Operating Manual

16 Series
Mass and Volumetric
Precision Gas Flow Controller

Innovative Flow and Pressure Solutions

 Notice: Alicat Scientific, Inc. reserves the right to make any changes and improvements to the products described in this
manual at any time and without notice. This manual is copyrighted. This document may not, in whole or in part, be copied,
reproduced, translated, or converted to any electronic medium or machine readable form, for commercial purposes,
without prior written consent from the copyright holder.
Note: Although we provide assistance on Alicat Scientific products both personally and through our literature, it is the
complete responsibility of the user to determine the suitability of any product to their application.
Alicat Scientific, Inc.’s Wide-Range Laminar Flow Element Patent: The wide-range laminar flow element and products
using the wide-range laminar flow element are covered by U.S. Patent Number: 5,511,416. Manufacture or use of the
wide-range laminar flow element in products other than Alicat

Limited Lifetime Warranty

Alicat Scientific, Inc. warrants to the original purchaser (hereinafter referred to as “Buyer”) that instruments manufactured
by Alicat Scientific (hereinafter referred to as “Product”) shall be free from defects in materials and workmanship for the life
of the Products.
Under this warranty, the Product will be repaired or replaced at manufacturer’s option, without charge for parts or labor when
the Product is carried or shipped prepaid to the factory together with proof of purchase.
The foregoing shall constitute the exclusive and sole remedy in lieu of other remedies of the Buyer for any breach by Alicat
Scientific of this warranty to the maximum extent permitted by law.
This warranty does not apply to any Product which has not been installed or used in accordance with the Product operation
and installation specifications provided to Buyer verbally or in writing by Alicat Scientific for the proper and normal use of
the Product.
Buyer agrees hereunder that Alicat reserves the right to void any warranty, written or implied, if upon Alicat’s examination of
Product shall disclose to Alicat’s satisfaction that the Product failure was due solely, or in part, to accident, misuse, neglect,
abuse, alteration, improper installation, unauthorized repair or improper testing by Buyer or agent of Buyer.
Alicat Scientific shall not be liable under any circumstances for indirect, special, consequential, or incidental damages in
connection with, or arising out of, the sale, performance, or use of the Products covered by this warranty.
Alicat Scientific does not recommend, warrant or assume responsibility for the use of the Products in life support applications
or systems.
Alicat’s warranties as herein above set forth shall not be enlarged, diminished or affected by, and no obligation or liability
shall arise or grow out of Alicat’s rendering of technical advice in connection with Buyer’s order of the Products furnished
hereunder.
If Product becomes obsolete, Alicat Scientific, at its own discretion, reserves the right to repair the Product with available
replacement parts or upgrade the Product to a current , commercially available version of the original Product. Should
upgrading the Product be deemed necessary by Alicat, Buyer hereby agrees to pay an upgrade fee equal to seventy percent
of the retail value of the replacement Product. Alicat Scientific hereunder makes no claim that replacement Products will
look, function or operate in the same or similar manner as the original product.
When a Product is returned to Alicat Scientific for recalibration this service is considered normal preventative maintenance.
Recalibration of Product shall not be treated as a warranty service unless recalibration of Product is required as the result
of repairs to Product pursuant to this Warranty. Failure to recalibrate Product on a yearly basis will remove any and
all obligations regarding repair or replacement of Product as outlined by this Warranty to Buyer from Alicat
Scientific.
This Warranty is in lieu of all other relevant warranties, expressed or implied, including the implied warranty of merchantability
and the implied warranty of fitness for a particular purpose, and any warranty against infringement of any patent.
Continued use or possession of Products after expiration of the applicable warranty period stated above shall be conclusive
evidence that the warranty is fulfilled to the full satisfaction of Buyer.
Alicat makes no warranty as to experimental, non-standard or developmental Products.
Accessories purchased from Alicat are not covered by this warranty.

Conformity / Supplemental Information:

The product complies with the requirements of the Low Voltage Directive 73/23/EEC and the EMC Directive 89/336/EEC
(including 93/68/EEC) and carries the CE Marking accordingly. Contact the manufacturer for more information.

03/15/2007 Rev.7 DOC-ALIMAN16C

Table of Contents Page
Installation 5
Plumbing 5
Mounting 5
Application 5
Power and Signal Connections 6
Input Signals 7
Analog Input Signal 7
RS-232 Input Signal 7
Output Signals 7
RS-232 Digital Output Signal 8
Standard Voltage (0-5 Vdc) Output Signal 8
Optional 0-10 Vdc Output Signal 8
Optional Current (4-20 mA) Output Signal 8
Optional 2nd Analog Output Signal 8
MC Series Mass Flow Controller Operation 10
Main Mode 10
Set-Pt. 10
Gas Absolute Pressure 10
Gas Temperature 11
Volumetric Flow Rate 11
Mass Flow Rate 11
Flashing Error Message 11
Select Menu Mode 11
Control Setup Mode 12
Input 12
Loop 13
Select 13
Gas Select Mode 14
Communication Select Mode 15
Unit ID 15
Baud 15
Data Rate 15
Manufacturer Data Mode 16
VC Series Volumetric Flow Controller Operation 17
Main Mode 17
Volume 17
Set Pt. 17
Flashing Error Message 17
Select Menu Mode 18
Control Setup Mode 18
Input 18
Select 18
Gas Select Mode 20
Communication Select Mode 20
Manufacturer Data Mode 20
RS-232 Output and Input 20
Configuring HyperTerminal® 20
Changing from Streaming to Polling Mode 20
Sending a Set-Point via RS-232 21
To adjust the P & D terms via RS-232 21
Gas Select 23
Table of Contents Page
Collecting Data 24
Data Format 24
Sending a Simple Script File to HyperTerminal® 25
Operating Principle 26
Gas Viscosity 26
Other Gases 27
Volume Flow vs. Mass Flow 27
Volumetric Flow and Mass Flow Conversion 28
Compressibility 28
Standard Gas Data Tables 29
Gas Viscosities, Densities and Compressibilities at 25o C 30
Gas Viscosities, Densities and Compressibilities at 0o C 31
Volumetric Flow Meters and Controllers Under Pressure 32
Troubleshooting 33
Maintenance and Recalibration 34
Technical Specifications 35
Dimensional Drawings 39
Additional Information
Option: Totalizing Mode 42
Option: Battery Pack 43
Option: Local SetPoint Module 45
Option: Remote Electronics 46
Accessory: BB-9 Multi-Drop Box 46
Accessory: RS-232 to RS-485 Converter 46
Accessory: Flow Vision 47
Accessories 48

Figure 1. 8 Pin Mini-DIN Connector 6

Figure 2. Simple method for providing set-point to controllers 7
Figure 3. Mini-DIN to DB-9 Connection for RS-232 Signals 8
Figure 4. Typical Multiple Device (Addressable) Wiring Configuration 9
Figure 5. Optional Industrial Connector 9
Figure 6. Main Mode Display, MC Series Flow Controller 10
Figure 7. Select Menu Display 11
Figure 8. MC Series Control Setup Display 12
Figure 9. Gas Select Display 14
Figure 10. Communication Select Display 15
Figure 11. Manufacturer Data Displays 16
Figure 12. Main Mode Display, V Series Flow Controller 17
Figure 13. VC Series Control Setup Display 18
Thank you for purchasing an MC or VC Series Gas Flow Controller. Please take the time to find and
read the information contained in this manual. This will help to ensure that you get the best possible
service from your instrument. This manual covers the following Alicat Scientific instruments:
MC Series 16 Bit Mass Gas Flow Controllers MC-XXSCCM-D
MC-XXSLPM-D
MCR-XXXSLPM
VC Series 16 Bit Volumetric Gas Flow Controllers VC-XXCCM-D
VC-XXLPM-D
VCR-XXXLPM

Installation
Plumbing
All MC and VC Series Gas Flow Controllers are equipped with female inlet and outlet port connections.
Because the flow controllers set up a laminar flow condition within the flow body, no straight runs of pipe
are required upstream or downstream of the controller. The inlet and outlet ports are equal in size and
symmetric (in-line). The port sizes (process connections) and mechanical dimensions for different flow
ranges are shown on pages 35-38.
Controllers with M-5 (10-32) ports have o-ring face seals and require no further sealant or tape. On
other controllers, avoid the use of pipe dopes or sealants on the ports as these compounds can cause
permanent damage to the controller should they get into the flow stream. Use of thread sealing Teflon
tape is recommended to prevent leakage around the threads. When applying the tape, avoid wrapping
the first thread or two to minimize the possibility of getting a piece of shredded tape into the flow stream.
When changing fittings, always clean any tape or debris from the port threads.
It is also recommended that a 20 micron filter be installed upstream of controllers with full scale ranges
of 1(S)LPM or less and a 50 micron filter be installed upstream of controllers with full scale ranges
above 1(S)LPM.
Mounting
All MC and VC Series Gas Flow Controllers have mounting holes for convenient mounting to flat panels.
The sizes and dimensions for the mounting holes are shown on pages 39-41. Position sensitivity is not
generally an issue with small valve controllers. Large valve controllers are somewhat position sensitive
because of the fairly massive stem assembly. It is generally recommended that they be mounted so
that the valve cylinder is vertical and upright. The primary concern in mounting a large valve controller
in a position other than the recommended position is the increased risk of leakage when the controller
is given a zero set-point and is being held closed by the spring force.
Application
Maximum operating line pressure is 145 PSIG (1 MPa).
Caution: Exceeding the maximum specified line pressure may cause permanent damage to the
solid-state differential pressure transducer.
If the line pressure is higher than 145 PSIG (1 MPa), a pressure regulator should be used upstream
from the flow controller to reduce the pressure to 145 PSIG (1 MPa) or less if possible. Many of our
controllers are built after extensive consultations with the customer regarding the specific application.
The result is that two controllers with the same flow range and part number may look and act quite
differently depending upon the application the controller was built for. Care should be taken in moving a
controller from one application to another to test for suitability in the new application. Note that volumetric
meters and controllers are not recommended for high pressure or high backpressure applications (see
page 32).


Power and Signal Connections
Power can be supplied to your MC or VC Series controller through either the power jack or the 8 pin
Mini-DIN connector as shown in Figure 1. Power may also be supplied through an AC to DC adapter
which converts line AC power to DC voltage and current as specified below. The power jack accepts 2.1
mm female power plugs with positive centers. Cables and AC/DC adaptors may be purchased from the
manufacturer (see Accessories page 48) and are commonly available at local electronics suppliers.
Small Valve: If your controller utilizes a small valve (about the size of your thumb), a 12-30Vdc
power supply with a 2.1 mm female positive center plug capable of supplying 250 mA is recommended.
Note: 4-20mA output requires at least 15 Vdc.
Large Valve: If your controller utilizes a large valve (about the size of your fist), a 24-30 Vdc power
supply with a 2.1 mm female positive center plug capable of supplying at least 750mA is required.
Alternatively, power can be supplied through the Mini-DIN connector as shown below:

AC/DCAdapter
AC/DC AdapterJack
Jack

11 2
2

3
3 44 5
5
6
6 77 8
8

Mini-DIN
Pin Function
cable color
1 Inactive or 4-20mA Primary Output Signal Black
Static 5.12 Vdc or Secondary Analog Output (4-20mA, 5Vdc, 10Vdc)
2 Brown
or Basic Alarm
3 RS-232 Input Signal Red
4 Analog Input Signal Orange
5 RS-232 Output Signal Yellow
6 0-5 Vdc (or 0-10 Vdc) Output Signal Green
7 Power In (as described above) Blue
8 Ground (common for power, communications and signals) Purple
Note: The above pin-out is applicable to all the flow meters and controllers available with the Mini‑DIN
connector. The availability of different output signals depends on the options ordered.
Underlined Items in the above table are optional configurations that are noted on the unit’s calibration
sheet.

Figure 1. 8 Pin Mini-DIN Connector

CAUTION: Do not connect power to pins 1 through 6 as permanent damage can occur!
Note: Upon initial review of the pin out diagram in Figure 1, it is common to mistake Pin 2 (labeled
5.12 Vdc Output) as the standard 0-5 Vdc analog output signal! In fact Pin 2 is normally a constant
5.12 Vdc that reflects the system bus voltage and can be used as a source for the set-point signal.


Input Signals
Analog Input Signal
Apply analog input to Pin 4 as shown in Figure 1.
Standard 0-5 Vdc: Unless ordered otherwise, 0-5 Vdc is the standard analog input signal. Apply the
0-5 Vdc input signal to pin 4, with common ground on pin 8. The 5.12 Vdc output on pin 2 can be wired
through a 50K ohm potentiometer and back to the analog input on pin 4 to create an adjustable 0-5 Vdc
input signal source as shown below.

8 7 6
0-5 Vdc
5 4 3

2 1

5.12 Vdc

50 KOhm
Potentiometer
Figure 2. Simple method for providing set-point to controllers
Optional 0-10 Vdc: If specified at time of order, a 0-10 Vdc input signal can be applied to pin 4, with
common ground on pin 8.
Optional 4-20 mA: If specified at time of order, a 4-20 mA input signal can be applied to pin 4, with
common ground on pin 8. Note: 4-20mA output requires at least 15 Vdc power input.
RS-232 Digital Input Signal
If you will be using the RS-232 input signal, it is necessary to connect the RS-232 Output Signal (Pin
5), the RS-232 Input Signal (Pin 3), and Ground (Pin 8) to your computer serial port as shown in Figure
3. Adapter cables are available from the manufacturer or they can be constructed in the field with parts
from an electronics supply house. In Figure 3, note that the diagrams represent the “port” side of the
connections, i.e. the connector on top of the meter and the physical DB-9 serial port on the back of the
computer. The cable ends will be mirror images of the diagram shown in Figure 3. (See page 20 for
details on accessing RS-232 input.)
Output Signals
Note: Upon initial review of the pin out diagram in Figure 1 (page 6), it is common to mistake Pin 2
(labeled 5.12 Vdc Output) as the standard 0-5 Vdc analog output signal! In fact Pin 2 is normally a
constant 5.12 Vdc that reflects the system bus voltage and can be used as a source for the input signal.
This allows the user in the field to run this output through a 50K ohm potentiometer and back into the
analog set-point pin to create a 0-5 Vdc set-point source.
RS-232 Digital Output Signal
If you will be using the RS-232 output signal, it is necessary to connect the RS-232 Output Signal (Pin
5), the RS-232 Input Signal (Pin 3), and Ground (Pin 8) to your computer serial port as shown in Figure
3. Adapter cables are available from the manufacturer or they can be constructed in the field with parts
from an electronics supply house. In Figure 3, note that the diagrams represent the “port” side of the


connections, i.e. the connector on top of the meter and the physical DB-9 serial port on the back of the
computer. The cable ends will be mirror images of the diagram shown in Figure 3. (See page 20 for
details on accessing RS-232 output.)
Standard Voltage (0-5 Vdc) Output Signal
All MC and VC series flow controllers have a 0-5 Vdc (optional 0-10 Vdc) output signal available on Pin
6. This is generally available in addition to other optionally ordered outputs. This voltage is usually in
the range of 0.010 Vdc for zero flow and 5.0 Vdc for full-scale flow. The output voltage is linear over the
entire range. Ground for this signal is common on Pin 8.
Optional 0-10 Vdc Output Signal
If your controller was ordered with a 0-10 Vdc output signal, it will be available on Pin 6. (See the
Calibration Data Sheet that shipped with your controller to determine which output signals were
ordered.) This voltage is usually in the range of 0.010 Vdc for zero flow and 10.0 Vdc for full-scale flow.
The output voltage is linear over the entire range. Ground for this signal is common on Pin 8.
Optional Current (4-20 mA) Output Signal
If your controller was ordered with a 4-20 mA current output signal, it will be available on Pin 1. (See
the Calibration Data Sheet that shipped with your controller to determine which output signals were
ordered.) The current signal is 4 mA at 0 flow and 20 mA at the controller’s full scale flow. The output
current is linear over the entire range. Ground for this signal is common on Pin 8. (Current output units
require 15-30Vdc power.)
Note: This is a current sourcing device. Do not attempt to connect it to “loop powered” systems.
Optional 2nd Analog Output Signal
You may specify an optional 2nd analog output on Pin 2 at time of order. (See the Calibration Data
Sheet that shipped with your controller to determine which output signals were ordered.) This output
may be a 0-5 Vdc, 0-10 Vdc, or 4-20 mA analog signal that can represent any measured parameter.
With this optional output, a volumetric flow controller could output the volumetric flow rate with a 0-5
Vdc signal (on pin 6) and a 4-20 mA signal (on pin 2), or a mass flow controller could output the mass
flow rate (0-5 Vdc on pin 6) and the absolute pressure (0-5 Vdc on pin 2).
Note: This is a current sourcing device. Do not attempt to connect it to “loop powered” systems.

DB-9 Serial Port 8 Pin Mini-DIN Port

1 2
1 2 3 4 5
3 44 5
5
6 7 8 9
6
6 7
7 8
8

5----------Ground--------------------------------------Ground----------8
3----------Transmit------------------------------------Receive---------3
2----------Receive-------------------------------------Transmit--------5

Figure 3. Mini-DIN to DB-9 Connection for RS-232 Signals


 Purple (Ground)
Red
Yellow
Unit A
Purple
Red
Yellow
Unit B
Purple
Red
Yellow
Unit C
4 3 2
2

5 1
3
5

9 6
8 7
Female Serial Cable Front

Figure 4. Typical Multiple Device (Addressable) Wiring Configuration

Note: The easiest way to connect multiple devices is with a Multi-Drop Box (see page 46).

An optional industrial connector is also available:

Pin Function Cable Color

1 Power In ( + ) Red 6
1
2 RS-232 Output Blue
5
3 RS-232 Input Signal White
4 Analog Input Signal Green 2
5 Ground (common for power, Black 4
communications and signals) 3
6 Signal Out (Voltage or Current as ordered) Brown

Figure 5. Optional Industrial Connector

Note: The above pin-out is applicable to all the flow meters and controllers ordered with the industrial
connector. The availability of different output signals depends on the flow controller options ordered.


 MC Series Mass Flow Controller Operation
The MC Series Mass Flow Controller provides a multitude of useful flow data in one simple, rugged
device. The MC Series can have several screen “modes” depending on how the device is ordered. All
MC Series controllers have a default Main Mode, Select Menu Mode, Control Set Up Mode, Gas Select
Mode (the Gas Select Mode may not be available on controllers calibrated for a custom gas or blend),
Communication Select Mode and Manufacturer Data Mode. In addition, your device may have been
ordered with the optional Totalizing Mode (page 42). The device defaults to Main Mode as soon as
power is applied to the controller.
Main Mode
The main mode screen defaults on power up with the mass flow on the primary display. The following
parameters are displayed in the main mode as shown in Figure 6.

o
PSIA C Set Pt.
+13.49 +22.73 0.000

MASS
SCCM
Air

+0.000 +0.000
Volume Mass Main

Figure 6. Main Mode Display, MC Series Flow Controller

The “MODE” button in the lower right hand corner toggles the display between modes.
Set Pt. – The set-point is shown in the upper right corner of the display. The set-point cannot be adjusted
from the main mode screen. For information on changing the set-point, see “Set”, page 13.
Gas Absolute Pressure: The MC Series flow controllers utilize an absolute pressure sensor to measure
the line pressure of the gas flow being monitored. This sensor references hard vacuum and accurately
reads line pressure both above and below local atmospheric pressure. This parameter is located in
the upper left corner of the display under the dynamic label “PSIA”. This parameter can be moved to
the primary display by pushing the button just above the dynamic label (top left). The engineering unit
associated with absolute pressure is pounds per square inch absolute (PSIA). This can be converted
to gage pressure (PSIG = the reading obtained by a pressure gauge that reads zero at atmospheric
pressure) by simply subtracting local atmospheric pressure from the absolute pressure reading:
PSIG = PSIA – (Local Atmospheric Pressure)
The flow meters use the absolute pressure of the gas in the calculation of the mass flow rate. For
working in metric units, note that 1 PSI = 6.89 kPa.

10
Gas Temperature: The MC Series flow controllers utilize a temperature sensor to measure the line
temperature of the gas flow being monitored. The temperature is displayed in engineering units of
degrees Celsius (°C). The flow controllers use the temperature of the gas in the calculation of the mass
flow rate. This parameter is located in the upper middle portion of the display under “°C”. This parameter
can be moved to the primary display by pushing the top center button above “°C”.
Volumetric Flow Rate: The volumetric flow rate is determined using the Flow Measurement Operating
Principle described on page 26. This parameter is located in the lower left corner of the display over
“Volume”. This parameter can be moved to the primary display by pushing the “Volume” button (lower
left). In order to get an accurate volumetric flow rate, the gas being measured must be selected (see
Gas Select Mode). This is important because the device calculates the flow rate based on the viscosity
of the gas at the measured temperature. If the gas being measured is not what is selected, an incorrect
value for the viscosity of the gas will be used in the calculation of flow, and the resulting output will be
inaccurate in direct proportion to the ratio between the two gases viscosities.
Mass Flow Rate: The mass flow rate is the volumetric flow rate corrected to a standard temperature
and pressure (typically 14.696 psia and 25°C). This parameter is located in the lower middle portion
of the display over “Mass”. This parameter can be moved to the primary display by pushing the button
located below “Mass” (bottom center). The controllers uses the measured temperature and the measured
absolute pressure to calculate what the flow rate would be if the gas pressure was at 1 atmosphere and
the gas temperature was 25°C. This allows a solid reference point for comparing one flow to another.
Flashing Error Message: Our flow meters and controllers display an error message (MOV = mass
overrange, VOV = volumetric overrange, POV = pressure overrange, TOV = temperature overrange)
when a measured parameter exceeds the range of the sensors in the device. When any item flashes
on the display, neither the flashing parameter nor the mass flow measurement is accurate. Reducing
the value of the flashing parameter to within specified limits will return the unit to normal operation and
accuracy.
Select Menu Mode
Pushing “Mode” once will bring up the “Select Menu” display. Push the button nearest your selection
to go to the corresponding screen. Push “Mode” again to return to the Main Mode display. (Note: If
your controller was ordered with Totalizing Mode option (page 42), pushing the “Mode” button once will
bring up the “Totalizing Mode” display. Pushing “Mode” a second time will bring up the “Select Menu”
display.)

Gas Control
Select Setup

SELECT
MENU

Comm. Mfg.
RS-232 Data Menu

Figure 7. Select Menu Display

11
Control Setup Mode
The Control Setup Mode is accessed by pressing the center button above “Control Setup” on the Select
Menu display (Fig.7) This mode allows the user to set up most parameters commonly associated with
PID control. Alicat Scientific flow controllers allow the user to select how the set-point is to be conveyed
to the controller, what that set-point is if control is local, and what the Proportional and Differential terms
of the PID control loop will be. The UP and DOWN buttons for adjusting variables can be held down for
higher speed adjustment or pressed repeatedly for fine adjustment.
Input – Alicat Scientific Flow Controllers normally ship defaulted to analog control as indicated in Figure
8. To change how the set-point will be conveyed to the controller push the button in the upper right hand
corner just above the dynamic label “Input” until the arrow is directly in front of the desired option. The
controller will ignore any set-point except that of the selected input and it will remember which input is
selected even if the power is disconnected.
Analog refers to a remote analog set-point applied to Pin 4 of the Mini-DIN connector as described
in the installation section of this manual. To determine what type of analog set-point your controller
was ordered with, refer to the Calibration Data Sheet that was included with your controller. 0-5 Vdc
is standard unless ordered otherwise. Note that if nothing is connected to Pin 4, and the controller is
set for analog control, the set-point will float. CAUTION! Never leave a Controller with any non-zero
set‑point if no pressure is available to make flow. The controller will apply full power to the valve in an
attempt to reach the set-point. When there is no flow, this can make the valve very HOT!

Serial refers to a remote digital RS-232 set-point applied via a serial connection to a computer or
PLC as described in the Installation and RS-232 sections of this manual. CAUTION! Never leave a
Controller with any non-zero set-point if no pressure is available to make flow. The controller will
apply full power to the valve in an attempt to reach the set-point. When there is no flow, this can make
the valve very HOT!

Local refers to a set-point applied directly at the controller. For more information on changing the set-
point locally refer to the heading “Select” below. Local input must be selected prior to attempting to
change the set-point locally. CAUTION! Never leave a Controller with any non-zero set-point if no
pressure is available to make flow. The controller will apply full power to the valve in an attempt to
reach the set-point. When there is no flow, this can make the valve very HOT!

Select Loop Input

>P 200 >Mass >Analog
D 500 Volume Serial
AUT0on Press Local

Set 0.00
Control
Up Down Setup

Figure 8. MC Series Control Setup Display

12
Loop—The selection of what variable to close the loop on is a feature unique to these mass flow
controllers. When the mass flow controller is supplied with the control valve upstream of the electronics
portion of the system, the unit can be set to control on outlet pressure (absolute pressures only) or
volumetric flow rate, instead of mass flow rate. Repeatedly pressing the button adjacent to the word
“Loop” on the control setup screen will change what variable is controlled. The change from mass to
volume can usually be accomplished without much, if any, change in the P and D settings. When you
change from controlling flow to controlling pressure, sometimes fairly radical changes must be made
to these variables. Note: Full scale pressure is normally 160PSIA. Consult the factory if you are having
difficulties with this procedure.
Select – To avoid accidental changing of the PID loop parameters or the set-point, the Control Setup
mode defaults with the selector on a null position. To change the set-point or the P and D PID loop
parameters, push the button in the upper left corner just above the dynamic label “Select” until the
selection arrow is pointing to the parameter you wish to change. When the parameter you wish to
change is selected, it may be adjusted up or down with the buttons under the display below the dynamic
labels “Up” and “Down”. Press the buttons repeatedly to make slow adjustments or hold them down to
make fast adjustments.
P refers to the Proportional term of the PID loop. Before changing this parameter, it is good practice to
write down the initial value so that it can be returned to the factory settings if necessary.
D refers to the Differential term of the PID loop. Before changing this parameter, it is good practice to
write down the initial value so that it can be returned to the factory settings if necessary.
AUT0on / AUT0off refers to the standard auto-tare or “auto-zero” feature. It is recommended that the
controller be left in the default auto-tare ON mode unless your specific application requires that it be
turned off. The auto-tare feature automatically tares (takes the detected signal as zero) the unit when it
receives a zero set-point for more than two seconds. A zero set-point results in the closing of the valve
and a known “no flow” condition. This feature helps to make the device more accurate by periodically
removing any cumulative errors associated with drift.
Set refers to the Set-Point. This parameter may only be changed if “Local” is selected as the Input. See
above for information on selecting the input. Using the UP and DOWN buttons, the set-point may be
adjusted between zero and the full-scale range of the controller. CAUTION! Never leave a Controller
with any non-zero set-point if no pressure is available to make flow. The controller will apply full
power to the valve in an attempt to reach the set-point. When there is no flow, this can make the valve
very HOT!

13
Gas Select Mode
The gas select mode is accessed by pressing the button above “Gas Select” on the Select Menu
display. The screen will appear as shown in Figure 9.

PgUP PgDWN Main

H2 Hydrogen
He Helium
>N2 Nitrogen
N2O Nitrous Oxide
Ne Neon
O2 Oxygen
UP DOWN Gas

Figure 9. Gas Select Display

The selected gas is displayed on the default main mode screen as shown in Figure 6, and is indicated
by the arrow in the Gas Select Mode screen in Figure 9. To change the selected gas, use the buttons
under “UP” and “DOWN” or above “PgUP” and “PgDWN” to position the arrow in front of the desired
gas. When the mode is cycled back to the Main Mode, the selected gas will be displayed on the main
screen. (Note: Gas Select Mode may not be available for units ordered for use with a custom gas or
blend.)

14
Communication Select Mode
The Communication Select mode is accessed by pressing the button below “Comm. RS-232” on the
Select Menu display. The screen will appear as shown in Figure 10.

Select
>
Unit ID (A).....A
Baud (19200)....19200
Data Rate......Fast

Comm.
UP DOWN RS-232

Figure 10. Communication Select Display

Unit ID – Valid unit identifiers are letters A-Z and @ (see Note below). This identifier allows the user
to assign a unique address to each device so that multiple units can be connected to a single RS-232
port on a computer. The Communication Select Mode allows you to view and/or change a unit’s unique
address. To change the unit ID address, press the “Select” button in the upper left corner of the display
until the cursor arrow is in front of the word “Unit ID”. Then, using the UP and DOWN buttons at the
bottom of the display, change the unit ID to the desired letter. Any ID change will take effect when the
Communication Select Screen is exited by pushing the MODE button.
Note: When the symbol @ is selected as the unit ID, the device will go into streaming mode when the
Communication Select Mode is exited by pushing the MODE button. See RS-232 Communications
(page 18) for information about the streaming mode.
Baud – The baud rate (bits per second) determines the rate at which data is passed back and forth
between the instrument and the computer. Both devices must send/receive at the same baud rate in
order for the devices to communicate via RS-232. The default baud rate for these devices is 19200
baud, sometimes referred to as 19.2K baud. To change the baud rate in the Communication Select
Mode, press the “Select” button in the upper left corner of the display until the cursor arrow is in front
of the word “Baud”. Then, using the UP and DOWN buttons at the bottom of the display, select the
required baud rate to match your computer or PLC. The choices are 38400, 19200, 9600, or 2400 baud.
Any baud rate change will not take effect until power to the unit is cycled.
Data Rate – Changing the Data Rate affects the rate at which the instrument dumps its data. Slow is
½ the Fast rate. The speed of the Fast rate is determined by the selected baud rate. It is sometimes
desirable to reduce the data rate if the communication speed bogs down the computer’s processor (as
is not uncommon in older laptops), or to reduce the size of data files collected in the streaming mode.
To change the data rate in the Communication Select Mode, press the “Select” button in the upper left
corner of the display until the cursor arrow is in front of the word “Data Rate”. Then, using the UP and
DOWN buttons at the bottom of the display, select either Fast or Slow. Any data rate change will be
effective immediately upon changing the value between Fast and Slow.

15
Manufacturer Data Mode

“Manufacturer Data” is accessed by pressing the “Mfg. Data” button on the Select Menu display (Figure
11). The “Mfg 1” display shows the name and telephone number of the manufacturer. The“Mfg 2”
display shows important information about your flow meter including the model number, serial number,
and date of manufacture.

Main
Alicat Scientific, Inc.
Ph 520-290-6060
Fax 520-290-0109

Mfg 1

Main
Model MC-10SLPM-D
Serial No 27117
Date Mfg.11/07/2005
Calibrated By.DL
Software GP07R23
Mfg 2

Figure 11. Manufacturer Data Displays

16
 VC Series Volumetric Flow Controller Operation

The VC Series can have several screen “modes” depending on how the device is ordered. All VC Series
controllers have a default Main Mode, Select Menu Mode, Control Setup Mode, Gas Select Mode (the
Gas Select Mode may not be available on meters calibrated for a custom gas or blend), Communication
Select Mode and Manufacturer Data Mode. In addition, your device may have been ordered with the
optional Totalizing Mode (page 42). The device defaults to Main Mode as soon as power is applied
to the controller. Note that volumetric controllers are intended for use in near atmospheric conditions
(Please see page 32).

Main Mode

The main mode screen shows the volumetric flow in the units specified at time of order. In the flow
mode, only two buttons are active as shown in Figure 12. The process gas that is selected is shown
directly under the flow units.

Set Pt.
0.000

Volume
CCM
Air

+0.000
Volume Main

Figure 12. Main Mode Display, VC Series Flow Controller

The “MODE” button in the lower right hand corner toggles the display between the Main Display and
the Menu Display.

Volume – The volume flow rate is defaulted on the primary display. If the set-point has been toggled to
the primary screen as described below, the volume flow rate can be toggled back to the primary display
by pushing the button (lower left corner) directly beneath the dynamic label “Volume”.

Set Pt – The set-point is shown in the upper right corner of the display. The set-point cannot be adjusted
from the main mode screen. For information on changing the set-point, see “Control Setup Mode”.

Flashing Error Message: Our volumetric flow meters and controllers display an error message (VOV
= volumetric overrange) when a measured parameter exceeds the range of the sensors in the device.
When any item flashes on the display, the flashing parameter is not accurate. Reducing the value of the
flashing parameter to within specified limits will return the unit to normal operation and accuracy.

17
Select Menu Mode
Pushing “Mode” once will bring up the “Select Menu” display (Figure 7, page 11). Push the button
nearest your selection to go to the corresponding screen. Push “Mode” again to return to the Main
Mode display. (Note: If your controller was ordered with Totalizing Mode option (page 42), pushing the
“Mode” button once will bring up the “Totalizing Mode” display. Pushing “Mode” a second time will bring
up the “Select Menu” display.)

Control Setup Mode

The Control Setup Mode is accessed by pressing the center button above “Control” on the Select Menu
Display (Fig.7 page 11) This mode allows the user to set up most parameters commonly associated with
PID control. Alicat Scientific flow controllers allow the user to select how the set-point is to be conveyed
to the controller, what that set-point is if control is local, and what the Proportional and Differential terms
of the PID control loop will be. The UP and DOWN buttons for adjusting variables can be held down for
higher speed adjustment or pressed repeatedly for fine adjustment

Select Loop Input

>P 200 >Analog
D 500 Volume Serial
AUT0on Local

Set 0.00
Control
Up Down Setup

Figure 13. VC Series Control Setup Display

Input – VC Series Flow Controllers normally ship defaulted to analog control as indicated in Figure 13
above. To change how the set-point will be conveyed to the controller push the button in the upper right
hand corner just above the dynamic label “Input” until the arrow is directly in front of the desired option.
The controller will ignore any set-point except that of the selected input and it will remember which input
is selected even if the power is disconnected.

Analog refers to a remote analog set-point applied to Pin 4 of the Mini-DIN connector as described
in the installation section of this manual. To determine what type of analog set-point your controller
was ordered with, refer to the Calibration Data Sheet that was included with your controller. 0-5 Vdc
is standard unless ordered otherwise. Note that if nothing is connected to Pin 4, and the controller is
set for analog control, the set-point will float. CAUTION! Never leave a Controller with any non-zero
set‑point if no pressure is available to make flow. The controller will apply full power to the valve in an
attempt to reach the set-point. When there is no flow, this can make the valve very HOT!

18
Serial refers to a remote digital RS-232 set-point applied via a serial connection to a computer or
PLC as described in the Installation and RS-232 sections of this manual. CAUTION! Never leave a
Controller with any non-zero set-point if no pressure is available to make flow. The controller will
apply full power to the valve in an attempt to reach the set-point. When there is no flow, this can make
the valve very HOT!

Local refers to a set-point applied directly at the controller. For more information on changing the
set-point locally refer to the heading “Select” below. Local input must be selected prior to attempting
to change the set-point locally. CAUTION! Never leave a Controller with any non-zero set-point if no
pressure is available to make flow. The controller will apply full power to the valve in an attempt to
reach the set-point. When there is no flow, this can make the valve very HOT!

Select – To avoid accidental changing of the PID loop parameters or the set-point, the Control Setup
mode defaults with the selector on a null position. To change the set-point or the P and D PID loop
parameters, push the button in the upper left corner just above the dynamic label “Select” until the
selection arrow is pointing to the parameter you wish to change. When the parameter you wish to
change is selected, it may be adjusted up or down with the buttons under the display below the dynamic
labels “UP” and “DOWN”. Press the buttons repeatedly to make slow adjustments or hold them down
to make fast adjustments.

P refers to the Proportional term of the PID loop. Before changing this parameter, it is good practice to
write down the initial value so that it can be returned to the factory settings if necessary.

D refers to the Differential term of the PID loop. Before changing this parameter, it is good practice to
write down the initial value so that it can be returned to the factory settings if necessary.

AUT0on / AUT0off refers to the standard auto-tare or “auto-zero” feature. It is recommended that the
controller be left in the default auto-tare ON mode unless your specific application requires that it be
turned off. The auto-tare feature automatically tares (takes the detected signal as zero) the unit when it
receives a zero set-point for more than two seconds. A zero set-point results in the closing of the valve
and a known “no flow” condition. This feature helps to make the device more accurate by periodically
removing any cumulative errors associated with drift.

Set refers to the Set-point. This parameter may only be changed if “Local” is selected as the Input. See
above for information on selecting the input. Using the UP and DOWN buttons, the set-point may be
adjusted between zero and the full-scale range of the controller. CAUTION! Never leave a Controller
with any non-zero set-point if no pressure is available to make flow. The controller will apply full
power to the valve in an attempt to reach the set-point. When there is no flow, this can make the valve
very HOT!

19
Gas Select Mode
The Gas Select Mode is accessed by pressing the button above “Gas Select” on the Select Menu
display. The screen will appear as shown in Figure 9 (page 13). The selected gas is displayed on the
default main mode screen as shown in Figure 11, and is indicated by the arrow in the gas select mode
screen in Figure 9. To change the selected gas, use the buttons under “UP” and “DOWN” or those
above “PgUP” and “PgDWN” to position the arrow in front of the desired gas. When the mode is cycled
back to the main mode, the selected gas will be displayed on the main screen.
Note: Gas Select Mode may not be available for units ordered for use with a custom gas or blend.

Communication Select Mode

The Communication Select mode is accessed by pressing the button below “Comm. RS-232” on the
Select Menu display. Please see page 14 for Communication Select mode instructions.

Manufacturer Data Mode

“Manufacturuer Data” is accessed by pressing the “Mfg. Data” button on the Select Menu display
(Figure 7, page 11). The “Mfg 1” display shows the name and telephone number of the manufacturer.
The“Mfg 2” display shows important information about your flow controller including the model number,
serial number, and date of manufacture (Figure 10, page 14).

RS-232 Output and Input

Configuring HyperTerminal®:

1. Open your HyperTerminal® RS-232 terminal program (installed under the “Accessories” menu on
all Microsoft Windows® operating systems).
2. Select “Properties” from the file menu.
3. Click on the “Configure” button under the “Connect To” tab. Be sure the program is set for: 19,200
baud (or matches the baud rate selected in the RS-232 communications menu on the controller)
and an 8-N-1-None (8 Data Bits, No Parity, 1 Stop Bit, and no Flow Control) protocol.
4. Under the “Settings” tab, make sure the Terminal Emulation is set to ANSI or Auto Detect.
5. Click on the “ASCII Setup” button and be sure the “Send Line Ends with Line Feeds” box is not
checked and the “Echo Typed Characters Locally” box and the “Append Line Feeds to Incoming
Lines” boxes are checked. Those settings not mentioned here are normally okay in the default
position.
6. Save the settings, close HyperTerminal® and reopen it.

In Polling Mode, the screen should be blank except the blinking cursor. In order to get the data streaming
to the screen, hit the “Enter” key several times to clear any extraneous information. Type “*@=@”
followed by “Enter” (or using the RS-232 communcation select menu, select @ as identifier and exit the
screen). If data still does not appear, check all the connections and com port assignments.

Changing From Streaming to Polling Mode:

When the meter is in the Streaming Mode, the screen is updated approximately 10-60 times per second
(depending on the amount of data on each line) so that the user sees the data essentially in real time.
It is sometimes desirable, and necessary when using more than one unit on a single RS-232 line, to be
able to poll the unit.

20
In Polling Mode the unit measures the flow normally, but only sends a line of data when it is “polled”.
Each unit can be given its own unique identifier or address. Unless otherwise specified each unit is
shipped with a default address of capital A. Other valid addresses are B thru Z.

Once you have established communication with the unit and have a stream of information filling your
screen:

1. Type *@=A followed by “Enter” (or using the RS-232 communcation select menu, select A as identifier
and exit the screen) to stop the streaming mode of information. Note that the flow of information will
not stop while you are typing and you will not be able to read what you have typed. Also, the unit
does not accept a backspace or delete in the line so it must be typed correctly. If in doubt, simply hit
enter and start again. If the unit does not get exactly what it is expecting, it will ignore it. If the line
has been typed correctly, the data will stop.
2. You may now poll the unit by typing A followed by “Enter”. This does an instantaneous poll of unit
A and returns the values once. You may type A “Enter” as many times as you like. Alternately you
could resume streaming mode by typing *@=@ followed by “Enter”. Repeat step 1 to remove the
unit from the streaming mode.
3. To assign the unit a new address, type *@=New Address, e.g. *@=B. Care should be taken not to
assign an address to a unit if more than one unit is on the RS232 line as all of the addresses will be
reassigned. Instead, each should be individually attached to the RS-232 line, given an address, and
taken off. After each unit has been given a unique address, they can all be put back on the same
line and polled individually.
Sending a Set-point via RS-232: To send a set-point via RS-232, “Serial” must be selected under
the “Input” list in the control set up mode. To give controllers a set-point, or change an existing point,
simply type in a number between 0 and 65535 (2% over range), where 64000 denotes full-scale flow
rate, and hit “Enter”. The set-point column and flow rates should change accordingly. If they do not,
try hitting “Enter” a couple of times and repeating your command. The formula for performing a linear
interpolation is as follows:
Value = (Desired Set-point X 64000) / Full Scale Flow Range
For example, if your device is a 100 SLPM full-scale unit and you wish to apply a set-point of 35 SLPM
you would enter the following value:

22400 = (35 SLPM X 64000) / 100 SLPM

If the controller is in polling mode as described in Changing from Streaming Mode to Polling Mode, the
set-point must be preceded by the address of the controller. For example, if your controller has been
given an address of D, the set-point above would be sent by typing:
D22400 followed by “Enter”

To adjust the Proportional and Differential (P&D) terms via RS-232:

Type *@=A followed by “Enter” to stop the streaming mode of information.
To adjust the “P” or proportional term of the PID controller, type *R21 followed by “Enter”.

21
The computer will respond by reading the current value for register 21 between 0-65535. It is good
practice to write this value down so you can return to the factory settings if necessary. Enter the value
you wish to try by writing the new value to register 21. For example, if you wished to try a “P” term of
220, you would type *W21=220 followed by “Enter” where the bold number denotes the new value.

The computer will respond to the new value by confirming that 21=220. To see the effect of the change
you may now poll the unit by typing A followed by “Enter”. This does an instantaneous poll and returns
the values once. You may type A “Enter” as many times as you like. Alternately you could resume
streaming mode by typing *@=@ followed by “Enter”. Repeat step 3 to remove the unit from the
streaming mode.

To adjust the “D” or proportional term of the PID controller, type *R22 followed by “Enter”.
The computer will respond by reading the current value for register 22 between 0-65535. It is good
practice to write this value down so you can return to the factory settings if necessary. Enter the value
you wish to try by writing the new value to register 22. For example, if you wished to try a “D” term of
25, you would type *W22=25 followed by “Enter” where the bold number denotes the new value.
The computer will respond to the new value by confirming that 22=25. To see the effect of the change
you may now poll the unit by typing A followed by “Enter”. This does an instantaneous poll and returns
the values once. You may type A “Enter” as many times as you like. Alternately you could resume
streaming mode by typing *@=@ followed by “Enter”. Repeat.
You may test your settings for a step change by changing the set-point. To do this type A32000 (A is the
default single unit address, if you have multiple addressed units on your RS-232 line the letter preceding
the value would change accordingly.) followed by “Enter” to give the unit a ½ full scale set-point. Monitor
the unit’s response to the step change to ensure it is satisfactory for your needs. Recall that the “P” term
controls how quickly the unit goes from one set-point to the next, and the “D” term controls how quickly
the signal begins to “decelerate” as it approaches the new set-point (controls the overshoot).

22
Gas Select – The selected gas can be changed via RS-232 input. To change the selected gas, enter
the following commands:
In Streaming Mode: $$#<Enter>
In Polling Mode: Address$$#<Enter> (e.g. B$$#<Enter>)
Where # is the number of the gas selected from the table below. Note that this also corresponds to the
gas select menu on the flow controller screen:

# GAS
0 Air Air
1 Argon Ar
2 Methane CH4
3 Carbon Monoxide CO
4 Carbon Dioxide CO2
5 Ethane C2H6
6 Hydrogen H2
7 Helium He
8 Nitrogen N2
9 Nitrous Oxide N2O
10 Neon Ne
11 Oxygen O2
12 Propane C3H8
13 normal-Butane n-C4H10
14 Acetylene C2H2
15 Ethylene C2H4
16 iso-Butane i-C2H10
17 Krypton Kr
18 Xenon Xe
19 Sulfur Hexafluoride SF6
20 75% Argon / 25% CO2 C-25
21 90% Argon / 10% CO2 C-10
22 92% Argon / 8% CO2 C-8
23 98% Argon / 2% CO2 C-2
24 75% CO2 / 25% Argon C-75
25 75% Argon / 25% Helium A-75
26 75% Helium / 25% Argon A-25
27 90% Helium / 7.5% Argon / 2.5% CO2 A1025
(Praxair - Helistar® A1025)
28 90% Argon / 8% CO2 / 2% Oxygen Star29
(Praxair - Stargon® CS)
29 95% Argon / 5% Methane P-5

For example, to select Propane, enter: $$12<Enter>

23
Collecting Data:
The RS-232 output updates to the screen many times per second. Very short-term events can be
captured simply by disconnecting (there are two telephone symbol icons at the top of the HyperTerminal®
screen for disconnecting and connecting) immediately after the event in question. The scroll bar can be
driven up to the event and all of the data associated with the event can be selected, copied, and pasted
into Microsoft® Excel® or other spreadsheet program as described below.
For longer term data, it is useful to capture the data in a text file. With the desired data streaming to the
screen, select “Capture Text” from the Transfer Menu. Type in the path and file name you wish to use.
Push the start button. When the data collection period is complete, simply select “Capture Text” from
the Transfer Menu and select “Stop” from the sub-menu that appears.
Data that is selected and copied, either directly from HyperTerminal® or from a text file can be pasted
directly into Excel®. When the data is pasted it will all be in the selected column. Select “Text to
Columns...” under the Data menu in Excel® and a Text to Columns Wizard (dialog box) will appear.
Make sure that “Fixed Width” is selected under Original Data Type in the first dialog box and click “Next”.
In the second dialog box, set the column widths as desired, but the default is usually acceptable. Click
on “Next” again. In the third dialog box, make sure the column data format is set to “General”, and click
“Finish”. This separates the data into columns for manipulation and removes symbols such as the plus
signs from the numbers. Once the data is in this format, it can be graphed or manipulated as desired.
For extended term data capture see: “Sending a Simple Script to HyperTerminal®” on page 25.
Data Format:
The data stream on the screen represents the flow parameters of the main mode in the units shown
on the display. For volumetric flow controllers, there are three columns of data representing volumetric
flow rate in the units specified at time of order, set point and the selected gas.
+4.123 4.125 Air
+4.123 4.125 Air
+4.123 4.125 Air
+4.123 4.125 Air
+4.124 4.125 Air
+4.125 4.125 Air
VC Series Volumetric Flow Controller Data Format
For mass flow controllers, there are 6 columns of data representing pressure, temperature, volumetric
flow, mass flow and the selected gas. The first column is absolute pressure (normally in PSIA), the
second column is temperature (normally in °C), the third column is volumetric flow rate (in the units
specified at time of order and shown on the display), and the fourth column is mass flow (also in the
units specified at time of order and shown on the display). For instance, if the meter was ordered in
units of SCFM, the display on the meter would read 2.004 SCFM and the last two columns of the output
below would represent volumetric flow and mass flow in CFM and SCFM respectively.
+014.70 +025.00 +02.004 +02.004 2.004 Air
+014.70 +025.00 +02.004 +02.004 2.004 Air
+014.70 +025.00 +02.004 +02.004 2.004 Air
+014.70 +025.00 +02.004 +02.004 2.004 Air
+014.70 +025.00 +02.004 +02.004 2.004 Air
+014.70 +025.00 +02.004 +02.004 2.004 Air
MC Series Mass Flow Controller Data Format

24
 Sending a Simple Script File to HyperTerminal®
It is sometimes desirable to capture data for an extended period of time. Standard streaming mode
information is useful for short term events, however, when capturing data for an extended period of
time, the amount of data and thus the file size can become too large very quickly. Without any special
programming skills, the user can use HyperTerminal® and a text editing program such as Microsoft®
Word® to capture text at user defined intervals.
1. Open your text editing program, MS Word for example.
2. Set the cap lock on so that you are typing in capital letters.
3. Beginning at the top of the page, type A<Enter> repeatedly. If you’re using MS Word, you can tell how
many lines you have by the line count at the bottom of the screen. The number of lines will correspond
to the total number of times the flow device will be polled, and thus the total number of lines of data it
will produce.
For example: A
A
A
A
A
A
will get a total of six lines of data from the flow meter, but you can enter as many as you like.
The time between each line will be set in HyperTerminal.
4. When you have as many lines as you wish, go to the File menu and select save. In the save dialog
box, enter a path and file name as desired and in the “Save as Type” box, select the plain text (.txt)
option. It is important that it be saved as a generic text file for HyperTerminal to work with it.
5. Click Save.
6. A file conversion box will appear. In the “End Lines With” drop down box, select CR Only. Everything
else can be left as default.
7. Click O.K.
8. You have now created a “script” file to send to HyperTerminal. Close the file and exit the text editing
program.
9. Open HyperTerminal and establish communication with your flow device as outlined in the manual.
10. Set the flow device to Polling Mode as described in the manual. Each time you type A<Enter>, the
meter should return one line of data to the screen.
11. Go to the File menu in HyperTerminal and select “Properties”.
12. Select the “Settings” tab.
13. Click on the “ASCII Setup” button.
14. The “Line Delay” box is defaulted to 0 milliseconds. This is where you will tell the program how often
to read a line from the script file you’ve created. 1000 milliseconds is one second, so if you want a line
of data every 30 seconds, you would enter 30000 into the box. If you want a line every 5 minutes, you
would enter 300000 into the box.
15. When you have entered the value you want, click on OK and OK in the Properties dialog box.
16. Go the Transfer menu and select “Send Text File…” (NOT Send File…).
17. Browse and select the text “script” file you created.
18. Click Open.
19. The program will begin “executing” your script file, reading one line at a time with the line delay you
specified and the flow device will respond by sending one line of data for each poll it receives, when it
receives it.
You can also capture the data to another file as described in the manual under “Collecting Data”. You
will be simultaneously sending it a script file and capturing the output to a separate file for analysis.

25
 Operating Principle

All M and V Series Gas Flow Meters (and MC and VC Series Gas Flow Controllers) are based on the
accurate measurement of volumetric flow. The volumetric flow rate is determined by creating a pressure
drop across a unique internal restriction, known as a Laminar Flow Element (LFE), and measuring
differential pressure across it. The restriction is designed so that the gas molecules are forced to move
in parallel paths along the entire length of the passage; hence laminar (streamline) flow is established
for the entire range of operation of the device. Unlike other flow measuring devices, in laminar flow
meters the relationship between pressure drop and flow is linear. The underlying principle of operation
of the 16 Series flow meters is known as the Poiseuille Equation:

Q = (P1-P2)�r4/8ηL (Equation 1)

Where: Q = Volumetric Flow Rate

P1 = Static pressure at the inlet
P2 = Static pressure at the outlet
r = Radius of the restriction
η = (eta) absolute viscosity of the fluid
L = Length of the restriction

Since �, r and L are constant; Equation 1 can be rewritten as:

Q = K (∆P/η) (Equation 2)

Where K is a constant factor determined by the geometry of the restriction. Equation 2 shows the linear
relationship between volumetric flow rate (Q) differential pressure (∆P) and absolute viscosity (η) in a
simpler form.

Gas Viscosity: In order to get an accurate volumetric flow rate, the gas being measured must be
selected (see Gas Select Mode, page 14). This is important because the device calculates the flow rate
based on the viscosity of the gas at the measured temperature. If the gas being measured is not what
is selected, an incorrect value for the viscosity of the gas will be used in the calculation of flow, and the
resulting output will be inaccurate in direct proportion to the difference in the two gases viscosities.
Gas viscosity, and thus gas composition, can be very important to the accuracy of the meter. Anything
that has an effect on the gas viscosity (e.g. water vapor, odorant additives, etc.) will have a direct
proportional effect on the accuracy. Selecting methane and measuring natural gas for instance, will
result in a fairly decent reading, but it is not highly accurate (errors are typically < 0.6%) because
natural gas contains small and varying amounts of other gases such as butane and propane that result
in a viscosity that is somewhat different than pure methane.
Absolute viscosity changes very little with pressure (within the operating ranges of these meters) therefore
a true volumetric reading does not require a correction for pressure. Changes in gas temperature do
affect viscosity. For this reason, the M and V Series internally compensate for this change.

26
Other Gases: M Series Flow Meters can easily be used to measure the flow rate of gases other than
those listed as long as “non-corrosive” gas compatibility is observed. For example, a flow meter that
has been set for air can be used to measure the flow of argon.
The conversion factor needed for measuring the flow of different gases is linear and is simply determined
by the ratio of the absolute viscosity of the gases. This factor can be calculated as follows:
Qog = Q1 [η1 / ηog ]
Where: Q1 = Flow rate indicated by the flow meter
η1 = Viscosity of the calibrated gas at the measured temp.
Qog = Flow rate of the alternate gas
ηog = Viscosity of the alternate gas at the measured temp.
Say we have a meter set for air and we want to flow argon through it. With argon flowing through the
meter, the display reads 110 SLPM. For ease of calculation, let us say the gas temperature is 25°C.
What is the actual flow of argon?

Qog = Actual Argon Flow Rate

Q1 = Flow rate indicated by meter (110 SLPM)
η1 = Viscosity of gas selected or calibrated for by the meter at the
measured temp.
ηog = Viscosity of gas flowing through the meter at the measured temp.
At 25°C, the absolute viscosity of Air (η1) is 184.918 micropoise.
At 25°C, the absolute viscosity of Argon (ηog) is 225.593 micropoise.
Qog = Q1 (η 1 / ηog)
Qog = 110 SLPM (184.918 / 225.593)
Qog = 90.17 SLPM
So, the actual flow of Argon through the meter is 90.17 SLPM. As you can see, because the Argon gas
is more viscous than the Air the meter is set for, the meter indicates a higher flow than the actual flow.
A good rule of thumb is: “At a given flow rate, the higher the viscosity, the higher the indicated flow.”

Volume Flow vs. Mass Flow: At room temperature and low pressures the volumetric and mass flow
rate will be nearly identical, however, these rates can vary drastically with changes in temperature and/
or pressure because the temperature and pressure of the gas directly affects the volume. For example,
assume a volumetric flow reading was used to fill balloons with 250 mL of helium, but the incoming
line ran near a furnace that cycled on and off, intermittently heating the incoming helium. Because
the volumetric meter simply measures the volume of gas flow, all of the balloons would initially be the
same size. However, if all the balloons are placed in a room and allowed to come to an equilibrium
temperature, they would generally all come out to be different sizes. If, on the other hand, a mass flow
reading were used to fill the balloons with 250 standard mL of helium, the resulting balloons would
initially be different sizes, but when allowed to come to an equilibrium temperature, they would all turn
out to be the same size.

This parameter is called corrected mass flow because the resulting reading has been compensated
for temperature and pressure and can therefore be tied to the mass of the gas. Without knowing the
temperature and pressure of the gas and thus the density, the mass of the gas cannot be determined.

27
Once the corrected mass flow rate at standard conditions has been determined and the density at
standard conditions is known (see the density table at the back of this manual), a true mass flow can
be calculated as detailed in the following example:
Mass Flow Meter Reading = 250 SCCM (Standard Cubic Centimeters/Minute)
Gas: Helium
Gas Density at 25C and 14.696 PSIA = .16353 grams/Liter
True Mass Flow = (Mass Flow Meter Reading) X (Gas Density)
True Mass Flow = (250 CC/min) X (1 Liter / 1000 CC) X (.16353 grams/Liter)
True Mass Flow = 0.0409 grams/min of Helium
Volumetric and Mass Flow Conversion: In order to convert volume to mass, the density of the gas
must be known. The relationship between volume and mass is as follows:
Mass = Volume x Density
The density of the gas changes with temperature and pressure and therefore the conversion of
volumetric flow rate to mass flow rate requires knowledge of density change. Using ideal gas laws, the
effect of temperature on density is:
ρa / ρs = Ts / Ta
Where: ρa = density @ flow condition
Ta = absolute temp @ flow condition in °Kelvin
ρs = density @ standard (reference ) condition
Ts = absolute temp @ standard (reference) condition in °Kelvin
ºK = ºC + 273.15 Note: ºK=ºKelvin
The change in density with pressure can also be described as:
ρa / ρs = Pa / Ps
Where: ρa = density @ flow condition
Pa = flow absolute pressure
ρs = density @ standard (reference ) condition
Ps = Absolute pressure @ standard (reference) condition
Therefore, in order to determine mass flow rate, two correction factors must be applied to volumetric
rate: temperature effect on density and pressure effect on density.
Compressibility: Heretofore, we have discussed the gases as if they were “Ideal” in their characteristics.
The ideal gas law is formulated as:
PV=nRT where: P = Absolute Pressure
V = Volume (or Volumetric Flow Rate)
n = number moles (or Molar Flow Rate)
R = Gas Constant (related to molecular weight)
T = Absolute Temperature
Most gases behave in a nearly ideal manner when measured within the temperature and pressure
limitations of Alicat products. However, some gases (such as propane and butane) can behave in a less
than ideal manner within these constraints. The non-ideal gas law is formulated as:
PV=ZnRT
Where: “Z” is the compressibility factor. This can be seen in an increasingly blatant manner as gases
approach conditions where they condense to liquid. As the compressibility factor goes down (Z=1 is
the ideal gas condition), the gas takes up less volume than what one would expect from the ideal gas
calculation.

28
This reduces to: Pa Va / Za Ta = Ps Vs / Zs Ts , eliminating R and n.

Alicat mass flow meters model gas flows based upon the non-ideal gas characteristics of the calibrated
gas. The flow corrections are normally made to 25 C and 14.696 PSIA and the compressibility factor
of the gas under those conditions. This allows the user to multiply the mass flow rate by the density of
the real gas at those standard conditions to get the mass flow rate in grams per minute.
Because we incorporate the compressibility factor into our ‘full gas model’; attempts to manually
compute mass flows from only the P, V, and T values shown on the display will sometimes result in
modest errors.

Note: Although the correct units for mass are expressed in grams, kilograms, etc. it has become standard
that mass flow rate is specified in SLPM (standard liters / minute), SCCM (standard cubic centimeters
/ minute) or SmL/M (standard milliliters / minute).

This means that mass flow rate is calculated by normalizing the volumetric flow rate to some standard
temperature and pressure (STP). By knowing the density at that STP, one can determine the mass flow
rate in grams per minute, kilograms per hour, etc.

STP is usually specified as the sea level conditions; however, no single standard exists for this
convention. Examples of common reference conditions include:

0°C and 14.696 PSIA

25°C and 14.696 PSIA
0°C and 760 torr (mmHG)
70°F and 14.696 PSIA
68°F and 29.92 inHG
20°C and 760 torr (mmHG)

MC Series Flow Controllers reference 25ºC and14.696 PSIA (101.32kPa) - unless ordered
otherwise and specified in the notes field of the calibration sheet.

Standard Gas Data Tables: Those of you who have older Alicat products (manufactured before
October 2005) may notice small discrepancies between the gas property tables of your old and new
units. Alicat Scientific, Inc. has recently incorporated the latest data sets from NIST (including their
REFPROP 7 data) in our products’ built-in gas property models. Be aware that calibrators that you may
be spot checking against may be using older data sets such as the widely distributed Air Liquide data.
This may generate apparent calibration discrepancies of up to 0.6% of reading on well behaved gases
and as much as 3% of reading on some gases such as propane and butane, unless the standard was
directly calibrated on the gas in question. As the older standards are phased out of the industry, this
difference in readings will cease to be a problem. If you see a difference between the Alicat meter and
your in-house standard, in addition to calling Alicat Scientific at (520) 290-6060, call the manufacturer
of your standard for clarification as to which data set they used in their calibration. This comparison will
in all likelihood resolve the problem.

29
 Viscosity* Density** Compressibility
Gas
Short Form Long Form 25 deg C 25 deg C 25 deg C
Number
14.696 PSIA 14.696 PSIA 14.696 PSIA
0 Air Air 184.918 1.1840 0.9997
1 Ar Argon 225.593 1.6339 0.9994
2 CH4 Methane 111.852 0.6569 0.9982
3 CO Carbon Monoxide 176.473 1.1453 0.9997
4 CO2 Carbon Dioxide 149.332 1.8080 0.9949
5 C2H6 Ethane 93.540 1.2385 0.9924
6 H2 Hydrogen 89.153 0.08235 1.0006
7 He Helium 198.457 0.16353 1.0005
8 N2 Nitrogen 178.120 1.1453 0.9998
9 N2O Nitrous Oxide 148.456 1.8088 0.9946
10 Ne Neon 311.149 0.8246 1.0005
11 O2 Oxygen 204.591 1.3088 0.9994
12 C3H8 Propane 81.458 1.8316 0.9841
13 n-C4H10 normal-Butane 74.052 2.4494 0.9699
14 C2H2 Acetylene 104.448 1.0720 0.9928
15 C2H4 Ethylene 103.177 1.1533 0.9943
16 i-C4H10 iso-Butane 74.988 2.4403 0.9728
17 Kr Krypton 251.342 3.4274 0.9994
18 Xe Xenon 229.785 5.3954 0.9947
19 SF6 Sulfur Hexafluoride 153.532 6.0380 0.9887
20 C-25 75% Argon / 25% CO2 205.615 1.6766 0.9987
21 C-10 90% Argon / 10% CO2 217.529 1.6509 0.9991
22 C-8 92% Argon / 8% CO2 219.134 1.6475 0.9992
23 C-2 98% Argon / 2% CO2 223.973 1.6373 0.9993
24 C-75 75% CO2 / 25% Argon 167.451 1.7634 0.9966
25 A-75 75% Argon / 25% Helium 230.998 1.2660 0.9997
26 A-25 75% Helium / 25% Argon 234.306 0.5306 1.0002
90% Helium / 7.5% Argon /
27 A1025 2.5% CO2 214.840 0.3146 1.0003
(Praxair - Helistar® A1025)
90% Argon / 8% CO2
28 Star29 / 2% Oxygen 218.817 1.6410 0.9992
(Praxair - Stargon® CS)
29 P-5 95% Argon / 5% Methane 223.483 1.5850 0.9993
*in micropoise (1 Poise = gram / (cm) (sec)) ** Grams/Liter (NIST REFPROP 7 database)

Gas Viscosities, Densities and Compressibilities at 25° C

30
 Viscosity* Density** Compressibility
Gas
Short Form Long Form 0 deg C 0 deg C 0 deg C
Number
14.696 PSIA 14.696 PSIA 14.696 PSIA
0 Air Air 172.588 1.2927 0.9994
1 Ar Argon 209.566 1.7840 0.9991
2 CH4 Methane 103.657 0.7175 0.9976
3 CO Carbon Monoxide 165.130 1.2505 0.9994
4 CO2 Carbon Dioxide 137.129 1.9768 0.9933
5 C2H6 Ethane 86.127 1.3551 0.9900
6 H2 Hydrogen 83.970 0.08988 1.0007
7 He Helium 186.945 0.17849 1.0005
8 N2 Nitrogen 166.371 1.2504 0.9995
9 N2O Nitrous Oxide 136.350 1.9778 0.9928
10 Ne Neon 293.825 0.8999 1.0005
11 O2 Oxygen 190.555 1.4290 0.9990
12 C3H8 Propane 74.687 2.0101 0.9787
13 n-C4H10 normal-Butane 67.691 2.7048 0.9587
14 C2H2 Acetylene 97.374 1.1728 0.9905
15 C2H4 Ethylene 94.690 1.2611 0.9925
16 i-C4H10 iso-Butane 68.759 2.6893 0.9627
17 Kr Krypton 232.175 3.7422 0.9991
18 Xe Xenon 212.085 5.8988 0.9931
19 SF6 Sulfur Hexafluoride 140.890 6.6154 0.9850
20 C-25 75% Argon / 25% CO2 190.579 1.8309 0.9982
21 C-10 90% Argon / 10% CO2 201.897 1.8027 0.9987
22 C-8 92% Argon / 8% CO2 203.423 1.7989 0.9988
23 C-2 98% Argon / 2% CO2 208.022 1.7877 0.9990
24 C-75 75% CO2 / 25% Argon 154.328 1.9270 0.9954
25 A-75 75% Argon / 25% Helium 214.808 1.3821 0.9995
26 A-25 75% Helium / 25% Argon 218.962 0.5794 1.0002
90% Helium / 7.5% Argon
27 A1025 / 2.5% CO2 201.284 0.3434 1.0002
(Praxair - Helistar® A1025)
90% Argon / 8% CO2
28 Star29 / 2% Oxygen 203.139 1.7918 0.9988
(Praxair - Stargon® CS)
29 P-5 95% Argon / 5% Methane 207.633 1.7307 0.9990
*in micropoise (1 Poise = gram / (cm) (sec)) ** Grams/Liter (NIST REFPROP 7 database)

Gas Viscosities, Densities and Compressibilities at 0° C

31
 Volumetric Flow Meters and Controllers Under Pressure
V and VC Series Volumetric Flow Meters/Controllers are intended for use in low pressure
applications. This is because an accurate measurement of the volumetric flow rate by means
of differential pressure requires the flow at the differential pressure sensor to be in a laminar
state. The state of the flow is quantified by what is known as the Reynolds Number. If the
Reynolds Number gets above a certain point, generally accepted as approximately 2000, the
flow will become non-laminar. The Reynolds Number for a given Newtonian fluid flow is defined
as:
Re = ρVL/η
Where: ρ= density
V= average velocity
L= Constant determined by length and geometry of passage
η= absolute viscosity
From this relationship we see that increasing the gas density or velocity increases the Reynolds
Number, and increasing the gas viscosity decreases the Reynolds number. For a given gas in
a given meter at a given temperature, L and η are roughly fixed constants.
For the purpose of illustration, let us put two 100 (S)LPM flow meters, identical in every way
except that one is a volumetric flow meter and one is a mass flow meter, in series with one
another in a pipeline. Now let us pass a small constant air flow through the meters, thus fixing
the velocity V though both meters. With the flow fixed, let us begin increasing the pressure,
and thus the density ρ. The mass flow meter, which is measuring the absolute pressure and
compensating for the density change registers this pressure increase as an increase in mass
flow rate because the number of molecules of gas keeps going up in the fixed volume of flow.
In addition, the Reynolds number has increased proportionately with the pressure increase
because the density goes up with the pressure. If you increase the pressure high enough,
the mass flow meter will max out at 100 SLPM, the Reynolds number has increased fairly
dramatically, and the volumetric meter still registers your small fixed flow rate.
Now if we maintain the higher pressure and try to take the volumetric meter up to its published
full scale flow of 100 LPM, our density ρ AND our velocity V will be high, which often results
in a high Reynolds number and non-laminar flow. When the flow is non-laminar, the Poiseuille
Equation upon which we base our volumetric flow measurement is no longer valid and the
meter reading is therefore no longer valid.
Gas properties also need to be taken into account in deciding whether you can use a volumetric
flow meter at a particular line pressure. Helium, which has a relatively low density and a
relatively high viscosity at standard conditions, can generally get away with higher pressures in
a volumetric flow meter. Propane, on the other hand, has a relatively high density and relatively
low viscosity making it a considerably more difficult gas to measure at higher pressures in a
volumetric flow meter. In air, most volumetric meters make valid full scale measurements up to
10-15 PSIG line pressure.

32
 TROUBLESHOOTING
Display does not come on or is weak.
Check power and ground connections.
Flow reading is approximately fixed either near zero or near full scale regardless of actual line
flow.
Differential pressure sensor may be damaged. Avoid installations that can subject sensor to pressure
drops in excess of 10 PSID. A common cause of this problem is instantaneous application of high‑pressure
gas as from a snap acting solenoid valve upstream of the meter. Damage due to excessive pressure
differential is not covered by warranty.
Displayed mass flow, volumetric flow, pressure or temperature is flashing and message MOV,
VOV, POV or TOV is displayed:
Our flow meters and controllers display an error message (MOV = mass overrange, VOV = volumetric
overrange, POV = pressure overrange, TOV = temperature overrange) when a measured parameter
exceeds the range of the sensors in the device. When any item flashes on the display, neither the
flashing parameter nor the mass flow measurement is accurate. Reducing the value of the flashing
parameter to within specified limits will return the unit to normal operation and accuracy.
After installation, there is no flow.
Alicat Scientific VC and MC controllers incorporate normally closed valves and require a set-point to
operate. Check that your set-point signal is present and supplied to the correct pin and that the correct
input is selected under the Input list in the control set up mode screen. Also check that the unit is
properly grounded.

The flow lags below the set-point.

Be sure there is enough pressure available to make the desired flow rate. If either the set-point signal line
and/or the output signal line is relatively long, it may be necessary to provide heavier wires (especially
ground wiring) to negate voltage drops due to line wire length. An inappropriate PID tuning can also
cause this symptom if the D term is too large relative to the P term.
Meter does not agree with another meter I have in line.
Volumetric meters will often not agree with one another when put in series because they are affected
by pressure drops. Volumetric flow meters should not be compared to mass flow meters. Mass flow
meters can be compared against one another provided there are no leaks between the two meters and
they are set to the same standard temperature and pressure. Both meters must also be calibrated (or
set) for the gas being measured. M Series mass flow meters are normally set to Standard Temperature
and Pressure conditions of 25° C and 14.696 PSIA. Note: it is possible to special order meters with a
customer specified set of standard conditions. The calibration sheet provided with each meter lists its
standard conditions.
Controller is slow to react to a set-point change or imparts an oscillation to the flow.
An inappropriate PID tuning can cause these symptoms. Use at conditions considerably different than
those at which the device was originally set up can necessitate a re-tuning of the PID loop.
The output signal is lower than the reading at the display.
This can occur if the output signal is measured some distance from the meter as voltage drops in the
wires increase with distance. Using heavier gauge wires, especially in the ground wire, can reduce this
effect.
My volumetric controller reading is strange, inconsistent, or incorrect.
Make sure you use a volumetric flow controller only under low pressure (close to atmospheric) and with
little to no back pressure for accurate readings. Mass controllers should be used for higher pressure
applications. See “Volumetric Flow Meters Under Pressure” page 31.

33
RS-232 Serial Communications is not responding.
Check that your meter is powered and connected properly. Be sure that the port on the computer to which
the meter is connected is active. Confirm that the port settings are correct per the RS-232 instructions
in this manual (Check the RS-232 communications select screen for current meter readings). Close
Hyperterminal® and reopen it. Reboot your PC.
Slower response than specified.
M and V Series meters feature an RS-232 programmable Geometric Running Average (GRA). Depending
on the full scale range of the meter, it may have the GRA set to enhance the stability/readability of
the display, which would result in slower perceived response time. If you require the fastest possible
response time, please consult the factory for written instructions on adjusting the GRA.
Jumps to zero at low flow.
M and V Series meters feature an RS-232 programmable zero deadband. The factory setting is usually
0.5% of full scale. This can be adjusted via RS-232 programming between NONE and 6.375% of full
scale. Contact the factory for more information.
Discrepancies between old and new units.
Please see “Standard Gas Data Tables” explanation on page 29.

Maintenance and Recalibration

General: MC and VC Series Flow Controllers require minimal maintenance. They have no moving
parts. The single most important thing that affects the life and accuracy of these devices is the quality
of the gas being measured. The controller is designed to measure CLEAN, DRY, NON-CORROSIVE
gases. A 20 micron filter (50 micron for 50LPM and up) mounted upstream of the controller is highly
recommended. Moisture, oil, and other contaminants can affect the laminar flow elements and/or reduce
the area that is used to calculate the flow rate. This directly affects the accuracy.
Recalibration: The recommended period for recalibration is once every year. Providing that the CLEAN,
DRY, and NON-CORROSIVE mantra is observed, this periodic recalibration is sufficient. A label located
on the back of the meter lists the recalibration due date. The meter should be returned to the factory for
recalibration near the listed due date. Before calling to schedule a recalibration, please note the serial
number on the back of the meter. The Serial Number, Model Number, and Date of Manufacture are also
available on the Manufacture Data 2 screen (page 16).
Cleaning: MC and VC Series Flow Controllers require no periodic cleaning. If necessary, the outside of
the controller can be cleaned with a soft dry rag. Avoid excess moisture or solvents.
For repairs, recalibrations, or recycling of this product, contact:
Alicat Scientific, Inc.
2045 N Forbes Blvd. Bldg.103
Tucson, Arizona 85745
USA
Ph. 520-290-6060
Fax 520-290-0109
email: [email protected]
Web site: www.alicatscientific.com

34
Technical Data for Micro-Flow and Ultra-Low Flow Mass & Volumetric Flow Controllers
0 to 0.5SCCM Full Scale through 0 to 50SCCM Full Scale

Specification Mass Controller Volumetric Controller Description

Accuracy ± (0.8% of Reading + 0.2% of Full Scale) At calibration conditions after tare
High Accuracy Option ± (0.4% of Reading + 0.2% of Full Scale) At calibration conditions after tare
Repeatability ± 0.2% Full Scale
Operating Range 1% to 100% Full Scale Measure
Typical Response Time 100 Milliseconds (Adjustable)
Standard Conditions (STP) 25ºC & 14.696PSIA Not Applicable Mass Reference Conditions
Operating Temperature −10 to +50 ºCelsius
Zero Shift 0.02% Full Scale / ºCelsius / Atm
Span Shift 0.02% Full Scale / ºCelsius / Atm
Humidity Range 0 to 100% Non–Condensing
Controllable Flow Rate 102.4% Full Scale
Maximum Pressure 145 145 1
PSIG
Mass, Volume, Pressure
Input /Output Signal Digital Volumetric Flow RS-232 Serial
& Temperature
Input / Output Signal Analog Mass Flow Volumetric Flow 0-5Vdc
Optional Input / Output Mass, Volume, Pressure 0-5 Vdc or 0-10Vdc or
Volumetric Flow
Signal Secondary Analog or Temperature 4-20mA
Electrical Connections 8 Pin Mini-DIN
Supply Voltage 12 to 30 Vdc (15-30Vdc for 4-20mA outputs)
Supply Current 0.250Amp
Mounting Attitude Sensitivity None
Warm-up Time <1 Second
303 & 302 Stainless Steel, Viton®, Silicone RTV (Rubber), Glass Reinforced
Wetted Materials2
Nylon, Aluminum, Brass, 410 Stainless Steel.
1. Volumetric meters only: Operating pressure limitations determined by Reynolds number thresholds. For
operating pressures >10PSIG, please contact the manufacturer for more details.
2. If your application demands a different material, please contact the manufacturer for available options.

Mechanical Specifications
Full Scale Flow
Full Scale Flow Mechanical Process Pressure Drop2
Volumetric
Mass Controller Dimensions Connections 1
(PSID)
Controller
0.5SCCM up to 0.5CCM up to
1.0
1SCCM 1CCM M-5 (10-32)
3.9”H x 3.4”W x 1.1”D
2SCCM up to 2CCM up to Female Thread*
1.0
50SCCM 50CCM
∗ Units ≤50SCCM F.S. are shipped with M-5 (10-32) Male Buna-N O-ring face seal to 1/8” Female NPT fittings.
These adaptor fittings were selected for customer convenience in process connection. It should be noted that
the 1/8” Female NPT introduces additional dead volume. To minimize dead volume, please see Accessories
for the 10-32 Male to 1/8”OD compression fitting.
1. Compatible with Beswick®, Swagelok® tube, Parker®, face seal, push connect and compression adapter
fittings.
2. Venting to atmosphere. Lower Pressure Drops Available, please contact the manufacturer.

Dimensional Drawings: page 39

35
 Technical Data for Low Flow Mass & Volumetric Flow Controllers
0 to 100SCCM Full Scale through 0 to 20SLPM Full Scale

Specification Mass Controller Volumetric Controller Description

Accuracy ± (0.8% of Reading + 0.2% of Full Scale) At calibration conditions after tare
High Accuracy Option ± (0.4% of Reading + 0.2% of Full Scale) At calibration conditions after tare
Repeatability ± 0.2% Full Scale
Operating Range 1% to 100% Full Scale Measure
Typical Response Time 100 Milliseconds (Adjustable)
Standard Conditions (STP) 25ºC & 14.696PSIA Not Applicable Mass Reference Conditions
Operating Temperature −10 to +50 ºCelsius
Zero Shift 0.02% Full Scale / ºCelsius / Atm
Span Shift 0.02% Full Scale / ºCelsius / Atm
Humidity Range 0 to 100% Non–Condensing
Controllable Flow Rate 102.4% Full Scale
Maximum Pressure 145 145 1
PSIG
Mass, Volume, Pressure
Input /Output Signal Digital Volumetric Flow RS-232 Serial
& Temperature
Input / Output Signal Analog Mass Flow Volumetric Flow 0-5Vdc
Optional Input / Output Mass, Volume, Pressure 0-5 Vdc or 0-10Vdc or 4-
Volumetric Flow
Signal Secondary Analog or Temperature 20mA
Electrical Connections 8 Pin Mini-DIN
Supply Voltage 12 to 30 Vdc (15-30Vdc for 4-20mA outputs)
Supply Current 0.250 Amp
Mounting Attitude Sensitivity None Tare after installation
Warm-up Time <1 Second
303 & 302 Stainless Steel, Viton®, Silicone RTV (Rubber), Glass Reinforced
Wetted Materials
Nylon, Aluminum, Brass, 410 Stainless Steel.
1. Volumetric meters only: Operating pressure limitations determined by Reynolds number thresholds. For
operating pressures >10PSIG, please contact the manufacturer for more details.
2. If your application demands a different material, please contact the manufacturer for available options.

Mechanical Specifications
Full Scale Flow
Full Scale Flow Mechanical Process Pressure Drop2
Volumetric
Mass Controller Dimensions Connections1 (PSID)
Controller
100SCCM to 100CCM to
1.0
500SCCM 500CCM
1SLPM 1LPM 1.5
4.1”H x 3.6”W x 1.1”D 1/8” NPT Female
5SLPM 5LPM 2.0
10SLPM 10LPM 5.5
20SLPM 20LPM 20.0
1. Compatible with Beswick®, Swagelok® tube, Parker®, face seal, push connect and compression adapter
fittings.
2. Venting to atmosphere. Lower Pressure Drops Available, please contact the manufacturer.

Dimensional Drawings: page 39

36
 Technical Data for Moderate Flow Mass & Volumetric Flow Controllers
0 to 50SLPM Full Scale through 0 to 100SLPM Full Scale
Specification Mass Controller Volumetric Controller Description
Accuracy ± (0.8% of Reading + 0.2% of Full Scale) At calibration conditions after tare
High Accuracy Option ± (0.4% of Reading + 0.2% of Full Scale) At calibration conditions after tare
Repeatability ± 0.2% Full Scale
Operating Range 1% to 100% Full Scale Measure
Typical Response Time 100 Milliseconds (Adjustable)
Standard Conditions (STP) 25ºC & 14.696PSIA Not Applicable Mass Reference Conditions
Operating Temperature −10 to +50 ºCelsius
Zero Shift 0.02% Full Scale / ºCelsius / Atm
Span Shift 0.02% Full Scale / ºCelsius / Atm
Humidity Range 0 to 100% Non–Condensing
Controllable Flow Rate 102.4% Full Scale
Maximum Pressure 145 145 1
PSIG
Mass, Volume, Pressure
Input /Output Signal Digital Volumetric Flow RS-232 Serial
& Temperature
Input / Output Signal Analog Mass Flow Volumetric Flow 0-5Vdc
Optional Input / Output Mass, Volume, Pressure 0-5 Vdc or 0-10Vdc or
Volumetric Flow
Signal Secondary Analog or Temperature 4-20mA
Electrical Connections 8 Pin Mini-DIN
Supply Voltage 24-30Vdc
Supply Current 0.750Amp
Control response somewhat sensitive to inverted
Mounting Attitude Sensitivity Tare after installation
operation.
Warm-up Time <1 Second
303 & 302 Stainless Steel, Viton®, Silicone RTV (Rubber), Glass Reinforced
Wetted Materials2
Nylon, Aluminum, Brass, 410 &416 Stainless Steel, Nickel.
1. Volumetric meters only: Operating pressure limitations determined by Reynolds number thresholds. For
operating pressures >10PSIG, please contact the manufacturer for more details.
2. If your application demands a different material, please contact the manufacturer for available options.

Mechanical Specifications
Full Scale Flow
Full Scale Flow Mechanical Process Pressure Drop2
Volumetric
Mass Controller Dimensions Connections1 (PSID)
Controller
50SLPM 50LPM 3.0
4.7”H x 7.5”W x 2.3”D 1/4” NPT Female
100SLPM 100LPM 3.0
1. Compatible with Beswick®, Swagelok® tube, Parker®, face seal, push connect and compression adapter
fittings.
2. Venting to atmosphere. Lower Pressure Drops Available, please contact the manufacturer.

Dimensional Drawings: page 40

37
 Technical Data for High Flow Mass & Volumetric Flow Controllers
0 to 250SLPM Full Scale through 0 to 1500SLPM Full Scale

Specification Mass Controller Volumetric Controller Description

Accuracy ± (0.8% of Reading + 0.2% of Full Scale) At calibration conditions after tare
High Accuracy Option ± (0.4% of Reading + 0.2% of Full Scale) At calibration conditions after tare
Repeatability ± 0.2% Full Scale
Operating Range 1% to 100% Full Scale Measure
Typical Response Time 100 Milliseconds (Adjustable)
Standard Conditions (STP) 25ºC & 14.696PSIA Not Applicable Mass Reference Conditions
Operating Temperature −10 to +50 ºCelsius
Zero Shift 0.02% Full Scale / ºCelsius / Atm
Span Shift 0.02% Full Scale / ºCelsius / Atm
Humidity Range 0 to 100% Non–Condensing
Controllable Flow Rate 102.4% Full Scale
Maximum Pressure 145 145 1
PSIG
Mass, Volume, Pressure
Input /Output Signal Digital Volumetric Flow RS-232 Serial
& Temperature
Input / Output Signal Analog Mass Flow Volumetric Flow 0-5Vdc
Optional Input / Output Mass, Volume, Pressure 0-5 Vdc or 0-10Vdc or
Volumetric Flow
Signal Secondary Analog or Temperature 4-20mA
Electrical Connections 8 Pin Mini-DIN
Supply Voltage 24 to 30 Vdc
Supply Current 0.750Amp
Control response somewhat sensitive to inverted
Mounting Attitude Sensitivity
operation.
Warm-up Time <1 Second
303 & 302 Stainless Steel, Viton®, Silicone RTV (Rubber), Glass Reinforced
Wetted Materials2
Nylon, Aluminum, 410 & 416 Stainless Steel, Nickel.
1. Volumetric meters only: Operating pressure limitations determined by Reynolds number thresholds. For
operating pressures >10PSIG, please contact the manufacturer for more details.
2. If your application demands a different material, please contact the manufacturer for available options.

Mechanical Specifications
Full Scale Flow
Full Scale Flow Mechanical Process Pressure Drop2
Volumetric
Mass Controller Dimensions Connections 1
(PSID)
Controller
250SLPM 250LPM 1/2” & 3/4” NPT Female 4.6
500SLPM 500LPM 6.5
5.0”H x 7.4”W x 2.3”D
1000SLPM 1000LPM 3/4” NPT Female 14.0
1500SLPM 1500LPM 17.0
1. Compatible with Beswick®, Swagelok® tube, Parker®, face seal, push connect and compression adapter
fittings.
2. Venting to atmosphere. Lower Pressure Drops Available, Please contact the manufacturer.

Dimensional Drawings: page 40, 41

38
        

MC & VC Series:
0 - 0.5SCCM
0 - 1SCCM 

0 - 2SCCM
0 - 5SCCM
0 - 10SCCM
0 - 20SCCM
0 - 50SCCM



 

    

 








 


No. Description Date


   
  


 
 
 
 
 Alicat Scientific, Inc.
  
     2045 N. Forbes Blvd. Suite 103 Tucson, AZ 85745
 


   520-290-6060 Ph. 520-290-0109 Fax
     
  
MC & VC Series:
  


       

0 - 100SCCM 

0 - 200SCCM
0 - 500SCCM
0 - 1SLPM
0 - 2SLPM
0 - 3SLPM
0 - 5SLPM
0 - 10SLPM 

0 - 20SLPM
   
  


    

 
 

 

   

  


Rev. No. Description Date



 
 
 
 
 Alicat Scientific, Inc.
  
 
39
   2045 N. Forbes Blvd. Suite 103 Tucson, AZ 85745
 


   520-290-6060 Ph. 520-290-0109 Fax
     
      
        

MC & VC Series:
0 - 50SLPM 

0 - 100SLPM

 

  

  

 
 



 
   




   


       

  
 
 

 Alicat Scientific, Inc.
MCR & VCR Series:
   
 

   2045 N. Forbes Blvd. Suite 103 Tucson, AZ 85745
 


   520-290-6060 Ph. 520-290-0109 Fax
 

0 - 250SLPM
   
      
       

 





 
 

 

 


 

  

*3/4” NPT to 1/2” NPT bushing commonly installed in this port.



Allow an extra 5/8” additional length for bushing.
 


 
 Alicat Scientific, Inc.
 
  
    2045 N. Forbes Blvd. Suite 103 Tucson, AZ 85745
   
  520-290-6060 Ph. 520-290-0109 Fax
   


    
   
40    
        

MCR & VCR Series:

0 - 500SLPM
0 - 1000SLPM
0 - 1500SLPM



 

 
   

  


 

 
 

Rev. No. Description Date
 
  
 
 

 Alicat Scientific, Inc.
   
     2045 N. Forbes Blvd. Suite 103 Tucson, AZ 85745
  
   520-290-6060 Ph. 520-290-0109 Fax

     
      
       

41
 Option: Totalizing Mode
16 Series Flow Meters and Controllers can be purchased with the Totalizing Mode option. This option
adds an additional mode screen that displays the total flow (normally in the units of the main flow
screen) that has passed through the meter or controller since the last time the totalizer was cleared.
The Totalizing Mode screen shown below is accessed by pushing the “MODE” button until the label
over it reads “Total”. If your meter or controller is ordered with Totalizing Mode option, pushing the
“Mode” button once will bring up the “Totalizing Mode” display. Pushing “Mode” a second time will bring
up the “Select Menu” display. Pushing it a third time will return you to the Main Mode Sreen.

Hours Mass Clear

0.3 0.00

Mass
SLtr
Air
+0.0 SCCM
Total

Counter – The counter can have as many as six digits. At the time of order, the customer must specify
the resolution of the count. This directly affects the maximum count. For instance, if a resolution of
1/100ths of a liter is specified on a meter which is totalizing in liters, the maximum count would be
9999.99 liters. If the same unit were specified with a 1 liter resolution, the maximum count would be
999999 liters.
Rollover – The customer can also specify at the time of order what the totalizer is to do when the
maximum count is reached. The following options may be specified:
No Rollover – When the counter reaches the maximum count it stops counting until the counter is
cleared.
Rollover – When the counter reaches the maximum count it automatically rolls over to zero and continues
counting until the counter is cleared.
Rollover with Notification – When the counter reaches the maximum count it automatically rolls over to
zero, displays an overflow error, and continues counting until the counter is cleared.
Hours.–.The display will show elapsed time since the last reset in 0.1 hour increments. The maximum
measurable elapsed time is 6553.5 hours (about nine months). The hours count resets when the “clear”
button is pushed, an RS-232 clear is executed or on loss of power
Clear – The counter can be reset to zero at any time by pushing the dynamically labeled “Clear” button
located above the upper right corner of the display. To clear the counter via RS-232, establish serial
communication with the meter or controller as described in the RS-232 section of the manual. To reset
the counter, enter the following commands:
In Streaming Mode: $$T <Enter>
In Polling (addressable) Mode: Address$$T <Enter> (e.g. B$$T <Enter>)

42
 Option: 9 Volt Battery Pack

A Battery Pack that uses a common 9 Volt battery can be mounted to the top of your 16 Series Flow
Meter or Pressure Guage. Power is passed from the battery to the flow meter through the 8 pin Mini‑DIN
connector. Output signals from the flow meter or pressure guage are passed through the male connector
on the bottom of the battery pack to the female connector on top of the battery pack so the signals can
be accessed normally. Turn the switch on top of the battery pack off when the meter is not in use. (Note:
The Battery Pack cannot be used with Flow or Pressure Controllers)

Normal (9V alkaline) battery life is approximately 8 hours (30-40 hours with a 9V-lithium battery),
however many factors can affect this. Replace the battery as often as required. A common indicator that
the battery may be approaching the end of its life is a sharp increase in the temperature indicated on the
meter. This false signal can result when the voltage drops below its normally regulated level. This can
affect the accuracy of the meter so it is good practice to check that the temperature is approximately
correct (25°C is about room temperature) or use a fresh battery, especially if the measurement is
critical.

Replacing the Battery:

The battery can be replaced with the battery pack installed on the flow meter.

1. Remove the four Phillips head screws from the back cover and gently remove it as shown below.
2. Remove the 9V battery, pulling the top of the battery out first.
3. Remove the old battery from the harness and replace it with a new battery.
4. Install the new battery bottom end first and replace the back cover so that the cushioning pad
presses directly down on the battery.
5. Replace the four Phillips head screws.

Battery Pack Back Cover Removal

43
Battery Pack Installation and Removal:

The battery must be removed before the battery pack can be installed or removed.

1. Remove the back cover of the battery pack and remove the battery if installed (see “Replacing the
Battery”).
2. Carefully place the battery pack on top of the flow meter, being especially careful that the pins in the
8 pin Mini-DIN plug are inserted properly into the 8 pin Mini-DIN socket on top of the flow meter. The
two screws trapped in the bottom of the battery pack will not allow the plug to be completely inserted
into the socket until they are screwed into place.
3. Slip the included hex wrench into either of the two holes on the top of the battery pack as shown
below and start the screw into the corresponding threaded hole in the top of the meter.
4. Before the screw is tightened down all the way, move the hex wrench to the other hole and tighten
the other screw gently down. Avoid over tightening the screw.
5. Return the hex wrench to the first hole and tighten the first screw gently down. Avoid over tightening
the screw.
6. Install the battery and replace the back cover as described above.
7. Removal is the reverse of the installation.

Wrench Access Hole

Wrench Access Hole

3/32 Hex Wrench

9 volt
battery

Trapped Mounting Screw Trapped Mounting Screw

8 Pin Mini DIN Plug

Back of
Meter

Battery Pack Installation/Removal

44
 Option: Local Set-Point Module
The Local Set-Point Module (LSPM) is designed to provide the user with a simple “turn of the dial”
method of changing a flow or pressure controller
set-point.

DC-62 Double Ended The LSPM features a set-point control dial, a digital
8Pin Mini-DIN Cable LED display which can be set to show either the
set-point or the actual process measurement, and
a tracking alarm LED which glows red whenever
the actual process measure­ment deviates from the
set-point by more than 2% of full scale. This device
is handy as a remote control/display device where
the controller is out of convenient reach or view.
It is supplied with a 6’ double ended cable to run
between the controller and the LSPM. There is an
additional 8 pin Mini-DIN port on the LSPM that
allows access to normal signal/power functions of
the controller’s Mini-DIN port.
• 8 Pin Mini-DIN connector connects to controller or to external device for power or output
signal recording
• LCD Display can display either the set-point or the process measurement.
• Set-point Adjustment Knob provides simple “dial it in” process changes.
• Display button switches display between actual set-point and measured flow parameter.
• LED indicator switches from green to red when the measured parameter deviates from the
set-point by more than 2% of full scale.
Operation Notes: The LSPM requires a double ended DC-62 8 Pin Mini-DIN cable connected
between either the top or bottom connector socket of the LSPM to the connector socket on top of
the controller. The two connector sockets on the LSPM are “pass through” connected so that the
unused socket can be connected to a DC-61 single ended cable for connection of output signals
and/or power. Appropriate power can be connected to either the LSPM or the controller, whichever
is more convenient. Unless specially ordered otherwise, the LSPM utilizes the 5.12 Vdc output pin
on the controller (pin 2) as a source. The 5.12 volts is connected through the potentiometer and
returned to the controller on the set-point pin (pin 4) as a 0 though 5.12 Vdc input signal depending
on the position of the adjustment knob.

2.992

1.050
2.375 .670

45
 Option: Remote Electronics for High Line or Gas Temperatures
Some applications involve operating temperatures outside the standard Alicat device specifications. A
solution using remote electronics is available.
The flow body’s components are minimized to only the required sensors. The flow data is sent to
the microprocessor electronics up to 6 feet away from the sensor package. Relocating the sensitive
electronics, including the LCD, allows for installation of the flow body in ambient temperatures as high
as 85° Celsius with gas temperatures under 100°Celsius.

Maximum distance
between electronics
and sensor package is
6 feet.

In these applications we recommend our custom gauge calibration at a gas temperature of up to

70°Celsius. This will reduce zero shift errors that occur when actual gas flow temperatures deviate
substantially from the gas calibration temperature. This configuration is also used in integrations that
require a compact flow package at the installation point.

Accessory: BB-9 Multi-Drop Box

The BB-9 Multi-Drop Box makes it convenient to wire multiple flow and/or pressure
devices to a single RS‑232 port.
The Multi-Drop Box has nine 8 pin mini-DIN ports available. The ports are to be used
with a standard double ended 8 pin mini-DIN (DC-62) style cable going from the box
to each flow or pressure device. A single DB9 D-SUB type connector (COM PORT)
connects, using the included cable, to the serial connector on a PC or laptop.
All of the flow and/or pressure devices are powered via a terminal block on the front
of the box.
If more than nine devices will be required, additional Multi-Drop Boxes can be daisy chained together
with a double ended 8 pin mini-DIN cable plugged into any receptacle on both boxes.

Accessory: RS-232 to RS-485 Converter

Since most computers have RS-232 communication onboard, Alicat has chosen RS‑232 as the digital
standard on all of its flow instruments. For those using RS-485 as their primary standard, our RS‑232
to RS-485 converter will allow interface between an RS-485 system and Alicat’s flow instrumentation.

46
 Accessory: Flow Vision™ Software

Flow Vision™ is an intuitive software interface to help your

experimental test cycles run smoother and make your integration
engineering time shorter! This easy to use software features a
simple graphical user interface, multiple device management
capabilities and straightforward script building for controller
command sequences.
Automatic Configuration: Automatically finds and configures
Alicat devices connected to your computer.
Session Saving: Your current configuration data can be saved
and reloaded for ease of experiment repetition.
Data Capturing & Logging: Captures data from your flow or
pressure units and logs it in a Microsoft® Excel© file or plain text
file – making it easy to graph and track your test data.
Script Building: Allows you to create scripts that change or
sample your flow or pressure unit’s setting at timed intervals.
Flow Vision™ supports all RS-232 Serial Communications, including quick selection of the calibration for
individual gas selectability and our popular end user access to the terms of the PID loop tuning

Flow Vision™ mimics Alicat’s

Standard Dynamic Displays on
your PC. Use your mouse to
execute all membrane switch
functions and more!

Flow Vision™ supports multiple devices connected to the same

RS232 port. Simply connect each device to a BB-9 Multi‑Drop Box, BB-9
then using the device addressability, assign an identifier to each
unit. Now you can easily control and monitor varying flow rates for
gas mixing, gas analysis, combined testing of multiple parts and
other applications.

Flow Vision™’s Graphing Utility continuously displays the data

points of the main parameter selected. The graph auto scales the Y‑axis
for the range of the selected parameter. Includes easy pause, run, stop
and print features.

Flow Vision™ System Requirements:

Microsoft ® Windows ® 2000 or Windows ® XP ♦ 2MB hard disk space
Available serial port (Some laptop computers are not equipped with serial ports. A virtual serial
port can be created using a USB to Serial adapter)

47
 Accessories
Part Number Description
FVISION Flow Vision™ software for interface with all Alicat instruments
BB-9 Multi-Drop Box
REMOTE Remote electronics with display
LSPM Local Set-Point Module (Controllers Only)
BPACK 9 volt battery pack (Meters and Gauges Only)
PCASE Industrial carry and storage case for portable meters/gauges
DC-61 8 Pin Male Mini-DIN connector cable, single ended, 6 foot length
DC-62 8 Pin Male Mini-DIN connector cable, double ended, 6 foot length
DC-251 8 Pin Male Mini-DIN connector cable, single ended, 25 foot length
DC-252 8 Pin Male Mini-DIN connector cable, double ended, 25 foot length
DC-6RT 8 Pin Male Right Angle Mini-Din Cable, single ended, 6 foot length
MD8DB9 8 Pin Male Mini-DIN to DB9 Female Adapter, 6 foot length
IC-10 Industrial cable, 6 Pin, single ended, 10 foot length
PVPS AC to DC 12 Volt Power Supply Adapter
PVPS24 AC to DC 24 Volt Power Supply Adapter
PVPSE AC to DC 12 Volt European Power SupplyAdapter
PVPSE24 AC to DC 24 Volt European Power Supply Adapter
RS485-KIT RS-232 to RS-485 Converter
RD Remote Panel Mount Display

ALICAT DEVICE PROCESS CONNECTION

M-5 (10-32) 1/8” 1/4” 1/2” 3/4”
COMPRESSION
FITTING
1/8” SS-200-1-0157 SS-200-1-2 SS-200-1-4 SS-200-1-8
1/4” SS-400-1-0256 SS-400-1-2 SS-400-1-4 SS-400-1-8 SS-400-1-12
1/2” SS-810-1-2 SS-810-1-4 SS-810-1-8 SS-810-1-12
3/4” SS-1210-1-8 SS-1210-1-12
3mm SS-3M0-1-2 SS-3M0-1-4
4mm SS-4M0-1-2 SS-4M0-1-4
6mm SS-6M0-1-2 SS-6M0-1-4 SS-6M0-1-8
8mm SS-8M0-1-2 SS-8M0-1-4 SS-8M0-1-8
12mm SS-12M0-1-2 SS-12M0-1-4 SS-12M0-1-8 SS-12M0-1-12
16mm SS-16M0-1-8 SS-16M0-1-12
FILTER
10 micron 2F-F2L-10-B
20 micron CF-303-20-316
50 micron 2F-F2L-50-B 4F-F4L-50-B 8F-F8L-50-B 12F-F12L-50-B

ADAPTER 410133 Male M-5 (10-32) Buna-N O-ring face seal to 1/8”Female NPT

48