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    MEMS

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    cetinabdullah2003

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    MEMS

    Uploaded by

    cetinabdullah2003
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    MEMS

    Uploaded by

    cetinabdullah2003

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    © All Rights Reserved
    Download as DOCX, PDF, TXT or read online from Scribd
    Download as docx, pdf, or txt
    of 1

    Micro-Electromechanical Systems:

    Accelerometers
    As the name implies, Micro-Electromechanical Systems (MEMS) combine mechanical and
    electrical components at the microscale. They are combined by using the techniques of
    microfabrication. The types of MEMS components can be very simple structures or extremely
    complex with a lot of moving parts. One of the most widely used MEMS products is the
    accelerometer. It measures the acceleration forces due to motion, vibration, or gravity.

    Figure 1 MEMS Based Accelerometer


    The working mechanism of MEMS based Accelerometer can be seen in Figure 1. A moving
    plate mass is suspended within a fixed plate by springs. When acceleration happens, the
    moving plate moves relative to the fixed plate. A capacitance is formed between two plates.
    When the plate moves the gap C will change and hence the capacitance. The difference
    between the two capacitances will give us the magnitude and direction of the acceleration.
    This difference is then converted to electrical signals.

    MEMS accelerometers have wide application areas. You can be even using them right now.
    They are used in electronics like tablets and gaming devices to track motion and screen
    orientation. So, when you play temple run on your phone, you rely on this little component.
    Also, due to their rapid detection ability they are used in automative and healthcare industries.
    For example, for airbag deployment or fall detection.

    In conclusion, MEMS accelerometers show us how micro-scale engineering transforms


    technology. With extremely compact design, low power consumption and scalable
    manufacturing, they became an essential product across multiple industries.

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