PL850 - Kalrez-PL850-Technical-Data-Sheet-KZE-A40133-00-A0123.FinalRev

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DuPont™ Kalrez® PL850

Perfluoroelastomer Parts for Semiconductor Plasma Applications

Product Description
Kalrez® PL850 is a versatile perfluoroelastomer product developed for a broad spectrum of vacuum applications where
seals are exposed to harsh plasma conditions generated by Fluorine, Oxygen, Chlorine, or Hydrogen-based chemistries.
Constructed with high purity building blocks designed to resist damage by aggressive plasma at temperatures up to
220 °C (428 °F), PL850 offers an effective all-around sealing solution, not only to legacy, but also to advanced Deposition,
Etch and Strip applications. Backed by extensive test data reproducing physical stresses, heat aging, and plasma exposure
environments, PL850 is a suitable solution to enable shorter customer qualification cycles with a high confidence in
successful long-term sealing performance.

Suggested Applications
• Gas feed lines and chamber nozzles • Pendulum and isolation valves
• NW & KF flange fittings in remote plasma delivery lines • KF flange fittings in exhaust lines
• Process chamber: Lid, Showerhead, Stack, Body, ESC, Door

Typical Physical Properties1 Kalrez® PL850


Color White
Maximum Service Temperature2, °C (°F) 220 (428)
Hardness, Durometer Shore A3 72
100% Modulus4, MPa (psi) 4.40 (638)
Tensile Strength at Break4, MPa (psi) 14.10 (2045)
Elongation at Break4, % 204
Compression Set5, %, 70 h at 204 °C (400 °F) 47

1 Not to be used for specifications


2 DuPont proprietary test method; performance will vary with seal design and application specifics
3 ASTM D2240 (Plied slab test specimens)
4 ASTM D412, 500 mm/min (AS568A size -214 O-ring test specimens)
5 ASTM D395B (AS568A size -214 O-ring test specimens)

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The information set forth herein is furnished free of charge, is based on technical data that DuPont believes to be reliable, and represents typical values
dupont.com that fall within the normal range of properties. This information relates only to the specific material designated and may not be valid for such material
used in combination with other materials or in other processes. It is intended for use by persons having technical skill, at their own discretion and risk.
This information should not be used to establish specification limits nor used alone as the basis of design. Handling precaution information is given with
the understanding that those using it will satisfy themselves that their particular conditions of use present no health or safety hazards and comply with
applicable law. Since conditions of product use and disposal are outside our control, we make no warranties, express or implied, and assume no liability
in connection with any use of this information. As with any product, evaluation under end-use conditions prior to specification is essential. Nothing herein
is to be taken as a license to operate or a recommendation to infringe on patents.

CAUTION: Do not use DuPont materials in medical applications involving implantation in the human body or contact with internal body fluids or tissues
unless the material has been provided from DuPont under a written contract that is consistent with the DuPont policy regarding medical applications and
expressly acknowledges the contemplated use. For further information, please contact your DuPont representative.

DuPont’s sole warranty is that our products will meet our standard sales specifications in effect at the time of shipment. Your exclusive remedy for breach
of such warranty is limited to refund of purchase price or replacement of any product shown to be other than as warranted. TO THE FULLEST EXTENT
PERMITTED BY APPLICABLE LAW, DUPONT SPECIFICALLY DISCLAIMS ANY OTHER EXPRESS OR IMPLIED WARRANTY OF FITNESS FOR A PARTICULAR
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© 2023 DuPont. All rights reserved. Reference No. KZE-A40133-00-A0123

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