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CEC340 MEMS DESIGN
COURSE OBJECTIVES: To understand the basic electrical and mechanical concepts of MEMS design To understand the design aspects of electrostatic sensors and actuators To understand the design aspects of thermal sensors and actuators To understand the design aspects of piezoelectric sensors and actuators To understand the design aspects of magnetic sensors and actuators UNIT I ESSENTIAL ELECTRIC AND MECHANICAL CONCEPTS Conductivity of semiconductors, Crystal planes and orientations, stress and strain, flexural beam bending analysis under single loading conditions, Types of beam Dynamic system, Spring Constant, torsional deflection, intrinsic stress, resonant frequency and quality factor UNIT II ELECTRO STATIC SESNING AND ACTUATION Electrostatic sensors, Parallel plate capacitor, Applications of parallel plate capacitors- inertial sensor, pressure sensor, flow sensor, tactile sensor, parallel plate actuators, interdigitated finger capacitors, applications of comb drive devices, Micro grippers, Micro motors. UNIT III THERMAL SENSING AND ACTUATION Fundamentals of thermal transfer, Thermal Sensing and actuation based on thermal expansion, Thermal couples, Thermal resistors, Thermal Biomorph, Applications- Infrared sensors, flow sensors, Inertia sensors, other sensors UNIT IV PIEZOELECTRIC AND MAGNETIC SENSING AND ACTUATION Mathematical description of piezoelectric effects, Cantilever piezoelectric sensing and actuator model, piezoelectric effects, properties of piezoelectric sensor materials –Quartz, PZT, PVDF, ZnO, Applications – Inertia, Acoustic sensors, Tactile sensors, Magnetic Actuators, Principle of Micro magnetic actuators‐ Deposition of magnetic materials‐Design and fabrication of magnetic coil. UNIT V MAGNETIC SENSING AND ACTUATION Concepts and principles- magnetization and nomenclatures, principles of micromagnetic actuators, fabrication of micro magnetic components- deposition, design and fabrication of magnetic coil, MEMS magnetic actuators POLYMER MEMS Polymers in MEMS Design‐ polymide‐SU‐8 Liquid crystal polymer (LCP)‐ PDMS – PMMA – Parylene ‐ Flurocorbon, Application‐Acceleration, pressure, flow and tactile sensors. 30 PERIODS PRACTICAL EXERCISES: 30 PERIODS 1. Design and simulation of piezoelectric cantilever 2. Design and simulation of thermo couples 3. Design and simulation of comb drive actuators COURSE OUTCOMES: Upon completion of this course, the students will be able to CO1: Understand the basics of MEMS design aspects. CO2: Apply the knowledge in the development of electro static sensors and actuators. CO3: Apply the knowledge in the development of thermal sensors and actuators. CO4: Apply the knowledge in the development of piezoelectric sensors and actuators. CO5: Apply the knowledge in the development of magnetic sensors and actuators. TOTAL:60PERIODS TEXTBOOKS 1.Chang Liu, “Foundations of MEMS”, Pearson education India limited, 2006 REFERENCES 1. Murty B.S, Shankar P, Raj B, Rath, B.B, Murday J, Textbook of Nanoscience and Nanotechnology, Springer publishing, 2013. 2. Sergey Edward Lyshevski, “MEMS and NEMS: Systems, Devices, and Structures”, CRC Press, 2002 3. Tai Ran Hsu, MEMS and Microsystems Design and Manufacture, Tata Mcgraw Hill, 2002 4. Vinod Kumar Khanna Nanosensors: Physical, Chemical, and Biological, CRC press,2012. CO’s-PO’s & PSO’s MAPPING CO PO1 PO2 PO3 PO4 PO5 PO6 PO7 PO8 PO9 PO10 PO11 PO12 PSO1 PSO2 PSO3 1332222-----13222333222-----23223333222-----23224333222 - - - - - 2 3 2 2 5 3 3 3 2 2 2 - - - - - 2 3 2 2 CO 3 3 2.8 2 2 2 - - - - - 1.8 3 2 2 1 - low, 2 - medium, 3 - high, ‘-' - no correlation
TEXT BOOK 1. Chang Liu, “Foundations of MEMS”, Pearson Indian Print, 1st Edition, 2012. REFERENCES 1. Gaberiel M. Rebiz, “RF MEMS Theory,Design and Technology”,John Wiley & Sons, 2003. 2. Charles P. Poole and Frank J. Owens, “Introduction toNanotechnology”, John Wiley & Sons, 2003. 3. Julian W.Gardner and Vijay K Varadhan, “Microsensors, MEMS and Smart Devices”, John Wiley & sons, 2001.
