use the width, height, and depth on your own (in microns) in
geometry for creating a
block.
2. At least two mesh conditions (e.g., fine,
coarse, etc.)
3. The remaining conditions are the same as those taught in
class.

Please Paste your Report Here

MEMS Lab 1_1
Report date
Jan 22, 2025, 4:20:16 PM

1
Contents
1. Global Definitions.......................................................................................
2. Component 1.............................................................................................
2.1. Definitions...............................................................................................................
2.2. Geometry 1.............................................................................................................
2.3. Materials.................................................................................................................
2.4. Solid Mechanics......................................................................................................
2.5. Mesh 1....................................................................................................................
3. Study 1......................................................................................................
3.1. Stationary...............................................................................................................
4. Results......................................................................................................
4.1. Datasets.................................................................................................................
4.2. Plot Groups.............................................................................................................

2
1 Global Definitions
Dat Jan 22, 2025,
e 4:20:16 PM

GLOBAL SETTINGS
Name Lab1_1.mph
Versio COMSOL Multiphysics 6.1 (Build:
n 282)

USED PRODUCTS
COMSOL
Multiphysics
CAD Import Module

COMPUTER INFORMATION
CPU AMD64 Family 25 Model 116 Stepping 1, 8 cores, 31.19 GB RAM
Operating system Windows 10

3
2 Component 1

2.1 DEFINITIONS

2.1.1 Coordinate Systems

Boundary System 1
Coordinate system Boundary
type system
Tag sys1

COORDINATE NAMES
Fir Secon Thir
st d d
t1 t2 n

2.2 GEOMETRY 1

Geometry 1

UNITS
Length
µm
unit
Angular de
unit g

4
2.3 MATERIALS

2.3.1 Material 1

Material 1

SELECTION
Geometric entity
Domain
level
Geometry geom1: Dimension 3: All
Selection
domains

2.4 SOLID MECHANICS

Solid Mechanics

5
 EQUATIONS

FEATURES
Name Level
Linear Elastic
Domain
Material 1
Boundar
Free 1
y
Initial Values 1 Domain
Boundar
Fixed Constraint 1
y
Boundar
Boundary Load 1
y

2.5 MESH 1

Mesh 1

6
3 Study 1
COMPUTATION INFORMATION
Computation 1
time s

3.1 STATIONARY
STUDY SETTINGS
Valu
Description
e
Include geometric
Off
nonlinearity

PHYSICS AND VARIABLES SELECTION

Solve
Physics interface Equation form
for
Solid Mechanics Automatic
On
(solid) (Stationary)

MESH SELECTION
Componen
Mesh
t
Component Mesh
1 1

7
4 Results

4.1 DATASETS

4.1.1 Study 1/Solution 1

SOLUTION
Descripti
Value
on
Solution Solution 1
Compone Component 1
nt (comp1)

Dataset: Study 1/Solution 1

8
4.2 PLOT GROUPS

4.2.1 Stress (solid)

Volume: von Mises stress (N/m2)

9
MEMS Lab 1_2
Report date
Jan 22, 2025, 4:30:52 PM

1
Contents
1. Global Definitions.......................................................................................
2. Component 1.............................................................................................
2.1. Definitions...............................................................................................................
2.2. Geometry 1.............................................................................................................
2.3. Materials.................................................................................................................
2.4. Solid Mechanics......................................................................................................
2.5. Mesh 1....................................................................................................................
3. Study 1......................................................................................................
3.1. Stationary...............................................................................................................
4. Results......................................................................................................
4.1. Datasets.................................................................................................................
4.2. Plot Groups.............................................................................................................

2
1 Global Definitions
Dat Jan 22, 2025,
e 4:30:52 PM

GLOBAL SETTINGS
Name Lab1_2.mph
Versio COMSOL Multiphysics 6.1 (Build:
n 282)

USED PRODUCTS
COMSOL
Multiphysics
CAD Import Module

COMPUTER INFORMATION
CPU AMD64 Family 25 Model 116 Stepping 1, 8 cores, 31.19 GB RAM
Operating system Windows 10

3
2 Component 1

2.1 DEFINITIONS

2.1.1 Coordinate Systems

Boundary System 1
Coordinate system Boundary
type system
Tag sys1

COORDINATE NAMES
Fir Secon Thir
st d d
t1 t2 n

2.2 GEOMETRY 1

Geometry 1

UNITS
Length
µm
unit
Angular de
unit g

4
2.3 MATERIALS

2.3.1 Material 1

Material 1

SELECTION
Geometric entity
Domain
level
Geometry geom1: Dimension 3: All
Selection
domains

2.4 SOLID MECHANICS

Solid Mechanics

5
 EQUATIONS

FEATURES
Name Level
Linear Elastic
Domain
Material 1
Boundar
Free 1
y
Initial Values 1 Domain
Boundar
Fixed Constraint 1
y
Boundar
Boundary Load 1
y

2.5 MESH 1

Mesh 1

6
3 Study 1
COMPUTATION INFORMATION
Computation 1
time s

3.1 STATIONARY
STUDY SETTINGS
Valu
Description
e
Include geometric
Off
nonlinearity

PHYSICS AND VARIABLES SELECTION

Solve
Physics interface Equation form
for
Solid Mechanics Automatic
On
(solid) (Stationary)

MESH SELECTION
Componen
Mesh
t
Component Mesh
1 1

7
4 Results

4.1 DATASETS

4.1.1 Study 1/Solution 1

SOLUTION
Descripti
Value
on
Solution Solution 1
Compone Component 1
nt (comp1)

Dataset: Study 1/Solution 1

8
4.2 PLOT GROUPS

4.2.1 Stress (solid)

Volume: von Mises stress (N/m2)