SEMI F37-0299 (Reapproved 1104)

METHOD FOR DETERMINATION OF SURFACE ROUGHNESS

PARAMETERS FOR GAS DISTRIBUTION SYSTEM COMPONENTS
This guideline was technically approved by the Global Gases Committee and is the direct responsibility of
the North American Gases Committee. Current edition approved by the North American Regional Standards
Committee on July 11, 2004. Initially available at www.semi.org September 2004; to be published
November 2004. Originally published February 1999.

1 Purpose 4 Referenced Standards

1.1 The purpose of this test method is to define a 4.1 ASME Standards1
method for determining numerical values for surface
B46.1 — Surface Texture (Surface Roughness,
roughness parameters measured on gas distribution
Waviness, and Lay)
system components. Application of this method is
intended to yield comparable data among users of this 4.2 ASQ Standards2
method.
Z1.9 — Sampling Procedures and Tables for Inspection
2 Scope by Variables for Percent Nonconforming

2.1 This document will specify methods, measuring NOTICE: Unless otherwise indicated, all documents
equipment, and test conditions for mechanical profile cited shall be the latest published versions.
surface roughness measurement of gas distribution
system components. This test method will not require 5 Terminology
nor recommend numerical values for specific surface 5.1 Abbreviations and Acronyms
roughness parameters. This test method is intended for
use in quality control and process development for 5.1.1 EDX Energy Dispersive X-Ray Spectroscopy
specification of and manufacturing of gas distribution 5.1.2 SEM Scanning Electron Microscopy
system components.
5.1.3 SEM Scanning Electron Microscope
NOTICE: This standard does not purport to address
safety issues, if any, associated with its use. It is the 5.2 Definitions
responsibility of the users of this standard to establish
5.2.1 cutoff a length selected to limit the spacing of
appropriate safety and health practices and determine
surface irregularities. It separates a surface's roughness
the applicability of regulatory or other limitations prior from its waviness.
to use.
5.2.2 distinct regions visually unique areas of a
3 Limitations surface defined by patterns of lay or differences in the
appearance of surface roughness. In-line bores of
3.1 Numerical values for specific surface roughness
different sizes or orientations and each leg of a shaped
parameters obtained using this test method may not
component should be considered distinct regions.
provide sufficient information for determining the
performance of the component, such as dry down times, 5.2.3 evaluation length the actual length over which
corrosion resistance or amount of particle generation. surface roughness is assessed.
Surface roughness measurement is one of many
evaluation techniques for assessing the performance or 5.2.4 lay the general direction of orientation of
quality of a surface. This document is not concerned surface features.
with characteristics such as component design, material, 5.2.5 skid a stylus probe support which acts as both
dimensions, appearance, etc. While surface defects a filter and a datum for probe movements.
traversed by the stylus may be included in the
roughness measurement, this method does not govern
the evaluation of surface defects. Surface defects may
be measured by methods such as SEM and EDX. This
test method is intended to measure surface features on 1 The American Society of Mechanical Engineers, Three Park
the order of 10 m in size. It is not intended to detect Avenue, New York, NY 10016-5990, 800-843-2763,
submicron surface features. http://www.asme.org/
2 American Society for Quality, 600 North Plankinton Avenue,
Milwaukee, WI 53203, http://www.asq.org/

1 SEMI F37-0299 © SEMI 1999, 2004

5.2.6 skidless a type of instrument that does not use 8 Units of Measure
an external skid attached to the probe to act as a datum. 8.1 Surface roughness should be described by means of
Instead, it references a datum plane internal to the the Roughness Average, Ra, as defined per ASME
measurement equipment. B46.1.
5.2.7 stylus the object which mechanically probes 8.2 Measurements should be specified in micro-meters
the surface. ( m) or microinches ( in).
5.2.8 surface roughness the finer irregularities of
the surface texture, usually including those 9 Preparation of Apparatus
irregularities that result from the inherent action of the 9.1 The surface should be clean and free from loose
production process, for example traverse feed marks debris before taking a measurement.
from cutting tools [ASME B46.1-1995].
9.2 The instrument should be sufficiently isolated from
5.2.9 surface texture repetitive or random vibrations, which will artificially increase roughness
deviations from the nominal surface that forms the measurements.
three-dimensional topography of the surface. Surface
9.3 Surfaces inaccessible to the stylus probe may be
texture includes roughness, waviness, lay, and flaws
exposed by sectioning a sample(s). Samples should be
[ASME B46.1-1995].
sectioned to avoid damage to the surface to be
5.2.10 waviness the more widely spaced component measured and should be cleaned appropriately to
of surface texture. Waviness may result from such remove sectioning debris.
factors as machine or workpiece deflections, vibrations,
chatter, heat treatment, or warping strains. Roughness 10 Procedure
may be considered as superimposed on a “wavy” 10.1 Select a single random location for measurement
surface.
within each distinct region of interest on each
component.
6 Sampling
10.2 Measurements shall be taken perpendicular to the
6.1 Acceptability criteria should be specified by the
lay. If this is not practical, measurements may be taken
user and be developed in accordance with published
in the direction of process gas flow through the
sampling plans such as ASQ Z1.9, Sampling
component.
Procedures and Tables for Inspection by Variables for
Percent Nonconforming. 10.3 Instrument cutoff length should be set to 0.800
mm (0.030 in.).
7 Apparatus
10.4 The evaluation length, or measurement length,
7.1 The instrument should be a stylus type as defined should be at least 3.81 mm (0.150 in.) where sufficient
by ASME B46.1, Section 2. Due to the limitations of length is available.
skidded instruments (Type IV and V), a skidless
instrument (Type I) is preferable. 11 Reporting
7.2 The instrument should be calibrated using standard 11.1 Average Ra is defined as the average of all Ra
laboratory practices and manufacturer's measurements taken over a population.
recommendations with a roughness metrology standard
11.2 Maximum Ra is defined as the maximum of all Ra
calibrated by a certified testing laboratory and traceable
measurements taken over a population.
to NIST3.
11.3 Both Average Ra and Maximum Ra should be
7.3 In order to resolve the features of the surface, a
reported for a given population. A population can be
stylus with a conical tipped radius of 5 m (200 in)
defined as:
should be used.
a set of single measurements on multiple
components
a set of multiple measurements on a single
component
a set of multiple measurements on multiple
3 National Institute of Standards and Technology, 100 Bureau Drive, components
Stop 3460, Gaithersburg, MD 20899-3460, (301) 975-6478,
http://www.nist.gov/

SEMI F37-0299 © SEMI 1999, 2004 2

12 Precision and Accuracy NOTICE: SEMI makes no warranties or
representations as to the suitability of the standards set
12.1 Some variance in Roughness Average is to be
forth herein for any particular application. The
expected on a single surface from measurement to
determination of the suitability of the standard is solely
measurement. No two measurements (as taken by
the responsibility of the user. Users are cautioned to
different operators, on different instruments, or at
refer to manufacturer's instructions, product labels,
different locations on the surface of a component) will
product data sheets, and other relevant literature,
contain the same data points. Because different
respecting any materials or equipment mentioned
instruments will acquire data points at different rates,
herein. These standards are subject to change without
and evaluation lengths may differ, a typical Roughness
notice.
Average measurement can include hundreds to tens of
thousands of data points. Reported measurements on By publication of this standard, Semiconductor
the same surface can be expected to deviate up to 20%. Equipment and Materials International (SEMI) takes no
position respecting the validity of any patent rights or
13 Related Documents copyrights asserted in connection with any items
mentioned in this standard. Users of this standard are
13.1 ANSI Standard4
expressly advised that determination of any such patent
Y14.36 Surface Texture Symbols rights or copyrights, and the risk of infringement of
such rights are entirely their own responsibility.
13.2 BSI Standard5
BS 1134 Assessment of Surface Texture, Part 1:
Methods and Instrumentation and Part 2: Guidance and
General Information
13.3 DIN Standard6
DIN 4768 Determination of Surface Roughness
Values Ra, Rz, Rmax with Electric Stylus Instruments
13.4 ISO Standard7
ISO 4288 Rules and Procedures for the Mea-
surement of Surface Roughness Using Stylus
Instruments
13.5 JIS Standard8
JIS B 0651 Instruments for the Measurement of
Surface Roughness by the Stylus Method

4 American National Standards Institute, Headquarters: 1819 L

Street, NW, Washington, DC 20036, USA. Telephone: 202.293.8020;
Fax: 202.293.9287, New York Office: 11 West 42nd Street, New
York, NY 10036, USA. Telephone: 212.642.4900; Fax:
212.398.0023, Website: www.ansi.org
5 British Standards Institution, 389 Chiswick High Road, London,
W4 4AL, United Kingdom, +44 (0)20 8996 9000, http://www.bsi-
global.com/
6 DIN Deutsche Institut für Normung, (DIN German Institut for
standardization e.V. ), Castle count road 6, 10787 Berlin, Germany,
+49 30 2601-0, +49 30 2601-1231, http://www2.din.de/
7 International Standards Organization, 1, rue de Varembé, Case
postale 56, CH-1211 Geneva 20, Switzerland, +41 22 749 01 11; Fax
+41 22 733 34 30, http://www.iso.org
8 Japanese Standards Association, 4-1-24 Akasaka Minato-ku,Tokyo
107-8440 Japan, +81-3-3583-8005, Fax: +81-3-3586-2014,
http://www.jsa.or.jp/default_english.asp

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