electronics

Article
Development of a High-Power-Factor Power Supply for an
Atmospheric-Pressure Plasma Jet
Chi-Feng Su 1 , Chih-Tung Liu 2 , Jong-Shinn Wu 2 and Ming-Tzu Ho 1, *

1 Department of Engineering Science, National Cheng Kung University, Tainan City 70101, Taiwan;
[email protected]
2 Department of Mechanical Engineering, National Yang Ming Chiao Tung University,
Hsinchu 30010, Taiwan; [email protected] (C.-T.L.); [email protected] (J.-S.W.)
* Correspondence: [email protected]

Abstract: This paper presents the design and implementation of a miniaturized high-voltage power
supply with power factor correction (PFC) for atmospheric-pressure plasma jet (APPJ) applications.
The sinusoidal output frequency and voltage of the power supply can be controlled independently
from 16 to 24 kHz and from 1 to 10 kVpeak , respectively. A helium APPJ load is used to assess the
performance of the developed power supply. It is shown that the developed high-voltage power
supply operates effectively, and the designed PFC converter improves the input current distortion of
the power supply. Not only the power factor of the power supply is increased from 0.41 to 0.95, but
it also provides a low-ripple DC voltage, which reduces the high-voltage ripple of the output from
730 to 50 Vp-p . In this paper, the proposed design integrates the PFC converter into the high-voltage
power supply so that the developed power supply has better electrical characteristics and the overall
power supply can be significantly miniaturized.





 Keywords: atmospheric-pressure plasma jet (APPJ); plasma power supply; power factor correction (PFC)
Citation: Su, C.-F.; Liu, C.-T.; Wu,
J.-S.; Ho, M.-T. Development of a
High-Power-Factor Power Supply for
an Atmospheric-Pressure Plasma Jet. 1. Introduction
Electronics 2021, 10, 2119. https://
By continually improving the design of plasma generators for decades, the atmospheric-
doi.org/10.3390/electronics10172119
pressure plasma has been compliant with the low-temperature work to ensure safe opera-
tions. Among atmospheric-pressure plasma designs, the atmospheric-pressure plasma jet
Academic Editor: Hani Vahedi
(APPJ) [1,2] is the most commonly used for many applications. The atmospheric-pressure
plasma jet produces plasma with a narrow area and high power density, suitable for single-
Received: 2 July 2021
Accepted: 25 August 2021
point processing. Therefore, many novel applications related to APPJ can be found in the
Published: 31 August 2021
biomedical field, including root canal disinfection [3], tooth bleaching [4], and treatment
of human extremities [5]. Handheld commercial APPJ devices will become popular for
Publisher’s Note: MDPI stays neutral
biomedical sterilization or surface treatment in the near future. For ease of use during
with regard to jurisdictional claims in
treatment, it is crucial to miniaturize the plasma power supply.
published maps and institutional affil- This paper aims to design a miniaturized plasma power supply. The expected output
iations. of the designed power supply has a high-voltage AC sinusoidal waveform, the output
voltage is adjustable at a fixed frequency, and it has a burst mode feature to protect the
plasma generator when the temperature is too high. We propose to improve the conven-
tional design in the commercially available product [6] by changing the autotransformer
Copyright: © 2021 by the authors.
and high-voltage transformer to improve the disadvantages of having a large volume so
Licensee MDPI, Basel, Switzerland.
that the space for circuit composition is significantly reduced.
This article is an open access article
This study first introduces the model of the plasma load. In [7–11], the plasma
distributed under the terms and models were simplified as combinations of several capacitors and threshold voltages.
conditions of the Creative Commons Here, we use the model introduced in [12] with the relationships between the structure
Attribution (CC BY) license (https:// and capacitors in [11]. The value of the capacitor at a non-discharged state is calculated
creativecommons.org/licenses/by/ approximately by measuring the dimensions of the APPJ structure and the arrangement
4.0/). of the ground electrode. The obtained parameters of the model are then used in the

Electronics 2021, 10, 2119. https://doi.org/10.3390/electronics10172119 https://www.mdpi.com/journal/electronics

Electronics 2021, 10, 2119 2 of 21

simulation. In addition, the high-voltage transformer model [13] and the inverter circuit are
also built in the simulation. Based on the simulation-based design, the feasible transformer
specifications are determined by simulating the gain curves of the input and output. Finally,
the plasma model is combined with the designed high voltage transformer circuit, and the
design of the high voltage power supply is validated by the simulation.
There are many advantages in our proposed design over conventional designs. In
the design, we redesign the high-voltage transformer to have a higher resonant frequency
so that it does not have a drastically changing gain in the operating range; this way we
can have advantages such as reduced operating current, inductance value, and coil wire
diameter. The heat and Electromagnetic Interference (EMI) issues can also be improved
by reducing the transformer’s size. Although this reduces the boost ability of the inverter,
the front-end converter can compensate for this reduced capability. Through such a
design compromise, we can reduce the volume of the back-end inverter. Furthermore,
the external DC power supply is integrated into the designed high-voltage power supply.
Most plasma power supplies are based on stand-alone DC power combined with high-
voltage power supplies [14,15] or Marx generators [16,17], and are thus bulky and heavy,
with limited portability. To overcome these disadvantages, in this study, a flyback PFC
converter [14,18] is use to replace the front-end DC power supply. Since the output
voltage of a flyback converter is arbitrarily step-up/down, it is different from the boost
system that is only used when the output voltage is higher than the input voltage. It
is very suitable for miniaturization applications as a front-end circuit. It can not only
replace the external DC power supply but also improve the capability of power factor
correction [19]. Based on the above two improvements, the overall power supply can be
further significantly miniaturized.
For practical applications, we used the helium APPJ as an output load, compared the
difference between simulation and experimental results, and validated the effectiveness
of the electrical function through measurement data. The performance of APPJ load was
assessed by optical emission spectroscopy (OES) [20–22]. Finally, in comparison with the
case study, the test results show that it is a successful miniature integrated design.
The rest of this paper is organized as follows. Section 2 discusses the structure
and equivalent electrical model of a plasma jet. Section 3 describes the design steps of
power supply circuits. In Section 4, a description of the experimental setup is given and
then the results of simulations and experiments are compared. Section 5 presents the
concluding remarks.

2. Equivalent Electric Circuit Model of Plasma Jet

A schematic diagram of an APPJ in this paper is shown in Figure 1. The APPJ consists
of a quartz tube, a capillary stainless tube, an aluminum nozzle, and aluminum foil. The
quartz tube serves as a dielectric layer.
The powered electrode (capillary stainless tube and aluminum nozzle) is inserted into
the quartz tube tightly using polytetrafluoroethylene (PTFE) sealing tape, and aluminum
foil is wrapped around the quartz tube as the grounded electrode. The distance between
the powered electrode and the grounded electrode is 15 mm. Here, a is the radius of the
electrode tube, b and c are the inner and outer radii of the quartz tube, respectively, and l
is the length of the powered electrode. At the undischarged state, the equivalent circuit
model of the APPJ consists of two capacitors connected in series with capacitances Cg and
Cd . As shown in Figure 1, Cg represents the capacitance between the power electrode and
dielectric barrier (quartz tube), and Cd represents the capacitance of the wall of the quartz
tube. The parallel capacitance Cs represents the stray capacitance from the power supply
and connecting wire. However, during the discharge process, Cg must be modified to
describe the electrical characteristics. From [7,9–12], it can be represented by three types, as
described below:
Electronics 2021, 10, 2119 3 of 21

Electronics 2020, 9, x FOR PEER REVIEW 3 of 21

Figure 1. Schematic diagram of the atmospheric pressure plasma jet.

Figure 1. Schematic diagram of the atmospheric pressure plasma jet.
The first type [7] uses a voltage-controlled current source model as shown on the
The powered
right-hand side of electrode
Figure 2a.(capillary stainless
In the figure, Rg istubetheand
plasma aluminum
sheath nozzle)
resistance,is inserted
and Cg
into the quartz tube tightly using polytetrafluoroethylene
is the gas capacitance. Both parameters vary with the composition of the gas, (PTFE) sealing tape,
butand
the
aluminum foil is wrapped
primary discharge currentaround the quartz
Idis(t) varies according tube as to the
the grounded
value of Velectrode.
(t). The The distance
current of the
g
between the powered electrode and
voltage-controlled current source is given by the grounded electrode is 15 mm. Here, a is the radius
of the electrode tube, b and c are the inner and outer radii of the quartz tube, respectively,
α
and l is the length of the powered electrode. At Vg (the
t) undischarged state, the equivalent

circuit model of the APPJ consists ofdistwo I = I 0 ·
(t) capacitors connected in series with capacitances (1)
Vth
Cg and Cd. As shown in Figure 1, Cg represents the capacitance between the power
where Vgand
electrode (t) represents
dielectric the discharge
barrier (quartzgas tube), and CId0 represents
voltage, representsthe thecapacitance
leakage current of theatwall
the
non-discharge state, and
of the quartz tube. The parallel V th represents the breakdown voltage level.
capacitance Cs represents the stray capacitance from the Equation (1) gives
that when
power Vg (t)and
supply is greater
connecting Vth , the
than wire. discharge
However, current
during therises rapidly.process, Cg must be
discharge
The parameter
modified to describe αthe adjusts the characteristics.
electrical slope of the discharge currentit Ican
From [7,9–12], . This
dis(t)be parameter
represented by
depends on the plasma load,
three types, as described below: whose range is typically between 1 and 12. In addition, the
totalThe firstILoad
current type (t)[7]
of the
usesequivalent model can be
a voltage-controlled obtained
current sourceby Kirchhoff’s
model as shown rule, andon ittheis
given by
right-hand side of Figure 2a. In the figure, Rg is the plasma sheath resistance, and Cg is the
dV power(t) dV d(t)
gas capacitance. Both parameters
ILoad(t) = I Csvary
+ I Cdwith
= C s ·the composition +C d · of the gas, but the primary (2)
discharge current 𝐼 varies according to the value dt of Vg(t). The dt current of the voltage-
where Vpower
controlled (t) represents
current source isthe input
given byvoltage and Vd (t) represents the voltage of Cd . While
such a model is accurate, the analysis of this model becomes more complicated.
The second type of model [11] consists of a Vg (t) α C , an inductor L in parallel, and
capacitor
Idis t =I0 · g g (1)
a series resistor Rg , as shown in Figure 2b. Here RgVrepresents th the conductivity of the current
return paths.
where The modelthe
Vg(t) represents reflects the transient
discharge gas voltage, characteristics
I0 representsin thethesimulation
leakage currentresults; at
when
the
the discharge process occurs, the resistance R g changes from
non-discharge state, and Vth represents the breakdown voltage level. Equation (1) gives a high resistance value to
a low resistance value, and the high-frequency resonance
that when Vg(t) is greater than Vth, the discharge current rises rapidly. of the LC circuit represents
the vibration of the electron collision in the discharge process. Because the frequency of
electron collisions is much higher than the drive frequency, the spiking phenomenon at
discharge can appear in the simulation waveform.
The third type of the equivalent model [9,10,12] is shown in Figure 2c. The equivalent
circuit of the air dielectric structure is represented by the capacitance Cg , resistance R, and
semiconductor components in parallel. Here the values of Cg and R vary with the gas
discharge. R represents the energy consumed during discharge, and Vth is the trigger
voltage of the component in the discharge state. Triggering of the discharge state can be
modeled by a transient surge suppressor (TVS) or power switch. This model assumes that
 Electronics 2021, 10, 2119 4 of 21

the plasma discharge current rises quickly as long as the applied voltage is greater than the
TVS voltage level. The TVS stays at the cut-off condition when the applied voltage is lower
Electronics 2020, 9, x FOR PEER REVIEW
than the TVS voltage level.

Figure 2. Equivalent model of a plasma jet: (a) dependent voltage source, (b) LC circuit and
Figure 2. Equivalent model of a plasma jet: (a) dependent voltage source, (b) LC circuit and
(c) TVS component.
component.
In this paper, we used the third type model to do the simulation-based design to
quickly determine the approximate working range of the system. Since the plasma jet
The parameter α adjusts the slope of the discharge current 𝐼 . This par
configuration does not use the same material along the entire length in this study, the value
depends onbethe
of Cg cannot plasmadirectly.
calculated load, whose
Instead,range
we usedis the
typically between
approximate method1 and 12. In addit
proposed
total
in [11]current ILoad(t)
to calculate theof the equivalent
capacitance model
values of can be obtained
this structure, by Kirchhoff’s
through assuming that the rule, a
given
surfacesbydefined by the specific radius have the same potentials (boundary conditions).
Capacitances of Cd and Cg in the non-discharged state can be obtained by
dVpower t dVd t
ILoad t =ICs +ICd =Cs · +Cd ·
2π ·ε 0 ·ε r_quartz ·l dt dt
Cd = (3)
ln bc
where Vpower(t) represents the input voltage and Vd(t) represents the voltage of Cd
such a model is accurate, the analysis of this model becomes more complicated.
The second type of model [11] consists of a capacitor Cg, an inductor Lg in p
and a series resistor Rg , as shown in Figure 2b. Here Rg represents the conductivit
current return paths. The model reflects the transient characteristics in the sim
 Electronics 2021, 10, 2119 5 of 21

2π ·ε 0 ·ε r_air ·l
Cg = (4)
ln ba
where ”0 is the dielectric constant of vacuum, ”r_quartz is the relative dielectric constant of
quartz, and ”r_air is the dielectric constant of air. The parameter Cs can be obtained from
the connector specifications or by measuring the connection line.

3. Power Supply System

Before designing the proposed circuit, a case study on a commercially available
product PVM500 [6] was conducted. PVM500 is a typical high voltage power supply. It
consists of an autotransformer and high-voltage inverter [10,12,13]; the output voltage is
adjusted by the autotransformer (AC/AC) on the input side and then converted to a DC
voltage via the rectifier. The symmetrical half-bridge is used for the inverter. The squared
voltage wave generated by this inverter is used as the input source of a high-voltage
transformer, enabling the resonant network to produce a high alternating voltage and
repeatedly exciting the plasma. In this case study, we found that the dimension of this
power supply was 10 × 17.5 × 25 cm3 . The volume of such a power supply has much
room for improvement. The autotransformer and the high voltage transformer occupy
the most space. If circuits or components with less volume can replace these parts, then
the power supply size may be significantly reduced. This paper proposes two points to
miniaturize the power supply.
• For the high-voltage transformer: The volume of the high-voltage transformer can
be reduced by redesigning the output characteristics of the inverter. By limiting
the frequency range and making the frequency range well below the maximum
resonance point, the inductance and winding current are reduced so that the size of
the transformer can be smaller.
• For the autotransformer: An adjustable AC/DC converter can replace the autotrans-
former, and the resulting volume can be significantly reduced. The design of PVM500
uses a bridge rectifier with filter capacitors to convert AC to DC; such a rectifier circuit
turns the input current into a pulse surge, and the peak value of the current is three to
five times larger than the ideal average current, as shown in Figure 3a. This current
distortion results in a lower power factor value and decreases the regional power net-
9, x FOR PEER REVIEW work efficiency and quality. If it can be changed to an active PFC converter to improve
6 of 21
the plasma device input current distortion, then the corrected current waveform is
illustrated in Figure 3b.

Figure 3. Schematic diagrams of input current distortion: (a) before improvement and (b) ideal improvement.
Figure 3. Schematic diagrams of input current distortion: (a) before improvement and (b) ideal
improvement. In this paper, the solutions mentioned above are adopted in the design of the power
supply. A schematic overview of the proposed power supply circuit is shown in Figure 4,
in which
In this paper, the adjustable
the solutions voltage and
mentioned frequency
above can be controlled
are adopted by resistances
in the design Rv and
of the power
Rf , respectively. In this design, the high-voltage secondary side only has the output
supply. A schematic overview of the proposed power supply circuit is shown in Figure 4,
voltage sensing, and there are no control and no other feedback circuits. The design of the
in which the adjustable
transformer voltage and frequency
of the high-voltage powercan be controlled
supply and the PFC by resistances
converter is givenRbelow.
v and Rf,

respectively. In this design, the high-voltage secondary side only has the output voltage
sensing, and there are no control and no other feedback circuits. The design of the
transformer of the high-voltage power supply and the PFC converter is given below.
 In this paper, the solutions mentioned above are adopted in the design of the power
supply. A schematic overview of the proposed power supply circuit is shown in Figure 4,
in which the adjustable voltage and frequency can be controlled by resistances Rv and Rf,
respectively. In this design, the high-voltage secondary side only has the output voltage
Electronics 2021, 10, 2119 sensing, and there are no control and no other feedback circuits. The design of 6 ofthe
21
transformer of the high-voltage power supply and the PFC converter is given below.

Figure 4. Circuit of the power supply with PFC controller.

Figure 4. Circuit of the power supply with PFC controller.

3.1. Transformer of High-Voltage Power Supply

3.1. Transformer of High-Voltage Power Supply
This circuit uses the full-bridge circuit topology to design the inverter because most
This circuit uses the full-bridge circuit topology to design the inverter because most
AC sinusoid power supplies have the transformer output directly connected to the plasma
AC sinusoid power supplies have the transformer output directly connected to the plasma
load. Such a circuit has no diodes or synchronous switches on the secondary side to cut
load. Such a circuit has no diodes or synchronous switches on the secondary side to cut
off the current loop, and the power stage circuit on the primary side withstands voltage
off the current loop, and the power stage circuit on the primary side withstands voltage
feedback from the secondary side voltage.
feedback from the secondary side voltage.
When the energy is transferred from the primary side to the secondary side, the
When
parasitic andtheloadenergy is transferred
capacitance from the side
on the secondary primary side the
can store to the secondary
energy. side,
Thus, not allthe
of
parasitic
the andenergy
electrical load capacitance on theinto
can be released secondary side can
the gas load. store the
Especially energy.
when Thus, not
the output all of
voltage
the
is electrical
lower than energy
the gascan be released
discharge into the
threshold, thegas load. cannot
energy Especially when the output
be effectively voltage
released. The
is lower than the gas discharge threshold, the energy cannot
energy is fed back to the primary side when the voltage changes polarity, and it canbe effectively released. The
energy is fed back to the primary side when the voltage changes
be stored in parasitic capacitance on the primary side or returned to the BUS capacitor polarity, and it can be
stored in parasitic capacitance on the primary side or returned
through the leakage inductance. In this way, different load capacitances can significantly to the BUS capacitor
through the
influence thisleakage
circuit,inductance.
and it always In this way,indifferent
results a matching loadproblem
capacitances can significantly
between the plasma
load and the AC high-voltage power supply. The equivalent capacitance the
influence this circuit, and it always results in a matching problem between plasma
values for
load and the AC high-voltage power supply. The equivalent
different plasma generators may vary significantly. For a transformer with a high turn capacitance values for
different plasma generators may vary significantly. For a transformer
ratio, the uncertain load capacitance on the secondary side can affect the operating with a high turn
ratio, the uncertain
characteristics of theload capacitance
primary-side on the
circuit, so wesecondary
initially side cana affect
choose simplethe operating
topology to
characteristics
avoid of the primary-side circuit, so we initially choose a simple topology to
circuit failure.
avoidThe circuit failure.high-voltage power supply consists of only a transformer and a
proposed
full-bridge inverter.high-voltage
The proposed Thus, the outputpower supply
voltage consists
gain of theof only asupply
power transformer
entirelyand a full-
depends
on the resonant characteristics of the transformer. The operating frequency range on
bridge inverter. Thus, the output voltage gain of the power supply entirely depends is
between 16 and 24 kHz in this paper, and we desire the transformer gain curve of the DC
voltage (Vdc_Bus ) to the AC output peak (Vo_peak ) to rise gently in the frequency range,
rather than operating near the rapidly varying resonant frequency point, as shown in
Figure 5.
This design can reduce the resonance current such that the transformer size can
be reduced. Assuming that the orange line at the bottom of Figure 5 is the gain curve
of the transformer, and the blue line is the DC voltage (Vdc_Bus ) controlled by the PFC
converter from the previous stage, the gain variation of the transformer is compensated
to achieve regulation of the output voltage amplitude (as illustrated by the green dashed
line). The design of the transformer with the desired resonance characteristic curve is the
primary concern here. Considering the transformer equivalent circuit in [15], the typical
equivalent model of a transformer is shown in Figure 6a. The model includes an ideal
transformer (with turns ratio N), primary side inductance LP , magnetizing inductance
Lm , leakage inductance Llea , secondary-side inductance LS , winding resistances (Rp and
Rs ), and parasitic capacitances on the primary side (C1 ), secondary side (C2 ), and both
sides (C1,2 ).
 the resonant characteristics of the transformer. The operating frequency range is between
16 and 24 kHz in this paper, and we desire the transformer gain curve of the DC voltage
(Vdc_Bus) to the AC output peak (Vo_peak) to rise gently in the frequency range, rather than
Electronics 2021, 10, 2119 operating near the rapidly varying resonant frequency point, as shown in Figure 7 of 215.

Electronics 2020, 9, x FOR PEER REVIEW

Figure
Figure 5. Outputvoltage
5. Output voltagegain
gain of
of the
theinverter.
inverter.

This design can reduce the resonance current such that the transformer size can be
reduced. Assuming that the orange line at the bottom of Figure 5 is the gain curve of the
transformer, and the blue line is the DC voltage (Vdc_Bus) controlled by the PFC converter
from the previous stage, the gain variation of the transformer is compensated to achieve
regulation of the output voltage amplitude (as illustrated by the green dashed line). The
design of the transformer with the desired resonance characteristic curve is the primary
concern here. Considering the transformer equivalent circuit in [15], the typical equivalent
model of a transformer is shown in Figure 6a. The model includes an ideal transformer
(with turns ratio N), primary side inductance LP, magnetizing inductance Lm, leakage
inductance Llea, secondary-side inductance LS, winding resistances (Rp and Rs), and
parasitic capacitances on the primary side (C1), secondary side (C2), and both sides (C1,2).
The simplified circuit [13] shown in Figure 6b is used for the transformer design.
Assuming ideal conditions (i.e., neglecting winding resistance RSC and conversion loss
resistance RC), representing by the Norton equivalent circuit shown in Figure 6c, the
resonant frequency in the circuit is determined by the equivalent inductance L1 and the
total stray capacitance Cstr.

Figure 6. Simplified analysis of a transformer with: (a) typical model, (b) transferring to the primary
Figure 6. Simplified
side circuit and (c) the analysis of a transformer
Norton equivalent circuit. with: (a) typical model, (b) transferring to the p
side circuit and (c) the Norton equivalent circuit.

Therefore, as long as the primary-side inductance LP and the natural res

frequency fr are determined, the simplified transformer model can be derived usi
following equations.
 Electronics 2021, 10, 2119 8 of 21

The simplified circuit [13] shown in Figure 6b is used for the transformer design.
Assuming ideal conditions (i.e., neglecting winding resistance RSC and conversion loss
resistance RC ), representing by the Norton equivalent circuit shown in Figure 6c, the
resonant frequency in the circuit is determined by the equivalent inductance L1 and the
total stray capacitance Cstr .
Therefore, as long as the primary-side inductance LP and the natural resonant fre-
quency fr are determined, the simplified transformer model can be derived using the
following equations.
L P = Llea + Lm (5)
Llea · Lm
L1 = (6)
Llea + Lm
1
fr = √ (7)
2π L1 ·Cstr
where the resonant parameters L1 and Cstr of the transformer are obtained from the sim-
ulation results. These two parameters can define the manufacturing specifications of the
transformer. In addition, the stray parameters of the transformer depend on the structure,
the manufacturing method, and the operating frequency. Especially, most magnetic compo-
nents still need manual production, and thus the manufacturing error must be considered.
Generally, the manufacturer only gives the specification of the parameter LP , the range of
the leakage inductance Llea and the turns ratio N.
For example, LP is approximately 5 mH, Llea is about 15% of LP , and N is 20. Here,
there is no limit to the stray capacity range, and this may have a significant impact on the
performance of the high voltage transformer. To ensure that the actual characteristics agree
with the simulated results, the resonant frequency and stray capacitance must be tested
after the transformer is manufactured.
Next, various resonant frequencies are calculated to obtain the corresponding stray
capacitance Cstr . Table 1 shows the stray parameters under various resonant frequencies.
Electronics 2020, 9, x FOR PEER REVIEW 9 of 21
In the simulation circuit, the effects of high-voltage probes and external capacitors are
considered. The simulation circuit model of the overall inverter is shown in Figure 7.
Table 1. Stray parameters with different resonant frequencies.
Table 1. StrayFrequency
Resonance parameters with different resonant frequencies.
Lm Llea L1 Cstr
(fr) Frequency
Resonance
Lm Llea L1 Cstr
30 kHz (fr ) 44.2 nF
35 kHz
30 kHz 32.5
44.2 nF nF
35 kHz
4.25 mH 750 μH 638 μH 32.5 nF
40 kHz 4.25 mH 750 µH 638 µH 24.9 nF
40 kHz 24.9 nF
45 kHz
45 kHz
19.6 nF
19.6 nF

Figure
Figure 7. 7. Simulationcircuits
Simulation circuits of
of the
the high-voltage
high-voltagepower
powersupply.
supply.

Figure 8 shows the simulation results of the gain curves with operating frequencies
of 16 to 24 kHz under various resonant frequencies (simulation results for 30, 35, 40, and
45 kHz are shown with solid lines and actual sample test results are shown with the red
dashed line). The simulation results imply that if a gentle output gain curve is desired for
the operating frequency range, the fabricated transformer must have a resonant frequency
 Figure 7. Simulation circuits of the high-voltage power supply.
Electronics 2021, 10, 2119 9 of 21

Figure 8 shows the simulation results of the gain curves with operating frequencie
of 16 to 24 kHz under various resonant frequencies (simulation results for 30, 35, 40, and
45 kHz Figure 8 showswith
are shown the simulation
solid linesresults of the gain
and actual curves
sample testwith operating
results frequencies
are shown with the red
dashed line). The simulation results imply that if a gentle output gain curve isand
of 16 to 24 kHz under various resonant frequencies (simulation results for 30, 35, 40, desired fo
45 kHz are shown with solid lines and actual sample test results are shown with the red
the operating frequency range, the fabricated transformer must have a resonant frequency
dashed line). The simulation results imply that if a gentle output gain curve is desired for
ofthe
40operating
to 45 kHz. This means that the stray capacitance Cstr should be controlled to be
frequency range, the fabricated transformer must have a resonant frequency
approximately
of 40 to 45 kHz. 19.6
Thisto means
24.9 nF. Thus,
that the manufacturing
the stray capacitance Cstrparameters of the transformer
should be controlled to be are
defined in Table 1. Finally, the actual parameters of the fabricated
approximately 19.6 to 24.9 nF. Thus, the manufacturing parameters of the transformer transformer are a
follows: the in
are defined resonant
Table 1. frequency
Finally, the =actual
40.3 parameters
kHz, Llea = 0.77
of themH, Lm = 4 transformer
fabricated mH, and Cstr are= as
24.2 nF.
follows: the resonant frequency = 40.3 kHz, Llea = 0.77 mH, Lm = 4 mH, and Cstr = 24.2 nF.

Figure Characteristic curves

Figure8.8.Characteristic curveswith
withdifferent resonant
different frequencies.
resonant frequencies.

In order to analyze the maximum load capacitance, we refer to the reference [23]. The
In order to analyze the maximum load capacitance, we refer to the reference [23]. The
conversion ratio of the capacitance value between the primary and secondary sides of an
conversion ratio of
ideal transformer the
is 1: N2capacitance value
(N is turn ratio). between
Affected theturns
by the primary and
ratio, it cansecondary
be seen thatsides
as of an
Electronics 2020, 9, x FOR PEER REVIEWideal transformer
output is 1: Nincreases,
load capacitance
2 (N is turn
the ratio). Affected
capacitance valueby the primary
of the turns ratio, 10
it can be seen tha
side conversion
asalso
output loadso
increases capacitance increases,
that the resonance the capacitance
frequency valueside
of the primary of the
willprimary
be lower.side conversion
We use
frequency,
also as shown
the increases
parameters thein
soofthat Figure
the
actual 9, andfrequency
resonance
transformerit to
can be seen
draw that
of the
the gain the lower
primary
curve of side the
willresonance
the lower be lower. frequen
resonance We use
the frequency,
thehigher as shown
the
parameters gain in Figure
value.
of the actual9,transformer
and it can be to
seen that the
draw thelower
gain the resonance
curve of the frequency,
lower resonance
the higher the gain value.

Figure
Figure 9. 9. Selecting the
Selecting the frequency
frequency curve of the
curve of maximum gain. gain.
the maximum

In order to avoid the large current of the high gain damaging the transformer, we
the actual transformer parameters in the simulation and change the output capacitanc
obtain the gain curves of different resonant frequencies. The frequency curve of
maximum gain is selected, then the maximum load capacitance value can be obtai
Electronics 2021, 10, 2119 10 of 21

In order to avoid the large current of the high gain damaging the transformer, we use
the actual transformer parameters in the simulation and change the output capacitance
to obtain the gain curves of different resonant frequencies. The frequency curve of the
maximum gain is selected, then the maximum load capacitance value can be obtained
through reverse calculation. The maximum gain is assumed not to exceed twice the original
gain. In Figure 9, the maximum gain is about 70 for 29.8 kHz, almost double the original
maximum gain for 40.3 kHz. Therefore, the frequency of 29.8 kHz is the lowest resonance
frequency allowed. Table 2 shows the corresponding calculation results. The maximum
capacitance of the secondary side is 110 pF, the no-load output capacitance is 60.2 pF, and
the high voltage probe and other calibration capacitance is 2 pF. Thus, it is shown that
the secondary side capacitance margin is 47.8 pF, and it is recommended to use a plasma
generator with a load capacitance less than this value.

Table 2. Corresponding calculation.

Primary Side Resonance Primary Side Resonant Capacitor Secondary Side Total
Frequency (Cstr ) Capacitance
29.8 kHz 44 nF 110 pF
40.3 kHz 24.1 nF 35 pF

In addition, one can compensate the resonant frequency through a passive filter to
solve the matching problem between the power supply and the plasma jet. Due to a high
number of turns in the output winding of the high voltage transformer, the inductance
value of the output side is considerable. If an inductance device is used in a passive filter
to compensate for the resonance frequency on the secondary side, its inductance value
must be immense, and the volume of the output stage hence increases. This problem can
be solved by increasing the inductance on the primary side, or a pF-scale high-voltage
capacitor can be used on the secondary side to do the compensation. This compensation
method can make the circuit volume relatively small.

3.2. PFC Converter

A high-power-factor power supply generally uses a boost topology to transform
different AC inputs into a fixed high-voltage DC source. However, this study uses a
flyback converter [18] that can perform output regulation and meets the universal AC
voltage range. The designed power is approximately 60 W in the continuous output state.
Therefore it is recommended that this power supply uses a plasma load of less than 50 W.
The circuit used the off-shelf ASICs L6562 and TSM101 to realize this PFC converter, and
the designed circuit is shown in Figure 10. The working principle of the circuit is based
on the chopper of the power electronics. Once an electrical power switch turns on and
off hundreds of times under a sinusoidal voltage with a low frequency of around 50 to
60 Hz, the primary-side current Ip and secondary-side current Is will become triangular
waveforms due to the inductance property of a transformer. The input current is controlled
by adjusting the duty ratio in each switching cycle.
If the duty ratio adjustment is based on the input sinusoidal voltage Vmult , the input
current will be transformed to have the same amplitude and waveform as those of the
voltage signal during the repeated power on/off switching process, as shown by the red
current waveform Ip in Figure 11. An electromagnetic interference (EMI) filter, which filters
high-frequency signals, is placed ahead of the PFC converter. The input current Iin is then
averaged to a sinusoidal-like wave. Ideally, the input current waveform is corrected to
approximate the input voltage waveform, as shown by the fine dotted line in Figure 11.
The AC main voltage input is passed through a bridge rectifier to obtain half-wave
voltage VB , and a voltage divider circuit is employed to detect the low-voltage half-wave
signal V mult . In addition, the signal Fb passes through an optocoupler circuit from the
secondary-side feedback to the primary side, and is then connected to the inverting port of
 The circuit used the off-shelf ASICs L6562 and TSM101 to realize this PFC converter, and
the designed circuit is shown in Figure 10. The working principle of the circuit is based
Electronics 2021, 10, 2119
on the chopper of the power electronics. Once an electrical power switch turns 11 onof and
21
off
Figurehundreds
10. The PFCof times
circuitunder
controlablock.
sinusoidal voltage with a low frequency of around 50 to 60 Hz,
the primary-side current Ip and secondary-side current Is will become triangular
waveforms due adjustment
If the duty ratio to the inductance
is based onproperty of sinusoidal
the input a transformer. The
voltage input
Vmult current is
, the input
the error amplifier. The control reference V c can be determined by multiplying the output
controlled
current will be by adjusting the
transformed duty the
to have ratiosame
in each switching
amplitude cycle.
and waveform as those of the
of the error amplifier by V mult .
voltage signal during the repeated power on/off switching process, as shown by the red
current waveform Ip in Figure 11. An electromagnetic interference (EMI) filter, which
filters high-frequency signals, is placed ahead of the PFC converter. The input current Iin
is then averaged to a sinusoidal-like wave. Ideally, the input current waveform is
corrected to approximate the input voltage waveform, as shown by the fine dotted line in
Figure 11.
The AC main voltage input is passed through a bridge rectifier to obtain half-wave
voltage VB, and a voltage divider circuit is employed to detect the low-voltage half-wave
signal Vmult. In addition, the signal Fb passes through an optocoupler circuit from the
secondary-side feedback to the primary side, and is then connected to the inverting port
of the error amplifier. The control reference Vc can be determined by multiplying the
output of the error amplifier by Vmult.

Figure 10. The PFC circuit control block.

Figure 10. The PFC circuit control block.

If the duty ratio adjustment is based on the input sinusoidal voltage Vmult, the input
current will be transformed to have the same amplitude and waveform as those of the
voltage signal during the repeated power on/off switching process, as shown by the red
current waveform Ip in Figure 11. An electromagnetic interference (EMI) filter, which
filters high-frequency signals, is placed ahead of the PFC converter. The input current Iin
is then averaged to a sinusoidal-like wave. Ideally, the input current waveform is
corrected to approximate the input voltage waveform, as shown by the fine dotted line in
Figure 11.
The AC main voltage input is passed through a bridge rectifier to obtain half-wave
voltage VB, and a voltage divider circuit is employed to detect the low-voltage half-wave
signal Vmult. In addition, the signal Fb passes through an optocoupler circuit from the
Figure Figure
11. 11. The
The PFC
secondary-side PFC
circuit circuit working
working
feedback waveform.side, and is then connected to the inverting port
to waveform.
the primary
of the error amplifier.
Therefore, when the Theinputcontrol
andreference Vc candiffer,
output voltages be determined
the voltage bylevelmultiplying
of V c will the
Therefore,
output
change.of thewhen
V c error
the input
amplifier
is compared with
and output
bythe
Vmult.
signal
voltages differ, the voltage level of Vc will
Vcs and then assigned to the input R of the RS
change. flip-flop,
Vc is compared
where Vwith the signal Vcs and then assigned to the input R of the RS flip-
cs is the obtained voltage signal by the resistor Rs , proportional to the
flop, where V
primary inductor currentvoltage
cs is the obtained signalatby
Ip . The signal thethe resistor
input Rs, proportional
S is defined to thedetection
as the zero current primary
(ZCD), and the output Q is the PWM signal of the control. In a switching cycle, the PFC
circuit working process is described as below.

3.2.1. Power Switch S1 : Turn On → Turn Off

When the power switch S1 is turned on, the transformer enters a magnetized state,
and thus the inductor current Ip rises linearly with proportionally increasing voltage Vcs ,
as shown from point a to point b on the Ip curve in Figure 11. This state remains until
the comparator’s positive input voltage Vcs is greater than the negative input voltage
Vc , and then the input R of the RS flip-flop changes to the high level, while both input
S and output Q of the RS flip-flop change to a low level. The signal Q is amplified to
turn off power switch S1 so that the transformer starts to release energy and charge the
output capacitor on the secondary side, as shown from point c to point d on the Ip curve in
Figure 11. Simultaneously, the transformer winding polarity changes so that the voltage of
ZCD changes from a low level to a high level, and the current Ip drops to zero and thus
Figure 11. The PFC circuit working waveform.
the input R of the RS flip-flop is restored to a low level. Therefore, both the input S and
the input R of the RS flip-flop are still at a low level, and S1 remains off until the current Is
Therefore,
decreases when the input and output voltages differ, the voltage level of Vc will
to zero.
change. Vc is compared with the signal Vcs and then assigned to the input R of the RS flip-
flop, where Vcs is the obtained voltage signal by the resistor Rs, proportional to the primary
Electronics 2021, 10, 2119 12 of 21

3.2.2. Power Switch S1 : Turn Off → Turn On

When the current Is reduces to zero, the transformer winding polarity is restored so
that the voltage of ZCD changes from a high level to a low level. The comparator’s negative
input ZCD is lower than the positive input voltage Vref , so the comparator’s output changes
to a high level and the input S of the RS flip-flop changes to a high level as well. The
input R of the RS flip-flop is still at a low level. Therefore, the output Q of the RS flip-flop
changes to a high level. Eventually, the signal Q is amplified again to turn on the power
switch S1 and the transformer begins to store energy while the current Ip rises linearly until
Vcs > V c again.
The power switching action has been defined for a switching cycle. The circuit system
is controlled by the input or output status. When the output voltage drops, the feedback
voltage signal Fb also decreases, and therefore the error signal increases, making the control
signal Vc larger. As a result, the peak current of the primary side becomes higher, indicating
an increase of the average input current, and hence provides more energy to regulate the
level of the output voltage. When the output voltage exceeds its operating level, the voltage
of the feedback signal Fb rises, so the reference signal Vc decreases. Therefore, it can be
ensured that this PFC flyback converter maintains a constant output voltage. Because this
PFC is a frequency-varying and duty-ratio-varying control device and the inductance value
determines the operating frequency of the PFC circuit [21], the inductance value Lp of the
primary side in the transformer dominates the design of the PFC circuit. The derivations of
the inductance value of the transformer and working frequency are given below. The input
voltage and current are defined as ideal sinusoidal waves as:

Vin (t) = V in_pk ·sin(2πft), I p (t) = I in_pk ·sin(2πft)

where Vin_pk and Iin_pk are the peak values of the input voltage and current, respectively.
The term f is the frequency of the input, which is either 50 or 60 Hz. Assuming that
the transformer of the PFC circuit is ideal, the current of the secondary side is defined
as follows:
Is (t) = n· I p (t) (n : primary-to- sec ondary turns ratio)
because this PFC converter operates in discontinuous current boundary mode [18], a single
switching period Tsw equals the sum of the turn-on time ∆ton and the turn off time ∆toff , is
shown by the current control condition in Figure 11.

1
TSW = ∆ton + ∆toff = (8)
f SW
∆IL
The voltage of the inductor is: VL = L ∆t on
. When the power switch is turned on, L
becomes Lp , the primary inductance of the transformer. The voltage VL of the primary-side
coil equals the input voltage Vin_pk . ∆IL is the current change from zero to Ip_pk , as shown
by the a-b segment in Figure 11. Then, ∆ton is given as:

L p · Ip_pk
∆ton = (9)
Vin_pk

∆IL
and when the power switch is turned off, VL = L ∆t . The voltage VL of the primary-side
off
coil equals the output voltage Vout plus the forward voltage Vout_diode of the output diode,
multiplied by the coil ratio n. Let ∆IL be the current change from zero to Ip_pk , as shown by
the c-d segment in Figure 11. Then, ∆toff is given as:

L p · Ip_pk
∆toff = (10)
n·(V out +V out_diode )
 Electronics 2021, 10, 2119 13 of 21

Combining Equations (9) and (10) yields:


L p · Ip_pk ·((V out +V out_diode ) + V in_pk
∆ton + ∆toff =
Vin_pk ·(n ·(V out +V out_diode ))

Let the primary-to-secondary reflected voltage VR equal n·(Vout + Vout_diode ) and

the switching frequency f sw equal ∆ton +1 ∆t , then, the inductance of the primary side is
off
given as:
Vin_pk ·VR
Lp =  (11)
f SW · Ip_pk ·(V R +V in_pk

where Vin_pk is the maximum voltage and Ip_pk is the current in a sinusoidal waveform.
Finally, the inductance value of PFC at the working frequency can be derived from
Equation (11).

4. Test Results
The internal configuration of the implemented high-voltage power supply of this
paper is shown in Figure 12. There are two independent power stages in the box. In the
first power stage, the DC bus voltage is roughly regulated in the range of 140 to 250 Vdc
from the main input voltage of 90 to 130 Vac by the PFC converter. In the second power
stage, the inverter is combined with a full-bridge circuit and a high-voltage transformer to
perform a boost function, resulting in the generation of a high-voltage sinusoidal wave.
The test results without load are shown in Figure 13. It shows that the peak voltage
value can reach 10 kVpeak at different frequencies. Moreover, the output voltage uses the
waveform controlled by the burst mode, as shown in Figure 14, and it can have 10~90%
Electronics 2020, 9, x FOR PEER REVIEW 14 of 21
control options.

Figure
Figure 12.12. Power
Power supply
supply photo
photo and
and schematic
schematic diagram.
diagram.

Figure 15 shows the working waveforms of the full-bridge circuit, and we measured
the drain to source voltages of low-side switches (S3_VDS , S4_VDS ), primary side current
(Ip_ inv ) and output voltage (Vo_peak ). It can be seen from the waveforms that the loop current
is not zero when the switches are switching, so this circuit has no soft-switching ability.
This working current is small, and the power consumption is also low despite switching
 Electronics 2021, 10, 2119 14 of 21

loss. 12.
Figure The primary
Power side
supply only
photo andneeds a 0.4diagram.
schematic A peak current for the output voltage on the
Figure 12. Power supply photo and schematic diagram.
secondary side to reach 4 KVpeak without load.

Figure
Figure13.
13.Output
Outputvoltages
voltagesat different
differentfrequencies:
frequencies:(a)
(a)16 kHz
kHz(b)
(b)20 kHz
kHzand
and(c)
(c)24 kHz.
Figure 13. Output voltages atatdifferent frequencies: (a) 1616kHz (b) 2020kHz and (c) 2424kHz.
kHz.

Electronics 2020, 9, x FOR PEER REVIEW 15 of 21

Figure14.
Figure Burstoutput
14.Burst outputmode:
mode:(a)
(a)10%
10%(b)
(b)50%
50%and
and(c)(c)90%.
90%.
Figure 14. Burst output mode: (a) 10% (b) 50% and (c) 90%.

Figure
Figure 15
15 shows
shows thethe working
working waveforms
waveforms of of the
the full-bridge
full-bridge circuit,
circuit, and
and we
we measured
measured
the drain to source voltages of low-side switches (S3_V DS, S4_VDS), primary side current
the drain to source voltages of low-side switches (S3_VDS, S4_VDS), primary side current
(I
(Ip_inv ) and output voltage (Vo_peak). It can be seen from the waveforms that the loop current
p_inv) and output voltage (Vo_peak). It can be seen from the waveforms that the loop current
is
is not zero
not zero when
when the
the switches
switches are
are switching,
switching, so
so this
this circuit
circuit has
has no
no soft-switching
soft-switching ability.
ability.
This
This working current is small, and the power consumption is also low despite
working current is small, and the power consumption is also low despite switching
switching
loss.
loss. TheThe primary
primary side
side only
only needs
needs aa 0.4
0.4 A
A peak
peak current
current for
for the
the output
output voltage
voltage on
on the
the
secondary side to reach 4 KV peak without load.
secondary side to reach 4 KVpeak without load.

Figure 15. Full-bridge circuit working waveform.

Figure 15. Full-bridge circuit working waveform.
We conducted an efficiency test with about 10 watts output to validate the efficiency
value
Weofconducted
each module aninefficiency
the overalltest
circuit.
withIn about
order to10
render
wattsthe test data
output to repeatable,
validate the in the
efficiency
experiment, a high-voltage resistance (10 kV 1 Mohm) was used as the test
value of each module in the overall circuit. In order to render the test data repeatable,load, and the in
test results are given in Table 3. A comparison of the characteristics of the proposed power
the experiment, a high-voltage resistance (10 kV 1 Mohm) was used as the test load, and
supply and the commercially available one in the case study is summarized in Table 4. It
theistest
shownresults areproposed
that the given in power
Table supply
3. A comparison of the
is both smaller andcharacteristics of the the
lighter, and optimizes proposed
power supply
electrical and the commercially
characteristics of the input end.available
Although one
thein the case
output study
voltage is proposed
of the summarized in
Table 4. It is shown that the proposed power supply is both smaller and lighter, and
optimizes the electrical characteristics of the input end. Although the output voltage of
the proposed design is smaller than that of PVM500, the proposed design outperforms
PVM500 in all other items. It demonstrates the practicality of the proposed design.
 Electronics 2021, 10, 2119 15 of 21

design is smaller than that of PVM500, the proposed design outperforms PVM500 in all
other items. It demonstrates the practicality of the proposed design.

Table 3. Circuit efficiency measurement.

Input Side Output Side

DC Bus (DC_avg)
(AC_rms) (AC_rms)
Voltage 110 V 164 V 3.08 kV
Current 0.16 A 93.4mA 4.02 mA
Watt 17.2 W 15.31 W 10.89 W
- PFC Converter High-Voltage Inverter
Efficiency 89% 71%

Table 4. Comparison of different HV power supplies.

Specification Item PVM500 Our Design

Input voltage (Vac ) 115 (only) 85~264
Output voltage ±15 kVpeak (Max) 0~±10 kVpeak
Output load capacitance <50 pf <40 pf
Output frequency (kHz) 20~100 16~24
Burst frequency (Hz) - 400
Burst ratio (%) 25~100 10~100
PFC Function NO YES (>0.95, 60 W)
Output voltage ripple (Vp-p ) - <50 (at 4 kVpeak )
Weight (kg) <2.2 <2
10 × 17.5 × 25 8 × 18 × 12
Dimensions (cm)
(4375 cm3 ) (1728 cm3 )
PVM500 Datasheet. Available online: https://www.amazing1.com/products/1-40kv-20-70khz-10-300w-adjustable-
power-supply-50pfd-loads.html (accessed on 4 August 2021).
Electronics 2020, 9, x FOR PEER REVIEW 16 of 21
To further assess the performance, we performed a load test of the power supply with
the APPL jet. Figure 16a shows the Helium APPJ and high-voltage Power Supply test
panel includes voltage and frequency control knobs, LED ON/OFF indicators, and a
setup before packaging. Figure 16b shows the packaged prototype. The power supply
power ON/OFF switch. The high-voltage wire and gas supply tube were inserted from
panel includes voltage and frequency control knobs, LED ON/OFF indicators, and a power
theON/OFF
top of the APPJ,
switch. Theand the quartz
high-voltage tube
wire and
and gaselectrodes
supply tubewere
weresealed
insertedusing
from insulator
the top glue
in of
a plastic shell.
the APPJ, and the quartz tube and electrodes were sealed using insulator glue in a
plastic shell.

Figure
Figure Testsetup
16.Test
16. setup photos:
photos:(a)
(a)setup
setupbefore packaging
before and and
packaging (b) packaged prototype.
(b) packaged prototype.
4.1. Measurement and Simulation Verification
4.1. Measurement andhelium
In the tests, the Simulation Verification
flow rate was 5 slm in the APPJ. The operating peak voltage of
theIn
power supplythe
the tests, washelium
in the range
flow of 4 towas
rate 6 kV5peak
slm , and the frequency
in the APPJ. The was about 20.9peak
operating kHz.voltage
of the power supply was in the range of 4 to 6 kVpeak, and the frequency was about 20.9
kHz. The output waveforms were measured using an oscilloscope (LeCroy WS44XS-A)
via a high-voltage probe (Tektronix P5100) and a current probe (Pearson 3972). Figure 17
 kHz. The output waveforms were measured using an oscilloscope (LeCroy WS44XS-A
via a high-voltage probe (Tektronix P5100) and a current probe (Pearson 3972). Figure
shows the measured voltage and current waveform. By observing the waveform, it is se
that the current phase of the APPJ is about 90° ahead of the voltage phase, when driv
Electronics 2021, 10, 2119 16 of 21
by a sinusoidal AC signal. Such a waveform is similar to the result given in [7], whi
means the APPJ is a capacitive load.
In addition, a high-frequency surge occurred in the current waveform. The cause
The output waveforms were measured using an oscilloscope (LeCroy WS44XS-A) via a
that the switching frequency is different from the natural frequency of the transforme
high-voltage probe (Tektronix P5100) and a current probe (Pearson 3972). Figure 17 shows
When the inverter
the measured voltageis and
switching, the output
current waveform. current istheforced
By observing to change
waveform, it is seendirection.
that T
parasitic inductor
the current and
phase of thecapacitor in the
APPJ is about 90 circuit
◦ loop
ahead of the produce the high-frequency
voltage phase, when driven by aresonan
in sinusoidal
the transient changes;
AC signal. thus,
Such there are
a waveform high surges
is similar in thegiven
to the result current.
in [7], which means
the APPJ is a capacitive load.

Figure 17. Actual measurement results.

Figure 17. Actual measurement results.
In addition, a high-frequency surge occurred in the current waveform. The cause is
thatFor
theverification, the simulation
switching frequency is differentwasfromconducted with the of
the natural frequency operating conditions th
the transformer.
When the inverter is switching, the output current is forced
same as the experiment (output frequency 20.9 kHz, input voltage of inverter to change direction. The 180 Vd
parasitic
The modelinductor
for the andsimulation
capacitor in circuit
the circuit
is loop
shown produce the high-frequency
in Figure resonance inverte
18; the full-bridge
in the transient changes; thus, there are high surges in the current.
Electronics 2020, 9, x FOR PEER REVIEW For verification, the simulation was conducted with the operating conditions the same 17 of 21
as the experiment (output frequency 20.9 kHz, input voltage of inverter 180 Vdc). The
model for the model,
transformer simulation circuit is shown
high-voltage probe in Figure 18; and
impedance the full-bridge
plasma jetinverter,
model are transformer
included.
model,
First, tohigh-voltage probe impedance
obtain the parameters and plasma
of the plasma jet model
model, are included.
we measured First, to obtain
the dimensions of the
the parameters of the plasma model, we measured the dimensions of the
actual plasma jet. We obtained a = 1.5 mm, b = 2 mm, c = 4 mm, and l = 20 mm, as shown actual plasma jet.
We obtained a = 1.5 mm, b = 2 mm, c = 4 mm, and l = 20 mm, as shown in
in Figure 1. The relative dielectric constants of quartz and air are εr_quartz = 3.8 and εr_air Figure 1. The
relative dielectric constants
= 1, respectively. Substitutingof quartz and air are
these constants ε r_quartz
into = 3.8 and
Equations ε r_air(4)= yields
(3) and 1, respectively.
Cd = 6 pF
Substituting these constants into Equations (3) and (4) yields C = 6 pF and
and Cg = 3.8 pF, and the power consumption resistor R is set to around 10 kΩ. In addition,
d C g = 3.8 pF, and
the power consumption resistor R is set to around 10 kΩ. In addition,
the stray capacitor Cs is about 10 pF, obtained by measuring the output connection wire.the stray capacitor
Cs is about 10 pF, obtained by measuring the output connection wire.

Figure18.
Figure 18.Simulation
Simulationcircuits
circuitsofofpower
powersupply,
supply,transform
transformmodel,
model,and
andplasma
plasmamodel.
model.

The
Thehelium
heliumAPPJ
APPJused
usedin
in this
this work
work has
has a breakdown voltage of about
about 44 to
to 55 kV
kVpeak
peakat
atthe
thenormal
normal pressure,
pressure, according
according toto previous
previous experimental
experimental results
results [3].[3]. Therefore,
Therefore, wewesetset
the
breakdown voltage to 4.5 kVpeak. Second, the manufacturer’s transformer parameters are
as follows: (1) the transformer turns ratio is 1:20; (2) the equivalent parameters of the
transformer are a magnetizing inductance of LP = 4.77 mH and leakage inductance of Lr =
770 μH; and (3) the resonant frequency is about 40.3 kHz.
 The helium APPJ used in this work has a breakdown voltage of about 4 to 5 kV
the normal pressure, according to previous experimental results [3]. Therefore, we s
breakdown voltage to 4.5 kVpeak. Second, the manufacturer’s transformer paramete
Electronics 2021, 10, 2119 17 of 21
as follows: (1) the transformer turns ratio is 1:20; (2) the equivalent parameters o
transformer are a magnetizing inductance of LP = 4.77 mH and leakage inductance o
770 μH; and (3) the resonant frequency is about 40.3 kHz.
the breakdown voltage to 4.5 kVpeak . Second, the manufacturer’s transformer parameters
Figure 19 shows the results of the experiment and simulation. The solid lines a
are as follows: (1) the transformer turns ratio is 1:20; (2) the equivalent parameters of the
measured
transformervoltage and current
are a magnetizing (Vout_meaof
inductance , ILout_mea), and the dashed lines are the simu
P = 4.77 mH and leakage inductance of
voltage
Lr = 770and
µH;current (Vresonant
and (3) the out_sim, Iout_sim ). It can
frequency be 40.3
is about seenkHz.that the voltage in the simulatio
Figure 19 shows the results of the experiment
good agreement with the experimental measurement, and and simulation. Thethere
solid lines
is aare the
difference i
measured voltage and current (Vout_mea , Iout_mea ), and the dashed lines are the simulated
amplitude of output current between the simulation and experimental result. We
voltage and current (Vout_sim , Iout_sim ). It can be seen that the voltage in the simulation
this
hasdeviation may with
good agreement be because the discharge
the experimental consumption
measurement, and there isisa not defined
difference in the pl
in the
model, andofthe
amplitude actual
output impedance
current between the ofsimulation
the gas inand the dischargeresult.
experimental stateWe is unknown.
think this Alth
deviation may be because the discharge consumption is not defined
this paper uses a general and less precise plasma model in the simulation-based desin the plasma model,
canandallow
the actual impedance of the gas in the discharge state is unknown. Although this paper
the designer to quickly determine the gas discharge load’s approx
uses a general and less precise plasma model in the simulation-based design, it can allow
working range and waveform.
the designer to quickly determine the In gas
further analysis,
discharge we suggestworking
load’s approximate addingrangethe load
and imped
and adjusting
waveform. the connecting
In further analysis, we wire’s
suggeststray
addingcapacitance Cs to correct
the load impedance the simulation
and adjusting the re
connecting wire’s stray capacitance Cs to correct the simulation results.

Figure
Figure Actual measurement
19.Actual
19. measurement andand
simulation.
simulation.
4.2. PFC and Output Ripple
Following the PFC circuit design given in Section III, the specifications of the PFC
converter are: (1) an input voltage of 90 to 264 Vac and an output voltage of 140 to 250 Vdc;
(2) a maximum power of 60 W; (3) a minimum operating frequency of the PFC circuit of
25 kHz; and (4) a transformer core type of PQ3230 with the specifications of le = 67.8 mm,
Ae = 153.8 mm2 , Ve = 10,440 mm3 , core material: SAMWHA PL-9, maximum magnetic
flux setting: 2900 G, leakage inductance: about 80 µH, a primary turns to the secondary
turns ratio of 66:60 with an inductance value of 730 µH, and air gap = unclear. We tested
the input-end performance of the designed plasma power supply under a 110 Vac input
voltage. Figure 20a shows that the input current waveform deforms dramatically without
PFC, resulting in a power factor of just 0.41. We then replaced the autotransformer with the
PFC converter. Figure 20b shows that the input current becomes a nearly sinusoidal wave
that is in phase with the input voltage and the resulting power factor is 0.95. Figure 21
also shows that the difference in the harmonic distortion of the current before and after
improvement. With PFC, the 1st harmonic component is significantly increased, and the
others are reduced. These results verify that satisfactory power quality can be achieved
using the proposed plasma power supply.
 voltage.
the Figure 20a shows
PFC converter. Figurethat
20bthe input that
shows current
thewaveform deforms
input current dramatically
becomes without
a nearly sinusoidal
PFC, resulting in a power factor of just 0.41. We then replaced the autotransformer
wave that is in phase with the input voltage and the resulting power factor is 0.95. with Figure
21the PFC
also converter.
shows Figure
that the 20b shows
difference thatharmonic
in the the input distortion
current becomes
of the acurrent
nearly sinusoidal
before and after
wave that is in phase with the input voltage and the resulting power factor is 0.95. Figure
improvement. With PFC, the 1st harmonic component is significantly increased, and the
21 also shows that the difference in the harmonic distortion of the current before and after
Electronics 2021, 10, 2119 others are reduced. These results verify that satisfactory power quality can be 18 ofachieved
21
improvement. With PFC, the 1st harmonic component is significantly increased, and the
using the proposed plasma power supply.
others are reduced. These results verify that satisfactory power quality can be achieved
using the proposed plasma power supply.

Figure 20. AC input waveforms obtained: (a) without PFC and (b) with PFC.
Figure
Figure20.
20.AC
ACinput
input waveforms obtained:(a)(a)
waveforms obtained: without
without PFC
PFC andand (b) with
(b) with PFC.PFC.

Figure21.
Figure Total harmonic
21.Total harmonic distortion
distortion in
in the
the AC
AC input
input current.
current.

Furthermore, the advantage of using a PFC converter is that it further reduces the
Figure 21.voltage
output Total harmonic distortion
ripple. The rangeinofthe AC input
voltage current.
ripple is reduced from 750 Vp-p to below
50 Vp-p , as shown in Figure 22a,b. Figure 22a shows that the high-voltage power supply
uses a rectifier. The output voltage ripple constantly fluctuates with the AC frequency
(50~60 Hz). When the output power increases or the internal capacitors age, the issue of
the output ripple becomes more serious. However, Figure 22b shows that the high-voltage
power supply uses an active PFC converter. Since the converter can generate a smooth DC
voltage on the input of the inverter, it thus significantly reduces the voltage variations on
the output ripple.

4.3. OES Test

Plasma jet emission was analyzed using OES. The plastic shell, which contains the
APPJ device, was fixed by an insulating holder for further measurement. We set the optical
lens to be 15 mm away from the front of the APPJ and analyzed the APPJ emission by
OES. The OES system was assembled by a monochromator (Princeton Instruments Acton
sp2500) with a photomultiplier tube (Hamamatsu R928).
 Electronics 2020, 9, x FOR PEER REVIEW 19 of 21
Electronics 2021, 10, 2119 19 of 21
Furthermore, the advantage of using a PFC converter is that it further reduces the
output voltage ripple. The range of voltage ripple is reduced from 750 Vp–p to below 50
Vp–p, Figure
as shown in Figure 22a,b. Figure 22a shows that the high-voltage power supply uses
23 shows the OES results in the discharge region.The results are a typical
a spectrum
rectifier. of
The output
a helium APPJ,voltage ripple
in which constantly
hydroxyl fluctuates
radical (309 nm),with
atomictheoxygen
AC frequency
(777 nm), (50~60
Hz). When
helium (706the
nm),output
nitrogen power
secondincreases or the and
positive system, internal capacitors
nitrogen age, system
first negative the issue
are of the
output
found inripple becomes
the plasma more
jet. The serious.
working gasHowever, Figure
was high-purity 22b shows
helium thatand
(99.995%), thethus
high-voltage
the
oxygensupply
power and nitrogen
uses an species
activemay
PFChave come from
converter. small
Since theimpurities
converterincan the generate
gas cylindera smooth
DCor voltage
ambient on air.the
These
input reactive oxygen/nitrogen
of the inverter, species (RONS)
it thus significantly play athe
reduces crucial rolevariations
voltage in
many applications.
on the output ripple. For example, oxygen species are essential for surface modification and
sterilization [20,21], and nitrogen species are essential for wound healing [22].

Electronics 2020, 9, x FOR PEER REVIEW 20 of 21

Figure22.
Figure Improved ripple
22.Improved rippleofofthe
theoutput
outputvoltage: (a) without
voltage: PFC PFC
(a) without and (b)
andwith
(b)PFC.
with PFC.

4.3. OES Test

Plasma jet emission was analyzed using OES. The plastic shell, which contains the
APPJ device, was fixed by an insulating holder for further measurement. We set the
optical lens to be 15 mm away from the front of the APPJ and analyzed the APPJ emission
by OES. The OES system was assembled by a monochromator (Princeton Instruments
Acton sp2500) with a photomultiplier tube (Hamamatsu R928).
Figure 23 shows the OES results in the discharge region.The results are a typical
spectrum of a helium APPJ, in which hydroxyl radical (309 nm), atomic oxygen (777 nm),
helium (706 nm), nitrogen second positive system, and nitrogen first negative system are
found in the plasma jet. The working gas was high-purity helium (99.995%), and thus the
oxygen and nitrogen species may have come from small impurities in the gas cylinder or
ambient air. These reactive oxygen/nitrogen species (RONS) play a crucial role in many
applications. For example, oxygen species are essential for surface modification and
sterilization
Figure
Figure OES
23.23.OES [20,21],
analysisand
analysis in nitrogen
in the
the discharge
dischargespecies
region.are essential for wound healing [22].
region.
The results demonstrate that the developed plasma power supply can sustain the
helium The results
APPJ demonstrate
with a high power that the developed
factor plasma
and high power
RONS supply can
intensity, sustain
which arethe
essential
5. Conclusions
helium APPJ with a high power factor
factors for commercializing an APPJ system. and high RONS intensity, which are essential factors
forThis study successfully
commercializing miniaturized the plasma power supply by the proposed
an APPJ system.
redesigned high-voltage transformer and combination of a PFC converter and an inverter.
The designed power supply is smaller than the conventional design, improves the input
power factor, and reduces the output voltage ripples. In the experiments, they have been
verified and quantitatively compared. Such features of the proposed design bring
advantages to the high-voltage power drivers but can also facilitate the commercial
Electronics 2021, 10, 2119 20 of 21

5. Conclusions
This study successfully miniaturized the plasma power supply by the proposed re-
designed high-voltage transformer and combination of a PFC converter and an inverter.
The designed power supply is smaller than the conventional design, improves the input
power factor, and reduces the output voltage ripples. In the experiments, they have been
verified and quantitatively compared. Such features of the proposed design bring advan-
tages to the high-voltage power drivers but can also facilitate the commercial development
of the applications of plasma systems. Future design of this power supply, may consider
using the soft-switching technique in the inverter. The LLC resonant circuit design concept
can be used to improve switching loss on power switches in the inverter, and unlike the
DC/DC LLC resonant circuit, the DC/AC high voltage resonant power supply must pay
special attention to the load capacitance on the secondary side. It may be necessary to limit
the range of load conditions (load and capacitance value) to maintain the advantage of soft
switching on the primary side.

Author Contributions: Conceptualization, J.-S.W. and M.-T.H.; Methodology, C.-F.S. and M.-T.H.;
Validation, C.-F.S. and C.-T.L.; Formal analysis, C.-F.S. and C.-T.L.; Data curation, C.-F.S.; Writing—
original draft, C.-F.S.; Writing—review & editing, J.-S.W. and M.-T.H.; Supervision, J.-S.W. and M.-T.H.
All authors have read and agreed to the published version of the manuscript.
Funding: This research received no external funding.
Data Availability Statement: Data collected through research presented in the paper are available
on request from the corresponding author.
Conflicts of Interest: The authors declare no conflict of interest.

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