A41802880c Eds Instruction Manual 2

Download as pdf or txt
Download as pdf or txt
You are on page 1of 56

edwardsvacuum.

com

Industrial Dry Vacuum Pumps


EDS 200 AND EDS 300
INSTRUCTION MANUAL

A41802880_C Original Instructions


300767970_002_C2
Copyright notice
©Edwards Limited 2019. All rights reserved.

Trademark credit
Edwards and the Edwards logo are trademarks of Edwards Limited, Innovation Drive, Burgess
Hill, West Sussex RH15 9TW.

Page 2
Contents
1. Safety and compliance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
1.1 Definition of Warnings and Cautions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
1.1.1 Safety symbols. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6

2. Important safety information. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8


2.1 Mechanical hazards. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
2.2 Electrical hazards. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
2.3 Thermal hazards. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
2.4 Danger through materials and substances. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
2.5 Explosion hazard. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
2.6 Noise hazard. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11

3. ATEX certification. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
3.1 Classification and marking of the pump. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
3.2 Conditions of safe use. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13

4. Description. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
4.1 Design. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
4.2 Supplied equipment. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
4.3 Ordering information. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
4.3.1 Pumps. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
4.3.2 Accessories. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16

5. Technical data. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17

6. Transport and storage. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20


6.1 Storage. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20

7. Installation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
7.1 Placement. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
7.2 Normal operation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
7.2.1 Abnormal operation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
7.3 Connecting the inlet and exhaust lines. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
7.3.1 Inlet lines. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
7.3.2 Exhaust lines. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
7.4 Connecting cooling-water. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
7.4.1 Water quality. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
7.5 Connecting purge gas. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
7.6 Electrical connections. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
7.6.1 Wiring the motor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
7.6.2 Motor thermistors. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34

Page 3
7.6.3 Pump body thermal snap switch. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
7.6.4 Grounding. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
7.6.5 Check the direction of rotation of the motor. . . . . . . . . . . . . . . . . . . . . . 35
7.6.6 Connecting the heat exchanger fan. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
7.7 Leak check after installation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35

8. Operation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36
8.1 Media compatibility. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37
8.2 Start-up. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37
8.3 Manual shut-down. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37
8.4 Unplanned shut-down and alarms. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37

9. Maintenance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38
9.1 Return the equipment or components for service . . . . . . . . . . . . . . . . . . . . . . . . 38
9.2 Maintenance intervals. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39
9.3 Checking the oil. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39
9.4 Inspect the closed cooling-water circuit. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40
9.5 Inspect pipelines and connectors. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41

10. Spares. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42

11. Diagnose a fault. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43


11.1 Pump does not start up. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43
11.2 Pump gets too hot. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43
11.3 Pump is extremely loud. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44
11.4 Motor power consumption is too high. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44
11.5 Pump is too loud. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44
11.6 Pump is losing lubricant. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45
11.7 Oil gets too dark. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45
11.8 Lubricant in the pump chamber. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45
11.9 Pump does not attain its pumping speed. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 46

12. Dimension drawings. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 47

13. Wearing parts. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 49

14. Waste disposal. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 50

Page 4
List of Figures
Figure 1: EDS pump models. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
Figure 2: Pumping speed curves EDS 200 and EDS 300. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
Figure 3: Lifting the EDS pump. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
Figure 4: Connections and controls. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
Figure 5: Oil level at pump standstill. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
Figure 6: Inlet flage dimensions (in mm). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
Figure 7: Maximum permissible flange loads. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
Figure 8: Connections and direction of motor rotation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
Figure 9: Cooling water level. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
Figure 10: Schematic for purge gas and switches - EDS pump with air cooling. . . . . . . . . . . . . 30
Figure 11: Schematic for purge gas and switches - EDS pump with water cooling. . . . . . . . . . . 31
Figure 12: Wiring schematic-1. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
Figure 13: Wiring schematic-2. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
Figure 14: Pump body thermal snap switch connection. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
Figure 15: Grounding. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
Figure 16: Heat exchanger fan connection. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
Figure 17: Oil level check. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40
Figure 18: Oil level at pump standstill. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40
Figure 19: Cooling water level. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41
Figure 20: EDS 200/300 with air cooling (dimensions in mm). . . . . . . . . . . . . . . . . . . . . . . . . . . 47
Figure 21: EDS 200/300 with water cooling (dimensions in mm). . . . . . . . . . . . . . . . . . . . . . . . 48

Page 5
A41802880_C - Safety and compliance

1. Safety and compliance


1.1 Definition of Warnings and Cautions

NOTICE:
Obligation to Provide Information
Read and follow these instructions carefully before installing and commissioning to
ensure optimum and safe operation right from the start.
Safe and proper operation is guaranteed when used correctly and in accordance with the
instructions contained in these operating instructions. Please read all safety instructions
in this section and the rest of this manual carefully and make sure that these instructions
are followed. The device may be operated and maintained only by trained personnel in
the proper condition and as described in the operating instructions. Also observe local
and state requirements and regulations. If you have any questions regarding safety,
operation or maintenance of the device, please contact our nearest subsidiary.

DANGER:
Danger indicates a hazard with a high level of risk which, if not avoided, will result in
death or serious injury.

WARNING:
Warning indicates a hazard with a medium level of risk which, if not avoided, could result
in death or serious injury.

CAUTION:
Caution indicates a hazard with a low level of risk which, if not avoided, could result in
minor or moderate injury.

NOTICE:
Information about properties or instructions for an action which, if ignored, will cause
damage to the pump or the system.

We reserve the right to change the design and the stated data. The illustrations are not
binding.
Keep the instructions for future use.

1.1.1 Safety symbols


The safety symbols on the products shows the areas where care and attention is necessary.
The safety symbols that follow can be used on the product or throughout the product
documentation.

Page 6
A41802880_C - Safety and compliance

General warning sign

Warning of counter-rotating rollers

Warning of automatic start-up

Warning of danger of slipping

Warning of electrical voltage

Warning of hot surface

Warning of explosion

Page 7
A41802880_C - Important safety information

2. Important safety information


2.1 Mechanical hazards

CAUTION: LOSS OF STABILITY DURING TRANSPORT


Uncontrolled movement due to incorrect attachment / lifting / carrying / rolling or
movement of the vacuum pump. Only use the attachment points and conveying means
described in this manual for vertical and horizontal conveying.

WARNING: EJECTION OF PARTS


Ejection of parts through bursting of vacuum system due to excessive pressure caused by
incorrect direction of rotation. Pressure build-up in the vacuum system or in vacuum
chambers. Check the direction of rotation of the vacuum pumps before each start-up,
after each motor change and after each electrical connection change.

Ejection of parts through bursting of vacuum system as a result of excessive pressure


caused by clogged or constricted exhaust. Pressure build-up in the vacuum system or
exhaust pipes. Do not start up or operate the vacuum system with the outlet closed or
throttled.

Ejection of parts through bursting of vacuum system due to excessive pressure, caused by
faulty function at the gas inlet into the vacuum system. Pressure build-up in the vacuum
system or inlet lines. Check correct connection of inlet and outlet flanges before
commissioning. The inlet pressure at the suction port of the vacuum system must not
exceed atmospheric pressure. If seal gas or gas-ballast from pressure vessels is used,
secure the supply in such a way that no overpressure can occur in the vacuum system in
the event of a fault or power interruption.

Ejection of parts through bursting of vacuum system as a result of excessive pressure


caused by the pump running backwards after it has been switched off under vacuum.
Danger of overpressure in the inlet lines and recipients as well as uncontrolled backward
running of rotors. In the event of a fault or during service, separate the vacuum pumps
from the vacuum vessel and connecting lines before the inlet by means of suitable valves.

WARNING: RISK OF CUTTING AND CRUSHING


Risk of cutting and cutting off by contact with moving parts such as couplings, shafts and
rotors.
Risk of cutting and crushing when reaching into open flanges or covers.
Do not operate the vacuum pump with open flanges or covers. When installing, first
mechanically connect the inlets and outlets, close the covers of rotating parts and then
make the electrical connections. Disconnect the vacuum pump from the power supply
before servicing. Only use trained service personnel.

Page 8
A41802880_C - Important safety information

WARNING: UNEXPECTED RESTART


Failure or malfunction of the central control system (unexpected start-up) or danger of a
pump restarting automatically after switching off due to a fault.
Risk of crushing, cutting or cutting off by touching moving parts due to recurring start
command or power supply.
Before carrying out maintenance or service work, disconnect the pump from the power
supply, secure it against being switched on again, determine that it is de-energised,
ground and short-circuited and cover / isolate adjacent live parts.

CAUTION: RISK OF INJURY


Pulling in of body parts and objects into the vacuum through open flanges. Do not
operate the vacuum pump with open flanges. When installing the vacuum pump, first
mechanically connect the inlets and outlets and then make the electrical connections.

CAUTION: HIGH PRESSURE GAS


Danger due to incorrect connection of the pump to the system to be pumped out.
Pressure build-up in the vacuum system.
Check correct connection of inlet and outlet flanges before commissioning. When using
the pump with seal gas, protect the seal gas supply so that no overpressure can occur in
the pump system in the event of a malfunction or power interruption.

CAUTION: TRIP HAZARD


Slipping, tripping or falling as a result of oil leaking from the pump. Oil can escape from
the vacuum pump during pumping or depending on the work process. Risk of falling on
oil spills. Check the vacuum pump regularly for oil leaks. Take the appropriate safety
measures

2.2 Electrical hazards

DANGER: ELECTRICAL SHOCK


Risk of electrical shock caused by direct or indirect contact with live parts. Electrical
shock due to faulty electrical connection and possible residual voltage up to 5 minutes
after disconnection from the mains. The electrical connection may only be carried out by
a trained person. Observe the national regulations in the user country, e.g. for Europe EN
50110 - 1. Prior to servicing, disconnect the vacuum pump from the power supply.

Risk of electrical shock due to interruption of the protective conductor system. In the
event of a fault, life-threatening voltages may be present on electrically conductive
components. Before commissioning, check the resistance of the earthing cable and the
suitability of the assigned overcurrent protection device.

Page 9
A41802880_C - Important safety information

DANGER: LIGHTNING STRIKE


Risk of fire and injury from lightning strike. The operator is responsible for assessing the
hazard potential when used outside of buildings.

2.3 Thermal hazards

CAUTION: HOT SURFACES


Burning of fingers, hands or arms on hot surfaces. Handle the pump only when ventilated
and cooled down. Wear suitable protective equipment.
Scalding by contact with hot equipment or lubricants. Danger of scalding when opening
the hot pump with hot operating fluid or cooling-water. Only open the outlet or inlet port
for operating media if the operating medium has adapted to the room temperature.
Wear suitable protective equipment.
A barrier must be placed around the pump to prevent accidental contact with hot
surfaces. The barrier must not only consist of barricade tapes or warning signs. The
barrier must be reliable and require tools (such as screwdriver or allen key) for removal.

2.4 Danger through materials and substances

DANGER: HAZARDOUS GASES


Danger due to a rapid increase in pressure due to the decomposition of pumped gases.
Uncontrolled emission of process gases by reaction products within the pump. The
pumping of reactive gases, vapours or gas mixtures is generally prohibited. The operator
is responsible for assessing the hazard potential of the process media or mixtures.

Danger of escaping or emitting pumped hazardous gases, vapours or substances. Pumped


process gases may escape from the exhaust and leaks in the vacuum system. The
pumping of pyrophoric / radioactive / oxidizing gases or gas mixtures, as well as the
pumping of oxygen of more than atmospheric concentration (21 %) is generally
prohibited. The operator is responsible for assessing the hazard potential of the process
media or mixtures.

2.5 Explosion hazard

DANGER: INTERNAL EXPLOSION


The pump is suitable for use with internal and external flammable atmospheres as
defined by the pump marking. There is a risk of internal explosions within the pump, or
ignition sources externally, if the pump is operated outside of the limits of operation.

Page 10
A41802880_C - Important safety information

2.6 Noise hazard

CAUTION: HIGH NOISE LEVELS


The operating conditions can cause higher noise levels than specified in the technical
data. Take suitable hearing protection measures.

Pressure values in bar or mbar are absolute pressures, unless expressly stated otherwise
(e.g. bar(g)).

Page 11
A41802880_C - ATEX certification

3. ATEX certification
DANGER: INTERNAL EXPLOSION
The EDS dry pump is designed to pump gas and/or vapours. Ensure that the pump
temperatures are sufficient to prevent condensation forming which may otherwise lead
to corrosion and loss of explosion protection. The use of seal purges and correct warm-up
and shut-down procedures are necessary to prevent the formation of condensation. If in
any doubt, please consult Edwards.
Shaft-seal purge must be maintained in order to ensure long term reliability of shaft-seals
and the zoning/protection concept.
If blockages of the exhaust are possible, exhaust pressure should be monitored,
otherwise excessive back-pressure can occur, leading to high temperatures and risk of
explosion.

The EDS ATEX Category 3 dry pump uses the protection strategy of constructional safety for
internal atmospheres, and satisfies the requirements for ATEX Category 3.
Constructional safety relies on there being no ignition sources inside the pump. EDS dry
pumps are manufactured and tested to show that running clearances are maintained in the
pump during extremes of normal operation and at trip points of pump safety instruments.
For Category 3 inside pumps, ignition hazards are prevented from occurring in normal
operation. When using constructional safety as the protection concept ensure that no
process deposits are formed inside the pump which could potentially create an ignition
source. This can be achieved either by process control or by the use of solvent flush. In such
systems the solvent flush operation is safety critical and suitable safeguards must be put in
place to ensure that solvent flow is maintained to the prescribed regime. The gearbox of the
EDS pump is classified one zone lower than the pumping chamber; the high-integrity seal in
combination with seal purge ensures zone separation.
The EDS is capable of pumping a potentially explosive atmosphere that is likely to occur
occasionally in normal operation and therefore satisfies the essential requirements
identified in Annex II of the ATEX Directive 2014/34/EU for Category 3 equipment.

3.1 Classification and marking of the pump


The pump is marked as follows:

II 3/-G Ex h IIC T3 Gc
5 °C < Ta < 40 °C
(internal atmospheres only)

Modifying the supplied pump, voids the CE and ATEX Declaration of Conformity.
Table 1 Key to the Symbols

ATEX logo

h The code letter “h” is valid for all non-electrical devices.


IIC Explosion group

Page 12
A41802880_C - Description

T3 Temperature class. Pumps belonging to temperature class T3 must only be


operated with gases or vapors which exhibit an ignition temperature of over 200
°C.

3.2 Conditions of safe use


The EDS pump must be operated in accordance with the definitions of normal use and
operational limits as specified within this manual.
Accessories and additional parts fitted to the EDS pump must fulfil the requirements of the
ATEX Directive 2014/34/EU regarding the equipment group and category and they must be
applicable for use in explosive atmospheres of the respective gas group and temperature
class. Accessories and additional parts should be approved by Edwards otherwise they may
have a detrimental effect on the pump performance and safety.
The mandatory safety instruments specified in this manual must be used and must not be
replaced with alternatives from other manufacturers without consultation with Edwards.
Only processes which fulfill the conditions of the normal operation as specified in this
manual must be used.
EDS pumps must only be used on processes if their materials resist the mechanical and/or
chemical influences and corrosion, under the respective operating conditions, so that the
explosion protection is always maintained.
Means for preventing back-flow of the pumped media must be used if back-flow can result
in process hazards.
Opening the EDS pump is only permitted with the pump switched off, isolated from the
electrical supply and in the absence of explosive atmosphere.

Process limits
Inlet pressure: The range of allowable inlet pressures is 0 – 1013 mbar.
Exhaust pressure: The maximum allowable exhaust pressure is 1200 mbar for T3 pumps and
1100 mbar for T4 pumps.
Inlet gas temperature: The maximum allowable inlet gas temperature is 110 °C for inlet
pressures < 150 mbar, and 80 °C for inlet pressures > 150 mbar.

Safety instruments
Refer to Pump body thermal snap switch (on page 34)and install and connect all mandatory
safety switches.

4. Description
Figure 1 EDS pump models

Page 13
EDS 200 and EDS 300 look the same, they differ only in their performance.
A. EDS 200/300 water-cooled B. EDS 200/300 air-cooled (with heat exchanger)

4.1 Design
The EDS dry pump range has been developed to meet the demanding requirements for
pumping solutions in industrial and chemical applications. The EDS pumps in general are
designed for general vacuum use only and operation in rough and fine vacuum to evacuate
vessels and to pump gas mixtures.
The pump is a dry, positive displacement screw vacuum pump in which pairs of
intermeshing, non-contacting screw rotors are turning contrawise in phase by timing-gears.
The screw rotors are driven by an asynchronous electrical motor. Blow-off valves within the
mechanism minimize pumping power at high pressures and allow the pump to be started
direct-on-line. The rotational speed of screw rotors is increased by transmission gears. Gears
and bearings are oil lubricated.
The EDS pumps are supplied with different motors concerning main voltage and supply
frequencies.

Cooling system
The motor is air-cooled by an integrated cooling-fan. The EDS pump itself is water or air
cooled.
Water cooled: cooling-water circulates around the pump-body and then passes out of the
pump. The cooling system is open-loop and unregulated such that the cooling water flow
rate and temperature will directly the temperature of the pump.
Air cooled: glycol/water mixture circulates around the pump-body and through the water to
air cooled heat exchanger via an integrated water pump. The cooling system is closed-loop.
The pumps have a thermal snap-switch on the pump-body as temperature monitoring.
The output of the thermal snap-switch has two connections: one will open circuit when the
temperature of pump-body is higher than 90 °C. Use this output to provide a warning of high
temperature. The second output will open circuit when the temperature of pump-body is
higher than 110 °C. Use this output to shut-down the pump when it is too hot.

Gas system
The EDS pumps have a shaft-seal purge system and a gas-ballast system.
The shaft-seal purge delivers the supplied gas, e.g. dry compressed air or nitrogen, to the
internal shaft seal system to protect it and ensure lifetime and functionality. Shaft-seal purge
ensures that the shaft-seals are maintained at a positive pressure gradient to pumping
chamber during pump operation; therefore it prevents the entry of corrosive or toxic
process vapours into the pump gearbox; prevents contamination of the process gases by
pump oil; prevents damage to shaft-seals by debris.
As supplied, the gas-ballast system can deliver ambient air to the pump gas-ballast inlet.
Gas-ballast use depends on your application and can e.g. reduce temperature load or
increase water vapour capability. The air-flow is filtered and is controlled by a valve. A check-
valve in the system prevents the escape of process gases out of the gas ballast. If required
for your application, it is possible to connect dry nitrogen supplies to the pump, to deliver
nitrogen gas ballast and nitrogen shaft-seal purge instead of air.

Page 14
Covers
The pump is equipped with covers. These must always be mounted during operation of the
pump, because they protect the operators from touching hot surfaces and they are required
for the cooling air flow.

4.2 Supplied equipment


1. Pump as described in Design and Pumps
2. The pumps are filled with lubricant: Ultragrade® Endurance Extend 110
3. The pump flanges have been blanked off with a sealing cap
4. 4x crane eyes M16
5. Inlet diffuser
6. NW 40 clamping ring & O-ring for exhaust, O-ring for inlet
7. Pump body thermal snap switch

4.3 Ordering information


4.3.1 Pumps
Table 2 Pumps ordering information

EDS ATEX Electrical Supply Part No.


200/400 V 50 Hz A41820945
230/460 V 60 Hz A41820946
EDS 200 water cooled 200 V 50 Hz A41820934
200/380 V 60 Hz A41820936
575 V 60 Hz A41820957
200/400 V 50 Hz A41821945
230/460 V 60 Hz A41821946
EDS 200 air cooled 200 V 50 Hz A41821934
200/380 V 60 Hz A41821936
II 3/-G Ex h IIC T3 Gc 575 V 60 Hz A41821957
5 °C < Ta < 40 °C
(internal atmospheres only) 200/400 V 50 Hz A41830945
230/460 V 60 Hz A41830946
EDS 300 water cooled 200/380 V 50 Hz A41830934
200/380 V 60 Hz A41830936
575 V 60 Hz A41830957
200/400 V 50 Hz A41831945
230/460 V 60 Hz A41831946
EDS 300 air cooled 200/380 V 50 Hz A41831934
200/380 V 60 Hz A41831936
575 V 60 Hz A41831957

Page 15
4.3.2 Accessories
Table 3 Accessories

Accessories Part number


Exhaust pressure transmitter (PS1) A41894000
Exhaust gas temperature transmitter (TS3) A41895001
Stator temperature transmitter (Pt 100) A41895000
Roots adapter A41893000
Ultragrade® Endurance Extend 110, 1 l H11032010
Ultragrade® Endurance Extend 110, 4 l H11032012
Roots adapter for EH 500 A41893001
TCV direct cooled A41890000
Silencer kit NW40 A41896009
Solenoid valve for purge system A41891001

Page 16
A41802880_C - Technical data

5. Technical data
Table 4 Technical data

EDS 200 300


Pumping speed without gas-ballast
> 210 m3/h > 280 m3/h
Ultimate partial pressure < 0.05 mbar < 0.01 mbar
Maximum permissible inlet pressure 1013 mbar
Max. permanent discharge pressure
1200 mbar
(absolute pressure)
Swept volume maximum pressure rating 11 bar
Integral leak rate < 10-4 mbar l/s
Water vapour capacity without
1.5 - 7 kg/h 2 - 10 kg/h
condensation between 10 – 50 mbar
Permissible ambient temperature 5 to 40 °C
Storage temperature -30 to +50°C
Typical continuous A-weighted sound
pressure level at ultimate pressure
≤ 72 dB(A)
(without silencer but with long exhaust
line)
Relative atmospheric humidity max. 90%
Installation location up to 2000 m (m ASL)
Cooling Water and water/ glycol mixture
Mains voltage 200 - 230 V or 380 - 460 V AC ± 10% or 575 V
Frequency 50/60 Hz
Phases 3-ph
Motor rating 5.5 kW (7.5 HP) 7.5 kW (10 HP)
Current rating (200 – 230 V systems) @
23 A 29 A
full load
Current rating (380 – 460 V systems) @
11.5 A 14.5 A
full load
Recommended branch circuit fuse:
UL (200 – 230 V systems) 32 A
IEC (200 – 230 V systems) 32 A
UL (380 – 460 V systems) 16 A
IEC (380 – 460 V systems) 16 A
UL (575 V systems) 16 A
IEC (575 V systems) 16 A
Min cable size for:
200 – 230 V systems 6 mm2
380 – 460 V systems 4 mm2
575 V systems 4 mm2
Power consumption at ultimate pressure 4.1 kW (5.5 HP) 4.5 kW (6 HP)
Installation category II (IEC 60664-1)
Input supply voltage unbalance Should not exceed 2% when assessed over any one
minute period

Page 17
A41802880_C - Technical data

EDS 200 300


Short circuit current rating according
IEC/EN 60947 suitable for motors with 225 A
efficiency class IE3.
Second protective earth (ground) Must be fitted with cross-sectional area at least equal to
conductor phase conductor size
Cooling fan for heat exchanger
Supply voltage 1-phase 24 V DC
Nominal current consumption 5A
Pump body thermal snap switch
Supply voltage 1-phase 6 - 230 V AC
Rotor speed 6600 rpm 7500 rpm
Min. permissible motor speed1) 1200 rpm
Protection class
Water cooled IP 54
Air cooled IP 20
Approx warm-up time to a temperature
of 40 °C (stator), with a cooling-water 60 min
flow of 4 l·min-1 @20°C
Oil filling Ultragrade® Endurance Extend 110
Oil quantity
Drive (gearbox) 1250 ml
Inlet side 250 ml
Inlet flange ISO 63
Exhaust flange NW 40
Materials

Rotors, Stators, Shafts, Gearbox Cast SG Iron


Seals PTFE and fluroelastome
Coupling cover Cast grey iron, steel, aluminium, brass, rubber
Timing gears Steel
Closed water circuit filling Drystar water mixture 50:50
Oil filling Synthetic
Weight (approximate) 420 kg
Water
Water connection G½˝ female threads
Water supply temperature 5 °C - 35 °C
Required water pressure differential (to
0.2 bar
achieve minimum 8 l/min)
Maximum supply pressure 7 bar(g)**
Primary cooling circuit volume
(Drystar water mixture volume in case of 6l
variant with indirect cooling)
Purge
Connection G¼˝ female thread
Purge gas supply pressure range 4 to 10 bar (g)
Purge gas regulated pressure > 2.2 bar (g)

Page 18
A41802880_C - Technical data

EDS 200 300


Purge gas supply quality < 5 μm
Seal purge flow rate 12 slm total
Gas-ballast flow rate 0 to 50 slm (adjustable)
1) The minimum permissible speed is relevant for the oil lubrication of bearings and gears. Running the pump at
less than the minimum speed for more than 1 hour can cause damage to the pump due to a lack of lubrication.
**bar(g): bar (gauge) is the overpressure, i.e. atmospheric pressure = 0 bar(g)

Figure 2 Pumping speed curves EDS 200 and EDS 300

Page 19
A41802880_C - Transport and storage

6. Transport and storage


CAUTION: LOSS OF STABILITY DURING TRANSPORT
Uncontrolled movement due to faulty attaching/lifting/carrying/rolling or moving the
vacuum pump. For vertical and horizontal transport, use only the attachment points and
transport means described in this manual.

NOTICE:
The pumps are supplied filled with synthetic oil. For this reason they should, while being
transported or shipped, not be subjected to much tilting (10° max.). Store the pumps only
horizontally standing on their feet.

Use a suitable fork-lift truck or pallet truck to move the pump on its pallet, close to where
you will install it.
Remove all packing materials.
Lift the pump at the crane eyes. Use all crane eyes. Ensure that it cannot tip over.

Figure 3 Lifting the EDS pump

A - max. 450

6.1 Storage
Store the pumps only horizontally standing on their feet.
Open the pumps only immediately before installing them.

NOTICE:
If there is the danger of frost, the cooling-water must be drained.

You may use a water glycol mixture of up to 50 %

Page 20
A41802880_C - Transport and storage

Temperature (only for storage without cooling-water) –30 °C to +50 °C


Storage site dry
Maximum atmospheric humidity 90 %, non-condensing

The pump must be stored at the most for one year only. Longer storing without turning the
rotors will damage the bearings. Connect the pump to operate it briefly and then
decommission it as described in the following sections. (The intake flange can stay sealed
during this brief operation, the exhaust flange must be opened.).

Page 21
A41802880_C - Installation

7. Installation
WARNING: RISK OF CUTTING AND CRUSHING
Risk of cutting and cutting off by contact with moving parts such as couplings, shafts and
rotors. Risk of cutting and crushing when reaching into open flanges or covers. Do not
operate the vacuum pump with open flanges or covers. When installing, first
mechanically connect the inlets and outlets, close the covers of rotating parts and then
make the electrical connections. Disconnect the vacuum pump from the power supply
before servicing. Only use trained service personnel.

WARNING: EJECTION OF PARTS


Ejection of parts through bursting of vacuum system due to excessive pressure caused by
incorrect direction of rotation. Pressure build-up in the vacuum system or in vacuum
chambers. Check the direction of rotation of the vacuum pumps before each start-up,
after each motor change and after each electrical connection change.

Ejection of parts through bursting of vacuum system due to excessive pressure, caused by
faulty function at the gas inlet into the vacuum system. Pressure build-up in the vacuum
system or inlet lines. Check correct connection of inlet and outlet flanges before
commissioning. The inlet pressure at the suction port of the vacuum system must not
exceed atmospheric pressure. If seal gas or gas-ballast from pressure vessels is used,
secure the supply in such a way that no overpressure can occur in the vacuum system in
the event of a fault or power interruption.

WARNING: RISK OF GAS LEAKAGE


The atmospheric shaft seal between the gearbox and atmosphere is a PTFE dynamic seal,
which may, under wear-out conditions, lead to small leakage of gas. Ensure that purge
gas is supplied continuously to the main pump shaft seals to prevent process gas entering
the gearbox which could otherwise leak from the atmospheric shaft seal. Leakage of
purge gas to atmosphere should also be considered; ensure the pump is in a well
ventilated area.

Only competent persons may install this EDS pump.


▪ Ensure that you comply with all local and national safety requirements when you install
the pump.
▪ Do not operate the pump system unless the inlet and outlet are connected to your
piping system.
▪ Disconnect the other components in the pumping system from the electrical supply so
that they cannot be operated accidentally.
▪ Electrical, purge gas and water supplies are all potentially hazardous energy sources.
Before carrying out any maintenance the supply of these sources should be locked and
tagged out.
▪ Ensure that the cooling-air flow through the pump-motor cooling-fan cannot be
obstructed.
▪ Ensure that all electrical cables, purge gas pipelines and cooling-water pipelines are
safely positioned, secured and routed, so that they do not present a trip hazard.

Page 22
A41802880_C - Transport and storage

Figure 4 Connections and controls

A. Water cooled version B. Air cooled version


1. Inlet 2. Pump body thermal snap switch
3. Pump body temperature control connector 4. Purge gas IN
5. Cooling-water OUT 6. Cooling-water IN
7. Gearbox oil level glass 8. Exhaust pressure transmitter port
9. Exhaust 10. Grounding connection M6
11. Gas panel 12. HV end oil level glass
13. Gas system pressure gauge 14. Gas system pressure regulator
15. Pump motor terminal box 16. Relief valve
17. Cooling water level glass 18. Heat exchanger

Page 23
A41802880_C - Installation

Figure 5 Oil level at pump standstill

7.1 Placement
Place the pump system on a flat and level surface.
The pump is designed for operation in building. We recommend leaving the crane eyes
screwed in.
Remove the covers and blank flanges on the pump just before fitting the pump so that the
assembly work can be performed under the cleanest conditions.
Check whether there is any desiccant present in the intake area and remove it.
The pumps are supplied filled with synthetic oil. Nothing will have to be refilled. Check the
oil levels through both oil level glasses.
If one of the oil levels is found to be incorrect, contact Edwards.
Fit suitable bolts through the fixing holes in the mounting feet, to secure the pump in
position.

7.2 Normal operation


The EDS pumps are suitable for a wide range of industrial and chemical applications.
Edwards has a dedicated team of applications engineers who can help you determine the
best EDS system for your application.
If you use the system on an application for which it is not suitable, you may invalidate your
warranties. If in doubt, contact Edwards.

7.2.1 Abnormal operation

WARNING: UNPREDICTABLE FAILURES


Use of equipment in abnormal operations can lead to failures that result in injury or
death. Misuse of the pump as described below is strictly prohibited.

▪ Use of the EDS as a positive displacement compressor


▪ Operation outside the limits of operation further defined in this manual
▪ Operation outside the limits of the ATEX marking
▪ Reverse rotation of the EDS
▪ Pumping gases and vapours for which the materials (see Technical data (on page 17)) of
the pump are not suitable
▪ Pumping of substances and mixtures (gases, liquids and solids) where the explosion
hazard results exclusively from the presence of explosive substances
▪ Pumping gases that tend to self-decompose, or that are chemically unstable

Page 24
A41802880_C - Installation

▪ Use of the EDS dry pump with materials which have auto-ignition temperatures below
the defined temperature rating
▪ Operation such that dusts and process deposits can build up inside the pump
mechanism, blow-off-valve and exhaust. This could lead to a loss of constructional
safety and an ignition hazard
▪ Operation such that the EDS dry pump inlet temperature falls below the dew point of a
vapour being pumped. This could lead to condensate that can collect and lead to the
risk of corrosion or an ignition hazard
▪ Pumping of, or use of the EDS dry pump in the presence of, explosive dust atmospheres
▪ Use of the EDS dry pump in a system or flammable process that causes the ingress of
metallic particles into the pump
▪ Pumping of liquids and solid particles
▪ Pumping pyrophoric gases
▪ Use with oxygen enriched atmospheres
▪ Operation with insufficient attachment of the pump
▪ Conversion, manipulation, and maintenance by people not authorized by Edwards
▪ Use of accessories that are not suitable for the internal or external ATEX rating, or
which are not permitted or approved by Edwards

7.3 Connecting the inlet and exhaust lines


7.3.1 Inlet lines
When you connect the EDS pump to the process system:
▪ Support process pipelines to stop the transmission of stress to pipeline joints.
▪ Use flexible connection in the pipeline from the process system to the pump to reduce
vibration and stress in the system pipelines.
▪ Ensure the loads on the pump-inlet flange do not exceed the limits specified in Exhaust
Lines.
▪ Consider to isolate the pump from the atmosphere and from your process systems if
you have pumped or produced dangerous chemicals.
▪ On very dusty applications, incorporate an inlet filter in the inlet pipeline, to minimise
the ingress of dust into the pump.
1. Undo and remove the bolts which secure the blanking-plate to the pump-inlet and
remove the blanking plate. Retain the bolts.
2. Use the trapped O-ring (fitted to the pump) to connect the pump-inlet to your vacuum
system. Secure the bolts retained in Step 1.

Page 25
A41802880_C - Installation

Figure 6 Inlet flage dimensions (in mm)

A. 4 x M8 B. 8 x M10

7.3.2 Exhaust lines

WARNING: DANGEROUS GASES


Pipe the exhaust to a suitable treatment plant to prevent the discharge of dangerous
gases or vapours to the surrounding atmosphere.

WARNING: INTERNAL EXPLOSION


Incorporate safety devices to prevent operation of the pump when the exhaust pipeline
is restricted or blocked. If you do not, the exhaust pipeline may become over-pressurised
and may burst.
Do not operate the EDS dry pump with the exhaust pipeline blocked. If the exhaust
pipeline is blocked, the pump can generate exhaust pipeline pressures of up to 12 bar.

Your exhaust pipeline system must be designed so that the pressure in the pipeline during
operation is less than 1.2 bar absolute.
Incorporate flexible bellows in the exhaust pipeline to reduce the transmission of vibration
and to prevent loading of coupling-joints, which can withstand pressure and maximum
temperature of about 170 °C.
Remove the blanking-cap from the pump-outlet.
Use the NW 40 clamping ring and trapped O-ring supplied in the fittings kit to connect the
pump-outlet to your exhaust pipeline.

Page 26
A41802880_C - Installation

Figure 7 Maximum permissible flange loads

Table 5 Maximum permissible flange load

Maximum force Pump inlet Pump outlet


FX ±892 N ±446 N
FY ±1070 N ±356 N
FZ ±1338 N ±290 N
FR ±1931 N ±640 N
Maximum moment Pump inlet Pump outlet
MX ±476 Nm ±115 Nm
MY ±952 Nm ±231 Nm
MZ ±721 Nm ±177 Nm
MR ±1285 Nm ±313 Nm

7.4 Connecting cooling-water


(Only for water cooled version)
1. Use G1/2 male pipe fittings to fit the cooling-water supply and return hoses.
2. Remove the blanking plugs from the cooling-water inlet and outlet.
3. Connect your water return hose to the cooling-water-outlet and connect your water
supply hose to the water-cooling inlet.
4. Turn on the cooling-water supply.
5. Inspect the water hoses, pipelines and connections and check that there are no leaks.

Page 27
A41802880_C - Installation

Figure 8 Connections and direction of motor rotation

1. Pump body temperature control connector 2. Purge gas inlet


3. Cooling-water outlet 4. Cooling-water intlet
5. Exhaust
Type Cooling-water demand at feed temperature(assuming a constant
discharge temperature of 50 °C)
30°C...35°C 25°C...30°C 5°C...25°C
l/min l/min l/min
EDS 200/300 8.0 6.0 4.0
Depending on your application and use of thermostatic valve temperatures and flows may differ

Figure 9 Cooling water level


CS/4062/A

max.

min.

7.4.1 Water quality


In order to ensure long trouble-free operation the cooling-water must not contain any oils,
greases and suspended solids. Moreover, we recommend compliance with the following
limit values:

Appearance Clear, free of oils and greases


Suspended matter < 250 mg/l
Particle size < 150 μm
Electrical conductivity < 700 μS/cm
pH value 7.0 to 9.0
Total hardness (total alkaline earths) < 8 °dH
Aggressive carbon dioxide None, not detectable
Chloride < 100 mg/l
Sulfate < 150 mg/l
Nitrate ≤ 50 mg/l
Iron < 0.2 mg/l
Manganese < 0.1 mg/l
Ammonium < 1.0 mg/l

Page 28
A41802880_C - Installation

Free chlorine < 0.2 mg/l


8 °dH (degrees German hardness) = 1.4mmol/l
= 10 °e (degrees English hardness)
= 14 °f (degrees French hardness)
If there is the danger of frost, you may use a water Drystar mixture of up to 50%.
DS water can be used for cooling the pump, if the pH value corresponds to the range indicated
above.

7.5 Connecting purge gas


The pump must be operated with purge gas. The purge gas is distributed in the pump via
flow restrictors as follows:
▪ to the shaft-seal on the low vacuum side
▪ into the pumping chamber (balance line)
▪ to the shaft-seal on the high vacuum side.
The flow restrictors ensure that the gas flow to the shaft-seal on the high vacuum side
becomes very low at ultimate pressure.
The purge gas on the shaft-seals provides an air cushion under the shaft-seals and thus
prevents premature wear.
Use of the correct shaft-seal purge and gas-ballast requirements depend on your application.
If in doubt about your application setting, contact Edwards.
▪ Connect an inert gas supply to the gas system. An upstream supply pressure of 4 to 10
bar(g) is required. Ensure that your gas system can maintain pressure whilst flowing up
to 62 SLM of purge gas.
▪ Adjust the regulator on the gas panel to 2.2 bar(g).
▪ The purge supply should be maintained whenever the pump is operational, to ensure
the process seals operate correctly and that the oil boxes are adequately protected
from process media.
▪ Be aware that the purge supplies are not automatically controlled, therefore it could be
possible to pressurise the pump or system if purge is left on with a closed system.
▪ Atmospheric gas-ballast can be adjusted or shut off completely, depending on your
application, using the manual needle valve.

WARNING: LEAKAGE OF GAS


The atmospheric shaft-seal between the gearbox and atmosphere is a PTFE dynamic seal,
which may, under wear-out conditions, lead to small leakage of gearbox gas. Ensure that
purge gas is supplied continuously to the main pump shaft-seals to prevent process gas
entering the gearbox which could otherwise leak from the atmospheric shaft-seal.
Leakage of purge gas to atmosphere should also be considered; ensure the pump is in a
well ventilated area.

Page 29
A41802880_C - Installation

Figure 10 Schematic for purge gas and switches - EDS pump with air cooling
Needle valve
PG-1
Gas ballast

PR-1 Purge gas

High-vacuum shaft seal


Low vacuum shaft seal
Heat

Balance line
exchanger

Gas ballast
Mechanical
Fan water pump Process IN
motor

Motor
BoV-2

CS/4043/A
TS-4
TS-1 TS-2
Exhaust

PG-1 Pressure gauge purge gas


PR-1 Pressure regulator purge gas
BoV-1 Blow off valve
TS-1 Pump body thermal snap switch, warning
TS-2 Pump body thermal snap switch, trip
TS-4 Motor thermistor
Flow restrictor

Non-return valve

Page 30
A41802880_C - Installation

Figure 11 Schematic for purge gas and switches - EDS pump with water cooling

PG-1 Pressure gauge purge gas


PR-1 Pressure regulator purge gas
BoV-1 Blow off valve
TS-1 Pump body thermal snap switch, warning
TS-2 Pump body thermal snap switch, trip
TS-4 Motor thermistor
Flow restrictor

Non-return valve

7.6 Electrical connections

DANGER: ELECTRIC SHOCK


Electrical shock caused by direct or indirect contact with live parts. Electrical shock due to
faulty electrical connection and possible residual voltage up to 5 minutes after
disconnection from the mains. The electrical connection may only be carried out by a
trained person. Observe the national regulations in the user country, e.g. for Europe EN
50110 - 1. Prior to servicing, disconnect the vacuum pump from the power supply.

Electrical shock due to interruption of the protective conductor system. In the event of a
fault, life-threatening voltages may be present on electrically conductive components.
Before commissioning, check the resistance of the earthing cable and the suitability of
the assigned overcurrent protection device.

Page 31
A41802880_C - Installation

WARNING: LIGHTNING STRIKE


Risk of fire and injury from lightning strike. The operator is responsible for assessing the
hazard potential when used outside of buildings.

7.6.1 Wiring the motor


All variants of EDS pump are supplied with a three-phase 5.5 or 7.5 kW pump motor.
Wire the motor in accordance with the instructions supplied with the motors.
Ensure that the electrical installation of the EDS pump conforms to your local and national
safety requirements. It must be connected to a suitably rated fused and protected electrical
supply and a suitable earth (ground) point.
Provide suitable strain relief on the electrical supply cables. If you do not, the cables (or
wires in the cables) may become disconnected and there may be a risk of injury or death by
electric shock.
We recommend that you connect the electrical supply to the pump motor through a suitable
current monitor, and that you configure the high current setting on the current monitor to
switch off the pump motor at a suitable overload current.
Connect the electrical supply to the pump motor through a contactor which has a manual
reset control. The contactor must be installed such that manual reset is required after a
power failure. The contactor must incorporate a motor circuit-breaker which meets the full
load current ratings of the pump motor.
You must be able to isolate and lock out the electrical supply to the EDS pump motor.
The EDS pump can be operated direct-on-line or via a frequency converter. Selection and
installation of a frequency inverter is the responsibility of the user. Ensure that the motor
operation and certification is not adversely affected by the use of a frequency converter. The
min and max motor speeds given in the technical data must be followed.

Figure 12 Wiring schematic-1

Page 32
A41802880_C - Installation

Figure 13 Wiring schematic-2


connection connection

CS/4045/A
U2 V2 W2 U2 V2 W2

U3 V3 W3

U3 V3 W3

U1 V1 W1
U1 V1 W1

Motor terminal
EDS Electrical Supply Part No. Wiring Schematic
connection
200/400 V 50 Hz A41820945 Y/YY
Wiring schematic-2
230/460 V 60 Hz A41820946 Y/YY
EDS 200 water
200 V 50 Hz A41820934 Y/D
cooled
200/380 V 60 Hz A41820936 Y/D Wiring schematic-1
575 V 60 Hz A41820957 Y
200/400 V 50 Hz A41821945 Y/YY
Wiring schematic-2
230/460 V 60 Hz A41821946 Y/YY
EDS 200 air cooled 200 V 50 Hz A41821934 Y/D
200/380 V 60 Hz A41821936 Y/D Wiring schematic-1
575 V 60 Hz A41821957 Y
200/400 V 50 Hz A41830945 Y/YY
Wiring schematic-2
EDS 300 water 230/460 V 60 Hz A41830946 Y/YY
cooled 200/380 V 50 Hz A41830934 Y/D
cooled 200/380 V 60 Hz A41830936 Y/D Wiring schematic-1
575 V 60 Hz A41830957 Y
200/400 V 50 Hz A41831945 Y/YY
Wiring schematic-2
230/460 V 60 Hz A41831946 Y/YY
EDS 300 air cooled 200/380 V 50 Hz A41831934 Y/D
200/380 V 60 Hz A41831936 Y/D Wiring schematic-1
575 V 60 Hz A41831957 Y

Motor thermistor
Connect the motor thermistors (PTC 150 °C) to your pump-motor control circuit. These must
be configured so that manual reset is required, otherwise the pump may restart
automatically once it has cooled down.
The pump motor has 3 PTCs in series. They comply with the standard DIN VDE V098-1-401.
In the terminal box are two wires of the PTCs, they have no polarity. Connect them to a
control unit. Do not connect the wires directly to the power.
The temperature sensor has a basic insulation to the motor winding. The operator has to
provide appropriate measure for the protection against indirect contact. For example, a
monitoring body with galvanic isolation from the temperature sensor to the pump control
can be provided for this.

Page 33
A41802880_C - Installation

7.6.2 Motor thermistors

7.6.3 Pump body thermal snap switch

Figure 14 Pump body thermal snap switch connection

Wire the snap switch into the pump-motor control circuit so that it stops the pump motor.
This must be configured so that manual re-set is required.
Switching point(s) Connection
Normally closed Plug: GSP3-U1

90 °C ± 5 K warning 90 °C: terminal 1 and 3

110 °C ± 5 K trip 110 °C: terminal 2 and 3

Switching capacity: 230 V a.c., 2.5 A see Figure: Wiring schematic-1 on page 32

The output of the thermal snap-switch has two connections: one will open circuit when the
temperature of pump-body is higher than 90 °C. Use this output to provide a warning of high
temperature. The second output will open circuit when the temperature of pump-body is
higher than 110 °C. Use this output to shut-down the pump when it is too hot.

7.6.4 Grounding
Connect the pump to a suitable factory or plant earth (ground) via a M6 earth thread.

Figure 15 Grounding

1. M6 thread

Page 34
A41802880_C - Installation

7.6.5 Check the direction of rotation of the motor


Blank the inlet or connect the EDS pump to the vacuum system before you check the
direction of pump rotation. If you do not, there is danger of objects being trapped in the
rotating pump rotors.
Direction of rotation is clockwise as viewed from the motor end of the pump. View the
motor fan direction.
Let the pump run up briefly (for approximately 1 second) and then immediately switch it off
again.
If the rotation direction is incorrect, isolate and lock-out the power supply, then change the
phases on the pump-motor and recheck direction.

7.6.6 Connecting the heat exchanger fan


(only for air cooled versions)
Connect the heat exchanger fan as shown.

Figure 16 Heat exchanger fan connection

1. Heat exchanger fan connection

The direction of rotation is indicated. Check the direction of rotation by viewing the fan. If
the direction of rotation is incorrect, the live and neutral phases are incorrectly wired.
Power supply must be intrinsically safe according to EN 61010 and the fan supply must be
fused with maximum 4 A.

7.7 Leak check after installation


EDS pumps are not hermetical sealed and leak tight by principle. Leak-check all relevant
connections after having installed the pump.

Page 35
A41802880_C - Operation

8. Operation
DANGER: EMISSION OF HAZARDOUS GAS
Danger as a result of rapid increase in pressure due to decomposition of pumped gases.
Uncontrolled emission of process gases by reaction products within the pump. The
pumping of reactive gases, vapours or gas mixtures is generally prohibited. The operator
is responsible for the assessment of the hazard potential of the process media or
mixtures.

Dangers through escaping or emitting transported hazardous gases, vapours or


substances. Process gases may escape from the exhaust and from leaks in the vacuum
system. The pumping of pyrophoric / radioactive / oxidizing gases or gas mixtures, as well
as the pumping of oxygen of more than atmospheric concentration (21 %) is generally
prohibited. The operator is responsible for the assessment of the hazard potential of the
process media or mixtures.

WARNING: EJECTION OF PARTS


Ejection of parts by bursting of the vacuum system due to excessive pressure caused by
clogged or constricted exhaust. Pressure build-up in the vacuum system or exhaust pipes.
Do not operate the vacuum system with the outlet closed or throttled.

Ejection of parts by bursting of the vacuum system due to excessive pressure caused by
the pump running backwards after it has been switched off under vacuum. Danger of
overpressure in the inlet lines and recipients as well as uncontrolled backward running of
rotors. In the event of a fault or during service, separate the vacuum pumps from the
vacuum container and connecting lines before the inlet by means of suitable valves.

CAUTION: EXTREME SUCTION


Pulling body parts and objects into the vacuum through open flanges.Do not put the
vacuum pump into operation with open flanges. During installation of the vacuum pump
first mechanically connect the inlets and outlets, and only then make the electrical
connections.

CAUTION: TRIP HAZARD


Hazard of slipping, tripping or falling due to oil leakage from the pump. During transport
or depending on the work process, oil may escape from the vacuum pump. Risk of falling
on oil spills. Check vacuum pump regularly for oil leaks. Take appropriate safety
measures.

CAUTION: HOT SURFACES


Burns due to contact with hot surfaces. Burning of fingers, hands or arms on hot surfaces.
Handle the pump only when ventilated and cooled down. Wear suitable protective
equipment.

Page 36
A41802880_C - Operation

CAUTION: HIGH NOISE LEVELS


Hearing loss due to high noise level. Depending on the operating conditions, higher noise
levels can be achieved than specified in the technical data. Take suitable hearing
protection measures.

8.1 Media compatibility


See Normal operation (on page 24). For a list of materials in contact with the process gas,
see Technical data (on page 17).
If you use the system on an application for which it is not suitable, you may invalidate your
warranties. If in doubt, contact Edwards.

8.2 Start-up
1. Ensure that any isolation valves in the process pipework are in the correct positions
(exhaust must be open).
2. Switch on the cooling water for water cooled pumps. For air cooled pumps ensure the
heat exchanger fan is powered and running.
3. Switch on or open the purge gas supply line and ensure right setting. Refer to
Connecting purge gas (on page 29).
4. Start the EDS pump by switching on the electrical supply.
The pump is ready for process when the stator temperature, measured next to the stator
thermal switch, reaches 40°C. (note this process-ready temperature may be different,
depending on your application)

8.3 Manual shut-down


1. Close the pump-inlet isolation-valve (if fitted).
2. Leave the EDS pump operating for sufficient time such that the pump is thoroughly
purged of any process gases. If condensable fluids have been pumped, operate the EDS
pump for at least 40 minutes with all purges on.
3. Switch off the EDS pump.
4. Close or switch off the purge gas supply line.
5. For water cooled pumps only keep the water cooling on for 10 minutes, then switch off
the cooling water.

NOTICE:
If you switch off water-cooling by closing both cooling-water inlet and outlet,
temperature may rise and result in unacceptable high water pressure and the water
circuit may leak.

8.4 Unplanned shut-down and alarms


Refer to Pump body thermal snap switch (on page 34) for instrument trip points.
If the pump stops unexpectedly whilst processing corrosive or condensable vapours
internally, it must be fully purged for sufficient time to ensure it is free of corrosives or
liquids. Otherwise the pump may corrode and be damaged.

Page 37
A41802880_C - Maintenance

9. Maintenance
WARNING: UNEXPECTED RESTART
Failure or malfunction of the central control system (unexpected start-up) or danger of a
pump restarting automatically after switching off due to a fault. Crushing, cutting or
cutting off by touching moving parts due to recurring start command or power supply.
Before carrying out maintenance or service work, disconnect the pump from the power
supply, secure it against being switched on again, determine that it is de-energised,
ground and short-circuit it and cover/isolate adjacent live parts.

CAUTION: HOT EQUIPMENT


Scalding by touching hot equipment or lubricants. Danger of scalding when opening the
hot pump with hot operating fluid or cooling-water. Open outlet or inlet port for
operating fluids only if the operating fluid has adapted to the room temperature. Wear
suitable protective equipment.

CAUTION: HIGH PRESSURE GAS


Danger due to incorrect connection of the pump to the system to be pumped out.
Pressure build-up in the vacuum system. Check correct connection of inlet and outlet
flanges before operation. When using the pump with seal gas, protect the seal gas supply
so that no overpressure can occur in the pump system in the event of a malfunction or
power interruption.

9.1 Return the equipment or components for service


Before you send your equipment to us for service or for any other reason, you must send us
a completed Declaration of Contamination of Vacuum Equipment and Components – Form
HS2. The HS2 form tells us if any substances found in the equipment are hazardous, which is
important for the safety of our employees and all other people involved in the service of
your equipment. The hazard information also lets us select the correct procedures to service
your equipment.
We provide instructions for completing the form in the Declaration of Contamination of
Vacuum equipment and Components – Procedure HS1.
If you are returning a vacuum pump, note the following:
▪ If a pump is configured to suit the application, make a record of the configuration
before returning the pump. All replacement pumps will be supplied with default
factory settings.
▪ Do not return a pump with accessories fitted. Remove all accessories and retain them
for future use.
▪ The instruction in the returns procedure to drain all fluids does not apply to the
lubricant in pump oil reservoirs.
Download the latest documents from www.edwardsvacuum.com/HSForms/, follow the
procedure in HS1, fill in the electronic HS2 form, print it, sign it, and return the signed copy
to us.

Page 38
A41802880_C - Maintenance

NOTICE:
If we do not receive a completed HS2 form, your equipment cannot be serviced.

9.2 Maintenance intervals


Standard maintenance activities are listed below. These activities are given for standard
operating conditions and may differ depending on the harshness of your application.
Therefore the maintenance plan might need to be adapted to your process conditions. If in
doubt, please contact Edwards for any further advice.
Table 6 Maintenance intervals

Service work Interval


Check the oil level and top-up if required 1 week
Check the cooling-water level and top-up if 1 week (only air cooled versions)
required
Check the purge gas supply pressure and hoses 6 months
Check the water hoses 6 months
Drain and replace oil 1 year
Drain and replace coolant 1 year (only air cooled versions)
Remove and clean water pump 1 year (only air cooled versions)
Replace blow-off valve 1 year
Clean the heat exchanger 1 year (only air cooled versions)
Complete overhaul in Edwards service centre 4 years or 32,000 operating hours
Leak check the entire pump system after all maintenance and assembly work and upon
request

9.3 Checking the oil

WARNING: RISK OF BURNS


Before removing the oil-drain or oil-fill plug always switch off the pump first and vent to
atmospheric pressure. When the pump has become warm during operation the casing
and the oil temperature may exceed 80 °C. Leave the pump to cool down. Always wear
protective gloves also to protect yourself against aggressive residues in the oil

The oil-level should be between the bottom and top of the glass for a non-operating pump.
When the pump is operating the oil-level is slightly lower than in a static condition.
If the oil shows any significant change in normal colour consider an oil change and contact
Edwards.
Make sure to use the right kind of oil, see Accessories (on page 16). Only use Edwards oil.

Page 39
A41802880_C - Maintenance

Figure 17 Oil level check

1. Oil fill plugs 2. Oil level glass-motor side


3. Oil level glass-intake side

Figure 18 Oil level at pump standstill

NOTICE:
If the oil level is too low, the bearings and gearwheels are not lubricated adequately; if it
is too high, oil may enter the pumping chamber.
The oil filling openings must be airtight. Under vacuum, the inflow of outside air can
cause oily gas to enter the pump chamber via the piston rings.

Clean the oil-fill port and reinstall the plug using a gasket which is in perfect condition. Wipe
off any oil residues from the casing.

9.4 Inspect the closed cooling-water circuit


(only for air cooled pump variants)

CAUTION:
The cooling system may be pressurized. Ensure that the EDS pump is cooled before
attempting to open the cooling-water header tank. Slowly open the filler cap to release
pressure.

Only for air cooled EDS pump the water or Drystar mixture filling of the closed-loop circuit
needs to be checked.

Page 40
A41802880_C - Maintenance

Cooling-water should be visible in the cooling-water level sight glass above the gearbox. If no
water or Drystar mixture is visible, the system will require additional coolant. Fill up the
system with adequate coolant, so that the sight glass is completely filled up.

Figure 19 Cooling water level

CS/4062/A
max.

min.

9.5 Inspect pipelines and connectors


Inspect all of the cooling system and purge gas pipelines and connections. Check that they
are not corroded or damaged. Replace any of the pipelines and connections that are
corroded or damaged. Check that all connections are secure. Tighten any loose connections.
Inspect all of the electrical cables. Check that they are not damaged and have not
overheated. Replace any cables that are damaged or have overheated. Check that all of the
electrical connections are secure. Tighten any loose connections.
Inspect all of the process inlet and exhaust pipelines and connections. Check that they are
not corroded or damaged. Replace any of the pipelines and connections that are corroded or
damaged. Check that all connections are secure. Tighten any loose connections.

Page 41
A41802880_C - Spares

10. Spares
Table 7 Spare

Part number Description


H11033015 Ultragrade® Kinetic 150 1L
H11033010 Ultragrade® Kinetic 150 4L
H12810003 Drystar coolant 0.9/2L
A41889706 EDS200/300 Direct cooled service kit
A41889708 EDS200/300 Indirect cooled service kit
A41889705 EDS 200/300 BOV kit
A41889702 EDS 200/300 Chemical atmospheric seal kit
EK32000113 Sight glass 40, 3 X 4 kit ATEX
A41889710 200/300 Chemical exhaust kit

Page 42
A41802880_C - Diagnose a fault

11. Diagnose a fault


A list of fault conditions and their possible causes is provided here to assist in basic
troubleshooting. If you are unable to rectify a fault using this guide, call your supplier or your
nearest Edwards Service Centre for advice.

Fault Pump does not start up

Cause Motor incorrectly connected.


Remedy Connect motor correctly.

Cause Overtemperature switch or motor stator defective.


Remedy Contact Edwards Service.

Cause Pressure switch is defective.


Remedy Replace the pressure switch.

Cause Lubricant is too thick.


Remedy Exchange the lubricant or warm up lubricant and pump.

Cause Motor rotor defective.


Remedy Contact Edwards Service.

Cause Pump has seized: defective rotors, bearings or toothed gears.


Remedy Contact Edwards Service.

Fault Pump gets too hot

Cause Cooling-water supply is not sufficient.


Remedy Ensure sufficient cooling-water supply.

Cause Cooling-water lines are clogged.


Remedy Decalcify cooling-water lines.

Cause Ambient temperature is too high or cooling air flow is obstructed.


Remedy Install the pump at a suitable place or ensure a sufficient flow of cooling air.

Cause Pump is operating in the wrong pressure range.


Remedy Check the pressure levels within the system.

Cause Gas temperature is too high.


Remedy Check system.

Cause Clearance between housing and rotors are too small due to contamination.
Remedy Clean pumping chamber.

Cause Clearance between housing and rotors are too small due to distortion of the pump.
Remedy Affix and connect the pump free of tension.

Page 43
A41802880_C - Diagnose a fault

Cause Friction resistance is too high due to contaminated bearings and/or contaminated
lubricant.
Remedy Clean pump, respectively perform maintenance.

Cause Lubricant level is too high.


Remedy Drain lubricant down to the correct level.

Cause Lubricant level is too low.


Remedy Top up lubricant to the correct level.

Cause Wrong lubricant filled in.


Remedy Contact Edwards service.

Cause Bearing is defective.


Remedy Contact Edwards service.

Fault Pump is extremely loud

Cause Bearing damage.


Remedy Repair pump.

Cause Thick particle deposits.


Remedy Clean pump, respectively perform maintenance.

Fault Motor power consumption is too high

Cause Like "Pump gets too hot".


Remedy See Pump gets too hot (on page 43).

Cause Incorrect mains voltage for the motor.


Remedy Connect the motor to the correct mains voltage.

Fault Pump is too loud

Cause Motor stator defective.


Remedy Contact Edwards Service.

Cause Motor rotor defective.


Remedy Contact Edwards Service.

Cause Distances between housing and rotors is too small due to contamination.
Remedy Clean pumping chamber.

Cause Distances between housing and rotors is too small due to distortion of the pump.
Remedy Affix and connect the pump free of tensions.

Cause Rotors make contact with the housing.


Remedy Contact Edwards Service. Shutdown pump immediately.

Cause Rotor is running untrue.


Remedy Contact Edwards Service. Shutdown pump immediately.

Page 44
A41802880_C - Diagnose a fault

Cause Oil slinger disc makes contact with the gear housing.
Remedy Contact Edwards Service.

Fault Pump is losing lubricant

Cause Oil drain plug is leaky.


Remedy Drain lubricant, firmly screw in a new oil drain plug with the gasket, fill in correct lubricant
quantity.

Cause Oil level glasses leaky.


Remedy Contact Edwards Service.

Cause Gear cover is leaky.


Remedy Replace the O-ring of the gear cover.

Cause Puddle under the motor, leak in the seal.


Remedy Contact Edwards Service. shutdown pump immediately.

Cause No lubricant leak is apparent.


Remedy See Lubricant in the pump chamber (on page 45)
.

Fault Oil gets too dark

Cause Oil has been used up.


Remedy Exchange the oil.

Cause Pump gets too hot.


Remedy See Pump gets too hot (on page 43); after remedy of the fault, exchange the oil.

Fault Lubricant in the pump chamber

Cause Lubricant level is too high.


Remedy Drain the lubricant down to the correct level.

Cause Lubricant is ejected from the system.


Remedy Check system.

Cause Pump is not standing horizontally.


Remedy Place the pump correctly.

Cause Pump has a gas leak towards the outside.


Remedy Run a leak search and pinpoint leaks. If the leak is not at the oil-fill or oil-drain plugs, return
the pump to the Edwards Service.

Cause Pump has an internal leak.


Remedy Contact Edwards Service.

Cause Shaft-seals are defective.


Remedy Contact Edwards Service.

Page 45
A41802880_C - Diagnose a fault

Fault Pump does not attain its pumping speed

Cause Intake screen is clogged.


Remedy Clean intake screen.

Cause Motor incorrectly connected.


Remedy Connect motor correctly.

Cause Motor stator defective.


Remedy Contact Edwards Service.

Cause Motor rotor defective.


Remedy Contact Edwards Service.

Cause Vacuum pump system has a gas leak.


Remedy Detect leak and seal it.

Cause Rotor gap is too great.


Remedy Contact Edwards Service.

Cause Bearing defective.


Remedy Contact Edwards Service.

Page 46
A41802880_C - Dimension drawings

12. Dimension drawings


Figure 20 EDS 200/300 with air cooling (dimensions in mm)

Page 47
A41802880_C - Dimension drawings

Figure 21 EDS 200/300 with water cooling (dimensions in mm)

Page 48
A41802880_C - Wearing parts

13. Wearing parts


Gasket for plug screw G 3/8 (oil fill plug) ES23955165

Page 49
A41802880_C - Waste disposal

14. Waste disposal


The equipment may have been contaminated by the process or by environmental influences.
In this case the equipment must be decontaminated in accordance with the relevant
regulations. We offer this service at fixed prices. Further details are available on request.
Separate clean components according to their materials, and dispose of these accordingly.
When sending us any equipment, observe the regulations given in section Return the
equipment or components for service on page 38.

Disposal of waste oil


Owners of waste oil are responsible for proper disposal of this waste.
Waste oil from vacuum pumps must not be mixed with other substances or materials.
Waste oil from vacuum pumps (Edwards oils are based on mineral oils) which are
contaminated due to the influence of oxygen in the air, high temperatures or mechanical
wear must be disposed of through a local waste oil disposal system.
Waste oil from vacuum pumps which is contaminated with other substances must be
marked and stored in such a way that the type of contamination is apparent. This waste
must be disposed of as special waste.
European, national and regional regulations concerning waste disposal need to be observed.
Waste must only be transported and disposed of by an approved waste disposal vendor.

Symbols on the vacuum device


Do not dispose of the vacuum device as residual waste. Dispose of it in accordance
with the applicable local regulations.

China RoHS: Products marked with this symbol contain residual quantities of
substances that are subject to quantitative regulation in accordance with Chinese
Directive GB/T 26552. These parts can safely be used for the environmental
protection use period (20 years) as indicated and should enter into the recycling
system after their environmental protection use period.

Page 50
P20050033A
CE Declaration of Conformity
Edwards Ltd
Innovation Drive
Burgess Hill
West Sussex
RH15 9TW, UK

The following product

EDS 200 and EDS 300

Part number
A418vwxz
v = 2, 3 (pumping speed)
w = 0, 1 (cooling system)
x = 934, 936, 945, 946, 957 (motor variants)
z = blank or V01 to V99

ATEX Marking:
II 3/-G Ex h IIC T3 Gc
5°C ≤ Ta ≤ 40°C
(internal atmospheres only)

Is in conformity with the relevant requirements of European CE legislation:


2006/42/EC Machinery directive
2014/34/EU ATEX directive on use in potentially explosive atmospheres
2014/30/EU Electromagnetic compatibility (EMC) directive
2011/65/EU Restriction of certain hazardous substances (RoHS) directive
as amended by Delegated Directive (EU) 2015/863

Based on the relevant requirements of harmonised standards:


EN 1012-2:1996 +A1:2009 Compressors and vacuum pumps. Safety requirements. Vacuum pumps
EN 60204-1:2006+A1:2009 Safety of machinery - Electrical equipment of machines Part1: General requirements
EN ISO 80079-36:2016 Explosive atmospheres – Part 36: Non-electrical equipment for explosive atmospheres.
Basic method and requirements
EN ISO 80079-37:2016 Explosive atmospheres - Part 37: Non-electrical equipment for explosive atmospheres --
Non-electrical type of protection constructional safety ''c'', control of ignition sources ''b'',
liquid immersion ''k''
EN 61000-6-2:2005 Electromagnetic compatibility (EMC) - Part 6-2: Generic standards - Immunity for industrial
environments
EN 61000-6-4:2007 Electromagnetic compatibility (EMC) - Part 6-4: Generic standards - Emission standard for
+A1:2011 industrial environments

Documentation Officer: Jelena Havelkova, Spielberk Office Centre, Holandska 10, Brno, 63900 Czech Republic,
: +42(0) 734 418 896, : [email protected]

This declaration, based on the requirements of the listed Directives and EN ISO/IEC 17050-1, covers all product
serial numbers from this date on: 20th January 2020.

Andries De Bock – Vice President Engineering Axel Guddas – General Manager


Industrial Vacuum Division Cologne
Qingdao
Additional Legislation and Compliance Information
EU EMC Directive: Class A/B Industrial equipment
Caution: This equipment is not intended for use in residential environments and may not provide adequate protection to
radio reception in such environments.

EU RoHS Directive: Material Exemption Information


This product is compliant with the following Annex III Exemptions:
• 6(a) Lead as an alloying element in steel for machining purposes and in galvanised steel containing up to 0.35 %
lead by weight
• 6(b) Lead as an alloying element in aluminium containing up to 0.4% by weight
• 6(c) Copper alloy containing up to 4% lead by weight

EU REACH Regulation Compliance


This product is a complex article which is not designed for intentional substance release. To the best of our knowledge
the materials used comply with the requirements of REACH. The product manual provides information and instruction to
ensure the safe storage, use, maintenance and disposal of the product including any substance based requirements.

Article 33.1 Declaration


This product does contain Candidate List Substances of Very High Concern above 0.1%ww by article as clarified under the
2015 European Court of Justice ruling in case C-106/14.
• Lead (Pb) added to the Candidate List June 2018
As indicated by the applied RoHS exemption(s) above this substance is present in certain aluminium/brass/steel
components.

材料成分声明
China Material Content Declaration
有害物质
Hazardous Substances
部件名称
六价铬 多溴联苯 多溴二苯醚
Part name 铅 汞 镉
Hexavalent Polybrominated Polybrominated
Lead Mercury Cadmium
Chromium biphenyls diphenyl ethers
(Pb) (Hg) (Cd)
(Cr VI) (PBB) (PBDE)
铸铝及铝合金制品
X O O O O O
Aluminium alloys
钢合金制品
X O O O O O
Steel alloys
铜接头
X O O O O O
Brass connectors
O: 表示该有害物质在该部件的所有均质材料中的含量低于 GB/T 26572 标准规定的限量要求。
O: Indicates that the hazardous substance contained in all of the homogeneous materials for this part is below the limit
requirement in GB/T 26572.
X: 表示该有害物质在该部件的至少一种均质材料中的含量超出 GB/T26572 标准规定的限量要求。
X: Indicates that the hazardous substance contained in at least one of the homogeneous materials used for this part is
above the limit requirement of GB/T26572.

This product has been manufactured under a quality management system certified to ISO 9001:2015
This page has been intentionally left blank.
This page has been intentionally left blank.
This page has been intentionally left blank.
edwardsvacuum.com

You might also like