NPL Flatness Interferometer Overview
NPL Flatness Interferometer Overview
of gauge surfaces. It operates based on the principle of optical interference, where monochromatic
light (light of a single color and wavelength) is used to create interference fringes on the surfaces
being inspected. Let’s break down the process and details for clarity.
rotated by 180°.
Each fringe corresponds to a distance change of half the wavelength (λ/2) between the gauge
and optical flat.
λ
d1 = n1 ×
2
λ
d2 − d1 = (n2 − n1 ) ×
2
λ
d2 − d1 (n2 − n1 ) × 2 (n2 − n1 )λ
= =
2 2 4
This formula gives the parallelism error by accounting for the changes in fringe count after
rotation.