Raith EBPG 5200 Plus: Quick Guide

INTRODUCTION
Use these instructions to process your sample using the Raith EBPG 5200 Plus. Optional steps are based on your sample
characteristics and/or personal preferences. Please note which EBPG # you are using, EBPG 1 (left) or EBPG 2 (right).
ENABLE TOOL ON BADGER
1) Log in to Badger-SNSF-Cloud → SNC → EBL: EBPG # → Enable.
TRANSFER DESIGN DATA
2) Set User Environment:
a) Right click on desktop to open a terminal → type “ce Badger ID”
b) In Cebpg, click “Change Environment” icon → Select “Badger ID” → Click OK.
3) Move Pattern: On the EBPG PC desktop “SNSF NPC Data” folder, locate [User] directory → copy GPF pattern file to
“users/ Badger ID /patterns” folder.
4) Check Pattern: In Cebpg, Open “Cview” icon → File → Open → patterns → Select *.gpf → Click “Open” & “Done.”
LOAD SAMPLE ON HOLDER AND INTO TOOL
5) Mount Sample: Remove holder from storage → BE CAREFUL NOT TO DAMAGE FOCUS MARK CHIP →
Load holder onto Sample Mounting Apparatus with hook towards user → Mount sample → Release Height Spring
Lever so sample pops up → NOTE Holder ID (ie. BW0XXX) and Holder Position (TL: top left, TR: top right, BL:
bottom left, BR: bottom right).
6) Alignment Microscope PC:
a) ConfoViz Software Window should be open → Check “Warp and Bow View” icon is selected (fifth from left).
b) Open SSH Connection: Desktop → Open “ssh EBPG #” icon → Type “calign” for pop-up window.
c) CALIGN Software: File → Open Holder → Open Holder ID BW0XXX → Click “Go to correction position”.
d) Load Holder on Alignment Microscope: Load holder onto microscope with hook towards user → Left-hand
lever should be towards user → Gently load holder onto stage → Firmly push left-hand lever forward to lock.
e) Align Coordinate System Origins: In CALIGN, click “Swap XY Axis” icon to rotate holder orientation.
f) Locate Lower-Left Square Reference Marker: Click “Go Reference Mark” Icon to move stage near Focus Mark
Chip → Click “Auto Focus” → Click “Auto Exposure” to remove red lines → Use Joystick to move to the Lower-
Left Square Reference Marker on Focus Mark Chip→ Click “ATC” - Adjust Table Coordinates sets reference
point to holder coordinate system.
g) Check Sample Level/Height: Move stage over substrate with Joystick → Click “Level” tab → Click first “#” to
grab position 1 → Move to second position → Click 2nd “#” button → Move to third position → Click 3rd “#”
button → Click “Start Measure” to measure level and height at the three positions →
Software will confirm if Tilt is within 1 um/mm and Z values are within ± 50 um, <10 um is achievable.
i) Correct Level/Height: If Z values are NOT within limits, click “Go to correction position” → Follow on
screen prompt and use hex wrench long section to adjust position height set screws A/B/C → Release
height spring lever → Click “Start Measure” to remeasure → Repeat adjustment until values within limits.
h) Check Sample Rotation: Select Rotation tab → Follow on screen prompt instructions.
i) For un-aligned exposure: Move stage to the edge of the sample, press “#” for “First x” → Move stage along
the same edge to different position, press “#” for “Second x” → Click “correct positions” → Click “go” for
“First x” → Adjust rotation angle with Rotation Rod by following on screen prompt → Re-check rotation →
If rotation is not within tolerance, click “Clear Positions” and reiterate until rotation is ok.
(1) OPTIONAL: For aligned exposure: move to first marker for “First x”, move to second orthogonal
marker for “Second x” and follow on-screen prompts.
i) Locate Reference Point of Sample:
i) For un-aligned exposure, locate center of chip → Write down X,Y coordinates in mm.
ii) For Aligned Exposure, refer to Raith EBPG5200+ User Guide with Visual Aids at snsf.stanford.edu.
iii) Go to Level tab → Click “Go to correction position” → Release left-hand lever lock → Leave holder.
j) Close ssh window EBPG# connection to close CALIGN.
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7) Load Holder into Load Lock:
a) Vent Load Lock: On the PLC touchscreen, click “SET LOCK VENT” → When at atmosphere, lift load lock door
up → Using two hands, lift cassette up and place on loader surface.
b) Load Holder into Cassette: Load holder into open slot and note which slot, confirm left and right cassette
wheels align with holder slits → DO NOT PUSH HOLDER IN ALL THE WAY or may damage Focus Mark
Chip!!! → Slowly insert holder until “detent” position → Using two hands, lift cassette handle and lower into
Load Lock → Gently close door → On the PLC touchscreen, click “SET LOCK VACUUM”.
c) Tool will be ready when G3 reads 5.5 e-06 → Continue to Control Software while waiting.
d) Wafer holder can be loaded when G3 reads 5.5 e-06 → Continue to Control Software while waiting.
e) Optional: In Cebpg, Select Holder (see #10) → Click “▶” icon next to holder → After holder is loaded, pre-set
Beam Current under “Beam” select “…” icon → Select desired beam in window.
OPERATE EBPG CONTROL SOFTWARE
8) The following windows should be open: Cebpg, CSYS, CMON
9) Set Up Job:
a) In Cebpg, click “Cjob” icon → Drag-drop “Substrate” module to active area → Type in “Name” → Select
Holder Type and Size (ie. Pieces is “other (WxH):”) → Click “OK” → Check display.
b) Drag-drop “Exposure” module over previous module → Type in “Name:” → For Aligned Exposure, refer to
Raith EBPG5200+ User Guide with Visual Aids at snsf.stanford.edu → Click “OK”.
c) Create Layout: Drag-drop “Layout” module over previous module → Check “Repetition 1” → Specify array
spacing using Count # and Vector X → Repeat for “Repetition 2” → Change “Scan Order” drop-down menu to
“raster” (Default: left to right) → OPTIONAL: Check box “Dose Update” → Input desired options.
d) Specify Pattern: Drag-drop “Pattern” module → Select GPF File with “…” → Select “Beam” with “…” →
specify Dose → Note: Max frequency is 125 MHz → View pattern by Menu Bar → View → Check “Pattern”.
e) OPTIONAL: Drag-drop “Identifier” (text) module over previous module → Click “Insert” for different options →
Re-position dose identifier by entering desired shift from the center of the pattern in “Positions [um,um]” →
Check display.
f) Export Job: File → Export job … → Pop-up window: Save changes to job flow? “yes/no” to save *.cjob flow to
[User]/jobs directory → Select [Exposure Name] → Click “Exposure Time” → Click 1) “Export” and 2) “Done”
→ *.job file saved to [User]/jobs directory → Exit Cjob window.
10) Select Holder: In Cebpg, under “Cassette” section, click holder button in the active slot → Select respective holder
Name and Type (Piece holder select TL/TR/BL/BR).
11) Schedule Exposure Job: In Cebpg, select “#” under Cassette → Select *.job file → Under “Parameters:” enter
coordinates from the microscope in “XX.XXXmm,YY.YYYmm” (ie. 54.678mm,72.234mm) for 1) Un-aligned: center of
sample OR 2) For Aligned Exposure, refer to Raith EBPG5200+ User Guide with Visual Aids at snsf.stanford.edu.
→ Optional: Check “No Unload” in case job crashes or running multiple samples → Click “Submit”.
12) Expose Job: Un-check “Schedule” box → Move “black line” below *.job file(s) → When ready, check “Schedule”
box → Exposure will start.
13) Check Progress: In Cebpg, click “CPRO”.
UNLOAD SAMPLE FROM CHAMBER, CASSETTE, AND HOLDER
14) Unload Substrate Holder: If the job did not unload automatically, in Cebpg, click “◀” icon next to holder to
unload Substrate → Wait until complete.
15) Unload and Reload Cassette: Vent Chamber by selecting “SET LOCK VENT” in PLC → Unload Cassette with two
hands → Unload Holder to Sample Mounting Apparatus → Put Cassette back in Load Lock, pump down by
selecting “SET LOCK VACUUM” in PLC.
16) Remove sample → Tighten screws on holder → Store Holder in Holder Storage Unit.
17) Close excess terminals and windows. Leave Cebpg, CSYS, CMON open.
DISABLE TOOL ON BADGER
18) Check and wait until the PLC Load Lock turbo icon is green.
19) Log in to Badger-SNSF-Cloud → Disable EBL: EBPG #.

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APPENDIX: OPTIONAL MANUAL CHECKS BEFORE STARTING EXPOSURE

All beams will automatically be checked before exposure and exported into a log file.
a) Check Marker Positions on Holder and Sample
b) Check Beam
i) Current
ii) Focus
iii) Spot Size
c) Check Height

TROUBLE SHOOTING:
• ConfoViz2 software not reading height measurement: close ssh window and ConfoVis2 window → reopen
ConfoViz2 and ssh EBPG, start again.
• PLC – If “SET LOCK VENT/VACUUM” is grayed out, check if “ALARM” is red → Clear “ALARM” button and retry
Vent/Vacuum.
• Aperture position unidentified – in an open terminal type “pg aper move home”
• Restarting Linux OS – Please inform staff if the computer is frozen or not responding.
o

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ABOUT THIS DOCUMENT

Version History
Date Editor Change Log
06/30/2023 Stanley Lin, Grant Shao, Initial Document
Rich Tiberio
07/11/2023 Stanley Lin, Rich Tiberio Updated procedures after reviewing on tool
12/07/2023 Stanley Lin, Rich Tiberio Updated procedures after reviewing on tool

Contributing To This Document

We encourage everyone to contribute to this document. If there are edits that may help better complete this document,
please email your general suggestions to [email protected].

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