Capacitive type Humidity Sensor (Ver 01)

SY-HC-1

SY-HC-Series

Rhopoint Components Ltd, Holland Road, Hurst Green, Oxted, RH8 9AX www. rhopointcomponents.com Tel : +44(0) 1883 717988 email: [email protected]

Capacitive type Humidity Sensor (Ver 01)

SY-HC-1

Capacitive Type Humidity Sensor

SY-HC-Series
The humidity sensor of SY-HC-series is a capacitive type polymer sensor for the measurement of relative humidity. Polyimide was selected as a humidity sensing material because of its inherent IC (Integrated Circuit) process compatibility, negligible temperature dependence and good resistance against contamination. To make the humidity sensor, we utilize the semiconductor fabrication technology and the polymer. The sensor converts the humidity value into capacitance, which can be electronically measured.

Caution
(1) Dont touch the active area of the SY-HC-1. -. If you must touch the sensor surface [active area], use the clean glove. (2) Please, use the LCR meter for basic characteristic measurement at 1Vac, 20 kHz, @25.

Rhopoint Components Ltd, Holland Road, Hurst Green, Oxted, RH8 9AX www. rhopointcomponents.com Tel : +44(0) 1883 717988 email: [email protected]

Capacitive type Humidity Sensor (Ver 01)

SY-HC-1

Model Name
SY-HC-Series : Capacitive type Humidity Sensor : Polymer Humidity Sensor

Features
Relative humidity sensor using the polymer Using the semiconductor fabrication process Using the glass wafer as a substrate material High sensitivity and accuracy, fast response Low hysteresis and long term stability

Typical Application
Hygrometers, consumer goods Humidifiers and Dehumidifiers Medical applications Automotive HVAC System Weather stations

Dimensions (mm)

1 mm = 0.03937 inch 1 inch = 25.4 mm

Rhopoint Components Ltd, Holland Road, Hurst Green, Oxted, RH8 9AX www. rhopointcomponents.com Tel : +44(0) 1883 717988 email: [email protected]

Capacitive type Humidity Sensor (Ver 01)

SY-HC-1

Basic Characteristics
Measurement Condition Temperature : 25, Input Voltage : 1Vac, Frequency : 20kHz

Characteristics
Nominal Capacitance @ 55%RH Sensitivity ( 10 %RH ~ 95 %RH) Humidity Hysteresis (20 %RH 95 %RH) Linearity Response time (30 %RH 90 %RH) Temperature coefficient (5 ~ 70 ) Long-term stability Operating temperature range Operating humidity range Operating frequency range

Value
330 20 pF 0.6pF/%RH < 2 %RH 2 %RH < 15 sec 0.16 0.01 pF / Drift < 0.2%RH/year - 40 ~ 120 0 ~ 100 %RH 1 ~ 100 kHz

Min
310

Typ
330 0.6 2

Max
350

-2

0 15

0.15

0.16

0.17 0.2

Operating Range of sensor

The working range of the capacitive humidity sensors SYHC-series is shown by the graph of temperature/ humidity limits. Although the SY-HC-series would not fail beyond the limits, the specification is guaranteed only within the working range.

Rhopoint Components Ltd, Holland Road, Hurst Green, Oxted, RH8 9AX www. rhopointcomponents.com Tel : +44(0) 1883 717988 email: [email protected]

Capacitive type Humidity Sensor (Ver 01)

SY-HC-1

Standard Characteristics
The sensor of SY-HC-series consists of a top-electrode a polyimide layer and a bottom electrode. The structure of top electrode has a grid top electrode, which brings a high sensitivity compared to that of a standard structure. The sensor was fabricated using the semiconductor fabrication technology such as sputter process, and polymer technology. This graph shows the typical response curve of SY-HC-1 in the humidity of 10%RH ~ 95 %RH.

B asic C h aracteristics o f H um idity Senso r

390 380 370 360

0.65 0.6 0.55

Capacitance (pF)

350 340 330 320 310 300 290 280 270 0 10 20 30 40 50 60 70 80 90

100

R e lativ e H um idity (% R H )

All capacitance of the sensor is measured by 1 Vac @ 20 kHz at 25 . The sensor characteristic of capacitive type humidity sensor[ SY-HC-1] is determined by the following formula :

C c (% RH ) = C s @ 55 % RH + S [(% RH (C m ) % RH (C s )] pF
Here,

S C c (%RH ) C s @ 55% RH % RH (C m ) % RH (C s )

: Standard Sensitivity (pF/%RH) : Calculated capacitance value at the measured relative humidity : Standard capacitance value at 55 %RH : Measured relative humidity value : Standard relative humidity value (55%RH)

Rhopoint Components Ltd, Holland Road, Hurst Green, Oxted, RH8 9AX www. rhopointcomponents.com Tel : +44(0) 1883 717988 email: [email protected]

Capacitive type Humidity Sensor (Ver 01)

SY-HC-1

Characteristics of SY-HC-1
Basic Capacitance Characteristics
The graph shows the typical characteristic curve of our capacitive humidity sensor [SY-HSseries]. The average increase of capacitance value within the working range of 10 ~ 95 %RH indicate 56 pF. Also, the accuracy is shown lower then 2 %RH. Considering the relative humidity of the sensor, the accuracy formula is given by

% RH (C c ) =
Here,

C m (% RH ) Cs @ 55% RH + % RH (Cs ) S

S C m (%RH ) C s @ 55% RH % RH (C c ) % RH (C s )

: Standard sensitivity (pF/%RH) : Measured capacitance value : Standard capacitance value at 55 %RH : Calculated relative humidity at the measured capacitance value : Standard relative humidity value (55%RH)

Basic capacitance of Sensor

360 350

Capacitance(pF)

340 330 320 310 300 290 0 20 40 60 80 100

Relative humidity(%RH)
At 25 , 1 Vac, 20 kHz

Temperature Humidity Calculation Error

25.0 10 303.00 -6.09

25.0 20 303.59 309.00 -5.41

25.0 40 316.25 321.00 -4.75

25.0 55 326.56 330.00 -3.44

25.0 75 339.56 342.00 -2.44

25.0 95 352.78 354.00 -1.22

sensitivity 0.6

Measurement 296.91

Rhopoint Components Ltd, Holland Road, Hurst Green, Oxted, RH8 9AX www. rhopointcomponents.com Tel : +44(0) 1883 717988 email: [email protected]

Capacitive type Humidity Sensor (Ver 01)

SY-HC-1

Hysteresis Characteristics

Hysteresis characterization of average value

350 340

Capacitance (pF)

330 320 310 300 290 0 20 40 60 80 100

Relative humidity (%RH)

Humidity Capacitance(pF) Hysteresis (pF) Hysteresis(%RH)

20 295.87 0.13 0.22

40 308.55 0.23 0.38

55 318.06 0.31 0.52

75 330.74 0.73 1.22

95 343.42

75 331.15

55 318.37

40 308.78

20 296

The graph shows the hysteresis curve of our capacitive humidity sensor [SY-HS-series]. Considering the relative humidity of the sensor, the hysteresis formula is given by

Hysteresis Vlaue = C (20% RH 95% RH ) C (95% RH 20% RH )

The hysteresis value is measured under 1 pF. The hysteresis variety of samples indicate < 3%RH at each humidity point. This result shows that the sensor satisfies our specification.

Rhopoint Components Ltd, Holland Road, Hurst Green, Oxted, RH8 9AX www. rhopointcomponents.com Tel : +44(0) 1883 717988 email: [email protected]

Capacitive type Humidity Sensor (Ver 01)

SY-HC-1

Temperature Characteristics
Temperature characteristics
370 360 350

Capacitance(pF)

5 10 15 20 25 30 40 50 60 70 0 20 40 60 80 100

340 330 320 310 300 290

Relative humidity(%RH)
At 25 , 1 Vac, 20 kHz
Sample 20% 30% 40% 50% 60% 70% 80% 90% 325.42 332.25 338.97 345.87 352.02 358.18 5 10 311.21 318.76 324.71 331.45 337.94 344.91 351.69 357.93 15 310.27 317.95 323.70 330.08 337.00 344.08 350.91 357.19 20 308.93 315.18 322.01 328.39 335.73 342.57 349.18 355.91 25 306.04 313.74 320.56 327.51 334.96 342.03 348.46 354.95 30 306.24 313.34 319.80 326.37 333.15 339.85 346.34 353.80 40 304.45 311.52 318.56 325.40 332.17 338.92 346.04 353.03 50 303.75 310.76 317.48 324.12 331.17 338.85 344.34 351.70 60 302.65 309.43 316.17 323.27 330.16 337.16 343.89 351.14 70 301.82 308.42 314.84 321.82 329.02 336.36 342.93 350.72

Capacitive type Humidity Sensor (Ver 01)

SY-HC-1

Frequency Characteristics
Frequency characteristics
370 360 350

Capacitance(pF)

340 330 320 310 300 290 0 20 40 60 80 100 10kHz 20kHz 50kHz 80kHz 100kHz

Relative humidity(%RH)

At 25 , 1 Vac, 20 kHz

Frequency 10 kHz 20kHz 50 kHz 80 kHz 100 kHz

20 %RH 308.72 308.65 308.08 305.41 304.87

40 %RH 323.41 322.21 321.66 319.61 319.24

55 %RH 332.92 332.24 331.24 329.06 328.34

75 %RH 345.66 344.72 343.8 341.85 340.71

95 %RH 359.37 358.12 356.33 353.97 353.67

Capacitive type Humidity Sensor (Ver 01)

SY-HC-1

Water Shock Characteristics

Water Shock Test Result
360 350

Capacitance(pF)

340 330 320 310 300 290 0 20 40 60 80 10 0

Basic After 12h After 24h

Relative humidity(%RH)

Short-term stability
Short-term stability
390 370

350

Capacitance(pF)

330

310

10 %RH
290

20 %RH 55%RH 75 %RH 95 %RH

270

250 0 5 10 15 20 25

Time(Hours)

Rhopoint Components Ltd, Holland Road, Hurst Green, Oxted, RH8 9AX www. rhopointcomponents.com Tel : +44(0) 1883 717988 email: [email protected]

Capacitive type Humidity Sensor (Ver 01)

SY-HC-1

Environmental Test System

The purpose of the report is to describe the results from environmental test of the capacitive type humidity sensor (SY-HC-1). Devices were characterized at 25 between 20 and 95 %RH. The meter is set to measure capacitance at 1Vac and 20 kHz. For the precise measurement, we used the hygrometer and compared with the humidity of temperature-humidity chamber. The data indicated the effect of a sensor characterization before/after the environmental tests of the SY-HC-1. Table is a summary of the environmental test results.

Measurement System of Capacitive Humidity Sensor

Rhopoint Components Ltd, Holland Road, Hurst Green, Oxted, RH8 9AX www. rhopointcomponents.com Tel : +44(0) 1883 717988 email: [email protected]

Capacitive type Humidity Sensor (Ver 01)

SY-HC-1

Environmental Test Result

No

Test Group

Test Condition Temperature:150, Test time : 1,000 hours Recovery time : 1 ~ 2 hours Temperature :- 40,Test time : 1,000 hours Recovery time : 1 ~ 2 hours Temperature : 25 , Humidity : 93 %RH Test time : 500 hours, Bias : 1Vac, 20kHz Recovery time : 1 ~ 2 hours Temperature : 85 , Humidity : 85 %RH Test time : 500 hours, Bias : 1Vac, 20kHz Recovery time : 1 ~ 2 hours High Temperature : 125 Low Temperature : - 40 1 Cycle : Low (30min) ~ High(30min) Cycle time : 200 cycle Recovery time : 1 ~ 2 hours Frequency Range : 10Hz ~ 20kHz

Request Condition
< 2%RH

High Temperature Storage

Low Temperature Storage Low Temperature/High

< 2%RH

Humidity Steady State with Bias High Temperature/High

< 3%RH

Humidity Steady State with Bias

< 3%RH

Temperature / Thermal Shock

< 2%RH

Vibration (Sine Sweep)

Sweep Range :10Hz, Sweep time : 15min 12 Sweep per axis Temperature Range : 0, 25, 50, 70 Input source : 1Vac, 20kHz Process time : 168 hours Recovery time : 1 ~ 2 hours

< 2%RH

Accuracy

< 2%RH

Rhopoint Components Ltd, Holland Road, Hurst Green, Oxted, RH8 9AX www. rhopointcomponents.com Tel : +44(0) 1883 717988 email: [email protected]

Capacitive type Humidity Sensor (Ver 01)

SY-HC-1

Application Note Frequency Output Circuit.

`This circuit is the typical frequency output circuit using the timer 555.

DC5V

R1 8 49.9 7 DISCH VDD RESET 4

C2 R3 10 0.1

R2 3 301 6 THRES 2 C3 GND 0.1 1 TLC555 HUMI. SY-HC-1 C1 0.1 TRIG CONT 5 OUT Fout

Rv is a variable resistor which compensate a output frequency about the basic capacitance value of SY-HC-1. Since the charge and discharge of the sensor run through different resistors, R1 and Rt [ = R2+ RV], the duty cycle is determined by :

T (high) = C @ % RH [ R1 + Rt ] ln 2
T ( low ) = C @ % RH R t ln 2 Period = T ( high ) + T ( low ) = C @ % RH [ R 1 + 2 R t ] ln 2
F = 1 Period = 1 C @ % RH [ R 1 + 2 R t ] ln 2

Output duty cycle = T ( high ) F =

R1 + R t 100 % R1 + 2 R t

Capacitive type Humidity Sensor (Ver 01)

SY-HC-1

The external capacitor charges through R1+Rt and discharges through Rt. Thus the duty cycle may be precisely set by the ratio of these two resistors. If R1 << Rt , the duty cycle is close to 50 %. Therefore the frequency is independent of the supply voltage.

Voltage Output Circuit.

Block diagram
This block diagram is DC voltage output model using the timer IC 555. The output of the sensor is a DC voltage linked to the capacitive humidity sensor. The circuit built operates in pulse width modulation (PWM) mode, which is one of the functions of timer IC 555.

Capacitive Humidity Sensor

Continuous triggering pulse

Pulse width modulation

Low pass filter

Amplifier

Vout

This sensor support electronic circuitry uses two timers. One timer continuously issues a pulse train in order to trigger the other timer, which operates in PWM mode.

Rhopoint Components Ltd, Holland Road, Hurst Green, Oxted, RH8 9AX www. rhopointcomponents.com Tel : +44(0) 1883 717988 email: [email protected]