OPERATION MANUAL

eliteTM
RF Plasma Generator
elite 300 / 600 Half Rack

WARNING: POTENTIALLY LETHAL VOLTAGES ARE USED BY AND PRODUCED BY

THIS UNIT. A thorough understanding of this manual is required before
attempting to install this unit into a system.

DO NOT USE ANY CFC (CHLOROFLUOROCARBON) SOLVENT IN THE MAINTENANCE OF THIS

PRODUCT. In recognition of our responsibility to protect the environment, this product has
been manufactured without the use of CFCs. The no‐clean flux now used in all soldering
CFC's operations may leave a small inert residue that will not affect the performance of the
product. The use of CFCs for cleaning or maintenance may result in partial liquification of the
no‐clean flux residue, which will damage the unit and void the warranty.

QUALITY
This product is manufactured at an MKS Instruments’ ISO‐9001‐Quality‐System‐compliant
ISO 9001 facility.
SYSTEM

Notice
The material contained in this manual is subject to change without notice. No part of this manual may be reproduced
or utilized in any form or by any means, electronic or mechanical, including photocopying or electronic transmission or
other means of reproduction or distribution without prior written consent of MKS, ENI Products. The drawings,
specifications and other technical information contained in this manual are the property of MKS, ENI Products and shall
not be copied, reproduced or used in any way, in whole or in part, as the basis of manufacture or sale of similar items
without the prior written consent of MKS, ENI Products.
Manual Order Number: 1041955 Copyright © 2009 MKS Instruments, Inc. All rights reserved.
Revision Level: 00A MATCHWORK® is a registered trademark of MKS Instruments, Inc.
 Warranty
MKS, ENI Products warrants to the original purchaser for a period of one year from the date of delivery, each
instrument to be free from defects in materials and workmanship. For a period of one year, MKS, ENI Products
will, at its option, adjust, repair, or replace defective parts, without charge to the original purchaser, so that
the instrument performs according to its specifications.
When warranty service is required, the instrument must be returned, transportation prepaid, to the
factory or to one of MKS, ENI Products' designated service centers. If, in our opinion, the instrument has been
damaged by accident, unreasonable use, buyer‐supplied software or interfacing, improper site preparation or
maintenance, or abnormal conditions of operation, repairs will be billed at standard rates. In this case, an
estimate will be submitted before the work is started.
THIS LIMITED WARRANTY IS EXCLUSIVE AND MKS, ENI PRODUCTS MAKES NO OTHER WARRANTIES,
EXPRESS OR IMPLIED, AND ALL OTHER EXPRESS ORAL OR WRITTEN WARRANTIES AND ALL WARRANTIES
IMPLIED BY LAW, INCLUDING ANY WARRANTIES OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR
PURPOSE OR OTHER WARRANTY OF QUALITY ARE EXCLUDED AND DISCLAIMED. IN NO EVENT SHALL MKS, ENI
PRODUCTS BE LIABLE FOR SPECIAL, INDIRECT, INCIDENTAL OR CONSEQUENTIAL DAMAGES RESULTING FROM
BREACH OF ANY WARRANTY, WHETHER EXPRESS OR IMPLIED, INCLUDING ANY IMPLIED WARRANTY OF
MERCHANTABILITY OR FITNESS FOR A PARTICULAR PURPOSE, OR FROM ANY CAUSE WHATSOEVER,
INCLUDING NEGLIGENCE. Buyer's sole and exclusive remedy under this warranty shall be repair or
replacement as set forth above, or if MKS, ENI Products is unable to repair or replace the defective part within
a reasonable time, a refund of the price of the part or goods that give rise to the warranty claim.

Service And Technical Assistance

For Service or Repair contact the closest Customer Service Department with the following information:
• Model and serial number
• Purchase order number
• Detailed description of malfunction
• Your company's "Bill To" and "Ship To" address
You will receive a RMA (Return Materials Authorization) number, the warranty status of the unit to be
returned and estimated repair charge, if any. The RMA number is your authorization number. Please type this
number on your purchase order and shipping label. After MKS, ENI Products receives the unit, a firm quote
and estimated date of completion will be given.

For Technical Assistance for your particular application, contact the nearest MKS, ENI Products Sales and
Service Center. The following information will help us provide you with prompt and efficient service:
• All of the information contained on the unit's nameplate.
• Names and telephone numbers of important contacts.
• Detailed description (i.e., physical damage and/or performance anomalies, quantitative and/or
qualitative deviation from specifications), including miscellaneous symptoms, dates and times.
• The environment and circumstances under which the issue developed.
• Supporting test data and/or records that can be provided.
• Any previous, related conversations and/or correspondence with MKS, ENI Products.
 Sales & Service Locations

ROCHESTER, NY MKS Instruments, Inc. Tel: (585) 427‐8300

100 Highpower Road Fax: (585) 427‐7839
Rochester, NY 14623

Toll Free USA Sales Hotline: 1‐800‐267‐5362

Toll Free USA Technical Support
Hotline: 1‐877‐464‐2789
SAN JOSE, CA MKS Instruments, Inc. Tel: (408) 750‐0300
134 Rio Robles Fax: (408) 428‐0390
San Jose, CA 95134
AUSTIN, TX MKS Instruments, Inc. Tel: (512) 719‐8000
1321 Rutherford Lane Fax: (512) 719‐8095
Suite 200
Austin, TX 78753
ENGLAND 1 Anchorage Court Tel: 44‐161‐929‐5500
Caspian Road Fax: 44‐161‐929‐5511
Altrincham, Cheshire
WA14 5HH, England
GERMANY Sielminger Str. 63 Tel: 49‐711‐947700
D‐70771 Leinfelden‐ Fax: 49‐711‐9477025
Echterdingen (Stetten)
Stuttgart, Germany
JAPAN MKS Japan, Inc. Tel: 042‐500‐8825
2‐12‐11 Matsubara‐cho Fax: 042‐500‐8829
Akishima‐city, Tokyo
Japan, 196‐0003
KOREA 6th Fl., Building B, Nexscien Plant, Tel: 82‐31‐8021‐1307
456, Gomae‐Dong, Giheung‐Gu, Fax: 82‐31‐8005‐9324
Yongin‐Si, Gyungki‐Do
Postal code : 446‐901, Korea
SINGAPORE Blk 4010 Techplace 1 Tel: 65‐6451‐1062
#01‐07/08/09 Fax: 65‐6451‐0172
Ang Mo Ko Ave 10
Singapore 569626
TAIWAN 2F, No. 47, Ln. 2, Sect. 2 Tel: 886‐3‐575‐3040
Kuang Fu Rd. Fax: 886‐3‐575‐3048
Hsinchu 300
Taiwan, ROC
P.R. of CHINA West end of 2nd floor, Tel: 86‐21‐5834‐7934 or
No. 3 building (T20‐3) 86‐21‐5834‐7914
No. 258 Jinzang Rd., Shanghai Jin Fax: 86‐21‐5834‐7794
Qiao Export Processing Zone
Pudong, Shanghai 201206
P.R. of China

Product and Applications information also available on the Internet at:

http://www.mksinst.com
This page intentionally left blank.
 Contents

TABLE OF CONTENTS
Chapter 1 ‐ Introduction ............................................................................5
1.1 About This Manual...................................................................................... 6
1.1.1 Finding Your Way Around ............................................................... 7
1.1.2 Documentation Conventions .......................................................... 8
Commands .......................................................................... 8
Definitions........................................................................... 8
1.2 Safety Considerations ................................................................................. 9
1.2.1 Exclamation Point Within a Triangle............................................... 9
1.2.2 Lightning Bolt Within a Triangle.................................................... 10
1.2.3 Service Warning ............................................................................ 10
1.2.4 Non‐ionizing Electromagnetic Radiation Warning Triangle ......... 11
1.2.5 Technical Support ......................................................................... 11
1.2.6 Earth (Ground) .............................................................................. 12
1.2.7 Protective Earth (Ground)............................................................. 12
1.2.8 Frame or Chassis ........................................................................... 12
1.3 Nameplate................................................................................................. 13
1.4 Getting Started Quickly............................................................................. 14

Chapter 2 ‐ System Installation................................................................16

2.1 Unpacking/Inspection ............................................................................... 16
2.1.1 Mechanical Inspection .................................................................. 16
2.1.2 Claim for Damage.......................................................................... 16
2.1.3 Packaging for Reshipment ............................................................ 16
2.1.4 Accessories Available .................................................................... 17
2.1.5 Instructions for Lifting and Carrying ............................................. 17

eliteTM i
Contents

2.2 Installation Requirements......................................................................... 18

2.2.1 eliteTM Airflow Requirements ....................................................... 18
2.2.2 Power Requirements .................................................................... 18
Upstream Disconnect Device............................................ 18
2.3 Rack Installation ............................................................................................ 19
2.4 System Interconnect ..................................................................................... 19
2.5 Remote Digital Interface ............................................................................... 20
2.5.1 Communication Configuration...................................................... 20
2.6 RF Power Connections................................................................................... 21
2.7 Safety Interlocks ............................................................................................ 21
2.8 Panels and Controls....................................................................................... 22
2.8.1 Front Panel.................................................................................... 23
Keypad controls: ........................................................................ 26
2.8.2 Rear Panel ..................................................................................... 27
Connections and indicators ....................................................... 27
Status LEDs................................................................................. 29
2.9 Power Requirements..................................................................................... 31
2.9.1 AC Mains Connection.................................................................... 31
2.11 Maintenance & Cleaning ............................................................................... 32
2.12 System Check................................................................................................. 33

Chater 3 ‐ eliteTM Operation .................................................................... 34

3.1 Basic Operation through the RS‐232 Interface ............................................. 34
3.1.1 Required Items.............................................................................. 34
3.1.2 Command Prompt......................................................................... 35
3.1.3 Startup Message ........................................................................... 35
3.1.4 General Command Syntax of One Letter Commands (OLC)......... 35
3.1.5 Optional Argument Data Entry ..................................................... 36
Supported OLC Commands (User Level)........................... 37
3.1.7 Example Operation of the System via OLC ................................... 39
3.2 Operation through Optional Interfaces ........................................................ 40
3.2.1 25‐pin Analog Interface ................................................................ 40
3.2.2 CEX (Common EXciter) IN / OUT................................................... 42
3.3 Pulsed Operation........................................................................................... 42

ii eliteTM
 Contents

Chapter 4 ‐ Troubleshooting....................................................................43
4.1 Hardware Faults ............................................................................................ 43

Appendix A ‐ eliteTM Specifications ..........................................................44

Appendix B ‐ Glossary of Terms ...............................................................47

eliteTM iii
Contents

This page intentionally left blank.

iv eliteTM
 Introduction

Chapter 1

Introduction
The eliteTM Plasma Generator is a rugged RF power source for plasma etching,
CVD and sputtering applications. Featuring precise power control and digital
interfacing, this eliteTM generator provides the exceptional reliability and
repeatability required for today’s demanding plasma processes.
Operating at the frequency of 13.56 MHz, the eliteTM platform consists of
products that will produce 300W or 600W into a 50Ω load. The digital‐based
control module automatically measures forward RF power and reflected RF
power, maintaining constant power output within ±2% of set point over a
Dynamic Power Range of 1 to 300 or 600 watts. The RF output can be pulsed
at up to 1kHz with duty cycles from 1 to 99%.
Precise power calibration is traceable to NIST (National Institute of Standards
and Technology) through the ENI Power Standard. Low harmonic distortion
and spurious‐free performance complement the unit’s RF power output
control and unconditional RF stability.
A rugged RF power section ensures substantial power delivery into fixed
match systems. The digital‐based control constantly monitors internal
subsystem status to maximize system availability.
A 9‐pin digital interface as well as a standard 25‐pin analog interface provide
remote control, monitoring and diagnostic capability. Optional custom
interface cards are also available.

eliteTM 5
Introduction

If this equipment is used in a manner not specified by the

manufacturer, then the protection provided by the equipment
may be impaired.

This equipment contains NO USER SERVICEABLE PARTS. In the event

that equipment servicing is required, please contact an authorized
MKS, ENI Products service center.

1.1 About This Manual

This manual provides all of the information required to safely install, setup
and operate your generator. While every attempt has been made to provide
a concise set of installation and operating procedures in the Getting Started
Quickly section, detailed instructions are also given in Chapters 2 and 3.
It is essential that you become thoroughly familiar with the contents of this
manual prior to using your generator. If used properly, the information
contained in this manual will not only promote reliable generator
performance but will also encourage a safe operating or service environment
for all individuals.
This manual uses the output power level of the eliteTM 600 as a default
(600W). However where applicable, the 600W output could be replaced
with 300W for the elite 300. Also, certain specifications or modes of
operation may be different than the typical operation by customer request.
Refer to any applicable addendum or specifications for your specific
generator when ordering other than the standard eliteTM unit.

6 eliteTM
 Introduction

1.1.1 Finding Your Way Around

This manual is divided into four chapters and two appendices. The main
Table of Contents will help you to quickly locate the chapter that contains
the information that you may be seeking. The following is a brief description
of each chapter.

Chapter 1 The chapter you are reading. This chapter provides information on the
content of the manual, the documentation conventions used, safety
considerations that need to be observed and a concise Getting Started
Quickly section.
Chapter 2 This chapter acquaints the user with the eliteTM Plasma Generator. It
covers major features and front and rear panel descriptions. This
chapter covers everything needed to install and set up your generator
from Unpacking and Inspection to Initial Power Up.
Chapter 3 This chapter covers in more detail how to operate your generator and
take advantage of all of its features.
Chapter 4 This chapter details common troubleshooting situations you may
encounter when using your generator, along with their solutions.
Appendix A This appendix provides complete physical and electrical characteristics
of your generator.
Appendix B This appendix provides a glossary of terms that have been used
throughout this manual.

eliteTM 7
Introduction

1.1.2 Documentation Conventions

To call attention to important information in this manual, the methods of
formatting described below have been used.

Commands

Many parts of this manual refer to computer commands and data. It is

important to recognize the conventions used in this manual in order to
understand the meaning of these commands.
Angle Brackets <> These brackets are shown for command parameters. They
are not part of the command and should not be entered.

Rounded Brackets () These brackets contain hex equivalent numbers for printable
or non‐printable characters. The lower‐case h (h) stands for
hexadecimal.

Curly Brackets {} These brackets indicate a symbol name for special control
codes or non‐printable characters. Examples of commonly
used control codes are listed below.

{LF} Line Feed (0Ah)

{CR} Carriage Return (0Dh)
{ESC} Escape (1Bh)

Definitions

Appendix B provides a complete list of all the new terms used in this manual.

8 eliteTM
 Introduction

1.2 Safety Considerations

Certain safety‐related considerations must be observed before installing,
operating, or servicing this equipment. Symbolic and/or textual labels and
markings are used in and/or on the equipment, as well as in this product
manual, to convey and/or identify such important information. Please look
for these labels and markings, and follow their direction.
The term CAUTION is used to indicate a potential hazard that could result in
minor injury or equipment damage, and to warn against unsafe practices.
The term WARNING is used to indicate a potential hazard that could result in
injury or death if not avoided.
The term DANGER is used to indicate an imminent hazard of serious injury or
death if not avoided.

1.2.1 Exclamation Point Within a Triangle

Symbol Definition: Caution, refer to accompanying documents

The “exclamation point within a triangle” symbol (reference ISO Publication
3864, No. B.3.1) is used in and/or on the equipment to alert the installer,
operator, or service personnel to the presence of important related
installation, operation, and/or service instructions and to direct such
personnel to the product manual for that information. This symbol is also
used within the product manual itself to identify important instructions.

eliteTM 9
Introduction

1.2.2 Lightning Bolt Within a Triangle

Symbol Definition: Caution, risk of electric shock

The “lightning bolt within a triangle” symbol (reference IEC Publication 417,
Symbol No. 5036, and ISO Publication 3864, No. B.3.6) is used in and/or on
the equipment to alert the user, operator or service personnel to the
presence of uninsulated voltage within the enclosure of sufficient magnitude
to constitute a risk of electric shock. Only authorized service personnel with a
schematic diagram and a thorough knowledge of the voltages existing within
the equipment shall remove covers or panels bearing this symbol. This
symbol is also used within the product manual itself to identify important
operating and/or maintenance instructions, which, if not followed carefully,
could result in personal injury or even death.

1.2.3 Service Warning

Service Warning Marking

Figure 1.2.3

10 eliteTM
 Introduction

MKS, ENI Products is responsible for safety, reliability, and

performance of the equipment only if:

• Assembly operations, extensions, readjustments, modifications, or

repairs are carried out by authorized personnel.
• The electrical installation is made in accordance with the
installation instructions provided and the room in which the
equipment is installed complies with the environmental
requirements.
• The equipment is used in accordance with the instructions for
use.

1.2.4 Non‐ionizing Electromagnetic Radiation Warning Triangle

Symbol Definition: Caution, non‐ionizing electromagnetic radiation

The “non‐ionizing electromagnetic radiation warning triangle” symbol
(reference IEC Publication 417, Symbol No. 5140, and ISO Publication 3864) is
used on the equipment to alert the installer, operator, or service personnel
that the equipment is capable of producing elevated, potentially dangerous,
levels of non‐ionizing electromagnetic radiation, particularly RF radiation.

1.2.5 Technical Support

On the back of the generator is a label with a toll‐free number for MKS, ENI
Products Technical Support. Should you have any difficulties with your
generator and have exhausted all possibilities in the Troubleshooting
Chapter, please feel free to call us.

Technical Support Label

Figure 1.2.5

eliteTM 11
Introduction

1.2.6 Earth (Ground)

Symbol Definition: Earth (ground)

The “earth (ground)” symbol (reference IEC Publication 417, Symbol No.
5017) is used to identify equipment earth (ground) terminal(s) in cases where
the “noiseless (clean) earth (ground)” symbol (reference IEC Publication 417,
Symbol No. 5018) and the “protective earth (ground)” symbol (reference IEC
Publication 417, Symbol No. 5019) are not explicitly required.

1.2.7 Protective Earth (Ground)

Symbol Definition: Protective earth (ground)

The “protective earth (ground)” symbol (reference IEC Publication 417,
Symbol No. 5019) is used to identify equipment terminal(s) which are
intended for connection to an external protective conductor for protection
against electric shock in case of a fault or to identify the terminal of a
protective earth (ground) electrode.

1.2.8 Frame or Chassis

Symbol Definition: Frame or chassis

The “frame or chassis” symbol (reference IEC Publication 417, Symbol No.
5020) is used to identify equipment frame or chassis terminal(s).

12 eliteTM
 Introduction

1.3 Nameplate
The eliteTM Plasma Generator can be identified by a nameplate at the back of
the unit that contains the following information.

A ENI MODEL NO: ELITE

B PART NO: ELITE 600FP-01
C SERIAL NO: XXX DATE: MM/DD/YY
D ENI REV: XXX
E OUTPUT: 600W WEIGHT: 16 kg / 25 lbs

Typical eliteTM Serial Tag Label

Figure 1.3

A. ENI MODEL NUMBER: D. ENI REV:

The number that uniquely identifies the The revision letter identifying product
unit. configuration (Revision A is the initial
revision level).

B. PART NO: E. OUTPUT & WEIGHT:

The assembly number that uniquely The output of the unit in watts and its
identifies product configuration. weight in kilograms and pounds.

C. SERIAL NO:
A number that is sequentially assigned as
the product is manufactured.
DATE:
The date of manufacture in MM/DD/YY
format.

eliteTM 13
Introduction

1.4 Getting Started Quickly

This section is intended to provide you with a set of instructions to enable
you to quickly set up and start running your generator. References to more
detailed information is provided at the end of each step.
To quickly set up your eliteTM generator, follow the procedure below:
1. If equipped, make sure the generator’s power switch is in the OFF
position.
Note: On some basic models, AC power control is accomplished
through the removal of the AC line cord. In this case, ensure the AC
linecord is disconnected from the rear of the generator

2. Attach the AC Mains line cord to a 110 – 253V, single‐phase, 15 A

outlet.

(See section 2.9 for more information on AC Power Requirements.)

3. If applicable, connect the 9‐pin male serial digital interface to the

female serial interface connector on the rear panel.

See section 3.1 for instructions to set up your computer.

See Table 2.5.1 for pin outs.

4. If applicable, connect the 25‐pin male analog interface cable to the

female connectoe on the rear of the generator. If the analog interface
will not be used, connect P/N 1019388‐001 interface jumper to defeat
the analog interface interlock circuit.

See Table 2.5.1 for pin outs.

5. Connect the RF cable from the plasma chamber to the RF output

connection. This will vary depending upon the application you are
using.

14 eliteTM
 Introduction

6. Make sure that the RF output cover is in place. This cover is designed
to prevent removal of the RF output cable without the need for a tool.
It is not designed to remove power from the generator if removed.
Observe all precautions when RF power is active.
7. If the generator is equipped with an ON/OFF switch, move the switch
to the ON position. If the switch has no ON/OFF switch, simply plug in
the IEC linecord to the rear of the unit to active power. When the unit
is ready to operate, the LEDs on the rear panel will be active.
8. From the terminal, you should see the following message:
----------------------------
ENI MONITOR
MKS Instruments ENI Products
----------------------------
9. The generator is now ready to operate.

eliteTM 15
System Installation

Chapter 2

System Installation
2.1 Unpacking/Inspection

2.1.1 Mechanical Inspection

If damage to the shipping carton is evident, request the carrier’s agent be
present when the unit is unpacked. Check for equipment damage and inspect
the cabinet and panels for dents and scratches.

2.1.2 Claim for Damage

Please notify MKS, ENI Products directly or your authorized MKS, ENI
Products representative if the product is mechanically damaged or fails to
meet specifications upon receipt. Retain our shipping carton and packing
material for the carrier's inspection, as well as for subsequent use to return
the unit should this become necessary.

2.1.3 Packaging for Reshipment

Whenever possible, the original shipping carton and packing material should
be used for reshipment. If the original packing material is not available, wrap
the instrument in heavy paper or plastic. Use a strong shipping container. If a
cardboard carton is used, it should be at least 200‐lb. test material.

Use shock‐absorbing material around all sides of the instrument to provide a

firm cushion and to prevent movement inside the container wall on each
side. Protect the front panel by means of cardboard spacers inserted
between the front panel and the shipping carton. Make sure that the
instrument cannot move in the container during shipping. Seal the carton
with a good grade of shipping tape and mark the container:
FRAGILE! ELECTRONIC INSTRUMENT

16 eliteTM
 System Installation

2.1.4 Accessories Available

Items from the following list (varying with configuration) are available as
accessories or attached to the eliteTMRF Generator.
Category / Item ENI Part Number
Documentation
Operation Manual 1041955
Mounting and Outline drawing (Basic Full Rack) 1037079
Mounting and Outline drawing (Full rack withLCD) 1036481
Mounting and Outline drawing (Basic Half Rack) 1037303
Mounting and Outline drawing (Half Rack with LCD) 1037304
Hardware
Adapter bracket for rack mounting two half rack units 1037463‐001
Rack handle (full rack) 331012
Rack handle (half rack) 1039014
RF Connectors / Cover
RF Output Connector cover 1036305‐001
Connectors / AC Cord
Interlock Jumper 1019388‐001
Basic AC linecord, IEC 60320 C‐13 to NEMA 5‐15P, 3m 1040434
Basic AC linecord, IEC 60320 C‐13 to flying lead, 1.5m 1040435‐001

2.1.5 Instructions for Lifting and Carrying

Because the eliteTM generator weighs 11 kg (25 lbs.), lifting and carrying this
unit can be performed by a single person (properly trained in the lifting and
moving of equipment).

eliteTM 17
System Installation

2.2 Installation Requirements

2.2.1 eliteTM Airflow Requirements

A minimum space of 75 mm (3”) should be allowed front, rear and sides for
ventilation. Approximately 160 CFM (4530 liters/min) of airflow is required.

2.2.2 Power Requirements

The AC Input Ratings of the eliteTM Generator are indicated on a label
attached to its back panel. Those nominal ratings are as follows:
110 VAC – 253VAC, 50/60Hz, 15A, Single Phase

Upstream Disconnect Device

Safety listing of model eliteTM generator requires that its
installation include an upstream current‐limiting disconnect
device rated 50‐60 Hz, 250V ~ minimum, and no more than
20A. The upstream disconnect device must be located
within sight of the eliteTMunit, must remain user‐accessible
at all times, and must be labeled so as to indicate the
equipment it disconnects. During installation, removal,
and/or servicing of the eliteTM unit, place the upstream
disconnect device into its off (open) position, and follow
lock and tag (lock‐out / tag‐out) procedures to control
hazardous energy (reference appropriate regional
regulations and requirements). No circuit should be
connected or wired when electricity is present.

For safety compliance, the eliteTM must be powered with a connection that
has a hardware‐based EMO circuit.

18 eliteTM
 System Installation

2.3 Rack Installation

To ensure proper operation of the eliteTM, it is important to provide correct
mechanical support within a rack installation.
The half‐rack eliteTM generator has two optional rack mounting plates
available (sold separately), one which allows a half‐rack generator to be
installed in a standard 19” EIA rack and the second which allows two half‐
rack generators to be installed side‐by‐side in the rack. When rack mounting,
the generator should be supported on a rack shelf of adequate strength to
support 11 kg (25 lbs). A ground wire or braid must be connected from the
generator ground stud on the rear panel to the chassis ground on the
cabinet.
For details, refer to the applicable Mounting and Outline Drawing as detailed
in section 2.1.4.

2.4 System Interconnect

The eliteTM generator may be supplied with an analog or other remote
control interface. For interfaces other than the standard analog interface,
refer to the appropriate addendum to this manual for more information.
In order to maintain EMC compliance, cables should be constructed using Alpha
Supra‐Shield or equivalent cable and metallized backshells providing 360° shield
termination. Each of these options is described in detail below and the
appropriate pin‐out table is also given.

eliteTM 19
System Installation

2.5 Remote Digital Interface

The digital interface provides control and monitoring of the generator using
standard RS‐232 voltage levels in an 8‐bit serial packet. The serial
communications data rate is fixed at 115 kbaud.
In order to maintain EMC compliance, cables should be constructed using
Alpha Supra‐Shield or equivalent cable and metallized backshells providing
360° shield termination.

2.5.1 Communication Configuration

A standard, 9‐pin female Type “D” connector provides the electrical
connection as defined in the table below.
Pin Function Description
1 Not used.
2 TX RS232 RS‐232 Tx data output.
3 RX RS232 RS‐232 Rx data input.
4 Not used.
5 Digital Ground This pin is connected to the digital ground of the controller.
6 Not used.
7 Not used.
8 Not used.
9 Not used.

Hardware Configuration for Remote Digital Interface

Table 2.5.1

20 eliteTM
 System Installation

2.6 RF Power Connections

The Type N RF output connector on the eliteTM generator is not field
replaceable. The use of adapters is not recommended, as that may extend
the connection beyond the RF cover, allowing a user to access the
connection without the use of a tool and thereby defeating this safety
feature.
An appropriately rated mating connector and coaxial cable must be used for
the RF output connection.

2.7 Safety Interlocks

The analog interface version of the eliteTM generator is equipped with an RF
interlock system accessed through pins 10 and 23 of the 25‐pin D‐sub
connector on the rear panel. Until this interlock circuit is completed, RF
output will be disabled.
Satisying this interlock circuit can be accomplished via a contact closure on
the customer tool, or by simply attaching an interlock defeat jumper (see
section 2.1.4).

Pins 10 & 23 of the Analog I/O

provide control of the internal
interlock circuit

eliteTM Safety Interlock Location ‐ Rear View, Analog Version

Figure 2.7

eliteTM 21
System Installation

2.8 Panels and Controls

This section describes in detail all the front and rear panel controls and
connections used on your generator.

eliteTM (LCD) Front View

Figure 2.8a

eliteTM (Basic) Front View

Figure 2.8b

22 eliteTM
 System Installation

2.8.1 Front Panel

On some models, the eliteTM generator may be supplied with a front panel
LCD display and integral keypad. The LCD provides information on the
operating parameters for the generator and where applicable, the attached
MKS Matchworks. The six‐button keypad can be used to setup the generator
and Matchworks operating parameters and control the RF output.
The LCD has two different menus that can be displayed. After boot‐up, the
LCD will display basic generator and Matchwork data as shown below:

OFF LP 000W 000W

000W 000 000 G

By using the Down key on the keypad, the main menu can be switched to the
Pulsing menu.

PL DUTY 10%
FREQ 1000Hz

eliteTM 23
System Installation

The following shows the various information and controls available in the
two menu screens:

Main Menu:

RF STATUS LVL MODE FWD REV

ON FP 600W 000W
600W 999 999 G

SETPOINT MW C1 MW C2 TUNE MODE

MENU ITEM ENTRY DESCRIPTION

ON RF is ON
RF STATUS
OFF RF is OFF

FP Forward Power Leveling Mode

LVL MODE LP Load Power Leveling Mode

EX External Leveling Mode (DC Bias)

FWD 0‐600 Forward Power (Watts)

REV 0‐600 Reflected Power (Watts)

SETPOINT 0‐600 Setpoint (Watts)

MW C1 0‐999 Matchwork C1 Position (when used with certain

MKS Matching Networks)

MW C2 0‐999 Matchwork C2 Position (when used with certain

MKS Matching Networks)

TUNE MODE G Generator controls Matchwork tune mode

(when used with M Manual Matchwork tune mode
certain MKS
Matching T Automatic Matchwork tune mode
Networks)

24 eliteTM
 System Installation

Pulse Menu:

STATUS DUTY

PL DUTY 10%
FREQ 1000Hz

FREQUENCY

MENU ITEM ENTRY DESCRIPTION

CW RF output is CW (continuous wave)

STATUS
PL RF output is pulsing

DUTY 1‐99 Pulsing duty cycle (%)

FREQUENCY 7.6 ‐ Pulsing frequency (Hz)

1000

eliteTM 25
System Installation

Keypad controls:
UP
LEFT RIGHT

ON CW 600W 000W
600W 999 999 G

CANCEL ENTER
DOWN

UP In cursor mode, push to increment value of the selected

control parameter. When cursor mode is disabled, the UP key
can be used to switch from the Pulse menu to the Main menu.

DOWN In cursor mode, push to decrement value of the selected

control parameter. When cursor mode is disabled, the DOWN
key can be used to switch from the Main menu to the Pulse
menu.

LEFT In cursor mode, push to move to the next control parameter

RIGHT In cursor mode, push to move to the next control parameter

ENTER Push to enter / exit cursor mode. In cursor mode, the cursor
can be moved between menu items to change operating
parameters of the generator and / or Matchworks.

CANCEL In cursor mode, push to cancel any changes made while in

control mode

26 eliteTM
 System Installation

2.8.2 Rear Panel

Connections and indicators

The following table briefly describes all of the rear panel connections for the
eliteTM Generator.

On all models
Connector Description
AC Input This connection is used to provide the AC power to the unit. While
(Type IEC 60320 C‐13) typical applications utilize one ‘Hot’ conductor and one ‘Neutral’
conductor, both lines are internally fused and therefore if necessary,
the generator may be supplied from two ‘Hot’ conductors that meet
the AC voltage range for the unit (i.e. 220V single phase, two phases of
208V 3ph)
Chassis Ground This 6mm ground lug provides a chassis ground point for the
(6mm Stud) generator. A braided ground strap or other suitable ground conductor
should be attached before operating the RF generator. The M6 nut on
the ground stud should be torqued to 40‐46 in‐lbs.
Analog Interface This interface connects the generator to an analog control signal. This
(Type DB25F) interface allows control of the generator through various analog
voltages (0 – 10Vdc). See section 3.2.1 for more information.
RS‐232 Interface This interface is used to connect the generator to a terminal.
(Type DB9F) Generator control and readback can be accomplished through a
standard terminal emulation program or through any system that can
provide the necessary commands. See section 3.1 for more
information.
Status LEDs These LEDs provide information as to the operating status of the
generator. See Status LEDs table in this section for additional details.
DC Bias (Optional) Future Option ‐ allows for an external leveling mode to control the
(Type BNC‐F) output power of the unit.

Matchworks Interface Future Option ‐ this fiberoptic transmit / receive pair is used to
communicate to a MKS Matchwork when the optional Profibus
Interface Board is not being used.
RF Output Type N RF connector.
(Type N)
CEX Output Provides an RF / pulse synchronization signal for a second RF
(Type BNC‐F) generator. This signal is directly tied to the main 13.56MHz source of
the generator.
CEX Input Input for RF / pulse synchronizaton. When in CEX mode, the drive
(Type BNC‐F) signal for the generator’s power amplifier will come from this source
versus the internal 13.56MHz source.
Blanking Input This connection allows for an external blanking signal to be supplied to
the generator to enable RF pulsing. See section 3.3 for more
information.

eliteTM 27
System Installation

With Optional Profibus Interface installed

Connector Description
Profibus Debug Port This port provides direct access to the Profibus Interface board
(Type DB9F) software. This port should only be used by qualified service personnel.

Matchworks Interface This fiberoptic transmit / receive pair is used to communicate to a MKS
Matchwork when the optional Profibus Interface Board is installed.
This allows the generator to control the Matchworks capacitor
positions via the generator front panel control.
Profibus Connector This digital interface is used to connect the generator to a Profibus
(Type DB9F) communications bus. See the Profibus User Manual (P/N 1037458) for
more information on the interface protocol.
Profibus Address This 8‐position dipswitch sets the Profibus address of the generator.
Dipswitch See the Profibus User Manual (P/N 1037458) for more information on
the interface protocol.

28 eliteTM
 System Installation

Status LEDs

All versions of the eliteTM generator utilize two LEDs on the rear panel to
provide information on the generator status as well as any faults or warnings.
Under normal operating conditions, the PWR and STAT LEDs will be solid or
flash green. Under fault or warning conditions, these LEDs will turn amber or
red and flash in a pattern indicating what fault is active. In the case of
multiple faults or warnings, there will be a one second OFF period between
codes.

Status PWR LED STAT LED

AC ON Solid Green ‐‐‐‐‐
System Ready Solid Green Solid Green
RF On Flashing Green (2Hz) ‐‐‐‐‐
RF within regulation Flashing Green (2Hz) Flashing Green (2Hz)
Interlock fault Solid Amber ‐‐‐‐‐‐
Warning Flashing Amber
(see below)
Fault Solid Red Flashing Red
(see below)

Fault Codes

Fault RED STAT LED flash pattern

(250ms between flashes)

Overheat Fault ON‐OFF

VIF Link Integrity Fault ON‐OFF‐ON‐OFF

Profibus Master lost with RF ON ON‐OFF‐ON‐OFF‐ON‐OFF

Profibus Link Integrity ON‐OFF‐ON‐OFF‐ON‐OFF‐ON‐OFF

eliteTM 29
System Installation

Rear Panel Drawing

Figure 2.8.2 shows the rear panel for the eliteTM Generator and calls out each
of the connectors as described in the table from the previous page.

Profibus Profibus Matchwork Profibus

Connector Address Interface Debug Port
dipswitch

RS‐232 RF Output
Interface

Blanking
Input
AC Input

Status LEDs Chassis Ground

DC Bias CEX Out CEX In

(Optional) Power Switch

eliteTM w/ Optional Profibus Rear Panel View

Figure 2.8.2a

Analog Interface
Connector

eliteTM w/ Basic Analog Interface Rear Panel View

Figure 2.8.2b

30 eliteTM
 System Installation

2.9 Power Requirements

The eliteTM generator is designed to operate from a single‐phase AC supply.
The universal input allows any line voltage from 110V to 253V at 50Hz or
60Hz. While the typical application will utilize one ‘Hot’ conductor and one
‘Neutral’ conductor, both lines are internally fused and therefore if
necessary, the generator may be supplied from two ‘Hot’ conductors that
meet the AC voltage range for the unit (i.e. 220V single phase, two phases of
208V 3ph)

2.9.1 AC Mains Connection

An IEC 60320 C‐13 style AC appliance inlet is supplied on the rear panel of
the generator. This allows connection of any number of linecords meeting
the IEC standard.
NOTE: Many off‐the‐shelf IEC 60320 linecords are not properly rated for the
current that the eliteTM generator may draw at nominal line voltages and full
power output. To maintain safety compliance, any linecord utilized should
be able to carry at least 15amps.

eliteTM 31
System Installation

2.10 Maintenance & Cleaning

The eliteTM generator is designed and built to require only the following
minimal cleaning and maintenance. It is recommended that the unit be
periodically wiped down on the outside with a dry cloth to remove any build‐
up of dust and dirt.
When operated in dusty areas, dust may build up in the front air intakes. A
hand‐held vacuum cleaner can used to remove any dust build‐up that occurs,
or it can be brushed off with a cloth.
WARNING: To minimize the risk of accidental shock, turn
off the AC mains breaker before wiping off the unit and
around the rear panel connections. Do not use a damp
cloth for cleaning unless AC power is disconnected

32 eliteTM
 System Installation

2.11 System Check

Before the eliteTM generator can be used, it is imperative that the following
procedure be followed to ensure optimal and safe operation. Make sure
that:

1. The AC line cord is connected to the AC mains. Verify that AC input power
is correct. (See section 2.9 for more information on AC Power
Requirements.) Inspect the AC power connector and cable before use –
replace if damaged.
2. The RS‐232 serial cable, if used, is connected to the 9‐pin D‐type serial
connector on the rear panel.
3. The Analog Interface Cable, if used, is connected to the analog I/O
connector. (See section 2.4 for more information on the analog
interface.)
4. The RF output cable is connected to the RF Output connector on the rear
panel. Ensure that the RF cable and connectors are in good condition –
replace if damaged.
5. The RF output cover is on.

RF Output Cover

RF Output Cover
Figure 2.11

eliteTM 33
Operation

Chapter 3
TM
elite Operation
The eliteTM generator was designed with simplicity in mind. Therefore, the
generator can be operated with a simplified command set consisting of one‐
letter commands issued from a standard terminal emulation program.
Alternately, because of the simplicity of the command set, applications can
be built in any number of scripting or automation languages to control the
generator.

3.1 Basic Operation through the RS‐232 Interface

The eliteTM generator is designed to be used with minimal input from the
user. In the most basic case, all that is required from the user is an RF
setpoint and the RF ON command. In more advanced situations, other
commands can be used to control and monitor the generator.

3.1.1 Required Items

In order to use the RS‐232 interface, you will need the following items:
1. A computer with a free COM port capable of communicating at 115200
baud (default), with 8 data bits, 1 stop bit, and no parity. Software flow
control should be enabled as well.
2. An RS‐232‐compliant cable to connect the computer to the unit.
3. A software program that emulates a simple terminal interface. A custom
program may be used as well.

34 eliteTM
 Operation

3.1.2 Command Prompt

The command prompt is an asterisk (the character above the 8 on any
standard PC keyboard). In order to ensure you are properly connected to the
unit, you should press the ENTER key on your keyboard a few times. You
should see the following echoed to the terminal:
*
*
This indicates that the software inside the unit is running and your setup is
sufficient to communicate via this interface.
The asterisk is never actually entered by the user. In the examples that
follow, it will be shown to indicate command entry at the terminal and is only
included for completeness.

3.1.3 Startup Message

If you are connected to the unit prior to its being turned on, and your setup is
correct, then you will see an initial message print out at the terminal once
the unit is turned on. It should look like this:
‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐
ENI MONITOR
MKS Instruments ENI Products
‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐‐
*
*

3.1.4 General Command Syntax of One Letter Commands (OLC)

The eliteTM generator control system has been designed with simplicity in
mind. Therefore, only single letter commands are necessary to control the
generator and obtain data from it.

EliteTM 35
Operation

ACK <CR><LF>“*” ASCII 0x0D 0x0A 0x2A

This is an acknowledgment of a completion of a valid command.

NAK <CR><LF>“?” ASCII 0x0D 0x0A 0x3F

This is used to indicate that the command sent was invalid or unavailable.

3.1.5 Optional Argument Data Entry

• Integer Numbers are entered as just #, where the number is made up of 0
to 9s, with a range of 0 to 999999.

• Out‐of‐range arguments will result in the NAK response above.

36 eliteTM
 Operation

Supported OLC Commands (User Level)

Command Parameters Description
K Access Level Key code Enables access to advanced generator controls.
Only used by MKS Trained Field Service and
Applications personnel
E RS‐232 Enable None Enables RS‐232 control of the generator
I RS‐232 Disable None Disables control of the generator through the RS‐
232 port. Even when control is disabled,
readbacks can still be obtained via this interface.
N RF ON None Enables RF Output
F RF OFF None Disables RF Output
A Forward Power None Sets the controller leveling mode to forward
Leveling leveling. In this mode, forward power will match
the setpoint, except when the generator exceeds
the reverse power limit.
V Delivered Power None Sets the controller leveling mode to delivered
Leveling leveling. In this mode, the load power (forward –
reflected) will match the setpoing, except when
the generator exceeds the reverse power or
forward power limits.
G External Power None Future use – sets the controller leveling mode to
Leveling external leveling. In this mode, an external
readback signal (i.e. DC bias) sets the level the
generator will attempt to achieve.
P Power Setpoint XXXXXX Sets the power setpoint for the generator. After
the ‘P’ command is issued, the generator will
respond with “Enter New Setpoint (AAAAAA ‐
BBBBBB):”. The power setpoint must be entered
as a six digit value (i.e. 000600 for 600W. Note ‐
the leading zeros are required)
C CEX Enable None Activates CEX mode. In this mode, the generator
receives its drive signal from the source attached
to CEX IN. Please review the specifications section
for CEX signal requirements.
J CEX Disable None Disables CEX mode. When disabled, the
generator uses its internal 13.56MHz source.
Q Set Pulse High XXXXXX When utilizing pulse mode, this command sets the
Time pulse high time in microseconds. After the ‘Q’
command is issued, the generator will respond
with “High Pulse Time:”. The pulse high time must
be entered as a six digit value (i.e. 005000 for
5000us. Note ‐ the leading zeros are required).
X Set Pulse Low XXXXXX When utilizing pulse mode, this command sets the
Time pulse low time in microseconds. After the ‘X’
command is issued, the generator will respond
with “Low Pulse Time:”. The pulse low time must
be entered as a six digit value (i.e. 005000 for
5000us. Note ‐ the leading zeros are required)
U Enable Pulsing None Enables internal pulsing of the RF output.
Y Disable Pulsing None Disables internal pulsing and allows CW operation
of the generator.

EliteTM 37
Operation

S Save None Saves changes made to the following

Configuration configuration items for future boot‐ups: Pulse
mode, pulse parameters, leveling mode, CEX
mode
L Reload Boot None Restores the as‐shipped configuration for
Configuration configuration items such as pulse mode, pulse
parameters, leveling mode and CEX mode.
M Monitor Data None Continuously displays generator date. When
issued, the following data is displayed:
RF Status : Off
CEX : DISABLE
SetPoint : 000000
Fault vector : 0000000000000000
Status Vector : 0000000000001000
Forward Power : 000056
Reverse Power : 000024
Delivered Power : 000032
Controller Output : 000000
Leveling mode : Forward Power
Interface : NONE
T Display Data None Displays raw generator data in string format. This
data can be easily used by a user‐built script or
macro. The data is returned in the following
format:

000000 000000 0000000000000000

0000000000001000 000056 000024 000032 000000
000005 00004E20 00004E20

Data (from left to right):

1. RF_ON/OFF in decimal
a. RF_ON is indicated by 000001
b. RF_OFF is indicated by 000000
2. SETPOINT in decimal
3. FAULT in binary.
a. Each digit represents a bit
position in the fault vector
4. STATUS in binary
a. Each digit represents a bit
position in the status vector
5. FORWARD_POWER in decimal
6. REVERSE_POWER in decimal
7. DELIVERED_POWER in decimal
8. CONTROLLER_OUTPUT in decimal
9. INTERFACE in decimal
10. PULSE_HIGH_TIME in hexadecimal
11. PULSE_LOW_TIME in hexadecimal
Z Firmware Revision None Returns the generator software revision
information.
Build revision : XXXXXX
Software memory core revision : XXXXXX
Software interface core revision : XXXXXX
H Help None Displays the help menu showing the commands
from this list.

38 eliteTM
 Operation

3.1.7 Example Operation of the System via OLC

An example of operation during which we send a set point, turn RF on,
enable pulse mode, wait for some time, and then turn RF Off:

User Entry Description

E Enable RS‐232 control

P
Set power set point to 600W
000600

N Turn RF on

Q
Set pulse high time to 50 us
000050

X
Set pulse low time to 500us
000500

U Enable pulsing

[Wait for some time]

F Turn RF off

I Return control to the default interface

EliteTM 39
Operation

3.2 Operation through Optional Interfaces

3.2.1 25‐pin Analog Interface

PIN NAME TYPE DESCRIPTION

1 MAX POWER (E) DO Emitter side of isolated transistor switch. (See Note 1.)
Transistor ON ‐ indicates max reverse power.
2 REFLECTED POWER AO A linear DC voltage that represents the reflected power
(+) output level.
0 V = 0 W, 1 V = 20 W
3 FORWARD POWER AO A linear DC voltage that represents the forward power
(+) output level.
0 V = 0 W, 1 V = 60 W (30W for 300W units)
4 RF ON/OFF CONTROL DI A voltage between this and Pin 17 will turn RF power ON.
(+) Leaving it open or applying zero voltage will turn RF
power OFF.
The nominal voltage to turn RF ON is selectable between
+5 V or +24 V (default) via a jumper. Input should not
exceed 30 VDC.
5 POWER SET POINT AI A linear DC voltage to set the output power level.
(+) 0 V = 0 W and 1 V = 60 W (30W for 300W units). Input
impedance is 100 kΩ balanced differential to ground.
6 NOT USED —
7 RF ON (E) DO Emitter side of isolated transistor switch. (See Note 1 )
Transistor ON—RF ON. Transistor OFF—RF OFF.
8 ANALOG REMOTE DI Ground referenced logic input. (See Note 2.)
ENABLE LOW ‐ Selects analog remote control mode.
HIGH (or OPEN) ‐ Disables analog remote control mode.
9 OVERHEAT (E) DO Emitter side of isolated transistor switch for Pin 22.
10 INTERLOCK (+) — This pin should connect to Pin 23 to complete the
interlock chain.
If the interlock chain is broken, the power supply will be
disabled.
11 LEVELING SELECT DI Ground referenced logic input. (See Note 2.)
LOW (or OPEN) ‐ Selects forward‐power leveling.
HIGH ‐ Selects an alternative power‐leveling mode.
12 LOAD POWER (+) AO A linear DC voltage that represents the load power output
level.
0 V = 0 W, 1 VDC = 60 W (30W for 300W units).
13 +12 VDC — User voltage for interface purposes. Rated 10 mA max.
14 MAX POWER (C) DO Collector side of isolated transistor switch for Pin 1.

40 eliteTM
 Operation

PIN NAME TYPE DESCRIPTION

15 REFLECTED POWER AO Signal return for Pin 2.
RTN (‐)
16 FORWARD POWER AO Signal return for Pin 3.
RTN (‐)
17 RF ON/OFF CONTROL DI Signal return for Pin 4.
(‐)
18 POWER SET POINT AI Signal return for Pin 5.
RTN (‐)
19 GND — Signal/Chassis ground.
20 RF ON (C) DO Collector side of isolated transistor switch for Pin 7.
21 GND Signal/Chassis ground.
22 OVERHEAT (C) DO Collector side of isolated transistor switch. (See Note 1.)
Transistor ON—Overheat fault. Transistor OFF—No fault.
23 INTERLOCK — This pin should connect to Pin 10 to complete the
interlock chain.
24 +5Vdc — User voltage for interface purposes. Rated 10 mA max.
25 LOAD POWER RTN (‐) AO Signal return for Pin 12.
Shell SHIELD — Cable shield.

DI = Digital Input DO = Digital Output AI = Analog Input AO = Analog Output

Note 1: For all isolated transistor outputs.

Transistor OFF (switch open) ‐ VCEmax = 40 VDC (IC < 500 µA)
Transistor ON (switch closed) ‐ ICmax = 10 mA (VCE < 1 V)

Note 2: For all ground‐referenced logic level inputs.

HIGH = 2 VDC min. to 30 VDC max.
LOW = ‐0.2 VDC min. to 1 VDC max.

Note 3: Analog outputs will drive a load impedance > 100 K

EliteTM 41
Operation

3.2.2 CEX (Common EXciter) IN / OUT

For synchronizing two RF generators, a cable can be connected between CEX
OUT of the master generator to CEX IN on a slave generator. Any RF
generator can be used in either master or slave mode. When operating in
CEX mode, the slave generator’s frequency will be locked to the master
generator. RF on/off control and RF setpoint remain independent between
the two generators. The CEX cable’s electrical length can be chosen to
provide a specific phase shift between the two RF generator outputs.
Note: When a generator is placed in CEX mode and RF is turned on, if a valid
CEX signal is not present at the CEX IN connector, the generator will issue an
Out of Regulation warning. Depending on the RF setpoint, a momentary
overshoot of RF power may be occur if a CEX signal is applied after RF is
already turned on.

3.3 Pulsed Operation

The eliteTM generator is capable of both CW and pulsed operation. Different
interface options allow for different pulse control methods. For instance,
when utilizing the RS‐232 interface, the pulse paramaters and activation of
internal pulse mode can be done using the appropriate OLC commands (see
section 3.1). Internal pulse mode can also be controlled via the front panel
LCD on generators so equipped.
Pulsing can also be controlled by supplying an external signal to the Blanking
Input connector on the rear panel of the generator. With this pin set low or
open, the RF output will be CW. By applying a logic high to this pin, the RF
output will be inhibited. Therefore, by applying a TTL pulse stream to this
pin, the RF output can be pulsed at a rate consistent with the external
source.

42 eliteTM
 Troubleshooting

Chapter 4

Troubleshooting
This chapter lists the common problems a user may encounter when using
the eliteTM generator, along with recommended solutions. If the problem
doesn’t match any of those on the following pages, please contact the
nearest MKS, ENI Products Service location for assistance.

4.1 Hardware Faults

Symptoms Possible Cause Recommendations

Unit does not power up when No or incorrect AC line voltage. Ensure that correct line voltage
plugged in and / or power is being supplied.
switch in ON position Internal fuse open Contact an authorized MKS, ENI
Products Service location for
assistance.
INTERLOCK fault Interlock string open. Check cabinet and RF connector
interlocks; check that pins 10 &
23 of the Analog Interface
connector are tied together,
either through the tool interlock
string or through the interlock
defeat jumper
Out of Regulation condition Low AC line voltage Ensure that correct line voltage
(generator unable to meet is being supplied.
setpoint and not

Internal power sensor issue Contact an authorized MKS, ENI

Products Service location for
assistance.

EliteTM 43
Appendix A

Appendix A
TM
elite Specifications
This appendix lists the complete physical and electrical characteristics for the
eliteTM Plasma Generator.

44 eliteTM
 Appendix A

eliteTM Specifications
(See Spec Doc # 1037990 for complete generator specifications)

Frequency 13.56 MHz fixed

Rated Output Power 300W or 600W into 50 ohm

Mismatched Power Rating Load VSWR Min FWD PWR
1.1:1 600W
(Typical for 600W generator)
1.5:1 600W
2.0:1 486W
3.0:1 384W
∞:1 200W
Load Mismatch Protection Automatic; forward power typically folds
back within 0.5ms when reflected power
exceeds 200W
Commanded Power Accuracy ±2W (1W ‐ 100W),
±2% (101W – rated power)
Same Generator Repeatibility 1%

Dynamic Power Range 1W to rated power

RF Stability / Spurious Output Unconditionally stable for any load within

operational limits / ‐20 dBc
Harmonics ‐30 dBc, maximum

Pulsed Operation Frequency 1Hz – 1kHz

(When controlled
via Blanking Input)
(Typical specs – some models may
have expanded capabilities) 7.6Hz – 1kHz
(When controlled
internally or via
alternate interface)

Minimum Pulse High Time 20us

Pulse Rise Time 5us
Connection BNC
Common Exciter (CEX) I/O
CEX IN Amplitude 0 – 10dBm
CEX IN Frequency 13.56MHz ± 5kHz
CEX OUT Amplitude 0 – 5Vdc
CEX Out Frequency 13.56MHz ± 5kHz

EliteTM 45
Appendix A

Connection IEC 60320 C‐13

AC Input
Input Range 110Vac – 253Vac
Line Frequency 50Hz – 60Hz
Power Consumption 1.2kW
Current @ 120Vac 9A
Power Factor > 0.90
Operating Ambient Temperature +5C to +40C

Size 8.6”W x 15”D x 5.10”H

Weight 25lbs (11kg)

Rack Mounting With optional rack mounting plate

RF Output Connection Type N

RS‐232 (Std) DB9F
Interfaces
Analog (Opt) DB25F
Profibus (Opt) DB9F
Internal Fuse Ratings F1, F2 – 15A, 3AG style

(Not user replaceable)

TM
(elite is a registered trademark of MKS Instruments ‐ ENI Products)
™
(Windows is a registered trademark of Microsoft Corporation)

46 eliteTM
 Appendix B

Appendix B

Glossary of Terms
This appendix provides a definition of terms that have been used throughout
this manual.

CVD Chemical Vapor Deposition

Caution Indicates a potentially hazardous situation that, if not avoided,

may result in minor or moderate injury. It may also be used to
alert against unsafe practices.

Clearance The shortest distance in air between two conductive parts.

DSP Digital Signal Processor

Danger Indicates an imminently hazardous situation that, if not

avoided, will result in death or serious injury.

EMC Electromagnetic Compatibility

Enclosure A part providing protection of equipment against certain

external influences and, in any direction, protection against
direct contact.

Equipment The system equipment, its component parts, and auxiliary or

peripheral equipment.

Fault The state of an item characterized by inability to perform a

required function, excluding the inability during preventive
maintenance or other planned actions, or due to a lack of
external resources.

Fixed Equipment Equipment fastened to a support or otherwise secured in a

specific location.

EliteTM 47
Appendix B

Installation Category Classification of parts of installation systems or circuits with

(Overvoltage Category) standardized limits for transient overvoltages, dependent on
the nominal line voltage to earth.

Interlock A mechanical, electrical or other type of device or system, the

purpose of which is to prevent or interrupt the operation of
specified machine elements under specified conditions.

LED Light‐Emitting Diode

Mains The electricity supply that is available to the consumer from

the distribution system or systems for which the equipment
concerned is designed.

Maintenance Planned or unplanned activities intended to keep equipment

in good working order.

NIST National Institute of Standards and Technology

NRTL Nationally Recognized Testing Laboratory

Operator Person operating equipment for its intended purpose.

Pollution Any addition of foreign matter, solid, liquid, or gaseous

(ionized gases), that may produce a reduction of dielectric
strength or surface resistivity.

Pollution Degree For the purpose of evaluating clearances, the following two
degrees of pollution in the micro‐environment are recognized:
Pollution Degree 1: No pollution or only dry, non‐conductive
pollution occurs. The pollution has no influence.
Pollution Degree 2: Normally only non‐conductive pollution
occurs. Occasionally, however, a temporary conductivity
caused by condensation must be expected.

Portable Equipment Equipment intended to be carried by hand.

Rated (value) A quantity value assigned, generally by a manufacturer, for a

specified operating condition of a component, device, or
equipment.

Risk The expected losses from a mishap, expressed in terms of

severity and likelihood.

Service Unplanned activities intended to return equipment that has

48 eliteTM
 Appendix B

failed to good working order.

Severity The extent of the worst credible loss from a mishap caused by
a specific hazard.

Terminal A component provided for the connection of a device

(equipment) to external conductors. It may contain one or
several terminal contacts.

Tool An external device, including keys and coins, used to aid a

person to perform a mechanical function.

Warning Indicates a potentially hazardous situation that, if not avoided,

could result in death or serious injury.

EliteTM 49
Appendix B

This page intentionally left blank.

50 eliteTM