March 2005

0104396-000 AA

P-15 ™
User’s Guide
for Software Version 7.0

Preliminary

K
KLA-Tencor PN:0104396-000 AA Software Version 7.0
KLA-Tencor Confidential 3/05
 KLA-Tencor P-15 User’s Guide

EC COMPLIANCE
At the time of printing, the P-15 complies with the essential
requirements of the EC (Electromagnetic Compatibility) Directives
listed below
EC Directives EC 89/392/EEC
EC 89/336/EEC
EC 73/23/EEC
Harmonized Safety Standards EN 50082-2:1995
EN 50081-2:1993
EN 55011:1991
Harmonized Electromagnetic Standards EN 60204-1:1992
EN 61010-1:1993

COPYRIGHT
This document is a copyrighted work of KLA-Tencor Corporation.
Unauthorized copying of its content is strictly prohibited. KLA-Tencor
provides this document without warranty in any form, either expressed
or implied. To order additional copies, specify part number
0104396-000 AA.

COMMENTS WELCOME
We welcome your comments about this document. Please e-mail them
to Film and Surface Technology Technical Publications, or contact us
at the address shown below. Please reference the document’s part
number in your communications.

Copyright © 2002-2005 KLA-Tencor Corporation. All rights Reserved. KLA-Tencor Corporation

Published March 2005 Film and Surface Technology Division
160 Rio Robles
San Jose, California USA 95134
Printed in the United States of America Phone: 408-875-4200 e-mail: [email protected]

0104396-000 AA iii
March 2005
List of Figures

Chapter 1 Introduction
Chapter 2 Basic Skills
Figure 2.1 Keyboard . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2
Figure 2.2 Trackball . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
Figure 2.3 Catalog Screen With Some Access Denied . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-5
Figure 2.4 Program Icons . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-6
Figure 2.5 Profiler Catalog Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-6
Figure 2.6 Profiler Configuration Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-8
Figure 2.7 Closing the Profiler Application Using the Control Button . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-8
Figure 2.8 Profiler Container for Profiler Shutdown . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-9
Figure 2.9 Start Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-9
Figure 2.10 Shut Down Windows Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-9

P re l i mi n a ry
Figure 2.11 Closing the Profiler Application Using the Control Button . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-10
Figure 2.12 Message Box for Profiler Shutdown . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-10
Figure 2.13 Start Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-11
Figure 2.14 Shut Down Windows Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-11
Figure 2.15 Clearing the Status Diagnostic Messages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-12
Figure 2.16 Contact Scan Stylus Tip . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-14
Figure 2.17 Scan Recipe Window in the Catalog Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-16
Figure 2.18 XY View Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-16
Figure 2.19 XY View Screen – View Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-17
Figure 2.20 Video Control Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-18
Figure 2.21 Save Data Set Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-19
Figure 2.22 Save Image As Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-20
Figure 2.23 Export File Formats in Drop-Down Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-21
Figure 2.24 Analysis Screen – File Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-21
Figure 2.25 Export Graph Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-22
Figure 2.26 Catalog Screen – Database File Manager Icon . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-23
Figure 2.27 Data Catalog Screen for Export of Data or Recipes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-23
Figure 2.28 Graphics Export Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-24
Figure 2.29 Scan Data Graph in the Analysis Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-25
Figure 2.30 Choosing a Sequence Data Set . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-26
Figure 2.31 Opening the Statistics Window to View Scan List . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-27
Figure 2.32 Surface Parameters Summary Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-27
Figure 2.33 Save As (Export) Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-28
Figure 2.34 Data Catalog Screen for Export of Data or Recipes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-29
Figure 2.35 Export Data Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-29
Figure 2.36 Analysis Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-30
Figure 2.37 Print Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-31

Chapter 3 Scan Recipes

Figure 3.1 Catalog Sequence Recipe Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2
Figure 3.2 Catalog Sequence Recipe Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
Figure 3.3 Title Bar for Catalog Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4
Figure 3.4 Control Button Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4

P/N 0104396-000 AA LOF-1

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 LIST OF FIGURES KLA-Tencor P-15 User’s Guide

Figure 3.5 Menu Bar for Scan Recipe Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6

Figure 3.6 Tool Bar Icons . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-8
Figure 3.7 Scan Recipe information in the List Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10
Figure 3.8 Recipe Path Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11
Figure 3.9 Tool Bar Buttons . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11
Figure 3.10 System Status Message Field . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-13
Figure 3.11 Scan Recipe Catalog Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-14
Figure 3.12 Tool Bar . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-14
Figure 3.13 Scan Recipe Catalog Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-15
Figure 3.14 Recipe Editor for a 2D UNTITLED Recipe . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-16
Figure 3.15 3D Parameters in the Information Display Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-16
Figure 3.16 2D Scan Category Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-17
Figure 3.17 X Scan Size (mm) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-17
Figure 3.18 Scan Speed Drop-down Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-18
Figure 3.19 Scan Trace Comparison - Large vs. Small Stylus Radius . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-19
Figure 3.20 Data Collection Frequency . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-20
Figure 3.21 Data Collection When Using a Large Radius Stylus . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-20
P rel i mi n a ry

Figure 3.22 Data Collection When Using a Small Radius Stylus . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-21
Figure 3.23 2D Scan Options With Sampling Rate Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-21
Figure 3.24 2D Scan Options With Multi-Scan Average Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-22
Figure 3.25 2D Scan Options With Scan Direction Arrow . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-22
Figure 3.26 2D Scan Options - Show Position: . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-23
Figure 3.27 Teach Scan Length, from the 2D Scan Teach Button . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-24
Figure 3.28 3D Scan Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-26
Figure 3.29 Traces - Scan Perimeter with Traces . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-26
Figure 3.30 3D Scan - Traces Parameter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-27
Figure 3.31 2D Scan Options - Show Position: . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-30
Figure 3.32 Teaching a Scan Position Using Center Show Position . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-30
Figure 3.33 Teaching a Scan Position Using Start Show Position . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-31
Figure 3.34 Teaching a Scan Position Using Start Show Position . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-31
Figure 3.35 Scan Time - Scan Parameters Definition . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-32
Figure 3.36 Individual Traces Calculation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-33
Figure 3.37 Total (hr:min:s): Calculation - 3D Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-33
Figure 3.38 Number of Data Points: Calculation - 2D & 3D Screens . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-34
Figure 3.39 Point Interval: Calculation - 3D Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-35
Figure 3.40 Stylus Parameters (2D and 3D) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-35
Figure 3.41 Stylus Parameters - Scan Parameters Definition . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-36
Figure 3.42 Stylus Parameters - With Applied Force Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-36
Figure 3.43 Recipe Editor - 3D Scan Parameter Definition . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-38
Figure 3.44 Vertical Ranging - Range/Resolution Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-39
Figure 3.45 Vertical Ranging - Profile Types . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-41
Figure 3.46 Feature Detection - Recipe Editor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-44
Figure 3.47 Feature Detection Point Locations on a Step . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-45
Figure 3.48 Feature Detection Point Locations for Convex and Concave . . . . . . . . . . . . . . . . . . . . . . . . . 3-45
Figure 3.49 Feature - Feature Detection - Recipe Editor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-46
Figure 3.50 Detection Variables - Feature Detection - Recipe Editor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-47
Figure 3.51 Scan Noise and the Gaussian Noise Filter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-48
Figure 3.52 Activating the Gaussian Noise Filter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-49
Figure 3.53 Filter Cutoff Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-50
Figure 3.54 Filters/Cursors Parameters - Recipe Editor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-51
Figure 3.55 Scan Noise and the Gaussian Noise Filter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-51

LOF-2 P/N 0104396-000 AA

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KLA-Tencor P-15 User’s Guide LIST OF FIGURES

Figure 3.56 Filters Parameters - Filter Option Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-52

Figure 3.57 Filters Parameters - Noise Filter Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-53
Figure 3.58 Filters Parameters - Waviness Filter Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-54
Figure 3.59 Cursor Parameters - Recipe Editor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-54
Figure 3.60 Analysis Screen with Trace in Need of Leveling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-55
Figure 3.61 Leveling Cursors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-55
Figure 3.62 Cursor Boundary Setting on Unleveled Trace . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-56
Figure 3.63 Setting Measurement Cursors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-57
Figure 3.64 Measurement Cursor on Level Trace . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-57
Figure 3.65 Analysis Screen CALC Button . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-58
Figure 3.66 Cursor Parameters - Recipe Editor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-59
Figure 3.67 Measurement Cursors - Relative to Feature Detection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-60
Figure 3.68 Cursor Parameters - Recipe Editor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-60
Figure 3.69 Median Filter Application in Glitch Removal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-62
Figure 3.70 2D and 3D Median Filter Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-63
Figure 3.71 Recipe Screen with Unit Output Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-64
Figure 3.72 Unit Output Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-64

Preliminary
Figure 3.73 General Parameters - Recipe Editor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-65
Figure 3.74 2D General Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-66
Figure 3.75 3D General Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-69
Figure 3.76 Waviness vs. Roughness . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-71
Figure 3.77 Roughness/Waviness Filter Analysis . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-71
Figure 3.78 Recipe Editor Showing 2D and 3D Roughness/Waviness Parameters . . . . . . . . . . . . . . . . . . 3-72
Figure 3.79 2D Roughness Parameters Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-73
Figure 3.80 2D Waviness Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-75
Figure 3.81 3D Roughness Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-77
Figure 3.82 Bearing Ration and Cutting Depth Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-79
Figure 3.83 Bearing Ratio . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-79
Figure 3.84 2D Bearing Ratio . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-80
Figure 3.85 Depth . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-80
Figure 3.86 2D Cutting Depth (CutDp) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-81
Figure 3.87 Cutting Depth . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-81
Figure 3.88 3D Bearing Ratio (Sbi) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-82
Figure 3.89 3D Material Volume . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-83
Figure 3.90 Bearing Ratio and Cutting Depth Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-84
Figure 3.91 High Spot Count . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-85
Figure 3.92 2D High Spot Count (HSC) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-85
Figure 3.93 2D Mean Spacing Sm (1/HSC) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-86
Figure 3.94 Peak Count . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-86
Figure 3.95 2D Peak Count (PC) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-87
Figure 3.96 2D Mean Spacing Sm (1/PC) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-87
Figure 3.97 Recipe Editor - Choosing 3D Cursors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-89
Figure 3.98 Three Point Leveling Showing Leveling Boxes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-90
Figure 3.99 Vertex Identification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-91
Figure 3.100 Matching Leveling Box and Cursor Locations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-92
Figure 3.101 3D Leveling Cursor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-92
Figure 3.102 3D Measurement Cursor Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-93
Figure 3.103 Matching Measurement Cursor Position to Measurement Box . . . . . . . . . . . . . . . . . . . . . . . . 3-94
Figure 3.104 3D Step Height Cursor Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-94
Figure 3.105 Setup Analysis Tools – Leveling Reference . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-96
Figure 3.106 Data Point Distribution in Bins . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-97

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Figure 3.107 Histograms of Scans A and B . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-98

Figure 3.108 Multiple Bins (Mode) Used to Define a Plane . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-99
Figure 3.109 Flat Surface Scan of a Single Object . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-100
Figure 3.110 Most Populous Plane Trace Variation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-100
Figure 3.111 Setup Analysis Tools Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-101
Figure 3.112 Enable Automatic Depth Analysis . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-102
Figure 3.113 Setup Analysis Tools – Leveling Reference . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-103
Figure 3.114 Setup Analysis Tools – Setting the Number of Bins . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-104
Figure 3.115 Histogram of a Scan . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-105
Figure 3.116 Recipe Editor - Recipe Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-106
Figure 3.117 Diagnostic Options Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-107
Figure 3.118 High Resolution Camera Only: Diagnostic Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-107
Figure 3.119 Scan Options: Diagnostic Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-108
Figure 3.120 Linearity Calibration Only . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-109
Figure 3.121 Recipe Menu with Save and Save As… Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-109
Figure 3.122 Catalog: Scan Data Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-110
Figure 3.123 Analysis Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-111
P rel i mi n a ry

Figure 3.124 Save Recipe As - Improper Name Format . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-111

Figure 3.125 Recipe Message Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-112
Figure 3.126 Save Recipe As - Proper Name Format . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-112
Figure 3.127 Recipe Editor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-112
Figure 3.128 Save Recipe As Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-113
Figure 3.129 Recipe Editor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-113
Figure 3.130 Recipe Information Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-114

Chapter 4 Stylus Change Procedure

Figure 4.1 Profiler [Catalog] - Click on the Calibration Icon . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2
Figure 4.2 Configuration Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2
Figure 4.3 Proximity Sensor Configuration Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3
Figure 4.4 Profiler [Catalog] - Click on the Calibration Icon . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5
Figure 4.5 Stylus Force Calibration Button . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5
Figure 4.6 Configuration Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6
Figure 4.7 Stylus ID Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-7
Figure 4.8 Message Box for Stylus Name Affirmation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-7
Figure 4.9 Message Box for Stylus Change Permission . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8
Figure 4.10 Supporting Stylus Mount During Stylus Change . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8
Figure 4.11 Sensor Assembly - Loosening Stylus Clamp Screw . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-9
Figure 4.12 Sensor Assembly - Seating the New Stylus . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-9
Figure 4.13 Supporting Stylus and Mount During Tightening Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . 4-10
Figure 4.14 Sensor Assembly - Seating the New Stylus . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-10
Figure 4.15 Message Box for Stylus Change Permission . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-11
Figure 4.16 KLA-Tencor Stylus Alignment Tool . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-12
Figure 4.17 Message Box Requesting SPO Standard Placement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-12
Figure 4.18 Manual Load from the Scan Offset Calibration Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-13
Figure 4.19 Scan Position Offset Calibration Options dialog box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-13
Figure 4.20 Window Buttons - _OFF150- Recipe Editor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-14
Figure 4.21 Scan Position Offset Calibration Options dialog box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-15
Figure 4.22 Set Default Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-15
Figure 4.23 Scan Parameter Definition - _OFF150 - Recipe Editor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-16
Figure 4.24 ZOOM IN - Scan Offset Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-16

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Figure 4.25 View Menu with Align Sample Chosen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-17

Figure 4.26 Alignment Angle Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-18
Figure 4.27 KLA-Tencor Stylus Alignment Tool . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-18
Figure 4.28 KLA-Tencor Stylus Alignment Tool . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-19
Figure 4.29 Aligning the Tool with Screen Crosshair . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-20
Figure 4.30 Align Screen Crosshair with 150 mm Crosshair Pattern . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-20
Figure 4.31 Manual Load from the Scan Offset Calibration Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-21
Figure 4.32 Scan: _OFF150 Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-22
Figure 4.33 Trace Path Through Upper Triangle . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-22
Figure 4.34 Data Analysis Window. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-23
Figure 4.35 Scan Data Portion of the Analysis Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-23
Figure 4.36 Coarse Scan Data Analysis Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-24
Figure 4.37 “Unknown Situation” Corrective Action . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-24
Figure 4.38 Pre Acceptance Analysis Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-25
Figure 4.39 Analysis Screen with Cursors Manually Placed . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-25
Figure 4.40 Scan Offset Calibration, Analysis Information Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-26
Figure 4.41 Hand Selecting the Triangle Data in Analysis Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-27

Preliminary
Figure 4.42 Accepting Adjusted Scan Results . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-27

Chapter 5 XY View Screen

Figure 5.1 Scan Recipe Window in the Catalog Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2
Figure 5.2 XY View Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-3
Figure 5.3 XY View Screen Menu Bar . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-3
Figure 5.4 Move Extents Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-6
Figure 5.5 Move To Position Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-6
Figure 5.6 Distance Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-9
Figure 5.7 View Menu and the Stage and Zoom Coordinate Field . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-12
Figure 5.8 View Menu in XY Vies Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-12
Figure 5.9 Save Zoom Position Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-13
Figure 5.10 MicroHead Measurement Head. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-15
Figure 5.11 Focusing the Optics (Dual-View Optics). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-16
Figure 5.12 Coordinate System of the KLA-Tencor Profiler Stage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-17
Figure 5.13 XY View Screen Tool Bar . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-18
Figure 5.14 XY View Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-19
Figure 5.15 Teach Die Grid Screen with Loaded Die Grid . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-20
Figure 5.16 Scan Catalog Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-22
Figure 5.17 Warning – Automatic Null . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-22
Figure 5.18 Teach Die Grid Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-23
Figure 5.19 Teach Die Grid - Teach First Position . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-24
Figure 5.20 Teach Die Grid - Teach Feature . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-25
Figure 5.21 Wafer Data Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-25
Figure 5.22 Teach Die Grid - Lower Right Corner . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-26
Figure 5.23 Teach Die Grid - With Feature in Navigation Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-27
Figure 5.24 Teach Die Grid - Die Grid Simulation in Navigation Window . . . . . . . . . . . . . . . . . . . . . . . . 5-27
Figure 5.25 Save Die Grid As Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-28
Figure 5.26 Sequence Editor with Die Grid Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-29
Figure 5.27 Load Sequence Die Grid . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-29
Figure 5.28 Die Grid Menu From the Menu Bar . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-30
Figure 5.29 Die Grid Navigation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-31
Figure 5.30 XY View Screen – View Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-33

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Figure 5.31 Teach Center Object Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-33

Figure 5.32 Teach Center of Object Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-34
Figure 5.33 Select Object Type Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-35
Figure 5.34 Arrow Button Movement - Scan Offset Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-36
Figure 5.35 Align Sample Procedure - Scan Offset Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-37
Figure 5.36 Setting Alignment Angle . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-37
Figure 5.37 Move Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-39
Figure 5.38 Move Extent Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-39

Chapter 6 View Scan Window

Figure 6.1 2D Single Scan View Scan Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-2
Figure 6.2 2D Sequence View Scan Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-2
Figure 6.3 2D Scan Window - Scan Information Field . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-3
Figure 6.4 2D Scan Window - Scan Information Field . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-4
Figure 6.5 Scan screen - real time Trace Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-6
Figure 6.6 2D View Scan Screen Menu Bar . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-7
Figure 6.7 3D View Scan Screen During a Single Scan . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-11
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Figure 6.8 3D View Scan Screen During a Scan Sequence . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-12

Figure 6.9 3D Scan Window - Scan Information Field . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-12
Figure 6.10 3D Scan Window - Scan Information Field . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-14
Figure 6.11 View Scan Screen Menu Bar . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-17
Figure 6.12 Scan screen - real time Trace Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-20
Figure 6.13 Top View Image of the 3D Scan In Progress . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-20
Figure 6.14 View Menu (Sequence Scan Screen) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-21
Figure 6.15 Sequence Execution Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-21
Figure 6.16 Sequence Scan Screen with Die Measurement Site Map . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-23

Chapter 7 Sequence Recipe and Data (Optional)

Figure 7.1 Sequence Editor Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-3
Figure 7.2 Sequence Editor – Sequence Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-6
Figure 7.3 Sequence Information Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-6
Figure 7.4 Sequence Editor – Mode Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-7
Figure 7.5 Sequence Editor – If Fail Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-9
Figure 7.6 Sequence Editor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-10
Figure 7.7 Data Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-10
Figure 7.8 Sequence Editor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-12
Figure 7.9 Teach Location Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-13
Figure 7.10 Sequence Recipe Catalog Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-14
Figure 7.11 Scan Sequence Catalog . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-15
Figure 7.12 Sequence Editor for NEW Recipe with Pattern Recognition . . . . . . . . . . . . . . . . . . . . . . . . . . 7-16
Figure 7.13 Options Section in the Sequence Editor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-17
Figure 7.14 Die Grid Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-17
Figure 7.15 Load Die Grid Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-18
Figure 7.16 Sequence Editor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-18
Figure 7.17 Sequence Editor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-19
Figure 7.18 Pattern Rec. Deskew Teach: Site 1 Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-19
Figure 7.19 Deskew Options Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-20
Figure 7.20 Data Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-21
Figure 7.21 Sequence Editor Set Up for New Recipe . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-22
Figure 7.22 Sequence Editor - Teach Scan Location . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-23

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Figure 7.23 Teach Location for First Recipe Scan . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-24

Figure 7.24 Sequence Editor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-25
Figure 7.25 Sequence Editor with Die Grid Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-26
Figure 7.26 Die Grid Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-26
Figure 7.27 XY View with Sequence Scan Sites . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-27
Figure 7.28 Sequence Editor Message Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-27
Figure 7.29 Sequence Editor with New Scan Sites . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-28
Figure 7.30 Correlation Scan Sequence . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-30
Figure 7.31 Correlation Sub-scan Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-31
Figure 7.32 Sequence Parameter Data window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-34
Figure 7.33 Sequence Summary Options Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-35
Figure 7.34 Manual Deskew Teach Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-37
Figure 7.35 Deskew Options Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-38
Figure 7.36 Profiler Sequence Editor Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-41
Figure 7.37 Pattern Rec. Deskew Teach window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-42
Figure 7.38 Pattern Rec. Deskew Teach Window After Teach . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-43
Figure 7.39 If Fail Menu in Options Portion of Sequence Recipe Screen . . . . . . . . . . . . . . . . . . . . . . . . . 7-44

Preliminary
Figure 7.40 Pattern Recognition and Deskew Options Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-45
Figure 7.41 Groping Retry Layers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-46
Figure 7.42 Analysis Screen with File Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-50
Figure 7.43 Save Data Set Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-51
Figure 7.44 Recipe Transport Options… Configuration Screen Button . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-52
Figure 7.45 Recipe Transport Options Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-53
Figure 7.46 Browse Directories Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-53
Figure 7.47 Recipe Transport Options with “If Existing File” Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-55
Figure 7.48 Calibration Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-56
Figure 7.49 Wafer Center Calibration Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-57
Figure 7.50 Sequence Recipe Catalog Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-59
Figure 7.51 Sequence Editor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-60
Figure 7.52 Handler Options Dialog Box - Load Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-60
Figure 7.53 Handler Options Dialog Box - Manual Load/Unload Option . . . . . . . . . . . . . . . . . . . . . . . . . 7-61
Figure 7.54 The Sequence Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-61
Figure 7.55 Load Substrate Message . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-62
Figure 7.56 Handler Options Dialog Box - Manual Load/Unload Option . . . . . . . . . . . . . . . . . . . . . . . . . 7-62
Figure 7.57 The Sequence Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-63

Chapter 8 Analyzing 2D Scan Data

Figure 8.1 Sequence Recipe Catalog . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-2
Figure 8.2 Scan Data Catalog . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-2
Figure 8.3 Scan Data Catalog . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-3
Figure 8.4 Thumbnail Display of Data Traces . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-4
Figure 8.5 Thumbnail Display of Data Traces . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-4
Figure 8.6 Data Before Leveling, with Leveling Cursors Visible . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-6
Figure 8.7 Screen Cursor Positioning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-7
Figure 8.8 Double Cursor - Relocating the Entire Cursor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-8
Figure 8.9 Delta Mode - Cursor Spread on a Scan Trace . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-9
Figure 8.10 Analysis Screen with Unleveled Trace and Level Cursors . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-10
Figure 8.11 Analysis Screen with Leveled Trace and Measurement Cursors . . . . . . . . . . . . . . . . . . . . . . . 8-11
Figure 8.12 Analysis Screen’s Cursors Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-12
Figure 8.13 Accessing the Scan Recipe from the Analysis Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-12

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Figure 8.14 Recipe Screen - General Parameters Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-13

Figure 8.15 Exit Recipe Editor to Return to Analysis Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-13
Figure 8.16 Analysis screen with Repositioned Cursors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-14
Figure 8.17 CALC Button in Analysis Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-14
Figure 8.18 Surface Parameter Summary Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-15
Figure 8.19 File Menu in Analysis Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-15
Figure 8.20 Save Scan Data Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-16
Figure 8.21 Analysis Screen with View Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-16
Figure 8.22 Setting Z Graph Limits . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-17
Figure 8.23 Analysis Screen with View Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-17
Figure 8.24 Set Z Units Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-18
Figure 8.25 View Menu with FFT Chosen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-18
Figure 8.26 Analysis Screen with a Normal Trace . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-19
Figure 8.27 View Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-19
Figure 8.28 Normal Trace and Z Axis Logarithmic Scaling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-20
Figure 8.29 Analysis Screen with the Zoom and Scale Function Buttons . . . . . . . . . . . . . . . . . . . . . . . . . . 8-21
Figure 8.30 Analysis Screen Using Scaling Zoom . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-21
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Figure 8.31 Analysis Screen Using Boxed Zoom . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-22

Figure 8.32 Recalculate and Save Zoomed Leveling Cursors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-23
Figure 8.33 Feature Detection - Recipe Editor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-24
Figure 8.34 Feature Detection Point Locations on a Step . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-25
Figure 8.35 Feature Detection Point Locations for Convex and Concave . . . . . . . . . . . . . . . . . . . . . . . . . 8-25
Figure 8.36 Feature - Feature Detection - Recipe Editor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-26
Figure 8.37 Detection Variables - Feature Detection - Recipe Editor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-27
Figure 8.38 Scan Noise and the Gaussian Noise Filter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-30
Figure 8.39 Activating the Gaussian Noise Filter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-30
Figure 8.40 Filter Cutoff Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-31
Figure 8.41 Feature Detection - Run 1 with Automatic Cursor Placement . . . . . . . . . . . . . . . . . . . . . . . . . 8-32
Figure 8.42 Feature Detection - Run 2 with Automatic Cursor Placement . . . . . . . . . . . . . . . . . . . . . . . . . 8-32
Figure 8.43 Feature Detection - Run 3 with Automatic Cursor Placement . . . . . . . . . . . . . . . . . . . . . . . . . 8-33
Figure 8.44 Effect of the Analog and Decimation Filters On Signal Transmission . . . . . . . . . . . . . . . . . . 8-35
Figure 8.45 Defining a Band Pass With The Short-wave & Long-wave Cutoff Filters . . . . . . . . . . . . . . . 8-35
Figure 8.46 Effect of the Short-wave Cutoff Filter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-36
Figure 8.47 Recipe Editor – Filters and Cursors Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-36
Figure 8.48 Effect of the Long-wave Cutoff Filter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-37
Figure 8.49 Waviness Filter (Long Wavelength Cutoff Filter) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-38
Figure 8.50 Signal Transmission Curves And Their Effects On Scan Data . . . . . . . . . . . . . . . . . . . . . . . . 8-38
Figure 8.51 Analysis Screen with Operations Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-40
Figure 8.52 Analysis Screen with Operations Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-41
Figure 8.53 Right-Click Menu - Remove Glitches Menu Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-41
Figure 8.54 Analysis Trace Window with Glitch Removed . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-42
Figure 8.55 3D General Parameters - Recipe Editor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-43
Figure 8.56 Arc Segment Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-44
Figure 8.57 General Parameters - Recipe Editor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-46
Figure 8.58 Feature Detection - Recipe Editor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-46
Figure 8.59 Cursor Options - Filters/Cursors - Recipe Editor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-47
Figure 8.60 Save Scan Data Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-48
Figure 8.61 Scan Recipe Tool Bar for Analysis Editing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-49

Chapter 9 Analyzing 3D Scan Data

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Figure 9.1 Scan Catalog Screen with Scan Data Active. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-2
Figure 9.2 Scan Catalog Screen with Scan Data Active. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-2
Figure 9.3 3D Analysis Screen with 3D Object Displayed . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-3
Figure 9.4 Analysis Tool Bar Image Rotation Buttons . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-3
Figure 9.5 Manual Image Rotation Handles . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-5
Figure 9.6 Image Rotation Using the Rotate Image Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-6
Figure 9.7 Right-Click Menu – Mouse Tools . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-7
Figure 9.8 Analysis Tool Bar Graphics Buttons . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-7
Figure 9.9 Analysis Screen - Tool Activation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-8
Figure 9.10 Analysis Screen - Enable Zoom Tool . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-8
Figure 9.11 Analysis Screen - Zoom Active . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-9
Figure 9.12 Analysis Screen with Zoom Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-9
Figure 9.13 Analysis Screen – Using the Zoom In Icon . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-10
Figure 9.14 Analysis Screen – Zoomed In Area . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-11
Figure 9.15 Analysis Screen – Unzoom Using Right-Click Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-11
Figure 9.16 Analysis Screen Menu Bar . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-18
Figure 9.17 Parameters Menu from the Analysis Screen Menu Bar . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-26

Preliminary
Figure 9.18 Catalog Screen – Scan Recipes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-27
Figure 9.19 3D Recipe Editor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-27
Figure 9.20 3D Recipe Editor with Roughness/Waviness Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-28
Figure 9.21 Bearing Ratio/Cutting Depth in Recipe Editor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-29
Figure 9.22 Program Level Icons . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-34
Figure 9.23 Catalog Screen with Scan Recipe Chosen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-34
Figure 9.24 3D Scan Catalog Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-35
Figure 9.25 Recipe Editor - 3D Cursors Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-36
Figure 9.26 3D Line by Line Leveling Cursor Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-37
Figure 9.27 3D Line by Line Leveling Cursor Field . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-38
Figure 9.28 Line Leveling Top View Analysis Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-39
Figure 9.29 Recipe Editor with 3D Cursors Window Displayed . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-39
Figure 9.30 Set Viewing Parameters Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-40
Figure 9.31 Line Leveling Dialog Box After Cursors Positioned . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-43
Figure 9.32 Image Arithmetic Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-44
Figure 9.33 3D analysis Screen with File Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-45
Figure 9.34 Save Scan Data Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-46
Figure 9.35 Analysis Screen - Analysis Tool Bar . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-46
Figure 9.36 3D Analysis Tool Bar with Slice Tool Activated . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-47
Figure 9.37 Analysis Screen with View . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-47
Figure 9.38 Analysis Screen with Slice Tool Active . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-48
Figure 9.39 Analysis Screen with Both 2D and 3D Images . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-48
Figure 9.40 Analysis Screen with Both 2D and 3D Images . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-49
Figure 9.41 Analysis Window with File Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-49
Figure 9.42 Save Scan Data Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-50

Chapter 10 System Security

Figure 10.1 Windows Screen START Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-4
Figure 10.2 Programs Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-4
Figure 10.3 Administrative Tools Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-5
Figure 10.4 Windows Screen with Path to User Manager Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-5
Figure 10.5 User Manager . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-6
Figure 10.6 User Manager . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-7

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Figure 10.7 New User Dialog Box - Variables . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-8

Figure 10.8 New User Dialog Box - Variables . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-8
Figure 10.9 Group Membership Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-9
Figure 10.10 User Manager . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-9
Figure 10.11 User Properties Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-10
Figure 10.12 Group Membership Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-10
Figure 10.13 Group Memberships Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-11
Figure 10.14 User Properties . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-11
Figure 10.15 Calibrations Screen with Functions Grayed Out . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-12

Chapter 11 Configuration
Figure 11.1 Start Menu with Setting Menu Displayed . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-3
Figure 11.2 Control Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-3
Figure 11.3 Date/Time Properties Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-4
Figure 11.4 Choose Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-4
Figure 11.5 Configuration Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-5
Figure 11.6 Stage Configuration Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-6
P rel i mi n a ry

Figure 11.7 Configuration - Theta Soft Home Position… . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-6

Figure 11.8 Teach Soft Home Position Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-7
Figure 11.9 Align Sample Procedure - Scan Offset Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-8
Figure 11.10 Setting Alignment Angle . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-8
Figure 11.11 Message Prompt After Alignment Angle is Set . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-8
Figure 11.12 Message Prompt to Accept of First Alignment Location . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-8
Figure 11.13 Message Prompt for Selecting Second Alignment Location . . . . . . . . . . . . . . . . . . . . . . . . . . 11-9
Figure 11.14 Message Prompt to Accept Second Alignment Location . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-9
Figure 11.15 Message Prompt to Accept the Alignment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-9
Figure 11.16 Configuration Screen - Lowest Elevator Position . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-10
Figure 11.17 Teach Lowest Elevator Position Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-11
Figure 11.18 Configuration Screen - Lowest Elevator Position . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-12
Figure 11.19 Configuration Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-14
Figure 11.20 System Configuration Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-14
Figure 11.21 Instrument Setup Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-15
Figure 11.22 Vacuum Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-16
Figure 11.23 Vacuum Feedback . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-16
Figure 11.24 Vacuum Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-17
Figure 11.25 System Configuration Summary Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-18
Figure 11.26 Registry Maintenance Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-19
Figure 11.27 System Configuration Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-20
Figure 11.28 Configuration Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-21
Figure 11.29 Safe Area Configuration - Sample Configuration Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-22
Figure 11.30 Safe Area Configuration Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-22
Figure 11.31 Safe Area Configuration - Edit Safe Area Values . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-23
Figure 11.32 Configuration Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-24
Figure 11.33 Machine History Recorder Configuration Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-24
Figure 11.34 Machine History Recorder Configuration with Drop-Down Menu . . . . . . . . . . . . . . . . . . . . 11-25
Figure 11.35 Machine History Recorder Configuration Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-25
Figure 11.36 Configuration Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-26
Figure 11.37 Enable New Options Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-27
Figure 11.38 Configuration Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-28
Figure 11.39 Export Path Defaults . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-28

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Figure 11.40 Configuration Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-29

Figure 11.41 Pattern Recognition and Deskew Options Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-30
Figure 11.42 Groping Retry Layers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-32
Figure 11.43 Pattern Recognition and Deskew Options Dialog box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-33
Figure 11.44 Pattern Recognition and Deskew Options Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-34
Figure 11.45 Configuration Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-35
Figure 11.46 Sequence Execution Options Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-35
Figure 11.47 Sequence Prompts Combo Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-36
Figure 11.48 ID Input Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-36
Figure 11.49 Sequence Execution Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-37
Figure 11.50 View Scan Display Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-37
Figure 11.51 Automation Combo Box in Sequence Execution Options . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-38
Figure 11.52 Configuration Screen - Manual Load Position . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-38
Figure 11.53 Teach Manual Load Position . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-39
Figure 11.54 Teach Manual Load Position Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-39
Figure 11.55 Configuration Screen - Proximity Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-40
Figure 11.56 Proximity Sensor Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-41

Preliminary
Figure 11.57 File Menu for Choosing Authorize Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-43
Figure 11.58 Authorize Maintenance Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-43
Figure 11.59 File Menu for Change Password… Dialog Box Access . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-44
Figure 11.60 Change Password Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-44
Figure 11.61 Closing the Profiler Application Using the Control Button . . . . . . . . . . . . . . . . . . . . . . . . . . 11-45
Figure 11.62 Profiler Container for Profiler Shutdown . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-45
Figure 11.63 Start Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-46
Figure 11.64 Shut Down Windows Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-46
Figure 11.65 Catalog - Scan Recipe Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-47
Figure 11.66 XY View Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-48
Figure 11.67 Lightweight Stage Table Top . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-49
Figure 11.68 Precision Locator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-49
Figure 11.69 Three Point Disk Locator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-50
Figure 11.70 Catalog - Scan Recipe Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-51
Figure 11.71 XY View Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-51
Figure 11.72 Three Point Disk Locator Base Plate . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-52
Figure 11.73 Center Hub Screw . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-52
Figure 11.74 Disk Support for the Three Point Disk Locator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-53

Chapter 12 Calibrations
Figure 12.1 File Menu for Choosing Authorize Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-2
Figure 12.2 Authorize Maintenance Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-2
Figure 12.3 File Menu for Change Password… Dialog Box Access . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-3
Figure 12.4 Change Password Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-3
Figure 12.5 Catalog Screen - Choose Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-4
Figure 12.6 Calibrations Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-4
Figure 12.7 Applied Force Calibration Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-5
Figure 12.8 Catalog Screen - Choose Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-6
Figure 12.9 Calibrations Screen- Accessing the Video Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-7
Figure 12.10 Manual Load from the Video Calibration Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-7
Figure 12.11 Message Prompt and Focus Button . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-9
Figure 12.12 XY Video Display Message Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-10
Figure 12.13 KLA-Tencor Stylus Alignment Tool . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-11

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Figure 12.14 Manual Load from the Scan Offset Calibration Window . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-12
Figure 12.15 Catalog Screen - Click on the Calibration Icon . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-12
Figure 12.16 Scan Calibrations Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-13
Figure 12.17 Scan Position Offset Calibration Options dialog box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-14
Figure 12.18 Window Buttons - COARSE - Recipe Editor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-15
Figure 12.19 Scan Position Offset Calibration Options dialog box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-16
Figure 12.20 Set Default Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-16
Figure 12.21 Scan Parameter Definition - _OFF150 - Recipe Editor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-17
Figure 12.22 View Menu with Align Sample Chosen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-18
Figure 12.23 Alignment Angle Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-18
Figure 12.24 KLA-Tencor Stylus Alignment Tool . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-19
Figure 12.25 KLA-Tencor Stylus Alignment Tool . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-20
Figure 12.26 Aligning the Tool with Screen Crosshair . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-20
Figure 12.27 Align Screen Crosshair with 150 mm Crosshair Pattern . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-21
Figure 12.28 Manual Load from the Scan Offset Calibration Window . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-21
Figure 12.29 Scan: _OFF150 Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-22
Figure 12.30 Trace Path Through the Triangle . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-22
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Figure 12.31 Data Analysis Window. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-23

Figure 12.32 Scan Data Portion of the Analysis Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-23
Figure 12.33 150 mm Scan Data Analysis Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-24
Figure 12.34 “Unknown Situation” Corrective Action . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-24
Figure 12.35 Angle Features on the Stylus Alignment Tool . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-25
Figure 12.36 KLA-Tencor Stylus Alignment Tool . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-26
Figure 12.37 Angle Features . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-26
Figure 12.38 Scan Information Display in Analysis Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-28
Figure 12.39 Step Height Calibration Factors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-29
Figure 12.40 Navigation Window Right-Click Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-30
Figure 12.41 Move To Position Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-30
Figure 12.42 Calibration Menu in the Calibration Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-31
Figure 12.43 Step Height Calibration Options Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-31
Figure 12.44 Multi-Scan Average Option . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-32
Figure 12.45 Setting Standard Step Height Value . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-32
Figure 12.46 Confirming the Displayed Calibration Recipe . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-33
Figure 12.47 “Copy default to custom recipe?” Message . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-34
Figure 12.48 Changing the Calibration Recipe Option to Default . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-34
Figure 12.49 Changing the Calibration Recipe Option to Custom . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-35
Figure 12.50 Recipe Editor for _STEPHTL . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-36
Figure 12.51 Stylus Force Change Message . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-37
Figure 12.52 Recipe Editor - Saving Recipe Changes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-37
Figure 12.53 Completing the Options Selection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-38
Figure 12.54 Loading the Step Height Calibration Standard . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-38
Figure 12.55 Step Height Calibration Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-39
Figure 12.56 Step Height Scan Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-40
Figure 12.57 Saving the New Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-41
Figure 12.58 Calibration Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-42
Figure 12.59 Level Calibration Warning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-43
Figure 12.60 Tilt Calibration System Status Load Wafer Message . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-43
Figure 12.61 Tilt Axis Angle Calibration Value Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-44
Figure 12.62 Activating Focus in the XY VIEW Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-45
Figure 12.63 Move To Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-45
Figure 12.64 Move To Position Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-45

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Figure 12.65 Teach Lowest Elevator Position Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-46

Figure 12.66 Move To Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-46
Figure 12.67 Move To Position Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-47
Figure 12.68 Calibration Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-48
Figure 12.69 Wafer Center Calibration Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-49

Chapter 13 GEM/SECS Option

Figure 13.1 Database File Manager Icon Choice . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-1
Figure 13.2 Configuration Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-2
Figure 13.3 Machine Configuration Dialog box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-2
Figure 13.4 Instrument Setup Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-3
Figure 13.5 Configuration Warning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-3
Figure 13.6 Configuration Screen – Opening GEM/SECS Communication . . . . . . . . . . . . . . . . . . . . . . . 13-4
Figure 13.7 GEM User Interface Screen (Top of Screen) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-4
Figure 13.8 Configuration Screen – Opening GEM/SECS Communication . . . . . . . . . . . . . . . . . . . . . . . 13-5
Figure 13.9 GEM User Interface Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-5

Preliminary
Figure 13.10 GEM User Interface Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-6
Figure 13.11 Configuration Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-6
Figure 13.12 Communication Option - Initial Communication States . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-7
Figure 13.13 Communication Option - Poll Delay . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-8
Figure 13.14 Communication Option - Poll Delay . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-8
Figure 13.15 Control States Option . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-9
Figure 13.16 GEM Configuration - Online Failed State: . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-10
Figure 13.17 GEM Configuration - Spooling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-11
Figure 13.18 GEM Configuration - Equipment Identification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-12
Figure 13.19 GEM Configuration - Event Reports . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-13
Figure 13.20 GEM Configuration - Alarms . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-13
Figure 13.21 GEM Configuration - Terminal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-14
Figure 13.22 GEM User Interface Screen - Trace Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-15
Figure 13.23 Trace Configuration Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-15
Figure 13.24 GEM User Interface Screen - GEM Status . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-16
Figure 13.25 GEM Status Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-16
Figure 13.26 GEM Status Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-18
Figure 13.27 Send TTY Message Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-18
Figure 13.28 GEM Status - View and Ack Host TTY Msg Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-19
Figure 13.29 View and Ack TTY Msg from Host Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-19
Figure 13.30 Database File Manager Icon Choice . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-20
Figure 13.31 Database Catalog Screen. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-20
Figure 13.32 Scan and Sequence Recipe Windows . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-21
Figure 13.33 Upload Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-22
Figure 13.34 Database File Manager Icon Choice . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-22
Figure 13.35 Database Screen - PPTransfer Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-23
Figure 13.36 PPid Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-23

Chapter 14 Wafer Stress Application Option

Figure 14.1 13 Point Least Square Fit Calculation Illustration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-4
Figure 14.2 Stress Recipe Name Assignment Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-5
Figure 14.3 Catalog Screen – Choosing the Stress Application . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-6
Figure 14.4 Stress Screen with Substrate Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-6
Figure 14.5 Precision Locator on the Stage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-7

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Figure 14.6 Catalog Screen – Choosing the Stress Application . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-7

Figure 14.7 Stress Application Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-8
Figure 14.8 Stress Recipe List Area . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-8
Figure 14.9 Function Buttons in the Stress Recipe Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-9
Figure 14.10 Stress Screen with the Scan Data Catalog Displayed . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-10
Figure 14.11 Scan Data Information in the Stress Data Catalog . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-10
Figure 14.12 Stress Calculation Function and Set-Up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-11
Figure 14.13 Stress Application Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-12
Figure 14.14 Stress Recipe Editor Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-13
Figure 14.15 Catalog Screen – Choosing the Stress Application . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-13
Figure 14.16 Stress Application Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-14
Figure 14.17 Stress Recipe Name Dialog Box. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-14
Figure 14.18 Stress Screen with Stress Recipe Editor Open . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-15
Figure 14.19 Saving Recipe Parameters Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-15
Figure 14.20 Stress Recipe Name . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-16
Figure 14.21 Number of Stress Points . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-16
Figure 14.22 Scan Start Position . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-17
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Figure 14.23 Scan Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-17

Figure 14.24 Substrate Specification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-18
Figure 14.25 Stress Calculation Method . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-20
Figure 14.26 Stress Screen With Recipe Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-21
Figure 14.27 Stress Recipe Name Dialog Box. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-21
Figure 14.28 Printer Icon in Tool Bar . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-22
Figure 14.29 Stress Application Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-23
Figure 14.30 Stress Recipe List Area . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-24
Figure 14.31 Stress Recipe Catalog Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-24
Figure 14.32 Scan ID Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-25
Figure 14.33 Scan Screen with Real Time Scan Trace . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-25
Figure 14.34 Stress Scan Analysis Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-26
Figure 14.35 Stress Screen with Scan Data Catalog Displayed . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-27
Figure 14.36 Stress Screen with Stress Data File . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-28
Figure 14.37 Stress Screen with Scan Data Catalog Displayed . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-29
Figure 14.38 Calculation Warning for Mismatched Recipes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-30
Figure 14.39 Film Thickness Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-30
Figure 14.40 Polynomial Calculation Results . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-30
Figure 14.41 Stress Calculation Analysis Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-31
Figure 14.42 Polynomial Calculation Results . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-31
Figure 14.43 Stress Calculation Results Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-32

Chapter 15 CMP Analysis Algorithms

Figure 15.1 Sample Array . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15-2
Figure 15.2 Sample Array of Lines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15-3
Figure 15.3 Sample Pad . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15-5
Figure 15.4 Setup Analysis Tools Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15-6
Figure 15.5 CMP Analysis Setup Page . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15-7
Figure 15.6 CMP Analysis Setup for Pads Analysis . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15-8
Figure 15.7 Sequence Recipe Catalog Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15-9
Figure 15.8 Analysis Screen for Sequence with CMP Analysis . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15-10
Figure 15.9 Sequence Erosion and Recess Results . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15-11

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 List of Tables

Chapter 1 Introduction
Table 1.1 Capabilities and Performance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2
Table 1.2 Hardware Features . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3
Table 1.3 P-15 Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4

Chapter 2 Basic Skills

Table 2.1 Keyboard Functions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2
Table 2.2 Using the Left Trackball Button . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4
Table 2.3 Profiler Program Access Icons . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-7
Table 2.4 Stylus Arm Assembly Protection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-13
Table 2.5 Special Characters Allowed for Naming Purposes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-19
Table 2.6 Graphics Export Dialog Features . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-22
Table 2.7 Graphics Export Dialog Features . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-24
Prelimina ry

Table 2.8 Graphics Export Dialog Features . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-25

Table 2.9 Graphics Export Dialog Features . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-28
Table 2.10 Print Dialog Box Features . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-31

Chapter 3 Scan Recipes

Table 3.1 Control Button Menu. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4
Table 3.2 GEM Status Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5
Table 3.3 File Menu Options Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6
Table 3.4 Edit Menu Options Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6
Table 3.5 Sample Menu Options Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7
Table 3.6 Vacuum Menu Options Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7
Table 3.7 Host Menu Options Description (Only available with GEM/SECS Option) . . . . . . . . . . . . . . . . . 3-7
Table 3.8 Diagnostics Menu Options Description. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-8
Table 3.9 Task Menu Options Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-8
Table 3.10 Tool Bar for the Scan Recipe Catalog Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-8
Table 3.11 Catalog Screen Access Buttons . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-9
Table 3.12 Scan Recipe List Window Function Access Buttons . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-12
Table 3.13 Recommended Scan Speeds . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-18
Table 3.14 Show Position Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-23
Table 3.15 3D Scan Parameters Summary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-25
Table 3.16 Automatic Parameter Adjustments . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-28
Table 3.17 Show Position Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-29
Table 3.18 Stylus Force Ranges for the Different Head Configurations. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-36
Table 3.19 Range and Resolution Scan Parameters for the MH2lf Head . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-38
Table 3.20 Range and Resolution Scan Parameters for the MH2sr Head . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-38
Table 3.21 Range and Resolution Scan Parameters for the MH2xr Head . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-39
Table 3.22 Profile Types . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-42
Table 3.23 Feature Detection Descriptions (See Figure 3.47 and Figure 3.48.). . . . . . . . . . . . . . . . . . . . . . . 3-46
Table 3.24 2D General Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-67
Table 3.25 3D General Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-70
Table 3.26 2D Roughness Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-74
Table 3.27 2D Waviness Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-76

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Table 3.28 3D Roughness Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-78

Table 3.29 High Resolution Camera Only - Diagnostic Options. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-107
Table 3.30 Standard - Diagnostic Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-108
Table 3.31 Linearity Calibration Only – Diagnostic Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-108

Chapter 4 Stylus Change Procedure

Table 4.1 Available L-Stylus Radius . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1

Chapter 5 XY View Screen

Table 5.1 View Menu Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4
Table 5.2 Die Grid Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-5
Table 5.3 Move Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-6
Table 5.4 Direction Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-7
Table 5.5 Actions Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-8
Table 5.6 Sample Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-8
Table 5.7 Vacuum Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-8
Table 5.8 Stylus Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-9
Pre limina ry

Table 5.9 Blob Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-9

Table 5.10 XY View window Tool Bar Buttons . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-10
Table 5.11 Locating a Scan Site. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-17

Chapter 6 View Scan Window

Table 6.1 Scan Screen - Recipe Information Column . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-3
Table 6.2 View Scan Screen - 2D Location Information Column . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-3
Table 6.3 View Scan Screen - 2D Location Information Column . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-4
Table 6.4 Scan Screen - Recipe Information Column . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-4
Table 6.5 View Scan Screen - 2D Location Information Column . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-5
Table 6.6 2D View Scan Window Tool Bar Buttons. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-7
Table 6.7 2D View Scan Screen - File Menu. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-8
Table 6.8 2D View Scan Screen - Trace Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-8
Table 6.9 2D View Scan Screen - Mode Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-8
Table 6.10 2D View Scan Screen - Image Menu. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-9
Table 6.11 2D View Scan Screen - Scan Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-9
Table 6.12 2D View Scan Screen - Sequence Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-9
Table 6.13 2D View Scan Screen - Pan Menu. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-10
Table 6.14 2D View Scan Screen - Debug Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-10
Table 6.15 Scan Screen - Recipe Information Column . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-13
Table 6.16 View Scan Screen - 3D Location Information Column . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-13
Table 6.17 View Scan Screen - 3D Location Information Column . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-14
Table 6.18 Scan Screen - Recipe Information Column . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-14
Table 6.19 View Scan Screen - 2D Location Information Column . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-15
Table 6.20 3D View Scan Window Tool Bar Buttons. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-16
Table 6.21 3D View Scan Screen - File Menu. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-17
Table 6.22 3D View Scan Screen - Trace Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-17
Table 6.23 3D View Scan Screen - Mode Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-17
Table 6.24 3D View Scan Screen - Image Menu. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-18
Table 6.25 3D View Scan Screen - Scan Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-18
Table 6.26 3D View Scan Screen - Sequence Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-18
Table 6.27 3D View Scan Screen - Pan Menu. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-19

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Table 6.28 3D View Scan Screen - Debug Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-19

Chapter 7 Sequence Recipe and Data (Optional)

Table 7.1 Sequence Editor window buttons . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-4
Table 7.2 Sequence List Buttons . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-4
Table 7.3 Options Buttons . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-5
Table 7.4 Site Buttons . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-5
Table 7.5 Mode Drop-down Menu Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-8
Table 7.6 If Fail Drop-down Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-9
Table 7.7 Save and Export Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-11
Table 7.8 Export Options. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-11
Table 7.9 Print Option . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-11
Table 7.10 Pattern Examples . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-39
Table 7.11 Pattern Search Criteria. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-40
Table 7.12 Groping Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-46

Chapter 8 Analyzing 2D Scan Data

P rel i mi n a ry
Table 8.1 2D Analysis toolbar . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-5
Table 8.2 Trace Information Parameter. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-23
Table 8.3 Feature Detection Descriptions (See Figure 8.34 and Figure 8.35.). . . . . . . . . . . . . . . . . . . . . . . 8-26
Table 8.4 Feature Detection Variables . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-33
Table 8.5 Scan Recipe Parameters. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-45

Chapter 9 Analyzing 3D Scan Data

Table 9.2 Manual Image Rotation Buttons . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-4
Table 9.1 Automatic Image Rotation Buttons . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-4
Table 9.3 Image Rotation Using the Arrow Keys . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-5
Table 9.4 Rotate Image Menu Options (From View Menu) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-6
Table 9.5 Analysis Toolbar Buttons . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-12
Table 9.6 Analysis Side Toolbar Buttons . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-14
Table 9.7 File Menu Operations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-18
Table 9.8 Edit Menu Option . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-19
Table 9.9 View Menu Options. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-20
Table 9.10 Change Menu Option From the View Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-23
Table 9.11 Change Menu Option From the View Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-24
Table 9.12 Operations Menu Options (From Menu Bar) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-29
Table 9.13 Data Menu Options (From Menu Bar) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-31
Table 9.14 Tools Menu Options (From Menu Bar). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-32
Table 9.15 3D Analysis graphs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-41

Chapter 10 System Security

Chapter 11 Configuration
Table 11.1 Facility Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-2
Table 11.2 Groping Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-30

Chapter 12 Calibrations
Table 12.1 Angle Feature Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-27
Table 12.2 Standard Calibration Matrix . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-51

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Chapter 13 GEM/SECS Option

Chapter 14 Wafer Stress Application Option
Table 14.1 Tool Bar Icons . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-11
Table 14.2 Elastic Constant of Substrates . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-19
Table 14.3 Polynomial Calculation Results Message Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-32
Table 14.4 Stress Calculation Results Box Contents . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-33

Chapter 15 CMP Analysis Algorithms

Pre limina ry

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Chapter 1 Introduction
INSTRUMENT OVERVIEW . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-1
CAPABILITIES AND PERFORMANCE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-2
HARDWARE FEATURES AND OPTIONS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-3

Chapter 2 Basic Skills

OVERVIEW . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-1
USING THE KEYBOARD . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-1
Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-1
USING THE TRACKBALL . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-3

Preliminary
Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-3
POWERING UP THE PROFILER . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-4
Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-4
Power Up Procedure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-4
SECURITY LOG ON . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-4
Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-4
Log On Procedure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-5
STARTING THE WINDOWS PROFILER APPLICATION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-5
Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-5
Profiler Start-Up Procedure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-6
NAVIGATING BETWEEN PROGRAM LEVEL SCREENS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-7
Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-7
Navigation Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-7
EXITING THE WINDOWS PROFILER APPLICATION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-8
Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-8
Profiler Exit Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-8
POWERING DOWN THE PROFILER . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-10
Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-10
Power Down Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-10
PERFORMING AN EMERGENCY SHUTDOWN . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-12
CLEARING A DIAGNOSTIC MESSAGE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-12
Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-12
Clearing a Diagnostic Message Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-12
PROTECTING THE STYLUS ARM ASSEMBLY. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-13
System Provisions for Stylus Protection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-13
Potential Stylus Damage During Scans. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-13
ADJUSTING THE VIDEO IMAGE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-15
Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-15
Video Image Adjustment Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-15
USING FILE NAME CONVENTIONS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-19
Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-19
Naming and Saving Files . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-19
SAVING VIDEO IMAGES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-20

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Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-20
Naming and Saving Video Images Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-20
EXPORTING DATA GRAPHS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-21
Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-21
Exporting Data Graphs from the Analysis Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-21
Exporting Graphs from the Scan Data Catalog. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-23
Exporting Graphs from the Sequence Data Catalog . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-26
EXPORTING DATA FROM THE DATABASE FILE MANAGER . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-28
PRINTING DATA . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-30
Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-30
Print Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-31

Chapter 3 Scan Recipes

INTRODUCTION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
ACCESSING THE SCAN RECIPE CATALOG SCREEN . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2
SCAN RECIPE CATALOG SCREEN COMPONENTS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
Pre limina ry

Screen Tools . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3

Catalog Screen Access Buttons . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-9
List Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10
System Status Message . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-13
CREATING AND EDITING A SCAN RECIPE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-13
Accessing the Scan Recipe Editor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-13
Recipe Editor for 2D and 3D Scans. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-15
Scan Parameter Definition Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-16
Feature Detection (Only for 2D Scans) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-43
Filters and Cursors (Only for 2D Scans) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-50
Unit Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-63
General Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-65
Roughness and Waviness Parameters. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-70
Bearing Ratio and Cutting Depth . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-79
High Spot Count and Peak Count . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-84
3D Cursors Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-88
Setup Analysis Tools . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-95
Diagnostic Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-105
Saving Scan Recipes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-109
Entering Comments . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-113

Chapter 4 Stylus Change Procedure

INTRODUCTION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
PROXIMITY SENSOR ACTIVATION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2
STYLUS REMOVAL AND REPLACEMENT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4
Stylus Removal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5
Stylus Replacement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-9
Scan Position Offset Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-11

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Chapter 5 XY View Screen

INTRODUCTION. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-1
STARTING THE XY VIEW APPLICATION. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-2
Procedure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-2
XY View Window Features . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-3
SETTING THE MAGNIFICATION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-11
Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-11
Changing the Magnification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-11
Resetting the Zoom to “0.00”. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-11
Saving the Current Zoom Position . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-12
FOCUSING THE VIEW . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-13
Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-13

Pre liminary
Focus the Optics – Top- or Side-View . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-15
POSITIONING THE SCAN SITE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-16
Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-16
USING DIE GRID NAVIGATION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-19
Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-19
Creating a Die Grid . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-21
Loading a Die Grid (Turning ON Die Grid Navigation) for a Single Scan . . . . . . . . . . . . . . . . . . . . . . . . .5-28
Clearing a Die Grid (Turn OFF Die Grid Navigation) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-30
Navigating Across the Wafer Using the Die Grid . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-31
Enabling the Dropout Die Option . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-31
Clearing Dropout Dies From the Grid . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-31
Moving to Partial Dies . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-31
Displaying Grid Numbers in the Die Grid Navigation Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-32
To Change the Font and Color of the Grid Numbers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-32
USING BLOB ANALYSIS (CENTER OBJECT SEARCH). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-32
Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-32
Starting Blob Analysis . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-32
Changing the Level of Contrast. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-34
ALIGNING THE SAMPLE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-35
Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-35
Procedure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-35

Chapter 6 View Scan Window

INTRODUCTION. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-1
2D SCREEN FUNCTION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-1
2D Scan Information Field. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-3
Scan Information Field - 2D Sequence Recipe Column . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-4
Video Image . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-5
Real Time Scan Trace Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-6
2D View Scan Screen Tool Bar . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-6
2D View Scan Screen Menu Bar . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-7
3D SCREEN FUNCTION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-10
3D Scan Information Field. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-12
Scan Information Field - 3D Sequence Recipe Column . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-14
3D View Scan Screen Tool Bar . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-15

P/N 0104396-000 AA TOC-3

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 TABLE OF CONTENTS KLA-Tencor P-15 User’s Guide

3D View Scan Screen Menu Bar . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-17

Video Image . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-19
Real Time Scan Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-20
SHOW MEASUREMENT SITE DURING SEQUENCE RUN . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-21
Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-21
Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-21
Wafer Image Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-22
Scan Site Image Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-23
ABORTING A SCAN . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-23

Chapter 7 Sequence Recipe and Data (Optional)

INTRODUCTION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-1
STARTING THE SEQUENCE EDITOR APPLICATION. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-2
SEQUENCE EDITOR WINDOW FEATURES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-3
Sequence Editor Menus . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-3
Sequence Editor Toolbar . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-4
Pre limina ry

Displaying the Sequence Information Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-6

EDITING THE OPTIONS FIELD IN THE SEQUENCE EDITOR . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-7
Semi-Automatic. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-7
Set Deskew Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-8
Teaching the Base Angle. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-12
CREATING A SEQUENCE RECIPE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-13
RUNNING A SEQUENCE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-29
CORRELATION SCANS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-29
Viewing the Correlation Scan Data. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-30
VIEWING SAVED SEQUENCE DATA . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-31
Viewing Old Sequence Data. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-31
Recovering Sequence Data. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-32
Calculating Combined Sequence Statistics (Option) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-32
USING MULTI ANALYSIS IN SEQUENCE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-32
Viewing Multi Analysis Results . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-33
VIEWING SEQUENCE DATA . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-34
Viewing Wafer Summary Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-34
Sequence Summary Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-34
Viewing Sequence Data with the Corresponding Trace, Site-by-Site . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-35
SEQUENCING WITH MANUAL DESKEW. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-36
DESKEWING TWICE TO ALIGN THETA . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-38
SEQUENCING WITH PATTERN RECOGNITION DESKEW
(PATTERN RECOGNITION OPTION ONLY) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-38
USING GROPING WITH PATTERN RECOGNITION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-44
Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-44
Setup Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-44
Groping Analysis (Condensed) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-48
SEQUENCING WITH SITE-BY-SITE PATTERN RECOGNITION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-48
SAVING SEQUENCES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-49
SAVING THE SEQUENCE DATA . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-50
SEQUENCE TRANSPORTABILITY . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-51
Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-51

TOC-4 P/N 0104396-000 AA

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KLA-Tencor P-15 User’s Guide TABLE OF CONTENTS

Sequence Transport Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-52

Wafer Center Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-55
Stage to Wafer Conversion. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-58
HANDLER… BUTTON OPTIONS WINDOW FOR SEQUENCING . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-58
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-63

Chapter 8 Analyzing 2D Scan Data

INTRODUCTION. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-1
STARTING THE 2D ANALYSIS APPLICATION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-1
Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-1
Data Analysis Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-1

Pre liminary
2D Analysis Window Features . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-5
LEVELING THE TRACE AND SETTING UP MEASUREMENTS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-6
Using Cursors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-6
Using the Leveling Cursors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-10
Using the Measurement Cursors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-11
CUSTOMIZING THE GRAPH DISPLAY . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-16
Changing the Z Limits Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-16
Changing the Z Units Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-17
Displaying Data in FFT Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-18
Displaying Data on Logarithmic Scaling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-19
Viewing in Zoom Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-20
Viewing the Trace Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-23
SETTING THE CURSOR POSITIONS USING FEATURE DETECTION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-24
Feature Detection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-24
SETTING THE CUTOFF FILTERS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-34
Setting the Short-Wave Filter Cutoff Values . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-35
Setting the Long-Wavelength Filter Cutoff Values . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-37
2D GLITCH REMOVAL . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-40
Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-40
Procedure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-40
MEASURING THE RADIUS ON CURVED SURFACES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-42
Measuring for Maximum Precision . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-43
Measuring for the Lowest Horizontal Resolution . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-44
Measuring with a 1-σ Repeatability (precision) of 0.002% of the Radius. . . . . . . . . . . . . . . . . . . . . . . . . .8-45
MEASURING STEP HEIGHT ON CURVED SURFACES USING FIT AND LEVEL . . . . . . . . . . . . . . . . . . . . . . . . . . .8-47
SAVING SCAN DATA . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-47
REEVALUATION OF SAVED 2D SCAN DATA . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-48

Chapter 9 Analyzing 3D Scan Data

INTRODUCTION. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9-1
STARTING THE 3D ANALYSIS APPLICATION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9-2
3D ANALYSIS SCREEN FEATURES . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9-3
Analysis Screen – Image Orientation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9-3
Graphics Buttons and Their Function). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9-7
Analysis Menu Bar . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9-18

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LINE-BY-LINE LEVELING . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-33

Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-33
Activating Line Leveling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-33
CUSTOMIZING THE SCAN IMAGE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-40
Setting the Image Proportions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-40
Setting the Shading Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-40
Changing the View Angle . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-41
CUSTOMIZING THE VIEW . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-42
Changing the Image Colors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-42
Changing the Scan Height Colors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-42
Removing Banding with Line Leveling. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-42
USING IMAGE ARITHMETIC TO COMPARE DATA . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-43
SAVING SCAN DATA . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-45
Saving 3D Scan Data. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-45
Creating and Saving 2D Slice Data from a 3D Scan . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-46
....................................................................................... 9-50
Pre limina ry

Chapter 10 System Security

INTRODUCTION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-1
Windows Defined Groups . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-2
Profiler Defined Groups . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-2
MANAGING THE SYSTEM SECURITY . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-4
Opening the User Manager . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-4
User Manager . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-6
Creating a New User. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-6
Changing or Adding Access to a User Group . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-9
Adding a User to a Users Group . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-9
Results of Limited Access. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10-11

Chapter 11 Configuration
INTRODUCTION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-1
OPERATING ENVIRONMENT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-1
FACILITY SPECIFICATIONS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-2
INTRODUCTION TO SYSTEM CONFIGURATION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-2
SETTING THE DATE AND TIME . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-3
CONFIGURATION WINDOW . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-4
STAGE CONFIGURATION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-5
Theta Soft Home Position. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-6
Leveling Offset . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-9
Teach Lowest Elevator Position. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-10
Elevator Focus Speed . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-12
Elevator Slow Focus Speed . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-13
Move Elevator to Safe Position Before Moving Stage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-13
Elevator Safe Position. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-13
Safety Interlock On. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-13
SYSTEM CONFIGURATION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-14

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Editing the System Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-14

Instrument Setup Configuration Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-15
Summary Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-18
Registry Maintenance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-19
Completing the Configuration. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-20
SAFE AREA CONFIGURATION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-21
MACHINE HISTORY RECORDER CONFIGURATION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-23
ENABLE NEW OPTIONS (PROPRIETARY) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-26
EXPORT PATH DEFAULTS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-27
Data Export Paths Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-27
PATTERN RECOGNITION OPTIONS AND DESKEW . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-29
Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-29
Deskew Twice To Align Theta . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-29

Pre liminary
Using Groping with Pattern Recognition . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-30
SEQUENCE EXECUTION OPTIONS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-35
Open Sequence Execution Options Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-35
Enable Sequence ID Prompts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-36
View Scan Display Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-37
Automation Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-37
TEACH MANUAL LOAD POSITION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-38
Teach Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-38
PROXIMITY SENSOR CONFIGURATION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-40
Configuration Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-40
Options. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-41
Proximity Sensor to Hi Mag Camera Offsets. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-42
PASSWORD – MID-SESSION CALIBRATION OR CONFIGURATION ACCESS . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-42
Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-42
Accessing the Maintenance Functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-42
Changing the Maintenance Password. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-43
LOSS OF POWER . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-44
TURNING OFF OR RESETTING THE INSTRUMENT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-44
INSTALLING A PRECISION LOCATOR . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-47
Standard Precision Locators . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-47
Three Point Disk Locator. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-50
Precision Locators - Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-54
OPTIONAL PRECISION LOCATORS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-58

Chapter 12 Calibrations
INTRODUCTION. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12-1
PASSWORD – MID-SESSION CALIBRATION OR CONFIGURATION ACCESS . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12-1
Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12-1
Accessing the Maintenance Functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12-1
Changing the Maintenance Password. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12-2
APPLIED FORCE CALIBRATION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12-3
Windows - Applied Force Calibration Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12-3
Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12-3
Applied Force Calibration Procedure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12-4
VIDEO CALIBRATION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12-5

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Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-5
Video Calibration Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-6
SCAN POSITION OFFSET CALIBRATION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-10
Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-10
150 mm (Standard) Scan Position Offset Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12-11
Scan Position Offset Calibration Validation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-25
STEP HEIGHT CALIBRATION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-28
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-29
Calibration Procedure:. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-29
LEVEL CALIBRATION. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-41
Level Calibration Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-42
Level Calibration Confirmation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-44
WAFER CENTER CALIBRATION. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-47
Calibration Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-47
Stage to Wafer Conversion. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-50
STANDARD CALIBRATION MATRIX . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-51
Pre limina ry

Chapter 13 GEM/SECS Option

INTRODUCTION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-1
ESTABLISHING GEM/SECS COMMUNICATION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-1
Enabling GEM/SECS from the GEM User Interface Screen. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-4
USING THE GEM/SECS APPLICATION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-4
GEM/SECS CONFIGURATION OPTIONS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-5
Communication Configuration Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-6
Control States . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-9
Trace Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-14
GEM STATUS WINDOW . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-16
Current GEM Status Information. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-16
GEM TTY Messages: Sending and Receiving . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-17
Uploading Recipes to the Host. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-19
Downloading Recipes from the Host . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-22

Chapter 14 Wafer Stress Application Option

Chapter Contents . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-1
DATA COLLECTION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-4
Scan Data Identification. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-5
LOADING WAFERS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-5
Load Wafer - Manual Procedure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-6
THE STRESS APPLICATION WINDOW . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-7
Stress Recipe Catalog . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-7
Stress Scan Data File Catalog . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-9
The Stress Screen Tool Bar . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .14-11
SELECTING, CREATING, AND MODIFYING A STRESS RECIPE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-12
Select and Open a Stress Recipe . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-12
Creating a New Stress Recipe . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-13
Modifying a Stress Recipe . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14-15

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SAVING A STRESS RECIPE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .14-20

Saving Recipe Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .14-20
Saving Recipe Parameters as a New Recipe. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .14-20
PRINTING A STRESS RECIPE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .14-22
CREATING STRESS DATA . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .14-22
Taking a Single Pre-Stress Scan. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .14-22
Taking a Single Post-Stress Scan . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .14-26
ANALYZING STRESS SCAN RESULTS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .14-26
Viewing Stress Scan Results . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .14-27
Stress Scan Analysis Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .14-28
Analyzing the Results . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .14-31

Pre liminary
Chapter 15 CMP Analysis Algorithms
INTRODUCTION. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .15-1
ARRAYS. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .15-2
Lines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .15-3
Pads . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .15-5
Setup for Analysis . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .15-6
Analysis Application . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .15-8

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Pre limina ry

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 1
INTRODUCTION Chapter 1

I NSTRUMENT O VERVIEW 1

The KLA-Tencor P-15 Profiler is a highly sensitive surface profiler that measures
step height, roughness, and waviness on sample surfaces. Roughness can be measured
with up to a 0.5 Å resolution over short distances. Waviness can be measured over the
entire surface of a sample (assuming a sample size within the system’s scan limits).
The P-15 system uses stylus-based scanning to achieve high resolution and can
correlate local submicron features with global surface measurements. It has a scan
area of 200 X 200 mm.
The P15 system offers the option between three head configurations, each with a

P rel i mi n a ry
different vertical range: the MicroHead IIsr (standard range), MicroHead IIlf (low
force), and the MicroHead xr (extended range).
Š The MicroHead IIsr (standard range) has a vertical range of 327 µm and is
capable of scanning at forces between 1 mg. and 50 mg.
Š The MicroHead IIlf (low force) has a vertical range between 6.5 µm and
130 µm. It is capable of scanning with a stylus force between 0.05 and 50 mg.
Low force is useful when scanning soft materials such as gold, indium, or
photoresist.
Š The MicroHead IIxr (extended range) extends the vertical range to 1000µm. It
is capable of scanning at forces between 0.5 mg. and 50 mg.
The dual-view optics provide the user with an opportunity to view the sample from
the top down and from the side. The top-down view is for accurate scan positioning.
The side-view optics are used to view the stylus tip as it passes over sample attributes.
The P-15 is an automated surface scanner that can profile a wide range of
topographies, including the following:
Š CMP
Recess measurement
Large-feature dishing
Pattern-dependant erosion
Surface topography characterization
Global planarity
Š Data Storage
Measurement of surface roughness
Slider – pole-tip recession and texture bump characterization

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C APABILITIES AND P ERFORMANCE 1

The Profiler software application runs in the Microsoft Windows environment. It

offers the following capabilities and performance features. (See Table 1.1).

Table 1.1 Capabilities and Performance

Feature Description
Microscopic and Combines macroscopic and microscopic surface analysis,
Macroscopic Feature and measures features as small as 0.25 µm.
Resolution
Correlation Scanning Provides a data reference for comparing the measurements
of multiple microscopic features by re-scanning portions of a
macroscopic long scan on the microscopic scale.
Die Grid Navigation Offers an alternative method to that of positioning the sample
by XY coordinates. Instead, it selects die location for
measuring lithographic patterns in different dies.
Preliminary

Poletip Recession Delivers nanometer-level accuracy in determining the height

Analysis difference between the poletip and the airbearing surface by
using the extremely flat scans of the P-15 systems.
Expandable Data Guarantees that the horizontal resolution is limited by the
Points stylus radius and not by the number of data points, by using a
number of data points per profile. The number of data points
is expandable up to 1 million (maximum).
Advanced Data Measures step height accurately on curved surfaces by being
Acquisition and able to fit and level a scan.
Manipulation Automates data analysis relative to the feature by detecting
the edge or apex of a profile feature.
Measures many roughness and waviness parameters, with
user-selectable cutoff filters to isolate roughness and
waviness.
Calculates statistics for multiple data sets (optional).
Data Recalculation Software versions 6.2 and newer save raw data from the scan
Using different or for reanalysis of the scan. This allows the user to enter the
additional scan original scan recipe and reset some of the scan parameters
parameters and then reanalyze the scan data using those parameters.
Results can be saved in the database.
Database Stores, manages, imports, and exports measurement recipes
Management and scan data using a full-featured database manager.

Network-capable Allows fast data transfers to a host computer, and can be

networked to desktop computers.
In addition, the optional SECS II Interface provides
bi-directional communication between the instrument and a
host computer.

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KLA-Tencor P-15 User’s Guide Introduction - Hardware Features and Options

H ARDWARE F EATURES AND O PTIONS 1

Table 1.2 presents the P-15 system’s hardware features and options.

Table 1.2 Hardware Features

Feature Description
Dual-View Optics All three head configurations offer dual-view optics. This
provides Two distinct views of the scan surface. The first is a
top-down view set of optics with two exchangeable lenses,
115-465x and 185-750x for fast, accurate positioning of the
scan. The second is the side view optic set. The 90-410x
optics provide the user a way to view the in-progress scan as
the stylus moves over surface features.
Motorized Level and Enables automatic mechanical leveling of the sample, and
Rotation programmable sample rotation using a motorized rotary
stage, enabling programmed θ-position repeatability of 4 µm
(0.16 mil) at 4 in. from the center.

Preliminary
Vacuum Sample Secures a sample in the center of the stage.
Hold-down
Computer Includes a 20-GB hard drive, and 256-MB RAM, and 52x
speed CD-ROM.
Also includes an Ethernet network adapter card, and a 3.5-in.
floppy disk drive with 1.44-MB capacity.
Note: Computer specification subject to change.
Monitor Includes a 38.1-cm (15-in.) SVGA video monitor or 15-in. flat
panel monitor that provides a magnified sample video image.
Note: Computer monitor specification subject to change.
Keyboard Includes a keyboard with a full set of standard AT keys, as
well as some instrument-specific control keys.
The keyboard has a trackball for fast cursor movement,
stage, and measurement head motion control, and
convenient menu option selection. The trackball and
keyboard can be used interchangeably for these functions.
Printer Port A parallel printer port is available for local printing.
Network-capable Allows fast data transfers to a host computer, and can be
networked to desktop computers.
In addition, the optional SECS II Interface provides
bi-directional communication between the instrument and a
host computer.

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Table 1.3 P-15 Options

Feature Description
Desktop Program Allows offline analysis and maintenance of scan data. This
frees the profiler for measurement and allows the user to
conveniently conduct data analysis in an office environment.
The Desktop Program can be loaded onto a desktop or laptop
PC running Windows.
Sequence Scanning Automatically executes up to 600 sequential scans per
sample by grouping scans into one sequence recipe file.
Pattern Recognition Provides the system with the capability to perform pattern
Software recognition of surface features used to quickly locate scan
features on samples with multiple identical scan sites.
Enhanced MaxView Creates a photo-like presentation of sample topography. Its
3D™ Imaging advanced manipulation and measurement tools provide the
Preliminary

ability to better delineate and characterize surface features.

MicroHead IIlf Low Force head, described in the Instrument Overview.
Measurement Head
MicroHead IIxr Extended Range head, described in the Instrument Overview.
Measurement Head
Answer! Custom Extends the data analysis capabilities of the system.
Software Macros
Color Camera Replaces the standard black and white camera. Not available
with pattern recognition option. Factory installed only.
Color Printer HP 950Cxi Printer w/cable, or equivalent model.
Stress Measurement Measures and computes the average, maximum and center
stress of surface films in MPa.
GEM/SECS Interface SECS II Interface provides bi-directional communication
between the instrument and a host computer.

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 2
BASIC SKILLS Chapter 2

O VERVIEW 2

Before beginning use of the P-15 system, it is important to become familiar with basic
skills — such as starting and shutting down the system, and operating the system
buttons, keyboard, trackball, Microsoft Windows , Profiler application, and other
components.
This chapter describes:
Š Using the Keyboard on page 2-1
Š Using the Trackball on page 2-3

P rel i mi n a ry
Š Powering Up the Profiler on page 2-4
Š Security Log On on page 2-4
Š Starting the Windows Profiler Application on page 2-5
Š Navigating Between Program Level Screens on page 2-7
Š Exiting the Windows Profiler Application on page 2-8
Š Powering Down the Profiler on page 2-10
Š Performing an Emergency Shutdown on page 2-12
Š Clearing a Diagnostic Message on page 2-12
Š Protecting the Stylus Arm Assembly on page 2-13
Š Potential Stylus Damage During Scans on page 2-13
Š Adjusting the Video Image on page 2-15
Š Using File Name Conventions on page 2-19
Š Saving Video Images on page 2-20
Š Exporting Data Graphs on page 2-21
Š Printing Data on page 2-30

U SING THE K EYBOARD 2

Introduction 2

The keyboard is an input device for communicating with the Profiler. The system
interface and scan processes are viewed on the monitor.

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Except where noted, the keyboard, the trackball, or a combination of both can be used
to perform commands or enter data. (See Figure 2.1).

Figure 2.1 Keyboard

LOAD Print Num Caps Scroll

Esc F1 F2 F3 F4 Z-0 X-Y START STOP LEVEL ZOOM ID Scm Scroll Pause Lock Lock Lock
MENU UNLOAD Lock Break
SysRq

~ ! @ # $ % ^ & * ( ) _ + Insert Home Page Num Ð

1 Backspace / *
` 2 3 4 5 6 7 8 9 0 - = Up Lock

Q W E R T Y U I O P | Delete End Page 7 8 9

Tab Alt-T
[ ] \ Down Pg Up
Vacuum +
Caps A S D F G H J K L : " Enter
4 5 6
Lock _ _ ; '

Z-8 X C V B N M < ? 1 2 3
Shift Shift
, . End Pg Dn
/
Enter
Ctrl Alt Select Alt Ctrl 0 .
Ins Del

Trackball

The keyboard is used to operate the instrument in functions such as entering

parameters to establish the Profiler scan procedure, starting a scan, and transferring
Preliminary

data files (importing and exporting data files).

1. To perform special functions, press the appropriate key(s) or the corresponding
hot key(s). (See Table 2.1)

Table 2.1 Keyboard Functions

Key Hot Key Description
ESC ESC Closes the dialog box. Minimizes the menu, if
a drop-down menu is displayed.
SHIFT-TAB Puts text cursor in the previous field.
TAB Puts text cursor in the next field.
PRINT SCRN CTRL+P Prints data from the current page.
DELETE Deletes any characters in a data field.
ARROW KEYS [↑] For menu items, they select the previous
[↓] item (UP ARROW) or the next item (DOWN
ARROW).
Moves cursor up or down in text fields.

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KLA-Tencor P-15 User’s Guide Basic Skills - Using the Trackball

Table 2.1 Keyboard Functions (Continued)

Key Hot Key Description
ARROW KEYS [←] Moves the measurement and leveling
[→] cursors left or right in the Analysis window.
Selects the previous item (LEFT ARROW) or
the next item (RIGHT ARROW) in a
drop-down menu.
Moves the cursor left or right in text fields.
ENTER Launches currently selected icon.
Selects menu item from drop-down menu.
Completes the entry of any dialog.
Same as clicking OK.
SPACEBAR In the Analysis window, pressing the
SPACEBAR activates first the right, then the
left, then both cursors together (so they can

Preliminary
move in tandem).
Press again to repeat the cycle.
LEFT TRACKBALL See Using the Trackball on page 2-3 in the
BUTTON following section.

RIGHT TRACKBALL See Using the Trackball on page 2-3 in the

BUTTON following section.

U SING THE TRACKBALL 2

Introduction 2

The trackball is a pointing device located on the right side of the keyboard. It consists
of a motion-sensing mechanism (operating off the ball itself) and two buttons (left
and right) situated around the trackball. (See Figure 2.2).

Figure 2.2 Trackball

Roller ball

Left Trackball Right Trackball

button button

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 Basic Skills - Powering Up the Profiler KLA-Tencor P-15 User’s Guide

By using the trackball to move the cursor to contact points on the screen and then
clicking or double-clicking on the contact, commands can be executed. Examples are:
starting software tasks, selecting commands from menus, entering data into the
computer.
1. Use a gentle rolling motion of the trackball to move the cursor across the
monitor screen.
2. Use one of the following actions with the left trackball button, as detailed in
Table 2.2, to accomplish the required function.

Table 2.2 Using the Left Trackball Button

Action Description
Click – To select an item or cancel a Press and release the left trackball
pending operation. button.
Double-click – To start an item. Press and release the left trackball
button twice in rapid succession.
Click and drag – To move an item Press and hold the left trackball button
Preliminary

from one location to another, or to while rolling the trackball.

select an item from a drop-down Release the trackball button when the
menu, or to select a section of text for desired function is complete.
editing, or to move scroll bars.

P OWERING U P THE P ROFILER 2

Introduction 2

When powered up, the system proceeds to start Windows and Profiler applications,
and initializes the Profiler equipment.

Power Up Procedure 2

1. Press the ON/OFF button on the monitor to activate the monitor.

2. Press the ON/OFF button on the Computer.
The Computer starts, Windows is initiated, and the Program Manager is
displayed.

S ECURITY L OG O N 2

Introduction 2

The Windows system running the Profiler is designed to operate with a security log
on procedure that limits access to various system function. This feature allows the
system administrator to control access to system functions based on a log on
password. Each user is assigned a log on word and a password that determines which
functions are available to that user. In this way, the system is protected from users
accidentally changing key parameters or accidentally erasing key data.

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A user with limited access encounters system icons that are grayed out. (See
Figure 2.3). This indicates that the functions represented by the icon are not available
to that user. In other screens and windows, certain function buttons are grayed out.
This means that the affected function is not available at that point in the procedure or
that the user does not have access to that feature. Examples of button procedures with
user access restrictions are some calibrations, data export, data import, and data
manipulation.

Figure 2.3 Catalog Screen With Some Access Denied

When access to a function is

denied due to the users logon

Preliminary
privilege, the icon is grayed out
to indicate restricted access.
If the icons are grayed out,
the function is currently
unavailable. In this example,
Configuration, Data Storage,
and GEM/SECS are not
available to the user.

Log On Procedure 2

A dialog box appears after the system is fully booted up. Use the following procedure
to log on:
1. Press CTRL-ALT-DEL on the keyboard to display the Log on dialog box.
2. The cursor should be blinking in the Log on ID field. Enter the Log On word.
DO NOT CLICK OK.
3. TAB to the Password field.
4. The cursor should be blinking in the Password field. Enter the Password.
5. Press the Enter key or click OK.

S TARTING THE W INDOWS P ROFILER A PPLICATION 2

Introduction 2

The Windows Profiler application is the interface with the P-15 system from which
the scan functions are performed and viewed.

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Profiler Start-Up Procedure 2

1. Use the trackball to locate the Profiler icon with the screen cursor. Double-click
on the Profiler icon to initiate startup of the P-15 system (See Figure 2.4).

Figure 2.4 Program Icons

Step 1 When the boot cycle

is complete and the log on is
complete, double-click on
Preliminary

the Profiler icon to initiate

system start-up.

2. The system goes through its initiation at the end of which the Profiler Catalog
screen appears. (See Figure 2.5)

Figure 2.5 Profiler Catalog Screen

Control Button GEM/SECS status

Program Access
Icons.

“Sample Present”
Status

System Status bar Clear Status button

to clear Status Bar

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This is the starting point for operating the instrument. In this screen, scan and
sequence recipes can be accessed for system operation. This screen is also the
entrance point for the other applications in the system. Each icon along the right
side of the screen opens another application that contains the parameters or
controls for a specific type of task. (See Table 2.3.)

Table 2.3 Profiler Program Access Icons

Icon Description Icon Description
Configuration Database File Manager
Displays the Profiler Configuration Displays the screen that provides
screen. This screen provides access access to files for export/import and
various configuration windows. delete.

Calibration Stress
Displays the Profiler Calibration screen. Displays the Profiler Stress catalog
This screen provides access to system screen. This screen contains access
calibration windows used for accessing to the recipe and data file screens.

Preliminary
various calibration procedures.
Scan GEM/SECS
Displays the Profiler Catalog screen. Displays the GEM/SECS screen.
This screen provides access to the Scan This screen is used to configure the
recipes, Sequence recipes, and data system relationship with its host.
files.

N AVIGATING B ETWEEN P ROGRAM L EVEL S CREENS 2

Introduction 2

The program level Profiler screens all have the program icons along the right border
of the screen. These icons can be used to navigate between the various other program
screens contained in the Profiler software.

Navigation Procedure 2

Use the following procedure to navigate between screens:

Š Click on the icon of the required program screen. (See Figure 2.6.)
This closes the current program screen and accesses the chosen one. This could
generate a message box that inquires if changes to settings, or data are to be
saved or discarded. Choose the required answer and follow any instruction.
Š Functions performed in some screens automatically access other screens.
EXAMPLE:
Performing a scan in the XY View screen generates the scan screen then the
Analysis screen.
The above screens do not contain the program icons. To change or exit, click File
in the Menu Bar and choose Exit from the drop-down menu. In some cases it is
necessary to click the control button at the top left corner of the screen and
choose Close from its drop-down menu. This closes the current screen and
displays the program screen from which the procedure was entered.

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Figure 2.6 Profiler Configuration Screen

To change to a different
program function, click
on the related icon.

E XITING THE W INDOWS P ROFILER A PPLICATION 2

Preliminary

Introduction 2

This procedure is used to close the Profiler and Windows applications.

Profiler Exit Procedure 2

1. Close all screens up to a program screen (program level screens are represented
by one of the program icons at the right side of the screen). (See Figure 2.7.)
2. Click on the control button at the top left of the screen to display the menu. (See
Figure 2.7.)
3. Choose Close from the drop-down menu. (See Figure 2.7.)

Figure 2.7 Closing the Profiler Application Using the Control Button

Step 2 To display its menu,

click its Control Button.

Step 3 Click on Close from

the drop-down menu.

4. A Profiler Container (message box) appears asking, “Are you sure you want to
exit the Profiler?” Click on Yes to exit. (See Figure 2.8.)

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Figure 2.8 Profiler Container for Profiler Shutdown

Step 4 Click on Yes to exit the

Profiler application.

To log off so another user 5. If exiting from the program so that another user can log on, click on the Start
can log on: button at the bottom left of the screen to display its menu. (See Figure 2.9.)

Figure 2.9 Start Menu

Preliminary
Step 6 Click on Shut Down to
display its dialog box.

Step 5 Click on Start to

display its menu.

6. Choose Shut Down from the menu. (See Figure 2.9.)

This displays a dialog box that presents three options. (See Figure 2.10.)
7. Choose, “Close all programs and log on as different user?” by clicking in the
radio button next to the question. (See Figure 2.10.)

Figure 2.10 Shut Down Windows Dialog Box

Step 7 Click on the radio button

next to Close all programs and
log on as a different user?

Step 8 Click on Yes to initiate

the log off procedure and open
the new log on.

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8. Click Yes to log off and set up for another user to log on. (See Figure 2.10.)

P OWERING D OWN THE P ROFILER 2

Introduction 2

This procedure is used to power down the P-15 system.

This procedure is used any time the P-15 system must be completely shut down. (For
example: for maintenance, repair, relocation of the instrument, or when system use is
suspended for an extended period of time.)

Power Down Procedure 2

1. Close all screens up to a program screen (program level screens are represented
by one of the program icons at the right side of the screen). (See Figure 2.11.)
2. Click on the control button at the top left of the screen to display it menu. (See
Figure 2.11.)
Preliminary

3. Choose Close from the drop-down menu. (See Figure 2.11.)

Figure 2.11 Closing the Profiler Application Using the Control Button

Step 2 To display its menu,

click its Control Button.

Step 3 Click on Close from

the drop-down menu.

4. A Profiler Container (message box) appears asking, “Are you sure you want to
exit the Profiler?” Click on Yes to exit. (See Figure 2.12.)

Figure 2.12 Message Box for Profiler Shutdown

Step 4 Click on Yes to exit the

Profiler application.

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To Log Off and Shut Down 5. If exiting from the program so that another user can log on, click on the Start
the System button at the bottom left of the screen to display its menu. (See Figure 2.13.)

Figure 2.13 Start Menu

Preliminary
Step 6 Click on Shut Down to
display its dialog box.

Step 5 Click on Start

to display its menu.

6. Choose Shut Down from the menu. (See Figure 2.13.)

This displays a dialog box that presents three options. (See Figure 2.14.)

Figure 2.14 Shut Down Windows Dialog Box

Step 7 To shut down the

computer, click in the radio
button next to Shut down the
computer?

Step 8 Click Yes to initiate the

shut down procedure for the
computer.

7. Choose, “Shut down the computer?” (See Figure 2.14.)

8. After the computer has closed all applications and written information to the
system drive, it displays a message box that says, “It is now safe to shut down
your computer.”
This message box has a button at the bottom of it that says “Reboot?”
9. If rebooting the system (without powering down the system) click on Reboot?

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CAUTION: When the instrument is powered up or reset, the stage

moves the Z axis all the way up, then X and Y to the 0,0 position.

10. If powering down the Profiler:

a. Press the On/OFF button on the Profiler computer.
b. Press the ON/OFF button on the monitor to turn off the monitor.

P ERFORMING AN E MERGENCY S HUTDOWN 2

The P-15 Profiler is powered up and shut down from the computer On/Off switch. In
case of an emergency, turn off the computer and this shuts down the entire system.

C LEARING A D IAGNOSTIC M ESSAGE 2

Preliminary

Introduction 2

Diagnostic messages appear in the status bar at the bottom of the window when an
action or circumstances create the potential for instrument malfunction, such as
occurs with a motion error. The system status bar also presents messages that guide
the user through many of the system procedures. When a diagnostic message appears,
the status bar at the bottom of the screen becomes red and the status bar must be
cleared before it can display any new messages.

Clearing a Diagnostic Message Procedure 2

After reading the message in the status bar at the bottom left of the screen, click the
Clear Status button on bottom right of the status bar to proceed. See Figure 2.12.

Figure 2.15 Clearing the Status Diagnostic Messages

System Status message. Clear Status button to

clear Status Bar

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KLA-Tencor P-15 User’s Guide Basic Skills - Protecting the Stylus Arm Assembly

P ROTECTING THE STYLUS A RM A SSEMBLY 2

System Provisions for Stylus Protection 2

The P-15 profiler incorporate several design features that protect the stylus from
damage. (See Table 2.4.)

Table 2.4 Stylus Arm Assembly Protection

Protection Name Stylus Arm Protective Measure Description of Result
Data Point Saturation During an ascending scan, the scan is The stylus automatically retracts and the scan
terminated when the stylus reaches its is terminated. In the Scan window, the trace
upper limit of travel (when it has pivoted ascends and flat lines at the top of its range.
up as high as it can go)
Lowest Elevator As a safety factor, the elevator can be With the Lowest Elevator Position properly set,
Position programmed to lower only to a preset when the measurement head is lowered, it only
limit. goes as far as the setting allows, thus

Preliminary
protecting the stylus and sample from damage.
This setting is also used to trigger the head
descent slow down point which occurs
1000 µm (set in the system registry) above the
Lowest Elevator Position.
Proximity Sensor The Proximity Sensor is designed to With the Proximity Sensor ON, the head slows
detect the sample as the head lowers and and stops as it nears the sample surface.
slow the descent. If the Proximity Sensor is turned OFF, then the
head descent slows when it reaches 1000 µm
above the Lowest Elevator Position. The
system then depends on the stylus contact
with the sample surface to stop the head
descent. If the stylus is coming down in a hole
or off the edge of the sample, the system or the
sample could be damaged by contact with the
sensor assembly.

Potential Stylus Damage During Scans 2

Despite precautionary features, there are still circumstances where damage can occur.
Š Damage occurs whenever the stylus is down and a vertical wall that is fixed to
the stage moves against the stylus shaft.
Š The stylus can be damaged whenever it encounters an obstacle higher than the
bevel height of the stylus tip (higher than 440 µm (17 mils) for the MicroHead
L-style stylus. (See Figure 2.16.)

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Š The stylus can be damaged by a shorter object if it has sharp corners or burrs
that bite into the stylus tip.

Figure 2.16 Contact Scan Stylus Tip

Scan Direction

Damage can
occur with steps
higher than the
Bevel Height bevel height.
Bevel Height is
440 µm (17 mil) for
MicroHead L-styli
Preliminary

Š If the stylus is lowered or a scan is started when the sample is not directly under
the stylus, damage to the stylus could occur.
This is most likely to happen when lowering the measurement head such that the
stylus drops into the center hole of a hard disk or misses the edge of the sample.
Then when the stage is moved, the stylus is damaged.

CAUTION: Do not move the stage unless the stylus is well above the
sample surface.

CAUTION: Do not start a scan unless the stylus is directly over the
sample or damage to the stylus or head could occur.

Š If a sample or precision locator is changed without resetting the Lowest

Elevator Position, the head can lower onto the locator if the stylus misses the
locator surface.
Š Damage could occur when MAN LOAD is clicked, causing the sample or locator
to hit the stylus. The measurement head must be at least 6.4 mm (0.25 in.) above
the top of the precision locator.

NOTE: The stylus tip is located about 4 mm (165 mils) below the
measurement head.

CAUTION: If changing the sample or precision locator to a different

height, reset the Lowest Elevator Position. Otherwise, damage to the
stylus or the measurement head can occur.

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When designing custom jigs or fixtures, consider the precautions noted in this section.
For instance, when designing a custom hard disk locator, its center section must be
flush with the top of the disk surface. Care must be exercised when nulling where
there is a hole in a jig, a vacuum hole, or a groove in a surface.
For hard disks only, when measuring the disk, avoid nulling in the Disk Locator hole.

NOTE: The KLA-Tencor Warranty Policy does not cover damage to

the stylus arm assembly or the pivot caused by operator error or
carelessness.

A DJUSTING THE VIDEO I MAGE 2

Introduction 2

The Video Controls allow the view of a particular sample surface to be optimized.

Preliminary
The brightness and contrast can be varied for the camera.

NOTE: Changing the focus can invalidate sequences that use pattern
recognition because the sample image is less likely to match the
stored image in the pattern recognition files.

The purpose of adjusting the video image is to clarify the image resolution and
contrast so it can be clearly viewed.

Video Image Adjustment Procedure 2

1. Open the Scan Recipe window. (Click on the Scan Recipe button in the Catalog
screen. See Figure 2.17.)
2. Once the Scan Recipe window is active, with a recipe highlighted, click the XY
View button to display the XY View screen. (See Figure 2.17.)

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Figure 2.17 Scan Recipe Window in the Catalog Screen

Step 2 With a Scan Recipe

highlighted, click on the XY icon
to display the XY View screen.

Step 1 When the screen opens,

click on the Scan Recipe button
to display the Scan Recipe list in
the Information Display window.

List window
Preliminary

Figure 2.18 XY View Screen

Menu Bar

Tool Bar

Step 3 Click on MAN

LOAD to move the stage
to the door.

Video Display Window

Sample Navigation
Window

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3. Click on MAN LOAD (see Figure 2.18) in the Tool Bar to move the stage to the
door. (See Figure 2.18.)
The head rises to a taught height and the stage moves to the door (or the taught
manual load position).
4. Open the door.

CAUTION: Do not open the door until the stage has completely
stopped moving. All motors stop immediately when the door is opened.
(Unless the interlock is disabled.)

5. Place the sample on the stage in the proper orientation.

6. Turn on the vacuum switch located on the left inside edge of the door.
The sample should now be securely in place on the stage.
7. Close the door.
8. Click on MAN LOAD to move the stage back under the system head.

Preliminary
9. Click the FOCUS button to null the stylus on the sample surface and focus at the
chosen magnification. (See Figure 2.18.)
10. Click View in the Menu Bar to display its menu. (See Figure 2.19.)
11. Select Video Controls. (See Figure 2.19.)

Figure 2.19 XY View Screen – View Menu

Step 10 Choose View from the

Menu bar.

Step 11 Choose Video

Controls… to display its dialog
box.

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The Video Controls dialog box appears. (See Figure 2.20.)

Figure 2.20 Video Control Dialog Box

Step 12 Use the slide Step 13 When desired

bar or directly enter results are achieved,
the value required. click on Apply.

Step 14 Click on Exit.

12. Adjust contrast and brightness controls:

a. Click and drag the slide bars for contrast and lamp brightness to achieve
desired effect.
b. If desired, type in the required values instead of dragging the slide bars.
c. Repeat if needed until desired results are obtained.
13. When values for Contrast and Lamp Brightness are set, click Apply.
Preliminary

14. When the adjustments are complete, click Exit

The settings are stored.

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KLA-Tencor P-15 User’s Guide Basic Skills - Using File Name Conventions

U SING F ILE N AME C ONVENTIONS 2

Introduction 2

Scan and sequence recipes and data can be saved, as well as graphs and video images.
In the Windows naming convention only the following special characters are allowed:

Table 2.5 Special Characters Allowed for Naming Purposes

Š _ underscore Š - hyphen Š { left brace
Š ! exclamation point Š & ampersand Š } right brace
Š % percent sign Š ( left parenthesis Š ‘ single quotation mark
Š # number sign Š ) right parenthesis Š ' apostrophe
Š $ dollar sign Š Š

Preliminary
Naming and Saving Files 2

1. When saving a file, click File to display its menu. Click the Save… button. A
dialog box appears. The content and appearance differ slightly depending on
what is being saved and the screen from which Save… was chosen. The one in
Figure 2.21 is for saving sequence data.

Figure 2.21 Save Data Set Dialog Box

Step 2 Ensure that the

recipe is being stored in the
appropriate folder.
Step 5 when the data
Step 3 Enter the data set name has been entered
name in the File Name click Save to save it in
field. the chosen folder.

Step 4 When saving sequence

data, choose either Statistics
or Trace to save the related
data in the named file.

2. Choose the appropriate folder in which to store the item being saved. (See
Figure 2.21.)
3. Create a distinct file name for the item being saved. It is best to make the name
representative of the content of the file if possible. The name can be up to 72
characters in length and should not contain empty spaces. Enter the file name in
the file name field. (See Figure 2.21.)
4. Set any other necessary options required to properly store the information in the
file. In Figure 2.21 that would include setting the content format of the file to
either Statistics or Trace, options only for sequence data. (See Figure 2.21.)
5. Click Save to save the data in the named file. (See Figure 2.21.)

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S AVING VIDEO I MAGES 2

Introduction 2

A video image can be captured in the XY View window and saved to a file. Many
standard image output file formats are supported.

Naming and Saving Video Images Procedure 2

1. Go to either the XY View or Theta View window, and click the View menu, then
select Save Image to File to display the Save Image As dialog box. (See
Figure 2.22).

Figure 2.22 Save Image As Dialog Box

Step 2 Choose a file to save Step 2 New

the image in. Click on the menu- folder. After
Preliminary

arrow, scroll until the directory or choosing a

folder is found and click on it. directory for the
file, click on this
icon and enter a
Step 3 Name the file that the
name for the new
image is to be saved as.
folder.
Step 4 Choose a format to store
the image as. Click on the menu
arrow, scroll until the format
appears, click on the format.

2. Choose the location in which the image is to be saved. To view the possible
files, click on the menu-arrow next to Save in and click on the desired folder.
To create another folder within a directory, click on the new folder icon and
enter a name for the new folder.
3. Next to File name, enter a name for the image file that is to be created.
4. Set the format that the image is to be saved in:
a. Click on the menu-arrow next to Save as type:
b. Scroll until the desired format is visible.
c. Click on the desired format.
5. Click Save to save the video image.
6. To view the video image, import the file into an application.

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E XPORTING D ATA G RAPHS 2

Introduction 2

Data graphs are contained in the Scan Data catalog, Sequence Data catalog and in the
Analysis screen when the scan data is being analyzed. 2D and 3D graphs can be
exported directly from the Analysis screen during scan data analysis. 2D and 3D
graphs from the Scan Data catalog can be exported in two ways: from the Analysis
screen, and from the Database File Manager.
2D and 3D data graphs from the Sequence Data catalog can be exported only from the
analysis screen because the file must be opened and the desired graph chosen and
displayed before it can be exported.
The data graph is exported as a graphic image in one of the following file formats:

Bitmap format (*.bmp) Encapsulated Post Script (*.eps)

Preliminary
TIFF format (*.tif) JPEG format (*.jpg)
Word Metafile format (*.wmf) GIF format (*.gif) (not supported)

Figure 2.23 Export File Formats in Drop-Down Menu

Exporting Data Graphs from the Analysis Screen 2

Opening the Export Graph 1. With the graph to be exported displayed in the Analysis screen, click File to
Dialog Box from the display its menu. (See Figure 2.24.)
Analysis Screen.

Figure 2.24 Analysis Screen – File Menu

Step 1 Click on File to display

its menu.

Step 2 Select Export Graph

from the File menu.

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2. Select Export Graph… (See Figure 2.24.)

This displays the dialog box for graphic exports. (See Figure 2.25.)

Figure 2.25 Export Graph Dialog Box

This field contains any file

tree that is directly under If a graph is saved, it is
the folder in the Save In placed in the folder that is
field above it. displayed in the Save In
field.

Step 3 Enter the file

Step 4 When the file has
name in the File name
been named, click on Save
field.
to save the newly named
file in the folder displayed in
Preliminary

the Save In field.

3. Set the required variables in the Save As dialog box. See Table 2.6 for an
explanation of the variables to be set.

Table 2.6 Graphics Export Dialog Features

Variable Description
Save In: This drop-down menu provides a browse feature from
which to search for the folder that the graphic is to be
exported to or the application that is to analyze it. The
location must be and displayed in the Save In: field.
Save In: file tree field Select the Directory path.
File Name Type the File Name, up to 68 -characters in length.
Save as Type From the drop-down menu, select the graphic format:
(BMP, TIFF, WMF, EPS, or JPEG).
Export Size (not The size options for the graph to be exported is not available
visible from the in the Analysis screen because the operator can adjust the
Analysis screen) size of the image on the screen to the desired export size.

4. After all the information is entered, click Save to export the graph.

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Exporting Graphs from the Scan Data Catalog 2

Exporting the Graph without Checking it in Analysis 2

Exporting Graph from the 1. Go to any top level screen containing the system icons and click on the Database
Database File Manager File Manager icon. (See Figure 2.26)

Figure 2.26 Catalog Screen – Database File Manager Icon

Step 1 Click on the

Database File Manager
icon to open it screen.

Preliminary
2. In the Database Catalog screen, choose either the 2D or 3D button in the tool bar.
Depending on the Catalog group chosen, this displays the 2D or 3D data or
recipe sets. (See Figure 2.27.)

Figure 2.27 Data Catalog Screen for Export of Data or Recipes

Step 2 Click on 3D to display 3D data or recipes.

3. Choose Scan Data from the Catalog buttons at the left of the screen.
4. Navigate to the folder containing the required graph.
To Open the Export Dialog 5. If the file name is known and there is no need to see the graph, click on the file
Box from the Database name of the graph, and click on Export Graph… at the bottom of the screen.
Screen

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This opens the export dialog box titled Save As. (See Figure 2.28).

Figure 2.28 Graphics Export Dialog Box

Preliminary

6. Complete the information in the dialog box. See Table 2.7 for more information.

Table 2.7 Graphics Export Dialog Features

Feature Description
Save In: This drop-down menu provides a browse feature from
which to search for the folder that the graphic is to be
exported to, the application that is to analyze it, or the
printer it is to be printed by. The location must be and
displayed in the Save In: field.
Save In: file tree field Select the Directory path.
File Name Type the File Name, up to 68-characters in length.
Save as Type Select the graphic format: (BMP, TIFF, WMF, EPS, or
JPEG).
Export Size Two options: Original Format and Resample
Original Format – To export in the original format and
size, click Original Format.
Resample – To export in another size format, click
Resample and use one of the following:
Š Enter the scale sizes in pixels to change the
sample size. (Note that if the numbers do not
maintain the aspect ratio of the original sample,
the graph is distorted.) OR
Š To keep the same scale, enter the first size setting
then click the Maintain Aspect Ratio checkbox.
The system fills in the second number to keep the
aspect ratio correct.

7. After all the information has been entered, click Save to complete the export.

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Exporting the Graph After Checking it in Analysis 2

To Open the Export Dialog 1. When the operator needs to see the scan graph before exporting it, after entering
Box from the Analysis the Scan Data folder containing the scan file, double-click on the file. This
Screen opens the Analysis screen with the graph displayed.
2. If the correct graph is displayed, resize or reorient it as required before export.

Figure 2.29 Scan Data Graph in the Analysis Screen

Step 3 Choose Export

Graph… from the File
drop-down menu.

Preliminary
Step 2 The size and
orientation in the display
determines what the
exported graph looks like.

3. Choose Export Graph… from the File menu (see Figure 2.29) to open the Save
As (export) dialog box.
4. Fill in the required information. (See field explanations in Table 2.8.)

Table 2.8 Graphics Export Dialog Features

Variable Description
Save In: This drop-down menu provides a browse feature from
which to search for the folder that the graphic is to be
exported to or the application that is to analyze it. The
location must be and displayed in the Save In: field.
Save In: file tree field Select the Directory path.
File Name Type the File Name, up to 72-characters in length.
Save as Type From the drop-down menu, select the graphic format:
(BMP, TIFF, WMF, EPS, or JPEG).
Export Size (not The size options offered in the Database screen for resizing
visible from the the graph to be exported is not available in the Analysis
Analysis screen) screen. In Analysis the operator can adjust the size and
orientation of the image on the screen before it is exported.

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5. After all the information has been entered, click Save to complete the export.

Exporting Graphs from the Sequence Data Catalog 2

The sequence file graphs cannot be directly viewed through the Sequence Data
screen. The operator must open the data file in the Analysis screen and choose a
specific scan graph to be exported.
1. From the Database screen, click the Sequence Data button to open the Sequence
Data window in the Database screen.
2. Navigate to the folder containing the sequence data set that has the graph(s) to
be exported.
3. To export a graph from a Sequence Data set, double-click on that sequence data
set (see Figure 2.30) to open the Analysis screen with it displayed.
The Analysis screen opens with the first scan from the first slot displayed in the
Analysis window. To find the required scan graph it might be necessary to open
the Surface Parameters Data (statistics) window.
Preliminary

Figure 2.30 Choosing a Sequence Data Set

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4. If the Surface Parameter Data window is not open in the Analysis screen, click
STATS to open it. (See Figure 2.31.) The Surface Parameters Data window can
also be accessed by choosing Surface Summary… from the View menu.

Figure 2.31 Opening the Statistics Window to View Scan List

Step 4 Click on STATS to

open the Scan Parameters
(Statistics) Window for
viewing the list of scans in the
sequence.

5. In the Surface Parameters Summary window, choose the required Slot and Site
to display the scan that is to be exported. (See Figure 2.32.) The graph is
displayed in the Analysis window.

Preliminary
Figure 2.32 Surface Parameters Summary Window

Step 5 Choose the Site to

display the scan that is to be
exported.

6. Resize or reorient the graph if necessary before being exported.

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7. Choose Export Graph… from the File menu. This displays the Save As (export)
dialog box. (See Figure 2.33.)

Figure 2.33 Save As (Export) Dialog Box

Preliminary

8. Set the options for the Graphics Export features. See Table 2.9 for an explanation
of the variables to be set.

Table 2.9 Graphics Export Dialog Features

Variable Description
Save In: This drop-down menu provides a browse feature from
which to search for the folder that the graphic is to be
exported to or the application that is to analyze it. The
location must be and displayed in the Save In: field.
Save In: file tree field Select the Directory path.
File Name Type the File Name, up to 68-characters in length.
Save as Type From the drop-down menu, select the graphic format:
(BMP, TIFF, WMF, EPS, or JPEG).
Export Size (not The size options offered in the Database screen for resizing
visible from the the graph to be exported is not available in the Analysis
Analysis screen) screen. In Analysis the operator can adjust the size and
orientation of the image on the screen before it is exported.

9. Click Save to export the graph.

E XPORTING D ATA FROM THE D ATABASE F ILE M ANAGER 2

Export of data files from the Database File Manager is performed the same way for
both Scan Data and Sequence Data sets.
1. From the Database File Manager choose either 2D or 3D files.

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2. Choose either the Scan Data or Sequence Data catalog button. This displays the
related 2D or 3D data files in the chosen catalog.

Figure 2.34 Data Catalog Screen for Export of Data or Recipes

Step 1 Click on 2D or 3D to display related files.

The File menu also has
menu items for Import
and Export dialog box
activation.

Two sets of buttons

produce the Import and
Export dialog boxes.

Preliminary
3. Navigate to the required data set and click on it to highlight it.
There are three ways to access the Export Sequence (or Scan) Data -- Select
Export Directory dialog box.

Š The Export… button at the bottom of the screen

Š The Export Data icon in the tool bar at the top of the screen
Š The Export… menu item in the File menu
4. Select Export… from one of its access points.
This displays the Export Sequence (or Scan) Data -- Select Export Directory
dialog box. (See Figure 2.35.)

Figure 2.35 Export Data Dialog Box

Step 5 From the drop-down file

manager, choose the directory
and file in which the data is to be
stored.

Step 6 Choose an export

format.

The destination path and

directory is displayed here.

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5. From the Export to: drop-down menu, choose the directory/folder that the data is
to be exported to. The actual path and folder name are displayed at the bottom
left of the dialog box. (See Figure 2.35.)
6. Choose an export format, either ASCI or Binary. (See Figure 2.35.)
7. Click OK to export the data to the destination folder.

P RINTING D ATA 2

Introduction 2

When the scan is completed, the raw data is processed and displayed in the Analysis
screen. (See Figure 2.36.) The Trace Information area, to the left of the trace, lists a
summary of the trace data. Choosing Surface Summary from the File menu opens
another window displaying calculated scan parameters, that can be pre-selected in the
scan recipe.

Figure 2.36 Analysis Screen

Preliminary

Click the Print icon to Trace Window

display its dialog box.

Trace Information area

Surface Parameter
Summary Window

On the left side of the trace image is the Trace Information area.
Š The Height text field displays the vertical distance between the trace
intersections of the left and right measurement cursors.
Š The Width text field displays the horizontal distance between the midpoints of
the areas defined by the two cursors.
Š Each cursor position and the stage position is displayed.

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Print Procedure 2

1. Go to the Analysis window, and click the Print icon to display the Print dialog
box. (See Figure 2.37.)

Figure 2.37 Print Dialog Box

Preliminary
2. Set the options for the PRINT features. (See Table 2.10).

Table 2.10 Print Dialog Box Features

Feature Description
Print Range Select the Print Range of pages
(All, Selection, Pages From _ To _).
Properties Select the Print Quality of text
(Low, Medium, High).
Copies Type the Copies number — to sort multiple copies,
check the Collate Copies checkbox.

3. Click OK to print the data.

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Preliminary

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 3
SCAN RECIPES Chapter 3

I NTRODUCTION 3

The P-15 system performs scans of sample surfaces using recipes that set the
parameters of each scan. Each recipe can be used alone or, if the system is capable of
sequencing, in conjunction with other recipes in a sequence to gather necessary data
from a given sample. Even some system calibrations use recipes to perform vital data
gathering and analysis so the system can be calibrated for optimum performance.
The P-15 system is capable of high resolution scans in two or three dimensional
formats. Both formats use trace data. The three dimensional scan uses a combination
of parallel traces. The length of the traces, the distance between parallel traces, and

P rel i mi n a ry
the frequency of data point collection are all defined in the recipe. The two
dimensional trace is a collection of data points made at a recipe specified frequency
either as one trace, or a recipe specified number of traces over the same scan position,
which are then averaged. The data is then presented in either a two or three
dimensional graphical format for observation and analysis. Data storage and analysis
are detailed in Saving Scan Data on page 8-47 and Saving Scan Data on page 9-45.
This chapter describes:
Š Accessing the Scan Recipe Catalog Screen on page 3-2
Š Scan Recipe Catalog Screen Components on page 3-3
Š List Window on page 3-10
Š Creating and Editing a Scan Recipe on page 3-13
Š System Status Message on page 3-13
Š Recipe Editor for 2D and 3D Scans on page 3-15
Š Scan Parameter Definition Window on page 3-16
Š Feature Detection (Only for 2D Scans) on page 3-43
Š Filters and Cursors (Only for 2D Scans) on page 3-50
Š General Parameters on page 3-65
Š Roughness and Waviness Parameters on page 3-70
Š Bearing Ratio and Cutting Depth on page 3-79
Š High Spot Count and Peak Count on page 3-84
Š 3D Cursors Parameters on page 3-88
Š Setup Analysis Tools on page 3-95
Š Diagnostic Options on page 3-105
Š Saving Scan Recipes on page 3-109
Š Entering Comments on page 3-113

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A CCESSING THE S CAN R ECIPE C ATALOG S CREEN 3

The Catalog screen is the first screen to appear when the profiler application is
opened. The functional areas in the screen are described in Figure 3.1 and Figure 3.2.

Figure 3.1 Catalog Sequence Recipe Screen

The Control Button The menu bar contains The tool bar contains commonly
contains the menu item drop-down menus for used commands in icon format.
to close the screen. various functions.
Scan Recipe is
chosen as indicated
by its depressed
button. The Scan
Recipe list is displayed
in the Information
Display window.
Preliminary

These buttons
determine which set
of files are active in
the Information
Display window. The
active button appears
depressed.

List window.

These Command buttons present recipe

interaction functions in a button format.

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Figure 3.2 Catalog Sequence Recipe Screen

When a recipe is chosen,

its name appears in this
box.
The current path to the set
of files displayed in the List
window is shown here.

Preliminary
The System Status
Message area.

The List window contains the list of currently available recipes for
whichever scan type and dimension is indicated

If the Scan Recipe button is not chosen, click on it. After the Scan Recipe button
is clicked, the List window changes to the Scan Recipe list. The Scan Recipe
screen is divided into functional components. Each is discussed in the following
section, Scan Recipe Catalog Screen Components on page 3-3.

S CAN R ECIPE C ATALOG S CREEN C OMPONENTS 3

Screen Tools 3

The Catalog Screen Tools section is divided into three parts: Title Bar, Menu Bar, and
the Tool Bar. An additional tool bar is located below the List window and is discussed
in List Window on page 3-10.

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Title Bar 3

The Title Bar contains the Control menu button, the Screen Title Bar, and the
Close/Minimize icons or (See Figure 3.3) or the GEM Status for systems equipped
with the GEM/SECS option.

Figure 3.3 Title Bar for Catalog Screen

Control Menu Button Screen Title Area Close Button is visible.

If the GEM/SECS option is being used, this status line

displays the current communication status with the system
host. Double-click on this field to open the GEM/SECS dialog
box. This is not visible if the option is not activated.
Preliminary

Š Control Button: This button is in the form of an icon that represents the
currently displayed screen. (See Figure 3.3.) It is always in the same place but
looks different depending on the screen currently displayed. Click on it to
display its menu. (See Figure 3.4.)

Figure 3.4 Control Button Menu

The Control button menu contains the following options:

Table 3.1 Control Button Menu

Menu Option Description When Active/Inactive
Restore N/A Disabled to prevent interference
with other screen operations.
Move N/A Disabled to prevent interference
with other screen operations.
Size N/A Disabled to prevent interference
with other screen operations.
Minimize N/A Disabled to prevent interference
with other screen operations.
Maximize N/A Disabled to prevent interference
with other screen operations.
Close Closes the current screen Active in all screens.
(window).

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Š Screen Title Area: This identifies the current active screen. (See Figure 3.3.) It
is not interactive.
Š Close: This button is used to close the application. It is part of the Windows
formatting. Do not use this button. Instead; use the Menu Bar or Control
Button functions. If the GEM Status is displayed, the Close Icon might be
covered. (See Figure 3.3.)
Š GEM/SECS Status Display (for systems with the GEM option): This area
displays the current GEM status. To view the GEM Status dialog box
double-click on the GEM Status Display. (See Figure 3.3.) Settings in the
dialog box should only be changed by those with a thorough knowledge of
GEM/SECS functions in the system.

CAUTION: Only system engineers familiar with the GEM operation

should change any settings in the GEM Status dialog box. Changing
these settings could disrupt processing.

The following table presents the possible GEM Status messages and the significance

Preliminary
of each message.

Table 3.2 GEM Status Display

GEM STATUS Description
Online/Local Online -The P-15 system is in the operating mode.
Local - In this state, the P-15 system is controlling its own
activity.
Online/Remote Online -This P-15 system is in the operating mode.
Remote - In this state, control of the P-15 system comes
from the host.
GEM Offline This means that the GEM communication link is
suspended.
GEM Disabled This means that the communication link is temporarily
disabled for a user defined purpose.

Menu Bar 3

The Menu Bars (See Figure 3.2) have various drop-down menus for operating some
of the system options available with the current screen. Each screen has its own menu
bar with its own options and variables. Some of the options in the Menu Bar are also
represented by icons in the Tool Bar and the Command buttons. The following
tables present the content of each drop-down menu in the Menu Bar for the Scan
Recipe Catalog screen.

NOTE: ne or more of the menu options in a given drop-down menu

might be grayed out. This can be due to the permission status of the
operator currently logged onto the system, it being an option that is not
currently available because it requires other system options to be
enabled before use, or the option’s unavailability at this stage in the
procedure.

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Figure 3.5 Menu Bar for Scan Recipe Screen

The Menu Bar for the Catalog screen contains seven active menus. Help is currently
unavailable. Each menu is discussed in its own table. The Menu Bar menus are
contained in Table 3.3 through Table 3.8.

Table 3.3 File Menu Options Description

File Menu Description Function Access
START Starts the currently highlighted scan procedure. Everyone has access.
The screen changes to the scan screen. In the screen
depicted in Figure 3.2, it would start the _STEPHTH
recipe scan.
Preliminary

Center Object Displays the center object in the XY View Everyone has access.
Window.
Teach Die Grid Opens the Teach Die Grid procedure in Access Restricted: Permission
the XY View Screen. Required
XY view Brings up the XY View screen, which is the Everyone has access
typical scan screen.
Print Brings up the Print Manager for printing recipes. Everyone has access
Exit Exits the Scan screen. This sometimes prompts the Everyone has access
display of dialog box asking if the current changes are to
be saved.

Table 3.4 Edit Menu Options Description

Edit Menu Description Function Access
New This opens the Recipe Editor screen with Access Restricted: Permission Required
an untitled recipe that is using the format of the
highlighted recipe in the catalog screen. The
recipe title is “UNTITLED” until the new recipe
parameters are set and it is saved with a new
name.
View/Modify This opens the Recipe Editor Access Restricted: Permission Required
screen displaying the parameters of the recipe
that is highlighted on the Scan Recipe screen.
2D This displays the 2D list of Scan Recipes in Everyone has access.
the Catalog display area. (See Figure 3.2.)
3D This displays the 3D list of Scan Recipes in Everyone has access.
the Catalog display area. (See Figure 3.2.)

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Table 3.5 Sample Menu Options Description

Sample Menu Description Function Access
Manual Load This moves the sample stage to Everyone has access.
the Stage Door of the system (the manual load
door) so a sample can be manually loaded
onto the stage.
Load/Unload Not functional in systems without N/A
a handler.
Initialize Handler Not functional in systems N/A
without a handler.
SMIF Load/Unload Not functional in systems N/A
without a handler.
Initialize SMIF Not functional in systems without N/A

Preliminary
a handler.
Release Cassette Not functional in systems N/A
without a handler.

Table 3.6 Vacuum Menu Options Description

Vacuum Menu Description Function Access
Off This button is inactive in the P-15 N/A
because the Vacuum switch is manual.
On This button is inactive in the P-15 N/A
because the Vacuum switch is manual.

Table 3.7 Host Menu Options Description (Only available with GEM/SECS Option)
Host Menu Description Function Access
Go Offline This takes the P-15 system offline. Access Restricted: Permission Required
This is used to prevent the system from
responding to a host during a user defined
operation.
Attempt Online This attempts contact with the Access Restricted: Permission Required
host to open the system communication link.
The system then operates according to its
predetermined GEM parameters.
Local This is an Online state where there is Access Restricted: Permission Required
communication with the Host but in which the
P-15 system controls the system’s operation.
Remote This is an Online state where there is Access Restricted: Permission Required
communication with the Host and in which the
host controls the P-15 system operation.

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Table 3.8 Diagnostics Menu Options Description

Diagnostics Menu Description Function Access
Synthesize Data Access Restricted: Permission Required

Table 3.9 Task Menu Options Description

Diagnostics Menu Description Function Access
Synthesize Data Access Restricted: Permission Required
Preliminary

Tool Bar 3

The Tool Bar has eight icons that work as short cuts to functions.

Figure 3.6 Tool Bar Icons

The function of each icon is described in Table 3.10.

Table 3.10 Tool Bar for the Scan Recipe Catalog Screen
Tool Bar Icon Description Function Access
Prints the currently highlighted recipe. Everyone has access.

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Table 3.10 Tool Bar for the Scan Recipe Catalog Screen
Tool Bar Icon Description Function Access
Starts a scan using the highlighted recipe in the List Everyone has access.
window.

Switches to XY View screen with the current recipe active, Everyone has access.
ready for a scan to be run.

Switches to the XY View screen with the stage rotation Everyone has access.
(theta) buttons active.

Displays the following in the List window: Everyone has access.

Š 2D Scan Recipes, when in the Scan Recipe Catalog
screen;
Š 2D Sequence Recipes, when in the Sequence Recipe

Preliminary
Catalog screen

Displays the following in the List window: Everyone has access.

Š 3D Scan Recipes, when in the Catalog Scan Recipe
screen;
Š 3D Sequence Recipes, when in the Catalog Sequence
Recipe screen.

Catalog Screen Access Buttons 3

The Catalog screen presents access to four sets of information. The Scan Recipe and
the Sequence Recipe screen, provide access to the currently defined recipes available
for execution in the P-15 system. Two data screens provide access to saved Sequence
and Scan data file information.

Table 3.11 Catalog Screen Access Buttons

Tool Bar Icon Description Function Access
This button displays the list of currently available Everyone has access.
Scan Recipe folders, which when chosen,
display their recipes in the Catalog screen’s List
window. (See Figure 3.2.)
This button displays the list of currently available Access Restricted: Permission Required
Scan Data folders, which when chosen, display
their data set in the Catalog screen’s List
window. (See Figure 3.2.)
Optional This button displays the list of currently Everyone has access.
available Sequence Recipe folders, which when
chosen, present their recipes in the Catalog
screen’s List window. (See Figure 3.2.)
Optional This button displays the list of currently Access Restricted: Permission Required
available Sequence Data folders, which when
chosen, present their data sets in the Catalog
screen’s List window. (See Figure 3.2.)

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List Window 3

List Window for Scan Recipe 3

When the Scan Recipe button is clicked, the List Window displays the Scan Recipe
information and associated function buttons. (See Figure 3.7.)

Figure 3.7 Scan Recipe information in the List Window

The Scan Recipe Name displays the currently

highlighted (chosen) recipe. If a scan is initiated
from this screen, this recipe is used.

The Recipe Path provides

Preliminary

the directory path to the

current set of recipes
displayed in the List window.
This portion of the
Information Display is
the List window,
containing the list of
available recipes that
can be used for scans.

These Function Buttons

operate on the chosen recipe.
They duplicate other menu
and tool button functions.

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Recipe Path Display

This area is used for navigating to a particular folder of recipes in a directory. The
recipes in the List window are contained in the highlighted folder in the Recipe Path
display.

Figure 3.8 Recipe Path Display

Recipes in the list are

contained in the highlighted
folder. In this case, the
SCANRCP folder.

Preliminary
Scan Recipe Name Display
This field contains the name of the currently chosen scan recipe. The recipe is chosen
by clicking on a recipe in the List window so that the recipe highlights. (See
Figure 3.7.) The recipe in the Scan Recipe Name display is designated to be the
current recipe. If the START button, at the bottom of the Information Display window
(see Figure 3.7), or the START button in the Scan Recipe Catalog tool bar (see
Figure 3.6 and Table 3.10), is clicked, a scan is performed using the current recipe.

Recipe List Window

This area contains the list of scan recipes that have been created for the various types
of scans used by the system. Scan Recipes are categorized into 2D Scan recipes and
3D Scan recipes. The recipes are accessible by clicking on either the 2D button or the
3D button in the tool bar at the top of the screen. (See Figure 3.9.) To determine
which list is active, look at the 2D and 3D buttons. The active buttons appear to be
depressed and highlighted. The inactive buttons appear extruded outward. (See
Figure 3.9.)

Figure 3.9 Tool Bar Buttons

The 2D button appears depressed and The 3D button appears extruded and
highlighted, showing that it is active. normal, showing that it is not active.

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When a recipe in the current list is clicked on, it highlights and its name appears in the
Scan Recipe Name display box at the top of the Information Display Window. In this
state, when the START button in the tool bar (see Figure 3.9 and Table 3.10.) or the
START button among the function buttons at the bottom of the Information Display
window (see Figure 3.7) is activated, a scan is performed using that recipe. In
addition, the current recipe is featured in the Scan Recipe Editor screen that appears
when the View/Modify button (a function button under the Information Display
window) is activated. (See Figure 3.7.)

Function Buttons - Scan Recipe List Window

The function buttons, located at the bottom of the Information Display window,
operate on the recipes in the recipe List window. Each button is active if it is not
grayed out. The Print, START, and XY View buttons all duplicate functions available in
a tool bar menu, and the Tool Bar. (See Figure 3.9.) The New and View/Modify buttons
are duplicates of Edit menu options. (See Table 3.4.) If the button is not accessible, it
appears as a 2D object, not 3D, and it is grayed out. Buttons might be inaccessible
because:
Preliminary

Š The system is operating in a Security level that does not grant the current Log
On access permission to perform the corresponding function, or
Š Because a preceding (or set-up) activity is required before the function can be
activated.

Table 3.12 Scan Recipe List Window Function Access Buttons

Function Icon Description Function Access
This prints the currently highlighted Recipe. Everyone has access.
This function is also performed
by the Printer icon in the tool
bar.
This opens the Recipe Editor for the creation Access Restricted: Permission Required.
of a New recipe. In the recipe editor, the title The same function is also found in the Edit
is “UNTITLED” until the recipe is named. The menu under New.
recipe content contains the default
parameters.
This opens the Recipe Editor allowing Access Restricted: Permission Required.
modification of the currently highlighted Same function is also found in the Edit menu
recipe. under View/Modify.
This opens the XY View screen and begins Everyone has access.
the scan procedure associated with the This function is also performed
currently highlighted scan recipe. by the START button in the
Tool Bar at the top of the screen.
This opens the XY View screen with the Everyone has access.
currently highlighted recipe in place to This function is also performed
perform a scan. by the XY Icon in the Tool Bar.

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System Status Message 3

This portion of the screen contains current system status messages. These messages
can contain any of the following:
Š Instructions to the user.
Š Warnings or Cautions
Š Current system activity.
It is important to check this field for system information if the system appears to be
stalled or inactive. This message field can contain valuable information for system
troubleshooting.

Figure 3.10 System Status Message Field

Preliminary
The System Status Message area To clear the message box, click on Clear
can contain messages, warnings, Status. This permanently erases the
and system activity. message.

C REATING AND E DITING A S CAN R ECIPE 3

This section presents the procedure for creating a Scan Recipe. Included are:
Š Accessing the Scan Recipe Editor where the recipe is created
Š A description of the parameters required to create a recipe
Š Naming the New Recipe
Š Testing the New Recipe

Accessing the Scan Recipe Editor 3

The actual creation of a scan recipe is performed in the Editor screen. This means that
recipe creation and editing is restricted to those whose password permits access to the
Recipe Editor. Use the following procedure to access the Recipe Editor screen:
1. Open the Profiler Catalog screen. (See Figure 3.13.)

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2. Choose the Scan Recipe button to display the Scan Recipe catalog. (See
Figure 3.11.)

Figure 3.11 Scan Recipe Catalog Screen

Step 2 Click on Scan Recipe

to display its contents in the
Information Display window.
The Scan Recipe button
appears inset when its is
chosen.
Preliminary

3. Choose 2D or 3D scan recipes by clicking on the appropriate icon. (See

Figure 3.12.)

Figure 3.12 Tool Bar

Step 3 Choose one

of the dimension icons
to display the list of
associated recipes.

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4. In the Scan Recipe list, a recipe is highlighted in the list. This has no effect on a
New recipe. The new recipe is generated using default parameters. (See
Figure 3.13.)

Figure 3.13 Scan Recipe Catalog Screen

When the Scan Recipe

button appears inset, the
Scan Recipe information is
displayed in the List window.

Preliminary
Step 4 Click on New to
display the Recipe Editor
using the default values in
the New recipe parameter.

Click on New, located among the function buttons at the bottom of the
Information Display window. (See Figure 3.13.)

Recipe Editor for 2D and 3D Scans 3

Introduction 3

When New is clicked, the Recipe Editor appears with an UNTITLED recipe. (See
Figure 3.14.) The UNTITLED recipe contains the default scan parameters. The Recipe
Editor has eight windows for the 2D recipes and nine for the 3D recipes that, together,
contain all the variable scan recipe parameters. Each of these windows is accessed
through its own access button on the left side of the Recipe Editor Screen. (See
Figure 3.14.) These windows are discussed one at a time, starting with the top button
and working down, until all the parameters required for defining a recipe are
explained.

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Figure 3.14 Recipe Editor for a 2D UNTITLED Recipe

The Title bar shows that the

recipe name is currently
UNTITLED and the screen
is Recipe Editor.

Each Parameter button

displays its parameters in
the Information Display
window.

The Information Display window

contains the parameter set
related to the currently activated
Preliminary

Parameter button. The current

Parameter button appears to be
indented, as the Scan
Parameter Definition does in
this illustration.

Scan Parameter Definition Window 3

Figure 3.15 3D Parameters in the Information Display Window

3D Scan contains scan

characteristics. (The 2D
version contains fewer
variables.)

Scan Time category

contains parameters that
are results of above actions.

Stylus category contains

Stylus force and size
parameters.

Vertical Ranging category

contains vertical size
(height, depth and scan
profile of the scan.)

The Scan Parameter Definition button displays four categories of 2D or 3D scan

parameters: 2D Scan or 3D Scan; Scan Time; Stylus; and Vertical Ranging.

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2D Scan Category Parameters - Scan Parameters Definition 3

The parameters defined in this category deal with the actual mechanics of the 2D
scan. Each is discussed in Figure 3.16.

Figure 3.16 2D Scan Category Parameters

Preliminary
1. X Scan Size (µm). This variable sets the length of the actual scan. It is set in one
of two ways:
Š Click on the menu arrow at the right of the X Scan Size field to display the
drop-down menu. Click on the desired number in the menu. The number
should appear in the field. The variables in the drop-down menu range, in
various increments, from 1 - 5000 µm. (See Figure 3.17.) For the standard
P-15, 80000 µm is the longest possible scan. The long scan P-15 can scan
200000 µm.
Š Alternative: Double-click in the X Scan Size field to highlight the current
number. Enter the desired number in microns (µm). This variable is helpful
when a specific scan length is required that is not in the drop-down menu.

NOTE: The scan length can also be changed when using the Teach
function. See Step 6. on page 3-22 for more details. See the Note.

Figure 3.17 X Scan Size (µm)

Step 1 Click on the menu arrow to

display the drop-down menu. To
choose the number of microns (µm)
in the scan length, click on the
appropriate number.

2. Scan Speed (µm/s) - This parameter sets the speed at which the scan is
performed. It has a range between 1 µm/s and 25000 µm/s, with numerous
options within this range displayed in its drop-down menu. (See Figure 3.18.)

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Figure 3.18 Scan Speed Drop-down Menu

To set the Scan Speed, click

on the menu arrow in the
Scan Speed field and click on
the desired speed.

The Scan Speed should be determined in conjunction with the stylus tip size and
Preliminary

the Applied Force setting. Table 3.13 lists some recommended safe scan speeds
for operation of the P-15 systems. Following the guidelines in the table should
protect the stylus tip and the sample:

Table 3.13 Recommended Scan Speeds

Stylus Tip Size Applied Force Scan Speed Related Condition
Submicron Tips 0.05 - 0.10 mg. Not to exceed 10 µm/s Soft materials*

2 µm Tip 0.5 mg. 2.0 - 10 µm/s Soft materials*

2 µm Tip 1 - 2 mg. Not to exceed 200 µm/s Normal scans

*Soft Materials - such as copper, gold, aluminum, and photoresist

The following cautions are important in determining a safe scan speed.

CAUTION: When scanning soft material (e.g., copper, aluminum, and

photoresist) follow the recommended applied force and scan speed for
each listed stylus.

CAUTION: If the scan speed is set too fast when using a small
applied force, features might be missed or inaccurately traced.

3. Sampling Rate (Hz) - is the frequency at which data points are collected. (It sets
the number of data points that are collected per second during a scan.) Optimum
data collection is determined by this number in conjunction with the scan speed,
the length of the scan, and the size of the stylus tip. The Sampling Rate should
be set so that each data point has meaning. In general, as the scan progresses, the
Sampling Rate should not calculate out to be greater than 1/4 the radius of the

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stylus tip. Any more than that reduces the significance of each data point. (See
Figure 3.21 and Figure 3.22.) Collecting more data points does not necessarily
improve the accuracy of the scan results and can cause slower system
calculations (as could be the case when using Multi-Scan averaging with an
unnecessarily high Sampling Rate). (See the example below.)
EXAMPLE: The following demonstrates the relation between scan speed, scan
length, and Sampling Rate:
Š Scan Speed = 10 µm/s Scan Length = 100 µm
Š Sampling Rate = 20 Hz Stylus radius = 2 µm
20 data points are collected each second during a 10 second scan (20 Hz.)
200 data points are collected during the total scan.
200 data points over a 100 µm scan means that 2 data points were collected
per micron during the scan.
Figure 3.19 illustrates the impact of stylus radius in generating a scan trace.

Preliminary
Figure 3.19 Scan Trace Comparison - Large vs. Small Stylus Radius

Scan Direction
Stylus A with
large radius.

Stylus Path A
Sample Surface

Stylus Radius

Stylus B with
small radius.

Stylus Path B

Stylus Radius

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Comparing the Scan Path of the large radius stylus and the small radius stylus,
assessment can be made regarding the validity of higher frequency data
collection. In general, the larger radius styli do not detect the smallest features.
They give traces that can resemble a statistical average. Little is gained by
increasing the number of data points collected during a large radius stylus scan,
if the stylus is not capable of capturing the smallest surface features. (See
Figure 3.19 and Figure 3.21.)

Figure 3.20 Data Collection Frequency

Low
Data points collected in
low Hz, medium Hz
Medium
and high Hz levels. See
Figure 3.21 for details.
High
Preliminary

Figure 3.21 Data Collection When Using a Large Radius Stylus

Stylus Path A (large radius stylus) - Stylus Path A (large radius stylus) -
Low Frequency Data Collection High Frequency Data Collection

Low and High Frequency Data Traces

are nearly the same since a large radius
stylus was used. Little data value is
gained from High frequency collection.

Low Frequency Data Trace

High Frequency Data Trace

Sample Surface

If the Stylus chosen is small enough to detect the features of interest in the scan,
then a sampling rate should be chosen that accurately records the level of detail
required from the scan. For a small stylus radius, as the Sampling Rate
increases, assuming the speed is left the same, the number of data points
collected forms a trace that comes closer to the actual scan path features. (See
Figure 3.22.)

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Figure 3.22 Data Collection When Using a Small Radius Stylus

Stylus Path B (small radius stylus) - Stylus Path B (small radius stylus) -
Low Frequency Data Collection Medium Frequency Data Collection

Stylus Path B (small radius stylus) - High Frequency Data Collection

As the Data Points get closer (higher frequency), the Data Trace
becomes more distinct, resembling Stylus Path B, which used a
Small Radius Stylus to scan.

Preliminary
Low Frequency Data Trace

Medium Frequency Data Trace

High Frequency Data Trace

Small Radius Stylus, Stylus Path B

Sample Surface

Choose the desired Sampling Rate by clicking on the menu arrow next to
Sampling Rate field. The recommended range is presented in the drop-down
menu (5 Hz - 1000 Hz). Click on the desired rate from the menu.

Figure 3.23 2D Scan Options With Sampling Rate Menu

Step 3 Click on the menu arrow

next to the Sampling Rate field.
Click on the desired rate from the
menu. The range is between 5 Hz
and 1000 Hz.

4. Multi-Scan Average - This is a 2D option that allows the user to repeat a single
scan up to 10 times so that the scan data can be averaged by the number of scans
performed. This feature provides an opportunity to level out the noise factors in
a scan. The optimum Multi-Scan Average is between 3 and 5 times.

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Figure 3.24 2D Scan Options With Multi-Scan Average Menu

Step 4 Multi-Scan Average sets

the number of times a scan is run
before the data is averaged to
present the scan for analysis. Click
on the menu arrow next to the
variable box and click on the
desired number of scans.

Click on the menu arrow next to the Multi-Scan Average to display its menu.
Click on the number of scans to be performed for averaging the data.
Preliminary

5. Scan Direction - Arrow - This option dictates the direction of the scan, from left
to right or from right to left .
Changing The Scan Direction: Click on the arrow to cause it to point the
opposite direction.

NOTE: DO NOT use unless it is absolutely necessary.

The recommended direction is left to right because it

gives better repeatability, protects the stylus, and provides better data.

Figure 3.25 2D Scan Options With Scan Direction Arrow

Step 5 The arrow dictates

which direction the scan
proceeds in. To change the
scan direction, click on the
arrow and it changes to
indicate scan direction.

6. Scan Direction - Teach - When the Teach button is clicked on, it displays the
Teach Scan Length screen. This screen allows the user to set the starting, center,
or end positions of a scan. The scan length is already set in the X Scan Size
parameter. Use the following procedure to set the Teach... position:

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Figure 3.26 2D Scan Options - Show Position:

Step 5 b. Click on the Teach… Step 5a. Before activating

button to display the Teach the Teach… button, click in
Scan Length screen where, in the radio button representing
the XY View, the exact location the reference position to be
of the chosen reference used in the Teach Scan
position can be established. Length screen.

a. Before clicking the Teach… button, the desired reference position must be
chosen. This is accomplished in the Show Position box, to the right of the
Teach… button. Click in the radio button next to the desired reference

Preliminary
position, Start, Center, or End, that is to be established with respect to the
scan feature in the Teach Scan Length screen. (See Figure 3.26.)

Table 3.14 Show Position Options

Option Description Graphic Representation
Start The Start setting is used in the Video portion of the XY
view screen to position the start of the scan at the Click here to position Start
intersection of the Video screen crosshairs. Wherever the Outcome
user clicks in the video image, that position becomes the
starting scan position, and appears at the center of the
Video screen, with the scan distance presented as an
arrow. Scan Feature
Center The Center setting is used in the Video portion of the XY
view screen to position the center of the scan at the Click here to position Center
intersection of the Video screen crosshairs. Wherever the
user clicks in the video image, that position becomes the Outcome
center of the scan, and appears at the center of the Video
screen, with the scan distance presented as an arrow.
Scan Feature

End The End setting is used in the Video portion of the XY view
screen to position the end of the scan at the intersection of Click here to position End
the Video screen crosshairs. Wherever the user clicks in
the video image, that position becomes the end of the Outcome
scan, and appears at the center of the Video screen, with
the scan distance presented as an arrow.
Scan Feature

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b. Locate the desired feature in the XY View portion of the screen. Click on
the reference position (start, center, or end). The screen then positions the
scan length arrow over the scan feature according to the chosen position.
The reference position is at the center of the video screen crosshairs. (See
Table 3.14.)

NOTE: When in the Teach Scan Length (XY view) screen, it is possible
to change the scan length by clicking on a position in the video screen
and dragging the new length. If the scan is immediately started from
the Teach Scan Length screen, it scans the newly defined (dragged)
distance even though the original recipe scan length is different.
However, if the new distance is not saved it does not appear on the
original recipe. If it is saved by clicking OK or actually saving the
changes from the menu, the recipe then reflects the newly dragged
scan distance.
Preliminary

Figure 3.27 Teach Scan Length, from the 2D Scan Teach Button

With the feature in the field of view,

click in the appropriate reference
point (start, center, or end) for the
scan. The system positions that
point center screen and places the
scan arrow over the scan in the
appropriate place.

EXAMPLE: If the
circled feature is to
be scanned…

and the reference

is set on center…

Click on the center of the scan

travel distance in the image and
that point is positioned center stage
with the scan trace through it.

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3D Scan Category Parameters - Scan Parameters Definition 3

The parameters discussed in this section are those that are additions to or differ from
the 2D parameters already presented. For information on parameters that are identical
for 2D and 3D scans, see the descriptions in the 2D recipe section. (See Table 3.15 for
identification of which parameter settings are 2D or 3D.)

Table 3.15 3D Scan Parameters Summary

Parameter Setting 2D, 3D or Both Description and Location
X Scan Size Both X direction scan length; Step 1. on page 3-17.
Y Scan Size 3D The length in the Y-direction through which the X-direction scans are made
at each Y Spacing interval.
Scan Speed Both The speed at which the scan is performed.
Sampling Rate Both The rate at which data points on the scan are recorded for analysis.
Traces 3D This is the number of scans that are made to encompass the Y-distance

Preliminary
requirement.
Multi-Scan Average 2D The number of single identical scans which are performed and used to
create a scan data set that represents the average of the scans.
Spacing 3D This is the distance between X scans performed across the Y direction of
the 3D scan area.
Scan Direction Both The direction in which the scan is performed.
Teach… Both Displays the Teach Scan Length screen that is used to determine the start,
center or end of the scan. Can also be used to drag a new scan length.
Show Position Both Displays the current position and provides an opportunity to set a new
position at which the scan, of scan length set in X Scan Size, is started, is
centered, or ends.

Y Scan Size (µm)

This parameter defines the size, in the Y-direction, of the 3D area to be scanned. It is
the area across which the number of scans defined in the parameter Traces are divided
up. (See Figure 3.29 on page 3-26.)

NOTE: If the variable in the Spacing parameter is changed, the Y Scan

Size changes to accommodate the number of Traces at the new
Spacing distance.

Setting or Changing Y Scan Size - Use one of the following procedures:

Š Click the menu arrow to the right of the Y Scan Size field and click on the
desired size.
Š Highlight the current number and type in the new number. (See also
Automatic Parameter Adjustment: in Step on page 3-27.)

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Figure 3.28 3D Scan Parameters

Set the Y Scan

Size by clicking
on the menu
arrow and
choosing the
desired size, or
by highlighting
the current
number and
typing in the new
number.
Preliminary

Traces
This assigns the number of scans that are made in the X-direction across the Y Scan
Size direction. In Figure 3.29, the number in the Traces variable box would be 8.

Figure 3.29 Traces - Scan Perimeter with Traces

X Scan Size
Y Scan Size

This scan contains 8 traces,

illustrated as dotted line arrows.
The number of traces is defined
in the Traces parameter.

Feature being scanned

If the Y Scan Size is set [Y Scan Size = (Traces -1) x Y Spacing], when the Traces:
parameter is entered, the Y Spacing parameter automatically adjusts to reflect the
appropriate spacing between scans.
Setting the Number of Traces: To change the number of Traces in a 3D scan,
highlight the current Traces value and type in the new number of traces. (See also
Automatic Parameter Adjustment: in Y Spacing (mm) on page 3-27.)

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Figure 3.30 3D Scan - Traces Parameter

To set or change
the number of
traces in a 3D
scan, highlight the
current Traces
variable and type
in the new
number.

Preliminary
Y Spacing (µm)
This variable sets the distance in the Y-direction between X-direction scan traces in a
3D scan.
The spacing is very important to final 3D data collection set because, together with
the stylus radius, it determines the essential resolution of the feature that is scanned.
(See Step 3 on page -18.) Consider to following examples:
Š If the distance between scans is too great with respect to the stylus radius,
important variations in the scanned feature might be missed.
Š Conversely, if using a larger stylus, and the distance between scans is very
small, many of the data points are essentially redundant and, therefore,
meaningless.

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Automatic Parameter Adjustment: - In general, a connection exists in the software

such that, when certain parameters are changed, other parameters are readjusted to
accommodate the changes. The adjustments occur between the Y Scan Size, Traces,
and Y Spacing parameters. Occasionally, after setting a parameter, the user might click
on one of the other parameters and notice a minor adjustment to the parameter that
had just been set. This happens to balance the numbers between Y Scan Size, Traces,
and Y Spacing. (See Table 3.16.)

Table 3.16 Automatic Parameter Adjustments

Change This Adjusts These Parameter Conditions Effecting Adjustment
Parameter
Y Scan Size Y Scan Size Occasionally makes minor adjustments
to the newly set number to
accommodate the Y Spacing or Traces.
Y Spacing
Traces Occasionally makes minor adjustments
(no more the ±1) to the newly set
Preliminary

number, to accommodate the Y Scan

Size and Y Spacing. Usually only for
scans less than 100 µm.
Traces Y Scan Size This change is normally small,
changing to accommodate the spacing
required to perform the number of
traces.
Y Spacing
Traces Occasionally makes minor adjustments
(no more the ±1) to the newly set
number, to accommodate the Y Scan
Size and Y Spacing. Usually only for
scans less than 100 µm.
Y Spacing Traces
Y Scan Size This change is normally small,
changing to accommodate the spacing
required to perform the number of
traces.
Y Spacing Occasionally makes minor adjustment
to the newly set number to
accommodate the Y Scan Size or
Traces.
Scan Speed No Changes
Sampling Rate No Changes

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1. Show Position - For 3D scans, the three options in this box are used for
positioning the scan area parameters box, not to indicate the actual Start and End
of the scan. One of these options must be chosen in conjunction with the Teach...
position function button next to the Show Position box. (See Table 3.17.)
Selecting An Option: Click in the radio button of the desired position.

Table 3.17 Show Position Options

Show Position Description Graphic Representation
Option
Start The Start setting is used in the Video portion of the XY Click here to position
view screen to position the upper left corner of the scan Start
area box in the Video screen crosshairs. Wherever the x
user clicks in the video image, that position becomes the
upper left corner of the scan area box, and appears at the
center of the Video screen. Outcome
This is not the actual place where the scan starts.

Preliminary
Start only defines the upper left corner of the scan Scan Feature
area box. Literal START is near the lower left corner.
Center The Center setting is used in the Video portion of the XY Click here to position
view screen to position the center of the scan area box in Center
the center of the Video screen crosshairs. Wherever the
user clicks in the video image, that position becomes the
center of the scan area box, and appears at the center of x
the Video screen.
Outcome
Scan Feature

End The End setting is used in the Video portion of the XY view Click here to position
screen to position the lower right corner of the scan area End
box in the center of the Video screen crosshairs. Wherever
the user clicks in the video image, that position becomes Outcome
the end of the scan area box, and appears at the center of
the Video screen.
This is not the actual place where the scan ends. End x
only defines the lower right corner of the scan area Scan Feature
box. Literal END is near the upper right corner.

2. Teach... - This function takes the feature and positions it in the scan field
according to the reference position option chosen in the Show Position box. (See
also Step 1. on page 3-29.)

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a. Before clicking the Teach... button, the desired reference position must be
chosen. This is accomplished in the Show Position box, to the right of the
Teach... button. Click in the radio button next to the desired reference
position, Start, Center, or End, that is to be established with respect to the
scan feature in the Teach Scan Length screen. (See Figure 3.31.)

Figure 3.31 2D Scan Options - Show Position:

Step 1 Before
activating the
Step 2 Click on the Teach…
Teach… button,
button to display the Teach
click in the radio
Scan Length screen where, in
button representing
the XY View, the exact location
the reference
of the chosen reference
position to be used
position can be established.
in the Teach Scan
Length screen.
Preliminary

b. Locate the desired sample feature in the Video portion of the screen. Click
on the position that corresponds to the reference position (Start, Center, or
End), that is on or near the scan feature. The screen positions the scan area
box over the scan feature according to the chosen position. The chosen
position (Start, Center, or End) is at center screen, with the scan area box
positioned accordingly. (See Figure 3.32, Figure 3.33 & Figure 3.34.)

Figure 3.32 Teaching a Scan Position Using Center Show Position

Scan Feature Scan Area Box Video Screen

With Center as the Crosshairs
Show Position,
Y Scan Size

click here to
achieve results
shown on right side
of this illustration.
X Scan Size

NOTE: When in the Teach Scan Length screen, it is possible to

change the scan area by clicking on a position in the video screen and
dragging the box to form a new area. If the scan is immediately started
from the Teach Scan Length screen, it scans the newly defined
(dragged) area even though the original recipe scan area is different.
However, if the new area parameters are not saved, they do not
appear in the original recipe. If they are saved by clicking OK or
actually saving the changes using the File menu, the recipe will reflect
the newly dragged scan distance.

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Figure 3.33 Teaching a Scan Position Using Start Show Position

Assume that the features

represented in the illustration were
on the video screen.
Š The feature with the dashed
circle around it is the object
of the scan,
Š The white box represents
the scan area defined by X
Scan Size and Y Scan Size,
Š Start is the Show Position.
Clicking here places the scan area
box around the feature and sets this
spot at the center of the view screen.

Preliminary
(See results in Figure 3.34.)

The preceding illustration demonstrates the use of the Teach... function from the
3D Scan parameters in the Recipe Editor. The illustration uses the Start option
from the Show Position box. The results are demonstrated in Figure 3.34.

Figure 3.34 Teaching a Scan Position Using Start Show Position

The scan area box aligns with

the Start position at the point on
the screen where the user clicks.

NOTE: The simplest way to set up a 3D scan is to choose Center as

the Show Position and click directly in the center of the scan feature.
This places the center of the feature in the center of the scan area box,
and places the scan area box at the center of the screen crosshairs.

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Scan Time Parameters (2D and 3D) - Scan Parameters Definition 3

The Scan Time parameters box displays time and data point values, broken down into
general components. (See Figure 3.35.) No values can be set or defined in this portion
of the screen. These values are read only because they are determined by parameters
set in other fields.

NOTE: These values are system generated from parameters set in

other fields. This value might be inaccurate up to 20% of the actual
value. Use these values only for casual reference.

Figure 3.35 Scan Time - Scan Parameters Definition

Preliminary

The Scan Time parameters

are display only.

Individual Traces (s)

This defines the number of seconds required to complete one scan. This time
parameter divides X Scan Size (µm) by Scan speed (µm/s) and adds the result to the
approximate move time. (See Figure 3.36.)

CAUTION: The following equation is not the actual equation used to

produce the variables. The equation only takes into consideration the
simplest and most general components used to produce the value
displayed in the field. Use generate values only for casual reference.

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For 2D and 3D [X Scan Size / Scan speed] + move time = Individual Traces (s)

Figure 3.36 Individual Traces Calculation

Individual Traces (s)

parameter is calculated using
the X Scan Size (µm) and the
Scan Speed (µm/s) settings.
The calculated time is added to
the move time to give the total
Individual Traces (s) time.

Preliminary
Total (hr:min:s) - This is the total time that it takes to complete the set of scans defined
in the scan recipe section, 2D or 3D Scan.

CAUTION: Generating the value for the Approx. Total (hr:min:s) is

very complicated. This variable can be inaccurate up to 20% in either
direction. Use the generated time only for casual reference.

Figure 3.37 Total (hr:min:s): Calculation - 3D Screen

Approx. Total (hr:min:s:).

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Number of Data Points: - This is the total number of scan data points collected during
the scan.

CAUTION: The following equation is not the actual equation used to

produce the variables, it only approximates it. This equation only takes
into consideration the simplest and most general components used to
produce the value displayed in the field. Use generate values only for
casual reference.

For 3D [(X Scan Size / Scan Speed) x Sampling Rate x Traces] + the number of traces
= Number of Data Points
For 2D [X Scan Size / Scan Speed] x Sampling Rate x Multi-Scan Average
= Number of Data Points
The approximate value is seen in the following example

Figure 3.38 Number of Data Points: Calculation - 2D & 3D Screens

Preliminary

The Number of Data Points is

calculated by taking X Scan
Size and dividing it by Scan
Speed, then…

multiply the result by the

Sampling Rate, then…

multiply the result by the

number of Traces.
This approximately equals the
Number of Data Points. 2D Choices to obtain the
Number of Data Points.

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Point Interval
Point Interval is the distance between data points in the X-direction of each trace.
For 2D and 3D Scan Speed (µm) / Sampling Rate (Hz) = Point Interval:

Figure 3.39 Point Interval: Calculation - 3D Screen

Point Interval is the

distance between data
points in each
X-direction scan trace.
It is defined as the
Scan Speed divided by
the Sampling Rate.

Preliminary
Stylus Parameters (2D and 3D) - Scan Parameters Definition 3

The Stylus parameters box contains those variables that deal with the stylus operation.
Only the Applied force variable is accessible for change in this screen.

Figure 3.40 Stylus Parameters (2D and 3D)

Applied Force is the only

parameter in Stylus that is
adjustable. Click on the menu
arrow to display the menu and
choose the force.

6.5 mm is the hi
gain range.

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Applied Force (mg)

This is the force exerted by the stylus on the sample surface. With each different
stylus radius there are recommended limits that should be taken into consideration
when setting the Applied Force. The Applied Force should not exceed the
recommended maximum force. (See Figure 3.41.)

Figure 3.41 Stylus Parameters - Scan Parameters Definition

Applied Force is the only Applied Force

adjustable parameter in should not
the Stylus box. exceed this limit.

Table 3.18 Stylus Force Ranges for the Different Head Configurations
MH2lf MH2sr MH2xr
Preliminary

0.05-50 mg in hi gain range 1-50 mg 0.5-50 mg

(0.1 mg for medium and low
ranges)

Changing the Applied Force setting:

1. Click on the menu arrow next to the variable box to display its menu.
2. Click on the desired force setting. (Figure 3.42.)

Figure 3.42 Stylus Parameters - With Applied Force Menu

To change the Applied

Force value, click on
the menu arrow to the
right of the variable box
to display the menu.
Click on the desired
force setting.

NOTE: The force setting must be within the range of the head being
used or a message is generated that requires the user to choose an
appropriate setting.

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Stylus Radius (µm)

Stylus Radius is the manufacturers stated radius of the stylus. The stylus radius cannot
be changed in this screen.

CAUTION: Recommendations and limits are only correct if the “Stylus

Change Procedure” was followed when the stylus was installed.

Use the Stylus Change Procedure to change the stylus radius setting. (See Stylus
Change Procedure on page 4-1.)

Recommended Maximum (mg)

Each stylus type is associated with a maximum applied force setting. The maximum
setting is deemed to be safe for the stylus and the sample while performing normal
scans. This force should not be exceeded.

CAUTION: See Table 3.13 on page 3-18 for special recommended

Preliminary
force limitation when using any submicron tip on a soft sample. This
number is set during the Stylus Change Procedure. If that procedure is
not used when changing a stylus the recommended force could be
incorrect. If a user sets the wrong Applied Force and exceeds the
actual recommended force, stylus damage or potential damage of soft
sample surfaces could occur.

Vertical Ranging Parameters (2D and 3D) - Scan Parameters Definition 3

Vertical Ranging contains two parameters: Range/Resolution and Profile Type. These
two parameters are used together to set up the system for:
Š Range: The maximum feature measurement limit (theoretical), up or down, that
is considered when scanning for a feature,
Š Resolution: The theoretical vertical resolution of the scan of a feature.

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Three set of ranges are available depending on the type of head the instrument uses.
The primary differences between the ranges are in their resolution capabilities, and
the ability in the 131 µm, 327 µm, and 1000 µm range to set the direction in which the
range is applied. The ranges are described below.

Figure 3.43 Recipe Editor - 3D Scan Parameter Definition

The VERTICAL RANGING

parameters box defines:
1. Which vertical features
are scanned; those in the
up, down, or both up and
down direction, from the
Preliminary

scans starting level.

2. The maximum theoretical
height, depth or both height
and depth of features that
are considered, along with
the minimum feature size
that, theoretically, can be
clearly resolved.

Range/Resolution
This parameter sets the maximum size limit of the features that can be scanned in
each given range, and the minimum feature size that can be resolved (positively
detected). Three ranges are available. (See Table 3.19.)

Table 3.19 Range and Resolution Scan Parameters for the MH2lf Head
Vertical Range (µm) Resolution (Å)
± 3.2 (6.5 total) 0.004
± 13 (26 total) 0.016
± 65 (131 total) 0.08

Table 3.20 Range and Resolution Scan Parameters for the MH2sr Head
Vertical Range (µm) Resolution (Å)
± 6.5 (13 total) 0.008
± 32 (64 total) 0.04
± 173 (327 total) 0.2

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Table 3.21 Range and Resolution Scan Parameters for the MH2xr Head
Vertical Range (µm) Resolution (Å)
± 6.5 (13 total) 0.008
± 65 (131 total) 0.08
± 500 (1000 total) 0.6

NOTE: The Resolution numbers in Table 3.19, Table 3.20, and

Table 3.21 are theoretical. Noise levels could greatly effect the
resolution.

Preliminary
Figure 3.44 Vertical Ranging - Range/Resolution Menu

To choose the 131 µm

range, click on the menu
arrow next to the variable
box to display the menu.
Click on 131 µm.

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131 µm, 327 µm, and 1000 µm ranges - The largest features are scanned using
these ranges. In this range, using the Profile Type menu (see Figure 3.45 and
Table 3.22), the user can specify which features are considered for analysis:
Š Features that step UP a maximum of 131 µm from the scan’s starting point;
Š Features that step DOWN a maximum of 131 µm from the scan’s starting
point;
Š Or features that step ±65 µm, BOTH UP AND DOWN, from the scan’s
starting point
Choosing the 131 µm, 327 µm, or 1000 µm range:
Click on the menu arrow to display the menu. Click on the desired option.
(See Figure 3.44.)

Range Limitations for 131 µm (MH2lf head):

Š The limit for a scan with the Profile Type is ±65 µm.
Š The limit for a scan with the Profile Type is approximately
Preliminary

65 µm + (1/2 x 65 µm) ≈ 100 µm.

Š The limit for a scan with the Profile Type is approximately
-65 µm + (1/2 x -65 µm) ≈ -100 µm
Range Limitations for 327 µm (MH2sr head):

Š The limit for a scan with the Profile Type is ±163 µm.
Š The limit for a scan with the Profile Type is approximately
160 µm + (1/2 x 160 µm) ≈ 240 µm.
Š The limit for a scan with the Profile Type is approximately
-160 µm + (1/2 x -160 µm) ≈ -240 µm
Range Limitations for 1000 µm (MH2xr head):

Š The limit for a scan with the Profile Type is ±500 µm.
Š The limit for a scan with the Profile Type is approximately
500 µm + (1/2 x 500 µm) ≈ 750 µm.
Š The limit for a scan with the Profile Type is approximately
-500 µm + (1/2 x -500 µm) ≈ -750 µm.

NOTE: The best results are obtained from the profile.

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Saturated Data Points If, in the course of a scan, the upper limit of any one of the ranges is reached and
50 data points are collected beyond the limit, the system aborts the scan and a
message is issued reporting that there are too many saturation data points. The
scan appears as complete, however, the end of the trace is only a continuation of
the last data point, not actual scan data.

Figure 3.45 Vertical Ranging - Profile Types

For the 131, 327, and 1000 µm

ranges, the three Profile Types allow
the user to choose features that go
up or down from the sample surface
the full range, or split the difference
between up and down features.

26 µm and 64 µm Ranges - These are the most common scan range for small

Preliminary
scans. They offer the opportunity to scan features which are ±13 µm or ±32 µm
from the scan starting point. These ranges do not offer the Up only or Down
only option. (See Table 3.22.) If larger features are to be scanned, use the 131
µm, 327 µm, or 1000 µm range.
Choosing the 26 µm or 64 µm range:
Click on the menu arrow to display the menu. Click on the 26 or 64 µm
range.
Range Limitations for 26 µm:

Š The limits for a scan with the Profile Type is ±13 µm

Range Limitations for 64 µm:

Š The limits for a scan with the Profile Type is ±32 µm.
Saturated Data Points If, in the course of a scan, the upper limit is reached and 50 data points are
collected beyond the limit, the system aborts the scan and a message is
issued reporting that there are too many saturation data points. The scan
appears as complete, however, the end of the trace is only a continuation of
the last data point, not actual scan data.
6.5 µm and 13 µm Ranges - These are the most sensitive scan range. It is for
scans of features 3.2 µm or smaller above or below the sample surface. This
range does not offer the Up only or Down only option. (See Table 3.22.) If larger
features are to be scanned, use either the medium range or the largest range.
Choosing 6.5 µm or 13 µm range:
Click on the menu arrow to display the menu. Click on 6.5 µm/0.015625Å.
Range Limitations for 6.5 µm:

Š The limits for a scan with the Profile Type is ±3.2 µm

Range Limitations for 13 µm:

Š The limits for a scan with the Profile Type is ±6.5 µm.

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If, in the course of a scan, the upper limit is reached and 50 data points are
collected beyond the limit, the system aborts the scan and a message is
issued reporting that there are too many saturation data points. The scan
appears as complete, however, the end of the trace is only a continuation of
the last data point, not actual scan data.

Profile Type: Available choices for each range and the resultant scan traces

Table 3.22 Profile Types

Profile Type Range Scan Description
131 µm 131 µm scans features that are 65 During a scan using this profile type, if the scan
327 µm µm up or down from the scan’s goes out of range and stays out of range for 50 data
1000 µm starting point. points, the scan is aborted.
When operating in this range, the sensor arm
327 µm scans features that are containing the stylus can be very near its vertical
160 µm up or down from the limit capacity.
scan’s starting point.
When it goes out of range for 50 data points on a
Preliminary

step up, the scan is aborted. If the scan continued

1000 µm scans features that are
to go further out of range, at some point the sensor
500 µm up or down from the
could be damaged.
scan’s starting point.
When it goes out of range for 50 data points on a
step down, the scan is aborted. If the scan
continued to go further out of range, the stylus
would float out of contact with the sample.
64 µm This scans features that are 32 µm During a scan using this profile type, if the scan
up or down from the scan’s goes out of the ±32 µm range and stay out of range
starting point. for 50 data points, the scan is aborted.
These limits are in the software. The system sends
a saturation message when the scan is aborted.
26 µm This scans features that are 13 µm During a scan using this profile type, if the scan
up or down from the scan’s goes out of the ±13 µm range and stay out of range
starting point. for 50 data points, the scan is aborted.
These limits are in the software. The system sends
a saturation message when the scan is aborted.
13 µm This scans features that are 6.5 During a scan using this profile type, if the scan
µm up or down from the scan’s goes out of the ±6.5 µm range and stay out of range
starting point. for 50 data points, the scan is aborted.
These limits are in the software. The system sends
a saturation message when the scan is aborted.
6.5 µm This scans features that are 3.2 During a scan using this profile type, if the scan
µm up or down from the scan’s goes out of the ±3.2 µm range and stay out of range
starting point. for 50 data points, the scan is aborted.
These limits are in the software. The system sends
a saturation message when the scan is aborted.

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Table 3.22 Profile Types (Continued)

Profile Type Range Scan Description
131 µm 131 µm scans features ≈ 100 µm During a scan using this profile type, if the scan
327 µm up from the scan’s starting point. goes out of range and stays out of range for 50 data
1000 µm points, the scan is aborted.
327 µm scans features ≈ 240 µm When operating in this range, the sensor arm
up from the scan’s starting point. containing the stylus is actually very near its
physical capacity.
1000 µm scans features ≈ 750 µm
When it goes out of range for 50 data points on a
up from the scan’s starting point.
step up, the scan is aborted. If the scan continued
to go further out of range, at some point the sensor
could be damaged.
131 µm 131 µm scans features ≈ 100 µm During a scan using this profile type, if the scan
327 µm down from the scan’s starting goes out of the range and stays out of range for 50
1000 µm point. data points, the scan is aborted.
When operating in this range, the sensor arm is
327 µm scans features ≈ 240 µm

Preliminary
actually very near its physical capacity.
down from the scan’s starting
When it goes out of range for 50 data points on a
point.
step down, the scan is aborted. If the scan
continued to go further out of range, the stylus
1000 µm scans features ≈ 750 µm
would simply float out of contact with the sample.
down from the scan’s starting
point.

Feature Detection (Only for 2D Scans) 3

Feature Detection is used to enable automatic detection of some common classes of

profile features (see Figure 3.47 and Figure 3.48). Feature detection facilitates
measurement throughput and consistency. It also makes it possible to automatically
and reliably set the position of the measurement and leveling cursors relative to the
rising and falling edge of a step-like feature or the apex of an arc-like feature.
In conjunction with feature detection, both the location of the edge (or the apex of an
arc) and the step width can be calculated and displayed in the Analysis window.

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Accessing the Feature Detection parameters: 3

In the Recipe Editor, click on the Feature Detection button. (See Figure 3.46.) For
information on how to display the Recipe Editor, see Accessing the Scan Recipe Editor
on page 3-13.

Figure 3.46 Feature Detection - Recipe Editor

To display the Feature

Detection parameters in
the Recipe Editor
Information Display
window, click on the
Feature Detection button.
Preliminary

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Feature
This parameter allows the user to choose between six different features that can be
detected and identified during a scan.

Figure 3.47 Feature Detection Point Locations on a Step

Example of a Step feature

UpEdge DownEdge

A trace of the Step feature

illustrated above.

Preliminary
UpBase DownBase

DownEdge UpEdge

A trace of the reverse Step

feature.

DownBase UpBase

Figure 3.48 Feature Detection Point Locations for Convex and Concave

The word Convex, as used in

A trace of the Convex feature. feature detection, is the point at
the apex of the convex trace.

The word Concave, as used in

A trace of the Concave feature. feature detection, is the point at
the apex of the concave trace.

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Table 3.23 Feature Detection Descriptions (See Figure 3.47 and Figure 3.48.)
Feature Description
None No feature detection is being used.
UpEdge At the trailing edge of a feature rise, it is the point at which
the trace begins the plateau. (See Figure 3.47.)
NOTE: This point location can be modified by using Distance
to Edge parameter in the General Parameters Window.

UpBase At the trailing edge of a plateau, it is the point at which the

trace begins to turn upward. (See Figure 3.47.)
DownEdge At the trailing edge of a plateau, it is the point at which the
trace begins to turn downward. (See Figure 3.47.)
DownBase At the trailing edge of a feature decline, it is the point at
which the trace begins the plateau. (See Figure 3.47.)
Preliminary

Convex This is the point at the apex of a convex feature. (See

Figure 3.48.)
Concave This is the point at the apex of a concave feature. (See
Figure 3.48.)

Selecting a feature for detection:

1. Click on the menu arrow next to the variable box to display its menu.
2. Click on the desired feature to select it. If necessary, use the scroll bar to reveal
other features. (See Figure 3.49.)

Figure 3.49 Feature - Feature Detection - Recipe Editor

Feature Detection allows the

user to choose from six feature
option (convex and concave not
shown). Click on the menu arrow
to display the menu. Click on the
desired feature to choose it.

Feature Number
If there are multiple edges detected in the scan, Feature Number provides a way to
select a specific edge for detection. (See Figure 3.50.)

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Changing the Feature Number:

Double-click in its variable box to highlight the current number and type in the
new number. (Use a whole number. 1 is Default)

Figure 3.50 Detection Variables - Feature Detection - Recipe Editor

Detection parameters are

changed by clicking in the
appropriate variable box to
highlight the current number.
Then type in the new number.

Preliminary
Slope Threshold
This factor sets the value at which any rise or fall in a trace is considered to be a slope,
not just part of the roughness or noise. This means that the Slope Threshold defines a
point at which the system recognizes a trace line as following or preceding an edge,
convex or concave point. (See Figure 3.50.)
Changing the Slope Threshold:
Double-click in its variable box to highlight the current number and type in the
new number:
Š Use values between 0 and 50.000
Š Default is 10.000 for a step and 1.000 for an apex point. These values are
sufficient for most scans above 200 Å in height.

NOTE: For very noisy scans where the system is having difficulty
detecting the feature, decrease the Slope Threshold. A value as low
as 5.00 can work well.

Plateau Threshold
This factor affects the precise horizontal location calculated for an edge or arc point.
This parameter allows for the positional adjustment of the point to the left or right.
(See Figure 3.50.)

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Changing the Plateau Threshold:

Double-click in its variable box to highlight the current number and type in the
new number:
Š Use values between 0 and 50.000
Š Default is 10.000 for a step and 0.000 for an apex point. These values are
sufficient for most scans above 200 Å.

NOTE: When comparing data from scans of identical features, find a

value that works and then use it consistently. Data is changed when
differing Plateau Threshold numbers are used.

Min. Plateau Width

Minimum Plateau Width defines the minimum horizontal distance between rising and
falling edges (or falling and rising edges). This is used in feature detection to identify
true features.
Preliminary

Changing the Min. Plateau Width:

Double-click in its variable box to highlight the current number and type in the
new number:
Š Use values between 0.005 and 1000.00 µm (0.0002 to 39.3701 mil)
Š Default is 10 µm.

NOTE: This is very dependent on which Feature is chosen for

detection and which Feature Number is used.

Apply Gaussian Noise Filter Before Detection

This is only used to filter out unwanted noise so the feature detection can more easily
detect designated features. (See Figure 3.51.) It does not apply the result to scan
data. For use of the Gaussian Filter with scan data, see Filters on page 3-50.

Figure 3.51 Scan Noise and the Gaussian Noise Filter

A Step scan with noise,

before applying the
Gaussian Noise Filter.

A Step scan with noise,

after applying the Gaussian
Noise Filter.

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To activate this feature

Click in the empty check box to put a 9 in it. (See Figure 3.52.) Then set the
Filter Cutoff (µm) size.

Figure 3.52 Activating the Gaussian Noise Filter

To activate the Gaussian Noise

Filter Before Detection feature,
click in its check box. A check (9)
indicates that it is chosen.

Preliminary
Filter Cutoff (µm)
This option is only activated when there is a check in the Apply Gaussian Noise Filter
Before Detection check box. (See Figure 3.52.) The number to be entered is in
microns. This determines the noise level that is filtered out.
For an in depth discussion on filters, see Filters on page 3-50.
Changing the Filter Cutoff
1. 1. Ensure that a Feature has been chosen.
2. 2. Click on the menu arrow to display its menu.
3. 3. Click on the desired cutoff filter setting.

NOTE: A Feature must be chosen in order for the Gaussian Filter to

become active. If None is showing in the Feature variable box, the
Gaussian option is grayed out. To activate it, select a feature.

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The Filter Cutoff range is from 0.25 through 800 µm. Only established variables
can be chosen.

Figure 3.53 Filter Cutoff Menu

Step 1 In order for the Apply

Gaussian Noise Filter Before
Detection, a Feature must be
chosen. The filter is not available
unless there is a feature chosen.

Step 2 After a Feature is chosen,

Preliminary

put a check (9) in the check box by

clicking in it.

Step 3 Click on the menu arrow to

display its menu. Click on the
desired cutoff filter setting.

Filters and Cursors (Only for 2D Scans) 3

Filters 3

Two filters are available for removing noise from scan data, either as the scan is
taking place, or after the scan occurs but before the data is saved. The oldest filter is
the RC Filter. RC stands for Resister Capacitor Filter. The second, the Gaussian Noise
Filter, is the best of the two and is generally chosen when a filter is required.

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Click on the Filters/Cursors button to display the Filters/Cursors parameters.

Figure 3.54 Filters/Cursors Parameters - Recipe Editor

The Filters/Cursors
parameters window is
displayed by clicking on the
Cursors/Filters button in the
Recipe Editor.

Preliminary
Gaussian Filter
This option is used to filter noise out of a scan. Application of this filter can be made
to the scan data as it is being generated (during the scan) or after the scan is complete
but before the data is saved.

Figure 3.55 Scan Noise and the Gaussian Noise Filter

A Step scan with noise,

before applying the
Gaussian Noise Filter.

A Step scan with noise,

after applying the Gaussian
Noise Filter.

The illustration in Figure 3.55 shows the effect of applying the Gaussian Noise Filter
to a scan. This filter can be set to filter out noise from 0.25 to 800 µm, as is evident in
the available wavelength values in the Noise Filter drop-down menu.
To select the Gaussian Filter: (See Figure 3.56.)

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1. Click on the Filter Option menu arrow to display its menu.

2. Click on Gaussian Filter.

Figure 3.56 Filters Parameters - Filter Option Menu

Two Filter options are available for

use in filtering out noise. The
newest and best is the Gaussian
Filter. The RC Filter might be
desirable if scanned data is to be
compared with older scans that
were made on Tencor DOS based
profilers using the RC Filter.

RC Filter
This is an older version noise filter. It was used with Tencor profilers before the
Preliminary

Gaussian Noise Filter was introduced. If the scans performed using this recipe are
going to be compared to scan performed by other Tencor DOS based profilers using
the RC Filter, then the use of the RC Filter helps in scan to scan correlation.
Selecting the RC Filter: (See Figure 3.56.)
1. Click on the menu arrow next to the variable box to display its menu.
2. Click on RC Filter.

Noise Filter
The Noise Filter is a Short Wavelength Cutoff filter. This is an adjustable software
filter used to reject short wavelength components of scan data. When used with the
Waviness Filter (Long Wavelength Cutoff), it also isolates band passes for
wavelengths. See Setting the Short-Wave Filter Cutoff Values on page 8-35 for more
information about using the cutoff filters in surface analysis.
Selecting the Short Wavelength Cutoff: (See Figure 3.57.)
1. Click on the Noise Filter menu arrow to display its menu.
2. Click on the desired Shortwave Cutoff.

NOTE: The availability of cutoffs is dependent on the scan speed. A

short wavelength cutoff cannot be entered if it is longer than the
currently selected long wavelength cutoff, or shorter than the value of
the analog cutoff.
Short wavelength cutoff ≤ Long wavelength cutoff
Short wavelength cutoff ≥ Analog cutoff

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NOTE: For scan speeds greater than 5 µm/s, the shortest short
wavelength cutoff selection turns the short wavelength filter completely
off. If subsequent changes to the scan speed or scan length cause the
short wavelength cutoff setting to become invalid, the cutoff is
automatically changed to the nearest available valid value (possibly
the default).

Figure 3.57 Filters Parameters - Noise Filter Menu

Step 1 Click on the menu arrow

Step 2 Click on the desired to display the cutoff menu.

Preliminary
Short Wavelength Cutoff.

Waviness Filter
The Waviness Filter is the Long Wavelength Cutoff filter. It is an adjustable software
filter to separate long wavelength components of scan data. When used with the Short
Wavelength Cutoff, it also isolates band passes for wavelengths.
Two types of Long Wavelength Cutoff filters are used:
Š Gaussian, the best filter for use with Windows based systems.
Š RC, used on older DOS based Tencor systems. Use this filter when comparing
new data with data obtained using the RC filter on a DOS based system. This
provides uniformity for comparison basis
To Select the Long Wavelength Cutoff: (See Figure 3.58.)
1. Click on the Waviness Filter menu arrow next to display its menu.
2. Click on the desired Long Wavelength Cutoff value.

NOTE: The availability of cutoffs is dependent on the scan speed. The

systems prevents the accidental entry of a long wavelength cutoff that
is shorter than the currently selected short wavelength cutoff or the
value of the analog cutoff.

If subsequent changes to the scan speed or scan length cause the

long wavelength cutoff setting to become invalid, the cutoff is
automatically changed to the nearest available valid value.

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Figure 3.58 Filters Parameters - Waviness Filter Menu

Step 1 Click on the menu arrow

Step 2 Click on the desired Long to display the cutoff menu.
Wavelength Cutoff value.

Cursors 3
Preliminary

Cursors are used for two general purposes:

Š Measurement Cursors are used to gather data either between the two sets of
cursors or within the boundaries of the cursor itself.
Š Leveling Cursors are used to level the data points in the trace so the trace
features fairly represent the actual scanned surface.

Figure 3.59 Cursor Parameters - Recipe Editor

The limits of the cursor boundary

Cursor parameters can be are displayed in the X1 and X2
changed using the screen columns for the various cursors.
variable boxes by clicking in
the appropriate variable box to
highlight the current number.
Then type in the new number. Notice that the cursor parameters
have not been set in the
illustration. They are all at a single
point on the trace.

Each cursor has limits that can be set. The limits of the cursor boundary are displayed
in X1 and X2 in the Cursors parameters box. The cursor limits are set relative to the
starting point of the scan. These values can be set in the window by clicking on the
current value in the variable box and typing in the new value.
The easiest way is to set the cursors is in the analysis screen, after the scan, using the
click and drag procedure. The procedure is described in the following discussion. (For
more information on leveling cursors see Leveling Cursors on page 3-55.)

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Figure 3.60 Analysis Screen with Trace in Need of Leveling

The Leveling Cursors are the top set

The Measurement Cursors are the

bottom set.

The trace is shown running from the

top left to the bottom right of the
screen. This clearly shows the need

Preliminary
for data leveling.

Leveling Cursors
In general, the most effective way to set the Leveling Cursors is in the Analysis screen
by clicking and dragging them into position. When they are in position, use the CALC
procedure (see Step 4 on page -58) to enter the new Cursors variables. By visually
positioning the cursors, the leveling positions are correct for the actual scan.
Setting the Leveling Cursor positions:
1. After the scan is complete, the Analysis screen is displayed. Click on LEVEL to
activate the Leveling Cursors. (See Figure 3.61.)
2. Reposition the leveling cursors using the following procedure.

Figure 3.61 Leveling Cursors

Step 1 To reposition cursors, click

on the LEVEL button in the tool bar
to activate the Leveling Cursors.

Step 2 When activated, click and

hold in the gray area containing the
cursor boundary box, an drag the Notice the double arrow associates with the cursor
cursors to the new position. that is active, the one that moves when drug.

a. Click on the LEVEL button in the tool bar. This activates the Leveling
cursors. The active cursor header is displayed as a 3D rectangle. The
cursor header being moved is indented while the other cursor is in relief.
The Measurement cursor heads appear as 2D line boxes. (See Figure 3.61.)

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b. As the track ball cursor approaches one of the active cursor heads, the
cursor head changes appearance to indented and the track ball cursor
appears as a double arrow as shown in Figure 3.61.
Click and hold on the cursor that is to be moved. Drag it to the desired
position, using the track ball to move it. Release the mouse button when
the cursor is in position.
3. When the cursor is in position, set each cursor boundary using the following
procedure:
a. Move the track ball cursor down into the black scan trace screen. The
boundary that the arrow is pointing at is the one that is moves. (See
Figure 3.62.)
b. Click and hold the mouse button while using the track ball to drag the
boundary into position for leveling the scan. Release the mouse button
when the boundary is correctly positioned.

NOTE: Both cursors should be positioned on the same X-plane. The

Preliminary

cursor boundaries should be positioned on the same plain, avoiding

noise peaks or valleys. This generally gives a flat scan trace.

c. Repeat Step 1 and Step 3 for the remaining cursor.

4. Click on the LEVEL button to level the trace. (See Figure 3.62.) This cause the
trace to be leveled and displays the trace with the Measurement Cursors active.
(See Figure 3.64 for a leveled trace.)

Figure 3.62 Cursor Boundary Setting on Unleveled Trace

Step 4 After Leveling cursors

have been set, click on LEVEL to
level the trace.

Step 3 When the Leveling Cursor

is placed in the general area that it
is to be used, move the track ball
cursor down into the black trace
screen to position the cursor
boundaries.
A single arrow points at the cursor
boundary that is to be adjusted.
Click and hold the mouse button
and use the track ball to move the
cursor boundary into place.

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Measurement Cursors
The Measurement cursors are used to measure various attributes of the scan. Some
measurements are obtained between the cursors, while others are made within the
boundary of a single cursor.
1. It is important to set the measurement cursors to accurately measure the desired
feature. In Figure 3.63 the left cursor is set on the sample surface with the cursor
borders positioned to measure a relatively flat trace segment. The right cursor is
positioned to detect the height of the step being measured. (See Figure 3.63.)

Figure 3.63 Setting Measurement Cursors

In this illustration, the left cursor In this illustration, the

is set on the sample surface. right cursor is set on
the top of the step.

Preliminary
Sample Surface

a. Click on the NORM button in the tool bar. This activates the Measurement
cursors. The Measurement cursor header appears as a 3D rectangles. The
Leveling cursors appear as 2D line boxes. (See Figure 3.64.)

Figure 3.64 Measurement Cursor on Level Trace

Step 1 The leveled trace appears

with the Measurement Cursors
active. If the Measurement
Cursors are not active, click on
the NORM button in the tool bar.

Move the cursor into the graph

area and position it next to the
cursor boundary that is to be
moved. It appears as an arrow.

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b. As the track ball cursor approaches one of the active cursors, the cursor
header changes to appear indented and the track ball cursor appears as a
double arrow as shown in Figure 3.61.
Click and hold on the cursor that is to be moved. Drag it to the desired
position using the track ball to move it. Release the mouse button when the
cursor is in position.
2. When the cursor is in position, set each cursor boundary using the following
procedure:
a. Move the track ball cursor down into the black scan trace screen. The
boundary that the cursor arrow is pointing at is the one that moves. (See
Figure 3.64.)
b. Click and hold the mouse button while using the track ball to drag the
boundary into position for its intended measurement in the scan. Release
the mouse button when the boundary is correctly positioned.
c. Repeat Step 1 and Step 3 for the remaining cursor.
d. Click on the LEVEL button to level the trace.
Preliminary

3. When the trace has been leveled and the Measurement cursors have been placed,
click on Operations to display its menu.
4. When the trace has been leveled and the Measurement cursors have been placed,
click on the CALC button to cause the system to recalculate the data with new
cursor positions. The new positions are saved as part of the recipe. (See
Figure 3.65.)

Figure 3.65 Analysis Screen CALC Button

Step 4 Click on the CALC

button to recalculate the
data with new cursor
positions.

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The Recalculation process places the cursor limits in the Cursors window of
the Recipe Editor. (See Figure 3.66.)

Figure 3.66 Cursor Parameters - Recipe Editor

The limits of the cursor boundary

Cursor parameters (limits) are
are displayed in the X1 and X2
automatically changed when
columns for the various cursors.
the CALC button is clicked in
the Analysis screen (before
the data is saved). When this box is checked, the
feature takes on the “0” position
and the cursors are set with
negative numbers to the left and
positive to the right.

Preliminary
Relative to Feature Detected
When there is a check (9) in its checkbox, the cursor limits are set relative to the
feature that is defined in the Feature Detection parameters window in the Recipe
Editor. (See Feature Detection (Only for 2D Scans) on page 3-43.) The feature
becomes the 0 point (the origin of the new coordinate system), with the points to the
left being negative and those to the right being positive. (See Figure 3.67.)
The cursors are set in the same way described in Step 1 on page -55 through Step 3 on
page -56. The system automatically places the measurement and leveling cursors
relative to the actual feature instead of relative to the starting point of the scan.

NOTE: If Relative to Feature Detected is not checked, there should be

no negative numbers in any cursor position because the start of the
scan is the “0” point.

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Figure 3.67 Measurement Cursors - Relative to Feature Detection

In this illustration, with UpEdge chosen In this illustration, with UpEdge chosen
for Feature Detection, the left cursor limits for Feature Detection, the right cursor
would be -9 and -6. limits would be +0.3 and +4.

UpEdge
A trace of the Step
feature illustrated
above.

Trace distance
Preliminary

1 micron
(µm) -6 -1 0 1

If UpEdge is chosen as the Feature Detection point,

it becomes the zero coordinate. Everything to the left
is negative and to the right is positive.

Fit and Level

This option is designed to remove a secondary curvature from the overall trace of a
curved surface. Features should then appear relative to a flat surface.
Selecting the Fit and Level option
Š Click in the empty check box to put a check (9) in it.

Figure 3.68 Cursor Parameters - Recipe Editor

Click in the empty checkbox

to activate this feature.
9

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Median Filter for 2D and 3D Data

This filter can be chosen as part of the recipe to help filter out spikes from
environmental noise and particulate contamination. A median filter can be turned on
before the scan, allowing the system to filter the data before the first viewing. It can
also be used on saved data. With the data open in the Analysis screen, the saved data
from single scans and sequences can be changed by opening the recipe used to create
the scan from the Analysis screen, and changing the filter size in that recipe.
The median filter is used for both 2D and 3D data, with each type having its own
menu of kernel sizes for the filters being applied to the data. When the filter is applied
before the scan, the data is filtered and permanently changed.

Preliminary

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The median filter works as a smoothing tool, taking out glitches and smoothing the
trace surface in direct proportion to the size of the kernel. The median if found for the
effected points in the kernel and is applied to data. The larger the kernel, the greater
the smoothing effect on the data. In general, the smaller the kernel (i.e., the 1 x 3 for
2D and the 3 x 3 for 3D), the less the data is manipulated.

Figure 3.69 Median Filter Application in Glitch Removal

Preliminary

BEFORE APPLICATION 1 x 3 point median filter AFTER APPLICATION

before and after application
Notice how much smoother the 1 x 7
filter (below) made the scan than that of
the 1 x 3 filter (above).

BEFORE APPLICATION 1 x 7 point median filter AFTER APPLICATION

before and after application

The median filter is a major component of the Glitch Removal process used on data in
the Analysis screen for both 2D and 3D data. (See 2D Glitch Removal on page 8-40,
and Activate 3D Glitch Removal Tool. on page 9-17.)
The available filter sizes (kernels) for 2D data are: 1 x 3, 1 x 5, and 1 x 7 points.

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The available filter sizes (kernels) for 3D data are: 3 x 3, 5 x 5, and 7 x 7 points.
Set or Change Median To add a filter or change the filter size on existing data, use the following procedure:
Filters for Saved Data
1. From the Catalog Screen, with either the Scan Data or Sequence Data catalog
open, open the data set by double-clicking on it. The Analysis screen opens.
2. From the Analysis screen, click on Edit to display its menu.
3. Select Recipe. This opens the recipe used to generate the data.
4. Click on Filters/Cursors to display the Filters and Cursors parameters.
5. Click on the menu-arrow for either the 2D or 3D Median Filter to display the
options. (See ScFigure 3.70.)
6. Choose the required filter size for the 2D or 3D data.

Figure 3.70 2D and 3D Median Filter Options

2D Median Filter options.

Preliminary
3D Median Filter options

7. Click on the Analysis screen icon in the tool bar to return to the Analysis screen
for the affected data.
Setting Median Filter Prior To set the median filter for 2D or 3D scans, either single scan or for use in a
to a Scan or Sequence sequence, prior to using the recipe, choose the required median filter while setting the
other recipe parameters. If the recipe is already a part of a sequence, the recipe can
also be opened from the sequence and the median filter added or changed prior to
running the sequence.
For additional use of the median filter see 2D Glitch Removal on page 8-40, and
Activate 3D Glitch Removal Tool. on page 9-17.

Unit Output 3

Unit Output is designed to give the user an opportunity to determine units of output
for the parameters calculated and to set automatic crossover values for unit changes.
The options here let the user choose the units for the 2D graphical display through the
recipe that is used to generate the scan. This option does not change the internal
representation of data or the statistical parameters which continues to be in
Angstroms.

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1. Click on Unit Output in the Recipe screen window buttons to open the Unit
Output parameters dialog box. (See Figure 3.71.) This dialog box is where units
are chosen for statistical data and graphic presentation.

Figure 3.71 Recipe Screen with Unit Output Dialog Box

Click on Unit Output to

open its dialog box.
Preliminary

2. Choose the desired units for statistical data reporting and graphic presentation
by clicking to place a dot in the radio button. (See Figure 3.72.)
3. If one of the bottom two choices are made, the crossover value must be entered
in the variable field. (See Figure 3.72.)

Figure 3.72 Unit Output Dialog Box

Choose the desired unit

of output for graphics and
calculated parameters.
Make sure to enter the
crossover values if either
of the late two options are To accept changes, click
chosen. OK. To reject changes
and retain current
values, click Cancel.

4. Click OK when all changes are complete, to accept the new values.

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General Parameters 3

The General Parameters window contains a variety of surface analysis calculations

which are performed on the scan data when the options are chosen before the scan, or
if they are applied to the scan data after the original data has been saved.
For each surface analysis option chosen, a post scan calculation is performed and
displayed on the Analysis screen.

Figure 3.73 General Parameters - Recipe Editor

To display the General

Parameters options in the

Preliminary
Information Display window
of the Recipe Editor, click
on the General Parameters The 3D options are
button. only for 3D scans.
2D cannot be applied
to 3D scans.

The 2D options are only for

2D scans and are not
available for 3D scans.

To access the General Parameters window, click on the General Parameters

button in the Recipe Editor screen. (See Figure 3.73.)

2D General Parameters (Normal Trace) 3

These parameters represent calculations that are performed using the data from a
scan. If the options are chosen before the scan is performed, and are part of the scan
recipe, the calculations are automatically performed by the software and displayed in
the Analysis screen upon completion of the scan. Parameters from the 2D General
Parameters are for single trace analysis, and as such, are not available for 3D scan
data analysis. (See Analyzing 2D Scan Data on page 8-1.)

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Each parameter is discussed below. (See Figure 3.73.)

Figure 3.74 2D General Parameters

Each chosen parameter is

calculated and displayed in the
Analysis window.

To select a parameter, click in

the empty check box to place a
check in it. Every checkbox
with a check (9) in it has its
data displayed in the Analysis
screen.
Preliminary

To select all the parameters To remove all selected

for inclusion in the Analysis, parameters from inclusion in the
click Select All 2D. Analysis, click Remove All 2D.

Adding 2D General Parameters to the Analysis

Š In the 2D General Parameters options box, click in the checkbox of any option
(see Figure 3.79) to include them in the current recipe and display each data
value in the Analysis screen. A check (9) in the checkbox activates the
parameter.
Š Add all the 2D General Parameters to the Analysis by clicking Select All 2D at the
bottom of the list. This puts a check (9) in the checkbox of all parameters.
Š Remove all checked parameters from the 2D General Parameters by clicking
Remove All 2D at the bottom of the list. This removes all checks from any chosen
parameters

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Table 3.24 2D General Parameters

Parameter Description
Step Height (StpHt) The difference in height between the left and right measurement
cursors positions. Each cursor position is an average of the area
between the cursor boundaries. The difference is between
these averages.
Total Indicator Runout The difference between the highest and lowest points in the
(TIR) scan.
Average Height (Ave) The average height of all data points between the measurement
cursors relative to the leveled baseline. (ANSI)
Slope The ratio of the difference in vertical positions to the difference in
horizontal positions of the measurement cursors. The slope is
reported as an angle in degrees.

Preliminary
NOTE: The position of each cursor is taken
to be the horizontal midpoint of each delta
cursor band, and the data value at this
location is the average of the vertical values
within these bands. (ANSI)
Radius The distance from the center of curvature of the profile arc
(assuming a circular profile within the sampling length) to the
profile. The measurement cursors define two points of a circular
arc. A least squares calculation is performed on the points
between the cursors. The normal trace should not be leveled
unless definite level reference points exist.
Area of Peaks (Area+) The total area bounded by the leveled baseline and the profile
where it rises above the baseline. (ANSI)
Area of Valleys (Area-) The total area bounded by the leveled baseline and the profile
where it descends below the baseline. (ANSI)
Total Area (Area) The sum of Area of Peaks and Area of Valleys. The delta
cursors are not used. (ANSI)

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Table 3.24 2D General Parameters (Continued)

Parameter Description
Peak (Pp) Maximum Z value, measured relative to the leveled reference
line, between the left and right measurement cursors.
Valley (Pv) Minimum Z value, measured relative to the leveled reference
line, between the left and right measurement cursors.
Profile Length (ProfL) The length that would be obtained from drawing out the profile in
a straight line. (ANSI)
Distance to Edge (Edge) Depending on the parameters settings in Feature Detection,
this distance is either:
Š The distance between the beginning of the scan and
the first rising or falling edge of a profile feature; or
Š The distance between the beginning of the scan and
the first concave or convex arc of a profile feature.
NOTE: This parameter is independent of the
Preliminary

cursor positions. It is based on the feature

detection parameters.
Step Width (StpWt) The distance between the first rising edge of an upward step
and the falling edge that follows, or the first falling edge of a
downward step and the rising edge that follows. This value is
meaningless for a convex or concave arc.

3D General Parameters 3

These parameters represent calculations that are performed using the data from a
scan. Only three General Parameters exist for 3D scans. (See Figure 3.75.) If the
options are chosen before the scan is performed, and are part of the scan recipe, the
calculations are automatically performed by the software and displayed in the
Analysis screen upon completion of the scan. Parameters from the 2D General
Parameters are for single trace analysis and as such are not available for 3D scan data
analysis. The options can be applied to live or saved data.
Each parameter option can be calculated in two different ways:
Š Full Scale: With this checkbox selected, the parameter are calculated using data
from the entire scan.
Š Boxed: With this checkbox selected, the parameter are calculated using data
from within the box that is defined in the 3D Cursors parameters window of the
Recipe Editor. (See Figure 3.73.)
Either one or both calculation options can be used. If both are used, two sets of
calculations are performed and presented in the Analysis screen.

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Each parameter is discussed below.

Figure 3.75 3D General Parameters

To select a parameter for

inclusion in the Analysis, click
Full Scale for data from entire
scan or Boxed for only data
from enclosed cursors, or both
can be chosen.

Preliminary
To select all the parameters
for inclusion in the Analysis,
click Select All 3D. To remove all selected parameters
from inclusion in the Analysis, click
Remove All 3D.

Adding 3D General Parameters to the Analysis

Š In the 3D General Parameters options box, click in the checkbox of any option
(see Figure 3.75) to include them in the current recipe and display each data
value in the Analysis screen. A check (9) in the checkbox activates the
parameter.
Š Add all the 3D General Parameters to the Analysis by clicking Select All 3D at the
bottom of the list. This puts a check (9) in the checkbox of all parameters. (See
Figure 3.75)
Š Remove all checked parameters from the 3D General Parameters by clicking
Remove All 3D at the bottom of the list. This removes all checks from any chosen
parameters. (See Figure 3.75)

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Table 3.25 3D General Parameters

Parameter Description
Total Ind. Runout This is the 3D Total Indicator Runout. TIR3D is the difference
(TIR3D) between the highest and lowest points in the scan.
SlopeX SlopeX refers to the slopes for lines in the plane:
The SlopeX is the slope along the X-direction
For the data set in any rectangular area (either a box or the
entire area), a plane can be established using the least squares
method.
SlopeY SlopeY refers to the slopes for lines in the plane:
The SlopeY is the slope along the Y-direction
For the data set in any rectangular area (either a box or the
entire area), a plane can be established using the least squares
method.
Preliminary

Peak 3D (Sp) Maximum Z value, measured relative to the leveled reference

plane.
Valley 3D (Sv) Minimum Z value, measured relative to the leveled reference
plane.

Roughness and Waviness Parameters 3

Introduction 3

Roughness and Waviness are defined by the Long Wavelength Cutoff setting. In
general, when a long wavelength cutoff is set, the wavelengths greater than the cutoff
are defined as Roughness and those less than the cutoff are defined as Waviness.
(See Figure 3.76.) The long wavelength cutoff setting is generally determined by the
specific application for which it is to be used.
A filter is used to remove aspects of the data so other aspects can be more carefully
analyzed. As an example, the roughness could be filtered out so the waviness could be
better analyzed. (See Figure 3.77.)

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For applications where the user is unsure of a specific long wavelength cutoff, use the
general rule of 1/5 the scan length. This means that for a scan of 50 µm, the cutoff
would be 10 µm.

Figure 3.76 Waviness vs. Roughness

Wavelength Cutoff filter

Waviness Roughness

Preliminary
Figure 3.77 Roughness/Waviness Filter Analysis

Scan Trace
Before Filter.

Waviness with
Roughness
filtered out

Roughness with
Waviness filtered
out.

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Figure 3.78 shows the Recipe Editor with the Roughness and Waviness parameters in
the Information Display window.

Figure 3.78 Recipe Editor Showing 2D and 3D Roughness/Waviness Parameters

To display the Roughness

and Waviness parameters in
the Recipe Editor parameters
window, click on the
Roughness/Waviness
button.
Preliminary

Roughness/Waviness
parameters in the Information
Display window.

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2D Roughness Parameters 3

Figure 3.79 2D Roughness Parameters Options

When chosen, the data

corresponding to each
parameter is displayed in the
Analysis screen.

To have the software

These parameters can be
calculate any of these
applied to a scan after it is
parameters, click in the
complete and before the data is
checkbox to put a check
saved. If the parameters are
(9) in it and activate it.
saved as part of the scan recipe,
they are automatically used.
To select all the

Preliminary
parameters for inclusion
in the Analysis, click To remove all selected
Select All Roughness. parameters from inclusion in the
Analysis, click Remove All
Roughness.

Each of the roughness parameters available in the 2D Roughness Parameters option

box are described in Table 3.26 on page 3-74. (For more information Roughness, see
the Introduction to Roughness and Waviness Parameters on page 3-70.)

Adding 2D Roughness Parameters to the Analysis

Š In the 2D Roughness Parameters options box, click in the checkbox of any
option (see Figure 3.79) to include them in the current recipe and display each
data value in the Analysis screen. A check (9) in the checkbox activates the
parameter.
Š Add all the 2D Roughness Parameters to the Analysis by clicking Select All
Roughness at the bottom of the list. This puts a check (9) in the checkbox of all
parameters.
Š Remove all checked parameters from the 2D Roughness Parameters by clicking
Remove All Roughness at the bottom of the list. This removes all checks from
any chosen parameters.

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2D Roughness Parameters Table

Table 3.26 2D Roughness Parameters

Parameter Description
Average (Ra) This is the arithmetic average deviation of the absolute
values of the roughness profile from the mean line or
centerline. Also known as centerline average roughness.
The centerline divides profiles such that all areas above it
are equal to all areas below it. (ANSI)
Maximum Ra (Max Ra) The trace within the cursors is divided into nineteen
overlapping sections. Each section is one-tenth of the
sampling length. The Ra of each section is calculated, and
the maximum is displayed. (ANSI)
RMS (Rq) The Root-Mean-Square (RMS) or geometric average
deviation of the roughness profile from the mean line
measured in the sampling length. (ANSI)
Peak (Rp) The distance between the mean line and the highest peak
Preliminary

within the sampling length. (ANSI)

Valley (Rv) The distance between the mean line and the lowest valley
within the sampling length. (ANSI)
Peak/Valley (Rt) The vertical distance between the highest peak and the
lowest valley in the sampling length leveled on the mean
line. (Also known as Rmax, Ry, Maximum Peak-to-Valley
Roughness.) (ANSI)
Height 10pt (Rz) The average height difference between the five highest
peaks and the five deepest valleys within the cursors
measured from a line parallel to the mean line. (ANSI)
Height 6pt (R3z) The average height difference between the three highest
peaks and the three deepest valleys in the sampling
length measured from a line parallel to the mean line and
not crossing the profile. (ANSI)

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Table 3.26 2D Roughness Parameters (Continued)

Parameter Description
Roughness Height (Rh) The difference in height in the roughness profile between
the left and right cursor positions. Analogous to the Height
data that always appears in the Summary box of the
Analysis window. (ANSI)
Mean Peak Height (Rpm) The mean value of the local peak heights relative to the
mean line of the roughness trace within the sampling
length.
RMS Slope (Dq) The root mean square (RMS) value of the roughness trace
slope. The Delta cursors are not used.
RMS Wavelength (Lq) 2π times the ratio of the root mean square (RMS) deviation
of the profile (Rq) to the root mean square slope of the
profile (Dq). Lq is a measure of the spacing of local peaks
and local valleys, taking into account their relative

Preliminary
amplitudes and individual spatial frequencies. (ISO
International Standards Organization)
Std. Dev. Height (SD) The standard deviation of the local peak heights about the
mean peak height relative to the mean line within the
sampling length.

2D Waviness Parameters 3

Figure 3.80 2D Waviness Parameters

When chosen, the data

To have the software corresponding to each
calculate any of these parameter is displayed in the
parameters, click in the Analysis screen.
checkbox to put a check
(9) in it and activate it. These parameters can be
applied to a scan after it is
complete and before the data is
saved. If the parameters are
saved as part of the scan recipe,
they are automatically used.

To select all the

parameters for inclusion
in the Analysis, click To remove all selected
Select All Waviness. parameters from inclusion in the
Analysis, click Remove All
Waviness.

Each of the waviness parameters available in the 2D Waviness Parameters option box

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is described in Table 3.27 on page 3-76. (For more information Waviness, see the
Introduction to Roughness and Waviness Parameters on page 3-70.)

Adding 2D Waviness Parameters to the Analysis

Š In the 2D Waviness Parameters options box, click in the checkbox of any option
(see Figure 3.80) to include them in the current recipe and display each data
value in the Analysis screen. A check (9) in the checkbox activates the
parameter.
Š Add all the 2D Waviness Parameters to the Analysis by clicking Select All
Waviness at the bottom of the list. This puts a check (9) in the checkbox of all
parameters.
Š Remove all checked parameters from the 2D Waviness Parameters by clicking
Remove All Waviness at the bottom of the list. This removes all checks from any
chosen parameters.

2D Waviness Parameters Description

Preliminary

Table 3.27 2D Waviness Parameters

Parameter Description
Average (Wa) This is the arithmetic average deviation of the absolute
values of the waviness profile from the mean line or
centerline also known as centerline average waviness).
The centerline divides profiles such that all areas above it
are equal to all areas below it. (ANSI)
RMS (Wq) The Root-Mean-Square (RMS) or geometric average
deviation of the waviness profile from the mean line
measured in the sampling length. (ANSI)
Peak (Wp) The distance between the mean line and the highest peak
within the sampling length. (ANSI)
Valley (Wv) The distance between the mean line and the lowest valley
within the sampling length. (ANSI)
Peak/Valley (Wt) The vertical distance between the highest peak and the
lowest valley in the sampling length leveled on the mean
line. Also known as Wmax, Wy, Maximum Peak-To-Valley
Waviness. (ANSI)
Waviness Height (Wh) The difference in height in the waviness profile between
the left and right cursor positions. Analogous to the Height
data that always appears in the Summary box of the
Analysis window. (ANSI)

3D Roughness Parameters 3

Each of the roughness parameters available in the 3D Roughness Parameters option

box is described in Table 3.28 on page 3-78. (For more information Roughness, see
the Introduction to Roughness and Waviness Parameters on page 3-70.)

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Add 3D Roughness Parameters to Analysis

Š In the 3D Roughness Parameters options box, click in the checkbox of any
option (see Figure 3.81) to include them in the current recipe and display each
data value in the Analysis screen. A check (9) in the checkbox activates the
parameter.
Š Add all the 3D Roughness Parameters to the Analysis by clicking Select All 3D at
the bottom of the list. This puts a check (9) in the checkbox of all parameters.
Š Remove all checked parameters from the 3D Roughness Parameters by clicking
Remove All 3D at the bottom of the list. This removes all checks from any chosen
parameters.

Figure 3.81 3D Roughness Parameters

When chosen, the data

corresponding to each

Preliminary
parameter is displayed in the
Analysis screen.
Either or both of the options
for each parameter can be Although these parameters can
chosen. To have the be applied to a scan after it is
software calculate any of complete and before the data is
these parameters, click in saved, if the parameters are
the checkbox to put a check chosen as part of the recipe
(9) in it and activate it. being used to perform the scan,
they are automatically included
and can be accessed any time
To select all the parameters in the future.
for inclusion in the Analysis,
click Select All 3D.
To remove all selected
parameters from inclusion in the
Analysis, click Remove All 3D.

Each parameter option can be calculated in two different ways:

Š Full Scale: With this checkbox selected, the parameter are calculated using data
from the entire scan.
Š Boxed: With this checkbox selected, the parameter are calculated using data
from within the box that is defined in the 3D Cursors parameters window in the
Recipe Editor. (See Figure 3.73.)

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Table 3.28 3D Roughness Parameters

Parameter Description
RMS Deviation (Sq) Root-Mean-Square Deviation of the Surface. The
root-mean-square value of the surface departures within the
sampling area.
Arithmetic Mean Arithmetic Mean Deviation of the Surface. The arithmetic mean of
Deviation (Sa) the absolute values of the surface departures above and
below the mean plane within the sampling area.
Skewness (Ssk) The measure of asymmetry of surface deviations about the
mean plane. It effectively describes the shape of the surface
height distribution.
Kurtosis (Sku) A measure of the peakedness or sharpness of the surface
height distribution. It characterizes the spread of the height
distribution.
Preliminary

RMS Slope (Sdelta q) The root-mean-square value of the surface slope within the
sampling area. RMS slope is sensitive to sampling rate.
Ten Point Height (Sz) The average value of the absolute heights of the five highest
peaks and the depths of the five deepest pits or valleys within
the sampling area.
Density of Summit The number of summits of a unit sampling area.
(Sds)

Interfacial Area Ratio The ratio of the increment of the interfacial area of a surface
(Sdr) over the sampling area. The Interfacial Area Ratio reflects the
hybrid property of surface.

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Bearing Ratio and Cutting Depth 3

Access the Bearing Ratio and Cutting Depth Information Display window by clicking
the Bearing Ration/Cutting Depth button in the Recipe Editor. (See Figure 3.82.)

Figure 3.82 Bearing Ration and Cutting Depth Parameters

To display the Bearing Ration

and Cutting Depth
parameters, click on the
Bearing Ratio/Cutting Depth
button.

Preliminary
Notice that none of the variable
boxes are active until they are
activated by putting a check (9)
in the checkbox next to them.

Bearing Ratio (tp) 3

Bearing Ratio is also know as Bearing Length Ratio (tp). ANSI defines it as:

Bearing Length Ratio (tp) and Others. A reference line is drawn parallel to
the mean line and at a preselected or predetermined distance from it to intersect
the profile in one or more subtended lengths. The bearing length ratio is the ratio
of the sum of these subtended lengths to the length of the mean line.

Figure 3.83 Bearing Ratio

Highest point Bearing Ratio = S1 + S2.

in the scan. S1 S2

Cutting Depth or Depth

Reference Line: Set a

number of µm or Å down
from the highest point. L
(Sampling Length)

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The Bearing Ratio is determined according to the following formula:

S1 + S2
tp = L

The bearing length is the sum of the subtended lengths (S1 and S2 in Figure 3.83).
The bearing ratio is the ratio of the bearing length to the sampling length (L in
Figure 3.83) as shown in the above formula.

Setting the 2D Bearing Ratio

Use the following procedure to set the 2D Bearing Ratio variables.
1. The option exists to create three 2D bearing ratio parameters. Click in up to
three empty checkboxes to put a check (9) in them and activate their variable
boxes. (See Figure 3.84.)

Figure 3.84 2D Bearing Ratio

Preliminary

Step 3 Set the Units. To

change the current units,
Step 1 Click in up to three click on the menu arrow
checkboxes to activate their and click on the desired
respective variable boxes. A unit signifier, µm or Å.
check (9) indicates that it is
Step 4 Double-click in the
active.
variable box and type in the
new Depth.

2. The depth is set down from the highest peak in the scan. It can be set in either
microns (µm) or angstroms (Å). Determine which units are going to be used and,
if a change is necessary, click on the menu arrow under units to display its menu.
3. Click on the desired unit signifier, µm or Å.
4. Depth is the distance down from the top of the highest point in the scan. To set or
change the Depth, double-click on the current Depth variable and type in the new
depth. (See Figure 3.85.)

Figure 3.85 Depth

Highest point
in the scan. S1 S2

Depth

Depth: Set a number of

µm or Å down from the
highest point. L
(Sampling Length)

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2D Cutting Depth (CutDp) 3

Cutting Depth is related to Bearing Ratio in that Bearing Ratio uses an operator set
depth from the top peak in the scan, adding up the points between the top peak and the
set depth, while Cutting Depth uses an operator set ratio of data points in the scan that
are below the highest peak in the scan, causing the system to determine the depth.
(See the definition of Bearing Length Ratio in Bearing Ratio (tp) on page 3-79.)

Figure 3.86 2D Cutting Depth (CutDp)

Step 1 Click in up to three Step 2 To change or set the

checkboxes to activate ratio, double-click in the
their respective variable variable box and type in a
boxes. A check (9) number between 0 and 1.00.
indicates that it is active. Every box with a check must
have its own ratio.

Preliminary
Use the following procedure to set the 2D Cutting Depth variables.
1. The option exists to create three 2D cutting depth parameters. Click in up to
three empty checkboxes to put a check (9) in them and activate their variable
boxes. (See Figure 3.86.)
2. The Cutting Depth is a ratio of points below the highest peak in the scan. The
operator chooses the ratio and the software automatically takes the that ratio of
data points in the scan that are the closest to the highest peak and calculates the
Cutting Depth (CutDp) variable, displaying the results in the Analysis screen.
EXAMPLE:
If the user want to calculate a set of parameters comparing 20%, 30%, and
40% cutting depth, all three check boxes are checked and the respective
variable boxes have: 0.20, 0.30, and 0.40 in them.
To set or change one or more of the Cutting Depth variables, double-click on
the number in the variable field so that it highlights, and type in the new ratio.
(See Figure 3.86.)

Figure 3.87 Cutting Depth

Highest point
in the scan. S1 S2

Cutting Depth

Cutting Depth: The Ratio

(percentage) of points
closest to the highest point L
in the scan, calculated by
(Sampling Length)
the system.

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3D Bearing Ratio (Sbi) 3

The 3D Bearing Ratio is a 3D version of the 2D Bearing Ratio in that it uses a

distance down from the highest point in the scan to compute a bearing ratio with
respect to a plane instead of area with respect to a single line trace.
In addition, two options are available for each of three parameter settings for
calculating the 3D Bearing Ratio. The scope of the calculation is set by clicking in
one or both of the range boxes: Full Scale and Boxed. The depth can then be set.
Full Scale - This option performs a calculation of the 3D Bearing Ratio over the
entire scan.
Boxed - This option performs a calculation of the 3D Bearing Ratio over the
portion of the scan within the box that is defined in the 3D cursors parameters
window. (See Figure 3.88.)
Use the following procedure to set the 3D Bearing Ratio variables.
1. To chose the scope of the 3D Bearing Ratio calculation, click in the empty
checkbox to activate the variable field and place it in the recipe. Either or both
Preliminary

options can be chosen.

Choose up to three sets of calculations with different depths. If all boxes are
checked, two calculations are performed for each of the three variable depths.

Figure 3.88 3D Bearing Ratio (Sbi)

Step 3 Set the Units. To

Step 1 The 3D Bearing Ratio change the current units,
variables become active when click on the menu arrow
there is a check in one or both and click on the desired
of the calculation scope check unit signifier, µm or Å.
boxes. If both are checked, two
calculations are made for each Step 4 Double-click in the
established depth. variable box and type in the
new Depth.

2. The depth is set down from the highest peak in the scan. It can be set in either
microns (µm) or angstroms (Å). Determine which units are going to be used and,
if a change is necessary, click on the menu arrow under units to display its menu.
3. Click on the desired unit signifier, µm or Å.
4. The Depth is the distance down from the top of the highest point in the scan. To
set or change the Depth, double-click on the current Depth variable and type in
the new depth.

3D Material Volume (Vm) 3

The 3D Material Volume is a 3D version of the 2D Cutting Depth Ratio. It is set by

using a ratio (percentage) of the overall data points below the highest peak in the scan
to compute a material volume (Vm) with respect to a plane instead of area with
respect to a single line trace.

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In addition, two options are available for each of three parameter settings for
calculating the 3D Material Volume. The scope of the calculation is set by clicking in
one or both of the range boxes: Full Scale and Boxed. The depth can then be set.
Full Scale - This option performs a calculation of the 3D Bearing Ratio over the
entire scan.
Boxed - This option performs a calculation of the 3D Bearing Ratio over the
portion of the scan within the box that is defined in the 3D cursors parameters
window. (See Figure 3.89)
Use the following procedure to set the 3D Material Volume variables.
1. To choose the scope of the 3D Material Volume calculation, click in the empty
checkbox to activate the variable field and place it in the recipe. Either or both
options can be chosen.
Choose up to three sets of calculations with different depths. If all boxes are
checked, two calculations are performed for each of the three variable depths.

Preliminary
Figure 3.89 3D Material Volume

Step 3 Set the Units. To

Step 1 The 3D Material Volume change the current units,
variables become active when click on the menu arrow
there is a check in one or both of and click on the desired
the calculation scope check unit signifier, µm or Å.
boxes. If both are checked, two
calculations are made for each Step 4 Double-click in the
established depth. variable box and type in the
new Depth.

2. The depth is set down from the highest peak in the scan. It can be set in either
microns (µm) or angstroms (Å). Determine which units are going to be used and,
if a change is necessary, click on the menu arrow under units to display its menu.
3. Click on the desired unit signifier, µm or Å.
4. The Depth is the distance down from the top of the highest point in the scan. To
set or change the Depth, double-click on the current Depth variable and type in
the new depth.

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High Spot Count and Peak Count 3

Access the High Spot Count and Peak Count Display Window by clicking the High
Spot Count/Peak Count button in the Recipe Editor. (See Figure 3.90.)

Figure 3.90 Bearing Ratio and Cutting Depth Parameters

To display the High Spot

Count and Peak Count
parameters, click on the High
Spot Count/Peak Count
button.
Preliminary

High Spot Count (HSC) 3

High Spot Count is the number of profile peaks per unit of length projecting through a
reference line parallel to and at a given height above, a line drawn parallel to the mean
line through the lowest point of the roughness trace. (See Figure 3.91).
The mean line is the line at the mean height of all data. Another line is drawn through
the lowest point in the trace, parallel to the mean line. The reference line is at a user
specified height above the lowest point line.

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Projecting through means that the profile curve first climbs above the reference line
and then falls below it. Thus, if the profile rises above the reference line, descends
without falling below it, then rises again, multiple peaks are not identified.

Figure 3.91 High Spot Count

1 count 1 count 1 count 1 count

Reference Line

Lowest point of roughness trace

Preliminary
Use the following procedure to set the 2D High Spot Count variables.
1. The option exists to create three 2D High Spot Count parameters. Click in up to
three empty checkboxes to put a check (9) in them and activate their variable
boxes. (See Figure 3.92.)

Figure 3.92 2D High Spot Count (HSC)

Step 3 Set the Units. To

change the current units,
Step 1 Click in up to three click on the menu arrow
checkboxes to activate and click on the desired
their respective variable unit signifier, µm or Å.
boxes. A check (9) Step 4 Double-click in the
indicates that it is active. variable box and type in the
new Height.

2. The height can be set in either microns (µm) or angstroms (Å). Determine which
units are going to be used and, if a change is necessary, click on the menu arrow
under units to display its menu.
3. Click on the desired unit signifier, µm or Å.
4. The Height is the distance up from the lowest point of the roughness trace.
To set or change the Height, double-click on the current Height variable and
type in the new height. (See Figure 3.92.)

2D Mean Spacing Sm (1/HSC) 3

Mean Peak spacing is the mean value of the local peak spacing of the profile within
the sampling length. The peaks for High Spot Count are defined by the Height
parameter from the High Spot Count window. Spacing is the inverse of the count.

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It is important to note that the 2D High Spot Count (HSC) and the 2D Mean Spacing Sm
(1/HSC) are related. If running a scan in which these values are to be compared, the
height of both must be identical for the data to have direct correlation.
Use the following procedure to set the 2D Mean Spacing Sm variables.
1. The option exists to create three 2D Mean Spacing Sm parameters. Click in up
to three empty checkboxes to put a check (9) in them and activate their variable
boxes. (See Figure 3.93.)

Figure 3.93 2D Mean Spacing Sm (1/HSC)

Step 3 Set the Units. To

change the current units,
Step 1 Click in up to three click on the menu arrow
checkboxes to activate and click on the desired
their respective variable unit signifier, µm or Å.
boxes. A check (9) Step 4 Double-click in the
indicates that it is active. variable box and type in the
Preliminary

new Height.

2. The height can be set in either microns (µm) or angstroms (Å). Determine which
units are going to be used and, if a change is necessary, click on the menu arrow
under units to display its menu.
3. Click on the desired unit signifier, µm or Å.
4. The Height is the distance up from the lowest point of the roughness trace. In
most scans, this value is compared to High Spot Count (HSC) so this height
must be identical to the Height in High Spot Count (HSC).
To set or change the Height, double-click on the current Height variable and
type in the new height. (See Figure 3.93.)

2D Peak Count (PC) 3

Peak Count is the number of peak and valley pairs per unit length projecting through
a band of width b centered about the mean line. (See Figure 3.94.)
The Mean line is the line at the mean height of all data. The band is the area bounded
by two lines running parallel to the mean line, at an equal distance from the mean line.

Figure 3.94 Peak Count

1 count 1 count 1 count

The boundary lines

are defined by the
band width entered in b
the Peak Count
Band variable box.
Mean Line

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Use the following procedure to set the 2D Peak Count variables.

1. The option exists to create three 2D Peak Count bandwidth settings. Click in up
to three empty checkboxes to put a check (9) in them and activate their variable
boxes. (See Figure 3.95.)

Figure 3.95 2D Peak Count (PC)

Step 3 Set the Units. To change the

current units, click on the menu arrow
Step 1 Click in up to three and click on the desired unit signifier,
checkboxes to activate µm or Å.
their respective variable
boxes. A check (9) Step 4 Double-click in the variable
indicates that it is active. box and type in the new Bandwidth.

2. The bandwidth can be set in either microns (µm) or angstroms (Å). Determine

Preliminary
which units are going to be used and, if a change is necessary, click on the menu
arrow under units to display its menu.
3. Click on the desired unit signifier, µm or Å.
4. The Band is the bandwidth surrounding the mean line. (See Figure 3.94.)
To set or change the Band, double-click on the current Band variable and type
in the new bandwidth. (See Figure 3.95.)

2D Mean Spacing Sm (1/PC) 3

Mean Peak spacing is the mean value of the local peak spacing of the profile within
the sampling length. The peaks for Peak Count are defined by the Band (bandwidth)
parameter from the Peak Count (PC) window. Spacing is the inverse of the count.
(See Figure 3.94.)
It is important to note that the 2D Peak Count (PC) and the 2D Mean Spacing Sm (1/PC)
are related. If running a scan in which these values are to be compared, the bandwidth
of both must be identical for the data to have direct correlation.
Use the following procedure to set the 2D Mean Spacing Sm
1. The option exists to create three 2D High Spot Count parameters. Click in up to
three empty checkboxes to put a check (9) in them and activate their variable
boxes. (See Figure 3.96.)

Figure 3.96 2D Mean Spacing Sm (1/PC)

Step 3 Set the Units. To change the

current units, click on the menu arrow
Step 1 Click in up to three and click on the desired unit signifier,
checkboxes to activate µm or Å.
their respective variable
Step 4 Double-click in the variable
boxes. A check (9)
box and type in the new Bandwidth.
indicates that it is active.

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2. The bandwidth can be set in either microns (µm) or angstroms (Å). Determine
which units are going to be used and, if a change is necessary, click on the menu
arrow under units to display its menu.
3. Click on the desired unit signifier, µm or Å.
4. The Band is the bandwidth bordered equidistant above and below the mean line
of the scan. In most scans, this value is compared to Peak Count (PC) so this
Band (bandwidth) must be identical to the Band in Peak Count (PC).
To set or change the Band, double-click on the current Band variable and type
in the new bandwidth. (See Figure 3.96.)

3D Cursors Parameters 3

Introduction 3

The 3D Cursors screen is designed to allow the user to view the cursor coordinates,
and manipulate the cursor position and boundaries by coordinate. (See Figure 3.97.)
Those who frequently use 3D cursors have found it more accurate to drag and drop
Preliminary

the cursor boundaries rather than attempt to pin point them using the 3D Cursors
window.
If necessary, it is possible to drag the cursor boundaries and then go into the 3D
Cursors screen and fine tune the boundary settings. Fine tuning is, however, seldom
done. In general, the 3D Cursors screen is only used as a reference screen.

X Start Level 3

This option is used to level the 3D scan with respect to the X starting position of the
scan. It assumes that the entire X=0 length of the scan is on the same plane, having no
holes or steps. If this box is checked, the other options are not used in the leveling
process. This option only levels in one direction, with respect to the X=0 plane.
Initializing X Start Level To activate the X Start Level option, click in the empty checkbox next to X Start Level.
(See Figure 3.97.)
Leveling Criteria The 3D scan progresses with each initial trace data point being used for the scan
leveling in the Y direction (using the X=0 point of each scan trace).

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Figure 3.97 Recipe Editor - Choosing 3D Cursors

Click to put a check

in the check box to
activate the X Start
To open the 3D Cursors Level.
window, click on 3D Cursors.
If this button is not displayed
on the screen, the recipe
type is set to 2D recipes.

Preliminary
3D Leveling Cursor (µm) 3

The 3D Leveling Cursor field presents the option to define the three boxes that are
used in the three-point leveling procedure. (See Figure 3.98.) This option is used by
the system for leveling if neither the X Start Level nor the Auto Level checkboxes are
checked. Each horizontal row of coordinates, called a vertex (after the old single point
procedure that was used in the past), actually defines a box surrounding a set of data
points. To be accurately used in the data leveling procedure, each box must contain
only data points on the same plane. All three boxes must be located on the same plane
to accurately level the data.

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Setting the Cursors: Click-and-Drag

Click-and-Drag Cursor If the tool bar’s Activate Leveling Tool button icon was used to place the
Positioning leveling cursors on the scan image, then it is possible to click-and-drag the boxes to
the best positions for leveling purposes. After being positioned, they can be sized to
include only the proper data. It is essential that each box contain data from only one
plane, no steps or holes. All three boxes must contain data from the same plane. (See
Figure 3.98.)

Figure 3.98 Three Point Leveling Showing Leveling Boxes

Notice that leveling on one

plane is difficult for the
illustrated sample. Only one
box contains data residing
on only one plane.
Preliminary

The other two boxes would

require adjustment in size so
only the level represented
by the lighter color is
included in their boundaries.

After the boxes are positioned properly, with the content in all three boxes being on
the same plane, leveling can take place. When the leveling is complete and saved, the
coordinates of each one are recorded in the Plane Leveling boxes. (See Figure 3.98.)
Each set of coordinates correspond to a box and are labeled with Box 1 being
represented by Vertex 1, and so on with Boxes 2 and 3. (For more information on 3D
leveling, see Activate Leveling Tool on page 9-15 in the 3D Analysis chapter.)

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The coordinates are as follows: (See Figure 3.99.)

Left – This corresponds to the left side of the cursor box and is the X coordinate
of that location. (See Figure 3.98.)
Right – This corresponds to the right side of the cursor box and is the X
coordinate of that location. (See Figure 3.98.)
Top – This corresponds to the top of the cursor box and is the Y coordinate of
that location. (See Figure 3.98.)
Bottom – This corresponds to the bottom of the cursor box and is the Y
coordinate of that location. (See Figure 3.98.)

Figure 3.99 Vertex Identification

Left Right
X coordinate X coordinate Video image of the
object to be leveled.

Preliminary
Top
Y coordinate

Bottom
Y coordinate
One of the three leveling boxes identified
with the Vertex in Plane Leveling window.
The location of the box sides are identified.

X=0 µm
Y=0 µm

Setting the Cursors: Enter Coordinates in 3D Cursor Window

Cursor Positioning by It is possible, for certain types of 3D production scans, to preset the 3D cursors for
Manually Setting the repetitive scans by entering the coordinates in the respective boxes. This works better
Coordinates with scans where most of the scan surface is on the same plane and the features being
scanned are located far enough away from other features to allow preset leveling. Use
the X and Y screen coordinates, with X=0, Y=0 being the bottom left corner of the
scan area. (See Figure 3.99.) Enter the number for each coordinate in the
corresponding Vertex variable box. (See Figure 3.100.)

NOTE: It is difficult to place these exactly by simply entering a

number. It might require entering the number and observing the results
several times to correctly position the cursor.

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Figure 3.100 Matching Leveling Box and Cursor Locations

Left Right
X coordinate X coordinate

Top
Y coordinate

Bottom
Y coordinate
Preliminary

X=0 µm
Y=0 µm

Line by Line Leveling 3

Line by line leveling was a feature for optical scans only. It is not available in the
current systems.

Figure 3.101 3D Leveling Cursor

The Line By Line

Leveling is not available
in the current systems.

Auto Level

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3D Measurement Cursor 3

The 3D measurement cursor is used to isolate an area of the scan, from which the
measurements designated in the recipe for inclusion in the Analysis data (such as
some of the parameters in General Parameters on page 65 and Roughness and
Waviness Parameters on page 70), can be reported. If no numbers are entered in the
3D Measurement Cursor variable boxes to define the measurement area, the data is
compiled for the entire scan area.

Figure 3.102 3D Measurement Cursor Box

Preliminary
Setting the Cursors: Click and Drag
Cursor Positioning Using The 3D Measurement Cursor box is associated with the Activate Height Tool button
Click-and-Drag
in the Analysis screen tool bar. In the Analysis screen, if the Activate Height
Tool button is clicked on, a box appears that can be resized and moved using the
click-and-drag method. As the box is drug around the scan image, the height of all
data points in the box is averaged with respect to sample plane and reported under
Height in the analysis statistics at the left side of the screen.
Set the Box Position in the After the box is sized and positioned, its position can be entered in the 3D
3D Measurement Cursor Measurement Cursor variable boxes.
Variable Boxes
1. Click on the CALC icon in the toolbar or click on Operations in the menu bar
2. Choose Recalc, to recalculate the parameters and place the cursor locations in
the 3D Measurement Cursor variable boxes.

Setting the Cursors: Manually Entering Coordinates

Manually setting the cursors is accomplished by entering the coordinate position of
the intended measurement box (Active Height Tool) directly into the 3D Measurement
Cursors variable boxes. The coordinates work as follows:

Left – This corresponds to the left side of the cursor box and is the X coordinate
of that location. (See Figure 3.103.)
Right – This corresponds to the right side of the cursor box and is the X
coordinate of that location. (See Figure 3.103.)
Top – This corresponds to the top of the cursor box and is the Y coordinate of
that location. (See Figure 3.103.)
Bottom – This corresponds to the bottom of the cursor box and is the Y
coordinate of that location. (See Figure 3.103.)

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Figure 3.103 Matching Measurement Cursor Position to Measurement Box

Left Right
X coordinate X coordinate

Top
Y coordinate

Bottom
Y coordinate
Preliminary

X=0 µm
Y=0 µm

3D Step Height Cursors 3

The 3D Step Height Cursors are two variable boxes that are designed to capture data
on two planes and calculate the average difference in the height between them. For
accurate results, all of the data in a cursor box should be on the same plane. In this
way, the difference between the data in the two boxes is the average difference
between the height of the two planes being measured.

Figure 3.104 3D Step Height Cursor Parameters

Setting the Cursors: Click and Drag

Cursor Positioning Using The 3D Step Height Cursor boxes are associated with the Activate Step Height Tool
Click-and-Drag
button in the Analysis screen tool bar. In the Analysis screen, if the Activate
Step Height Tool button is clicked on, two boxes appear that can be resized and
moved using the click-and-drag method. As the boxes are drug around the scan
image, the height of all data points in the box is averaged with respect to sample plane
and reported under one of the height measurements (depending on which cursor box
is being moved) in the analysis statistics at the left side of the screen.

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1. If the view of the sample surface is not from the top, click View in the menu bar
to display it menu.
2. Choose Top from the View menu.
3. To determine the step height in the Analysis screen, the system subtracts the Z
value of Box 1 from the Z value of Box 2. The Left box, in the 3D Cursors
window, correlates to Box 1 in the Analysis screen. This box should be placed on
the lowest plane. Click in the center of Box 1 and drag it to the base plane.

NOTE: If Box 1 is placed on the step plane instead of the base plane,
the height reading is given as a negative number.

4. Resize the box to the proper dimensions to avoid artifacts and keep it separate
from other planes.
5. Click in the center of Box 2 and drag it to the step plane.
6. Resize the box to the proper dimensions to avoid artifacts and keep it separate

Preliminary
from other planes (like step edges or slopes).
Set the Box Position in the After the box is sized and positioned, its position can be entered in the 3D
3D Step Height Cursors Measurement Cursor variable boxes (see Figure 3.104) using the following
Variable Boxes procedure.
1. Click on the CALC icon in the tool bar, or to use the menu option on Operations
in the menu bar to display its menu.
2. From the Operations menu, choose Recalc.
Both methods recalculate the parameters and place the cursor locations in the
3D Measurement Cursor variable boxes.

SETUP ANALYSIS TOOLS 3

This tool has two purposes that are used in the Analysis of the gathered data.
Š First, the leveling of the data is accomplished based on a choice of data to be
used as a leveling basis.
Š Second, the data is compiled as a histogram for comparison of feature depth in
the scan.
The parameters available in this window work on already accumulated data.
Therefore, the parameters can be adjusted and recalculated over and over again on the
same data to help analyze the scan results.
Both the leveling and the depth analysis histogram are discussed in this section.

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Leveling Reference 3

The system offers three data planes to choose from for leveling the scan data. (See
Figure 3.105.) The three options are:
Š Most Populous Plane
Š Highest Plane
Š Lowest Plane
The leveling takes place based upon the data points identified in one of the three data
distribution planes identified above. The planes are associated with modes that are
defined as a bin or group of bins that hold a significant number of data points. The
total Z-axis distance of the scanned object is divided up into equal Z-axis portions
called bins.

Figure 3.105 Setup Analysis Tools – Leveling Reference

The Leveling Reference

options are displayed by
Preliminary

clicking on the menu arrow

in the Leveling Reference
field.

The data bins form a histogram generated by the scan data. The contents of the bins
are set using the parameters displayed directly below the Leveling Reference variable
box in the Setup Analysis Tools dialog box. The parameters are:
Š Number of Bins
Š % for qualifying neighboring bins

Number of Bins
Bins are actually ranges in the Z scan height. The total Z scan height is divided by the
number of Bins chosen. Each bin presents the number of data points collected in its
range, as compiled from data collected across the entire scan length.

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Percentage (%) for Qualifying Neighboring Bins

While it is possible to set up the bin distribution so that the points are clearly
distributed in single bins, not spread over several bins, it is more likely that
neighboring bins contain data points that, when taken together, constitute a mode.
(See Figure 3.106.)

Figure 3.106 Data Point Distribution in Bins

Z Max Z Max

Z Mid
Z Mid

Preliminary
Z Min Z Min

Scan A Scan B

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In Figure 3.106, Scan A shows that the major distribution of points lie clearly in Z
Min, Z Mid, and Z Max. The histogram of this distribution would be clearly presented
in three ranges. However, in Scan B, the distribution for the Z Mid is between two
bins. One bin near the center has 9 data points while its neighbor has 5 points. The
user might want this distribution of points to be considered together as a mode. This is
where the Percentage for Qualifying Neighboring Bins is used.

Figure 3.107 Histograms of Scans A and B

20
18
points in each bin.

16
Number of data

14
Scan A 12
10
8
6
4
2
Preliminary

Bin Number 1 2 3 4 5 6 7 8 9 10 11 12 13
Z Min Z Mid Z Max
Lowest Plane Most Populous Plane Highest Plane
20
18
points in each bin.

16
Number of data

Scan B 14
12
10
8
6
4
2

Bin Number 1 2 3 4 5 6 7 8 9 10 11 12 13
Z Min Z Mid Z Max
Lowest Plane Most Populous Plane Highest Plane

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The user can set a percentage factor such that, if the bin containing the most data
points (reference bin) has a neighboring bin that contains the user set percentage of
the number of data points in the reference bin, it is also considered as part of the same
mode and used in the leveling procedure.
EXAMPLE:
Using Figure 3.106, Scan B, if the user chose Most Populous Plane as the
reference, and selected 50% as the Percentage for Qualifying Neighboring Bins,
the system would check each mode in the scan data to determine which contains
the highest number of data points. The modes would be comprised of bins or
sets of bins, where a bin with a significant number of data points has one or
more neighbors that contain at least 50% of the data points that it has. The mode
with the highest number of data points is then considered to be the Most
Populous Plane and is used in the leveling process. (See the shaded area in
Figure 3.108, Scan B.)

Figure 3.108 Multiple Bins (Mode) Used to Define a Plane

Preliminary
Z Max
Highest Plane

Z Mid
Most Populous

Z Min
Lowest Plane
Scan B

Leveling Reference
Three reference planes exist, from which one must be chosen to level the scan. Two of
the planes are easy to understand and use; the Highest Plane and Lowest Plane.
Š Highest Plane – Referring to Figure 3.108, the Highest Plane corresponds to the
data set in the Z Max range (or mode if looking at the histogram).
Š Lowest Plane – In the same illustration, the Lowest Plane corresponds to the
data set in the Z Min range.
The third plane, Most Populous Plane, is more difficult to deal with and, depending
on the topography of the sample, could lead to inconsistent results. The following
illustrations describe the most common scan situations and the possible difficulties
associated with using the Most Populous Plane for leveling and data analysis.

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The Scan illustrated in Figure 3.109 would be an acceptable candidate for Most
Populous Plane. This scan is of a single attribute with a relatively large surface
area surrounding it. No matter which scan trace is used, the sample surface level,
in this case the Lowest Plane, would also be the Most Populous Plane. Either the
Lowest Plane or the Most Populous plane could be used for leveling.

Figure 3.109 Flat Surface Scan of a Single Object

Area of the scan

Object of the scan

Preliminary

Top Down View of Edge View of scan

scan surface surface

The scan illustrated in Figure 3.110 would not be an acceptable candidate for
Most Populous Plane. This scan has four traces that would give different data
sets depending on which trace was used to level the scan. If Most Populous
Plane was chosen as the leveling reference, traces 1, 2, and 4 would level the
trace on the Lowest Plane of the scan. Trace 3 would level the trace on the
Highest Plane of the scan. This would change the way the data is analyzed. The
depths calculated from either of its two neighboring scans would be very
different.

Figure 3.110 Most Populous Plane Trace Variation

Trace 1

Trace 2

Trace 3

Trace 4

Top Down View of Edge View of scan

scan surface surface

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Opening the Setup Analysis Tools Dialog Box 3

From the Recipe Editor, click on the Setup analysis tools button to open the Setup
Analysis Tools dialog box. (See Figure 3.111.)

Figure 3.111 Setup Analysis Tools Dialog Box

Click in the empty checkbox

to enable the Leveling
function and the histogram.

Preliminary
Click on the Setup
Analysis Tools…

to display its window.

Setup Analysis Tools – Leveling 3

The Setup Analysis Tool’s Leveling function and the histogram are both enabled by
clicking in the empty checkbox next to Enable Automated Depth Analysis. (See
Figure 3.111.)
To activate them, use the following procedure.
1. From the Recipe Editor, click on Setup Analysis Tools to display the Setup
Analysis Tools dialog box. (See Figure 3.111.)

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Figure 3.112 Enable Automatic Depth Analysis

To enable the leveling and

depth analysis functions,
click in the empty checkbox
and the variable fields
become active.
Preliminary

2. In the Setup Analysis Tools dialog box, click in the empty Enable Automated
Depth Analysis checkbox. (See Figure 3.112.)
Change Leveling 3. The Leveling Reference – The leveling attribute must be tied to the available data
Reference set. The leveling algorithms are set up to operate on one of three data sets
(planes), Most Populous Plane, Highest Plane, and Lowest Plane.
a. To select a data plane, click on the menu arrow next to Leveling Reference.
(See Figure 3.113.)

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b. Select the required data plane by clicking on it in the Leveling Reference

drop-down menu. (See Figure 3.113.)

Figure 3.113 Setup Analysis Tools – Leveling Reference

To change the leveling

attribute, click on the menu
arrow next tot the Leveling
Reference and choose the
required attribute from the
menu.

Preliminary
Change Number of Bins 4. The Number of Bins – highlight the current number in the Number of Bins
variable box and enter the new number of bins to be used. (See Figure 3.114.)
Remember, the more bins, the fewer number of data points each bin might
contain. Be sure to carefully evaluate the distribution of data points in the bins
so that the % for Qualifying Neighboring Bins can ensure that the proper number
of points are included in the calculated modes for the leveling procedure.

NOTE: The available range for the number of bins is 20 – 200.

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Figure 3.114 Setup Analysis Tools – Setting the Number of Bins

To set the Number of Bins, highlight

the current number in the Number of
Bins variable box and enter the new
number.

Set the % for qualifying

neighboring bins by highlighting the
current percentage in the variable box
and entering the new one.
Preliminary

Change % qualifying 5. % for qualifying neighboring bins – Highlight the current percentage, in the % for
neighboring bins qualifying neighboring bins variable box, and enter the new percentage. (See
Figure 3.114.)
Remember, the number of bins is divided up in equal spacing increments across
the entire depth of the scan. The more bins, the more significant the % for
qualifying neighboring bins becomes. This number, as well as the other attributes
in this window can be adjusted after the scan data is collected; so assessing the
data might help adjust the percentage to include all necessary data points.
In the illustration presented in Figure 3.114, the bins in the mid range, bins 7-10,
all contain data points. To isolate the data points that are to be considered as part
of the mode, a percentage must be entered that only accumulates the desired data
points. If Most Populous Plane was chosen as the reference, the system
accumulates the total of all adjacent bins, in data point clusters, matching the
percentage set in % for qualifying neighboring bins, and uses the totals to
determine which bins constitute the Most Populous Plane. If 50% was set as the
% for qualifying neighboring bins, the system would key in on bin #8 and include
the contents of bin #9 because its contents were greater than 50% of the number
of data points in bin #8. The data points in bins #7 and 10 would not be included
because they were less than the required 50%. The combination of data points
would show that this is the Most Populous Plane in the scan and perform the
leveling and depth calculations from this data.

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Figure 3.115 Histogram of a Scan

Z Max
Depth of Scan

Z Mid

Z Min

Preliminary
20
18
Number of data points in

16
14
each bin.

12
10
8
6
4
2

Bin Number 1 2 3 4 5 6 7 8 9 10 11 12 13
Z Min Z Mid Z Max
Lowest Plane (Mode) Most Populous Plane (Mode) Highest Plane (Mode)

In the Histograms, the different planes (modes) are color coded for easy
reference and identification. The Histogram is displayed in green. The major
modes, when displayed, appear in red.
6. After all adjustments are complete, click OK to save the changes, or Cancel to
discard the changes.

Diagnostic Options 3

This dialog box presents options that can be used to run diagnostic scans such as No
Motion and No Nulling scans.

NOTE: Scans using these options should only be used by

KLA–Tencor service personnel or applications engineers for diagnostic
purposes only.

1. To display the Diagnostic Options dialog box:

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a. Click on Recipe in the menu bar to display its menu,

b. Click on Diagnostic... from the drop-down menu. (See Figure 3.116.)

Figure 3.116 Recipe Editor - Recipe Menu

Step 1a. To access the

Diagnostic Options dialog
box, click on Recipe in the
Menu Bar to display its menu.

Step 1b. Then click on

Diagnostic… button.
Preliminary

2. This displays the Diagnostic Options dialog box. (See Figure 3.117.)
To chose an option for a diagnostic scan, click in the empty checkbox next to the
desired option. A check (9) in the checkbox indicates that the option is chosen.
Each Option is discussed below.

CAUTION: Each of the options is active for the recipe in which it is

saved. If the recipe is used as a template to create other recipes, the
option will remain intact unless turned off. This could create numerous
scan data deviations from the expected scan results.

3. Click OK when all required options have been chosen. (See Figure 3.117.)

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Figure 3.117 Diagnostic Options Dialog Box

Step 3 Click on OK when the

desired options have been
chosen.

Step 2 Click in the check box

of the option that is to be used
in the diagnostic. A check (9)
in the box means the option is
chosen.

Preliminary
High Resolution Camera Only– Diagnostic Options 3

The diagnostic options presented here are used by the P-15 camera. In some systems
supported by this software, more than one camera is used. In those systems, this set of
options would only apply to the high magnification camera.

Table 3.29 High Resolution Camera Only - Diagnostic Options

Option Description
No Motion Scan During the scan, data is collected but the stage does not
move. (See Figure 3.118.)
NOTE: This scan is only available in 2D.

Do Not Null Before No movement of the elevator (for nulling) occurs before
Scan the scan is performed and the data collected. (See
Figure 3.118.)

Figure 3.118 High Resolution Camera Only: Diagnostic Options

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Scan Options 3

This is a set of miscellaneous scan related options.

Figure 3.119 Scan Options: Diagnostic Options

Table 3.30 Standard - Diagnostic Options

Option Description
Preliminary

No Back Scan Before Back Scan is a technique where, immediately prior to

Scan the scan, the stage moves the scan start position back
and begins the scan nulling and movement. The
mechanical portion of the system has an opportunity
to settle before actually reaching the beginning of the
data collection.
This option prevents the Back Scan positioning from
taking place. (See Figure 3.119.)
No Noise Filter This prevents postprocessing of the scan data with
cutoff filters. (See Figure 3.119.)
No Leveling This prevents postprocessing data leveling of scan
data. (See Figure 3.119.)
No Linearity Correction Only used during the Linearity Calibration. (See
Figure 3.119.)

Linearity Calibration Only – Diagnostic Options 3

Table 3.31 Linearity Calibration Only – Diagnostic Options

Option Description
Use Raw Data Raw data from the scan is presented with no
postprocessing; without scaling to the measurement
range.
NOTE: This option has no useful application apart from
the Linearity Calibration.
No Stylus Arc Data from the scan is presented with no postprocessing
Correction arcal correction.
NOTE: This option has no useful application apart from
the Linearity Calibration.

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Figure 3.120 Linearity Calibration Only

Saving Scan Recipes 3

Options for Saving Scan Recipes

The recipes that are created using the Recipe Editor must be saved to capture the new
or modified parameters. Two options available for saving a recipe are accessed in the
Recipe drop-down menu are:

Š Save, is used to either save changes to a current recipe, or to save the content of

Preliminary
New recipe.
Š Save As, is used when changes have been made to an existing recipe and the
user wishes to preserve both the new recipe and the original one.
The two options are explained in detail later in this section. (See Figure 3.121 and
also Figure 3.116 on page 3-106.)

Figure 3.121 Recipe Menu with Save and Save As… Options

The Save and Save As…

options are available in the
Recipe drop-down menu.

Recipe Naming Convention

The P-15 system’s software allows for Scan and Sequence Recipe names that are 79
characters long. This allows the user adequate space to make names that describe the
content of the recipes being named.
While the longer names provide greater flexibility for descriptive naming, several
software display locations exist where the recipe names are displayed in truncated
form. This could present difficulties when attempting to identify which recipe is
actually represented by the truncated recipe name.

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If a long name is to be used, make the first eight characters in the name reflect the
recipe difference so its truncated version can be easily recognized in other screens.
EXAMPLE:
If the first 8 or more characters of several Scan Recipes are identical, the
following problem could arise when attempting to identify which recipe was
used to create the scan data. (See Figure 3.122.)

Figure 3.122 Catalog: Scan Data Screen

When a Scan Data file is

chosen (clicked on) it
highlights and the Scan Data
file name is totally displayed
in the Scan Data Name
display box. The Scan
Recipe is not totally
Preliminary

displayed, only the first eight

characters of the name.

In the Recipe display portion

of the Catalog: Scan Data
screen, both the name of the
Scan Data and the Recipe ID
name are truncated. (See the
note above.)

In Figure 3.122 both the Scan Data name and the Scan Recipe name are
truncated down to eight characters in the Scan Data file list. When the Scan Data
file is clicked on, it highlights and the Scan Data file name is totally displayed
(up to 74 of the 79 characters) in the Scan Data Name reference box. The Scan
Recipe name is not displayed in total any place on this screen.
If the user attempts to discover the actual recipe name by opening the Scan Data
File, the Analysis screen is opened and displays the Scan Data information. The
Scan Data file name is completely displayed in the title bar but the Scan Recipe
name is still truncated to 10 characters.

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Figure 3.123 Analysis Screen

The Scan Data name appears totally

displayed at the top of the screen.

The Scan Recipe, used to

gather the data, is listed in
truncated form (10 characters
only).

Preliminary
If the scan recipes used to gather data have the same first 8 or 10 characters, it
could be very difficult to tell which actual recipe was used to gather the data
presented in the Scan Data file.
END OF EXAMPLE
Use the following procedure to name a Recipe.
Š Use file names that contain different characters in the first 8 characters. (See
EXAMPLE above.)
Š Be sure to connect all words in the file name together. Use an underline “_” to
separate the words.
If the words are not connected as in Figure 3.124, a warning is generated. (See
Figure 3.125.)

Figure 3.124 Save Recipe As - Improper Name Format

Notice the spaces between the

words. This generates a system
message. (See Figure 3.125.)

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Figure 3.125 Recipe Message Box

The words need to be set together or separated by an underline “_” character.

(See Figure 3.126.)

Figure 3.126 Save Recipe As - Proper Name Format

Notice that the spaces are

filled in using the underline “_”
Preliminary

character.

1. From the Recipe Editor screen, click on Recipe in the Menu bar to display its
menu. (See Figure 3.127.)
2. Click on:
a. Save - to save the changes to the current recipe. This immediately saves
recipe with no further operator requirement.
b. Save As - to preserve the original recipe unchanged and to save the
changes as a new recipe. (See Figure 3.127.)

Figure 3.127 Recipe Editor

Step 1 Click on Recipe in the

Menu Bar.

Step 2 Click on either Save to

save changes in the current
recipe, or Save As to preserve
the current recipe unchanged and
the changes in a new recipe.

3. If Save As is clicked, the Save Recipe As dialog box appears. (See Figure 3.127.)

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4. Type in the new recipe name, making sure there are no spaces between words.
(See Figure 3.128.)

Figure 3.128 Save Recipe As Dialog Box

Step 5 Enter the new recipe name

and click on OK to enter the Recipe
name into the Recipe file.

5. Click on OK to form the new recipe. (See Figure 3.128.)

Entering Comments 3

Introduction

Preliminary
3

This feature is designed for recording important comments about the recipe. The only
field that is active for user input is the Comments: field. The other fields are
automatically set by the system to reflect the specific recipe.

Procedure 3

1. Click on Recipe in the menu bar of the Recipe Editor.

Figure 3.129 Recipe Editor

Step 1 Click on Recipe to

display its menu.

Step 2 Click on Info to

display the Recipe Info
dialog box.

2. The Recipe menu is displayed. Click on Info to display the Recipe Information
dialog box. (ALTERNATIVE: Press Ctrl + 1.)

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3. Click in the Comments text field and enter the information that is to accompany
the recipe.

Figure 3.130 Recipe Information Dialog Box

Step 3 The cursor should be

blinking in this field. Enter any
required comments in the field.

Step 4 After comments have

been added, click on OK to save
them and close the dialog box.
Preliminary

4. When the information is entered, click on OK to save it and close the dialog box.

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 4
STYLUS CHANGE PROCEDURE Chapter 4

I NTRODUCTION 4

Styli are available in various sizes for a variety of different scanning requirements.
Each stylus is a delicate tool and requires careful handling.
Styli are color-coded to indicate radius. Check the color band on the stylus arm
against the following table for the stylus radius.

Table 4.1 Available L-Stylus Radius

Color Code Band Stylus Radius (µm) Cone Angle (Deg.)

P rel i mi n a ry
Red 12.5 60
Yellow 5.0 60
Green 2.0 60
Orange 2.0 45

Blacka 0.3–0.8 85

Blacka 0.1–0.2 85

Dual Black (Not 0.03-0.05 (DuraSharp) 40

recommended for the P-15)

a. For radius values, refer to the SEM documents provided with the stylus.

This chapter describes:

Š Proximity Sensor Activation on page 4-2
Š Stylus Removal and Replacement on page 4-4
Š Scan Position Offset Calibration on page 4-11

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P ROXIMITY S ENSOR A CTIVATION 4

Before beginning the procedure and subsequent calibrations, it is important that the
Proximity Sensor settings be adjusted in order to ensure optimum system
performance and to protect the sensor and stylus.
1. Ensure that the Proximity Sensor is being used during the following calibrations.
Defining parameters used by the proximity sensor are set in the Proximity
Sensor Configuration dialog box. To access it from the Profiler – [Catalog]
screen, click on the Configuration icon. (See Figure 4.1.)

Figure 4.1 Profiler [Catalog] - Click on the Calibration Icon

Step 1 Click on the

Preliminary

Configuration icon to display

the Configuration screen.

2. In the Configuration screen, click Proximity Sensor… to display the Proximity

Sensor Configuration dialog box. (See Figure 4.3.)

Figure 4.2 Configuration Screen

Step 2 Click on the

Proximity Sensor… button
to open the Proximity Sensor
Configuration dialog box.

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3. In the Proximity Sensor Configuration dialog box, click in the empty checkbox
next to Use Proximity Sensor. (See Figure 4.3.) The 9 in the checkbox enables
the option so the system uses the Proximity Sensor to stop the head from
contacting the sample during the null on a sample surface, thus helping prevent
damage to the sample or the stylus.

Figure 4.3 Proximity Sensor Configuration Dialog Box

Step 6 After all

changes are
complete, click OK.

Step 3 Click in the

empty checkbox next
to Use Proximity
Sensor and (Step 4)
Optional: Click in the empty Enable Proximity
checkbox next to Autofocus

Preliminary
Sensor Offset to
After Move to enable this enable these options. A
option. A check (9) in the box check (9) in the box
indicates that it is enabled. indicates that they are
enabled.

4. The Enable Proximity Sensor Offset option is very important when measuring
small artifacts that are on elevated surfaces or near the edge of the sample. This
ensures that the null and autofocus are taking place at the same Z level as
detected by the proximity sensor. In addition, it protects the sensor and head
from damage, especially near the wafer edge.
Click in the empty checkbox to put a 9 in it. This enables the Proximity Sensor
Offset option. (See Figure 4.3.)
5. The Autofocus After Move option is designed null and focus on the sample in the
XY view screen. It does require time to perform this function, so it can be turned
off for running sequences and other procedures where the user does not need to
see the image.
Click in the empty checkbox to put a 9 in it. This enables the Autofocus After
Move option. (See Figure 4.3.)
6. Click OK to close the Proximity Sensor Configuration dialog box.
7. To save the changes made in the Configuration screen, click on File from the tool
bar at the top of the screen to display the File menu.
8. Click on Save from the File menu.
9. Exit the Configuration screen by clicking on the small icon in the top left corner
of the screen (to the left of the word Configuration), then from the drop-down
menu click on Close.

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STYLUS R EMOVAL AND R EPLACEMENT 4

The following discussion contains procedures for changing the stylus in the sensor
assembly of the P15 system.
Stylus replacement in the P-15 system is relatively simple. Important:
Use only an approved stylus from KLA-Tencor.
Do not modify the measurement head in any way. If, while using the prescribed
procedure, there is difficulty in mounting the stylus, call KLA-Tencor Customer
Service.
Know the stylus type and radius for input later in the procedure.
Follow the instructions as presented in this section to avoid omitting steps.

CAUTION: The stylus tip is very fragile! When removing the stylus
from its shipping container, use stainless tweezers (422320) to hold
the arm while gently peeling back the foam. Grasp the arm in the
center section and lift the stylus out tip first. To place the stylus back in
Preliminary

its shipping container, place the rounded end into the round end of the
holder and slowly rotate the tip end down. Release the tip only when it
is properly positioned in the grove.

The procedure consists of six parts:

Š Stylus removal procedure
Š Stylus replacement procedure
Š Scan Position Offset Calibration.

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Stylus Removal 4

1. From the Profiler [Catalog] screen click on the Configuration icon to display the
Configuration screen. (See Figure 4.4.)

Figure 4.4 Profiler [Catalog] - Click on the Calibration Icon

Step 1 Click on the

Configuration icon to
display the Configuration
screen.

Preliminary
2. From the Configuration screen click on the menu arrow to the right of the stylus
type variable box to display its menu. (See Figure 4.5.)

Figure 4.5 Stylus Force Calibration Button

Step 2 Click the menu

arrow to display the list
of stylus types.

Step 3 Click on the

stylus type of the stylus
that is to be mounted.

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3. Click on the stylus type that will replace the current stylus. (See Figure 4.5.)
4. Click on Replace Stylus to display its dialog box. (See Figure 4.6.)

Figure 4.6 Configuration Screen

Step 4 To begin the

stylus replacement
procedure, click
Preliminary

Replace Stylus to
display its dialog box.

5. To make it easier to track stylus performance, the system provides an

opportunity to name the stylus. The type of stylus has already been set before
moving to this screen (see Step 3.), and is identified in the Type variable box.
This variable cannot be changed in this dialog box, only in the Configuration
screen. The name identifies the specific stylus of the Type referred to in the Type
variable box.
The Stylus ID dialog box is displayed. (See Figure 4.7.) It contains the name of
the stylus and a list of previously identified styli of the Type referenced in the
Type variable box.

To identify a new stylus: When using a new stylus, double-click in the ID

variable box and enter the new name.
To enter the name of previous stylus: When mounting a previously used stylus,
click on the name of the stylus from the Previous ID’s list. The name should
appear in the ID box.

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Figure 4.7 Stylus ID Dialog Box

The Type of stylus being

mounted in the system
should be reflected in
Step 5 To enter a new the Type box.
stylus name, double-click
to highlight the old name in
the ID box and enter the
new name.

If a previously used stylus is

being mounted, click on the
name given to that stylus.

Preliminary
Step 6 When the stylus
name has been successfully
entered, click OK to save it
and close the dialog box.

6. When the new name is entered, click OK to save it and exit the dialog box. (See
Figure 4.7.)
7. The profiler message box is displayed inquiring if the name displayed is the
correct stylus name. Click Yes to affirm the name or No if the name is incorrect
and needs to be changed.
When Yes is clicked, the system head is automatically raised to the manual load
height for easy access to the stylus.
(If No is clicked, it is necessary to name the stylus again.)

Figure 4.8 Message Box for Stylus Name Affirmation

Step 7 Click Yes if the

name reflected next to ID is
the name of the stylus just
entered in the Stylus ID
dialog box.

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8. After Yes is chosen, another message box is displayed. (See Figure 4.9.) This
box states that the stylus can be changed.
Notice that the message box contains a caution telling the user to “ensure the
sensor is unlocked.” Disregard this part of the message, it is not for the
MicroHead II sensor assembly.
DO NOT CLICK OK UNTIL THE STYLUS HAS BEEN CHANGED.

Figure 4.9 Message Box for Stylus Change Permission

Disregard this portion

CAUTION: Do not click of the message.
OK until the new stylus
has been installed.
Preliminary

9. Open the Stage door.

CAUTION: Do not operate the stage or any motor driven component

with the door open or the system will have to be rebooted.

10. Loosen the thumbscrew holding the stylus wrench to the side of the head and
slide the wrench out of its holder.
11. The head of the stylus clamp screw is visible from the front of the instrument.
Place a finger under the Stylus Mount to support it while the screw is being
loosened. Loosen the screw by inserting the stylus wrench and turning the
wrench counterclockwise 1/2 turn. Be careful to apply turning torque only. Do
not push against the screw head any harder than is necessary to seat the wrench.
(See Figure 4.10 and Figure 4.11.) Do not remove the screw.

Figure 4.10 Supporting Stylus Mount During Stylus Change

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12. With the stylus clamp screw loose, take hold of the stylus with tweezers and pull
gently straight to the left until the stylus comes free. (See Figure 4.11.)

Figure 4.11 Sensor Assembly - Loosening Stylus Clamp Screw

CAUTION: Do not turn Step 11 Loosen the

this screw; it can result in stylus clamp screw.
damage to the stylus.

Stylus

Step 12 Pull stylus straight out Support the arm here while
in this direction with tweezers loosening the clamp screw.
See Figure 4.10.

Preliminary
Stylus Replacement 4

1. Using tweezers, take hold of the new stylus with the tip pointing downward
toward the stage. Insert the long arm of the stylus into the support groove in the
stylus arm. Gently maneuver it into the slot. Once in the slot, move it up and
down gently to ensure that it reaches the end of the slot and seats properly. (See
Figure 4.12.)

Figure 4.12 Sensor Assembly - Seating the New Stylus

Once in place, gently

move the stylus UP
and DOWN while
pushing it into place to
ensure that it seats
properly. Ensure that the stylus
touches the end of the slot.

2. Support the stylus mount (arm) and stylus with a finger to protect it from
damage while tightening the mounting screw. (See Figure 4.13.)

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Figure 4.13 Supporting Stylus and Mount During Tightening Procedure

Preliminary

3. While supporting the stylus and the stylus arm, gently tighten the clamp screw
to hold the stylus in place. Do not over tighten or damage can occur to the stylus
arm pivot. (See Figure 4.13 and Figure 4.14.)

Figure 4.14 Sensor Assembly - Seating the New Stylus

CAUTION: Do not turn Step 3 Gently tighten the stylus clamp

this screw; it can result in screw to hold the stylus in place.
damage to the stylus.

Step 2 Support stylus and mount at

these two points. See Figure 4.13.

4. Remove the wrench from the clamp screw and replace it in its mount. Tighten
the thumbscrew to hold the wrench in place.

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5. When the stylus installation is complete, click OK. (See Figure 4.15.)

Figure 4.15 Message Box for Stylus Change Permission

Step 5 When the stylus

installation is complete,
click on OK.

6. The system performs an Applied Force calibration.

Scan Position Offset Calibration 4

Introduction

Preliminary
4

As soon as the Applied Force calibration is complete, the Scan Position Offset
procedure is initiated. The Scan Position Offset Calibration procedure scans for data
that it then uses to calculate the X-, Y-axis offsets from the optics and stylus, for
positioning the sample stage.
For the standard styli this procedure is performed in the following order:
1. 150 µm (standard) calibration
2. If the 150 µm scan fails to locate the triangle, then the 500 µm (backup)
calibration is performed.
3. If the 500 µm was performed successfully, the 150 µm calibration must be
performed again.

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Calibration Procedure 4

Use the Stylus Alignment Tool (KLA-Tencor Part Number 219517 – see Figure 4.16)
to perform the Scan Position Offset Calibration and determine the distance that the
stylus tip is offset from the crosshair overlay in the XY View window.

Figure 4.16 KLA-Tencor Stylus Alignment Tool

Preliminary

1. A message box is displayed requesting the user to place the Scan Position Offset
tool on the stage. (See Figure 4.17.)

Figure 4.17 Message Box Requesting SPO Standard Placement

2. Open the stage door.

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Figure 4.18 Manual Load from the Scan Offset Calibration Window

Step 10 After loading the

Stylus Alignment Tool, click
on MAN LOAD again to send
the stage back under the
stylus.

3. Place the Stylus Alignment Tool precisely in the center of the stage, squarely

Preliminary
positioned with respect to the XY axis.
4. Turn the vacuum ON using the switch on the upper left inside door frame.

NOTE: The Vacuum menu in the screen’s menu bar is not functional.
It does not effect the stage vacuum.

5. Close the stage door.

6. Click OK in the message box. (See Figure 4.17.)
The Scan Offset Calibration Option dialog box is displayed (see Figure 4.19) on
top of the Calibration screen.
Two columns present the two options used to set up the Scan Offset Calibration.
The first column is the Size column. It is used to determine the length of the step
that is to be scanned and, therefore, which triangle the scan is to be performed
on. If the step is 150 µm, the system uses the 300 µm triangle. If the step is
500 µm, the system uses the 1000 µm (1 mm) triangle.
7. Choose 150 µm (standard) to continue with the calibration. (See Figure 4.19)

Figure 4.19 Scan Position Offset Calibration Options dialog box

Step 8 Choose Recipe

type: Custom or Default
Step 7 Click on 150 µm.

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8. Use the Default recipe unless there is a very good reason not to.
RECIPE TYPES. Two calibration options exist in the Scan Offset Calibration
Option dialog box. Each option provides the user with the opportunity to choose
between using a default recipe or to create/use a custom recipe. Default and
Custom recipes are explained below:
Š Default: This recipe is designed to operate with a scan speed and stylus
force setting that is safe for the stylus. The default settings are the
KLA-Tencor recommended recipe settings for all the calibrations.
Š Custom: This recipe type offers the user the option to customize recipe
parameters to meet specific scan requirements. In the Recipe Editor there
are seven windows, each with configurable parameters. (See Figure 4.20.)
For the Scan Position Offset Calibration, the only Recipe Editor window
necessary is the Scan Parameter Definition that appears when the editor is
first opened (see Figure 4.23). When chosen, the Scan Parameter Definition
button (in the top left corner of the screen, circled in Figure 4.20) appears
to be indented.
Preliminary

Figure 4.20 Window Buttons - _OFF150- Recipe Editor

Scan Parameter
Definition: displays the 2D
Scan window shown in the
illustration.

Each button in this column

displays a user configurable
window in which recipe
parameters can be defined for
use in various types of scans.
NOTE: THESE BUTTONS
ARE PASSWORD
PROTECTED WITH
RESTRICTED ACCESS.

9. The recipes are set as follows:

CAUTION: KLA-Tencor recommends using the Default recipes unless

there is a very good reason for creating a custom recipe.

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To use the currently a. To use the calibration recipe indicated to the right of the Size selection (see
selected recipe: Figure 4.21), click Continue to proceed.

Figure 4.21 Scan Position Offset Calibration Options dialog box

The current recipe type is

Step 9a. Click on Continue
displayed here.

Preliminary
To change the recipe from b. To apply the Default recipe when Custom is indicated, click on Default. The
Custom to Default message box, “Copy default to custom recipe?” appears. Click Yes in the
message box to replace the parameters in the custom recipe with default
values. (See Figure 4.22.)

Figure 4.22 Set Default Dialog Box

Step 9b. To change from Custom

to Default, click on Yes to set
default values in the custom recipe.

To change the recipe from c. To apply a Custom recipe when Default is indicated, or to modify the
Default to Custom custom recipe that is indicated, click Custom. The Recipe Editor opens,
displaying the custom recipe. Change the parameters as required. (See
Figure 4.23.)
i. Close the Recipe Editor by clicking on the control button in the upper
left corner and choosing Close from the drop-down menu. (See
Figure 4.23.)

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ii. If the new parameter values were not already saved, a dialog box
requires the user to choose between the save options before exiting
the Recipe Editor. Choose Save Changes to set the changes to the
Custom recipe so they are used in the scan.

Figure 4.23 Scan Parameter Definition - _OFF150 - Recipe Editor

Step i Click to display the

Control Button menu. Choose
Close from the menu.

This window (Scan

Preliminary

Parameter Definition) is the

only one required if there are
to be recipe changes related
to the Scan Position Offset
Calibration procedure.

10. From the Scan Offset Calibration screen, click MAN LOAD in the tool bar to move
the stage back beneath the stylus. (See Figure 4.18.)

Figure 4.24 ZOOM IN - Scan Offset Calibration

Step 12 Click the

required zoom button
to position the zoom at
the desired level.

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11. (BEFORE CONTINUING see CAUTION below.) Click FOCUS in the tool bar.
The Stylus Alignment Tool’s surface image comes into focus. (See
Figure 4.24.)

CAUTION: As the stylus lowers toward the Stylus Alignment tool,

watch carefully to ensure that both the proximity sensor and the stylus
come down on the tools measurement surface. With the Proximity
Sensor Offset option chosen in the Proximity Sensor Configuration
box, the proximity sensor is coming down directly on the position
where the measurement is to be made. If the stylus and the sensor are
not descending directly onto the stylus alignment tool’s measurement
area, press the Space Bar on the computer keyboard or a mouse click,
to stop the stylus descent. Manually relocate the tool under the stylus.
Click on FOCUS again to resume the procedure.

12. The zoom setting should be the same as that at which the scans are performed.
KLA-Tencor recommends that the optics be zoomed all the way out (set at 0), or
that the desired zoom setting be locked. (See Saving the Current Zoom Position

Preliminary
on page 5-12.)
To zoom in or zoom out, click and hold the correct button until the optics are at
the required zoom setting. (See Figure 4.24.)
BEGIN Align Sample 13. The Stylus Alignment Tool must be aligned with respect to the X-, Y-axis in
Procedure order for the calibration to be as accurate as possible. Click on View in the menu
bar to display its menu. (See Figure 4.25.)
14. Choose Align Sample… from the menu. (See Figure 4.25.)
This displays the Alignment Angle Dialog Box. (See Figure 4.26.)

Figure 4.25 View Menu with Align Sample Chosen

Step 13 Click on
Align Sample… to
begin the sample
alignment procedure.

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15. In the Alignment Angle dialog box, leave the setting at the default, “0” and click
OK to accept the alignment angel of 0°. (See Figure 4.26.)

Figure 4.26 Alignment Angle Dialog Box

The prompt at the bottom of the screen now says,.

16. Use the arrow buttons to locate the border line between the 300 µm triangles and
the 1000 µm triangle. Still using the arrow buttons, follow the line to the left side
of the tool. (See Figure 4.27.)
Preliminary

17. Move the cursor to the line and click precisely on the line.
The prompt at the bottom of the screen now says,

18. Click OK at the bottom right corner of the screen.

The prompt at the bottom of the screen now says,

Figure 4.27 KLA-Tencor Stylus Alignment Tool

Step 16 Locate Step 19 Move

the line and to a place on
move to a place the line near the
on the line near right end and
the left end and click precisely
click precisely on the line.
on the line.

19. Use the left arrow button follow the dividing line to the right until it reaches the
end of the line. (See Figure 4.27.)

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20. Move the cursor directly over the line and click precisely on the line.
The system adjusts the theta alignment so the Stylus alignment tool is lined up
with the X- and Y-axis. The prompt at the bottom of the screen now says,

END Align Sample 21. Click OK at the bottom right of the screen to accept the stage alignment of the
Procedure Stylus Alignment Tool.
The prompt at the bottom of the screen now says,

There are two different alignment patterns that can be used in the Scan Position
Offset Calibration. Each scan is conducted at the midpoint of the triangle where
the step distance is one half the length of both right angle triangle sides. The first
and primary alignment pattern is the 300 µm triangle which is called the 150 µm
alignment pattern. It has this name because the scan traverses the triangle at it
midpoint where the distance is 150 µm. The second is the 1000 µm (1 mm)
triangle which is called the 500 µm alignment pattern because its midpoint scan

Preliminary
distance is 500 µm. It is used when the 150 µm scan fails to locate the 300 µm
triangle.
When making this calibration, first use the 300 µm triangle to complete the
150 µm scan. If the stylus offset is too great, the scan misses the triangle. If this
happens, try the 1000 µm (1 mm) triangle to complete the 500 µm scan. If that is
successful, retry the 300 µm triangle.
If the 500 µm scan missed the 1000 µm triangle, the stylus needs to be
physically realigned by an authorized KLA-Tencor service representative.

Figure 4.28 KLA-Tencor Stylus Alignment Tool

300 µm triangle is used

for the 150 µm scan.

150 µm alignment pattern with

its crosshair alignment pattern 1 mm triangle is used for
at its left side. the 500 µm scan.

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22. Use the linear movement arrow buttons (see Figure 4.29.) to locate one of the
150 µm alignment patterns with its crosshair alignment pattern at its left side.
(See Figure 4.28.)

Figure 4.29 Aligning the Tool with Screen Crosshair

Step 22 Use the arrow

buttons to locate one of the
300 µm triangles with its
crosshair pattern next to it.
Preliminary

23. Click at the center of the Crosshair Pattern to align it with the screen crosshair.
(See Figure 4.30.) The crosshair pattern should align precisely with the screen
crosshair.

Figure 4.30 Align Screen Crosshair with 150 µm Crosshair Pattern

Crosshair alignment
pattern.

Screen
crosshair.

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24. Click the START button located in the screen tool bar. (See Figure 4.31.)

Figure 4.31 Manual Load from the Scan Offset Calibration Window

Step 24 Click on the

START button to start the
calibration.

Preliminary
The video image changes to side view as the stage moves to position the start of
the scan on the beginning of the start pattern near the calibration triangle.
When the stylus has reached the beginning of the 150 µm scan trace, the screen
changes to the Scan: _OFF150 window. The scan automatically begins.

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Figure 4.32 Scan: _OFF150 Window

As the scan proceeds, the trace line

progresses from left to right across
the scan trace.
As soon as the scan is complete,
the scan screen is automatically
replaced with the Analysis screen.
See Figure 4.34.

Scan calibration mark.

Preliminary

The scan can be viewed at the bottom right of the Scan: _OFF150 screen as it
progresses from left to right across the scan trace window, forming a linear
image of the scanned surface. The Start pattern next to triangle is set up to direct
the scan through the middle of the triangle using the _OFF150 recipe. In a
perfectly calibrated system, the scan trace goes directly through the center of the
300 µm triangle creating a 150 µm trace step. However, this is not a common
occurrence for a system that has not yet been calibrated after a stylus change.
The system uses the step and the distance across the triangle to determine where
the trace was performed and then automatically calculates the offsets.

Figure 4.33 Trace Path Through Upper Triangle

The user is directed to Scan path with

150 µm
set the scan to begin 150 µm step
at the intersection of
the three lines.

150 µm

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Figure 4.34 Data Analysis Window.

Scan trace display.

See Figure 4.35.

Scan data analysis.

See Figure 4.36.

Preliminary
When the scan is complete, the Data Analysis window automatically replaces the
Scan: _OFF150 screen. The window contains a scan data trace as shown in
Figure 4.35. If the scan was successful, the system detected the triangle and set
cursors at the edges of the triangle for visual inspection. It is possible to observe
the scan and determine, visually, where the trace is running through the triangle.

Figure 4.35 Scan Data Portion of the Analysis Window

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In the bottom half of the window, the Scan Offset Calibration Analysis appears. In
Figure 4.36 the system has subtracted the Up Edge from the Down Edge and
calculated the result to be 150.0 µm. Using this analysis of the scan, the system
makes a recommendation based upon its recognition of the Stylus Alignment
Tool triangle pattern.
25. To accept the recommendation, ensure that Accept Current Calibration Result is
chosen, then click on Take Selected Action. (See Figure 4.36.)

Figure 4.36 Coarse Scan Data Analysis Window

If the scan was recognized by the system, a recommendation

to ACCEPT the calibration is displayed here.
Step 25 To accept
the calibration, click
in the Accept...
radio button,
The system
subtracts the then click Take
Preliminary

Up Edge from the Selected Action.

Down Edge and
derives the width.
The outcome in this
case is 150.0 µm.

If the trace misses the triangle or is unable to identify it, one of several messages
can be displayed. If the message reads, “Unknown situation…” or is otherwise
uncertain, perform the entire scan procedure again, this time using the 1000 µm
(1 mm) triangle and replacing the 150 µm scan recipe with the 500 µm scan
recipe, _OFF500. If the 500 µm scan is acceptable, perform the 150 µm scan
again. The results should be acceptable.

Figure 4.37 “Unknown Situation” Corrective Action

The conclusion of the

scan is displayed here.
It can either
recommend accepting,
be uncertain, or
recommend rescan.

First If the scan is uncertain or the

recommendation is to take a rescan, Second Then click
click Cancel Current Calibration. Take Selected Action.

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When the Triangle is The message could also say that the scan might have caught the triangle and ask the
Present, But System Does user to choose either to accept it, change the location, or reject it. If the Conclusion
Not Find It. box informs the user that the system either didn’t find the triangle for sure or asks the
user to check the trace for the presence of the triangle, it might be necessary to reset
the measurement cursors. (See Figure 4.38.)

Figure 4.38 Pre Acceptance Analysis Screen

In this case, the system placed

the identification cursors at the
left edge of the trace, missing
the triangle that is obviously
displayed mid trace. (See
Figure 4.39 for resolution.)

Preliminary
1. If the triangle is obvious, reset the measurement cursors to the top edges of the
triangle. To reset the measurement cursors, look in the top area over the graph,
click and hold on the right cursor, then drag it to the top right corner of the step
in the trace. Repeat for the left cursor, dropping it on the top left corner. (See
Figure 4.39.)

Figure 4.39 Analysis Screen with Cursors Manually Placed

Click, hold and drag each cursor to the top edges of the step.

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2. Once the measurement cursors are in position, click Record in the Scan Offset
Calibration Analysis section of the screen. (See Figure 4.40.)

Figure 4.40 Scan Offset Calibration, Analysis Information Window

Preliminary

Step 2 Once the cursors have been placed

at the top edges of the triangle, click Record Step 2 Choose Accept Current Step 3 Click Take Selected
to set the coordinates of the triangle edges in Calibration Results by clicking in Action to save the calibration
the Up Edge and Down Edge fields. its empty radio button. results.

3. When the edges of the triangle have been recorded, choose Accept Current
Calibration Result in the Possible Actions box. (See Figure 4.40.)
4. Click Take Selected Action. (See Figure 4.40.)
When More Than One On rare occasions the system fails to recognize the triangle even though it is in the
Possibility is Displayed data set. The system might also make a determination that one of a number of
detected features is the correct one. To determine if the triangle is in a given data set,
review the scan data set of detected features at the bottom left of the Scan Offset
Calibration Analysis portion of the screen. If the triangle is present then the scan
calibration can be reset.
1. Click on the scan feature data set that represents the triangle so that it highlights.
In Figure 4.41 the system choose feature number 1 and set its parameters in the
Up Edge and Down Edge fields. (See Figure 4.41.) However, feature number 2
is 151.71 µm which is very near the expected scan distance of 150 µm. In this
example the user would click on that feature to highlight it.
2. With the feature highlighted, click on Set to choose that feature as the triangle.
The Up and Down parameters of the data set are recorded in the Up Edge and
Down Edge fields. (See Figure 4.41.)

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Figure 4.41 Hand Selecting the Triangle Data in Analysis Screen

Second: Click The Up and Down parameters are displayed

on Set=>. in the Up Edge and Down Edge fields

First: Click on the

feature that represents
the triangle.

Preliminary
1. Once the feature is chosen, choose Accept Current Calibration Result. (See
Figure 4.42.)
2. Click Take Selected Action. (See Figure 4.42.)

Figure 4.42 Accepting Adjusted Scan Results

Step 1 Choose Step 2 Click on Take

Accept Current Selected Action to accept
Calibration Result. the calibration results.

3. After the scan calibration has been accepted, the Calibrations screen returns.
Close the Calibration screen.

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Preliminary

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 5
XY VIEW SCREEN Chapter 5

I NTRODUCTION 5

The name XY View comes from the function of the screen itself, which is for viewing
the sample surface, and positioning a scan. The XY View screen also provides other
tools required to set up and perform a scan.
The appearance of the video image depends on the zoom setting being used to view
the sample surface and the current accuracy of the focus.
The P-15 has a zoom capability that allows the operator to zoom in and out to view
the sample surface at different magnification levels.

P rel i mi n a ry
This chapter describes:
Š Starting the XY View Application on page 5-2
Š Setting the Magnification on page 5-11
Š Focusing the View on page 5-13
Š Positioning the Scan Site on page 5-16
Š Using Die Grid Navigation on page 5-19
Š Using Blob Analysis (Center Object Search) on page 5-32
Š Aligning the Sample on page 5-35

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STARTING THE XY VIEW A PPLICATION 5

Procedure 5

1. When the Catalog screen is first displayed, the Sequence Recipe list is in the
Information Display window. To change to the Scan Recipe list, click on the
Scan Recipe button. (See Figure 5.1.)

Figure 5.1 Scan Recipe Window in the Catalog Screen

Step 2 With a Scan Recipe

highlighted, click on the XY icon
to display the XY View screen.

Step 1 When the screen opens,

Preliminary

click on the Scan Recipe button

to display the Scan Recipe list in
the Information Display window.

Information Display window

2. Once the Scan Recipe window is active, ensure that the desired scan recipe is
highlighted by clicking on it. With the recipe highlighted, click the XY button to
display the XY View screen. (See Figure 5.1.)

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XY View Window Features 5

Figure 5.2 XY View Screen

Menu Bar

Tool Bar

Video Display Window

Sample Navigation
Window

Preliminary
Current Stage and
Zoom Position Field.

XY View Menu Bar 5

The Menu Bar contains the majority of the available screen function commands. Each
function is explained in detail in this section.

Figure 5.3 XY View Screen Menu Bar

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View Menu

Table 5.1 View Menu Description

View Menu Description
Focus
Using the current magnification setting, this button
causes the system to focus on the sample that is
on the stage at the same time that the stylus is
nulled on the sample surface.
Video Controls…
Displays the Video Display Dialog Box.
Save Image to File…
Displays the dialog box which set up the location of
the file where the image is to be saved.
Print Image…
Displays the dialog box for printing the image in the
Preliminary

video portion of the screen.

Display Center Object View
This puts the center of the object being scanned at
the screen crosshair.
Align Sample…
Displays the dialog box used for setting up the
angular rotation of the sample on the sample stage
and initiates the automated procedure for aligning
the sample to the video display.
Zoom In
Causes the optics to zoom in to a higher
magnification.
Zoom Out
Causes the optics to zoom out to a lower
magnification.
Reset Zoom
Resets the zoom position to “0” when the Zoom is
active (position not saved).
Save Zoom Position
Displays a dialog box where the zoom position is
set and locked so that it cannot be changed by the
Zoom In and Zoom Out buttons.
Show Start of Feature
Displays, at the crosshair of the video display, the
starting point of the scan.
Show Center of Feature
Displays, at the crosshair of the video display, the
center of the scan on the sample surface.
Show End of Feature
Displays, at the crosshair of the video display, the
end of the scan on the sample surface.

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Die Grid Menu

Table 5.2 Die Grid Menu

Die Grid Menu Description
Load…
Displays the dialog box used to load a die grid
pattern.
Save As…
Saves the die grid pattern.
Clear Die Grid
Removes any die grid pattern on the video display
window. [See Clearing a Die Grid (Turn OFF Die
Grid Navigation) on page 5-30.]
Clear Dropout Dies
Blocks the dies from being scanned when a mouse

Preliminary
cursor is placed over the die on the Sample
Positioning Window and the SHIFT+LEFT MOUSE
BUTTON is pressed.

Clear Associated Dies

Removes dies which were previously associated in
a sequence recipe.
Pattern Rec. Options…
This displays the Load Die Grid dialog box. [See
Loading a Die Grid (Turning ON Die Grid
Navigation) for a Single Scan on page 5-28.]
Display Numbers
Displays the numbers on the Sample Positioning
Window.
Font…
Displays the font dialog box used to change the
screen fonts.
Move To Partial Dies
Scans the partial die at the edge of the wafer
perimeter, only when this feature is enabled.
Normally, these partial dies cannot be scanned
because of the circular wafer edge, but this feature
allows them to be scanned.

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Move Menu

Table 5.3 Move Menu

Move Menu Description
Slow – Sets the XY stage to move in the slowest, or
smallest increment, speed as defined in the Move
Extents.

Medium – Sets the XY stage to move in medium, or

intermediate increment, speed as defined in the Move
Extents.

Fast – Set the XY stage to move in fast, or largest increment,

speed as defined in the Move Extents.
Move Extents – Sets the increment (Slow, Medium, Fast) for
the stage movement. Enter the µm per click distance in each
field for X/Y movement and the degrees in the Theta fields.
Preliminary

Figure 5.4 Move Extents Dialog Box

EXAMPLE For the X and Y movement: If Fast speed is

selected (with the Fast value set to 300 microns), then
the stage moves by 300 microns each time an arrow
button is clicked.
EXAMPLE for Theta Rotation: For the theta (rotational)
movement. Sets the rotational increment (Slow, Medium,
Fast) in degrees, for the stage movement with each
button or key click. If Fast speed is selected (with Fast set
to 5°), then with each click the stage rotates 5°.
Precision Move – Takes out any backlash in the lead screws.
To Position – This displays the Move To Position dialog box.
Enter the coordinates the stage is to move to. If a rotational
move is used to reorient a feature already in view so it can be
scanned in a different direction, also choose Rotate About
Camera Position. Click OK to make the move.
Figure 5.5 Move To Position Dialog Box

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Direction Menu

Table 5.4 Direction Menu

Direction Menu Description
Up – Moves the stage in the +Y direction away
from the front door by one increment (as
defined in Move Speeds for the set speed) per
button click. Click and hold the button for
continuous movement.
Down – Moves the stage in the -Y direction
toward the front door by one increment (as
defined in Move Speeds for the set speed) per
button click. Click and hold the button for
continuous movement.
Left – Moves the stage in the -X direction toward
the left by one increment (as defined in Move

Preliminary
Speeds for the set speed) per button click. Click
and hold the button for continuous movement.
Right – Moves the stage in the +X direction
toward the right by one increment (as defined
in Move Speeds for the set speed) per button
click. Click and hold the button for continuous
movement.
Fast Z Up – Raises the measurement head away
from the stage by one increment per button click.
Click and hold the button for continuous
movement.
This is the same as clicking the Elev button.
Fast Z Down (Focus) – Lowers the
measurement head and sensor to the null
position, and focuses the video image. The
measurement head automatically lowers to the
correct distance from the sample for real-time
video.
This is the same as clicking the Focus button.
Rotate Counterclockwise – Rotates the stage in
the theta counterclockwise direction by one
increment (as defined in Move Speeds for the set
speed) per button click. Click and hold the button
for continuous movement.
Rotate Clockwise – Rotates the stage in the theta
clockwise direction by one increment per button
click. Click and hold the button for continuous
movement.

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Actions Menu

Table 5.5 Actions Menu

Actions Menu Description
Start Scan
Starts the scan process.
View Scan
Changes to the View Scan window.

Sample Menu

Table 5.6 Sample Menu

Sample Menu Description
Manual Load
Moves the stage towards the front door. This is
used for loading wafers.
Preliminary

Load/Unload
Not applicable for the P-15 system.
Initialize Handler
Not applicable for the P-15 system.
Pod Operations…
Not applicable for the P-15 system.
Change Configuration
This brings up the Safe Area configuration box.

Vacuum Menu

Table 5.7 Vacuum Menu

Vacuum Menu Description
Off
Not applicable for P-15 systems. The vacuum
status is set using a manual switch next to the
door.
On
Not applicable for P-15 systems. The vacuum
status is set using a manual switch next to the
door.

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Stylus Menu

Table 5.8 Stylus Menu

Stylus Menu Description
Drop/Lift
Causes the stylus to pivot up. A check mark is
visible while it is in the UP position. Click on it to
release it back to its normal scanning position
Distance…
Displays the Distance From Sample dialog box.
This is the distance from the stylus to the sample
surface during scan positioning. Set the number in
µm and click OK. The distance remains in effect
until changed by the user.

Figure 5.6 Distance Dialog Box

Preliminary
Blob Menu

Table 5.9 Blob Menu

Blob Menu Description
Edit Binarization Threshold
Activates the Blob Analysis capability when
the Display Center Object View feature is
selected from the View menu.
This allows the user to draw a box around
an object visible in the video image, and
the stage moves to the center of that object
using the image contrast to locate the
object. The contrast value can be set from
0 to 255 with a typical range of 60 to 100.
EXAMPLE: if selecting a dark object, set the
threshold to a high value so that greater
contrast is used to help distinguish the
object from the surrounding area. [See
Using Blob Analysis (Center Object
Search) on page 5-32.]

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Tool Bar Buttons 5

Table 5.10 XY View window Tool Bar Buttons

Button Description
Sets the XY stage to move in small increments as set in Move
Extents.

Sets the XY stage to move in moderate increments as set in Move

Extents.

Sets the XY stage to move in large increments as set in Move

Extents.

Moves the stage in the +Y direction (away from the front door) by
one increment (as set in Move Extents) per button click. Click and
hold the button for continuous movement.
Moves the stage in the -Y direction (toward the front door) by one
Preliminary

increment (as set in Move Extents) per button click. Click and hold
the button for continuous movement.
Moves the stage in the -X direction (toward the left) by one
increment (as set in Move Extents) per button click. Click and hold
the button for continuous movement.
Moves the stage in the +X direction (toward the right) by one
increment (as set in Move Extents) per button click. Click and hold
the button for continuous movement.
Rotates the stage in the theta counterclockwise direction by one
increment (as set in Move Extents) per button click. Click and hold
the button for continuous movement.
Rotates the stage in the theta clockwise direction by one
increment (as set in Move Extents) per button click. Click and hold
the button for continuous movement.
Raises the measurement head away from the stage by one
increment per button click. Click and hold the button for
continuous movement.
Lowers the measurement head containing the sensor assembly to
the null position, with the stylus just above the surface, and
focuses the video image.
Changes to a higher magnification with each click.

Changes to a lower magnification with each click.

Starts the scan process.

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Table 5.10 XY View window Tool Bar Buttons (Continued)

Button Description
A toggle that lifts and drops the stylus.

Toggle button that moves the stage to and away from the Manual
Load position. Before each movement, the measurement head
moves to the set Z-height to protect the sensor assembly from
accidental contact.

S ETTING THE M AGNIFICATION 5

Introduction 5

The system has an optical zoom function that allows the operator to view the sample
surface at different magnifications for feature identification and scan placement.

Preliminary
If the system has Pattern Recognition operating, zooming in and out could prevent the
system from performing accurately because the recognition function also takes into
consideration the size of the image as well as its shape.

Changing the Magnification 5

Click the ZOOM IN or ZOOM OUT to change the magnification. Each click changes the
magnification level in or out by a small amount.
(Alternative:
In the Menu bar click on View to display its menu. From the View menu, select
either Zoom In or Zoom Out to change the magnification. Each click changes the
magnification level in or out by an amount a little more than twice the size of the
button icons.)
For systems using the Pattern Recognition option, the zoom function can greatly
effect those system’s ability to perform the recognition function. If the Zoom position
is set and left at a particular zoom level, the system is dependable using the Pattern
Recognition option.

Resetting the Zoom to “0.00” 5

If the zoom function has been used, it might be necessary to use the Reset Zoom to
return the zoom magnification to exactly “0.00” in the Zoom field at the bottom right
of the screen.

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Click on Reset Zoom and the system automatically zooms out to the furthest position
and sets the Zoom field to 0.00.

Figure 5.7 View Menu and the Stage and Zoom Coordinate Field

Click Reset Zoom from

the View menu to reset
In the Zoom field, the
the Zoom to exactly
current zoom position
0.00.
is displayed. This is not
the magnification.
Preliminary

Saving the Current Zoom Position 5

For systems operating with the Pattern Recognition option, it is extremely important
that the Zoom position be locked so the system can perform the pattern recognition
function properly. Saving the current zoom position is also called “zoom lock.” This
function relies on both shape and size for the recognition process to be effective. The
most reliable way to secure the zoom position is to use the Save Zoom Position dialog
box to set and lock the desired position.
Another reliable way is to leave the zoom feature at 0.00, then pattern recognition
should work well. In this case, it is very important that, before the pattern recognition
process is used, the operator remember to reset the zoom to 0.00.
1. Check to ensure that the current Zoom position, displayed in the Zoom field at
the bottom left of the screen, is the position that the zoomed magnification is to
be frozen at. If so, proceed to the next step. If not, adjust the zoom
(magnification) to the required level using the zoom icons or menu items.
2. To save the current zoom position, click on Save Zoom Position in the View
menu. This opens the Save Zoom Position dialog box. (See Figure 5.8.)

Figure 5.8 View Menu in XY Vies Screen

Step 2 Click Save

Zoom Position to open
its dialog box.

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The Save Zoom Position dialog opens with the current zoom position in the
Zoom field.
3. Ensure that the zoom position in the dialog box Zoom field agrees with the Zoom
Position in the screen display. (See Figure 5.9.)
4. Put a check in the Save Zoom Position check box. (See Figure 5.9.)

Figure 5.9 Save Zoom Position Dialog Box

Step 3 Both of the

Step 4 Click Save Zoom positions
Zoom Position. should be the same.

Step 5 Click OK to
save the position.

Preliminary
5. Click OK to save the position and disable the zoom icons in the tool bar and the
zoom menu items in the View menu. (See Figure 5.9.)

F OCUSING THE VIEW 5

Introduction 5

Focusing on the sample surface is controlled by a combination of the nulling process

and the system focus knobs.

Nulling 5

Fast Approach
In the first phase of the nulling descent, the measurement head lowers the stylus at a
higher speed until it reaches a preset level above the sample surface. The default level
set in the registry is 1000 µm above the Lowest Elevator Position. If the stylus touches
the surface during the fast approach phase of the descent, an error is generated. The
error is not speed dependant.
If the proximity sensor and the proximity sensor offset is used during the descent, the
stage moves to position the proximity sensor over the same location at which the
stylus eventually touches the surface.
If the proximity sensor is enabled, the Fast Approach ends when either the proximity
sensor indicates the approaching surface. If the proximity sensor is disabled, the Fast
Approach ends when the head reaches 1000 µm above the Lowest Elevator Position.
The descent slows at this point and, if the Proximity Sensor Offset is applied, the
system moves the stylus back over the contact point on the sample surface.

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Slow Approach
This is the phase of the nulling descent in which the stylus contacts the sample
surface. Even though this phase is called the Slow Approach, it is possible for the
descent speed to be set to the same rate as the Fast Approach.
The Slow Approach ends when the stylus hits a surface and the stylus is pushed up
above the horizontal position.

Final Adjustment
During the last phase of the nulling operation, the head moves upward very slowly
until the stylus drops just barely below the horizontal position and slightly above the
surface.

Focus 5

After the final adjustment to the head and stylus position, the system focusses on the
surface.
Preliminary

After the null and focus procedure, if the sample surface is not in focus, the focus
knobs can be used to bring the surface into focus. (This should only be required after
stylus change.)
The purpose of focusing the view is to sharpen the image in the video window. If the
focus is clear the first time, and the sample is flat, focus should be maintained each
time the stage moves to another location on the same sample surface.

Proximity Sensor 5

The proximity sensor can be used in the transition between the Fast Approach and
Slow Approach phases of the nulling procedure. The following restrictions apply to
proximity sensor use:
Š The proximity sensor works on optical principles and is therefore not for use
with transparent surfaces. For transparent surfaces teach the Lowest Elevator
Position and turn the proximity sensor off.
Š The system accommodates the physical offset between the stylus and the
proximity sensor by adjusting the stage position at the appropriated time before
the scan procedure. The accommodation cannot be performed for measurements
15 mm or closer to the right hand side of the chuck. If measurements are to be
taken at X-coordinate values that might fall within that restricted range, the
Proximity Sensor Offset must be disabled. The proximity sensor can still be
used, provided the sample is flat and not transparent.
Š For small samples that are not transparent, the proximity sensor can be used in
the nulling procedure provided that the offset has been correctly taught. The
original offset was taught at the factory and should not be changed unless there
is very good reason. Using the proximity sensor is especially convenient for
sample with widely varying thickness between measurements, to avoid
focussing errors, and to avoid repeated teaching of the Lowest Elevator Position.
Š For samples having the same thickness (i.e., within ± 200 mm), disable the
proximity sensor and rely on the Lowest Elevator Position. Since these samples
have the same thickness, the Lowest Elevator Position does not need to be reset.

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Focus the Optics – Top- or Side-View 5

1. Raise the measurement head.

CAUTION: Before lowering the head, be sure that the sample is under
the center of the optics, that the stage is not significantly out of level,
and that there are no physical obstacles.

2. Use the Focus button to null the stylus on the sample (use a patterned sample
with easily defined features).

NOTE: If the Proximity Sensor is not enabled, the elevator is designed

to slow its rate of descent to 10 µm/sec when it reaches 1000 µm
above the Lowest Elevator Position.

3. Open the measurement chamber door and then the head door. (See Figure 5.10.)

Preliminary
Figure 5.10 MicroHead Measurement Head.

Top Panel
Stylus Protection
Plate

Camera

Status
Indicators

Stylus Wrench

Optics

Head Door

4. If the initial view requires focusing, turn the Top-View Focus knob to focus the
top view. (See Figure 5.11)
5. Click the Stylus Drop-Lift icon to lower the stylus onto the sample surface.

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6. If the side view requires focusing, use the Side-View Focus knob to focus the
side view. (See Figure 5.11)

Figure 5.11 Focusing the Optics (Dual-View Optics).

Side-View
Focus Knob

Top-View
Focus Knob
Preliminary

7. Test the Video Calibration after any mechanical refocusing event by clicking on
a clearly definable feature and see if it lines up exactly with the screen crosshair.
If not, perform the Video Calibration.

P OSITIONING THE S CAN S ITE 5

Introduction 5

The stage can be moved in the X, Y, and theta direction to orient an object image for
scan positioning. The stage can be moved to reach any point on the sample surface
within the Safe Area limits. (See Safe Area Configuration on page 11-21)
The stage moves incrementally in the following directions:
Š The X direction moves the stage left and right
Š The Y direction moves the stage forward and backward
Š The theta direction rotates the stage clockwise and counterclockwise.

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A common way to move the stage is to click on the arrow button that points in the
direction that the stage is to move. Notice that the arrow points in the direction the
stage moves and not in the direction that the image moves in the field of view.

NOTE: When using the toolbar arrow buttons, the image appears to
wiggle as it stops. This is a normal part of the procedure designed to
eliminate the slight mechanical backlash in the stage movement that
could make precise positioning difficult.

Figure 5.12 shows the stage coordinate system (SEMI Standard M20-92) used by the
Profiler. The X and Y coordinates relative to the center of the measurement area are
displayed in the current stage coordinate area of the XY View window. The travel
area of the stage is limited to a circle 210 mm (8.2 in.) in diameter. (See Figure 5.12).

Figure 5.12 Coordinate System of the KLA-Tencor Profiler Stage

Preliminary
Scan Site Positioning Procedure 5

1. After the sample is loaded on the stage and the stage returned to the scan
position under the stylus, click FOCUS.
2. Use one or more of the following methods to locate a scan site. (See Table 5.11.)

Table 5.11 Locating a Scan Site

Movement Required Movement Method
To make a large move Sample Navigation Window – The navigation circle
across the sample represents the stage area. Click the location on the
surface, use the Sample Sample Navigation Window to move to the
Navigation Window corresponding location on the sample. (See
(See Figure 5.14.) Figure 5.14.)

Move to a different site in Video Display Window – Click the desired site in
the current Video Display video display window. (See Figure 5.14.)
Window (See The site moves so that the video crosshair are
Figure 5.14.) centered on the chosen location.

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Table 5.11 Locating a Scan Site

Movement Required Movement Method
Move in increments Arrow Buttons Positioning – Click the Fast,
across the sample using Medium, or Slow buttons (move extents) to change
the Video Display the stage movement increments. (See Figure 5.13.)
Window to locate a With the cursor over the arrow button, click for one
feature or scan site. move of the distance defined by the move extents
setting. Click and hold to start and continue the stage
movement in increments defined by the move
extents. Release to stop the stage movement.

NOTE: The incremental distance

represented by the Fast, Medium, and
Slow buttons can be changed by
choosing Move Extents from the Move
menu. The Move Extent dialog box
appears in which the new speeds for
each button can be entered.
Preliminary

Precision positioning Stylus Drop-Lift Positioning – After the null is

using the Stylus Drop-Lift complete, click the Stylus Drop-Lift button. This
changes the optics to side-view with the stylus in the
down position. Click on the scan site beginning point.
Repeat if necessary until the stylus is at the desired
starting point of the scan.

Figure 5.13 XY View Screen Tool Bar

Click on the appropriate button to Click on the Stylus Drop-Lift button

set the move increments (speed). to view the scan start position.

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3. Click the Stylus Drop-Lift button to null the stylus on the sample and confirm the
scan position.

Figure 5.14 XY View Screen

Video Display Window

Preliminary
Sample Navigation
Window

U SING D IE G RID N AVIGATION 5

Introduction 5

When scanning a wafer, the die grid navigation features can be used to teach scan
and sequence sites by die location rather than by stage coordinates.
Die grid navigation is composed of two components: Die Grid Navigation Window;
and Die Window.
The Die Grid Navigation Window presents a representation of the die positions on the
wafer surface. (See the Die Grid Navigation Window in Figure 5.15.) The small
highlighted rectangle, in the upper right quadrant of the die matrix, represents the die
currently being scanned. Each time a new die is chosen, the scan is performed on the
same position in that die. (See Die Window in Figure 5.15.)
The Die Window is designed to pinpoint the location of the feature to be scanned on
each die. (See the Die Window in Figure 5.15.) The cursor in the rectangle represents
the location on the die where the feature to be scanned resides. To move to another
scan position in the die, click on the new position in the Die Window box.

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Figure 5.15 Teach Die Grid Screen with Loaded Die Grid

Current Die Scan Position: The die

currently being scanned is highlighted.

Die Grid Navigation Window:

This is a representation of the
current die grid loaded in the
system. Click on any die to move
the associated die on the current
wafer to the scan location.
Preliminary

Grid Information Die Window: This is a Current position of

Area surface representation of the die feature
each die on the grid. being scanned.

Once a die grid pattern is loaded, the Die Grid Navigation Window appears in the
Teach Scan screen (except in calibration procedures), Teach Sequence Site screen,
and Teach Blob Analysis screen.
Die Grid windows (see Figure 5.15) differ from standard Teach windows in three
aspects:
Š Die Grid Navigation Window—replaces the Sample Navigation Window. (See
Figure 5.2.) Click in the desired die grid to quickly move the corresponding die
into the field of view in the Video Display Window.
Š Die Window—for positioning a feature in the field of vision within the die
itself. Click in the desired region to quickly move that area of the die into the
field of view.
Š Grid information area—contains wafer and current die coordinates, wafer
diameter, and die size.

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In making it more convenient to position scans on a wafer, Die Grid Navigation

provides the following options:
Š Mask out the dies that are not to be measured. Masked dies appear blacked out
on the Die Grid Navigation Window, providing visual reference points.
Š Display the die coordinates on the Die Grid Navigation window and even
change the font and size of the numbers.
Š Show the partial dies on the edge of the wafer.

Creating a Die Grid 5

Introduction 5

To use a die grid, one must be created using a sample with clearly defined identical
dies, equally spaced. Once created, it can be used whenever measurements are being
made on samples which are identical to the one used to make the die grid. Numerous
die grids can be created, stored, and loaded as they are needed.

Preliminary
Wafer alignment on the sample stage is critical to the systems ability to consistently
locate dies on the wafer. It must be precisely placed with it X- Y- orientation identical
to that of the die grid. This can be accomplished by using a precision locator on the
sample stage. The loaded die grid pattern is accurate only as long as the wafer is not
moved after the initial die grid alignment procedure. This means that the vacuum
must be turned on when the wafer is loaded and not turned off until the wafer is
unloaded. If the wafer is moved, the die grid must be reloaded, a procedure which
realigns the wafer dies with the die grid.
The die grid is created by establishing its size and position on a wafer, and identifying
a unique and distinguishable feature which the system can use to locate the same
position on any die.

Teach a Die Grid 5

Creating a die grid is a user friendly procedure. Once the Teach Die Grid procedure is
initiated, each step is prompted by a message at the bottom of the screen or next to the
graphic.
1. Click on the Scan Recipe button at the top of the option list located at the left of
the Catalog screen. (See Figure 5.16.)

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Figure 5.16 Scan Catalog Screen

Step 2 Click on the Die Grid icon to

initiate the Teach Die Grid procedure.

Step 1 Click on the Scan

Recipe button to open the list
of available scan recipes.
Preliminary

2. Click on the Die Grid button in the tool bar, or select Teach Die Grid from
the File menu. (See Figure 5.16.)
The Teach Die Grid window appears with a warning about the automatic null
feature of the Teach Die Grid procedure. (See Figure 5.17.)

Figure 5.17 Warning – Automatic Null

Step 3 Click OK to continue.

3. Click OK to continue with the procedure. (See Figure 5.17.)

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4. In the Teach Die Grid screen, the procedure is prompted from the message
display area at the bottom left of the screen. (See Figure 5.18.)

Figure 5.18 Teach Die Grid Screen

Preliminary
Step 4 The message prompt, here
under the graphic, informs the
operator of procedures as they
occur and operator requirements.

Notice in Figure 5.18 that the message prompt tells the operator to place a
specific sized wafer on the stage and then click on OK. The system is configured
to run a specific sized wafer. It is important that only that size wafer be used.
5. Obtain the wafer to be used in the teach die grid procedure
6. Click MAN LOAD to move the stage to the door.
7. Open the door and load the wafer onto the precision locator. (If there is no
precision locator, have one installed before continuing with this procedure.)
8. Turn ON the vacuum using the switch located at the left inside edge of the door.
9. Close the door and click MAN LOAD to send the stage back under the
measurement head.

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10. Click on OK when all variables are correct.

Figure 5.19 Teach Die Grid - Teach First Position

Step 11 The graphic represents

a single die. The thick gray
border is the area between the
various dies on the wafer. Teach
the first position as indicated by
Preliminary

the arrow in the illustration.

Notice the message,

instructing the operator.

11. Teach the upper left inside corner of the die: (follow the instructions on the
screen)
Š Position the die image using the arrow buttons so that the upper left corner
of the die is in the field of view.
Š Position the mouse cursor at the left inside corner of the die, as indicated in
the Figure 5.19 illustration, and click.

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Figure 5.20 Teach Die Grid - Teach Feature

Step 12 Use the arrow buttons to

locate a distinct feature. Use the
click and drag procedure to draw a
box around the feature. The system
displays a message if the box is too
small or too large. This prompt is designed to
indicate that the operator must
pick a distinct feature that is
common to all dies and choose
it as the search feature.

Preliminary
Notice the message,
instructing the operator.

12. Teach a pattern in the die:

Š Using the arrow buttons, locate a feature that is present in every die. The
pattern should be distinct from other nearby features.
Š Click and drag to draw a box around the feature. Start at the upper left
corner and drag across the feature so that it is centered in the box when the
mouse button is released.
The instrument centers the pattern in the image crosshairs twice. The Wafer
Data dialog box appears. (See Figure 5.21):

Figure 5.21 Wafer Data Dialog Box

Step 13 If the exact die size is

known, highlight the variable
box for each dimension and
enter the value. Leave it 0 if the
system is required to determine
the size. This number represents the
distance from the left wafer
Step 14 When all variables have edge that the dies start. The
been set, click OK to continue. distance is measured in full die
widths, in this case, 2.

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13. Verify and correct the wafer data and type in die width and height if known.
Š To teach the die size, leave Die width and Die height at 0.
Š Left die number tells the instrument how far from the left edge to set its
reference point. The value indicates the reference distance in the number of
full die widths from the edge.
14. After making any required adjustments, click OK.
If the die width and height were not entered, the instrument continues to the
third position in the Teach Die Grid sequence:

Figure 5.22 Teach Die Grid - Lower Right Corner

Preliminary

Step 15 Use the arrow buttons

to move the field of view to the
lower right corner of the die and
click on the outside corner.

Notice the message,

instructing the operator.

15. Use the arrow buttons to move the die image so the lower right outside corner of
the die is visible. Move the mouse cursor to the lower right outside corner of the
die and click on it to teach the position.
Š The stage moves to various dies on the wafer, locating the pattern taught in
Step 12 The taught image appears in the navigation window with a
comment underneath it that advises the operator which die is being
checked. (See Figure 5.23.)

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Figure 5.23 Teach Die Grid - With Feature in Navigation Window

The feature appears in

Preliminary
the navigation window,
above the text explaining
the current system
activity.

16. When the system completes its check, the die grid is applied. The Teach Die
Grid screen changes its die grid navigation window to reflect the current die grid
configuration on the wafer. (See Figure 5.24.) The taught die appears in dark
blue. The operator is prompted to click OK to save the die grid.

Figure 5.24 Teach Die Grid - Die Grid Simulation in Navigation Window

The die grid simulation is

visible in the die grid
navigation area with the
taught die highlighted.

The die is presented as a

large rectangle with the
feature location and size
indicated by a boundary
box in the relative location
of the feature on the die.

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At the bottom of the die grid navigation window is a representation of the die
grid, which appears as a bounded white rectangle. The taught feature is pictured
a small bounded box appearing in its relative position in the die. This makes it
easier for the operator to locate the feature if a visual search is necessary.
17. Click OK (bottom center of the screen) to save the die grid.
A save dialog box appears. (See Figure 5.25.)

Figure 5.25 Save Die Grid As Dialog Box

Step 18 Choose the location

where the die grid is to be saved
by clicking in the down arrow and
selecting the appropriate directory.
Step 21 After
Step 20 Type in the name of the
completing Step
new die grid.
18 - Step 20,
Step 19 Choose the format for click on Save.
Preliminary

the die grid to be saved in by

clicking the down arrow and
choosing the appropriate format. It
should be Data files (*.die).

18. Choose the drive and directory for storage of the die grid file. (See Figure 5.25.)
19. Ensure that the proper file format is chosen for saving the die grid file. Click on
the Save As Type: menu arrow to display its menu and choose the required
format from the menu. (See Figure 5.25.)
20. Type a name for the die grid in the File name: variable box. (See Figure 5.25.)
21. Click on Save. (See Figure 5.25.)
The extension *.die is supplied automatically. Die Grid Navigation is enabled
with the new die grid applied. Using Die Grid Navigation on page 5-19
describes how to use Die Grid Navigation with sequences.

Loading a Die Grid (Turning ON Die Grid Navigation) for a

Single Scan 5

1. Ensure that the wafer is in place on the stage. It must have the same pattern as
that of the die grid being loaded.

CAUTION: It is very important that the wafer is placed in the same

orientation that the die grid was taught. If not, the system cannot find
the dies. Use a precision locator to place the wafer in the proper
orientation.

2. In the XY View, Scan Editor, or Sequence Editor windows, click on Die Grid from
the menu bar. (See Figure 5.26.)

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Figure 5.26 Sequence Editor with Die Grid Menu

Step 2 Click on Die Grid

to display its menu.

Step 3 Click on Load... to

display the Load Die Grid
dialog box.

Preliminary
3. Click on Load to display the Load Die Grid dialog box. (See Figure 5.27.)
4. In the Load Die Grid dialog box, double-click on the name of the die grid to be
used. This displays die grid name in the File Name display box.

Figure 5.27 Load Sequence Die Grid

Step 4 To choose a die grid to

associate with the sequence:
1. Double-click on the name of
the die grid.
2. Click on Open to load it.

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5. Click on Open to load the die grid.

The system nulls the stylus and begins to search for the pattern that is displayed
on the right side of the screen. After it successfully locates the test pattern, the
die grid is loaded.
Die Grid navigation is now active and the die grid selected is applied.

Clearing a Die Grid (Turn OFF Die Grid Navigation) 5

1. Go to the Teach Scan window.

2. Click the Die Grid menu, and select Clear Die Grid. (See Figure 5.28.)

Figure 5.28 Die Grid Menu From the Menu Bar

Preliminary

Standard navigation is active again.

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Navigating Across the Wafer Using the Die Grid 5

1. Load a die grid using the procedure in Loading a Die Grid (Turning ON Die
Grid Navigation) for a Single Scan on page 5-28)
2. Die Grid Navigation uses the representation of the sample that appears in the
Sample Navigation Grid at the right of the XY View screen. To move the to a
specific die, click on its location. The system moves the stage to that die and
focuses on the feature. The feature’s position is indicated in the die
representation below the Sample Navigation Grid.

Figure 5.29 Die Grid Navigation

Step 2 When navigating using

Preliminary
the die grid, the die grid
representation appears in the
Sample Navigation Window.
To move to a specific die, click
on its position.

The location in the individual

die, where the optics focus, is
indicated in the die
representation.

Enabling the Dropout Die Option 5

Go to the Teach Scan window, and press the SHIFT key while clicking the dies in the
Die Grid Navigation Window that are to be dropped out. These dies are not scanned.
The die is blacked out. To restore a dropped out die, click it again.

Clearing Dropout Dies From the Grid 5

From the Die Grid menu, click on Clear Drop Out Dies. The dies are restored to
availability for scan purposes.

Moving to Partial Dies 5

1. From the Die Grid menu select Enable Partial Die to enable the Partial Die option.
2. Go to the Teach window, click on Die Grid, then click on Move To Partial Dies.
(See Figure 5.28.)
3. In the Die Grid Navigation Window, click on the partial die to navigate to it.

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Displaying Grid Numbers in the Die Grid Navigation

Window 5

From a Teach Scan/Site window, click on Die Grid, then click on Display Numbers.
(See Figure 5.28.)
If the numbers are too small to see, increase the size of the Die Grid Navigation
Window by clicking and dragging the window’s vertical separator bar to the left.

To Change the Font and Color of the Grid Numbers 5

1. Go to a Teach Scan/Site window, click on Die Grid, click on Font.

A standard font dialog box appears.
2. Select the font attributes desired and click OK.

U SING B LOB A NALYSIS (C ENTER O BJECT S EARCH ) 5

Preliminary

Introduction 5

Blob, or Center Object Search, locates features by their mass distribution (general
shape), which might not be apparent from the two-dimensional video image. To use
Center Object Search, first store the image of the object by teaching it. The instrument
compares the stored image with features within its search area, looking for a similar
mass distribution. When the instrument finds a similar object, it positions the scan,
orienting the center of the scan line or scan area (3D) with the center of the object.
Center Object Search works best with features that are rounded or conical.

Starting Blob Analysis 5

1. With the object in question displayed in the XY View video screen click on
View to display its menu.

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2. Select Display Center Object View from the View menu. (See Figure 5.31)

Figure 5.30 XY View Screen – View Menu

Step 1 Click on View to

Display its Menu.

Step 2 Choose Display

Center Object View from
the View menu.

Preliminary
The Teach Center Object window appears. (See Figure 5.31)
3. In the Video Display, locate the object to be scanned.

Figure 5.31 Teach Center Object Window

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4. Click and drag the cursor box around the object, placing its center dot on the
object’s center of mass.
The instrument positions the object in the center of the video image.
The instrument uses pattern recognition to analyze the object. The object’s
pattern is stored with the recipe and made available each time the recipe is used
with Display Center Object View checked.
If the instrument is having trouble finding the object, it might help to edit the
binarization threshold, that is, change the level of contrast the instrument uses in
recognizing the object. (See Changing the Level of Contrast on page 5-34.)

Changing the Level of Contrast 5

1. Click the Blob menu and select Edit Binarization Thresholds. (See Figure 5.32
and Table 5.9 on page 5-9.)

Figure 5.32 Teach Center of Object Screen

Preliminary

Step 1 Click on Blob to

display its menu. Choose Edit
Binarization Thresholds.

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The Select Object Type dialog box appears. (See Figure 5.33):

Figure 5.33 Select Object Type Dialog Box

Preliminary
Š If Dark Object is selected, raise the threshold.
A threshold of 0 accepts only objects of very high contrast—black objects
against a white background. The highest threshold, 256, accepts a very low
contrast object—gray object against a lighter background.
Š If Light Object is selected, lower the threshold.
A threshold of 0 in this case recognizes very low contrast objects—gray
objects against a darker background. A threshold of 256 recognizes high
contrast objects—very bright objects against a very dark background.
2. Click OK to accept the settings and close the dialog box.

A LIGNING THE S AMPLE 5

Introduction 5

This procedure aligns the sample image with the X-axis of the view screen using a
straight feature on the sample. Two methods for accomplishing this, each of which
rotate the stage (theta movement) to accomplish the alignment, are detailed in the
following sections. With the sample features aligned with the X-axis, more accurate
scans can be taken and die grid navigation is more accurate.

Procedure 5

Aligning the Sample with the Instrument 5

This procedure assumes that the sample is already on the sample stage and ready for
alignment. The sample must have a straight, easily discernible feature that can be
used to aligned the sample features with the X-axis of the XY view screen.

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1. Click on the FOCUS button in the tool bar. The stylus nulls on the sample surface
and the sample image comes into focus.

Figure 5.34 Arrow Button Movement - Scan Offset Calibration

Step 1 Click on the FOCUS button to lower the head and focus on the sample.

Step 2 Use the arrow

buttons to locate and
center the feature under
the crosshair. The
arrows move the
sample in the direction
Preliminary

that the arrow points.

2. Using the linear movement arrow buttons, locate the center of the feature to be
used for alignment. (See Figure 5.34.)

CAUTION: It is very important that the chosen feature be such that it

lies in a straight line across the X-axis of the sample. A thin line is best
for use in the alignment procedure.

NOTE: The arrows move the stage not the optics.

3. Use the arrow buttons to approximately center the screen crosshair in the center
of the feature. (Or, move the cursor to the center of the feature and click. This
should move the crosshair to that location.)

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4. Click on View in the tool bar to display its menu. In the menu, click on Align
Sample. (See Figure 5.35.) This sets up the Alignment Sample procedure which
aligns the XY axis of the screen with the chosen feature.

Figure 5.35 Align Sample Procedure - Scan Offset Calibration

Step 4 To align the

Stylus Alignment Tool
with the XY axis of the
screen, click on Align
Sample.

Preliminary
5. A dialog box appears requesting input of the intended alignment angle. The
default is 0 which aligns the feature with the X-axis after the procedure is
complete. Click on OK in the dialog box to accept the 0 value. (See Figure 5.36.)

Figure 5.36 Setting Alignment Angle

Step 5 Click on OK to accept

the “0” angle alignment.

6. Using the right arrow button (→), scroll across the feature to the left portion of
the feature. Stay close to the feature, and stop when a reasonable distance has
been covered (or at the end of the feature if it is small).
7. Place the crosshair cursor on a portion of the feature that is easily duplicated at
its other end and click with the left mouse button. The system performs
adjustments which align the screen crosshair to the feature at the point of
contact.

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8. The message prompt displays at the bottom left of the screen, “Press OK to
accept the first alignment position.” Click OK, at the bottom right of the screen,
to accept the first alignment position.
9. Using the left arrow button (←), scroll across the center of the feature (starting
point). Stay close to the feature, and stop when the sample has move a
significant enough distance to give the software a long interval over which to
align the sample with the X-axis. Place the crosshair cursor over the same
portion of the feature that was used to set the first position and click with the
left mouse button. The system performs final adjustments, aligning the feature
with the XY axis.
10. The message prompt displays “Press OK to accept the second alignment
position.” Click OK, at the bottom right of the screen, to accept the second
alignment position.
11. After the adjustments have been completed by the system, the message prompt
at the bottom of the screen indicates that the OK button must be clicked to accept
the new alignment adjustment. Click OK (bottom right of screen) to accept or
click Cancel to run a new alignment angle calculation.
Preliminary

This completes the Align Sample procedure.

Manual Alignment of the Sample 5

The sample can be aligned manually using the XY view screen in conjunction with
the theta (rotational) movement arrow buttons on the tool bar.
1. Follow Step 1 through Step 3 in Aligning the Sample with the Instrument.
2. Use the theta movement arrows in the tool bar (in conjunction with the other
arrow buttons as necessary) to rotate the chosen feature until it aligns with the
X-axis on the XY view screen.
a. Click the button for counterclockwise rotation.
b. Click the button for clockwise rotation.
The Theta movement buttons may rotate the image past the point required
to align the sample features with the X-axis. If this happens, the following
adjustments to the theta movement can be made:
i. Check the Speed Setting in the Move menu. In the tool bar at the top
of the XY view screen, click on MOVE to display the menu. (See
Figure 5.37.) Three speeds (which are actually movement
increments) are available: Slow, Medium and Fast. If the image
always rotates past the X-axis, refine the movement by moving to the
next slower movement. If the Slow setting still does not allow
alignment, move to step ii.

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Figure 5.37 Move Menu

Click on the desired speed in the Move menu.

The chosen speed has a check in front of it.
Click on Move Speeds to display the Move
Extent dialog box. (See Figure 5.38.)

ii. The amount of rotation in the theta arrow buttons is set in degrees in
the Move Extents dialog box with each setting (Slow, Medium, or Fast)
having its own rotation in degrees.

Figure 5.38 Move Extent Dialog Box

There are three movement

Preliminary
speeds available in the Move
menu. All three are defined in the
Move Extents dialog box. For
each 100 µm the stage moves 1°.
EXAMPLE: In the Fast Move
Extent box is set to 300. This
means a 3° movement with each
click on a theta arrow.

Check the Slow Move Extent box and set it as low as 0.01. Click on
OK to set the new speed.

iii. In the XY view screen, click on Move and choose Slow. (See
Figure 5.37.) The theta movement should now be small enough for
proper alignment.

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Preliminary

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 6
VIEW SCAN WINDOW Chapter 6

I NTRODUCTION 6

This chapter describes:

Š 2D Screen Function on page 6-1
Š 2D Screen Function on page 6-1
Š 3D Screen Function on page 6-10
Š Show Measurement Site During Sequence Run on page 6-21
Š Aborting A Scan on page 6-23

P rel i mi n a ry
2D S CREEN F UNCTION 6

The View Scan Window appears while a scan is being run. It allows the user to observe
the progress of the scan and to adjust scan parameters in the various screens for
optimum scan results. The scan can be started once the recipe has been chosen and the
sample loaded onto the sample stage. The scan can be started from several places. The
most common two starting points are:
Š With the required recipe chosen, click on START in the Scan Recipe screen.
Š From the Scan Recipe screen, click on the XY icon. From the XY screen click on
START.

Click START to begin the scan. The View Scan screen appears. (See Figure 6.1.)
The head lowers bringing the stylus into contact with the sample at the
start-of-scan position. The scan begins, first briefly traveling opposite the scan
direction, then reversing. This allows the mechanical instruments to settle down
and the stage to reach the programmed scan speed before data collection begins.
The View Scan window appears and the scan begins. The video image freezes
during the scan and the Real Time Scan view in the lower right corner displays
the data in real time as it is collected. (See Figure 6.1). When the scan is
finished, the data is automatically displayed in the Analysis window.

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Figure 6.1 2D Single Scan View Scan Window

The sample surface and

scan progress is displayed
Real Time Scan
from the side-view in the
Trace Window
Video Display.

Scan information is
displayed in this area.
Preliminary

Two columns of information are presented in the lower left quadrant of the 2D scan
screen (Figure 6.1) and three columns in the 2D sequence screen (Figure 6.2).

Figure 6.2 2D Sequence View Scan Window

Scan information in the

Sequence View Scan
Window

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2D Scan Information Field 6

Figure 6.3 2D Scan Window - Scan Information Field

Scan Recipe Scan Location

information column. information column.

2D Recipe Column 6

The first column in the 2D Scan Information Field is the Recipe column. It contains
the scan recipe name and some of the critical determining recipe parameters.
Table 6.1 presents a brief description of each parameter.

Preliminary
Table 6.1 Scan Screen - Recipe Information Column
Parameter Description
Recipe Gives the name of the recipe being used to create the
scan. If the name is followed by “…” then it is truncated.
Scan Type The type of scan being produced, 2D or 3D.
Scan Length The length of the scan on the X-axis direction.
Scan Speed How fast the stage moves during the data gathering
portion of the scan.
Sampling Rate The number of data points being collected per second
during the scan.
Scan The direction in which the scan is being performed. -> is in
the positive direction, and <- is in the negative direction.

Scan Information Field - 2D Location Column 6

The second column in the Scan Information field is the Location column. It contains
the coordinates and orientation of the scan starting point. Table 6.2 presents a brief
description of each parameter.

Table 6.2 View Scan Screen - 2D Location Information Column

Parameter Description
X The X coordinate of the scan origination point
Y The Y coordinate of the scan origination point
T The rotational value of the sample at the scan origination
point.

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Scan Information Field - 2D Sequence Recipe Column 6

Figure 6.4 2D Scan Window - Scan Information Field

Sequence
Scan Location
Information
information
column.
Scan Recipe
information
column.

2D Sequence Column 6

The first column in the Scan Information field is the Sequence column. It contains the
information regarding the sequence being used in the scan. Table 6.3 presents a brief
description of each parameter.
Preliminary

Table 6.3 View Scan Screen - 2D Location Information Column

Parameter Description
Sequence The Sequence Recipe Name
Step Shows which step of the total number of step the system is
currently performing.
Slot N/A – No handler for P-15.
Lot ID The name of the sample lot. This is assigned by the
operator or the system defaults to Recipe Name. (See
Table 7.7 on page 7-11.)

2D Recipe Column 6

The second column in the Scan Information Field is the Recipe column. It contains
the scan recipe name and some of the critical determining recipe parameters.
Table 6.1 presents a brief description of each parameter.

Table 6.4 Scan Screen - Recipe Information Column

Parameter Description
Recipe Gives the name of the recipe being used to create the
scan. If the name is followed by “…” then it is truncated.
Scan Type The type of scan being produced, 2D or 3D.

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Table 6.4 Scan Screen - Recipe Information Column

Parameter Description
Scan Length The length of the scan on the X-axis direction.
Scan Speed How fast the stage moves during the data gathering
portion of the scan.
Sampling Rate The number of data points being collected per second
during the scan.
Scan The direction in which the scan is being performed. -> is in
the positive direction, and <- is in the negative direction.
Trace The current trace in the sequence.

2D Location Column 6

The second column in the Scan Information field is the Location column. It contains
the coordinates and orientation of the scan starting point. Table 6.2 presents a brief

Preliminary
description of each parameter.

Table 6.5 View Scan Screen - 2D Location Information Column

Parameter Description
X The X coordinate of the scan origination point for the
current scan in the sequence.
Y The Y coordinate of the scan origination point for the
current scan in the sequence.
T The rotational value of the sample at the scan origination
point for the current scan in the sequence.

Video Image 6

The upper left quadrant of the screen displays a side-view of the scan as it progresses
across the sample surface. A trace arrow in the top-down view, visible with its origin
at the crosshair of image, marks the course of the scan. (See Figure 6.1 on page 6-2.)

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Real Time Scan Trace Window 6

This window presents a real time trace of the scan. (See Figure 6.5.) A 2D scan can be
set up for multi-scan averaging which causes the system to scan the same location as
many times as the set parameter requires. Each subsequent scan’s trace appears in a
different color in the window using a four color rotation. At the end of the scan, the
traces are averaged by the system and the result presented in the Analysis screen.

Figure 6.5 Scan screen - real time Trace Window

This is the Y axis of the

scan graph. It is set by This is the X axis of
system to capture the the scan graph. It is
height and depth of sample determined by the
surface features. Scan Length setting
in the recipe.
Preliminary

In the Real Time trace window the height/depth of the features relative to the surface
is presented as a trace across the graph. The graph’s Y coordinates are set by the
system and displayed in a scale that is appropriate for displaying scan features. The
X-axis scale is determined by the scan length set in the scan recipe. (See Figure 6.5.)

2D View Scan Screen Tool Bar 6

The tool bar buttons are provided for convenience. Many of their functions are
duplicated from other screen menu items in the menu bar. Table 6.6 presents a brief
description of the function of each button.
Use the buttons to customize the appearance of the Real Time view. Note that while
the scan is still Live (not saved), the XY view, Analysis Window, Recipe Editor and
Scan View screen can all be toggled between so parameters can be readjusted to
improve the scan. The first buttons in the following table open the various screens.
All the buttons are located in the tool bar at the top of the View Screen. (See
Figure 6.8 and Table 6.1.)

NOTE: During the scan, the buttons are grayed out and cannot be
accessed until the scan is complete. Only the STOP icon is active.

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Table 6.6 2D View Scan Window Tool Bar Buttons

Button Description
XY View Screen Icon – Changes to view the XY View screen.

Analysis Screen Icon – Changes screens to view the Analysis

screen.

Recipe Editor Screen Icon – Changes screens to view the Recipe

Editor Screen

Manual Scaling – Resizes the trace to fit in the graph. Requires

operator initiation.

Auto Scaling – Automatically resizes the trace after each scan.

Preliminary
START SCAN – Starts a stopped scan. The scan that was stopped
begins again from the start, the prior partial scan is not retained.

STOP SCAN – Stops a scan that is in process. A stopped scan

cannot be started again from the place in the scan where it
stopped. The scan begins again from the beginning.
PAUSE SEQUENCE – N/A for single scans.

START/RESUME SEQUENCE – N/A for single scans.

2D View Scan Screen Menu Bar 6

The menu bar contains those functions that are related to the activities required in the
View Scan Screen. Some of the functions are duplicated in the tool bar. (See
Figure 6.6.) Each menu is discussed in its own table.

Figure 6.6 2D View Scan Screen Menu Bar

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Table 6.7 2D View Scan Screen - File Menu

File Menu Description of Menu Items
Oscilloscope – Not available with P-series systems.
XY View – Returns to the XY View screen.
If the scan was stopped in the View Scan screen,
and the File/XY View menu item was used to toggle
to the XY view screen, the scan start position can be
adjusted. The user then toggles back to the View
Scan screen from the Actions/View Scan menu item
in the XY View screen, and the scan can be run
again in the new location.
Analysis – Returns to the Analysis screen with the current
data displayed.
Š If the scan is stopped by the user, the user can
toggle to the Analysis screen by using the
Preliminary

File/Analysis menu item.

Š If the user returns to the View Scan screen from the
Analysis screen to start a stopped scan, when the
scan is complete, the screen does not automatically
return to the Analysis screen. To return to the
Analysis screen, use the File/Analysis menu item.
Edit Recipe – Opens the Recipe screen for the current
scan.
Š If the user stops a scan and wants to edit the scan
recipe, the Recipe Editor can be opened using the
File/Edit Recipe menu item.

Exit Scan – Closes the current screen.

Table 6.8 2D View Scan Screen - Trace Menu

Trace Menu Description of Menu Items
Rescale – Resizes the trace to fit in the graph. Requires
operator initiation.
Auto Scale – Scales the trace as it is being created.
AC/DC – Grayed out - Not available.

Table 6.9 2D View Scan Screen - Mode Menu

Mode Menu Description of Menu Items
Background Subtraction – appears active but is not
available for use with the P-15 system.

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Table 6.10 2D View Scan Screen - Image Menu

Image Menu Description of Menu Items
Zoom In – Not available in the P-series systems.
Center Anchor – Not available for single 2D scans.
Corner Anchor – Not available for single 2D scans.
Edit Scan Parameters… – Use the File/Recipe menu item
for this function.

Table 6.11 2D View Scan Screen - Scan Menu

Scan Menu Description of Menu Items

Preliminary
Start – Starts the scan after it has been stopped mid
process. This is the same as the START button in the tool
bar. The grayed out option is the currently active one. In
the illustration, the scan has been started, only stopping
can be performed.
Stop – Stops the scan during a scan without canceling the
procedure. The scan can be started all over again, but not
from the point in the scan where it was halted.

Table 6.12 2D View Scan Screen - Sequence Menu

Sequence Menu Description of Menu Items
Pause – Used in Scan Sequences only.
Resume – Used in Scan Sequences only.

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Table 6.13 2D View Scan Screen - Pan Menu

Pan Menu Description of Menu Items
Slow – Small size stage movement increments. The Slow
movement is defined in the Move Speeds dialog box.
Medium – Medium size stage movement increments. The
Medium movement is defined in the Move Speeds dialog
box.
Fast – Large size stage movement increments. The Fast
movement is defined in the Move Speeds dialog box.
Move Speeds… – Opens the Dialog box to define the
stage movement increments.
Left – Not Available in the P-Series systems.
Right – Not Available in the P-Series systems.
Preliminary

Up – Not Available in the P-Series systems.

Down – Not Available in the P-Series systems.

Table 6.14 2D View Scan Screen - Debug Menu

Debug Menu Description of Menu Items
Switch to 2D – unavailable for this application
Switch to 3D – unavailable for this application
Turn on Square Tool – unavailable for this application

3D S CREEN F UNCTION 6

The function of the 3D View Scan screen is similar to that of the 2D screen. Some
additions to the screen are made to facilitate 3D analysis and operator monitoring of
the scan process. Some menu items from the Menu bar are not accessible when
operating 3D sequences.
The View Scan Window for 3D scans appears while a scan is being run. It allows the
user to observe the progress of the scan and to adjust scan parameters in the various
screens for optimum scan results. The scan can be started once the recipe has been
chosen and the sample loaded onto the sample stage. The scan can be started from
several places. The most common two starting points are:
Š With the required recipe chosen, if the user believes that the scan starting point
is already set to the desired point, click on START in the Scan Recipe screen.
Š To view the sample and align the starting point of the scan, from the Scan
Recipe screen, click the XY icon. After the necessary adjustments are made to
the start position in the XY View screen, click START.

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Click START to begin the scan. The View Scan screen appears. (See Figure 6.7.)
The head lowers bringing the stylus into contact with the sample at the
start-of-scan position. The scan begins, first briefly traveling opposite the scan
direction, then reversing. This allows the mechanical instruments to settle down
and the stage to reach the programmed scan speed before data collection begins.
The View Scan window appears, switches to side view optics, and the scan
begins. The video image shows the stylus in contact with the sample surface
during the scan from the side-view perspective. The Real Time Scan graph in
the lower right quadrant displays the data in a real time trace as it is collected.
(See Figure 6.7). After each trace, the data is presented in the 3D Top View
window, with each successive trace being added to the others until all traces are
viewed in the window. When the scan is finished, the system performs
calculations on the data and automatically displays it in the Analysis window.

Figure 6.7 3D View Scan Screen During a Single Scan

Preliminary
The Video Display window 3D Top View
shows the sample surface display, view of
with the scan area composite traces.
surrounded by a box.

Along with the items found in

the 2D Information filed,
Trace: is added as a strictly
2D trace display, of
3D element.
single trace used
to create 3D

Two columns of information are presented in the lower left quadrant of the 3D scan
screen (Figure 6.7) and three columns in the 3D sequence screen (Figure 6.8).

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Figure 6.8 3D View Scan Screen During a Scan Sequence

When performing a
sequence, the Sequence
information is added to the
information set.
Preliminary

3D Scan Information Field 6

Figure 6.9 3D Scan Window - Scan Information Field

The only parameter in this

field that is different from
the 2D field is Trace:

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3D Scan Recipe Column 6

The first column in the Scan Information Field is the scan Recipe column. It contains
the scan recipe name and some of the critical determining recipe parameters.
Table 6.15 presents a brief description of each parameter. The 3D column adds Trace
to information presented in a 2D parameter set.

Table 6.15 Scan Screen - Recipe Information Column

Parameter Description
Recipe Gives the name of the recipe being used to create the
scan. If the name is followed by “…” then it is truncated.
Scan Type The type of scan being produced, 2D or 3D.
Scan Length The length of the scan in the X direction.
Scan Speed How fast the stage moves during the data gathering
portion of the scan.

Preliminary
Sampling Rate The number of data points being collected per second
during the scan.
Scan The direction in which the scan is being performed. -> is in
the positive direction, and <- is in the negative direction.
Trace Presents: 1) The current scan number out of the total
number of scans to be completed. (2) Spacing between
traces through the scan area in both proportion (showing
how many traces are being made) and size.

3D Location Column 6

The second column in the Scan Information field is the Location column. It contains
the coordinates and orientation of the scan starting point. Table 6.16 presents a brief
description of each parameter. This information is identical with that for 2D scans.

Table 6.16 View Scan Screen - 3D Location Information Column

Parameter Description
X The X coordinate of the scan origination point
Y The Y coordinate of the scan origination point
T The rotational value of the sample at the scan origination
point.

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Scan Information Field - 3D Sequence Recipe Column 6

Figure 6.10 3D Scan Window - Scan Information Field

Sequence
Scan Location
Information
information
column.
Scan Recipe
information
column.

3D Sequence Column 6

The first column in the Scan Information field is the Sequence column. It contains the
information regarding the sequence being used in the scan. Table 6.17 presents a brief
description of each parameter.
Preliminary

Table 6.17 View Scan Screen - 3D Location Information Column

Parameter Description
Sequence The Sequence Recipe Name
Step Shows which step out of the total number of steps the
system is currently performing.
Slot N/A – No handler for P-15.
Lot ID The name of the sample lot. This is assigned by the
operator or the system defaults to Recipe Name. (See
Table 7.7 on page 7-11.)

3D Recipe Column 6

The second column in the Scan Information Field is the Recipe column. It contains
the scan recipe name and some of the critical determining recipe parameters.
Table 6.18 presents a brief description of each parameter.

Table 6.18 Scan Screen - Recipe Information Column

Parameter Description
Recipe Gives the name of the recipe being used to create the
scan. If the name is followed by “…” then it is truncated.
Scan Type The type of scan being produced, 2D or 3D.

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Table 6.18 Scan Screen - Recipe Information Column

Parameter Description
Scan Length The length of the scan on the X-axis direction.
Scan Speed How fast the stage moves during the data gathering
portion of the scan.
Sampling Rate The number of data points being collected per second
during the scan.
Scan The direction in which the scan is being performed. -> is in
the positive direction, and <- is in the negative direction.
Trace For the current 3D scan it presents: 1) The current scan
number out of the total number of scans to be completed.
(2) Spacing between traces through the scan area in both
proportion (showing how many traces are being made)
and size.

Preliminary
3D Location Column 6

The second column in the Scan Information field is the Location column. It contains
the coordinates and orientation of the scan starting point. Table 6.19 presents a brief
description of each parameter.

Table 6.19 View Scan Screen - 2D Location Information Column

Parameter Description
X The X coordinate of the scan origination point for the
current scan in the sequence.
Y The Y coordinate of the scan origination point for the
current scan in the sequence.
T The rotational value of the sample at the scan origination
point for the current scan in the sequence.

3D View Scan Screen Tool Bar 6

The tool bar buttons are provided for convenience. Many of their functions are
duplicated from other screen menu items in the menu bar. Table 6.20 presents a brief
description of the function of each button.
In 3D sequences most of the buttons are not active. Note that while the scan is still
under way and when a sequence scan is paused, the XY view, Analysis Window,
Recipe Editor and Scan View screen icons are all disabled. All the buttons are located
in the tool bar at the top of the View Screen. (See Figure 6.8 and Table 6.20.)

NOTE: During the scan, the buttons are grayed out and cannot be
accessed.

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Table 6.20 3D View Scan Window Tool Bar Buttons

Button Description
XY View Screen Icon – Disabled for this process.

Analysis Screen Icon – Disabled for this process.

Recipe Editor Screen Icon – Disabled for this process.

Manual Scaling – Resizes the trace to fit in the graph. Requires

operator initiation.

Auto Scaling – Automatically resizes the trace after each scan.

Preliminary

START SCAN –
Sequences: Once the STOP SCAN icon is clicked, the sequence
is terminated and there is no opportunity to use this button. Not
used in sequences.
Single Scans: In a single 3D scan, this initiates the scan from the
View Scan window. If the STOP SCAN icon is clicked, the scan is
terminated an this icon is not used to restart a stopped scan.
STOP SCAN –
Sequences: Stops a scan sequence that is in process and returns
to the Scan Catalog screen.
Single Scans: Stop a scan that is in progress and returns to the
Scan Catalog screen.
PAUSE SEQUENCE – Stops a sequence that is in process. If a
scan is in process when the sequence is paused, that scan is
repeated when the sequence is resumed.
START/RESUME SEQUENCE – Starts a sequence or resumes a
paused sequence. Resuming a sequence starts it from the
beginning of the interrupted scan.
PAN AND ZOOM – This icon is not applicable for the P-15 system.

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3D View Scan Screen Menu Bar 6

The menu bar contains those functions that are related to the activities required in the
View Scan Screen. Some of the functions are duplicated in the tool bar. (See
Figure 6.11.) Each menu is discussed in its own table.

Figure 6.11 View Scan Screen Menu Bar

Table 6.21 3D View Scan Screen - File Menu

File Menu Description of Menu Items
Oscilloscope – Not available with P-series systems.

Preliminary
XY View – Disabled for 3D scans
Analysis – Disabled for 3D scans
Edit Recipe – Disabled for 3D scans
Exit Scan – Disabled for 3D scans

Table 6.22 3D View Scan Screen - Trace Menu

Trace Menu Description of Menu Items
Rescale – Resizes the trace to fit in the graph. Requires
operator initiation.
Auto Scale – Scales the trace as it is being created.
AC/DC – Disabled.

Table 6.23 3D View Scan Screen - Mode Menu

Mode Menu Description of Menu Items
Background Subtraction – appears active but is not
available for use with the P-15 system.

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Table 6.24 3D View Scan Screen - Image Menu

Image Menu Description of Menu Items
Zoom In – Not available in P-15 systems.
Center Anchor – Not available in P-15 systems.
Corner Anchor – Not available in P-15 systems.
Edit Scan Parameters… – Use the File/Edit Recipe menu
items to perform this function.

Table 6.25 3D View Scan Screen - Scan Menu

Scan Menu Description of Menu Items
Start –
Preliminary

Sequences: The sequence is terminated when the STOP

button is clicked. There is no opportunity to use this menu
item.
Single Scans: Starts a 3D scan from the View Scan
window. Operates the same as the Start Scan icon.
Stop –
Sequences: Stops the sequence during a scan, canceling
the sequence and returning to the Sequence Catalog
screen.
Single Scans: Stops the scan and returns to the Scan
Catalog screen.

Table 6.26 3D View Scan Screen - Sequence Menu

Sequence Menu Description of Menu Items
Pause – Pauses the scan sequence. The current scan is
abandoned and will be started over when the Resume
icon or menu item is clicked.
Resume – Resumes the sequence again, initiating it at
the beginning of the scan that was interrupted.

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Table 6.27 3D View Scan Screen - Pan Menu

Pan Menu Description of Menu Items
Slow – Might appear active but is non functional.
Medium – Might appear active but is non functional.
Fast – Might appear active but is non functional.
Move Speeds… – Might appear active but is non
functional.
Left – Not Available in the P-Series systems.
Right – Not Available in the P-Series systems.
Up – Not Available in the P-Series systems.
Down – Not Available in the P-Series systems.

Preliminary
Table 6.28 3D View Scan Screen - Debug Menu
Debug Menu Description of Menu Items
Switch to 2D – unavailable for this application
Switch to 3D – unavailable for this application
Turn on Square Tool – unavailable for this application

Video Image 6

The upper left section of the screen displays scan image on the sample surface. (See
Figure 6.8.) Prior to the scan, a scan boundary box surrounds the scan area in the
image.

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Real Time Scan Window 6

This window presents a real time trace of the scan. (See Figure 6.12.) In the Real
Time trace window the height/depth of the features relative to the surface is presented
as a trace across the graph. The graph’s Yaxis scale is set by the system and displayed
in a scale that is appropriate for the scan features. The X coordinates are determined
by the scan length set in the scan recipe.

Figure 6.12 Scan screen - real time Trace Window

This is the Y-axis of the This is the X-axis of

scan graph. It is set by the scan graph. It is
system to capture the determined by the
height and depth of sample Scan Length setting
Preliminary

surface features. in the recipe.

In a 3D scan each subsequent scan’s trace is presented in the 3D Top View display.
(See Figure 6.13.) At the end of the scan the system presents the results in the 3D
Analysis screen.

Figure 6.13 Top View Image of the 3D Scan In Progress

The height of the scan

image is defined by the
the width of the scan
Y distance in the Recipe
image is defined by the
Editor for the recipe
X distance in the Recipe
being used.
Editor for the recipe
being used.

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S HOW M EASUREMENT S ITE D URING S EQUENCE R UN 6

Introduction 6

During a sequence scan procedure, the user can toggle between a view of the current
scan site (actually, the image contains as much of the scan site as allowed by the
current magnification) on the Video screen and the Die Measurement Site Map. (See
Figure 6.14.) To toggle between the views, use the following procedure:
1. In the Sequence Scan Screen, click View in the menu bar.
2. Choose Toggle Video or Wafer View to toggle between the scan site (Video) and
the wafer die map (Wafer View).
When the Show Measurement Site is enabled, the video screen presents a frozen image
of the scan start position. The Die Measurement Site Map contains the location(s) of
the scan sites or die in which the scans take place.

Preliminary
Figure 6.14 View Menu (Sequence Scan Screen)

Configuration 6

The Configuration screen provides the user with the option to set the system so the
video display can toggle between the measurement site image and to the video image
of the scan site. This dialog box is entered through the Configuration screen button,
Sequence Execution Options.

Figure 6.15 Sequence Execution Options

Show Measurement Sites

causes the starting point of
the scan site to be displayed
in the video screen.

Low Mag. Camera is

chosen by default to
view the scan site in the
video image.

Show Measurement Sites 6

To activate the Show Measurement Sites option,

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1. From the Configuration Screen, click Sequence Execution Options…

2. Click to put a check in the Show Measurement Sites checkbox. The default for
this feature is that it is disabled.
When this is clicked, the Low Magnification is automatically chosen and cannot
be disabled; it is the default setting. If the Show Measurement Sites is enabled,
the system allows the user to toggle between the display of the measurement
sites on a scan site sample image (like a wafer map), and the actual video view
of the scan site.
3. Click OK to save the settings and close the dialog box.

Camera Settings 6

The camera setting for the P-15 system is set to low magnification by default. The
view of the scan site is presented in low magnification. The view is limited by the
magnification and might or might not contain the entire scan area.

Wafer Image Display

Preliminary

If the Wafer Map is chosen, all of the sites that are to be scanned are visible on the
wafer image. If the wafer has a die grid and the die is loaded, the wafer map looks like
the die map and the entire die containing the scan site(s) is highlighted in a color. The
die is color coded to represent its scan status. The colors are as follows:
Š Yellow: Site waiting to be scanned
Š Dark Green: Site being scanned
Š Green: Site already scanned.

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If the wafer is not characterized by a die grid, or the die map is not loaded, the scan
sites appear as colored dots at the scan location. The color code is the same as that of
the wafer having a die grid map.

Figure 6.16 Sequence Scan Screen with Die Measurement Site Map

Green: Site
already scanned.

Dark Green: Site

being scanned.

Yellow: Site not

scanned.

Preliminary
Scan Site Image Display 6

As the sequence progresses through each scan site, the image of the current scan site
is displayed in the video screen. This is the view that alternates with the Die
Measurement Site Map (see Figure 6.16) as the View menu options are toggled
between (see Figure 6.14). This image is not live, but is a snap shot of the scan site
start position as it appears before the scan.

A BORTING A S CAN 6

Click the Stop button at any time to abort the scan. The scan can be started all over
again, but not from where it stopped. All data from the aborted scan is lost. If a
sequence is halted using the Pause button, and the sequence is resumed, the Analysis
screen might not be displayed at the end. Click File/Analysis to open Analysis.

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Preliminary

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 7
SEQUENCE RECIPE AND DATA (OPTIONAL) Chapter 7

I NTRODUCTION 7

The Sequence Recipe and Data application is a system option. It must be purchased.
The Pattern Recognition, which can be used with the Sequence option, must also be
purchased. The Sequence application uses sequences that contain multiple scan
recipes combined into one file for automatic sequence scanning. This saves time
when repeatedly scanning the same location(s) on multiple samples. The Sequence
Recipe and Data application consists of two parts:
Š Sequence Recipe Editor to load, create, edit, and save Sequence Recipes for
scanning.

P rel i mi n a ry
Š Sequence Database to load, collect, manipulate, and save data obtained from
scanning.
Sequences can be created using any combination of 2D and 3D recipes. The Sequence
Recipe contains information that directs the system to precisely position the sample
beneath the measurement head for each measurement in the sequence of scans. Each
measurement location in a sequence is called a site. The information for how to scan
each site is contained in the Scan Recipe that is connected with the site in the
Sequence Recipe. See Chapter 3 for more information on creating and editing Scan
Recipes.
The Sequencing feature provides the following capabilities:
Š Combine a 600 sites and Scan recipes
Š Set reference points for correcting translational and rotational variations
between substrates (deskew)
Š Re-scan portions of a long scan, using the long scan as a data reference for the
subscans so their measurements correlate with each other
Š Set Deskew manually or automatically using Pattern Recognition
Š Set Pattern Recognition options to search locally for a match when a match is
not found in the camera’s field of view at deskew sites, and carry out
user-selected instructions if the search fails
Š Set pattern recognition to reference sites using site-by-site Pattern Recognition
Š In Multi Analysis mode, apply different Scan recipes to a single scan
Š Automatically display, print, export, and save statistics and trace data for all
sites
Š Teach scan sites and alignment reference points interactively, with or without
theta
Š Export the data from each wafer immediately following the wafer processing
Š Choose the number of times the Sequence Recipe is run and allow the data to be
saved for each run

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This chapter describes:

Š Starting the Sequence Editor Application on page 7-2
Š Sequence Editor Window Features on page 7-3
Š Editing the Options Field in the Sequence Editor on page 7-7
Š Creating a Sequence Recipe on page 7-13
Š Running a Sequence on page 7-29
Š Correlation Scans on page 7-29
Š Viewing Saved Sequence Data on page 7-31
Š Using Multi Analysis In Sequence on page 7-32
Š Viewing Sequence Data with the Corresponding Trace, Site-by-Site
on page 7-35
Š Sequencing with Manual Deskew on page 7-36
Š Deskewing Twice To Align Theta on page 7-38
Š Sequencing with Pattern Recognition Deskew (Pattern Recognition Option
Only) on page 7-38
Preliminary

Š Using Groping with Pattern Recognition on page 7-44

Š Sequencing with Site-by-Site Pattern Recognition on page 7-48
Š Saving Sequences on page 7-49
Š Saving the Sequence Data on page 7-50
Š Sequence Transportability on page 7-51
Š Handler… Button Options Window For Sequencing on page 7-58
Š on page 7-63

STARTING THE S EQUENCE E DITOR A PPLICATION 7

1. In the Catalog screen, if it is not already active, click the Sequence Recipe
button.
2. Select a Sequence recipe to be edited.

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3. Click the View/Modify button. (It is also possible to double-click on the recipe to
open the Sequence Editor.
The Sequence Editor screen appears. (See Figure 7.1).

Figure 7.1 Sequence Editor Screen

Scan Recipe list

Sequence
Recipe list

Preliminary
Options section

Scan Type drop-down menu Site buttons

S EQUENCE E DITOR W INDOW F EATURES 7

The Sequence Editor window consists of the following elements:

Š Scan recipe catalog for selecting from available Scan recipes
Š Options section for setting sequence options
Š Control buttons for sequence programming
Š Sequence list, linking sites with Scan recipes

Sequence Editor Menus 7

The Sequence Editor menu bar provides access to commands through its menus.
Click on the titles in the menu bar to view their menus.

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Sequence Editor Toolbar 7

The Sequence Editor toolbar contains buttons that provide an alternative way to
access commonly used functions. (See Table 7.1.)

Table 7.1 Sequence Editor window buttons

Button Description
Creates a new default Sequence recipe.

Opens Sequence recipe editor for the currently chosen recipe in

the sequence.

Saves the current Sequence recipe; if the current Sequence

recipe has never been saved, displays the Save Sequence As
dialog box first.
Prints the selected Sequence recipe.
Preliminary

Starts a scan using the current Sequence recipe.

Table 7.2 Sequence List Buttons

Button Description
Adds the selected Scan recipe into the sequence.

After highlighting an existing site in the Sequence list,

clicking this button changes the Scan recipe for the site
to whatever is highlighted in the catalog.
Displays the Scan Recipe Editor, open to the recipe
selected in the Scan recipe Catalog (the field to the left of
the Edit Recipe… button.)
This selects all the recipes in the current Sequence
Recipe.

This goes to the XY View screen and locates the current

scan location in the video screen for verification.

Deletes the selected site from the sequence.

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Table 7.3 Options Buttons

Button Description
Displays the Data Saving Options dialog box where
sequence data can be automatically saved, exported, or
printed.
Displays the dialog box for the sort software option.

Displays the Handler dialog box. The P-15 has no

handler so the only option available is Manual Load.

Table 7.4 Site Buttons

Preliminary
Button Description
Goes to the XY view so a measurement site can be
chosen based on a location observed on the screen.

Goes to the XY view so a pattern can be taught for

pattern recognition.

Defines a measurement site by allowing the manual

entry of the X, Y, and Theta coordinates.

Defines the measurement site as a multi analysis site

where analysis is performed on data from the last site
with defined coordinates. Basically, uses the same raw
data but with a different scan recipe.
Runs only the highlighted site without running the whole
sequence.

A measurement site can be set up to use the previous

site’s pattern for site-by-site pattern recognition.

X and Y offset values can be manually entered from a

pattern rec site to a measurement site.

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Displaying the Sequence Information Dialog Box 7

The Sequence Information dialog box displays the title, author, date and time of
creation (or modification) of the sequence. It also provides a text box for annotations.
1. In the Sequence Editor, click the Sequence menu to display its menu.
(See Figure 7.2).

Figure 7.2 Sequence Editor – Sequence Menu

Step 1 Click on Sequence

to display its menu.

Step 2 Click Info… to display

its dialog box.
Preliminary

2. From the Sequence Menu, select Info… (See Figure 7.2)

Figure 7.3 Sequence Information Dialog Box

Step 4 This field, the

Comments: text box, can be
used to record messages or
information on the sequence
listed in the dialog box heading.

The Sequence Information dialog box is displayed. The Name, User, and
Modified fields cannot be edited.

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3. Click in the Comments field, or press TAB← or TAB→ until the Comments text
box is highlighted.
4. Enter the text of the information which needs to be passed from one operator to
the other.

E DITING THE O PTIONS F IELD IN THE S EQUENCE E DITOR 7

In the Options variable fields, sequence mode (deskew options) and data transfer
options can be defined for the sequence displayed in the editor.

Semi-Automatic 7

In the Sequence Editor, put a check in the Semi-Automatic check box to enable the
mode. (See Figure 7.4)
For 2D scans, the Semi-Automatic mode causes a sequence to display the trace
data after each scan and pause before proceeding to the next step. Each step can

Preliminary
be verified and, if needed, the scan sites can be adjusted and the scan performed
again before proceeding to the next step.
For 3D scans, the Semi-Automatic mode does not halt the sequence between
steps.

Figure 7.4 Sequence Editor – Mode Menu

Click in the Semi-Automatic

check box to enable the
mode.

Click on the Mode

down-arrow to display its
menu. Select from the
available modes.

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Set Deskew Mode 7

Click the Mode drop-down menu (see Figure 7.4), and select the from the following
Sequence modes. (See Table 7.5)

Table 7.5 Mode Drop-down Menu Options

Mode Description
No Deskew The sequence contains no deskew points for
alignment.
Manual Deskew Deskew points are set and must be confirmed
manually by the operator.
Pattern Rec. Deskew Deskew points are set using the Pattern Recognition
option.
Site-by-Site Pattern Scan sites are set relative to a Pattern Recognition
Recognition site and deskew is performed by pattern recognition.

Site-by-Site No Deskew Each site is scanned without deskew.

Preliminary

CAUTION: It is important that when scanning with Pattern

Recognition, use the same zoom setting for the scan that was used to
capture the pattern. If zoom is used during the procedure, always
zoom completely out before starting the scan. If a particular zoom
setting is required, use the Zoom-lock feature to ensure that the zoom
setting remains unchanged throughout the procedure.

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Set Scan Status Option if 1. Click the If Fail drop-down menu, and select the action to take if the pattern
Pattern Recognition Fails recognition fails to find a site. (See Table 7.6.)

Figure 7.5 Sequence Editor – If Fail Menu

Preliminary
Step 1 Click on the If Fail
down-arrow to display its
menu. Select from the
available modes.

Table 7.6 If Fail Drop-down Menu

Feature Description
Proceed Measurement Continue with the next site as if the scan had
worked.
Skip, No Measurement Measurement of that wafer is suspended.
Retry Pat. Rec. Manually Allows user to move the site into the field of
view.
Find Site Manually without Pat. Allows the user to click on the center of the
Rec. pattern being used for pattern recognition and
click OK to continue with scan without pattern
recognition confirmation.
Cancel Sequence Sequence is suspended. User must restart the
sequence.

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Begin: Set Data Options 2. Click the Data button to choose options for data collection that automatically
execute upon sequence completion.

Figure 7.6 Sequence Editor

Step 2 Click the Data

button to open the Data
Options dialog box.
Preliminary

The Data Options dialog box appears. (See Figure 7.7.) Once set, the Profiler
automatically either exports, saves, or prints the file data.

Figure 7.7 Data Options

Step 1 When the

options have been
chosen, click OK.

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3. Choose an option from the Save, Export, and Print options. (See Table 7.7.)

Table 7.7 Save and Export Options

Feature Description
None Saves or exports no data.
Statistics Saves or exports only the statistics for the specified
parameters, the recipe ID, part ID, and sequence ID.
The results for each parameter at each measurement
site are not printed, saved, or exported. Statistics are
calculated for scans taken with the same recipe and
are saved only if two or more scans are taken with
that recipe.
Trace Data Saves or exports everything, including the recipes
used, the raw data points for each scan, parameter
results, and the statistics.
Use Lot ID Prompts the operator to enter the Lot ID before

Preliminary
running the sequence, then saves or exports the data
under the Lot ID name.
Use Name Saves or exports the data under the sequence name
or a user-specified name. The Path button opens a
dialog box for designating the path of the desired file.
Use Operator ID Prompts the operator to enter their ID before running
the sequence. The data file contains the operator ID
but is still saved under the Lot ID or the Use Name.

The Export Options also contain a choice of export file type. (See Table 7.8.)

Table 7.8 Export Options

Feature Description
ASCII File Data is exported in ASCII code.
Binary File Data is exported in binary code.

The Print Option contain the following feature. (See Table 7.9.)

Table 7.9 Print Option

Feature Description
Enable Auto Print Automatically prints data at the end of the sequence.
Click the Details... button to open a standard print
dialog box and set print options.

End: Set Data Options 4. Click OK to set the options.

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Teaching the Base Angle 7

The Base Angle is an offset angle relative to the orientation of the sample’s pattern. It
is used to align scans with the wafer geometry. It is to be used primarily for scan
sequences using manual load in conjunction with the No Automatic Load/Unload
handler option in the system. (See No Automatic Load/Unload on page 7-62.) The
Base Angle is fixed for all scans in the sequence. Use the following procedure to
program the Base Angle.
1. Double-click Base Angle in the sequence list. (See Figure 7.8)
2. A warning is displayed before the Teach Location screen appears. The warning
says that deskew and measurement sites could be invalidated. Click OK to
proceed or Cancel to abort the procedure.

Figure 7.8 Sequence Editor

Preliminary

Step 1 Double-click on
Base Angle to open the
Teach Location screen.

Before the Teach

Location screen opens, a
warning is displayed.

3. The Teach Location window appears. (See Figure 7.9). Locate a line or other
pattern to use for a reference.
4. Click the clockwise or counterclockwise Rotation buttons in the toolbar until the
crosshair is aligned with the reference feature.

NOTE: As the range rotates, if necessary, move the stage to keep the
reference feature in the field of view.

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Figure 7.9 Teach Location Window

If the theta movement

overshoots the alignment,
click SLOW for smaller move
increments with each click.

Step 4 Click on the

appropriate rotation (theta)
button to rotate the stage
If the SLOW movement and align the video image
increments needs to be adjusted with the screen crosshair.
so the image can be aligned,
click Move in the menu bar and
choose Move Extents. Decrease

Preliminary
the theta increment for SLOW.

5. ALTERNATIVE to steps 3. and 4.: To align the current sample surface with the
screen crosshair, use the principles described in BEGIN Align Sample Procedure
on page 12-18. Use a horizontal feature on the sample surface in place of the
dotted line on the Stylus Alignment Tool described in the procedure.
6. Click OK to return to the Sequence Editor window.
Notice that the Base Angle now has a value instead of the phrase Not Used.
When running a sequence with a non-zero Base Angle, the stage rotates to that
position immediately before deskew (if applicable).

C REATING A S EQUENCE R ECIPE 7

A sequence allows the user to assemble a series of scans that can be performed on a
single scan position or on multiple scan sites on a sample. In a production
environment, the sequence can be set up to run multiple sites on multiple identical
samples. The sequence recipe can be created for many different scenarios. The
following procedure progresses through the creation of a sequence recipe that
includes die grid navigation, a necessary ingredient for scanning multiple dies on a
sample.
This procedure assumes that no wafer is currently present on the measurement
chamber table/chuck.
Begin: Load Sample 1. From the Catalog screen, click on the Sequence Recipe button to display scan
Procedure recipes in the Information Display Window.

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2. To load a sample, click on Sample in the menu bar at the top of the screen to
display its menu. (See Figure 7.10.)

Figure 7.10 Sequence Recipe Catalog Screen

Step 2 Click on Sample in

the menu bar to display its
menu.
Step 3 Click on Manual
Load to bring the stage to
the stage door.

Step 1 Click on the

Sequence Recipe button to
display the Scan Recipe
Catalog screen.
Preliminary

3. Choose Manual Load from the Sample menu. The sample stage moves to the
stage door.
4. After the stage stops, open the stage door.

CAUTION: Wait until the stage has completely stopped moving before
attempting to open the measurement chamber door. If it is open when
the system is in movement, the profiler software does not operate
because the interlock switch stops all the stage and elevator motors.

5. Place the patterned wafer on the stage paying close attention to the orientation of
the wafer. The die grid should be as square with the stage X-Y-axis as possible.
It is best to use a precision locator to place the wafer securely and squarely on
the stage. Otherwise, if the system has to deskew the wafer very much,
measurements and pattern recognition could fail later.
6. Turn the vacuum on using the switch on the upper left door frame.
7. Close the measurement chamber door.

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End: OPTIONAL Manual 8. After the door is closed, click on Sample in the menu bar, then on Manual Load.
Wafer Load Procedure The stage moves back under the measurement head.

Figure 7.11 Scan Sequence Catalog

Step 9 Click on the

Sequence Recipe button to
display the Sequence list in
the display window.

Step 10 To open the

Sequence Editor for a new
recipe, click on the NEW

Preliminary
button at the bottom of the
screen.

9. Click on the Sequence Recipe button to change to the Sequence catalog list. (See
Figure 7.11.)
10. From the Sequence catalog, open a new sequence by clicking on the NEW button
at the bottom of the screen. (See Figure 7.11.)
The Sequence Editor opens, formatted to create a new sequence recipe. (See
Figure 7.12.)

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Figure 7.12 Sequence Editor for NEW Recipe with Pattern Recognition

Step 11 Click on Sequence

and then on Save or Save As to
display the dialog box for saving
and naming the sequence.
Preliminary

11. Click on Sequence in the menu bar to display its menu. (See Figure 7.12.)
12. Click on Save or Save As to name and save the sequence.
13. The Save Recipe dialog box appears. Type in the name of the new sequence and
click on OK to save it.

Linking a Die Grid with a Sequence 7

When linking a die grid with a sequence, it is better to link it while creating a new
sequence recipe rather than to associate a die grid with an existing recipe that uses the
same recipe sequence. Use the following procedure for linking a recipe as part of the
creation of a new recipe.
1. To use a die grid, Pattern Recognition Deskew must be in place. To tie the
deskew process to pattern recognition, use the following procedure. In the
Options box located in the lower left corner of the Sequence Editor, click on the
menu arrow next to the Mode field.

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2. Click on Pattern Recog. Deskew… (See Figure 7.13.)

Figure 7.13 Options Section in the Sequence Editor

Step 1 Click on the menu

arrow for its menu.

Step 2 Choose Pattern

Recog. Deskew.

Begin: Load Die Grid 3. This sequence is being set up to work on a particular wafer with a set die grid
that is to be measured. The sequences must be connected to the Die Grid for
scanning and navigational purposes.

Preliminary
Die Grid Navigation with single scans requires loading the die grid at the
beginning of each scanning session. With sequences, a die grid can be associated
with a sequence, so that it loads and aligns the wafer automatically when
teaching sites for the sequence. The die grid can also be disassociated if the
sequence no longer requires Die Grid Navigation.
For additional information about the use of Die Grid Navigation, see Using Die
Grid Navigation on page 5-19.

NOTE: Whenever possible, load a die grid before teaching any sites;
because it invalidates all currently taught positions.

Ensure that the wafer on the stage has the same pattern as that of the die grid
being loaded.

CAUTION: It is very important that each wafer is placed in the same

orientation that the die grid was taught in. If not, the system cannot
locate the dies. When placing the wafer in the system, it is best to use
a precision locator to place the wafer in the proper orientation.

4. In the menu bar, click on Die Grid to display its menu. (See Figure 7.14.) If Die
Grid is grayed out in the menu bar, the Safe Area might be incorrect. Set the Safe
Area in the Configuration screen to the size of the wafer being used. See Safe
Area Configuration on page 11-21.

Figure 7.14 Die Grid Menu

Step 5 Click on Load... to display

Step 4 Click on Die Grid the Load Die Grid dialog box
in the menu bar to overlay on the XY View screen.
display its menu.

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5. Click on Load... (See Figure 7.14.)

Figure 7.15 Load Die Grid Dialog Box

Step 6 Double-click on
the name of the die grid Step 7 Click on Open to
to be used. open the die grid.

This displays the XY view screen with the Load Die Grid dialog box
overlay. (See Figure 7.15 for dialog box.))
Preliminary

6. In the Load Die Grid dialog box, double-click on the name of the die grid to be
used. This displays the die grid name in the File Name display box. (See
Figure 7.15.)
7. Click on Open to load the die grid. (See Figure 7.15.)
The system nulls the stylus and begin to search for the pattern that is displayed
in the sample navigation window. After it successfully locates the test pattern,
the die grid is loaded.

CAUTION: The die grid must match the die grid pattern on the wafer
that has been loaded. If not, the die grid feature cannot be found and
the die grid does not load.

8. A warning message box appears warning that adding the die grid to the recipe
changes the base angle and can invalidate deskew and measurements sites. Since
this is a new recipe and the site have yet to be determined, click on OK. (See
Figure 7.16.)

Figure 7.16 Sequence Editor

Step 8 Read the

warning and click OK
to close it.

End: Load Die Grid 9. In the Sequence Editor, save the Sequence Recipe by clicking on Sequence to
display its menu, then on Save.
Begin: Teach Global 10. This procedure is designed to set up the pattern recognition that allows the
Pattern Recognition Sites system to recognize the current wafer as related to the die grid and to perform a
deskew procedure on to align the wafer with the X- Y-axis.
In the Sequence Recipe Catalog screen, click Deskew Site 1. (See Figure 7.17.)

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11. The Teach Pattern button at the bottom of the screen becomes active. (See
Figure 7.17.) Click the button to begin the Teach Pattern procedure for Site #1.

Figure 7.17 Sequence Editor

Step 10 Click on Deskew Site 1.

Step 11 Click on Teach Pattern.

After the pattern is taught, repeat

the procedure for Site 2.

Preliminary
12. The Pattern Rec. Deskew Teach: Site 1 screen is displayed. Click on a die in the
upper left quadrant of the sample navigation grid. the dark (blue on the screen)
rectangle has been chosen in Figure 7.18.

Figure 7.18 Pattern Rec. Deskew Teach: Site 1 Screen

Step 15 Use the

click-and-drag process to
draw a box around the
Step 12 Click on
feature to be used for
a die in the upper
pattern recognition deskew.
left quadrant.

(The video image is not

visible in this illustration but
would be present on the
actual screen.) The box is
drawn around the feature
that is displayed in the The location of the
Current Patt... box. feature is indicated
Step 16 Click OK in the die navigation
when satisfied with box.
the feature and die
location.

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13. After the die in the upper left quadrant is clicked, the system moves that die into
view in the video window. Click on FOCUS in the tool bar to bring the die into
clear focus.
14. Use the arrow buttons in the tool bar to move the field of vision to a feature in
that die that is used for centering the die and aligning the wafer. It is best to use
the same feature that is used in the die grid. (See Figure 7.18.)
15. After locating the feature, use the click and drag procedure, starting from the
upper left corner of the feature, to draw a rectangle around the feature. When the
box is complete, the system centers it in the X-Y-grid and a replica of it is
produced in a box on the screen. The die navigation box, under the die grid
navigation grid, now contains a small blue box indicating the position of the
feature with respect to the die boundaries. (See Figure 7.18.)
16. When satisfied with the die position and the feature, click on OK.
End: Teach Global Pattern 17. Repeat Step 10 through Step 16 for Site 2. For a location, choose the lower right
Recognition Sites quadrant, at approximately the opposite die position, at an approximate 45°
angle through the center of the die grid from the first die.
Begin: Setting Deskew 18. Deskew Options set the number of groping Layers, set the maximum and
Preliminary

Options minimum percentage match for identification of a feature, and offer the ability
to turn on or off Deskew Twice and Image Processing options. (See Using
Groping with Pattern Recognition on page 7-44.)
Click on Deskew in the menu bar and then on Options... to display the dialog
box. (See Figure 7.19.)

Figure 7.19 Deskew Options Dialog Box

Step 24 Click in the

check box to change
the current setting.

Step 19 Click on the

menu arrow and click
on the desired
groping layers (sites)
Step 25 Click on OK
when all settings have Step 20 Double-click
been set and confirmed. in the variable box
and enter the
percentage.

19. Set the No. of Groping Retry Layers by clicking on the down-arrow and then
clicking on the desired number of layers and sites. (See Using Groping with
Pattern Recognition on page 7-44 for more information on groping layers.)
20. Set the Lowest Match Score by double-clicking in the variable box and typing in
the new percentage. (See Figure 7.19.)
21. Set the Max. Score to Stop Groping by double-clicking in the variable box and
typing in the new percentage. (See Figure 7.19.)

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22. To enable Edge Based Pattern Rec., click to put a check in the checkbox. (See
“Edge Based Pattern Rec.” in Table 7.12 on page 7-46.)
23. To enable Save/Apply Video Settings, click to put a check in the checkbox. (See
“Save/Apply Video Settings” in Table 7.12 on page 7-46.)
24. If desired, click to put a check in the check box for Perform Deskew Twice to
Align Theta to enable it. (See “Perform Deskew Twice to Align Theta” in Table
7.12 on page 7-46.)
End: Set Deskew Options 25. Click on OK when all the parameters have been set.
Begin: Set Data Options 26. Data Options are explained in detail beginning in Step 2. on page 7-10, in
Editing the Options Field in the Sequence Editor.
Click on Data... in the Options section in the lower left corner of the Sequence
Editor. This displays the Data Options dialog box.
The Data Options dialog box appears. (See Figure 7.7.) Once set, the Profiler
automatically either exports, saves, or prints the file data.

Preliminary
Figure 7.20 Data Options

Step 28 When the

options have been
chosen, click OK.

27. Set the options according to the scan sequence requirements. (See Step 2 on
page -10 through Step 4 on page -11, in Editing the Options Field in the
Sequence Editor.)
End: Set Data Options 28. Click on OK when options have be set.

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29. Save the Sequence by clicking on Sequence to display its menu, then on Save.

Figure 7.21 Sequence Editor Set Up for New Recipe

The Sequence Editor comes up

with no recipes listed. Use Step
30 to create a sequence of When the recipe is added, it
recipes: appears in the list with the
1. Highlight a scan recipe. scan location parameters
displayed as NOT DEFINED.
2. Click on the Add button.
Preliminary

3. Repeat Steps 1 and 2 for

each additional recipe.

Adding Scan Recipes 30. The Sequence Editor appears with no scan recipes in the Sequence list. Add the
required recipes to the sequence using the following procedure: (See
Figure 7.21.)
a. In the scan recipe list, click on the first recipe to be included in the
sequence. It highlights when selected.
b. Click on the Add button to add the recipe to the sequence.
c. Repeat this procedure for every scan recipe that is to be added to the
sequence.

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Begin: Teach Scan 31. In the Sequence Editor, click on the first scan recipe in the sequence. It
Location highlights when chosen. (See Figure 7.22.)

Figure 7.22 Sequence Editor - Teach Scan Location

Step 31 Click on the first Scan

Recipe so that it highlights.

Step 32 When the first

Scan Recipe has been
chosen, click on the Teach

Preliminary
Loc button to begin the
Teach procedure.

32. Click on the Teach Loc button at the bottom of the screen.
The XY view screen appears and the system proceeds to null on the sample
surface. It then searches for the feature in the die. When it is found, the scan path
indicator is displayed over the feature. (See Figure 7.23.)
33. The die grid is visible in the sample navigation window with the die navigation
box below it. During a scan sequence, the system uses the Pattern Recognition
Deskew to situate the wafer. It begins with the top left die and moves to the
bottom right die.
Choose a die that is close to the bottom right die. If there is a preset pattern for
checking the dies, choose the die closest to the bottom right die. It becomes a
starting point for the sequence following the Associate Dies procedure.
34. Find the feature in the die that is to be scanned using the first recipe. Click in the
relative position in the die navigation box to move the feature close to the field
of view. Use the arrow buttons to move the feature into view. Click in the
relative position in the die navigation box

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Figure 7.23 Teach Location for First Recipe Scan

Step 33 Choose a die close to the bottom right die used

for Pattern Recognition Deskew. If there is a set die
checking scheme, choose the one closest to the bottom
right die as a starting point for the sequence.

Step 34 The Teach Location

screen displays the sample
surface under low magnification.
Position the scan path across
the chosen feature.

Step 35 Position the scan

path indicator over the
portion of the die that is to be
Preliminary

scanned by the recipe in the

sequence. Use the arrow
buttons to move the field of
vision and locate the scan
location.

Step 36 Click OK when the

scan path indicator is properly
placed.

The die navigation box can be used to position the scan for
the recipe. Click on the place in the die where the scan
feature resides. The video image displays that position.

35. After the feature is centered in the video window, position the scan path
indicator over the feature in the die that is to be scanned using the first recipe in
the sequence. (See Figure 7.23.)
36. When the scan path indicator is correctly positioned, click on OK. (See
Figure 7.23.) The screen changes back to the Sequence Recipe screen.
In the Sequence Recipe screen, there are now coordinates next to the scan recipe
which describe the location of the scan path in the die for that recipe. (See
Figure 7.24.)

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Figure 7.24 Sequence Editor

This scan sequence has two

recipes that it uses. Both
have the scan locations

Preliminary
taught as indicated by the X,
Y, and Theta coordinates.

37. Repeat Step 31 through Step 36 (Teach Scan Location) for each recipe in the
sequence. Be sure to use the same die as that used to teach the first location.

Associating Dies with a Sequence Using Die Grids 7

After a die grid has been associated with the scans in a sequence, it is possible to
associate other dies on the same sample with the scans using the die grid. This creates
a longer sequence in which additional scan locations on the sample are scanned
automatically, using validated scan locations.
Use the following procedure to associate dies with the sequence scans using die grids.
1. Ensure that the procedure in Linking a Die Grid with a Sequence on page 7-16
has been completed for the sequence being used.
2. From the Sequence Editor highlight the recipe that is to have additional dies
associated with.
3. Click on Die Grid in the menu bar. (See Figure 7.25.)

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4. Click on Associate Dies... (See Figure 7.25.)

Figure 7.25 Sequence Editor with Die Grid Menu

Step 3 Click on Die Grid in the

menu bar to display its menu.

Step 4 Click on Associate

Dies... to begin the process of
choosing new scan sites.
Preliminary

This displays XY screen titled “Associate Dies With Sequence Scan Sites,” with
a graphic display of the die grid configuration, visible to the right of the video
display area. (See Figure 7.27.)
5. If the die grid comes up with the dies already chosen, click on Die Grid in the
menu bar.
6. Choose Clear. This takes out all the old dies and leaves only the one that was
used for teaching the current recipe locations. It has the number 1 in it.

Figure 7.26 Die Grid Menu

Step 5 In the menu bar, Step 6 Click on Clear

click on Die Grid to to remove the
display its menu. unwanted dies from the
die grid.

7. Each rectangle on the die grid configuration represents a single die. The green
one with the number one (1) in it represents the original scan site designated for
the chosen scan recipe. To add dies, simply click on the desired die where the
additional scan is to be made. Each successive site turns green and contains a
number.

NOTE: The scans are performed according to the die site numbers.
To reduce sequence timing, choose the scan sites in a circular fashion
for minimum time of travel between scan sites. (See Figure 7.27.)

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Figure 7.27 XY View with Sequence Scan Sites

Step 7 The original die being

scanned is the number one die.
Click in each successive
rectangle representing a die that
is to be added to the sequence
using the die number one scan.

Step 8 When all the required

dies have been selected, click
on OK to add the new sites to

Preliminary
the scan sequence.

NOTE: Dies can be selected or deselected by clicking or them.

8. After all the required dies have been selected, click on OK to add them to the
sequence. (See Figure 7.27.)
9. The Sequence Editor message box appears with a message saying that the
chosen sites will be added to the sequence, asking whether to proceed with the
additions.
Click on OK to continue or Cancel to abort the addition of the sites to the
sequence.

Figure 7.28 Sequence Editor Message Box

Step 9 Click on OK to add

the additional selected sites
to the scan sequence.

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When OK is clicked, the Sequence Editor is displayed with the additional sites in
the Sequence Recipe.
Notice that each new site has the coordinates of the scan location for that die. In
the illustration Figure 7.29, two sets of new sites have been added, one for
additional dies using the scan named FIRST, and one for dies using the scan
named SECOND.

CAUTION: The coordinates presented for the scans in the new sites
might not be exactly where they are needed. It is important to verify
each of their locations.

Figure 7.29 Sequence Editor with New Scan Sites

Step 10 The new scan sites

are presented below the
Preliminary

original ones in the recipe list.

Each has its own scan position
coordinates listed. Highlight the
entire group of new scan
locations by clicking on the first
one, then hold down the shift
key and click on the last one.

Step 11 After all the new

recipes are highlighted, click on
the Auto Verify button.

Begin: Auto Verify 10. Highlight the entire group of new scan sites by clicking on the first one, holding
the shift key down and clicking on the last one.
11. Click on the Auto Verify button to begin the process of verifying each scan
location.
12. The XY view screen is now displayed. The system moves the field of vision to
each scan site and displays the site with the scan path positioned as it is during
the actual scan. Adjust each site individually using the following procedures:
a. The feature being scanned should be visible in each site. If not, locate it.
b. Ensure that the scan path indicator is positioned correctly. If it is not, move
the cursor to the exact location where the scan is to begin and click. The
system should adjust the scan position on the screen.
c. When complete, click on OK to verify that location. The next site appears
on the screen automatically.

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End: Auto Verify d. When the last site is verified, the screen reverts back to the Sequence
Editor. Save the Sequence by clicking on File and Save or Save As.
e. A dialog box appears. Enter the name of the new sequence and click OK to
save it.

Disassociating a Die Grid with a Sequence 7

1. Make sure the sequence is displayed in the Sequence Editor

2. Click on Edit to display its menu.
3. Select Clear Die Grid.

R UNNING A S EQUENCE 7

1. Click the Start button, or click the Sequence menu, and select Start.
2. Perform manual deskew, if applicable. Also, refer to manual deskew section for
explanation of how to do this.

Preliminary
3. Click the Stop button to stop the sequence before normal termination.

C ORRELATION S CANS 7

Scans are correlated when a long scan is performed first, then small scans are
performed in the same general location. Correlation scanning combines local area
scans with macroscopic scans so that discrete features can be related to global surface
planarity.
From the scan data of a long scan, distinct features can be located which require a
repeat scan at high resolution, then create a sequence that performs high resolution
sub-scans along the length of the long scan. Data for each sub-scan is based on the
long scan, providing a data reference for correlating the measurements of the
sub-scans.
1. Open an existing Sequence recipe or create a new one in the Sequence Editor.
2. Select the recipe to use for the long scan (one that traverses the targeted feature).
3. Click the Scan Type arrow below the sequence to open the list.
4. Click the Correlation Long Scan button.
A message dialog box appears, warning that the recipe immediately following is
designated a Correlation Sub-scan and if it is set up for multiple analysis, it
resets to single scan. The Sub-scan is the short scan that is tied to the long scan.
It provides the local, small-scale analysis. It is set up in step 7, next page.

NOTE: Multiple correlation scan sets can be established; each set is

marked by the initial long scan in red lettering and its associated
sub-scans immediately following in blue.

5. Click OK.
The long scan recipe becomes red; the recipe immediately following becomes
blue, indicating that it is a sub-scan to that long scan. Sub-scans always follow
long scans in sequence.

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6. Designate the other sub-scans (usually 100 µm or less) as done for the long scan,
using the Scan Type list to select Correlation Sub-scan.
Figure 7.30 shows the Sequence Editor for a correlation scan where the parent
long scan recipe is EXAMPLE, Loc is location 1. The sub-scans are EXAMPLE2,
Loc are location 2, location 3, and location 4.

Figure 7.30 Correlation Scan Sequence

The first recipe, the parent

long scan, is in red.

The subscan recipes, the

correlation subscans, are
in blue.
Preliminary

7. Teach the long scan position.

a. Press the Teach LOC button.
b. Go to the location and click on it. To accept the location, click OK in the
dialog box that appears.
8. Teach the sub-scan position.
a. Press the Teach LOC button.
b. Go to the location and click on it. To accept the location, click OK in the
dialog box that appears.
The Teach Sub-Scan window appears.
9. If the current position of the sub-scan is not close enough to the position of the
long scan for both to appear in the video image, a red arrow and the coordinates
of the long scan appears on the video image.
Move the stage in the direction of the arrow to bring the long scan into view.
The long scan is represented in the window by a red scan line; the sub-scan by
blue.
10. Position the sub-scan on the desired portion of the long scan line.
11. Click OK.
The Sequence Editor returns to view.
12. Repeat for all sub-scans.

Viewing the Correlation Scan Data 7

1. Run the correlation sequence. Save the recipe and click Start.
The Analysis window appears, showing the results of the first recipe in the
sequence.

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2. Click the File menu, and select Correlation Scan.

The Correlation Scan dialog box appears.
3. Click the long scan
4. Click OK to display the Correlation Scan window.
The Correlation Scan window appears, showing the long scan trace and
thumbnail callouts of each of its sub-scans positioned on the long scan (see
Figure 7.31).

Figure 7.31 Correlation Sub-scan Window

Sub-scan
thumbnail

Preliminary
5. Double-click the thumbnail on the graph to view the sub-scan trace.
The trace appears in its own analysis window. A Statistics window also appears
for the long scan.
6. Click the File menu, and select XXX to view the correlation scan statistics.
Multiple Analysis cannot be used with correlation scans.

VIEWING S AVED S EQUENCE D ATA 7

Viewing Old Sequence Data 7

1. Go to the Catalog window, and click the Sequence Data button.

The Sequence Data Catalog window appears.
2. Select the data set from the list in the catalog, and click the Review button, or
double-click the desired data set.

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Recovering Sequence Data 7

In the case of a system crash during a sequence execution, using this recovery tool, it
is possible to go back to the screen that displayed the last data, including unsaved
data.
1. Go to the Sequence Data catalog window.
2. Select a sequence.
3. Click the Recover button.

Calculating Combined Sequence Statistics (Option) 7

Values from different sequence sets can be combined into one, and used to calculate
the standard deviation, mean, and so forth. The computer accesses stored data from
selected data sets in the Sequence Data catalog and recalculates them.
1. Click the Sequence Data command button in the Catalog screen.
The Sequence Data catalog window appears.
Preliminary

2. Highlight the data files to be combined.

3. Press CTRL while clicking to highlight multiple data files.
4. Click the Combine button.
5. Enter a name for the new combined data set.
6. Click OK.
A statistics summary with the new data appears after a short calculation interval.

U SING M ULTI A NALYSIS I N S EQUENCE 7

Multiple data analyses can be obtained from a single scan by applying the data
analysis settings of additional recipes to its raw data. The process is a modification of
a sequence recipe in which the instrument uses the first scan recipe to scan and
analyze in the usual manner, then takes settings from the subsequent recipes to
reanalyze the first recipe’s scan data.
It is important to note that the raw data for the scan be saved and therefore can be
subjected to numerous different parameter adjustments. Each set of data that is
obtained from applying the new parameters can be save under its own name. This
means that after the scan is run and the results saved, the additional information can
be retrieved at a later date, even calculated on a desktop version of the software if it
has been purchased.
Time can be saved and throughput improved by using multiple analysis for:
Š Measurements that require more than one cursor setting — such as two different
step heights on a single scan
Š Measurements with different filter settings
Š Measurements with different surface parameters enabled in the Scan recipe.

1. Go to the Sequence Recipe catalog window, and select a Sequence recipe.

2. Click the View/Modify button to open the Sequence Editor window.

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3. Click the New button at the bottom of the screen or click the Sequence menu,
and select New.
A blank sequence list appears.
4. Set up the scanning recipe to scan with its existing settings:
a. Click the name of the required recipe to be used for the scan.
b. Click Add to add the Scan recipe to the list.
5. To make changes to an existing Scan recipe.
a. Click its name in the list
b. Click Edit recipe to change any parameters and filter settings. Cursor
positions can only be changed by entering them numerically.
c. Save the recipe.
d. To teach cursor positions later from the scan trace:
e. Click Save As to create a new recipe even if no changes were made to the
recipe at this point.

Preliminary
f. Exit the Recipe Editor window to return to the Sequence Editor window.
g. Select the new recipe that was just created.
h. Click Add to add the Scan recipe to the list.
6. Set up the analyzing Scan recipes:
a. Go to the Scan Recipe catalog list, and click a Scan recipe containing the
required analysis settings.
This recipe should have the same scan length, scan speed, sampling rate,
stylus force, contact speed, and range as the scanning recipe.
b. Make changes to the Scan recipe as in Step 5b.
This step can also be performed before compiling the sequence list, using
the Scan recipe to scan the sample and teach the cursor positions.
c. Add the Scan recipe to the sequence list.
d. While the Scan recipe is still highlighted, click the Multi Analysis button.
This instructs the instrument not to scan the sample again but to reanalyze
the data according to the recipe’s data analysis parameters. Note that the
Multi Analysis button is not active (dimmed) for the first recipe in a
sequence.
e. Repeat the process as many times as needed.
7. Click the Sequence menu, and select Save As to save the sequence.

Viewing Multi Analysis Results 7

1. Tile the windows to display the Sequence Parameter Summary window and the
Scan Trace simultaneously.
2. Go to the Sequence Parameter Summary window:
Š Site 1 shows data analyzed with the first Scan recipe in the sequence list.
Š Site 2 data corresponds to the second Scan recipe, and so on with each
additional site.
3. To view each Scan recipe’s data set in both Trace and Summary windows:

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a. Click the arrow in the Recipe drop-down menu on the tool bar.
b. Select the Scan recipe.

VIEWING S EQUENCE D ATA 7

Viewing Wafer Summary Data 7

The Sequence Parameter Data window displays the detailed results of each site
scanned in the sequence.
1. Go to the File menu in the Analysis window, and select Surface Summary.

Figure 7.32 Sequence Parameter Data window

Recipe drop-down menu

Preliminary

2. Maximize the Sequence Parameter Data window to view the entire Sequence
Parameter Data screen from the Analysis window.
3. Go to the Sequence Parameter Data window, and click on the Recipe drop-down
menu on the left of the toolbar. (See the Recipe location at the top left of
Figure 7.32.) This drop-down menu displays all Scan recipes that are included
in the sequence.
4. Choose the desired recipe by clicking on it.

Sequence Summary Options 7

The Sequence Summary Options dialog box specifies the information to be displayed
in the Sequence Parameter Data window. The individual scans in any sequence can be
viewed in the Analysis window by clicking the appropriate site number in the
Sequence Parameter Data window.
1. Open the Analysis window.

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2. Click the Operations menu, and select Summary Display Options to display the
Sequence Summary Options dialog box. (See Figure 7.33.)

Figure 7.33 Sequence Summary Options Dialog Box

Step 3 Click in the checkbox to

put a check in the option. That
item get displayed in the
summary screen.

Step 4 Once all changes have

been made, click OK to activate
the changes.

Preliminary
3. Choose the items to be displayed in the summary screen. A check in the box
indicates those that are displayed. (See Figure 7.33.)
4. Click OK to activate changes to the summary display items. (See Figure 7.33.)

Viewing Sequence Data with the Corresponding Trace,

Site-by-Site 7

The screen can be set up to display a site’s parameter data along with the trace itself.
1. Open both the Analysis and the Sequence Parameter Data windows.
2. Go to the Windows menu, and select Tile Vertically.
3. Size the windows by clicking and dragging their frames.
4. Display the desired trace:
a. Go to the Sequence Parameter Data window, and click the numbered Site
box of the trace desired.
The Analysis window displays the trace for that site.
b. Repeat for other sites, displaying each trace in turn.
5. Save the workspace:
a. Click the File menu, and select Save Workspace to save this window
orientation.
The dialog box appears.
b. Enter a name for the workspace.
c. Click OK to save.
6. To review both parameter data and the trace:
a. Click the File menu, and select Load Workspace to retrieve the workspace.
b. Highlight the workspace name in the drop-down menu.

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c. Click OK. The screen reconfigures to the desired trace/data window

orientation.

S EQUENCING WITH M ANUAL D ESKEW 7

The reason for programming a sequence is to automate a repetitive series of

measurements on multiple samples. The example contains all of the essential features
of a sequence.
Even with a locator or some sort of fixture, the second and subsequent samples cannot
reliably be placed on the stage in the exact same position, and with the same
alignment, as the first. The new sequence can still be used, but each of the scan sites
must be manually located and retaught before running the sequence.
Deskew enables and defines two points on a sample to be used as reference points
prior to the start of a sequence. These points are then used to mathematically correct
for translational (X, Y) and rotational (theta) error in sample positioning.
1. Create a new sequence.
Preliminary

2. When ready to set up manual deskew, proceed with the following steps.
3. Set the deskew mode to Manual Deskew.
Note that two deskew steps now appear in the sequence list on the right side of
the window.
4. Select the first deskew site by double-clicking anywhere on the Deskew Site 1
line in the sequence list.

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5. Click the Teach Loc button, or double-click the deskew site. The Manual
Deskew Teach window appears. (See Figure 7.34).
The two deskew points should be in opposite quadrants, with each being at least
half way to the edge of the substrate.

Figure 7.34 Manual Deskew Teach Window

Preliminary
6. Select the first deskew point. Select an obvious point, such as the corner of an
easily and uniquely identifiable rectangle.
Click the chosen position.
The stage moves so that the crosshair are centered on the selected site.
7. Click OK.
The Sequence Editor window reappears, with the X and Y coordinates of the
selected site entered in the deskew Site 1 step.
8. Select the second deskew point.
9. Repeat steps Step 5 through Step 7 for the second deskew site.
10. Once the deskew sites have been successfully established, proceed to program
the rest of the sequence steps.
11. Run the sequence.
After each deskew operation, the instrument pauses and requests acceptance of
the deskew site.
12. If it is out of the field of view, use the arrow buttons to move the stage and
search for the site. Click on the deskew site, moving it to the center of the
crossmarks.
13. Click OK to accept the deskew site.

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14. Repeat Step 11 through Step 13 for deskew site #2.

The tool then proceeds with the measurement sites.

D ESKEWING TWICE TO A LIGN T HETA 7

With a single deskew operation, there is no stage rotation to compensate for the small
rotational error in sample placement. A second deskew can be performed to
compensate for this error by enabling this option in the Pattern Recognition and
Deskew Options dialog box. This allows accurate sample rotations within a sequence.
1. Go to the main Configuration window, and click the Pattern Recognition
Options… button.
The Deskew Options dialog box appears (see Figure 7.35).

Figure 7.35 Deskew Options Dialog Box

Step 3 Click OK
when all choices
Preliminary

are complete.

Step 2 Click in the

checkbox to enable
or disable the
deskew twice option.

2. Click the Perform Deskew Twice to Align Theta? check box to enable or disable
the second deskew.
3. Click OK to set the options and close the dialog box.

S EQUENCING WITH P ATTERN R ECOGNITION D ESKEW

(P ATTERN R ECOGNITION O PTION O NLY ) 7

The Pattern Recognition option minimizes operator intervention in sequence operation

by automating the precise setting of deskew points at the beginning of a sequence.
Pattern Recognition deskew replaces and automates the manual deskew process. The
same considerations of global deskew point placement that apply to manual deskew
apply equally to pattern recognition deskew.

NOTE: To minimize positioning error, space the deskew points at least

one-half the diameter of the sample. Do not set the deskew points
parallel to the X-axis or Y-axis, but instead use two points on a
diagonal line. If the deskew points are identical, the sequence aborts.

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NOTE: Although a coordinate transformation is made, there is no

stage rotation to compensate for the small rotational error in sample
placement unless the deskew option is set to perform a second
deskew. See Deskewing Twice To Align Theta on page 7-38 for more
information.

NOTE: Note also that any rotational error is magnified when

traversing a long distance across a large wafer. This might cause the
deskew site to be outside the field of view when a wafer is loaded.

A pattern recognition deskew site is a unique pattern of wafer features visible within

Preliminary
the instrument’s field of view. The size and shape of the pattern must be uniquely
different from other wafer features visible in the field of view to ensure that the
instrument can locate the sites without ambiguity. (See Table 7.10).

Table 7.10 Pattern Examples

Pattern Example Description
Good Patterns Š Alphanumeric characters
Š Circular or rectangular pads that appear singly
Š Crosses
Š Alignment marks
Š Other polygon shapes
Bad Patterns Š Sections of a repetitive grid
Š Circular pads or rectangular pads that repeat in or near the
field of view

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When choosing patterns, keep the following points in mind. (See Table 7.11).

Table 7.11 Pattern Search Criteria

Search Criteria Description
Search time depends The larger the pattern, the faster the system can recognize
on pattern size. the pattern. However, larger patterns require more accurate
initial positioning within the camera’s field of view because the
search area is reduced.
Also, Pattern Recognition options can be set so that the
system performs a pattern search if the pattern is not found
within the field of view. See Using Groping with Pattern
Recognition on page 7-44 for information.
When using If only two corners are used, other rectangles in the field of
rectangular pads, use view could confuse the pattern recognition system.
the entire rectangle.
The pattern should be However, uniqueness cannot be sacrificed for simplicity.
unique and as simple
Preliminary

as possible.
Select symmetric They are less sensitive to image rotation. Circular patterns
patterns. are rotationally symmetric and therefore are good patterns.
Similarly, the best polygon patterns have the most sides.
High contrast features When available, select high contrast features. Noise does not
make pattern have as much effect on the pattern recognition match. The
recognition matches pattern colors are important because the pattern recognition
easier. system reads the black and white image, not the color image.

Avoid patterns with By using edge enhancement, the instrument computer

rough surfaces. emphasizes the fine features present on a rough surface.
Because roughness is random, these features add noise to
the system and make the pattern recognition system less
reliable.

NOTE: It is generally a good idea to avoid fixed dust particles in the

field of view as well. Avoid selecting wafer-specific defects or features
as patterns, or the instrument computer could become confused. This
includes dust particles, partially etched areas near the edge of the
wafer, and so on.

To set up Pattern Recognition deskew:

1. Go to the Sequence Editor window.
2. Select the sequence recipe that is to have Pattern Recog. Deskew.
3. Select Pattern Recog. Deskew from the Mode drop-down menu. (See
Figure 7.36.)

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Figure 7.36 Profiler Sequence Editor Window

Step 4 Double-click the

deskew site that is to be
use.

Step 2 Highlight to select

the recipe that is to have
the Pattern Recog.
Deskew.

Step 3 Click on the menu

arrow to display the Mode

Preliminary
menu.

Choose Pattern Recog.

Deskew from the menu.

Step 5 Click on Teach Pat…

to open the screen.

4. Double-click the Deskew Site 1 entry near the top of the sequence list or
highlight the Deskew Site 1 entry. (See Figure 7.36.)

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5. Click the Teach Pat button. (See Figure 7.36.)

The Pattern Rec. Deskew Teach window appears and the stylus automatically
nulls on the sample surface.

Figure 7.37 Pattern Rec. Deskew Teach window

Preliminary

6. Select a pattern to use for pattern recognition.

As a rule of thumb, select something that is simple and easily recognizable, like
an alphanumeric character or an alignment mark. (See Table 7.10 on page 7-39
and Table 7.11 on page 7-40.) Something that looks much like another feature
that is also within the field of view does not work reliably because the wrong
site might be identified.
7. Define a rectangular area that encloses the chosen pattern as follows:
a. Press and hold the left trackball button at the top left corner of the desired
rectangle.
b. Move the trackball toward the bottom right corner of the desired rectangle.
A blue box appears that follows the trackball cursor as it moves.
c. When satisfied with the desired rectangular area, release the trackball
button.
The system processes the image information defined by the rectangle.
d. If the rectangle was too small or too large, a message dialog box appears
indicating that the rectangle was too small or too large:
i. Click OK.
ii. Teach the pattern again.

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8. The blue box remains on the window with a darker blue dot in the center.
The stage moves until the selected feature is centered in the crosshair
(Figure 7.38 on page 7-43).

Figure 7.38 Pattern Rec. Deskew Teach Window After Teach

Preliminary
9. Move the stage a small distance.
10. Click Verify to test whether the system can accurately find the taught feature.
A box is drawn around the feature when it is found.
11. If recognition fails, select another pattern and retry.
12. Click OK to accept the new pattern.
13. Repeat Step 2 to Step 9 for Deskew Site 2 to establish the second deskew point.
14. Once the deskew sites have been successfully established, proceed to
programming the rest of the sequence steps.
Due to the number of variables that affect pattern recognition, the computer
might not always be successful in locating a deskew site. The instrument can be
preset to do one of four things in the event of a failure:
Š Continue scanning
Š Stop scanning the wafer and proceed to the next scan site
Š Repeat the pattern recognition
Š Stop the entire sequence
15. Choose a Pattern Recognition Failure Response from the If Fail drop-down
menu. (See Figure 7.39.)

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Figure 7.39 If Fail Menu in Options Portion of Sequence Recipe Screen

Step 16 Choose on of the four

If Fail options to guide the
system performance when
pattern recognition fails.

16. Run the sequence.

U SING G ROPING WITH P ATTERN R ECOGNITION 7

Preliminary

Introduction 7

Deskew Options can be set so that the system performs a pattern search if the pattern
is not found within the field of view when the sample is positioned at the deskew site.
This search is called groping. Note that these same parameters (in a slightly different
format and with slightly different wording for the Lowest Match Score parameter) are
available in the Pattern Recognition and Deskew Options dialog box in the
Configuration screen. (See Pattern Recognition Options and Deskew on page 11-29.)
The parameters set in the Deskew Options dialog box take precedence over those
from the Pattern Recognition and Deskew Options dialog box.
Access to the Pattern Recognition and Deskew Options dialog box is through the
Configuration screen’s Pattern Recognition Options… button. (See Pattern
Recognition Options and Deskew on page 11-29.) Access to the Deskew Options
dialog box is through the Deskew menu in the Sequence Recipe screen. Notice that,
the parameter, “Minimum Match Score” in the Pattern Recognition dialog box, has
not yet been changed to “Lowest Match Score” as it has in the Deskew Options dialog
box. The values set in the Deskew Options dialog box for each sequence recipe
override those set in the Pattern Recognition Options dialog box.
The three groping parameters are described in Table 7.12.

Setup Procedure 7

1. From the Sequence Editor, click Deskew in the menu bar to display its menu.

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2. Click Options… to open the Deskew Options dialog box. (See Figure 7.40).

Figure 7.40 Pattern Recognition and Deskew Options Dialog Box

Preliminary
3. Click on the Number of Groping Layers menu-arrow to display its menu. (See
Figure 7.40.)
4. Choose the number of layers from the menu. (See Figure 7.40. For information
on the groping layers see Table 7.12.)
5. Set the Lowest Match Score (%) by highlighting the current percentage and
entering the new one. (See Figure 7.40. For information on match scores see
Table 7.12.)
6. Set the Minimum Score to Stop Groping (%) by highlighting the current
percentage and entering the new one. (See Figure 7.40. For information on
match scores see Table 7.12.)

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7. Edit the fields by using the parameters described in Table 7.12.

Table 7.12 Groping Parameters

Parameter Description
Number of Groping This parameter controls how much of the area around the
Retry Layers deskew site is searched for the pattern. Each layer consists of
a square area constructed by evenly surrounding the deskew
site with squares the size of the camera field of view. (See
Figure 7.41).

Figure 7.41 Groping Retry Layers

Groping 1st Retry Layer 2nd Retry Layer
disabled searches for 8 searches for
searches only more square 24 more square areas
camera field of areas
view
Preliminary

3rd Retry Layer searches for 48 more squares; 4th Retry Layer
searches for 80 more squares. It stops after the 4th try.

Available choices are:

Š None (the default)
Š 1 (8 Sites)
Š 2 (24 Sites)
Š 3 (48 Sites)
Š 4 (80 Sites)
NOTE: It takes 10 s to move the stage, null the
stylus, and search one such area; 8 search sites
(1 layer of retry) takes as long as 90 s; and 24
sites (2 layers) takes as long as 250 s, and so
on.
First, the deskew site field of view is searched. If the pattern is
not found, the stage moves to one corner of the next layer
and searches the field of view there. This continues until the
pattern is found or until all search sites have been examined.
If the pattern is still not found, the stage moves to one corner
of the next layer and continues.

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Table 7.12 Groping Parameters (Continued)

Parameter Description
Lowest Match Score Lowest Match Score is used to compare all the groping
positions in the given groping levels. Once the groping stops
(Was changed from (assuming that the Minimum Score to Stop Groping is not
Minimum Match found) the highest score achieved, among those scores that
Score, which is still qualified for Lowest Match Score acceptance, is chosen as
the term used in the the search pattern (model). This number must be smaller than
Configuration the Minimum Score to Stop Groping. Allowed values range
screen version of between 20 to 100%; the default is 65%.
this parameter.) This parameter allows adjustment of the threshold at which
the pattern recognition system concludes that it has found a
candidate for the desired deskew site.
Minimum Score To Minimum Score to Stop Groping defines a value at which the
Stop Groping system accepts the image as the model for which it is
searching. Groping stops if this score is reached and the
image corresponding to the score is considered to be the

Preliminary
search pattern (model).
EXPLANATION: If the pattern recognition system is groping
to find the desired pattern, frequently the matching pattern is
found with little ambiguity. If a score equal to or better than
the Minimum Score to Stop Groping occurs, the searching
process stops and the deskew site is placed. Allowed values
range between 20 to 100%; the default is 70%.
If no matches are found that are as good as this setting, the
search continues until all retry layer areas are searched. The
highest score above the Lowest Match Score setting
determines the placement of the deskew site.
Edge Based Pattern The Edge Based Pattern Recognition option is used for low
Recognition contrast image recognition on a sample surface or where
there is a large surface light variation. If this option is chosen
(with a check in the check box), the normal image contrast
grayscale processing takes place first, then a series of filters
are applied that further contrast and sharpen edges for a
better pattern recognition.
The image data is stored before these filters are applied so
the data is not effected by this option. It is strictly a tool used
for pattern recognition where contrast is low or where light
varies significantly.
If the option is not chosen, only the image contrast grayscale
processing is performed.
NOTE: When this option is enabled, the pattern
recognition process takes longer than if it is not
chosen. The filtering and sharpening procedures
require significant extra time.

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Table 7.12 Groping Parameters (Continued)

Parameter Description
Save/Apply Video The lamp brightness setting is important in pattern
Settings recognition. If the lamp brightness is different from when the
original sequence was established, the pattern recognition
images could be difficult for the system to detect. A check in
the Save/Apply Video Settings checkbox ensures that the
lamp brightness is saved with each deskew site pattern so
future scans have the same image view with the same light
for pattern recognition.
Perform Deskew With a single deskew operation, there is no stage rotation to
Twice to Align Theta compensate for the small rotational error in sample
placement. By enabling this option in the Pattern Recognition
and Deskew Options dialog box, a second deskew is
performed to compensate for this error. This allows accurate
sample rotations within a sequence.
Preliminary

8. Click OK to set the options and close the dialog box.

Groping Analysis (Condensed) 7

1. The first field of view is searched for the model. If the Minimum Score to Stop
Groping is achieved, the image in the first field is chosen as the search pattern
(model).
2. If the Minimum Score to Stop Groping is not achieved in the first field of view,
the groping continues. Each position in every allowed groping level produces a
score. If that score is greater than the Lowest Match Score, but less than the
Minimum Score to Stop Groping, its score is saved for comparison with other
scores in case the Minimum Score to Stop Groping is not achieved during the
entire groping session.
3. If at any time during the groping session the Minimum Score to Stop Groping is
achieved, the image with that score is accepted as the search pattern (model) and
the groping stops. Any residual Lowest Match Score values are discarded.
4. If the entire groping session produces only scores greater than the Lowest Match
Score but less than the Minimum Score to Stop Groping, then the highest score
among the Lowest Match Score candidates is chosen as the search pattern
(model).
5. If no scores are obtained above the Lowest Match Score, then the groping
session pattern recognition search failed.

S EQUENCING WITH S ITE - BY -S ITE P ATTERN R ECOGNITION 7

Sometimes it is more effective to position a scan relative to a taught feature instead of

as arbitrary stage coordinates. Site-by-Site Pattern Recognition stores an offset from a
taught pattern for any scan in the sequence. The pattern must first be taught the
“home” feature, then teach the scan. With Site-by-site Pattern Recognition enabled,
the instrument stores the scan position as an offset from the taught feature.

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1. In the Options section of the Sequence Editor, click the drop-down button of the
Mode option. (See Table 7.5 on page 7-8.)
2. Click the Site-by-site Pattern Rec. option. (See Table 7.5 on page 7-8.)
3. Teach Pattern Recognition for the two initial deskew sites. (See Step 10 on page
-18 through Step 16 on page -20.)
4. Insert Scan recipes for the measurement sites. (See STEP 30 ON PAGE -22.)
5. Click the site in the Sequence list to be taught.
6. Click the Teach Pat button, or click the Use Previous Site button to use the
pattern from previous site.
The Pattern Rec. Deskew Teach Window appears.
7. Teach a Pattern Rec. feature near the intended scan location, following the
guidelines in Table 7.10 and Table 7.11.
8. Click OK.
9. With the site still highlighted, click the Teach Loc button.

Preliminary
10. Teach the location for the actual measurement. This position is recorded as an
offset from the Pattern Rec. site.
11. Click OK.
12. Repeat for all sequence sites.

S AVING S EQUENCES 7

Sequences can be saved on the hard drive or network drive

NOTE: For SEMI compliance, both scan recipes and sequences

share the same directory. This means that a sequence cannot have
the same name as an existing recipe.

CAUTION: Do not attempt to save directly to the Jaz drive. Save in

the file first then transfer to the Jaz drive.

1. Click the Sequence menu, and select:

Š Save to save the current recipe, or
Š Save As to save the current recipe under a different name.

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2. Type a sequence name in the Name field.

The name can be upper or lower case. If using special characters, only the
following are allowed:

~ tilde ( left parenthesis

! exclamation point ) right parenthesis
@ at sign _ underscore
# number sign - hyphen
$ dollar sign { left brace
% percent sign } right brace
^ caret ‘ single quotation mark
& ampersand ' apostrophe

3. Click OK.
Preliminary

S AVING THE S EQUENCE D ATA 7

The Scan and Sequence Data sets can be saved and retrieved for future review and
additional reanalysis using different scan recipe parameters.
If a scan is completed without being interrupted, the Analysis screen automatically
appears after the scan is complete.
1. Click File, and select Save Data. The dialog box appears. (See Figure 7.43.)

Figure 7.42 Analysis Screen with File Menu

Step 1 Click File to

display its menu.

Choose Save Data…

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2. Ensure that the data is being saved into the correct folder. (See Figure 7.43.)
3. Type a name (up to 72-alphanumeric characters) in the File Name field.
The name can be upper or lower case. If using special characters, refer to Using
File Name Conventions on page 2-19. (See Figure 7.43.)

Figure 7.43 Save Data Set Dialog Box

Step 2 Ensure that the

recipe is being stored in the
appropriate folder.
Step 5 When the data
Step 3 Enter the data set name has been entered
name in the File Name click Save to save it in
field. the chosen folder.

Step 4 Choose either

Preliminary
Statistics or Trace to save
the related data in the
named file.

4. Choose either Statistics or Trace. If both require saving, perform the save
function two times, one for each option, giving names to each different data set.
Trace creates a scan data set containing the actual trace data. This can then be
used to display the trace in the Analysis screen for further analysis or
recalculation with new parameters. The system also uses this data to create the
Thumbnail trace for comparison.
Statistics creates a file of the scan data parameters that were set in the scan
recipe used to create the different scans. This data can also be displayed in the
Sequence summary screen and analyzed or recalculated with different scan
parameters.
5. Click Save. Once a data set has been saved, it is added to the Sequence Data
catalog. The Sequence Data catalog window allows for the selection of
individual data sets for reviewing. Unwanted data sets can also be deleted.

S EQUENCE TRANSPORTABILITY 7

Introduction 7

This feature is designed to facilitate the use of a sequence recipe on a system that
receives the recipe from another identical system. This is accomplished by using the
center of the wafer as a reference instead of using the stage center. To accomplish this,
the Wafer Center Calibration must be run on the sending and receiving systems,
preferably using the same wafer. Both systems must already have all calibrations
current, including Center of Rotation and Stage Mapping. As a result, there is no need
to reteach locations or die grid models when transporting a sequence recipe to another
system.

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Another benefit of the Wafer Center Calibration is that, after service or maintenance
where a component was replaced, running the calibration ensures that sequences do
not need to be retaught.
In order for the sequence to perform its intended scans at the intended locations, the
recipes and die grids are exported to the receiving system along with the sequence
recipe. This export function is accomplished using the appropriate export options.
It is important to note that this procedure is recommended for like systems with the
same optics. Systems with different optics might experience difficulty with the
pattern recognition because the models are different sizes. In addition, sites taught on
an x40 system in low magnification might not be accessible in an x20 system.

Sequence Transport Configuration 7

The user has the option of including models and scan recipes (along with the already
included basic sequence, deskew, and site by site model) when exporting a sequence
to another system. If the user chooses to export the sequence recipe without including
the models and scan recipes, only the basic sequence, deskew, and site by site model
Preliminary

is exported.

Open the Sequence Transport Options… Dialog Box 7

From the Configuration screen, click on the Recipe Transport Options… button to
open its dialog box. (See Figure 7.44)

Figure 7.44 Recipe Transport Options… Configuration Screen Button

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Export Paths 7

The Recipe Transport Options dialog box, contains fields for setting the Export and
Upload paths for scan and sequence recipes. The system has default paths that were
established during the software installation. The default paths are displayed in
Figure 7.45.
1. To change back to the default scan and sequence recipes, sequence recipe option
defaults, and data paths (C:\EAGLE\SCANEXP and C:\EAGLE\SEQEXP),
click on the System Defaults button.

Figure 7.45 Recipe Transport Options Dialog Box

Step 1 Click System

Defaults to set scan and
sequence recipe paths

Preliminary
to default settings, and
Scan and Sequence
to set sequence recipe
recipes and data paths
options defaults.
are displayed here.

2. If setting a different path, click Browse and locate the desired folder in the
dialog box. Click OK when the folder is chosen to set it active in the Recipe
Transport Options dialog box. (See Figure 7.46.)

Figure 7.46 Browse Directories Dialog Box

This is the default

scan recipe folder.

3. If no other changes are to be made in the Recipe Transport Options dialog box,
click OK to accept the changes.

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Sequence Recipe Options 7

The Sequence Recipe Options portion of the Recipe Transport Options dialog box is
designed to give the user an opportunity to include the models and scan recipes in the
sequence recipe export or upload.
The Export option, when checked, adds the binary models and scan recipes to the
sequence recipe when exporting it. If unchecked, the models and scan recipes are not
included with basic sequence, deskew, and site by site model.
The Upload option, when checked, accepts the models and scan recipes when
uploading the sequence recipe. If unchecked, the models and scan recipes are not
included with basic sequence, deskew, and site by site model.
The If Existing File field contains the options necessary when recipes on the system
have the same name as those being imported. (This option is only for imported
recipes. If a host downloads a sequence, all existing files are automatically
overwritten.) The following options are available:
Š Prompt User: This option produces a dialog box that allows the user to rename
the recipe, overwrite the current recipe having the same name, or set the option
Preliminary

to ensure that no recipes are ever overwritten by user imported files.

Š Auto rename all: This option automatically renames the scan recipes and diegrid
in the sequence and placed the newly named scan recipes in the designated
folder.
Š Auto overwrite all: This option automatically overwrites recipes and diegrid with
the same name, replacing them with the imported recipe.
Š Do not overwrite any: This option does not allow any of the recipes, scan or
sequence, to be overwritten. When an import is attempted, the user is prompted
with a question asking if the existing recipe is to be overwritten with the
imported one. In a sequence the prompt is given for every file, scan recipes and
diegrids.

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1. Put a check in the checkbox of either or both Exporting and Uploading. The
checked box means the models and scan recipes, if they exist, are included in the
operation.

Figure 7.47 Recipe Transport Options with “If Existing File” Menu

Step 1 Put a check in Step 3 Click OK to

either or both boxes to accept the changes
include the models and and close the dialog
scan recipes in their box.
respective operations.

Step 2 Click on the option in

the drop-down menu to choose

Preliminary
the method of handling
incoming recipes or diegrids
with identical names in the
incoming folder.

2. Click on the option in the drop-down menu to choose how the incoming recipes
and diegrids are to be handled if there are files with the same name already
resident in the selected folders. (See the explanations above regarding the
operation of each option.)
3. Click OK to apply the changes and close the dialog box.

Wafer Center Calibration 7

The sequence transportability depends on the system using the center of the wafer as a
reference point instead of the center of the stage, as has been done in the past. This
requires that the Calibrate Wafer Center calibration be run. The Calibrate Wafer Center
calibrates the center of the wafer as the (0,0) reference point. After this calibration has
been run, all sequence recipes and the system Safe Area settings use the wafer
coordinates. (See “Calibrate Wafer Center” Calibration.)
The P-15 systems do not use a handler, so this is only effective if the system has a
precision locator for wafer alignment.

Calibration Procedure 7

Before performing the Calibrate Wafer Center calibration, all system calibrations
must be current, including the Center of Rotation and Stage Mapping calibrations. If
not, perform these calibrations first along with any prerequisites. After these are
acceptably completed, proceed with the following calibration.

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1. From the Calibration screen, click on Calibrate Wafer Center button.

NOTE: The user must be logged in under the proper security level to
access the Calibrate Wafer Center calibration. Without the correct level,
the calibration might be missing from the menu or grayed out.

Figure 7.48 Calibration Screen

Preliminary

Step 1 Click on Calibrate

Wafer Center… to open
the calibration.

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The user is prompted to load a wafer. The user selects the cassette and slot that
the wafer is to be taken from as well as setting the load angle to 45°.

Figure 7.49 Wafer Center Calibration Screen

Preliminary
2. Load a wafer.
3. Click OK after the wafer is loaded.
The system moves the wafer to until its edge is under the optics. When the stage
stops, the system focuses on a point near the wafer edge.
4. Align the wafer edge with the screen crosshair as prompted by the system. If the
edge is not in sight, move the stage to the right using the right arrow button in
the toolbar. Align the left wafer edge with the screen crosshairs.
5. Click OK.
6. The stage moves to a point near the right wafer edge and the system focuses on
the wafer surface. The user is prompted to align the wafer edge with the screen
crosshairs.
7. Align the right wafer edge with the screen crosshairs. Use the left-arrow button
in the tool bar to move the wafer edge into alignment with the screen crosshairs.
(In necessary, use the Slow speed for the arrow button movement to accurately
position the edge of the wafer at the screen crosshairs.)
8. Click OK to accept the position.
9. Click OK.
The system positions the top of wafer under the optics and focuses. The user is
prompted to position the top edge of the wafer at the screen crosshairs.

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10. Align the top wafer edge with the screen crosshairs. Use the down-arrow button
in the tool bar to move the wafer’s top edge into alignment with the screen
crosshairs. (In necessary, use the Slow speed for the arrow button movement to
accurately position the top edge of the wafer at the screen crosshairs.)
11. Click OK.
The system positions the bottom of wafer under the optics and focuses. The user
is prompted to position the bottom edge of the wafer at the screen crosshairs.
12. Align the bottom wafer edge with the screen crosshairs. Use the up-arrow button
in the tool bar to move the wafer’s bottom edge into alignment with the screen
crosshairs. (In necessary, use the Slow speed for the arrow button movement to
accurately position the bottom edge of the wafer at the screen crosshairs.)

Stage to Wafer Conversion 7

As a result of the system converting to the use of the wafer center instead of the stage
center as a reference point, all sequence recipes created before the conversion (i.e.,
before the “Calibrate Wafer Center” calibration) become inaccurate. They must be
Preliminary

converted to the wafer center system in order to perform correctly. The Calibrate
Wafer Center Calibration adds an offset from the stage coordinate to the wafer
coordinates.
The Stage to Wafer calibration should only be performed after the Center of Wafer
calibration is performed and prior to any new recipes being created. If only new
recipes (recipes created after the Calibrate Wafer Center calibration) are to be used,
the conversion is optional.

NOTE: This procedure can only be performed once.

Calibration Procedure 7

1. From Windows Explorer, run

<Drive where Eagle is located>:\eagle\exe\StagetoWafer.exe
2. User is warned to back up recipes before proceeding.
Backup is advised. Use the Pbackup procedure.
3. Click Proceed. All sequence recipes are automatically converted.

H ANDLER … B UTTON O PTIONS W INDOW F OR S EQUENCING 7

The P-15 does not have a handler. Manual Load/Unload is the only active feature in
this dialog box, and is available for use in the P-15 system.

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This option is for an operator who is going to use the same sequence recipe to process
numerous samples in a series. In this mode, at the end of each scan sequence the stage
automatically moves to the manual load position and a dialog box informs the user to
load a sample and click OK when ready. The stage positions the sample to begin the
sequence scans and automatically begins the scan procedure. When the sequence is
complete, process starts again. This procedure continues until the Cancel button is
clicked to stop the sequence.

Accessing the Handler… Button Options Window 7

1. In the Sequence Recipe Catalog (see Figure 7.50), click the View/Modify button
to display the Sequence Editor. (See Figure 7.51.)

Figure 7.50 Sequence Recipe Catalog Screen

Preliminary
Step 1 To display the
Sequence Editor,
click on View/Modify.

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2. Click on the Handler… button (see Figure 7.51) to display the Handler Options
dialog box. (See Figure 7.52.)

Figure 7.51 Sequence Editor

Step 2 Click on Handler

to display the Handler
Preliminary

Options dialog box.

Using Handler Options to Set the Sample Selection Procedure 7

Sequence procedures can be run tow ways for the P-15 system: No Automatic
Load/Unload and Manual Load/Unload. Each is discussed below.

Figure 7.52 Handler Options Dialog Box - Load Options

Click on the No Automatic Click on OK after all the

Load/Unload radio button to desired changes have
set manually loaded single been made.
sample sequence scans.

Sample loading Options

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Manual Load/Unload (Automatic)

This options is used when the operator is going to use a sequence for processing
numerous samples using the same sequence recipe. In this mode, the stage
automatically moves to the manual load position and a dialog box informs the user to
load a sample and click OK when ready. The stage positions the sample to begin the
sequence scans and automatically begins the scan procedure. When the sequence is
complete, the stage again moves to the manual load position and the dialog box
appears. This procedure continues until the Cancel button is clicked to stop the
sequence.
1. In the Sequence Editor click on the Handler… button. This displays the Handler
Options dialog box. (See Figure 7.53.)

Figure 7.53 Handler Options Dialog Box - Manual Load/Unload Option

Step 2 Choose the

Preliminary
Step 3 Click OK
Manual Load/Unload
when the selection
option for multiple
is complete.
samples using the
manual load procedure.

2. Select Manual Load/Unload (place a dot in the radio button) to activate the
automatic Manual Load procedure for each sample using the sequence. (See
Figure 7.53.)
3. Click OK after the Manual Load/Unload procedure has been selected. (See
Figure 7.53.)
4. In the Sequence Editor, click Sequence in the menu bar to display its menu.
5. Click on Save to save the changes in the sequence. (See Figure 7.54.)

Figure 7.54 The Sequence Menu

Step 4 Click on Sequence

to display the menu,

Step 5 click on Save to save

the Handler Options dialog
box configuration changes.

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6. When the sequence containing the Manual Load/Unload option is started, a

message box appears telling the user to load a sample (substrate) then click OK
to continue or Cancel to stop the sequence. (See Figure 7.55.)
Load a sample onto the stage then click OK to continue. (See Figure 7.55.)

Figure 7.55 Load Substrate Message

Step 6 Load a sample on the

stage and click OK to continue.

Step 8 Click Cancel after the

last sample is removed.

7. Turn on the vacuum using the switch on the top left inner door frame.
8. After the last sample is processed, the system moves it to stage door.
9. Open the door and turn off the vacuum.
Preliminary

10. Remove the sample from the stage and click Cancel. This terminates the
sequence repetition. (See Figure 7.55.)

No Automatic Load/Unload
This options is used when the operator is going to process random samples using a
sequence recipe. In this mode, all load and unload procedures are initiated directly by
the operator.
1. In the Sequence Editor click on the Handler… button. This displays the Handler
Options dialog box. (See Figure 7.53.)

Figure 7.56 Handler Options Dialog Box - Manual Load/Unload Option

Step 2 Choose the

Step 3 Click OK
No Automatic Load/Unload
when the selection
option for single or random
is complete.
sequence execution.

2. Select No Automatic Load/Unload (place a dot in the radio button) to deactivate

the Automatic Manual Load procedure. (See Figure 7.56.)
3. Click OK after the selection is complete. (See Figure 7.56.)
4. In the Sequence Editor, click Sequence in the menu bar to display its menu.

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5. Click on Save to save the changes in the sequence. (See Figure 7.54.)

Figure 7.57 The Sequence Menu

Step 4 Click on Sequence

to display the menu,

Step 5 click on Save to save the

Handler Options dialog box
configuration changes.

Preliminary

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Preliminary

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 8
ANALYZING 2D SCAN DATA Chapter 8

I NTRODUCTION 8

The 2D Analysis application displays the trace of the sample and its measurement
data after scanning.
This chapter describes:
Š Starting the 2D Analysis Application on page 8-1
Š Leveling the Trace and Setting Up Measurements on page 8-6
Š Setting the Cursor Positions Using Feature Detection on page 8-24
Š Setting the Cutoff Filters on page 8-34

P rel i mi n a ry
Š Customizing the Graph Display on page 8-16
Š Measuring the Radius on Curved Surfaces on page 8-42
Š Measuring Step Height on Curved Surfaces Using Fit and Level on page 8-47
Š Saving Scan Data on page 8-47
Š Reevaluation of Saved 2D Scan Data on page 8-48

STARTING THE 2D A NALYSIS A PPLICATION 8

Introduction 8

2D analysis is an operation performed on data obtained from a scan. If a 2D scan is

run, immediately after the scan procedure is complete, the Analysis screen
automatically appears. When automatically opened following a scan, the Analysis
screen contains the analysis of the “live” data. The following apply to live data:
Š It is data which has just been collected from a scan;
Š It has not been saved and is therefore untitled;
Š This data can be manipulated by changing the scan parameters in the Scan
Recipe Editor for the recipe used to create the scan.
If the data has been saved, it is no longer “live” as described above. It has the
following properties:
Š Its name appears in the Scan or Sequence Data (if it was save to that location).
Š It must be opened through the Analysis screen in order to view or reanalyze it.
Š It can be reanalyzed by changing the scan recipe parameters.

Data Analysis Procedure 8

If the original scan has been saved and the Exit from the scan screen has been
performed, use the following procedure to access the Analysis screen.

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1. From the Catalog screen, click on the Scan Data button (see Figure 8.1) to display
the Scan Data Catalog in the Information Display window.

Figure 8.1 Sequence Recipe Catalog

Step 1To display the

Scan Data Catalog in the
Scan screen, click on the
Scan Data button.
Preliminary

Information display
Window

2. Click the 2D button at the top of the screen to display the 2D Scan Data sets.
(See Figure 8.2.)

Figure 8.2 Scan Data Catalog

Step 2 Click on 2D to
display 2D scan data sets in
the catalog.

The Information Display

window portion of the
catalog screen contains:
Š The list of folders
Š Displays the scan
data list, the
contents of the
selected folder.
(See Figure 8.3.)

Step 4 After clicking on the

desired folder, click the
Thumbnail button to display
thumbnails of all data sets in
the folder. (See Figure 8.4.)

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3. Open the desired data folder by double-clicking on the folder name in the Scan
Data list of folders. (See Figure 8.3.)
4. Click on the Thumbnails button to display small graphs (thumbnails) of all data
sets in the chosen folder. (See Figure 8.4.)
5. To display the Analysis window for a particular data set, use one of the
following procedures:
Š Double-click on the thumbnail; (See Figure 8.4.)
Š Click once on the thumbnail and then click on OK. (See Figure 8.5.)
Š Double-click on the scan data name in the scan data list. (See Figure 8.3.)
Š Click once on the name of the data set in the list (it highlights when
chosen) then click on the Review button. (See Figure 8.3.)

Figure 8.3 Scan Data Catalog

Preliminary
Each item in the SCAN Each item in the above catalog
DATA folder list is a folder belongs to the same Scan
which contains one or Data set folder. (See Step 5)
Step 4 Click on Thumbnails more scan data sets or Double-click on one to display
to display a set of small additional folders. the analysis window.
graphic presentations of the
individual scan traces. (See
Figure 8.4.)

Step 5 Click on a Scan Data set, then

click on Review to display the analysis
screen.

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Figure 8.4 Thumbnail Display of Data Traces

When the Thumbnail button

is clicked on, the Thumbnail
dialog box appears
containing thumbnail traces
of all data in the folder.

(See Step 5) To access the

Analysis screen for any one of
the thumbnails, double-click on
the thumbnail.
Alternative: See Figure 8.5.
Preliminary

Figure 8.5 Thumbnail Display of Data Traces

Alternative: To access the Analysis

screen using a thumbnail:

(See Step 5) Second,

Then click OK.

(See Step 5) First, click

on the thumbnail;

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2D Analysis Window Features 8

The Analysis toolbar contains buttons that provide access to commonly used
functions. (See Table 8.1.)

Table 8.1 2D Analysis toolbar

Button Description
Displays the graph view in the original view size.

Activates the zoom capability. To focus on a certain part of the

graph, use the cursor boundaries to define the zoom-in area.

Turns the Auto Scale Function for the zoom capability on and off.

First click activates the LEVEL cursors.

Second click levels the trace according to cursor settings and

Preliminary
activates the Measurement cursors.
Opens the Surface Parameter Summary window. If the Surface
Parameter Summary window is currently minimized, it appears
maximized upon clicking this button.
This initiates a recalculation of the data using newly chosen
parameters from the recipe used for the scan. This can be
executed on both live data (not yet saved) and saved data that
was collected using the Software version 6.1 or higher.
Toggles, ON/OFF, the normal trace graph.

Toggles, ON/OFF, the waviness trace graph.

Toggles, ON/OFF, the roughness trace graph.

Activates Fine Cursor Movement mode of measurement and

leveling cursors.

Prints the Analysis graph and the surface parameter summary.

Show/Hide Major Modes for the Histogram.

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L EVELING THE TRACE AND S ETTING U P M EASUREMENTS 8

To facilitate the analysis of trace data, the system uses vertical lines called cursors.
Two types of cursors are used: Leveling and Measurement. Leveling cursors are used
to define the baseline for the trace. Measurement cursors are used to define the region
for measurement. In general, the leveling function should be performed prior to
setting the Measurement cursors.

Figure 8.6 Data Before Leveling, with Leveling Cursors Visible

Left Cursor boundary box.

Contact with the cursor in

the margin above the
graph body displays the
double tip arrow (↔)
indicating that the entire
cursor is being moved.
Preliminary

The cursor boundary lines

are the vertical lines
extending down from the
boundary box above the
graph body.

Using Cursors 8

The procedure for using and moving cursors is the same for each function in which
cursors are used. The cursor manipulation is the same for both the Leveling and
Measurement functions.

Moving Cursors 8

Cursors can be moved using either the track ball or the combination of keyboard
space bar and arrow keys. When the scan initially appears in the Analysis screen, the
left measurement cursor is highlighted.
In the following discussion the screen’s arrow cursor is called the pointer. The word
cursor is used to describe the vertical boundary lines used to manipulate screen data.

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Moving the Cursor with the Trackball:

1. The pointer is moved by rolling the trackball. As the pointer moves toward the
right or left cursor, it interacts with the cursor’s boundary line, taking on the
shape of an arrow with a boundary line at its tip. (See Figure 8.7.) As the pointer
passes the center line between the two cursors it changes direction, pointing
toward the cursor boundary it is closest to. When it changes direction, it is able
to interact with (reposition) the cursor boundary that it is pointing at.
The single arrowheads demonstrate that only the nearest cursor boundary at
which it is pointing, can be moved, thereby expanding or diminishing the cursor
size. (See Figure 8.7.)

Figure 8.7 Screen Cursor Positioning

When the cursor is chosen, the boundary lines are

highlighted and the boundary box
appears recessed.

Preliminary
The arrow direction points to
the cursor boundary that is
being interacted with. The
pointers in these illustrations
can move the boundaries
they are pointing at in either
direction. The trackball
movement, as used in the
click and drag procedure,
determines the direction of
cursor boundary movement.

The screen opens with the left cursor highlighted. Using the trackball, move the
pointer to the cursor boundary. As the pointer passes the midpoint between the
two cursors it changes direction, pointing at the closest cursor boundary. If that
cursor is not highlighted, click with the left mouse button to activate the cursor.
At any time after the pointer points to the boundary, as long as the cursor
boundary is highlighted, the boundary can be repositioned in either direction by
clicking with the left mouse button and dragging it. The pointer does not have to
be directly next to the cursor boundary, only pointing at it. (In Figure 8.7, the
pointer in the left illustration only moves the right cursor boundary. The pointer
in the right illustration only moves the left cursor boundary.)
2. If the entire cursor is to be moved without changing its size (that is, without
moving only one of its boundaries), the double arrow pointer is used. (See
Figure 8.8.) Use the trackball to position the pointer either in the margin above
the graph, or between the cursor boundaries, causing the double arrow to appear.
(See Figure 8.8.) With the double arrow positioned to move the highlighted
cursor, click and hold the left trackball button while dragging the cursor to its
new location.

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Figure 8.8 Double Cursor - Relocating the Entire Cursor

The double head arrow

indicates that the entire
cursor is going to be moved.
Anywhere in the margin
above the graph initiates only
the double head arrow.
In the graph, the screen
cursor must be between the
cursor boundary lines.
Preliminary

Moving the Cursor with the Space Bar and Arrow Keys
The combination space bar and arrow keys can be used to move the cursors to new
locations on the trace. The space bar and arrow keys function independently of the
trackball and the associated pointer used to change the cursor size or relocate it.
1. When the screen opens, the left cursor is highlighted. To select a cursor or to
select another cursor, click the space bar. Each time the space bar is clicked it
toggles once in the progression from left cursor to right cursor to both cursors,
then back to the left cursor.
2. Once the desired cursor is highlighted (or both cursors are highlighted) use the
left or right arrow keys to move the cursors. Notice that the cursor(s) move a
small consistent distance in the direction of the arrow key each time the arrow
key is clicked.

Changing the Cursor Size Using the Space Bar and Arrow Keys
The combination space bar and arrow keys can be used to change the cursor size.
They function independently of the trackball and the associated pointer used to
change the cursor size or relocate it.
Once the desired cursor is highlighted (or both cursors are highlighted) use the
up or down arrow keys to spread or reduce the cursor(s) size. Notice that the
cursor boundaries move outward (up arrow) or inward (down arrow) a small
consistent distance each time the arrow key is clicked.

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General Cursor Use 8

In the scan pictured in Figure 8.9, the tract is very jagged indicating a high noise
level. When the scan shows evidence of this type of noise, or is very rough, the
measurement cursor boundary lines set a distance over which an average is computed
by the system. The resultant data is then used for the purpose of evening out the trace
data. In rough or noisy scans, set the cursor boundaries further apart than would be the
case in smooth scans. This technique is called the Delta Mode.

Figure 8.9 Delta Mode - Cursor Spread on a Scan Trace

In this blow up of a scan in

the Analysis screen. The

Preliminary
spread of the cursor
boundaries in this trace is
wide enough to compensate
for the high noise level.
Notice the spikes and
valleys that depict the noise.

1. For rough or noisy scans, the cursor boarders should be expanded to cover a
wider region. To adjust the width of the leveling or measurement cursor:
a. Click outside the border of the measurement cursor that is to be expanded
and drag it to the new position. (See Figure 8.7 and step on page 8-7.)
b. (Alternate resizing of cursor) With the cursor highlighted, use the up arrow
key to spread the cursor and the down arrow key to shrink the cursor. Each
click on the arrow key expands or shrinks the cursor a consistent amount.
(See Step under Changing the Cursor Size Using the Space Bar and Arrow
Keys on page 8-8)
The average value of the height within the region is then used for measurement
or leveling.
2. For finer cursor control:
a. Click the Operations menu and select Fine Movement Mode, or click the
FINE button.
b. In the FINE cursor mode, the movement with each arrow key click is
exactly one data point.
c. NOTICE: The FINE cursor mode has no effect on the trackball method of
movement and resizing.

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Using the Leveling Cursors 8

In order to obtain an accurate analysis, the trace must be given a level frame of
reference. This is accomplished through the leveling procedure. For 2D scan data,
two areas (defined by cursors) on the scan that are at equal heights define a reference
axis for plotting the data and calculating surface parameters.
Acceptable leveling cursor positions can be determined in advance by viewing a
sample in the XY View window prior to finalizing the recipe and beginning the scan.
However, the proper position is not always obvious, and it is possible to accidentally
set them at inappropriate locations. In an extreme case, the left leveling cursor might
end up at the bottom of a large step, and the right leveling cursor on the top.
1. Click on the LEVEL button in the tool bar. (Alternative: Operations/Level Trace.)
This activates the leveling cursors. They appear at the locations currently
specified in the recipe, with the left cursor selected (highlighted).

Figure 8.10 Analysis Screen with Unleveled Trace and Level Cursors
Preliminary

The LEVEL button is used two

times:
Step 1 The first click activates
the Leveling Cursors.
Step 3 The second click
levels the trace and activates
the Measurement Cursors.

The dashed lines are not in the

actual screen but are used here
to show two planes which can be
used in this trace for setting
leveling cursors.

Step 2 Set the cursors so they intersect the trace

in bounded areas that are on the same plain.

2. To set the cursors so that the trace is accurately leveled, it is important to find
two areas on the trace that are on the same plain. Set the cursors to the desired
positions. (For help moving cursors, see Using Cursors on page 8-6.)

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3. Click the LEVEL button. (Alternative: Operations/Level Trace.)

The data is leveled and replotted and the measurement cursors appear.

Figure 8.11 Analysis Screen with Leveled Trace and Measurement Cursors

After the LEVEL button is

clicked on the second time, the
Measurement Cursors are
activated and the trace appears
leveled out.

As the cursors are moved

in the Analysis screen, the
Cursors limits adjust
automatically to reflect the
new positions. (See

Preliminary
Figure 8.12.)

Using the Measurement Cursors 8

The measurement cursors are used to define the region or regions of interest for
measurement.
EXAMPLE:
1. In order to determine the difference in height between two regions, those two
regions must each be clearly identified. The measurement cursors are used to
isolate both regions for measurement and subsequent calculation.
2. To determine the area in a peak or valley region, the Measurement Cursors
can be moved (or adjusted if they were partially out of position) to accurately
enclose those regions and the area calculated or recalculated.
The parameters affected by the measurement cursors can be added or taken out of the
recipe so that the new results are displayed in the Surface Parameter Summary
Window (STATS) of the screen after the cursors are moved and the results of the move
recalculated. This procedure can be performed on “live” data or previously saved data
(from scans using software version 6.1 or newer).
The Analysis window initially appears with the measurement cursors set at the
locations specified in the scan recipe.

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Like the leveling cursors, the measurement cursors can be freely moved to any
location on the trace. In the Scan Data Analysis window the displayed cursor positions
are recalculated whenever the measurement cursors are moved to new locations.

Figure 8.12 Analysis Screen’s Cursors Settings

As the cursors are moved in the Analysis

screen, the Cursors limits adjust
automatically to reflect the new positions.

Parameters in the Surface Parameter Summary window are not recalculated

automatically when the measurement cursors are moved. If new data is required with
the adjustment of the cursors, the recipe used to create the scan can be modified to
present new parameters in the Surface Parameter Summary window or remove
unnecessary ones.
1. From the Analysis screen, click on Edit to display its menu. (See Figure 8.13.)
Preliminary

2. Then click Recipe… to open the scan recipe used to create the scan. (See
Figure 8.13.)

Figure 8.13 Accessing the Scan Recipe from the Analysis Screen

Step 1 Click on Edit

Step 2 Click Recipe…
to open the recipe
used to create the
scan.

Notice current cursor

positions and parameter
statistics.

This displays the scan recipe screen from which parameters can be added or
removed. In Figure 8.14 the General Parameters window of the Recipe screen
has been opened to change the parameter set to be calculated with the next
cursor adjustment. (This procedure can be used with both live and saved data.)

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Figure 8.14 Recipe Screen - General Parameters Window

The General Parameters

button has been chosen
and its contents displayed.

Parameters have been

Preliminary
chosen that reflect the
needs relating to the
pending cursor change.

3. When the parameters have been chosen, click on Recipe to display its menu.
(See Figure 8.15.)
4. Choose Analysis to return to the Analysis screen. The system calculated the
parameter values for the chosen parameters using the current cursor settings and
displays them in the Surface Parameter Summary window. (See Figure 8.15.)

Figure 8.15 Exit Recipe Editor to Return to Analysis Screen

Step 3 Click on Recipe to

display its menu.
Step 4 Choose Analysis
to return to the Analysis
screen.

After repositioning the cursors, to recalculate the parameters in the Surface

Parameter Summary window, use the following procedure:

5. Set the Measurement Cursor positions. (For help positioning the cursors, see
Using Cursors on page 8-6.)
In the following illustration the cursors have been moved to capture the area
under the two highest features in the scan. Parameters have been chosen that
respond to the new position. (See Figure 8.16.)

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Figure 8.16 Analysis screen with Repositioned Cursors

Step 5 The cursors are

moved to a new position.
In this illustration they are
positioned to find the area
under the two high
features on the graph.

The cursor positions and

related height, width and
step parameters are
automatically updated as
the cursors are moved.
Preliminary

6. After positioning the measurement cursors, the parameters in the Surface

Parameter Summary window are ready to be updated:
Click the CALC button to perform the recalculation. (See Figure 8.17.)

Figure 8.17 CALC Button in Analysis Screen

Step 6 Click CALC to

recalculate the
parameters using the new
cursor positions.

The parameters are automatically recalculated and the Surface Parameter

Summary window is updated. In Figure 8.18, the chosen parameters in the Scan
Recipe display their new values in keeping with the new cursor positions. Only
the chosen parameters become part of the data set that is calculated.

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Figure 8.18 Surface Parameter Summary Window

When the recalculation

procedure is performed, only
the parameters chosen in the
scan recipe are visible and
only those are changed.

Preliminary
7. To retain the newly calculated values in a data file and the new cursor positions
in the recipe, the data must be saved. Click File to open its menu. (See
Figure 8.19.)
8. Choose Save Data… from the File menu to open its dialog box. (See
Figure 8.19.)

Figure 8.19 File Menu in Analysis Screen

Step 7 To save data, click

File to display its menu.

Step 8 Choose Save

Data… from the File
menu.

9. In the Save dialog box, ensure that the proper folder is chosen, enter the name
that the data is to be stored under. (See Figure 8.20.)
10. Click Save to save the data. (See Figure 8.20.)

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Figure 8.20 Save Scan Data Dialog Box

Step 9 Enter the file Step 10 After the name

name. is entered click Save to
save the data to the file.

C USTOMIZING THE G RAPH D ISPLAY

Preliminary

The View menu offers several options for customizing the graphical display of the
data. The instrument proportions the data to the area available in the window.
However, the data can be sized by setting custom graph limits.

Changing the Z Limits Display 8

Changing the Z Limits Display allows the user to set the scale on the graph.
1. Click the View menu to display its menu. (See Figure 8.21.)

Figure 8.21 Analysis Screen with View Menu

To set the Z Graph Limits or Z

Units
Š Step 1 Click View to
display the menu.
Š Step 2 Choose Change
Š Step 3 Choose Z Graph
Limits

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2. Choose Change from the View menu. (See Figure 8.21.)

3. Select Z Graph Limits. (See Figure 8.21.)
The dialog box appears. (See Figure 8.22).

Figure 8.22 Setting Z Graph Limits

Step 5 Click
on OK to save
Step 4 To change the limits, the changes
double-click on the current limit to to the limits.
highlight it. Enter the new limit.

4. Highlight the old limit and enter the new limits in the Upper and Lower Z Limit
fields: (See Figure 8.22.)
Š Higher to reduce the size of the trace;

Preliminary
Š Lower to increase the size of the trace.
5. Click OK to apply the limits to the displayed data. (See Figure 8.22.)

Changing the Z Units Display 8

The Profiler plots the data in µm, nm, Å, or both µm and Å with a crossover value
that is set by the user.
1. Click the View menu to display its menu. (See Figure 8.23.)

Figure 8.23 Analysis Screen with View Menu

To set the Z Graph Limits or Z

Units
Š Step 1 Click View to
display the menu.
Š Step 2 Choose Change
Š Step 3 Choose Z Units

2. Choose Change from the View menu. (See Figure 8.23.)

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3. Select Z Units. (See Figure 8.23.)

The Set Z Units dialog box appears (see Figure 8.24).

Figure 8.24 Set Z Units Dialog Box

Step 4 Choose the desired units by Step 5 Click on

clicking in the appropriate radio button. OK to apply the
For the bottom choice, after clicking in settings to the
the radio button, enter a distance at displayed data.
which it changes between microns
and angstroms.

4. Select the desired Z unit mode. Choose between:

Š Microns only (µm only mode),
Š Nanometers only (nm only mode),
Š Angstroms only (Å only mode),
Preliminary

Š Combination mode where the reading could be in angstroms or microns

depending on the trace magnitude (µm and Å crossover at [variable] Å).
In this mode, enter the trace magnitude at which the units change from
microns (µm) to angstroms (Å) or from Å to µm. In Figure 8.24, the mode
crosses over at 10000 Å.
5. Click OK to apply the settings to the displayed data.

Displaying Data in FFT Mode 8

The data can be replotted using the Fast Fourier Transform (FFT) in order to expose
patterns of data that indicate regularly spaced features of the same width. By default,
the instrument plots the Scan View data in linear coordinates (“Normal” data).
A choice of window functions is available to apply to the endpoints of the FFT data.
Selecting FFT:
1. Click View to display its menu. (See Figure 8.25.)
2. Select FFT. (See Figure 8.25.)

Figure 8.25 View Menu with FFT Chosen

Step 2 To choose Fast Step 4 To return to the

Fourier Transform, click normal data presentation,
FFT. A check next to FFT click on Normal Data. A
indicates that it is chosen. check next to Normal
Data indicates that it is
chosen.

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The instrument replots the data.

3. Click View to display its menu. (See Figure 8.25.)
4. Select Normal Data to return to the Normal Data mode. (See Figure 8.25.)
The current data mode selection is one with the check next to it.

Displaying Data on Logarithmic Scaling 8

The display can be set to plot either Normal or FFT data in logarithmic X and Z
coordinates. Logarithmic scaling helps to delineate small features that are dwarfed by
the larger features in a linearly proportioned scan.
1. In the Analysis screen, click on View in the Menu Bar. (See Figure 8.25 for an
illustration of the menu.)

Figure 8.26 Analysis Screen with a Normal Trace

Step 1 Click on View to display

Preliminary
its menu. See the menu in Figure
8.25. Choose Normal Trace.

A Normal Trace without logarithmic

scaling.

2. From the view menu, choose either Normal Data or FFT. (See Figure 8.28.)
3. Select Log 10 X or Log 10 Z or both from the menu. A check appears next to the
chosen items.

Figure 8.27 View Menu

EXAMPLE: Normal Application.

With Normal Data chosen, Step 3 Click on Log 10
click on Log 10 Z Axis to X Axis, Log Z Axis, or
display the Normal data in Z both to display Fast
Axis logarithmic scaling. For Fourier Transform data
result see Figure 8.28. in logarithmic scaling.
Step 2 Click on
Normal Data or FFT. In
this example, FFT.

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A check appears beside the menu selection and the instrument replots the data
for the chosen axis.

Figure 8.28 Normal Trace and Z Axis Logarithmic Scaling

This is the Normal trace from

Figure 8.26 with the Z Axis
logarithmic scaling applied.

See Figure 8.27, EXAMPLE,

for an illustration on setting
up this display.

4. Return to linear plotting by disabling the log 10 selection(s) (See Step 3).

Viewing in Zoom Mode 8

Preliminary

Selected portions of the trace can be zoomed in on to help isolate features for
measurement, especially when using the Fine measurement mode for small-increment
cursor movement. Feature isolation can be improved with the Scale function, that
allows vertical as well as horizontal scaling.
Zoom Procedure 1. The zoom function operates using the Scale icon and the Zoom icon. (See
Figure 8.29.) Click on the scale icon to choose the desired state of the scale
function.
Š If the Scale function is on, two vertical lines appear on the scan.
Š If the Scale function is off, a box appears.

Š The scale icon toggles the scale function on and off.

2. Click on the Zoom-in icon to activate the zoom function. (See Figure 8.29.)

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3. Click on the Zoom-out icon to return to normal display. (See Figure 8.29.)

Figure 8.29 Analysis Screen with the Zoom and Scale Function Buttons

Step 2 Click on the

Zoom In icon for a
closer view a
portion of the trace.

Step 3 Click on the

Zoom Out icon to
return to the original
view.

Step 1 Click on the

Scale icon to activate
scaling. If the button

Preliminary
is highlighted, the
zoom function is a
box, if scaling is not
on, zoom is between
cursors.

Zoom with Scaling ON 4. Click and drag the cursors and position them, one on each side of the feature
being zoomed in on. (See Figure 8.30.)

Figure 8.30 Analysis Screen Using Scaling Zoom

When the cursors are Click to turn

positioned around the the scale
portions to be function on.
zoomed, click here.

Step 4 Click on each cursor

(left and right) and move them
to define the zoom area.

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Zoom with Scaling OFF 5. Click and drag on a border or corner of the zoom box, to enclose the portion of
the scan to be zoomed in on. (See Figure 8.31.)

Figure 8.31 Analysis Screen Using Boxed Zoom

Step 6 When the box Disable

is positioned around the scale
the portions to be function to
zoomed, click here. turn it off.

Step 5 Click on a portion of the

box (box border or corner) to
Preliminary

move a border and change the

area of the box.

NOTE: For finer positioning, go to the Operations menu and select

Fine Movement Mode, or click its button on the toolbar. Press [<] or [>]
to position the vertical lines.

6. Click on the Zoom In icon to zoom into the area defined by the cursors or the
zoom box. (See Figure 8.31.)
7. Perform any measurement or leveling procedure necessary to analyze the
zoomed data.
8. Click the Zoom In button again to deactivate the zoom cursors and reactivate the
measurement cursors. (See Figure 8.31.)
9. To save the new data and the new cursor positions, use the procedure described
in Saving Data From the Zoom Procedure on page 8-23.

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Saving Data From the Zoom Procedure 8

Saving data and cursor 1. To update the data in the Surface Parameter Summary window and to store
position in Surface zoomed cursor positions in the recipe, click the Operations menu, and select
Parameter Summary Recalc with Zoomed Level Cursors. (See Figure 8.32)

Figure 8.32 Recalculate and Save Zoomed Leveling Cursors

Step 1 Click on Operations in

the Menu bar.
Step 2 Choose Recalc With
Step 2 Choose Recalc With Unzoomed Level Cursors to
Zoomed Level Cursors to recalculate data and not save
recalculate data and save new new cursor positions.
cursor positions.

Preliminary
Saving only data in Surface 2. To update the data in the Surface Parameter Summary window without saving
Parameter Summary the zoomed cursor positions, go to the Operations menu and select Recalc With
Unzoomed Cursors. (See Figure 8.32)

3. To return to the original scan view click the Undo Zoom icon , or go to
the Operations menu and select Undo Zoom.

Viewing the Trace Information 8

The left side of the Analysis window displays the basic data taken from the leveling
and measurement cursors. These values are updated instantaneously with the
positioning of the cursors (see Table 8.2).

Table 8.2 Trace Information Parameter

Parameter Description
Meas (µm) Displays the X-axis value of the left vertical line of the left and right
measurement cursors.
Delta (µm) Displays the X-axis value of the right vertical line of the left and
right measurement cursors.
Level (µm) Displays the X-axis value of the left vertical line of the left and right
leveling cursors.
Delta (µm) Displays the X-axis value of the right vertical line of the left and
right leveling cursors.
Ref (µm) Displays the Feature detection reference point within the trace.
L Height Displays the Average height of the scan region marked by the left
measurement cursor.
R Height Displays the Average height of the scan region marked by the
right measurement cursor.
St Height Displays the Difference between the R Height and the L Height.

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Table 8.2 Trace Information Parameter

Parameter Description
Width Displays the Difference between the average X value of the scan
region marked by the right measurement cursor, and the average
X value of the scan region marked by the left measurement
cursor.
TIR Displays the difference between the highest and the lowest points
on the scan between the central points of the measurement
cursors. Stands for Total Indicator Runout.

S ETTING THE C URSOR P OSITIONS U SING F EATURE D ETECTION 8

Feature Detection 8

Feature Detection is used to enable automatic detection of some common classes of

profile features (see Figure 8.34 and Figure 8.35) to facilitate measurement
throughput and consistency. Feature Detection makes it possible to automatically and
Preliminary

reliably set the position of the measurement and leveling cursors relative to the rising
and falling edge of a step-like feature, or the apex or an arc-like feature.
In conjunction with feature detection, both the location of the edge (or the apex of an
arc) and the step width, can be calculated and displayed in the Analysis window.

CAUTION: It is important to ensure the accuracy of the Video

Calibration and the Scan Position Offset Calibration prior to enabling
Feature Detection.

1. To access the Feature Detection parameters, click on the Feature Detection

button in the Recipe Editor.

Figure 8.33 Feature Detection - Recipe Editor

Step 1 To display the Feature

Detection parameters in the
Recipe Editor Information
Display window, click on the
Feature Detection button.

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2. Feature: -This parameter allows the user to choose between six different features
that can be detected during a scan. (See also Quick Reference Table 8.4 on page
8-33.)

Figure 8.34 Feature Detection Point Locations on a Step

Example of a Step feature

UpEdge DownEdge

A trace of the Step feature

illustrated above.

Preliminary
UpBase DownBase

DownEdge UpEdge

A trace of the reverse Step

feature.

DownBase UpBase

Figure 8.35 Feature Detection Point Locations for Convex and Concave

Convex is the point at the apex

A trace of the Convex feature. of the convex trace.

A trace of the Concave feature. Concave is the point at the

apex of the concave trace.

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Table 8.3 Feature Detection Descriptions (See Figure 8.34 and Figure 8.35.)
Feature Description
None No feature detection is being used.
UpEdge At the trailing edge of a feature rise, it is the point at which
the trace begins the plateau. (See Figure 8.34.)
NOTE: The point location can be modified using the Distance
to Edge parameter in the General Parameters Window.

UpBase At the trailing edge of a plateau, it is the point at which the

trace begins to turn upward. (See Figure 8.34.)
DownEdge At the trailing edge of a plateau, it is the point at which the
trace begins to turn downward. (See Figure 8.34.)
DownBase At the trailing edge of a feature decline, it is the point at
which the trace begins the plateau. (See Figure 8.34.)
Preliminary

Convex This is the point at the apex of a convex feature. (See

Figure 8.35.)
Concave This is the point at the apex of a concave feature. (See
Figure 8.35.)

Selecting a feature for detection:

a. Click on the down-arrow next to the variable box to display its menu. (See
Figure 8.36.)
b. Click on the desired feature to select it. In necessary, use the scroll bar to
reveal other features. (See Figure 8.36.)

Figure 8.36 Feature - Feature Detection - Recipe Editor

Feature Detection allows the

user to choose from six feature
option (convex and concave not
shown). Click on the down-arrow
to display the menu. Click on the
desired feature to choose it.

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3. Feature Number: - If multiple edges are detected in the scan, Feature Number
provides a way to select a specific edge for detection. (See Figure 8.37 and also
Quick Reference Table 8.4 on page 8-33.)
Changing the Feature Number:
a. Double-click in its variable box to highlight the current number and type in
the new number. (Use only whole numbers. 1 is Default)

Figure 8.37 Detection Variables - Feature Detection - Recipe Editor

Detection parameters are

changed by clicking in the
appropriate variable box to
highlight the current number.

Preliminary
Then type in the new number.

4. Slope Threshold: - This factor sets the value at which any rise or fall in a trace is
considered to be a slope, not just part of the roughness or noise. This means that
the Slope Threshold defines a point at which the system recognizes a trace line
as following or preceding an edge, convex or concave point. (See also Quick
Reference Table 8.4 on page 8-33.)
Changing the Slope Threshold:
a. Double-click in its variable box to highlight the current number and type in
the new number:
Š Use values between 0 and 50.000 (these numbers are proportional
and have no units)
Š Default is 10.000 for a step and 1.000 for an apex point.
b. If the artifact is much larger in comparison to the surrounding roughness of
the surface:
Š Set the value higher.
c. If the artifact is only a little larger than the surrounding roughness:
Š Set this value lower.
Š Set the Minimum Plateau Width (description follows) to avoid any
ambiguity in identifying the correct edge.

NOTE: For very noisy scans where the system is having difficulty
detecting the feature, decrease the Slope Threshold. A value as low as
5.00 might work well.

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5. Plateau Threshold: - This factor affects the precise horizontal location calculated
for an edge or arc point. This parameter allows for the positional adjustment of
the point to the left or right. (See also Quick Reference Table 8.4 on page 8-33.)
Changing the Plateau Threshold:
Double-click in its variable box to highlight the current number and type in the
new number:
Š Use values between 0 and 50.000 (these numbers are proportional and
have no units)
Š Default is 10.000 for a step and 0.000 for an apex point.

NOTE: When comparing data from scans of identical features, find a

value that works and then use it consistently. Data is changed if
differing Plateau Threshold numbers are used.

HINTS for successfully setting the Plateau Threshold:

Preliminary

If setting the up edge or down edge:

Š Set this value to about the same value as the Slope Threshold
(from 0 to 50.000 – these numbers are proportional and have no
units).
Š If the threshold is slightly greater than the Slope Threshold, the
precise location of the edge moves slightly to the left for an UpEdge
or to the right for a DownEdge.
Š If the threshold slightly smaller than the Slope Threshold, the precise
location of the edge moves slightly to the right for an UpEdge or to
the left for a DownEdge.
If setting the UpBase and DownBase:
Š Adjustments are opposite for UpBase when compared with UpEdge
and for DownBase when compared with DownEdge.
If setting the Concave or Convex arc:
Š If the default setting is not being used, set this value to a very small
number (from 0 to 1.000 – these numbers are proportional and have
no units).

NOTE: The Slope Threshold determines whether or not an edge is

detected. The Plateau/Apex Threshold determines only the precise
reported location of a detected edge.

6. Min. Plateau Width: - Minimum Plateau Width defines the minimum horizontal
distance between rising and falling edges (or falling and rising edges). This is
used in feature detection to identify true features. (See also Quick Reference
Table 8.4 on page 8-33.)

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The Minimum Plateau Width can be used to reject such peaks that may
otherwise prevent the system from detecting the correct edge. For step-like
features, the Minimum Plateau Width specifies a plateau as follows:
Š For ascending features (such as UpEdge, UpBase), the plateau follows the
detected edge.
Š For descending features (such as DownEdge, DownBase), the plateau
precedes the detected edge.
Changing the Min. Plateau Width:

Double-click in its variable box to highlight the current number and type in the
new number:
Š Use values between 0.005 and 1000.00 µm (0.0002 to 39.3701 mil.)
Š Default is 10 µm.

NOTE: This is very dependent on which Feature is chosen for

Preliminary
detection and which Feature Number is used.

HINT to successfully set the Plateau Width:

If setting the UpEdge, DownEdge, UpBase, or DownBase features:
Š Set this value to be greater than the width of stray peaks, but
somewhat less than the width of the step to be detected (from
0.005–1000.00 mm to 0.0002–39.3701 mil.).

NOTE: Setting the Plateau Width to wide results in no edge being

found.

The Minimum Plateau Width is not intended for use with Concave or
Convex features. In cases of rough sample surfaces, though, it might be
useful.
Š For a Convex arc: The Minimum Plateau Width specifies a
minimum width for the feature, and so can be used to reject narrow
roughness peaks in the vicinity of the arc.
Š For a Concave arc: The Minimum Plateau Width is used to specify a
minimum size for a level section following a detected arc.

NOTE: The feature detection setup can be evaluated by reviewing

trace data in the analysis window. The parameter “ref” that is listed to
the left of the trace, indicates the position of the detected feature
relative to the start of the scan. If this parameter reads “0” then no
feature is being detected and the feature detection setup must be
altered.

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NOTE: It is important to set the thresholds appropriately for the type of

feature being scanning so that the Feature Detection calculation is
reliable. Also note that the profile scan length must include not only the
entire length of the artifact but enough on both sides to set cursors for
reliable data leveling.

7. Apply Gaussian Noise Filter Before Detection - This is only used to filter out
unwanted noise so the feature detection can more easily detect designated
features. (See Figure 8.38.) It does not apply the result to scan data. For use of
the Gaussian Filter with scan data, see Filters on page 3-50.

Figure 8.38 Scan Noise and the Gaussian Noise Filter

A Step scan with noise,

before applying the
Preliminary

Gaussian Noise Filter.

A Step scan with noise,

after applying the Gaussian
Noise Filter.

Activating this feature, click in the empty check box to put a 9 in it. (See
Figure 8.39.) Then set the Filter Cutoff (mm) size.

Figure 8.39 Activating the Gaussian Noise Filter

To activate the Gaussian Noise

Filter Before Detection feature,
click in its check box. A check (9)
indicates that it is chosen.

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8. Filter Cutoff (mm) - This option is only activated when there is a check in the
Apply Gaussian Noise Filter Before Detection check box. (See Figure 8.39.) The
number to be entered is in microns. This determines the noise level that is
filtered out.
For an in depth discussion on filters, see Filters on page 3-50.
Changing the Filter Cutoff
a. Ensure that a Feature has been chosen.
b. Click on the down arrow to display its menu.
c. Click on the desired value.

NOTE: A Feature must be chosen in order for the Gaussian Filter to

become active. If None is showing in the Feature variable box, The
Gaussian option is grayed out. To activate it, select a feature. (See
Figure 8.40.)

Preliminary
Š The Filter Cutoff range is from 0.25 through 800 µm. Only established
variables may be chosen.

Figure 8.40 Filter Cutoff Menu

Step 8a. In order for the Apply

Gaussian Noise Filter Before
Detection, a Feature must be
chosen. The filter is not available
unless there is a feature chosen.

Step 8b. After a Feature is chosen,

put a check (9) in the check box by
clicking in it.

Step 8c. Click on the down arrow to

display its menu. Click on the
desired cutoff filter setting.

9. Figure 8.41 through Figure 8.43 demonstrate the usefulness of Feature

Detection. Three scans were taken across the same section of the feature,
beginning and ending at different points along the profile. Each time, the cursors
are automatically set in the same place relative to the feature being detected, at
the second UpBase.

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Figure 8.41 Feature Detection - Run 1 with Automatic Cursor Placement

Note Cursor placement.

Preliminary

Figure 8.42 Feature Detection - Run 2 with Automatic Cursor Placement

Note Cursor placement.

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Figure 8.43 Feature Detection - Run 3 with Automatic Cursor Placement

Note Cursor placement.

Preliminary
Feature Detection Quick Reference Table 8

Table 8.4 Feature Detection Variables

Feature Description
Feature Identifies the type of feature to be detected, or turns Feature Detection off.
Feature Number Provides a way to select a particular edge for detection if there are multiple edges detected in
a scan.
Slope Threshold Sets the value at which an upward slope in the trace is considered to be preceding the edge
or apex; that is, when an upward slope appears that rises significantly above the general
roughness of the surface.
Slope Threshold is very similar to a signal-to-noise ratio. The best values for a given sample
will depend on the relative scales of the artifact being examined and the surrounding surface
roughness, as well as parameters such as scan speed, sampling rate, and so on. For step
heights, 10 is a good typical value.
Plateau Threshold Affects the precise horizontal location calculated for the edge or arc. Since the edge of a step
is rarely a perfectly defined location, this factor allows for the adjustment of the value to the
left or right, depending on whether the edge is to be the bottom of the step, the top of the step,
or somewhere in between. Generally, the best way to specify the Plateau Threshold is to set
the same value as the Slope Threshold.
Min. Plateau Width This value specifies the minimum horizontal length between a rising and falling edge, which is
(µm) used in the feature detection calculation to determine the correct edge.
This is useful in preventing erroneous feature detection of spikes due to noise, particles,
rough surfaces, etc.

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S ETTING THE C UTOFF F ILTERS 8

Setting Cutoff Filters can be accomplished using “live” data or previously saved data.
“Live” data has not yet been saved, and the Analysis window is still open, displaying
the scan data from the current scan (i.e., the Analysis window has not been closed on
the current scan data).
The scan data does not come directly from the sensor, but instead is filtered through
three stages:
Š an analog hardware filter
Š a digital decimation filter
Š digital software filtering

1. The sensor output is filtered by the analog hardware filter so that it can be
digitized with minimal distortion. The filter also reduces noise by attenuating
higher frequencies. It has a fixed cutoff frequency of 2 kHz.
2. The signal then passes through an analog-to-digital (A/D) converter. The A/D
Preliminary

converter has a nominal sampling frequency of 31.25 kHz.

3. Next, the signal passes into the digital decimation filter. This step reduces the
signal sampling rate from the original31.25 kHz down to the sampling rate
selected in the recipe by the user.
The cutoff wavelength depends on the scan speed as described by the following
equation:
Scan Speed
Cutoff Wavelength = --------------------------------------------------------------------------------------
Cutoff frequency of combined filters

For example, with a scan speed of 100 µm/s, and a sampling rate of 200 Hz or
100 Hz, the cutoff wavelength is 5.6 µm. With this same scan speed, however, at
a sampling rate of 50 Hz, the cutoff wavelength is 7.1 µm.
The action of a cutoff filter can be illustrated by plotting the percentage of signal
transmission as a function of wavelength (usually plotted as the logarithm of
wavelength). Note that there is always some slope in the transmission curve of a
cutoff filter; that is, the transmission percentage is not exactly zero for all values
on one side of the cutoff value and exactly 100 for all values on the other side of
the cutoff value. The cutoff wavelength of a filter is defined by that wavelength
at which 50% of the signal is passed.

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Figure 8.44 shows the transmission curve of the combined analog and
decimation filters. For every factor of 10 in scan speed, the curve moves to the
right by a factor of 10 in wavelength.

Figure 8.44 Effect of the Analog and Decimation Filters On Signal

Transmission

Reject Pass Region

Region

Setting the Short-Wave Filter Cutoff Values

Preliminary
8

See also the discussion on Short-Wavelength Cutoff Filters

Data can be filtered to provide the following specific results:
Š Reduce the effect of small surface irregularities or environmental noise;
Š Remove large-scale waviness and form error so that roughness can be evaluated
unambiguously;
Š Isolate specific frequency bands, allowing determination of intermediate
components of roughness or waviness.
Long-wave, short-wave, or both filters can be used. Combining the short and long
wave filters forms a band pass filter that cuts off all short wavelengths below the
short-wave cutoff value and all long wavelengths above the long-wave cutoff value.

NOTE: The software does not allow setting a short-wave cutoff that is
larger than the long-wave cutoff, which would result in a zero-width
band of wavelengths, attenuating all of the data (see Figure 8.45).

Figure 8.45 Defining a Band Pass With The Short-wave & Long-wave Cutoff Filters

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The short wavelength cutoff or noise filter attenuates data with wavelengths below
the specified cutoff valve. This has the effect of removing noise from the data. This
filter is always active, set either to a specified or a default value.

Select the short-wave cutoff (or long-wave pass) filter. 8

This cuts off the short-wavelengths in the data; those short-wavelengths below the
filter’s cutoff value. (See Figure 8.46).

Figure 8.46 Effect of the Short-wave Cutoff Filter

Preliminary

1. Go to the Recipe Editor, click Filters/Cursors to open its window. (See

Figure 8.47.)
2. At the Noise Filter (shortwave cutoff) variable field, click the drop-down arrow
to select a value from the range of cutoff filters provided. In this menu, the filter
can also be turned off by clicking the Off option in the menu. The chosen filter
appears in the variable field. (See Figure 8.47.)

Figure 8.47 Recipe Editor – Filters and Cursors Options

Step 1 Click on the

Filter/Cursors button to display
the Filter and Cursor options.

Step 2 To display the Noise

Filter menu, click on the
down-arrow next tot he
variable field. Click to
choose the filter or click on
Off at the top of the menu to
turn the filter Off.

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Up to 22 standard settings (including the default) are available depending on the

scan speed. Entering a short-wave cutoff that is longer than the currently
selected long-wave cutoff, or shorter than the value of the analog cutoff is
prevented by the system. For scan speeds greater than 5 µm/s, the shortest
short-wave cutoff selection turns off the short-wave cutoff filter.
If subsequent changes to the scan speed or scan length cause the short-wave
cutoff setting to become invalid, the cutoff is automatically changed to the
nearest available valid value (possibly the default).
The default cutoff depends on the scan speed and sampling rate.
3. From the Filter Option variable menu, select from the following filters:
Š Gaussian For Windows-based systems; and
Š RC For comparison to scan data obtained with DOS-based systems, such
as the KLA-Tencor P-2 Long Scan Profiler.

Setting the Long-Wavelength Filter Cutoff Values

Preliminary
8

Select the long-wave cutoff (or short-wave pass) filter. 8

This cuts off the higher wavelengths in the data (those above the filter’s cutoff value,
see Figure 8.48).

Figure 8.48 Effect of the Long-wave Cutoff Filter

1. Go to the recipe window, click Filters/Cursors to open its window. (See Figure
8.49.)

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Figure 8.49 Waviness Filter (Long Wavelength Cutoff Filter)

Step 1 Click on the

Step 2 To display the
Filter/Cursors button to
Waviness Filter menu, click
display the Filter and
on the down-arrow next to
Cursor options.
the variable field. Click to
choose the required filter or
click on Off at the top of the
menu to turn the filter Off.
Preliminary

2. In the Waviness Filter variable field, click the drop-down arrow to select a value
from the range of cutoff filters provided. From this menu, the filter can also be
turned off by clicking Off in the menu. (See Figure 8.49.)
Up to 17 standard filter choices are available depending on the scan speed. A
long-wave cutoff that is shorter than the currently selected short-wave cutoff or
the value of the analog cutoff, is prevented from being entered.
If subsequent changes to the scan speed or scan length cause the long-wave
cutoff setting to become invalid, the cutoff is automatically changed to the
nearest available valid value.
Figure 8.50 shows the effect of different cutoff filter settings on the same set of
scan data.

Figure 8.50 Signal Transmission Curves And Their Effects On Scan Data
Signal Transmission Curve Scan Data Effect Description
Normal Data
Only the analog filter acts on the data.
Three wavelengths, labeled λ1, λ2, and λ3,
are identified.

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Figure 8.50 Signal Transmission Curves And Their Effects On Scan Data
Signal Transmission Curve Scan Data Effect Description
Roughness 1
The long-wavelength cutoff filter is applied
with a cutoff value just higher than λ1.
The resulting data trace shows only
features of the scale of λ1; higher
wavelengths, including λ2 and λ3, are
suppressed.
Roughness 2
A different long-wavelength cutoff value is
applied, it value is just higher than λ2.
The resulting data trace shows features of
the scale of λ1to λ2; higher wavelengths,
including λ3, are suppressed.

Preliminary
Roughness 3
A short-wavelength cutoff filter with a value
just higher than λ1 is applied, in addition to
the long-wavelength cutoff, to the
Roughness 2 curve.
The resulting data trace shows only
features of the scale of λ2; higher
wavelengths, including λ3, and lower
wavelengths, including λ1, are suppressed.

Waviness 1
The short-wavelength cutoff filter is applied
with a cutoff value just lower than λ3.
The resulting data trace shows only
features of the scale of λ3; lower
wavelengths, including λ1 and λ2, are
suppressed.
Waviness 2
The short-wavelength cutoff filter is applied
with a cutoff value just lower than λ2.
The resulting data trace shows features of
the scale of λ2 and λ3; lower wavelengths,
including λ1, are suppressed.

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 Analyzing 2D Scan Data - 2D Glitch Removal KLA-Tencor P-15 User’s Guide

2D G LITCH R EMOVAL 8

Introduction 8

The 2D glitch removal is designed to remove erroneous data caused by environmental

noise or particulate contamination. The 2D glitch removal process is designed to
work in conjunction with the repurposed measurement cursors. The glitch removal
operates using a median point filter that can be set by user to either 1 x 3, 1 x 5, or
1 x 7 data points. (For more information on median filters, see Median Filter for 2D
and 3D Data on page 3-61.) The filter is reset with each new data set.
This procedure can be used with new unsaved data, saved data, and a 2D slice of a 3D
image.

Procedure 8

Figure 8.51 Analysis Screen with Operations Menu

Preliminary

1. Move the left cursor to the next position to the left of the glitch that models the
trace where the glitch occurs. Place the cursor’s left and right borders to include
the data set that is to be used to remove the glitch. (See Figure 8.52.)

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2. Move the right cursor to the next position to the right of the glitch that models
the trace where the glitch occurs. Place the cursor’s left and right borders to
include the data set that is to be used to remove the glitch. (See Figure 8.52.)

Figure 8.52 Analysis Screen with Operations Menu

Set the cursors on data

that is a model for the glitch
removal. In this case, the
bottom of the trace.

GLITCH

Preliminary
3. Right-click to display the Right-Click menu. (See Figure 8.53.)

Figure 8.53 Right-Click Menu - Remove Glitches Menu Options

4. Move the cursor over Remove Glitches Within Cursors to display its menu. (See
Figure 8.53.)

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 Analyzing 2D Scan Data - Measuring the Radius on Curved Surfaces KLA-Tencor P-15 User’s Guide

5. Click on the required filter.(See Figure 8.53.)

The glitch is removed using the chosen filter. (See Figure 8.54.))

Figure 8.54 Analysis Trace Window with Glitch Removed

Preliminary

M EASURING THE R ADIUS ON C URVED S URFACES 8

The average radius of a circular segment defined by the measurement cursors is

calculated from a data set using the least squares fit method. This method is capable
of high precision, covering a range from 0.5 µm (20 µin.) to 200 mm (7.9 in.),
provided that the sample fits on the stage.
The radius of the measurement stylus is added to the sample radius in the
measurement. The following sample might be:
Š Acceptable Where the radius of a 2-µm stylus added to a 20-mm radius sample
might be considered negligible (0.01%),
Š Unacceptable Where a 5-µm stylus added to a 1-mm radius is a 0.5% error,
which is generally unacceptable.
This can be avoided if the instrument is calibrated with a high precision
cylindrical standard whose radius is within a factor of 5 of the sample to be
measured. This is the Radius of Curvature calibration. For the highest accuracy,
KLA-Tencor recommends that this calibration is performed by a trained
technician.

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1. Go to the Scan Recipe Editor and click on General Parameters. Step 1 (See
Figure 8.55.)

Figure 8.55 3D General Parameters - Recipe Editor

Step 1 In the Recipe Editor,

click on the General
Parameters button to display
the 2D General Parameters
in the Information Display
Window.

Step 2 Click in the empty

check box next to Radius
so the radius information is

Preliminary
displayed in the Analysis
screen, in the Surface
Parameter Summary
window.

2. Click in the check box next to Radius to enable the radius measurement and
display the results in the Analysis screen. (See Figure 8.55.)
3. If measuring other types of samples with no required radius measurement,
disable the radius measurement by clicking on the check mark (9) in the check
box so that the check box is left empty.

Measuring for Maximum Precision 8

1. The height of the measured arc should be no more than 77% of the vertical range
of the measurement head.
Measurements can be made up to 90% of the vertical range of the measurement
head in arc height but precision of the scan cannot be certain. (See Figure 8.56).

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2. The size of the included angle should be no more than 90°.

Measurements can be made up to 110° in included angle with a small loss of
precision. (See Figure 8.56).
These limits depend on the type of measurement head being used.

Figure 8.56 Arc Segment Dimensions

R
Preliminary

Included angle up to 90°

3. To measure another portion of the radius, physically rotate the sample about the
radial axis.
Precise measurement is also restricted to arc segments that are symmetric to the
radial axis of the measured artifact.
4. To measure using a given radius R, optimum arc height H (Figure 8.56), and the
optimum scan length L, use the following formula:

L = 2 2RH – H 2

Scan length and scan speed are dependent on the radius of the sample, the arc
height allowed by the measurement head, and its vertical range.

NOTE: Scans taken at the lowest possible horizontal resolution for the
optimal scan length generally yield the most repeatable and precise
radius measurements.

Measuring for the Lowest Horizontal Resolution 8

Various combinations of scan speed and sampling rate can be experimented with.
1. Set the sampling rate to 200 Hz.
2. Set the scan speed to get a scan time that is as close as possible to 25 seconds
without exceeding it.
3. If the longest scan time possible under these restrictions is 12 seconds or less:
a. Set the sampling rate to 100 Hz.
b. Set the scan speed so that the scan time is as close as possible to 50
seconds without exceeding it.

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4. If the arc height H is less than 40% to 45% of the range available for the
measurement head, the recommended profile type is the center bias profile type
.
5. Set the stylus force high enough for the stylus to reach the lowest points of the
scan.
The stylus force needed depends on the arc height H and on the profile type
(peak, valley, or center bias).
a. If, during radius measurement, the trace flattens out and no data out of
range message appears, try a higher stylus force setting.

Measuring with a 1-σ Repeatability (precision) of 0.002% of

the Radius 8

1. Do not set both leveling cursors to zero.

2. Preset the position of the measurement cursors.

Preliminary
Ensure that the following parameters are properly set. (See Table 8.5).

Table 8.5 Scan Recipe Parameters

Recipe Field Setting
Scan Length See changing X Scan Size.
Scan Speed See changing Scan Speed
Sample Rate 200 Hz is optimum. See Sampling Rate.
Surface Parameters Use the General Parameters window in the Recipe
Editor to enable Radius and Distance to Edge.
Stylus Force See Applied Force.
Profile Type See Profile Type.
Vertical Range See Range/Resolution.

3. To measure a convex radii:

a. Go to the Scan Recipe Editor.
b. Click on the General Parameters button

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c. Ensure that there is a check (9) in both the Distance to Edge and Radius
check boxes. (See Figure 8.57.)

Figure 8.57 General Parameters - Recipe Editor

Step 3b. In the Recipe

Editor, click on the General
Parameters button to display
the 2D General Parameters
in the Information Display
Window.
Step 3c. Click in the empty
check box next to Radius and
Distance to Edge so that
information will be displayed in
the Analysis screen, in the
Surface Parameter Summary
Preliminary

window.

d. From the Recipe Editor click on the Feature Detection button to display the
Feature Detection options in the Information Display Window. The display
is shown in Figure 8.58.

Figure 8.58 Feature Detection - Recipe Editor

Step 3e. Click on the

down-arrow next to the
Step 3f. Scroll down to the Feature variable box.
bottom of the menu. Click on
Convex from the drop-down
menu.

e. Click on the down-arrow next to the Feature variable box. The menu is
displayed.

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f. Scroll down to the bottom of the menu. Click on Convex.

The cursors automatically adjust.
4. To measure with 0.002% repeatability, adjust the measurement cursors in the
Analysis window until the height values for the cursors are equal within 0.5 µm
(20 µin.) for radii larger than 2.5 mm (0.1 in.).

M EASURING S TEP H EIGHT ON C URVED S URFACES U SING F IT AND L EVEL 8

Step height can be measured on curved surfaces such as lenses or glass optical fibers,
or in a bow in a profile that has been leveled in the normal manner. This capability is
enabled or disabled in the Scan recipe.

NOTE: The Profiler application can remove a simple convex or

concave curve from the data, but not more complex curves like waves.

Preliminary
1. From the Recipe Editor click on the Filters/Cursors button. This displays the
Filters and Cursors options in the Information Display Window.

Figure 8.59 Cursor Options - Filters/Cursors - Recipe Editor

Step 2 Click on the empty

check box next to Fit and
Level to enable it.

2. In the Cursors portion of the display, check the Fit and Level check box. (See
Figure 8.59.)
3. Save the changes.

S AVING S CAN D ATA 8

Scan data can be saved for reviewing at a later time. This is especially important
because the data that is saved can be reanalyzed at a later date using different scan
parameters.
1. Click on File in the Menu Bar to display the File menu.

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2. Select Save Data.

The Save Scan Data dialog box appears. (See Figure 8.60).

Figure 8.60 Save Scan Data Dialog Box

Step 4 From the drop-down

menu, click on the desired drive
and directory. Step 3 Click on
the menu arrow
to reveal the
Step 5 Double-click on the folder
available drives
in which the data is to be saved.
and directories.

Step 6 Enter the name being

Step 7 Click
given to the new data set.
Save to save the
Preliminary

data to the file.

3. Click on the menu arrow next to Save In to reveal the available drives and
directories. (See Figure 8.60)
4. Select the drive and directory from the drop-down menu. (See Figure 8.60)
5. Double-click on the folder that the data is to be stored in. A list of all current
data files appear. (See Figure 8.60)
6. Enter a name for the data set in the File name variable box. (See Figure 8.60)
7. Click Save to save the data in the new file. (See Figure 8.60)
Once a data set has been saved, it is added to the Scan Data catalog. The Scan
Data catalog window allows selection of individual data sets for reviewing.
Unwanted data sets can be deleted.

R EEVALUATION OF S AVED 2D S CAN D ATA 8

The version 6.2 software provides a the user with an opportunity to review scan data
that was saved and to change parameters in the scan recipe for recalculation of the
data. This is possible because the system saves the raw scan data from the scans.
The recipe determines which parameters are calculated in the Analysis screen’s
Statistics window after the scan. Once the data is saved, it can be revisited in the
Catalog screen. The general procedure is as follows.
1. Access the Catalog screen.
2. Choose either the Scan Data or Sequence Data windows.
3. From the Scan Data window, navigate to the data set that is to be recalculated.
4. From the Sequence Data window, choose a sequence.
5. Double-click the scan data set. This opens the Analysis screen for the data set.
6. In the analysis screen, click on Edit to display its menu.
7. Choose Recipe. This opens the Recipe that was used to create the original scan.

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8. Change the parameters that require addition or removal. This is accomplished by

opening each parameter window and choosing the new parameter to be included
in the analysis statistics or removing parameters no longer required.
The following parameters can be edited:
Feature Detection
Filters and Cursors
General Parameters
Roughness and Waviness
Bearing Ratio/Cutting Depth
Automatic Histogram Leveling
The Scan Parameter Definition cannot be edited.
9. After all changes have been made, click on the Analysis icon in the tool bar to
return to the Analysis screen.

Figure 8.61 Scan Recipe Tool Bar for Analysis Editing

Preliminary
Step 9 Click on the Analysis
icon in the tool bar to return
to the Analysis screen.

10. The Analysis screen returns with the statistics in place in the 2D Surface
Parameter Summary window. There is no need to recalculate this information
because the system automatically does that when it regenerates the Analysis
screen.
If there are any manipulations to the image that are being done, click in the 2D
Data portion (the window with the 2D image) of the Analysis screen to make it
active.
11. Adjustments that effect the parameters are cursor placement or leveling. Change
these if required.

12. In the Analysis screen click the CALC button to perform a recalculation
of the statistics for the new cursor or leveling.
13. To save the data, click on File to display its menu.
14. Choose Save Data… to open its dialog box.
15. Navigate to the correct folder in which the data is to be stored.
16. Name the file.
17. Click on Save to save the data in the folder.

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Preliminary

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 9
ANALYZING 3D SCAN DATA Chapter 9

I NTRODUCTION 9

The 3D scan data analysis displays the 3D scan image and trace information after a
scan is completed. A 3D scan is an image built by taking a series of 2D scans,
arranged in a raster pattern, to form a picture of the sample surface at the scan
location. With 3D analysis, complete surface analysis can be performed.
This chapter describes:
Š Starting the 3D Analysis Application on page 9-2
Š 3D Analysis Screen Features on page 9-3

P rel i mi n a ry
Š Line-by-Line Leveling on page 9-33
Š Customizing the Scan Image on page 9-40
Š Changing the View Angle on page 9-41
Š Customizing the View on page 9-42
Š Using Image Arithmetic to Compare Data on page 9-43
Š Saving Scan Data on page 9-45
Š on page 9-50

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STARTING THE 3D A NALYSIS A PPLICATION 9

1. Click the Scan Data or Sequence Data command button to display the data
information in the Catalog window. (See Figure 9.1.)

Figure 9.1 Scan Catalog Screen with Scan Data Active.

Step 1 Click on the Scan

Data button to display the
Scan Data list in the
information window.
Step 2 Click on the 3D
button to display the 3D list
in the information window.
Preliminary

Step 3 Click to choose

the required data folder.

2. Click the 3D button. (See Figure 9.1.)

Figure 9.2 Scan Catalog Screen with Scan Data Active.

Step 4 To open a data

set, highlight one required
data set.

Step 5 To open the

chosen data set, click on
Review.

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3. In the Scan Data Path column, click the folder name. (See Figure 9.1.)
4. In the Scan Data list, click on a data set to be analyzed. (See Figure 9.2.)
5. With the data set highlighted, click the Review button. The Analysis window
appears. (See Figure 9.3.)

Figure 9.3 3D Analysis Screen with 3D Object Displayed

Menu Bar Additional

Command
Buttons
Toolbar
Buttons

Trace
Information

Preliminary
Image
Display

3D A NALYSIS S CREEN F EATURES 9

Analysis Screen – Image Orientation 9

The image in the Analysis Image Display area can be rotated to orient it for analysis
and viewing. Four options exist for rotation of the object. All four are presented, with
the Recommended procedure coming first.
Recommended Image Option 1 – Automatic Image Rotation. Use the Image Rotation buttons in the tool
Rotation Procedure bar. (See Figure 9.4) These are Automatic Image Rotation buttons, described in
Table 9.1.

Figure 9.4 Analysis Tool Bar Image Rotation Buttons

Automatic Image Rotation Buttons Manual Image Rotation Buttons

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Table 9.1 Automatic Image Rotation Buttons

Button Description of Action
Rotates the image to the left on its horizontal plane. Each click moves
the image a small distance. (Identical to the left arrow key.)

Rotates the image to the right on its horizontal plane. Each click moves
the image a small distance. (Identical to the right arrow key.)

Rotates the image in a backward roll. Each click moves the image a
small distance. (Identical to the up arrow key.)

Rotates the image in a forward roll. Each click moves the image a
small distance. (Identical to the down arrow key.)

Option 2 – Manual Handle Drag. There are also Manual Image Rotation buttons,
Preliminary

described in Table 9.2.

Table 9.2 Manual Image Rotation Buttons

Button Description of Action
Rotates the image on its horizontal plane using four handles that are
manipulated by click-and-drag method. (See Figure 9.5.)

Rotates the image on its horizontal plane using a single handle that is
manipulated by the click-and-drag method. (See Figure 9.5.)

1. Click on the button representing the plane in which the required rotation is to
take place. The image appears to have handles attached to it. (See
Figure 9.5)

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2. Click on one of the handles (see Figure 9.5) and, while holding down the mouse
button, drag the image to rotate it to a different orientation in the chosen plane.
Release the mouse button to set the image in its new orientation.

Figure 9.5 Manual Image Rotation Handles

Click on the button

representing the required
plane of rotation.

With the particular angular

rotation button clicked, click
on one of the four handles
and hold the mouse button
down while dragging the
image in the chosen

Preliminary
rotation plane. Release the
button to terminate the
rotation.

Option 3 – Arrow Keys. Use the arrow keys on the keyboard. The movement
provided by each key is described in Table 9.3.

Table 9.3 Image Rotation Using the Arrow Keys

Button Description of Action
Rotates the image to the left on its horizontal plane. Each click moves
the image a small distance. (Identical to the left rotation button.)

Rotates the image to the right on its horizontal plane. Each click moves
the image a small distance. (Identical to the right rotation button.)

Rotates the image in a backward roll. Each click moves the image a
small distance. (Identical to the up rotation button.)

Rotates the image in a forward roll. Each click moves the image a
small distance. (Identical to the down rotation button.)

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Option 4 – Rotate Image Menu. Use the Rotate Image menu rotation options. The
rotation provided by each menu item is identical to that provided by the representative
arrow key (cited next to each option) as described in Table 9.3, and the related Image
Rotation button described in Table 9.1.

Figure 9.6 Image Rotation Using the Rotate Image Menu

STEP 1 Click on View to

display the View menu. STEP 3 Click on the desired
rotation. The rotation takes
place immediately, moving
STEP 2 Click on Rotate same distance that each
Image to reveal the Rotate Manual Image Rotation
Image menu. button moves the image.
Preliminary

Table 9.4 Rotate Image Menu Options (From View Menu)

Menu Item Description of Action
Rotates the image to the left on its horizontal plane.
This action only move the image one increment each
time. The menu must be opened again for each move.
Rotates the image to the right on its horizontal plane.
This action only move the image one increment each
time. The menu must be opened again for each move.
Rotates the image in a backward roll. This action only
move the image one increment each time. The menu
must be opened again for each move.
Rotates the image in a forward roll. This action only
move the image one increment each time. The menu
must be opened again for each move.

Use the Mouse Tool in the Right-Click menu.

1. Right-click to display the Right-Click menu. (See Figure 9.7.)
2. Click on Mouse Tools to display its menu. (See Figure 9.7.)
3. Choose Rotate Image from the Mouse Tools menu. (See Figure 9.7.)
4. Choose the required rotation from the menu. This menu is the same as the
Rotate Image menu from in the View drop-down menu in the Menu Bar. (See
Figure 9.6 and Table 9.4.)
Each click moves one increment only. The entire menu process must be
completed for each single movement.

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Figure 9.7 Right-Click Menu – Mouse Tools

Step 1 Right-click the

mouse button to open the
Step 3 Click on Rotate
Right-Click menu.
Image to display its menu.

Step 2 Click on Mouse

Tools to display its menu.

Graphics Buttons and Their Function) 9

Figure 9.8 Analysis Tool Bar Graphics Buttons

Preliminary
Automatic and Manual Image Rotation Buttons 9

The Automatic and Manual Image Rotation buttons are displayed in Figure 9.4. They
are discussed beginning in Analysis Screen – Image Orientation on page 9-3 and
explained in Table 9.1 through Table 9.4.
In general, the automatic rotation buttons move the image in the depicted direction by
one increment of movement each time they are clicked on. The manual rotation
buttons place handles on the image to allow it to be moved in the indicated direction.

Zoom Features 9

The Zoom features are designed to facilitate zooming in on a portion of the 3D

graphic for closer inspection. The zoom can be accomplished through the use of
several zoom tools.
Š The View menu contains zoom features.
Š The tool bar contains zoom features shaped like magnifying glasses.
Š The Right-Click menu contains zoom tools.
The following explanation demonstrates the use of the zoom tools in the most
efficient manner. Other combinations of zoom tool usage exist, but this combination
should be the simplest.

1. In the Analysis screen, click on the Tool Activation icon at the top of
the tool bar on the right side of the screen. This activates (enables) the side tool
bar tools. (See Figure 9.9.) When the side tool bar is activated, the graphic
image is changed to top view.

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Figure 9.9 Analysis Screen - Tool Activation

Step 1Click on the

Tool Activation
button to activate
the tool. Active tools
are red and black.
Preliminary

Tools after activation.

2. Place the cursor over the graphic display and right-click to display the tool
menu. (See Figure 9.10.)

Figure 9.10 Analysis Screen - Enable Zoom Tool

Notice that the 3D image is

changed to the top view when
the tools are enabled.

With the tools enabled, and

the tool menu open
Step 3 Move the cursor to
Zoom Tool which displays
its menu.
Step 4 Move the cursor
over Enable Zoom Tool
and click. A check appears
next to Enable Zoom Tool.

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3. In the tool menu, move the cursor over Zoom Tool to display its menu. (See
Figure 9.10.)
4. Click on Enable Zoom Tool to activate the zoom process. (See Figure 9.10.)

Figure 9.11 Analysis Screen - Zoom Active

Step 5 When zoom is active,

the Zoom In magnifying glass
icon is enabled. It zooms in on
whatever is outlined by the
Zoom box.

Preliminary
When zoom is active, a Zoom
box is displayed at the bottom
left corner of the 3D graphic
display.

5. When the zoom process is activated, the Zoom In magnification glass is

activated and the Zoom box is deployed at the bottom left of the 3D graphic
display. (See Figure 9.11.)

Figure 9.12 Analysis Screen with Zoom Box

Zoom box relocated to the intended

Zoom area.

Step 6 Click hold and drag the

upper right corner to the top right
corner of the intended zoom area.

Step 6 Click hold and drag the

lower left corner of the Zoom box
to the lower left corner of the
intended zoom area.

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6. A good way to position the Zoom box is, click and hold on the top right handle
(boxed corner) of the Zoom box and position it where the top right corner of the
intended zoom area. Repeat the process with the bottom left corner, placing it at
the bottom left corner of the intended zoom area. (See the intended zoom area in
Figure 9.12.)

Figure 9.13 Analysis Screen – Using the Zoom In Icon

Step 7 Click on the Zoom In icon to

zoom into the boxed area.

Zoom box relocated to the intended

Zoom area.
Preliminary

ALTERNATIVE to the
Zoom icon - Move
cursor to Zoom Tools
to display its menu,
then click on Zoom.

7. When the Zoom box is positioned as the boundary of the intended zoom area,
click on the Zoom In icon in the tool bar. (See Figure 9.13.)
The 3D graphic image changes, displaying only the bounded area within the
Zoom box. (See Figure 9.14.)

ALTERNATIVE procedure for activating the zoom to display the area within
the Zoom box:
a. Right-click to display the Right-Click menu. (See Figure 9.13.)
b. Click on Zoom Tools. (See Figure 9.13.)
c. Choose Zoom. (See Figure 9.13.)
Working with a Zoomed While in the view containing the zoomed image, all the procedures contained in
Image the right side tool bar can be executed on the image. The Level, Slice, Height,
Step Height, and Glitch Removal, all function the same way with a zoomed
image that they do with a standard top view image.
While in the view containing the zoomed image, it is not possible to zoom in
further. To zoom in closer, return to the original image and repeat the zoom
procedure using a smaller area within the Zoom Box for the zoom image.
When the Zoom In procedure is complete, the Zoom Out icon is activated to
allow the User to return to the pre-zoom image. (See Figure 9.14.)

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Figure 9.14 Analysis Screen – Zoomed In Area

Step 8 When the Zoom In

procedure is complete, the
Zoom Out icon is activated to
allow the user to return to the
pre-zoom image. The Zoom
In icon is deactivated.

Preliminary
8. To return to the pre-zoom image, click on the Zoom Out icon. The image
returns to the prior display. (See Figure 9.14.)
ALTERNATIVE: (See Figure 9.15.)
a. Right-click on the graphic display area to display its menu.
b. Move the cursor to Zoom Tools, to display its menu.
c. Choose Unzoom and click. The image returns to the prior display.

Figure 9.15 Analysis Screen – Unzoom Using Right-Click Menu

Step 8b. Move the cursor to Zoom Tools to

display its menu.

Step 8c. Click on UnZoom.

Step 8a. Right-click to display

the Right-Click menu.

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Analysis Screen Toolbar Button Functions 9

Table 9.5 Analysis Toolbar Buttons

Button Description of Action
Zoom In on the area bounded using a zoom box to form the boundary. This is for use with the Zoom
Box. This icon is used as a trigger to execute zoom of the data according to the parameters set using
the Zoom Box.
Procedure: (See procedure as described beginning with STEP 1. on page 9-7.) The following is an
abbreviated version of the procedure.

1. Click on the Hammer in the Analysis Tool box to enable the Analysis Tools.
2. Right-click to display its menu.
3. Move the cursor to the Zoom Tools.
4. Click on Zoom in the Zoom Tools menu.
5. Adjust the size and position of the zoom box so it forms the boundary of the area to be zoomed.
Preliminary

6. Click on the Zoom In icon to zoom to the area bounded by the zoom box (or click on
Zoom in the Tools menu - as illustrated below).

1. Click on Tools to
display its menu.

2. Click on Zoom
Tools 3. Click on Enable 4. Click on Zoom
Zoom Tool to enable
the Zoom In icon.

Zoom Out tool. This returns the image to its pre zoom magnification. This tool works with the Zoom In
tool described above. It is for use after zooming in on a bounded area. (See STEP 8. on page 9-11.)

LEVEL icon. This is for use with the three point leveling tool. It is used as a trigger to execute
leveling of the data according to the three vertex positions set using the Leveling Tool.
Procedure:

1. Click on the Hammer in the Analysis Tool box (on the right side of the image), The
Analysis Tools are enabled.

2. Click on the Leveling Tool . The LEVEL icon is enabled.

3. Use the click-and-drag procedure (click on the center of each vertex) to position them. (For more
information on the procedure, see Activate Leveling Tool on page 9-15.)

4. Click on the LEVEL icon to complete the leveling procedure.

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Table 9.5 Analysis Toolbar Buttons (Continued)

Button Description of Action
Statistics information box. This displays the statistics information box on the screen, usually beneath
the analysis image. The positioning can be manipulated.

Print. This causes the system to print the analysis information.

Positive Magnification. This causes the entire image to be magnified by one increment each time it is
clicked on. The image continues to grow in size, having its outside edges cropped as its size increases
past the image area of the screen.

Negative Magnification. This causes the entire image to be reduced in magnification by one
increment each time it is clicked on.

Preliminary
The following three buttons activate the Ray Trace Mode and allow the user to illuminate the surface with a light source from
different angles. The Spotlight effect has been used in the following graphics to illustrate the lights distance and direction. The
spotlight was activated for the illustration and, if on, can be turned off for complete lighting of the surface, while maintaining
directional integrity of the lighting process.

NOTE: For the three following buttons it is important to remember that the light can be moved over
and over, through a series of different locations and angles. Each time a different light button is
chosen, the light moves differently depending on its beginning position and angle. The following
descriptions are designed to give general guidelines for moving the lights. Light angles, beginning,
and ending positions vary depending on the position and angle that the light is in when the next button
is clicked.

Change light rotation... This shines a light on the image from the beginning location and angle of the
light. User can rotate the light source in a horizontal plane, parallel to the image surface.

The light projection swings from left to right in the illustration above.

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Table 9.5 Analysis Toolbar Buttons (Continued)

Button Description of Action
Change light rise... From the starting location and angle, the light moves in an arc over the image
surface (like a sunrise/sunset).

The light swings from centered above toward a lower left side angle.
Change light distance... From the starting position and angle of the light, the light moves closer or
further from the image at the current angle.
Preliminary

The light moves from high left to a lower position near image center.
Move highlight planes... This moves each highlighted plane for visibility. Up to 10 planes can be
identified for viewing.

Analysis Screen Side Toolbar Buttons 9

These buttons, located at the right of the image, are active in the Top View only
(looking directly down on the image surface). (See Table 9.6).

Analysis Screen Side Toolbar Button Functions 9

Table 9.6 Analysis Side Toolbar Buttons

Button Description of Action
Enable Analysis Tools (Top View). This button enables the remaining tools in this tool bar. It moves
the image to the Top View because all the tools require this view.

Disable analysis Tools. This button disables active tools. This includes the tools in this tool bar as well
as those in the top tool bar.

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Table 9.6 Analysis Side Toolbar Buttons (Continued)

Button Description of Action
Activate Leveling Tool. This button activates the leveling tool that places three interactive boxes on
the image surface for leveling the image. Each box represents a corner of the leveling triangle.
Procedure:
1. Click-and-drag the center of the boxes (labeled vertexes in the data column at the left) to
locations on the image surface that are to be used as leveling points. The information in the
square is averaged to form a height for leveling that point in the triangle.
2. If desired, use the handles at the corners of the squares to resize the squares so the surface
bounded by each vertex creates the average desired height for that point.
NOTE: It is very important that the area covered by each box is on the same
plane. In addition, the contents of all three boxes must also be on the same
plane, or the image is not properly leveled and the image itself could become
distorted. Boxes 1 and 2 in the illustration below are too large to properly level
the image.

Preliminary
3. Click the LEVEL button on the top tool bar to level the image.

Each leveling box must be

placed in an area containing
data that is on one plane. All
three boxes must be on the
same plane for the leveling to
be accurate.

Boxes 1 and 2 contain

data on more than one
plane and will produce
inaccurate leveling.

Each box has its location

statistics displayed in the data
column, to the left of the
image.

Activate Height Tool. This button activates the tool that places a box on the image surface. The box
borders an area containing data that is averaged to give a single average height of the contents of the
box. Using the center of the box, it can be moved using the click-and-drag procedure. The handles at
the corners of the box can be used to change the area of the box. The data is automatically calculated
as the box is moved, or as its area is changed by moving its borders.

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Table 9.6 Analysis Side Toolbar Buttons (Continued)

Button Description of Action
Activate Slicing Tool. This button activates the tool that allows the user to slice the image down from
the top surface to the foundation of the image and display a 2D image of the cross section at the slice.
This tool provides three options (see also Table 9.14) for the slice: horizontal, vertical, and diagonal.
(Diagonal can be adjusted to any angle.) All three options can be adjusted to any length. (See Table
9.9, in the Current Slice section.)
Procedure:
a. When this tool is clicked, a slice line is displayed on the 3D image in the chosen
orientation.
b. Click and hold while dragging the slice line to the desired location on the image.
c. Adjust the length of the slice by using the click-and-drag procedure with one of the handles
at the end of the slice line.
d. Right-click to display the Right-click menu. (See below.)
Preliminary

In the View menu, click on

View Current Slice to
display the 2D image at
the slice indicated in the
3D image.

e. Click on View Current Slice (shown above) to view the current slice trace. To display both
the 2D image along with the 3D image (as illustrated below), click on Window, then choose
Cascade. (See Creating and Saving 2D Slice Data from a 3D Scan on page 9-46 for
information on creating a slice and saving current slice data.)

Activate Step Height Tool. This button activates the tool that places two boxes on the image surface.
Using using the click-and-drag procedure with the center of each box, it can be moved to a new
location on the image surface. It can then be resized using the corner handles. The software
determines the difference between the average height in one box and the average height in the other
box. This difference is automatically calculated as the boxes are moved or resized.

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Table 9.6 Analysis Side Toolbar Buttons (Continued)

Button Description of Action
Activate 3D Glitch Removal Tool.
This button activates the 3D glitch removal option. The tool is used in the following manner:
1. Activate the glitch removal button by clicking on it. A box is displayed at the bottom right of the
top view of the 3D image.
2. Drag the box over an area that presents the identical but correct formation of the area that
contains the glitch. Resize the box to capture only those attributes and only the size that is to be
corrected in removing the glitch. (See left side illustration below. Note that it is important to
gather enough data points for the system to make the analysis and remove the glitch.)
3. Right-click to display the right-click menu.

Place and resize glitch In right-click

removal box in a position menu choose

Preliminary
modeling desired data. filter option.

4. Move cursor to Remove Glitches Within Cursors and choose the median filter to be used; 3 x 3,
5 x 5, or 7 x 7. (See right side illustration above.) (For more information on median filters, see
also Median Filter for 2D and 3D Data on page 3-61.)
5. Move the box over the glitch area, placing it in the same relative position that the initial box was
placed. (See left side illustration below.)

Move the glitch In right-click menu, choose

removal box over Remove Glitches.
the glitch area.

6. Right-click to display the right-click menu. (See right side illustration above.)
7. Move the cursor to Remove Glitches and click.(See right side illustration above.) The glitch is
removed using the chosen filter and the data gathered in the first box.

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Analysis Menu Bar 9

Most of the functions available in the two Analysis Tool Bars and the Right-click
menu, are also available using the Menu Bar at the top of the screen. In addition, there
are numerous other menu items that facilitate functions necessary for the processing
of 3D scan data.

Figure 9.16 Analysis Screen Menu Bar

File Menu 9

Table 9.7 File Menu Operations

Menu Item Description of Action
Saves the current data to a file. This option displays the Save Dialog box with its
Preliminary

associated options.

Exports the current data. This option displays the Export dialog box with its associated
options.

Prints the current data. This option displays the Print dialog box with its associated
options.

This option displays a thumbnail presentation of the material that is to be printed so it

can be reviewed.

This option displays the Print Setup dialog box with its printer/print setup options.

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Table 9.7 File Menu Operations (Continued)

Menu Item Description of Action
This option allows the user to choose a specifically designed work space from a
drop-down menu in the Select Work Space dialog box.

This option presents a dialog box that allows the user to establish a named work
space.

Preliminary
This option Exits from the Analysis screen.

Edit Menu 9

Table 9.8 Edit Menu Option

Menu Item Description of Action
This option places the image and data information on the clipboard.

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View Menu 9

Table 9.9 View Menu Options

Menu Item Description of Action
This option displays another menu presenting options effecting the image perspective,
view position, lighting and color.

This option displays another menu offering options to view the image from different
perspectives. See Table 9.11 for more detail on each view.
Preliminary

Top View Oblique View

Front View Back View

Left View Right View

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Table 9.9 View Menu Options (Continued)

Menu Item Description of Action
This option displays another menu presenting options, each of which rotate the image
by one increment each time they are chosen. (See Table 9.4 for a complete
explanation of the movement of each option.)

NOTE: This is the most inefficient way of image rotation since each
time an option is used, the menu disappears and must be accessed
again for another single movement rotation. The rotation buttons in the
tool bar or the arrow keys on the keyboard are much more efficient.

Preliminary
This option causes the magnification of the entire image by one increment of
magnification each time it is clicked on.

This option causes the reduction in size of the entire image by one increment of
magnification each time it is clicked on.

This option opens the Analysis screen where it presents a graphical representation of
the histogram of the data in the chosen data file.

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Table 9.9 View Menu Options (Continued)

Menu Item Description of Action
This option displays the Highlight dialog box with its highlight options for chosen
planes in the analysis image.
Preliminary

This options presents the trace of the Current Slice as an Analysis Screen graph.

2D image of the
slice.

3D image with a
horizontal slice
displayed.

This option displays the Surface Summary box in the Analysis Screen.

Ignore this button

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Table 9.9 View Menu Options (Continued)

Menu Item Description of Action
Ignore this button

Change Menu From the View Menu 9

Table 9.10 Change Menu Option From the View Menu

Menu Item Description of Action
This option displays the Set Viewing Parameters dialog box with its options and
settings.

Preliminary
This option displays the Light Properties dialog box with its options and settings.

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Table 9.10 Change Menu Option From the View Menu (Continued)
Menu Item Description of Action
This option displays the Light Properties dialog box with its options and settings. The
color is applied to the primary image on the Analysis screen.
Preliminary

Select View Menu From the View Menu 9

Table 9.11 Change Menu Option From the View Menu

Menu Item Description of Action
Restore Original View returns the image view to the first view that it is presented in
when the Analysis screen opens.

Top turns the image surface flat, giving the user a top down view of the image. This is
the same view that is presented when the side tool bar is activated.

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Table 9.11 Change Menu Option From the View Menu (Continued)
Menu Item Description of Action
Oblique turns the image so that it is rotated to the left and down from the Original View,
giving more view of the top surface.

Front is rotated a short distance in the counter-clockwise direction from the Original

Preliminary
View.

Back rotates the image so that the surface is in the same basic orientation as the
Original View, only with the front to the rear and rear of image to the front.

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Table 9.11 Change Menu Option From the View Menu (Continued)
Menu Item Description of Action
Left Side rotates the image so that the surface is in the same basic orientation as the
Original View, only with the front to the right, the rear of image to the left and the left
side to the front of the display.

Right Side rotates the image so that the surface is in the same basic orientation as the
Preliminary

Original View, only with the front to the left, the rear of image to the right and the right
side to the front of the display.

Parameters Menu 9

The Parameters Menu is designed to display the checked parameters in the analysis
data. This information is included and saved in the Surface Summary record. To
include the menu parameter in the Surface Summary, click next to it so that a check
appears. (See Figure 9.17.)

Figure 9.17 Parameters Menu from the Analysis Screen Menu Bar

The General, Roughness, Waviness and Hybrid parameters are sets of parameters
found in the Recipe Editor for the recipe being used to create the 3D scan that is being
analyzed. For details on each parameter set, see Chapter 3. To cause these parameters
to be displayed in the Surface Summary information, use the following procedure:

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1. From the 3D Recipe Path, choose a folder containing the 3D recipe, or from the
Scan Sequence Recipe list choose a sequence. (See Figure 9.18.)
2. Double-click on the recipe to open the Recipe Editor for that recipe, or click on
View/Modify at the bottom of the screen.

Figure 9.18 Catalog Screen – Scan Recipes

Step 1 Choose the required

Preliminary
3D folder from which the recipe
list can be viewed.

Step 2 Double-click on the

recipe or click on it and then on
View/Modify.

General Parameters 3. Click on the General Parameters button (see Figure 9.17.) to display the General
Parameters information in the Information Display Window.

Figure 9.19 3D Recipe Editor

Step 3 Click on General

Parameters to display the
parameter set in the
Information Display Window.

Only the 3D
parameters are
used and available
for display in the
Analysis Screen.

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4. Ensure that the required parameters for the scan are chosen. (Figure 9.19.)
Roughness/Waviness 5. Click on Roughness/Waviness button to display the Roughness/Waviness
Parameters options in the information display window. (See Figure 9.20.)

Figure 9.20 3D Recipe Editor with Roughness/Waviness Options

Step 5 Click on the

Roughness/Waviness
button to display the
Roughness/Waviness
options in the information
display window.
Preliminary

The only parameters available

in 3D scans are those in the 3D
Roughness Parameters box.

Step 6 Click on Select All 3D to

choose all the available parameters
for inclusion in the Analysis data.

6. Click in each empty check box next to the parameters that are to be displayed in
the Surface Summary box after the scan. This activates the procedure so that the
information is available for data analysis. (See Figure 9.20.)
To choose all of the available parameters, click on the Select All 3D button at the
bottom of the column.
Hybrid Parameters 7. This is the set of parameters contained in Bearing Ratio, Cutting Depth, High
Spot Count, and Peak Count. Click on the Bearing Ratio/Cutting Depth button.
(See Figure 9.21.)

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Figure 9.21 Bearing Ratio/Cutting Depth in Recipe Editor

Step 7 Click on Bearing

Ratio Cutting Depth to
display its window.

Step 8 The 3D parameters

Preliminary
that can be chosen are
presented in the 3D
parameter fields.

8. Make the required adjustments to the 3D parameter settings. (See Figure 9.21.)

NOTE: The High Spot Count/Peak Count parameters are only for 2D
analysis and do not show up in 3D analysis.

9. In the 3D Analysis screen, click on View in the menu bar to display its menu.
10. From the View menu, click on Parameters Menu.
11. Click next to each parameter that is to be displayed in the Surface Summary box.
The checkmark ensures that the information prescribed in the Recipe Editor and
collected during the scan, is displayed in the Surface Summary box. (See
Figure 9.17.)

Operations Menu in the Analysis Screen Menu Bar 9

Table 9.12 Operations Menu Options (From Menu Bar)

Menu Item Description of Action
This option activates the Leveling procedure by
activating the tool bar to the right of the image,
orientating the image to the Top View, and placing the
leveling cursors on the image surface. (See Table 9.5,
Level tool.)

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Table 9.12 Operations Menu Options (From Menu Bar) (Continued)

Menu Item Description of Action
This button is activated when the Leveling procedure is
activated. If the Leveling procedure is begun and the
user wishes to cancel it prior to completion, this button
can be clicked to abort the procedure.
This option displays the Line Leveling dialog box for
use in leveling the image. There are two sets of lines
that work just like setting cursors. There is a left and
right side of the “line” that will be used for leveling. It is
very important that the bounded area in both “lines” is
all in the same plane. For this reason, the example
shown below would not be a good candidate for this
type of leveling since no vertical line could be drawn on
a single plane.
Preliminary

This displays the Image Arithmetic dialog box which

allows the user to compare the current image with
other images using various mathematical operators.

This option allow the user to recalculate the current

data using new parameters.

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Table 9.12 Operations Menu Options (From Menu Bar) (Continued)

Menu Item Description of Action

Data Menu from the Analysis Screen Menu Bar 9

Table 9.13 Data Menu Options (From Menu Bar)

Menu Item Description of Action
This option inverts the data and changes the screen
image to reflect the inverted data.

This option allows the user to choose how many of the

collected data points will be used. It opens a dialog box

Preliminary
that with the necessary settings.
This feature sets the gain of the image.
The computer records more data points than are
possible to plot on-screen, so it uses a subset of the
points taken to build the image. In general, the smaller
the subset, the coarser the image and the faster it can
be displayed and rotated.
To control the image granularity from coarse to fine, set
the parameters for the data subset, using the Data
Granularity dialog box.

This option is for display purposes only. If checked (like

Low Resolution in the following field), the image will be
presented in a higher resolution. This slows generation
time when the image is rotated or magnified but offers
greater detail.
This option is for display purposes only. If checked, as
in the illustration, the image will be presented in a lower
resolution. This enhances generation time when the
image is rotated or magnified.

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Tools Menu from the Analysis Screen Menu Bar 9

Table 9.14 Tools Menu Options (From Menu Bar)

Menu Item Description of Action
This options enables the Side Tool Bar Buttons. (See
Table 9.6.)

This options disables the Side Tool Bar Buttons.

This option displays the Analysis Tools menu.

Preliminary

This option changes the image to Top View, places the

zoom box at the bottom left corner of the image, and
activates the Zoom In (magnification) icon in
the top tool bar. (See Table 9.5, Zoom In.)
Once the Zoom In boundary box is set on the area to
be zoomed in on, this option completes the zoom
procedure to magnify the surface bounded by the box.
This button restores the pre zoom image.

This option displays the Mouse Tools menu.

These tools are all duplications of tools on the top tool
bar. For Rotate Image and Change Rise Angle, see
Table 9.2. For three Change Light... options, see
Table 9.5, look for the same titles. For the Move
Highlight Planes, see Table 9.5, look for the same title.

This option is used with the Slicing Tool. (See

Table 9.6, in the Activate Slicing Tool section.) When
this option is chosen, the slicing tool will automatically
go to the horizontal position and only operate in that
position for the slicing procedure.

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Table 9.14 Tools Menu Options (From Menu Bar) (Continued)

Menu Item Description of Action
This option is used with the Slicing Tool. (See
Table 9.6, in the Activate Slicing Tool section.) When
this option is chosen, the slicing tool will automatically
go to the vertical position and only operate in that
position for the slicing procedure.
This option is used with the Slicing Tool. (See
Table 9.6, in the Activate Slicing Tool section.) When
this option is chosen, the slicing tool automatically set
the slicing line at a diagonal across the image. This line
can be changed to any angle or length.

L INE - BY -L INE L EVELING 9

Preliminary
Introduction 9

Line-by-Line Leveling is designed to provide a tool for leveling 3D images where

planes at the same “Z” level can be detected running from top to bottom (along the
Y-axis) of the 3D image. This process is used to remove errors caused by scan drift.
This is accomplished by the system which averages the points between the cursor
borders to come up with a single value. The 3D image is leveled using the trace line
along the x-axis and the averaged value for the leveling cursor.
Each cursor is color coded with a right and left side and progressively higher headers
that help the user to set them in their proper order. All four lines can be used for
leveling. The left line (shorter cursor border) of each color set is the left cursor border.
This keeps the lines identifiable so they are not placed out of order. It is important that
the lines be kept in order.

Activating Line Leveling 9

Opening the 3D Cursor Parameters Window 9

Line-by-Line Leveling is activated in the Recipe Editor. It is used only in 3D images

and is only accessible through a 3D recipe.

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1. From any top level screen, open the Catalog Screen by clicking on its icon. (See
Figure 9.22.)

Figure 9.22 Program Level Icons

Step 1 From any

top level screen
click on the Catalog
Screen icon.

2. From the Catalog Screen choose the Scan Recipe button to display the scan
Preliminary

recipe names in the list field portion of the screen.

Figure 9.23 Catalog Screen with Scan Recipe Chosen

Step 2 Click on the Scan

Recipe button to display
the scan recipes in the list
field.

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3. Ensure that the 3D icon is active so the 3D Scan Recipes are displayed in the lit
field. (See Figure 9.24.)

Figure 9.24 3D Scan Catalog Screen

Step 3 Choose the 3D icon.

Step 4 Double-click on a
recipe to open its recipe editor.

Preliminary
ALTERNATIVE:
Click to highlight
the recipe, then
click View/Modify.

4. Select the 3D recipe to be edited by double-clicking on the recipe name. This

opens the recipe editor. (See Figure 9.24.)
(ALTERNATIVE: Click to highlight the recipe, then click on View/Modify at the
bottom of the screen. See Figure 9.24.)

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5. In the Recipe Editor, click on 3D Cursors to display the 3D Cursor parameters.

This displays the four sets of 3D cursor parameters that are available for
defining in the recipe:
Š 3D Leveling Cursor
Š 3D Line by Line Leveling Cursor
Š 3D Measuring Cursor
Š 3D Step Height Cursor

Figure 9.25 Recipe Editor - 3D Cursors Window

The 3D Line by Line

Leveling parameters.
Preliminary

Step 5 Click on 3D
Cursors to display the
3D Cursor parameters.

Enabling 3D Line-by-Line Parameters 9

The 3D Line-by-Line Leveling option is enabled by putting a check in the Enable

Automated Line by Line Leveling checkbox. After the option is enabled, the user can
choose between two leveling options, or manually set the cursors in the Analysis
screen after the scan.

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Enable the 3D Line-by-Line Leveling by clicking in the empty Enable Automated Line
by Line Leveling checkbox to put a check in it. (See Figure 9.26.)

Figure 9.26 3D Line by Line Leveling Cursor Parameters

Step 5 Click in the

empty checkbox to
enable 3D Line-by-Line
Leveling.

After the Line-by-Line Leveling is enabled, the two leveling options are also active so
one or the other can be enabled. Clicking in the empty radio button toggles between
the options.

Preliminary
Use Default Line Position [0% 50% 50% 100%] 9

This option can be used best when scanning a sample with uniform texture typical of
film roughness scans. This function operates best when there are known flat regions
throughout the Y axis direction. This preset option automatically levels the scan by
placing the left cursor’s left border at the origin of the scan, the left cursor’s right
border at the mid point of the scan, the right cursor’s left border also at the midpoint
of the scan, and the right cursor’s right border at the end point of the scan.

Use Defined Line Positions 9

The Defined Line Positions can be set in two ways:

Š The operator chooses Use Defined Line Positions as the leveling tool. The
operator manually enters (sets) the positions of the cursors in microns. These
settings are between 0 µm and the number of microns in the scan length, as
defined in the recipe.
Š The operator can enable line-by-line leveling and choose Use Defined Line
Positions as the leveling tool. The operator then either runs the scan to obtain the
data, or opens saved data that used the same recipe. The Line-by-Line procedure
is used to level the data and the data is saved. Once saved, the positions of the
newly placed cursor lines is displayed in the recipe.

Manual Entry of Line Position in Line Field

1. Follow the instruction in Opening the 3D Cursor Parameters Window
on page 9-33.
2. In the 3D Cursor Parameters window, ensure that Enable Automated Line by Line
Leveling is enabled. (See Figure 9.27.)

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3. Click on the empty radio button next to Use Defined Line Positions to enable it.
(See Figure 9.27.)

Figure 9.27 3D Line by Line Leveling Cursor Field

Either:
Manually enter positions in
Step 3 Choose Use each field.
Defined Line Positions OR
Manually position the line
cursors on the image in
Analysis screen.

Once Use Defined Line Positions is enabled, the four Line fields become active.
4. If the positions for the line spacing is known, enter the respective positions in
each of the fields. Remember the following when entering the position:
Š The units are microns (µm).
Preliminary

Š The range is [0 µm to (Length of scan) µm] (length as defined in the scan

recipe being used).
Š 0 ≤ Line 1 position < Line 2 position < Line 3 position < Line 4 position ≤
Scan Length
Š If the cursor line entries fall outside the scan limits, the system
automatically adjusts the cursors according to the sequential priority in the
above bullet.

Manually Position Line Cursors on Image to Enter Line Position

1. Run the scan using the recipe that is modified as illustrated in Figure 9.27.
2. From the Analysis screen choose Operations in the Menu Bar.
3. Select Line Leveling from the Operations menu.
The graphic display of the data appear midscreen in the top view with the four
line cursors in place at opposite borders of the image.

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4. Click and drag each line to its required position. All four line cursors must be on
the same plane for the data to be properly leveled. (See Figure 9.28.)

Figure 9.28 Line Leveling Top View Analysis Screen

Step 4 Click and drag lines If necessary, view the same image
to the required positions. from a different perspective so
positioning cursors is easier.

Notice that all the cursor

lines are set to level on the
same plane.

Preliminary
5. It is not necessary to save the data for the new cursor position to be recorded in
the recipe.
6. To observe the recipe, click Edit in the Menu Bar to display its menu.
7. Select Recipe from the Edit menu to return to the Recipe Editor.
8. In the Recipe Editor, click on the 3D Cursors button at the bottom of the
parameter window icon column. (See Figure 9.29.)

Figure 9.29 Recipe Editor with 3D Cursors Window Displayed

To return to the
Analysis Screen, click
on the Analysis
Screen icon.

The current cursor positions are

now recorded in the Line fields.

Step 8 Click on 3D
Cursors to display
the Cursors window
as shown.

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9. To preserve the current 3D Line by Line Leveling Cursors positions, save the
recipe.

C USTOMIZING THE S CAN I MAGE 9

Setting the Image Proportions 9

1. Go to the View menu, and select Change.

The View Properties dialog box appears.
2. Type a number that gives an appropriate value for the image height in Data
Height Mag. (See Table 9.10 on page 9-23, View Properties.)
Since the number depends on the relative heights of the features in the image,
select a higher value to obtain a taller image, a smaller value to reduce it. Click
OK.

Setting the Shading Mode

Preliminary

1. In the View menu, click on Change...

2. In the Change... menu, click on View Properties.
The Set Viewing Parameters dialog box appears.

Figure 9.30 Set Viewing Parameters Dialog Box

Shading mode options. Chose

the one that best fits the
requirements by clicking in its
empty radio button.

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3. Select one of the following shading modes to customize the 3D data images to
better represent the sample type:
Š By Height to emphasize high features, click on the radio button next to
Height gradient mode. (See Figure 9.30.)
Š By Light to enhance smooth surfaces, click on the radio button next to Ray
trace mode. (See Figure 9.30.)
The results will appear in the Analysis screen, showing the three-dimensional,
color representation of the data points collected in one of three selectable
formats. (See Table 9.15.)

Table 9.15 3D Analysis graphs

Graph Description
By Height
Good for viewing rough features.
The higher the feature, the lighter the
color.

Preliminary
By Light
Good for viewing smooth features since
contours are more obvious.
Features appear as if illuminated by a light
source.

Changing the View Angle 9

1. The image can be viewed from various angles by doing one of the following:
Š Press the arrow keys on the keyboard. (See Analysis Screen – Image
Orientation on page 9-3.)
Š Go to the View menu, click on Change...
Click on one of the seven views listed: (See Table 9.11 on page 9-24.)
Restore Original View Top
Oblique Front
Back Left Side
Right Side
Š Click the Rotation buttons at the bottom of the 3D view window to quickly
examine the image from any angle. (See Table 9.1 on page 9-4 and
Table 9.2 on page 9-4.)

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C USTOMIZING THE VIEW 9

Changing the Image Colors 9

1. Go to the View menu, and select Change...

2. Click on Display Color.
3. Select a color from the palette or create a custom color.
Saving the scan file also saves custom colors. (See Table 9.10 on page 9-23.)
4. Click OK to close the dialog box and apply the choice.

Changing the Scan Height Colors 9

Images can be color-coded and displayed in the Height Gradient Mode format to
better delineate height features. The Highlight feature allows the user to define a
highlight plane to bring out certain features of the image.
1. Go to the View menu, and select Highlight.
Preliminary

A dialog box appears with the minimum and maximum heights obtained in the
scan.
2. Go to the Plane Height entry field, and type the desired height.
3. Click Set Headlight Plane Color.
4. Select a color from the palette or create a custom color.
5. Click OK.
6. If desired, repeat to define additional planes.

Removing Banding with Line Leveling 9

Line leveling can be used to remove banding caused by environmental signal drift
with each successive trace in a 3D scan baseline. Line leveling calculates corrections
by comparing line segments line-by-line rather than by averaging areas. Line leveling
should generally be used when calculating 3D roughness, area, volume, and other
parameters.
1. Click on Operations in the Analysis screen menu bar.
2. Click on Line Level...

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3. Go to the Operations menu, and select Line Level.

The dialog box appears (see Figure 9.31).

Figure 9.31 Line Leveling Dialog Box After Cursors Positioned

Step 4 The cursors in

this illustration must be
placed close together to
ensure that they are
covering the same plane.

Preliminary
Step 5 After the cursors
are set, click Apply to
preview the results.

4. Click and drag the lines of each pair of boundary cursors to define segments of
the scan lines on the same plane.
Do not include features, only flat areas (see Figure 9.31 for placement of
cursors). Notice that in the image, the lines must be vary close together in order
to keep from including unwanted features.
The instrument compares the bounded segments and calculates an average
baseline for the scan.
5. Click the Apply button to preview the results. The Undo button become active.
6. Click the Exit button to return to the scan data window and view the results on
the scan image.
7. If the new leveling is to be retained, it must be saved. If the screen is closed
without saving, the changes are lost.

U SING I MAGE A RITHMETIC TO C OMPARE D ATA 9

Two 3D scans can be compared with similar surfaces or the same site to evaluate
noise and roughness. Both scans must use the same recipe:
Š Recipe
Š X-size and Y-size
1. Open the data file that is to be use in the calculations. This is Image 1.

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2. Go to the Operations menu, and select Image Arithmetic.

The dialog box appears (see Figure 9.32)

Figure 9.32 Image Arithmetic Dialog Box

Step 3 Enter the name of

the second image or click
Preliminary

the Browse… button to

search for the image.

3. Type in the name of the second image or Browse for the second image.
The second image must have used the same recipe as the first image, and it must
be the same size.
4. Press ENTER, or click the Display button.
The second image appears in the display area in the dialog box.
5. Go to the Operator panels, and click one of the buttons for:
Š Subtraction or addition
Š Division or multiplication
The Processing Formula above the panels displays the selection.
Š Scale Factor sets the value for Operator 2.
Š If division or subtraction are not being performed on the data, go to the
Scale Factor field, and enter 1.
6. Click the Apply button to perform the operations.
7. To revise the operations and recalculate, click the Undo button.
8. When the results are satisfactory, click the Close button.
A Save message dialog box appears.
9. Click OK to save the resulting image.

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S AVING S CAN D ATA 9

Scan data can be saved for reviewing at a later time. This is especially important
because the data that is saved, using software version 6.1 or newer, can be reanalyzed
at a later date using different scan parameters.
In addition to saving the 3D data, current slice data can be save. This procedure is
covered at the end of this section.

Saving 3D Scan Data 9

1. Click on File in the Menu Bar to display the File menu.

Figure 9.33 3D analysis Screen with File Menu

Step 1 Click on File

to display its menu.

Preliminary
Step 2 Choose Save
Data… from the
menu.

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2. Select Save Data…

The Save Scan Data dialog box appears. (See Figure 9.34).

Figure 9.34 Save Scan Data Dialog Box

Step 4 From the drop-down

menu, click on the desired drive
and directory. Step 3 Click on
the down-arrow to
reveal the
Step 5 If folders are present,
available drives
double-click on the folder in which
and directories if
the data is to be saved.
needed.

Step 6 Enter the name being

Step 7 Click
given to the new data set.
Save to save the
data to the file.
Preliminary

3. Click on the menu arrow next to Save In to reveal the available drives and
directories. (See Figure 9.34)
4. Select the drive and directory from the drop-down menu. (See Figure 9.34)
5. Double-click on the folder that the data is to be stored in. A list of all current
data files appear. (See Figure 9.34)
6. Enter a name for the data set in the File name variable box. (See Figure 9.34)
7. Click Save to save the data in the new file. (See Figure 9.34)
Once a data set has been saved, it is added to the Scan Data catalog. The Scan
Data catalog window allows selection of individual data sets for reviewing.
Unwanted data sets can be deleted.

Creating and Saving 2D Slice Data from a 3D Scan 9

1. From the Analysis Screen, click on the hammer tool to activate the tool bar.

Figure 9.35 Analysis Screen - Analysis Tool Bar

Step 1 Click on the

hammer icon to
activate the tool bar
function.

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2. In the activated tool bar, click on the slice tool to activate the slice tool.

Figure 9.36 3D Analysis Tool Bar with Slice Tool Activated

Step 2 Click on the slice

tool to activate it.

3. Choose the desired slice direction. Click on Tools to display its menu. (See

Preliminary
Figure 9.37.)

Figure 9.37 Analysis Screen with View

Step 3 Click on Tools to

display its menu.

Step 4 Click on Cross

Section Tool to display
its menu.

Step 5 Choose the desires

slice direction. Unlock
Cross-Section is chosen,
making any direction slice
possible.

4. Click on Cross Section Tool from the Tools menu to display its menu. (See
Figure 9.37.)
5. Choose the desired cross section tool for the slice direction. (See Figure 9.37.)
6. For the Horizontal and Vertical tools, click and drag the slice line to the desired
location on the 3D image to display the 2D trace of the scan at that location. For
the Unlock Cross-Section tool, click and drag the slice line end points to the
desired location on the border of the image as seen in Figure 9.38.

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Figure 9.38 Analysis Screen with Slice Tool Active

Step 6 Top create the slice,

click and drag the endpoints of
the unlocked slice tool or the
line segment of the vertical or
horizontal slice tools.
Preliminary

7. When the slice line has been placed, click View in the menu bar to display its
menu. (See Figure 9.39.)
8. Choose Current Slice… to display the 2D slice trace. (See Figure 9.39.)

Figure 9.39 Analysis Screen with Both 2D and 3D Images

Step 7 With the slice

tool placed, click on
View in the menu bar to
display its menu.

Step 8 Choose
Current Slice… from
the menu.

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If the Window option is set to Tile Horizontal then the image is displayed as
illustrated in Figure 9.40. The 2D slice trace is displayed above the 3D image.
The 3D image is shown with the slice tool placed across the image at the place
where the 2D image is generated.

Figure 9.40 Analysis Screen with Both 2D and 3D Images

The current slice is

displayed as a 2D image
in the Analysis Screen.

The 3D image is displayed

Preliminary
in the top down mode, with
the slice tool across the
image as placed to create
the 2D slice.

9. To save the 2D trace data from the 3D scan, click in the 2D trace portion of the
Analysis screen to activate it.

Figure 9.41 Analysis Window with File Menu

Step 10 To save the 2D trace

data, click File to display its
menu.

Step 11 Choose Save

Data… to open the

Step 9 Click in the 2D trace

portion of the Analysis screen
to activate it.

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10. To save the 2D slice data click File to display is menu. (See Figure 9.41.)
11. Choose Save Data… to display is dialog box. (See Figure 9.41.) This displays the
Save Scan Data dialog box. It should be set up to save 2D data as shown by the
data type “Scan Data Files (*.dat)” in the Save as type: field. (See
Figure 9.42.)

Figure 9.42 Save Scan Data Dialog Box

Step 13 From the Save in:

drop-down menu, click on the
desired drive and directory. Step 12 Click on
the Save in:
down-arrow to
Step 14 If folders are present,
reveal the
double-click on the folder in which
available drives
the data is to be saved.
and directories if
needed.
Preliminary

Step 15 Enter the name being Step 16 Click

given to the new data set. Save to save the
data to the file.

12. Click on the down-arrow next to Save In to reveal the available drives and
directories. (See Figure 9.42)
13. Select the drive and directory from the drop-down menu. (See Figure 9.42)
14. Double-click on the folder that the data is to be stored in. A list of all current
data files appear. (See Figure 9.42)
15. Enter a name for the data set in the File name variable box. (See Figure 9.42)
16. Click Save to save the data in the new file. (See Figure 9.42)
Once a data set has been saved, it is added to the Scan Data catalog. The Scan
Data catalog window allows selection of individual data sets for reviewing. 2D
slice data saved from a 3D scan can be reevaluated in the Analysis screen by
changing the recipe parameters and performing a recalculation of the
information. Unwanted data sets can be deleted.

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 10
SYSTEM SECURITY Chapter 10

10

I NTRODUCTION 10

The Profiler system security is designed to provide users with membership in various
groups for access to the Profiler functions for which they are responsible. Each group
access is provided by an interface between the Windows software and the Profiler
Software. Each group is defined and named in the Windows software. Windows
defines three user groups: Administrator, Power Users, and Users. The Profiler
software defines 16 additional groups. The additional groups are as follows:

P rel i mi n a ry
P_Configuration P_Calibration P_AdvCalibration
P_EditScanRecipe P_TranScanRecipe {+EditScanData
P_TranScanData P_EditSeqRecipe P_TranSeqRecipe
P_EditSeqData P_TranSeqData P_Stress
P_Diagnostics P_VirtualArtifacts P_StageMapping
P_GemSecs

Each of these groups provide access to system functions that are necessary for the job
actions associated with the security level. There can be as many people assigned to
each level as is necessary.
This chapter includes discussions on:
Š Windows Defined Groups on page 10-2
Š Profiler Defined Groups on page 10-2
Š Opening the User Manager on page 10-4
Š User Manager on page 10-6
Š Creating a New User on page 10-6
Š Results of Limited Access on page 10-11
Š Adding a User to a Users Group on page 10-9

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Windows Defined Groups 10

The Windows defined groups have functions as follows:

Š Administrator and Power Users: A user who is a member of either of these
predefined groups has all of the Profiler privileges. That is, he is allowed to use
any and all Profiler software features and can create, delete, or modify any
Profiler system or data files.
Š User: A user who is a member of predefined Users group has the basic set of
Profiler privileges:
View a scan or sequence recipe
Run a scan or sequence recipe
Save the data in a new data file, including thumbnail files
View data, including thumbnail files
Perform the Applied Force calibration procedure because it is a daily
operation that requires relatively few Profiler skills
Preliminary

Profiler Defined Groups 10

The Profiler defined groups have privileges as follows:

Š P_Configuration: This group allows a user to select the Configuration button
in the program level screens and to perform any configuration procedures. The
only exception is that in System Configuration, only Administrators and Power
Users are allowed access to Registry Maintenance.
Š P_Calibration: This group allows a user to perform any of the calibration
procedures except Center of Rotation (Administrators and Power Users only),
Linearity, Pulse ratio, Tilt/Level, Virtual Artifacts, and Stage Mapping. These
other calibrations are included in other groups.
Š P_AdvCalibration: This group allows a user to access these calibration
procedures: Linearity, Pulse Ratio, and Tilt/Level.
Š P_EditScanRecipe: This group allows a user to modify an existing scan recipe
and save it. The edit can be done explicitly in the recipe editor or implicitly by
using a function that automatically changes the recipe, such as the CALC
function in the Analysis window in a live scan or in review mode.
Š P_TranScanRecipe: This group allows a user to import a new scan recipe but
not to overwrite an existing one, unless the user is also a member of
P_EditScanRecipe. The user can also export a scan recipe to an external file.
The Profiler imposes no restrictions on the user privileges of the external file.
Š P_EditScanData: This group allows a user to modify existing scan data and
save it. The user can also overwrite existing scan data with different data or
delete scan data.

NOTE: If the user is not also a member of P_EditScanRecipe, then

the user cannot implicitly modify a scan recipe in the Analysis window
in either a live scan or review mode. Examples of this are the CALC
and RECALC button which are disabled.

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Š P_TranScanData: This group allows a user to import new scan data but not to
overwrite existing data, unless the user is also a member of P_EditScanData.
The user can also export scan data to an external file. The Profiler imposes no
restrictions on the user privileges of the external file.
Š P_EditSeqRecipe: This group allows a user to modify an existing sequence
recipe and save it. The edit can be done either directly in the recipe editor or
implicitly by using a function that automatically changes the recipe. The user
can also overwrite an existing sequence recipe with a different recipe or delete a
sequence recipe.
Š P_TranSeqRecipe: This group allows a user to import a new sequence recipe
but not to overwrite an existing one, unless the user is also a member of
P_EditSeqRecipe. The user can also export a sequence recipe to an external file.
The Profiler imposes no restrictions on the user privileges of the external file.
Š P_EditSeqData: This group allows a user to modify existing sequence data and
save it. The user can also overwrite existing sequence data with different data or
delete sequence data.

Preliminary
NOTE: If the user is not also a member of P_EditSeqRecipe, then the
user can not implicitly modify a sequence recipe in the Analysis
window. Examples of this are the CALC and RECALC button functions
which are disabled.

Š P_TranSeqData: This group allows a user to import new sequence data but not
to overwrite existing data, unless the user is also a member of P_EditSeqData.
The user can also export sequence data to an external file. The Profiler imposes
no restrictions on the user privileges of the external file.
Š P_Stress: The group allows a user to access the Stress application. The user can
create, delete, or modify stress recipes. The user can also create, delete, or
modify stress scan data. This group can be restricted to users who have stress
characterization responsibilities.
Š P_Diagnostics: This group allows a user to access the Diagnostics application.
This group can be restricted to users who have machine troubleshooting
responsibilities.
Š P_VirtualArtifacts: This group allows a user to generate virtual artifacts. This
group can be restricted to user who have this responsibility.
Š P_StageMapping: This group allows a user to perform the Stage Mapping
calibration. Only users with special training should be members of this group.
Š P_GemSecs: This group allows a user to change the host/equipment
GEM/SECS settings. Only users with special training should be members of the
group.

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M ANAGING THE S YSTEM S ECURITY 10

Opening the User Manager 10

During the logon procedure the user must enter a combination of logon ID and
password. This logon is necessary for the Windows software to complete the system
initiation. The logon ID establishes which group(s) the user has access to. The
password completes the access to group functions. When opening the User Manager
screen, where the security system resides, the logon will have already determined
what groups the user has access to. Only those with Administrator or Power User
access can perform any of the functions in the User Manager screen.
1. Click on the START button at the bottom left of the screen. This displays the
Windows menu. (See Figure 10.4.)
2. Click on the Programs option to display its menu. (See Figure 10.1.)

Figure 10.1 Windows Screen START Menu

Preliminary

Step 1 Click on START Step 2 Move the cursor

at the bottom left corner over Programs to access
of the screen to open this the Program menu.
menu.

3. Move the cursor over Administrative Tools (Common) to display its menu. (See
Figure 10.2 and Figure 10.4)

Figure 10.2 Programs Menu

Step 3 Move cursor over

Administrative Tools to
display its menu.

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4. Move the cursor over User Manager (see Figure 10.3 and Figure 10.4) to display
the User Manager screen. (See Figure 10.5.)

Figure 10.3 Administrative Tools Menu

Step 4 Move cursor over

User Manager to display
the User Manager screen.

Preliminary
Figure 10.4 Windows Screen with Path to User Manager Screen

Step 2 Cursor
over Programs

Step 3 Cursor over

Administrative Tools

Step 4 Cursor over

User Manager

Step 1 Click on
START

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User Manager 10

The User Manager is the security system interface for Windows. The P-15 Profiler
uses the Windows security system. All assignment of users to user groups and
creation of user passwords is set in this screen.

Figure 10.5 User Manager

List of user names.

Preliminary

List of User Groups

Creating a New User 10

For the P-15 system users, a User Group is a secured access group with specific
system privileges.
To create a new user, use the following procedure:
1. Click on User to display its menu. (See Figure 10.6.)

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2. Click on New User to open the New User dialog box. (See Figure 10.6.)

Figure 10.6 User Manager

Step 1 To create a
new user, click on
User.

Step 2 Click on
New User…

Preliminary
BEGIN: Setting a 3. Enter the User Name in the first field. This is the name that the user enters into
Password the User ID field during the logon process. (See Figure 10.7.)
4. Enter the Full Name in the second field. This is the actual identity of the user.
(See Figure 10.7.)
5. Enter the Description in the third field. This describes the duties of the user. (See
Figure 10.7.)
6. Enter the Password in the fourth field. This is the password that the user enters
in the Password field at logon. (See Figure 10.7.)
7. Enter the Confirm Password in the fifth field. This is the Password that was
entered in the fourth field, now entered a second time to verify that the first
entry was correct (verification is difficult since the password is not displayed). If
the two entries are different correction can be made. (See Figure 10.7.)

CAUTION: It is extremely important that the Administrator password

be protected. If the passwords are changed and lost or forgotten, it is a
very expensive and time consuming process to establish new access
to the system. To avoid potential system downtime, the original
Administrator password should be kept in a secure place by the
administrator and not changed.

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Figure 10.7 New User Dialog Box - Variables

Step 3 Enter the user name.

This is the logon name.
Step 4 Enter the user name.
This is the identity of the person.

Step 5 Enter the user name.

This is what the person does in
the system.

Step 6 Enter the Password. A

confirmation is requested so
there is less chance of
misspelling since it is not visible.
Preliminary

8. There are four logon variables that can be selected from. To enable one of the
variables, click in the empty checkbox so that a check (9) appears in it. The
variables are as follows: (See Figure 10.8.)
Š User Must Change Password at next logon. If checked, the user will be
required to enter a new Password the next time the user logs on.
Š User Cannot Change Password. This makes it impossible for the user to
change the password. This is helpful if several people use the same logon.
Š Password Never Expires. If checked, the password always stays the
same. If this is not checked, the user will be required to periodically choose
another password. This is a way of forcing a periodic change of password.
END: Setting a Password Š Account Disabled. If checked, the user will not be able to logon until it is
unchecked. This way a users logon can be stopped without wiping out the
connections that the user has in the system. The connections cannot be
reestablished if the user is deleted.

Figure 10.8 New User Dialog Box - Variables

Click on the empty

checkbox of the desired
password logon variables.

To change or add access to

a group for a user, click on
Group to display its dialog
box.

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Changing or Adding Access to a User Group 10

1. Click on the Groups button at the bottom left of the New User dialog box to
display the Group Membership dialog box.
2. Remove the current user group. This is done by double-clicking one or more of
the current user groups in the Member of field, like one of the P_XxxXxxXxx
groups in Figure 10.9. (OR by highlighting the current user group in the Member
of variable box and clicking on Remove. See Figure 10.9.)

Figure 10.9 Group Membership Dialog Box

Step 2 Double-click one or

more of the current user group.

Preliminary
In this case, one of the
OR Highlight the current
P_XxxXxxXxx groups.
user group, and click on
Remove to delete the
highlighted user group.

Adding a User to a Users Group 10

It is possible to add user to a profiler specific users group. This is primarily for those
who are in the Windows defined Users group, because they have limited access to the
profiler groups.
Use the following procedure to add a person already having the Users group access to
a user specific users group.
1. From the User Manager, double-click on the name of the user in the users
name list. (See Figure 10.10.)

Figure 10.10 User Manager

Step 1 Double-click on the

name of the user that is to be
added to the profiler specific
group. (In this case, User2.) This
opens the User Properties
dialog box.

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2. Click on the Groups button at the bottom left of the User Properties dialog box to
display the Group Membership dialog box. (See Figure 10.11.)

Figure 10.11 User Properties Dialog Box

Step 2 Click on the Groups

button to open the Group
Membership dialog box.
Preliminary

3. Scroll to find the desired user group in the Not member of variable box. (See the
user groups defined in Profiler Defined Groups on page 10-2.) Double-click on
the group to move it into the Member of field.
OR, highlight the desired group in the Not Member of field and click on the
<-Add button. The selected group moves to the Member of field. (See
Figure 10.12.)

Figure 10.12 Group Membership Dialog Box

OR, highlight the user group Step 3 Double-click the

and click on Add to place the new user group. Here
user group in the Member of P_EditScanRecipe is
field. selected.

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4. After adding all the necessary groups, click on OK to finalize the choices. (See
Figure 10.13.)

Figure 10.13 Group Memberships Dialog Box

Step 4 When the

group has been
added, click OK.

The chosen group is

transferred to the
Member of side.

Preliminary
5. The User Properties dialog box appears. Click OK to close and save the changes.

Figure 10.14 User Properties

Step 5 When all the

desired changes
and additions have
been completed,
click on OK to
complete and save
them.

Results of Limited Access 10

When a user group is added to a user, the user access is limited to only those P-15
processes indicated by the user group membership. With limited access, certain
screens and contents are not accessible for change or use. In other cases, the screens
or specific functions in a screen are blocked from user access.

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When a screen has limited access to its functionality, the inaccessible functions are
grayed out. In the illustration in Figure 10.15, the Applied Force, Video Lamp Balance,
and Drop Timer calibrations are active but all other calibration functions are grayed
out to indicate that they are inaccessible to the operator under the current security
limitations.

Figure 10.15 Calibrations Screen with Functions Grayed Out

Notice that in the Calibration

icon does not have access
denied.

However, in the
Calibrations screen, the
operator might only have
access to certain
calibrations. Inaccessible
functions are grayed out.
Preliminary

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 11
CONFIGURATION Chapter 11

11

I NTRODUCTION 11

This chapter describes:

Š Operating Environment on page 11-1
Š Facility Specifications on page 11-2
Š Introduction to System Configuration on page 11-2
Š Setting the Date and Time on page 11-3
Š Configuration Window on page 11-4
Š Theta Soft Home Position on page 11-6

P rel i mi n a ry
Š Teach Lowest Elevator Position on page 11-10
Š System Configuration on page 11-14
Š Safe Area Configuration on page 11-21
Š Machine History Recorder Configuration on page 11-23
Š Enable New Options (Proprietary) on page 11-26
Š Export Path Defaults on page 11-27
Š Pattern Recognition Options and Deskew on page 11-29
Š Sequence Execution Options on page 11-35
Š Teach Manual Load Position on page 11-38
Š Proximity Sensor Configuration on page 11-40
Š Loss of Power on page 11-44
Š Turning Off or Resetting the Instrument on page 11-44
Š Installing a Precision Locator on page 11-47
Š Optional Precision Locators on page 11-58

O PERATING E NVIRONMENT 11

The KLA-Tencor systems use an internal, passive vibration isolator system to allow
operation in a normal production-line environment. For highly sensitive
measurements (i.e., for artifacts below 500 Å or when the system is located in
excessively noisy areas), KLA-Tencor recommends a solid floor.
For service access, approximately 50 cm (20 in.) of air space on both sides and to the
rear of the instrument is required.

CAUTION: The installation site must be free from sudden temperature

changes or extreme drafts. Do not place the instrument directly in the
airstream or an air-conditioning vent or heating outlet.

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F ACILITY SPECIFICATIONS 11

Table 11.1 Facility Specifications

FACILITY SPECIFICATION
Vacuum Required to hold down the samples: 6 mm (0.25 in.) nominal line
providing a minimum of 500 mm (20 in.) mercury of vacuum at a flow
of 27 liters/min. (1 cfm).
Dimensions Instrument (without monitor): 57 cm (23 in.) wide, 78 cm (31 in.)
deep, 46 cm (17.5 in.) high.
Monitor (15-in.) SVGA:
Electrical 90-110 V, 50/60 Hz
110-130 V, 50/60 Hz
208-260 V, 50/60 Hz
UL, CSA, European-qualified.
Preliminary

NOTE: If the power source is susceptible to

radio-frequency interference, an isolation transformer is
required for providing additional filtering. Sensitive
computer components require a power source that is
free from spikes, dips, and surges.

NOTE: If power failure is a common occurrence, use an

Uninterruptable Power Supply (UPS) device. A UPS
device supplies post interruption power for 30 minutes
so an orderly system shutdown can be accomplished
during a power failure. See Loss of Power
on page 11-44 for details.
Ambient Specified operating range: 16°–26°C.
Temperature Maximum rate of temperature change: ≤ 1°C/hr.
Vibration Floor vibration must be less than 250 µin./sec. (6.4 µm/s) RMS,
1-100 Hz
Audio Noise ≤ 80 dB (C weighting scale)
Air Pressure 90-125 psi, flow (6.4 kg/cm2 - 8.9 kg/cm2)
Laminar Air ≤ 100 ft/min (30 m/min), down-blowing
Flow

I NTRODUCTION TO S YSTEM C ONFIGURATION 11

The KLA-Tencor system application software must have the correct information in its
internal configuration files to properly run the instrument. The following sections
cover checking and editing these configurations.

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KLA-Tencor P-15 User’s Guide Configuration - Setting the Date and Time

S ETTING THE D ATE AND TIME 11

To Set the Date and Time 11

1. Before starting the Profiler system, click Start to display its menu.
2. Move the scroll cursor to Settings to display its menu.
3. Click on Control Panel to display the Control Panel window. (See Figure 11.1.)

Figure 11.1 Start Menu with Setting Menu Displayed

Step 1 Press CTRL+ESC

to display the Start menu.

Step 2 Move the cursor to

Preliminary
Settings in the menu.

Step 3 Click on Control

Panel.

4. In the Control Panel window, click on Date/Time (it is either in a list or displayed
under its icon). (See Figure 11.2.)

Figure 11.2 Control Panel

Step 4
Double-click
Date/Time to
open the
Date/Time
window.

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5. Choose the new value from the drop-down menu or highlight the part of the date
or time (e.g., month, hour) that requires updating.
6. Enter the new value. (See Figure 11.3.)

Figure 11.3 Date/Time Properties Window

Preliminary

7. Repeat for each new value that requires updating.

8. Click OK to reset the system with the new date or time and to exit from the
dialog box.
9. Close the Control Panel

C ONFIGURATION W INDOW 11

The Configuration screen is password protected. If the icon or the function buttons in
the Configuration screen are not active, the user should logon with the appropriate
log-on ID and password for access.
To access the Configuration screen, click on the Configuration icon in any system level
screen. (See Figure 11.4.)

Figure 11.4 Choose Calibration

Click on the
Configuration icon to
open the
Configuration screen.

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The Configuration window is displayed. (See Figure 11.5)

The left side of the screen contains a series of access buttons that open configuration
parameter dialog boxes in which configuration values can be set. The right side of the
window shows some of the current configuration values. Most of these values are set
by manufacturing technicians prior to shipment of the system. Although these values
are editable, they should not be changed without advice from KLA-Tencor
Technical Support personnel.

Figure 11.5 Configuration Screen

Each button accesses

another set of configuration
parameters.

Preliminary
Stage Configuration
settings. Do not change
values without consulting
KLA-Tencor Tech. Support.

STAGE C ONFIGURATION 11

The items in the Stage Configuration area are all editable using Configuration screen
options. All of the variable fields except the Theta Soft Home Position, the ones with
the active variable fields (white background), can be edited directly in the field itself.
The Theta Soft Home Position must be changed using the configuration procedure
presented by clicking its configuration button. (See Teaching the Soft Home Position
on page 11-6.)

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Figure 11.6 Stage Configuration Parameters

Preliminary

Theta Soft Home Position 11

The Soft Home position is related to the X- Y-stage Theta Home Switch and the puck
cutout. It is set at manufacturing and should not require further adjustment unless the
entire Y-drive is replaced. Prior to performing this adjustment, the Y-orthogonality
should be adjusted. The Soft Home position might be changed by teaching a new
position.
This procedure should only be attempted by a KLA-Tencor trained technician. An
error in this position could create further alignment difficulties.

Teaching the Soft Home Position 11

Figure 11.7 Configuration - Theta Soft Home Position…

Step 1 Choose Theta

Soft Home Position to
display its screen.

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1. Choose Theta Soft Home Position… from the buttons on the left side of the
Configuration screen. (See Figure 11.7.) The Teach Soft Home Position screen
appears. (See Figure 11.8.)
The stage rotates to the current Soft Home, theta, position.
2. Click MAN LOAD to move the stage to the stage door. (See Figure 11.8.)
3. Open the stage door.

CAUTION: A system safety shutdown occurs if an attempt is made to

activate any stage or elevator motion when the stage door is open
(unless the interlock switch has been disabled).

4. Load the orthogonality fixture onto the stage. (If the fixture is not available,
use a patterned wafer, seated in a precision locator.)
5. Close the door.
6. Click MAN LOAD to move the stage back under the stylus.

Preliminary
Figure 11.8 Teach Soft Home Position Screen

Step 8 Use the arrow

buttons to move and Step 2 Click MAN LOAD
rotate the stage into the to move the stage out to
new Soft Home position. the Stage Door and again
to move it back after the
sample is loaded.

Step 18 After the new

Soft Home has been
taught, click OK to
save or Cancel to exit.

7. Click on FOCUS to focus on the sample surface.

8. Find a line or row of attributes using the arrow buttons in the tool bar, move the
sample to the desired new position. If necessary, use the rotation buttons to
rotate the stage to a new theta position. (See Figure 11.8) For a more precise
setting, use the Align Sample procedure detailed in Step 9. through Step 9.
Begin: ALIGN SAMPLE 9. Click on View in the tool bar to display its menu. In the menu, click on Align
Sample. (See Figure 11.9.) This sets up the Align Sample procedure used to
align the XY axis of the screen with the tool’s pattern.

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Figure 11.9 Align Sample Procedure - Scan Offset Calibration

Step 9 To align the Stylus

Alignment Tool with the XY
axis of the screen, click on
Align Sample.

10. The alignment Angle dialog box appears requesting input of the intended
Preliminary

alignment angle. The default is “0” and should appear in the variable box. Click
on OK in the dialog box to accept the “0” value. (See Figure 11.10.)

Figure 11.10 Setting Alignment Angle

Step 10 Click on OK to accept

the “0” angle alignment.

11. The message prompt at the bottom of the screen appears as follows:

Figure 11.11 Message Prompt After Alignment Angle is Set

Using the right arrow button (→), scroll across the a horizontal pattern.
12. Place the crosshairs cursor on the horizontal line or die border and click. The
system performs adjustments that align the screen grid dashes to the crosshairs.
13. The message prompt displays the following:

Figure 11.12 Message Prompt to Accept of First Alignment Location

Click OK, at the bottom right of the screen, to accept the first alignment location.

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14. The following message appears in the message prompt:

Figure 11.13 Message Prompt for Selecting Second Alignment Location

Using the left arrow button (←), scroll across the wafer or sample. Stay close to
the chosen horizontal feature. Travel at least one centimeter. Place the crosshairs
cursor on the horizontal feature (in the same relative position as the first
position) and click with the left mouse button. The system performs final
adjustments, aligning the screen grid to the horizontal feature (the sample
pattern is now aligned with the XY axis.)
15. The message prompt appears as follows:

Figure 11.14 Message Prompt to Accept Second Alignment Location

Preliminary
Click OK, at the bottom right of the screen, to accept the second alignment
location.
16. The message prompt appears as follows:

Figure 11.15 Message Prompt to Accept the Alignment

After the adjustments have been completed by the system, the message prompt
at the bottom of the screen requests the user to click OK to accept the new
alignment adjustment. (See Figure 11.15.) Click OK (bottom right of screen) to
accept, or click Cancel to run a new alignment calculation.
End: ALIGN SAMPLE This completes the Align Sample procedure.
17. Click at the X- Y-junction on the video image to record the new position’s
coordinates.
18. Click OK to save the new position, or click Cancel to keep the original value and
return to the Configuration screen. (See Figure 11.8)

Leveling Offset 11

The Leveling Offset is set at manufacturing. It should not be necessary to adjust it

unless other mechanical procedures have been performed on the stage or drive
systems. The leveling calibration procedure is automated and, when completed,
provides a value for this field. (See Level Calibration on page 12-41)
KLA-Tencor recommends that this number not be changed except by a KLA-Tencor
trained technician.

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Teach Lowest Elevator Position 11

Introduction 11

The Lowest Elevator Position sets the vertical motion range of the stage. Using this
feature, a limit (Z coordinate) can be set for the elevator so that the measurement
head cannot descend past the level of the sample surface.
Correctly teaching the Lowest Elevator Position protects the measurement head when
the Proximity Sensor (which is used to switch from Elevator Focus Speed to Elevator
Slow Focus Speed) is not being used.

CAUTION: It is very important to reset the correct Lowest Elevator

Position after a precision locator is installed. The stylus can be
damaged if the stage remains configured to the original setting.

Procedure to Teach Lowest Elevator Position 11

Preliminary

This positioning procedure requires that the stylus make contact with the stage
surface, precision locator surface, or a ample (if samples of consistent thickness are
used) in order to assign a lowest elevator position that allows the system to locate and
use the sample support surface or embedded standards. It is best to use a sample if the
samples tested are of a consistent thickness. Make sure that the stylus stops on the
top surface and not in a hole or grove. Once the stylus is aligned with the proper
surface position, the remainder of the procedure is automatic.
1. From the Configuration screen, choose Lowest Elevator Position… from the menu
buttons at the left side of the screen. (See Figure 11.16.)

Figure 11.16 Configuration Screen - Lowest Elevator Position

Step 1 To open the screen

for teaching lowest elevator
position, click Lowest
Elevator Position…

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2. The window shown in Figure 11.17 appears. Assuming that the samples of
consistent thickness are being used, load one of the samples onto the stage.
To manually load a wafer or other sample, click MAN LOAD to move the stage to
the stage door. (See Figure 11.17.)

Figure 11.17 Teach Lowest Elevator Position Screen

Step 8 Click FOCUS

to begin position the
adjustment.

Step 2 Click MAN LOAD to

Preliminary
move the stage to the stage
door. Load the sample and
click MAN LOAD again to The Z coordinate in
move the stage back under this example is
the stylus. 53189.85 µm.

3. Open the stage door.

CAUTION: A system safety shutdown occurs if an attempt is made to

activate any stage or elevator motion when the stage door is open
(unless the interlock switch has been disabled).

4. Load the sample from the stage.

5. Switch on the vacuum using the switch on the upper left inside door frame.
6. Close the door.
7. Click MAN LOAD to move the stage under the stylus. (See Figure 11.17.)
8. Click FOCUS in the tool bar to move the head down to focus on the sample. (See
Figure 11.17.) The system is set to protect the stylus so this final null could take
a relatively long time.
9. When the null is complete, click OK to accept the Lowest Elevator Position (Z
coordinate) position or Cancel to reject the new position (Z coordinate) and
retain the previous one. The screen should close and return to the Configuration
screen.
The system takes the null position Z coordinate and adds 500 µm to it. The new
accepted position is automatically entered into the Lowest Elevator variable
field in the Configuration screen. (See Figure 11.18.)

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Figure 11.18 Configuration Screen - Lowest Elevator Position

The new value for Lowest

Elevator Position. In this case
it is: 53389.85.

Step 10 When an acceptable

change to the Lowest Elevator
Position has been entered, click
on Save Stage Configuration
Preliminary

Changes.

10. In the Configuration screen, if the Lowest Elevator Position (Z coordinate) is

acceptable, click Save Stage Configuration Changes to accept the new value; or,
to retain the previous position, close the screen without saving the changes.

Elevator Focus Speed 11

This is the speed at which the elevator lowers the head toward the sample surface
until it reaches the Proximity Sensor Trip Position. When it reaches the trip position,
it proceeds with the Elevator Slow Focus Speed until Soft Null or Null is reached,
depending on whether the proximity sensor is being used. (See Figure 11.6 on page
11-6 also Figure 11.18.)

Settings Determining Trip Position 11

Š If the proximity sensor is not on, the Elevator Focus Speed is active until
the elevator reaches 1mm above the Lowest Elevator Position, at which
point the Elevator Slow Focus Speed is activated.
Š If the proximity sensor is on, the Elevator Focus Speed is active until the
proximity sensor trip position is reached, at which time the Elevator Slow
Focus Speed is activated.

Elevator Speed 11

The elevator speed in this setting cannot exceed 1000 µm/second if the proximity
sensor is off. Otherwise, if it is on, the speed is 2000 µm/second

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Elevator Slow Focus Speed 11

The Elevator Slow focus Speed is the speed at which the elevator lowers the head
from the Elevator Focus Speed trip position until null is accomplished. (See Figure
11.6 on page 11-6 also Figure 11.18.)

Move Elevator to Safe Position Before Moving Stage 11

This checkbox works in conjunction with the Elevator Safe Position variable. If this
box is checked, the elevator moves the head up to the recorded height in the Elevator
Safe Position variable field. This prevents the stylus from contacting the surface of an
ununiform or tilted sample as the sample moves from one location to another. (See the
checkbox in Figure 11.6 on page 11-6 also Figure 11.18.)

Elevator Safe Position 11

This feature works in conjunction with the Move Elevator to Safe Position Before

Preliminary
Moving Stage checkbox. If there is a check in the box, this variable is used. If there is
no check in this box, the head is not lift up this distance. This is the absolute elevator
height that the system moves the head to every time the stage is moved under the
prescribed circumstance. (See Figure 11.6 on page 11-6 also Figure 11.18.)

NOTE: The smaller the number, the longer it takes for the head to rise
before the move and lower after the move. Set this number carefully if
processing time is a concern, especially in sequence scans.

Safety Interlock On 11

The door to the P-15 has an interlock that should be used to protect the user from
injury and the instrument from damage. When the safety interlock is ON, the
interlock system is active. This protective status prevents the system motors from
engaging if the measurement chamber (stage) door is open. If any of the system stage
or elevator motors are active when the stage door is opened, they are immediately
turned off. They remain inoperative until the door is closed.
A check in the check box shows that the interlock system is ON. Like many of the
Configuration features, this feature requires a security log on to enter and change. It is
View Only to those without the clearance.

CAUTION: the Safety Interlock should not be defeated except for

service requiring the service engineer to operate the motors with the
door open. There are no operator defined functions requiring the door
to be opened during system operation. Only KLA-Tencor trained
service personnel should ever defeat the Safety Interlock System.

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S YSTEM C ONFIGURATION 11

The System Configuration options can only be observed in the System Configuration
dialog box, not edited. The System Configuration screen contains tabbed windows
that allow the user to observe the process and hardware settings for the instrument.
Changes must be performed by KLA-Tencor trained technicians.

Editing the System Configuration 11

1. Click on the System… button at the left side of the Configuration screen. (See
Figure 11.19).

Figure 11.19 Configuration Screen

Step 1 To open the System

Configuration dialog box,
choose System…
Preliminary

The System Configuration dialog box appears. (See Figure 11.20)

Figure 11.20 System Configuration Dialog Box

Configuration…
Dialog Box

Instrument…
Dialog Box

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Instrument Setup Configuration Dialog Box 11

Figure 11.21 Instrument Setup Dialog Box

Step 1 Change the

Software Options by
clicking on them. The
chosen options will have
an X next to them.
Deactivated options
have no X.

Preliminary
The Instrument Setup dialog box provides access to the Software Options activation
box and the Vacuum Options box. The Hardware Options box is a display box that
reports the current Video Hardware and MicroHead type. The following steps detail
the operation and function of each activity box and check box. (See Figure 11.21.)

Software Options 11

1. All of the purchased software options should appear in this box. (See the circled
area in Figure 11.21.) An X before the option name indicates that it has been
enabled. Click on the option to toggle between enabled and disabled. Choose the
options that are to be enabled in the upcoming scanning session. When the
configuration changes are complete, a system warning tells the user that the
system must be restarted to initiate the new options and other changes.
2. The vacuum system is manually operated so no changes are required in the
Vacuum Options field. Click OK to confirm the Software Options selection.
3. The System Configuration window appears again. If no further changes are
required, click OK to confirm the current changes. A window appears advising
the operator that the system must be restarted to activate the newly enabled
software configuration (selected options). The system MUST BE RESTARTED
TO ACTIVATE THE NEW SOFTWARE OPTION CONFIGURATION.

Vacuum Options 11

Vacuum Control Option 1. Vacuum Control contains three options that are presented in the Vacuum
Control drop-down menu: None/Manual; Automatic; and Load/Unload Only. (See
Figure 11.22. It might be necessary to scroll down to see all options.) The P-15
system operates using a manual set of vacuum controls. The only valid option in
the Vacuum Control menu is None/Manual. The vacuum control for the P-15 is a
manual switch on the upper left inner portion of the system door frame.

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Figure 11.22 Vacuum Options

Step 1 Vacuum Control:

Choose how the vacuum
operation is to be
controlled.
Preliminary

Click on the Vacuum Control menu arrow to display the Vacuum Control
options. Select the desired option. (See Figure 11.22.)
Vacuum Feedback Option 2. Vacuum Feedback: Vacuum Feedback is not available in the P-15 system.

Figure 11.23 Vacuum Feedback

Step 2 Vacuum
Feedback: Not for use
with the P-15 system.

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Time Delay Option 3. Time Delay Between 2nd Deskew and 1st Measurement in Sequence (in sec): is
designed to provide enough time, after the last stage movement and before the
beginning of a scan sequence, to dissipate the vacuum holding a sample. This
option is only available for entering a value when the Load/Unload Only option
in the Vacuum Control menu is enabled. (See Load/Unload Only in Step 1 on
page -15 of the Vacuum Options section.)

Figure 11.24 Vacuum Options

Step 3 Time Delay:

Enter the time allowed Step 4 When all
for the vacuum to changes have been

Preliminary
dissipate before making made, click OK.
the first measurement.

To enable the Delay, highlight the number in the box next to Time Delay From 2nd
Deskew to 1st Measurement in Sequence (s):. (See Vacuum Options on page 15.)
Enter the number of seconds that the system must pause for the dissipation of
the vacuum holding the sample. (See Figure 11.24.)
If there is a number in this box, and the field behind it is white, the Delay is
already enabled. If the number is 0, it has no delay effect on the scan. If the 0, or
other number in the box, has a gray background, enable the Load/Unload Only
option in the Vacuum Control menu to activate the field so it can receive a value
(enabled and accessible for change).
4. If no other changes are to be made in the Instrument Setup window, click OK to
confirm the changes.
5. The System Configuration window appears again. If no further changes are to be
made, click OK to confirm the current changes. A window appears advising the
operator that the system must be restarted to enable the new software
configuration (selected options). If there were changes to the Software Options,
the system MUST BE RESTARTED TO ENABLE THE NEW SOFTWARE OPTION
CONFIGURATION.

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Summary Configuration 11

The Summary Configuration is a display of information regarding the current system

configuration. None of the items are configurable in this screen; it is read only. The
items covered in this screen inform the user of the following system configuration
parameters:
Š The Software version and the build number for that version is indicated in the
first field at the to top left of the window, . In this example, the
software version is 6.30.00, and Build number is XX. (See Figure 11.25.)

Figure 11.25 System Configuration Summary Window

Preliminary

Š The Build date for the specific build of the current Software version is presented
in the second field down in the left panel, . The date
and time of the software compilation are recorded for identification of the exact
software build being used on the system.
Š The version of software operating the CIB is presented in the third field down in
the left panel, . In this example, no CIB is present so no software
version is operating the CIB.
Š The system scanning head being used, and the software version operating the
head are presented in the fourth field down in the left panel, .
In this example, the MH2 head is being used and the 115.71.237 version
software is driving it.

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Š Stage mapping can be enabled or disabled. The current status is displayed in the
fifth field down in the left panel, . In this case, Stage Mapping
is disabled. (See also Figure 11.27.) This feature is only available with the
pattern recognition option.
Š The Mechanical assembly serial number of the system is recorded in the first
field of the right panel, .
Š The customer number, assigned for use in conjunction with the serial number to
enable easy access for the user to Customer Services, .
Š The system Model type is displayed in the third field down in the right panel,
. In this case, it is a P-15 profiler.

Registry Maintenance 11

The Registry Maintenance dialog box is provided so that the registry can be either
updated with the new information or reset to the previous registry information. The

Preliminary
registry should only be accessed by KLA-Tencor Field Service Engineers. Certain
calibration information is stored here and must be used by a trained technician who
understands the registry requirements.

Figure 11.26 Registry Maintenance Dialog Box

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Completing the Configuration 11

1. Check the configurable information in the System Configuration box itself.

Š Machine Type: This presents a choice between Desktop and Instrument.
Desktop means that the software is actually being run as a simulation on a
desktop computer (this is primarily for data assessment), not on the
instrument itself. Instrument indicates that the software is being used to run
the instrument. (See Figure 11.27.)

CAUTION: Do not Change the Machine Type information. This

information has been set at installation and changing it renders the tool
useless. It is not possible to restore the system exactly to it previous
state because vital information is lost at conversion.

Š Handler Type: The P-15 does not have a handler. The only option available
is None. (See Figure 11.27.)

Figure 11.27 System Configuration Dialog Box

Preliminary

Step 1 DO NOT CHANGE

THIS SETTING.

Step 2 Click
OK when all
changes
Step 1 There is no handler so have been
the only option is None. made.

Enable Stage Mapping check

box.
Notice that this option is
currently grayed out. This
happens when Stage
Mapping has not yet been
performed on the system.

2. After all necessary changes are made, from the System Configuration dialog box,
and click OK to accept the changes, or Cancel to close this dialog box and return
to the Configuration window with the original settings unchanged. A message
box appears warning the operator to reboot the system if any changes have been
made.
3. To reboot the system, follow the instructions in Turning Off or Resetting the
Instrument on page 11-44.

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KLA-Tencor P-15 User’s Guide Configuration - Safe Area Configuration

S AFE A REA C ONFIGURATION 11

The Stage Limit setting is designed to limit the movement of the stage to the current
setting parameters. The setting defines the mechanical movement limit called the
SAFE AREA. There is also a hardware limit switch that automatically stops the stage
movement if the setting in the Radius box is too large.

NOTE: If the Safe Area is set too large, as would be the situation after
original installation, the die grid application cannot be loaded and the
Die Grid button in the Sequence Recipe Editor is grayed out. To
correct this, set the Safe Area to coincide with the sample being used.

1. Click on Sample… to open the Safe Area Configuration dialog box. (See
Figure 11.28.)

Figure 11.28 Configuration Screen

Preliminary
Step 1 To open the Safe
Area Configuration dialog
box, choose Sample…

The Safe Area Configuration dialog box opens with only the wafer
configuration drop-down menu active.

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2. Click on the menu arrow to access the Sample Configuration menu. (See
Figure 11.29.)

Figure 11.29 Safe Area Configuration - Sample Configuration Menu

Step 2 Click on the menu

arrow to display the Sample Step 4 After the Sample
Configuration menu. Configuration is chosen,
click Set Active to
activate it.
Step 3 Click on the sample
configuration to be used in the
scans.
Preliminary

3. Choose the required sample configuration. (See Figure 11.29.) This changes the
information in the Safe Area configuration display (circled in Figure 11.31).
4. Click on Set Active to activate the new Safe Area configuration. (See
Figure 11.29.)
5. To edit the safe area configuration parameters, click Edit. (See Figure 11.30.)

Figure 11.30 Safe Area Configuration Dialog Box

When the Safe Area

Configuration dialog box
opens, only the sample
configuration drop-down
menu is active.

Step 5 To open up and

edit the safe area
parameters, click on Edit.

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The Safe Area Configuration dialog box safe area can now be edited. (See
Figure 11.31.)
Begin: Changing Safe 6. Change the safe area parameters by highlighting the appropriate box and
Area Values entering the new parameter. (See Figure 11.31.)

CAUTION: DO NOT CHANGE these parameters without consulting a

KLA-Tencor system specialist. Incorrectly set parameters could
seriously damage the system.

Figure 11.31 Safe Area Configuration - Edit Safe Area Values

When the Sample

Step 8 Click Quit Edit when
Configuration is chosen and
the new values have been
set to active, the information in
entered and saved, or to
the Safe Area Configuration
abandon the edit without
display is changed to match

Preliminary
changing the values.
the chosen configuration.

Step 6 To change the

Step 7 When the new values
parameters, highlight the
have been entered in the
parameter to be changed
variable boxes, click Save
and enter the new value.
Edit to apply the values.

Step 9 To exit the Safe

Area Configuration dialog
box, click End Dialog.

7. After the parameters have been entered, click Save Edit to accept the new safe
area. (See Figure 11.31.)
8. If the edit is to be abandoned without accepting the new parameters, click Quit
Edit. (See Figure 11.31.)
9. To exit the Safe Area Configuration dialog box, click End Dialog. (See
Figure 11.31.)

M ACHINE H ISTORY R ECORDER C ONFIGURATION 11

The Machine History Recorder is designed to provide a log of certain system

activities as a process record and for review. The log information is limited to
messages generated by the system. Each of the five message types can be entered in
the log. The log itself can be maintained as a continuous log or can be set to generate
a separate log for each processing session.

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1. From the Configuration screen, choose Machine History Recorder… (See

Figure 11.32.)

Figure 11.32 Configuration Screen

Step 1 To open the Machine

History Recorder Configuration
dialog box, click on Machine
History Recorder…
Preliminary

Create: Recorder File 2. The Recorder File Name variable box allows the user to set another file name for
Name the log that is to be generated. The default is MHRLog.log.
To change the current log name, highlight the current name and enter the new
one. (See Figure 11.33.)
Enable: Recorder Actively 3. The Recorder Actively Recording check box allows the user to enable or disable
Recording the active log entry process. If this feature is enabled, the recorder makes real
time entry of system messages into the designated log. (See Figure 11.33.)

Figure 11.33 Machine History Recorder Configuration Dialog Box

Step 2 To change the file

name for the log, highlight the
current name and enter the
new one.
Step 3 A check in the check
box activates the recorder to
make message entries in the
designated log file.

Step 4 A check in the check

box includes that message
type in the designated log file
when the recorder is active.

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Select: Items To Be 4. In the Items To Be Recorded menu box, ensure that there is a check (9) in each
Recorded check box of the messages that are to be recorded in the log. (See Figure 11.33.)
Set: Maximum number of 5. To set the log file size, click on the menu arrow next to the Maximum number of
items per recorder file items per recorder file variable field. This displays its menu. (See Figure 11.35.)

Figure 11.34 Machine History Recorder Configuration with Drop-Down Menu

Step 5 Click on the menu

arrow to display its menu, then
click on the Maximum Number
of Items Per Recorder File.

Preliminary
6. Choose the number of items from the drop-down menu by clicking on the
number, either 1,000, 10,000, 100,000 or Unlimited. The new number is displayed
in its field. (See Figure 11.35.)

Figure 11.35 Machine History Recorder Configuration Dialog Box

The size of the log file can be

changed by clicking on the
menu arrow and choosing
the size from the menu items.

Step 8 This option

Step 7 This allows the user
allows the user to set
to set the message
the message output to
separation output format.
either an existing log, or
Only one format can be
to start a new log for
chosen. Click on the radio
each scanning session.
button next to the format that
is to be used.

Choose: Output Format 7. The Output Format allows the user to determine what type of spacing is used in
the log to separate the messages. The separator is either a space, a comma or a
tab.
A selected option has a dot in its radio button. To choose an unselected option,
click in the empty radio button next to it.

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Choose: Output Mode 8. The Output Mode allows the user to choose to add new messages to the existing
log file, or put the messages in a new log file for each session.
A selected option has a dot in its radio button. To choose an unselected option,
click in the radio button next to it.

E NABLE N EW O PTIONS (P ROPRIETARY ) 11

In most cases, options can be added to an installed instrument without additional

software or hardware installation. The system software contains all the options. The
options that are enabled and available for use are activated by entering the
configuration code programmed into the Configuration Key during manufacturing.
Using this dialog box and a code provided by the KLA-Tencor Sales representative,
desired options can be enabled for the instrument.

Figure 11.36 Configuration Screen

Preliminary

Step 1 To add new options,

choose New Option… to
open its dialog box.

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KLA-Tencor P-15 User’s Guide Configuration - Export Path Defaults

1. To add an option that is purchased after the system is installed, choose New
Options… to open the New Options dialog box. (See Figure 11.36.)

Figure 11.37 Enable New Options Dialog Box

Step 4 Current Model

Identification No. (MIN). Record
the new number on the form after
the new option is enabled.

Step 2 Enter the number

provided on the Configuration Key
Update Form in these boxes.

Step 3 After the number is

entered, click Program to
enable the option.

Preliminary
2. The option to be added is identified in the software by a series of numbers
similar to that displayed under the Model Identification No: in Figure 11.37.
When the option is purchased from KLA-Tencor, the series of numbers is
provided on the Configuration Key Update Form.
Enter each set of numbers into the provided series of boxes using the dash
between number segments as the indicator to move to the next box. (See
Figure 11.37.)
3. When the number has been entered, click Program to initiate enabling of the
option program. (See Figure 11.37.)
4. Once enabled, the Model Identification No. (MIN) changes. Record the new
MIN on the Configuration Key Update Form for future reference. This is the
number that KLA-Tencor uses for identification of the customer and current
options when ordering software upgrades or new options for the system. (See
Figure 11.37.)
5. After the program is enabled, a system message box might request that the
system be restarted to initialize the new option. Follow the instructions; they
differ depending on the option purchased.

E XPORT P ATH D EFAULTS 11

Export Path Defaults set the default path for exporting scan and sequence recipes and
data.

Data Export Paths Configuration 11

1. Choose Export Paths in the Configuration screen. (See Figure 11.38). The Export
Path Defaults dialog box opens. (See Figure 11.39)

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Figure 11.38 Configuration Screen

Step 1 Click Export Path

Defaults… to open its
dialog box.
Preliminary

2. To set the default path for either the Scan or Sequence recipe and data, use one
of the following:
a. Enter the desired path, starting with the drive and continuing through the
entire sequence, ending with the folder in which the information is to
reside. (See Figure 11.39.)
b. Click Browse… to find the drive and folder in which the information is to
reside. (See Figure 11.39.)
c. Click System Defaults. This sets the path to the one programmed into the
system as displayed in Figure 11.39.

Figure 11.39 Export Path Defaults

Option a. Highlight the current

path, then enter the entire new
path, starting with the drive and
ending with the folder in which
the information is to reside. Step 3 Click
OK to set the
new paths, or
Cancel to exit
and retain the
Option b. Click Browse… to open
old ones.
the explorer window and locate the
drive, file(s) and folder in which the Option c. Click System Defaults to change the
information is to reside. path to the one programmed into the system.

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KLA-Tencor P-15 User’s Guide Configuration - Pattern Recognition Options and Deskew

3. Click OK to save the new values and return to the Configuration window, or click
Cancel to return to the Configuration screen without changing the previous
values. (See Figure 11.39.)

P ATTERN R ECOGNITION O PTIONS AND D ESKEW 11

Introduction 11

Configuration of the Pattern Recognition and Deskew options is performed in the

Pattern Recognition and Deskew Options dialog box, and the Deskew Options dialog
box. Access to the Pattern Recognition and Deskew Options dialog box is through the
Configuration screen’s Pattern Recognition Options… button. (See Figure 11.40.)
Access to the Deskew Options dialog box is through the Deskew menu in the
Sequence Recipe screen. (See Using Groping with Pattern Recognition
on page 7-44.) Notice that, the parameter, “Minimum Match Score” in the Pattern
Recognition dialog box, has not yet been changed to “Lowest Match Score” as it has

Preliminary
in the Deskew Options dialog box. The values set in the Deskew Options dialog box
for each sequence recipe override those set in the Pattern Recognition Options dialog
box.

Figure 11.40 Configuration Screen

Deskew Twice To Align Theta 11

With a single deskew operation, there is no stage rotation to compensate for the small
rotational error in sample placement. A second deskew can be performed to
compensate for this error by enabling this option in the Pattern Recognition and
Deskew Options dialog box. This allows accurate sample rotations within a sequence.

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A second deskew operation is, therefore, sometimes necessary to improve the

accuracy of pattern recognition deskew, in the Pattern Recognition Option. (See
Figure 11.41.)

Figure 11.41 Pattern Recognition and Deskew Options Dialog Box

The variables all deal with

groping functions that are
defined in the these
parameters.

A check in the check box

signals that the second
deskew is enabled. Click in
Preliminary

the empty box to enable

the second deskew.

Using Groping with Pattern Recognition 11

Pattern Recognition options can be set so that the system performs a pattern search if
the pattern is not found within the field of view when the sample is positioned at the
deskew site. This search is called groping.
The three groping parameters are described. (See Figure 11.41).
1. From the Configuration screen, choose Pattern Recognition Options.
The Pattern Recognition and Deskew Options dialog box appears.
(See Figure 11.41)
2. Edit the fields by using the parameters described in Table 11.2.

Table 11.2 Groping Parameters

Parameter Description
Save/Apply Video The lamp brightness setting is important in pattern
Settings recognition. If the lamp brightness is different from when the
original sequence was established, the pattern recognition
images could be difficult for the system to detect. A check in
the Save/Apply Video Settings checkbox ensures that the
lamp brightness is saved with each deskew site pattern so
future scans have the same image view with the same light
for pattern recognition.
Perform Deskew With a single deskew operation, there is no stage rotation to
Twice to Align Theta compensate for the small rotational error in sample
placement. By enabling this option in the Pattern Recognition
and Deskew Options dialog box, a second deskew is
performed to compensate for this error. This allows accurate
sample rotations within a sequence.

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Table 11.2 Groping Parameters (Continued)

Parameter Description
Edge Based Pattern The Edge Based Pattern Recognition option is used for low
Recognition contrast image recognition on a sample surface or where
there is a large surface light variation. If this option is chosen
(with a check in the check box), the normal image contrast
grayscale processing takes place first, then a series of filters
are applied that further contrast and sharpen edges for a
better pattern recognition.
The image data is stored before these filters are applied so
the data is not effected by this option. It is strictly a tool used
for pattern recognition where contrast is low or where light
varies significantly.
If the option is not chosen, only the image contrast grayscale
processing is performed.

Preliminary
NOTE: When this option is enabled, the pattern
recognition process takes longer than if it is not
chosen. The filtering and sharpening procedures
require significant extra time.

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Table 11.2 Groping Parameters (Continued)

Parameter Description
Number of Groping This parameter controls how much of the area around the
Retry Layers deskew site is searched looking for the pattern. Each layer
consists of a square area constructed by evenly surrounding
the deskew site with squares the size of the camera field of
view. (See Figure 11.42.)

Figure 11.42 Groping Retry Layers

Groping 1st Retry Layer 2nd Retry Layer
disabled searches for 8 searches for
searches only more square 24 more square areas
camera field of areas
view
Preliminary

3rd Retry Layer searches for 48 more squares; 4th Retry Layer
searches for 80 more squares. It stops after the 4th try.

Options in the drop-down menu are: (See Figure 11.43.)

Š None (the default)
Š 1 (8 Sites)
Š 2 (24 Sites)
Š 3 (48 Sites)
Š 4 (80 Sites)
NOTE: It takes 10 seconds to move the stage,
null the stylus, and search one such area; 8
search sites (1 layer of retry) takes as long as 90
seconds; and 24 sites (2 layers) takes as long as
250 seconds, and so on.
First, the deskew site field of view is searched. If the pattern is
not found, the stage moves to one corner of the next layer
and searches the field of view there. This continues until the
pattern is found or until all search sites have been examined.
If the pattern is still not found, the stage moves to one corner
of the next layer and continues.

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Table 11.2 Groping Parameters (Continued)

Parameter Description
Minimum Match This parameter allows adjustment of the threshold at which
Score the pattern recognition system concludes that it has found a
candidate for the desired deskew site.
(Renamed in Lowest Match Score is used to compare all the groping
Deskew Options positions in the given groping levels. Once the groping stops
dialog box to: (assuming that the Minimum Score to Stop Groping is not
Lowest Match Score) found) the highest score achieved, among those scores that
qualified for Lowest Match Score acceptance, is chosen as
the search pattern (model). This score must be smaller than
the Minimum Score to Stop Groping. Allowed values range
between 20 to 100%; the default is 65%.
If the pattern does not show up in the original field of view, the
search begins, and if any images score greater than the
Lowest Match Score, the pattern recognition system
concludes that the best of these is the correct deskew site

Preliminary
(unless it finds a match equal to or greater than the Maximum
Score and stops groping). Allowed values range from 20 to
100%; the default is 65%.
For Desktop versions, use the minimum value, 20.
Minimum Score To If the pattern recognition system is groping to find the desired
Stop Groping pattern, sometimes the matching pattern is found with little
ambiguity. If a score equal to or better than the Minimum
Score to Stop Groping occurs, the searching process stops
and the deskew site is placed. Allowed values range from 20
to 100%; the default is 70%.
For Desktop versions, use the minimum value, 20.
If no matches are found that are as good as this setting, the
search continues until the retry layer areas are all searched. If
this occurs, the best score above the Minimum Match Score
setting determines the placement of the deskew site.

Figure 11.43 Pattern Recognition and Deskew Options Dialog box

Step 3 The drop-down menu for

Number of Groping Retry
Layers displays the number of
tries and the number of sites
associated with the groping level.

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Setting: Number of 3. Click on the menu arrow to display the Number of Groping Retry Layers
Groping Retry Layers drop-down menu. (See Figure 11.43 and Table 11.2.)
4. From the drop-down menu, choose the number of groping layers (sites) to be
searched in pattern recognition attempts. (See Figure 11.43 and Table 11.2.)
Setting: Minimum Match 5. Highlight the current value in the variable box associated with Minimum Match
Score (%) Score (%) and enter the new percentage value. Values can be from 20-100%.
Default is 65%. (See Figure 11.44.)

Figure 11.44 Pattern Recognition and Deskew Options Dialog Box

Step 5 Highlight the current

percentage and enter the new
one. Values must be between 20
and 100%.

Step 7 For low contrast images

or large surface light variations,
enable the Edge Based Pattern Step 9 When
Preliminary

Recognition option. all changes are

complete, click
OK to apply
Step 8 To save lamp brightness
values.
settings for pattern recognition
consistency, choose this option.

Setting: Minimum Score to 6. Highlight the current value in the variable box associated with Minimum Score to
Stop Groping (%) Stop Groping (%) and enter the new percentage value. Values can be from
20-100%. Default is 70%. (See Figure 11.44 and Table 11.2.)
Selecting: Edge Based 7. The Edge Based Pattern Recognition option is used for low contrast image
Pattern Recognition recognition on a sample surface or where there is a large surface light variation.
If the option is not chosen, only the image contrast grayscale processing is
performed.
To select this option, ensure that there is a check in the check box. Click in the
empty check box to place a check (9) in it. (See Figure 11.44.)

NOTE: When this option is enabled, the pattern recognition process

takes longer than if it is not chosen. The filtering and sharpening
procedures require significant extra time.

Selecting: Save/Apply 8. The Save/Apply Video Settings option saves the lamp brightness settings so
Video Settings image processing for pattern recognition is the same when the same recipe is
used for the scan or sequence.
To select this option, ensure that there is a check in the check box. Click in the
empty check box to place a check (9) in it.
9. Click OK to set the options and close the dialog box. (See Figure 11.44.)

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KLA-Tencor P-15 User’s Guide Configuration - Sequence Execution Options

S EQUENCE E XECUTION O PTIONS 11

This option is only for those systems that have the Sequence Option as part of the
system package. It automatically saves sequence data under a lot ID and/or operator
ID. To enable and define this option, the Sequence Execution Option must be set to
display an ID information prompt before each sequence.

Open Sequence Execution Options Dialog Box 11

Choose Sequence Execution Option from the option buttons in the Configuration
screen. (See Figure 11.45).

Figure 11.45 Configuration Screen

Step Click Sequence

Preliminary
Execution Option… to
open its option box.

The Sequence Execution Options dialog box appears. (See Figure 11.49.)

Figure 11.46 Sequence Execution Options Dialog Box

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Enable Sequence ID Prompts 11

The first combo box in the Sequence Execution Options dialog box contains options
for operator identification. (See Figure 11.47.)

Figure 11.47 Sequence Prompts Combo Box

The first item, Prompt for Lot ID Before Sequence Execution, requires the operator to
enter a Lot ID code in the Lot ID field before the sequence can proceed. If there is a
check in the checkbox, the word (Required) appears next to the ID field. (See
Figure 11.48.) If (Required) is not present, then the sequence can be started without
entering the ID.
The second item, Prompt for Operator ID before Sequence Execution, requires the
Preliminary

operator to enter an operator ID code before the sequence can proceed. If there is a
check in the checkbox, the word (Required) appears next to the ID field. (See
Figure 11.48.) If (Required) is not present, then the sequence can be started without
entering the ID.

Figure 11.48 ID Input Dialog Box

If the word (Required) is

present on either one of
the ID fields, that field
must be filled in for the
sequence to launch.

1. To choose one or both of the listed options, put a check (9) in its check box.
(See Figure 11.49.)
Before the sequence begins, each option is displayed in a dialog box. If the
option was chosen in the options dialog box, that option must be responded to
by the operator before sequence processing starts. (See Figure 11.48.)

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Figure 11.49 Sequence Execution Options

Step 2 Click OK
Step 1 Click on the empty
to accept the
check box to put a check in
changes or
the box and enable the option.
Cancel to retain
previous settings.

Preliminary
2. Click OK to save the new settings and return to the Configuration screen, or click
Cancel to return to the Configuration screen retaining the previous settings.

View Scan Display Settings 11

The View Scan Display Settings are designed to give the operator the opportunity to
choose which view is presented in the View Scan screen during a sequence scan. If
the Show Measurement Sites option is chosen, then the operator has the option to
view either the scan site on the sample surface or the site map showing the individual
scan sites for the current sequence. (See Figure 11.50.) See Show Measurement Site
During Sequence Run on page 6-21 for explanation and examples of the settings.

Figure 11.50 View Scan Display Settings

1. Click in the empty Show Measurement Sites checkbox to ensure that the operator
can view both the measurement site map and the scan site by toggling between
them in the View Scan screen during a sequence. (See Figure 11.50.)
The Low Mag. Camera is automatically chosen for the scan site view.
2. Click OK to accept the changes and close the dialog box. (See Figure 11.49.)

Automation Settings 11

Automation settings found in this dialog box are not functional in the P-15 system.
These settings are used with systems having a handler and cassettes that have slot
map criteria available for the system. The checkboxes might appear to be enabled but
there is no affect on the system. (See Figure 11.51.)

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 Configuration - Teach Manual Load Position KLA-Tencor P-15 User’s Guide

Figure 11.51 Automation Combo Box in Sequence Execution Options

TEACH M ANUAL L OAD P OSITION 11

This procedure sets the manual load position of the stage and elevator. The Manual
Load position can be changed by teaching the new position.

Teach Procedure 11

1. To open the Teach Manual Load Position screen, click on the Manual Load
Preliminary

Position… button on the left side of the Configuration screen. (See

Figure 11.52.)

Figure 11.52 Configuration Screen - Manual Load Position

Step 1 To open the Teach

Manual Load Position
screen, click Manual Load
Position…

2. The Teach Manual Load Position screen appears. (See Figure 11.53.) The stage
moves to the current Manual Load position. Using the arrow and rotation
buttons on the tool bar, move the sample to the desired position. It is also
possible to click the destination point in the wafer map on the XY View screen.

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KLA-Tencor P-15 User’s Guide Configuration - Teach Manual Load Position

Figure 11.53 Teach Manual Load Position

Step 2 Use the arrow

buttons to move the stage to
the desired Manual Load
position.

3. If desired, adjust the Z coordinate by raising the head with the ELEV button. Or,
lower it using the FOCUS to start the head lowering and the ESC key on the key
board to stop it at the desired height. (See Figure 11.54.)

Figure 11.54 Teach Manual Load Position Screen

Preliminary
Step 4 Check the
Z-coordinate, observing the
stylus to see if it is high enough.
Click ELEV to raise the Head if
necessary. Use FOCUS (lower)
and the ESC key (stop Step 5 When the
movement - ignore error coordinates are set,
message) to position it. click OK to accept the
changes or Cancel to
retain the old ones.

4. If desired, adjust the Z coordinate by raising the head with the ELEV button. Or,
lower it using the FOCUS to start the head lowering and the ESC key on the key
board to stop it at the desired height. (See Figure 11.54.)
5. Click OK to save the new position, or click Cancel to keep the original values
and return to the Configuration screen. (See Figure 11.54.)

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 Configuration - Proximity Sensor Configuration KLA-Tencor P-15 User’s Guide

P ROXIMITY S ENSOR C ONFIGURATION 11

The proximity sensor is responsible for signalling when the stylus is in near proximity
to the sample surface. The proximity sensor activity has configurable parameters that
can be accessed in the Proximity Sensor Configuration dialog box.

Configuration Procedure 11

1. To open the Proximity Sensor Configuration dialog box, click Proximity Sensor…
at the bottom of the Configuration screen menu buttons. (See Figure 11.55.)

Figure 11.55 Configuration Screen - Proximity Sensor

Preliminary

Step 1 Click Proximity Sensor…

to open the Proximity Sensor
Configuration dialog box.

The Proximity Sensor dialog box (see Figure 11.56) is divided into four
sections:
Š Options
Š Proximity Sensor to Camera Offsets
The options and the variables within each one are discussed in the following
sections.

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Figure 11.56 Proximity Sensor Configuration

Options

Proximity Sensor to Camera

Offsets

Autofocus/Surface Track

Preliminary
Thresholds – N/A for the P-15
system.

Autofocus/Surface Track
Disable Threshold. N/A for the
P-15 system.

Options 11

A check in the checkbox next to each option indicates that it is enabled.

Š Pole Tip Recession Nulling: The MicroHead II optics are perpendicular to, and
focus directly on, the sample surface. When the instrument is to scan a very
small sample, the sample stage moves the sample from under the optics focal
point to a position under the stylus. When this options is enabled, the proximity
sensor is not used in the focusing operation. The stylus is lowered and nulls
directly on the small sample.
Š Use Proximity Sensor: This option is active and can be changed to meet
processing requirements. Before enabling this option, the Pole Tip Recession
Nulling must be disabled. With this option enabled (a check in the check box),
the Proximity Sensor signal causes the system to slow the head descent at a
preset distance from the sample surface, then stops the head before the stylus
touches the surface.
Š Enable Proximity Sensor Offset: This option is used to prevent the stylus from
hitting the sample too hard in situations where the proximity sensor is out of
position to detect the sample surface; e.g., beyond the edge of the sample. This
option should be used for Scan Position Offset and Step Height Calibrations.
When this option is enabled, the following sequence of events occurs during the
nulling procedure:
a. The sample stage moves the sample under the proximity sensor.
b. The head is lowered until the proximity sensor detects the sample surface,
causing the head to stop.

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c. The sample stage moves the sample under the stylus.

d. The head is lowered until the stylus nulls on the sample surface.
1. In the Options section of the Proximity Sensor Configuration dialog box, put a
check (9) in the check box of every option that is to be used. (See
Figure 11.56.)
2. If no other changes are to be made in the Proximity Sensor Configuration dialog
box, click OK to accept the configuration. (See Figure 11.56.)

Proximity Sensor to Hi Mag Camera Offsets 11

CAUTION: Do not change this number unless told to by an authorized

KLA-Tencor representative.

This is a hardware parameter. At manufacturing, it is precisely set according to the

distance from the Proximity Sensor to the Hi Mag Camera. This number is used by
the software to perform certain centering functions. Currently this number is set at
0 in the Y-axis and -12000 in the X-axis. (See Figure 11.56.)
Preliminary

P ASSWORD – M ID -S ESSION C ALIBRATION OR C ONFIGURATION A CCESS 11

Introduction 11

If a system is currently being used by an operator who is not logged in as a member of

the Administrators, P_Configuration, P_Calibration, or P_AdvCalibration security
group, most of the Calibration and Configuration screen functions are not available to
the operator. This feature provides an operator, who has a valid password, the ability
to enter the Calibration or Configuration screen procedures in the current session
without the necessity of exiting and restarting the Profiler software under the required
security level.

Accessing the Maintenance Functions 11

To access the Calibration or Configuration functions, the user must enter the
Authorize Maintenance dialog box from either the Configuration or Calibration
screen, depending on which screen’s functions are to be accessed. If a calibration is to
be performed, enter through the Calibration screen. If configuration changes are to be
made, enter through the Configuration screen. Access is granted only as long as the
user stays in the Configuration or Calibration screen. Access is terminated when the
user clicks on one of the other Program icons.

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1. In the Calibration or Configuration screen, click on File to display its menu. (See
Figure 11.57.)

Figure 11.57 File Menu for Choosing Authorize Maintenance

Step 1 Click on File to Step 2 Choose Authorize

display its menu. Maintenance…

2. From the File menu choose Authorize Maintenance… This opens a Authorize
Maintenance dialog box. (See Figure 11.57.)

Figure 11.58 Authorize Maintenance Dialog Box

Preliminary
3. Enter the password required for access to the Calibration or Configuration
screen. (See Figure 11.58.)
4. Click OK when the password has been entered. (See Figure 11.58.)
If the valid password was correctly entered, access is granted to the Calibration or
Configuration functions until the user exits the accessed screen.

Changing the Maintenance Password 11

Introduction 11

A member of the Administrators security group can change the Maintenance

Password. Once changed, the same password is used for entrance to either the
Configuration or Calibration screen functions.

Choosing a Password 11

Choose a password with the following parameters in mind:

Š It can only have alphabetic and/or numeric characters.
Š It is case sensitive.
Š It must have between 6 and 14 characters.

Password Change Procedure 11

Use the following procedure to change the password.

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 Configuration - Loss of Power KLA-Tencor P-15 User’s Guide

1. From either the Configuration or Calibration screen click on File to display its
menu. (See Figure 11.59.)

Figure 11.59 File Menu for Change Password… Dialog Box Access

Step 1 Click on File to Step 2 Choose Change

display its menu. Password…

2. From the File menu choose Change Password… This opens the Change
Password dialog box. (See Figure 11.59.)

Figure 11.60 Change Password Dialog Box

Step 4 Enter the

Step 3 Enter password
password here
here first.
Preliminary

again.

Step 5 Click OK only after

both password entries have
been completed.

3. Enter the new password first in the New maintenance password field. Do not
click OK.
4. Enter the identical password into the Confirm new password field. (See
Figure 11.60.)
5. Click OK. If both passwords were the same, the system receives it and it
becomes the new password for both screens.

L OSS OF P OWER 11

The KLA-Tencor profiler should be protected from power loss.

Š The head of the hard disk drive auto-parks at power loss so that the hard disk
drive does not suffer damage. However, if power returns and cycles quickly on
and off two or three times within 100 to 200 ms, there is a remote possibility of
a head crash and permanent damage.
Š If power failure is a common occurrence, use an Uninterruptable Power Supply
(UPS) device that supplies power for 30 minutes to provide time for an orderly
shutdown.

TURNING O FF OR R ESETTING THE I NSTRUMENT 11

When powering down the instrument, use the following procedure to ensure against
loss of data and recipes.

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KLA-Tencor P-15 User’s Guide Configuration - Turning Off or Resetting the Instrument

Exit to Windows 1. Close all screens up to a program screen, one with the icons at the right side.
(See Figure 11.61.)
2. Click on the control button at the top left of the screen to display it menu. (See
Figure 11.61.)
ALTERNATIVE: Click on the Exit button at the top right corner of the screen.
Then proceed to Step 4. (See Figure 11.61.)
3. Choose Close from the drop-down menu. (See Figure 11.61.)

Figure 11.61 Closing the Profiler Application Using the Control Button

ALTERNATIVE: Click on
the Exit button to close
the application.

Step 2 To display its menu,

click its Control Button.

Preliminary
Step 3 Click on Close from
the drop-down menu.

4. A Message box is displayed asking, “Are you sure you want to exit the
Profiler?” Click on Yes to exit. (See Figure 11.62.)

Figure 11.62 Profiler Container for Profiler Shutdown

Step 4 Click on Yes to exit the

Profiler application.

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To log off to shut down the 5. If exiting from the program so that another user can log on, click on the Start
system button at the bottom left of the screen to display its menu. (See Figure 11.63.)

Figure 11.63 Start Menu

Preliminary

Step 6 Click on Shut Down…

to display its dialog box.

Step 5 Click on Start

to display its menu.

6. Choose Shut Down… from the menu. (See Figure 11.63.)

This displays a dialog box that presents three options. (See Figure 11.64.)

Figure 11.64 Shut Down Windows Dialog Box

Step 7 To shut down the

computer, click in the radio
button next to Shut down the
computer?

Step 8 Click Yes to initiate the

shut down procedure for the
computer.

To Shut Down the System: 7. Choose, “Shut down the computer?” Figure 11.61
8. Click on Yes to initiate the shut down procedure. (See Figure 11.64.)
9. After the computer has closed all applications and written information to the
system drive, it displays a message box which says, “It is now safe to shut down
your computer.”
10. Turn off the computer. The system is shut down.
To Restart the Computer 11. If rebooting the system (without powering down the system), from the Shut
Down Windows dialog box (see Figure 11.64), click on Restart the computer?

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KLA-Tencor P-15 User’s Guide Configuration - Installing a Precision Locator

12. Click Yes at the bottom of the dialog box to initiate the reboot.

I NSTALLING A P RECISION L OCATOR 11

Various precision locators are available to provide for exact positioning of a sample
relative to a fixed reference point. See Standard Precision Locators on page 11-54
and Optional Precision Locators on page 11-54 for graphic representations of the
available precision locators.
The stage table is removable so the precision locators can be bolted directly to the
stage. Disc locators bolt directly to the stage table.

Standard Precision Locators 11

CAUTION: Nominally, the top surface of a standard precision locator

should be at the same level relative to the measurement head as the
top surface of the stage tabletop. Still, it is a good idea to confirm the

Preliminary
accuracy of the setting for Lowest Elevator Position when a precision
locator is installed. The stylus can be damaged if the existing settings
are incorrect. Refer to the procedures in Teach Lowest Elevator
Position on page 11-10 for details.

Installing the Precision Locator: 11

1. In the Catalog screen, choose Scan Recipe to display the scan recipes in the site
list area. (See Figure 11.65.)

Figure 11.65 Catalog - Scan Recipe Screen

Step 1 When the screen

opens, click on Scan Recipe
to display the scan recipes in
the site list area.

Step 2 With a recipe

highlighted, click the XY icon
to open the XY View screen.

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2. With a recipe highlighted, click on the XY icon in the tool bar to open the XY
View screen. (See Figure 11.65.) The XY View screen opens. (See
Figure 11.66.)

Figure 11.66 XY View Screen

Step 4 If the head did not move Step 3 Click on MAN

up during the MAN LOAD LOAD to move the head
procedure, click the ELEV button up and move the stage out
as many times as necessary to to the stage door.
move the stage up to a safe
height for removing the chuck.
Preliminary

3. Click on MAN LOAD to move the head up and bring the stage out to the stage
door. (See Figure 11.66.)
4. If the head does not move up during the MAN LOAD procedure, click the ELEV
button (see the Tool Bar in Figure 11.66) as many times as necessary to move
the head to a high enough position so that contact with the stylus can be avoided
when removing the stage table.
5. Open the door.

CAUTION: If Interlock is ON, do not open the door before moving

the stage into position or the system might shut down due to the safety
interlock activation on the stage door.

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6. Remove the three screws (see Figure 11.67) that hold the stage table to the stage.
Remove the table. It might be necessary to rotate the stage using the rotational
arrow buttons (in the tool bar) for easier access to the screws.

Figure 11.67 Lightweight Stage Table Top

Screw #1 securing Locator pin

the stage table to (underside of
the stage. the table)

Screw #2 securing
Screw #3 securing
the stage table to

Preliminary
the stage table to
the stage.
the stage.

7. Place the precision locator on the stage so that the three holes line up with the
mounting holes. A pin on the bottom of the locator fits into the groove on the
stage just to the right of the 12 o’clock position as seen from above. (See
Figure 11.68.)

Figure 11.68 Precision Locator

Locator mounting screw #1

Wafer stops
Locator pin
(underside of
Vacuum holes the table)

Locator mounting screw #2 Locator mounting screw #3

Gap for the wafer wand

Press down on the precision locator to slide the pin into the groove. When
positioned as shown in Figure 11.68, the precision locator is in the “0” theta
position (that is, theta equals 0 degrees).

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8. Screw in the mounting screws to secure the locator to the stage. (See
Figure 11.68.)

Three Point Disk Locator 11

The KLA-Tencor three point disk locator for profilers (Part No. 304247) is shown in
Figure 11.69.

Figure 11.69 Three Point Disk Locator

Preliminary

The current locators are

situated at the 95 mm
position on the Three Point
Disk Locator.
Disk Supports. The
support is illustrated
in Figure 11.74.

The three point Disk Locator has three disk supports that can be situated to support
five sizes of disk: 48 mm, 65 mm, 84 mm, 95 mm, and 130 mm disks.

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KLA-Tencor P-15 User’s Guide Configuration - Installing a Precision Locator

Installing the 3-point Disk Locator on the Stage: 11

1. In the Catalog screen, choose Scan Recipe to display the scan recipes in the site
list area. (See Figure 11.70.)

Figure 11.70 Catalog - Scan Recipe Screen

Step 1 When the screen

opens, click on Scan Recipe
to display the scan recipes in
the site list area.

Step 2 With a recipe

Preliminary
highlighted, click the XY icon
to open the XY View screen.

2. With a recipe highlighted, click on the XY icon in the tool bar to open the XY
View screen. (See Figure 11.71.) The XY View screen opens. (See
Figure 11.71.)

Figure 11.71 XY View Screen

Step 4 If the head did not move Step 3 Click on MAN

up during the MAN LOAD LOAD to move the head
procedure, click the ELEV button up and move the stage out
as many times as necessary to to the stage door.
move the stage up to a safe
height for removing the chuck.

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3. Click on MAN LOAD to move the head up and bring the stage out to the stage
door. (See Figure 11.71.)
4. If the head does not move up during the MAN LOAD procedure, click the ELEV
button (see the Tool Bar in Figure 11.71) as many times as necessary to move
the head to a high enough position so that contact with the stylus can be avoided
when removing the stage table.
5. Open the door.

CAUTION: If Interlock is ON, do not open the door before moving

the stage into position or the system might shut down due to the safety
interlock activation on the stage door.

6. Remove the three screws (8-32×3/8 in.) that hold the stage table to the stage.
Remove the table.
7. The Three Point Disk Locator has a base plate (see Figure 11.72) that has three
holes for mounting it in place of the stage table. Place the disk locator base plate
on the stage so that the three mounting holes line up.
Preliminary

8. Insert the three mounting screws and tighten. (See Figure 11.72.)

Figure 11.72 Three Point Disk Locator Base Plate

9. Place the Three Point Disk Locator on its base plate and screw in the center hub
screw. (See Figure 11.73.) Be sure that the washer is between the screw and the
Three Point Disk Locator.

Figure 11.73 Center Hub Screw

10. Close the door

PINCH POINT: Keep fingers, hands, and other body parts clear of the
closing door to prevent a pinch injury.

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CAUTION: If Interlock is ON, do not open the door before moving

the stage into position or the system might shut down due to the safety
interlock activation on the stage door.

11. Click MAN LOAD to move the stage back under the measurement head
The Lowest Elevator Position is set at the factory to allow the stylus to be nulled on
the stage surface for both the standard stage and a precision locator. When a wafer
locator is installed, a new lowest elevator position must be redefined, and that
position entered into the stage configuration file. See Teach Lowest Elevator Position
on page 11-10 for details.

Adjusting the Disk Size: 11

1. Remove the screws (2-56×1/2 in.) securing each of the three disk supports.
2. Position each disk support to the required disk size. The five disk sizes are
identified by concentric circles on the locator surface, with the representative

Preliminary
disk size printed over each circle. The are three disk support mounting holes
associated with each disk size. (See Figure 11.69.)
3. Insert the screws and loosely tighten, leaving some play in the position of each
disk support. Place a representative disk on the supports and adjust them so that
the disk is supported snugly between the three supports. The final positioning of
the disk should resemble that illustrated in Figure 11.74.

Figure 11.74 Disk Support for the Three Point Disk Locator

Disk support The disk should be Disk, supported by the

surface. supported as shown on all Disk Support.
three supports.

4. When the three disk supports are adjusted, tighten the three disk support screws
and recheck the disk position. Leave enough clearance to take into account
manufacturing tolerances so that all disks of this size fit. Try to get the disk
centered around the central hub of the locator.

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Precision Locators - Description 11

Precision locators are fixtures that provide for exactly positioning of a sample relative
to a fixed reference point. KLA-Tencor provides the following types of precision
locators:

Standard Precision Locators 11

These locators provide positioning for square samples, wafers with flats, and notched
wafers. Instruments are shipped with a choice of the standard stage table or one of the
locators in this list. (See Figure 11.75 through Figure 11.80.)
Standard precision locators include:
Š 4-in. for Wafer with Flat/Square Substrate
Š 4-in. for Wafer with Notch
Š 5-in. for Wafer with Flat/Square Substrate
Š 5-in. for Wafer with Notch
Š 6-in. for Wafer with Flat/Square Substrate
Preliminary

Š 6-in. for Wafer with Notch

Optional Precision Locators 11

These locators allow positioning of less common sizes of square substrates and
wafers. They bolt on top of the standard stage table.

NOTE: These locators must be purchased separately.

Optional precision locators include (See Figure 11.81 through Figure 11.88)
Š 2-in. for Wafer with Flat/Square Substrate
Š 3-in. for Wafer with Flat/Square Substrate
Š 82-mm for Wafer with Notch
Š 4-in. for Wafer with Flat/Square Substrate
Š 5-in. for Wafer with Flat/Square Substrate
Š 5-in. for Wafer with Notch

Optional Disk Precision Locators 11

These locators are used for holding hard disk samples to the stage. They bolt on top of
the standard stage table. Note: These locators have to be purchased separately.
Instructions for installing precision locators can be found in Installing the
Precision Locator: on page 11-47,

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Optional disk precision locators include (See Figure 11.89)

Š 48-mm for Disk
Š 65-mm for Disk
Š 95-mm for Disk
Š Adjustable Three Point Disk Locator (48 mm, 65 mm, and 95 mm)

Optional Stress Precision Locators 11

These locators are used for holding wafers in place, suspended at three points, for
measurement of stress related to a deposition on the wafer surface. The Manual Load
Stress Locator is attached to the stage table. The Adjustable Stress Locator is mounted
to its own base place that is secured to the stage.

Preliminary

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Optional, Stress Locator - Manual Load for 200 mm Wafers (see Figure 11.90).

Figure 11.75 For 4 in. Wafer w/Flat or Square Substrate Figure 11.76 For 4 in. Wafer with Notch

Locator Pin

5.3 in.
5.2 in.
Preliminary

Figure 11.77 For 5 in. Wafer w/flat or Square Substrate Figure 11.78 For 5 in. Wafer with Notch

Locator Pin
5.8 in.
5.7 in.

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Figure 11.79 For 6 in. Wafer w/flat or Square Substrate Figure 11.80 For 6in. Wafer with Notch
Locator Pin
6.9 in.

7.0 in.

Preliminary

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O PTIONAL P RECISION L OCATORS 11

Figure 11.81 For 2 in. Wafer w/Flat or Square Substrate Figure 11.82 For 3 in. Wafer w/Flat or Square Substrate
1.7 in.

2.8 in.
Preliminary

Figure 11.83 For 4 in. Wafer w/Flat or Square Substrate Figure 11.84 For 4 in. Wafer with Notch

Locator Pin
3.7 in.

3.7 in.

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Figure 11.85 For 5 in. Wafer w/Flat or Square Substrate Figure 11.86 For 5 in. Wafer with Notch

Locator Pin
4.6 in.

4.6 in.

Preliminary
Figure 11.87 For 6-in. Wafer w/Flat or Square Substrate Figure 11.88 For 82-mm Wafer with Notch

Locator Pin
5.5 in.

3.1 in.

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Figure 11.89 Adjustable, for 48, 65, and 95-mm Disks Figure 11.90 Stress Locator - Manual Load
Disk Disk Notch pin
Support Support Locator pin

Mounting
screw holes.

Positioning
plate
Preliminary

Center
Reference Wafer support Wafer wand
Disk
Support bearings gap

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 12
CALIBRATIONS Chapter 12

12

I NTRODUCTION 12

This chapter describes:

Š Password – Mid-Session Calibration or Configuration Access on page 12-1
Š Applied Force Calibration on page 12-3
Š Video Calibration on page 12-5
Š Scan Position Offset Calibration on page 12-10
Š Scan Position Offset Calibration on page 12-10
Š Step Height Calibration on page 12-28

P rel i mi n a ry
Š Level Calibration on page 12-41
Š Level Calibration on page 12-41
Š Standard Calibration Matrix on page 12-51

P ASSWORD – M ID -S ESSION C ALIBRATION OR C ONFIGURATION A CCESS 12

Introduction 12

If a system is currently being used by an operator who is not logged in as a member of

the Administrators, P_Configuration, P_Calibration, or P_AdvCalibration security
group, most of the Calibration and Configuration screen functions are not available to
the operator. This feature provides an operator, who has a valid password, the ability
to enter the Calibration or Configuration screen procedures in the current session
without the necessity of exiting and restarting the Profiler software under the required
security level.

Accessing the Maintenance Functions 12

To access the Calibration or Configuration functions, the user must enter the
Authorize Maintenance dialog box from either the Configuration or Calibration
screen, depending on which screen’s functions are to be accessed. If a calibration is to
be performed, enter through the Calibration screen. If configuration changes are to be
made, enter through the Configuration screen. Access is granted only as long as the
user stays in the Configuration or Calibration screen. Access is terminated when the
user clicks on one of the other Program icons.

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1. In the Calibration or Configuration screen, click on File to display its menu. (See
Figure 12.1.)

Figure 12.1 File Menu for Choosing Authorize Maintenance

Step 1 Click on File to Step 2 Choose Authorize

display its menu. Maintenance…

2. From the File menu choose Authorize Maintenance… This opens a Authorize
Maintenance dialog box. (See Figure 12.1.)

Figure 12.2 Authorize Maintenance Dialog Box

Preliminary

3. Enter the password required for access to the Calibration or Configuration

screen. (See Figure 12.2.)
4. Click OK when the password has been entered. (See Figure 12.2.)
If the valid password was correctly entered, access is granted to the Calibration or
Configuration functions until the user exits the accessed screen.

Changing the Maintenance Password 12

Introduction 12

A member of the Administrators security group can change the Maintenance

Password. Once changed, the same password is used for entrance to either the
Configuration or Calibration screen functions.

Choosing a Password 12

Choose a password with the following parameters in mind:

Š It can only have alphabetic and/or numeric characters.
Š It is case sensitive.
Š It must have between 6 and 14 characters.

Password Change Procedure 12

Use the following procedure to change the password.

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1. From either the Configuration or Calibration screen click on File to display its
menu. (See Figure 12.3.)

Figure 12.3 File Menu for Change Password… Dialog Box Access

Step 1 Click on File to Step 2 Choose Change

display its menu. Password…

2. From the File menu choose Change Password… This opens the Change
Password dialog box. (See Figure 12.3.)

Figure 12.4 Change Password Dialog Box

Step 4 Enter the

Step 3 Enter password
password here

Preliminary
here first.
again.

Step 5 Click OK only after

both password entries have
been completed.

3. Enter the new password first in the New maintenance password field. Do not
click OK.
4. Enter the identical password into the Confirm new password field. (See
Figure 12.4.)
5. Click OK. If both passwords were the same, the system receives it and it
becomes the new password for both screens.

A PPLIED F ORCE C ALIBRATION 12

Windows - Applied Force Calibration Procedure 12

Check the Calibration Introduction 12

Matrix on page 12-51 for

possible interaction with Applied force is the force between the stylus tip and the sample when the stylus is in
other calibrations. contact with the sample. Mechanical changes in the stylus arm can affect calibration
settings.

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Applied Force Calibration Procedure 12

1. Double-click on the Calibration icon. (See Figure 12.5.)

Figure 12.5 Catalog Screen - Choose Calibration

Step 1 Double-click on the

Calibrations icon to open
the Calibrations screen.
Preliminary

2. Click on the Applied Force button in the Calibration screen. (See Figure 12.6.)
The Applied Force Calibration dialog box is displayed. (See Figure 12.7.)

Figure 12.6 Calibrations Screen

Step 2 Click on Applied

Force to display the Applied
Force Calibration window.

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3. Click on Calibrate to begin the calibration procedure.

The system performs the calibration and displays the results in the three fields of
the Applied Force Calibration dialog box. (See Figure 12.7.)

Figure 12.7 Applied Force Calibration Window

Step 3 Click on Calibrate Step 4 When the

to begin the Applied Force calibration is complete,
Calibration. click on Save/Close to
save the calibration
results of the Applied
Force Calibration.

4. Click on Save/Close button to save the calibration results. (See Figure 12.7.)
OR, click on Cancel to retain the old calibration results.

Preliminary
CAUTION: Do Not Manually Change any of the numbers in the fields.

VIDEO C ALIBRATION 12

Check the Calibration Introduction 12

Matrix on page 12-51 for

possible interaction with Video calibration ensures that the stage position is correlated to the video image on
other calibrations. the screen. The calibration calculates the video pixels/micron. This means that when a
position on the video screen is clicked, that position moves to the screen crosshair.
This calibration works two different ways depending on whether or not the P-15
system has the Pattern Recognition option. Both calibration procedures are presented.
In this procedure, the Stylus Alignment Tool, Stage Mapping Wafer, or another
sample with distinctive features can be used. The Stylus alignment Tool is
recommended. The directions in this procedure include loading a sample, like the
Stylus Alignment Tool (KLA-Tencor part number 219517).

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Video Calibration Procedure 12

1. Click on the Calibration icon. (See Figure 12.8.) The Calibrations screen is
displayed. (See Figure 12.9.)

Figure 12.8 Catalog Screen - Choose Calibration

Step 1 Click on the

Calibrations icon to
open the
Calibrations screen.
Preliminary

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2. Choose Video. (See Figure 12.9.) The XY View Video Calibration screen
appears. (See Figure 12.10.)

Figure 12.9 Calibrations Screen- Accessing the Video Calibration

Step 2 Click on the Video…

button to display the Video
Calibration window.

Preliminary
Loading the Stylus 3. From the Video Calibration screen choose MAN LOAD to move the stage out to
Alignment Tool the stage door. (See Figure 12.10.)
The Stylus Alignment Tool should be used to perform this calibration. A
patterned sample that provides very distinct features could also be used if the
Stylus Alignment Tool is not available.

Figure 12.10 Manual Load from the Video Calibration Screen

Step Click MAN LOAD to

bring the stage to the door
so the sample can be
loaded.
Step 8 After the sample is
loaded on the stage, click
MAN LOAD to return stage
under stylus.

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4. Open the stage door.

CAUTION: A system safety shutdown occurs if an attempt is made to

activate any stage or elevator motion when the stage door is open,
unless the interlock defeat switch has been disabled.

5. Place the Stylus Alignment Tool (or other sample) on the stage. Position it in the
center of the stage as squarely as possible with respect to the XY axis.
6. Turn of the vacuum using the switch just inside the left side of the door.

NOTE: The vacuum menu in the screen’s menu bar is disabled. It

does not effect the stage vacuum.

7. Close the door.

8. Click MAN LOAD to move the stage back into position under the stylus and the
optics. (See Figure 12.10.)
9. Click FOCUS in the tool bar. (See Figure 12.11.) The system nulls on the sample
Preliminary

(nulls = brings the head down and focuses the optics according to the currently
set magnification with the stylus very near contact with the sample surface).
10. Ensure that the current zoom setting is correct for the measurements that this
calibration is preparing for. The zoom setting is read at the bottom right of the
screen. A setting of 0.00 is zoomed all the way out. (See Figure 12.11.)
11. The prompt in the lower left corner of the screen reads, “Teach a feature on the
upper left corner of the overlay.” Use the linear arrow keys to position a feature in
the upper left quadrant of the screen for use in teaching the calibration. Avoid
features that are identical or similar to other features nearby. (See Figure
12.11.)
Teaching for Systems with 12. To TEACH the feature, drag a pattern recognition box around the chosen
Pattern Recognition feature. (Pattern recognition box: Move the cursor above and to the left of the
feature. Click and hold the mouse button, drag the box down below and to the
right of the feature, and release the button.)

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The system moves the feature and pattern recognition locates it again. If the
system locates the feature go to Step on page -10. Otherwise continue on to the
next step.

Figure 12.11 Message Prompt and Focus Button

Step 11 Use only these arrow

buttons to position the chosen
object or feature in the upper left
quadrant of the screen.

Step 9 Click FOCUS to null the

stylus on the sample surface.

Preliminary
the zoom setting is
read at the bottom
Follow the message prompt
of the screen.
instructions throughout all the
calibration procedures.

13. If the pattern recognition program does not find the pattern, perform the
calibration again. If the system locates the feature, go to the results that are
explained in Step 15. If the system still does not locate the feature, use the
procedure for systems without pattern recognition as described in Step 14 and
Step 15.
Teaching for Systems 14. Choose a feature in the upper left quadrant of the screen. To choose the feature,
without Pattern move the cursor crosshair over the feature and click on it at a precise point that
Recognition can be exactly identified again. The system moves the feature to another
location nearby.

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15. Click on the same feature again in exactly the same place on the feature as the
first click.
The Profiler Container message box is displayed (this is true also if the pattern
recognition finds the chosen pattern after Step 12 on page -8).
The calibration results are presented as calculated ratios of:
vertical and horizontal screen units called pixels to X and Y stage
coordinates in microns (a ratio of Pixels to microns, see Figure 12.12.)

Figure 12.12 XY Video Display Message Box

Step 16 Click OK to save the

calibration or Cancel to reject it and
retain the old calibration.
Preliminary

16. Click OK to save the calibration or Cancel to reject it and retain the old
calibration. The Calibration screen is then displayed. (See Figure 12.12.)

S CAN P OSITION O FFSET C ALIBRATION 12

Introduction 12

The Scan Position Offset Calibration procedure scans for data that it then uses to
calculate the X-, Y-axis offsets from the optics and stylus, for positioning the sample
stage.
During the Stylus Change procedure, the system automatically sets up the Scan
Position Offset Calibration to be performed as part of the procedure.
For the standard styli this procedure is performed in the following order:
1. 150 µm (standard) calibration
2. If the 150 µm scan fails to locate the triangle, then the 500 µm (backup)
calibration is performed.
3. If the 500 µm was performed successfully, the 150 µm calibration must be
performed again.

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Use the Stylus Alignment Tool (KLA-Tencor Part Number 219517 – see Figure
12.13) to perform the Scan Position Offset Calibration and determine the distance that
the stylus tip is offset from the crosshair overlay in the XY View window.

Figure 12.13 KLA-Tencor Stylus Alignment Tool

Preliminary
150 µm (Standard) Scan Position Offset Calibration 12

1. From the Scan Offset Calibration screen click MAN LOAD to move the stage out
to the stage door. (See Figure 12.14.)
2. After the system has completely stopped moving, open the stage door.

CAUTION: Wait until the stage motion has completely stopped before
opening the door. If the stage is still in motion when the door is
opened, the system stops. (Unless the interlock is disabled)
CAUTION: Do not activate the stage motion system with the door
open or the system stops. (Unless the interlock is disabled)

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Figure 12.14 Manual Load from the Scan Offset Calibration Window

Step 1 To move the stage to

the open door, click on the
MAN LOAD icon. It highlights
and the stage moves
forward.

Step 6 After loading the

Stylus Alignment Tool, click
on MAN LOAD again to send
the stage back under the
stylus.

3. Place the Stylus Alignment Tool precisely in the center of the stage, squarely
positioned with respect to the XY axis.
Preliminary

4. Turn the vacuum on using the switch on the left inside edge of the door.

NOTE: The Vacuum menu in the screen’s menu bar is disabled. It

does not effect the stage vacuum.

5. Close the stage door.

6. From the Scan Offset Calibration screen, click MAN LOAD in the tool bar to move
the stage back beneath the stylus. (See Figure 12.14.)
7. From the Catalog screen click on the Calibration icon to display the Calibration
screen. (See Figure 12.15.)

Figure 12.15 Catalog Screen - Click on the Calibration Icon

Step 7 Click on the

Calibration icon to display
the Calibration screen.

8. Ensure that the Video Calibration is correct at the zoom setting being used for
the Scan Position Offset calibration. (If, when clicking on an object to center it
in the XY View screen, the object does not move to the crosshair junction,
perform the Video Calibration. This should correct the symptom. See Video
Calibration on page 12-5.) Zoomed out all the way out is recommended.

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CAUTION: Use the zoom-lock or zoom all the way out when
performing the Scan Position Offset calibration.

Each zoom setting has a slightly different Scan Position Offset. It is

important that the system be calibrated at the zoom setting which is
being used for the scans. It is very important that the zoom setting be
consistent when using pattern recognition and that the pattern
recognition image be captured at the zoom setting being used to locate
the pattern. Scans zoomed all the way out are consistent as is any
zoom position that has been locked.

NOTE: Ensuring that the Video Calibration is correct helps to avoid

introducing error into the Scan Position Offset calibration.

Preliminary
9. Ensure that the proximity sensor is ON (see Proximity Sensor Configuration
on page 11-40) or reteach the Lowest Elevator Position using the alignment tool
as the sample surface. (See Teach Lowest Elevator Position on page 11-10.)
10. In the XY View screen, click and hold the ZOOM-IN button until the optics are
fully zoomed out.
11. From the Calibration screen, click on the Scan Position Offset… button. (See
Figure 12.16.)

Figure 12.16 Scan Calibrations Screen

Step 11 Click on the Scan

Position Offset… calibration
button to display the SCAN
OFFSET CALIBRATION
OPTION dialog box.

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The Scan Offset Calibration Option dialog box is displayed (see Figure 12.17) on
top of the Calibration screen.
Two columns present the two options used to set up the Scan Offset Calibration.
The first column is the Size column. It is used to determine the width of the
triangle that is to be scanned and therefore, which triangle the scan is to be
performed on. If the width is 150 µm then the 300 µm triangle is being used. If
the width is 500 µm then the 1000 µm (1 mm) triangle is being used.
12. Choose 150 µm (standard) to continue with the calibration. (See Figure 12.17)

Figure 12.17 Scan Position Offset Calibration Options dialog box

Step 13 Choose Recipe

type: Custom or Default
Step 12 Click on 150 µm.
Preliminary

13. Choose a recipe type, Default or Custom.

RECIPE TYPES. Two calibration options exist in the Scan Offset Calibration
Option dialog box. Each option provides the user with the opportunity to choose
between using a default recipe or to create/use a custom recipe. Default and
Custom recipes are explained below:
Š Default: This recipe is designed to operate with a scan speed and stylus
force setting that is safe for any contact stylus. The default settings are the
KLA-Tencor recommended recipe settings for all the calibrations.
Š Custom: (CUSTOM RECIPE CREATION IS AN OPTION BUT IS NOT
NOT RECOMMENDED BY KLA-TENCOR.) This recipe type offers the
user the option to customize recipe parameters to meet specific scan
requirements. In the Recipe Editor there are seven windows, each with
configurable parameters. (See Figure 12.18.) For the Scan Position Offset

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Calibration, the only Recipe Editor window necessary is the Scan

Parameter Definition that appears when the editor is first opened (see
Figure 12.21). When chosen, the Scan Parameter Definition button (in the
top left corner of the screen, circled in Figure 12.18) appears to be
indented.

Figure 12.18 Window Buttons - COARSE - Recipe Editor

Scan Parameter
Definition: displays the 2D
Scan window shown in the
illustration.

Preliminary
Each button in this column
displays a user configurable
window in which recipe
parameters can be defined for
use in various types of scans.
NOTE: SOME OF THESE
BUTTONS ARE PASSWORD
PROTECTED WITH
RESTRICTED ACCESS.

CAUTION: The DuraSharp stylus should only be used with the low
force head. If using the DuraSharp stylus, DO NOT set the Scan
Speed higher than the default, 10 µm/second, and do not set the
Applied Force higher than the default, 0.2 mg. In general, these
settings should be established through the Stylus Change procedure
only, and not changed manually in their fields.

14. The recipes are set as follows:

CAUTION: KLA-Tencor recommends using the Default recipes unless

there is a very good reason for creating a custom recipe.

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To use the currently a. To use the calibration recipe indicated to the right of the Size selection (see
selected recipe: Figure 12.19), click Continue to proceed.

Figure 12.19 Scan Position Offset Calibration Options dialog box

The current recipe type is

Step 14a. Click
displayed here.
on Continue
Preliminary

To change the recipe from b. To apply the Default recipe when Custom is indicated, click on Default. The
Custom to Default message box, “Copy default to custom recipe?” appears. Click Yes in the
message box to replace the parameters in the custom recipe with default
values. (See Figure 12.20.)

Figure 12.20 Set Default Dialog Box

Step 14b. To change from Custom

to Default, click on Yes to set default
values in the custom recipe.

To change the recipe from c. To apply a Custom recipe when Default is indicated, or to modify the
Default to Custom custom recipe that is indicated, click Custom. The Recipe Editor opens,
displaying the custom recipe. Change the parameters as required. (See
Figure 12.21.)
15. Close the Recipe Editor by clicking on the control button in the upper left corner
and choosing Close from the drop-down menu. (See Figure 12.21.)
16. If the new parameter values were not already saved, a dialog box requires the
user to choose between the save options before exiting the Recipe Editor.
Choose Save Changes to set the changes to the Custom recipe so they are used
in the scan.

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Figure 12.21 Scan Parameter Definition - _OFF150 - Recipe Editor

Step 15 Click to display the

Control Button menu. Choose
Close from the menu.

This window (Scan

Parameter Definition) is the
only one required if there are

Preliminary
to be recipe changes related
to the Scan Position Offset
Calibration procedure.

17. (BEFORE CONTINUING see CAUTION below.) Click FOCUS in the tool bar.
The Stylus Alignment Tool’s surface image comes into focus.

CAUTION: As the stylus lowers toward the Stylus Alignment tool,

watch carefully to ensure that both the proximity sensor and the stylus
come down on the tools measurement surface. With the Proximity
Sensor Offset option chosen in the Proximity Sensor Configuration
box, the proximity sensor is coming down directly on the position
where the stylus makes its measurement. If the stylus and the sensor
are not descending directly onto the stylus alignment tool’s
measurement area, press the ESC key, on the computer keyboard, to
stop the stylus descent. Manually relocate the tool under the stylus.
Click on FOCUS again to resume the procedure.

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BEGIN Align Sample 18. The Stylus Alignment Tool must be aligned with respect to the X-, Y-axis in
Procedure order for the calibration to be as accurate as possible. Click on View in the menu
bar to display its menu. (See Figure 12.22.)
This displays the Alignment Angle Dialog Box.

Figure 12.22 View Menu with Align Sample Chosen

Step 18 Click on
Align Sample… to
begin the sample
alignment procedure.
Preliminary

19. In the Alignment Angle dialog box, leave the setting at the default, “0” and click
OK to accept the alignment angel of 0°.

Figure 12.23 Alignment Angle Dialog Box

The prompt at the bottom of the screen now says,.

20. Use the arrow buttons to locate the border line between the 300 µm triangles and
the 1000 µm triangle. Still using the arrow buttons, follow the line to the left side
of the tool. (See Figure 12.24.)
21. Move the cursor to the line and click precisely on the line.
The prompt at the bottom of the screen now says,

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22. Click OK at the bottom right corner of the screen.

The prompt at the bottom of the screen now says,

Figure 12.24 KLA-Tencor Stylus Alignment Tool

Step 20 Locate Step 23 Move

the line and to a place on
move to a place the line near the
on the line near right end and
the left end and click precisely
click precisely on the line.
on the line.

Preliminary
23. Use the left arrow button follow the dividing line to the right until it reaches the
end of the line. (See Figure 12.24.)
24. Move the cursor directly over the line and click precisely on the line.
The system adjusts the theta alignment so the Stylus alignment tool is lined up
with the X- and Y-axis. The prompt at the bottom of the screen now says,

END Align Sample 25. Click OK at the bottom right of the screen to accept the stage alignment of the
Procedure Stylus Alignment Tool.
The prompt at the bottom of the screen now says,

There are two different alignment patterns that can be used in the Scan Position
Offset Calibration. Each scan is conducted at the midpoint of the triangle where
the step distance is one half the length of both right angle triangle sides. The first
and primary alignment pattern is the 300 µm triangle which is called the 150 µm
alignment pattern. It has this name because the scan traverses the triangle at it
midpoint where the distance is 150 µm. The second is the 1000 µm (1 mm)
triangle which is called the 500 µm alignment pattern because its midpoint scan
distance is 500 µm. It is used when the 150 µm scan fails to locate the 300 µm
triangle.

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When making this calibration, first use the 300 µm triangle to complete the
150 µm scan. If the stylus offset is too great, the scan misses the triangle. If this
happens, try the 1000 µm (1 mm) triangle to complete the 500 µm scan. If that is
successful, retry the 300 µm triangle.
If the 500 µm scan missed the 1000 µm triangle, the stylus needs to be
physically realigned by an authorized KLA-Tencor service representative.

Figure 12.25 KLA-Tencor Stylus Alignment Tool

300 µm triangle is used

for the 150 µm scan.
Preliminary

150 µm alignment pattern with

its crosshair alignment pattern 1 mm triangle is used for
at its left side. the 500 µm scan.

26. Use the linear movement arrow buttons (see Figure 12.26.) to locate one of the
150 µm alignment patterns with its crosshair alignment pattern at its left side, or,
if they are in view on the video screen, click on one to move it to the screen
crosshair. (See Figure 12.25.)

Figure 12.26 Aligning the Tool with Screen Crosshair

Step 26 Use the arrow

buttons to locate one of the
300 µm triangles with its
crosshair pattern next to it.

27. Click at the center of the Crosshair Pattern to align it with the screen crosshair.
(See Figure 12.27.) The crosshair pattern should align precisely with the screen
crosshair.

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Figure 12.27 Align Screen Crosshair with 150 µm Crosshair Pattern

Crosshair alignment
pattern.

Screen
crosshair.

28. Click the START button located in the screen tool bar. (See Figure 12.28.)

Preliminary
Figure 12.28 Manual Load from the Scan Offset Calibration Window

Step 28 Click on the

START button to start the
calibration.

The video image changes to side view as the stage moves to position the start of
the scan on the beginning of the start pattern near the calibration triangle.
When the stylus has reached the beginning of the 150 µm scan trace, the screen
changes to the Scan: _OFF150 window. The scan automatically begins.

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Figure 12.29 Scan: _OFF150 Window

As the scan proceeds, the trace line

progresses from left to right across
the scan trace.
As soon as the scan is complete,
the scan screen is automatically
replaced with the Analysis screen.
See Figure 12.31.

Scan calibration mark.

Preliminary

The scan can be viewed at the bottom right of the Scan: _OFF150 screen as it
progresses from left to right across the scan trace window, forming a linear
image of the scanned surface. The Start pattern next to triangle is set up to direct
the scan through the middle of the triangle using the _OFF150 recipe. In a
perfectly calibrated system, the scan trace goes directly through the center of the
300 µm triangle creating a 150 µm trace step. However, this is not a common
occurrence for a system that has not yet been calibrated after a stylus change.
The system uses the step and the distance across the triangle to determine where
the trace was performed and then automatically calculates the offsets.

Figure 12.30 Trace Path Through the Triangle

The user is directed to Scan path with

150 µm
set the scan to begin 150 µm step
at the intersection of
the three lines.

150 µm

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Figure 12.31 Data Analysis Window.

Scan trace display.

See Figure 12.32.

Scan data analysis.

See Figure 12.33.

Preliminary
When the scan is complete, the Data Analysis window automatically replaces the
Scan: _OFF150 screen. The window contains a scan data trace as shown in
Figure 12.32. If the scan was successful, the system detected the triangle and set
cursors at the edges of the triangle for visual inspection. It is possible to observe
the scan and determine, visually, where the trace is running through the triangle.

Figure 12.32 Scan Data Portion of the Analysis Window

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In the bottom half of the window, the Scan Offset Calibration Analysis appears. In
Figure 12.33 the system has subtracted the Up Edge from the Down Edge and
calculated the result to be 150.0 µm. Using this analysis of the scan, the system
makes a recommendation based upon its recognition of the Stylus Alignment
Tool triangle pattern.
29. To accept the recommendation, ensure that Accept Current Calibration Result is
chosen, then click on Take Selected Action. (See Figure 12.33.)

Figure 12.33 150 µm Scan Data Analysis Window

If the scan was recognized by the system, a recommendation

to ACCEPT the calibration is displayed here.
Step 29 To accept
the calibration, click
in the Accept...
radio button,
The system
subtracts the then click Take
Preliminary

Up Edge from the Selected Action.

Down Edge and
derives the width.
The outcome in this
case is 150.0 µm.

If the trace misses the triangle or is unable to identify it, one of several messages
can be displayed. The message could say that scan might have caught the
triangle and ask the user to choose either to accept it, change the location, or
reject it. The message might read, “Unknown situation...” in which case the user
should perform the 500 µm scan. If the message is uncertain, perform the entire
scan procedure again, this time using the 1000 µm (1 mm) triangle and the 500
µm scan recipe, _OFF500.

Figure 12.34 “Unknown Situation” Corrective Action

The conclusion of the

scan is displayed here.
It can either
recommend accepting,
be uncertain, or
recommend rescan.

First If the scan is uncertain or the

recommendation is to take a rescan, Second Then click
click Cancel Current Calibration. Take Selected Action.

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After the scan calibration has been accepted, the Calibrations screen returns with
the Scan Offset Calibration Option dialog box open on top.

Scan Position Offset Calibration Validation 12

Introduction 12

This procedure is used to verity the accuracy of the Y dimension in the offset. If the
calibration result was 150 µm, the offset error should be 0. The offset error is
determined by subtracting the scan result from the intended width, 150 µm.
To verify the calibration for a specific sample size the Scan Position Offset
Verification procedure is used. The Stylus Alignment Tool provides a set of various
sized right angle test features that can be used to ensure that the calibration is
effective for the sample size being scanned. Use the right angle test feature that has
features closest in size to features that are to be measured.

Preliminary
Figure 12.35 Angle Features on the Stylus Alignment Tool

Dimension A should be near the size of the

smallest features you want to measure

The scan length should be long enough to

completely include dimension B or C
(depending on which way you have the
Stylus Alignment Tool oriented on the
stage). See Table 12.1 on page 12-27 for
available dimensions.

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The right angle features are at the top of the Stylus Alignment Tool (KLA-Tencor Part
Number 219517 – see Figure 12.36). They are used to validate the effectiveness of
the Scan Position Calibration. Each of the six columns contain the same sized angle
features, duplicated above each triangle that is available for use in the calibration
procedure.

Figure 12.36 KLA-Tencor Stylus Alignment Tool

The Angle Features

are presented in
various sizes at the
top of the tool.
Each column is
identical.
Preliminary

Each angle feature has its own “Dimension A” displayed just above it on the tool. The
top angle feature in Figure 12.37 is 14 µm in the “A” direction as demonstrated in
Figure 12.35. The bottom feature is 10 µm. The displayed size is also a key in
determining the length of the angle feature arms, features “B” and “C” in Figure
12.35. Each size (“A” dimension) is recorded in the first column of Table 12.1, Angle
Feature Dimensions. Find the size and the corresponding lengths are displayed in that
row.

Figure 12.37 Angle Features

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Table 12.1 Angle Feature Dimensions

Dimension A (µm) Dimension B (µm) Dimension C (µm)
4 16 50
6 24 60
8 32 80
10 40 100
14 56 100
18 72 100

Verification Procedure 12

The verification procedure can be performed using the recipe that the scan is being

Preliminary
used to verify.
1. With the Scan Recipe screen open, select the recipe to be used.
2. Click on the XY icon to open the XY View screen.
3. Ensure that the zoom setting is exactly the same as was used in the calibration
procedure. It is best to perform the calibration zoomed all the way out.
4. Click on FOCUS. The system focuses on the Stylus Alignment Tool.
5. Find an angle feature that has the dimension size needed to verify that the
system can find and scan a feature of that size.
If the need arises to use a feature that is vertically positioned on the screen, use
the rotation buttons to reorient the stage so the feature is horizontally positioned.
Or, right-click on the navigation window to display the Move To dialog box and
enter 90° in the Theta field.
6. Use the arrow buttons to approximately position the feature for the scan.
7. Position the cursor crosshair and click such that the screen crosshairs are exactly
lined up horizontally with the left side of the feature, far enough from the feature
to allow the stylus room to scan the approach to the feature before actually
scanning the feature itself.

Screen crosshair
lined up with the
center of the feature
to be scanned.

Scan path and direction.

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8. Click START to begin the scan. The scan progresses like other scans, with the
real-time trace displayed at the bottom right of the screen.
Observe the stylus image on the screen to ensure that it contacts the feature at
the intended location.
When the scan is complete, the Analysis screen is displayed. On the left side of
the Analysis screen are some of the statistics of the scan itself.
9. In the Analysis screen, set the measurement cursors to the edges of the step.

Figure 12.38 Scan Information Display in Analysis Screen

Preliminary

After the Cursors have been set

to the edges of the step, the
Width should reflect the length
of the scanned feature.

10. In the Analysis screen, look in the Analysis display (see Figure 12.38) and
locate the Width.
The Width should show that the correct feature was scanned. In Figure 12.38 the
scan Width of 56 µm would show that the “B” dimension of the right angel
feature labeled “14” (see Figure 12.37 on page 12-26 and Table 12.1 on page
12-27) was scanned.
If the stylus passed over the intended object and the Width verifies that the
object scanned was the correct one, the verification is complete and the system
is ready to be used for scans.
If the scan missed its intended object, repeat the Scan Position Offset
Calibration. After the calibration is complete, repeat the verification procedure.

STEP H EIGHT C ALIBRATION 12

Check the Calibration The vertical sensing transducers in the system are not absolute devices and, therefore,
Matrix on page 12-51 for require calibration. The calibration factors for the available vertical ranges are set to
possible interaction with approximately 1.00 at the factory. (See Figure 12.39.)
other calibrations.

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CAUTION: All vertical ranges must be calibrated. Each calibration

must be performed independently. Use the 2 µm stylus fo this
calibration

The best calibration results come from precision techniques carefully repeated. To
promote uniformity in results, the procedure for Step Height Calibration is automated
for each range. The recipes are written for use with VLSI Standards Inc. step height
calibration standards. The step height calibration should be performed periodically,
depending on the amount of system use, for each of the three ranges.

12

Figure 12.39 Step Height Calibration Factors

Preliminary
Step Height Calibration
Factors are presented in
the Calibrations screen.

Calibration Procedure: 12

Check the Calibration All three ranges must be calibrated.

Matrix on page 12-51 for
possible interaction with 1. From any top level screen choose the Scan Catalog icon to open the Catalog
other calibrations. screen.
2. From the Scan Catalog screen, click on the XY icon in the tool bar to open the
XY View screen.
3. Click MAN LOAD in the tool bar, to move the sample stage to the door.

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4. Open the stage door.

CAUTION: A system safety shutdown occurs if an attempt is made to

activate any stage or elevator motion when the stage door is open
(unless the interlock defeat switch has been disabled).

5. Place the Step Height Standard so it is centered on the stage, positioned squarely
with respect to the X-Y axis.
If the step height standard does not cover the vacuum holes so they can be
effective, it might be necessary to rotate the standard 90° so it does cover the
vacuum holes.
If the standard was rotated 90°, it is necessary to rotate the stage 90° in the same
direction so the step and other scan features are properly oriented for a scan. To
accomplish this
a. Right-click in the navigation window to display the menu dialog box.
b. Click on Move To… to open its dialog box. (See Figure 12.40.)
Preliminary

Figure 12.40 Navigation Window Right-Click Menu

Step 5b. Choose Move To…

to open its dialog box.

c. In the Move To Position dialog box, enter 90 or -90 in the T (deg) field,
depending on which way the step standard was rotated on the stage. (See
Figure 12.41.)

Figure 12.41 Move To Position Dialog Box

Step 5d. Click OK

when the entry is
Step 5c. Enter 90 in complete.
the T (deg) field.

d. Click OK to rotate the stage and close the dialog box. (See Figure 12.41.)
6. Turn ON the Vacuum using the switch on the upper left inside jam of the door.
7. Close the door.
8. Click MAN LOAD in the tool bar, to move the sample stage back under the stylus.
9. Close the XY View screen. This returns to the Scan Catalog screen.
10. Click on the Calibration icon to open the Calibration screen.

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11. From the Calibrations screen, choose Step Height… (See Figure 12.42.) The Step
Height Calibration Options dialog box appears in the center of the window. (See
Figure 12.43.)

Figure 12.42 Calibration Menu in the Calibration Screen

Step 11 From the

Calibration screen,
choose Step Height… to
open the Step Height
calibration screen.

Preliminary
12. Range: Choose the range to be calibrated. Select the appropriate step height
standard for use in calibrating the selected range. (See the circled area in
Figure 12.43.) If using the Low range, the step limit should be 3.5 µm or less, if
using the Medium range, the step limit should be 13 µm or less, and if using the
High range, the step limit should be 65 µm or less.

Figure 12.43 Step Height Calibration Options Dialog Box

Step 12 Choose the range

that is to be calibrated.

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13. Multi-Scan Average: This determines the number of times the profiler scans the
same feature during each scan procedure. Data from all scans are automatically
averaged and their average is presented as the scan result. Click on the
down-arrow next to the Multi-Scan Average value box to display the menu.
Select the number of scans per calibration from the drop-down menu. (See
Figure 12.44 below.) The value should be at least 3, with 5 being optimum.

Figure 12.44 Multi-Scan Average Option

Step 13 Click on the down

arrow to display the menu.
Choose the number of scans per
calibration.
Preliminary

14. Standard Step Height Value: Enter the nominal step height value, for the
standard being used, into the Standard Step Height Value field. Select the correct
units from those available in the drop-down list to the right. See the circled area
in Figure 12.45.

NOTE: Units in Å correspond to recipes for VLSI Thin Film standards;

units in µm correspond to the longer scan VLSI Thick Film standards.

Figure 12.45 Setting Standard Step Height Value

Step 14 The step height standard

being used should have an absolute
height value on it. Double-click on the Ensure that the units displayed
numerical box next to Standard Step are identical to the step height
Height Value: and type in the height units. To change the units,
displayed on the standard. click on the menu-arrow and
click on the correct units.

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15. Recipe:

CAUTION: KLA-Tencor recommends using the Default recipe for all

calibrations. Default recipes should always be used unless there is a
very good reason for creating a custom recipe. Creating a custom
recipe for a calibration procedure could result in inaccurate calibration
results. The system is designed to operate using Default recipes only.

The system provides both default and customizable calibration recipes for each
of the three ranges. When a range is chosen, either the Default or a Custom
recipe can be used to perform the calibration. The currently applied calibration
recipe is displayed to the right of the chosen range. If nothing is changed, the
currently displayed recipe is used for the calibration procedure.
Choose Default for the calibration unless there is a very good reason to change
the recipe.

CAUTION: In Low Force Head systems, the Default recipe for the

Preliminary
short scan (6.5 µm) should be used for systems operating with the
DuraSharp stylus. This stylus requires a slow scan speed to protect its
tip. If using a DuraSharp tip, do not modify a custom recipe scan speed
to operate at faster than the recommended 10 µm/second (5 µm/sec is
best), to protect this delicate stylus.

16. To proceed with the calibration using the recipe indicated to the right of the
range (Default or Custom), click Continue. (See Figure 12.46.)

Figure 12.46 Confirming the Displayed Calibration Recipe

Step 16 Click on
Continue to apply the
Recipe type indicated next
to the Range choice.

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Default Recipe Option 17. To apply the Default recipe when “Custom” is indicated, click on Default. (See
the circled areas in Figure 12.48.) The message, “Copy Default to Custom
recipe?” appears. (See Figure 12.47.) Clicking on Yes replaces the parameters in
the Custom recipe with Default values. Clicking No retains the current Custom
value.

Figure 12.47 “Copy default to custom recipe?” Message

Step 17 Click Yes to Step 17 Click NO to retain

replace custom recipe the custom recipe values.
values with default values.

Custom Recipe Option 18. To apply a Custom recipe when “Default” is indicated or to modify the Custom
recipe that is indicated, click on Custom... (See the circled areas in Figure
12.49.) The Recipe Editor opens, displaying the parameters for the custom
recipe. A custom recipe for each Range is already in the Scan Recipe Catalog
Preliminary

File with a name representing the recipe; _STEPHTL for Low step;
_STEPHTM for Medium step; and _STEPHTH for High step. (The procedure
continues
on page 12-36.)

Figure 12.48 Changing the Calibration Recipe Option to Default

Step 17 To change
from Custom to Default
The type of recipe being used in
recipe, click on Default.
a given range is listed next to it in
the Recipe column. In this case,
a Custom recipe is being applied
to the Low Range scan.

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Figure 12.49 Changing the Calibration Recipe Option to Custom

Step 18 To change from

Default to a Custom
The type of recipe being used
recipe, or to modify the
in a given range is listed next to
current recipe, click
it in the Recipe column. In this
Custom…
case, a Default recipe is being
applied to the Low Range scan.

Preliminary
19. The parameters that can be modified are included in the Recipe Editor screen.
(See Figure 12.50.) Each recipe, including the Default, has a specific name that
is included in the Scan Recipes screen under the 2D recipe catalog. Custom
recipes can be modified to meet special scan requirements including custom
calibration scans. If the Default recipe is not going to be used, great care should
be taken to modify only those parameters absolutely necessary to provide the
best step height calibration

CAUTION: Step Height Calibration is a critical procedure, vital to

future process scan integrity. Do not modify the calibration recipe
parameters without understanding the consequences of such
modification. Only parameters included in the Step Height Calibration
Options dialog box are used for the calibration.

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Figure 12.50 Recipe Editor for _STEPHTL

Step 20 From the Recipe

drop-down menu, click on Save.

Step 21 Choose Save.

Preliminary

The parameters that can be modified for the scan calibration are: Scan Length;
Scan Speed; Sampling Rate; Multi-Scan Average; Stylus Force; Contact Speed;
Range/Resolution; and Profile Type.
Š Range/Resolution and Multi-Scan Averaging should have already been
set in the Step Height Calibration Options. There should be no need to
change these in this screen. Range/Resolution is not available for change at
this point in the procedure.
Š Profile Type only contains options for the High (131 µm/0.357Å) Range.
Both of the other ranges have only one profile type available.
Š Scan Speed can be changed. If the speed is increased, the accuracy could
suffer. The Step Height Calibration is critical to scan data accuracy. If the
speed is set at a higher rate than the Default value, the number in the
Multi-Scan Average should also be set to at least 5.
Š When using the DuraSharp tip (not recommended for P-15), the Scan
Speed defaults to 5 µm/s and the associated drop-down menu contains only
2, 5, and 10 µm/s options.
Š Scan Length should reflect about 200 µm on each side of the step.
Š Stylus Force should never be set higher than the recommended value
(indicated next to the box containing the current value.) If it is set too high,
a message box might appear that prompts the user to consider changing
back to within the safe force limits. (See Figure 12.51.)
This should not be a problem if the recommended 2 µm stylus is used.

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Figure 12.51 Stylus Force Change Message

20. When the required modifications to the recipe have been completed, click
Recipe in the menu bar to display the menu.
21. Choose Save from the drop-down menu. (See Figure 12.50.)
22. To close the Recipe Editor, first click on the control button at the top left corner
of the screen to display its menu.
23. If the recipe was not saved, and Exit is chosen from the control button

Preliminary
drop-down menu, a dialog box opens requesting a decision on the changes made
to the recipe. Choose Save Changes to save the changes so they can be used in
the Step Height Calibration. (See Figure 12.52.)

Figure 12.52 Recipe Editor - Saving Recipe Changes

Step 23 Click on the radio

button next to Save Changes
then on OK so the new
parameters are in effect for
the Step Height Calibration.

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24. After the modifications to the recipe are saved, the Step Height Calibration
Options dialog box appears again. Click on Continue. (See Figure 12.53.) This
displays the Step Height Calibration screen.

Figure 12.53 Completing the Options Selection

Step 24 After all modifications

have been saved, click
Continue to proceed to the
Calibration screen for the
Step Height Calibration scan.
Preliminary

25. Click on FOCUS to null the stylus near the VLSI Step Height Standard surface
and bring the standard into focus. (See Figure 12.54.)

Figure 12.54 Loading the Step Height Calibration Standard

Step 25 After the Step Height

Calibration Standard has been
placed on the stage and the
stage centered under the stylus,
Click FOCUS to null the stylus.

Step 3 Click on MAN LOAD to

move the stage to the open door.
Step 8 After the Step Height
Calibration Standard is centered
on the stage, click MAN LOAD to
send the stage back under the
stylus.

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26. Use the arrow buttons to locate the calibration step on the standard.
If the Video Calibration has been performed in the current zoom position, the
hash marks on the crosshair are 100 µm apart. (See Figure 12.55.)

Figure 12.55 Step Height Calibration Window

Step 26 Use the arrow

buttons to locate the
calibration step on the Step
Height Standard.

If Video is calibrated for the

current zoom, the distance

Preliminary
between the hash marks on
the centerline is displayed in
this screen position.

27. Position the crosshair about 200 µm from the left side of the step and click OK
(at the bottom right of the screen), or click Start in the tool bar. The instrument
performs the same scan through the exact same location as many times as
prescribed in the recipe (the Multi-Scan Average on page 12-32, set in the Step
Height Calibration Options dialog box, Figure 12.44).
28. During the Step Height Calibration Scan procedure, the progression of each scan
can be observed in the lower right corner of the screen, on the scan graph. Each
scan is displayed in a different color. (See Figure 12.56.)

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29. The individual scans (Multi-Scan Average) are averaged to arrive at a single
step height. The system then compares the average of the scans with the known
VLSI standard step height that was entered into the Step Height Calibration
Option dialog box. (See Step 14 on page -32.)

Figure 12.56 Step Height Scan Screen

Each trace appears in the

scan screen, presented in
a different color.
Preliminary

When complete, the calibration factor is automatically calculated and displayed

at the end of the information area of the Analysis window. (See the circled area
at the bottom left in Figure 12.57.)
The calibration factor is displayed with the last calibration factor. Both should
be close. See the circled area at the bottom left of Figure 12.57.
To compare the step height standard value with the averaged measured height,
click on STATS in the tool bar to open the Surface Parameter Summary statistics
window. The step height result is displayed in the Statistics window. See the
white area just above the Analysis trace window in Figure 12.57.
30. Click on the SET button in the tool bar to save the calibration factor, or the
Cancel button to keep the original value and return to the Calibrations screen.
(See the circled area at the top right in Figure 12.57.)

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Figure 12.57 Saving the New Calibration

Step 30 To accept the new

calibration, click on SET.

Click on STATS to open the

Surface Parameter Summary
window containing scan statistics.

The calibration factor is

calculated and displayed in the
Calibration Factor section
along with the old one.

Preliminary
31. Use the above procedure to repeat the step height calibration for the remaining
ranges. Each range is significant and important for the integrity of future scans.

L EVEL C ALIBRATION 12

Check the Calibration Accurate scans depend on the X- and Y-axis planes of the Sample Stage being parallel
Matrix on page 12-51 for to the stage motion in the respective planes. Two independent calibrations, Tilt and
possible interaction with Level, are required to ensure that these planes are parallel to the stage motion in their
other calibrations. respective directions.
The Tilt Calibration (adjustment) sets the Y-axis plane of the Sample Stage surface
parallel to the stage motion, which is defined by the surface of the reference flat. The
Tilt calibration requires the manual adjustment of a screw that is difficult to locate.
This calibration should be performed by a KLA-Tencor trained technician. The Tilt
calibration is described in the Service Manual.
The Level Calibration sets the X-axis plane of the Sample Stage surface parallel to the
stage motion, which is defined by the surface of the reference flat. The Level
calibration is totally automated for the P-15.

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The Level calibration should be performed whenever one of the listed conditions
arise:
Š Removing and replacing the carriage
Š Changing the reference flat
Š Replace motorized stage
Š Replacing the leveling motor
Š System does not complete the initialization procedure.
When performing this calibration, use a Contact Mode stylus, preferably a 2 µm tip,
that has been properly installed using the Stylus Replacement procedure. For
information on changing the stylus, see Chapter 4 Stylus Change Procedure
on page 4-1.

CAUTION: Be sure that the system is using a sturdy stylus.

Preliminary

Level Calibration Procedure 12

Check the Calibration 1. From from any top level screen, click on the Calibrations icon .
Matrix on page 12-51 for
possible interaction with 2. Click Level… to open the Level Calibration screen.
other calibrations.

Figure 12.58 Calibration Screen

Step 2 Click Level… to

open the calibration screen.

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3. A warning appears in the Profiler Container message box. It states that the system
automatically nulls in this calibration and advises that a sample be placed on the
stage to prevent stylus damage. (See Figure 12.59.)
Read the message and click OK to close the message box. (See Figure 12.59.)

Figure 12.59 Level Calibration Warning

Step 3 Click on OK to
acknowledge the message
warning of the automatic nulling
of the stylus in this calibration.

Preliminary
System Status Bar.

4. After the warning message is acknowledged, a message is displayed (see

Figure 12.60) in the system status bar at the bottom left of the screen as pointed
out in Figure 12.59. The message requests the user to load a 200 mm wafer onto
the stage then click the OK button. See the following wafer loading procedures.

Figure 12.60 Tilt Calibration System Status Load Wafer Message

Begin: Load Wafer 5. Click on MAN LOAD to move the stage to the Stage Door.
6. (See CAUTION below.) Open the stage door.

CAUTION: Do not activate the stage motion system with the door
open, unless the interlock switch is disabled.

7. Load a featureless wafer onto the sample stage. Place it in the center of the
stage.
8. Turn the vacuum ON using the switch on the upper left door jam.
9. Close the stage door.
End: Load Wafer Manually 10. Click MAN LOAD to move the stage back under the optics.

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11. Click OK to begin the calibration.

The stylus nulls twice, once each near the left and right extremes of the wafer.
With each nulling, the Z value is registered. The system then calculates and
corrects the stage level status such that, when the calibration is performed again,
the entire surface of the stage has nearly the same Z value (assuming the wafer
has a minimal bow and that the Tilt calibration is correct).
12. When the Level calibration is complete, the system presents a dialog box with
the results and an option to accept or reject the calculation. Click OK to accept
the calculated value or Cancel to reject it. (See Figure 12.61.)

Figure 12.61 Tilt Axis Angle Calibration Value Dialog Box

Step 12 Click OK to accept

the Level calibration value,
or Cancel to reject it.
Preliminary

Level Calibration Confirmation 12

After the Level calibration is complete, a confirmation test must be made of the
calibration results. The test consists of nulling near the left edge of the wafer and
recording its Z height at null, and then nulling near the right edge of the wafer and
recording its Z height at null. This can be done using the Lowest Elevator Position
procedure accessed through the Configuration screen. The difference between the left
and right Z value should be 20 µm or less for the calibration to be acceptable. If the Z
value is greater than 20 µm, perform the Level calibration again.

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1. Open the XY View screen. (See Figure 12.62.)

Figure 12.62 Activating Focus in the XY VIEW Screen

Preliminary
Step 2 Right-click
in the Navigation
window to open the
Move To… menu.

2. Right-click in the navigation window to display the Move Menu. (See

Figure 12.63.)
3. From the Move Menu choose Move To… (See Figure 12.63.)

Figure 12.63 Move To Menu

Step 3 Choose Move

To… to open the Move
To Position dialog box.

4. The Move To Position dialog box opens. Leave the Y and T fields empty and
enter 88000 in the X field. (See Figure 12.64.) This positions the stylus at the
right side of the stage as shown in Figure 12.65.

Figure 12.64 Move To Position Dialog Box

Step 4 Enter 88000 in the

Step 5 Click OK to move
X field.
to the position.

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5. After the entry is complete, click OK to close the dialog box and position the
stylus at the new coordinates. (See Figure 12.64.)

Figure 12.65 Teach Lowest Elevator Position Screen

Step 6 After the stylus is in

position, click FOCUS to null the
stylus on the sample surface.

After the OK button is clicked

the stylus is positioned near the
right or left of the wafer as
shown by the blue tracking dot.

The navigation window is

used to position the scan
and view the null position.

Notice that X coordinate is

Preliminary

the 88000 that was set

before the move.

Step 7 The Z value is the

relative height of the stylus.
Record this number after the
null is complete.

6. After the stylus is in position, click on FOCUS to null the stylus near the back of
wafer. (See Figure 12.65.)
7. When the focus procedure is complete, record the Z value as indicated in the
lower right corner of the screen. (See Figure 12.65.)
8. Right-click in the navigation window to display the Move Menu.
9. From the Move Menu choose Move To… (See Figure 12.66.)

Figure 12.66 Move To Menu

Step 9 Choose Move

To… to open the Move
To Position dialog box.

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10. The Move To Position dialog box opens. Leave the Y and T fields empty and
enter -88000 in the X field. (See Figure 12.67.)

Figure 12.67 Move To Position Dialog Box

Step 10 Enter -88000 in

the X field. Step 11 Click OK to
move to the position.

11. After the entry is complete, click OK to close the dialog box and position the
stylus at the new coordinates. (See Figure 12.67.) The blue tracking dot appears

Preliminary
at the left edge of the wafer.
12. After the stylus is in position, click on FOCUS to null the stylus near the front of
wafer.
13. When the focus procedure is complete, record the Z value as indicated in the
lower right corner of the screen. (See Figure 12.65.)
14. The numerical difference between the Z value near the right edge of the wafer
and the Z value near the left edge of the wafer represents the level calibration
results. If this number is less than 20 µm, the calibration is within specifications.
If it is not within the specifications, perform the Level calibration again and
check the results.

WAFER C ENTER C ALIBRATION 12

The sequence transportability depends on the system using the center of the wafer as a
reference point instead of the center of the stage, as has been done in the past. This
requires that the Calibrate Wafer Center calibration be run. The Calibrate Wafer Center
calibrates the center of the wafer as the (0,0) reference point. After this calibration has
been run, all sequence recipes and the system Safe Area settings use the wafer
coordinates. (See “Calibrate Wafer Center” Calibration.)
The P-15 does not use a handler, so this is only effective if the system has a precision
locator for wafer alignment.

Calibration Procedure 12

Before performing the Calibrate Wafer Center calibration, all system calibrations
must be current, including the Center of Rotation and Stage Mapping calibrations. If
not, perform these calibrations first along with any prerequisites. After these are
acceptably completed, proceed with the following calibration.

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1. From the Calibration screen, click on Calibrate Wafer Center button.

NOTE: The user must be logged in under the proper security level to
access the Calibrate Wafer Center calibration. Without the correct level,
the calibration might be missing from the menu or grayed out.

Figure 12.68 Calibration Screen

Preliminary

Step 1 Click on Calibrate

Wafer Center… to open
the calibration.

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The user is prompted to load a wafer. The user selects the cassette and slot that
the wafer is to be taken from as well as setting the load angle to 45°.

Figure 12.69 Wafer Center Calibration Screen

Preliminary
2. Load a wafer on the precision locator.
3. Click OK after the wafer is loaded.
The system moves the wafer to until its edge is under the optics. When the stage
stops, the system focuses on a point near the wafer edge.
4. Align the wafer edge with the screen crosshair as prompted by the system. If the
edge is not in sight, move the stage to the right using the right arrow button in
the toolbar. Align the left wafer edge with the screen crosshairs.
5. Click OK.
6. The stage moves to a point near the right wafer edge and the system focuses on
the wafer surface. The user is prompted to align the wafer edge with the screen
crosshairs.
7. Align the right wafer edge with the screen crosshairs. Use the left-arrow button
in the tool bar to move the wafer edge into alignment with the screen crosshairs.
(In necessary, use the Slow speed for the arrow button movement to accurately
position the edge of the wafer at the screen crosshairs.)
8. Click OK to accept the position.
9. Click OK.
The system positions the top of wafer under the optics and focuses. The user is
prompted to position the top edge of the wafer at the screen crosshairs.

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10. For all tools: Align the top wafer edge with the screen crosshairs. Use the
down-arrow button in the tool bar to move the wafer’s top edge into alignment
with the screen crosshairs. (In necessary, use the Slow speed for the arrow
button movement to accurately position the top edge of the wafer at the screen
crosshairs.)
11. Click OK.
The system positions the bottom of wafer under the optics and focuses. The user
is prompted to position the bottom edge of the wafer at the screen crosshairs.
12. Align the bottom wafer edge with the screen crosshairs. Use the up-arrow button
in the tool bar to move the wafer’s bottom edge into alignment with the screen
crosshairs. (In necessary, use the Slow speed for the arrow button movement to
accurately position the bottom edge of the wafer at the screen crosshairs.)

Stage to Wafer Conversion 12

As a result of the system converting to using the wafer center instead of the stage
center as a reference point, all sequence recipes created before the conversion (i.e.,
Preliminary

before the “Calibrate Wafer Center” calibration) become inaccurate. They must be
converted to the wafer center system in order to perform correctly. The Calibrate
Wafer Center Calibration adds an offset from the stage coordinate to the wafer
coordinates.
The Stage to Wafer calibration should only be performed after the Center of Wafer
calibration is performed and prior to any new recipes being created. If only new
recipes (recipes created after the Calibrate Wafer Center calibration) are to be used,
the conversion is optional.

NOTE: This procedure can only be performed once.

Calibration Procedure 12

1. From Windows Explorer, run

<Drive where Eagle is located>:\eagle\exe\StagetoWafer.exe
2. User is warned to back up recipes before proceeding.
Backup is advised. Use the Pbackup procedure.
3. Click Proceed. All sequence recipes are automatically converted.

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STANDARD C ALIBRATION M ATRIX 12

The system is facilitated by a series of interconnected calibrations. The

interdependency of the calibrations makes it important that those who calibrate the
systems understand the which calibrations affect other calibrations. When performing
any of the calibrations for the system, ensure that all prerequisite calibrations are
performed prior to performing the target calibration. When the target calibration is
completed, ensure that any necessary subsequent calibrations are performed or the
possibility exists for inaccurate scans.

Table 12.2 Standard Calibration Matrix

Calibration to be Calibration Post Calibration System Performance Results
Performed Prerequisites Requirements
Applied Force none none Protects stylus and sample during nulling procedure.
Video Calibration Applied Force none Objects chosen (clicked on) in the screen are
accurately positioned in the center of the screen.

Preliminary
Improves accuracy of pattern recognition deskew and
site-by-site pattern recognition.
Scan Position Applied Force, Fine Scan When performing a scan with the sample stage, the
Offset Calibration Video Position Offset general location taught for the scan is accurate. The
Calibration scan occurs very near the taught position.
Linearity Applied Force Step Height Linearity ensures that a sensor that has been calibrated
using only one step height standard can accurately
measure other values. For example, a sensor calibrated
with a 24 µm standard should accurately measure a
100 µm step.
Step Height Applied Force, none Feature steps on the sample surface are more
Linearity, Scan accurately measured.
Position Offset
Radius of Curvature Applied Force, none Radii of curved surfaces are more accurately
Step Height measured.
Pulse Ratio Applied Force, none Calibrates the stage movement distance to match the
Video, Center of move distance requested by the user.
Rotation All previously taught sites in a sequences become
invalidated (are slightly off from their original position.)
Stage Mapping Applied Force, none Enhances accuracy of movement between identical
Video, Center of positions in a die grid.
Rotation, Pulse All previously taught sites in a sequences become
ratio invalidated (are slightly off from their original position.)
Level Applied Force none Scans in excess of 1000 µm are more level. Ensures
that the stylus does not exceed its vertical range due to
the excessive tilt or level orientation of the stage.
Lamp Balance Applied Force, none
Drop Timer
Drop Timer Applied force none

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Preliminary

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 13
GEM/SECS OPTION Chapter 13

13

I NTRODUCTION 13

The GEM/SECS option is designed for environments in which the system is

controlled by, or requires communication with a remote Host computer. GEM/SECS
also provides a communication link with the Host for receiving and sending process
programs (recipes).
This chapter includes:
Š Establishing GEM/SECS Communication
Š Using the GEM/SECS Application

P rel i mi n a ry
Š GEM/SECS Configuration Options
Š GEM Status Window

E STABLISHING GEM/SECS C OMMUNICATION 13

Communication between the system and the Host computer is established through the
GEM/SECS program. Use the following procedure to open the GEM/SECS link
between the system and the Host:
1. From any top level screen, click the Configuration icon. (See Figure 13.1.)

Figure 13.1 Database File Manager Icon Choice

Step 1 Click on the

Configuration icon to display
the Configuration screen.

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2. This brings up the Configuration window. To display the Machine Configuration

dialog box:, click System… (circled in Figure 13.2).

Figure 13.2 Configuration Screen

Step 2 Click on the System…

button to select System
Configuration.
Preliminary

3. This brings up the System Configuration dialog box. (See Figure 13.3.) From the
System Configuration dialog box, choose Instrument… (circled in Figure 13.3).
This brings up the Instrument Setup dialog box. (See Figure 13.3.)

Figure 13.3 Machine Configuration Dialog box

Step 3 Click on Instrument… to

display the Instrument Setup
dialog box.

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4. To activate automatic GEM/SECS connection when the system is booted up:

from the Instrument Setup dialog box, double-click on the check box next to
GEM/SECS (circled in Figure 13.4). The Instrument Setup dialog box contains
a list of all purchased system options. An X next to the option name indicates
that it has been chosen to be active. Click in the empty column next to
GEM/SECS to put an X next to it. The system is now set up to initiate the
GEM/SECS connection every time the system is booted up. (See Figure 13.4.)

Figure 13.4 Instrument Setup Dialog Box

Step 4 Double-click on the box

next to GEM/SECS. An X
appears when it is chosen.

Preliminary
5. Click on OK to set the change and close the dialog box.
6. A message box appears instructing the user to restart the system. GEM/SECS is
not activated unless the system is restarted. (See Figure 13.5.)

Figure 13.5 Configuration Warning

NOTE: A Message Box appears instructing the user to reboot the

system. This must be done to ensure proper GEM/SECS connection.

7. Use the same procedure described above (except that the check box should be
empty), to deactivate the automatic connection of GEM/SECS each time the
system is booted up.

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Enabling GEM/SECS from the GEM User Interface Screen 13

1. If the GEM+SECS option in the Instrument Setup dialog box is enabled, then it
is possible to activate GEM/SECS using the GEM User Interface screen.
From any top level screen, click on the GEM+SECS icon. (See Figure 13.6.)

Figure 13.6 Configuration Screen – Opening GEM/SECS Communication

Step 1 Click on the

GEM/SECS icon to
open its screen.
Preliminary

2. Open the GEM User Interface screen. From the GEM User Interface dialog box,
click on GEM, located at the top left of the screen (indicated in Figure 13.7).
3. In the drop-down menu, click on Enabled to enable GEM/SECS. A check
appears next to Enabled when GEM is running (illustrated in Figure 13.7).

Figure 13.7 GEM User Interface Screen (Top of Screen)

9 Step 2 Click on GEM to

display the drop-down menu.

Step 3 Click on Enabled to

enable GEM. A check appears
9
next to Enabled.

4. Disabling GEM/SECS is accomplished by clicking on Enabled when the check

mark appears next to it. The check mark is absent when GEM/SECS is disabled.

U SING THE GEM/SECS APPLICATION 13

The GEM/SECS application has functions that are accessed in different ways.
Establishing the GEM/SECS communication link can be set up through both the GEM
User Interface and Configuration screens. GEM/SECS configuration is accessed
through the GEM drop-down menu in the GEM User Interface screen. Message TTY
communication with the Host, using GEM/SECS, is accomplished through the GEM
Status window.

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1. To access the GEM User Interface screen from any top level screen, click on the
GEM+SECS icon. (See Figure 13.6.)

Figure 13.8 Configuration Screen – Opening GEM/SECS Communication

Step 1 Click on the

GEM/SECS icon to
open its screen.

Preliminary
2. From the GEM User Interface screen, click on GEM at the top left of the screen,
to access the drop-down menu (indicated in Figure 13.9).

Figure 13.9 GEM User Interface Screen

Step 2 Click on GEM

to display the
drop-down menu.

Step 3 Drop-down
menu containing GEM
related dialogue boxes.
Choose the required
option.

3. Choose the required option.

Four options are available in the drop-down menu. The first is the
Enable/Disable option, and has already been discussed in Enabling GEM/SECS
from the GEM User Interface Screen on page 13-4. The other three are
discussed in the following sections.

GEM/SECS C ONFIGURATION O PTIONS 13

These options should only be exercised by those totally familiar with the GEM+SECS
operation. The function definition for each of the configurable states is set by Semi
Standard E30. Refer to that document for any questions regarding GEM+SECS
communication. Use the following procedure to configure the GEM/SECS options:
1. From the GEM User Interface screen, click on GEM to display its menu.

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2. From the GEM menu click on Config... to display the Configuration window.

Figure 13.10 GEM User Interface Screen

Step 1 Click on GEM to

display the drop-down menu.

Step 2 Click on Config... to

open the Configuration
window.

The Configuration screen is displayed as shown in Figure 13.11.

Figure 13.11 Configuration Screen

Preliminary

The GEM Configuration window has seven category boxes containing GEM related
options and control information. This section provides user interface information on
four of the categories:
Š Communication
Š Spooling
Š Control States
Š Equipment Identification.

Communication Configuration Options 13

The Communication box deals with establishing and continuing the communication
link between the system and the Host computer. The communication link establishes
the ability of the system and Host to send and receive messages.

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Initial Communication State 13

In the Communication box, Init. Comm. State:, determines the initial communication
link status between the system and the Host when the system is booted up. (See
Figure 13.12.)

Figure 13.12 Communication Option - Initial Communication States

Communication Box

Initial Communication
State: Choose Enabled or
Disabled.

Preliminary
From the drop-down menu, choose the desired option. The selected option appears in
the field. (See Figure 13.12.)
Š Enabled: This means that when the system is booted up, it attempts to initiate a
link between itself and the Host computer.
Š Disabled: This means that when the system is booted up, it does not attempt to
initiate a link between itself and the Host computer.

NOTE: After boot up, once the system initialization is complete, the
initial communication state can be overridden using the GEM
drop-down menu in the GEM User Interface screen. (See Enabling
GEM/SECS from the GEM User Interface Screen on page 13-4.)

Poll Delay 13

The system continually checks to determine if the Host computer is still

communicating with it. The number of seconds between these “polls” of the Host
computer is indicated in this box. (See Figure 13.13.) This number should only be

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changed under the supervision of those responsible for GEM/SECS communication

between the system and the Host.

Figure 13.13 Communication Option - Poll Delay

Communication Box

Poll Delay: To change the

number, highlight the box,
delete its contents and
enter the new number.
Preliminary

To change the number of seconds between “polling incidents,” highlight and delete
the current contents of the box. Type in the new “polling interval” in seconds.

Establish Communication Delay 13

Figure 13.14 Communication Option - Poll Delay

Communication Box

Estab. Comm. Delay: To

change number, highlight
the box, delete contents
and enter new time.

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During the system initialization, if the Init. Comm. State: is set to Enable, the system
attempts to establish a communication link between itself and the Host computer. If
the link is not established immediately, it continues to attempt the link at intervals set
in the Estab. Comm. Delay. This number should only be changed under the supervision
of those responsible for GEM/SECS communication between the system and the
Host.
To change the number of seconds between communication link attempts, highlight
and delete the current contents of the box. Type in the new “link attempt interval” in
seconds.

Control States 13

After a communication link is established between the system and the Host, the
Online status can take the form of either ONLINE/REMOTE or ONLINE/LOCAL.
Control of the system processing can be transferred from the system to the Host or
remain with the system.

Preliminary
Figure 13.15 Control States Option

Control States Box

Init. Control State: Click

on the menu-arrow to
display its menu.

Initial Control State 13

If the Initial Communication State is set to Enabled (see Initial Communication State
on page 13-7), then the system and the Host are set to be in communication with each
other. This does not mean that the Host is controlling the system. For the Host to
assume control of the processing at boot up time, Init. Comm. States must be set to
Enabled and the Control must be set to Online.

Š Online: In this state, when the system is fully initilized, its activity is controlled
by either the Host (ONLINE/REMOTE) or the system (ONLINE/LOCAL)
according to preprogrammed parameters. To set this option, click the menu
arrow next to the Init. Control State: interaction box. Click Online. (See
Figure 13.15.)

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Š Equipment Offline: In this state, the system is being operated by the operator and
not the Host. For allowable communication between Host and system while in
this state, see Semi Standard E30. While in this state, the operator must initiate
Online status. (See Figure 13.15.)
Š Host Offline: In this state, the system is ready to accept Host interaction
whenever the Host is responding. This state allows the system to continue
operation while waiting for Host interaction. (See Figure 13.15.)

Online Failed State: 13

This setting establishes a default state in the event that Initial Communication was set
to Online, and the Online status fails. If Online fails, the system automatically resets
to the state chosen in the Online Failed State selection. (See Figure 13.16.)

Figure 13.16 GEM Configuration - Online Failed State:

Preliminary

Online Failed State: Click

on the menu arrow to
display drop-down menu.
Click on the desired state.

Š Equipment Offline: With this setting, if the Online status fails, the system resets to
Equipment Offline. In this state, the operator must initiate generation of the Online status.
Š Host Offline: With this setting, if the Online status fails, the system resets to Host Offline.
In this state, the system is open to initiation of the Online status from the Host.

Spooling 13

When enabled, spooling is activated during communication failure between the Host
and the system. In the event of communication failure between the host and the
system, the system no longer sends events to the host. When spooling is enabled, the
events are written to a file. When the system is in this spooling mode, an asterisk (*)
appears in the status bar. When communication is restored, the host must send an
S6F23 (RSD) message to the system requesting that queued messages be purged or
requesting that they be transmitted. After the host message is received, the asterisk is
removed from the status bar.

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When activated, this allows the system to queue messages intended for the host so
they can be delivered when the communication is restored. (See Figure 13.17.)

Figure 13.17 GEM Configuration - Spooling

Spooling category box.

Preliminary
Š Spooling Enabled:
This option enables the spooling activity during periods of communication laps
between the system and the Host. Click on the empty checkbox next to Spooling
Enabled to enable this option. The X in the box enables the option. (See
Figure 13.17.)
Š Overwrite Spool:
This option requires that Spooling Enabled is active (X in the checkbox). When
activated, this option allows a full spool file to have its oldest messages
overwritten with new messages. Click on the empty checkbox next to Overwrite
Spool to enable this option. The X in the box indicates that the option is active.
(See Figure 13.17.)
Š Max. Spool Transmit:
This is the maximum number of messages that can be sent in response to a
S6F23 message from the Host. (See Figure 13.17.)
Š Max. Spool File Size:
This specifies the maximum size, in bytes, of the disk file that is used for the
spool area. (See Figure 13.17.)

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Equipment Identification 13

This information identifies the system, and the software being used to operate it.
These fields are generated by the system when the software is loaded.

Figure 13.18 GEM Configuration - Equipment Identification

Equipment Identification
category box.
Preliminary

Š Model (MDLN):
This field contains the model number (e.g., P-15). (See Figure 13.18.)
Š Rev.:
This field contains the version number of the software operating the system.
(See Figure 13.18.)
Š Device Name:
A default name is applied to the system by the system software when it is
installed. The name can be changed by the host, at host discretion. (See
Figure 13.18.)

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Event Reports 13

Figure 13.19 GEM Configuration - Event Reports

Event Reports options.

Preliminary
Š Annotated Reports (S6F13):
This option provides annotation with the S6F13 event reports sent to the Host.
(See Figure 13.19.)
Š W-Bit for S6:
This option specifies whether S6 messages are to be sent to the Host with the
Wait Bit set to 0 or 1. If the check box contains an X, the Wait Bit is set to 1.
(See Figure 13.19.)

Alarms 13

This option sets the S5 Alarm message Wait Bit to either 0 or 1 for transmission to
the Host. If the check box contains an X, the Wait Bit is set to 1.

Figure 13.20 GEM Configuration - Alarms

Alarms options.

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Š W-Bit for S6:

This option specifies whether S5 Alarm messages are to be sent to the Host with
the Wait Bit set to 0 or 1. (See Figure 13.20.)

Terminal Options 13

Figure 13.21 GEM Configuration - Terminal

Terminal options.
Preliminary

Š W-Bit for S10:

This option specifies whether S10 messages are to be sent to the Host with the
Wait Bit set to 0 or 1. An X in the check box indicates that the wait bit is set to 1.
(See Figure 13.21.)
Š Buffer TTY Msgs:
With this option enabled, the system does not display the messages. (See
Figure 13.21.)

Trace Configuration 13

This option is designed to limit which messages are stored in the Status (Log) File on
the disk. The divisions are set by message priority. Each message generated by the
system carries with it a priority rating. By choosing one of the options, only the
desired messages are saved to the Status (Log) File.

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Figure 13.22 GEM User Interface Screen - Trace Configuration

To access the Trace

Configuration Window,
click on Trace Cfg…

Preliminary
1. To access the Trace Configuration dialog box from the GEM/SECS window,
click on Trace Cfg… from the GEM drop-down menu. (See Figure 13.22.)

Figure 13.23 Trace Configuration Dialog Box

Step 2 Choose the priority level

of the messages to be stored.

Step 3 Click on OK to save the

configuration.

2. Choose the priority level of the messages to be stored by clicking in the radio
button of the selection. (See Figure 13.23.)
Š Low Priority (All Messages)
This option prescribes saving all messages to the Status (log) file.
Š Medium Priority (Most Messages)
This option prescribes saving to the Status (log) file, most generated messages,
generally omitting those messages used only for communication.
Š High Priority (Only Status Bar Messages)
This option prescribes saving only the most important messages, those that are
typically displayed in the Status Bar Messages box.

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3. Click on OK in the Trace Configuration dialog box to save the configuration.

GEM S TATUS W INDOW 13

When the GEM option is installed in a system, the GEM status window can be
accessed through the Status Bar at the top right of all screens operating in the system
environment.

Figure 13.24 GEM User Interface Screen - GEM Status

GEM Status bar: Current GEM

Status; Click on the bar to display
the GEM Status window.
Preliminary

Current GEM Status Information 13

1. To access the GEM Status window, click on the Status Bar at the top right of the
screen (circled in Figure 13.24, where it appears in every screen.)

Figure 13.25 GEM Status Window

GEM Status: Current general

communication information
status. Read-Only.

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2. The GEM Status window displays the current GEM communication status in
the system. This window can be helpful for troubleshooting purposes.
Š Link State: The Link State has two possibilities:
Enabled: This means that the communication link between the system
and the Host is established. In this mode, the system and Host might
be either Communicating or Not Communicating. Note: Not
Communicating can also mean that it is “active until communications
are formally established” (S1F13 and S1F14).
Disabled: This means that the communication link between the
system and the Host has been disabled so no link is possible in this
state.
Š Control State: The Control State has two possibilities:
Online: This means that the system is in operating mode. In this state,
control of the system can be from: Host (Host computer controlling
the processing); or Local (the system controlling its own activity).

Preliminary
Host Offline: This means that the Host is not sending or responding to
messages from the system. In this case, if the control state is set to
Local, the system continues to process wafers. If the system is set to
Host control, the system has limited functionality.
Offline: This means the system is not sending or responding to
messages from the Host. In this case, the system can only operate
under Local control.
Š Online Substrate: This is the status of the communication link. The Online
status could either be Online/Remote (Host control) or Online/Local
(system control).
Š Spool State: This is the status of the spooling activity between the system
and the Host if the system is set to spool and the communication link is
active. If the system is set to spool information, then the spooling activity
is either Active or Inactive. During a communication interruption, the
system spools messages to a queue. When communication is restored, the
Host can send an S6F23 message requesting that the stored messages be
sent to the Host.
Š Prev. Proc. State: This indicates which processing state the system was last
in, immediately prior to the current processing status. For more
information on the process states see the KLA-Tencor Profiler SECS
Interface manual.
Š Process State: This indicates which processing state the system is currently
operating in. For more information on the process states see the
KLA-Tencor Profiler GEM/SECS Interface manual.

GEM TTY Messages: Sending and Receiving 13

It is possible to send and receive TTY messages using GEM. The messages dealt with
in this screen are strictly text communications between the system and the Host.
These are not commands that the Host computer can respond to.

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Sending TTY Messages to the Host 13

Figure 13.26 GEM Status Window

Step 1 To open the

interactive window for
sending TTY messages,
click here.
Preliminary

1. To open the dialog box for sending TTY messages, click on the Send TTY Msg to
Host button. (See Figure 13.26.)

Figure 13.27 Send TTY Message Window

Step 2 Click in the message

box to activate cursor, then type
the message.

2. Type in the message that is to be sent to the Host screen. When satisfied with the
message content, click on the OK button to send it to the Host. (See
Figure 13.27.)

View and Acknowledge TTY Message From the Host 13

When a message comes from the Host, it can be viewed in the View and Ack Tty Msg
from Host window. To enter the window, click on the View and ACK Host TTY Msg
button (circled in Figure 13.28 below). If a message arrives from the Host during
normal processing, an indicator appears (the letters TTY) at the upper right corner of
the screen, in the status bar. Click on the Status Bar to display the GEM Status box.

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Figure 13.28 GEM Status - View and Ack Host TTY Msg Window

View and Acknowledge

Host TTY Message button.

Preliminary
The Host might require a response from the system signalling that the message
delivered to the system was read. To acknowledge receipt of the message click on the
ACK HOST MSG (Acknowledge Host Message) button (circled in Figure 13.29).

Figure 13.29 View and Ack TTY Msg from Host Window

Text from Host message

appears here.

Click on the ACK HOST

MSG to acknowledge
receipt of the message.

Uploading Recipes to the Host 13

Using GEM/SECS, process recipes can be uploaded (exported) to the Host computer.
If the information has been stored in one of the files in the Database File Manager, it
can be uploaded using the following procedure. (Note: the Host can also initiate the
upload.)

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1. From any top level screen, click on the Database File Manager icon.

Figure 13.30 Database File Manager Icon Choice

Step 1 Double-click on
the Database File
Manager icon to display
the Catalog screen.

2. The Database Catalog screen is displayed. This screen provides access to: Scan
Preliminary

Recipes; Scan Data; Sequence Recipes; Sequence Data. (See the access buttons,
circled in Figure 13.31. Only the Recipe screens are used in this procedure.)

Figure 13.31 Database Catalog Screen.

Step 3 Only the

Scan Recipe and the
Sequence Recipe
catalogs are used in
this procedure.

3. Either Scan Recipe or Sequence Recipe can be chosen. The window then
displays a list of related recipes. (See Figure 13.31.)
4. In the chosen window, move the cursor over the desired item in the list and click
on it. This highlights the specific file/recipe that is to be uploaded. (The screens
are presented below.)

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Figure 13.32 Scan and Sequence Recipe Windows

Scan Recipe Window

Step 5 To upload (export) a

recipe, click on PPTransfer
then on Upload.

Preliminary
Sequence Recipe Window

5. In the Screen Menu bar, click on PPTransfer to display the PPT drop-down menu.
Click on Upload. (It is available in all four screens. See circled display in the
Scan Recipe Window in Figure 13.32.)

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6. This displays the Upload dialog box. (See Figure 13.33.) Check the file name
presented in the dialog box and compare it against the file highlighted in the
database catalog window. They should be the same.
7. If they are the same, click on OK. It is then transferred to the Host.

Figure 13.33 Upload Window

Step 7 If the correct Step 6 Check the file

recipe for upload is name against the recipe
named in this box, name from the catalog.
click on OK to send it. They should be the same.

Downloading Recipes from the Host 13

Using GEM/SECS, process recipes can be downloaded (imported) from the Host
computer. To download a recipe from the Host, use the following procedure.
Preliminary

1. From any top level screen, double-click on the Database File Manager icon.(See
Figure 13.34.)

Figure 13.34 Database File Manager Icon Choice

Step 1 Click on the

Database File Manager
icon to display the
Catalog screen.

2. When the Database File Manager opens, click on the 2D or 3D icons in the tool
bar so the system displays the required recipe type. (See Figure 13.35.)

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3. From the Catalog (database) screen click on PPTransfer (Process Program

Transfer) in the Screen menu bar to display the PPT menu. Click on Download to
display the PPid (Process Program identification) window. (Download is circled
in Figure 13.35.)

Figure 13.35 Database Screen - PPTransfer Menu

Step 3 Click on Download to

display the PPid window.

Step 2 Click on 2D to display 2D

file list and 3D to display 3D file list.

Preliminary
4. In the PPid: box, type in the exact name of the recipe that is to be downloaded.
(See Figure 13.36.)
5. Click OK to begin the Download process. (See Figure 13.36.)

Figure 13.36 PPid Window

Step 5 When the recipe Step 4 Enter the exact name

name is in the PPid field, click of the Recipe to be
OK to start the download. downloaded from the Host.

6. When the download is complete, the recipe appears in either the Scan Recipe file
(2D or 3D) or the Sequence Recipe file (2D or 3D), depending on which type of
recipe it is. GEM/SECS directs the recipe to the proper file. The downloaded
recipe can now be accessed.

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Preliminary

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 14
WAFER STRESS APPLICATION OPTION Chapter 14

14

I NTRODUCTION 14

Stress can be generated in the film and wafer as a result of thin film deposition. The
deformation of the thin film can create bending and compressing, or expansion of the
substrate surface. The result is a slight concave or convex curvature of the wafer.
Careful monitoring of the thin film stress data is useful for reducing process variation.
The KLA-Tencor Wafer Stress application option provides a tool for measuring the
wafer curvature at the wafer surface so calculations can be made regarding the stress
generated by a deposited film. This is accomplished by creating a reference scan
before deposition, and comparing it with the post deposition scan of the same wafer,

P rel i mi n a ry
in the same position, using the same scan recipe.
The KLA-Tencor Profiler software calibrates the following stress values:
Š Average Stress — derived from a polynomial fit of the entire profile, excluding
5% of the fit data on either end.
Š Maximum Stress — the maximum absolute stress value.
Š Center Stress — stress at the midpoint of the profile data.

Chapter Contents 14

This chapter describes:

Š Data Collection on page 14-4
Š Loading Wafers on page 14-5
Š The Stress Application Window on page 14-7
Š Selecting, Creating, and Modifying a Stress Recipe on page 14-12
Š Saving a Stress Recipe on page 14-20
Š Printing a Stress Recipe on page 14-22
Š Creating Stress Data on page 14-22
Š Analyzing Stress Scan Results on page 14-26

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Stoney Equation 14

The Stoney equation for stress in a thin-film layer deposited on a substrate is as

follows:
2
1 E t
σ = ------- ⋅ ---------------- ⋅ ---s
6R ( 1 – v ) t f

where
E
---------------- = wafer elastic constant
(1 – ν)

σ = stress
ts = wafer thickness
tf = film thickness
Preliminary

R = radius of curvature
E = Young’s Modulus for the wafer (substrate)
ν = Poisson’s Ratio
As a profile is taken, the height of the wafer is being measured as a function of
position:
y = f(x)

where
2 3⁄2
[ 1 + ( dy ⁄ dx ) ]
R ( x ) = -------------------------------------------
2 2
-
d y ⁄ dx

with y = Z-axis.
Two methods are available to obtain y (which relates to the Z-axis) from the profile.
These are the two methods of calculation that exist for determining the stress: the
least square fit (13 Point Least Square Fit), and the polynomial fit (Polynomial Fit).
The recommended algorithm is the Polynomial Fit. It is chosen in the Stress recipe
editor, at the bottom of the screen. This algorithm produces the best repeatability of
the two available methods. The calculation provides three polynomial order options,
5th, 6th, and 7th order. For the best repeatable results, use the 5th order polynomial fit
(see Choosing the Stress Calculation Method on page 14-19).

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Polynomial Fit 14

The Polynomial Fit uses the entire data set. It is important to note that higher order
polynomials (6th and 7th) might result in fitting data to local irregularities. The
polynomial fitting procedure is as follows:
A function y = f(x) can be expressed in terms of a polynomial order n as
[3] [4] [5],

y = c0 + c1x + c2x2 +…+ cnxn

As illustrated above, n + 1 coefficients exist for polynomial n. After the value of

the coefficients are computed, the new y values for different values of x can be
computed.
EXAMPLE:

Preliminary
In the actual polynomial fit algorithm, a 5th, 6th, or 7th order polynomial is used
for the calculation. In this example, a 3rd order polynomial is going to be used
for the purpose of illustrating the process of fitting a polynomial.
The general equation for a 3rd order polynomial is:

y = c0 + c1x + c2x2 + c3x3

To compute the coefficients 4 equations are required to compute the 4
unknowns. The 4 equations are generated by multiplying the above equation by
the coefficients of c3, c2, c1, and c0.

x3y = c0x3 + c1x4 + c2x5 + c3x6

x2y = c0x2 + c1x3 + c2x4 + c3x5

xy = c0x + c1x2 + c2x3 + c3x4

y = c0 + c1x + c2x2 + c3x3

The next step is to solve this set of simultaneous equations to find the values of
c3, c2, c1, and c0. Crout’s method [3] [4] is used here to solve this.
When the coefficients have been calculated, the new values for y are computed
for different values of x. The radius of curvature is calculated for any value of x
using the following formula:

2 3⁄2
[ 1 + ( dy ⁄ dx ) ]
R ( x ) = -------------------------------------------
2 2
-
d y ⁄ dx

where,

dy/dx = 3c3x2 + 2c2x + c1 and d2y/dx2 = 6c3x = 2c2

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The results are then used to calculate stress using the stress formula presented at the
beginning of this section.

Least Square Fit 14

The Least Square Fit method is more complicated than the Polynomial Fit method. It
consists of fitting local sections of data to circular arcs and computing the mean
radius from the local radius of curvature. This is more susceptible to noise variations
and fine surface geometries, making it less robust.

NOTE: The Least Square Fit method is provided so that users can
correlate stress results with old generation profilers where it was the
default algorithm used for stress.

Explanation: The 13 Point Least Square Fit algorithm immediately disregards the
beginning and ending 5% of the data points. It then divides the remaining scan length
into three identical lengths of 0.3L (L equals the scan length). (See Figure 14.1.)
Preliminary

Within each 0.3L section, the local radius of curvature is calculated for each set of 13
data points in the section. Starting with the first data point, it calculates the local
radius for the first 13 points (1-13). Then the calculation is made for the second set of
13 points (2-14). (See Figure 14.1.) This continues until data point N-12 of the
section where it calculates the last point (N = total data points in the section).

Figure 14.1 13 Point Least Square Fit Calculation Illustration

First 0.3L of Second 0.3L of Third 0.3L of

the data points the data points the data points
3 - 15
2 - 14
1 - 13

last 13
points
Center Stress is
5% excluded calculated from data in 5% excluded
data points this segment. data points

The average radius of each 0.3L segment is the mean of the local radii. The stress is
calculated for each 0.3L segment based on the mean radius of that section. The
Average Stress and the Max Stress reflect the mean and maximum stress of all the
segment stress calculations. The Center Stress is the stress calculated from the mean
radius of the center 0.3L segment. (See Figure 14.1.)

D ATA C OLLECTION 14

Use the Wafer Stress application to compare pre- and post-processing traces. This
comparison calculates the curvature caused solely by the process-induced stress.

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Only the pre- and post-deposition traces, along with their summaries, are saved.
Stress values are not saved but are recalculated each time for the raw traces. To
calculate the stress values, both the pre- and post-deposition traces must be present in
the Scan Data catalog.

Scan Data Identification 14

To compute and display a difference measurement, both pre- and post-deposition raw
data must be saved. Saving the raw and summary data allows for the recalculation of
stress values using different parameters.
In order to save and store data for retrieval and use in the stress application, each data
set must be given a name. The name must contain 79 characters or less and should be
designed to help the user identify it as a pre- or post-processing scan. Ideally the scan
name also includes other information such as a reference to the substrate composition.
However, it is up to the user to come up with a suitable name. The name is entered in
the dialog box shown in Figure 14.2.

Preliminary
Naming Scan Data Procedure 14

When a scan is initiated in the Stress application, this dialog box appears.
1. Enter the scan data name in the variable box.
2. Click OK to accept the name. This initiates the scan.

Figure 14.2 Stress Recipe Name Assignment Dialog Box

Click in the Scan ID Click OK when the

variable box and enter name has be entered.
the name to be used to
identify the scan data.

L OADING WAFERS 14

In the P-15 system, the manual load procedure is used. For general information on
installing a precision locator, see Installing the Precision Locator: on page 11-47. See
Optional Stress Precision Locators on page 11-55 for graphic representations of some
of the stress locators.
The system might come with a stress locators. Use the manual load procedure. (See
also Figure 14.4.)
The stress measurement procedure depends on a pre-processing scan of the same
wafer that is subsequently measured after processing. The two scans are then
compared and a stress calculation is performed by the system. For the results to be
meaningful, the scan must be taken of the identical location on the same wafer, before
and after processing. Use the following procedure to create the first scan.
This procedure assumes that the precision locator is in place on the sample stage.

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Load Wafer - Manual Procedure 14

Begin: (Manual) Load 1. From the Catalog screen, click on the Stress icon. This opens the Stress catalog
Wafer Procedure screen displaying the Stress Recipe list. (See Figure 14.3.)

Figure 14.3 Catalog Screen – Choosing the Stress Application

Step 1 Choose the

Stress icon to open the
Stress Catalog screen.

2. In the Stress screen, click Substrate to display its menu. (See Figure 14.4.)
Preliminary

Figure 14.4 Stress Screen with Substrate Menu

Step 2 Click on Substrate to

display its menu.

Step 3 Click on Manual Load to

move the stage to the door.
Step 7 After the wafer has been
placed on the stage, click on
Substrate.
Step 8 Click on Manual Load.
The stage moves back under
the stylus.

3. From the Substrate menu choose Manual Load. (See Figure 14.4.) This moves
the sample stage to the stage door. Do not open the stage door until the stage
stops.

CAUTION: Do not operate the stage or elevator with the stage door
open. If the stage or elevator is activated with the stage door open, the
system door interlock causes the system to cut power to all motors.

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4. Open the stage door.

Figure 14.5 Precision Locator on the Stage

Step 5 Place the wafer on the

stage with the stage pin in the
notch.

Three points on
which the wafer
rests.

Step 5 Position the wafer so

that it rests against the
positioning plate.

Preliminary
5. Place the wafer on the stress precision locator, with the locator pin firmly in the
wafer notch, and the left side of the wafer against the positioning plate. (See
Figure 14.5.)
The wafer rests on three precision points. (See Figure 14.5.)
6. Close the stage door.
7. Click Substrate, in the menu bar, to display its menu.
End: (Manual) Load Wafer 8. From the menu, choose Manual Load. This moves the sample stage back under
Procedure the stylus. (See Figure 14.4.)
9. Leave the Stress screen open for the next procedure.

T HE STRESS A PPLICATION W INDOW 14

Stress Recipe Catalog 14

This section describes the various parts of the Stress Recipe Catalog screen and the
function of the stress recipe related buttons.
1. Click the Stress icon in the Catalog screen. (See Figure 14.6.)

Figure 14.6 Catalog Screen – Choosing the Stress Application

Step 1 Choose the

Stress icon to open the
Stress Catalog screen.

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2. This displays the Stress application screen. If the Recipe catalog is not
displayed, click on Stress Recipe Catalog to view the currently saved and
available stress recipes. (See Figure 14.7.)

Figure 14.7 Stress Application Screen

Step 2 If not already

highlighted, click on Stress
Recipe Catalog to display
the current list of stress
related scan recipes.

Recipe list area. See

Figure 14.8.
Preliminary

Recipe functions. See

Figure 14.9.

3. Choose a Recipe to use for a stress scan by clicking on the recipe to highlight it.
If the name is long, it might be truncated in the list area, making it difficult to
distinguish between similar names. When highlighted, the recipe names appear
in its entirety in the Stress Recipe Name box. (See Figure 14.8.)

Figure 14.8 Stress Recipe List Area

The Stress Recipe Name.

When a recipe is selected, its
name appears in full in the
Stress Recipe Name box.

List of currently available Dates and times that the corresponding

Stress Recipes. recipes were created.

The Stress Recipe Name list contains all the currently defined and saved Stress
Recipes. Each recipe is presented with its creation date and time. (See
Figure 14.8.)

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4. Four function buttons are positioned at the bottom of the recipe list area. (See
Figure 14.7.) These are all duplicated functions, residing originally in the menu
bar menus for use in conjunction with the listed recipes. (See descriptions in
Figure 14.9.)

Figure 14.9 Function Buttons in the Stress Recipe Screen

This prints the currently

highlighted recipe contents.

This opens the Stress Recipe This initiates a stress This deletes the currently
Editor for the currently scan using the currently highlighted recipe.
highlighted recipe. highlighted recipe.

Š Click Print to print the currently highlighted recipe.

Š Click View/Modify to open the Stress Recipe Editor for the currently

Preliminary
highlighted recipe.
Š Click Start to initiate a stress scan using the currently highlighted recipe.
Š Click Delete to delete the currently highlighted recipe from the recipe list.

Stress Scan Data File Catalog 14

This section describes the various parts of the Stress Data Catalog screen and the
function of the data file related buttons.
1. To access the available stress data files, click on Scan Data Catalog. This
displays the list of data files from scans that have been performed using a Stress
Recipe for use with the Calculation function. (See Figure 14.10.)

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Figure 14.10 Stress Screen with the Scan Data Catalog Displayed

Step 1 Click on Scan Data

Catalog to bring up the
Stress Scan Data Catalog
and Calculation function.

Step 3 Click here to

The scan data list is
The Calculation delete the currently
described in Figure 14.11.
Preliminary

function and highlighted data set

Step 2 Click Review to set-up box. See
open the Stress Analysis Figure 14.12.
screen for the currently
highlighted scan data file.

The Scan Data Catalog contains the scan data files that were collected from scans
that used stress recipes. Each data file listing contains six items. See
Figure 14.11 for details.

Figure 14.11 Scan Data Information in the Stress Data Catalog

Scan ID is the name the

scan data was given when
the scan was taken.
Stress Recipe is the scan X and Y are the X-, Date and Time are the
recipe that was used to Y-coordinates at which actual date and time at
perform the scan. the scan began. which the scan was run.

Š Scan ID is the name given the data file when a scan was performed.
Š Stress Recipe is the name of the recipe that was used to create the scan.

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Š X and Y are the actual coordinates on the wafer where the scan began.
Š Date and Time are the actual date and time that the scan was created.
2. Click Review to open the Stress Analysis screen to view the data in the
highlighted data file.
3. Click Delete to delete the currently highlighted stress data set.
4. The Calculation function and setup is configured and executed in this screen.
(See Figure 14.12.)

Figure 14.12 Stress Calculation Function and Set-Up

Click Set Pre to make the

currently highlighted data file
the pre-stress scan.

Click Set Post to make the

currently highlighted data file
the post-stress scan.

Preliminary
When both the pre- and
post-stress data files have
been chosen, click Calculate
to do the stress calculation.

Š Click Set Pre to make the currently highlighted data file the pre-stress scan.
Š Click Set Post to make the currently highlighted data file the post-stress
scan.
Š With both pre- and post-stress data files chosen, click Calculation to
perform the stress calculation.

NOTE: This step requires that the appropriate recipe has already
been chosen in the Stress Recipe Catalog. (See Stress Scan Analysis
Procedure, Step 2. on page 14-28.)

The Stress Screen Tool Bar 14

The Stress Screen has a tool bar that contains six active icons. These icons present
quick access to six functions that also reside in the individual menu bar items.

Table 14.1 Tool Bar Icons

Button Action
Invokes the Stress Recipe Editor to add a new stress recipe.

This icon is only active if there is a change in a recipe or for saving a

new recipe. It saves changes to the current file.

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Table 14.1 Tool Bar Icons

Button Action
Displays the Print dialog box for printing data on the current screen.

Starts a scan using the current stress recipe.

Toggles to the XY View screen.

Switches to the Theta view window.

S ELECTING , C REATING , AND M ODIFYING A S TRESS R ECIPE 14

Preliminary

Select and Open a Stress Recipe 14

1. From any top level screen, click the Stress icon in the process icon bar.
This opens the Stress application screen.
2. This displays the Stress application screen. Click on Stress Recipe Catalog to
view the currently saved and available stress recipes. (See Figure 14.13.)

Figure 14.13 Stress Application Screen

Step 2 If not already

highlighted, click on Stress
Recipe Catalog to display
the current list of stress
related scan recipes.

Step 3 Click to highlight

the recipe that is to be
modified.

Step 4 To open the Stress

recipe screen, click on
View/Modify.

3. Click on the recipe that is to be viewed or modified. (See Figure 14.13.)

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4. Click View/Modify (see Figure 14.13.) to open the Stress recipe editor.

Figure 14.14 Stress Recipe Editor Window

Substrate Specification is for choosing the substrate modulus and thickness. See discussion on page 14-18.

The current recipe name is

not editable.

Number of Stress Points is

for use with Least Square Fit
calculation procedure. See
discussion on page 14-16.

Scan Start Position is the X-

Y-coordinates of beginning of
the scan. See discussion on

Preliminary
page 14-16.

Scan Parameters sets the

system scan parameters. See
discussion on page 14-17. Stress Calculation Method is for
choosing the calculation formula.
See discussion on page 14-19.

Creating a New Stress Recipe 14

1. To open the Stress application, double-click the Stress icon in the Catalog
screen. (See Figure 14.15.) This opens the Stress Catalog screen.

Figure 14.15 Catalog Screen – Choosing the Stress Application

Step 1 Choose
the Stress icon to
open the Stress
Catalog screen.

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2. This displays the Stress application screen. If it is not currently active, click on
Stress Recipe Catalog to view the available stress recipes. (See Figure 14.16.)

Figure 14.16 Stress Application Screen

Step 4 Click NEW to open

the recipe editor for
creating a new recipe.

Step 2 If not already

chosen, click on Stress
Recipe Catalog to display
the current list of stress
related scan recipes.

Step 3 Click to highlight

Preliminary

the recipe that is to be used

to create the new recipe.

3. If there is a recipe that has parameters closest to those required in the new
recipe, highlight it.
4. Click NEW. This brings up a dialog box for naming the new recipe.
5. Enter the name of new stress recipe.

Figure 14.17 Stress Recipe Name Dialog Box.

Step 5 Enter the recipe

name in the box provided.

Step 6 When the

name is correctly
entered, click OK.

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6. Click OK to accept the name, and the Stress Recipe Editor opens, ready for
entering new parameters to form a new stress recipe. (See Figure 14.17.)

Figure 14.18 Stress Screen with Stress Recipe Editor Open

Preliminary
7. Make the necessary changes to the parameters. (See Modifying a Stress Recipe
on page 14-15.)
8. If the user attempts to start a scan using this recipe before saving the new
parameters, a dialog box appears stating that the recipe parameters have changed
and request a decision as to whether to save the new parameters or not. It is
important to save the new parameters if the recipe is to be used again to run
comparative scans.

Figure 14.19 Saving Recipe Parameters Dialog Box

Click OK to save the new parameters.

Modifying a Stress Recipe 14

Once a recipe has been chosen and the Stress recipe editor opened, the recipe
parameters can be modified.

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Recipe Name 14

This part of the recipe cannot be modified. The current recipe name is listed at the top
left of the screen. (See Figure 14.14 and Figure 14.20.) (If a new recipe is required
with parameters like those of the current recipe, click NEW at the left end of the tool
bar. This creates a new recipe with the same attributes at the original recipe.)

Figure 14.20 Stress Recipe Name

Number of Stress Points 14

This number was used with the Least Square Fit calculation procedure. (See Choosing
the Stress Calculation Method on page 14-19.) The calculations related to this
procedure are described in the introduction to this chapter. (See Figure 14.14 and
Figure 14.21.) This number belongs to legacy software and has no effect on any
Preliminary

calculation. Ignore this number.

Figure 14.21 Number of Stress Points

This number is only active with

the 13 Point Least Square Fit.

Scan Start Position 14

This is the start position on the wafer for each comparative scan, described in X-,
Y-coordinates. If the proper procedure was used for wafer placement on the stress
locator, this setting should ensure that the pre- and post-processing scans are
performed at the same location on the wafer. (See Figure 14.14 and Figure 14.22.)
For general purposes, the longer the scan, the more accurate are the results. The
amount of time required to complete the scan must be balanced against the need for
accurate data. KLA-Tencor recommends scanning 80% of the wafer diameter to
determine the stress.
EXAMPLE:
When scanning across the diameter of an eight inch wafer (200000 µm), the
scan should be 160000 µm long. This means that the scan should begin at
X = -80000, Y = 0. It should end at X = 80000, Y = 0. (See Figure 14.22.)
To change the coordinates:
1. Highlight the current X-coordinate number and enter the new one.
2. Highlight the current Y-coordinate number and enter the new one.

NOTE: If the wafer needs to be rotated, enter the XY View screen,

rotate the wafer, exit the XY View screen, then enter new coordinates.

OR

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1. ALTERNATIVE Step 1: An alternative is to click on the XY icon in the tool bar

to open the XY View screen.
2. ALTERNATIVE Step 2: Move the video image until finding the target area, then
click on the desired start position. (In scans of specific attributes this can prove
to provide easier positioning of the scan start, but in general, it is repeatability is
less accurate.)
3. ALTERNATIVE Step 3: Click OK to accept the start position.

Figure 14.22 Scan Start Position

Scan Parameters 14

Preliminary
The Scan Parameters allow the user to set the scan length, speed, sampling rate and
applied force. Each of these parameters affects the outcome of the stress calculation.
(See Figure 14.14 and Figure 14.23.)

Figure 14.23 Scan Parameters

Scan Length: For best results, the scan length should be 80% of the diameter of
the wafer being measured for stress. The longer the scan, the more accurate the
results.
Scan Speed: Scan speed often works in concert with Applied Force. If the speed
is too high with a very light Applied Force, the results could be inaccurate. (See
Stylus Force below.) For long stress scans, it is recommended that the scan
speed be 10000 µm/s or less, with 2000 µm/s - 5000 µm/s being optimum.
Sampling Rate: This is the number of data points collected as a function of time.
For a set sampling rate, as the scan speed increases, the data points become
further apart.
Stylus Force (Applied Force): Applied Force is the force exerted on the sample
surface by the stylus tip. As the force goes up on a smaller tip, the greater the
potential for damage to the sample surface and the to the tip itself. For this
reason, it is recommended that at least a 2 µm tip be used for this type of scan
over a long distance (12.5 µm or even 25 µm is acceptable). The larger tip allows
for a greater Applied Force and a faster scan speed without danger to the tip or
sample surface. The recommended force setting for a long fast scan using a
2 µm stylus is 5 mg.

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Stylus Start Position: This allows the user to choose which profile type is used
in the scan. Three choices are presented: Middle , Top , and Bottom
. These profile types correspond to the stylus movement limits as
described in Profile Type: Available choices for each range and the resultant
scan traces on page 3-42.
KLA-Tencor recommends using the Middle option first. If the Middle option
limits out, observe the direction of the limit and choose the corresponding
profile type.

Substrate Specification 14

The Substrate settings refer to the wafer composition and thickness. Each type of
substrate has an elasticity constant that is important in the calculation. The software is
programmed to provide the constant (Modulus) for each listed substrate type. (See
Figure 14.14 and Figure 14.24.) Click on the menu-arrow next to the substrate Name
variable box and scroll through the list and choose the substrate being used. Choosing
the substrate automatically sets the Modulus. The operator must set the substrate
Preliminary

Thickness by double-clicking in the variable box and entering the new thickness in
microns (µm). (See Figure 14.24.) It is important to note that the user is given another
chance to enter the thickness each time the scan is started. This way, a sample can be
tested numerous times using the same material in different thicknesses without having
to go into the recipe each time to change this parameter.
If the user is measuring a substrate that is not listed, the user can choose None from
the list of substrates and enter the modulus and thickness. Like the other substrates,
the user is given the opportunity to change the thickness each time a scan is run using
this recipe.

Figure 14.24 Substrate Specification

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The following is a list of common substrates and their corresponding elastic

constants. The Orientation is the crystalline orientation of the substrate being tested.

Table 14.2 Elastic Constant of Substrates

Substrate Material Orientation Elastic Constants
(1011 Pa)
Aluminum * 1.030
Aluminum Oxide (Al2O3) + 3.835

Aluminum Oxide (Al2O3) + 4.895

Aluminum Nitride (AIN) + 4.367

Beryllium Oxide (BeO) + 4.367
Borophosphosilicate (BPSG) Glass + 1.500
Gallium Arsenide (GaAs) 111 1.741

Preliminary
Gallium Arsenide (GaAs) 100 1.239
Germanium (Ge) 111 1.837
Germanium (Ge) 100 1.420
Phosphosilicate (PSG) Glass + 0.988
Quartz + 0.850
Sapphire + 4.080
Silicon 111 2.290
Silicon 100 1.805
Sodalime glass (Corning microsheet 0211) + 0.973

(+ = amorphous structure)

Choosing the Stress Calculation Method 14

1. The stress can be calculated using either of two methods. The first, Polynomial
Fit, is the recommended method. This method gives the best repeatability. The
Using Polynomial Fit option gives the opportunity to choose from three
polynomial orders, 5th, 6th, and 7th. The best results come from the 5th order
polynomial. The higher the order, the higher the possibility that smaller sample
surface features could be included in the calculation.
To choose the order, click on the menu-arrow next to the variable box and click
on the order to be used. (See Figure 14.25.)

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2. The second method is the 13 Point Least Square Fit method, described in the
introduction to this chapter. 13 Point Least Square Fit calibration is a legacy
formula that does not provide the best calculation results for stress. Its
repeatability is not as good as the Polynomial Fit procedure. It is still present in
the software for use by those who wish to compare the results of current scans
with older scans that used the 13 Point Least Square Fit calibration for stress
calculations before the new Polynomial Fit formula was available. This method
should not be used unless it is well understood and conducted for specifically
defined results. (See Figure 14.25.)

Figure 14.25 Stress Calculation Method

Step 1 Click in the empty

radio button to choose it. The
dot indicates that it is chosen.

The 13 Point Least Square

Fit option (does not provide Step 2 Click on the menu-arrow to view the menu.
Preliminary

the best reproducible results). Choose the desired polynomial order. 5 is

generally acceptable for most stress applications.

S AVING A STRESS R ECIPE 14

It is necessary to save a current recipe if any of the following circumstances occur:

Š If any of the parameters in a current recipe have been changed and the changes
need to be preserved.
Š If any of the parameters in a current recipe have been changed and the changes
need to be preserved, but the old recipe also needs to be saved. In this case it is
necessary to perform a Save As procedure.
Š If a new recipe has been created and used but not saved, and there is a need to
preserve the recipe for future use.

Saving Recipe Parameters 14

When the parameters in a current recipe have changed and those changes need to
preserved in the current recipe, use the following procedure.
1. From the Stress Recipe screen, click Recipe in the Menu Bar. This displays its
menu.
2. Click Save.

Saving Recipe Parameters as a New Recipe 14

If the user changes parameters in a recipe and needs to keep the old recipe in tact
while preserving the changes, a new recipe can be created from the original.

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1. When the parameters have been changed in a recipe, and before the changes
have been saved as part of the original recipe, click Recipe at the far left end of
the Menu Bar to display its menu.

Figure 14.26 Stress Screen With Recipe Menu

Click Recipe to display its

menu.

Click Save As to open the

Stress Recipe Name dialog
box. (See Figure 14.27.)

Preliminary
2. Choose Save As to display the Stress Recipe Name dialog box.

Figure 14.27 Stress Recipe Name Dialog Box.

3. Enter the name of the new recipe name in the provided space. The name should
help the user quickly identify the specific use for the recipe.
4. Click OK to establish the new recipe using the parameters displayed in the
original one.

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P RINTING A S TRESS R ECIPE 14

With the Stress Recipe Editor open, click on the printer icon. This prints the currently
displayed stress recipe.

Figure 14.28 Printer Icon in Tool Bar

Click the printer icon to

print the list of stress recipe
parameters for the current
Preliminary

recipe.

C REATING STRESS D ATA 14

Taking a Single Pre-Stress Scan 14

In order to create stress data that is accurate and usable, the following must be
observed:
Š The same wafer must be used for the pre- and post-stress scans.
Š The wafer must be positioned in exactly the same place on the stage for both
pre- and post-stress scans. This is accomplished through the use of a stress
precision locator.
Š The pre- and post-stress scans must be performed using the same recipe.

Load a Wafer on the Stress Locator 14

It is essential that the wafer be placed in the same place, in the same orientation on the
stage, for both the pre- and post-stress scans. It is also very important that the wafer
be supported on three points. If the wafer rests flat on the stage, its weight could
create deformation that could distort the stress data. For these reasons it is essential
that the stage be equipped with a stress precision locator.

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1. If the stress precision locator is not in place on the stage, attach it using the
procedure described in Installing a Precision Locator on page 11-47, with
additional reference to Optional Precision Locators on page 11-58.
2. Load the wafer using the Load Wafer - Manual Procedure on page 14-6.

Choosing a Stress Recipe 14

Choose the stress recipe that is to be used for both the pre- and post-stress scans using
the following procedure.
1. To open the Stress application, click the Stress icon . This opens the
Stress Catalog screen.
2. This displays the Stress application screen. If the Recipe catalog is not
displayed, click on Stress Recipe Catalog to view the currently saved and
available stress recipes. (See Figure 14.29.)

Figure 14.29 Stress Application Screen

Preliminary
Step 2 If not already
highlighted, click on Stress
Recipe Catalog to display
the current list of stress
related scan recipes.

Recipe list area. See

Figure 14.30.

Step 4 To change Step 7 To start the scan

recipe parameters using the highlighted
click View/Modify. recipe, click Start.

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3. Choose a Recipe to use for a pre-stress scan by clicking on the recipe to

highlight it. When highlighted, the recipe name appears in its entirety in the
Stress Recipe Name box. (See Figure 14.30.)
If no changes are required to the current recipe before it is run, skip to Step 7.
If recipe parameter modifications are required before running the scan, continue.

Figure 14.30 Stress Recipe List Area

The Stress Recipe Name.

When a recipe is selected, its
name appears in full in the
Stress Recipe Name box.

List of currently available

Stress Recipes.
Preliminary

If the Stress Recipe must 4. If the recipe requires modification of parameters before the scans can be run,
be Modified: click View/Modify at the bottom center of the screen. (See Figure 14.29.)
5. The Stress Recipe window opens. Change the parameters requiring adjustment.
(For information of parameters see Modifying a Stress Recipe on page 14-15.)
6. To save the recipe changes either directly to the recipe or create a new recipe,
see Saving Recipe Parameters on page 14-20 or Saving Recipe Parameters as a
New Recipe on page 14-20.
Starting the Pre-stress 7. From either the Stress catalog screen or the Stress recipe editor, click the START
Scan button to initiate the pre-stress scan.

Figure 14.31 Stress Recipe Catalog Screen

Step 7 With the stress

recipe chosen, click
START to initiate the
pre-stress scan, using
the highlighted recipe.

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8. This displays the Scan ID dialog box. Enter a scan data identification name that
allows the user to clearly isolate it from other data.
EXAMPLE:
In Figure 14.32, pre_ refers to pre-stress, stress_ identifies the scan as
stress related, gal_ indicates that it is a gallium arsenide substrate, and 01 is
the scan number.

Figure 14.32 Scan ID Dialog Box

Step 8 Enter a distinct scan Step 9 When the scan data

identification name that can name is complete, click OK
help identify the created to accept the name and
data. begin the scan.

Preliminary
9. When the name has been entered, click OK to accept the scan data name and
begin the scan. (See Figure 14.33.)

Figure 14.33 Scan Screen with Real Time Scan Trace

The scan screen opens and

the scan begins. The scan
surface is displayed in the
video screen.
As the scan progresses, the
data points are recorded as
a trace in the scan window.

The scan recipe name and its

parameters are displayed in
the scan information box.

10. When the scan is complete, the data is automatically saved and the Scan
Analysis screen opens. (See Figure 14.34.)
To close the analysis screen, click on the control button at the top left corner of
the screen and choose Close from its menu. (See Figure 14.34.)

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Figure 14.34 Stress Scan Analysis Screen

To close the analysis screen,

click the control button and
choose Close.

The Scan ID is displayed at

the top of the Analysis data.
As in the illustration, the name
may be truncated.

Scan data information is

displayed for visual analysis.
Preliminary

Scan trace is displayed.

To close the analysis screen, click on the control button at the top left corner of
the screen and choose Close from its menu. (See Figure 14.34.)

Taking a Single Post-Stress Scan 14

Use the same procedure detailed in Taking a Single Pre-Stress Scan. Be sure to name
the scan in such a way that it can be distinguished clearly from other scans in regards
to pre- or post-stress, substrate, and any other pertinent information.
The scan should:
Š Have the same recipe as the pre-stress scan
Š Be made with the wafer placed on the stress locator
Š Be made with wafer in the same orientation on the locator as in the pre-stress
scan

A NALYZING STRESS S CAN R ESULTS 14

Stress analysis is accomplished through the comparison of a pre-stress scan and a

post-stress scan. The analysis is not saved, but is instead generated each time the
calculations are performed.

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Viewing Stress Scan Results 14

1. From the Stress screen, click on Scan Data Catalog. This displays the names of
the scan data files. (See Figure 14.35.)
Notice that the catalog list has information regarding the ID (name) of the data
file, the stress recipe used to collect the data, the X- and Y-coordinates at which
the scan started, the date the data was collected, and the time it was collected.

Figure 14.35 Stress Screen with Scan Data Catalog Displayed

Step 1 Click on Scan Data

Catalog to display the list of
data files.

Preliminary
Scan data files.

Step 10 To view the scan data

results, click Review.

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2. Click to highlight the data file that is to be viewed. Click Review at the bottom
center of the screen to open the data file. (See Figure 14.35.)

Figure 14.36 Stress Screen with Stress Data File

If only partial scan data is visible,

click on the cancel zoom icon to
display the entire graphic.
Preliminary

3. If the data is not fully displayed, click the cancel zoom icon. (See Figure 14.36.)
4. To return to the Stress catalog screen, press the ESC key.

Stress Scan Analysis Procedure 14

Analysis can be made by comparing a pre-stress single trace with a post-stress single
trace of the same wafer at the same location using the same stress recipe.
1. To open the Stress application, click the Stress icon . This opens the
Stress Catalog screen.
2. With the Stress Recipe Catalog chosen, click on the recipe that is to be used for
the calculation. A chosen recipe is highlighted. (See Figure 14.37.)

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3. After the recipe is chosen, click Scan Data Catalog. (See Figure 14.37.)

Figure 14.37 Stress Screen with Scan Data Catalog Displayed

Step 2 Click on Stress

Recipe Catalog to
display the list of Step 5 Click on
recipes. Choose a Set Pre to set the
recipe. pre-stress recipe.

Step 7Click on
Set Post to set
the post-stress
recipe.
Step 3 Click on
Scan Data Catalog
Step 8 Check the
to display the list of
Stress recipe to

Preliminary
data files.
ensure that it the
same as that in the
chosen data files. If
it is, click
Calculate.

4. Highlight the data file that is to be used as the pre-stress scan.

The Scan ID names might be difficult to tell apart if they are truncated.
However, when a data file is highlighted, its entire name is displayed above the
scan data file list, in the box titled Scan Data Name.
5. With the data file highlighted in the Stress Scan Data Catalog, click Set Pre to
choose the highlighted file for use as the pre-stress scan data file in the
calculation. (See Figure 14.37.)
6. Highlight the data file that is to be used as the post-stress scan.
7. Click Set Post to choose the highlighted file for use as the post-stress scan data
file in the calculation. (See Figure 14.37.)
8. When both pre- and post-stress data files are chosen, the Calculate button is
enabled. Check the recipe in the Analysis box and if correct for the pre- and
post-stress data files, click on Calculate to perform the stress analysis. (See
Figure 14.37.)

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9. If an incorrect match is made of recipes between the pre- and post-stress data
files, and the chosen recipe, a warning box appears. (See Figure 14.38.) Click
OK to abort the calculation. Start again by choosing the stress recipe in the
recipe catalog and again choose the pre- and post-stress scan data files.

Figure 14.38 Calculation Warning for Mismatched Recipes

10. If the data files are accepted for calculation, the Film Thickness dialog box
appears. (See Figure 14.39.) Enter the film thickness, in microns (µm) in the
variable box.
11. Click OK when the thickness has been entered. (See Figure 14.39.)
Preliminary

Figure 14.39 Film Thickness Dialog Box

Step 10 Double-click in the

variable field to highlight the Step 11 Click OK when
current value and enter the the correct film thickness
correct film thickness in microns. has been entered.

12. The calculation is performed by the system and the calculation results message
box titled, Polynomial Calculation Results, appears. (See Figure 14.40.) Click OK
to continue.

Figure 14.40 Polynomial Calculation Results

Step 11 Click OK
to continue.

13. The Stress calculation analysis screen opens for reviewing the result of the
calculation. (See Figure 14.41 and Choosing the Stress Calculation Method
on page 14-19.)

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Figure 14.41 Stress Calculation Analysis Screen

A general result is posted at the

top of the Stress analysis box. In
this case the results show the
stress to be Tensile.
(See Figure 14.43.)

The Stress analysis box

contains the stress calculation
results. (See Introduction
on page 14-1.)

Preliminary
Put a check in the check
box of each trace that is to
be displayed on the screen.

NOTE: The data and traces are fictitious and created only to show the position of data reports.

Analyzing the Results 14

The calculation results are displayed in the Polynomial Calculation Results message
box immediately after the scan is complete. See Table 14.3 for an explanation of the
individual results. Click OK to continue with the analysis display.

Figure 14.42 Polynomial Calculation Results

Click OK to continue.

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Table 14.3 Polynomial Calculation Results Message Box

Result Explanation
Polynomial Order Chosen as part of the Recipe. (See Choosing the Stress
Calculation Method on page 14-19.)
Max. Dev. Maximum Deviation of the fit polynomial from the original profile
Variance Variance = (Standard Deviation)2
Std. Dev. Standard Deviation from the Mean

After the Polynomial Calculation Results message box is closed, the Stress Analysis
screen is displayed. The Stress box in the upper left portion of the screen (see
Figure 14.43) displays the results of the calculation. The computative analysis is
characterized at the top of the box as either compressive or tensile. (See Table 14.4 for
an explanation of the box contents.)

Figure 14.43 Stress Calculation Results Box

Preliminary

This stress calculation

results indicate a
Tensile state.

The results in each category are displayed in MPa and dynes/cm2. In addition, the R:
in each set of data represents the Radius of Curvature. The Radius of Curvature is the
average radius used in calculating stress per the definitions in the Introduction.

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Table 14.4 Stress Calculation Results Box Contents

Result Explanation
Stress Designation Compressive

Positive value average stress (Ave.)

Positive value polynomial

Tensile

Negative value average stress (Ave.)

Negative value polynomial
Ave. Average stress over the entire scan, derived from the
polynomial fit of the entire profile minus 5% on either end.

Preliminary
Max. Maximum absolute stress over the entire profile
Center Stress at the center of the profile
Method Polynomial Fit or 13 Point Least Square Fit

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 15
CMP ANALYSIS ALGORITHMS Chapter 15

I NTRODUCTION 15

CMP (Chemical Mechanical Polishing) processes are used on a variety of different

surface compositions. In general, the analysis of CMP surface scans centers around
three structures: arrays, lines, and pads. Each of these structures requires its own
unique method of analysis. The analysis can be performed on scans in 2D or 3D
scans. In the P-15 systems, the analysis is integrated into the system software. Each
basic structure is discussed in its own section. The CMP Analysis chapter contains the
following sections:
Š Arrays on page 15-2

P rel i mi n a ry
Š Lines on page 15-3
Š Pads on page 15-5
Š Setup for Analysis on page 15-6
Š Analysis Application on page 15-8

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A RRAYS 15

For the purposes of this analysis, “array” is defined as an array of circular contacts or
vias (plug). The contacts or vias are usually a metal like tungsten or copper which
typically have polish rates higher than that of the surrounding array oxide. The basic
composition of a sample array is illustrated in Figure 15.1.

Figure 15.1 Sample Array

Field Oxide

Array oxide. Same

chemical structure but
has faster polish rates
due to presence of plugs.
Preliminary

Metal-filled contact or via

(plug). CMP polish rates
are typically higher than
that of array oxide.
Dashed line represents Erosion Recess
surface with no erosion

Using the ARRAY Analysis Routine 15

This routine is designed to perform analysis on both 2D and 3D Profiler data. The
same set of input parameters are used for 2D and 3D data belonging to a single recipe,
e.g., 2D slices from a 3D data set. The routine is intended for use with array profiles
that have negligible recess and considerable erosion. It calculates both erosion and
recession.

Analysis Process
The analysis is performed on Normal data as described in the following sequence:
1. The data is smoothed using a median filter with a kernel (smoothing window) of
five data points.
2. The “erosion region” (ER) is found by determining the minimum and maximum
slopes in the profile. The slope of each point is defined to be the average slope
with respect to the ten nearest neighbors.

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3. The “calculations region” (CR) is defined as some fraction of the ER. By default
this fraction is set to 1/2 (50%).
4. Determine the local maxima within the CR using a window of 5 data points.
5. Determine the local minima within the CR using a window of 5 data points.
6. Using the local maxima, interpolate to obtain a curve that fits those points
(curve A).
7. Using the local minima, interpolate to obtain a curve that fits those points
(curve B).
8. Calculate the average of curve A. This is the erosion value.
9. Calculate the average of curve B. Subtract the erosion value from this average to
obtain the recess value.

Lines 15

For the purposes of this analysis, “lines” is defined as an intermittent distribution of

metal and oxide lines. The metal line are usually a soft metal like aluminum or copper

Preliminary
which typically have polish rates higher than that of the surrounding array oxide. The
basic composition of a sample set of line is illustrated in Figure 15.2.

Figure 15.2 Sample Array of Lines

Field Oxide

Array Oxide – The same chemical

structure as the field oxide, has faster
polish rates due to presence of the
metal lines.

Metal Lines – CMP polish rates are

typically higher than that of array
oxide.

Using the LINES Analysis Routine 15

The LINES routine assumes that the lines are running parallel to each other. The scan
path must be perpendicular to the lines. This routine is designed to perform analysis
on both 2D and 3D Profiler data. The same set of input parameters are used for 2D
and 3D data belonging to a single recipe, e.g., 2D slices from a 3D data set. The
analysis is intended for profiles exhibiting both recess and erosion. It calculates both
erosion and recession.

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Analysis Process
The analysis is performed on Normal data as described in the following sequence:
1. The data is smoothed using a median filter with a kernel (smoothing window) of
five data points.
2. The “erosion region” (ER) is found by determining the minimum and maximum
slopes in the profile. The slope at each point is defined to be the average slope
with respect to the ten nearest neighbors.
3. The “calculations region” (CR) is defined as some fraction of the ER. By
default, this fraction is set to 1/2 (50%).
4. Determine the vertical range of data within the CR. Define Tolerance to be 1/2
of the vertical range.
5. Determine the local maxima within the CR using a window of variable size. The
size of the window is roughly equivalent to the pitch of the lines. The Tolerance
is used to calculate the size of this window for each individual data point.
6. Determine the local minima within the CR using a window of variable size. The
size of the window is roughly equivalent to the pitch of the lines. The Tolerance
Preliminary

is used to calculate the size of this window for each individual data point.
7. Using the local maxima, interpolate to obtain a curve that fits those points
(curve A).
8. Using the local minima, interpolate to obtain a curve that fits those points
(curve B).
9. Calculate the average of curve A. This is the erosion value.
10. Calculate the average of curve B. Subtract the erosion value from this average to
obtain the recess value.

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Pads 15

For the purposes of this analysis, “pads” is defined as a larger region of metal
surrounded by an oxide. The pads are usually a soft metal like which typically has a
polish rate higher than that of the surrounding oxide. The basic composition of a
sample pad is illustrated in Figure 15.3.

Figure 15.3 Sample Pad

Field Oxide

Preliminary
Metal-filled pad. CMP
polish rates are typically
higher for the pad than
that of array oxide.
Dishing

Using the PADS Analysis Routine 15

This routine is designed to perform analysis on both 2D and 3D Profiler data. The
same set of input parameters are used for 2D and 3D data belonging to a single recipe,
e.g., 2D slices from a 3D data set. The routine is intended for use with pad profiles to
calculate dishing.

Analysis Process
The analysis is performed on Normal data as described in the following sequence:
1. The data is smoothed using a median filter with a kernel (smoothing window) of
five data points.
2. Find the “erosion region” ER by finding the minimum and maximum slopes in
the profile. The slope at each point is defined to be the average slope with
respect to the ten nearest neighbors.
3. The “calculations region” (CR) is defined as some fraction of the ER. By
default, this fraction is set to 1/2 (50%).
4. Calculate the average of all data points within the calculation region. This will
be the dishing value.

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Setup for Analysis 15

Introduction 15

A scan can be programmed to include any of the three types of analysis, erosion,
recess, and dishing, using the scan recipe. The scan data is processed to present
erosion and recess, or dishing values to the Analysis screen. In addition, the 6.x
software saves the data from each scan so that the erosion, recess, or dishing values
can be calculated later by changing the recipe parameters used to create the original
scan.

Setup for Erosion and Recess Analysis 15

1. From the Catalog screen choose Scan Recipe.

2. Double-click on the required recipe to open the Recipe Editor for that recipe.
(Or click to highlight the required recipe, then click on View/Modify at the bottom
of the screen.)
3. From the Recipe Editor screen choose Setup Analysis Tools. This displays the
Preliminary

Setup Analysis Tools dialog box. (See Figure 15.4.)

4. Click on the CMP Analysis Setup tab to display its page. (See Figure 15.4.)

Figure 15.4 Setup Analysis Tools Dialog Box

Step 4 Click on the

CMP Analysis Setup
tab to display its page.

Step 3 Click on Setup

Analysis Tools to open
its dialog box.

5. From the Select CMP Application drop-down menu select either Array or Lines.
Both of these selection enable the Erosion and Recess analysis checkboxes in
the Select Parameters to Calculate field. Both choices open with a check in their
checkbox. (See Figure 15.5.) This indicates that they are enabled and will be
calculated, with the results displayed in the Analysis screen’s Statistics window.

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Figure 15.5 CMP Analysis Setup Page

Step 5 Choose the CMP

application either Lines The parameters in
or Array, to be analyzed. the right side of the
screen appear
active, but none of
these are currently
used in calculations.
Step 6 Choose the
parameter to be calculated.

Step 7 Click on OK to
save changes and close

Preliminary
the dialog box.

6. With either Lines or Arrays chosen, with the selected application displayed in
the Setup CMP Application drop-down menu field, choose the parameters
(Erosion, or Recess) to be calculated. The default is, both Erosion and Recess
are enabled. (See Figure 15.5.) To enable or disable a parameter, click in the
checkbox to toggle the check in and out of the field.
Notice the parameters on the right side of the screen appear to be active. Values
can be entered in the User Defined fields, but they are not currently used in the
calculations. These parameters are part of an upcoming capability enhancement
to the current algorithm.
7. Click OK when all the changes are complete. This closes the Setup analysis
Tools dialog box.
8. The recipe must be saved after the recipe changes are complete if they are to be
preserved in the recipe. (See Figure 15.5.)

Setup for Dishing Analysis 15

The dishing analysis is performed on Pads. When the Pads application is chosen, the
only parameter that is active is Dishing. Erosion and Recess are inactive.
1. In the CMP Analysis Setup page, choose Pads from the Select CMP Application
drop-down menu.
The Select Parameters to Calculate field changes to reflect the Dishing parameter
active and enabled. If left as it is, the Dishing analysis takes place and the results
are displayed in the Analysis screen’s Statistics window.

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Figure 15.6 CMP Analysis Setup for Pads Analysis

Step 1 Choose Pads

from the Select CMP
Application drop-down
menu.

Step 2The Dishing Step 3 After all

parameter is activated and changes are
enabled automatically. complete, click OK
Leave it enabled. to save them and
close the dialog box.
Preliminary

2. The Dishing parameter should be active and have a check in the checkbox
(enabled). Leave it that way. If no check is present, click in the checkbox to
place the check in the box. (See Figure 15.6.)
3. After all changes are complete, click on OK to save the changes and close the
dialog box. (See Figure 15.6.)

Analysis Application 15

During the analysis of data following a scan, the chosen parameters are calculated and
displayed in the Statistics window of the Analysis screen. For data gathered from
scans that used recipes from previous software versions, the data can be recalculated
by changing parameters in the recipe originally used to create that data. this means
that data which was originally processed without the erosion, recess, or dishing
calculations can be recalculated by activating these applications and parameters in the
original recipe.

Analysis of New Data 15

When a scan or sequence of scans are run using one or more recipes containing the
CMP Analysis Algorithm, the results are displayed in the Analysis screen
immediately following the scan.
1. Set up the recipe to be used according to the procedures described in the section
titled Setup for Analysis on page 15-6.
2. If the recipe, or a series of related recipes, is to be used in a sequence, follow the
procedure for establishing a sequence described in Creating a Sequence Recipe
on page 7-13.

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Starting a Sequence Containing CMP Analysis

The following procedure assumes that the recipes used in the sequence have already
been set up to perform the CMP analysis.
1. In the Catalog screen, choose Sequence Recipe. This displays the available
sequence recipes in the List window. (See Figure 15.7.)
2. In the Sequence Scan List window, click on to highlight the sequence recipe to
be used. (See Figure 15.7.)
3. Click START to initiate the scan sequence. (See Figure 15.7.)

Figure 15.7 Sequence Recipe Catalog Screen

Step 3 Click on
START to initiate the
scan sequence.

Preliminary
Step 1 Choose
Sequence Recipe.

Step 2 Choose the

sequence recipe to be
used for scans.

4. Click on START in the tool bar to initiate the scan sequence. (See Figure 15.7.)
The screen changes to the View Scan screen and scan sequence begins. The
procedure continues until all the scans at all the designated sites are complete.
When the sequence ends the system performs all the required calculations. The
Analysis screen is then displayed.

Analysis Screen for Sequences Running the CMP Analysis

The Analysis screen is composed of two major windows, the Analysis Trace and the
Statistics. For more information on 3D the Analysis screen functions see 3D Analysis
Screen Features on page 9-3, and for 2D see 2D Analysis Window Features
on page 8-5.
Once the screen is open, the results of the CMP Analysis calculations are visible in
the Statistics window. (See Figure 15.8.)

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The sequence in Figure 15.8 contains scans from each wafer in a cassette. The same
sites were scanned on each wafer. One scan is performed on each different site on the
wafer. Each site scan is performed using a different recipe. Each identical scan site on
all the wafers is processed using the same recipe. E.g., all #3 scan sites use the same
recipe. This makes it possible to correlate the results and view them all together in
one place.
1. To view the trace of the statistics set in the Statistics window, click on the site
number below the cassette wafer slot. (See Figure 15.8.)

Figure 15.8 Analysis Screen for Sequence with CMP Analysis

Preliminary

Step 1 Click on the

wafer site number of the
wafer from the cassette
slot displayed above it to
view its graph.

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The Erosion and Recess calculation results are displayed in their respective
columns in the Statistics window. (See Figure 15.9.) If one of the calculations
shows a result that is questionable, the trace can be viewed and the data
recalculated after adjusting parameters, like applying a filter or cursor
placement.

Figure 15.9 Sequence Erosion and Recess Results

Sequence
identification
information.

Preliminary
Erosion and Recess calculation results
for the scan of site #3 on some of the
wafers in Lot 1-F-931.

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Index

Symbols 3D roughness parameters, scan recipe parameters 3-76

% for qualifying neighboring bins - setup analysis tools 3-103 3D scan information field, view scan screen 6-12
3D scan parameter summary 3-25
Numerics 3D scan parameters definition, scan recipe parameters 3-25
13 Point Least Square Fit 14-20 3D step height cursors, scan recipe parameter 3-94
2D bearing ratio, scan recipe parameter 3-80 3D view scan screen
2D cutting depth (CutDp), scan recipe parameter 3-81 menu bar 6-17
2D data recalculation of parameters 8-48 debug menu 6-19
2D glitch removal 8-40 file menu 6-17
2D mean spacing Sm (1/HSC), scan recipe parameter 3-85 image menu 6-18
2D mean spacing Sm (1/PC), scan recipe parameter 3-87 mode menu 6-17
2D median filters 3-61 pan menu 6-19
2D peak count (PC), scan recipe parameter 3-86 scan menu 6-18
2D roughness parameters 3-74 sequence menu 6-18
2D roughness parameters table 3-74 trace menu 6-17
2D roughness parameters, scan recipe parameters 3-73 sequence scan 6-12

P re l i mi n a ry
2D scan information field 6-3 single scan 6-11
2D scan parameters window, scan recipe parameters 3-17 tool bar 6-15
2D slice data from 3D image 9-46 video image 6-19
2D waviness parameters 3-75, 3-76
2nd deskew time delay 11-17 A
3D aborting a scan 6-23
data view options 9-41 add button, sequence recipe 7-4
image manipulation, shading mode 9-41 administrator 10-2
3D analysis screen tool bar 9-3 alarms, GEM/SECS 13-13
3D analysis tool bar align sample 5-35
disable analysis tools 9-14 manual alignment 5-38
enable analysis tools 9-14 ambient temperature
leveling tool 9-15 facilities requirement 11-2
3D analysis tools operating environment 11-2
height tool 9-15 analysis
slice tool 9-16 stress 14-26
3D bearing ratio (Sbi), scan recipe parameter 3-82 analysis screen icon
3D cursors 3D view scan window 6-16
setting by click and drag 3-90 analysis screen icon, view scan screen 6-7
setting cursors in 3D cursor window 3-91 analysis tool bar 9-46
3D cursors parameters, scan recipe parameters 3-88 disable analysis tools 9-14
3D general parameters enable analysis tools 9-14
boxed 3-68 leveling tool 9-15
full scale 3-68 analysis tools
peak 3D (Sp) 3-70 height tool 9-15
slope X 3-70 slice tool 9-16
slope Y 3-70 analysis tools, setup 3-101
total indicator runout (TIR3D) 3-70 analyzing 2-D scan data
valley 3D (Sv) 3-70 customizing the graph display 8-16
3D glitch removal 9-17 leveling the trace 8-6
3D image manipulation, 3D image proportions 9-40 starting the 2D analysis application 8-1
3D leveling analyzing 2-Dscan data
line-by-line 9-33 cursor position using feature detection 8-24
3D leveling cursors, scan recipe parameter 3-89 cursors 8-6
3D material volume (Vm), scan recipe parameter 3-82 leveling cursors 8-10
3D measurement cursor measureing step height on curved surfaces 8-47
setting by click-and-drag 3-93 measurement cursors 8-11
3D measurement cursor, scan recipe parameter 3-93 measuring radius on curved surface 8-42
3D median filters 3-61 saving scan data 8-47, 9-45
3D roughness parameters 3-77 setting cutoff filters 8-34

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long-wave 8-37 C
short-wave 8-35 CALC recalculation button 8-5
starting 2D analysis application 8-1 calibration
analyzing 3D scan data 9-1 applied force 12-3
applied force calibration matrix 12-51
calibration 12-3 mid-session password access 11-42, 12-1
stress recipe 14-17 opening calibration screen 2-7
stylus parameters 3-36 scan position offset 4-11, 12-10
apply before detection 3-48 coarse 12-11
area of peaks, scan recipe parameter (Area+) 3-67 step height 12-28
area of valleys, scan recipe parameter (Area-) 3-67 camera diagnostics 3-107
arithmetic mean deviation (Sa), scan recipe parameter 3-78 cancel sequence 7-9
arrow buttons capture a video image 2-20
scan site positioning 5-18 catalog screen description 3-2
arrow keys catalog screen function buttons 3-9
left and right 2-3 catalog screen toos 3-3
up and down 2-2 center object search 5-32
associate dies scan sites 7-27 clear, die grid menu 7-26
auto scaling icon click and drag, definition 2-4
3D view scan window 6-16 close/minimize icon 3-5
Preliminary

auto scaling icon, view scan screen 6-7 collate copies checkbox 2-31
auto verify associated dies 7-28 color-coding height in 3D scans 9-42
auto verify in sequence recipe 7-4 combined sequence statistics, calculation procedure 7-32
automation communication delay 13-8
automation settings in the sequence execution options computer - details 1-3
dialog box 11-37 concave
average (Ra), scan recipe parameters 3-74 feature detection parameter 3-45
average (Wa), scan recipe parameters 3-76 configuration
average height, scan recipe parameter (Ave) 3-67 data export path 11-27
date and time 11-3
B date/time 11-3
base angle, teaching a base angle 7-12 deskew options 11-29
Basic Skills deskew twice to align theta 11-29
Using the Trackball 2-3 editing system configuration 11-14
basic skills GEM configuration window 13-6
adjusting the video image 2-15 GEM/SECS 13-5
clearing a diagnostic message 2-12 configuration screen 13-6
exiting the profiler application 2-8 online failed 13-10
exporting data graphs 2-21 spooling 13-11
file naming conventions 2-19 trace 13-14
keyboard 2-1 handler
naming and saving files 2-19 type 11-20
powering down the profiler 2-10 instrument setup 11-15
powering up the profiler 2-4 machine 13-2
printing data 2-30 machine history recorder 11-23
protecting the stylus arm assembly 2-13 enable recorder 11-24
saving video images 2-20 output format 11-25
security log on 2-4 machine type (desktop/system) 11-20
starting the profiler application 2-5 mid-session password access 11-42, 12-1
trackball 2-3 optional software features 11-26
using the trackball 2-3 pattern recognition
bearing ratio 3-79 number of groping sites 11-34
bearing ratio (Sbi), 3D scan recipe parameter 3-82 options 11-30
bearing ratio and cutting depth 3-79 setting minimum score to stop groping 11-34
bearing ratio, 2D scan recipe parameters 3-80 safe area 11-21
bevel height 2-14 screen 13-2
binarization threshold 5-9 screen access 2-7
binarization thresholds 5-34 sequence execution options 11-35
bitmap format (*.bmp) 2-21 automation settings 11-37
blob analysis 5-9 sequence ID prompts 11-36
buffer TTY msgs, GEM/SECS 13-14 show measurement sites 11-37

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software options 11-15 stress data identification 14-5

stage configuration 11-5 data analysis
system configuration chapter 11-1 2D tools 8-5
system configuration dialog box 11-14, 13-2 surface parameter summary window, 2D 8-5
vacuum options 11-15 trace window, 2D 8-5
configuration screen 11-4 data button in sequence recipe 7-5
contrast 2-18 data display
contrast - binarization threshold 5-9 Fast Fourier Transform (FFT) 8-18
contrast, video adjustment 2-18 trace information 2-30
control button description 3-4 Z limits adjustment 8-16
control button menu 3-4 data export path configuraiton 11-27
close 3-4 data options
maximize 3-4 dialog box 7-10, 7-21
minimize 3-4 sequence editor 7-10
move 3-4 data points saturation 3-41
restore 3-4 database file manager
size 3-4 access 2-7
control state exporting data 2-23, 2-28
GEM/SECS status window 13-17 date and time, setting 11-3
control states, (GEM/SECS) 13-9 debug menu

Preliminary
convex 3D view scan screen 6-19
feature detection parameter 3-45 delete key 2-2
copies 2-31 density of summit (Sds), 3D scan recipe parameter 3-78
correlation scan deskew
correlation sub-scan window 7-31 configuration options 11-29
long scan 7-29 deskew twice to align theta 7-38, 7-48, 11-30
sequence 7-30 configuration settings 11-29
sub-scan window 7-31 die grid linking options 7-17
viewing scan data 7-30 groping layer options in sequence 7-20
correlation scanning - description 1-2 manual deskew in sequencing 7-36
creating a new recipe 3-15 mode setting in sequence 7-8
cursor options in sequencing 7-20
leveling 8-10 pattern recognition deskew teach screen 7-19
measurement 8-11 diagnostic message
movement 2-2, 2-4 clearing 2-12
moving text cursor 2-2 diagnostic options - standard 3-108
cursor control, fine movement mode 8-9 diagnostic options, scan recipe parameter 3-105
cursor positions diagnostic, clearing message 2-12
set using feature detection 8-24 diagnostics menu
cursors scan catalog screen 3-8
leveling 3-54 die grid
measurement, scan recipe parameter 3-54 associate dies for sequence 7-26
cursors (2D scans) 3-50 change grid number colors 5-32
cursors, 3D parameters, scan recipe parameter 3-88 clear die grid 5-5
cursors, scan recipe parameter 3-54 clearing 7-26
cutoff filter die grid menu 5-5
setting 8-34 disassociate from sequence 7-29
cutting depth, 2D, scan recipe parameter 3-81 displaying grid numbers 5-32
linking die grid to sequence 7-16
D load die grid 7-18
damage, to stylus 2-13 load die grid procedure 7-17
data menu 7-17
analyzing 3D scan data 9-1 navigation 5-19
data file access 2-7 creating a die grid 5-21
export from database file manager 2-28 positioning within die 5-20
export graphs 2-21 positioning within grid 5-20
printing 2-30 wafer navigation 5-19
saved 2D data reevaluation 8-48 die grid navigation
stress data collection 14-4 navigate a wafer 5-31
stress data creation 14-22 turn off 5-30
stress data file catalog 14-9 turn on 5-28

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direction binary data files 7-11

X 5-16 data graph 2-22
Y 5-16 data graphs 2-21
disable analysis tools 9-14 database file manager 2-7
disk locator File menu selection 2-29
3-point 11-50 file type options 7-11
disk precision locators 11-54 graphics size 2-22, 2-24, 2-25, 2-28
disk size adjustment 11-53 the graph 2-22, 2-28
Display 6-22 export data
display center object view from database file manager 2-28
edit binarization threshold 5-9 export data icon 2-29
distance to edge, scan recipe parameter (edge) 3-68 export graph button 2-23
down area use 2-2 export options 7-54
DownBase export paths
feature detection parameter 3-45 recipe transport options 7-53
DownEdge default setting 7-53
feature detection parameter 3-45 exporting graphs
drop/lift stylus button 5-11 from scan data catalog 2-23
dropout die from sequence data catalog 2-26
clearing 5-5, 5-31
Preliminary

die grid navigation 5-31 F

DuraSharp stylus protection warning message 12-37 facility system requirements 11-2
fast
E button 5-18
edge based pattern recognition 7-47, 11-31, 11-34 down 5-7
edit menu Z up 5-7
scan catalog screen 3-6 fast approach - nulling 5-13
edit recipe button, sequence recipe 7-4 Fast Fourier Transform (FFT) - data display mode 8-18
edit system configuration 11-14 feature
edit X, Y, offset site button, sequence recipe 7-5 feature detection parameter 3-45
edit X, Y, theta site button, sequence recipe 7-5 feature detection 8-24
elastic constant 2D analysis screen 8-24
Stoney’s equation 14-2 cursor positioning 8-24
stress application table 14-19 feature description table 3-46
electrical, facilities specification 11-2 filter cutoff (um) 3-49, 8-31
elevator feature detection (2D scans) 3-43
elevator button and fast Z up 5-7 feature detection, 2D scans 3-43
teach lowest position 11-10 feature number, scan recipe parameter 3-46
elevator safe position 11-13 file format
elevator slow focus speed 11-13 *.bmp definition 2-21
emergency shutdown 2-12 *.tif definition 2-21
enable analysis tools 9-14 *.wmf definition 2-21
enable automated depth analysis checkbox 3-102 file format, graphics 2-22, 2-24, 2-25, 2-28
enter key uses 2-3 file menu
entering comments, scan recipe parameters 3-113 2D view scan screen 6-8
environment 3D view scan screen 6-17
general system requirements 11-1 scan catalog screen 3-6
equipment identification, GEM/SECS 13-12 file naming 2-22, 2-24, 2-25, 2-28
equipment offline files
initial control state, GEM/SECS 13-10 naming 2-19
online failed state, GEM/SECS 13-10 naming convention special characters 2-19
esc key saving 2-19
closing dialog boxes 2-2 film thickness dialog box 14-30
minimize menu 2-2 filter cutoff, scan recipe parameter 3-49
escape, see esc key 2-2 filters
event report, GEM/SECS 13-13 long wavelength cutoff 8-37
exit profiler 2-8 median 3-61
exit profiler application 2-8 short wavelength cutoff 8-35
export filters and cursors
3D graphs 2-21 filters 3-50
ASCII data files 7-11 fit and level 3-60

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leveling cursors 3-55 initial communication state 13-7

measurtement cursors 3-57 initial control state 13-9
noise filter 3-52 equipment offline 13-10
RC filter 3-52 host offline 13-10
relative to feature detected 3-59 online 13-9
filters and cursors (2D scans) 3-50 interface 13-4
final adjustment - nulling 5-14 link 13-1
find site manually without pat. rec., pattern rec. option 7-9 online failed state 13-10
fit and level, for step height on curved surface 8-47 equipment offline 13-10
fit and level, scan recipe parameter 3-60 host offline 13-10
focus 5-14 poll delay 13-7
focusing 5-13 program 13-1
format spooling 13-10
(*.bmp) 2-21 max. spool file size 13-11
(*.tif) 2-21 max. spool transmit 13-11
(*.wmf) 2-21 overwrite spool 13-11
bitmap 2-21 spooling enabled 13-11
export size 2-24 status display description 3-5
Metafile 2-21 status window 13-16
TIFF 2-21 terminal options 13-14

Preliminary
function buttons buffer TTYmsgs 13-14
scan recipe list window 3-12 W-bit for S10 13-14
function keys, special system functions 2-2 trace configuration, priority rating 13-15
TTY messages 13-17
G sending 13-18
Gaussian filter 8-30 view and acknowledge 13-18
Gaussian filter, scan recipe parameter 3-51 uploading recipes to host 13-19
Gaussian noise filter 3-48 ppt transfer 13-21
GEM Disabled, GEM/SECS status 3-5 upload 13-21
GEM Offline, GEM/SECS status 3-5 user interface 13-4
GEM User Interface 13-4 GEM/SECS, online/local status 3-5
GEM/SECS 13-4 GEM/SECS, online/remote status 3-5
access 2-7 GEM/SECS, status response table 3-5
alarms 13-13 general parameters 3-65
options 13-13 2D
W-bit for S6 13-14 area of peaks 3-67
application 13-4 area of valleys 3-67
application use 13-4 average height 3-67
choosing in instrument setup 13-3 distance to edge 3-68
communication link 13-4 peak (Pp) 3-68
configuration 13-4, 13-5, 13-13 profile length 3-68
communication options 13-6 radius 3-67
screen 13-6 slope 3-67
control states 13-9 step height 3-67
disabling 13-4 step width 3-68
downloading recipes from host 13-22 total area 3-67
PPid box 13-23 total indicator runout (tir) 3-67
PPid window 13-23 valley (Pv) 3-68
enabling 13-4 3D 3-68
equipment identification 13-12 peak 3D (Sp) 3-70
establish communication delay 13-8 slope X 3-70
establishing communication 13-1 slope Y 3-70
event report 13-13 total indicator runout (tir) 3-70
GEM status window 13-16 valley 3D (Sv) 3-70
control state 13-17 general parameters, 2D normal trace parameters 3-65
link state 13-17 glitch removal
online substrate 13-17 2D 8-40
prev. proc. state 13-17 3D 9-17
process state 13-17 graphics
spool state 13-17 orienting on screen 9-7
icon 13-4, 13-5 screen image rotation 9-7

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graphs, naming conventions 2-19 initial control state 13-9

groping initialize profiler 2-6
lowest match score - definitio 7-47 installation
lowest match score - definition 7-47 precision locators 11-47
minimum score to stop groping - definition 7-47 interfacial area ratio (Sdr), 3D scan recipe parameter 3-78
parameters interfacial area ratio (Sdr), roughness parameters 3-78
lowest match score 7-47, 11-33 interlock
maximum score to stop 7-47, 11-33 door safety interlock 11-13
number of groping sites 11-34 system shutdown warning 11-7, 11-11, 12-8, 12-30
retry layers 7-46, 11-32
table 7-46, 11-30 J
retry layers 7-46 Jaz drive caution 7-49
setting options for use with pattern recognition 11-30
using with pattern recognition 7-44 K
groping parameters, retry layers 11-32 kernel 15-2
kernel, median filter size 15-2
H keyboard 2-1, 2-3
handler hot keys 2-2
button for sequence recipe 7-5 keys, description of action 2-2
options trackball 2-3
Preliminary

load options 7-60 keyboard functions 2-2

wafer selection 7-60 keyboard use 2-2
setting handler type 11-20 kurtosis (Sku), scan recipe parameter 3-78
handler options
accessing 7-59 L
hard disk measurement warning 2-15 lamp brightness 2-18, 7-48, 11-30
height 10pt (Rz), scan recipe parameters 3-74 left arrow use 2-3
height 6pt (Rz), scan recipe parameters 3-74 level
height text field 2-30 calibration 12-41
height tool 9-15 level calibration 12-42
high resolution camera only - diagnostic options 3-107 level icon - 3D analysis 9-12
high spot count and peak count 3-84 leveling
high spot count and peak count, scan recipe parameters 3-84 3D, line-by-line 9-33
high spot count, lowest point of roughness trace 3-85 leveling cursor movement 2-3
high spot count, scan recipe parameter 3-84 leveling cursor setting 8-10
highest plane - setup analysis tools 3-102 leveling cursors, 3D, scan recipe parameter 3-89
histogram - analysis tools 3-105 leveling cursors, scan recipe parameters 3-54
host computer communicaiton setup 13-1 leveling cursors, setting 3-55
host menu, GEM/SECS leveling offset 11-9
scan catalog screen 3-7 leveling reference - setup analysis tools dialog box 3-102
host offline leveling reference, scan recipe parameter 3-96
GEM/SECS, initial control state 13-10 leveling reference, scan recipe parameters 3-99
GEM/SECS, online failed state 13-10 leveling tool 9-15
hot keys, description 2-2 light rise change - 3D analysis 9-14
lights distance change, 3D analysis 9-14
I lights, 3Danalysis
If Fail menu in sequence options 7-9 change highlight planes 9-14
image lights, change rotation, 3D analysis 9-13
screen image manipulation 9-7 line by line leveling, scan recipe parameter 3-92
video image output file formats 2-20 line leveling 9-33
image menu linearity calibration only - diagnostic options 3-108
3D view scan screen 6-18 line-by-line leveling activation 9-33
view scan screen 6-9 line-by-line leveling, 3D 9-33
image rotation buttons, automatic 9-4 link state, GEM status window 13-17
image rotation menu 9-6 list files of type, export format 2-22, 2-24, 2-25, 2-28
image rotation, automatic - 3D analysis 9-3 list window 2-16
image rotation, manual handle drag 9-4 scan recipe catalog screen 3-10
images load
saving video images 2-20 die grid 5-28
individual traces parameter 3-32 die grid load menu item 5-5
initial communication state 13-7 load die grid 7-18

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load die grid dialog box 7-18 measurement cursor, 3D, scan recipe parameter 3-93
load die grid procedure 7-17 measurement cursors 3-57
load wafer procedure in sequence 7-13 setting relative to feature detection 3-60
load workspace 7-35 measurement cursors, scan recipe parameters 3-54
load/unload menu item 5-8 median filter
load die grid, dialog box 7-18 glitch removal 8-40
locator 2-14 median filters 3-61
log on procedure 2-5 medium button, move increments 5-18
logoff and shutdown 2-11 menu bar 2-16
loss of power cautions 11-44 scan recipe screen 3-6
lot ID save option 7-11 menu bar, catalog screen 3-5
lowest elevator position metafile export format (*.wmf) 2-21
caution 2-14 Metafile format (*.wmf) 2-21
change with locator 2-14 MicroHead IIlf 1-1, 1-4
lowest match score 7-47 MicroHead IIsr 1-1
lowest plane - setup analysis tools 3-102 MicroHead IIxr 1-1, 1-4
lowest point of roughness trace, high spot count 3-85 min. plateau width, scan recipe parameter 3-48
L-stylus stylus table 4-1 minimum match score, groping 11-33, 11-34
minimum score to stop groping 7-47
M minimum score to stop groping, setting 11-34

Preliminary
machine configuration minimum Z value, valley 3D 3-70
use in GEM communications 13-2 mode menu
machine history recorder 11-23 3D view scan screen 6-17
options 11-25 view scan screen 6-8
output format 11-25 most populus plane, histogram 3-99
recorder file name 11-24 mouse tools menu - 3D analysis 9-7
machine type, configuration setting 11-20 move elevator to safe position before moving stage 11-13
magnification move speeds 5-6, 5-18
changing with zoom in or zoom out 5-11 multi analysis in a sequence 7-32
magnification control 5-11 multi analysis in a sequence, button 7-5
magnification, negative, 3D analysis 9-13 multi-scan average 12-32
magnification, positive, 3D analysis 9-13 multi-scan average, scan recipe parameter 3-21
maintain aspect ratio, export size 2-24
maintenance N
authorized maintenance access 11-42, 12-1 naming conventions, special characters 2-19
changing password for mis-session access 11-43, 12-2 navigation
man load button 5-11 between program level screens 2-7
manual deskew in sequence recipe 7-36 screen 2-7
manual load neighboring bins, percent qualifying, histogram 3-97
caution 2-14 New button, scan catalog screen 3-12
menu item 5-8 new maintenance password 11-44, 12-3
teach position 11-38 new recipe, creating a new recipe 3-15
manual load/unload (automatic sequence) 7-61 no back scan before scan,diagnostic option, scan recipe
manual scaling icon parameter 3-108
3D view scan window 6-16 no leveling, diagnostic option, scan recipe parameter 3-108
manual scaling, view scan screen 6-7 no linearity correction, diagnostic option, scan recipe
material volume (Vm), 3D, scan recipe parameter 3-82 parameter 3-108
max. spool file size, GEM/SECS spooling 13-11 no motion - diagnostic options 3-105
max. spool transmit, GEM/SECS spooling 13-11 no motion scan, diagnostic option, scan recipe
maximum match score, groping 11-33 parameter 3-107
maximum Ra (Max Ra), scan recipe parameters 3-74 no noise filter, diagnostic option, scan recipe parameter 3-108
maximum Z value, peak 3D, scan recipe parameters 3-70 no nulling - diagnostic options 3-105
MaxView 3D™ Imaging 1-4 no nulling before scan, diagnostic option, scan recipe
mean peak height (Rpm), scan recipe parameters 3-75 parameter 3-107
mean spacing Sm (1/HSC), 2D, scan recipe parameter 3-85 noise filter, scan recipe parameter 3-52
mean spacing Sm (1/PC), 2D, scan recipe parameter 3-87 noise, facilities requirement 11-2
measurement null 5-13, 5-19
cursor movement 2-2 nulling
disk measurement caution 2-15 fast approach 5-13
head 2-13, 2-14, 5-10 final adjustment 5-14
head damage 2-14 slow approach 5-14

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number of bins - setup analysis tools 3-103 cancel sequence 7-9

number of data points parameter 3-34 find site manually without pat. rec. 7-9
number of groping retry layers 11-34 proceed measuremnent 7-9
number of stress points 14-16 retry pat. rec. manually 7-9
skip, no measurement 7-9
O minimum match score 11-34
offsets, proximity sensor to hi mag camera 11-42 save/apply video settings 7-48, 11-30
online failed state, GEM/SECS 13-10 setting options 11-30
online substrate, GEM status window 13-17 site-by-site 7-48
online, initial GEM control state 13-9 teach global sites 7-18
online/local, GEM/SECS status 3-5 teach pattern button 7-19
online/remote, GEM status window 13-17 teach site 1 7-19
online/remote, GEM/SECS status 3-5 pattern search criteria 7-40
optics pause sequence icon
focusing 5-15 3D view scan window 6-16
top view and side view focusing 5-15 pause sequence, view scan screen 6-7
optional precision locators 11-54 peak (Pp), scan recipe parameter 3-68
optional software features 11-26 peak (Rp), scan recipe parameters 3-74
enabling 11-27 peak (Wp), scan recipe parameter 3-76
options field, sequence editor 7-7 peak 3D (Sp), 3D scan recipe parameter 3-70
Preliminary

overwrite spool, GEM spooling 13-11 peak count (PC), 2D scan recipe parameter 3-86
peak count and high spot count 3-84
P peak/valley (Rt), scan recipe parameters 3-74
P_AdvCalibration 10-2 peak/valley (Wt), scan recipe parameter 3-76
P_Calibration 10-2 perform deskew twice to align theta 7-48, 11-30
P_Configuration 10-2 plateau threshold, scan recipe parameter 3-47
P_Diagnostics 10-3 point interval parameter 3-35
P_EditScanData 10-2 pole tip recession nulling 11-41
P_EditScanRecipe 10-2 poll dalay, GEM/SECS 13-7
P_EditSeqData 10-3 polynomial calculation results, stress 14-30, 14-31
P_EditSeqRecipe 10-3 polynomial fit, stress calculation 14-3
P_GemSecs 10-3 polynomial fit, stress calculation option 14-19
P_StageMapping 10-3 post-stress scan 14-26
P_Stress 10-3 power down procedure 2-10
P_TranScanData 10-3 power failure, cautions 11-44
P_TranScanRecipe 10-2 power up procedure 2-4
P_TranSeqData 10-3 power user, system security 10-2
P_TranSeqRecipe 10-3 powering down, system reset 11-44
P_VirtualArtifacts 10-3 PPTransfer, GEM/SECS recipe upload 13-21
P-15 performance details 1-2 precision locator 11-47
P-240 caution 2-14
deminsions 11-2 disk locator 11-54
model information field, GEM 13-12 illustrated 11-58
pan and zoom icon 6-16 installation 11-47
pan menu optional locators 11-54
2D view scan screen 6-10 standard locators 11-54
3D view scan screen 6-19 stress locator
partial dies location 5-5 manual load 14-6
partial dies, die grid positioning 5-31 use and loading 14-22
password precision move 5-6
authorize maintenance 11-42, 12-1 pre-stress scan 14-22
password, setting or changing 10-7 prev. proc. state, GEM status window 13-17
pattern recognition print
choosing good patterns 7-39 current page data 2-2
deskew 7-38 dialog box 2-31
deskew options groping retry layers 7-46, 11-32 print options 7-11
deskew teach screen 7-19 procedure 2-31
deskew twice to align theta 7-48, 11-30 quality options 2-31
edge based 7-47, 11-31, 11-34 range 2-31
failure options 7-9 screen 2-2
if fail options sequence data 7-11

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print button 2-31 3D 9-17

print button, scan catalog screen 3-12 resample, export graphic size 2-24
print icon - 3D analysis 9-13 reset profiler 11-44
printing data 2-30 resolution - definition for each instrument head 3-38
proceed measurement, pattern rec. option 7-9 resolution - scan parameter 3-38
process state, GEM status window 13-17 retry pat. rec. manually, pattern rec. option 7-9
profile length (ProfL), scan recipe parameter 3-68 right arrow 2-3
profile type table 3-42 RMS (Rq), scan recipe parameters 3-74
profile type vs. range 3-40 RMS (Wq), scan recipe parameter 3-76
profile type, scan recipe parameter 3-42 RMS deviation (Sq), scan recipe parameter 3-78
profiler icon 2-6 RMS slope (Dq), scan recipe parameters 3-75
profiler user groups 10-2 RMS slope (Sdelta q), 3D scan recipe parameter 3-78
prompt for lot ID before sequence execution 11-36 RMS wavelength (Lq), scan recipe parameters 3-75
prompt for operator ID before sequence execution 11-36 roller ball, mouse 2-3
proximity sensor 11-41 root mean square (RMS) 3-74
enable offset 11-41 root mean square (RMS) deviation (Sq), scan recipe
offsets to hi mag 11-42 parameter 3-78
pole tip recession nulling 11-41 root mean square (RMS) slope (Dq), scan recipe
restrictions 5-14 parameters 3-75
used for nulling slow down 5-14 rotate stage 5-7

Preliminary
proximity sensor configuration 11-40 rotate stage, sample alignment 5-38
proximity sensor configuration dialog box 11-41 rotation button
proximity sensor dialog box options 11-41 theta clockwise 5-10
theta counterclockwise 5-10
Q roughness
qualifying neighboring bins - setup analysis tools 3-103 average (Ra), scan recipe parameter 3-74
height (Rh), scan recipe parameter 3-75
R height 10pt (Rz), scan recipe parameter 3-74
radius, profile arc, scan recipe parameter 3-67 height 6pt (Rz), scan recipe parameter 3-74
range/resolution parameter 3-38 maximum Ra, scan recipe parameter 3-74
range/resolution, scan recipe parameter 3-38 mean peak height (Rpm), scan recipe parameter 3-75
ray trace mode 9-13 peak (Rp), scan recipe parameter 3-74
RC filter, scan recipe parameter 3-52 Peak/Valley (Rt), scan recipe parameter 3-74
real time scan window profile, scan recipe parameter 3-74
view scan screen 6-20 RMS (Rq), scan recipe parameter 3-74
reboot RMS slope (Dq), scan recipe parameter 3-75
system reboot option 11-46 RMS wavelength (Lq), scan recipe parameter 3-75
system reboot procedure 2-11 standard deviation height, scan recipe parameter 3-75
recalculation button 8-5 table of 2D roughness parameters description 3-74
recipe valley (Rv), scan recipe parameter 3-74
adding scan recipes to sequence 7-22 roughness and waviness parameters 3-70
modify stress recipe 14-15 roughness height (Rh), scan recipe parameters 3-75
save changes for recipe 12-37 roughness parameter, 3D
saving a new stress recipe 14-21 arithmetic mean deviation (Sa) 3-78
recipe editor screen icon density of summit (Sds) 3-78
3D view screen window 6-16 interfacial area ratio (Sdr) 3-78
recipe naming convention 3-109 kurtosis (Sku) 3-78
recipe path display RMS deviation (Sq) 3-78
scan recipe catalog screen 3-11 scan recipe parameter 3-78
recipe transport options skewness (Ssk) 3-78
sequence recipe options 7-54 ten point height (Sz) 3-78
export options 7-54 roughness parameters
recipe transport options... 7-52 2D roughness table 3-74
recipes roughness parameters, 2D 3-73
downloading recipes from host, GEM 13-22 roughness parameters, 2D parameters table 3-74
uploading recipes to host, GEM 13-19 roughness parameters, 3D 3-76
recommended macimum (force)
stylus parameters 3-37 S
recover unsaved sequence data 7-32 S6F13 report, GEM option 13-13
relative to feature detected, scan recipe parameter 3-59 safe area
remove glitches configuration 11-21

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edit safe area 11-23 catalog screen fields 3-3

editing 11-23 recipe catalog screen 3-2
sample configuration 11-22 recipe editing and creation 3-13
safe area configuration dialog box 11-22 2D general parameters 3-65
safety interlock 11-13 2D roughness parameters 3-73
sample 2D scan parameters 3-17
placement caution 2-14 3D general parameters 3-68
surface image 2-15 3D scan parameters 3-25
sample menu 3Droughness parameters 3-76
scan catalog screen 3-7 bearing ratio and cutting depth 3-79
sample navigation window 2-16 feature detection 3-43
scan site positioning 5-17 filters and cursors 3-50
sample selection procedure 7-60 high spot count and peak count 3-84
manual load/unload 7-61 list window 3-10
sampling rate scan recipe editor 3-13
effects of changing 3-28 scan time parameters 3-32
sampling rate (Hz), scan recipe parameter 3-18 screen component description 3-3
sampling rate, example 3-19 stylus parameters 3-35
sampling rate, stress recipe 14-17 vertical ranging 3-37
saturated data points 3-41 scan recipe parameters 3-54
Preliminary

saturated data points, effect on scan 3-41 2D general parameters 3-65

save 2-19 bearing ratio and cutting depth 3-79
2D slice data from 3D image 9-46 feature detection 3-43
save as 2-19, 5-5 feature detection cursor positioning 8-24
save image as dialog box 2-20 filters and cursors 3-50
save video image to file 2-20 high spot count and peak count 3-84
sequence data 7-50 roughness and waviness parameters 3-70
sequences 7-49 scan recipes
save 2D data, reevaluation 8-48 saving 3-109
save image as 2-20 scan recipes chapter 3-1
save workspace 7-35 scan site
save/apply video settings 7-48, 11-30, 11-34 positioning 5-16
saving scan recipes 3-109 scan site positioning 5-17
saving sequences 7-49 arrow buttons 5-18
scan sample navigation window 5-17
direction 2-14 stylus drop-lift 5-18
icon 2-7 video display window 5-17
recipe and data naming 2-19 scan size, X direction - scan parameter 3-17
site location 5-17 scan speed
start scan 5-10 effects of changing 3-28
stress recipe parameters 14-17 scan speed table 3-18
terminate prematurely 2-13 scan speed, scan parameter 3-17
scan catalog screen scan speed, stress recipe 14-17
menu bar 3-5 scan start position, stress recipe 14-16
title bar 3-4 scan time parameter 3-32
tool bar 3-8 screen navigation 2-7
scan direction - changing direction 3-22 second deskew time delay 11-17
scan direction arrow, scan parameter 3-22 security
scan direction, "teach" button - scan parameter 3-22 adding user to user group 10-9
scan feature description 3-45 authorize Maintenance password 11-42, 12-1
scan ID, entering a scan name 14-25 creating a new user 10-6
scan ID, stress naming procedure 14-5 limited access users 10-11
scan length, stress recipe 14-17 opening the user manager 10-4
scan menu user manager 10-6
view scan screen 6-9, 6-18 security chapter 10-1
scan options - diagnostic options 3-108 security levels 10-2
scan options dialog box - diagnostic options 3-108 Select All button, sequence recipe 7-4
scan parameters sequence
3D summary 3-25 base angle 7-12
scan parameters definition window 3-16 deskewing twice to align theta 7-38
scan recipe groping (pattern recognition) 7-44, 11-30

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pattern recognition deskew 7-38 sequence summary options 7-35

recipe naming 2-19 sequence transport configuration 7-52
recipe screeen access 2-7 sequence transportability 7-51
running a sequence 7-29 export paths 7-53
saving sequence recipe 7-49 recipe transport options... 7-52
searching for pattern (groping) 11-30 set default, dialog box 12-34
sequence transportability 7-51 Set Post, stress analysis button 14-29
wafer data summary window 7-34 Set Pre, stress analysis button 14-29
sequence data Setup Analysis Tools dialog box 3-101
calculating combined sequence statistics 7-32 setup analysis tools dialog box 3-101
multi data analysis 7-32 Setup Analysis Tools parameter button 3-101
previewing saved data 7-31 setup analysis tools, scan recipe parameter 3-95
recovering sequence data 7-32 shift-tab, cursor movement 2-2
saving 7-50 show measurement site during sequence 6-21
saving statistics 7-51 show measurement sites
saving trace data 7-51 enabling from sequence execution options dialog box 11-37
viewing data with its trace 7-35 show position options 3-23, 3-29
sequence data catalog sceen show position, scan parameter 3-23
export graphs 2-26 shutdown, normal system shutdown 2-10
sequence editor site-by-site pattern recognition 7-49

Preliminary
data options 7-9 skewness (Ssk), scan recipe parameter 3-78
features 7-3 skip, no measurement, pattern rec. option 7-9
menus 7-3 slice data 9-46
opening the sequence editor 7-2 slice tool 9-16
options 7-7 slice tool, current view 9-16
options field 7-7 slope threshold
screen 7-3 changing recipe from Analysis 8-27
sequence list buttons 7-4 slope threshold, scan recipe parameter 3-47
site buttons 7-5 slope X, 3D scan recipe parameters 3-70
toolbar 7-4 slope Y, 3D scan recipe parameters 3-70
sequence execution option 11-35 slope, scan recipe parameter 3-67
sequence execution options 11-35 slow approach - nulling 5-14
sequence ID, enable prompt 11-36 slow button, movement increments 5-18
sequence information dialog box 7-6 smoothing window, median filter 15-2
sequence menu soft home (theta), teach position 11-6
3D view scan screen 6-18 software program options 11-15
view scan screen 6-9 Sort... button, sequence recipe 7-5
sequence recipe spacebar, use during system operations 2-3
adding scan recipes 7-22 spool state, GEM status window 13-17
automatic manual load/unload 7-61 spooling enabled, GEM spooling 13-11
calculating combined sequence statistics 7-32 stage
correlation scans 7-29 configuration 11-5
teaching base angle 7-12 configuration options 11-5
viewing the correlation scan data 7-30 coordinate system 5-17
creating a sequence 7-13 movement, theta (rotational) movement 5-6
creating sequence recipe 7-1 travel limits 5-17
deskewing twice to align theta 7-38 stage movement, X and Y movement 5-6
handler options 7-58 standard deviation height, scan recipe parameter 3-75
previewing saved sequence data 7-31 start
saving sequence data 7-50 profiler applications 2-4
saving sequence recipe 7-49 START button, scan catalog screen 3-12
sequence menu 7-61, 7-63 start scan icon, view scan screen 6-7
sequence recipe and data 7-1 start/resume sequence icon
sequencing using pattern recognition deskew 7-38 3D view scan window 6-16
sequencing using site by site pattern rec. 7-48 start/resume sequence icon, view scan screen 6-7
teach first scan location 7-24 starting scan, menu item 5-8
teach scan location 7-23 statistics information box, analysis screen 9-13
using groping with pattern recognition 7-44, 11-30 statistics, save and export options 7-11
using multi analysis in sequence 7-32 STATS button in Analysis screen 2-27
viewing sequence data 7-34 status messages 3-13
with manual deskew 7-36 step feature

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feature detection parameter 3-45 substrate list 14-19

step height (StpHi) , scan recipe parameter 3-67 wafer elastic constant 14-2
step height calibration 12-28, 12-29 wafer load procedure
options dialog box 12-31, 12-35, 12-38 manual 14-6
screen 12-38 stress recipe
stylus force warning message 12-37 stylus start position 14-18
step height cursors, 3D scan recipe parameter 3-94 Stylus
step width (StpWt), scan recipe parameter 3-68 stylus mount 4-8
Stoney’s equation 14-2 stylus 2-13, 2-14
stop inprocess scan 6-23 arm pivot stylus 4-10
stop scan icon caution 2-13
3D view scan window 6-16 clamp screw stylus 4-8
stop scan icon, view scan screen 6-7 color-coded 4-1
stress damage potential 2-14
access to stress application 2-7 possible stylus damage 2-13
analysis screen 14-26 replacement procedure 4-9
application window 14-7 see caution 11-47
calculation algorithms 14-19 sizes 4-1
calculation analysis screen 14-31 stylus protection features
data collection 14-4 data point saturation 2-13
Preliminary

data creation 14-22 lowest elevator position 2-13

data file catalog 14-9 proximity sensor 2-13
data naming procedure 14-5 wrench stylus 4-8
film thickness dialog box 14-30 stylus arm assembly protection 2-13
initiate calculation button 14-29 stylus change procedure
polynomial calculation method stylus removal 4-5
polynomial fit 14-19 stylus drop-lift button
polynomial fit algorithm 14-3 scan site positioning 5-18
polynomial calculation results 14-30, 14-31 stylus parameters 3-35
post stress scan 14-26 stylus protection provisions 2-13
precision locator, manual 14-7 stylus radius
pre-stress scan 14-22 stylus parameters 3-37
recipe 14-12 stylus radius effect on trace 3-19
13 point least square fit 14-20 stylus radius vs. data collection frequency 3-20
applied force 14-17 stylus replacement procedure
creating new stress recipe 14-13 stylus removal and replacement 4-4
function buttons 14-9 stylus replacement 4-9
number of stress points 14-16 stylus start position 14-18
print recipe 14-22 substrate 2-14
recipe list 14-8 elastic constants 14-19
sampling rate 14-17 specification, stress application 14-18
saving a recipe 14-20 substrate material list, stress application 14-19
scan length 14-17 summary data presentation 7-34
scan parameters 14-17 surface
scan speed 14-17 surface parameter summary screen 2-30
scan start position 14-16 surface paramter summary window, analysis 2-30
stress calculation method 14-19 surface height distribution sharpness, kurtosis 3-78
stress recipe name box 14-8 system configuration 11-2, 11-14
stylus force 14-17 system status messages 3-13
substrate specification 14-18
recipe catalog 14-7 T
scan analysis 14-26 tab, cursor movement 2-2
scan data identification 14-5 task menu
set post button 14-29 scan catalog screen 3-8
set pre button 14-29 teach
Stoney’s equation 14-2 die grid 5-21
stress calculation global pattern recognition sites 7-18
calculate button 14-11 lowest elevator position 11-10
set post button 14-11 see also die grid navigation 5-19
set pre button 14-11 soft theta home 11-6
stress screen tool bar 14-11 Teach Loc... button, sequence recipe 7-5

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KLA-Tencor P-15 User’s Guide INDEX

Teach Pat... button, sequence recipe 7-5 UPS (Uninterruptible Power Supply) device 11-44
teach pattern recognition site 7-19 use lot ID, save/export option 7-11
teach scan direction, scan recipe parameter 3-22 use name option, save/export using sequence name 7-11
teach scan length screen 3-24 use operator ID, adds ID to file 7-11
temperature, ambient operating 11-2 use prev site button, sequence recipe option 7-5
temperature, site specification 11-2 user group, security category
ten point height (Sz), 3D scan recipe parameter 3-78 adding a user to a group 10-9
terminal option (GEM/SECS) 13-14 changing user group 10-9
test button, sequence recipe 7-5 user, security category 10-2
TIFF, export graphic format 2-22, 2-24, 2-25, 2-28 creating new user 10-6
TIFF, graphic format (*.tif) 2-21
time and date, setting 11-3 V
title bar, catalog screen tools 3-4 vacuum
tool activation icon 9-7 facilities specification 11-2
tool bar 2-16 second deskew time delay 11-17
3D analysis screen 9-3 vacuum control 11-15
scan recipe catalog screen 3-8 vacuum feedback 11-16
view scan screen 6-6 vacuum off, menu item 5-8
tool bar, scan catalog screen 3-8 vacuum on, menu item 5-8
toolbar vacuum menu, scan catalog screen 3-7

Preliminary
analysis screen, side toolbar 9-14 valley (Pv), scan recipe parameter 3-68
analysis screen, top toolbar 9-12 valley (Rv), scan recipe parameters 3-74
XY view screen 5-10 valley (Wv), scan recipe parameter 3-76
total (hr valley 3D (Sv), 3D scan recipe parameters 3-70
min vertical range - definition for each instrument head 3-38
s) parameter 3-33 vertical ranging parameters, scan recipe parameter 3-37
total area (Area), scan recipe parameter 3-67 vibration
total indicator runout (TIR), 3D scan recipe parameters 3-70 facilities requirement 11-2
total indicator runout (TIR), scan recipe parameter 3-67 video
trace adjusting video image 2-15
ascends 2-13 video calibration 12-5
trace data button, save or export data 7-11 video calibration results 12-10
window, analysis screen 2-30 video control dialog box 2-18
trace configuration video display 2-16
GEM/SECS 13-14 image adjustment 2-15
trace menu image focus 5-10
3D view scan screen 6-17 save image 2-20
view scan window 6-8 saving images 2-20
traces video control dialog box 2-18
3D scan parameter 3-26 video display window
effects of changing 3-28 scan site positioning 5-17
trackball 2-2, 2-3 video image
cursor movement 2-4 3D view scan screen 6-19
trackball use view
introduction 2-3 setting 3D options 9-40
left button 2-4 view scan screen
travel area, stage limits 5-17 2D scan screen menu bar 6-8
TTY messages debug menu 6-10
GEM/SECS, sending and receiving 13-17 file menu 6-8
GEM/SECS, terminal options 13-14 image menu 6-9
mode menu 6-8
U pan menu 6-10
uninterruptible power supply, note 11-2 scan menui 6-9
unzoom - 3D analysis 9-11 sequence menu 6-9
up arrow key usage 2-2 trace menu 6-8
UpBase scan trace window 6-6
feature detection parameter 3-45 tool bar 6-6
UpEdge video image 6-5
feature detection parameter 3-45 view scan window 6-1
upload recipes to host, GEM 13-21 2D recipe column
upper travel limit, data point saturation 2-13 recipe 6-3

P/N 0104396-000 AA INDEX-13

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 INDEX KLA-Tencor P-15 User’s Guide

sampling rate 6-3 loading a die grid 5-28

scan 6-3 navigating the wafer using the die grid 5-31
scan length 6-3 using die grid navigation to find partial dies 5-31
scan speed 6-3 XY view screen icon
scan type 6-3 3D view scan window 6-16
aborting a scan 6-23 XY view screen icon, view scan screen 6-7
screen function 6-1 XY view, button 5-2
view/modify button, scan catalog screen 3-12
Y
W y scan size
wafer effects of changing 3-28
sequence summary, viewing 7-34 Y scan size parameter 3-25
stress application 14-1 Y spacing
wafer manual loading, stress chuck 14-5 effects of changing 3-28
wafer image display
show wafer image during sequence scan 6-22 Z
wait bit (GEM/SECS alarms) 13-13 Z limits, changing limits 8-16
waviness parameter zoom and pan icon 6-16
average (Wa) 3-76 zoom box - 3D analysis 9-9
filter 3-53 zoom features - 3D analysis 9-7
Preliminary

maximum peak-to-valley waviness 3-76 zoom in button 5-10

peak (Wp) 3-76 zoom in icon - 3D analysis 9-10, 9-12
peak/valley (Wt) 3-76 zoom lock, saving current zoom position 5-12
RMS (Wq) 3-76 zoom out button 5-10
valley (Wv) 3-76 zoom out icon - 3D analysis 9-11, 9-12
waviness height (Wh) 3-76 zoom position
waviness parameters 3-75 saving current position 5-12
waviness vs. roughness 3-71 zoom reset 5-11
W-bit for S10, GEM configuration, terminal option 13-14 zoom tool, enable 9-8
W-bit for S6 zoom tools menu - 3D analysis 9-11
GEM configuration, event report 13-13
GEM/SECS, event report 13-13
Windows, closed application 2-8
Windows, start application 2-4
WMF, graphic export format 2-22, 2-24, 2-25, 2-28

X
X scan size, scan recipe parameter 3-17
X start level, 3D cursors, scan recipe parameter 3-88
X start level, scan recipe parameter 3-88
XY stage movement 5-6, 5-10
XY video calibration results 12-10
XY view
toolbar 5-10
XY view screen 5-1
aligning the sample 5-35
focusing 5-13
focusing the view 5-13
opening XY view 5-2
setting magnificaiton 5-11
setting the magnificaiton 5-11
starting the XY view application 5-2
using blob analysis (center object search) 5-32
using die grid navigation 5-19
chang die number font or color 5-32
changing the contrast level 5-34
clearing a die grid 5-30
clearing drop out dies from the grid 5-31
creating a die grid 5-21
die grid numbers displayed on navigation grid 5-32
enabling the dropout die option 5-31

INDEX-14 P/N 0104396-000 AA

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