ADVANCED MATERIALS HANDLING

FluoroLine®
Ultrapure PFA
Tubing
High-purity, PFA tubing excels in
ultrapure, chemically corrosive
applications
Entegris offers a complete line of tubing to satisfy your need
for an ultraclean, leak-free fluid delivery network. Made from
high-purity PFA material, our tubing withstands your harshest,
chemically corrosive applications. Sizes range from 1/16" to 1
1/2" and 40 mm, and many material options provide flexibility
to meet any fluid system design. For extreme purity needs, we
offer an ultraclean (UC) tube product that has the lowest total Enables an ultraclean, leak-free fluid delivery network.
metal extractables and least amount of surface
contamination.

APPLICATIONS

• High-purity, corrosive chemical handling

• Semiconductor applications including photolithography, bulk

chemical delivery, CMP, WEC

• Chemical delivery in life sciences applications

• Solar, LED, flat panel display

• Excellent performance with low surface tension chemistries

FEATURES & BENEFITS

Made from high purity, 100% PFA material Resistant to highly corrosive, high-purity chemical environments

Manufactured in an ISO certified, Class 7 clean Controls manufacturing process and maintains tubing cleanliness
environment

Meets SEMI® F57-0314 specifications Assures tubing cleanliness, maintaining process integrity in liquid chemical distribution
systems

Excellent optical clarity Allows visual inspection of chemical flowing in the system

Optional ultraclean (UC) tubing available Provides the lowest metal extractable levels and the least amount of surface
contamination, maintaining process purity
SPECIFICATIONS

Size Tube size OD Wall thickness Material options

1/16" 0.062" ±0.003" (1.57 mm ±0.08 0.015" ±0.003" (0.38 mm ±0.08 Chemours 440
mm) mm)

1/8" 0.125" ±0.003" (3.18 mm ±0.08 0.030" ±0.004" (0.76 mm ±0.10 Chemours 440, 450
mm) mm)

3/16" 0.188" ±0.003" (4.76 mm ±0.08 0.030" ±0.004" (0.76 mm ±0.10 Chemours 440, 450
mm) mm)

6 mm 6 mm ±0.10 mm 1.20 mm ±0.10 mm Chemours 440

1/4" 0.250" ±0.004" (6.35 mm ±0.10 0.030" ±0.004" (0.76 mm ±0.10 Chemours 440, 450
mm) mm)

1/4" 0.250" ±0.004" (6.35 mm ±0.10 0.047" ±0.004" (1.19 mm ±0.10 Chemours 440, 450, 950, Daikin
mm) mm)1 AP231SH

1/4" 0.250" ±0.004" (6.35 mm ±0.10 0.062" ±0.005" (1.57 mm ±0.13 Chemours 440, 450
mm) mm)

8 mm 8 mm ±0.10 mm 1.20 mm ±0.10 mm Chemours 440

5/16" 0.312" ±0.004" (7.92 mm ±0.10 0.030" ±0.004" (0.76 mm ±0.10 Chemours 440, 450
mm) mm)

3/8" 0.375" ±0.004" (9.52 mm ±0.10 0.030" ±0.004" (0.76 mm ±0.10 Chemours 440, 450
mm) mm)

3/8" 0.375" ±0.004" (9.52 mm ±0.10 0.062" ±0.005" (1.57 mm ±0.13 Chemours 440, 450, 950, Daikin
mm) mm)1 AP231SH

10 10 mm ±0.10 mm 1.60 mm ±0.13 mm Chemours 440

mm

12 12 mm ±0.10 mm 1.60 mm ±0.13 mm Chemours 440

mm

1/2" 0.500" ±0.005" (12.70 mm 0.030" ±0.004" (0.76 mm ±0.10 Chemours 440, 450
±0.13 mm) mm)

1/2" 0.500" ±0.005" (12.70 mm 0.062" ±0.005" (1.57 mm ±0.13 Chemours 440, 450, 950, Daikin
±0.13 mm) mm)1 AP231SH

3/4" 0.750" ±0.005" (19.05 mm 0.062" ±0.005" (1.57 mm ±0.13 Chemours 440, 450, 950, Daikin
±0.13 mm) mm) AP231SH

1" 1.000" ±0.005" (25.40 mm 0.062" ±0.005" (1.57 mm ±0.13 Chemours 440, 450, 950, Daikin
±0.13 mm) mm) AP231SH

1 1/4" 1.250" ±0.007" (31.75 mm ±0.18 0.075" ±0.007" (1.90 mm ±0.18 Chemours 440, 450
mm) mm)

1 1/2" 1.500" ±0.007" (38.10 mm 0.086" ±0.007" (2.18 mm ±0.18 Daikin AP231SH
±0.18 mm) mm)

40 40 mm ±0.18 mm 0.086" ±0.007" (2.18 mm ±0.18 Chemours 450, Daikin AP231SH

mm mm)
1
Standard for PrimeLock® and Flaretek® fittings

2
SPECIFICATIONS

Size Tube size OD ID Minimum bend MOQ Maximum roll Maximum reel
radius length length

1/16" 0.062" (1.57 0.032" (0.81 0.4" (10 mm) 100 100 ft NA
mm) mm) ft

1/8" 0.125" (3.18 0.065" (1.65 0.5" (13 mm) 500 500 ft 5000 ft
mm) mm) ft

3/16" 0.188" (4.76 0.127" (3.23 1.0" (25 mm) 500 500 ft 3000 ft
mm) mm) ft

6 mm 6 mm 3.6 mm 40 mm 500 500 ft 5000 ft

ft

1/4" 0.250" (6.35 0.190" (4.83 2.0" (51 mm) 500 500 ft 2500 ft
mm) mm) ft

1/4" 0.250" (6.35 0.156" (3.96 1.5" (38 mm) 500 500 ft 2500 ft
mm) mm) ft

1/4" 0.250" (6.35 0.126" (3.20 1.5" (38 mm) 500 500 ft 2500 ft
mm) mm) ft

8 mm 8 mm 5.6 mm 40 mm 500 500 ft 2000 ft

ft

5/16" 0.312" (7.92 0.252" (6.40 2.2" (56 mm) 500 500 ft 2000 ft
mm) mm) ft

3/8" 0.375" (9.52 0.315" (8.00 3.5" (89 mm) 500 500 ft 5000 ft
mm) mm) ft

3/8" 0.375" (9.52 0.251" (6.38 2.0" (51 mm) 500 500 ft 5000 ft
mm) mm) ft

10 10 mm 6.8 mm 50 mm 500 500 ft 3500 ft

mm ft

12 12 mm 8.8 mm 70 mm 500 500 ft 4000 ft

mm ft

1/2" 0.500" (12.70 0.440" (11.18 5.0" (127 mm) 500 500 ft 2000 ft
mm) mm) ft

1/2" 0.500" (12.70 0.376" (9.55 2.3" (58 mm) 500 500 ft 4000 ft
mm) mm) ft

3/4" 0.750" (19.05 0.626" (15.90 9.0" (229 mm) 250 250 ft 1500 ft
mm) mm) ft

1" 1.000" (25.40 0.876" (22.25 11.0" (279 mm) 250 250 ft 750 ft
mm) mm) ft

1 1/4" 1.250" (31.75 1.100" (27.94 12.5" (318 mm) 500 NA2 500 ft
mm) mm) ft

1 1/2" 1.500" (38.10 1.328" (33.73 22.5" (572 mm) 500 NA2 500 ft
mm) mm) ft

40 40 mm 1.398" (35.51 22.5" (572 mm) 500 NA2 500 ft

mm mm) ft
2
Sold in full reels only

3
SPECIFICATIONS

Laser Marking Codes

ENTEGRIS 440 4 0123456789

Material OD Size Work Order Number

440 = FluoroLine AT high purity PFA 4 = 1/4" (6.4 mm) Work order number traceable to a
specific material lot number, date
manufactured, and production
inspection record

450 = FluoroLine UAT high purity PFA 5 = 5/16" (7.9 mm)

950 = FluoroLine XAT high purity PFA 6 = 3/8" (9.5 mm)

231 = FluoroLine XKT high purity PFA 8 = 1/2" (12.7 mm)

12 = 3/4" (19.1 mm)

16 = 1" (25.4 mm)

20 = 1 1/4" (31.8 mm)

24 = 1 1/2" (38.1 mm)

25 = 1.57" (40 mm)

Maximum Pressure Rating Chart

FluoroLine Ultrapure PFA Tubing

Maximum pressure capabilities of various sizes are listed below. (Flaretek nut ratings are included as a reference.) These ratings are provided
as a guide in system design. The component with the lowest maximum pressure rating determines your system maximum pressure rating.

PVDF Nut PFA Nut CPFA Nut FlareLock® II PFA

Temperature FL(X)-1 FL(X)-3 FL(X)-6 Nut FL(X)II-3 psig FluoroLine Ultrapure PFA
Size (X) °F (°C) psig (kPa) psig (kPa) psig (kPa) (kPa) Tubing psig (kPa)

1/4" 75 (24) 225 (1551) 225 225 (1551) 225 (1551) 273 (1882)
(1551)

200 (93) 133 (917) 133 (917) 133 (917) 144 (993) 136 (938)

250 (121) 100 (689) 100 (689) 100 (689) 120 (827) 85 (586)

300 (150) 75 (517) 75 (517) 75 (517) 95 (655) 61 (421)

350 (175) N/R 50 (345) 50 (345) 70 (483) 36 (248)

400 (200) N/R N/R 15 (103) 45 (310) N/R

3/8" 75 (24) 225 (1551) 225 225 (1551) 225 (1551) 234 (1613)
(1551)

200 (93) 133 (917) 133 (917) 133 (917) 144 (993) 116 (800)

250 (121) 100 (689) 100 (689) 100 (689) 120 (827) 73 (503)

300 (150) 75 (517) 75 (517) 75 (517) 95 (655) 52 (359)

350 (175) N/R 50 (345) 50 (345) 70 (483) 31 (214)

400 (200) N/R N/R 15 (103) 45 (310) N/R

1/2" (8) 75 (24) 190 (1310) 190 190 (1310) 190 (1310) 168 (1158)
(1310)

4
SPECIFICATIONS

PVDF Nut PFA Nut CPFA Nut FlareLock® II PFA

Temperature FL(X)-1 FL(X)-3 FL(X)-6 Nut FL(X)II-3 psig FluoroLine Ultrapure PFA
Size (X) °F (°C) psig (kPa) psig (kPa) psig (kPa) (kPa) Tubing psig (kPa)

200 (93) 100 (689) 100 (689) 100 (689) 105 (724) 83 (572)

250 (121) 75 (517) 75 (517) 75 (517) 82 (565) 52 (359)

300 (150) 50 (345) 50 (345) 50 (345) 58 (400) 37 (255)

350 (175) N/R 40 (276) 40 (276) 55 (379) 22 (152)

400 (200) N/R N/R 15 (103) 35 (241) N/R

3/4" 75 (24) 110 (758) 110 (758) 110 (758) 140 (965) 107 (738)

200 (93) 76 (524) 76 (524) 76 (524) 100 (689) 53 (365)

250 (121) 35 (241) 35 (241) 35 (241) 47 (324) 33 (228)

300 (150) 27 (186) 27 (186) 27 (186) 40 (276) 24 (165)

350 (175) N/R 20 (138) 20 (138) 34 (234) 14 (95.5)

400 (200) N/R N/R 15 (103) 27 (186) N/R

1" 75 (24) 75 (517) 75 (517) 75 (517) 90 (620) 77 (531)

200 (93) 40 (276) 40 (276) 40 (276) 50 (345) 38 (262)

250 (121) 28 (193) 28 (193) 28 (193) 34 (234) 24 (165)

300 (150) 15 (103) 15 (103) 17 (117) 20 (138) 17 (117)

350 (175) N/R 15 (103) 15 (103) 17 (117) 10 (68.9)

400 (200) N/R N/R 15 (103) 15 (103) N/R

1 1/4" 75 (24) 80 (552) 80 (552) * N/A 80 (552)

1 1/2" 75 (24) N/A 99 (682) N/A N/A 69 (476)

and 40
mm

N/R = Not Rated

N/A = Not Available
* = Contact Entegris

5
PERFORMANCE DATA

PRESSURE/TEMPERATURE RATINGS

FluoroLine PFA tubing pressure ratings were established using ASTM D2837. This test exposes the tubing to long-
term, constant pressures at various temperature settings. Our test took 22 months to complete. From the analysis, a
hydrostatic design basis (HDB) value is multiplied by a safety design factor to obtain a hydrostatic design stress. The
HDB value is used to determine the tubing operating parameters. FluoroLine PFA tubing completed this extensive
testing.

All FluoroLine tubing products are fully characterized and all performance ratings are derived from quantifiable data.
Our design and process expertise allow you to confidently design your fluid systems reliably and safely.

6
PERFORMANCE DATA

PRESSURE LOSS VS. FLOW

This data is for water (fluid with s.g. = 1.0).

For pressure loss vs. flow capability outside of these calculations, please contact Entegris.

PRESSURE LOSS VS. FLOW

This data is for water (fluid with s.g. = 1.0).

For pressure loss vs. flow capability outside of these calculations, please contact Entegris.

7
ORDERING INFORMATION

Notes:
• Quantities between roll and reel length maximums will be packaged on a roll.
• Tight and consistent tolerances, along with lot-to-lot consistency are maintained using continuous online measurements of the FluoroLine
tubing OD and wall thickness.

FOR MORE INFORMATION

Please call your Regional Customer Service Center today to learn what Entegris can do for you.
Visit entegris.com and select the Contact Us link to find the customer service center nearest you.

TERMS AND CONDITIONS OF SALE

All purchases are subject to Entegris’ Terms and Conditions of Sale. To view and print this information,
visit entegris.com and select the Terms & Conditions link in the footer.

Corporate Headquarters Customer Service

129 Concord Tel +1 952 556 4181
Billerica, MA 01821 Fax +1 952 556 8022
USA Toll Free 800 394 4083

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