sensors

Article
Modeling and Piezoelectric Analysis of Nano
Energy Harvesters
Muhammad Faisal Wasim 1 , Shahzadi Tayyaba 2 , Muhammad Waseem Ashraf 1, *
and Zubair Ahmad 3, *
1 Department of Physics (Electronics), GC University, Lahore 54000, Pakistan; [email protected]
2 Department of Computer Engineering, The University of Lahore, Lahore 54000, Pakistan;
[email protected]
3 Center for Advanced Material (CAM), Qatar University, Doha PO Box 2713, Qatar
* Correspondence: [email protected] (M.W.A.); [email protected] (Z.A.)




Received: 19 February 2020; Accepted: 6 March 2020; Published: 15 July 2020


Abstract: The expedient way for the development of microelectromechanical systems (MEMS)
based devices are based on two key steps. First, perform the simulation for the optimization of
various parameters by using different simulation tools that lead to cost reduction. Second, develop the
devices with accurate fabrication steps using optimized parameters. Here, authors have performed a
piezoelectric analysis of an array of zinc oxide (ZnO) nanostructures that have been created on both
sides of aluminum sheets. Various quantities like swerve, stress, strain, electric flux, energy distribution,
and electric potential have been studied during the piezo analysis. Then actual controlled growth of
ZnO nanorods (NRs) arrays was done on both sides of the etched aluminum rod at low-temperature
using the chemical bath deposition (CBD) method for the development of a MEMS energy
harvester. Micro creaks on the substrate acted as an alternative to the seed layer. The testing was
performed by applying ambient range force on the nanostructure. It was found that the voltage range
on topside was 0.59 to 0.62 mV, and the bottom side was 0.52 to 0.55 mV. These kinds of devices are
useful in low power micro-devices, nanoelectromechanical systems, and smart wearable systems.

Keywords: aluminum; ANSYS; piezoelectric; MEMS; ZnO nanorods

1. Introduction
Sensing and energy production are the hot issues of the modern era, along with price control
of these technologies. However, various types of mechanical energy in the ambient base physical
environment such as typing stress, walking and running, vehicles, noise, and other sounds and other
industrial vibrations can be collected to be used in electronic devices [1]. Different forms of mechanical
energy that are found in a natural environment like the flow of water, blowing of wind, and tide
still need to be explored [2]. Microelectromechanical system (MEMS) based devices exhibit modern
features. Smart materials play an important role in creating multifunctional characteristics in these
devices. Nanostructures have changed the functionality and dimensions of these devices. Most of these
devices are based on the nanostructure basic functionality that are part of modern energy devices.
Nanostructures of different dimensions are used in different MEMS devices to perform various tasks
such as sensing, actuation, balancing, controlling, and pumping [3]. To achieve these functionalities,
one dimensional (1D) nanostructures like nanorods, nanowires, nanotubes, nano-tapes, and nano-belts
can play a vital role [4–7]. Nanorods, nanotubes, and thin film like structures are extensively used for
energy harvesting devices. The piezoelectric and other physical aspects of the nanomaterials have also
been used to manufacture the MEMS devices in the nano-regime for energy generation [8]. Zinc oxide
is most suitable material for synthesis of 1D nanostructures by using various techniques such as

Sensors 2020, 20, 3931; doi:10.3390/s20143931 www.mdpi.com/journal/sensors

Sensors 2020, 20, x FOR PEER REVIEW 2 of 10

nano-regime for energy generation [8]. Zinc oxide is most suitable material for synthesis of 1D
nanostructures by using various techniques such as electron beam gun evaporation, thermal
Sensors
vacuum 20, 3931
2020,evaporation (TVE), metal-organic chemical vapor deposition (MOCVD), molecular 2beam of 10

epitaxial (MBE) growth, sputtering, chemical bath deposition (CBD), dip coating, and hydrothermal
methodsbeam
electron [9]. Vertical highly aligned,
gun evaporation, uniform,
thermal vacuum and straight arrays
evaporation of metal-organic
(TVE), the ZnO nanorods on surfaces
chemical vapor
and their interfaces have a prominent role in the performance of MEMS
deposition (MOCVD), molecular beam epitaxial (MBE) growth, sputtering, chemical bath deposition devices. ZnO nanorods
aligneddip
(CBD), incoating,
the c-axis andofhydrothermal
applied stress can cause
methods deformation
[9]. Vertical highlytoaligned,
develop an electric
uniform, field [10].
and straight The
arrays
vibrational energy harvester with a piezoelectric effect was reported with
of the ZnO nanorods on surfaces and their interfaces have a prominent role in the performance of a downshift of resonance
frequencies
MEMS devices. [11].
ZnO Dynamic
nanorods vibrational
aligned in effects areofimportant
the c-axis and can
applied stress cancause
be studied with to
deformation a bi-stable
develop
an electric field [10]. The vibrational energy harvester with a piezoelectric effect was reportedvarious
electromagnetic harvester [12]. These piezoelectric energy harvesters can be tuned to with a
methods, like
downshift the biasing
of resonance flip method
frequencies [13].
[11]. The degree
Dynamic of freedom
vibrational effects(DOF) is a critical
are important andparameter in the
can be studied
dynamic mode of harvesters [14]. Piezoelectric and electromagnetic effects are
with a bi-stable electromagnetic harvester [12]. These piezoelectric energy harvesters can be tuned toalso useful for energy
harvesters
various basedlike
methods, on wind effectsflip
the biasing [15]. Such [13].
method vibrational piezoelectric
The degree of freedom material
(DOF) isbased MEMS
a critical energy
parameter
harvesters are crucial for self-power electronic devices with micropower, nano
in the dynamic mode of harvesters [14]. Piezoelectric and electromagnetic effects are also useful for electromechanical
systems,
energy and smartbased
harvesters wearable
on windsystems [1].[15]. Such vibrational piezoelectric material based MEMS
effects
In this work, the authors have adopted
energy harvesters are crucial for self-power electronic a low-temperature
devices with CBD methodnano
micropower, for the growth of ZnO
electromechanical
nanostructures due to its simplicity
systems, and smart wearable systems [1]. and low-cost. The etched aluminum substrate has been used for
fabrication of thethe
In this work, nanorods. ANSYS
authors have software
adopted was used for piezo
a low-temperature simulation.
CBD method Thegrowth
for the testingofofZnO
the
developed MEMS energy harvester was also performed.
nanostructures due to its simplicity and low-cost. The etched aluminum substrate has been used
for fabrication of the nanorods. ANSYS software was used for piezo simulation. The testing of the
2. Design, Working Principle, and Dependent Parameters of Nano-Harvesters
developed MEMS energy harvester was also performed.
The piezoelectric analysis comprises coupling the electric field and structure. When functional
2. Design, Working
force is applied Principle, the
on nanorods, andpiezoelectric
Dependent Parameters of Nano-Harvesters
material exhibits compression, and contrariwise the
vibrations create voltage. The direct effect of piezoelectricity can be represented
The piezoelectric analysis comprises coupling the electric field and by the
structure. When general
functional
equation given below
force is applied on nanorods, the piezoelectric material exhibits compression, and contrariwise the
vibrations create voltage. The direct effect of piezoelectricity can be represented by the general equation
given below = +ℰ (1)
D = dT + EE (1)

where,
where, = ( )
D = Electrical Polarization ( mC2 )
= ( )
T = Stress Vector ( mN2 )
=
d = Piezoelectric Coe f f icent matrix
ℰ=
E = Electrical Permitivity matrix
= ( )
E = Electic Field vector ( mV
)
The electric
The electric field
field isis applied
applied parallel
parallel toto the
the z-axis.
z-axis. The
The direction
direction of
of positive
positive polarization
polarization isis
customarily parallel with the z-axis, and conversely, the strain is applied in the x-axis. TheThe
customarily parallel with the z-axis, and conversely, the strain is applied in the x-axis. schematic
schematic of
of the nano-generator working principle is shown
the nano-generator working principle is shown in Figure 1. in Figure 1.

Figure1.1. Schematic
Figure Schematic of
of nano-generator
nano-generator working
workingprinciple.
principle.

The performance and robustness of the nano-generator depend on various parameters. Some of
these parameters are involved during synthesis or fabrication stages, and rests are involved in the
harvesting stage. The fabrication stage parameters are the nanorod length, diameter, and the surface
Sensors 2020, 20, x FOR PEER REVIEW 3 of 10
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The performance and robustness of the nano-generator depend on various parameters. Some of
SensorsThe performance
2020, 20, 3931 and robustness of the nano-generator depend on various parameters. Some 3 of of
10
these parameters are involved during of synthesis or fabrication stages, and rests are involved in
of the
these The performance
parameters and robustness
are involved the nano-generator
during synthesis or fabricationdepend
stages,on and
various
restsparameters.
are involvedSomein the
harvesting stage. The
these parameters arefabrication stage parameters
involved during are
synthesis orare the nanorod
fabrication stages, length, diameter,
and diameter,
rests and the
are involved insurface
the
harvesting stage. The fabrication stage parameters the nanorod length, and the surface
area
area
area
ofofthe
harvesting
of thedevice.
the device.
device.
The
stage. TheThe
The
harvesting
fabrication
harvesting
harvesting
stage
stage
stage
stage
parameters
parameters
parameters
parameters
are
areare
are tapping
thetapping
nanorodforce
tapping forceand
length,
force and
and frequency.
diameter,
frequency.
frequency.andThe
the
TheThe current,
surface
current,
current,
voltage,
area
voltage, power,
of the
power, and
device.
and efficiency
The
efficiency of
harvesting
of nanogenerators
stage parameters
nanogenerators directly
are
directly depend
tapping
depend force
on on
the the
and parameters
frequency.
parameters
voltage, power, and efficiency of nanogenerators directly depend on the parameters of the above of The
the of the above
current,
above two
twovoltage,
stages.
stages. power,
TheThe and
schematic
schematic efficiency of nanogenerators
ofofparametric
of parametric dependency
dependency directly
is shown
is shown depend
shown on
inFigure
in Figure Figurethe
2. 2.2.parameters of the above
two stages. The schematic parametric dependency is in
two stages. The schematic of parametric dependency is shown in Figure 2.

Figure
Figure 2. Schematic
Schematic of parametric
ofparametric dependency
parametric dependency of
dependencyof
of nano-generators.
nano-generators.
Figure2.2.
Figure 2.Schematic
Schematicof
of parametric dependency ofnano-generators.
nano-generators.
3. ANSYS
3. ANSYS Simulation
Simulation
3. ANSYS
3. ANSYS Simulation
Simulation
ANSYS (ANSYS
ANSYS (ANSYS 17 17 perpetual
perpetual license
license purchased
purchased by by Ibadat
Ibadat Education
Education Trust, Trust, the
the University of
Universityofof
ANSYS
ANSYS (ANSYS1717perpetual
(ANSYS perpetuallicense
license purchased
purchased by by Ibadat
Ibadat Education
Education Trust,
Trust,thethe
University
University of
Lahore,
Lahore, Pakistan)
Pakistan) was
was used
used for the simulation
simulation of dual side array of ZnO nanorods. This array was
Lahore,
Lahore, Pakistan) was used for the simulation of dual side array of ZnO nanorods. This array was
createdPakistan)
created on aluminum
on aluminumwas used for the After
sheets/rods.
sheets/rods.
simulation
After creating
ofthe
creating dual
the 3D3Dside
3D
array of
geometry
geometry
ofthe
of the
ZnO nanorods.
nanorod
thenanorod
nanorod array,This
array,
array was
the material
the material
created
created onon aluminum
aluminum sheets/rods.After
sheets/rods. After creating
creating the
the 3D geometry
geometry ofof the nanorod array, the
array, material
the material
properties of ZnO
ZnO weredefined.
defined. Then,structural
structuralelement
elementSolid
Solid 226 and circuit element Circuit
propertiesofof ZnO were
were defined. Then,
Then, structural element 226
Solid 226 and
and circuit
circuit element
element Circuit
Circuit 9494
properties
94
werewere of ZnO
chosen, were
and defined.
meshing ofThen,
aluminumstructural element
substrate with Solid
a 226
glued and
array circuit
of rods element
was performed. 94
Circuit
performed.
were chosen,
chosen, andand meshing
meshing of of aluminum
aluminum substrate with aa glued
substrate with glued array
array of of rods
rods waswas performed.
were chosen,
Required and meshing of aluminum
such substrate with a glued array of rods was performed.
Requiredboundary
boundaryconditions,
conditions, such
such asas degree of freedom,
degree of freedom, andand loads,
loads, such
suchas asforce,
force,were
wereapplied
applied toto
Required
the boundary
model. The 3D conditions,
geometry, such
mesh as degree
model, and of freedom,
model with and
load loads,
are shown such in as force,
Figure were
3. applied to
the model.TheThe3D3Dgeometry,
geometry, mesh model, and model with load are shown in inFigure
Figure3.3.
the model. The 3D geometry, mesh model, and model with load are shown in Figure 3.

Figure 3.
Figure 3. Geometry
Geometry of the (a)
of the (a) solid;
solid; (b)
(b) mesh;
mesh; (c)
(c)load.
load.
Figure 3. Geometry of the (a) solid; (b) mesh; (c) load.
Thesimulation
The simulationwas was carried
carried out
out in APDL, and results werewere visualized
visualized andandanalyzed
analyzed[16].
[16].As
Asthe
the
structuraland
structural and
and piezo
piezoelements
piezo elementswere
elements defined
were
were during
defined simulation,
during bending,
simulation,
simulation, stress, strain,
bending,
bending, stress,electrical
stress, strain, potential,
strain, electrical
electrical
The simulation was carried out in APDL, and results were visualized and analyzed [16]. As the
energy distribution,
potential,
potential, energy and electrical
energy distribution,
distribution, andflux
and were observed.
electrical
electrical flux were The deflection
observed.
observed. The of
The 3D geometry
deflection
deflection of 3Dat
of3D the applied
geometry
geometry atat
structural and piezo elements were defined during simulation, bending, stress, strain, electrical
theapplied
loads
the applied
occurred loads occurred
in occurred
loads the in the
X, Y, and
in the X, Y, and Zasdirections,
Z directions,
X, shown in as shown
Figure
as shown4. in
in Figure
Figure4.4.
potential, energy distribution, and electrical flux were observed. The deflection of 3D geometry at
the applied loads occurred in the X, Y, and Z directions, as shown in Figure 4.

Figure 4. Deflection along direction (a) X; (b) Y; (c) Z.

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Sensors 2020, 20, 3931 4 of 10

Figure
Figure4.4.Deflection
Deflection along direction(a)
along direction (a)XX ;(b)Y;Y(c)
;(b) ; (c)
Z. Z.

TheThe deflection
deflection
The of of
deflection thethe
of thepresented
presented 3Dmodel
presented3D
3D modelcan
model canbe be
be calculated
alongalong
calculated
calculated along
all allall
directions. TheThe
directions.
directions. The contour contour
and contour
and and vector
vector plot
vector plot ofthe
ofofthe
plot the veer
veer
veer are
are
are shown
shown
shown ininFigure
Figure
in Figure 5.
5. It 5.
wasIt was
wasfound
Itfound found that
that the the
that the
maximum maximum
value invalue
maximum barinwas
thevalue the
in bar
the bar
was 4.52
4.52
was 4.52 µm. µm.
µm.

Figure 5. Total deformation (a) contour plot; (b) vector form.

Figure 5. Total deformation (a) contour plot; (b) vector form.
Figure 5. Total deformation (a) contour plot; (b) vector form.
DueDue
to the uniform
to the uniformapplied
appliedload onthe
load on thegeometry,
geometry, thethe stress
stress occurs
occurs in thein
X,the X, Y,
Y, and and Z directions
Z directions and
and can
canbebeanalyzed.
analyzed. Stress-related values are shown in Figure 6. The values of maximum
Stress-related values are shown in Figure 6. The values of maximum stress intensity stress
Due to the uniform applied load on the geometry, the stress occurs in the X, Y, and Z directions
intensity andMises
and Von Von stress
Miseswere
stress were and
1162.86 1162.86 andPa,1094.92
1094.92 Pa, respectively.
respectively.
and can be analyzed. Stress-related values are shown in Figure 6. The values of maximum stress
intensity and Von Mises stress were 1162.86 and 1094.92 Pa, respectively.

Figure
Figure 6. Stress
6. Stress (a)(a)
X;X; (b)Y;Y;(c)
(b) (c)Z;
Z;(d)
(d) intensity;
intensity; (e)
(e)Von
VonMises;
Mises;(f) (f)
vector form.
vector form.
Change in geometry occurs due to stress, and its values in the X, Y, and Z directions are shown in
Change
Figure in geometry
7. The maximumoccurs due
values of to stress,
strain intensityand
anditsVon
values
Misesinstrain
the X, Y, and
were Z10
13.2 × directions
−9 and 10 ×are 10shown
−9 .
in Figure 7.
During theThe maximum
piezoelectric values of strain intensity and Von Mises strain were 13.2 the values 10 ×
× 10 -9 and
Figure 6. Stress analysis,
(a) X; (b)itY;was
(c) found that the ZnO
Z; (d) intensity; (e) rod
Vonarray was
Mises; (f)stable,
vectorand
form.
10 . related
-9 Duringtothe piezoelectric
stress were in theanalysis,
limit of theit was found
elastic range.that the ZnO rod array was stable, and the values
related toAsstress were in the limit of the elastic range.
Change inthe arrays of ZnO rods were on both sides
geometry occurs due to stress, and of an aluminum sheet, piezo properties were defined
its values in the X, Y, and Z directions are shown
and analyzed on only the rod-like structure. The value of voltage was considered 0–100 V during the
in Figurepiezo
7. The maximum values of strain intensity and Von Mises strain were 13.2 × 10-9 and 10 ×
analysis. Therefore, the electrical potential distribution was 0–100 V, as given in the Figure 8.
10-9. During
This the piezoelectric
distribution analysis,on
can be visualized it was found
both sides of that the ZnOduring
the nanorods rod array was stable,
the applied load dueand the values
to the
related to stressdifference.
polarity were in the limitflux,
Electrical of the
energyelastic range. and electrical potential are shown in Figure 8.
distribution,
The maximum values of electrical flux, energy distribution, and electrical potential are 227 × 10−9 c/m2 ,
97.9 × 10−9 watts, and 100 V, respectively.
 Sensors 2020, 20, 3931 5 of 10
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Figure 7. Strain (a) X; (b) Y; (c) Z; (d) intensity; (e) Von Mises; (f) vector form.

As the arrays of ZnO rods were on both sides of an aluminum sheet, piezo properties were
defined and analyzed on only the rod-like structure. The value of voltage was considered 0–100 V
during the piezo analysis. Therefore, the electrical potential distribution was 0–100 V, as given in the
Figure 8. This distribution can be visualized on both sides of the nanorods during the applied load
due to the polarity difference. Electrical flux, energy distribution, and electrical potential are shown
in Figure 8. The maximum values of electrical flux, energy distribution, and electrical potential are
227 × 10-9 c/m2, Figure
97.9 × 10 -9 watts, and 100 V, respectively.
7. Strain (a) X; (b) Y; (c) Z; (d) intensity; (e) Von Mises; (f) vector form.
Figure 7. Strain (a) X; (b) Y; (c) Z; (d) intensity; (e) Von Mises; (f) vector form.

As the arrays of ZnO rods were on both sides of an aluminum sheet, piezo properties were
defined and analyzed on only the rod-like structure. The value of voltage was considered 0–100 V
during the piezo analysis. Therefore, the electrical potential distribution was 0–100 V, as given in the
Figure 8. This distribution can be visualized on both sides of the nanorods during the applied load
due to the polarity difference. Electrical flux, energy distribution, and electrical potential are shown
in Figure 8. The maximum values of electrical flux, energy distribution, and electrical potential are
227 × 10-9 c/m2, 97.9 × 10-9 watts, and 100 V, respectively.
Figure 8. Piezoelectric quantities: (a) electrical flux density; (b) energy distribution; (c) electrical
Figure 8. Piezoelectric quantities: (a) electrical flux density; (b) energy distribution; (c) electrical
potential distribution.
potential distribution.
4. Manufacturing
4. Manufacturing
The main steps involved in experimentation were cleaning, etching, growth on the nanostructure,
The main of
development steps involvedand
a connection, in testing.
experimentation were cleaning,
The development and testingetching, growth
of the energy on thecan
harvester
nanostructure,
be performed using the technique which was reported in our previous work [1]. First, the energy
development of a connection, and testing. The development and testing of the pure and
harvester
smooth can be performed
aluminum sheet ofusing
0.5 mm thethick
technique
was cut which
into awas reported
piece in our
of the size 2 cmprevious
× 5 cm. work
Then,[1]. First, of
cleaning
thethe
pure and smooth
aluminum aluminum
substrate sheet of using
was performed 0.5 mm thethick was cut
standard into aThen,
method. pieceetching
of the size
was 2carried
cm x 5outcm.[17].
Then, cleaning of the aluminum substrate was performed using the standard method.
The solution was prepared by adding 60 g sodium chloride (NaCl) into 500 mL of deionized water. Then, etching
was carried
This out [17].
solution was putTheinto
solution was prepared etching
the self-developed by adding 60 gThe
setup. sodium chloride
etching vessel(NaCl) into of
consisted 500 mLflat
two
of Figure
deionized
carbon barswater. Thisby
separated
8. Piezoelectric solution
a smallwas
quantities: putelectrical
distance
(a) into
and the self-developed
adjusted
flux (b)etching
parallel to
density; each setup.
other.
energy TheThe etching
aluminum
distribution; vessel
substrate
(c) electrical
consisted of between these carbon-based parallel electrodes. The voltage of 30 V was applied forother.
two flat
was fixeddistribution.
potential carbon bars separated by a small distance and adjusted parallel to each 10 min.
The aluminum
Then substrate
the substrate was was fixedand
washed between
dried inthese carbon-based
an oven. parallel
The actual electrodes.
and schematic The voltage
diagram of the of 30
etching
V was applied for 10 min.
setup is shown in Figure 9.
4. Manufacturing Then the substrate was washed and dried in an oven. The actual and
schematic diagram
After etching ofthe
thealuminum
etching setup is shown
substrate, theinZnO
Figure 9.
nanorods were deposited using chemical bath
The main This
deposition. steps involved
method providesin a constant
experimentation
temperature were
insidecleaning,
the chemical etching,
bath forgrowth
the uniformon the
nanostructure, development
growth of nanorods. of a connection,
The etched andtreated
substrate was testing. Thedodicanthiol
with development for and testing
3 h and thenofdried
the energy
at
◦
harvester
80 C.canThisbe performed
treated using
substrate the technique
was attached whichcatcher
with a Teflon was reported in our
and inserted into previous
the beakerwork [1]. First,
at constant
magnetic
the pure stirring. The
and smooth beaker contained
aluminum sheet of a0.5
15 mm
mM solution
thick wasof zinc acetate
cut into di-hydrate
a piece and
of the hexa-amine.
size 2 cm x 5 cm.
◦
Then,The temperature
cleaning of theofaluminum
the beaker substrate
was 95 C. was
The position
performedof the substrate
using was flipped
the standard every 30Then,
method. min and
etching
the solution was changed after 2 h. This process continued for 8 h. Then the substrate
was carried out [17]. The solution was prepared by adding 60 g sodium chloride (NaCl) into 500 was annealed at mL
◦
400 C. The schematic and actual CBD setup is shown in Figure 10.
of deionized water. This solution was put into the self-developed etching setup. The etching vessel
consisted of two flat carbon bars separated by a small distance and adjusted parallel to each other.
The aluminum substrate was fixed between these carbon-based parallel electrodes. The voltage of 30
V was applied for 10 min. Then the substrate was washed and dried in an oven. The actual and
schematic diagram of the etching setup is shown in Figure 9.
 Figure 9. Carbon parallel plates chemical etching setup.

After etching the aluminum substrate, the ZnO nanorods were deposited using chemical bath
deposition. This
Sensors method
2020, 20, 3931 provides a constant temperature inside the chemical bath for
6 of 10 the uniform
Sensors 2020, 20, x FOR PEER REVIEW 6 of 10
growth of nanorods. The etched substrate was treated with dodicanthiol for 3 hrs and then dried at
80 ˚C. This treated substrate was attached with a Teflon catcher and inserted into the beaker at
constant magnetic stirring. The Figure 9. Carbon
beaker parallel plates
contained a 15chemical
mM etching setup.
solution of zinc acetate di-hydrate and
hexa-amine. The temperature of the beaker was 95 ˚C. The position of the substrate was flipped
After etching the aluminum substrate, the ZnO nanorods were deposited using chemical bath
every 30 min andThis
deposition. themethod
solution was changed
provides a constantafter 2 hrs. This
temperature insideprocess continued
the chemical bath forfor
the 8uniform
hrs. Then the
substrate was of
growth annealed
nanorods.atThe 400etched
˚C. The schematic
substrate and actual
was treated CBD setupfor
with dodicanthiol is 3shown
hrs andin Figure
then dried10.
at
80 ˚C. This treated substrate was attached with a Teflon catcher and inserted into the beaker at
constant magnetic stirring. The beaker contained a 15 mM solution of zinc acetate di-hydrate and
hexa-amine. The temperature of the beaker was 95 ˚C. The position of the substrate was flipped
every 30 min and the solution was changed after 2 hrs. This process continued for 8 hrs. Then the
substrate was annealed at 400 ˚C. The schematic and actual CBD setup is shown in Figure 10.
Figure 9. Carbon parallel plates chemical etching setup.
Figure 9. Carbon parallel plates chemical etching setup.

After etching the aluminum substrate, the ZnO nanorods were deposited using chemical bath
deposition. This method provides a constant temperature inside the chemical bath for the uniform
growth of nanorods. The etched substrate was treated with dodicanthiol for 3 hrs and then dried at
80 ˚C. This treated substrate was attached with a Teflon catcher and inserted into the beaker at
constant magnetic stirring. The beaker contained a 15 mM solution of zinc acetate di-hydrate and
hexa-amine. The temperature of the beaker was 95 ˚C. The position of the substrate was flipped
every 30 min and the10.
Figure solution wasbath
Chemical changed after 2schematic
deposition hrs. This and
process continued
functional for 8 hrs. Then the
diagram.
substrate was annealed at 400 ˚C. The schematic and actual CBD setup is shown in Figure 10.
5. Characterization and Testing
Figure
Figure 10. Chemical
10. Chemical bath
bath deposition schematic
deposition schematic and
andfunctional diagram.
functional diagram.
The etched sheet of aluminum
5. Characterization and Testing was viewed using a scanning electron microscope (SEM) and the
5. Characterization
image is shown in and Testing
TheFigure 11. of
etched sheet It aluminum
is clear that smallusing
was viewed creaks appeared
a scanning electrononmicroscope
the surface.
(SEM) These
and the micro creaks
have been used
The asisan
image
etched alternative
shown
sheetinof
Figure toItthe
11.
aluminum seed
is was
clear thatlayer. Normally,
smallusing
viewed creaks
a appeared
scanning the seed
onelectron
the layer
surface. aligns
These
microscopemicroand gives
creaks
(SEM) and thestrength
have been used as an alternative to the seed layer. Normally, the seed layer aligns and gives
image is shown in Figure 11. It is clear that small creaks appeared on the surface. These micro creaks strength
to nanorods.
to nanorods.
have been used as an alternative to the seed layer. Normally, the seed layer aligns and gives strength
to nanorods.

Figure 10. Chemical bath deposition schematic and functional diagram.

5. Characterization and Testing

The etched sheet of aluminum was viewed using a scanning electron microscope (SEM) and the
image is shown in Figure 11. It is clear that small creaks appeared on the surface. These micro creaks
Figure 11. SEM graph of the etched aluminum substrate.
have been used as an alternative
Figure toSEM
11.11.
Figure SEM thegraph
seed
graphlayer.
of the Normally,
of the the seed
etchedaluminum
etched aluminum layer aligns and gives strength
substrate.
substrate.
to nanorods.The cross-sectional view of the nanorods on the etched aluminum substrate sheet is shown in
Figure 12. It was found that the rod length was around 4 µm, and the width of the used aluminum
thick sheet was determined to be 50 µm (0.05 mm). The morphological picture clarifies the vertical
alignment of the synthesized nanorods.
 Sensors 2020, 20, x FOR PEER REVIEW 7 of 10
Sensors 2020, 20, x FOR PEER REVIEW 7 of 10

The cross-sectional
The cross-sectional view
view of
of the
the nanorods
nanorods on
on the
the etched
etched aluminum
aluminum substrate
substrate sheet
sheet isis shown
shown inin
Figure 12. It was found that the rod length was around 4 µm, and the width of the used
Figure 12. It was found that the rod length was around 4 µm, and the width of the used aluminum aluminum
thick sheet
thick sheet was
was determined
determined toto be
be 50
50 µm
µm (0.05
(0.05 mm).
mm). The
The morphological
morphological picture
picture clarifies
clarifies the
the vertical
vertical
Sensors 2020, 20, 3931 7 of 10
alignment of the synthesized nanorods.
alignment of the synthesized nanorods.

Figure 12.
Figure 12. SEM
12. SEMcross-sectional
SEM cross-sectionalimages
cross-sectional images
images of ZnO
of of
ZnOZnO nanorods:
nanorods: (a,b)
(a,b)(a,b)
nanorods: side
side side view;
view;view; (c)
(c) top(c) topview;
edge
top edge(d)
edge view; (d)
bottom
view; (d)
bottom edge view.
edge view.
bottom edge view.

The sample
The sample surface
surface was
was also
also viewed
viewed by
by SEM,
SEM, as
as shown
shown in
in Figure
Figure 13.
13. These
These nanorods
nanorods were
were
vertically aligned and highly dense.
vertically aligned and highly dense.

Figure 13.
Figure 13. Surface
Surface view
Surface view of
view of SEM
of SEM images
SEM images of ZnO
images of ZnO nanorods:
nanorods: (a)
(a) topside
(a) topside view;
topside view; (b)
view; (b) bottom
(b) bottom side
bottom side view.
side view.

Figure 14
Figure 14 shows
shows the
the X-ray
X-ray diffraction
diffraction (XRD) patterns of
(XRD) patterns
patterns of the
the ZnO
ZnO nanorods
nanorods grown
grown on on the
the etched
etched
Figure 14 shows the X-ray diffraction (XRD) of the ZnO nanorods grown on the etched
aluminum sheet.
aluminum sheet. A
sheet. A hexagonal
A hexagonal wurtzite
hexagonal wurtzite structure
wurtzite structure has
structure hasbeen
has beenfound
been found with
found withspace group
with space
space group P63mc,
group P63mc, (ICDD
P63mc, (ICDDcard
(ICDD
aluminum
no: 04-008-8198),
card whichwhich
no: 04-008-8198),
04-008-8198), is the typical
is the structure
the typical
typical of ZnO.ofThe
structure sharpness
ZnO. of the (0 of
The sharpness
sharpness 0 2)the
XRD(0 00peaks
2) XRD
XRDindicated
peaks
card no: which is structure of ZnO. The of the (0 2) peaks
the growth
indicated the of the
the growth ZnO
growth of nanorods
of the
the ZnO in the
ZnO nanorods vertical
nanorods in in the direction,
the vertical which
vertical direction, were
direction, which the
which were most
were the important
the most for
most important the
important
indicated
piezoelectric
for the effect.
the piezoelectric No peaks
piezoelectric effect.
effect. No of any
No peaks new
peaks of phases
of any
any new were
new phasesdetected
phases were in the
were detected XRD
detected in patterns,
in the
the XRD which
XRD patterns, show
patterns, whichthe
which
Sensorsfor
2020, 20,
uniformity x FOR PEER REVIEW
of the synthesized nanorods.nanorods. 8 of 10
show
show the uniformity
the uniformity of the
of the synthesized
synthesized nanorods.
(0 0 2)
Intensity

Z n O n a n o ro d e s
(2 0 0)

2 9 .5 5 3 9 .5 5 4 9 .5 5 5 9 .5 5 6 9 .5 5 7 9 .5 5

2 T h e ta (d e g r e e )

Figure14.
Figure XRD patterns.
14. XRD patterns.

After the synthesis of ZnO nanostructures, the MEMS energy harvester was developed by
making contacts using a supporting technique. The open-circuit voltage was studied. To measure
the output parameters of the piezoelectric generators, the required frequency, known as the
 (2 0 0)
2 9 .5 5 3 9 .5 5 4 9 .5 5 5 9 .5 5 6 9 .5 5 7 9 .5 5

2 T h e ta (d e g r e e )
Sensors 2020, 20, 3931 8 of 10
Figure 14. XRD patterns.

After
Afterthe
thesynthesis of ZnO
synthesis of ZnO nanostructures,
nanostructures, the MEMS energy
the MEMS harvester
energy was developed
harvester by making
was developed by
contacts using a supporting technique. The open-circuit voltage was studied.
making contacts using a supporting technique. The open-circuit voltage was studied. To measureTo measure the output
parameters
the outputofparameters
the piezoelectric
of thegenerators, the required
piezoelectric frequency,
generators, known as
the required the mechanical
frequency, known resonance
as the
frequency,
mechanicalgives the optimized
resonance frequency, harvest
gives the power. But, the
optimized conditions
harvest power.forBut,
thethe
vibrational
conditionsexcitation
for the
vibrationalare
frequencies excitation
different frequencies are different
from the resonance fromThe
frequency. thepower
resonance frequency.
of generation Theimproved
can be power of by
generation
using can be
impedance improved
matching andby using impedance
adjusting the load. To matching
accomplishandsuch
adjusting the load.
a condition To accomplish
the load circuit and
such a condition
impedance the load circuit
of the generator were and impedance
matched to get of
thethe generatorpower.
maximum were matched
An energy to get the maximum
harvesting circuit
power. An energy harvesting circuit was used for impedance matching. The cyclic
was used for impedance matching. The cyclic force was applied on the generator using test setup to force was applied
on the the
harvest generator
energy using test consisted
that setup setup to harvest the follower
of the cam energy that setup consisted
mechanism. of the
The voltage cam follower
observed on the
mechanism.
topside was in Thethevoltage
range observed
of 0.59 toon0.62themV,
topside
and was in the range
the bottom side of 0.59
was to 0.62
0.52 mV,mV,
to 0.55 andas
the bottom
shown in
side was
Figure 15. 0.52 to 0.55 mV, as shown in Figure 15.

Figure 15. Open circuit voltage: (a) top side; (b) bottom side.
Figure 15. Open circuit voltage: (a) top side; (b) bottom side.
Generally, the outputs of the ZnO based MEMS energy harvester such as current, voltage, power,
Generally,depend
and efficiency the outputs of thelike
on factors ZnO based length,
nanorod MEMS energy
nanorodharvester
diameter, such as current,
surface area orvoltage,
sample
power,
size, and frequency,
tapping efficiency depend on factors
and tapping force. like nanorodconditions
Harvesting length, nanorod
are alsodiameter,
importantsurface
for thearea
MEMS or
sample size, tapping frequency, and tapping force. Harvesting conditions are also
energy harvester, along with impedance matching. There is no output power if the resonant frequency important for the
MEMS
does notenergy harvester,
match with along
exciting with impedance
frequency. Hence, morematching.
powerThere
can beis achieved
no outputby power
load if the resonant
matching with
frequency does
impedances not Various
[18,19]. match with excitingreported
researchers frequency. Hence,sided
a single morenano-generator
power can be achieved by load
with the different
matching[20,21]
substrates with impedances [18,19].
while we have Variousa researchers
developed nano-generatorreported
on botha single
sides sided
of the nano-generator with
substrate by growing
the different substrates [20,21] while we have developed a nano-generator on
the piezo material on both sides of the substrate. Khan et al. [22] reported a similar device that wasboth sides of the
substrateon
fabricated bynanoporous
growing thealuminum
piezo material on both
oxide with sides
a large of the
sample substrate.
size Khan
with single sideetpiezo
al. [22] reported
material whilea
similar device that was fabricated on nanoporous aluminum oxide with a large
Kasi et al. reported an electro polishing system to fabricate such a membrane [23]. Their growth time sample size with
single
was 5 hr,side piezo
while thematerial while shows
current study Kasi etthe
al. nanostructure
reported an electro
growth polishing system to fabricate
in 4 h. Nanomaterial based such
MEMS a
membrane
energy [23]. can
harvesters Their
be growth time
fabricated usingwas 5 hr, while
chemical the current
and physics studymethods.
deposition shows the nanostructureis
Reproducibility
growth in 4 hrs. Nanomaterial based MEMS energy harvesters can be fabricated
one of the challenging aspects of using chemical methods. The physical methods have more using chemical and
accuracy
physics deposition methods. Reproducibility is one of the challenging aspects of using chemical
than chemical methods due to the optimized parameters. On the other hand, chemical methods are
methods. The physical methods have more accuracy than chemical methods due to the optimized
low cost and easy to fabricate with less percentage of reproducibility. Sufficient energy harvesting
parameters. On the other hand, chemical methods are low cost and easy to fabricate with less
power is required to operate medical, microfluidics, and small-scale power devices [24–26]. By using
directional piezoelectric energy, the harvester is more suitable for such applications [27]. The new
design presented in this study with two side growth of nano piezo-material for energy harvesting can
also be helpful to fulfill the requirements of small scale devices.

6. Conclusions
The optimization of various parameters by using soft computing techniques is a modern method.
This study presents the simulation and development of MEMS-based energy harvesters. The fabrication
of the harvester was reported using a cost-effective method. First, the piezo analysis for the array of
nanorods on both sides of the aluminum substrate was performed to optimize different qualities such
as veer, stress, strain, energy distribution, electric flux, and electric potential. Then, micro cracks were
developed on both sides of the substrate, acting as an alternative to the seed layer. The seed layer
Sensors 2020, 20, 3931 9 of 10

gives the strength and alignment to nanorods. The synthesis of zinc oxide nanorods was performed on
both sides of aluminum sheet at low temperature using the CBD method for the development of a
MEMS energy harvester. After making contact, the open circuit voltage was measured using a cam
follower testing setup by adjusting the impedance matching. It was found that the voltage range on
the topside was 0.59 to 0.62 mV and the bottom side was 0.52 to 0.55 mV as observed during testing.
It was concluded that such devices are useful in self-powered electronic devices with microwatt power,
nano electromechanical systems, and smart wearable systems.

Author Contributions: M.F.W. performed the experimental work. M.W.A. and Z.A. provided technical support
and guidance throughout the study. S.T. contributed to the simulation part and manuscript improvement,
Z.A. reviewed the final manuscript and contributed to improve the scientific quality of the article. All authors
have read and agreed to the published version of the manuscript.
Funding: Open Access funding was provided by the Qatar National Library. This work is supported by Qatar
University Internal Grant No. QUCG-CAM-2020\21-1.
Conflicts of Interest: The authors declare no conflict of interest.

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