A Brief History of High-Power Semiconductor Lasers: David F. Welch, Senior Member, IEEE
A Brief History of High-Power Semiconductor Lasers: David F. Welch, Senior Member, IEEE
6, NOVEMBER/DECEMBER 2000
Invited Paper
Fig. 3. Electroluminescent images of the surface of a broad-area laser operating at 810 and 915 nm. For this experiment defects were intentionally introduced in
the chip and in the case of 810-nm lasers (no In) these defects are seen to propagate through the active region [22].
Fig. 5. Infrared image of the top of a broad-area gain region illustrating the effect of filamentation.
Semiconductor lasers, being highly nonlinear devices and ciencies of 30%–50%, the double-clad fiber lasers could operate
having a large coupling between the gain of the laser and at optical to optical conversion efficiencies of 60%–80%. Al-
the index of refraction, made it difficult to fabricate a large though fiber lasers do not result in the broad wavelength cov-
aperture single-mode laser. Several conceptual techniques erage of semiconductor only solutions, fiber lasers have meet
were pursued [23]–[38]: 1) coupled laser arrays through either the power and scaling requirements of most potential multi-
evanescent or direct coupling of individual laser elements; 2) watt single-mode applications. Currently, fiber lasers are used
surface-emitting laser arrays where serial injection locking in marking systems, thermal printing systems, and Raman am-
of multiple cavities were studied; 3) master oscillator power plifiers.
amplifier configurations on a monolithic chip; 4) externally
injection locked lasers; 5) asymmetric gain profiles in large
VI. DIODE-PUMPED SOLID-STATE (DPSS) LASERS
aperture lasers; 6) multimode large aperture devices with
highly differentiated modal gain profiles; 7) external cavity The first use of MOCVD and MBE was in the fabrication
lasers; and 8) unstable resonator lasers with large emitting of AlGaAs lasers operating between 780 and 860 nm. From
apertures. Several general issues were barriers to a number this material system came the first application of high-power
of these potential solutions; first the output power needed to semiconductor lasers, that of pumping Nd : YAG lasers at wave-
be efficiently coupled into a single emission radiation lobe, lengths around 810 nm. The use of diode pumping of Nd : YAG
the radiation patter, or far field pattern, needed to remain lasers enabled a dramatic reduction in size and a significant
stable over all power and temperature operating conditions, the increase in operating efficiency as compared to flash lamp
discrimination between modes of operation had to be sufficient pumped solid-state lasers. In later years as the semiconductor
to insure single-mode operation as the gain uniformity and lasers became more reliable, so did the solid-state lasers. A
index uniformity changed during operation of the laser and the steady progression in DPSS technology over the past 15 years
laser had to be able to be made reproducibly with high yield. has transformed the laser-based material processing industry to
All of these conditions became very problematic in a material where DPSS lasers now compete with high-power CO laser
system that was highly nonlinear and the index and gain were systems for cutting and welding applications, and a significant
highly coupled. Finally and more importantly, the need for fraction of the market is the sale of DPSS lasers.
an application that is economically large enough that would High-power semiconductor lasers used for pumping of
justify the expense associated with the migration from a DPSS Nd : YAG lasers were first commercially introduced in 1984
solution to a semiconductor manufacturing solution. To date at output powers of 100 mW CW. Nd : YAG lasers have
some exceptional work by a variety of research organizations several distinctions compared to semiconductor lasers; first
has resulted in the demonstration of single spatial mode laser at they have a long excited state lifetime and can therefore store
output powers in excess of 5-W CW. energy and are applicable to -switched operation resulting in
In parallel with the development of monolithic single spatial high-peak power applications, and second they have the ability
mode lasers came the development of double-clad rare earth to efficiently convert multimode light into single-mode light.
doped fiber. As discussed below, rare earth doped fiber orig- The designers of DPSS lasers looked to use of high-power
inated around the need for optical amplification in the fiber semiconductor lasers to replace that of flash lamp pumping
where Er doped fiber amplifiers (EDFA) were developed. From for the advantages of greater efficiency and higher reliability.
the technology of Er fibers, which were originally developed This gave great design flexibility to the DPSS laser designer
for single-mode fibers requiring single-mode pump lasers, came in the choice of format for the high-power semiconductor
the conceptual development of double-clad fibers. Double-clad laser. Quickly, the market moved to a design of a 1-cm-long
fibers have a single-mode core surrounded by a second mul- monolithic semiconductor laser array that could be stacked to
timode optical cladding layer. In this configuration multimode create a two-dimensional (2-D) emitting aperture, Fig. 5. The
light is injected into the outer cladding layer and the the light 1-D and 2-D arrays were used in either CW or what was noted
propagates over several tens of meters while it is absorbed by as quasi-CW mode, where the quasi-CW operation was a series
the rare earth dopant in the single-mode core of the fiber. This of long pulses used to match the upper state lifetime of the
process has demonstrated to be a very efficient mechanism of solid state laser, on the order of a few hundred microseconds to
conversion of the multimode radiation from the semiconductor a few milliseconds. Today, monolithic laser arrays have been
laser to a single-mode output. While the Nd : YAG laser, dis- demonstrated at output powers approaching 200 W CW where
cussed below, will result in optical to optical conversion effi- reliable operation of 60 W is commercially available.
1474 IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, VOL. 6, NO. 6, NOVEMBER/DECEMBER 2000
VIII. TELECOMMUNICATIONS
Fig. 7. Photograph of a 2-D array of laser diode bars; maximum output power
In parallel with the development of high-power semicon- of 2.56-kW average power.
ductor lasers was the development of rare earth doped optical
fiber. Rare earth doped fiber in conjunction with the advances
in high-power lasers are, in this author’s perspective, the true
enabler to WDM communication systems. It was the ability
to amplify light in fiber that eliminated the need for expensive
regeneration every 100 km, thus enabling an economic solution
for WDM fiber optic communication. The development of rare
earth fiber has had two primary areas of impact: the first being
Er: doped fiber for amplification at 1550 nm.
The first demonstration of Er doped fiber amplifiers (EDFA)
was in conjunction with 1480-nm semiconductor lasers. The
conversion efficiency of the 1480 pump lasers to 1550 ampli-
fication of the signal source is in the range of 70%. Rapidly, the
communication system designs pushed for output powers from
the amplifiers on the order of 20 mW (13 dBm), and for a variety Fig. 8. FIT rate for 980-nm laser chips as a function of output power.
of reasons due to multichannel inputs and multistage amplica- requiring greater than 30 dBm and therefore further driving the
tion, these amplifiers required pump powers of greater than 50 output power requirements from the emiconductor lasers. The
mW. As the channel count further increased over time the am- research community implemented some of the technologies and
plifier output power exceeded 23 dBm with some applications designs discussed above, increasing the cavity length of the laser
WELCH: A BRIEF HISTORY OF HIGH-POWER SEMICONDUCTOR LASERS 1475
Fig. 9. Equivalent noise figure as a function of pump power for a Raman pump laser for both SMF28 and LEAF fiber.
Fig. 10. Impact of Raman amplification on the SNR degradation in system performance. For a system designed for 35-dB degradation in SNR, the incorporation
=
of Raman amplification in complement with EDFA (NF 5 dB) extends the distance between repeaters from approximately 500 to 3000 km. For this example
the amplifier spacing is 100 km.
Fig. 13. Revenue by market sector for semiconductor lasers (Laser Focus World) [41].
trial and undersea reliability requirements. Today, high-power fiber being used and the system implementation of the fiber and
980-nm lasers can be deployed with FIT rates less than 100 at ranges between 500 mW and 1.5 W.
powers of several hundred milliwatts. The alternative technology to fiber laser-based Raman ampli-
The combination of Er fiber, and high-power 1480- and fication pumps is the use of direct high-power semiconductor
980-nm lasers are the essential elements of the WDM long-haul lasers. For Raman amplification in the C and L transmission
communication systems. The 980-nm laser provides the noise bands of the optical fiber, the semiconductor lasers need to op-
performance, while the combination of 1480- and 980-nm erate in the 1450-nm range. To achieve the output power of 500
for power generation enable the multichannel architectures of mW to 1 W, organizations are both polarization and wavelength
today. Without these technologies there would be no high data multiplexing four–six pump lasers in to a single-fiber output.
rate communication systems capable of handling the traffic Raman amplification will require the output power of discrete
needed for internet applications. 1455-nm pumps to approach 300 mW and beyond in order to
The next generation of amplification technology for commu- optimize the performance and manufacturing cost.
nication networks is Raman amplification. Raman amplification Today, most next-generation long-haul transmission system
transforms the network from amplification at discrete points to designs will utilize Raman amplification. This technology is a
a network where the transmission fiber becomes part of the am- breakthrough technology as it is the enabler for ultralong-haul
plification network, resulting in a dramatically reduced noise transmission and high data rate ( Gb/s) transmission. Cur-
figure of the amplifier, thus enabling ultralong haul transmission rently, the Raman amplification is designed to complement the
and 40-Gb/s transmission. Raman amplification grew out of two EDFA.
different high-power laser technologies. The first deployment of
Raman amplification has come from the use of fiber laser-based
IX. CONCLUSION
pump sources. These amplifier pumps are currently being de-
ployed in undersea festooning application and dry-side-based Over the past 20 years since the first work for high-power
preamplifiers. As discussed above, the fiber laser configuration semiconductor lasers, the technology and market requirements
combines the technologies of high-power semiconductor lasers have advanced dramatically. The market for semiconductor
with that of double-clad fiber laser converting the multimode lasers has grown at staggering clips from 1980 to 2000 and is
semiconductor light to single spatial mode output and subse- currently growing at greater than 40% per annum, the largest
quent Raman shifting to an output wavelength of 1455 nm at a market being the communications market. The semiconductor
power in excess of 1 W CW. These light sources were initially laser is the largest market of all optical technologies (Figs. 12
tools of the research community to investigate the properties and 13). High-power lasers as a segment of the overall market
of Raman amplification in fiber optic transmission. Optimum are growing even faster at a rate in excess of 90% per annum.
pump powers for fiber is dependent on the type of transmission For high-power lasers the growth and impact is substantial
WELCH: A BRIEF HISTORY OF HIGH-POWER SEMICONDUCTOR LASERS 1477
as high-power lasers enable dramatic cost reduction and [12] M. Sakamoto, D. F. Welch, H. Yao, J. G. Endriz, and D. R. Scifres,
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[13] E. Wolak, M. Sakamoto, J. Endriz, and D. R. Scifres, LEOS ’92 Digest,
The trend is to shift value from the transmission products to the 1992, Paper No. DLTA 5.1, p. 175.
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High-power semiconductor lasers have become a pillar for a 24, p. 113, 1988.
number of markets including fiber optic communications, ma- [16] G. L. Harnagel, P. S. Cross, D. R. Scifres, and D. Worland, Electron.
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The advancements of high-power lasers is the culmination Phys., vol. 67, p. 1132, 1990b.
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application engineers. To give adequate and definitive recog- [24] D. E. Ackley, Appl. Phys. Lett., vol. 42, pp. 152–154, 1983.
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[26] H. Hosoba, M. Matsumoto, S. Matsui, S. Yano, and T. Hijikata, (in
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Sony, Hitachi, Mitsubishi, IBM, Uniphase, Lasertron, Pirelli, [29] D. F. Welch, W. Streifer, P. S. Cross, and D. Scifres, IEEE J. Quantum
U.S. Government, TRW, Hughes, Perkin Elmer, AT&T, Lucent, Electron., vol. QE-23, p. 752, 1987.
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Research Labs, Naval Research Labs, Philips Lab USAF, Rome 1992.
Lab USAF, Cornell University, University of New Mexico, [32] R. Lang, IEEE J. Quantum Electron., vol. QE-18, pp. 976–983, 1982.
[33] U. Koren, B. Miller, G. Raybon, M. Oran, M. Young, T. Koch, J.
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[34] D. Welch, R. Waarts, D. Mehuys, R. Parke, D. Scifres, R. Craig, and W.
The author would like to thank all of the individuals in these Streifer, Appl. Phys. Lett., vol. 57, pp. 2054–2056, 1990.
and other organizations that have contributed to the technology [35] L. Goldberg, D. Mehuys, and D. Hall, Electron. Lett., vol. 28, pp.
and applications for these devices over the years. It is through 1082–1084, 1992.
[36] J. Walpole, E. Kintzer, S. Chinn, C. Wang, and L. Missagia, Appl. Phys.
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would like to acknowledge some of the many contributors that 1044–1046, 1992.
[38] S. O’Brien, R. Parke, D. Welch, D. Mehuys, and D. Scifres, Electron.
he has had the benefit of working with at SDL, many of whom Lett., vol. 28, pp. 1272–1273, 1992.
have contributed in one way or another to this data in this article [39] M. Ziari, OFC, 2000.
including, B. Streifer, D. Scifres, R. Parke, J. Major, R. Lang, S. [40] S. G. Anderson, “Review and forecast of laser markets: 1999—Part I,”
Laser Focus World, vol. 35, no. 1, pp. 80–100, 1999.
Sanders, R. Waarts, T. Tally, B. Gignac, R. Craig, V. Dominic, [41] R. V. Steele, “Review and forecast of laser markets: 1999—Part II,”
D. Mehuys, S. Grubb, R. Zanoni, M. Devito, M. Cardinal, D. Laser Focus World, vol. 35, no. 5, pp. 52–72, 2000.
Coblentz, M. Verdiell, and countless others.
REFERENCES
[1] R. N. Hall, G. E. Fenner, J. D. Kingsley, T. J. Soltys, and R. O. Carlson, David F. Welch (S’81–M’85–SM’90) received the
Phys. Rev. Lett., vol. 9, p. 366, 1962. B.S.E.E. degree from the University of Delaware,
[2] M. I. Nathan, W. Dumke, G. Burns, F. H. Dill Jr., and G. Lasher, Appl.
Newark, in 1981 and the Ph.D. degree from Cornell
Phys. Lett., vol. 1, p. 62, 1962.
[3] N. Holonyak Jr. and S. F. Bevacqua, Appl. Phys. Lett., vol. 1, p. 82, 1962. University, Ithaca, NY, in 1985.
[4] T. M. Quist, R. H. Rediker, R. J. Keyes, W. E. Krag, B. Lax, A. L. In January 1985, he joined SDL, Inc. as a Research
McWhorter, and H. J. Zeigler, Appl. Phys. Lett., vol. 1, p. 91, 1962. Scientist and was promoted to Vice President of
[5] I. Hayashi, M. B. Panish, W. Foy, and S. Sumski, Appl. Phys. Lett., vol. R&D in 1990. In 1996, he became Vice President
17, p. 109, 1970. of the Systems Business Group within SDL. His
[6] Zh. I. Alferov, V. M. Andreev, D. Z. Garbuzov, Yu. V. Zhilyaev, E. P. most recent position, as of September 1998, is Chief
Morozov, E. L. Portnoi, and V. G. Trofim, Sov. Phys. Semicond., vol. 4, Technical Officer and Vice President of Corporate
p. 1573, 1971. Development, where his responsibilities include
[7] H. Kressel and J. K. Butler, Semiconductor Lasers and Heterojunction overall technology direction and merger/acquisitions. He has authored more
LEDs, 1977. than 250 articles and more than 50 patents. He has worked on the development
[8] G. H. B. Thompson, Physics of Semiconductor Laser Devices, 1980. of advanced optical technologies for fiber optic communications while at SDL.
[9] T. P. Pearsall, Ed., GaInAsP Alloy Semiconductors, 1982. Dr. Welch received the 1992 Adolph Lomb Award from the OSA, the 1998
[10] J. K. Butler, Ed., Semiconductor Injection Lasers, 1980. Engineering Achievement Award from LEOS, the 1999 Fraunhoffer Award, and
[11] D. R. Scifres, C. Lindstrom, R. D. Burnham, W. Streifer, and T. L. Paoli, his contributions have been acknowledged in more than 17 product of the year
Electron. Lett., vol. 19, p. 169, 1983. awards. He is a Fellow of the OSA.