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2021-09

INSTALLATION MANUAL

Fully Automatic Dicing Saw

DFD6361

Copyright of this document is owned by DISCO Corporation

("DISCO"). No part of this document may be copied or reproduced
in any form or by any means, without the express written permission
of DISCO. Also, this document may not be disclosed or transferred
to third parties.

This document is printed on recyclable Lint-Free Paper.

・The blue paper is recyclable as used paper just like plain paper.
・The cover paper and adhesive portions are non-recyclable.
(Remove the cover and adhesive portions before recycling.
UKFSNE*000HE Recycle the blue paper only.)
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READ CAREFULLY BEFORE USING THIS

MANUAL
Introduction
This machine is a dicing saw to cut materials such as silicon wafers and glass substrates (referred
collectively as "workpiece" hereafter).
The machine contains rotary sections with parts that operate at high speed; high-voltage sections with
danger of causing electric shock; drive sections where the workers' physical parts and/or clothing may get
caught.
If N2 gas is used in place of clean air, the machine also has a N2 gas ejection section that might have
adverse effect on the human body.
Failure to handle this machine properly may lead to serious injury or death.

Read before using the machine

Before using the machine, read this manual thoroughly and follow strictly all the instructions set forth in
this manual.
To assure safety during work associated to operation and maintenance of this machine, it is important for
every worker to know where the potential safety hazards lie in this machine. Although it is difficult for
DISCO to foresee each and every potential safety hazard, various precautionary notes and warnings have
been included in this manual and the separate Safety Manual to identify and provide preventive
knowledge against all foreseeable hazards. Strict observance of all these precautions and other relevant
instructions set forth in this manual and the separate Safety Manual is thus essential for increased safety
assurance.
The safety features of the machine may be seriously affected, in case this machine is modified without
gaining the prior consent from DISCO or repaired in a manner not stated in this manual. Therefore, never
attempt to modify or repair this machine in a manner not approved by DISCO.

Scope of responsibility
DISCO shall not be responsible for any accident due to any of the following events:
・Any parts other than the genuine DISCO brand are mounted onto the machine.
・Any parts other than periodic replacement or consumable parts are replaced without prior consent of
DISCO.
・Any parts designed by the customer are mounted onto the machine without prior consent of DISCO.
・Equipment of another manufacturer is added to the machine.
・The machine or part of the machine is transported, reused, resold or modified.
If the customer refuses to disclose the names and contents of the process materials or piping parts used for
the machine as trade secret or confidential commercial information, DISCO may not be able to carry out
repair or maintenance on the machine for protection of the safety and health of our technical personnel.

Parts replacement
When you replace any parts other than periodic replacement or consumable parts described below, consult
your nearest DISCO office. If they are replaced without consulting DISCO, DISCO shall assume no
liability for the consequences arising therefrom.
・Operation Manual
・Maintenance Manual
・When specified in a separate document (e.g., Technical news letter, Operation guide)
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Hazard level
The safety precautions set forth in this document are classified into DANGER, WARNING and
CAUTION categories which represent 3 degree of hazards latent in the machine. These categories are
defined as detailed below in accordance with the seriousness and probability level of the hazard. In
addition to the above 3 safety precaution levels, CAUTION without the safety alert symbol ( ) and
NOTICE are used to give safety usage instructions to the user.
Before using the machine, be sure to read and understand all the associated safety precautions set forth in
the manual.
Hazard levels are classified as follows:
If you cannot avoid the incident in question, a critical situation in which
either critical injury or death is very likely to result.
DANGER This symbol is used for the incident in which the injury is critical and there
is high probability of occurrence.
If you cannot avoid the incident in question, a serious situation in which
either critical injury or death may result.
WARNING This symbol is used for the incident in which the injury is serious but there
is not high probability of occurrence.
If you cannot avoid the incident in question, a medium or slight injury may
result.
CAUTION This symbol is used for the incident in which the injury is slight and there
is not high probability of occurrence.
If you cannot avoid the incident in question, an accident of property
CAUTION damage may occur.
Indicates the safe way of using the machine as well as precautions to avoid
NOTICE accidents resulting in damage to property.
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Safety label
Safety labels are affixed to the potentially hazardous sections of this machine.
Before using this machine, verify the label positions and thoroughly understand the hazard levels and
hazard descriptions.
・The language used for the safety labels affixed to the machine outer covers can be requested by
customers.
The language used for the safety labels affixed to the machine interior is only either Japanese or
English.
Label Hazard Level Hazard Description
There is a danger that your fingers or
WARNING hands may be cut by the rotating blade.
・Do not place your fingers or hands
near the blade or flange until the
spindle comes to a complete stop.
・Do not open the splash cover until the
spindle comes to a complete stop.
・It takes approximately 15 seconds for
the spindle to stop completely after the
stop process is executed (including in
case of EMO and a power failure).
There is a possibility that your fingers or
WARNING hands may get caught and injured in the
drive sections.
・Do not position your fingers or hands
in the drive sections.
・Do not place tools or other irrelevant
items near them.
The spinner section is a rotating
CAUTION mechanism. There is a possibility that
your fingers or hands may be cut by the
rotating spinner or that serious injury
may be caused by scattered workpiece.
・Do not position your fingers or hands
near the spinner until it stops
completely
There is a possibility that yours fingers
CAUTION or hands may be caught and injured by
the drive sections.
・Do not position your fingers or hands
near the drive sections.
・The maintenance work of the machine
should be done only by operators with
the maintenance qualification.
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About the safety label (Continued)

Label Hazard Level Hazard Description

There is a possibility that your fingers or
CAUTION hands may get caught and injured in the
drive sections.
・Do not position your fingers or hands
in the drive sections.
・Before performing maintenance work,
make sure to shut off the machine
power and lock out the breaker.
There is a possibility that you may burn
CAUTION your fingers or hands by touching the hot
parts of the machine.
・Turn off the machine, and then
perform maintenance work only after
the machine cools down sufficiently.

MSAAA-00015-0

Even if the power circuit breaker of the

WARNING machine is turned off, the primary side of
the breaker remains energized.
There is a danger that you may die or get
seriously injured from electric shocks.
・Do not touch the energized sections.
There is a danger that you may die or get
WARNING seriously injured from electric shocks.
・Do not touch the electrically charged
sections.
・Before performing maintenance work,
make sure to shut off the machine
power, and lock out the breaker.
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INTRODUCTION
About this manual
This manual describes the installation and adjustment procedures of Fully Automatic Dicing Saw 6000
series model DFD6361.
To ensure safety
To ensure safety, be sure to thoroughly read and understand the contents of this manual before performing
any operation. When performing any operation, make sure that the procedures set forth in this manual are
followed.
Installation and maintenance of the machine must be carried out by qualified persons who have completed
DISCO's education curriculum (hereinafter referred to as maintenance personnel).
This manual is the 'Original instructions'.
Definition of a manager and an operator
The definition of "manager" and "personnel" applied in this manual is as follows:
Category Applicable Personnel Job
Manager Management representative Engages in overall management of the machine
and its operators.
Operator Maintenance personnel Qualified person who has completed DISCO's
machine maintenance training to engage in
maintenance of the machine.
Data maintenance personnel Qualified person to manage the software data of
the machine.
Operator Engages in operation of the machine for
processing workpieces.

Instruction manuals of the machine

This manual is the Installation Manual indicated by the arrow.
Manual Who should read Contents
Safety Manual ・Management Information for ensuring safety during
representative machine operation, installation and
・Data maintenance maintenance
personnel
・Maintenance personnel
Installation Manual Maintenance personnel Machine installation and adjustment
procedures
Operation Manual Operator Operational procedures to be performed by
the machine operator
Data Maintenance Data maintenance Screen contents for data entry and machine
Manual personnel operation data setting procedures
Maintenance Manual Maintenance personnel Servicing, inspection and adjustment
procedures to be performed by the customer
Technical Reference Maintenance personnel Machine specifications/
Circuit diagrams/Illustrations/Part lists
Unit notation
International System of Unit is adopted to express any unit. Also, all the pressure values are expressed in
gauge pressure.

Introduction-1
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CONTENTS
CONTENT S

READ CAREFULLY BEFORE USING THIS MANUAL

INTRODUCTION ..............................................Introduction-1

CONTENTS.......................................................... Contents-1

A. Installation Specifications and Environment ................. A-1

1. Specifications ............................................................................................................... A-2
2. Dimensions/Dry Mass of Machine Upon Delivery ........................................................ A-6
3. Installation Environment............................................................................................... A-7
3-1. Installation Site .............................................................................................................................. A-8
3-2. Environment Requirements ......................................................................................................... A-10
3-3. Environment for Storage and Transport ...................................................................................... A-15

4. Piping and Wiring Connection.................................................................................... A-16

4-1. Rear Side Connecting Positions ................................................................................................. A-17
4-2. Piping and Wiring Connection ..................................................................................................... A-18

B. Installation and Relocation Operation .......................... B-1

1. Installation Operation ................................................................................................... B-2
1-1. Hoisting and Lowering the Machine by a Crane ........................................................................... B-4
1-2. Transferring the Machine .............................................................................................................. B-8
1-2-1. Transferring the machine by hand push ............................................................................. B-9
1-2-2. Transferring the Machine by Pallet Truck ......................................................................... B-11
1-3. Installing the Machine With the Leveling Mount .......................................................................... B-15
1-4. Removing the Drive Axis Metal Fixtures ..................................................................................... B-17
1-4-1. Removing the X-axis Metal Fixture .................................................................................. B-19
1-4-2. Removing the Y (Y1 and Y2) -axis Metal Fixtures ........................................................... B-20
1-4-3. Removing the Tying Bands of the Upper Arm and Lower Arm......................................... B-23
1-4-3-1. Removing the Transfer Axis Cover ........................................................................ B-24
1-4-3-2. Removing the Upper Arm Tying Bands ................................................................. B-25
1-4-3-3. Removing the Lower Arm Tying Bands ................................................................. B-26
1-4-3-4. Mounting the Transfer Axis Cover ......................................................................... B-27
1-4-4. Removing the Metal Fixtures of the Spinner Axis ............................................................ B-28
1-4-5. Removing the Retaining Screws of the Arm Section Cover Used for
Transport Purpose ........................................................................................................... B-29

Contents-1
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CONTENTS

1-5. Piping and Wiring Connection ..................................................................................................... B-31

1-5-1. Mounting the status indicator ........................................................................................... B-33
1-5-2. Connecting piping............................................................................................................. B-34
1-5-3. Connecting Power Supply Wiring..................................................................................... B-37
1-5-3-1. Removing the Breaker Section Cover ................................................................... B-40
1-5-3-2. Connecting the Power Supply Wiring.................................................................... B-41
1-5-3-3. Mounting the Breaker Section Cover .................................................................... B-46
1-5-3-4. Completion of Connecting the Power Supply Wiring ............................................ B-47
1-6. Mounting the Machine Outer Cover ............................................................................................ B-48
1-7. Leveling the Machine with the Leveling Mount ........................................................................... B-52
1-7-1. Mounting the Spirit Level .................................................................................................. B-53
1-7-2. Removing the Machine Outer Cover ................................................................................ B-54
1-7-3. Leveling the machine ....................................................................................................... B-55
1-8. Mounting the Machine Anchors [Optional Accessory] ................................................................. B-57
1-9. Completion of Installation Operation ........................................................................................... B-59

2. Transferring Operation ............................................................................................... B-62

2-1. Terminating the Machine ............................................................................................................. B-64
2-2. Removing the Machine Outer Cover and Status Indicator .......................................................... B-65
2-2-1. Turning OFF the Power .................................................................................................... B-66
2-2-2. Removing the Machine Outer Cover ................................................................................ B-67
2-2-3. Removing the Status Indicator ......................................................................................... B-69
2-3. Disconnecting Piping and Wiring ................................................................................................ B-71
2-4. Mounting the Drive Axis Metal Fixtures ....................................................................................... B-73
2-4-1. Mounting the X-axis metal fixture ..................................................................................... B-74
2-4-2. Mounting the Y (Y1 and Y2) -axis metal fixtures .............................................................. B-75
2-4-3. Mounting the Tying Bands of the Lower Arm and Upper Arm .......................................... B-78
2-4-3-1. Removing the Transfer Axis Cover ........................................................................ B-78
2-4-3-2. Mounting the Lower Arm Tying Bands .................................................................. B-79
2-4-3-3. Mounting the Upper Arm Tying Bands .................................................................. B-80
2-4-3-4. Mounting the Transfer Axis Cover ......................................................................... B-81
2-4-4. Mounting the Metal Fixtures of the Spinner Axis .............................................................. B-82
2-4-5. Attaching the Retaining Screws of the Arm Section Cover Used for
Transport Purpose ........................................................................................................... B-83
2-5. Removing the Leveling Mount..................................................................................................... B-85

Contact Information

Contents-2
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A. Installation Specifications and Environment

Contents of this chapter

Section No. Title Contents

1 Specifications ・Requirements for the machine's driving force
2 Dimensions/Dry Mass of ・Standard dimensions and mass of the machine
Machine Upon Delivery on delivery
3 Installation Environment ・Requirements for installation environment
4 Piping and Wiring Connection ・Connection positions for piping and wiring

A-1
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1. Specifications
Power requirements

Machine with 1.2 kW spindle

Input voltage 200 to 240 VAC ±10%, 3-phase
Frequency 50 to 60 Hz
Power consumption ・When processing: 2.2 kW
・During warm-up: 1.8 kW
・During standby: 0.4 kW
The values shown above are for reference and will differ
depending on the actual conditions applied.
Max. power 6.9 kVA
The leakage current 25 mA or less
The rated sensitivity current of the circuit breaker is 50 mA.
If the earth leakage breaker is used for the plant facilities for
protection purpose, use a harmonic-measured breaker with an
appropriate sensitivity current.
Short circuit current rating (SCCR) 5 kA
Machine main Standard 20 A
breaker rating With transformer 20 A
Wiring configuration 3WIRE+GROUND
Machine with 1.8 kW spindle [optional accessory]
Input voltage 200 to 240 VAC ±10%, 3-phase
Frequency 50 to 60 Hz
Power consumption ・When processing: 2.2 kW
・During warm-up: 1.8 kW
・During standby: 0.45 kW
The values shown above are for reference and will differ
depending on the actual conditions applied.
Max. power 10.4 kVA
The leakage current 25 mA or less
The rated sensitivity current of the circuit breaker is 50 mA.
If the earth leakage breaker is used for the plant facilities for
protection purpose, use a harmonic-measured breaker with an
appropriate sensitivity current.
Short circuit current rating (SCCR) 5 kA
Machine main Standard 30 A
breaker rating With transformer 20 A
Wiring configuration 3WIRE+GROUND

A-2
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Power requirements (Continued)

Machine with 2.2 kW spindle [optional accessory]
Input voltage 200 to 240 VAC ±10%, 3-phase
Frequency 50 to 60 Hz
Power consumption ・When processing: 1.7 kW
・During warm-up: 1.6 kW
・During standby: 0.45 kW
The values shown above are for reference and will differ
depending on the actual conditions applied.
Max. power 10.4 kVA
The leakage current 25 mA or less
The rated sensitivity current of the circuit breaker is 50 mA.
If the earth leakage breaker is used for the plant facilities for
protection purpose, use a harmonic-measured breaker with an
appropriate sensitivity current.
Short circuit current rating (SCCR) 5 kA
Machine main Standard 30 A
breaker rating With transformer 20 A
Wiring configuration 3WIRE+GROUND

Air

Pressure ・Range: 0.5 to 0.8 MPa

・Fluctuation range: ±0.01 MPa
Connection port Rc3/8
Mean flow rate during running 189 L/min (ANR)
The above values are just for reference and differ depending on
various conditions.
Maximum flow rate 378 L/min (ANR)

Clean air
Clean air is blown directly to workpieces. Prepare clean air suitable for the customer's standards.
When using N2 in place of clean air, please consult DISCO sales representative.
Pressure ・Range: 0.5 to 0.8 MPa
・Fluctuation range: ±0.01 MPa
Connection port Rc3/8
Mean flow rate during running 65 L/min (ANR)
The above values are just for reference and differ depending on
various conditions.
Maximum flow rate 265 L/min (ANR) (excluding air gun)

A-3
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N2
N2 gas is used when a UV irradiation unit is incorporated as an optional accessory.
Pressure ・Range: 0.2 to 0.4 MPa
・Fluctuation range: ±0.01 MPa
Connection port Rc3/8
Maximum flow rate 35 L/min (ANR)
The values shown above are for reference and will differ depending
on the actual conditions applied.

Water used
Water is divided into two systems: for cutting water, water curtain, other and cooling water.

Cutting water, water curtain and other

Pressure ・0.2 to 0.4 MPa
When the machine is equipped with the spinner atomizing nozzle
[optional accessory], pressure of 0.25 MPa or higher is required.
・Fluctuation range: ±0.01 MPa
Connection port Rc3/8
Maximum flow rate 14 L/min
Breakdown:
・Cutting water: 12 L/min
・Water curtain: 1 L/min
・Other: 1 L/min (spinner cleaning/protection water for non-contact
setup [optional accessory])

Cooling water
Pressure ・0.2 to 0.4 MPa
・Fluctuation range: ±0.02 MPa
Connection port Rc1/4
Maximum flow rate 3.0 L/min at 0.3 MPa
・When the 1.8 kW spindle [optional accessory] or 2.2 kW spindle
[optional accessory] is installed: 1.5 L/min (at 0.2 MPa)

Rinse water [optional accessory]

Pressure ・0.2 to 0.4 MPa

・Fluctuation range: ±0.01 MPa
Connection port Rc1/4
Maximum flow rate 1.0 L/min

Duct

Capacity 5 to 8 m3/min
Connection port ・Duct hose
・I.D.: 101.6 mm

A-4
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Water drainage

Connection port ・Duct hose

・I.D.: 50.6 mm

Main dimensions
Main body: 1,200 W  1,550 D  1,800 mm H

(Excluding the protrusions and the Status indicator [336 mm])

・The space for installation must be large enough to perform the maintenance.

Machine dry mass

Approx. 2,050 kg (Standard)

・When selecting the transformer unit for use outside Japan as an optional accessory, the accessory mass
is added to the machine mass.

Approx. 100 kg (Transformer unit for use outside Japan)

Paint color
Cream (Munsell No. 2.5 GY 8.0/0.5)

Black (Munsell No. N2.4)

A-5
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2. Dimensions/Dry Mass of Machine Upon Delivery

Dimensions/Dry Mass of Machine Upon Delivery

Main Body Dimensions 1,200 W  1,550 D  1,800 H

(mm)
Mass (kg) Approx. 2,050 kg (standard)

When selecting the transformer unit for use outseide Japan as an optional
accessory, the accessory mass is added to the machine mass.
Approx. 100 kg (Transformer unit for use outseide Japan)
・In transferring, secure enough space so that the machine will pass safely through the selected route.
(Information: At least a space of approximately 690 mm wide is necessary for a person to work sitting.)
・The status indicator (336 mm) and other protrusions are not included in the above dimensions.

A-6
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3. Installation Environment
Summary of this section

Section No. Title Contents

3-1 Installation Site ・Illustration of the installation site
3-2 Environment Requirements ・Environment requirements to install the
machine
3-3 Environment for Storage and ・Storage environment
Transport ・Transport environment

A-7
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3-1. Installation Site

Installation precautions
・The mass of the machine differs by whether it has the transformer unit for use outseide Japan.
・In installation site selection, ease of operation and maintenance must be taken into consideration.
・In installation, secure 380 mm of maintenance space between the top face of the machine and the
ceiling of the room (2,180 mm high from the floor).
・Connect the blade hose either at the right or rear side of the machine.
・The maintenance area is described with the recommended values that are based on SEMI S8.

Installation drawing (Without transformer)

(Unit: mm)

A-8
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Installation drawing (With transformer)

(Unit: mm)

A-9
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3-2. Environment Requirements

Do not use any utility that violates the required conditions
If you use any utility that violates the conditions required in this document, DISCO shall not be liable for
any damage arising from such use. The following adverse effects or troubles unexpected at DISCO may
occur:

・Impact on not only customer's products but also the final products

・Generation of hazardous gas due to chemical reaction

・Impact on your plant facilities

・Impact on your machines (including ones other than DISCO's)

Trouble examples caused by utilities that violate the conditions:

Utility Example Details
Workpiece breakage Impurities caused the air system to be clogged, which
made it impossible for the transfer arm to hold the
workpiece, causing the workpiece to drop.
Breakage of the air drive As a result of using air whose atmospheric dew point
Air section is high, dew condensation occurred in the pipe or air
cylinder, and rust occurred in the air drive section.
Spindle breakage Air was supplied with a pressure exceeding the upper
limit, the pipe came off the fitting, and the spindle
having the air bearing structure got broken.
Decrease in oxygen As a result of using gas such as N2 instead of
concentration compressed air, the gas permeated the room, and the
oxygen concentration decreased.
Clean air ・Inhaling air with a low oxygen concentration may
cause serious injury or death due to lack of oxygen.
Workpiece contamination Air including impurities directly hit the workpiece and
the workpiece was contaminated.
Cutting water Workpiece contamination Water including impurities directly hit the workpiece
/ spinner and the workpiece was contaminated.
cleaning
water
Occurrence of water Impurities caused a pipe to get corroded, and water
leakage leakage occurred.
・Touching leaked liquid or the machine may cause
serious injury or death due to an electric shock.
Spindle breakage As a result of using cooling water whose temperature
Cooling water does not meet the conditions, floating of the spindle
axis became unstable and the spindle having the air
bearing structure got broken.
Decrease in process Change in water temperature caused the spindle to
accuracy expand or shrink, which made it impossible to keep the
process accuracy.

A-10
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Environment requirements
This machine realizes highly accurate applications by employing highly precision axis units.
The installation environment, therefore, gives a great effect on the machine accuracy.

Installation site
・Ease of operation and maintenance must be taken into account.

・If the machine is used or kept in the environment where dirt and dust float around, precision parts of the
machine may be worn out or get dirty quickly, which could shorten the part life or adversely affect
processing and part quality.
If you need to use or keep the machine in the environment where dirt and dust float around, please
consult DISCO sales representatives.

Treatment for waterproof and drainage

If water leakage should occur, the floor surface and downstairs might be damaged.
Therefore, provide the floor surface with an appropriate treatment for waterproof and drainage.

The drain pan and water leakage detection unit are available as an optional accessory.

Ambient temperature (room temperature)

20 to 25°C (variation: within ±1°C)

Ambient relative humidity

55 ±15% (non-condensing)

Cutting water/spinner cleaning water temperature

Room temperature +2°C (variation: within ±1°C)

A-11
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Cutting water/spinner cleaning water quality

Deionized water is recommended. Consult your DISCO representative when using other than deionized
water.

・Water containing foreign matters or ions may cause corrosion, rust or breakage of the machine, or
clogging of the pipes.

・In order to protect the machine, install a filter to remove foreign matters of which particle size is over
100 μm in the location just before the cutting water connection port of the machine. If you use the water
temperature control unit or DI water recycling unit manufactured by DISCO, the filter is unnecessary.
The filter unit is available as an optional accessory provided by DISCO.

・Use of flammable cutting oil or cutting fluid may cause firing in the machine.

・If water which contains cutting oil or cutting fluid and whose volatility has been lower compared to
deionized water adheres to the water leakage sensor inside the machine, it will not dry. As a result, the
water leakage sensor will need to be replaced because otherwise, a water leakage error will continue to
be generated regardless of the presence or absence of water leakage. The replacement of water leakage
sensor is handled by DISCO customer engineer.
Never disable the water leakage sensor function in order to avoid errors, because it involves risk of an
electric shock due to water leakage or firing.

Cooling water temperature

Same as the room temperature (variation: within ±1°C)

Fluctuation in water temperature may adversely affect cutting accuracy due to expansion or shrinkage of
spindle.

Cooling water quality

High content of chloride (Cl), iron (Fe), copper (Cu) and sodium (Na) or high ratio of conductivity may
cause corrosion of the mechanical parts or clogging of piping.

Rinse water quality [optional accessory]

Consult your DISCO representative when using other than deionized water.

A-12
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Power requirements
Standard specification: Within 200 to 240 VAC ±10, three-phase

Specification with transformer: Within 380 to 415 VAC ±10%, three-phase

・The leakage current is 25 mA or less.

The rated sensitivity current of the circuit breaker is 50 mA. If the earth leakage breaker is used for the
plant facilities for protection purpose, use a harmonic-measured breaker with an appropriate sensitivity
current.

・This machine belongs to overvoltage category II. Install an electrically insulated-type transformer in
between plant facility and the machine.

・Significant voltage vibrations must be avoided.

・Use the power supply without any momentary interruption.

・Do not use the machine in electrically noisy environments. The tests listed below are conducted for this
machine.

Standards
IEC: 61000-4-4 Electrical fast transient/burst immunity test

Outline of test
±2.0 kV (Charge voltage)

Power cable
The power cable for this machine is prepared as an optional accessory.

Grounding
Facility-side ground connection must be made according to the local regulations.

If the grounding system is TT

Make the connection so that the resistance between the grounding electrode at the plant facility and the
machine's PE terminal is less than 100 .

Air
Filtration rating: 0.00001 mm/99.5% or more
Residual oil: 0.1 mg/m3 or less
Atmospheric dew point: -10 to -20°C
・When the atmospheric dew point is higher than -10°C:
Dew condensation may occur at the spindle bearing and cause a malfunction of the spindle.

・When the atmospheric dew point is lower than -20°C:

It may cause abnormal wear of the spindle carbon brush.

・There is a proportional relationship between the concentration of ozone contained in compressed air
and gum deterioration speed. As the ozone concentration is higher, gum parts deteriorate earlier. Any
deterioration of parts clearly due to ozone and any breakage caused by the deterioration may not be
covered by warranty even when the machine is in the warranty period.
Reference: Ozone concentration varies depending on the environment or the type of the air compressor.

A-13
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Duct
Exhaust capacity: 5 to 8 m3/min

Altitude
Altitude of 1,000 m or lower

When the altitude of the site is higher than 1,000 m, consult your nearest DISCO.

Others
・Use the piping hose without any foreign matter adhered inside.

・Avoid locations where noise, vibrations, heat, and oil mist are generated, as well as locations close to
fans and ventilation outlets.

・This machine discharges exhaust air and drain water containing silicon dust due to the cutting operation.
Control and dispose of the machine discharges in accordance with the environment criteria of the local
regulations.

・Do not use this machine at any place other than an industrial or commercial facility. This machine is
designed for industrial use and its EMC performance has been evaluated as EN55011, Group 1, Class A.
Therefore, there is a possibility that electromagnetic noise may exceed the limit defined by standards
for residential environments.

・Ensure that an air source, a water source, drain pipes and a power source are located near the machine.

・Install valves which can be locked out for both the air and water supplies at the facility-side.
These should be prepared by the customer.

・Be sure to install the machine on the floor that has adequate strength. And when the installation site
uses the raised floor, please consult your nearest DISCO about its strength.
(For the installation floor withstand load, see the section 3-1 of this chapter, [Installation Site].)

・Avoid places where the temperature greatly varies.

・Machine anchors are optionally available. They are designed to provide human/equipment protection in
the event of an earthquake or other disaster. It is recommended that the machine be secured with these
anchors.

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3-3. Environment for Storage and Transport

Environment for storage and transport
The environmental conditions for storage and transport would wield a profound influence on the
machine's accuracy when it is operated.
Ambient temperature 5 to 40C
(room temperature)
Ambient relative humidity 35 to 70% (no condensation)
Machine anchors are optionally available. They are designed to provide human/equipment protection in
the event of an earthquake or other disaster. It is recommended that the machine be secured with these
anchors.
Avoid locations where noise, vibrations, heat, and oil mist are generated, as well as locations close to
fans, and ventilation outlets.
Drain water from the machine before storage and transport.
Before starting operation of the machine after storage or transport, make sure to grease its driving axes.
If the machine is used or kept in the environment where dirt and dust float around, precision parts of the
machine may be worn out or get dirty quickly, which could shorten the part life or adversely affect
processing and part quality.
If you need to use or keep the machine in the environment where dirt and dust float around, please
consult DISCO sales representatives.

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4. Piping and Wiring Connection

Summary of this section

Section No. Title Contents

4-1 Rear Side Connecting Positions ・Piping connection diagram on the rear side of
the machine
4-2 Piping and Wiring Connection ・Piping and wiring connection

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4-1. Rear Side Connecting Positions

Rear side connecting positions

Rear side
9
(Unit: mm)

No. Name Remarks

1 Cooling water OUT Rc1/4
2 Cooling water IN Rc1/4
3 Deionized water IN Rc3/8
4 Main air IN Rc3/8
5 Clean air IN Rc3/8
6 Rinse water (Spinner cleaning water) IN Rc1/4 [optional accessory]
7 Main drain * 50.6 ID Duct hose
8 Main duct * 101.6 ID Duct hose
9 Chuck table water curtain IN Rc3/8 [optional accessory]
* Discharges dirty water and mist containing cutting material particles.

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4-2. Piping and Wiring Connection

Range of Utility Connection Parts Prepared by DISCO
For the connections of utilities to the DFD6361, air piping, water piping, duct piping, drain piping and
electrical wiring should be arranged. Among those, the customer is requested to arrange hoses and joints
as well as connection ports at the plant facility, except for ducts and drain hoses.

Fully Automatic Dicing Saw

DFD6361
Plant Facility Arrangement

Air piping Hoses and joints Air connection ports

Water piping Hoses and joints Water connection ports

Duct / drain piping Duct hoses / Drain hoses Duct and drain connection ports

Electrical wiring Power cables Electricity connection ports

Supplied from DISCO Arranged by the customer

・DISCO arranges the air piping to the connection ports of the DFD6361. The customer is requested to
arrange hoses and joints as well plant facility connection ports.

・DISCO arranges water piping to the connection ports of the DFD6361. The customer is requested to
arrange hoses and joints as well as plant facility connection ports.

・DISCO arranges duct and drain piping to the hoses (both-end duct cuffs with hose band). The customer
is requested to arrange the plant facility connection ports.

・DISCO arranges electrical wiring to the connection ports of the DFD6361. The customer is requested to
arrange power cables and plant facility connection port.

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Air Piping
DISCO arranges the air piping to the connection ports Rc3/8 of the DFD6361. The customer is requested
to arrange hoses and joints as well as plant facility connection ports.
There are following two types of piping specification whether clean air is used or not. Arrange applicable
hoses and joints suitable for your situation.

a. Standard piping (When clean air is used)

DFD6361 Hose and joints Plant facility arrangement

Air
Air IN (Rc3/8)
0.5 to 0.8 MPa

Clean air IN (Rc3/8) Clean air

0.5 to 0.8 MPa

Supplied from DISCO Arranged by the customer

Utility flow direction : Air Filter

b. When clean air is not used

DFD6361 Hose and joints Plant facility arrangement

Air
Air IN (Rc3/8)
0.5 to 0.8 MPa
Air Air IN

Clean air

Supplied from DISCO Arranged by the customer

Utility flow direction
: Air Filter

・DISCO can provide all the hoses and joints to be arranged by the customer as optional accessories.

・DISCO can provide 2 types of braided hose and 2 types of polyurethane tubes as optional accessories.
If you need them, specify the amount and length necessary to your DISCO representative.

・DISCO arranges braided hose joint and one-touch joint as optional accessories. It is necessary to
determine the type in accordance with the hose selection and screw diameter. If you need them, specify
the amount and length necessary to your DISCO representative.

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Water Piping
DISCO arranges the water piping to connection ports Rc1/4 and Rc3/8 of the DFD6361. The customer is
requested to arrange hoses and joints as well as plant facility connection ports.

There are following 5 types of piping specification depending on the difference of branching method of
deionized water. Arrange appropriate hoses and joints suitable for your situation.

Also, in order to protect the machine, install a filter to remove foreign matters of which particle size is
over 100 μm in the location just before the cutting water connection port of the machine (at the location
shown with in the figures below). If you use the water temperature control unit or DI water
recycling unit manufactured by DISCO, the filter is unnecessary.
The filter unit is available as an optional accessory provided by DISCO.
a. When a single deionized water path is branched into 2; cutting and cooling water (standard)

DFD6361 Plant Facility Arrangement

Cutting water IN DI water

Spinner cleaning water IN 0.2 to 0.4 MPa
(Rc3/8)
City water
Cooling water IN (Rc1/4) 0.2 to 0.4 MPa

Cooling water OUT (Rc1/4) Drain

Rinse water
Rinse water IN (Rc1/4) 0.2 to 0.4 MPa

Supplied from DISCO Arranged by the customer

Utility flow direction Pipe which requires the filter unit [optional
accessory] or a filter to remove foreign matters
of which particle size is over 100 μm.

b. When each of 2 deionized water paths is connected to cutting and spinner cleaning water
respectively

DFD6361 Plant Facility Arrangement

Cutting water IN DI water

(Rc3/8) 0.2 to 0.4 MPa

Spinner cleaning water IN DI water

(Rc1/4) 0.2 to 0.4 MPa

Cooling water IN (Rc1/4) City water

0.2 to 0.4 MPa

Cooling water OUT (Rc1/4) Drain

Rinse water IN (Rc1/4) Rinse water

0.2 to 0.4 MPa

Supplied from DISCO Arranged by the customer

Utility flow direction Pipe which requires the filter unit [optional
accessory] or a filter to remove foreign matters
of which particle size is over 100 μm.

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Water Piping (Continued)

c. When a single deionized water path is branched into 3; cutting, spinner cleaning and cooling
water

DFD6361 Plant Facility Arrangement

Cutting water IN DI water
Spinner cleaning water IN 0.2 to 0.4 MPa
Cooling water IN
(Rc3/8)

Cooling water OUT (Rc1/4) Drain

Rinse water
Rinse water IN (Rc1/4) 0.2 to 0.4 MPa

Supplied from DISCO Arranged by the customer

Utility flow direction Pipe which requires the filter unit [optional
accessory] or a filter to remove foreign matters
of which particle size is over 100 μm.

d. When a single deionized water path is branched into 4; cutting, spinner cleaning, cooling and
rinse water

DFD6361 Plant Facility Arrangement

Cutting water IN
Spinner cleaning water IN DI water
Cooling water IN 0.2 to 0.4 MPa
Rinse water IN
(Rc3/8)

Cooling water OUT (Rc1/4)

Drain

Supplied from DISCO Arranged by the customer

Utility flow direction Pipe which requires the filter unit [optional
accessory] or a filter to remove foreign matters
of which particle size is over 100 μm.

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Water Piping (Continued)

e. When a single deionized water path is branched into 3; cutting, spinner cleaning and rinse
water

DFD6361 Plant Facility Arrangement

Cutting water IN DI water
Spinner cleaning water IN 0.2 to 0.4 MPa
Rinse water IN
(Rc3/8)
Cooling water IN City water
(Rc1/4) 0.2 to 0.4 MPa

Cooling water OUT (Rc1/4)

Drain

Supplied from DISCO Arranged by the customer

Utility flow direction Pipe which requires the filter unit [optional
accessory] or a filter to remove foreign matters
of which particle size is over 100 μm.

・DISCO can provide all the hoses and joints to be arranged by the customer as optional accessories.

・DISCO can provide 2 types of braided hose and 2 types of polyurethane tubes as optional accessories.
If you need them, specify the amount and length necessary to your DISCO representative.

・DISCO arranges braided hose joint and one-touch joint as optional accessories. It is necessary to
determine the type in accordance with the hose selection and screw diameter. If you need them, specify
the amount and length necessary to your DISCO representative.

・Drained water in the diagrams above does not contain cutting particles.

・The hoses and joints to be arranged by the customer to install the filter unit [optional accessory] are the
same as indicated in the diagrams.

・When deionized water is used as cutting water and the filter unit [optional accessory] is selected, the
machine incorporates the filter unit.

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Duct and drain piping

For duct and drain piping, 2 types (exhaust and drain) are required.
DISCO arranges duct and drain piping to the hoses (both-end duct cuffs with hose band). The customer is
requested to arrange the plant facility connection ports.

・Drainage and exhaust include contaminated water and mist including cutting particles.

・When the machine is equipped with the mist collector [optional accessory], the 125 mm air outlet,
50 mm discharge port, and power connection port (terminal M5) for the mist collector should be
separately arranged at the plant facilities.

DFD6361 Plant Facility Arrangement

Main duct Duct hose 100

(including spindle and (length 3 m)
Both-end duct cuffs Air outlet (100)
spinner exhaust) with hose band

Duct hose 50

Main drain (length 1 m)
(Spinner exhaust/drain) Discharge port (50)
Both-end duct cuffs
with hose band

Supplied from DISCO Arranged by the customer

: Air : Liquid : Discharge containing cutting particles

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B. Installation and Relocation Operation

Contents of this Chapter

Section No. Title Contents

1 Installation Operation ・Procedures for installing the machine
・Adjustments work after the machine
installation
2 Relocation Operation ・Procedures for relocating the machine

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1. Installation Operation
Operation flow

1-1 Hoisting and Lowering the Machine by a Crane

1-2 Transferring the Machine

1-3 Installing the Machine with the Leveling Mount

1-4 Removing the Drive Axis Metal Fixtures

1-5 Piping and Wiring Connection

1-6 Mounting the Machine Outer Cover

1-7 Leveling the Machine with the Leveling Mount

1-8 Mounting the Machine Anchors [Optional Accessory]

1-9 Completion of Installation Operation

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Safety items for installation

WARNING

Air exhaust, water drainage, and cutting particles must be properly

managed/disposed of in compliance with applicable environmental regulations
Due to the nature of its processing characteristics, the machine may produce harmful
substances depending on the types of workpiece it processes.

It is recommended that the installed machine be secured with the "machine

fixation anchor metal"
DISCO provides "machine fixation anchor metal" as an optional accessory for
human/equipment protection in the event of an earthquake or other disaster.

The floor on which the machine is installed should be provided with sufficient
waterproofing and drainage treatment
When you have water leaks, the floor surface of the installation site or downstairs
may be damaged.

Periodically inspect the water pipe fittings to make sure that no water leaks from
them
When you have water leaks, the floor surface of the installation site or downstairs
may be damaged.

NOTICE

Use the safety goggles, protective gloves, stepstools, flashlights and alcohol
which are available in your factory or comply with your factory's standards
Safety goggles, protective gloves, stepstools, flashlights and alcohol are not supplied
with the machine.

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1-1. Hoisting and Lowering the Machine by a Crane

Equipment you must have ready

WARNING

Use the specified hoisting jigs when hoisting the machine

If the machine is hoisted or lowered using hoisting gear other than the dedicated jigs,
the hoisting gear may be broken due to insufficient strength or center-of-gravity may
be displaced, causing the machine to fall down. This may result in severe injury or
death of any person underneath the machine.

Before hoisting the machine, inspect the hoisting jigs and slings for abnormalities
Inspections should be performed by a person with expertise. Do not use the hoisting
jigs and slings when any abnormality is found as a result of inspections.
Otherwise the hoisting jigs and slings may be broken due to insufficient strength or
center-of-gravity may be displaced, causing the machine to fall down. This may result
in severe injury or death of any person underneath the machine.

[Hoisting jigs]
Item DISCO Part ID Qty
[1] Lifting plate HANGER 2
LPXJ-020004-2
[2] Hexagonal bolt for displacement HEXAGON SOCKET HEAD CAP SCREW 4
prevention MSS100025UN-0
[2] Hexagonal nut for displacement HEXAGON NUT 4
prevention M6N-100-1UN-0
[3] Rope SLING 4
LJKJ-911120-0
[4] Shackle SHACKLE 4
LENJ-910035-0
[5] Lifting bracket HANGER 1
LENJ-910003-0
[6] Rope SLING (1M) 2
LJEJ-910004-0
[7] Shackle SHACKLE 4
LCAJ-910006-0
[Others]
Safety shoes and protective gloves

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Procedures for hoisting and lowering the machine by a crane

DANGER

While the machine is hoisted or lowered, stay away from the area beneath and
around the machine
If the machine should fall while the machine is hoisted or lowered, persons in such
area may be crushed to death or severely injured. Or if the machine should swing like
a pendulum, they may be caught between the machine and wall or hit by the machine
to death or severely injured.

Ensure that the employed crane is rated for a hoisting load of 2,150 kg or
heavier and withstands the machine mass, boom length and hoisting angle
If the machine should fall while the machine is hoisted or lowered, persons beneath or
near it may be crushed to death or severely injured. Note that the mass of the machine
including the hoisting jigs is approximately 2,150 kg.

WARNING

Use the specified hoisting jigs when hoisting the machine

If the machine is hoisted or lowered using hoisting gear other than the dedicated jigs,
the hoisting gear may be broken due to insufficient strength or center-of-gravity may
be displaced, causing the machine to fall down. This may result in severe injury or
death of any person underneath the machine.

Be sure to firmly secure the displacement prevention bolts to the hoisting jigs
If the displacement prevention bolts come off from the hoisting jigs during hoisting,
the hoisted machine may lose balance and fall. If the machine falls, you could be
crushed to death or seriously injured.

Make sure to firmly secure the shackles

If the shackles are disengaged from the jigs during machine hoisting, the hoisted
machine may lose balance and drop. If the machine falls, you could be crushed to
death or seriously injured.

Make sure to wear safety shoes and protective gloves throughout the machine
hoisting/lowering process
Your feet or hands could be caught or cut off by the machine while the machine is
hoisted or lowered.

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Procedures for hoisting and lowering the machine by a crane (Continued)

Step No. Procedure

1 Wear the safety shoes and protective gloves.
2 Insert the [1] Lifting plate into the machine frame.
3 Attach the [2] Hexagonal bolt and nut for displacement prevention to the mounting holes
of the inserted [1] Lifting plate.
4 Draw the [3] Rope through the [7] Shackle.
5 Attach the [7] Shackle (with the [3] Rope) to the [1] Lifting plate.
6 Draw the [3] Ropes and [6] Rope through the [4] shackles.
7 Attach the [4] Shackle (with the [3] Rope) and [4] Shackle (with the [6] Rope) to the [5]
Lifting bracket.
8 Engage the hoisting [6] Ropes with a crane.
Detailed drawing of
shackle attachment

(Screw-in the fixing screw)

[6]:Rope

[5]:Lifting bracket

[4]:Shackle

[3]:Rope

[7]:Shackle

[1]:Lifting plate
[2]:Hexagonal bolt/nut

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Procedures for hoisting and lowering the machine by a crane (Continued)

Step No. Procedure

8
(Continued)

(Unit: mm)

9 Initiate hoisting after making sure that the ropes do not come into contact with any part of
the machine.
The mass of the machine including the hoisting jigs is approx. 2,150 kg
Ensure that the employed crane rating is adequate for the machine weight. Also, be sure
that the employed wires and other hoisting accessories are appropriate for the machine
weight.
・Hoist the machine without shocking the machine.
・Do not tilt the machine.
・Do not apply any undue force to the covers.
10 Lower the machine.
・While lowering, exercise care not to shock the machine.

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1-2. Transferring the Machine

Summary of this section
You can move the machine by either hand push or using a pallet truck.
Section No. Title Contents
1-2-1 Transferring the Machine by ・Procedures for transferring the machine by
Hand Push hand push
1-2-2 Transferring the Machine by ・Procedures for transferring the machine by
Pallet Truck pallet truck

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1-2-1. Transferring the machine by hand push

Equipment you must have ready

Safety shoes and protective gloves

Procedures for transferring the machine

WARNING

Do not place your feet or hands under the machine during the operation
If the machine should topple down while it is transferred, you may be caught under
the machine, or if the leveling mount should come off, your feet or hands may be
caught or cut off by the machine.

Wear safety shoes and protective gloves during the operation

Otherwise, your feet and hands could be caught or cut off by the machine.

CAUTION

When transferring the machine, use a flat transfer route

When the machine passes a floor that is bumpy or with varying surface levels while
transferred, impacts are applied to the machine, which may have an adverse effect on
its processing accuracy.

Push the main body frame to move the machine

If the covers and sub-frame are pushed or pulled while the machine is transferred, the
resin cover might be broken or sub-frame might be bent.

Step No. Procedure

1 Wear the safety shoes and protective gloves.
2 Secure enough space so that the machine will pass safely through the selected route.
(Information: At least a space of approximately 690 mm wide is necessary for a person to
work sitting.)

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Procedures for transferring the machine (Continued)

Step No. Procedure

3 Select a flat transfer route. Push the main body frame to move the machine.
・Push the main body frame only for transfer purposes.

Front side Main body frame

・Never push the touch panel, splash cover, flowmeter or arm section cover when you
move the machine.
Touch panel

[Do not push the shaded sections.]

Front side
Arm section cover
Splash cover Flowmeter

Left side Right side

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1-2-2. Transferring the Machine by Pallet Truck

Equipment you must have ready

Safety shoes and protective gloves

Pallet truck

Procedures for transferring the machine by pallet truck

DANGER

When transferring the machine by pallet truck, make sure that the gravity center
of the machine is on the pallet truck center
If the machine is transferred while its gravity is not properly centered on the pallet
truck, it may fall off the truck, causing severe personal injury or death. The weight of
the machine including the hoisting jigs is approximately 2,150 kg.

The employed pallet truck must be capable of moving up and down and
transporting a load of 2,150 kg and be equipped with a fork of 1,100 mm or
longer
If the machine is transferred while its gravity is not properly centered on the pallet
truck, it may fall off the truck, causing severe personal injury or death. The weight of
the machine including the hoisting jigs is approximately 2,150 kg.

Check the insertion position of the fork on the drawing before starting the
operation
If the fork of the pallet truck is not correctly positioned under the machine, it may
cause the machine to topple or fall off the pallet truck during transportation, causing
nearby persons seriously injured or crushed to death.

Make sure that the fork of the pallet truck is correctly inserted into the designated
position so that the gravity center of the machine is on the center of the pallet
truck
If the fork of the pallet truck is not correctly positioned under the machine, it may
cause the machine to topple or fall off the pallet truck during transportation, causing
nearby persons seriously injured or crushed to death.

Ensure that there is no person in the machine transfer route and the area around
it
If the machine should topple or fall off the pallet truck, persons in such area may be
severely injured or crushed to death.

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Procedures for transferring the machine by pallet truck (Continued)

DANGER

Do not place your feet or hands under the machine during the operation
If the machine should topple down while it is transferred, you may be caught under
the machine, or if the leveling mount should come off, your feet or hands may be
caught or cut off by the machine.

WARNING

Wear safety shoes and protective gloves during the operation

Otherwise, your feet and hands could be caught or cut off by the machine.

CAUTION

Before transferring the machine, make sure that the axes are secured with the
metal fixtures
If you transfer the machine without attaching the metal fixtures to the axes, it may
take a great deal of time later to readjust the machine's processing accuracy. For the
procedure to secure the metal fixtures, refer to section 2-4, [Mounting the Drive Axis
Metal Fixture] in this chapter.

When transferring the machine, use a flat transfer route

When the machine passes a floor that is bumpy or with varying surface levels while
transferred, impacts are applied to the machine, which may have an adverse effect on
its processing accuracy.

Push the main body frame to move the machine

If the covers and sub-frame are pushed or pulled while the machine is transferred, the
cover might be broken or sub-frame might be bent.

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Procedures for transferring the machine by pallet truck (Continued)

Step No. Procedure

1 Wear the safety shoes and protective gloves.
2 Secure enough space so that the machine will pass safely through the selected route.
(Information: At least a space of approximately 690 mm wide is necessary for a person to
work sitting.)
3 From the front side of the machine, insert the fork of the pallet truck under the machine as
shown below, and lift the machine.

Pallet truck

Top side (Unit: mm)

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Procedures for transferring the machine by pallet truck (Continued)

Step No. Procedure

3
(Continued)

Front side (Unit: mm)

4 Transfer the machine to the installation site.

→For details of installation site:
See Section 3-1 [Installation Site] of Chapter A.
5 Lower the fork and then pull it out of the machine.

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1-3. Installing the Machine With the Leveling Mount

Equipment you must have ready

22 mm wrench
Safety shoes and protective gloves

Procedures for installing the machine with the leveling mount

The machine can be moved with the casters that are attached underneath the machine.
When installing the machine, therefore, you have to prevent it from moving by casters and secure it at the
installation site. For this purpose, use the leveling mount to jack up the machine.

WARNING

Do not place your feet or hands under the machine during jacking operation
If the machine should topple down while it is jacked up, you may be caught under the
machine, or if the leveling mount should come off, your feet or hands may be caught
or cut off by the machine.

The leveling mount must be adjusted so that the distance between the machine
bottom surface and floor surface becomes between 51 and 71 mm
If the leveling mount is jacked up at a higher or lower position than the range between
51 and 71 mm, the leveling mount may come off. If the leveling mount comes off
during jacking operation, your feet or hands may be caught or cut off by the machine.
If a kinematic cassette is used, adjust the leveling mount so that the distance between
the machine bottom and floor surface will be between 53 and 71 mm. When the
distance between the horizontal datum plane and the floor (standard height for load
ports) is 900 mm, the position of the cassette stage should be adjusted by data setting.

Wear safety shoes and protective gloves during the operation

Otherwise, your feet and hands could be caught or cut off by the machine.

Step No. Procedure

1 Wear the safety shoes and protective gloves.
2 Place the dowel pin of the leveling mount just under the positioning hole located
underneath the main body frame. Then rotate the leveling mount handle lightly
counterclockwise.
・Perform the operation above for all 4 leveling mounts.
→For the positioning hole:
See Section 3-1 [Installation Site] of Chapter A.
3 Verify that the dowel pin fits into the positioning hole and the leveling mount does not
move to-and-fro or side-to-side.
・Perform the operation above for all 4 leveling mounts.

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Procedures for installing the machine with the leveling mount (Continued)

Step No. Procedure

4 With a wrench, rotate the leveling mount handle counterclockwise until all the casters are
lifted above the floor surface. Make necessary adjustments in the front-rear and left-right
directions so that the machine is roughly parallel to the floor surface.
When standard cassette is used
・When jacking up the machine, ensure that its distance to the floor surface does not
exceed 51 to 71 mm.
(When the machine is jacked up by 59 mm, chuck table surface is positioned 900 mm
above the floor.)
If a kinematic cassette is used
・When jacking up the machine, ensure that its distance to the floor surface does not
exceed 53 to 71 mm.
When the distance between the horizontal datum plane and the floor (standard height
for load ports) is 900 mm, it is necessary to change data for the cassette plate position.
Please consult with DISCO.

Dowel pin Handle

Counterclockwise handle
rotation raises the machine.

Standard specifications cassette :

51 to 71 mm
Kinematic specifications cassette :
53 to 71 mm

5 Visually make sure that all the casters mounted on the bottom of the machine are lifted
above the floor.

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1-4. Removing the Drive Axis Metal Fixtures

About removing the drive axis metal fixtures
Prior to machine shipment, the drive axes of the machine are secured by the dedicated metal fixtures to
prevent the axes from being displaced due to vibration or the like during transit. When installing the
machine, it is therefore necessary to remove the metal fixture retaining screws, metal fixtures and tying
bands of the X-, Y1- and Y2-axis, lower arm, upper arm and spinner axis.

Store all the removed metal fixtures and retaining screws in the storage space for drive axis metal fixtures
inside the machine.
Store the metal fixtures and retaining screws so as not to lose them since they will be reused when
transferring the machine.
For spinner axis For cover retaining screws

For X-axis For Y-axis For Z-axis

Axis metal fixtures storage space

Front side

Operation flow

1-4-1 Removing the X-axis Metal Fixture

1-4-2 Removing the Y (Y1 and Y2) -axis Metal Fixtures

1-4-3 Removing the Tying Bands of the Upper Arm and Lower Arm

1-4-4 Removing the Metal Fixtures of the Spinner Axis

1-4-5 Removing the Retaining Screws of the Arm Section Cover Used for Transport Purpose

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Equipment you must have ready

3 mm Allen wrench
4 mm Allen wrench
5 mm Allen wrench
10 mm wrench
Phillips screwdriver
Nipper

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1-4-1. Removing the X-axis Metal Fixture

Procedures for removing the X-axis metal fixture

Step No. Procedure

1 Loosen the retaining screws (M6) of the X-axis metal fixture and remove the retaining
screws and nuts.
・Do not remove the 2 lower retaining screws.

Nut (M6)

Retaining
screw (M6)

X-axis metal
fixture

Do not remove the 2 lower

retaining screws.

Item DISCO Part ID

FIXTURE(X)
X-axis metal fixture
LNLX-010036-0

Continued in the next section.

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1-4-2. Removing the Y (Y1 and Y2) -axis Metal Fixtures

Procedures for removing the Y (Y1 and Y2) -axis metal fixtures

Procedure
Step No.
(Continued from the previous section)
1 Loosen the retaining screws (M6) of the Y1-axis metal fixture, and then remove the metal
fixture.

Retaining
screws (M6)

Y1-axis metal
fixture
Nut (M6)

Item DISCO Part ID

FIXTURE(Y)
Y1 and Y2-axis metal fixtures
LKFY-030009-0

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Procedures for removing the Y (Y1 and Y2) -axis metal fixtures (Continued)

Step No. Procedure

2 Remove the cover [P]'s mounting screws (M4) which are located at both upper and lower
part of the cover.
Mounting screw (M4)
: Position of the
mounting screws

[P] Mounting screw (M4)

Front side

3 While holding the right edge of the cover [P], open it toward the left side of the machine.

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Procedures for removing the Y (Y1 and Y2) -axis metal fixtures (Continued)

Step No. Procedure

4 Loosen the retaining screws (M6) of the Y2-axis metal fixture, and then remove the metal
fixture.

Y2-axis metal fixture

Nut (M6)

Retaining
screws (M6)

Item DISCO Part ID

FIXTURE(Y)
Y1 and Y2-axis metal fixtures
LKFY-030009-0

5 Close the cover [P], and then tighten the retaining screw of the cover.

Continued in the next section.

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1-4-3. Removing the Tying Bands of the Upper Arm and Lower Arm
Operation flow

1-4-3-1 Removing the Transfer Axis Cover

1-4-3-2 Removing the Upper Arm Tying Bands

1-4-3-3 Removing the Lower Arm Tying Bands

1-4-3-4 Mounting the Transfer Axis Cover

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1-4-3-1. Removing the Transfer Axis Cover

Procedures for removing the transfer axis cover

CAUTION

The transfer axis cover removed when performing maintenance work on the
machine should be placed far enough from the working area
Also make sure to replace the removed the transfer axis covers immediately after the
maintenance work is completed. If the transfer axis covers are placed against the
machine during operations, they may fall when an earthquake or other accident occurs
and injure maintenance personnel at work.

Procedure
Step No.
(Continued from the previous section)
1 Open the arm section cover.
2 Unscrew the cover retaining screws (upper) (truss head screws, 2 places).

Cover retaining screw (upper)

Transfer axis cover

(upper)

Transfer axis cover

(lower)

Cover retaining screw (lower)

Right side

3 Remove the transfer axis cover (upper). Then place it sufficiently away from the working
area.
・To disengage the transfer axis cover (upper), pull the lower part of the cover toward you
and lift it up.
4 Unscrew the cover retaining screws (lower) (truss head screws, 2 places).
5 Remove the transfer axis cover (lower). Then place it sufficiently away from the working
area.
・To disengage the transfer axis cover (lower), pull the lower part of the cover toward you
and lift it up.

Continued in the next section.

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1-4-3-2. Removing the Upper Arm Tying Bands

Procedures for removing the upper arm tying bands

Procedure
Step No.
(Continued from the previous section)
1 Remove the tying bands at the locations shown in the drawings below by cutting them
with the nipper.

Tying band

Upper arm Tying band

Continued in the next section.

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1-4-3-3. Removing the Lower Arm Tying Bands

Procedures for removing lower arm tying bands

Procedure
Step No.
(Continued from the previous section)
1 Remove the tying bands at the locations shown in the drawings below by cutting them
with the nipper.

Tying band

Lower arm

Tying band

Continued in the next section.

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1-4-3-4. Mounting the Transfer Axis Cover

Procedures for mounting the transfer axis cover

Procedure
Step No.
(Continued from the previous section)
1 Reinstall the transfer axis cover (upper) and transfer axis cover (lower) in its original
position.

Transfer axis cover

(upper)

Transfer axis cover

(lower)

Right side

Continued in the next section.

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1-4-4. Removing the Metal Fixtures of the Spinner Axis

Procedures for removing the metal fixtures of the spinner axis

Procedure
Step No.
(Continued from the previous section)
1 Loosen the retaining screw (M5) of the spinner axis metal fixture, and then remove the
metal fixture.

Spinner axis metal fixture

Retaining screw (M5)

Item DISCO Part ID

FIXTURE
Spinner axis metal fixture
LJTS-910032-0

2 Remove the tape which secures the nozzle.

Nozzle

Continued in the next section.

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1-4-5. Removing the Retaining Screws of the Arm Section Cover

Used for Transport Purpose
Procedure to remove the retaining screws of the arm section cover used for transport purpose

Procedure
Step No.
(Continued from the previous section)
1 Be ready with the retaining screws of the arm section cover used for installation purpose.
・The retaining screws of the arm section cover used for installation purpose are stored
(attached with a tape) in the area indicated in the following drawing.
Area where the retaining screws of
the arm section cover used for
installation purpose are stored

Top side

2 Remove the retaining screws of the arm section cover used for transport purpose.
・The screw head of the retaining screws of the arm section cover used for transport
purpose is red.

Retaining screw of the

arm section cover used
for transport purpose

Item DISCO Part ID

Retaining screw of the arm section BOLT
cover used for transport purpose LJKJ-911157-0

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Procedure to remove the retaining screws of the arm section cover used for transport purpose
(Continued)

Step No. Procedure

2 ・As shown below, a total of 4 retaining screws of the arm section cover used for
(Continued) transport purpose are attached to the machine.
Positions to attach the retaining
screws of the arm section cover
used for transport purpose

Top side

3 Store all the retaining screws that have been removed in the previous step, keeping in
mind that they may become necessary again when the machine is moved in the future.
4 Insert the retaining screws of the arm section cover used for installation purpose
(M5  16) into the screw holes where the retaining screws used for transport purpose have
been attached. After tightening them firmly, attach the arm section cover.
・A total of 4 retaining screws of the arm section cover used for installation purpose need
to be attached.
5 Close the arm section cover.

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1-5. Piping and Wiring Connection

Operation flow

1-5-1 Mounting the Status Indicator

1-5-2 Connecting Piping

1-5-3 Connecting Power Supply Wiring

B-31
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Equipment you must have ready

3 mm Allen wrench
18 mm wrench
24 mm wrench
30 mm wrench
Flatblade screwdriver (for wire clamp)
Phillips screwdriver (for power connection)
Torque driver
When braided hoses are used for piping
Pipe line Machine side Recommended hose (mm)
Rinse water [optional accessory] Rc1/4 Braided hose
(Spinner cleaning water) Braided hose joint 15 × 9
Clean air Rc3/8 Braided hose
Braided hose joint 22 × 15
Air Rc3/8 Braided hose
Braided hose joint 22 × 15
Deionized water Rc3/8 Braided hose
Braided hose joint 22 × 15
Cooling water IN Rc1/4 Braided hose
Braided hose joint 15 × 9
Cooling water OUT Rc1/4 Braided hose
Braided hose joint 15 × 9
When polyurethane tubes are used for piping

We can offer polyurethane tubes for piping of rinse [optional accessory] (spinner cleaning water) and
IN/OUT of cooling water.
Pipe line Machine side Recommended hose (mm)
Rinse water [optional accessory] One-touch joint Polyurethane tube
(Spinner cleaning water) 12 × 8
Cooling water IN One-touch joint Polyurethane tube
12 × 8
Cooling water OUT One-touch joint Polyurethane tube
12 × 8

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1-5-1. Mounting the status indicator

Procedures for mounting the status indicator

Step No. Procedure

1 Open the cover [P].
2 Run the status indicator connector cable into the machine via hole of the cover [P]. Then
secure the status indicator by the lock nut.

Lock nut

[P]

Status indicator connector cable (JSTC)

3 Connect the status indicator connector cable (JSTC) to the mating machine-side
connector.

Continued in the next section.

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1-5-2. Connecting piping

Procedures for connecting piping

WARNING

When using N2 gas as a substitute for clean air, install a main valve which
satisfies all the requirements listed below for the N2 supply line at the facilities
・The main valve is located close to the machine.
・The main valve is used only for the machine.
・The main valve is located at the place to which operators can easily access to open
or close it.

When using N2 gas as a substitute for clean air, close the main valve of the N2
gas supply line at the facilities before performing maintenance of the machine
N2 gas emission may cause oxygen deficiency, thereby incurring serious personal
illness or death.

When using N2 gas as a substitute for clean air, install a ventilator with an
adequate capacity in order to maintain sufficient oxygen concentration, and
make sure to operate the ventilator during the machine operation
Also, keep your face away from the N2 gas emission part of the cutting area and
spinner area while N2 gas is supplied and shortly after the supply is stopped since the
oxygen concentration is low. N2 gas emission may cause oxygen deficiency, thereby
incurring serious personal illness or death.

If the ventilator stops due to a power failure or breakage when using N2 gas as a
substitute for clean air, stop the machine operation and close the main valve of
N2 gas
N2 gas emission may cause oxygen deficiency, thereby incurring serious personal
illness or death.

When the piping connection work for the cutting water and cooling water is
completed, check looseness of connections for the joints
If water leakage should occur, the floor surface and downstairs might be damaged.

A hose and hard piping line between the machine drain port and the plant-side
drain inlet must be inclined
If the hose and hard piping line are positioned in parallel to or higher than the drain
port, water remains in the hose, which may cause water leakage from the hose joint. It
may also cause water leakage from the water case.

B-34
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Procedures for connecting piping (Continued)

CAUTION

Ensure that air supply connection coupling is properly completed

Inadequate connection will cause the pipe to be disconnected. If the air pipe is
disconnected during spindle rotation, the spindle may fail.

Perform piping operation carefully so as not to mix up piping of the cutting water
and cooling water hoses
Since water quality between wheel and cooling water is different, a mistake in piping
of wheel and cooling water may damage workpieces or adversely affect processing
accuracy.

Step No. Procedure

1 As shown below, connect the hoses to the drain and duct exhaust ports at the rear of the
machine.
・Apply silicone sealant to the hose and cuff joints.

Left side
Duct port connection Drain port connection

Apply silicone sealant Apply silicone sealant

B-35
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Procedures for connecting piping (Continued)

Step No. Procedure

2 Before connecting the joints to the manifold, which is located at lower right side of the
machine, check the position of the utility supply port of the manifold.
3 Using a joint, connect the braided hoses or polyurethane tubes to each utility supply port
using joints, as illustrated below.
・It is recommended that the customer furnish braided hose joints
as indicated in the above figure. The braided hose joint is provided as an optional
accessory.
・One-touch joints for connection of the IN/OUT port of cooling water and the rinse port
[optional accessory] are available as optional accessories.

Right side
Manifold

Rinse [Optional accessory]

(Spinner cleaning water)
Clean air

Air

Deionized water
Cooling water IN
Cooling water OUT
Braided hose
joint

4 Check looseness of connections for the joints.

Continued in the next section.

B-36
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1-5-3. Connecting Power Supply Wiring

Operation flow

1-5-3-1 Removing the Breaker Section Cover

1-5-3-2 Connecting the Power Supply Wiring

1-5-3-3 Mounting the Breaker Section Cover

1-5-3-4 Completion of Connecting the Power Supply Wiring

Safety items for connecting power supply wiring

WARNING

When you make power cable connection, make sure to connect the PE line of
the cable first and confirm its connection
If you come into contact with the machine when its PE line is not connected, you may
receive an electric shock that could result in severe injury or death.

When connecting the power cable terminal to the power circuit breaker, be sure
to use a calibrated torque driver and tighten the screws of the breaker terminal
block with the specified torque(3 N•m)
If the torque is not just enough, the connection between the power cable terminal and
breaker terminal block may heat up, which could cause a fire.

Do not turn ON the facility power source until the machine and the floor
completely dry when they are wet with water
Otherwise you may get an electric shock which could result in serious injury or death.
Shut off power supply at the circuit breaker of this machine and facility power source,
lock them out with padlocks or the like, and then wipe the machine and the floor dry.

B-37
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Safety items for connecting power supply wiring (Continued)

WARNING

Before connecting the power cables, be sure to shut OFF the facility power
source
If you connect power cables while the electricity is flowing through the machine, you
may receive an electric shock that may lead to serious injury or death.

Connect the PE line so that it is not strained even when a load is applied to the
cable
If the PE line is disconnected, it could cause electric shock due to electric leakage.
To prevent the PE line from disconnecting under the strain, make sure that the PE line
of the power cable is at least 150 mm longer than the L1/L2/L3 lines
L1
At least 150 mm longer
L2
than the other lines.
L3
PE

CAUTION

Connect the power cable L1, L2, and L3 lines to the respective designated
positions on the breaker terminal block
If the L1/L2/L3 lines are connected in the wrong positions, the machine will not
operate properly and there is a risk that it will be damaged or processing accuracy will
be affected. Connect the power cable in the correct positions on both the plant facility
side and the machine side.

Breaker
L1 L2 L3 terminal block

B-38
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Power cable list

The following power cables are prepared for this machine as optional accessory.
Nominal cross -
Length sectional area Number Terminal Terminal
Specification (m)
Part No. mm2
of for power for PE
AWG terminals wire wire
equivalent
3 EKFJ-010355-0 12 4 4 M5 M5
20 A 5 EKFJ-010356-0 12 4 4 M5 M5
Standard 7 EKFJ-010357-0 12 4 4 M5 M5
(200 to 240 VAC) 3 EKFJ-010358-0 8 10 4 M5 M5
30 A 5 EKFJ-010359-0 8 10 4 M5 M5
7 EKFJ-010360-0 8 10 4 M5 M5
Transformer 3 EKFJ-010355-0 12 4 4 M5 M5
specification 20 A/
5 EKFJ-010356-0 12 4 4 M5 M5
30 A
(380 to 415 VAC) 7 EKFJ-010357-0 12 4 4 M5 M5

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1-5-3-1. Removing the Breaker Section Cover

Procedures for removing the circuit breaker section cover
[Common between standard and transformer specification]

Procedure
Step No.
(Continued from the previous section)
1 Turn the circuit breaker lever to the <OFF> position.

2 Insert the cover unlock key to the cover lock of the circuit breaker section cover to release
the lock.

Circuit breaker
section cover

Cover lock

3 Turn the circuit breaker lever to the <RESET> position to remove the circuit breaker
section cover.
・When the circuit breaker lever is at the <ON> position, the circuit breaker section cover
cannot be removed.
・When the circuit breaker section cover is removed, the circuit breaker lever cannot be
turned to the <ON> position.

RESET
position

Continued in the next section.

B-40
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1-5-3-2. Connecting the Power Supply Wiring

Procedures for connecting the power supply wiring

Step No. Procedure

(Continued from the previous section)
1 Have on hand the cable, terminals and other items required for power cable connection.
・Make sure that the PE line of the power cable is at least 150 mm longer than the
L1/L2/L3 lines.
L1
At least 150 mm longer
L2
than the other lines.
L3
PE

2 Route the power cable to the inner side of the machine, as shown below.
・Screw down the retaining screw (M4) of the nylon clip to firmly secure the power
cable so that it does not move.

Power cable

Left side

Nylon clip
・Firmly secure it.

B-41
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Procedures for connecting power supply wiring (Continued)

Step No. Procedure

3 Remove the retaining screws (2 places) of the terminal block cover.
Terminal block cover

Retaining
screw

4 Remove the terminal block cover.

B-42
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Procedures for connecting power supply wiring (Continued)

Step No. Procedure

5 Connect the power cable PE line (ground line) to the PE terminal block and tighten the
screws of the PE terminal block with the specified torque (3 N・m).
・In power cable connecting, be sure to connect the PE line first.
[Standard specification]

Terminal board

PE
L1 L2 L3

Leakage breaker

PE terminal
bar

PE = Ground (GND)

[Transformer specification (380 to 415 VAC)]

PE
Leakage
breaker
L1 L2 L3

PE terminal
bar

Terminal
Circuit breaker
board

PE = Ground (GND)

B-43
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Procedures for connecting power supply wiring (Continued)

Step No. Procedure

6 Connect the power cable L1/L2/L3 lines to the breaker terminal block and tighten the
screws of the breaker terminal block with the specified torque (3 N・m).
・When connecting the optional transformer or UPS (Uninterruptible Power Supply) unit,
they must be connected with the machine before connecting the machine to the facility
power source.
[Standard specification]

Terminal board

PE
L1 L2 L3

Leakage breaker

PE terminal
bar

PE = Ground (GND)
[Transformer specification (380 to 415 VAC)]
PE
Leakage
breaker
L1 L2 L3

PE terminal
bar

Terminal
Circuit breaker
board

PE = Ground (GND)

7 Check to make sure that the PE line terminal is not strained when you lightly pull down
the power cable by hand.
・If the PE line terminal is strained, it means that the PE line is not long enough. Use a PE
line with enough length.

B-44
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Procedures for connecting power supply wiring (Continued)

Step No. Procedure

8 Replace the terminal block cover back into the initial position.
Terminal block cover

Retaining
screw

Continued in the next section.

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1-5-3-3. Mounting the Breaker Section Cover

Procedures for mounting the circuit breaker section cover

Procedure
Step No.
(Continued from the previous section)
1 Attach the circuit breaker section cover.

Circuit breaker
section cover

2 Lock up the circuit breaker lever with a padlock or the like.

Continued in the next section.

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1-5-3-4. Completion of Connecting the Power Supply Wiring

Procedures for completion of connecting power supply wiring

Procedure
Step No.
(Continued from the previous section)
1 Connect the power cable to the facility power source.
・When you make the cable connection to the facility power source, be sure to connect
the PE wire first using a adequately long PE wire.
・Before connecting the machine to the facility power source, connect the cables of
optional accessories such as a transformer and UPS (Uninterruptible Power Supply).

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1-6. Mounting the Machine Outer Cover

Machine outer cover configuration
・The cover [P] is to be secured with screws before the cover [A] is installed.
・The cover [B] is to be installed before the cover [A].

[P]

[A] [B] [C] [D] [E]

Front side Right side

[R]
[S] [U]

[F] [G] [H] [I]

Rear side Left side

:Outer cover lock position

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Machine outer cover configuration (Continued)

・The [V] is to be secured with screws.

[V]

Top side

Retaining screw

Procedures for mounting the machine outer cover

Step No. Procedure

1 Install the covers [V] on the top surface of the machine.

[V]
Mounting screws

Top side

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Procedures for mounting the machine outer cover (Continued)

Step No. Procedure

2 Mount the cover [P] with the mounting screws.
Mounting screw (M4)
: Position of the
mounting screws

[P] Mounting screw (M4)

Front side

3 Install the cover [B].

[B]

Front side

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Procedures for mounting the machine outer cover (Continued)

Step No. Procedure

4 Install the covers [A], [C], [D], [E], [F], [G], [H], [I], [R], [S] and [U].

[P]

[A] [B] [C] [D] [E]

Front side Right side

[R]
[S] [U]

[F] [G] [H] [I]

Rear side Left side

:Outer cover lock position

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1-7. Leveling the Machine with the Leveling Mount

Operation flow

1-7-1 Mounting the Spirit Level

1-7-2 Removing the Machine Outer Cover

1-7-3 Leveling the Machine

Equipment you must have ready

Spirit level (minimum tick: 20 μm/m)

22 mm wrench
Safety shoes and protective gloves

B-52
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1-7-1. Mounting the Spirit Level

Mounting the spirit level

WARNING

Make sure to wear safety shoes and protective gloves throughout the machine
hoisting/lowering process
Your feet or hands could be caught or cut off by the machine while the machine is
hoisted or lowered.

Step No. Procedure

1 Wear the safety shoes and protective gloves.
2 Turn ON the facility power supply.
3 Unlock the lever of the circuit breaker on the left of the machine, and then turn ON the
circuit breaker.
4 Insert the key into the main switch.
5 Rotate the key to the "START" position to turn ON the machine.
6 Press the <System Initial> button.
・System initialization will be effected.
7

With the button on the software keyboard, move the chuck table to a
location beneath the spindle section.
8 Open the splash cover.
9 Make sure that there is no dirt or other foreign matters on the table base upper surface.
Place a spirit level on the table base.

Continued in the next section.

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1-7-2. Removing the Machine Outer Cover

Procedures for removing the machine outer cover

Procedure
Step No.
(Continued from the previous section)
1 Turn OFF the main switch and then remove it.
2 Turn OFF the circuit breaker and then lock its lever with a padlock or the like.
3 Shut OFF the facility power supply.
4 Remove machine outer covers [A], [B], [C], [D], [E], [F], [G], [H] and [I].
・The cover [B] cannot be removed until the cover [A] is removed.

[P]

[A] [B] [C] [D] [E]

Front side Right side

[R]
[S] [U]

[F] [G] [H] [I]

Rear side Left side

:Outer cover lock position

Continued in the next section.

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1-7-3. Leveling the machine

Procedures for leveling the machine

WARNING

Do not place your feet or hands under the machine during jacking operation
If the machine should topple down during jacking operation, you may be caught under
the machine, or if the leveling mount should come off, your feet or hands may be
caught or cut off by the machine.

The leveling mount must be adjusted so that the distance between the machine
bottom surface and floor surface becomes between 51 and 71 mm
If the leveling mount is jacked up at a higher or lower position than the range between
51 and 71 mm, the leveling mount may come off. If the leveling mount comes off
during jacking operation, your feet or hands may be caught or cut off by the machine.
If a kinematic cassette is used, adjust the leveling mount so that the distance between
the machine bottom and floor surface will be between 53 and 71 mm. When the
distance between the horizontal datum plane and the floor (standard height for load
ports) is 900 mm, the position of the cassette stage should be adjusted by data setting.

B-55
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Procedures for leveling the machine (Continued)

Procedure
Step No.
(Continued from the previous section)
1 Rotate the leveling mount handle as needed to level the machine alternately in the front-
rear and left-right directions.
・Perform the operation above for all 4 leveling mounts.
When Standard cassette is used
・When jacking up the machine, ensure that the distance to the floor surface does not
exceed 51 to 71 mm.
(When the machine is jacked up by 59 mm, chuck table surface is positioned 900 mm
above the floor.)
If a kinematic cassette is used
・When jacking up the machine, ensure that its distance to the floor surface does not
exceed 53 to 71 mm.
When the distance between the horizontal datum plane and the floor (standard height
for load ports) is 900 mm, it is necessary to change data for the cassette plate position.
Please consult with DISCO.

Dowel pin Handle

Counterclockwise handle
rotation raises the machine.

Standard specifications cassette :

51 to 71 mm
Kinematic specifications cassette :
53 to 71 mm

2 With a spirit level, level the machine until the spirit level reads 0.02 mm/1 m or lower for
both the X- and Y-direction.
Table base

Y-direction Spirit level

X-direction

X-direction
Y-direction

Front of the machine

3 Remove the spirit level from the table base surface.

4 Secure the machine to the floor with the machine anchors.
→For the anchoring procedure:
See Section 1-8 [Mounting the Machine Anchors [Optional Accessory]] of this
Chapter.

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1-8. Mounting the Machine Anchors [Optional Accessory]

Equipment you must have ready

13 mm wrench
19 mm wrench
Safety shoes and protective gloves

Procedures for mounting the machine anchors

WARNING

Wear safety shoes and protective gloves during the operation

Otherwise, your feet and hands could be caught or cut off by the machine.

Step No. Procedure

1 Wear safety shoes and protective gloves.
2 As shown below, secure the machine to the floor surface with the machine anchors.
・The installing positions of the machine anchors are indicated with arrows on the main
frame.
・The customer is requested to arrange taps on the floor and bolts (M12).
・For the bolts (M12), please prepare property class 10.9 bolts classified under ISO 898.

Elongated hole

Top side

B-57
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Procedures for mounting the machine anchors (Continued)

Step No. Procedure

2
(Continued)

Metal fixture
Anchor bolt

(Unit: mm)

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1-9. Completion of Installation Operation

Procedures for completion of installation operation

WARNING

When the installation work is completed, check that there is no water leakage
from any tube while feeding the cutting water and cooling water
If water leakage should occur, the floor surface and downstairs might be damaged.

Step No. Procedure

1 Install machine outer covers [A], [B], [C], [D], [E], [F], [G], [H] and [I] which were
removed for leveling purposes.
2 Turn ON the facility power supply.
3 Unlock the lever of the circuit breaker and then turn ON the circuit breaker.
4 Insert the key into the main switch.
5 Turn ON the machine by rotating the key to the "START" position.
6 Press the <System Initial> button.
・System initialization will be effected.
7 Make sure that the air, clean air and deionized water pressure displayed on the SENSOR
STATUS screen indicate as follows:
Air : 0.5 MPa or higher
Clean air : 0.5 MPa or higher
Deionized water : 0.3 MPa or higher
→For the pressure adjustment procedures;
See Section 4 [Sensor Adjustment] of Chapter B in the Maintenance Manual.

8 Mount the chuck table.

→For the procedures to mount the chuck table:
See Section 1 [Chuck Table Replacement] of Chapter B in the Maintenance Manual.
9 Press the <Spindle> button.
10 Press the <Cutting Water> button.

B-59
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Procedures for completion of installation operation (Continued)

Step No. Procedure

11 Check that no water leaks from the piping system of cooling water and deionized water at
the rear of the machine.

Right side

Deionized water IN
Cooling water IN
Cooling water OUT

12 Turn OFF the main switch and then pull out the key.
13 Turn OFF the circuit breaker at the left of the machine. Lock out the circuit breaker lever
with a padlock or the like.

14 Shut off the facility power supply.

15 Close the facility main valve of air.

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Procedures for completion of installation operation (Continued)

Step No. Procedure

16 Remove the [H] cover.

[H]

Left side

17 Check that no water leaks from the drain port of the machine.

Left side
Drain port

18 Install the cover [H].

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2. Transferring Operation
Operation flow

2-1 Terminating the Machine

2-2 Removing the Machine Outer Cover and Status Indicator

2-3 Disconnecting Piping and Wiring

2-4 Mounting the Drive Axis Metal Fixtures

2-5 Removing the Leveling Mount

Transferring the Machine

→See Section 1-2 of this Chapter

Hoisting and Lowering the Machine

→See Section 1-1 of this Chapter

Installing the Machine

→See the sections 1-3 to 1-9 of this Chapter

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Safety items for transferring operation

NOTICE

When it is necessary to transfer or dispose of the machine, contact your nearest

DISCO office
DISCO will provide you with detailed information and precautions required for
carrying out such work and manage the machine serial number file at the new
installation site.

Use the safety goggles, protective gloves, stepstools, flashlights and alcohol
which are available in your factory or comply with your factory's standards
Safety goggles, protective gloves, stepstools, flashlights and alcohol are not supplied
with the machine.

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2-1. Terminating the Machine

Operation flow

Verification of stoppage of the cooling and cutting water, and completion of initialization
→See Section 10-1 [Verification of Stoppage of Cooling and Cutting Water Initialization] of Chapter
B in the Operation Manual.

Cleaning operation
→See Section 10-2 [Cleaning Operation] of Chapter B in the Operation Manual.

For CE-marking specification machine:

Moving the spinner table
Before turning the power OFF, move the spinner table down to the lowest position.
Press the <System Initial> button to effect system initialization.

Press the <F3> button on the ENGINEERING MAINTENANCE screen [7.0].

・The I/O CHECK screen appears.
→See Section 4 [Sensor/Solenoid Valve Check] of Chapter C in the Maintenance Manual.

Using the I/O CHECK screen, move the spinner table down to the lowest position.
・Follow the procedure below to move the spinner table down to the lowest position.
1. Turn <2040: Move S/T up/down> OFF.
2. Turn <2063: Move S/T down> ON.

Turning the power OFF

→See Section 10-3 [Turning the Power OFF] of Chapter B in the Operation Manual.

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2-2. Removing the Machine Outer Cover and Status

Indicator
Safety items for operation with the machine outer cover removed

CAUTION

The machine outer covers removed when performing maintenance work on the
machine should be placed far enough from the working area
Also make sure to replace the removed covers immediately after the maintenance
work is completed. If the covers are placed against the machine during operations,
they may fall when an earthquake or other accident occurs and injure maintenance
personnel at work.

Operation flow

2-2-1 Turning OFF the Power

2-2-2 Removing the Machine Outer Cover

2-2-3 Removing the Status Indicator

Equipment you must have ready

Item DISCO Part ID

Unlock key KEY (FASTENER)
LHLC-010010-0

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2-2-1. Turning OFF the Power

Procedures for turning OFF the power

Step No. Procedure

1 Make sure that the machine power is OFF.
2 Turn OFF the circuit breaker on the left of the machine. Lock out the circuit breaker lever
with a padlock or the like.

3 Turn OFF the facility power supply.

Continued in the next section.

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2-2-2. Removing the Machine Outer Cover

Machine outer cover configuration
→See Section 1-6 [Mounting the Machine Outer Cover] of this Chapter.

How to unlock the outer cover

To release the cover lock, insert the unlock key into the cover lock section and unlock the cover as shown
below.

Cover lock
Cover unlock key

Insert the key

and press it down.

Procedures for removing the machine outer cover

WARNING

Before the operation, turn OFF the machine power and facility power source
The machine has hazardous sections where your fingers/hands or other parts of your
body may be caught or cut off.

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Procedures for removing the machine outer cover (Continued)

Procedure
Step No.
(Continued from the previous section)
1 Remove the covers [A], [B], [C], [D], [E], [F], [G], [H], [I], [R], [S] and [U].
・The cover [B] cannot be removed until the cover [A] is removed.

[P]

[A] [B] [C] [D] [E]

Front side Right side

[R]
[S] [U]

[F] [G] [H] [I]

Rear side Left side

:Outer cover lock position

2 Store the removed outer covers sufficiently away from the working area.

Continued in the next section.

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2-2-3. Removing the Status Indicator

Procedures for removing the status indicator

Procedure
Step No.
(Continued from the previous section)
1 Remove the cover [P]'s mounting screws (M4) which are located at both upper and lower
part of the cover.
Mounting screw (M4)
: Position of the
mounting screws

[P] Mounting screw (M4)

Front side

2 Open the cover [P].

3 Disconnect the connector cable of the status indicator (JSTC).

Lock nut

[P]

Connector cable (JSTC)

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Procedures for removing the status indicator (Continued)

Step No. Procedure

4 Unfasten the lock nut of the status indicator, and then remove the status indicator.
5 Wrap the status indicator with packaging material.

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2-3. Disconnecting Piping and Wiring

Equipment you must have ready

30 mm wrench
Safety shoes and protective gloves

Procedures for disconnecting piping and wiring

WARNING

Do not turn ON the facility power source until the machine and the floor
completely dry when they are wet with water
Otherwise you may get an electric shock which could result in serious injury or death.
Shut off power supply at the circuit breaker of this machine and facility power source,
lock them out with padlocks or the like, and then wipe the machine and the floor dry.

Be sure to disconnect the PE line last after disconnecting power supply cables
If you come into contact with the machine that is not grounded, you may receive an
electric shock which could result in serious injury or death.

The wiring disconnection must be made after shutting OFF the machine power
and the facility power supply
If you make any wiring disconnection while power is supplied, you may receive an
electric shock which could result in serious injury or death.

Wear protective gloves and goggles to clean the inside of the machine and use
tweezers as well to remove broken workpieces
If you perform such work with bare hands, they may be cut or stabbed by the
workpiece.

Do not put your fingers or hands at the drive sections or in the operation space
while the drive sections are operating
Also, make sure that all axes have come to a complete stop before performing the
operation. Otherwise, they may be caught or cut off.

When using N2 gas as a substitute for clean air, install a ventilator with an
adequate capacity in order to maintain sufficient oxygen concentration, and
make sure to operate the ventilator during the machine operation
Also, keep your face away from the N2 gas emission part of the cutting area and
spinner area while N2 gas is supplied and shortly after the supply is stopped since the
oxygen concentration is low. N2 gas emission may cause oxygen deficiency, thereby
incurring serious personal illness or death.

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Procedures for disconnecting piping and wiring (Continued)

WARNING

If the ventilator stops due to a power failure or breakage when using N2 gas as a
substitute for clean air, stop the machine operation and close the main valve of
N2 gas
N2 gas emission may cause oxygen deficiency, thereby incurring serious personal
illness or death.

Do not put your fingers or hands into any air-driven section or operation space
when the air supply is switched ON/OFF
Even when the machine itself is turned off, the air-driven parts may move when the
air supply is switched on or off. In case your fingers or hands are placed in any of
these moving sections or operation space, they may be caught or cut off.

Lock out the water, air and clean air main valves
If any of the main valves (water, air or clean air) is opened by other persons during
machine installation or maintenance, it may cause an accident or machine failure.

Step No. Procedure

1 Disconnect the power cable from the facility power source.
・When disconnecting the power cable, be sure that the PE wire is disconnected last.
2 Shut OFF the facility-side master valve completely and disconnect pipes.
3 Wear the safety shoes and protective gloves.
4 Drain water from the machine.
・When the floor or machine gets wet, wipe it dry with a cloth or the like.
5 Remove the machine anchors.
→See Section 1-8 [Mounting the Machine Anchors [Optional Accessory]] of this Chapter.

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2-4. Mounting the Drive Axis Metal Fixtures

Operation flow

2-4-1 Mounting the X-axis Metal Fixture

2-4-2 Mounting the Y (Y1 and Y2) -axis Metal Fixtures

2-4-3 Mounting the Tying Bands of the Lower Arm and Upper Arm

2-4-4 Mounting the Metal Fixtures of the Spinner Axis

2-4-5 Attaching the Retaining Screws of the Arm Section Cover Used for Transport Purpose

Safety items for mounting the drive axis metal fixtures

WARNING

Perform the operation after the machine power, facility power supply and air are
shut OFF
If your fingers or hands are placed in the drive section during axis metal fixture
installation, they may be caught or cut off.

Equipment you must have ready

3 mm Allen wrench
4 mm Allen wrench
5 mm Allen wrench
10 mm wrench
Phillips screwdriver
Nipper
Tying band

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2-4-1. Mounting the X-axis metal fixture

Procedures for mounting the X-axis metal fixture

Step No. Procedure

1 Remove all the metal fixtures and retaining screws from the axis metal fixtures storage
space on the front side of the machine.
For spinner axis For cover retaining screws

For X-axis For Y-axis For Z-axis

Axis metal fixtures storage space

Front side

2 Secure the X-axis metal fixture with the retaining screws (M6).

Nut (M6)

Retaining
screw (M6)

X-axis metal
fixture

Item DISCO Part ID

FIXTURE(X)
X-axis metal fixture
LNLX-010036-0

Continued in the next section.

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2-4-2. Mounting the Y (Y1 and Y2) -axis metal fixtures

Procedures for mounting the Y (Y1 and Y2) -axis metal fixtures

Procedure
Step No.
(Continued from the previous section)
1 Secure the Y1-axis metal fixture with the retaining screws (M6).

Retaining
screws (M6)

Y1-axis metal
fixture
Nut (M6)

Item DISCO Part ID

FIXTURE(Y)
Y1 and Y2-axis metal fixtures
LKFY-030009-0

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Procedures for mounting the Y (Y1 and Y2) -axis metal fixtures (Continued)

Step No. Procedure

2 Remove the cover [P]'s mounting screws (M4) which are located at both upper and lower
part of the cover.
Mounting screw (M4)
: Position of the
mounting screws

[P] Mounting screw (M4)

Front side

3 While holding the right edge of the cover [P], open it toward the left side of the machine.

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Procedures for mounting the Y (Y1 and Y2) -axis metal fixtures (Continued)

Step No. Procedure

4 Secure the Y2-axis metal fixture with the retaining screws (M6).

Y2-axis metal fixture

Nut (M6)

Retaining
screws (M6)

Item DISCO Part ID

FIXTURE(Y)
Y1 and Y2-axis metal fixtures
LKFY-030009-0

5 Close the cover [P], and then tighten the retaining screw of the cover.

Continued in the next section.

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2-4-3. Mounting the Tying Bands of the Lower Arm and Upper Arm
Operation flow

2-4-3-1 Removing the Transfer Axis Cover

2-4-3-2 Mounting the Lower Arm Tying Bands

2-4-3-3 Mounting the Upper Arm Tying Bands

2-4-3-4 Mounting the Transfer Axis Cover

2-4-3-1. Removing the Transfer Axis Cover

Procedures for removing the transfer axis cover

CAUTION

The transfer axis cover removed when performing maintenance work on the
machine should be placed far enough from the working area
Also make sure to replace the removed covers immediately after the maintenance
work is completed. If the covers are placed against the machine during operations,
they may fall when an earthquake or other accident occurs and injure maintenance
personnel at work.

→For the procedures for removing the transfer axis cover:

See Section 1-4-3-1 [Removing the Transfer Axis Cover] of this Chapter.

Continued in the next section.

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2-4-3-2. Mounting the Lower Arm Tying Bands

Procedures for mounting the lower arm tying bands

Procedure
Step No.
(Continued from the previous section)
1 Following the procedure below, secure the lower arm with tying bands.
1. Lightly twist the tying band 1 around the lower arm (plate).
2. Pass the tying band 2 through the ring of the tying band 1.
3. Lightly twist the tying band 2 around the absorber.
4. Tighten the tying bands 1 and 2 to secure the lower arm.
5. Cut the extra parts of the tying bands 1 and 2 with a nipper.

Lower arm
(plate)

Tying band1 Absorber

Front side

Tying band2

Left side

Continued in the next section.

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2-4-3-3. Mounting the Upper Arm Tying Bands

Procedures for mounting the upper arm tying bands

Procedure
Step No.
(Continued from the previous section)
1 Following the procedure below, secure the upper arm with tying bands.
1. Lightly twist the tying band 1 around the upper arm (plate).
2. Pass the tying band 2 through the ring of the tying band 1.
3. Lightly twist the tying band 2 around the absorber.
4. Tighten the tying bands 1 and 2 to secure the upper arm.
5. Cut the extra parts of the tying bands 1 and 2 with a nipper.

Absorber

Tying band1 Tying band2

Upper arm
(plate)

Left side
Front side

Continued in the next section.

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2-4-3-4. Mounting the Transfer Axis Cover

Procedures for mounting the transfer axis cover
→For the procedures for mounting the transfer axis cover:
See Section 1-4-3-4 [Mounting the Transfer Axis Cover] of this Chapter.

Continued in the next section.

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2-4-4. Mounting the Metal Fixtures of the Spinner Axis

Procedures for mounting the metal fixtures of the spinner axis

Procedure
Step No.
(Continued from the previous section)
1 Secure the spinner-axis metal fixture with the retaining screw (M5).

Spinner axis metal fixture

Retaining screw (M5)

Item DISCO Part ID

FIXTURE
Spinner axis metal fixture
LJTS-910032-0

2 Secure the nozzle with tape so that it does not move to the spinner table side.
Nozzle
Spinner table

3 Close the arm section cover.

Continued in the next section.

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2-4-5. Attaching the Retaining Screws of the Arm Section Cover

Used for Transport Purpose
Procedure to attach the retaining screws of the arm section cover used for transport purpose

Procedure
Step No.
(Continued from the previous section)
1 Remove the retaining screws of the arm section cover used for installation purpose.

Retaining screw of the

arm section cover used
for installation purpose
(M5  16)

Item DISCO Part ID

Retaining screw of the arm section BOLT
cover used for installation purpose LJKJ-911157-0

・A total of 4 retaining screws of the arm section cover used for installation purpose are
attached to the machine.
Positions to attach the retaining screws of the
arm section cover used for installation purpose

Arm section cover

Top side

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Procedure to attach the retaining screws of the arm section cover used for transport purpose
(Continued)

Step No. Procedure

2 Store all the retaining screws that have been removed in the previous step in the area
indicated in the following drawing by attaching them with a tape, while keeping in mind
that they may become necessary again for installation purpose in the future.
Area where the retaining screws of
the arm section cover used for
installation purpose are stored

Top side

3 Insert the retaining screws of the arm section cover used for transport purpose into the
screw holes where the retaining screws used for installation purpose have been attached.
After tightening them firmly, secure the arm section cover in place.
・Tighten the retaining screws of the arm section cover used for transport purpose by
screwing them down fully into the respective screw hole on the SUS cover.
・A total of 4 retaining screws of the arm section cover used for transport purpose need to
be attached.
4 Close the arm section cover.

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2-5. Removing the Leveling Mount

Equipment you must have ready

22 mm wrench
Safety shoes and protective gloves

Procedures for removing the leveling mount

WARNING

Do not place your feet or hands under the machine during jacking operation
If the machine should topple down while it is jacked up, you may be caught under the
machine, or if the leveling mount should come off, your feet or hands may be caught
or cut off by the machine.

Wear safety shoes and protective gloves during the operation

Otherwise, your feet and hands could be caught or cut off by the machine.

Step No. Procedure

1 Wear safety shoes and protective gloves.
2 With a wrench, rotate the handle of the 4 leveling mounts.
Loosen them equally until all the casters come into contact with the floor.
Handle

Clockwise handle rotation

lowers the machine.

3 Rotate the leveling mount handle clockwise until it does not move. Then remove all the
leveling mounts.
4 Store the removed leveling mounts.
5 Transfer the machine.
→See Section 1-2 [Transferring the Machine] of this Chapter.
6 When hoisting and lower the machine:
→See Section 1-1 [Hoisting and Lowering the Machine by a Crane] of this Chapter.
7 →For the machine installation after transfer:
See the sections 1-3 to 1-9 of this Chapter.

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Contact Information
Immediately get in touch with DISCO if any of the following situation arises:
・where an accident that involves injury or death, or an environment-related accident has occurred or
might occur during the operation of DISCO machine
・where it is necessary to transfer or dispose of DISCO machine

13-11, Omori-Kita 2-chome, Ota-ku, Tokyo 143-8580 Japan

[Overseas Sales Department]
Phone: 81-3-4590-1100 Fax: 81-3-4590-1075

For your nearest DISCO office, visit our website at:

http://www.disco.co.jp
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