Application Note #25

Parts-Per-Trillion Moisture Detection in

Electronic-Grade Bulk Gases
HALO KA Max H2O • HALO KA H2O

GASES & CHEMICALS CEMS ENERGY SEMI & HB LED ATMOSPHERIC LAB & LIFE SCIENCE

This application note discusses how Tiger Optics' ultra-trace of computing power to process the input from cameras and
moisture analyzers help semiconductor manufacturers ensure sensors in real-time; and the necessary high-performance
purity of their bulk gases. We take a look at the drivers for the processors must be both reliable and power-efficient.
semiconductor industry pushing analyzer performance to
The Demand for Higher-Quality Gases and Better Analytics
new heights, and we show how Tiger's latest H2O analyzer,
the HALO KA Max H2O, meets this challenge by reaching To meet the challenges of these new applications, the
unprecedented levels of detection sensitivity and speed of semiconductor industry's International Roadmap for Devices
response. and Systems (IRDS)¹ outlines manufacturing quality as one
key aspect; therefore, semiconductor device manufacturers
Modern Applications Propelling Semiconductor are implementing more stringent control into all aspects of
Manufacturing the manufacturing process, from the cleanroom environment
The semiconductor market is seeing a new era of and the wafer processing tools to the raw materials used for
innovation, with new applications fueling demand for production, many of which are gases. Consequently, improved
advanced semiconductor devices that put more stringent gas quality control is one of the most important measures that
requirements on reliability, power handling capability and are employed by semiconductor fabs to increase yields and
power consumption, while packing more functionality into reduce failure rates.
a smaller package and decreasing technology nodes. Among With the need to monitor and ensure stricter and more
these demanding applications are increasingly more powerful consistent gas quality comes a demand for more sensitive
smartphones and tablets that aim—at the same time—to and accurate analytical technologies. At the same time, speed
improve battery life. More recently, automotive sensor systems, of response has become more important as well, as fab
the Internet of Things (IoT), the next generation of wireless operators rely heavily on real-time process control to increase
communication (5G), and smart power grids have emerged throughput.
as applications with enormous expansion potential over the Tiger Optics has been serving the semiconductor industry
coming years and decades. Future self-driving vehicles (as since its inception in 2001 with its array of laser-based moisture
illustrated in Figure 1), for instance, require massive amounts analyzers. In many state-of-the-art semi fabs, Tiger’s Cavity
Ring-Down Spectroscopy (CRDS) analyzers are the gold
standard for ensuring quality of the major bulk gases that are
used in the manufacturing process, which are typically N2,
CDA, O2, H2, Ar, and He. With H2O as one of the most critical gas
impurities, Tiger’s analyzers serve a crucial role in the fab due to
their ultimate sensitivity, fast speed of response, and excellent
reliability.
A Sticky Situation—The Difficulty of Trace H2O Detection
H2O is a high priority for gas quality control in a fab, as it is
very destructive to processes and one of the most difficult
contaminants to avoid due to its prevalence. From an analytical
point of view, moisture detection in gases tends to be a difficult
task owing to the molecule's tendency to stick to surfaces. For
analytical techniques that rely on physical interaction with the
H2O molecule, it is therefore very hard to achieve fast speed
of response. Furthermore, detection limit requirements are
stringent for semiconductor device manufacturing, ranging
from low-part-per-billion (ppb) levels down to well into the
Fig. 1 Artistic illustration of a future self-driving vehicle.
 GASES & CHEMICALS CEMS ENERGY SEMI & HB LED ATMOSPHERIC LAB & LIFE SCIENCE

parts-per-trillion (ppt), which is beyond the sensitivity limit of

many trace detection technologies.
The most critical aspects of a successful moisture
measurement for this application are:
1. Sensitivity & Accuracy of Zero Baseline
2. Baseline Stability
3. Speed of Response
Accuracy of Zero Baseline
Having a true zero is essential to ensure the analyzer’s baseline
accuracy. Most traditional analyzers rely on a zero gas to
calibrate the instrument’s baseline. But at ppt-levels of H2O,
is there really such a thing as a “zero gas”? While modern
purifiers are quite effective in removing moisture, such low Fig. 2 Tiger Optics’ state-of-the-art HALO KA H2O trace moisture
H2O levels are typically below most purifiers’ manufacturer analyzer (left) and the next-generation HALO KA Max H2O (right).
specifications. Consequently, measurement techniques that This is not the case with Tiger's systems. A direct result of
rely on calibration using a zero gas can struggle to obtain an the time-based and absolute nature of CRDS, any significant
accurate zero due to the difficulty of removing H2O completely sources of drift, such as environmental factors or laser drift,
from the “zero gas”. In contrast, Tiger’s CRDS systems do not cancel out during the measurement, making the analyzer
rely on a zero gas measurement to obtain the instrument’s baseline drift-free within the analyzer's LDL specification.
zero calibration. Tiger's analyzers use a “spectroscopic zero”, Consequently, all real residual H2O in the ultra-high-purity gas
a wavelength where H2O does not absorb, to determine the will still show up in the analyzer as a true reading rather than
true measurement baseline, independent of the presence of being "calibrated out".
H2O in the gas. During measurement operation, the analyzer
Speed of Response
continuously references the concentration readings against this
Moisture’s stickiness also causes most H2O analyzers to exhibit
true zero to maintain absolute accuracy.
slow speed of response. Modern fabs, however, prefer to
Baseline Stability monitor and control their processes in real-time, which makes
Another critical aspect of trace moisture measurement is the fast detection of impurity upsets or other issues essential.
long-term stability of an instrument’s zero. Most traditional CRDS has been proven in the field to be superior in this
analyzers experience drift in their calibration, which requires respect because it is a purely optical, non-contact detection
periodic "re-zeroing" of the analyzer. So what happens if the method that does not rely on a physical interaction with the
zero gas is slowly increasing its moisture content? Such a H2O molecule (unlike electrolytic or crystal-based moisture
"moisture creep" can easily be caused by a failing purifier; and analyzers, for instance). Therefore, there is no interaction time
a slow rise in H2O may be indistinguishable from instrument that may limit the analyzer’s response. Furthermore, Tiger
drift. In this case, the periodic zeroing of the analyzer leads Optics has worked consistently to improve response time by
to a moving offset that can mask a slow but real increase in limiting internal volume and surface area, applying advanced
moisture levels in your sample gas. Thus, a potential threat to surface treatment, and optimizing gas flow, thus offering speed
your process can become undetectable. of response of only a few minutes rather than hours.
Tab. 1 HALO KA Max H2O and HALO KA H2O detection specifications These profound advantages are the main reasons that make
Tiger Optics' moisture analyzers the most accurate and reliable
HALO KA Max H2O HALO KA H2O systems to monitor the incoming bulk gases in a semiconductor
Gas Detection Precision (1σ) Detection Precision (1σ) fab. Consequently, the SEMI organization outlines CRDS as the
Matrix Limit (LDL)* @ zero Limit (LDL)* @ zero standard technique for qualifying piping and measuring trace
H2O in bulk gases in SEMI F112.²
In N2 40 ppt 300 ppt 100 ppt
HALO KA and HALO KA Max—The Premium Choices for Semi
In He 10 ppt 100 ppt 20 ppt
Bulk Gas Monitoring
In Ar 20 ppt 130 ppt 45 ppt With modern semiconductor fabs seeking the highest levels
100 ppt
In H2 30 ppt 200 ppt 70 ppt of performance and reliability, Tiger Optics' premium moisture
analyzers are excellent choices to consistently achieve
In O2 20 ppt 150 ppt 50 ppt
maximum yield and throughput. Table 1 shows a summary of
In CDA 30 ppt 300 ppt 100 ppt the detection limit and zero precision specifications for the
*defined as the larger of 3σ over 24 hours or the dry-down limit
HALO KA H2O and the HALO KA Max H2O.
 GASES & CHEMICALS CEMS ENERGY SEMI & HB LED ATMOSPHERIC LAB & LIFE SCIENCE

limit) in all of the major semi bulk gases. This new performance
benchmark makes the HALO KA Max the new flagship among
Tiger’s line of trace moisture analyzers (shown in Figure 3).
To illustrate the HALO KA Max’s excellent baseline
performance, Figure 4 shows a reading in dry N2 over an 18-
hour timeframe (black trace). The measurement demonstrates
the HALO KA Max’s capability to measure comfortably below
100 ppt, which actually challenges the ability of most sampling
systems to achieve such a low H2O level. Even more impressive
is the analyzer’s precision at near-zero levels (measured as
1σ), which is only 12 ppt in this example. The HALO KA Max’s
guaranteed specifications call out a precision at zero of
40 ppt in N2 and as low as 10 ppt in He. For comparison, the
Fig. 3 Tiger Optics’ lineup of trace moisture analyzers red trace shows the baseline performance of the HALO KA,
which also demonstrates excellent performance well below
HALO KA H2O—The State-of-the-Art Moisture Analyzer 1 ppb, exhibiting a measurement precision (1σ) of 74 ppt with a
for Modern Semi Fabs. Most advanced semiconductor fabs guaranteed precision specification of 100 ppt in N2.
employ Tiger Optics' CRDS trace H2O analyzers as the preferred The key to the HALO KA Max's excellent detection limit is
technology to comply with SEMI F112 standard. The analyzer of its entirely new electronic and optical platform, allowing the
choice for many fabs is the HALO KA H2O (Figure 2, left). With analyzer to operate with lower measurement noise. In addition,
a detection limit of 300 ppt in N2 (specified as 3σ over a 24- however, the new platform has more computing power, an
hour period) and even lower in other bulk gases, the KA fits the optimized flow path, and improved wetted materials, allowing
needs of most advanced semiconductor fabs. In addition, the also for enhanced speed of response. This is important for
HALO KA saves significant space in the analyzer rack compared preserving the analyzer’s real-time detection capability when
to the competition, since two analyzers fit within one 19” slot. In approaching low-ppt H2O levels. Moisture dry-down time
addition to high performance and reliability, the HALO KA also increases exponentially with lower concentrations. At some
delivers fabs considerable savings in operating cost, with no point, the analyzer's speed of response would become too
requirements for maintenance, field calibration or spare parts. slow to be useful for real-time process control. The HALO KA
HALO KA Max H2O—Tiger’s New Flagship H2O Analyzer. Tiger Max’s optimized design allows it to exhibit a speed of response
Optics' new HALO KA Max (Figure 2, right) is an ideal choice at ppt to ppb levels that other instruments only achieve at
for electronic gas makers and semiconductor manufacturers much higher concentrations. Figure 5 illustrates this fact
requiring detection limits for H2O below 100 ppt. This next- impressively by simulating a process control situation with
generation analyzer touts both lower detection limits and faster a 1 ppb control limit and occasional H2O spikes of only a few
speed of response. It is Tiger Optics’ first moisture analyzer parts per billion (denoted by the orange markers). Not only does
that offers a detection limit of 100 ppt (3σ/24h or dry-down the HALO KA Max’s sensitivity pick up even the smallest spike

Fig. 4 HALO KA Max baseline reading in dry N2 over 18 hours showing Fig. 5 Demonstrating the HALO KA Max’s response to moisture spikes
consistent performance below 100 ppt of moisture. at low ppb levels with a simulated process control limit of 1 ppb.
 GASES & CHEMICALS CEMS ENERGY SEMI & HB LED ATMOSPHERIC LAB & LIFE SCIENCE

Cavity Ring-Down Spectroscopy

Gas in
Detector All Tiger Optics instruments are based on CRDS. The key
components of the CRDS system are shown in Figure 6.
99% CRDS works by tuning laser light to a unique molecular
Laser light Gas out
source Highly reflective fingerprint of the sample species. By measuring the time it
mirrors takes the light to decay or “ring-down”, you receive an accurate
Beam 1%
molecular count in milliseconds. The time of light decay, in
splitter
essence, provides an exact, non-invasive, and rapid means to
Laser lock cell detect contaminants.
with detector

Fig. 6 Principle of CRDS

Tiger Optics Overview
Founded in 2001, Tiger Optics has been the preferred provider
without any ambiguity, but its incredible speed of response at for high-performance, laser-based gas analyzers to advance
such low levels also instantly displays the upset. This means industrial standards and enable cutting-edge research. By
that your process can be protected immediately from the leveraging the expertise of scientists, engineers and industry
excess moisture. Once the H2O source is removed, the analyzer specialists, we offer advanced total solutions, field support,
also returns back to below the control limit within minutes, so analyzer training, and advice to help customers improve yields
the process can resume with minimal delay. While the HALO KA and reduce costs. By creating out-of-the-box solutions that
Max performs this exercise with considerable ease, it should deliver fast, reliable and stable measurements, Tiger Optics
be noted that most other analyzers would neither have the supports continuous innovation for gas & chemical production,
sensitivity nor the speed to respond these simulated moisture semiconductor fabrication, and many other markets.
upsets with the same kind of precision.
First ISO-Certified CRDS Company
Conclusion
Tiger Optics is the first CRDS company
In summary, Tiger's current portfolio of ultra-trace moisture certified to the ISO 9001:2008 and
analyzers allows modern semiconductor fabs to protect their the current ISO 9001:2015 standard of
processes from upsets in their gas quality more efficiently process consistency and continuous
and reliably than ever before. By employing the HALO KA H2O quality improvement.
and the HALO KA Max H2O, fabs are ready to meet the quality
demands for present and upcoming high-performance devices.
©Tiger Optics, LLC • Ver. 11/2020

References

¹IEEE Standards Association, International Roadmap for Devices and Systems (IRDS), https://irds.ieee.org/
²SEMI International Standards, SEMI F112-0613 - Test Method for Determination of Moisture Dry-Down Characteristics of Surface-
Mounted and Conventional Gas Delivery Systems by Cavity Ring Down Spectroscopy (CRDS), http://ams.semi.org/ebusiness/
standards/SEMIStandardDetail.aspx?ProductID=211&DownloadID=3085.

Tiger Optics, LLC

275 Gibraltar Road, Horsham, PA 19044
Phone: +1 (215) 656 4000 • Fax: +1 (215) 343 7168
[email protected] • www.tigeroptics.com