2

Silicon & Wafer

CT600 Multi-Crystalline Ingot Furnace

Operating Manual Version 0.6

CT600 Multi-Crystalline Ingot Furnace Version 0.6, 2012-10-02

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Table of Contents Table of Contents

2.7 Workstations for Operating Personnel ...............................36

Table of Contents
2.8 Hazardous Areas ..............................................................38
1 Notes on the Use of this Manual .........................................15 2.9 Safety Labels on the Furnace............................................39
1.1 Validity of this Operation Manual .......................................15 2.10 Escape Routes .................................................................41
1.2 Nameplates.......................................................................16 2.11 Safety Information for Transport, Assembly and
Commissioning .................................................................42
1.3 Used Symbols...................................................................17
1.3.1 Hazard Symbols................................................................18 2.12 Safety Information for Operation........................................43
1.3.2 Prohibition symbols...........................................................20
1.3.3 Mandatory Symbols ..........................................................20
2.13 Safety Information for Work on the Electrical System.........45
1.4 Terms and Abbreviations ..................................................21
2.14 Safety Information for Cleaning, Maintenance and Repair .46
1.5 Definition of Owner/Operator and Operator .......................22
2.15 Residual Risks ..................................................................50
2.15.1 Process Chamber .............................................................51
1.6 Manufacturer's Address ....................................................22 2.15.2 Transformers ....................................................................52
2.15.3 Top Part of Chamber in Parking Position...........................53
2.15.4 Support Crucible ...............................................................53
2 Safety....................................................................................23 2.15.5 Melting Crucible ................................................................54
2.15.6 Hot Zone Integrated Safety Barrier....................................55
2.1 Intended Use ....................................................................23 2.15.7 Cooling Water ...................................................................55
2.15.8 Chemicals.........................................................................57
2.2 General Safety Information................................................24 2.15.9 Voltage supply ..................................................................57
2.2.1 CE-marking.......................................................................24 2.15.10 Process Control ................................................................58
2.2.2 Safety and Warning Labels ...............................................25 2.15.11 Covers on Live Parts.........................................................58
2.2.3 Owner/Operator Duty ........................................................25 2.15.12 Screw Jack .......................................................................59
2.2.4 Personnel Duty .................................................................26
2.2.5 Safety Inspections by the Manufacturer.............................26 2.16 Emergency .......................................................................59
2.2.6 Safety Inspections by the Owner/Operator ........................26 2.16.1 What to Do in the Event of an Emergency .........................59
2.16.2 Restarting after an Emergency..........................................60
2.3 Personnel Qualification .....................................................27
2.3.1 General.............................................................................27
2.3.2 Personnel Training............................................................28 3 Technical Data .....................................................................61
2.4 Safety Equipment..............................................................29 3.1 Technical Data – Furnace .................................................61
2.4.1 Safety Chain .....................................................................30
2.4.2 Removable Metal Grid.......................................................30 3.2 Specification of cooling water ............................................62
2.4.3 Main Power Switch............................................................31
2.4.4 Emergency Stop Button ....................................................31 3.3 Specification of Argon .......................................................62
2.4.5 Two-hand control ..............................................................32
2.4.6 Protective Circuit...............................................................33 3.4 Specification of Compressed Air........................................63
2.4.7 Insulation Monitoring (IT)...................................................33
2.4.8 Over current Protection Devices........................................33
2.4.9 Covers on Live Parts.........................................................33
4 Delivery Scope, Transport and Storage..............................64
2.4.10 Safety Relief Valves..........................................................33
2.4.11 Final Safety Barriers for Melt Leak.....................................33
2.4.12 Electrical Equipment .........................................................33 4.1 Delivery Scope..................................................................64
2.4.13 Process Recording............................................................34
4.2 Transport ..........................................................................65
2.5 Safety Signals...................................................................35
2.5.1 "Movement" Signal Towers ...............................................35 4.3 Instructions for Transport ..................................................66
2.5.2 "Messages and warnings" Signal Tower ............................35 4.3.1 Chamber...........................................................................66
4.3.2 Control Cabinet .................................................................68
4.3.3 Hot Zone...........................................................................69
2.6 Personal Protective Equipment .........................................35

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Table of Contents Table of Contents

4.4 Storage.............................................................................70 6.12 Process Procedure Schematically .....................................97

5 Assembly and Installation ...................................................71 7 Control Elements and Software ..........................................98

5.1 Requirements ...................................................................71 7.1 Control Elements ..............................................................98

5.1.1 Hall ...................................................................................72 7.1.1 Control Elements on the Control Cabinet...........................98
5.1.2 Utility Supply.....................................................................72 7.1.2 Two-hand control ............................................................101
5.1.3 Cooling Water Supply .......................................................73 7.1.3 "Movement" signal unit....................................................102
5.1.4 Water Filter .......................................................................73 7.1.4 "Messages, warnings and alarms" signal unit ..................102
5.1.5 Process Gas Supply..........................................................73
5.1.6 Voltage Supply..................................................................73 7.2 Main Switches at the Furnace System.............................103
5.1.7 Vacuum Pump Station ......................................................73
7.3 Starting Multi Crystallisation Furnace software ................106
5.2 Requirements for Erection.................................................74

8 Preparation and Operation ................................................108

6 Technical Description of the Furnace .................................75
8.1 Loading of Melting Crucible.............................................108
6.1 General overview ..............................................................75
8.2 Open Chamber before Process .......................................111
6.2 Process Chamber Components.........................................78
6.2.1 Exterior Process Chamber ................................................78 8.3 Loading the Crucible into the Bottom Part of Chamber ....112
6.2.2 Interior Process Chamber (Hot Zone)................................80
6.2.3 Furnace bottom part internal "lower hot zone" ...................81 8.4 Preparation of Media.......................................................114
6.2.4 Furnace top part internal "upper hot zone".........................82
6.2.5 Hot Zone adsorbing basin .................................................82 8.5 Checking Furnace for Any Damage.................................116
6.2.6 Hot Zone Installation .........................................................82
6.2.7 Crucible insert...................................................................82 8.6 Close Chamber...............................................................116

6.3 Cooling Water Supply .......................................................83 8.7 Process Start-Up.............................................................118

6.3.1 Cooling water supply.........................................................84
6.3.2 Cooling water loops...........................................................85 8.8 Opening of the Furnace after the Process .......................133
6.3.3 Cooling water return and cooling water redundancy ..........85
8.9 Unloading of the Furnace ................................................134
6.4 Vacuum pump station .......................................................86
6.4.1 Argon flushing circuit.........................................................86 8.10 Switch Off the Furnace....................................................135
6.4.2 Heat exchanger.................................................................86 8.10.1 Switch off at the End of a Process ...................................135
6.4.3 Vacuum Operation ............................................................86 8.10.2 Switch off during the Process ..........................................136
6.5 Transformer ......................................................................87
9 User Interface of the Control Panel...................................137
6.6 Carriage............................................................................88
9.1 Structure of the User Interface Window ...........................138
6.7 Parking Position................................................................90 9.1.1 Areas of the user interface window..................................138
6.7.1 Service Access and Staircases .........................................91 9.1.2 Definition of the areas .....................................................138
6.7.2 Process Monitoring ...........................................................91 9.1.3 Cursor shapes during the process ...................................139
9.1.4 Overview area.................................................................140
6.8 Silica Crucible ...................................................................92 9.1.5 Work area .......................................................................141
6.8.1 Silicon and Graphite Storage.............................................92 9.1.6 Main process value area .................................................141
6.8.2 Crucible Charging .............................................................92 9.1.7 Button area .....................................................................142

6.9 Control Cabinet with Power Supply and PLC.....................94 9.2 Start Screen....................................................................144

6.10 Control Panel ....................................................................95 9.3 Log In .............................................................................145

6.11 Multi Crystallisation Furnace Software...............................96 9.4 “Overview” function .........................................................146

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Table of Contents Table of Contents

9.5 “Cooling Water” function..................................................148 11.3.7 Maintaining Warning Labels and Inscriptions...................190
11.3.8 Maintaining Electrical Components..................................190
9.6 “Moving Technology” - function .......................................150 11.3.9 Checking High-Voltage Lines ..........................................191
11.3.10 Maintaining Measuring Equipment...................................191
9.7 “Temp IW selection” - function.........................................152 11.3.11 Maintaining Control Elements..........................................191
11.3.12 Maintaining Guide Rails ..................................................191
9.8 “Heating Parameters” - function.......................................154 11.3.13 Maintaining the Guide Rods of the Handling Tool ............192
11.3.14 Maintaining the Melting Crucible......................................192
9.9 “Process Data” - function.................................................156 11.3.15 Inspecting the Support Crucible.......................................192
11.3.16 Inspecting the Hot Zone Integrated Safety Barrier ...........192
9.10 “Processes” - function .....................................................158 11.3.17 Inspecting Graphite and CFC Components .....................192
11.3.18 Inspecting the Current Feed Through ..............................193
9.11 “Process Status” - function ..............................................160 11.3.19 Maintaining the Overall Furnace......................................193
11.3.20 Maintaining the Chamber Interior ....................................193
9.12 „Diagrams” - function.......................................................162 11.3.21 Inspecting the Argon Piping.............................................193
11.3.22 Measuring Cooling Water................................................193
9.13 „CSV Archive” - function..................................................164 11.3.23 Cleaning the Touch Panel ...............................................194
11.3.24 Replace Cooling Water Filter...........................................194
9.14 „Profibus Diagnostics” function........................................166
11.4 Restart after Maintenance ...............................................195
9.15 “Service Maintenance” function .......................................168

9.16 „Service Limits” function ..................................................170 12 Dismantling and Disposal..................................................196

9.17 „Service Sensor Setup” function ......................................172 12.1 Instructions for Dismantling the Furnace..........................196

9.18 “Process Data Online” function........................................174 12.2 Dismantling the hot zone.................................................196

9.19 Information bar................................................................176 12.3 Disposal..........................................................................197

10 Fault diagnostics ...............................................................177 13 Instruction on emergency situations at Multi-Crystalline Si-

Process ..............................................................................198
10.1 Display of Warning, Alarm and Default Messages ...........177
13.1 Explanations ...................................................................198
10.2 Clearing Defaults ............................................................178
13.2 Practical Part – Personnel Activity...................................200

11 Maintenance.......................................................................179

11.1 Safety Information for Maintenance .................................179

11.1.1 Argon Pump Station Instructions .....................................180
11.1.2 Maintenance on the Hot Zone .........................................180
11.1.3 Access Points for Maintenance Work ..............................181
11.1.4 System Parts Requiring Recording..................................181
11.1.5 Spare and wearing parts .................................................182
11.1.6 Maintenance and Recording Plan....................................182

11.2 Maintenance List.............................................................182

11.3 Maintenance Activities.....................................................189

11.3.1 Checking Cooling Water Lines / Hoses............................189
11.3.2 Checking the Function of the Main Switch .......................189
11.3.3 Checking the Function of the Emergency Stop System....189
11.3.4 Maintaining the Protective Circuit ....................................189
11.3.5 Maintaining the Covers of the Power Supplies.................190
11.3.6 Maintaining the Warning Devices ....................................190

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Table of Figures Table of Figures

Figure 40: Melting crucible on bottom plate of support crucible ...........................................109

Table of Figures
Figure 41: Loading of melting crucible wit various feedstock materials (example)................110
Figure 1: Tandem system nameplates................................................................................16 Figure 42: Mounting support crucible side walls..................................................................110
Figure 2: Removable metal grid..........................................................................................30 Figure 43: Handling tool .....................................................................................................112
Figure 3: Main switch .........................................................................................................31 Figure 44: Hand-wheel of the handling tool.........................................................................113
Figure 4: Emergency stop button........................................................................................32 Figure 45: Lowering the charged crucible into the hot zone.................................................113
Figure 5: Two-hand control.................................................................................................32 Figure 46: Cooling water supply .........................................................................................114
Figure 6: Workstations for operating personnel...................................................................36 Figure 47: Argon pressure gauge .......................................................................................115
Figure 7: Workstations for operating personnel – side view.................................................37 Figure 54: Molten Silicon, a look through the inspection glass ............................................123
Figure 8: Hazardous areas at the furnace...........................................................................38 Figure 55: Setting of process number, weight and start time...............................................124
Figure 9: Escape Routes....................................................................................................41 Figure 56: Plausibility check ...............................................................................................125
Figure 10: Emergency stop button........................................................................................59 Figure 57: Plausibility check is ok.......................................................................................126
Figure 11: Top part of chamber with transportation eyelets...................................................66 Figure 58: Processes window.............................................................................................127
Figure 12: Bottom part of chamber with transportation eyelets..............................................66 Figure 59: Process window with message box start/cancel.................................................128
Figure 13: Control cabinet with eyelets.................................................................................68 Figure 60: Extended process window with message box start/cancel..................................129
Figure 14: Main components of the tandem system (top view)..............................................76 Figure 61: Running process and pop-up with start conditions .............................................130
Figure 15: Main components of the tandem system (side view) ............................................76 Figure 62: Lowering of the handling tool .............................................................................134
Figure 16: Main components of the tandem system (isometric view).....................................77 Figure 63: Support crucible on assembly carriage ..............................................................135
Figure 17: Top view of the process chamber ........................................................................78 Figure 64: Areas of user interface.......................................................................................138
Figure 18: Bottom view of the process chamber ...................................................................79 Figure 65: Control cursor....................................................................................................139
Figure 19: Sectional view of the process chamber ................................................................80 Figure 66: Text Cursor .......................................................................................................139
Figure 20: Position of the cooling water supply .....................................................................83 Figure 67: Overview area ...................................................................................................140
Figure 21: Schematic view of the cooling water supply .........................................................83 Figure 68: Main process value area....................................................................................141
Figure 22: Components of the vacuum pump station ............................................................86 Figure 69: Button Set 1 (top) ..............................................................................................142
Figure 23: Carriage ..............................................................................................................88 Figure 70: Button Set 2 (bottom) ........................................................................................142
Figure 24: Parking position...................................................................................................90 Figure 71: Start screen.......................................................................................................144
Figure 25: Crucible with silicon feedstock during charging ....................................................92 Figure 72: Login screen......................................................................................................145
Figure 26: Filled crucible on graphite bottom plate................................................................93 Figure 73: Overview function – PID diagram.......................................................................146
Figure 27: Crucible handling tool ..........................................................................................93 Figure 74: Cooling water function .......................................................................................148
Figure 28: Control panel.......................................................................................................95 Figure 75: Moving technology - function .............................................................................150
Figure 29: Temperature trend during the process (example).................................................97 Figure 76: Temp IW selection - function .............................................................................152
Figure 30: Control elements on the control cabinet ...............................................................98 Figure 77: Heating Parameters - function ...........................................................................154
Figure 31: "Drive demand" key switch ................................................................................100 Figure 78: Process Data- function ......................................................................................156
Figure 32: Two-hand control...............................................................................................101 Figure 79: Processes – function .........................................................................................158
Figure 33: "Movement" audio visual signal unit...................................................................102 Figure 80: Process Status - function...................................................................................160
Figure 34: "Messages and warnings" signal unit .................................................................102 Figure 81: Diagrams - function ...........................................................................................162
Figure 35: Bypass-switch on position “Mains” .....................................................................103 Figure 82: CSV Archive - function.......................................................................................164
Figure 36: Main switch .......................................................................................................104 Figure 83: Profibus diagnostics ..........................................................................................166
Figure 37: Power button for UPS........................................................................................104 Figure 84: Service Maintenance - function..........................................................................168
Figure 38: Main window of the furnace system program “CT600 System” ...........................106 Figure 85: Service Limits - function.....................................................................................170
Figure 39: Main window of the furnace system program “CT600 System” user level login ...107 Figure 86: Service Sensor Setup - function.........................................................................172

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Table of Figures Table Index

Figure 87: Process Data Online - function ..........................................................................174

Table Index
Figure 88: Information bar ..................................................................................................176
Figure 89: Access points on the upper rack ........................................................................181 Table 1-1: Explanation of Terms and Abbreviations..............................................................21
Figure 90: Maintenance access points on the front rack......................................................181 Table 2-1: Personnel Qualification........................................................................................28
Table 2-2: Process Recording ..............................................................................................34
Table 2-3: Safety Labels ......................................................................................................39
Table 3-1: Technical Data – Furnace....................................................................................61
Table 3-2: Specification of cooling water ..............................................................................62
Table 3-3: Specification of Argon..........................................................................................62
Table 3-4: Specification of compressed air ...........................................................................63
Table 5-1: Requirements Hall Floor ......................................................................................72
Table 6-1: Furnace Components ..........................................................................................77
Table 6-2: Process Chamber Components ...........................................................................78
Table 6-3: Process Chamber Components ...........................................................................79
Table 6-4: Process Chamber Components ...........................................................................80
Table 7-1: Control Cabinet Elements....................................................................................98
Table 7-2: Control Elements Two-Hand Control..................................................................101
Table 7-3: "Movement" audio visual signal unit...................................................................102
Table 7-4: "Messages and warnings" signal unit .................................................................102
Table 9-1: Short cut icons ..................................................................................................140
Table 9-2: Operator control functions button set 1 & set 2...................................................143
Table 9-3: Login .................................................................................................................145
Table 9-4: Overview function - PID diagram .......................................................................146
Table 9-5: Cooling water function .......................................................................................148
Table 9-6: Moving technology - function .............................................................................150
Table 9-7: Temp IW selection- function ..............................................................................153
Table 9-8: Heating Parameters - function ...........................................................................155
Table 9-9: Process Data- function ......................................................................................156
Table 9-10: Processes- function...........................................................................................159
Table 9-11: Process Status - function...................................................................................161
Table 9-12: Diagrams-function .............................................................................................163
Table 9-13: CSV Archive - function.......................................................................................165
Table 9-14: Profibus diagnostics - function ...........................................................................167
Table 9-15: Service Maintenance - function..........................................................................169
Table 9-16: Service Limits - function.....................................................................................171
Table 9-17: Service Sensor Setup - function.........................................................................173
Table 9-18: Process Data Online - function ..........................................................................175
Table 10-1: Default displays on the control panel – measures (PLC collective messages) ....178
Table 11-1: Safety accessories (pressure limitation valves) ..................................................182
Table 11-2: Abbreviations in the Maintenance list .................................................................183
Table 11-3: Maintenance Table............................................................................................184

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Table Index

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Notes on the Use of this Manual Notes on the Use of this Manual

This Operating Manual is valid for the CT600 crystallisation furnace

1 Notes on the Use of this Manual family including:
This chapter contains explanations about this Operating Manual and The Furnace itself
the used symbols.
The Electrical circuit diagram and
The Software.
1.1 Validity of this Operation Manual
1.2 Nameplates
This Operating Manual is valid for the CT600 Multi-Crystalline Ingot
Furnace Family. The following nameplate is attached to each furnace system:
One Tandem System consists of two single furnace systems. The
Tandem System is designed in such a way that two single furnace
systems are sharing one parking position for the top part of the
process chamber in between. Apart from the common parking position
the two single furnace systems are operated independently. The top
part of chamber of a furnace system can be placed on the parking
position while the opposite furnace system is operating. This setting
offers the advantage of a compact design and makes optimum use of
the parking position.
Before you operate the system for the first time or if you are entrusted
with other work on the system, you must read this operating manual.
This Operating Manual is part of the system and must be at the
operation personnel's disposal any time. This Operating Manual must
be kept for future use.
The Operating Manual contains important information about operating
the system safely and properly. Your observance helps to:
• Avoid risks,
• Reduce repair costs and downtimes,
• Increase reliability and the service life of the system.

This Operating Manual must be read and used by everyone who is

entrusted with work on the furnace system, such as:
• Operation,
• Troubleshooting in a sequence of operations,
• Monitoring, maintenance and repair work.

Besides this Operating Manual, the regulations for accident prevention

and environmental protection applicable in the user country and at the
site must be observed.

Figure 1: Tandem system nameplates

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Notes on the Use of this Manual Notes on the Use of this Manual

1.3 Used Symbols The structure of warnings always contains the same elements:
symbol, warning level, cause and remedy.
In this Operating Manual instructions are weighted and labeled with a
corresponding symbol in accordance with the effect the instruction can Example:
have if not observed.
The safety and warning instructions do not claim to be complete.
DANGER Hazardous voltage!
Warning Levels There are three warning levels.
There is an electric shock hazard when touching or approaching live
parts.
Warning Level Cause and Remedy Take all safety precautions relating to high voltage.
DANGER Immediate risk of death or serious injury. If not Shut off power supply and UPS and secure against restart.
avoided, the hazardous situation will result in
death or serious injury.
WARNING Risk of death or serious injury. If not avoided, the
hazardous situation could result in death or Mandatory Instructions Symbol Instruction Explanation
serious injury.
Mandatory Wear safety Disobeying this instruction can
CAUTION Risk of minor or moderate injury. If not avoided, symbols such as helmet! result in bodily injury.
the hazardous situation could result in minor or
moderate injury.

Prohibitive Do not stand Disobeying this instruction can

symbols such as here! result in bodily injury or material
damage.

Additional Information Additional information, tips and tricks are indicated with the symbol.
Example:

Variable values and data contained in this Operating Manual only

serve illustration purposes and are not suitable for use in a real
process.

1.3.1 Hazard Symbols

Symbol Hazard
Risk of death or injury!
This symbol indicates a location with immediate
risk of death or injury. The situation can result
in life-threatening or even fatal injuries.
This symbol also indicates hazards not covered
by other symbols.

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Notes on the Use of this Manual Notes on the Use of this Manual

Symbol Hazard 1.3.2 Prohibition symbols

Hazardous voltage!
This symbol indicates hazardous voltage which
can kill. Symbol Prohibition
Do not stand here!
Hot surface!
This symbol indicates that you must not stand
This symbol indicates a burn hazard from hot in the area labelled with this symbol.
surface.

Fire hazard! No fire or open flames!

This symbol indicates a fire hazard. This symbol indicates that fire and open flames
are prohibited in this area.

Suspended loads hazard! No access for unauthorized persons!

This symbol indicates a suspended loads This symbol indicates that unauthorized
hazard. persons have no access to this area.

Crush hazard!
No smoking!
This sign is in front of activities involving a risk
of being crushed This symbol indicates that smoking is
prohibited in this area.
Hand crush hazard!
This symbol indicates a hand crush hazard. No pacemakers!
This symbol indicates that pacemaker wearers
do not have access to this area.
Tip over hazard!
This symbol indicates a tip over hazard during No food or beverages!
transport.
This symbol indicates that food and beverages
Fall hazard! are prohibited in this area.

This symbol indicates a fall hazard.

Warning! 1.3.3 Mandatory Symbols

• Irritant
• Dermal sensitizer Symbol Instruction
• Acute toxicity (harmful)
• Narcotic effects Wear safety helmet!
• Respiratory tract
• Irritation
Warning – gases under pressure!
This symbol indicates a hazard from gases Wear ear protection!
under pressure.

Wear eye protection!

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Notes on the Use of this Manual Notes on the Use of this Manual

Symbol Instruction Term/Abbreviation Explanation

Ingot Crystallized block made of semiconductor
Wear protective suit! feedstock material such as silicon
MSL Mean Sea Level
NTU Nephelometric Turbidity Units

Wear protective gloves! P&ID Piping and Instrumentation Diagram

Parking position The place between the two single furnace
systems in the middle of the tandem system.
PLC Programmable Logic Controller
Wear safety boots! Recipes are records to document an
Recipe
crystallization process. They contain melting,
crystallization, tempering and cooling values.

Tandem system One Tandem System consists of two

Wear dust mask! complete furnace systems, the support
frame and safety devices.
UPS Uninterruptible Power Supply
This symbol indicates aspects you must
observe in any case.
1.5 Definition of Owner/Operator and Operator
The owner/operator is defined as the company or entity that
owns/manages the plant.
1.4 Terms and Abbreviations The operator is defined as the person who operates the plant/works at
The following terms and abbreviations are used in this Operating the plant.
Manual:

1.6 Manufacturer's Address

Table 1-1: Explanation of Terms and Abbreviations
centrotherm SiTec GmbH
Term/Abbreviation Explanation Johannes-Schmid-Str. 8
CFC CFC = carbon fiber-reinforced carbon D-89143 Blaubeuren / Germany
EI&C Electrical, Instrumentation & Control Phone: +49 (0)7344 9187-849
FC stroke Frequency Converter stroke Fax: +49 (0)7344 9187-882
E-mail: [email protected]
FC linear Frequency Converter linear motion
Internet: www.sitec.centrotherm.de
Furnace system A furnace system is part of a tandem
system. The single furnace system consists
of the process chamber (incl. internals),
transformer, cooling water distributor,
carriage (incl. drive), heat exchanger, pump
station and control cabinet.
Hazardous area Every area in and/or around a machinery in
which a person can be put at risk.
Normal position In the normal position, the top part of
(furnace position) chamber rests on the bottom part of
chamber. The process chamber is closed.

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Safety Safety

Misuse The furnace system was exclusively designed for the purpose
2 Safety indicated in the "Intended Use" section. Any use beyond that purpose,
This chapter contains the intended use of the tandem system and a such as melting or heating up other material, is regarded as misuse.
summary of all the important safety provisions. This chapter is Abuse can result in personal injuries to users or third parties.
therefore suitable for the initial, basic induction of new employees. Furthermore, the Furnace System itself or other material property can
be damaged.
2.1 Intended Use
The manufacturer is not liable for any personal injury or material
The CT600 Multi-Crystalline Ingot Furnace is intended for melting and damage resulting from any such misuse.
directional solidification of silicon in a specified quality to produce
multi-crystalline ingots. 2.2 General Safety Information

The system was exclusively designed, manufactured and tested for

industrial use.
Anyone who is entrusted with work on the CT600 Multi-Crystalline
The proper operations of the system as well as related hazards are Ingot Furnace must read and comply with this chapter.
the sole responsibility of the owner/operator.
Materials to be processed for the intended use of the system are
provided and used by the furnace owner/operator. The quality of the
basic silicon is crucial to the resulting quality of the ingot. The basic The system is constructed in accordance with the state-of-the-art and
silicon must be dry and free of residues of acid or base. recognized safety regulations. Nevertheless, during use risk to life and
In order to operate the system as intended, the manual as well as all limb may arise for the user or third parties as well as extensive
specified intervals for inspection and maintenance work must be property damage if:
observed. • The system is not used for the intended purpose,
• The system is operated by personnel who have not been
Types of Crucibles Melting crucibles instructed,
• The range of types of recommended crucibles is restricted by • The system is improperly changed or modified,
• Height and size • The safety provisions and instructions are not observed.
• Type of coating
Only use the system if it is in perfect working order and for the use
intended while using it, remain aware of safety issues and potential
Support crucible
hazards at all times and always comply with this operating manual.
The support crucible must be adapted to the size of the melting
Operate the system only when all safety and protective devices are
crucible so that the melting crucible fits inside correctly.
installed and fully functional! These are, for example, user protection
and the EMERGENCY OFF features. Furthermore all sensors (cooling
Functions realized The furnace system offers the possibility to process/melt silicon water sensors, thermocouples, pyrometers) must be installed and fully
feedstock material with regard to functional.

• Charging In the event of faults which impair safety and changes in the operating
conditions, stop the furnace system immediately and report the
o Charging the crucible up to the filling edge freely selectable malfunction to personnel responsible.
o Feedstock material sorting freely selectable
• Function test 2.2.1 CE-marking
o Assessment and storage of heating and cooling times The system meets the basic health and safety requirements of the
o Evaluation via parameter database relevant EU directives.
The CE mark and the EU declaration of conformity were issued by
• Leakage measurement centrotherm SiTec GmbH.
o Measurement of the leakage rate and analysis of the results

• Storage of the results in the database

• Retention curve at a particular temperature with variable
parameters
• Cooling curve at a particular temperature with variable
parameters

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2.2.4 Personnel Duty

2.2.2 Safety and Warning Labels
• Every employee must take care of his own safety and health as
Read and observe the safety and warning labels in this manual and
well as of safety and health of those persons affected by his doing
on the system without fail!
or omission during work as far as possible — according to the
All the safety signs on the system must be kept complete and legible. instructions he received and the instructions of the
Replace damaged or illegible signs. owner/operator.
Special safety regulations may be necessary for individual jobs. These • Every employee must use machinery, equipment, tools,
safety regulations can be found in the operating manual for the hazardous substances, transport means and other means
corresponding activity. They are clearly highlighted with a warning properly.
sign (pictogram). • Every employee must use the personal protective equipment
made available to him properly and store it at the intended place
2.2.3 Owner/Operator Duty after use.
• The owner/operator must obtain the local operation permit and • Every employee must immediately report any serious or
observe related conditions. immediate safety or health hazard or any defect detected at
Protective Measures • The owner/operator must inform personnel who can be subject to the protective system to the owner/operator.
serious or immediate hazards as soon as possible about those
hazards. He must also inform them about protective measures 2.2.5 Safety Inspections by the Manufacturer
taken or to be taken. Perform all checks indicated in “11 Maintenance” on page 179.
• The owner/operator must supervise the observance of safety
measures. 2.2.6 Safety Inspections by the Owner/Operator
• The owner/operator must provide personal protective equipment Perform all checks indicated in “11 Maintenance” on page 179.
and supervise that this equipment is actually worn.
Personnel Instruction • The owner/operator must instruct personnel with respect to the
safeguards of the machinery.
• The owner/operator must instruct personnel in handling
equipment.
• The owner/operator must make sure that employees of external
companies working on the furnace system have been
appropriately instructed with respect to safety and health hazards
relating to their work on the furnace.
• The owner/operator must inform personnel about hazards relating
to their work.
• The owner/operator must make sure repair, retrofitting and
maintenance work is only carried out by accordingly authorized
personnel.
• The owner/operator must make sure that all persons working
inside the plant have a valid work permit.
Specific Hazardous Equipment • If the use of equipment involves any possible hazard, the
owner/operator must make sure that only particularly
authorized and trained personnel work with such equipment.

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Other Persons Other persons are persons who do not fall under the above
2.3 Personnel Qualification definitions. The owner/operator must assume that those persons do
not have knowledge of the possible hazards of the furnace. By means
2.3.1 General of appropriate measures, make sure that other persons do not enter
The plant's owner/operator must clearly define the responsibilities of operation or hazardous areas and that they observe the general
personnel regarding operation, maintenance and repair. safety instructions.

Personnel must be in good health and mentally fit for operating the
plant. Table 2-1: Personnel Qualification
Personnel to be trained or instructed or personnel in training shall only
work at the furnace under constant supervision of an experienced Personnel Instructed Engineer Operation Electrically Industrial
person. Activity Person for Personnel Skilled Mechanic
Special Person
The individual tasks to be carried out at the furnace require different Tasks
personnel qualification listed in the following in Table 2-1.
If the specified personnel qualifications are not observed, hazards can Transport • •
result during work on the plant. Assembly • • •
Instructed Person for Special Person instructed by an engineer about the assigned tasks and
Tasks possible hazards which can result from improper use and trained, if
Electrical installation •
required. Person moreover instructed about required safeguards and Start-up, operation, shutdown • •
protective measures.
Mechanical & Electrical
Engineer An engineer is someone who, due to suitable education and training, • • • •
Disassembly
is able to carry out the assigned tasks and recognize possible hazards
as well as to read and understand piping and instrument diagrams Cleaning •
(PID). The engineer must be familiar with the regulations for e.g.
Mechanical work: troubleshooting,
accident prevention, occupational safety, fire protection and •
environmental protection applicable at the operating site, as well as repair and maintenance
with the plant's operating conditions and risks. The engineer must Work on the electrical system:
have knowledge of process engineering to be able to understand, troubleshooting, repair and •
control and adapt the processes in the plant. maintenance
Operation Personnel Operation personnel are persons who, due to suitable education and
Disposal • •
training, are able to carry out the assigned tasks, recognize possible
hazards as well as to read and understand piping and instrument
diagrams (PID).
2.3.2 Personnel Training
The operator must have knowledge of process engineering to be able
to understand and control the processes in the plant. Personnel must have been trained – either by centrotherm SiTec
Operation personnel must be familiar with the regulations for e.g. GmbH, or by persons who themselves have been trained by
accident prevention, occupational safety, fire protection and centrotherm SiTec GmbH.
environmental protection applicable at the operating site as well as Training must be repeated regularly by the operating company and
with the plant's operating conditions and risks. confirmed by signature. The owner/operator is responsible for
Electrically skilled personnel must be able to read and understand arranging the first training and regular refresher trainings.
Electrically Skilled Person
electric circuit diagrams, to put electrical systems into service, to The owner/operator determines the suitability of experts and operating
maintain them, to wire control cabinets, to ensure the functionality of personnel.
electrical components and to identify possible hazards from handling
Repeat safety training every six months.
electrical and electronic systems.
Industrial Mechanic Industrial mechanics must be able to read and understand machine
drawings, piping and instrument diagrams (PID) and process flow
diagrams (PFD), to execute or supervise the safe assembly of plant
components, to maintain it mechanically, to ensure the functionality of
mechanical components, to prepare the plant for start-up, to identify
possible damage and to recognize potential hazards relating to the
plant.

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2.4 Safety Equipment 2.4.1 Safety Chain

The function of safety and protective equipment is to protect the To protect personnel from entering dangerous areas accidentally or
operator from health risks when using the furnace system in without permission centrotherm SiTec GmbH strongly recommends
accordance with the regulations. You may only operate the furnace installing safety chains to cordon off dangerous areas. At each
system when all the safety and protective devices are installed and furnace system there are two areas to be cordoned off at different
fully functional. process stages:
Assign persons the responsibility for the effectiveness of the safety • Access to the staircase: the access to the staircase must be
equipment. Instruct those persons to report all hazards or cordoned off during the process and during any movement of the
malfunctions during furnace operation to the supervisor. top part of the chamber.
• Area at the ground floor: the area around the transformer,
pump station and the lower part of the process chamber
underneath the platform must be cordoned off as long as the
DANGER Inoperative safety equipment!
furnace system is supplied with power and/or as long as there
During operation, cleaning or setup, safety equipment must not be is dangerous media within system components.
rendered inoperative. There is a risk of injury at moveable parts from
hot surfaces or leaking gases. 2.4.2 Removable Metal Grid
• Only operate the furnace with fully functional safety equipment. The removable metal grid provides protection from falling down from
• Check safety equipment at regular intervals (see the upper level through the maintenance hole at the parking position.
“11 Maintenance” on page 179). It may only be removed, if the top part of a chamber is placed at the
• Should it be absolutely necessary to render safety equipment parking position, so that there is no fall hazard.
inoperative, put the furnace into a safe condition: The metal grid can only be removed from below, that is from the
o There shall be no risk of injury. ground level.
o Furnace damage must be avoided.
1 metal grid
o Third persons must not put the furnace into an unsafe condition.
1
• Set up warning signs warning third persons of work being
performed.
• Prevent access of uninvolved persons to the work area.
• After completion of work, put the furnace into a safe condition.
• Only experts may render safety equipment inoperative.

DANGER Manipulated settings!

Manipulation of factory settings can render the furnace's safety
equipment inoperative.
Figure 2: Removable metal grid
The manufacturer cannot be held liable for injuries or damage
resulting wherefrom.

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WARNING Fall hazard! 1 emergency stop button

There is a hazard of falling through the maintenance hole at the

parking position, if the metal grid is not installed or not installed
properly.
• Only remove the metal grid, when the top part of a chamber is 1
placed over it.
• After having it removed for cleaning or maintenance work.
immediately re-install the metal grid.
• Avoid stepping on the metal grid. If it is necessary to step on
the metal grid, make sure that it is installed properly.

2.4.3 Main Power Switch

The main switch is installed on the control cabinet. It connects and
Figure 4: Emergency stop button
disconnects the furnace from the mains.
The following occurs when you actuate the emergency stop button:
• Voltage supply to the drives stops.
WARNING Dangerous voltage!
• All hazardous movements are safely stopped.
Voltage may be present even when the main power switch is switched
off. Contact with live parts may result in electric shock, burns or death. The emergency stop button does not affect the following components
Only trained workers may work on the equipment after an on-site and systems. If values are above or below limits these components
briefing. are affected or shut down by software:
• cooling water supply: cooling water supply remains open.
• heaters
• valves for argon supply
• vacuum pump

2.4.5 Two-hand control

The two-hand control requires simultaneous actuation with both hands
to initiate and keep up furnace motions. This serves to protect the
operator.

Figure 3: Main switch

For the correct procedure of switching on the furnace refer to “7.2

Main Switches at the Furnace System” on page 103.

2.4.4 Emergency Stop Button

Each furnace system is equipped with two emergency stop buttons to
immediately stop the movement of the carriage in case of emergency.
On the two-hand control and on the control cabinet, there is one
emergency stop button each. Figure 5: Two-hand control

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2.4.6 Protective Circuit 2.4.13 Process Recording

All furnace components are connected to a protective circuit During the different process phases, the following recording processes
(green/yellow line sheathing). and tests are performed.
In electrical systems, the protective circuit protects against hazardous
touch voltage and electric shock in the event of a fault such as a Table 2-2: Process Recording
housing insulation failure.
Process Phase Recording / Test
2.4.7 Insulation Monitoring (IT)
Process
leak test (furnace vacuum leak test)
The IT system is a system in electrical engineering for increased
preparation
heater test (short-circuit test, heating power)
reliability in the event of an insulation error.
Power supply of the heaters is an IT system. Insulation errors are Only after these tests have been successfully
detected by insulation monitoring devices. completed, the process is started.
Process Heater:
2.4.8 Over current Protection Devices

heating power
For over current protection, automatic circuit breakers, fuses and Cooling water recording of each cooling circuit:
motor protection switches are installed.

pressure
2.4.9 Covers on Live Parts
temperature

flow rate
All live parts are covered. Those covers avoid accidental touching of
live parts and thus protect you against electric shock. Process gas recording:

pressure recording of argon supply
2.4.10 Safety Relief Valves
End of process leak test (chamber vacuum leak test)
Two pressure reducers and three safety valves protect the furnace
against inadmissible overpressure in the cooling water circuit.

2.4.11 Final Safety Barriers for Melt Leak

The hot zone is set up inside an impounding area (as per HAZOP)
which in the event of an accident can absorb the entire volume of
silicon of the crucible and thus helps to avoid environmental damage
as a result of silicon overflow.
Leakage is detected by means of a temperature and heating power
supervision circuit which reports the leakage if silicon is released. If
the leakage notification is switched on, an alarm is given.

2.4.12 Electrical Equipment

A failure of electrical components can result in considerable damage
to the furnace. The following measures minimize that risk:
• Temperature sensors monitor the temperature in the control
cabinet, of the transformer, the vacuum pump and pyrometers.
• A ventilator protects the control cabinet against overheating.

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2.5 Safety Signals 2.7 Workstations for Operating Personnel

There are the following workstations at the furnace:
2.5.1 "Movement" Signal Towers
• at the control panel on the control cabinet (during operation)
Movement of the top part of chamber is indicated by visual and
acoustic signals from signal towers. Signal towers are installed on the • at the two-hand control (during top part of chamber move)
right and left side of the top part of the chamber and one at the ground • below the maintenance hole at the parking position (during
floor near the maintenance hole. maintenance/cleaning of the top part of chamber)
• on the frame (during loading and unloading)

2.5.2 "Messages and warnings" Signal Tower The workstations are illustrated on the figures below.
A "Messages and warnings" signal tower is installed near the control 1 Carriage with top part of
cabinet. It indicates every general message or warning. chamber 1
2 Control panel
2.6 Personal Protective Equipment

Wear safety helmet and safety boots!

In the erection area of the furnace as well as for all work on the
furnace, all persons must wear safety helmet and safety boots.

Wear protective suit, dust mask and protective gloves!

For work on the furnace, have protective suit, dust mask and 2
protective gloves at hand.
For specific tasks, you must wear protective suit, dust mask and
protective gloves.

Figure 6: Workstations for operating personnel

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2.8 Hazardous Areas

1 Control cabinet 1 3 1
2 SIHIdry Vacuum system
During operation and during all other work, unauthorized persons are
3 Carriage with top part of not allowed access to the area two meters around the layout of the
chamber frame.
2 Unauthorized persons are not allowed to enter the upper floor.
While the top part of chamber is in parking position, only maintenance
personnel are allowed at the assembly location.

Figure 7: Workstations for operating personnel – side view

Apply floor markings at a distance of two meters around the frame
The operator controls and records the furnace system at the control layout to warn of the hazards of the furnace.
panel. The furnace system is supplied with the following media: Apply floor markings at the assembly location to warn of dropping
• Electricity parts.
• Cooling water
• Argon
• Compressed air

The media supply is accommodated in a separate room - site. The

operating personnel must constantly record the media supply.
2m
During process, the work area is limited to one meter around the
control panel.
The safety measures must be relocated after each maintenance work.
2m
2m

2m

Figure 8: Hazardous areas at the furnace

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Label Explanation Position on the Furnace

2.9 Safety Labels on the Furnace
There are the following safety labels on the furnace. Maintain safety Floating loads! at the access to the platform
labels in legible condition. For details, please refer to Appendix 1 on the platform at the chamber
"Position and type of safety labels" (see “Fehler! Verweisquelle
konnte nicht gefunden werden. Fehler! Verweisquelle konnte
Wear googles! on the platform at the chamber
nicht gefunden werden.” on page Fehler! Textmarke nicht
definiert.).

Wear safety helmet! at the access to the platform

Table 2-3: Safety Labels
on the platform
Label Explanation Position on the Furnace
Hazardous voltage! on each transformer Wear protective suit, on the platform at the chamber (when opening the
on the control cabinet dust mask and protective chamber)
gloves!
on the covers of the power supplies
on the driving and lifting units
on the SIHIdry pump
at the access to the platform
Hot surface! on each transformer
on the vacuum path incl. bypass
on each pipe which may be hot
on the top part of chamber
on the bottom part of chamber
close to the inspection glass
on the crucible handling devices
at the access to the platform
No pacemakers! on each transformer
on the platform

No access for at the access to the upper floor of the platform

unauthorized persons! at the assembly area of the top part of chamber

Do not stand here! on the transformer top

on the covers of the power supply

Crush hazard! on the lifting and driving unit

on the chamber top
on the SIHIdry vacuum system
at the access to the platform
Fall hazard! at the access to the platform
on the platform at the chamber

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2.10 Escape Routes 2.11 Safety Information for Transport, Assembly and
Commissioning
Escape routes are special routes that should
Only instructed skilled workers with appropriate protective equipment
• be kept clear of all obstructions are authorized to carry out transport, assembly and commissioning of
• be at least one meter wide the furnace system. This also applies to re-commissioning after
• lead to a safe place, usually outside and away from the extensive repair work.
building. Please observe the following instructions for transport, assembly and
commissioning:
Doors on escape routes must be unlocked.
Lifting and transporting • Never stand under suspended loads.
There must be at least two separate escape routes per floor leading • Observe accident prevention regulations! Use personal protective
out of the building. equipment for work: wear safety footwear, protective gloves and
All doors in the escape routes should open in the direction of the protective glasses.
escape route. They have to be easily accessible. There must not be • Use only appropriate means of transport and separate lifting
any elevators in an escape route. accessories which can safely bear the weight of the load!
Emergency lighting should be available and powered by an Assembly and Commissioning • For overhead work, use a stable ladder or other safe ascending
independent power source. aids.
• Observe the relevant product safety regulations when handling
oils or grease.
• If work using open flame must be performed, such as welding,
Mark escape routes, footpaths and transport routes. flame-cutting, soldering, outside or inside the vessel or in a narrow
space, the person responsible must issue a written permit. When
work with open flame is performed, all persons present in the
vessel or narrow space must wear flame-resistant protective
clothing.
• A responsible person equipped with adequate fire extinguishing
equipment must be present in areas where sparks from welding or
burning can be present. All areas near the welding or cutting
scene, including the floors above and below shall be carefully
inspected and patrolled during work and for a certain time after
work has been completed.
• When work is interrupted or during breaks, all welding and
soldering tools must be removed from the vessel or narrow space.
• After completion of maintenance, inspection or repair:
o Clean the whole area.
o Re-establish the safe furnace condition.

Figure 9: Escape Routes

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2.12 Safety Information for Operation • Do not eat, drink or smoke when working.
Please observe the following instructions for furnace operation: • Use soap and water to clean skin covered with graphite or silicon.
• Installed safety devices may not be put out of operation. Only
• The furnace may only be operated by instructed persons
operate the furnace system when all the safety and protective
authorized by the owner/operator.
devices are in full working order.
• Responsibilities for furnace operation must be clearly assigned
• If it is necessary to touch a heated component, put on heat-
and observed so that there are no unclear competencies which
resistant protective gloves.
could result in hazards.
• Ensure that no unauthorized persons are on the system (in the
• Do not do anything which could affect furnace safety.
immediate vicinity of the furnace) during movement of the
• Always operate the furnace in proper and safe condition. carriage.
• Only operate the furnace with parameters indicated in the • Activate EMERGENCY STOP button in the event of danger!
technical data. The process recipe that is provided by centrotherm
• Only work on the system with hall lighting switched on and
SiTec GmbH is only valid for the corresponding hardware design
illumination of the system components (cooling water supply).
of the hot zone and the corresponding net weight of the silicon.
Otherwise hazardous!
Any changes on the process recipes or on the hot zone, or higher
silicon net weights can be critical. • Avoid operating high-frequency, remote controlled and radio
equipment in the vicinity of the equipment electronics and their
• The temperature measurement of the system must be checked
cables.
and calibrated regularly. Even marginal displacement of a
thermocouple or not correctly adjusted pyrometers can lead to • The settings of the flow meters and pressure control valves of the
wrong measured values. furnace system may only be altered by authorized skilled workers.
• Observe the maintenance schedule of the system components. • Clean the area around the system daily. Remove loose parts.
Not properly maintained components may lead to hazards. Clean up liquids on the floor immediately. Danger of slipping!
Especially the graphite components may change its thermal
properties during process deployment and must be replaced
according to the maintenance schedule even if there are no visible
defects. DANGER Suffocation hazard!
• Any changes of process data, hot zone design and net weight During operation, there is a suffocation hazard in the chamber interior
which are not in accordance to the specification will cause serious resulting from
damage.
o vacuum
• You must immediately report changes of the furnace which affect
safety to the owner/operator. o high temperatures
o Argon supply.
• Observe the applicable national and local rules and regulations for
accident prevention, occupational safety, fire protection and
environmental protection. • Prior to every process start-up, make sure there is no person
inside the chamber.
• Observe all safety labels and information in the plant.
• Observe the safety instructions relating to process media.
• If the plant's operating behaviour changes drastically, the plant or
the affected section of the plant must be brought to a safe state
immediately. The supervisor must be informed about the changes.
The malfunction or damage must be repaired without delay. If this
is not your responsibility or if you do not have the required
technical abilities and knowledge, a supervisor must be
immediately informed about the failure, so that the replacement of
missing or damaged parts can be organized.
• Damaged or missing parts must be replaced immediately. Spare
parts must comply with the technical requirements specified by
centrotherm SiTec GmbH. This is ensured if original spare parts
from centrotherm SiTec GmbH are used.
• Wearing baggy clothing, loose long hair and jewelry are forbidden.
• Avoid any metal contamination inside the process chamber. Do
not carry any material in your pockets when entering the system
area, for example pens or mobile phones.
• Change dirty clothing.

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2.14 Safety Information for Cleaning, Maintenance and

2.13 Safety Information for Work on the Electrical
Repair
System
• The electrical equipment may only be installed, modified and
maintained by or under the supervision of an electrically skilled
person and in accordance with the relevant electrical regulations.
For all maintenance and cleaning tasks at the furnace wear protective
gloves, safety boots and safety helmet!
DANGER Electric shock hazard at live components!
The system's operating voltage can kill if live components are
touched. A short circuit can lead to spark formation or fire. Prior to maintenance, inspection, repair or cleaning at the furnace,
It is prohibited to carry out any work on live components. Switch off proceed as follows:
the furnace before starting work on the electrical system and secure • Move the top part of chamber into main furnace parking position.
the circuits against inadvertent switch-on.
• Shut down the furnace and the UPS.
Observe the following safety instructions for work on the electrical
• Switch off the furnace with the main switch on the control cabinet.
system:
• Padlock the main switch against switch-on.
• Switch off UPS.
• Attach a "Maintenance" warning sign.
• Disconnect/insulate.
• Secure against inadvertent switch-on.
• Check the switch off condition.
• Earth and short-circuit. DANGER Fall hazard!
• Shield all live parts. During work on the frame, you could fall through the assembly hole if
the metal grid is not installed properly (refer to “2.4.2 Removable
Metal Grid”, on page 30)
• Never work alone. Always work together with at least one other • Only perform maintenance on the frame if the top part of chamber
person. is in parking position.
• The system's power supply must be suitably dimensioned to avoid • Make sure that the removable metal grid is installed properly.
overloads.
• During work on the first floor avoid stumbling and walk
• Make sure to use only original fuses with the correct rating. carefully.
• Make sure that the electrical system is always in a technically safe
and perfect condition.
• Regularly check the plant's electrical system. Report every defect,
such as loose or damaged connections, and have the defect DANGER Burn hazard!
repaired by an electrically skilled person.
After completion of the process, there is a burn hazard from very hot
• Depending on operating voltage, frequency, type of use and parts.
location, the electrical equipment must be protected against
indirect contact in such a way that even in the event of a fault in • Let hot parts cool down before starting maintenance or cleaning.
the electrical system, there are no hazardous voltages. • Wear protective equipment.
• Cables to be connected must be unambiguously and permanently
marked, since wrong connections can result in hazards.
• Work on the pyrometers or on the mechanical driving mechanism
may only be performed when the systems are electrically isolated DANGER Inoperative safety equipment!
and have cooled down. During maintenance or cleaning, safety equipment must not be
• Close switch cabinet after completing the work. Keep key in a rendered inoperative. There is a risk of injury at moveable parts from
secure place. hot surfaces or leaking gases.
• When protective covers have to be removed, make sure that • Only operate the furnace with fully functional safety equipment.
no live parts or conductive material of hazardous potential
• Check safety equipment at regular intervals.
difference can be contacted.

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Maintenance • Observe all maintenance intervals. o The hose springing out of the fitting
• Maintenance, inspection and repair work may only be carried out o Corrosion of fittings reducing function and strength
by suitably qualified experts. o Failure to observe installation requirements
• Repairs and maintenance work on the hot zone may only be o Exceeding storage life and durability
performed by skilled personnel after prior instruction.
All work on the hot zone must only be performed when the • For overhead maintenance work, use a stable ladder or other safe
machinery is shut down. ascending aids.
• If malfunctions are detected during inspections, notify the • Observe the relevant product safety regulations when handling
personnel responsible of the malfunction in order to remedy the oils or grease.
fault. Only start operating the system again when the fault has
• If work using open flame must be performed, such as welding,
been remedied.
flame-cutting, soldering, outside or inside the vessel or in a narrow
• The unit or individual equipment or pipes or other parts to be space, the person responsible must issue a written permit. When
maintained must be put in safe condition before maintenance is work with open flame is performed, all persons present in the
started. vessel or narrow space must wear flame-resistant protective
• All activities must be coordinated with all other persons working clothing.
inside the unit. In case of shift work, adequate communication • A responsible person equipped with adequate fire extinguishing
between the personnel of the individual shifts must be organized. equipment must be present in areas where sparks from welding or
• Before replacing large modules, use suitable lifting tackle to burning can be present. All areas near the welding or cutting
secure them against falling or tipping over. scene, including the floors above and below, shall be carefully
inspected and patrolled during work and for a certain time after
• Spare parts must comply with the technical specifications by
work has been completed.
centrotherm SiTec GmbH. This is always guaranteed for original
spare parts of centrotherm SiTec GmbH. • If it is necessary to dismantle protective devices or safety
The installation and/or use of spare and accessory parts not equipment during maintenance and repair, the parts must be
supplied and released by centrotherm SiTec GmbH can negatively reinstalled and their function checked immediately after the work
affect furnace characteristics. has been completed.
The manufacturer cannot be held liable for damage resulting from • When work is interrupted or during breaks, all welding and
the use of non-original parts and non-original accessory parts. soldering tools must be removed from the vessel or narrow space.
Standard parts can be purchased in specialist shops.
• After completion of maintenance, inspection or repair:
• Damaged or defective parts must be immediately replaced.
o Clean the whole area.
• With appropriate measures, you must prevent that the furnace is o Re-establish the safe furnace condition.
operated with damaged or defective components.
• Before parts of the equipment are loosened (for replacement) Cleaning Please observe the following instructions for cleaning the furnace:
always secure them against tipping over or falling down by fixing
them to the ground whenever possible or by supporting with
mechanical measures. Before transporting the equipment to be
replaced, always make sure the hoisting gear is sufficiently CAUTION Open electrical control cabinets!
dimensioned and securely fixed. Never stand under overhead Water or dust can penetrate into open electrical control cabinets.
loads. Possible consequences are:
• If bolted connections must be loosened for maintenance, o Short circuit
inspection or repair, re-tighten them after work has been
completed and make sure they are securely seated. o Damage to electrical components
o Failure of process control.
• Inspect all cables, hoses and couplings regularly for leaks and
externally detectable damage. Have all damage remedied
immediately. • Close all electrical control cabinets.
Hoses should be replaced at once in the event of:
o Damage to the external shell (abrasion marks, cuts, cracks,
embitterment) • Do not clean the furnace during operation. Make sure that no
o Deformation in a depressurized or pressurized condition which other work is carried out during cleaning.
does not correspond to the normal shape of the flexible hose • Regularly clean the furnace to enhance its life, ensure its proper
o Leaks condition and allow trouble-free operation.
o Damage or deformation of hose fittings (reduced sealing ability); • The furnace may only be cleaned by instructed persons
minor surface damage does not constitute grounds for authorized by the owner/operator.
replacement

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Safety Safety

• The owner/operator must equip cleaning personnel with

corresponding protective equipment as required by national 2.15 Residual Risks
regulations and according to the processed material.
• Work on electrical systems may only be carried out by an
electrically skilled person. CAUTION Hazardous Process Conditions!
• Make sure that no cleaning equipment is left in the furnace after While the process is running, the following is prohibited:
completion of cleaning.
o Setup
• Never use petrol or other highly inflammable substances for
cleaning. o Maintenance
• Use lint-free cleaning cloths. o Cleaning
o Furnace shutdown
Disposal Store used water filters and other contaminated materials in a
separate, specially labelled container and dispose of in an • Only do the above when the process is completed.
environmentally friendly manner. • Before starting with the first three works above also shut down the
Dispose of spent batteries according to the regulations (hazardous furnace.
waste).
Faulty and irreparable components must be disposed of in an
environmentally sound manner. Separate individual materials (metal, WARNING Hot surfaces!
electronics, plastic) and then add them to the recycling.
During operation, the furnace can become very hot. There is a burn
Structural alterations Unauthorized structural changes of the furnace system are not hazard at hot surfaces.
permitted for safety reasons. Likewise, you may not make any
changes to the installation (cables, connections, insulation) for • Observe attached warning signs.
reasons of electromagnetic compatibility (EMC). • Keep clear of components which can generate heat.
Unauthorized modifications and changes to the hot zone are not • Let hot parts cool down before starting work on them.
permitted. • Wear protective gloves for work on hot parts.

WARNING Hot shooting parts!

During operation, the furnace can become very hot. After opening the
upper part of the furnace, hot shooting parts can be ejected from the
ingot and/or the crucible.
• Observe attached warning signs.
• Keep clear of components which can generate heat.
• Let hot parts cool down before starting work on them.
• Wear protective gloves for work on hot parts.
• Wear protective equipment.
• Wear equipment for eye and face protection.
• Keep sufficient distance to the hot ingot.

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Safety Safety

2.15.1 Process Chamber 2.15.2 Transformers

DANGER Burn hazard if hot vapours escape! DANGER Electromagnetic field!

The contact of melt and water results in gas expansion in the chamber The transformers generate a strong electromagnetic field that can kill
interior. Due to that, vapours can exit at the blow-out skirt. pacemaker wearers.
During operation, do not stand under or near to the blow-out skirt. • Pacemaker wearers must keep clear of the transformers.

DANGER Burn hazard when opening the top part of chamber!

WARNING Fire hazard!
Hot gases can escape during opening of the top part of the chamber.
If not specified transformer ports are used, there is a fire hazard.
• Wear protective equipment.
• Use Transformer ports only as specified.
• Keep sufficient distance to the top part of chamber.
• Do not approach the top part of chamber shortly after opening.

DANGER Hazardous voltage!

WARNING Hazard during ingot removal due to flying debris! There is an electric shock hazard if the protective earth connection is
insufficient.
During ingot removal the crucible may burst and lead to flying debris.
• Use earth connection as specified.
• Wear protective equipment.
• During operation, keep clear of the transformer.
• Wear equipment for eye and face protection.
• Keep sufficient distance to the hot ingot.

WARNING Hot surface!

During operation, the transformer surface becomes hot. There is a
WARNING Burn hazard during ingot removal! burn hazard.
• Wear protective equipment. • During operation, keep clear of the transformer.
• Let hot parts cool down before starting work. • After operation, let the surface cool down sufficiently before
• Keep sufficient distance to the hot ingot. any work on the transformer.

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Safety Safety

2.15.5 Melting Crucible

2.15.3 Top Part of Chamber in Parking Position

WARNING Use of damaged or unsuitable melting crucibles!

WARNING Falling parts!
The use of damaged or unsuitable melting crucibles results in a risk of
While the top part of chamber is in parking position, loosen parts from injury or material damage. There is a risk of injury from spilling melt
construction may fall down. and hot vapours below the blow-out skirt.
• Wear safety helmet. o Melt gets into the bottom part of chamber.
• Wear equipment for eye and face protection. o The furnace wall is damaged.
• Carry out a visual inspection to detect loose parts early. o If the melt comes into contact with water, there is gas
• Secure the assembly location against access of unauthorized expansion.
persons by means of a chain.
• Prior to loading, check the melting crucible for damage.
• Check also the coating of the crucible for damage.
• The supplier of the melting crucibles may offer trainings for the
2.15.4 Support Crucible correct use and loading of the crucibles. centrotherm SiTec GmbH
strongly recommends to the owner/operator’s personnel to attend
these trainings.
WARNING Support crucible break! • Do not use damaged melting crucibles.
The mechanical failure of the support crucible results in damage to the • Make sure the melting crucible is not damaged during loading
melting crucible. There is a risk of injury from spilling melt and hot and movement.
vapours below the blow-out skirt.
o Melt gets into the bottom part of chamber.
o The furnace wall is damaged.
WARNING Incorrect loading of the melting crucible!
o If the melt comes into contact with water, there is gas
expansion. If the maximum filling weight is exceeded, the retaining capacity of the
hot zone integrated safety barrier is exceeded as well, and no more
• Check the support crucible for damage melt can be collected. There is a risk of injury from spilling melt and
(chapter 11.3.15, page 192). hot vapours below the blow-out skirt.
• Make sure the melting crucible is correctly mounted and fits to the The following can result from incorrect loading:
support crucible. o Silicon melt leaking into the bottom part of chamber
• Only use specified melting crucibles. o Damage to the furnace wall
o Gas expansion due to melt–water contact
o Overfilled melting crucibles can damage upper hot zone when
the top part of chamber is closed.

• Only fill the melting crucible to its maximum weight, filling level and
height. Even if the maximum weight is not reached, melted silicon
may flow over as a result of wrong silicon filling height or packing
density.
• Measure the weight of the loaded melting crucible before and after
the process cycle. Discrepancy regarding the weight indicates a
silicon overflow. In this case check the integrated safety barrier
(chapter 11.3.16, page 192).
• Ensure that the net weight and the ingot weight is in
accordance to the specification!

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Safety Safety

DANGER Suspended loads hazard! DANGER Cooling water supply failure!

During transport of the melting crucible and ingot removal, parts can A failure of the cooling water supply results in overheating of water-
drop and injure you. cooled parts (chamber jacket, heat exchanger). Possible
consequences are:
• Do not stand under suspended load.
• Use visual and acoustic signals to warn of the hazard. Sstability loss of structural parts
o Air infiltration
o Critical process conditions
o Formation of carbon monoxide from oxidation of carbon
DANGER Uncontrolled solidification of melt! materials resulting in a suffocation hazard.
Uncontrolled solidification of melt due to a heater failure, faults in the
• If the cooling water supply fails, purge the furnace with argon.
electrical system or mechanical damage to the heating conductor can
damage the melting crucible. There is a risk of injury from spilling melt • If the cooling water exceeds the temperature of 80 °C, all cooling
and hot vapours. water hoses need to be exchanged.
• Use suitable means to establish a redundant voltage supply • Ensure sufficient cooling water supply (chapter 5.1.3, page
(chapter 5.1.6, page 73). 73).
• Regularly check the electrical system for damage
(chapter 11.3.8, page 190).

DANGER Hazardous voltage!

Additives in the cooling water such as antifreeze agent can affect the
2.15.6 Hot Zone Integrated Safety Barrier electric conductivity of water. This renders the insulation of the
electrode cooling system inoperative so that voltage is applied on
tubes, fittings and other parts.
DANGER Hot zone integrated safety barrier break! • Do not add any additives which affect electric conductivity to the
cooling water.
The mechanical failure of the hot zone integrated safety barrier results
in a loss of the melt retaining function. There is a risk of injury from • Have the cooling water quality analyzed
spilling melt and hot vapours below the blow-out skirt. (chapter 11.3.22, page 193).
o Melt gets into the bottom part of chamber.
o The furnace wall is damaged.
o If the melt comes into contact with water, there is gas WARNING Burn hazard!
expansion.
During operation, pressurized cooling water or hot water vapour can
• Regularly check the hot zone integrated safety barrier for damage exit at the safety valve.
(chapter 11.3.16, page 192). Possible consequences are:
o Burns
o Contact with pressurized cooling water
2.15.7 Cooling Water o Slipping.

• Connect an unpressurised drain to the outlet of the safety valve.

DANGER Cooling water entry through arc formation! • Install an expansion vessel at the “water separator”
A mechanical contact loss of the current feed through to the electrode
can result in arc formation. This can lead to entry of cooling water and
thus to gas expansion from the contact of melt and water. There is a
risk of injury from spilling melt and hot vapours below the blow-out
skirt.
• Regularly check the current feed through for damage
(chapter 11.3.18, page 193).

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Safety Safety

2.15.8 Chemicals DANGER Hazardous voltage!

During work on the control cabinet, there is an electric shock hazard.
Please observe the following safety measures:
Hazard Measures
• Only electrically skilled persons are allowed to carry out work on
Argon live components, such as control cabinet, transformer and power
Harmful if inhaled in high • Remove victim to fresh air while using cables.
concentration. a self-contained breathing apparatus. • Before any work on live components switch off the main switch
• Keep warm and at rest. and switch off the UPS inside the control cabinet.
• Call a doctor. In case of apnoea, • The control cabinet can only be opened with a special key. That
artificial respiration. special key may only be handed to authorized persons.
Contains gas under pressure; may • Store container at below 50 °C in a
explode if heated. (H332) well-ventilated place.
2.15.10 Process Control

DANGER Process control failure!

CAUTION If the process control fails, the process cannot be controlled anymore
Process gas supply failure!
and PLC and temperature recording can also fail. Possible
If the process gas supply fails, no more argon can be fed to the consequences are:
process chamber. Possible consequences are:
o Damage to the furnace
o Failure of the emergency purge function o Critical process conditions
o No redundancy of the cooling system o Uncontrolled solidification of melt.
o Oxygen purge in might occur
o Graphite might be polluted. • There is a risk of injury from spilling melt and hot vapours.
• Observe the inspection intervals in “11 Maintenance” on page 179.
• Provide for redundant process gas supply
• If the process control fails, purge the furnace with argon.
(chapter 5.1.5, page 73).
• Existing process gas is cooled through circulation.
• If the process gas supply fails, the cooling power of the water
cooling system is sufficient to safely complete the process. DANGER Critical process conditions!
Wrong operation of the furnace can result in critical process
conditions. There is a risk of injury from spilling melt and hot vapours.
2.15.9 Voltage supply • Only personnel sufficiently instructed about the process may
operate the furnace.

DANGER Voltage supply failure!

2.15.11 Covers on Live Parts
If voltage supply fails, this results in the failure of the customer cooling
water supply and in the failure of the heaters. There is a risk of injury
from spilling melt and hot vapours.
DANGER Hazardous voltage due to missing covers!
• Use suitable means to establish a redundant voltage supply If covers on live parts are missing or damaged, live parts can be
(see chapter 5.1.6, page 73). touched so that there is an electric shock hazard.
• Ensure that any phase is supplied with power. • Only operate the furnace with intact covers.
• Regularly check the covers for damage
(chapter 11.3.5, page 190).

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2.15.12 Screw Jack 2.16.2 Restarting after an Emergency

The conditions could be an alarm, a warning or a fault.

WARNING Crush hazard! WARNING Hazardous furnace condition!

During driving the carriage system, lifting and lowering the top part of Risk of injury or damage to the furnace!
chamber, there is a crush hazard at the screw jack.
• Only switch the furnace back on after you have identified and
• Transports of persons on the top part of chamber as well as remedied the cause for emergency stop.
standing in the danger zone are prohibited.
• Do not grab into the screw jack while the top part of chamber
is moving.
Only authorized persons may switch the furnace back on after an
emergency.
Assign persons the responsibility for switching the furnace back on
2.16 Emergency after an emergency.

2.16.1 What to Do in the Event of an Emergency

1 Actuate one of the emergency stop buttons on the control cabinet 1 Switch off the main switch before remedy.
or on the two-hand control. o Padlock the main switch against switch-on.
o Attach a "Maintenance" sign.
1 emergency stop button
2 Remedy the causes of all warning or failure messages.
3 Switch the main switch back on.
4 Unlock the emergency stop button by pulling.
5 Press the "Reset emergency stop" button near the control panel.
6 Acknowledge all failure messages.

Figure 10: Emergency stop button

2 Provide for cooling water supply by leaving the main valves open.

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Technical Data Technical Data

3 Technical Data Description Unit Value

This chapter contains the technical data of a single furnace system Electrical input 3/N/PE Input voltage V 3 x 400
(see chapter 1.1 ID N°). Each tandem system consists of two furnace Frequency Hz 50
systems. The described projects consist of two tandem systems.
Further on the specification of the cooling water is described. Maximal power consumption kVA 320
Maximal rated current A 463
3.1 Technical Data – Furnace
Sound pressure level SIHI measurement DIN ISO 9614 db (A) < 80
Table 3-1: Technical Data – Furnace
Ambient conditions Temperature °C 10 - 35
Description Unit Value Relative humidity (non-condensing) % 20 – 80
Weight (entire tandem system) kg approx. 7500
Weight components Support frame kg approx. 3000
(without water and 3.2 Specification of cooling water
attached peripherals) Carriage kg approx. 1500
Chamber brackets with drag chains kg approx. 500
Table 3-2: Specification of cooling water
Control cabinet kg approx. 750
Transformer (2 units) kg approx. 630 each Description Unit Value

Cooling water distributor kg approx. 150 pH value pH 7 to 8

Pump station kg approx. 500 Electrical conductivity uS/cm 200

Heat exchanger kg approx. 100 Carbonate hardness (KH) °dH 5 to 6

Electrodes (6 units) kg approx. 50 each Total hardness (KH) °dH 5 to 6

Top part of chamber kg approx. 1800 Chloride (CI) mg/l < 150

Bottom part of chamber kg approx. 1700 Algae growth 1 / ml < 100

Hot zone (complete) kg approx. 250 Turbidity NTU < 1.0

Support crucible kg approx. 150

Ingot weight kg approx. 500 3.3 Specification of Argon

Pressures Operating pressure bar 5 Table 3-3: Specification of Argon

cooling water
Description Unit Value
Final vacuum pressure mbar 5 x 10-2
% 99.999% minimum
Process pressure mbar 600 Purity
Quality Definition 5.0
Temperatures Cooling water feed °C 22 +/- 3°C
Inlet pressure bar 6±1
Cooling water return °C 42 +/- 3°C
Temperature °C 20 - 30
Furnace temperature °C approx. 1600
Flow rate (during process) sl/m 1 - 40
Volume flow rates Roots pump argon m³/h 1000
Max Flow rate (filling) sl/m 250
Cooling water volume l/min 280
Average Argon consumption while Nl/min 40
process

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Technical Data Delivery Scope, Transport and Storage

3.4 Specification of Compressed Air 4 Delivery Scope, Transport and Storage

This chapter contains the scope of supply, information on transport
and storage of the delivered components.
Table 3-4: Specification of compressed air
4.1 Delivery Scope
Description Unit Value
The following parts are included in the Multi Crystallization Furnace
Quality compliant to ISO 8573-1:2001 Class 333 system delivery scope:
Particle size µm <5 • Support frame rack with
Particle density mg/m³ <5 o Furnace intake
Inlet pressure bar 7 bar ± 1 o Walkway
o Staircase
Temperature °C 20 - 30
Consumption per Ingot run m³ < 1,5 • Two furnaces with:
o Carriage with chamber brackets and drag chains
o Hot zone for crucible intake
o Top part of chamber
o Bottom part of chamber

• Electrodes
• Carriage (with drive units)
• Control cabinet with power circuitry and PLC
• Transformer
• Argon supply-piping and instrumentation
• Heat exchanger
• Cooling water supply and return piping, distributor, valves and
instrumentation
o Main connection valve
o Duplex filter with backwash capability
o Safety valve with steam discharge

• Two hand control

• Support crucible
• Pump station with piping and instrumentation
• Pyrometers and Thermo Couples (T/C)

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Delivery Scope, Transport and Storage Delivery Scope, Transport and Storage

4.3 Instructions for Transport

4.2 Transport
Use a forklift truck or crane to transport all components. If the system 4.3.1 Chamber
is already assembled, you must dismantle the system before you can
lift and / or transport the individual components.
Dismantle the system to the following main components: 1 Transportation eyelets
• Top part of chamber, bottom part of chamber and hot zone
• Pump station
• Transformer
• Control cabinet
1
• Carriage with drag chain
• Support frame rack
• Platforms and staircase
• Cooling water supply comprising
o Main line cabinet
o Cooling water pipe work

The system must never be transported with supplies!

Figure 11: Top part of chamber with transportation eyelets

The weights of the individual main components are given in

“3.1 Technical Data – Furnace” on page 61. 1 Transportation eyelets

For longer transportation, pack components in suitable boxes or

containers.

Required indications relating to the lifting capacity of load lifting tackle

are provided in the technical data in “3.1 Technical Data – Furnace”
on page 61. 1

WARNING Suspended loads hazard!

During transport, parts can drop.
• Do not stand under suspended load.
• Use visual and acoustic signals to warn of the hazard.
• Only use admissible and intact lifting gear.
Figure 12: Bottom part of chamber with transportation eyelets

1 Disconnect the supply fittings for cooling water, compressed air,

Some components have transport eyelets. Fasten a sufficiently long argon and electrical components on the top part of chamber, of
rope to the transport eyelets so that the angle is not smaller than 60°. the carriage and of the whole system.

Use a crane to lift the individual components. Observe the maximum

admissible load carrying capacity and the center of gravity!

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Delivery Scope, Transport and Storage Delivery Scope, Transport and Storage

2 Separate the supply fittings for cooling water, compressed air,

argon and electrical components on the bottom part of chamber, 4.3.2 Control Cabinet
of the rack and of the whole system. The control cabinet can be lifted by a crane and a suitable lifting
3 Dismount the chamber brackets which connect the chamber with device.
the carriage. 1 Eyelets
4 Put all the components of the furnace system in such a position 1
that the chamber can be lifted out collision-free.

DANGER The chambers may fall during lifting!

Death or serious injuries if parts of the body are affected and/or
crushed.
• Never stand under suspended loads.
• Only use lifting devices which can safely bear the weight of the
parts!
• Wear safety footwear, protective gloves and safety helmet
when lifting.

5 Lift the top part and the bottom part of the chamber separately and
carefully.
6 Balance the system carefully, if necessary shift position points.
Figure 13: Control cabinet with eyelets
Now you can continue to lift and carefully transport the top and
afterwards the bottom part to the desired location. How to lift the control cabinet: 1Disconnect supply fittings to the cabinet
2Fasten the hoisting gear or chain to the eyelets (e.g. with load hooks)
3Pass the crane hook over the center of gravity of the control cabinet.
When transporting the system with a forklift truck, the chamber system 4Hitch the hoisting gear in the crane hook.
must be secured to avoid tipping over. Use long forks with bars to
support the frame.

DANGER The control cabinet may fall during lifting!

Death or serious injuries if parts of the body are affected and/or
crushed.
• Never stand under suspended loads.
• Only use lifting devices and lifting accessories which can safely
bear the weight of the parts!
• Wear safety footwear, protective gloves and safety helmet
when lifting.

5Lift the control cabinet carefully until it is freely suspended.

6Balance the control cabinet, if necessary.

Now you can continue to lift and carefully transport the control cabinet
to the desired location.
The control cabinets of the system must be packed in accordance with
valid normative documents (fragile goods). In addition, they must be
protected from falls and other damage during transportation.

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Delivery Scope, Transport and Storage Delivery Scope, Transport and Storage

4.3.3 Hot Zone 4.4 Storage

The big single parts are lifted out of the bottom part of the chamber Store components
with a crane and a suitable lifting device. Further transport can then
take place using a crane, forklift truck or elevating platform truck. • packed on pallets
Transport instructions: • dry
• under roof.
• Protect the hot zone from shocks and vibrations during
transportation.
Storage temperature: -10 °C to +25°C
• Protect the open connecting holes and screw threads from the Humidity: non-condensing
ingress of dirt.
• Use suitable lifting accessories in such a way as to avoid damage
to the furnace.
• Ensure even, horizontal lifting.
• Fasten all the parts by tying them somewhere.
• Avoid jolt when putting down components.

How to lift big parts of the hot 1 Dismount every small part from the big ones, like the Argon shield
zone: and the top and bottom heating.
2 Start lifting the single big parts as follows:
o At the upper hot zone fasten four suitable eyebolts to the hot
zone.
o Hitch a suitable hoisting gear there.
o At the hot security box use the delivered lifting tool from
centrotherm Sitec GmbH and screw the four screws into the
windings in the corners.
o At the heat sink screw use a suitable eyebolt into the winding in
the middle of it to lift it with a suitable hoisting gear hitched
there.
o At the lower isolation box use the four ropes under each corner
and attach them to a suitable hoisting gear and lift it.

DANGER The hot zone may fall during lifting!

Death or serious injuries if parts of the body are affected and/or
crushed.
• Never stand under suspended loads.
• Ensure the eyebolts are seated securely.
• Only use lifting devices and lifting accessories which can safely
bear the weight of the parts!
• Wear safety footwear, protective gloves and safety helmet
when lifting.

3 Lift the big parts of the hot zone carefully until it is suspended
unsupported.
4 Balance the big parts of the hot zone, if necessary.

Now you can continue to lift and carefully transport the big parts of the
hot zone to the desired location.

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Assembly and Installation Assembly and Installation

5 Assembly and Installation 5.1.1 Hall

This chapter describes the assembly and installation of the furnace
system.
DANGER Fire hazard!
5.1 Requirements Risk of death or serious injury.
• The floor around the furnace must be non-combustible (fire
Only qualified, trained skilled workers appointed to do so may carry resistance class 0).
out assembly and installation of the system. • Storage of combustible materials near the furnace is
prohibited.
Only electrically qualified personnel may perform work on the
electrical equipment.

The hall floor must comply with the following requirements:

Assembly, installation Observe accident prevention regulations! Use personal protective
equipment for work: wear safety footwear, protective gloves and
safety helmet. Table 5-1: Requirements Hall Floor
Proceed with assembly and installation in accordance with the
documents supplied. These are, in particular: Parameter Value / Property
• Layout wiring diagrams material concrete, normally reinforced
• Drawings concrete compressive strength C 20/25
• Piping and Instrumentation Diagram class
Please note in particular: base plate / footing homogeneous, monolithic, level,
• Use lifting eyelets, ring-bolts and other transport aids provided. free of cracks, no joints between
the furnaces within one tandem
• Avoid the use of force to prevent lateral forces and tensions in system
pipe-work and equipment. Ensure good support of the pipes!
• Avoid the use of hemp and putty as sealants. These can result in
contamination and consequent malfunctions.
5.1.2 Utility Supply
• When laying flexible pipes, ensure that these do not chafe or
collide with other parts. • The continuous supply of utilities is essential.
• Avoid interruptions.
Commissioning If assembly is duly performed, commissioning and functional tests • Supply of utilities in the specified quality and quantity is
may begin. mandatory.

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Assembly and Installation Assembly and Installation

5.1.3 Cooling Water Supply

5.2 Requirements for Erection
Use suitable means to establish a redundant cooling water supply.
The owner/operator must carry out the following work prior to erection:
Additional supplies for increased availability of cooling water supply
can be: • Enough space and measures to avoid disturbance by facilities,
components or other equipment and infrastructure nearby.
• Town water (please refer to specification)
• Consult the building statics to check if the building is designed for
• Elevated tank with sufficient capacity (115, 200 l min. per furnace) the furnace load.
• Redundant cooling water supply. • Cordon off the designated erection site for the furnace.
A separation of the cooling circuit from the cooling facilities reduces • Provide for sufficient space to temporarily store delivered
the probability of soiling. components.
• Put up warning signs to point out erection work.
Use a closed cooling circuit for furnace cooling. Via a heat exchanger
you can connect a secondary cooling circuit with cooling facilities (e.g. • Provide for the following supplies:
cooling towers). o Electrical current
Then, additives such as antifreeze agents in the secondary cooling o Cooling water
circuit do not affect chemical and physical characteristics of the o Argon
primary cooling circuit. o Compressed air.

5.1.4 Water Filter

• Prior to every process start-up, check the function of the water WARNING Risk of injury or damage to the furnace!
filters. The impact of vehicles against furnace components, particularly
• Use electronic filter monitoring to increase the availability of against load-bearing parts of the platform, can result in an injury
the filter system. hazard or furnace damage.
Possible consequences are:
5.1.5 Process Gas Supply
o Personnel injury
• Use suitable means to ensure availability of process gas (argon). o Hazardous reduction of platform statics
• Use redundant feed, e.g. two independent cylinder bundles. o Damage to furnace components.

5.1.6 Voltage Supply • Attach suitable collision protection.

Use suitable means to establish a redundant voltage supply, e.g. with • Mark transport routes.
• A ring supply with two network supplies;
• A sufficiently dimensioned stand-by generator.

5.1.7 Vacuum Pump Station

If the furnace cannot be sufficiently protected against vehicle impact,
no vehicle traffic is allowed near the furnace.

CAUTION Soiling and break hazard!

If the pumps are used improperly, there is a soiling and break hazard.
• Remove the protective caps from the pump nozzles only shortly
before attaching the pipelines.
• Make sure the pipelines have been cleaned before you install the Erection and initial commissioning of the furnace are carried out
pump. by centrotherm SiTec GmbH.
• Support pipelines so that there is no tension on the pump
parts (break hazard of pump parts).

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Technical Description of the Furnace Technical Description of the Furnace

6 Technical Description of the Furnace

This chapter describes the range of applications and components of 5 6
the tandem system. 1 2 3 4

6.1 General overview

The main components of the Multi Crystallization Furnaces are:
• Vacuum pump system with piping of the vacuum path
• Pyrometers and thermocouples (T/C)
• Support frame rack with
o Walkway
o Staircase
• Chambers with:
o Carriage with chamber brackets and drag chains
Figure 14: Main components of the tandem system (top view)
o Cooling/heating filter circuit
o Hot zone 1 Furnace 1 2 Carriage furnace 1
o Top part of the chamber
3 Support frame rack 4 Parking position
o Bottom part of the chamber
5 6
• Control cabinet with power circuitry and PLC Furnace 2 Carriage furnace 2
• Transformer
• Argon supply-piping and instrumentation
1 2 3 4 5 6
• Cooling water piping and instrumentation with distributor
o Valves and instruments
o Duplex filter with backwash capability
o Safety valve with steam discharge
• Control console consisting of monitor and control panel (in control
cabinet)
• Support crucible
• Pump station with piping and instrumentation

The main components are illustrated, as far as possible, in the

following figures.

7 8 9 10
Figure 15: Main components of the tandem system (side view)

1 Control cabinet furnace 1 2 Top part of chamber 3 Bottom part of chamber

furnace 1 furnace 1
4 Bottom part of chamber 5 Top part of chamber 6 Control cabinet furnace 2
furnace 2 furnace 2
7 Transformers furnace 1 8 Pump station furnace 1 9 Pump station furnace 2
10 Transformers furnace 2

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Technical Description of the Furnace Technical Description of the Furnace

6.2 Process Chamber Components

1 6.2.1 Exterior Process Chamber

2

3
6 3
1

2
5

Figure 16: Main components of the tandem system (isometric view)

Figure 17: Top view of the process chamber
Table 6-1: Furnace Components

Pos. Designation Explanation Table 6-2: Process Chamber Components

1 Carriage (with vertical and The carriage unit is used for opening and closing the process chamber
Pos. Designation Explanation
horizontal drive) and moves the top part of chamber between parking and furnace
position. 1 Heat exchanger flange During the process, process gas is removed from the chamber interior
through this flange and fed through the heat exchanger.
2 Process chamber Silicon is melted in the process chamber. The components of the
process chamber are described in “6.2 Process Chamber Components” 2 Bypass The chamber is directly evacuated through this flange.
on page 78.
3 Blow-out skirt If there is gas expansion inside the chamber, the blow-out skirt deviates
3 Parking position On the parking position the top part of one process chamber is parked exiting gas towards the bottom.
during crucible charging or maintenance.
4 Plastic cover The plastic cover protects you from hazardous voltage from the
4 Transformers The transformers supply the energy with the operating voltage to the electrodes.
heating.
5 Control cabinet The control cabinet contains the electrical components to control the
furnace.
6 Support frame rack Process chamber, carriage and platform are mounted to the frame.

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6.2.2 Interior Process Chamber (Hot Zone)

13
2

11

3
3

12

4
1 2
10

Figure 18: Bottom view of the process chamber 9

8
Table 6-3: Process Chamber Components
Figure 19: Sectional view of the process chamber
Pos. Designation Explanation
1 Process gas supply Process gas is supplied through this flange. At the integrated pyrometer Table 6-4: Process Chamber Components
flange, the temperature of the bottom of the support crucible or, if a plug
is used, the temperature inside the heat sink can be measured.
Pos. Designation Explanation
2 Cooling water connection Cooling water is supplied through this flange.
1 Pyrometer flange The pyrometer flange serves to connect pyrometers vacuum-tightly. The
3 Thermocouple flange The thermocouple flange serves to connect thermocouples vacuum- optical path of the pyrometers is purged with argon to avoid clogging
tightly. and fogging.
Rotameters are installed on the individual pyrometer flange. There, the
argon flow can be individually visualized and adjusted.
2 Top welded casing of the The top welded casing is the moveable part of the process chamber.
process chamber The stainless steel casing of the process chamber supports the
individual components. The chamber jacket is water-cooled.
3 Top part of the insulation The insulation box thermally insulates the heated chamber interior.
box Hence, is responsible fro the temperature-profile.

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Pos. Designation Explanation

6.2.4 Furnace top part internal "upper hot zone"
4 Bottom part of the The insulation box thermally insulates the heated chamber interior. The furnace upper hot zone is mounted in the top part of chamber. It
insulation box Hence, is responsible fro the temperature-profile. consists of the following components:
5 Bottom welded casing of The bottom welded casing is securely fastened to the frame. The • Hot zone hanging
the process chamber stainless steel casing of the process chamber supports the individual
• Upper isolation box
components. The chamber jacket is water-cooled.
• Side heating
6 Final safety barrier If silicon melt leaks out, a part of it is collected in the final safety barrier.
• Argon shield
7 Hot zone integrated safety If silicon melt leaks out, the malt can be collected in the hot zone
barrier integrated safety barrier. 6.2.5 Hot Zone adsorbing basin
8 Blocking box The blocking box design excludes the possibility of a contact between In the bottom part of chamber a heat resistant adsorbing basin called
melt and cooling water. final safety barrier is mounted. The basin is located beneath the hot
zone. This impounding basin is intended to admit liquid silicon in the
9 Heat sink The arrangement of gas inlets and outlets ensures a defined gas flow event of a crucible leakage. This should prevent the chamber from
and an even temperature distribution in the heat sink. The large-area being destroyed by molten silicon penetrating the chamber wall which
transition to the support crucible supports fast and homogeneous will also lead to fast steam expansion and also enable the furnace
temperature control of the melting crucible. system to be securely switched off in the event of leaking silicon.
While silicon is being melted, the bottom plate of the heat sink gets
heated by the bottom heater. Furthermore, this energy is transferred to 6.2.6 Hot Zone Installation
the melting crucible.
The hot zone is installed in the process chamber divided into modules.
According to that principle, controlled heat removal from the crucible
takes place during the "crystallization" process step. Heat is removed • The upper hot zone mounted in the upper part
from the process chamber by the cooling gas. • The lower hot zone mounted in the lower part
10 Bottom heater The bottom heater is installed in the bottom part of chamber. Graphite
rods are heated by electrical current. By heat radiation from the rods the 6.2.7 Crucible insert
process gas can be heated. The following crucible inserts can be operated in the furnace system
as specified:
11 Current feed through At the current feed through, the electric cables for the foil heater and
bottom heater are connected. Electrical current is supplied to the • Crucible corresponding to contract
heaters via graphite electrodes. Current feed through is a vacuum-tight • Support crucible which is corresponding to the process crucible
and water-cooled.
12 Argon shield By means of the argon shield, argon is distributed over the melting
crucible and forms a shielding layer against air in the chamber.
13 Foil heater/side heater The foil heater is located in the top part of chamber. Graphite foils are
heated by electrical current. Heat radiation from the foil results in heat to
melt the silicon.

6.2.3 Furnace bottom part internal "lower hot zone"

The furnace lower hot zone is mounted in the bottom part of chamber.
It consists of the following components:
• Final safety barrier
• Blocking box
• Heat sink
• Lower isolation box
• Bottom heating
• Hot safety box

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6.3.1 Cooling water supply

6.3 Cooling Water Supply
The cooling water supply is particularly important and must be
The cooling water supply is on the back of the chamber near the pump monitored carefully by the operating personnel continuously. Each
station in order to keep cooling pipes short and pressure losses low. furnace system must be supplied with treated cooling water.
The initial pressure must be 5 bar while having a continuous flow rate
volume of 280 l / min.
Temperature, flow and cooling water pressure is displayed at the
control panel either at the inlet and outlet side of the unit.
In case of insufficient cooling water supply, exceed or be lower than
the temperature or pressure limits a warning occurs. After a defined
period a default requires an operator interaction, e.g. additional water
supply or pressure increase. Those signals of the measurement
devices are recorded and evaluated by the control of the furnace
system.
The cooling water supply system is recorded by the following
instruments.
Flow rate limit switch:
F101, Flow meter: Monitors the minimum flow rate in the system inlet
and having a maximum and minimum limit switch.
Temperature measurement:
Figure 20: Position of the cooling water supply T101, Temperature Switch: Monitors the temperature in the system
inlet and having a maximum and minimum temperature limit switch.
1 Water supply distributor Pressure measurement:
2
2 P301/P302, Pressure transducers for main cooling water supply:
Pressure relief valve
Monitors the cooling water supply pressure in the system inlet and
3 Isolating valve filter 2 having a maximum and minimum pressure limit switch. You can adjust
1 the inlet pressure by adjusting the V301 for the complete system.
4 Filter 2
P303, Pressure transducer for chamber cooling water supply: Records
5 Drain valve the cooling water supply pressure for the chamber top and bottom part
6 Filter 1 only. P303 has a primary pressure and return pressure indicator. You
can adjust the inlet pressure by adjusting the V303 for the chamber
7 Isolating valve filter 1 7 only.
8 Returns of the single Cooling water filter and pressure gauges on the filters:
water-loops with throttle F204, F205 Filter: Contamination of the filter is monitored via the
and measurement differential pressure given by the analogous pressure indicator before
equipment 6 and after the filter. The filter unit is redundant only one filter must be in
operation while the second one is in standby. In normal situation the
8 3 differential pressure should display the same value, if the differential
pressure increases the filter is contaminated and the flow rate is
4 decreasing. It is not displayed or monitored at the PLC.

5
If the pressure decrease exceeds 1 bar, the second filter should be
Figure 21: Schematic view of the cooling water supply put into operation and the contaminated filter should be cleaned. The
decrease is not monitored at the PLC!
If a particular flow rate of cooling water is not reached a process run
can not be started. If the flow rate of electrode cooling water is not
sufficient, the particular heater is switched off.
The process instrument diagram (P&ID CT600) shows the internal
cooling water supply of the furnace system.

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6.3.2 Cooling water loops 6.4 Vacuum pump station

The cooling water supply provides the necessary cooling power for the
furnace system. 6.4.1 Argon flushing circuit
Following systems are part of the cooling water unit: In the Argon flushing circuit the furnace is inertized by injecting Argon
into the furnace and setting an operating pressure of approx.
o Cooling water supply distributor 600 mbar. The furnace atmosphere is permanently observed by
o Cooling water return collector including the flow and suction in order to maintain this operating pressure. The argon
temperature measurement units and adjusting valves for each protects the indoor atmosphere against the surrounding atmosphere,
loop which may flow into the furnace via leaks. The pump station consists
o Different loops to the consumer of a roots pump (1.000 m³/h) and a backing pump (250 m³/h). These
pumps are fully automatic controlled by the PLC and the software.

The cooling water supply to the furnace consists of the following 6.4.2 Heat exchanger
cooling water loops:
The heat exchanger has a cooling efficiency of approx. 60 kW. It is
o Chamber top part intended to cool the exhaust gas extracted from the furnace to prevent
o Chamber bottom part the pumps from being damaged. The heat exchanger needs a
o Heat exchanger permanent cooling water supply while operating the furnace.
o Electrodes top part
6.4.3 Vacuum Operation
o Electrodes bottom part
The pump station is continuously running during process. It is used for
o Vacuum pump system
different operations like evacuation, pressure control and recirculation.
6.3.3 Cooling water return and cooling water redundancy 1 Heat exchanger
The cooling water flow can only adjusted in the cooling water return 2 Pipe connection 1
collector.
3 Roots blower
o Vacuum pump system: 5 l / min
4 Bypass pipe 2 4
o Per Electrodes: 25 l / min
o Per Chamber: 82.5 l / min 5 SIHIdry pump
o Heat exchanger: 40 l / min
3

All furnaces must be supplied with the complete cooling water flow
continuously, also during loading and unloading of the furnace to
avoid malfunctions.
The cooling water supply system must have a redundant supply unit,
provided by the plant’s owner/operator, to avoid damage of the system
when having power supply failure or cooling water breakdown. If the
supply fails completely an emergency supply system for the pumps or
5
an emergency cooling water supply system (water network, elevated
tanks or accumulator tank), provided by the plant’s owner/operator,
must be operated until the furnace parts have been safely cooled
down. Figure 22: Components of the vacuum pump station

The vacuum pump station consists of a motor-pump combination,

isolating valves and a heat exchanger. The backing pump creates the
necessary vacuum at the start of the process. The roots blower
If the power supply can not be activated after approx. 3 min, measures
supports the backing pump during the evacuation of the chamber
on emergency cooling must be taken immediately!
interior and keeps the gas in motion.
The roots blower delivers 1000 m³/h and the backing pump 250 m³/h.
The hot zone should be operated in a low pressure – Argon
atmosphere. The operating pressure of the argon during process is
set at 600 mbar. The final vacuum obtainable is about 0.05 mbar.

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The leak and desorption rate can be up to 0.05 mbar l/s, for empty,
dry chambers, (measured after 8 hours of pump operating time). The 6.6 Carriage
pump operating time at 0.1 mbar is up to 10 min. The carriage unit is used for opening and closing the process chamber
and moves the top part of chamber between parking and furnace
6.5 Transformer position.
The transformer is set up on the system and consists of the following The carriage unit consists of the following modules:
components:
• Carriage rack
• Housing • Lifting unit two-sided
• Primary-secondary transformer unit • Hoisting frame two-sided
• Cable for heating electrodes • Vertical drive motors two-sided
The transformers can be heavily magnetized during process. • Drag chains on two-sided
Therefore, no operating personnel should work near the transformers • Top part of chamber
or touch them.

1 Drag chain
2 Lifting unit
3 Carriage
4 Top part of chamber

Figure 23: Carriage

Drive unit vertical / lifting The vertical drive unit consists of a frequency-controlled motor which
lifts and lowers the top part of the carriage. The drive units are
installed on both sides of the top part of the chamber. The frequency
converters itself are located in the control cabinet. Main functionality of
the vertical drive unit is to open and close the furnace chamber.

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Drive unit horizontal / moving Track system The horizontal drive unit consists of two frequency 6.7 Parking Position
controlled drive motors mounted on both sides of the carriage. These
motors move the top part of chamber between the furnace and the The parking position of a tandem system is designed to park one top
parking position. The frequency converters itself are located in the part of a chamber while the second furnace system is in operation.
control cabinet. Main functionality of the horizontal drive unit is to This configuration offers the advantage of a process flow optimized
move the furnace chamber. design and makes optimum use of the parking position.
The track system is securely mounted and aligned on the rack. It gives The top parts of the chambers can be parked at the parking position
Track system for two purposes crucible charging and maintenance.
a guided way for the horizontal movement of the carriage carrying the
top part of the chamber. Take care that the second carriage is locked and the selected carriage
Drag chain The drag chains are flexible cables and hose guides which are has received all necessary clearances from the control unit before you
respectively mounted on both sides of the chamber on the brackets. move the selected top chamber to the parking position.
The drag chains enable vertical and horizontal movement of the top The operator should take care of all safety measures to avoid collision
part of chamber. All flexible parts of the drag chains the cables and of the carriages as well as personnel hazard.
hoses inside must be regularly checked for wear and tear.

Figure 24: Parking position

1 Service access 2 Staircase

3 Parking position 1&2 empty 4 Carriage 1 in operating
position
5 Carriage 3 in parking 6 Top part of chamber 3
position parking position

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6.7.1 Service Access and Staircases 6.8 Silica Crucible

The platform can be entered by using the staircase. Only instructed
and trained staff members are allowed to enter the level of the 6.8.1 Silicon and Graphite Storage
carriages, tracks, parking and operating position of the chamber and An ambient condition without dust and metal contamination is
platform. The service access is arranged around both chambers in indispensable for the operating phases “Fill crucible” and “Charge
such a way that all the necessary work on this level can be performed crucible”. Any kind of contamination of the silicon with other materials
safely. especially metals influences the quality of the ingot. Therefore, a
suitable rooms for both silicon and graphite needs to be provided by
6.7.2 Process Monitoring the plant’s owner/operator. E.g. a kind of clean room, can be used for
Process monitoring takes place on the control panel which is charging the crucible or store and handle graphite.
assembled at the control cabinet.

An ambient condition without dust and metal contamination is

indispensable for the operating phases “Fill crucible” and “Charge
crucible”.

6.8.2 Crucible Charging

Crucible charging with silicon feedstock

1 Example of charging with

Si crystal bricks
3 Example of charging with
poly chunks

Figure 25: Crucible with silicon feedstock during charging

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6.9 Control Cabinet with Power Supply and PLC

The control cabinet with the power supply system and PLC are the
brain behind to operate the furnace system. Each furnace system has
his one control unit and hence, each furnace can be run
independently. The control cabinet is located in front of each furnace
system and consists of the following main modules:
• Main switch
• Frequency converters to control the motors
• EMERGENCY OFF safety circuit
• Power controllers for bottom and side heating
Figure 26: Filled crucible on graphite bottom plate • PLC and process PC
• Display and keyboard
Crucible handling tool The crucible handling tool is used to charge the crucible with the
feedstock into the furnace as well as to unload the ingot out of the • Fuses
furnace. During the loading process four pins are guided in tubes to • UPS
secure the positioning in the hot-zone. The vertical position of the
filled crucible in the hot-zone can be set by four rings, which are fixed Computer and PLC are controlling as well as monitoring the operation
at the guiding pins. To carry the crucible and the bottom plate four of the furnace system.
lifting brackets are assembled, one at each side. By a hand wheel
The Simatic S7 PLC manufactured by Siemens consists of the
these brackets can be turned either to open or to close (fix or free the
following components:
crucible). The positioning of the crucible in the tool is secured by a
gauge. • CPU including the process programming
• Digital and analogous input / output groups

6 The signal administration from and to the input / output modules is

5 carried out via profibus.
The documentation on the electrics of the furnace system consists of
4 1 the following components:
• PLC program documentation including a visualization overview
2
• Circuit diagram
3
7 • Manuals of all electrical devices installed at the furnace
• Software licenses
Figure 27: Crucible handling tool • Inspection sheet complying DIN VDE 0113
• Industry PC / microbox
The system software is installed on the industry PC / microbox. The
1 Handling tool 2 Rotating lifting brackets functionality of the program modules covers the recording and
recording of the process parameters (temperatures, pressures, flow
3 Assembly pallet 4 Filled silica crucible with rate volumes) the analysis of the measurement results as well as the
support crucible data storage.
5 Guiding pin 6 Attachment points for hoisting Network card There are two Ethernet interfaces on the industry PC / microbox to
gear connect the furnace system with either a host or a remote control.
7 Ring to adjust the System operating software The system software is installed on the industry PC / microbox and
vertical positioning guides the operator through system operation.

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6.10 Control Panel 6.11 Multi Crystallisation Furnace Software

The control panel is mounted on the left door of the control cabinet. The multi crystallization furnace software is the key to operate the
The panel consists of the following items: furnace system. As system software MS-Windows XP is used.
• TFT Screen The operator interfaces (menu control, dialog boxes, input fields, etc.)
• Operator units are comparable to standardized to other MS-Windows applications.
• Keyboard The system software supports the operator to run the furnace system.
Furthermore, is is responsible for recording and storing all process
• Trackball data. Finally it support the operator in analyzing the records.

1 Main functionalities are the follows:

TFT screen
• Controlling the system sequence (in interaction with the PLC)
2 Keyboard with trackball 1 • Recording operating data
3 Emergency button • Displaying and visualizing operating data
• Recording actual process data such as
o Temperature
o Pressure
2
o Heater power
o Volume flow rate
• Conversion of the system protocols (read in of various protocols)
3
• Storage of the processes data (archiving)

Figure 28: Control panel

Screen By the TFT screen all major process data can be either displayed or
analyzed as charts.
Operator interface The operator interface is described in chapter “7.1 Control Elements”
on page 98.
Keyboard with trackball The PC keyboard with trackball allows the interactive handling of the
industry PC.

The emergency button is monitored by both the hardware and the

PLC.
When pushing the emergency button a failure message is shown on
the screen of the control panel.

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6.12 Process Procedure Schematically 7 Control Elements and Software

The diagram below shows the main process steps of the multi This chapter describes the control elements at the control cabinet and
crystalline process. the first steps of how to work with the system software. Furthermore,
there is given an overview on the operation of the furnace system
The chart shows both, the temperature trends of top and bottom including the charging and unloading steps for the crucible.
heater as well the reference points of the process recipe. A reference
point indicates a default change of parameters in the recipe. 7.1 Control Elements
To start the crystallization the bottom heater power falls whereas the
Control elements are the main switches, buttons and elements for the
top heater stays on its level. This effect, that the crystallization
operator to run the furnace system.
process starts from the bottom of the crucible.
During the crystallization itself the two independently working heaters 7.1.1 Control Elements on the Control Cabinet
set their heating power on different levels. For the other three process
steps the bottom heater and the top heater are nearly working on the
same power level.

1 2 3 4 1
7

6
2

4
Top heater Bottom heater

Figure 29: Temperature trend during the process (example) 3

Figure 30: Control elements on the control cabinet

1 Melting 2 Crystallization
3 Annealing 4 Cooling Table 7-1: Control Cabinet Elements

Pos. Designation Explanation

1 Power unit The power unit contains all major power electronic components to run the
furnace system. Main elements are the following:
• Thyristor controllers for top and bottom heater
• Power safety circuit (Uninterruptable Power Supply - UPS).
2 Main switch The main switch connects the furnace to the facility. To avoid the
unauthorized use of the furnace system the main switch can be locked.
3 Control unit The control section includes all major components on the control voltage level
which are necessary to control the furnace system.
4 "Reset button” By the "Reset emergency stop" button the operator has to confirm and hence,
emergency stop clear the reset of the emergency stop button.

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Pos. Designation Explanation 1 Control panel

5 Emergency stop In case of an emergency the EMERGENCY STOP BUTTON is used to set the 2 Key switch
button whole furnace system into a safe mode. "Drive demand"
The following operations starts when the operator pushes an emergency stop
button: 3 Emergency button
1
• All hazardous movements are safely stopped 4 "Reset emergency stop"
• All heaters are switched off Button
• Voltage supply to the motors is switched off
• All valves for argon supply are closed (indirect via software)
6 Key switch To give access to the manual operation (two-hand control panel) of the
"Drive demand" furnace the operator has to activate the key switch "Drive demand"
7 Control panel The TFT control panel is the interactive interface between the operator and
the furnace process. Via the visualizing tool the operator can either set the
parameters or analyze the recordings. 2 4

EMERGENCY STOP In case of an emergency, the operator can STOP the whole system by
pushing the EMERGENCY STOP button.
All processes are stopped and the furnace control system is set into a
3
safe level.

Please note: Only use the EMERGENY STOP BUTTON in case of an

emergency event!
Do not use EMERGENCY BUTTONS in case of repair and Figure 31: "Drive demand" key switch
maintenance to disconnection of the furnace system to the facility!
Key Switch "Drive demand" The manual control mode can be activated by turning the "Drive
demand" key switch.
Reset EMERGENCY STOP:
In the manual control mode the operator is able to run the possible
1 Take actions to stop the events resulted which are responsible for process steps of the furnace system by the two-hand control.
the EMERGENCY STOP
The "Drive demand" key switch is located on the control cabinet,
2 Reset the emergency EMERGENCY STOP by turning the button below the control panel.
Emergency Stop buttons There are two emergency stop buttons at the unit. One on the control
The system is ready for operation again. cabinet the second on the two hand control unit.
Main switch The main switch is installed at the front side on the control cabinet. It In case of an emergency event press either the button on the control
connects Position “ON” or cuts Position “OFF” the furnace system to unit or on the two hand control panel.
the facility.
"Reset emergency stop" Button The "Reset emergency stop" button is located on the control cabinet,
• Position "0FF": Power supply to the facility is cut below the control panel.
• Position "ON": Power supply to the facility is connected
To restart the furnace the operator has to push this button to confirm
the operational availability of the system.
In case of maintenance and repair work, the main switch must put into
position “OFF”. Furthermore the main switch has to be secured in the
“Off” position to avoid the unauthorized turn into the “ON” position.
Please note: Only use the EMERGENY STOP BUTTON in case of an
Control Panel By an interactive dialogue the operator runs the process via the emergency event!
control panel. The operator can do various actions via this interface.
Import and change the recipe as well as recording and analyzing the Do not use EMERGENCY BUTTONS in case of repair and
data records. maintenance to disconnection of the furnace system to the facility!

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7.1.2 Two-hand control 7.1.3 "Movement" signal unit

The top part of chamber can only be moved with the two-hand control. The movement of the top part of the furnace is indicated by an audio-
If the two-hand control is not in operation, motion is safely stopped. visual signal. Both signal actors are located in a traffic light like signal
The two-hand control function must be released with the "Drive unit. Two of this unit are mounted at the top chamber, each side one
and hence, are moving with the unit. A third unit is installed at the
demand" key switch.
ground floor level. The visual signal is a flashing yellow light. The
audio signal gives a horn signal like sound.
1 2

3 1

4 2
5

Figure 32: Two-hand control

Figure 33: "Movement" audio visual signal unit

Table 7-2: Control Elements Two-Hand Control

Table 7-3: "Movement" audio visual signal unit
Pos. Control Explanation
Element/Signal Pos. Signal Explanation

1 Indicator light Indicator light is on when the top part 1 Horn signal Chamber moves.
"End position of chamber has reached the parking 2 Yellow flashing light Chamber moves.
assembly" position.

2 Emergency stop In case of an emergency the 7.1.4 "Messages, warnings and alarms" signal unit
button EMERGENCY STOP BUTTON is General messages, warnings and alarms are indicated by visual
used to set the whole furnace system signals. The signals follow the logic of a traffic light (red, yellow,
into a safe mode. green). In case of a warning or an alarm the effect is supported by a
3 Indicator light Indicator light is on when the top part flashing effect
"End position of chamber is in furnace position.
furnace"
1
4 Toggle switch Flip the switch to position "Open" to
"Open/Close" move the top part of chamber to the
2
parking position.
Flip the switch to position "Close" to
move the top part of chamber to the 3
furnace position.
5 Two-hand buttons Switches to activate the movement Figure 34: "Messages and warnings" signal unit
unit. Both buttons must be pressed by
the operator to move the top part of
chamber. Table 7-4: "Messages and warnings" signal unit

Pos. Signal Explanation

1 Red flashing light Alarm message
2 Yellow flashing light Default message
3 Green permanent light Process runs trouble-free.

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7.2 Main Switches at the Furnace System 3 Close the control cabinet and set he main switch on position “ON”.
This chapter describes the main switches at the furnace and the
functionality of said. In detail: How to start, set up and stop the
system.

DANGER Touching electrically live components can be lethal!

• Only electrically skilled and trained persons are allowed to open
the control cabinet.
• Always lock up the control cabinet to avoid unauthorized
access.

Figure 36: Main switch

4 Open the control unit and check if the UPS is switched on. If the
The safe and reliable operation of the furnace system is ensured by UPS is switched off, press the power button (see Figure 37).
using an uninterruptible power supply (UPS). Before starting a
process run, make sure that the UPS is switched on. 1 Power button

First Start When you START the system for the first time or after maintenance
1
activity, proceed as described below:
1 Open the control cabinet.
2 Turn the bypass-switch to the position “Mains” (see Figure 35).
1 Bypass switch

1
Figure 37: Power button for UPS
Figure 35: Bypass-switch on position “Mains”
5 Turn the bypass-switch (Figure 35) to the position “UPS”.
6 Close the control cabinet.

Proceeding in the described way, the operator has initiated the

following:
• Main power switch set on position “ON”.
• UPS is activated.
• PLC in the control cabinets is started.
• Electronic components (computers and measuring technique)
of the chamber site are activated.

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7.3 Starting Multi Crystallisation Furnace software

Normal process run If the operational planning shows a regular production the power
connection can stay at the end of a run in the status “ON”. This chapter gives you a brief description of the start of the furnace
system software and the first operating steps.
If the operator intends to shut the unit “OFF” follow the proceedings
described in chapter “8.10 Switch Off the Furnace” on page 135. For a detailed description of the various screens refer to chapter 9,
page 137.
To start the furnace in a normal production, proceed as described
below: Previous knowledge When describing the program, basic knowledge of the user interface
and the operating elements of Windows are assumed. If additional
1 Switch on the main switch. information is required, read the corresponding chapter in the
2 Open the control cabinet. Microsoft Windows user manual or use Windows online help.
3 Check if the UPS is activated and the bypass-switch is on position The program starts up automatically.
“UPS”. The following chapter describes the manual start up.
4 Close the control cabinet. After switching on the furnace system, the Windows interface appears
on the screen of the control panel. The operator can select the
If the operator has carried out the steps like described, the furnace is furnace system software by a click on the Furnace CT600" software
ready for the next process. In detail: icon.
• Main power switch set on position “ON”. Prerequisite Operating system is running.
• UPS is activated. 1 In the Windows Start menu, click on the menu entry for the
• PLC in the control cabinets is started. "Furnace CT600" program.
• Electronic components (computers and measuring technique) The Start window of the program opens.
of the chamber site are activated. o The splash screen disappears and the main window of the
furnace system program “CT600 System” appears.
Control unit To switch the control unit on, the operator has to press the key switch
Switch on "CONTROL ON" on the control unit.
If the control unit is activated, the result is as follows:
• The signal lamp in the key switch "CONTROL UNIT ON" lights up.
• The pump station is activated.
• The selected system is switched on.

Pushing In case of an emergency Stop the operator has to unlock the

“Reset emergency stop” button emergency button. To activate the furnace unit after the emergency
stop, the operator has to push the "Reset emergency stop" button to
confirm the status.

Figure 38: Main window of the furnace system program

“CT600 System”

The program structure covers the following clearance levels that are
embedded in a clear hierarchical structure:
Viewer Without a password only display windows for values can be opened.
User Users may conduct additional tests in fully automatic mode.

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Admin Beyond the user rights administrators can

8 Preparation and Operation
• Define default values for inspection
• Create and edit recipes
• Run semi-automatic mode
• Issue passwords for users

2 Log into the system as a “user” (see chapter 0, page 118). Wear safety helmet, protective suit, eye protection, protective
gloves and safety boots!
o The operator is registered in the system as a user (1) and he
can start operating the furnace system.

1 Registered Level

The chapter preparation and operation refers to setup activities like

crucible charging and loading of the furnace as well as activities to
check required process media.
1
8.1 Loading of Melting Crucible

WARNING Incorrect loading of the melting crucible!

If the maximum filling height is exceeded, the retaining capacity of the
hot zone integrated safety barrier has to be exceeded to the varied
melting volume as well
The following safety-related events can result from incorrect loading:
o Silicon melt leak into the bottom part of chamber
o Damage to the furnace wall
o Gas expansion due to melt–water contact
o Overfilled melting crucibles can damage the insulation box when
Figure 39: Main window of the furnace system program the top part of chamber is closed
“CT600 System” user level login o Silicon can fall into the hot zone and damage it

• Only fill the melting crucible up to the default filling height. Use a
gauge to check the correct height
• Take care that you have still sufficient space between the highest
pieces of silicon and the top part of chamber when the top part of
chamber is closed
• Observe the maximum filling weight during charging
• Avoid any contamination of the crucible from acids and bases.
Hence, take measures of all given actions during crucible
handling and charging

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Please observe the following points: 3 Load the melting crucible with caution
• Only trained personnel is allowed to load the melting crucible o Make sure the melting crucible is not damaged during loading
• Overloading the melting crucible has to be approved by of the o Only fill the melting crucible up to the default filling height. Use a
plants owner/operator gauge to check the correct height
• Only use the melting crucible in combination with a suitable o Take care that you have still sufficient space between the upper
support crucible edge of silicon and the top part of chamber when the top part of
chamber is closed
• Do not use unqualified or damaged crucibles
o Only use silicon nitride coated crucibles
• Use a gauge to check the filling height
o Recommended crucibles by centrotherm SiTec GmbH:
o Ceradyne 36040 C, “RTU” ready to use
1 Check the specified melting crucible for damage
o Vesuvius X712880, “RTU” ready to use
o Do not use damaged melting crucibles
1 Melting crucible 1 3
2 Place the melting crucible on the bottom plate of the support 2 Cropped bricks
1 Melting crucible 3 Chunks
2
2 Bottom plate

Figure 41: Loading of melting crucible wit various feedstock

materials (example)

4 Fix the walls of the support crucible to the melting crucible

o Fix the walls of the support crucible with the srews
2
o Tighten the screws hand-tight
o Make sure the support crucible is not damaged
1 Melting crucible
Figure 40: Melting crucible on bottom plate of support crucible 2 Support crucible

DANGER Use of damaged or unqualified melting crucibles!

The use of damaged or unqualified melting crucibles results in a risk
of injury or material damage. There is a risk of injury from spilling melt 2
1
and hot vapours below the blow-out skirt.
o Melt gets into the bottom part of chamber
o The furnace wall is damaged
o If the melt comes into contact with water, there is gas expansion
• Prior to loading, check the melting crucible for damage
Figure 42: Mounting support crucible side walls
• Do not use damaged melting crucibles
5 After loading, weigh the melting crucible. The net weight of silicon
is limited to the maximum specified weight

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8.2 Open Chamber before Process 8.3 Loading the Crucible into the Bottom Part of
1 To open the chamber the operator has to activate the two-hand Chamber
control unit. The operator has to put the “Drive demand" at the Necessary Conditions • The top part of chamber is in parking position.
control cabinet to position “1”. The audio-visual signal confirms the
activation of the control unit • Prior to first start, after maintenance or exchange of inner parts
make sure that the equipment has no leakage and burn out /
2 The operator has to betaken to the platform where the two-hand cleaning procedure was done. The inner process chamber has to
control unit is placed on its parking rack be free of any particles .
3 Put the “Open/close toggle switch” at the two-hand control to
position “Open”
Please observe the following points:
4 The operator has to hold the two-hand buttons pushed to move
• Only use specified lifting gear
the carriage to position 1 of the opening process. When the
carriage has reached position 1, the LED 2 ("End position furnace" • The crane used must be designed for smooth motion, particularly
indicator light) gets on for smooth starting and stopping.
5 The operator has to release the action, the two hand buttons. LED • Travel the last 100 mm before the support crucible touches the
2 gets off bottom part of chamber at a reduced speed of 20 mm/s maximum.
6 The operator has to hold the two-hand buttons pushed again to
start the lowering process. When the carriage has reached 1 Use the crane to move the handling tool the supply area for the
position 2, the LED 2 ("End position furnace" indicator light) gets charged crucibles. The operator has to position the handling tool
on above the crucible.
7 The operator has to release the action, the two hand buttons. LED 1 Handling tool
2 gets off
2 Brackets
8 The operator has to hold the two-hand buttons pushed for a thirt
time to move the carriage to the final position of the opening
process. When the carriage has reached the end position, LED 1
("End position assembly" indicator light) gets on
9 The operator has to release the action, the two hand buttons. LED
1 gets off
10 The operator has to put the two-hand control back onto the
parking position of the rack
11 The operator has to betaken to the ground floor. At the cabinet the
operator has to put the "Drive demand" key switch back to position 1
“0”
2
12 Beware of hot quartz and silicon parts sprinkling around in case of
ingot or crucible breaking.
13 Move down the top part of chamber into its parking position. The Figure 43: Handling tool
chamber is open. The crucible and ingot can be removed now.
2 By using the special alignment gauge the operator can align the
14 Do not keep the chamber open for a long time and close it crucible into a clear position in the handling tool. Turn the brackets
immediately as soon as possible. of the lifting device into the opening of the bottom plate by using
15 Avoid dust, high humidity and condensing air condition while the the hand-wheel.
chamber is open.

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Figure 44: Hand-wheel of the handling tool

8.4 Preparation of Media
3 Use the crane to carefully move the charged crucible to the
Necessary Conditions • The connection points as well as the position of the media at the
furnace and place it over the open bottom part of the chamber.
furnace are described in chapter 5.1.
4 The operator has to adjust the handling tool so that the guiding o Exhaust system
pins fit into the guide sleeves.
o Cooling water supply and return
5 Carefully lower the charged crucible into the Hot Zone.
o Compressed air
1 Guiding pin o Argon
2 o Power connection
Guide sleeve
• The operator has to make sure that the specified utility supply flow
is given (Argon and cooling water) and that the valves to the
facility are opened. The manual ball valve “Argon emergency
purge” has to be closed.

Cooling Water The cooling water supply is equipped with two redundant filters. The
1 operator can switch between both filters. This safety feature secures
the cooling water supply at any time.
1 Make sure, the manual ball valve of cooling water reflow side is
2 open.
2 Make sure, the manual ball valve of cooling water supply side is
open.
3 Check pressures before and after filters F204 and F205:
Pressure at the pressure gauge drain side must be 5 bar. If
pressure difference supply and drain side is >1 bar, the filter has
Figure 45: Lowering the charged crucible into the hot zone to be cleaned or flushed.
6 When the charged crucible is placed on the bottom plate of the 1 Pressure gauge drain
furnace, the operator has to use the hand-wheel again. By turning side of the filter 1
the brackets into position “open” the handling tool gets free. Make
2 Manual ball valve for
sure that brackets are moved out of the openings completely. 10
cooling water reflow 2
7 Use the crane to lift the handling tool out of the guide sleeves and (V201)
place it at its parking position.
3 Manual ball valve for
cooling water reflow
(V203) 9
4 Pressure gauge drain 3
side of the filter
5 Filter F205
8
6 Manual ball valve for
cooling water supply 4
(V202) 7
7 Pressure gauge feed
side of the filter
6
8 Filter F204
5
9 Manual ball valve for
cooling water supply
(V200)
10 Pressure gauge feed Figure 46: Cooling water supply
side of the filter

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4 The operator has to check flow rate at Flow meter F101: flow must Compressed Air To ensure the operation of the SiHIDry-pump the operator has to
3
be between 240 and 280 m /h check the pressure of compressed air. Default value for the air
5 The operator has to check pressure at gauge P303: pressure must pressure has to be at 7 bar. The operator can adjust the pressure
be between 1.5 and 2.5 bar. Tuning of the pressure can be done value at the pressure reducer that is located next to the interface to
the facility.
at valve V303.

Argon Check Argon pressure at gauge P306. Pressure must be at 5 bar. Set 8.5 Checking Furnace for Any Damage
Argon pressure at valve V305.
Following the media check the operator has to test the furnace system
with respect to water leakage or damaged parts. The operator has to
keep records on the conditions. Furthermore, the operator is
Argon pressure can only be set when the process is running. Hence, responsible to take actions to get the damaged parts repaired.
argon pressure must be controlled on a regular basis. In case of fall or • Damaged or defective parts has to be replaced or repaired by
increase, the Argon flow has to be adjusted. qualified personnel
• Water leakage has to be stop by qualified personnel
• Visual check of the entire system on safety critical conditions
• Listen to abnormal audible indications (e.g. pumps)
1 Flow Meter F751 • Replace broken, loosen or damaged parts
2 Pressure Gauge P305
3 Pressure Reducer V305 All damaged or defect parts must be replaced immediately. Don’t use
the furnace if you are aware of defects and damaged parts at the
4 Pressure Gauge P306 5 1 furnace.
5 Flow Meter F750

8.6 Close Chamber

If the furnace is loaded with the charged crucible, the operator can
close the chamber.
Necessary Conditions • The control unit is “on”
• The charged crucible with feedstock is placed and aligned in the
hot zone
4 • The system check on damages is without results
2 • The process related PC program is started
• The operator is standing on the platform at the dual hand control
3 • The dual hand control panel is activated

Emergency-off When the EMERGENCY OFF is activated, the following conditions

occur:
• The movement of the carriage stops
• The top part of chamber remains in position
• All control units for movement, including the frequency converter
Figure 47: Argon pressure gauge for the motors are switched off

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7 To lower the carriage to the second position of the closing process

the operator has to hold both two hand buttons pressed again.
Start of the operating sequence is only possible with the protective
When the carriage has reached the second position, LED 2 ("End
device closed.
position furnace" indicator light) lights up.
8 Stop pressing both two hand buttons. LED 2 turns off.
9 To align the chamber top to the chamber bottom the operator has
to press the two hand buttons for a third time. When the carriage
DANGER Crush hazard! has reached the defined end position, LED 2 ("End position
While the top part of chamber is moving, there is a crush hazard. furnace" indicator light) lights up.

• Prior to every motion of the top part of chamber, make sure no 10 Stop pressing both two hand buttons. LED 2 turns off.
person stays in the danger area. 11 The operator has to put the two hand control back on its parking
• Only the operator using the two-hand control is allowed on the position.
platform while the top part of chamber is moving. 12 The operator has to go to the ground floor and has to switch the
• The operator with the two-hand control must be able to "Drive demand" key at the control cabinet to position “0”.
overlook the entire danger zone of movement. 13 The close chamber process is completed.

DANGER Falling parts!

All safety measures must be followed at any time.
While the top part of chamber is moving between the parking and
furnace position, parts can loosen from the chamber and hence, can Sensors and switches must be clean and operating at any time.
fall down.
• Always move the top part of chamber from the furnace position to
the parking position or visa versa.
• Do not stop the movement in between those two positions. 8.7 Process Start-Up
• When top part of the chamber is in an intermediate position keep Necessary Conditions • In accordance to the proceedings the operator has carried out all
buttons at the two hand control panel pressed while the chamber preparation steps to run a process. The proceedings are
is moving and the light does not blink. described in chapter 8, page 108.
• Only the operator using the two-hand control is allowed on the • The operator has switched on the furnace system.
platform while the top part of chamber is moving. • The operator has closed the process chamber.
• The end positions have been reached.
• The start screen of the furnace software is available on the control
Close chamber sequence To close the chamber the operator has to proceed as follows: panel
1 The operator has to clean the main sealing ring and the main
flange (bottom side of the chamber) before closing the chamber.
2 The operator has to switch the "drive demand" key at the control
cabinet to position “1”. If the two hand control is active an audio
visual indication - acoustic signal and yellow flashing light – shows
the status.
3 The operator has to go on the platform and take the two hand
control out of its parking position.
4 To start the closing sequence the operator has to switch the
“Open/close toggle switch” at the two hand control to position
“Close”.
5 The operator has to hold the two hand buttons pressed to move
the carriage towards the furnace. When the carriage has reached
the position 1, furnace position, LED 1 ("End position assembly"
indicator light) lights up.
6 Stop pressing both two hand buttons. LED 1 turns off.

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1 To log into the system the operator has to press the operator 3 Open the process data window by pressing the “Process Data”
button (1). The system login (2) pops up. button (1) on the overview screen.
1 Operator Button
2 System Login 1 Process Data Button

1
2

Figure 48: Login screen

Figure 50: Overview screen, “Process Data Button”
2 The operator has to enter his username and password. The input
has to be confirmed by pressing “OK” button on the system login 4 To load a recipe the operator has to press the "Import out of CSV"
message box. The info box of the operator button (1) displays the button (1). The message box “Open” (2) pops up.
operator the user level.
5 The operator can select the recipe of choice and has to confirm
1 Operator Button the selection by pressing the “Open Button” (3).

1 “Import out of CSV” Button

1
2 Message Box “Open”
3 Open Button 2

Figure 49: Logged in screen

Figure 51: Screen to select and load a recipe

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Breakpoints can only be set by the administrator.

The operator has two options to load a recipe. First option can be
Breakpoints can only be set in the programming or editing modus.
used to load the recipe from the network. Second option can be used
to load the recipe from the CPU. Breakpoints are a tool to secure the process. By an interactive dialog,
the operator has to confirm the status of the process. Hence,
In case of loading from the CPU, the operator has to select the “Read
centrotherm SiTec GmbH recommends to set breakpoints at critical
out of CPU” button.
process steps.

When the process flow reaches a breakpoint, the process is set on

hold and the message box “Confirm” a breakpoint (1) pops up. The
The operator has the possibility to export recipes. Recipes can be green permanent light at the "Messages and Warnings" signal unit
exported into the network by the “Export to CSV” button. switches to flashing mode.

1 Message Box “Confirm” a

6 The recipe opens.
breakpoint

1 Break Point “Melting”

2 Break Point
“Crystallisation”
1
1

Figure 53: Message Box “Confirm” a breakpoint

The operator has to check, if the process status and the program
Figure 52: Recipe with break points status are equal. If so, the operator has to confirm the status.

Molten Silicon For example: The melting breakpoint can be checked on the process
Breakpoints in recipe Breakpoints are defined process events in the process flow. At this side by looking through the inspection glass at the top part of the
point, the operator has to confirm the status of the process. process chamber.
e.g. Breakpoint 1: The feedstock is completely melted The operator can check the status of the silicon by visual inspection.
There is a clear visible indication for molten silicon.
e.g. Breakpoint 2: The melt is completely crystallized
By looking through the inspection glass of the top chamber the
The above screen shot shows such a recipe with two breakpoints. operator has a look onto the silicon.
In case of visible travelling waves at the surface of the feedstock the
material is molten.

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7 The operator has to set the process number, the start time for the
run and the Silicon weight of the charged crucible in the recipe.

1 Process number
2 Charged weight 4
1
3 Start time
4 Date 2
5 Date acceptance
Figure 54: Molten Silicon, a look through the inspection glass 6 End date & time 3
If the feedstock is molten, the operator can confirm the status by Process total duration
pressing the confirm button.
The process cycle continues by starting the next step of the recipe. 5 6

• Protect your eyes against the radiation of the Silicon.

• The operator has to take care neither to damage any cables nor
any pipes or parts of the furnace.
• The operator has to take all safety measures not to fall from
chamber top (better use a mirror and stand on the platform).
• The operator has to wait at least one hour after the first melt is
visible. Hence, don’t switch to next step when the first melt is Figure 55: Setting of process number, weight and start time
visible.

CAUTION o Open the menu “Process number” (1) and set the process
The radiation of the Silicon can harm your eyes. number.
o Open “Silicon weight [kg]” menu (2) and set the weight – one
Wear appropriate safety equipment to protect your eyes..
digit after the point - of the Silicon.
o Open the menu “Start date & time” (3).
o The calendar menu (4) opens.
o Select the date and time for the run. Confirm the selection by
pressing “Accept” (5)
o For operators reference, “End date & time” as well as “Process
total duration” (6) are displayed.

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8 Followed by the parameter (process number, weight and start If the recipe is without fault, message box “Import into CPU” (2) pops
time) the operator has to start a “Plausibility check” (1). The up.
plausibility check is an interactive safety function. The operator
To proceed in the process flow the operator has to confirm the
gets the information on the process plausibility. Information can be
message by pressing the “OK” button
either the accuracy of the recipe or details on recipe failures in
form of warnings and alarms. 1 “Write into CPU” button
1 Plausibility check 2 Message box
“Import into CPU”
2 Message Box
3 “OK” button
“Warnings and Alarms

3
1

Figure 57: Plausibility check is ok

Figure 56: Plausibility check 9 To proceed in the process flow the operator has to confirm the
message by pressing the “OK” button (3).
Possible warnings and errors are displayed in the message box
“Warning and Alarms” (2). The operator has to confirm the message 10 The operator has to load the recipe into the CPY by pressing the
by pressing “OK”. “Write into the CPU” button (1). The status of the loading
procedure is recorded by a progress bar.
In case of warnings and alarms the operator has to inform the
administrator on the content of the message. The administrator has to
revise the recipe according to the messages.
After the revision the operator has to load the recipe again.
To load a recipe into the CPU the plausibility check has to be carried
out successfully.

After revision of the recipe the operator has to load the revised recipe
by repeating step 7 and step 8.

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After loading the recipe into the CPU, the furnace is ready for the
process. The operator gets additional information on the process step by the
11 The operator has to load the processes window by pressing the “status information” (5) displayed message.
“Processes” button (1) in the menu bar. The status can be the following:
o The processes window opens.
• Pass
• Fail
1 “Processes” button • Finished
7
2 Process step “Information” 1 • Running
box
2
3 Connection arrow By pressing the “Process to continue” button (6) the operator has the
6
4 “Lock” symbol possibility for a stepwise approval the process steps either to verify
3 the process step or, in case of a fixed process interruption, to start a
5 “Status information” on re-entry.
process step
6 “Process to continue” 4
button 5 12 To set the process on the start the operator has to push the
7 “Process start” button "Process start" (7) button.
13 As result of the “Process start” the message box “Process start /
cancel” (1) pops up. The operator has to set the status on “On”.
Therefore, the operator has to push the “Process “start / cancel”
button (2) distinguishable by the three dots. A further submenu,
the extended process window with message box start/cancel,
opens.

1 Message box “Process

Figure 58: Processes window start / cancel”
2 “Process start / cancel”
Each process step of the recipe has its own “Information” box (2). All button
informations on the process step are given in this box. 1
The colour codes of the boxes stands for the following:
• black box: process step “verification not started” 2
• green box: process step “approved”
• red box: process step “verification failed”

To give an understanding on the process flow these information boxes

are connected by arrows (3). The colour codes of the arrows stands
for the following:
• black arrow: verification not started
• green arrow: verification finished

If a “Lock” symbol (4) is attached to the connection arrow the start

conditions of the process step are not fulfilled. Hence, the operator
has to debug the faulty conditions. Figure 59: Process window with message box start/cancel

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14 The operator has to set the status on “On” by pressing the “Status A third indication for the successful start of the process is the progress
On” button (1) in the command section of the message box. The bar “Remaining” (4). The following information gets visible:
selection has to be confirmed by pressing the “Ok” button (2) in
the execution section of the message box. • Colour of the box changes to green
• The remaining time of the process step
o The process starts.
• The shifting of the bar versus time. The shorter the remaining
process step time the shorter the length of the bar.
1 “Status On” button 1 “Process stop” button
2
2 Confirmation “Ok” button 3 2 Process step “Information”
box 2 3
3 “Close” button
3 “Status information” on the 4
process step
4 Progress bar “Remaining” 5
1 5 “Lock” symbol
6
6 Submenu “Not worked
through” conditions”
7 “Close” button 6
8 Process step “VII Process
2 terminated”

Figure 60: Extended process window with message box Figure 61: Running process and pop-up with start conditions
start/cancel
If a “Lock” symbol (5) is attached to the connection arrow the step
below cannot be started by the program sequence. Hence, the
operator has to debug the faulty conditions. Therefore, the operator
15 The operator has to close the message box pushing the “Close” has to open the sub-menu “Not worked through” conditions (6) by
button (3) distinguishable by the x. pressing the “Lock” symbol. To highlight the faulty information the
faults are marked red.
After the operator has started the process the message of the After debugging the faulty conditions, the operator has to close the
“Process start” button changes both the message “Process stop” (1) message box by pressing the “Close” button (7), distinguishable by
and the colour “green”. By pressing the button, the operator could stop the x.
the process. If the process has successfully reached and finished process step
The successful start of the process gets visible by the colour change number VII the information box “VII Process terminated” (8) changes
of the “Information” box (2) of process step number #1. The colour its colour to green.
changes to green. In addition to the change of box colour the “Status
information” (3) changes to running. If the operator cannot debug the faulty conditions, the operator has to
inform the administrator.

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Furnace Approvals After the set up of the furnace the following approval status needs to
be confirmed:
Final Approvals After all process steps have been carried out successfully, the final
No. Test Description approval procedure starts. The test proceeding ensures the thightness
of the chamber during the process.
1 Sensor Functionality tests of all sensors
approval e.g. safe test probes, thermo couples,
pyrometers. No Test Description
2 Cooling Overall testing of functionality and pressure 1 Evacuation The chamber has to be evacuated to a
Circuit conditions of the cooling circuit approval minimum value, the set point pressure
approval
2 Leak Test The leak-tightness of the process chamber
3 Evacuation The chamber has to be evacuated to a approval has to be approved by a leak test. The drop
approval minimum value, the set point pressure of pressure has to stay below the set point
value
4 Leak Test The leak-tightness of the process chamber
approval has to be approved by a leak test. The drop of
pressure has to stay below the set point value End of Process The successful completion of the final approvals marks the end of the
5 process. The camber can be flooded.
Heater Test Functionality test of the two independent
approval heating circuits. The test approves both, the
system function and the inexistence of short-
circuits
6 Process Only if all test approvals show the status “Ok”
Release the process can be started. In case of any
approval failure the operator has either to debug the
failure or repeat the approval proceeding.

Process Steps The preheating of the furnace system excluded the operator can set
40 process steps within 7 main process steps. The 7 main process
steps are the following:
No Process step Description
1 Heat-up Controlled heating to remove the humidity
and the low temperature chemical bound
Oxygen in the process chamber
2 Melting Controlled heating to change the state of
the Silicon, from solid to liquid
3 Operator Interactive step. The operator has to
Intervention confirm the current status and to clear the
next process step
4 Crystallization Controlled cooling to change the state of
the Silicon, from liquid to solid
5 Operator Interactive step. The operator has to
Intervention confirm the current status and to clear the
next process step
6 Tempering Controlled cooling to reduce the stress in
the solid and hence, crystallized Silicon.
7 Cooling Controlled cooling step to reduce the
temperature in the camber below the critical
value to open the chamber

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8.8 Opening of the Furnace after the Process 8.9 Unloading of the Furnace
To unload the furnace the operator has to open the process chamber.
Opening chamber sequence The operator has to proceed as follows:
1 The operator has to activate the two hand control. Therefore, he DANGER All part of the furnace as well as the crystallized ingot including
has to switch the "Drive demand" key at the control cabinet to both crucibles might have a temperature above 50 °C.
position “1”. If the two hand control is active an audio visual Risk of burns!
indication – acoustic signal and yellow flashing light – shows the
status. Wear appropriate safety equipment!
2 The operator has to go on the platform and take the two hand
control out of its parking position. Necessary conditions • The crystallization process is finished.
3 To start the opening sequence the operator has to switch the • The top part of chamber is moved to the parking position.
“Open/close toggle switch” at the two hand control to position
“Open”. • The main power switch of the furnace is switched off.

4 The operator has to hold the two hand buttons pressed to move 1 The operator has to wear the appropriate safety equipment.
the carriage towards the first position of the opening process.
When the carriage has reached the first position, LED 2 ("End 2 To unload the crucible the operator has to move the handling tool
position furnace" indicator light) lights up. above the furnace
5 Stop pressing both two hand buttons. LED 2 turns off. 3 During the lowering the operator has to take care that the guiding
pins fits into the guiding sleeves. Furthermore, the operator has to
6 To move the carriage towards the parking position the operator take care that the adjustment rings (3) are positioned at the
has to hold both two hand buttons pressed again. When the correct level.
carriage has reached the second position, LED 2 ("End position
furnace" indicator light) lights up.
7 Stop pressing both two hand buttons. LED 2 turns off.
8 The operator has to hold both two hand buttons pressed again, to Wear appropriate safety equipment.
move the carriage down to the end position of the opening Take care not to damage the graphite parts of the hot zone
process. When the carriage has reached the end position, LED 1
("End position assembly" indicator light) lights up.
9 Stop pressing both two hand buttons. LED 1 turns off.
4 The operator has to lower the handling tool carefully into the hot
10 The operator has to put the two hand control back on its parking zone so that the guiding pins fit into the guide sleeves.
position.
1 Guiding Pin
11 The operator has to wear the appropriate safety equipment as hot
and sharp particles could work loose. 2 Guide Sleeve
3 Ring to adjust the vertical
positioning
CAUTION
Caution, the loosening of hot and sharp particles from either the ingot
or the crucible is possible. 3
Wear appropriate safety equipment.

12 The operator has to go down to the ground floor and has to switch
the "Drive demand" key at the control cabinet to position “0”. 1
13 The opened chamber is now ready for the unloading step
2

To avoid the contamination of the chamber by humidity or dust keep

the chamber closed when you are not working at the furnace.
Figure 62: Lowering of the handling tool

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5 When the handling tool is positioned, the operator has to use the 8.10.2 Switch off during the Process
hand wheel to turn the brackets to position “Close”. To avoid
In case of a switch off during the process critical situations might
damaging of the graphite the operator has to make sure that the
happen.
brackets fits into the openings.
To avoid these situations and to safeguard a controlled shut down of
6 By the handling tool, the operator has to lift the bottom plate with
the system the operator has to use the “Emergency Stop”
the crucibles and the ingot out of the furnace.
7 The operator has to move the goods to the assembly area and
place them carefully onto the assembly carriage.
CAUTION Only use the Emergency-Stop button to switch of the furnace
during a process run!
If the furnace is switched off during process, the following situations
can happen:
o Process control failure
o Safety equipment failure
o Voltage supply failure
o Cooling water supply failure
o Process gas supply failure.

Figure 63: Support crucible on assembly carriage

8 By turning the brackets back to the position “Open” the handling

tool gets free.
9 The operator has to use the crane to lift the handling tool out of
the guide sleeves and place it at its parking position.

8.10 Switch Off the Furnace

8.10.1 Switch off at the End of a Process
The operator has to close the furnace and set the chamber under an
Argon atmosphere before the furnace can be shut off.
Closing the chamber and providing an Argon atmosphere avoids the
contamination by particles and dust as well as by humidity.
If in the process planning shows no further run is scheduled, the
operator can switch off the furnace.
The proceeding is as follow:
1 The operator has to stop the main Argon supply. Leave the valves
of the sub-distribution open.
2 Switch off the PC at the control desk.
3 Press the key switch "CONTROL OFF" on the control panel.

DANGER The main pump unit might be under pressure.

• Depressurize all components of the pump unit!

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9 User Interface of the Control Panel 9.1 Structure of the User Interface Window
9.1.1 Areas of the user interface window
CAUTION Manual interventions are not checked on plausibility! The furnace system provides a user interface window for an
interactive-dialog between the operator and the process flow.
Not all functions are locked against faulty inputs.
This user interface window is segmented into four main areas:
Faulty inputs can result into critical situations.
• Area 1: Overview area
• Area 2: Work area
• Area 3: Main Process Value Area
WARNING Risk of damage to the furnace! • Area 4: Button area
• "Manual" operating mode is only allowed during maintenance and
start-up. 1 Overview Area
• "Manual" operating mode is not allowed for standard processes. 2 Work Area 1
• Only qualified and instructed experts may run the furnace in 3 Main Process Value Area
the "Manual" operating mode.
4 Button Area

3
4
Figure 64: Areas of user interface

9.1.2 Definition of the areas

The overall design of the user interface window and the size of the
four areas are fixed.
Overview Area The overview area is mandatory. By selecting the respective function
the operator can open the corresponding menu in the work area.
After the selection, the button of the function changes its colour from
grey to turquoise.
Work Area The work area displays detailed information on the selected function.
As an example figure 64 shows the work area of the function process
status. The work area displays the following detailed information:
• Recipe process step number
• Diagram of selected parameters
• Process step box with main parameters and status
• Process time calculation

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Main Process Value Area The main process value area displays the following detailed
information:
9.1.4 Overview area
• Status of the audio visual signal unit
• Process name The overview area is segmented by the following functionality:
• Recipe step number • Selection buttons
• Remaining time bar function and time display • Message box
• Temperatures • Shortcut Icons
• Pressures By using the functionality of the overview area the operator can
navigate through the information system of the furnace system.
• Cooling energy
Furthermore, he can trace back into the process history to analyze
Button Area The button area supports the operator by navigating through the parameters or look into the future to plan maintenance or service
windows. The functionality of the icons is comparable to the windows work.
icons. The operator handle the operational procedures like saving or
loading and displaying or hiding. Navigation The operator can navigate through the information system by
selecting the corresponding “Selection Button” (1). The information on
9.1.3 Cursor shapes during the process the selected button is displayed in the work area.
Message The operator gets the breaking news on the process by the written
Shape of the cursor The operator can use the cursor to select command buttons or icons
in the following three areas: information in the “Message box” (2).
If you click on an area selection button, the corresponding process
picture of the highest picture hierarchy level is displayed in the work
• Area 1: Overview area area.
• Area 2: Work area
• Area 4: Button area 1 Selection button
2 Message box 3 2
1
The operator has to move the cursor onto the command button or 3 Shortcut icons
icon. To activate the corresponding function the operator has to select Figure 67: Overview area
the command button or icon by pressing the left mouse button.
The operator can get control on the function if the cursor changes its
shape from a standard arrow shape into the control cursor shape.
Icons The "Shortcut icons" (3) can be clusters into three different classes:
• Message system
Figure 65: Control cursor • Graphic system
• System function
The functionality and the classification of the selectable icons are the
The operator can use the cursor in a input box, if the cursor changes following:
its shape into the text cursor shape.

Table 9-1: Short cut icons

Icon/function Description/functionality Classification

Pressing the icon opens a list in the work area. The
displayed lists covers the last 16 messages of the Message system
highest priority.
Pressing the icon opens a list in the working area
Message system
displaying all received messages.
Figure 66: Text Cursor Pressing the icon displays the last received message in
Message system
the message box.

The operator cannot get control on the function or on the input box if
the shape of the cursor does not change.

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Icon/function Description/functionality Classification 9.1.7 Button area

In case of a message on the process the icon pops up The operator can select between two predefined button sets to control
next to the linked selection button. The colours give an the furnace system.
indication on the status of the message: Set 1 is obligatory when the operator starts the process. By pressing
A: Excess of the alarm limit the operator buttons (green triangle) the operator can switching back
W: Excess of the warning limit Graphic system and force between the two sets
S Process control error
O Operator prompt 1
X One or more messages are locked 1 Operator button
Pressing the icon generates a screen shot. The screen Figure 69: Button Set 1 (top)
shot is saved as temporary file and printed out at the System function
connected printer.
Figure 70: Button Set 2 (bottom)
Pressing the icon displays the "System Log in". The
operator can log in or log out to the various levels by System function
selecting the level followed by the password
Button colour scheme Buttons can be either active or blocked.
By the colour index the operator can direct read the status.
9.1.5 Work area • Gray:
The operator can get in-depth information by the system navigation The button is blocked. Either as the permission of the level is
Display of process pictures
system. By the selection of the information of interest, either a flow missing or as the related process picture I not active
chart a diagram a list of data or a combination of all pops up in the • Coloured:
work area. The button is active and hence, can be used by the operator
The operator has various possibilities to load the process picture of
the information of interest into the work area. For example:
Switching between the button sets By pressing the switch button(s) (green triangle) the operator can
• Selection button in the overview area switching back and force between the two sets.
• Shortcut icon in the overview area
• Icons in the button area

Note on the operator buttons To get the information on the function of the operator button move the
cursor onto the button.
9.1.6 Main process value area
If the operator clicks on the button the corresponding action starts.
The main process value area is divided into 2 segments. The
summary box (1) and the audio visual signal unit (2), (3).
The summary box (1) provides all major information on the process. Button set 1 Table 9-2 gives an explanation of the icon and defines the
He temperatures, the cooling energy the pressures as well as the functionality of the various buttons of button set 1 and set 2.
remaining time of the process step.
The audio visual signal (2), (3) unit of the main process value area is a
mirror image to the signal unit at the furnace system. Controlled by the
software the indication is the same as at the furnace.

3 2
1 Summary box
2 Visual signal unit Figure 68: Main process value area 1
3 Audio signal unit

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Table 9-2: Operator control functions button set 1 & set 2

Icon/function Explanation/functionality
Icon Explanation / functionality Switch button
Switch button Switching back and force between the two sets
Switching back and force between the two sets Language
Alarm list Displays a dialoge box to select the language
Displaying the alarm list which corresponds to the login level Administrator
Graphic selection Displays a dialoge box to change permissions
Displays a graphic selected / loaded by its “functional name” Exit
Go left Displays a dialog box to stop the process control.
Displays the process picture left to the current process picture

Go up
Displays the process picture above to the current process picture 9.2 Start Screen
Go down Besides the overview area and the button area the Start screen shows
Displays the process picture below to the current process picture the logo of centrothem and the version of installed software (1).

Go right
Displays the process picture right to the current process picture 1 Overview area
2 Button area
Back
Displays the previous process picture 3 Centrotherm logo
1
Forward 3
Displays the next process picture

Load
Loads a saved screen composition

Save
Saves a screen composition

Delete
Deletes a screen composition

Information 2
Opens a dialog box that provides information on the current process picture

Acoustic signal confirmation

Confirms the acoustic signal but doesn’t chancel the reason for the signal Figure 71: Start screen
Message confirmation
Confirms all displayed messages

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9.3 Log In
Pressing the “Operator button” (1), the operator get access to the 9.4 “Overview” function
“Login” message box (2). Pressing the “Overview” button (A) in the overview area, the operator
The operator can select his permission level by writing the relevant gets access to the “Overview window” in the work area.
level name in the login line. Writing the password in the operator gets The overview function displays the piping and instrumentation diagram
access to the system permission level of choice. (PID) in the work area.
1 Operator button
2 “Login” message box
1

1 14
A
2 3

15

Figure 72: Login screen 9

6
Table 9-3: Login
8
Pos. Control Element Explanation
1 Operator button Operator button displays the login permission level 16
Clicking on the button opens the “Login” message box

2 “Login” message box Gives access to the system permission level of choice 19 18 20 17 13 12 11 10 2
Login: Type user name in → linked to the system permission
Figure 73: Overview function – PID diagram
Password: Type password in
OK: Confirmation of the input data, get access to the system
Cancel: Cancel input data Table 9-4: Overview function - PID diagram
Logout: Logout of the system
Locking of all operator controls Pos. Control Element Explanation / functionality
Closing of process mode
1 V-5 Cooling vent
Switch to guide the gas flow through the heat exchanger
2 V-6 Chamber vent
Control valve for process pressure control
3 Roots pump value box Recording roots pump values
Switch between automatic and manual mode

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Pos. Control Element Explanation / functionality

9.5 “Cooling Water” function
4 Roots pump Roots pump
Pressing the “Cooling water” button (A) in the overview area, the
Main unit to circulate the process gas during the process
operator gets access to the “Cooling water” window in the work area.
Green = running
The Cooling water function displays
Red = fault
• The main cooling circuits (1)
5 V-3 Rapid flooding vent
• The main cooling parameters per circuit
Rapid flooding of the chamber with atmosphere
o Volumes (2)
6 PV SIHIDry pump Vacuum pump o Temperatures (3)
Safeguard the set pressure value in the process chamber o Energies (4)
7 Circulation request button Proces gas flow Start / Stop and, the aggregated cooling parameters.
Starts / Stops process gas circulation (clearing roots pump)
8 Vacuum request button Vacuum Start / Stop
Starts / Stops pressure control of the process chamber
9 V-1 Main vacuum valve
A
Enables the evacuation of the furnace
10 BP301 Pressure display
Displays the atmospheric pressure 6
11 V-6 values Valve value display
Displays set and process values of V-6 valve 7
12 Temperature SIHIDry Pump Temperature value display
8
Displays process temperature of SIHIDry pump and setting
temperature warning and alarm limits
13 BP300 Pressure display 9
Displays the pressure in the process chamber 5
14 V-4 Process vent 10
Supply vent to guide the circulation of the process gas through a
bypass and NOT through the heat exchanger
15 V-2 Process vent
Return vent for the bypass process gas circulation
16 P-1 Pump
Displays status of the SIHIDry pump
17 Reset button Reset 1 2 3 4
Clearance of undefined pump status and reset to an defined status
Figure 74: Cooling water function
18 BP352 Pressure display
Displays Argon pressure Table 9-5: Cooling water function
19 VA01-05 Purge gas vents
Pos. Control Element Explanation / functionality
Display Argon purge gas vents values
1 Unit column Cooling circuit definition
20 VA00 Emergency vent Name of the cooling circuit and graphical link to the furnace
Displays emergency vent value
2 Flow column Flow rates of the cooling circuits
Displays the respective flow rate of each cooling circuit

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Pos. Control Element Explanation / functionality

9.6 “Moving Technology” - function
3 Temperature column Temperatures of the cooling circuits
Displays the respective temperature of each cooling circuit Pressing the “Moving Technology” button (A) in the overview area, the
operator gets access to the “Moving Technology” window in the work
4 Cooling energy column Cooling energy of the cooling circuits area.
Displays the respective cooling circuit of each cooling circuit
The “Moving Technology” window covers the following information:
5 BP 304 Pressure display
• The flow chart of the process (9)
Displays the outlet pressure
• The visualization of furnace position (furnace or parking position)
6 BP 302 Pressure display
• The main drive parameters (sensors and actors)
Displays the supply pressure

7 BF 101 Flow rate display

Displays the inlet flow rate

8 BT 401 Temperature display 4

Displays the water inlet temperature
3 A
9 Delta flow Delta flow rate
Displays the flow rate spread between the inlet and the outlet flow
1 7
10 Energy balance Effective cooling energy
Displays the effective cooling energy respectively the spread between the
heating and cooling energy 8
2
6

9
5

10

11

12

Figure 75: Moving technology - function

Table 9-6: Moving technology - function

Pos. Control Element Explanation / functionality

1 “Start of editing” button Editing mode entry
Access entry to edit the movement parameters
2 End position top left/right Limit switch
indication Indication on the chamber position. In case of an end position the
colour of the button changes to “Green”

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Pos. Control Element Explanation / functionality

9.7 “Temp IW selection” - function
3 Movement speed indication Movement speed display Pressing the “Temp IW selection” button (A) in the overview area, the
Displays the current speed of the various drivers operator gets access to the “Temp IW section” window in the work
area.
4 Resolution Distance pulse counter
Synchronizing speed and hence, position of both vertical axis The “Temp IW selection” window covers the following information:

5 Controller difference Delta of vertical (angular) displacement of axis • The visualisation of the position of the temperature sensors
Displays the displacement of the two axis • The current values
• The redundancy and verification of the measurement results
6 Drive Drive parameter display
Displays current speed and position of the movement
7 Hub Drive Parameter setting
“Normal” furnace opening Displays the valid end positions for the furnace opening and closing A
process
2
8 Hub Drive Parameter setting
“Hot Zone removing” Displays the valid end positions for the maintenance work on the hot
zone
9 Step sequence opening Process flow chart 3
Displays both, the process flow and the current valid sequence of
the process (box change to orange colour) 1 4
10 Moving menu Selection menu
Menu to select the necessary process “Closing” or “Opening”
5
11 Message box Message display
Displays both the current message(s) as well as the status of each
message (colour indication)
12 Sensors Status of limit switch overview
Displays the current status of each limit switch by its colouring

Green: End position reached

Grey: End position not reached

Figure 76: Temp IW selection - function

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9.8 “Heating Parameters” - function

Table 9-7: Temp IW selection- function
Pressing the “Heating parameters” button (A) in the overview area, the
Pos. Control Element Explanation / functionality operator gets access to the “Heating parameters” window in the work
area.
1 Visualisation Visualisation of the position
The “Heating parameters” window covers the following information:
Displays both position of the sensors and set value for the sensors
• The thyristor properties
2 Control switch Switch between average or single sensor control
• The control properties
Selection to choose between a single sensor or an average value
• The heating power
measurement to control the process
3 “Pyrometer” button Setting parameters
In case of a sensor fault or implausible values of the sensor during
the operator can switch between the redundant sensor units. A
The selected control loop is marked with green lines
5
4 Trigger Set temperature limits
Set limits of the process step to check the plausibility of the
measured values
1
5 Top PV Current value display 6
Displays the current temperature value of the selected control
sensor loop 2
7

Figure 77: Heating Parameters - function

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Table 9-8: Heating Parameters - function 9.9 “Process Data” - function

Pos. Control Element Explanation / functionality Pressing the “Process Data” button (A) in the overview area, the
operator gets access to the “Process Data” window in the work area.
1 Controller Heater controller
The “Process Data” window covers the following information:
Controls the temperature behaviour by both the comparison of set
and current temperature as well as the comparison of the heating • The recipe
power • The system functions
2 Contactor Main switch o Export
Switches the thyristor “On” or “Off” o Import
• Overview on process details
3 Passing Approval switch
o Process number
Approves the disconnection of the thyristor
o Silicon weight
4 Top PV Current value display o Timeline
Displays the current process temperature of the heater circuit
5 Total output Current value display
Displays the current transformer output power A
6 Temp T10 L1, L2, L3 Current value display
Displays the current temperature of each phase 9
7 Thyro Tx Current value display
10
Displays the main thyristor parameters of each phase:
1
• Power 11
• Voltage
• Efficiency 2 12

4 13

5 14

15
6
16
7 7
17
8
18
3
19

20

Figure 78: Process Data- function

Table 9-9: Process Data- function

Pos. Control Element Explanation / functionality

1 Preparation steps Fixed preparation sequence
Approval of the furnace functionality

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Pos. Control Element Explanation / functionality

9.10 “Processes” - function
2 Process steps Freely programmable process sequence
Pressing the “Processes” button (A) in the overview area, the operator
40 freely programmable process steps for an individual set of the
gets access to the “Processes” window in the work area.
melting, crystallization, annealing and cooling sequences
The “Processes” window displays the process chart in eight steps,
3 Post processing steps Fixed post processing sequence each step in a box, including preparation and post processing steps.
Approval on the error-free passed process Each box displays the main parameters of the recipe step.
4 Step duration Real time calculation The Operator gets the information on the status of the process (pass,
Time calculation of the individual recipe step, start time end time running, …) in the status line. Furthermore, the current running
process has a time bar with a green background.
5 Step duration Duration of step calculation
Step duration in min.
6 End [C°] Set temperature
Step temperature at the end of the recipe step A
7 dT/dt [K/h] Heating rate 6
Heating rate per minute of the recipe step 1

8 Limits Set limits of the main recipe parameters

Set min/max limits for the heaters and the chamber pressure
9 Pressure [mbar] Set pressure
2
Set pressure at the end of the recipe step
10 Operator clearance Recipe step - result approval 3
Activation of the next recipe step starts only if the operator approves 7
the status
11 Process number Counter 4
8
Current process number
12 Silicon weight Mass balance
Charged Silicon weight
9
13 Start date and time Counter
Start date and time of the process
5
14 End date and time Counter
End date and time of the process
15 Read out of CPU Import
Import the current recipe values from the CPU
Figure 79: Processes – function
16 Write to CPU Export
Export the current recipe values into the CPU
17 Import/Export CSV Import / Export
Import / export the recipe data as CSV file
18 Delete values Delete input data
Delete all set data in the recipe
19 Plausibility check Plausibility check
Program check of set data (recipe) plausibility
20 Start of editing Editing
Editing of set data in the recipe

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Table 9-10: Processes- function

9.11 “Process Status” - function
Pos. Control Element Explanation / functionality Pressing the “Process Status” button (A) in the overview area, the
operator gets access to the “Process Status” window in the work area.
1 Process Start / Cancel Start / Cancel button
Pressing the button starts or cancels the process The “Process Status” window displays the current recipe step as well
as the closest previous and following recipe steps.
2 Evacuation before process Set chamber pressure
Furthermore, the current running recipe step with the main parameters
Pump down chamber pressure to set values for leak-test and a trend chart of the main parameters are displayed
3 Leak-test before process Approval of chamber tightness
Raise of chamber pressure has to be lower than the set limit
4 Heaters test Approval of heaters
Resistivity of the heaters has to be in the range of the set limits
5 Preheating Approval of power supply A
Power supply has to be in the range of the set limits
1
6 Process to continue Switch
Button to approve and switch to the following process step
7 Process - Process Current running process step
Displays the current running process step (green box) and the main 2
process data of the current process step
8 Evacuation after process Set chamber pressure
Pump down chamber pressure to set values for leak-test 3
9 Leak test after process Approval of chamber tightness
Raise of chamber pressure has to be lower than the set limit

Figure 80: Process Status - function

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Table 9-11: Process Status - function

9.12 „Diagrams” - function
Pos. Control Element Explanation / functionality Pressing the “Diagram” button (A) in the overview area, the operator
gets access to the “Diagram” window in the work area.
1 Recipe Recipe step an set parameters
Displays the current recipe step (red frame) as well as the closest The “Process Status” window displays the aggregated charts of the
previous and following recipe steps four main process clusters:

2 Trend Chart • Top part of the chamber

Displays the trend charts of the main process parameters • Bottom Part of the chamber
• Heating and cooling power
3 Process-Process Current running process step
• Temperatures and gas and water flows
Displays the current running process step (green box) and the main
process data of the current process step
4 Time Process timetable
Displays the timetable (total time, skipped time, duration, rest time)
of the total process
A

Figure 81: Diagrams - function

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Table 9-12: Diagrams-function

9.13 „CSV Archive” - function
Pos. Control Element Explanation / functionality Pressing the “CSV Archive” button (A) in the overview area, the
operator gets access to the “CSV Archive” window in the work area.
1 Top Part Chart
Displays the record of all major parameters in the top chamber The “CSV Archive” window puts the operator either into the position to
navigate in archive of the runs done or to manage the csv files.
2 Heating and Cooling Chart
Displays the record of all major heating and cooling parameters
3 Bottom Part Chart
Displays the record of all major parameters in the bottom chamber
4 Flows and temperatures Chart A
Displays the record of all major temperature and flow parameters

2
3

Figure 82: CSV Archive - function

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Table 9-13: CSV Archive - function

9.14 „Profibus Diagnostics” function
Pos. Control Element Explanation / functionality Pressing the “Profibus Diagnostics” button (A) in the overview area,
the operator gets access to the “Profibus Diagnostics” window in the
1 Directory Directory list
work area.
Displays the list of all stored historical (csv files) runs
The “Profibus Diagnostics” window displays the main communication
2 Save As… Saving structure of the furnace system.
Save the selected data file into the archive Furthermore, the main parts within the communication structure and
3 Delete archive… Delete its status are displayed.
Delete the selected data file from the archive
4 Display CSV Data display
Displays the parameters of the selected data file

2 4

Figure 83: Profibus diagnostics

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Table 9-14: Profibus diagnostics - function

9.15 “Service Maintenance” function
Pos. Control Element Explanation / functionality
Pressing the “Service Maintenance” button (A) in the overview area,
1 Position Position of the part the operator gets access to the “Service Maintenance” window in the
Names the position of the parts at the furnace system work area.
The “Service Maintenance” window gives a clear overview on the
2 SPS Controlling Unit
status of the major maintenance clusters
Main control unit with program control
• The running times
3 Part Part
• Cooling water volumes
Displays a sketch of the part as well as the communication address
• Switching cycles
of the part
• Heating energy
4 Status Status
Displays the status of the main parts
• OK
• Fault
A

Figure 84: Service Maintenance - function

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User Interface of the Control Panel User Interface of the Control Panel

Table 9-15: Service Maintenance - function

9.16 „Service Limits” function
Pos. Control Element / Section Explanation / functionality Pressing the “Service Limits” button (A) in the overview area, the
operator gets access to the “Service Limits” window in the work area.
1 Cluster Name Name of the cluster
Displays the name of the major cluster The “Service Limits” window puts the operator into the position to set
both the warning and the alarm limits for the major parameters.
2 Start of editing Start editing
To have a better overview, the parameters are clustered into groups.
Starts the editing process of the cluster
3 Properties Value Display
Displays the value of the main properties
4 Synchronization Start Synchronization
Starts the synchronisation of the system A

Figure 85: Service Limits - function

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User Interface of the Control Panel User Interface of the Control Panel

Table 9-16: Service Limits - function

9.17 „Service Sensor Setup” function
Pos. Control Element / Section Explanation Pressing the “Service Sensor Setup” button (A) in the overview area,
the operator gets access to the “Service Sensor Setup” window in the
1 Cluster name Name of the cluster
work area.
Displays the name of the major cluster
The “Service Sensor Setup” window puts the operator into the position
2 Parameter Parameter to edit the sensor properties.
Displays the name and the value of the parameter To have a better overview, the parameters are clustered into groups.
3 AH Alarm
Set value of upper alarm limit
4 WH Warning
Set value of upper warning limit
5 WL Warning A
Set value of lower warning limit
6 AL Alarm
Set value of lower alarm limit
1 2

4
7

5 8

Figure 86: Service Sensor Setup - function

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User Interface of the Control Panel User Interface of the Control Panel

Table 9-17: Service Sensor Setup - function

9.18 “Process Data Online” function
Pos. Control Element / Section Explanation Pressing the “Process Data Online” button (A) in the overview area,
the operator gets access to the “Process Data Online” window in the
1 Cluster name Name of the cluster
work area.
Displays the name of the major cluster
By the “Process Data Online” window the operator can set the recipe
2 Start of editing Start editing value into the CPU.
Starts the editing process of the cluster
3 Name and address Name and address
Displays the name and the address of the sensor at the furnace Identical structure as chapter 9.9 “Process Data
system After typing, all modifications gets active in the CPU
4 Manufacturer Name of the sensor manufacturer
Displays the name of the sensor manufacturer
5 Sensor Sensor
Displays the sensor class
6 Type Type of the sensor A
Displays the detailed sensor type 9
7 Offset Offset
10
Set of measurement limits and display the set limits for the sensor 1
8 Meas. range Range 11
Set of measurement range and display the range for the sensor
2 12

4 13

5 14

15

Figure 87: Process Data Online - function

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User Interface of the Control Panel User Interface of the Control Panel

Table 9-18: Process Data Online - function

9.19 Information bar
Pos. Control Element Explanation / functionality
The information bar is obligatory and displays the values of the main
1 Preparation steps Fixed preparation sequence process parameters. In detail, the:
Approval of the furnace functionality • Status of the audio visual signal unit
2 Process steps Freely programmable process sequence • Process name
40 freely programmable process steps for an individual set of the • Recipe step number
melting, crystallization, annealing and cooling sequences • Remaining time bar function and time display
3 Post processing steps Fixed post processing sequence • Temperatures
Approval on the error-free passed process • Pressures
4 Step duration Real time calculation • Cooling energy
Time calculation of the individual recipe step, start time end time
5 Step duration Duration of step calculation
Step duration in min.
6 End [C°] Set temperature
Step temperature at the end of the recipe step
7 dT/dt [K/h] Heating rate Figure 88: Information bar
Heating rate per minute of the recipe step
8 Limits Set limits of the main recipe parameters
Set min/max limits for the heaters and the chamber pressure
9 Pressure [mbar] Set pressure
Set pressure at the end of the recipe step
10 Operator clearance Recipe step - result approval
Activation of the next recipe step starts only if the operator approves
the status
11 Process number Counter
Current process number
12 Silicon weight Mass balance
Charged Silicon weight
13 Start date and time Counter
Start date and time of the process
14 End date and time Counter
End date and time of the process
15 Start of editing Editing
Editing of set data in the recipe

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Fault diagnostics Fault diagnostics

10 Fault diagnostics 10.2 Clearing Defaults

This chapter summarizes the information that can help in the event of
a fault.
DANGER Troubleshooting and default repair require supervisor or expert
10.1 Display of Warning, Alarm and Default Messages knowledge.
Risk of injury or death for non experts
In case of an alarm or default message, the furnace system cannot be
switched on. • Work on electrical equipment may only be undertaken by an
electrician or by instructed persons under the guidance and
supervision of an electrician in accordance with electrical
Default reports A default pops up on the display as follows: regulations
• On the control panel the signal lamp "Acknowledge collective • Serious defaults may only be cleared by trained and authorized
default / default" flashes rapidly experts
• Default messages from the PLC control are displayed on the • The operator may only do troubleshooting and clearing of small
control panel display defaults
• Default messages have a default report number
• Default messages pops up in a red box In case of a default, the operator has to pick up the default message
• Only if the default has been solved and confirmed by the operator, on the control panel.
the test sequence can be continued If the operator can clear the default, he has to take the following
actions:
Defaults will lead to either the interruption of the work flow and/or the
blocking of activated functions.
1 Clear the default
2 Confirmation of the default:
Warning messages A warning pops up on the display as follows: Push "Acknowledge default" button on the control panel
• On the control panel the signal lamp "Acknowledge collective Signal lamp "Acknowledge default" gets off.
default / default" flashes slowly
In case of a serious default, the operator has to take the following
• Warning messages from the PLC control are displayed on the measures:
control panel display
1 Press the EMERGENCY OFF button
• Warning messages have a warning report number
2 Inform qualified experts
• Warning messages pops up in a yellow box
Clearance of the default by qualified and authorized experts
• Most warning messages are displayed until they are
acknowledged 3 Unlock the EMERGENCY OFF button
4 Confirmation of the default:
Push "Acknowledge default" button on the control panel
Warning messages does not result in the interruption of the work flow.
Signal lamp "Acknowledge default" gets off.

EMERGENCY OFF In case of an EMERGENCY STOPP, the signal lamp "Acknowledge The furnace system is ready for operation again.
collective default / default" lights up on the control panel.
Display on the control panel The following table lists the basic structure on how to proceed in case
of defaults and warning.

Table 10-1: Default displays on the control panel – measures (PLC collective messages)

Display Cause Clearance (measure)

Signal lamp A default exists.
Clear the default
"ACKNOWLEDGE DEFAULT" The system is not ready
Take measures to get the furnace
lights up for operation. inspected by experts

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Maintenance Maintenance

11 Maintenance Avoid contamination of the Silicon feedstock

Ensure that no pollution gets into the open chamber
Perform maintenance and inspection at the recommended intervals to Reduce the contamination to an ingot on a minimum
• prolong the furnace life
• ensure the proper furnace performance
• detect faulty parts in advance 11.1.1 Argon Pump Station Instructions
• save repair costs Argon facility is subject to the safety and maintenance regulations
applicable at the installation site.
Besides the legally specified tests, the gas supply pressure must be
11.1 Safety Information for Maintenance recorded. The gas supply pressure might be measured with a test and
filling device.
Before you start to perform the maintenance work, read and make
familiar with the safety regulations chapter ”2 Safety", on page 23.
Only personnel with specialist knowledge and experience may work Argon connections must be depressurized before dismantling!
on facility components.
Repairs at the Argon piping may only be made by the manufacturer
Never do weld, solder or drill work

For all maintenance and cleaning tasks at the furnace:

wear protective gloves, safety boots and safety helmet! DANGER Discharge of Argon!
Argon discharged under high pressure may cause serious injury!
• Before starting work, switch off the furnace system and
Prior to maintenance, inspection, repair or cleaning at the furnace, depressurize it!
proceed as follows:
• Move the top part of chamber into furnace position
• Shut down the furnace
11.1.2 Maintenance on the Hot Zone
• Switch off the furnace with the main switch on the control cabinet
• Padlock the main switch against switch-on
• Attach a "Maintenance" warning sign
Repairs and maintenance work on the hot zone may only be
performed by skilled experts
Report and record all defaults detected so that they can be cleared.
Note: alarms can change to defaults, if they are not cleared in time.
Never use the following for cleaning:
• Petrol or other highly inflammable substances
• Compressed air (dirt might get into sensitive parts of the system)
• High pressure cleaner (dirt might get into sensitive parts of the
system)

Auxiliaries for maintenance work • Lint-free cleaning cloths

• Standard detergents
• Water

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Maintenance Maintenance

11.1.3 Access Points for Maintenance Work

Table 11-1: Safety accessories (pressure limitation valves)
Support frame rack top view Access points for maintenance work on the support frame rack are
marked in the following figure.
Pressure limitation valves DB Comment
Techn. Pos. (P&ID)
Inspection every ≤ 6 months
1 Top part of chamber 2 1
Cooling water circuit
Check seal is undamaged.
2 Carriage 1 2 3
Set and protected at 6 bar
Check external leak-tightness.
3 Parking position
Check agreement of types.

11.1.5 Spare and wearing parts

You may only use genuine spare parts from centrotherm SiTec GmbH
as well as approved accessories.

11.1.6 Maintenance and Recording Plan

Maintenance work has to be recorded in the obvious recording plan of
the furnace owner.

Figure 89: Access points on the upper rack

11.2 Maintenance List
Support frame rack side view Access points for maintenance work on the support frame rack are The individual maintenance jobs are listed in the maintenance list
marked in the following figure. Table 11-3.
1 Carriage The structure of the list covers the following logic:
1 2 1
2 Top part of chamber
• Name of the component
3 Control cabinet • Maintenance activity
4 Cooling water supply • Maintenance interval
• Operator-level for the work

The execution of the maintenance and the observance of the intervals

must be recorded according to the guidelines.

3 4 3
Indicated inspection intervals are based on empirical values of the
Figure 90: Maintenance access points on the front rack
manufacturer, proper handling of the processes and the use of the
specified auxiliary and feedstock materials. Minor changes of the set-
11.1.4 System Parts Requiring Recording
up may influence the intervals.
In accordance with Industrial Safety Ordinance (BetrSichV), systems Frequently record the lifetime of the furnace components according to
and their parts requiring recording must be inspected on regular your process set-up and adjust inspection intervals to the furnace
intervals. The inspection has to be done by an approved inspection conditions.
authority to ensure that they are in perfect working order as regards
operating safety. Centrotherm SiTec GmbH recommend to use a maintenance logbook
Safety accessories (pressure With regard to a safety function the following accessories parts must
limitation valves) be proofed according to the Pressure Equipment Directive.

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Maintenance Maintenance

The following abbreviations are used in the maintenance list: Table 11-3: Maintenance Table

Component Maintenance Activity Interval By Further Information

Entire furnace system Clean the area around the Remove loose parts.
Table 11-2: Abbreviations in the Maintenance list
system Clean up liquids spilt on the
D IP
floor immediately.
Abbreviation Explanation
Danger slippery!
D Daily
Electrical connection cables Have all damage remedied
W Weekly on visible damage (abrasion M ESP immediately by competent
marks, cracks, cuts) electricians.
M Monthly
Cleaning M
½Y Every six months IP
Visual inspection Y, C
2J Every 2 years
A
4J Every 4 years Flush system cooling water
(or as EP
components
required)
5J Every 5 years
Clean the hall floor. Keep the
Y Annually
Hall floor Cleaning P, W IP hall floor clear of objects to
P Prior to process start avoid trip hazards

A After maintenance or retrofitting Entire chamber Perform visual inspection of Check for leaks and visible
tensioning elements and all damages.
I Prior to integration into the furnace connection points on leaks M IM
All damages have to
C Included in commissioning by manufacturer remedied immediately

The following abbreviations are used in the "By" column: Check gas filling and Performed with a test and
suction pressure (negative ¼Y EP filling device
IP Instructed person pressure)
EP Expert Check if the chamber jacket
is free from cracks, damage
ESP Electrically skilled person
and leaks
Chamber jacket Visual inspection P IP
IM Industrial mechanic In case of any damage to the
chamber jacket, it has to be
repaired immediately
Top part and bottom part of Chamber functions:
chamber Check pyrometer.
Temperature measurement
¼Y If necessary, adjust pressure
Check sealing surface on
by the associated pressure
flange
gauge.
Heat exchanger connection
Clean the inspection glasses
Inspection glasses Cleaning ½Y IP
with isopropanol.
Cleaning ½Y IP
Chamber interior
Visual inspection P IP
Hot zone Clean foundation plate daily
before the start of work and
D EP
check the bearing surface
for the crucible for damage.
Check protective walls. M IP
Check bearing surfaces for
M IP
wear and tear.

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Maintenance Maintenance

Component Maintenance Activity Interval By Further Information Component Maintenance Activity Interval By Further Information
Check sealing surfaces for Check in perfect working
M IP 4Y ESP
wear and tear. order.
Hot zone integrated safety Repeated inspection as per
Visual inspection ½Y IP
barrier VDE 0113 / DIN EN 60204 4Y ESP
Pt. 19 / BGV A2
Visual inspection IP
melting crucible I Main switch Functional test Y, A, C ESP
Measurement IM
Emergency stop system Functional test A, C ESP
Visual inspection
support crucible I, P IP Visual inspection ½ Y, A
Cleaning Protective circuit ESP
Measurement C
Cooling water components Clean contaminated parts Proceeding like this,
Wipe up spilt water with a D IP improves detection of Covers of the power Cleaning
leakage ½Y ESP
cloth immediately supplies Visual inspection
Cooling water lines, cooling Inspect all cables, hoses Cleaning ½Y
water hoses and couplings for leaks and Warning devices ESP
externally detectable Functional test C, P
damage. Cleaning ½Y
W IP Warning and information
Have all damage remedied IP
labels and inscriptions Visual inspection W, P
immediately.
Spurting water can result in Safety valve cooling circuit Functional test M EP See supplier documentation.
injuries.
Cleaning ½Y
Replace water hoses 3Y IM
Visual inspection Y
Cooling water connection Electrical components ESP
Discharge collected water Functional test Y, A, C
under operator terminal and M EP
cooling water supply Clean surfaces
Measurement C, 4 Y
Cooling water Measurement Y EP Visual inspection ½Y
High-voltage lines ESP
Filter device Ball valves on the filters: Functional test C
Check function of the valves W EP Cleaning M
and smoothness of Measuring equipment EP
operation of the ball valves. Functional test Y, A
Filter screens Cleaning M IP Visual inspection W
Control elements IP
Water filter Replace filter candles Increased flow resistance Functional test M
cooling filter circuit and results in reduced cooling
supply power Control panel Clean operator panel with a
½Y M IP
damp cloth (water only)
(or as IP The exchange cycle must be
required) determined according to the Check function of signal If necessary, have the faulty
contamination level of the lamps lamps replaced
M ESP
cooling water Replacement only by
Electrical equipment (and Check function of all Check whether connection electrician!
operating material) electrical contacts. cables and electrical wires Cleaning P
are damaged (cracks, Guide rail IP
½Y abrasion marks, cuts, etc.) Visual inspection ½Y
(or as ESP Check filter mats in fans Cleaning P
required) Guide rods of the handling
IP
Check connectors are tool Visual inspection ½Y
fastened securely
Replace defective parts Cleaning and lubrication of
Screw jack Y EP See supplier documentation.
screw
Lubrication of jack at nipple Y

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Maintenance Maintenance

Component Maintenance Activity Interval By Further Information Component Maintenance Activity Interval By Further Information
Removal, cleaning and re- Check geared motor for
5J
filling jack with grease unusual noise, vibration and D
changes
Visual inspection for wear Y
Check of housing
Argon pressure pumps Repeated tests EP Installation site M
temperature
Argon piping Functional test Y EP
Check of oil level M
Graphite and CFC Check of oil level sensor M
Visual inspection I, P IP
components EP
Check of oil quality ½Y
Current feed through Visual inspection Y, I, C ESP
Gearbox First oil change after See supplier documentation.
C, A, –
Measurement ESP commissioning
½Y
Further oil changes 2J
Replacement of bottom
Y EP
Heaters heater Check of gearbox for leaks M
Replacement of side heater ½Y EP
Cleaning of gearbox vent ½Y
Replacement of both
2J EP Cleaning ½Y
heaters
Check of level in cooling Check of slipping clutch 500 h, Y
–
jacket
Check of clutch 3M
Vacuum pump check of sieve for soiling – EP See supplier documentation.
Complete check of geared
Y
cleaning of delivery motor
– EP
chamber
after 3 h;
Check of mounting screws
Visual inspection Y M
Gearbox See supplier documentation.
Transformer Cleaning Y ESP See supplier documentation. Change of roller bearing
2J
grease
Retightening of fittings Y
Check of rubber buffer of
Initial inspection ½Y ½Y
stator
Lubricate bearings 5Y Leak test –
Heat exchanger EP See supplier documentation.
Cleaning – Functional test –
Three-phase motors EP See supplier documentation.
Main inspection 2J Check of heat exchanger
Draining of condensed for ambient air and cleaning 3M
water if necessary
Check of condensed water
3M
Control cabinet cooler discharge EP See supplier documentation.
Check of fans for possible
overheating or excessive Y
vibration
Cleaning –
Pyrometer Cleaning of lens – EP See supplier documentation.

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11.3.5 Maintaining the Covers of the Power Supplies

11.3 Maintenance Activities
Visual Inspection Carry out the following checks for all covers of live parts:
Prerequisite The furnace is secured as described in “11.1 Safety Information for
Maintenance", on page 179. • Check fastenings for tight connection and check if all screws are
installed. If required, also retighten the screws on the fastenings.
11.3.1 Checking Cooling Water Lines / Hoses • Check the covers for damage such as cracks. Have damaged
covers replaced immediately.
Cooling water hoses should be replaced at once in the event of:
• Damage to the external shell (abrasion marks, cuts, cracks, Cleaning Clean the outside surfaces.
embitterment)
• Deformation in a depressurized or pressurized condition which 11.3.6 Maintaining the Warning Devices
does not correspond to the normal shape of the flexible hose, Functional Test Perform the following steps:
• Leaks
1 Put the furnace into service mode
• Damage or deformation of hose fittings (reduced sealing ability);
minor surface damage does not constitute grounds for 2 At the control panel, call the "Service/Limits" Screen Section
replacement 3 Push the "Lamp test" button
• The hose springing out of the fitting 4 As long as the button is pressed all warning devices are switched
• Corrosion of fittings reducing function and strength on
• Failure to observe installation requirements o Replace the defect warning devices
• Exceeding storage life and durability 5 Put the furnace back into service mode

11.3.2 Checking the Function of the Main Switch Cleaning Clean the outside surfaces of the signal towers.
Switch on the main switch. Check if the furnace is supplied by power. 11.3.7 Maintaining Warning Labels and Inscriptions
Switch off the main switch. Check if the furnace is completely
Visual Inspection Check all warning and information labels as well as all inscriptions of
disconnected to power supply.
the control elements for legibility and completeness.
11.3.3 Checking the Function of the Emergency Stop System Have illegible and incomplete labels or inscriptions replaced.
Check EMERGENCY OFF switch and EMERGENCY OFF devices for Cleaning Clean all warning and information labels as well as all inscriptions with
trouble-free function. a damp cloth.
Perform the following steps: 11.3.8 Maintaining Electrical Components
1 Put the furnace into service.
Functional Test Check all electrical components for proper function.
2 Push the emergency stop buttons.
In case an electrical component does not work, replace it.
o Check if all hazardous movements have been stopped safely
Visual Inspection Carry out the following checks for all electrical components:
o Check if the heaters have been switched off
• Make sure the electrical equipment confirms with the technical
o Check if voltage supply of the drives was switched off
documentation.
o Check if the argon supply valves have been closed by the
• Check all connections for tight fit.
control
o If one of the above points does not apply, take the furnace out • Fix all screws and terminals.
of operation and have the emergency stop system repaired • Check wires for tight fit.
immediately • Check wirings for cracks, abrasion or erosion.
3 Repeat this check for all emergency stop buttons on the furnace • Check covers and insulations for damage.
Immediately replace damaged electrical components.
11.3.4 Maintaining the Protective Circuit
Measurement Carry out the following measurements for all electrical components:
Visual Inspection Check all connections of the protective circuit in the control cabinet
and on the furnace for tight connection. If required, fix the • Check the protective circuit on continuous connection.
connections. • Check insulation resistance.
Measurement Check the protective circuit for continuous connection. • Check voltages.
In case of interruptions, safeguard a continuous connection. • Check protection against residual voltages.

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Maintenance Maintenance

Checks performed by the owner/operator must be documented in an

"Electrotechnical Safety Inspection" check list. 11.3.13 Maintaining the Guide Rods of the Handling Tool

Cleaning Visual Inspection Check the guide rods of the handling tool for damage such as cracks
or fatigue.

Engage expert companies or especially trained personnel when Should the guide rods of the handling tool be damaged, have them
cleaning inside electrical components is to be carried out (e.g. of fans repaired or replaced.
of electric motors, control cabinet interior). Cleaning Clean the guide rods of the handling tool with a dry cloth.

11.3.14 Maintaining the Melting Crucible

Visual Inspection Carry out a visual inspection of the melting crucible. Do not use
11.3.9 Checking High-Voltage Lines damaged or out of specification melting crucibles. Check if the melting
Visual Inspection Check cable sheathing on cracks, abrasion or erosion. crucible is free from cracks and damage.

Should any sheathing be damaged, replace the related cable. Should the melting crucible be damaged, replace it.

Functional Test Check the contact points for tight installation. Measurement Prior to integration into the furnace, carry out an inspection of each
melting crucible (100-% inspection). Check and record the
If required, fix the contact points. dimensional consistency of the melting crucibles.

11.3.10 Maintaining Measuring Equipment Maximum outside dimensions:

Functional Test Check all measuring equipment for proper function according to the • width: 880 + 2 mm x 880 + 2 mm
component operation manuals. • height: 420 mm
If required, readjust, maintain or replace the equipment.
11.3.15 Inspecting the Support Crucible
Visual Inspection Carry out a visual inspection of the support crucible. Check if the
Record the results of the functional tests support crucible is free from cracks and damage.
Centrotherm SiTec GmbH recommends to take measures to detect Should the support crucible be damaged, replace it.
trends to adjust inspection intervals.
Cleaning Clean the underside of the crucible and check for damage to the
Should a sensor indicate unrealistic values, check its function and bearing surface.
replace it if required. Check sealing surface on the flange for correct positioning and
damage.
Clean hot zone components daily before the start of work and check
Cleaning Clean the quartz glasses of the pyrometers with iospropanol.
the bearing surface for the crucible for damage.
11.3.11 Maintaining Control Elements
11.3.16 Inspecting the Hot Zone Integrated Safety Barrier
Functional Test Test the function of all control elements.
Visual Inspection Carry out a visual inspection of the hot zone integrated safety barrier.
Should any control element not work, have it replaced by an Check if the hot zone integrated safety barrier is free from cracks and
electrically skilled person. damage.
Visual Inspection Check all control elements on damage and signs of wear. Should the hot zone integrated safety barrier be damaged, have it
Should any control element be damaged, have it replaced by an repaired or replaced.
electrically skilled person. Cleaning Clean hot zone components daily before the start of work and check
the bearing surface for the crucible for damage.
11.3.12 Maintaining Guide Rails
11.3.17 Inspecting Graphite and CFC Components
Visual Inspection Check the guide rails for damage such as cracks or fatigue.
Should the guide rails be damaged, have them repaired or replaced. Check the graphite and CFC components on damage such as cracks
or aging.
Cleaning Clean the running surfaces of the guide rail of the carriage with a dry
cloth. Should the graphite or CFC components be damaged, have them
repaired or replaced.

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Maintenance Maintenance

11.3.18 Inspecting the Current Feed Through 11.3.23 Cleaning the Touch Panel
After every heater change, however no later than within the indicated The touch panel has a cleaning mode you can use for cleaning.
inspection intervals, carry out an inspection of the clamped terminal With the "Cleaning picture" button, switch to that mode before
connection between current feed through and electrode. Check if the cleaning the touch panel with a dry cloth. Proceeding like mentioned
insulating washer between current feed through and electrode is
you avoid that any settings can be accidentally changed.
intact.
Only use rinsing agents or foaming monitor cleaners for cleaning.
Should the insulating washer be damaged, replace it immediately.

11.3.19 Maintaining the Overall Furnace

CAUTION Damage hazard!
Visual Inspection Check the overall furnace for damage. Pay particular attention to weld
seams and piping as well as to fittings for cooling water, argon and • Do not clean the device with aggressive solvents, abrasives,
vacuum. compressed air or steam cleaners.
Check if the furnace is free from cracks, damage and leaks.
Have any damage to the furnace repaired immediately.
Cleaning Clean the outside surfaces of the overall furnace.
11.3.24 Replace Cooling Water Filter
11.3.20 Maintaining the Chamber Interior
It is necessary to replace the filter elements, if the pressure
Visual Inspection Check if the chamber interior is free from cracks and damage. drop gets to high or a default message is displayed.
Have any damage to the chamber interior repaired immediately. It is a prerequisite for changing the filter that the filter aggregate
Cleaning Clean the metal surfaces of the chamber interior with isopropanol. in stand-by.
Filter How to replace the filter element:
11.3.21 Inspecting the Argon Piping
1 Close the isolating valve.
Proceed as follows to test the Argon piping for leaks:
2 Unscrew the sealing cap.
1 Provide Argon to the piping.
3 Put a suitable catching tray under the drain line.
2 Close argon supply at the facility site.
4 Open the isolating valve on the filter vessel.
3 Observe if Argon pressure drops.
5 Guide the water flow via the drain pipe into the catching tray
o Dropping pressure in the Argon piping indicates leaks. underneath.
o Have leaks eliminated immediately.
6 Wait until the water flow stops.
11.3.22 Measuring Cooling Water 7 Open the seal and remove the cover of the filter vessel.
The filter element is now accessible and can be replaced.
Have the cooling water quality analyzed.
8 Check the O-rings of the bottom gasket and the elastic sleeve for
damage and replace if necessary.
9 Replace the filter insert.
Admissible limit values are indicated in chapter 3, page 61. 10 Fasten the filter vessel and close it.
11 Open the isolating valve.
The filter replacement is complete and the filter aggregate is ready
for operation.

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Maintenance Dismantling and Disposal

11.4 Restart after Maintenance 12 Dismantling and Disposal

Proceed as follows to restart the furnace after maintenance work: This chapter covers observable basic instructions for dismantling
and/or disposal of the furnace system.

12.1 Instructions for Dismantling the Furnace

Safety assessment and furnace release assign to dedicated persons

Observe the valid safety regulations!

Only personnel with specialist knowledge and experience may work
on facility parts.
Safety Assessment and Furnace Perform the following steps to secure furnace safety for restart after
Release stoppage: Only use appropriate tools (e.g. insulated tools).
1 Check the function of all safety equipments
2 Check the protective circuits
3 Check the function of Argon emergency purge For all dismantling tasks at the furnace system wear protective gloves,
4 Make sure there are no persons in the danger zone. safety boots and safety helmet!
5 Make sure there are no foreign objects inside the chamber
6 At the control panel, check if there are any warning or default
messages.
7 Clear the causes of all warning or default messages Faulty and irreparable components must be disposed of according to
the environmental regulations.
8 Approve warning or default messages.
Separate all materials (plastic, metal, and electronics) for recycling.
9 Switch the furnace to the status “On” (see “7.2 Main Switches at
the Furnace System”, page 103).

Procedure How to proceed with dismantling:

1 Switch the furnace off
2 Depressurize the furnace system
3 Cut off the electrical connections to the facility
4 Remove the residual media (e.g. cooling water)
5 Cut off the electrical connections between the control cabinet, the
switch cabinet (system) and all other electrical components
6 Cut off the cooling water piping to the facility

Disconnect and remove components of choice from the furnace

system.

12.2 Dismantling the hot zone

Only specialists shall responsible for work on the hot zone.
Repairs to the hot zone as well as to the chamber falls under the
responsibility of the manufacturer. Never drill , weld or carry out solder
work at the chamber.

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12.3 Disposal 13 Instruction on emergency situations at

For disposal of the system take notice of the following: Multi-Crystalline Si-Process
• Cordon off the erection site for the furnace before you
disassemble the furnace
13.1 Explanations
• Provide for sufficient space to temporarily store removed
components Main process stages: 1 Preparation to the process
• Put up warning signs to point out disassembly work – chamber evacuation, leakage test, heater test, heater preheating
• Dispose of the furnace according to valid local regulations
2 Heating and melting
• Dispose of oil, cleaning and operating fluids according to valid
local regulations as well as in compliance with manufacturer – solid Silicon heating, Silicon melting, liquid Silicon
indications 3 Crystallization
• Observe the safety data sheets of the manufacturers – vertical temperature gradient formation, Silicon solidification from
bottom to top, crystallization of top corners
4 Annealing
– ingot heating, temperature holding
5 Cooling down
– ingot cooling by controlled heating, cooling by active cooling
6 Post treatment
– chamber evacuation, leakage test, chamber flooding

Main emergency situations: A – Cooling water failure

– alarm on cooling water flow, pressure and temperature
B – Electrical power failure
– alarm on power supply to heaters, pumps and control cabinet
C – Quartz crucible failure
– alarm on cooling water temperature or bottom heater power
dropping
D – Argon flow failure
– alarm on argon pressure.
E – Out of Control

General Measures • Contact your responsible supervisor or line manager immediately

• In case of infrastructure fails contact the person in charge for the
facilities and utilities
• In any case record the incident in the record book at the furnace
• In any case:
o Take the events very seriously
o Forward the information to the supervisor
independently of the severity of the event

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Critical levels and periods: A - Most Critical Emergency Situation

13.2 Practical Part – Personnel Activity
The most critical emergency situation and leads also to situations B
and very probably to C. Critical during the last 5 to 6 hours of melting
and the first 10 to 12 hours of crystallization. For personnel because of
A. Cooling water failure: 1 The first operator has to stand at the control monitor in order to
possible output of hot water and hot vapour high pressure from safety
control permanently the cooling water circles.
valves and probably damaged hoses. Critical for furnace, hot zone
and, for ingot. 2 The second operator has to find the reason of cooling water failure
and to solve the problem as quick as possible.
B - Less Critical Emergency Situation
3 Contact the responsible supervisor and line manager
Less critical emergency situation than leads very probably to critical
immediately.
situation C. Critical during the last 5 to 6 hours of melting and the first
10 to12 hours of crystallization. 4 If the temperature of cooling water increases above 70 °C, even in
one of the circles, the operator at the control unit should give
For the personnel in safe position not critical as the furnace safety
command for evacuate the hall.
system may handle the situation. Nevertheless, critical for furnace for
hot zone and, for ingot. 5 The power after 3 minutes switches automatically off, but
nevertheless the operator standing at the control unit has to switch
C – Slightly Less Critical Emergency Situation
off main red power switch. After switching on Position off, he has
Slightly less critical emergency situation than B since the emergency to leave the hall, too.
cooling down process can be activated by pumps at bottom. Critical
6 For the most critical process stages – the last 5 to 6 hours of
during the last 5 to 6 hours of melting and the first 10 to12 hours of
melting and the first 10 to 12 hours of crystallization – the cooling
crystallization.
down time may take more than 5 to 6 hours to lead the furnace
For the personnel in safe position it is not critical as the furnace the into an uncritical stage.
furnace safety system may handle the situation. Nevertheless, critical
for furnace for hot zone and, for ingot.
D - Minimally Critical Emergency Situation B. Electrical power failure: 1 The personnel have to identify the reason of electrical power
Minimally critical emergency situation but critical level. Situation can failure and solve the problem as quick as possible.
arise upon situation C after a few minutes of Argon absence followed 2 The process after 3 minutes switches automatically off. For safety
by a sharp argon flow increasing. Graphite parts above the melt may reasons the internal battery buffered UPS (uninterrupted power
brake and fall down onto the melt. Hence, the top part of the melt supply) keeps the controlling and monitoring system alive for 15
would get solid which may leads to situation C. Critical during the last minutes.
5 to 6 hours of melting and the first 10 to 12 hours of crystallization.
3 During 15 minutes the operators has to control the cooling water
For the personnel in safe position it is not critical as the furnace the cycles. In particular on the circles of heat exchanger and bottom
furnace safety system may handle the situation. Nevertheless, critical part of chamber.
for furnace for hot zone and, for ingot.
4 The operator has to contact the responsible supervisor and line
manager immediately.
5 If the temperature of cooling water increases above 70 °C, even in
one of the circles, the operator at the control unit should give
command for evacuate the hall.
6 The power after 3 minutes switches automatically off, but
nevertheless the operator standing at the control unit has to switch
off main red power switch. After switching on Position off, he has
to leave the hall, too.
7 For the most critical process stages – the last 5 to 6 hours of
melting and the first 10 to 12 hours of crystallization – the cooling
down time may take more than 3 to 4 hours to lead the furnace
into an uncritical stage.

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C. Quartz crucible failure: 1 In any case contact the responsible supervisor and line manager D. Argon flow failure: 1 In case of a failure in the Argon supply for more than 3 minutes,
C-I. Determination of molten immediately. the operator has to close the valve for top axial argon flow
silicon leakage: 2 Periodic leakage of molten silicon may occur at the beginning of 2 The personnel have to detect the reason of Argon flow failure and
the silicon melting – 6 to 9 hours after the process start. solve the problem as quick as possible.
Most probable reason may be the usage of a damage crucible. 3 In case the Argon flow has been repaired the operator has to open
3 Intensive leakage of molten silicon may occur at the ending of the the valve for top axial argon flow very slowly. The increase should
silicon melting process – 10 to 12 hours after the process start. be done stepwise up to 20–30 l/min. One step per minute by
The situation may happen as a consequence of an emergency setting 2 to 3 l/min per step.
situation. 4 The second operator should control the cooling water temperature
4 Leakage of molten silicon during crystallization is even less especially in the heat exchanger and bottom part of chamber in
probable as the bottom of the crucible may be covered by solid order to determine silicon leakage.
silicon. The situation may happen as a consequence of an 5 Contact the responsible supervisor and line manager immediately.
emergency situation.
5 Low intensive periodical leakage during melting can be
determined by periodical decreasing of the bottom heater power
E. Out of Control: Most critical situation may happen in case of a strong software or
below the limits. In case, the heart power may fall.
hardware failure.
6 Intensive leakage during melting can be determined by a sharp
1 If the process gets out of control the operator has to switch off the
increasing of cooling water temperature, especially in the bottom
power by pressing the Emergency Stop button
cooling cycle. In case, the heart power may fall.
2 All personnel have to leave the building immediately. Stay out of
7 Intensive leakage during crystallization can be determined by
the building for a minimum of 3 to 6 hours. Time depends on the
sharp increasing of cooling water temperature, especially in the
process step.
bottom cooling cycle. In case, the heart power may fall.
3 Contact the supervisor and the line manager immediately.
C-II. Operators activity to 1 In any case contact the responsible supervisor and line manager
minimize damages: immediately.
2 During silicon charge melting – 6 to 12 hours after the process
start – the shift operators has to control bottom heater power
every 10 minutes.
3 Alarms get active on sharp increasing of cooling water
temperature in the heat exchanger and bottom part of chamber.
For example in case of a silicon leakage.
4 In case the bottom heater power has 2 times dropped below 50
kW during the melting process – 6 to 9 hours after the process
start - the operator has to switch the process to the first cooling
step.
5 In case the bottom heater power drops at the ending of melting
process – 10 to 12 hours after the process start – the operator
has to switch the process to the first crystallization step.
6 The operator has to control cooling water temperature during
crystallization in the heat exchanger. In case of an increase above
70 °C the operator has to switch the process to the first cooling
step.
7 In case of uncontrollable situations, the operator standing at the
control unit has to give command to evacuate the building

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