Kec053 Vlsi Technology
Kec053 Vlsi Technology
Kec053 Vlsi Technology
BTECH
(SEM V) THEORY EXAMINATION 2023-24
VLSI TECHNOLOGY
TIME: 3 HRS M.MARKS: 100
Note: 1. Attempt all Sections. If require any missing data; then choose suitably.
SECTION A
1. Attempt all questions in brief. 2 x 10 = 20
Qno. Question Marks CO
a. Mention the advantages of ICs. 2 1
b. Define polishing. 2 1
c. What is auto doping in growth process? 2 2
d. What is plasma oxidation? 2 2
e. Explain photo mask. 2 3
f. What are PR materials? 2 3
g. Write the types of diffusion. 2 4
h. Define ion-implantation 2 4
i. Enlist different types of IC packages. 2 5
j. Write all packaging design considerations. 2 5
90
2
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SECTION B
2.
2. Attempt any three of the following: 10 x 3 = 30
P1
24
a. Explain Electronic Grade Silicon with neat diagram 10 1
4D
5.
c. Explain in detail Optical Lithography. 10 3
.5
P2
SECTION C
4 0
a. Explain CZ process in detail with neat diagram. What is the pull rate in CZ 10 1
:4
technique?
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