Model FS4000

Features
Mass flow range from 0 ~ 2 SLPM to 0 ~ 50 SLPM
Response time 10 ms, excellent for critical applications
Pressure rating up to 5 bar (73 psi)
Exchangeable mechanical connectors for easy installation at
different applications
Compact design ready for multiple channel assembly
Excellent for electronic meters in anesthesia equipment

Description
The FS4000 mass flow sensors are manufactured gas monitoring and control. Models of FS4003 are
using Siargo's proprietary MEMS flow sensor and packaged in a flow channel diameter of 3 mm with a
package technology. The products are designed for very low pressure loss configuration and measures air
reliability with excellent performance in targeted flow up to 5 SLPM. Applications include leakage
applications. The sensors are housed in 3mm and detection, particle counter and analytical
8mm pipes with maximum flow rate 5 SLPM and 50 instrumentation. FS4008 are packaged in a flow
SLPM, respectively. Each model is manufactured via channel diameter of 8 mm and measures air flow up to
specially designed package and smart electronics so 50 SLPM. It can be used in gas flow measurement
that the optimal sensitivity would be achieved. and/or control equipment. Applications include
electronic flow meter for anesthesia equipment, clean
The packaging enclosure is made of the chemically
room gas flow monitoring, air sampler, and gas
inert and thermally stable polycarbonate material.
analyzer.
The maximum over pressure rating can reach up to 5
bar (73 psi) that is benefitted from Siargo's unique The FS4000 sensors require a power supply of 8 ~ 18
MEMS sensor chip structure, special packaging Vdc and provide an analog output or both an analog
technology and the rugged sensor housing. and a digital outputs. The analog output is linearized
from 0.5 Vdc to 4.5 Vdc corresponding with flow rate
The mechanical structure of FS4000 series is
from 0 to full scale. The digital output can be found in
designed for easy assembly as manifold for process

Working Principle
The MEMS sensor chip utilizes the calorimetric principle. It is packaged on a plate installed inside the flow
channel, which provides additional flow conditioning from the boundary layer configuration resulting in a
laminar flow. The mass flow measurement is established as the gas carries heat away from the heater leading
to the redistribution of the temperature field. Accurate flow rate is obtained by calibration with standard gas at
preset conditions.

Time-averaged velocity profile boundary layer

Flow direction
Turbulent
Free stream
Laminar

Sensor
the communication protocol described late in this thread and one-touch connectors. They are readily
manual. The response time of the FS4000 is 10 ms by interchangeable, which provides easy installation for
default, which provides solutions for critical different connection requirements.
applications where instant flow rate changes to be
The calibration is generally performed with nitrogen at
monitored. However, if slower response time is
20°C and 101.325kPa pressure rating. It can
preferred, then it can be modified through
nonetheless be carried out with other gases and
RS232/RS485 communication protocol.
conditions upon requests.
The mechanical interface provides options of BSPT

Block Diagram
The functional block diagram is shown in the following converts the voltage into flow rate. The flow rate signal
figure. The critical component of the FS4000 is the is sent out through analog or both analog and digital
MEMS sensor chip. The sensor driving circuitry sends formats (RS232 or RS485).
flow rate related voltage to ADC. The micro-controller
processes (amplifies, filters, etc) the voltage and then

FS4000
VCC
GND
Voltage
Flow Regulator
EEPROM

RS232 RX(RS232)/A(RS485)

ADC /RS485 TX(RS232)/B(RS485)

MEMS Sensor
Driver/Receiver
Driving
Sensor
MCU
Circuitry
Chip I/V Vout
D/A Converter

Functional block diagram of the FS4000.

1. Sensor Performance

1.1 Performance Specifications

All data unless otherwise noted apply for calibration conditions: N2, 20 °C, 101.325 kPa absolute pressure, horizontal
mounting.

Model FS4003 FS4008

Flow Range 0 ~ 2, 3, 4, 5 0 ~ 10, 20, 30,40,50 SLPM
Turn-down Ratio > 100:1
1
Accuracy ± (1.5 + 0.2FS) %
Repeatability ± 0.75 %Reading
Null Shift ± 30 mV
Output Shift ± 0.12 %/°C
2
Response Time 10 (Default, 50, 100, 200 ,500, 1000 selectable) ms
3
Output Linear: Analog 0.5 ~ 4.5 Vdc / Digital RS232 or RS485
4
Pressure Drop (Max.) < 100 < 600 Pa
Max. Working Pressure 0.5 MPa
5
Power Supply 8 ~ 18 Vdc, 50 mA
24 typical when RS232/RS485 not connected
Operating Current6 mA
27 typical when RS232/RS485 communicates with a PC
Power Consumption < 220 mW
Sourcing: 25
Analog Output Load mA
Sinking: 15
Working Temperature -10 ~ +55 °C

1 Denotes ±(1.5 %Reading + 0.2 % Full Scale). To obtain accurate flow measurement, let the sensor warm up 1 minute at power up.

2 The default response time is 10ms. It can be programmed via RS232/RS485 communication port.

3 The analog output is provided and the RS232/RS485 is optional. The analog voltage 0.5 ~ 4.5 Vdc corresponds with flow rate of 0 ~ full scale.
RS232 protocol can be found at the Appendix, and the RS485 can be obtained from the manufacturer.

4 The maximum pressure drops measured at flow rates of 5 SLPM and 50 SLPM for FS4003 and FS4008 respectively. See section 1.4 for details.

5 One DC power supply is necessary. The required minimum output current is 50 mA. The sensor actually consumes less than that in operation.

6 The operating current over the entire supply voltage range of 8 ~ 18 Vdc is about the same when no analog output load.

Compliance Statement: All components of this product are RoHS compliant. The product fully complies
with CE norm EN61000-6-1 through 61000-6-4, EN50081-2 through 50082-2 and EMC directive 89/336/EEC.
1.2 Additional Specifications

Model FS4003/FS4008 FS4008 Unit

Mechanical Connection1 BSPT 1/4 (R 1/4), 4 mm/6 mm/8 mm One-touch
DN 3 (FS4003) and 8 (FS4008) mm
2
Pins Out 5 Pins, AMP 103956-4, 0.5 m
Calibration Options3 Air, CO2, N2, O2, Ar @ 20 °C, 101.325 kPa
Package Material Polycarbonate
Size < 98.0 x 48.0 x 20.0 mm3
52 (with BSPT 1/4 (R1/4) connection)
Weight g
71(with O4, O8 connection) 68(with O6 connection)
Storage Temperature -20 ~ +65 °C
Humidity < 95 %RH (No icing or condensation)

1 The BSPT connector and one-touch connector are interchangeable.

2 The 0.5m output cable is usually shipped together with the sensor.
3 Calibrations at other gases and conditions available upon request.

1.3 Flow Characteristics

1.3.1 Analog Output Characteristics

The FS4000 provides an analog output of 0.5 ~ 4.5 Vdc corresponding with 0 ~ full scale flow rate. Using full scale of 5
SLPM as an example, the typical analog output v.s. flow rate is illustrated in Table 1.1 and Figure 1.1.

Table 1.1: Typical output voltage v.s. flow rate. Typical Output Curve -- 5 SLPM
5.0
Flow Rate Typical Voltage
Analog Output Voltage (V)

4.5
(SLPM) (Vdc) 4.0
0.0 0.5 3.5
1.0 3.0
1.3
2.5
2.0 2.1 2.0
3.0 2.9 1.5
4.0 3.7 1.0
0.5
5.0 4.5 0.0
5.5 4.9 0.0 1.0 2.0 3.0 4.0 5.0 6.0
6.0 4.9 Mass Flow Rate (SLPM)

Figure 1.1: A typical analog output curve.

The sensor is calibrated 10% above the full scale flow rate to ensure the accuracy within the defined full range during
interpolation. For example, full scale 5 SLPM is calibrated till 5.5 SLPM. Hence at a flow rate beyond the defined full
scale, there is still analog output but the accuracy is not guaranteed.
2. Pins and Interface
2.1 Pin Definition 2.2 Pin Description
The FS4000 provides a 5-pin interface. The output VCC and GND: The FS4000 requires a power supply
connecting cable of 0.5m long is shipped together with of 8 ~ 18 Vdc. The voltage is internally regulated to
the sensor. The sensor pin layout is shown in Figure power the circuit. Therefore, there are no stringent
2.1 and the cable color code is defined in Table 2.1. requirements on the accuracy, stability as well as ripple
of the power supply. The sensor consumes less than
30 mA normally but a 50 mA is required for the power
supply to ensure a sufficient working current.
Vout: The analog output pin provides 0.5 ~ 4.5
Vdc corresponding with the specified flow range
0 ~ full scale. Beyond this range, there is still
voltage reading, but the accuracy is not
guaranteed.
Figure 2.1: FS4000 pin layout. TX and RX: The RS232 communication is bi-
directional. TX is the transmit pin for RS232 and
it sends out signal from the sensor. RX is the
Table 2.1: FS4000 cable color code. receive pin and it receives signal. Using these
two pins together with GND pin, the sensor's
Pin# Color Definition
operation mode and response time can be
1 Blue TX (RS232 transmit) /A (RS485) configured, and the voltage as well as flow rate
2 Green Vout, Analog output can be obtained.

3 Red VCC, Power supply A and B: The RS485 is an asynchronous, half-

4 Black GND, Ground duplex communication. A is the transmit pin for
RS485 and it sends out signal from the sensor.
5 Yellow RX (RS232 receive) /B(RS485)
B is the receive pin and it receives signal. When
transmitting signal from the sensor, or receiving
signal, the other pin is working as GND.

3. Mechanical Dimensions and Mountings

3.1 Sensor Mechanical Dimensions
The FS4000 provides two options to mechanically interface with customer applications: BSPT 1/4 (R 1/4) thread
and one-touch connectors, and they are readily interchangeable. The dimensions are shown in Figure 3.1 and
Figure 3.2.

For BSPT 1/4 (R 1/4) connection:

Figure 3.1: The FS4000 mechanical dimensions with BSPT 1/4 (R 1/4) connectors.
1.3.2 Digital Output Characteristics Table 1.3: FS4008 pressure drop v.s. flow rate.
The digital output is accessed via RS232/RS485.
Figure 1.2 shows the applied mass flow rate v.s. the Flow Rate (SLPM) 0 5 10 20 30 40 50
digital output of a 50 SLPM full scale sensor. Same as
analog output, when flow rate is beyond the defined full Presure Drop (Pa) 0 8 25 90 200 370 580
scale, the output accuracy is not guaranteed.
Digital Output -- 50SLPM FS4008 Pressure Drop Curve
60 600
Digital Output (SLPM)

50 500

Pressure Drop (Pa)

40 400

30 300

20 200

10 100

0 0
- 10 0 10 20 30 40 50 60 70 0 10 20 30 40 50
Mass Flow Rate (SLPM) Mass Flow Rate (SLPM)

Figure 1.2: Typical digital output characteristics. Figure 1.4: FS4008 pressure drop v.s. flow rate.
1.4 Pressure Drop Characteristics
The FS4000 is packaged with standard enclosures
with flow channel sizes of 3 mm and 8 mm,
respectively, for different applications. The pressure
drop is influenced by the flow channel size as well as
the flow rate applied. For FS4003, the maximum
pressure drop is measured at flow rate 5 SLPM, and 50
SLPM for FS4008. The results are shown in Table 1.2,
1.3 and Figure 1.3, 1.4.

Table 1.2: FS4003 pressure drop v.s. flow rate.

Flow Rate (SLPM) 0 1 2 3 4 5

Presure Drop (Pa) 0 6 15 30 55 95

FS4003 Pressure Drop Curve

100
90
80
Pressure Drop (Pa)

70
60
50
40
30
20
10
0
0 1 2 3 4 5
Mass Flow Rate (SLPM)

Figure 1.3: FS4003 pressure drop v.s. flow rate.

 For one-touch connection:

One-touch Connection L D
ID=8mm 91.0 Φ8.0
ID=6mm 83.0 Φ6.0
ID=4mm 80.0 Φ4.0

Figure 3.2: The FS4000 mechanical dimensions with one-touch connector.

4. Ordering Guide
4.1 Sensor Selection
The sensor part number is composed of the product model number and suffix indicating the full scale flow rate,
mechanical connection, output format as well as the application gas. Refer the following for details.

Gas (A-air; B - N2O; C - CO2; N - N2; O - O2; R - Ar;

for other gases , please contact manufacturer.)

Output2 ( V - Analog, BV - Both analog and RS485,

CV - Both analog and RS232);

Connection ( R - R 1/4;O4/O6/O8-One-touch, ID=4mm/6mm/8mm)

Full scale Flow Rate (selectable, FS 4003 - 2,3,4,5 SLPM;

1

FS 4008 - 10,20,30,40,50 SLPM)

Product Model Name (03-DN3,08-DN8)

1 Max. flow rate number only, for example, 30 meaning full scale flow rate of 30SLPM.
2 The sensor shipped with standard analog output. RS232/RS485 is optional.

4.2 Order Contact and Customer Support

The sales offices are listed at the end of this document. For small quantities, the order can be placed either through
Siargo website: www.siargo.com or the sales offices. For large quantities, please contact the sales offices or the
authorized distributors or sales representatives.
Siargo is making every effort to ensure the quality of the products. In case of questions, and or product supports,
please contact customer service listed at the end of the document. We will respond your request in a timely fashion and
will work with you toward your complete satisfaction.
Important Notices nominal flow rate is approximately 70% of the full scale
Wetted Materials and Compatibility flow rating of the sensor. Don't use a sensor with a flow
The sensor body is made of medical compatible range beyond the specification continuously. Select
plastics. The sensor chip comprises of silicon, silicon the product properly, and do not use high flow sensor
nitride and silicon dioxide and the sensor chip surfaces for trace flow applications. For instance, don't use a 50
are passivated with silicon nitride and silicon dioxide. SLPM sensor for a 0.5 SLPM application as the
The electronic sealing is provided by RTV (room accuracy would not be desired.
temperature vulcanizing) silicone sealant WR-704
composed of HOCH3 (SiO) nCH3H. Warranty and Liability
(effective May 2009)
Cautions for Handling and Siargo warrants the products sold hereunder, properly
Installations used and properly installed under normal
circumstances and service as described in the user
The product at the time of shipment is fully inspected manual, shall be free from faulty materials or
for product quality and meets all safety requirements. workmanship for 180 days for OEM products, and 365
Additional safety measures during handling and days for non-OEM products from the date of shipment.
installation should be applied. To prevent ESD This warranty period is inclusive of any statutory
(electrostatic discharge) damage and /or degradation, warranty. Any repair or replacement serviced product
take customary and statutory ESD precautions when shall bear the same terms in this warranty.
handling. Do power the product with the correct
polarity, voltage and amperage. All precautions and Siargo makes no other warranty, express or implied
measures for electrical voltage handling must apply. and assumes no liability for any special or incidental
The product sealing is ensured to work under working damage or charges, including but not limited to any
pressure of 0.5MPa and is leakage proof before the damages or charges due to installation, dismantling,
shipment. But cautions and further leakage test are reinstallation or any other consequential or indirect
important at installation as well since any leakage damages of any kind. To the extent permitted by law,
might cause severe safety issue. the exclusive remedy of the user or purchaser, and the
limit of Siargo's liability for any and all losses, injuries or
This product contains no user serviceable damages concerning the products including claims
components. Do not attempt to disassemble, based on contract, negligence, tort, strictly liability or
substitute parts or perform unauthorized modifications otherwise shall be the return of products to Siargo, and
to the product. Doing so will forfeit the terms of the upon verification of Siargo to prove to be defective, at
warranty and cause the liability to any damages its sole option, to refund, repair or replacement of the
thereafter. It should only be serviced by authorized products. No action, regardless of form, may be
personnel. Upon requests, Siargo will provide brought against Siargo more than 365 days after a
necessary technical support and/or training of the cause of action has accrued. The products returned
personnel. under warranty to Siargo shall be at user or
purchaser's risk of loss, and will be returned, if at all, at
Cautions for Product Applications Siargo's risk of loss. Purchasers or users are deemed
to have accepted this limitation of warranty and liability,
The product is designed for use with general purpose which contains the complete and exclusive limited
gases such as air and nitrogen. It is advised that the warranty of Siargo, and it shall not be amended,
products are best used for non-explosive clean gases. modified or its terms waived except by Siargo's sole
The sensors cannot be used for gas metrology of action.
fluoride or fluoride-containing gases. For updates of
the product certification information, please contact This warranty is subject to the following exclusions:
the manufacturer. Use for other gases such as (1) Products that have been altered, modified or have
extreme corrosive and toxic gases may cause the been subject to unusual physical or electrical
product malfunctioning or even severe damages. circumstances indicated but not limited to those
Don't expose the product's outer surface to any liquids, stated in this document or any other actions which
the unit does not have a water tight electronics cannot be deemed as proper use of the products.
package. (2) Siargo does not provide any warranty on finished
goods manufactured by others. Only the original
Don't flow gas in conditions that can cause water
manufacturer's warranty applies;
condensation or water trap inside the unit as the
accuracy could be significantly altered. (3) Products re-sold to the third parties.
It is suggested to design your application so that
Appendix RS232 Communication Protocol
defined as below:
Frame_header 1 byte
Serial Port Settings Command code 1 byte
Length 1 byte
Data Variable-length
Checksum 1 byte
Frame_end 1 byte

a) Frame_header:
0x9D;
b) Command code:
The commend code, an integer between 0
and 255 excepting 0x9D, defined in the User
Layer to achieve various functionality.
c) Length:
The length of the data, an integer between 0
Protocol Structure and 102 depending on the commend code. If
the command code has no data, the length
This protocol includes three working layers: physical should be 0. If the FS4000 unit detects the
layer, data link layer, and user layer. length larger than 102, the FS4000 unit will
not send any response;
Physical layer protocol d) Data:
Every byte contains 11bits, which is defined as The body of the data, whose length varies
follows: depending on the command code. If the
command code has no data, the length
Start_bit D0 D1 D2 D3 D4 D5 D6 D7 D8 Stop_bit should be 0;
e) Checksum:
a) Start_bit: XOR;
f) Frame_end:
1bit, a logic low; 0x0D;
b) Data bits (D0~D7): g) Overtime
8 bits, representing the data byte under 1sec. This is to prevent FS4000 from
transmission, which is ordered from the running into a deadlock because of the
least-significant digit to the most-significant master failures or communication failures.
digit; When FS4000 receives a correct byte, a
c) Frame_header flag (D8): timer will begin. If FS4000 does not receive
other correct byte within 1sec, it will interrupt
1bit, a flag to indicate whether the data byte the communication and prepare to receive
under transmission is a type of datum or next byte. The interval time from FS4000 to
frame_header. the master is less than 10msec (which can
* When transmitting a frame_header (or be used for the master to judge the
address) from master, D8 must be set to 1. overtime).
When transmitting another datum (such as
User layer protocol
command code, data length, data segment,
checksum or frame_end), D8 can be set to 0
or 1. We suggest customer set D8 to 0,
when transmitting other datum;
* For the byte sent from FS4000, D8 is
always 0;
d) Stop_bit:
1bit, a logic high.
Data link layer protocol
Both the master and slave (e.g., FS4000) have the
same frame format, each byte of which is hexadecimal
(non-ASCII code). Specifically, the frame format is
Appendix RS232 Communication Protocol

User layer protocol (continued) Flow chart (master to FS4000)