Kec053 Vlsi Technology

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Subject Code: KEC053


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BTECH
(SEM V) THEORY EXAMINATION 2023-24
VLSI TECHNOLOGY
TIME: 3 HRS M.MARKS: 100

Note: 1. Attempt all Sections. If require any missing data; then choose suitably.

SECTION A
1. Attempt all questions in brief. 2 x 10 = 20
Qno. Question Marks CO
a. Mention the advantages of ICs. 2 1
b. Define polishing. 2 1
c. What is auto doping in growth process? 2 2
d. What is plasma oxidation? 2 2
e. Explain photo mask. 2 3
f. What are PR materials? 2 3
g. Write the types of diffusion. 2 4
h. Define ion-implantation 2 4
i. Enlist different types of IC packages. 2 5
j. Write all packaging design considerations. 2 5
90

2
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SECTION B

2.
2. Attempt any three of the following: 10 x 3 = 30
P1

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a. Explain Electronic Grade Silicon with neat diagram 10 1
4D

b. Discuss Vapor-Phase Epitaxy. 10 2

5.
c. Explain in detail Optical Lithography. 10 3
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P2

d. Explain fick’s law of diffusion. 10 4


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Q

e. Discuss Package Types and Packaging Design Considerations. 10 5


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SECTION C
4 0

3. Attempt any one part of the following: 10 x 1 = 10


5:

a. Explain CZ process in detail with neat diagram. What is the pull rate in CZ 10 1
:4

technique?
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b. Discuss different shaping operations involved in preparing wafers with 10 1


diagram.
4

4. Attempt any one part of the following: 10 x 1 = 10


02

a. Explain the principle of Molecular Beam Epitaxy. 10 2


-2

b. What is latch up? How it is avoided in CMOS technology? 10 2


01

5. Attempt any one part of the following: 10 x 1 = 10


a. Explain the kinetics of wet watching. How gold is etched? 10 3
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b. How is the silicon nitride used? Explain its deposition variables. 10 3


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6. Attempt any one part of the following: 10 x 1 = 10


a. Define sheet resistance. Describe a method for its measurement. 10 4
b. Discuss gaseous and liquid diffusion system. 10 4
7. Attempt any one part of the following: 10 x 1 = 10
a. Explain Metallization and describe the problems associated with this process. 10 5
b. What do you mean by Sputtering? Explain Sputtering yield. 10 5

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QP24DP1_290 | 29-01-2024 13:45:40 | 117.55.242.132

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