Parametric Instrument Accessories: Keysight Technologies
Parametric Instrument Accessories: Keysight Technologies
Technical Overview
Table of Contents
1. Introduction............................................................................... 3
2. Connecting to Fixture............................................................... 4
2.1. Jumper cables............................................................... 4
2.2. Socket modules............................................................ 5
3. Connecting to SWM................................................................. 6
3.1. GNDU............................................................................. 6
3.2. SMU............................................................................... 7
3.3. MFCMU.......................................................................... 7
4. Connecting to Prober............................................................... 8
4.1. GNDU connections....................................................... 8
4.2. SMU/CMU connections................................................ 9
5. Accessories..............................................................................13
5.1. CMU accessories.........................................................13
5.2. B1500A peripherals.....................................................15
5.3. Connector type............................................................16
5.4. Cables...........................................................................18
5.5. Connector plates........................................................ 20
5.6. Adapters & connectors............................................... 24
1. Introduction
This guide provides information on how to connect a prober to Keysight Technologies,
Inc. semiconductor parametric measurement instruments.
Figure 1.1. B1500A with Cascade prober Figure 1.2. B1500A with Vector prober
Figure 1.3, B1500A with Suss prober Figure 1.4. ASUs on the probe station
04 | Keysight | Parametric Instrument Accessories Guide – Technical Overview
2. Connecting to Fixture
The 16442A and 16442B test fixtures have 2.1. Jumper cables
6 triaxial input ports. You can connect
force ports of SMU to them by using Table 2.1. Jumper cables
Triaxial Cable 16494A as shown in Mini banana – Pin plug
Figure 2.1.
Approximately 200 mm
11 mm 7 mm
2 mm
1 mm
Triaxial cable
16494A-001 1.5 m
or As option of 16442A/16442B
16494A-002 3.0 m 16442A-811/16442B-811 for Black (2ea), Blue (2ea), Red (2ea)
Fixture Parts number
S 16442A
M Force 16442-61600 for Black (1ea)
SMU or
U 16442B 16442-61601 for Red (1ea)
1-6
Sense 16442-61602 for Blue (1ea)
1 mm
1 mm
As option of 16442A/16442B
16442A-812/16442B-812 for Black (2ea), Blue (2ea), Red (2ea)
Parts number
16442-61603 for Black (1ea)
16442-61604 for Red (1ea)
16442-61605 for Blue (1ea)
As option of 16442A/16442B
16442A-813/16442B-813 for Black (2ea), Blue (2ea), Red (2ea)
Parts number
16442-61606 for Black (1ea)
16442-61607 for Red (1ea)
16442-61608 for Blue (1ea)
Approximately 200 mm
11 mm
2 mm
As option of 16442A/16442B
16442A-814/16442B-814 for Black (2ea), Blue (2ea), Red (2ea)
Parts number
16442-61609 for Black (1ea)
16442-61610 for Red (1ea)
16442-61611 for Blue (1ea)
05 | Keysight | Parametric Instrument Accessories Guide – Technical Overview
Socket Modules
43 mm
This socket module is for measurement
16442A-801/16442B-801 0.1 inch of virtually any device—component, DIPIC,
86 mm
or small-scale circuit.
43 mm
16442A-802/16442B-802 0.075 inch 84 mm
1.8 mm
1 mm
8 mm 17.2 mm
16442A-803/16442B-803 0.05 inch
43 mm
86 mm
5 mm 3 mm of three lead or four lead bipolar
transistors and FETs.
5 mm
3 mm
43 mm
20 mm
16442A-821/16442B-821
84 mm
N1254A-201
43 mm
16442A-823/16442B-823
1
2.54 mm
84 mm
N1254A-202
43 mm
1 18
Maximum voltage: 230 V
43 mm
2.54 mm
16442A-822/16442B-822 9 mm
84 mm
N1254A-207
43 mm
current measurements.
43 mm
16442A-800/16442B-800
84 mm
06 | Keysight | Parametric Instrument Accessories Guide – Technical Overview
3. Connecting to SWM
3.1. GNDU
An SMU has FORCE (SENSE), GUARD, Ground unit cable
and COMMON, but a GNDU has SENSE, 16493L-001 1.5 m SWM
FORCE, and COMMON as shown in Figure or B2200A
16493L-002 3.0 m E5250A
3.1. You need some sort of GNDU to Kelvin G
N
adapter when connecting the GNDU to D
standard triaxial connections. U
Triaxial – triaxial
adapter
Common N1254A-107
Figure 3.2. Examples of a GNDU non-Kelvin
connection to SWM
Sense
Kelvin connection
Table 3.2. Parts information
Connect the dual triaxial connector using
a GNDU to Kelvin Adapter (N1254A-100) Description Qty Part number Product
as shown in Figure 3.3. For this part, see Kelvin triaxial cable – 1.5 m (Max 3.0 A) 1 — 16493K-001
Table 5.10 in Section 5.6 Adapters. For Kelvin triaxial cable – 3.0 m (Max 2.6 A) 1 — 16493K-001
parts information, see Table 3.2. Maxi-
Ground unit cable – 1.5 m 1 — 16493N-001
mum current is restricted when the Kelvin
triaxial cable is used. See Table 3.2. GNDU to Kelvin adapter 1 — N1254A-100
07 | Keysight | Parametric Instrument Accessories Guide – Technical Overview
3.2. SMU
An SMU terminal is shown in Figure 3.4.
Kelvin triaxial cable
16494B-003 0.8 m
Kelvin triaxial cable or
Common 16493K-001 1.5 m 16494B-001 1.5 m
or or
16493K-002 3.0 m 16494B-002 3.0 m
SWM SWM
Force Force Force B2200A Force Force E5250A
(Sense) S or S
M B2201A M
Guard U Sense Sense U Sense Sense
ports separately.
Figure 3.6. Examples of a SMU non-Kelvin connection
to SWM
Non-Kelvin connection
When non-Kelvin connection is used,
connect the Keysight 16494A triaxial cable SWM
Hcur CMU input cable
between the SMU and SWM as shown in 16494F-001 2.0 m B2200A
or
Figure 3.6. B2201A
M Hpot CMH
F
C
3.3. MFCMU M
U Lpot CML
MFCMU of B1500A is connected to CMH
and CML port of B2200A/ B2201A by Lcur
using CMU input cable 16494F-001 as
shown in Figure 3.7.
Figure 3.7. Examples of a MFCMU connection to SWM
08 | Keysight | Parametric Instrument Accessories Guide – Technical Overview
4. Connecting to Prober
4.1. GNDU connections
An SMU has FORCE (SENSE), GUARD, Shielding box
and COMMON, but a GNDU has SENSE,
FORCE, and COMMON as shown in Figure Triaxial cable
Adapter for GNDU
16493L-001 1.5 m
4.1. You need some sort of GNDU to Kelvin or
N1254A-107
adapter when connecting the GNDU to 16493L-002 3.0 m
G Probe cable (triaxial) Prober
standard triaxial connections.
N
D
U
Common
Connector plate
Sense
DUT
Force
Figure 4.1. GNDU terminal Figure 4.2. Examples of a GNDU non-Kelvin connection
Connect the dual triaxial connector using Figure 4.3. Examples of a GNDU Kelvin connection
Kelvin connection
Figure 4.5. Examples of a SMU Kelvin connection
These instructions apply when all
connections are Kelvin. Two probes must
contact the wafer in this connection. Table 4.3. Parts information
Connect the triaxial connector on the Figure 4.6. Examples of a SMU non-Kelvin connection
probe cable as shown in Figure 4.6. For
parts information, see Table 4.4. Table 4.4. Parts information
Note: When connecting the cable and Kelvin triaxial cable – 1.5 m 1 — 16493K-001
tee connector as shown in Figure 4.7, Kelvin triaxial cable – 3.0 m 1 — 16493K-002
space restrictions make an adjacent Triaxial cable – 0.4 m 1 — 16494A-004
connector unusable. Since three Triaxial tee-connector 1 1250-1551 —
connectors are necessary for a Kelvin
connection a connector plate must be
used. Select the correct connector plate
for your application. To make two Kelvin
connections, use a Keysight 16495H. To
make three Kelvin connections, use a
Keysight 16495J.
11 | Keysight | Parametric Instrument Accessories Guide – Technical Overview
ASU connection
Each ASU has one Dsub control cable, one
Triaxial cable and
triaxial cable, and (optionally) two coaxial CMU cable Dsub cable
cables connected to it. The cables can be N1300A-001 1.5 m 16493M-001 1.5 m Shielding box
or or
connected to the ASU inside the shielding N1300A-002 3.0 m 16493M-002 3.0 m
box through the 16495K plate.
H
The ASU outputs should be connected to R Probe cable (triaxial)
S Dsub Dsub
the DUT by using triaxial cables as shown M
U A
in Figure 4.8. S
Force Force
U
Probe cable (triaxial)
When making IV measurements with the Hcur
SCUU positioner-based
probing mode
The SCUU should be connected to the
SCUU cable Shielding box
DUT by using triaxial cables as shown in N1301A-002 3.0 m
Figure 4.9.
used. M H pot
F
C Sense Probe cable (triaxial)
When making CV measurements using the M
Lpot
U
MFCMU, only the FORCE outputs of the Force
SCUU are used. SCUU FORCE output1 DUT
Lcur
corresponds to CMH, and SCUU FORCE
Sense
output2 corresponds to CML.
Force
S
The SCUU can be fixed on the prober by M
U
using SCUU Magnet Stand (N1301A-110). Sense
Connector plate
16495K
5. Accessories
5.1. CMU accessories
B1500A has the multi frequency
capacitance measurement unit (MFCMU).
There are two types of CMU connection as
follows.
–– Standard four terminal pair (4TP)
connection
–– SCUU positioner-based probing
mode
According to your situation, you can select Figure 5.1. Standard four terminal pair (4TP)
the type of connection.
N1300A-001/N1300A-002 16494F-001
4156C+41501B Type A
E5260A/E5270B Type A
16442A/B Type A
5.4. Cables
Several possibilities exist for connecting Table 5.6. SMU cables overview
the Source Monitor Units (SMUs) to the
16493K 16494B
DUT. The great variety of available cables
can be categorized into mainly three
types:
Triaxial & Dsub cable For ASU Triaxial cable Interlock cable
16493N 16493L
If you need parts to fix a connector plate, 16495F—Half size connector plate for matrix
see Table 5.8. Order the quantity you need. 16495F-001 has 12 triaxial through connectors (female to female), an Intlk
(The number of holes in a connector plate connector, and a GNDU connector (triaxial through, female to female). The
is four.) back of the Intlk connector is designed for soldering.
A. Front view
INPUT
Common 1 1
Force 3 4
7 8
Signal line
9 10
Common
GN DU Intlk !
INTLK terminal
B. Rear view
Ground terminal
Ground terminal
Triaxial Triaxial
Common terminal
connector connector Common terminal
Coaxial Coaxial
connector connector
115
105 5
50
5
12
4 - Ø 3.2
INPUT
1 1
3 4
5 6
210 220
196 Metal cover 7 8
9 10
11 12
G ND U Intlk !
Unit: mm
Metal cover
Keysight 16495H-002
(The difference between the Keysight 16495 F, H and J
is the number of the triaxial and coaxial connectors.)
230
220 5
50
5
12
4 - Ø 3.2
Unit: mm
206 12
Americas
Keysight B1500A Semiconductor Canada (877) 894 4414
Brazil 55 11 3351 7010
Device Analyzer
Mexico 001 800 254 2440
www.keysight.com/find/b1500a United States (800) 829 4444
Asia Pacific
Australia 1 800 629 485
China 800 810 0189
Hong Kong 800 938 693
India 1 800 112 929
Keysight B1505A Power Device Japan 0120 (421) 345
Analyzer/Curve Tracer Korea 080 769 0800
www.keysight.com/find/b1505a Malaysia 1 800 888 848
Singapore 1 800 375 8100
Taiwan 0800 047 866
Other AP Countries (65) 6375 8100
myKeysight Europe & Middle East
www.keysight.com/find/mykeysight Austria 0800 001122
A personalized view into the information most relevant to you. Belgium 0800 58580
Finland 0800 523252
Three-Year Warranty France 0805 980333
www.keysight.com/find/ThreeYearWarranty Germany 0800 6270999
Keysight’s commitment to superior product quality and lower total cost Ireland 1800 832700
of ownership. The only test and measurement company with three-year Israel 1 809 343051
warranty standard on all instruments, worldwide. Italy 800 599100
Luxembourg +32 800 58580
Keysight Assurance Plans Netherlands 0800 0233200
www.keysight.com/find/AssurancePlans Russia 8800 5009286
Up to five years of protection and no budgetary surprises to ensure your Spain 800 000154
Sweden 0200 882255
instruments are operating to specification so you can rely on accurate
Switzerland 0800 805353
measurements.
Opt. 1 (DE)
www.keysight.com/go/quality Opt. 2 (FR)
Opt. 3 (IT)
Keysight Technologies, Inc.
United Kingdom 0800 0260637
DEKRA Certified ISO 9001:2008
Quality Management System
For other unlisted countries:
Keysight Channel Partners www.keysight.com/find/contactus
www.keysight.com/find/channelpartners (BP-09-23-14)
Get the best of both worlds: Keysight’s measurement expertise and product
breadth, combined with channel partner convenience.
www.keysight.com/find/b1500a
www.keysight.com/find/b1505a
www.keysight.com/find/b2900a