OM86225 Rev A

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EO3 FAMILY OZONE

GENERATORS
AX88XX
OPERATION
AND
MAINTENANCE MANUAL

Part No. OM86225


Rev. A
Oct 24, 2011

90 INDUSTRIAL WAY
WILMINGTON, MA. 01887-4610 USA
(978) 284-4000
Revision History

Revision ECO Description of Changes


A 13831 Release Document
DO NOT USE ANY CFC (CHLOROFLUOROCARBON) SOLVENT IN THE
MAINTENANCE OF THIS PRODUCT. In recognition of our responsibility to protect the
environment, this product has been manufactured without the use of CFCs. The no-
clean flux now used in all soldering operations may leave a small inert residue that will
not affect the performance of the product. The use of CFCs for cleaning or
maintenance may result in partial liquification of the no-clean flux residue, which will
damage the unit and void the warranty.

This product is manufactured at MKS Industries’ ASTeX plant in Wilmington MA, an


ISO 9001 Quality System Certified Facility.

Notice
The material contained in this manual is subject to change without notice. No part of
this manual may be reproduced or utilized in any form or by any means, electronic or
mechanical, including photocopying or electronic transmission or other means of
reproduction or distribution without prior written consent of MKS. The drawings,
specifications and other technical information contained in this manual are the
property of MKS and shall not be copied, reproduced or used in any way, in whole or
in part, as the basis of manufacture or sale of similar items without the prior written
consent of MKS.
Warranty
MKS warrants to the original purchaser for a period of one year from the date of delivery, each generator to be
free from defects in materials and workmanship. For a period of one year, MKS will, at its option, adjust, repair,
or replace defective parts, without charge to the original purchaser, so that the instrument performs according
to its specifications.
When warranty service is required, the instrument must be returned, transportation prepaid, to the factory or to
one of MKS's designated service centers. If, in our opinion, the instrument has been damaged by accident,
unreasonable use, buyer-supplied software or interfacing, improper site preparation or maintenance, or
abnormal conditions of operation, repairs will be billed at standard rates. In this case, an estimate will be
submitted before the work is started.
THIS LIMITED WARRANTY IS EXCLUSIVE AND MKS MAKES NO OTHER WARRANTIES, EXPRESS OR
IMPLIED, AND ALL OTHER EXPRESS ORAL OR WRITTEN WARRANTIES AND ALL WARRANTIES
IMPLIED BY LAW, INCLUDING ANY WARRANTIES OF MERCHANTABILITY OR FITNESS FOR A
PARTICULAR PURPOSE OR OTHER WARRANTY OF QUALITY ARE EXCLUDED AND DISCLAIMED. IN
NO EVENT SHALL MKS BE LIABLE FOR SPECIAL, INDIRECT, INCIDENTAL OR CONSEQUENTIAL
DAMAGES RESULTING FROM BREACH OF ANY WARRANTY, WHETHER EXPRESS OR IMPLIED,
INCLUDING ANY IMPLIED WARRANTY OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR
PURPOSE, OR FROM ANY CAUSE WHATSOEVER, INCLUDING NEGLIGENCE. Buyer's sole and exclusive
remedy under this warranty shall be repair or replacement as set forth above, or if MKS is unable to repair or
replace the defective part within a reasonable time, a refund of the price of the part or goods that give rise to
the warranty claim.

Disclaimer: If this equipment is used in a manner not specified by the manufacturer, then the protection
provided by the equipment may be impaired.

Service and Technical Assistance


For Service or Repair contact the closest Customer Service Department with the following information:
• Model and serial number
• Purchase order number
• Detailed description of malfunction
• Your company's "Bill To" and "Ship To" address

You will receive a RMA (Return Materials Authorization) number, the warranty status of the unit to be returned
and estimated repair charge, if any. The RMA number is your authorization number. Please type this number
on your purchase order and shipping label. After MKS receives the unit, a firm quote and estimated date of
completion will be given.

For Technical Assistance for your particular application, contact the nearest MKS Sales and Service Center for
ozone products. The following information will help us provide you with prompt and efficient service:
• All of the information contained on the unit's nameplate.
• Names and telephone numbers of important contacts.
• Detailed description (i.e. physical damage and/or performance anomalies, quantitative and/or
qualitative deviation from specifications), including miscellaneous symptoms, dates and times.
• The environment and circumstances under which the issue developed
• Supporting test data and/or records that can be provided.
• Any previous, related conversations and/or correspondence with MKS.
Product Support

24/7 Telephone product support for installation and troubleshooting:

800-227-8766
978-284-4000 (outside the USA),
877-464-2789 (24/7 technical support in the USA).

Email product and service support:


[email protected]

Product and Applications information also available on the Internet at:

http://www.mksinst.com
MKS EO3-SERIES
OZONE GENERATOR•

TABLE OF CONTENTS

Page

1.0 SAFETY PRECAUTIONS - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -1

1.1Safety Summary - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -1
1.1.1 Read This Manual - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -1
1.1.2 Use Proper Wire Connections - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -1
1.1.3 Device Labeling - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -2
1.2 Oxygen - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -2
1.2.1 Oxygen Characteristics - - - - - - - - - - - - - - - - - - - - - - - - - - - - -2
1.2.2 Oxygen Safety Precautions - - - - - - - - - - - - - - - - - - - - - - - - - - -2
1.3 Ozone - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -3
1.3.1 Ozone Characteristics - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -3
1.3.2 Ozone Safety Precautions - - - - - - - - - - - - - - - - - - - - - - - - - - - -3
1.4 Ozone Generator Safety - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -4
1.4.1 Ozone Safety - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -4
1.4.2 Ozone Detectors - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -4
1.5 Electricity - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -6
1.6 Ozone First Aid - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -6
1.7 Ambient Monitoring for Ozone - - - - - - - - - - - - - - - - - - - - - - - - - - - - -7

2.0 INTRODUCTION - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -8

2.1 Principles of Operation - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -8


2.2 Features - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -9
2.3 Installation - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -10
2.3.1 Utility Requirements for E-Series Ozone Generator - - - - - - - - - -10
2.3.2 Interfacing - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -11
2.4 Main Fuses - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -12
2.5 Initial Inspection - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -12
2.6 Location - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -12
2.7 Plumbing - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -12
2.8 Electrical - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -13
2.8.1 Supply Power - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -13
2.8.2 Output Signals - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -14
2.8.3 Input Signals - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -14
Page

3.0 START-UP - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -17

3.1 Generator Start-Up - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -17


3.2 Generator Idle - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -18
3.2.1 Generator Ozone Production in Idle - - - - - - - - - - - - - - - - - - -18
3.2.2 Idle Conditions - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -19
3.2.3 Stopping Gas Flow - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -19
3.3 Operation Status Display Screen - - - - - - - - - - - - - - - - - - - - - - - - - -19
3.4 Keypad - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -20
3.5 Security Levels - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -20

4.0 OPERATION - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -21

4.1 Local Mode - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -21


4.2 Remote Mode - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -22

5.0 OPERATOR MENU - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -23

5.1 Operator Mode - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -23


5.2 Operation Status Screen - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -24
5.3 Local/Remote Menu - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -24
5.4 Firmware Version Menu - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -25
5.5 Time and Date Menu - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -25
5.5.1 Setting the Day - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -25
5.5.2 Setting the Date - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -26
5.5.3 Setting the Time - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -26

6.0 TECHNICIAN MENU - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -27

6.1 Security Selection - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -28


6.2 Relays (Engineering Use) - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -28
6.2.1 Manual Override - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -28
6.2.2 Auto/Manual Select - - - - - - - - - - - - - - - - - - - - - - - - - - - - -29
Page

6.3 Alarm Settings - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -30


6.3.1 Cell Temperature - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -30
6.3.2 Cell Pressure - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -30
6.3.3 Feed Pressure - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -31
6.3.4 Oxygen Flow - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -31
6.3.5 Remote Input - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -31
6.4 Water Meter (not implemented) - - - - - - - - - - - - - - - - - - - - - - - - - -31
6.4.1 Contacting Head - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -32
6.4.2 Paddle Wheel - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -32
6.4.3 Autotrol Turb 1-inch - - - - - - - - - - - - - - - - - - - - - - - - - - - -32
6.4.4 Autotrol Turb 2-inch - - - - - - - - - - - - - - - - - - - - - - - - - - - -32
6.4.5 Water Meter - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -33
6.5 System Set-Up - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -33
6.5.1 Local Remote Set-Up - - - - - - - - - - - - - - - - - - - - - - - - - - - -33
6.5.2 Remote Enable Configuration Set-Up - - - - - - - - - - - - - - - - -34
6.5.2.1 Remote Enable Configuration - - - - - - - - - - - - - - - - -34
6.5.2.2 Room Ozone Alarm Timer Configuration - - - - - - - - - -34
6.5.3 Initialization - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -34
6.5.3.1 Restore Defaults - - - - - - - - - - - - - - - - - - - - - - - - - -35
6.5.3.2 Calibrate Pressure - - - - - - - - - - - - - - - - - - - - - - - - -35
6.5.3.3 Calibrate Gas Flow - - - - - - - - - - - - - - - - - - - - - - - -36
6.5.3.4 Flow Constant - - - - - - - - - - - - - - - - - - - - - - - - - - - -37
6.5.4 Security - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -38
6.5.5 Diagnostics - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -38
6.5.5.1 Analog I/O - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -38
6.5.5.2 Digital I/O - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -39
6.5.5.3 Alarms/Control - - - - - - - - - - - - - - - - - - - - - - - - - - -39
6.5.5.4 Calibration - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -39
6.5.6 Date and Time - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -40
6.5.7 Drop Security Level to Operator Mode - - - - - - - - - - - - - - - -40

7.0 RELAY OUTPUTS (Engineering Use) - - - - - - - - - - - - - - - - - - - - - - - - - -41

7.1 Relay States - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -41


7.2 Alarm Code - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -42

8.0 SHUTDOWN - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -43

8.1 General Emergency Shutdown - - - - - - - - - - - - - - - - - - - - - - - - - - -43


8.2 General Normal “Manual” Shutdown - Local Mode - - - - - - - - - - - - -43
8.3 General Normal “Manual” Shutdown - Remote Mode - - - - - - - - - - -43
8.4 Generator Fault Shutdown - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -43
8.5 Shut Down Alarms - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -43
Page

9.0 ESTIMATING OZONE OUTPUT - - - - - - - - - - - - - - - - - - - - - - - - - - - - -44

9.1 Estimating Ozone Output - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -44


9.2 Cooling Temperature Effect on Ozone Output - - - - - - - - - - - - - - - - -45

10.0 MAINTENANCE - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -46

10.1 Daily - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -46


10.2 Monthly - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -46
10.3 Quarterly - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -47
10.4 Annually - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -47
10.5 Cabinet Entry and Cell Removal - - - - - - - - - - - - - - - - - - - - - - - - - -47
10.6 Cell Reinstallation in Cabinet - - - - - - - - - - - - - - - - - - - - - - - - - - - -48
10.7 Circuit Board Replacement - - - - - - - - - - - - - - - - - - - - - - - - - - - - -48

11.0 TROUBLESHOOTING - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -52

11.1 Alarms - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -52


11.1.1 Shutdown Alarms - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -52
11.1.2 Warnings - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -53
11.2 Troubleshooting Chart - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -54

12.0 SPARE AND REPLACEMENT PARTS LIST - - - - - - - - - - - - - - - - - - - - -61

13.0 DRAWINGS - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -62


13.1 Electrical Drawing - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -62
13.2 Installation Drawings- - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -63
13.3 Electrical Schematic - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -64

APPENDIX

Ozone MSDS - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -65


LIST OF FIGURES

Page

Figure Title

2.1 Front Panel Controls - - - - - - - - - - - - - - - - - - - - - - - - - - - - -9


2.2 Bottom View of Generator with Connections - - - - - - - - - - - -11
3.3 Welcome Screen - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -17
3.4 Operation Status Screen - - - - - - - - - - - - - - - - - - - - - - - - - -19
5.5 Operator Menu - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -23
5.6 Operation Status Screen - - - - - - - - - - - - - - - - - - - - - - - - - -24
5.7 Local/Remote Menu Screen - - - - - - - - - - - - - - - - - - - - - - -24
5.8 Firmware Version Menu Screen - - - - - - - - - - - - - - - - - - - - -25
5.9 Day, Date, & Time Menu Screen - - - - - - - - - - - - - - - - - - - -25
6.10 Technician Menu - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -27
9.11 Ozone Output vs. Water Temperature - - - - - - - - - - - - - - - - - -45
13.12 Electrical Hook-Up Drawing - - - - - - - - - - - - - - - - - - - - - - -62
13.13 Installation Drawings - - - - - - - - - - - - - - - - - - - - - - - - - - - -63
13.14 Electrical Schematic - - - - - - - - - - - - - - - - - - - - - - - - - - - -64

LIST OF TABLES

Table Title

1.1 Effects of Ozone at Various Concentrations - - - - - - - - - - - - - -5


10.2 Suggested Maintenance Intervals - - - - - - - - - - - - - - - - - - - -49
10.3 Maintenance Log - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -50
10.4 Maintenance Chart - - - - - - - - - - - - - - - - - - - - - - - - - - - - -51
1.0 SAFETY PRECAUTIONS

1.1 Safety Summary

The safety summary does not contain all of the safety statements in this manual. Other
safety statements are included within the manual text and are enhanced and defined as fol-
lows:

NOTE: Indicates statements that provide further information and clarification.

CAUTION: Indicates statements that are used to identify conditions or practices


that could result in equipment or other property damage.

WARNING: INDICATES STATEMENTS THAT ARE USED TO IDENTIFY


CONDITIONS OR PRACTICES THAT COULD RESULT iN
INJURY OR LOSS OF LIFE.

WARNING: FAILURE TO FOLLOW THE REQUIREMENTS SET FORTH


IN THIS SECTION 1.0 COULD POSE A RISK OF SERIOUS
INJURY OR DEATH TO INDIVIDUALS WORKING WITH
OZONE.

1.1.1 Read This Manual

Prior to operating or servicing this device, this manual must be read and
understood. Keep it and other associated information near the machine for future
reference.

This manual has been prepared to provide the operator with information on the
installation, operation, maintenance, and troubleshooting of the E-Series Ozone
Generator System.

The E-Series Ozone Generator must be installed, operated, and maintained by


qualified and properly trained operators. It is the responsibility of the owner to
ensure that operators have been properly trained to operate and maintain the E-
Series Ozone Generator.

1.1.2 Use Proper Power Connections

Use proper wiring and connection methods as stated in this manual and local
regulations.

Page 1 MKS Instruments OM86225 Rev. A


E-Series Ozone Generator Manual
1.1.3 Device Labeling

Do not, under any circumstances, remove any Caution, Warning, or other descrip-
tive labels from the devices.

The E-Series Ozone Generator is a durable piece of equipment, which with prop-
er care will last for many years. Whenever possible precautionary measures have
been made to reduce the possibility of a dangerous condition. However, as a
result of misuse or improper maintenance, dangerous conditions may present
themselves. The areas of potential danger include:

• Oxygen
• Ozone
• High Voltage Electricity

1.2 Oxygen

Oxygen is used as the parent gas for the production of ozone in the E-Series Ozone
Generator. Certain precautions must be taken to ensure safety. This section discusses the
basics of oxygen safety, including oxygen characteristics and oxygen safety precautions.
This section is provided as information only. It is the owner’s responsibility to determine
and follow all national and local codes and regulations.

1.2.1 Oxygen Characteristics

• Colorless, odorless, tasteless


• Heavier than air
• Supports and accelerates burning (particularly in concentrations > 25%)

1.2.2 Oxygen Safety Precautions

Oxygen must not be exposed to the following:

• Open flames
• Oil and grease

Open flames in the presence of oxygen can cause a potentially explosive situation.
Under no circumstances should smoking, welding, or any source of ignition
(sparking) be allowed in the vicinity of the oxygen producing equipment.

Oil and grease in the presence of oxygen can rapidly combust. Therefore, the
oxygen equipment must be kept free of oil and grease. This includes operator and
maintenance personal's clothing in order to reduce the potential for danger.

Use only oxygen-compatible greases in the system.

Page 2 MKS Instruments OM86225 Rev. A


E-Series Ozone Generator Manual
1.3 Ozone

The E-Series Ozone Generator converts oxygen-enriched air to ozone. Certain safety pre-
cautions must be taken. This section discusses the basics of ozone safety; including ozone
characteristics and ozone safety precautions. This section is provided as information only.
It is the owner’s responsibility to determine and follow all national and local codes and
regulations.

1.3.1 Ozone Characteristics

• Toxic
• Corrosive
• Accelerates burning
• Heavier than air and oxygen
• Acrid odor
• Unstable

NOTE: Ozone can be detected by humans (by the sense of smell) at a level
as low as 0.003 ppm (odor threshold).

NOTE: The owner and/or user is responsible for compliance with all nation-
al and local regulations regarding the use of ozone.

1.3.2. Ozone Safety Precautions

• Follow national and local regulations and guidelines for handling ozone.

Ozone must not be exposed to the following:

• Open flames
• Oil and grease
• Non-compatible grease

Open flames in the presence of ozone can cause a potentially explosive situation.
Under no circumstances should smoking, welding, or any source of ignition
(sparking) be allowed in the vicinity of the ozone producing equipment.

Oil and grease in the presence of ozone can rapidly combust. Therefore, the ozone
equipment must be kept free of oil and grease. This includes operator and main-
tenance personal's clothing in order to reduce the potential for danger.

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E-Series Ozone Generator Manual
1.4 Ozone Generator Safety

1.4.1 Ozone Safety

The E-Series Ozone Generators are designed to operate safely. The potentially
lethal nature of ozone requires the equipment owner to follow additional safety
precautions.

1.4.2 Ozone Detectors

Ozone generators can produce ozone concentrations up to 15% wt and higher.


This concentration is above the lethal limit. Even small leaks can produce dan-
gerous concentrations of ozone in a local area. For this reason, ozone-warning
devices must be installed in the area near the ozone generator and ozone process
manufacturing areas. For information on installing ozone detectors see Ambient
Ozone Monitoring (Section 1.7). To ensure safety the following precautions
should be taken:

• Access to ozone generator should be limited to authorized and trained per-


sonnel only.

• Evacuation routes must be clearly marked in the event of an ozone leak.

• Install an electrical disconnect switch on the power feed to the ozone gener-
ator. This electrical disconnect switch should disconnect the electrical supply
to the equipment. This switch should be in an accessible location and
installed per local regulations.

• Install ozone detectors to monitor for the presence of ozone. Wire the detec-
tors into the discreet ozone generator shut down input whenever possible.

• Have suitable breathing apparatus available on site. A breathing apparatus


must be worn before entering areas with suspected concentrations of ozone.

WARNING: ONCE THE OZONE GENERATOR HAS BEEN TURNED


OFF, THE MACHINE STILL CONTAINS OZONE GAS.
BEFORE OPENING THE MACHINE OR PIPING,
FLUSH THE EQUIPMENT THOROUGHLY WITH DRY
AIR OR OXYGEN GAS UNTIL NO OZONE CAN BE
DETECTED.

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Table 1.1
Effects of Ozone
at Various Concentrations

OSHA Regulations

EPA Discharge Limits: 1.0 ppm to Atmosphere

OSHA Exposure Limits: 0.1 ppm for 8 hours


0.3 ppm for 10 minutes
10+ ppm - Respiratory
problems, may be fatal

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1.5 Electricity

WARNING: NEVER OPEN THE ELECTRICAL EQUIPMENT WHEN


POWER IS SUPPLIED. ALWAYS REMOVER POWER
(UNPLUG) BEFORE OPENING ELECTRICAL EQUIPMENT.

WARNING: THE INTERNAL CAPACITORS CAN HOLD A DANGEROUS


ELECTRICAL CHARGE FOR UP TO FIVE (5) MINUTES
AFTER TURNING THE MACHINE OFF. WAIT AT LEAST 5
MINUTES AFTER TURNING MACHINE OFF BEFORE OPEN-
ING THE DOOR. ALWAYS DISCONNECT POWER FROM THE
MACHINE BEFORE OPENING THE DOOR.

WARNING: NEVER WORK ON LIVE EQUIPMENT! HIGH VOLTAGE CAN


CAUSE INJURY AND DEATH.

1.6 Ozone First Aid

IMPORTANT: The owner and/or user must ensure that first aid measures meet local
codes and regulations.

Following exposure to ozone, the following first aid measures must be performed
immediately.

1. Bring the victim into fresh air.

2. Call emergency services, stating ozone exposure.

3. Give medical-oxygen.

4. Lay victim down and keep victim calm until help arrives.

5. Check pulse, breathing, and consciousness.

6. If breathing stops, begin CPR*.

* CPR: Cardiopulmonary Resuscitation

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1.7 Ambient Monitoring for Ozone

Ambient monitoring units must be installed in all areas where ozone can potentially
escape. Air currents need to be taken into consideration. Several monitoring units may
need to be installed, depending upon the size of the room.

When in an ambient alarm condition:

• Evacuate all personnel from the contaminated area.

• Enter room wearing a suitable breathing apparatus.

• Disconnect electrical supply and ventilate the area.

WARNING: IF THE AMBIENT MONITORS GIVE A WARNING OR


FAIL, THE FEED GAS SUPPLY MUST BE IMMEDIATELY
AND AUTOMATICALLY DISCONNECTED. SIMULTANE-
OUSLY, THE WARNING MUST INITIATE AN OPTICAL
AND ACOUSTIC ALARM, SO THAT PERSONNEL IN THE
RESPECTIVE ROOMS ARE WARNED. AS LONG AS THE
AREA MONITORS INDICATE A HIGH OZONE CONCEN-
TRATION, THE ROOMS ARE ONLY TO BE ENTERED
WHEN WEARING SUITABLE BREATHING APPARATUS.

• Wiring terminals are provided on the E-Series Ozone Generator for connecting a
safety monitor alarm output to automatically shut down the ozone generator.

• Rooms where ozone will be produced or used should be properly ventilated.

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2.0 INTRODUCTION

Ozone (O3) is a three-atom allotrope of oxygen (O2). It is second only to fluorine in electro-neg-
ative oxidation potential. Ozone is a natural ingredient of the earth's upper atmosphere, generat-
ed by solar energy, and exists in a gaseous form at ambient conditions. Un-reacted ozone decom-
poses in a matter of hours to simple molecular oxygen and therefore it cannot efficiently be stored.
It must be produced on site. A wide variety of ozone equipment configurations and sizes are avail-
able for municipal, industrial, and laboratory applications.

Ozone is emerging as the most efficient and ecologically sound oxidant to treat both organic and
inorganic substances in air and water.

2.1 Principles of Operation

The E-Series Ozone Generator is designed to continuously generate ozone. The gen-
erator offers the user the capability to regulate the ozone output from 0 - 100% of its rated
capacity. This adjustment can be made from the local control panel or remotely via a
4-20 mA current loop.

Ozone generators produce ozone from a very dry form of oxygen. The supplied oxygen
should be dried to -62°C (-80°F) dew point, or drier, and should be particulate free to
1 micron. The oxygen should have a minimum concentration of 90%. The E-Series
Ozone Generators rated output is based on an oxygen feed of 93% purity.

Prior to entering the E-Series Ozone Generator, the clean, dry oxygen should be pressure-
regulated to between 0.62 and 1.03 barg (9 and 15 psig).

Feed gas passes through a passage that is machined between the electrodes and the dielec-
tric. This passage is known as the "dielectric gap." The dielectric gap is the point where
electrical energy is applied to the feed gas, creating ozone. By controlling the amount of
energy applied to the cell, ozone output can be controlled. Cooling passages are also
machined inside the electrodes, allowing cooling water to carry off excess heat from the
process. The entire cell is contained in a housing, which provides mechanical structure
for the cell, as well as a measure of safety for operators and maintenance personnel.

As feed gas passes through the dielectric gap, a portion of the oxygen molecules are con-
verted to ozone. An ozone output data sheet is included in this manual to assist you in
estimating the ozone output at certain machine settings.
The amount of ozone created is dependent on several factors:

• Oxygen flow rate, temperature, and pressure


• Cooling water temperature and flow rate
• Applied voltage and frequency
• Oxygen purity and dew point
• Cell contamination

The resultant ozone output can be estimated by observing operating conditions on the
front display on the front panel and comparing them to the data sheet in this manual. The
data sheet reflects test results taken at the factory on this specific generator.

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After the parent gas and ozone mixture leaves the dielectric assemblies, it passes through
an adjustable flow control valve prior to exiting the generator cabinet. The ozone outlet
can be connected to the process via Teflon* (FEP or PTFE) or stainless steel tubing.

Figure 2.1
Front Control Panels

2.2 Feature

Generator Power Switch Main power switch for generator. Switch illuminates
when inverter is enabled.

Emergency Stop Switch Palm press switch that quickly removes power from the
generator and stops flow of oxygen in emergency conditions.

Multi-Line Digital Display Displays operating parameters, warnings, faults, and alarms.

16 Key Keypad Allows the user to adjust settings of the generator and
change views on the display.

Gas Flow Valve Located on the bottom of the unit, adjusts gas flow through
the ozone generator cell.
Note: The total range of the valve is one turn – 360 deg.
Trying to turn it more than 360 deg will cause damage.

* Teflon is a trademark E.I. Dupont de Nemours and Company, Inc.

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2.3 Installation

2.3.1 Utility Requirements for E-Series Ozone Generator

Electrical

• 200 - 240VAC, single-phase


• 50/60 Hz
• 3.5 amps full load

Cooling Water

• 1.9 to 3.2 Lpm [30 to 50 gph (0.5 to 0.8 gpm)]


• Potable or better quality (softened water is preferred)
• Maximum pressure: 2.4 barg [35 psig] (15 to 20 psig typical)
• 15 - 35°C (60 - 95°F)

WARNING: IF THE COOLING WATER IS TOO COLD, CONDEN-


SATION MAY FORM INSIDE THE GENERATOR CAB-
INET AND DAMAGE INTERNAL CIRCUITRY. THE
TEMPERATURE OF THE COOLING WATER SHOULD
BE NEAR AMBIENT ROOM TEMPERATURE.

To prevent mineral deposits from damaging the cooling system, the cooling water
must have a low mineral content. To protect the generator, a solenoid valve (1/2
inch 220 VAC) and water flow switch (0.5 gpm) should be installed in the
cooling water supply line. Power the solenoid from terminals 35 and 36 to
energize the valve when the generator is turned on, or power the valve and
generator from a common disconnect.

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Figure 2.2
Bottom View of Generator with Connections

Dry Oxygen Supply

• Pressure: 0.62 to 1.03 barg (9 to15 psig)


• Flow: 2 to 12 sLm (4.2 to 25 scfh) - The total range of the gas flow control
valve is one turn – 360 deg. Trying to turn it more than 360 deg will cause
damage.
• Moisture content: -62°C (-80°F) dew point max.
• Maximum temperature: 29°C (85°F)
• Purity: greater than 90% oxygen

NOTE: If using an oxygen concentrator, such as SeQual ATF-25, be sure


there is no air pressure into the concentrator except when power is
applied. On systems using plant air, a solenoid valve (3/4-inch, 220
Vac) must be installed at the concentrator input and powered with the
concentrator. On systems with a compressor, the concentrator and
compressor should be powered from a common switch.

2.3.2 Interfacing

Connect room ozone safety monitor and any remote alarm devices to the wiring
strip inside the cabinet.

Terminals are also provided on the wiring strip inside the cabinet for connecting
a cooling water flow switch and remote 4-20 mA control signals.

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2.4 Main Fuses

These fuses are located in the fuse holders on the main terminal strip. All current for the
ozone generator unit passes through these fuses.

2.5 Initial Inspection

Inspect the shipping carton for obvious external damage. Note on the carrier's bill-of-lad-
ing the extent of the damage, if any, and notify the carrier. Save the shipping carton until
your ozone generator is up and running.

NOTE: If there was shipping damage, call the responsible MKS


Instruments representative for more information.

2.6 Location

Place the ozone generator as near as possible to where ozone is to be applied to the
process. There should be a minimum of 3 feet (0.91 m) clearance below and in front of
the generator.

WARNING: DO NOT SUBJECT THE OZONE GENERATOR OR AIR COM-


PRESSOR TO DIRECT SUNLIGHT, WATER, OR FREEZING
CONDITIONS OR EXCESSIVELY DUSTY, HUMID AND COR-
ROSIVE ENVIRONMENTS. CHEMICAL FUMES MUST ALSO
BE AVOIDED.

Your E-Series Ozone Generator must be operated in a clean, dry environment that does
not contain any corrosive or volatile airborne contaminants. Excessive moisture, dust
and/or vapors from stored chemicals, paints, or solvents will damage the generators
electronic components. Vapors from chlorine or chlorine-containing compounds are espe-
cially damaging.

WARNING: THE OPERATION OF YOUR OZONE GENERATOR IN A DAM-


AGING ENVIRONMENT MAY VOID ITS WARRANTY.

2.7 Plumbing

Connect the water inlet and outlet on the ozone generator using not less than 1/4-inch
(0.635 cm) diameter tubing. The incoming water pressure must be less than 2.4 barg
(35 psig). The use of a pressure regulator and flow switch on the water source is recom-
mended (refer to Figure 2.2, Bottom View of Generator with Connections).

Do not hard p l u mb the water fittings to the generator cabinet. All plumbing c o n -
nections must be removed from the cabinet to service the generator cell.

The ozone plumbing needs to extend at least 2 feet (60 cm) above the highest water
level in the process being treated.

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Connect the oxygen inlet using oxygen safe tubing, such as copper, stainless steel, Teflon,
or other such tubing. Connect the ozone outlet using stainless steel tubing, [Teflon,
(FEP, or PTFE)] tubing or other ozone resistant plumbing (Figure 2.2, Bottom View of
Generator with Connections).

Do not hard plumb the gas fittings to the generator cabinet. All plumbing connec-
tions must be removed from the cabinet to service the generator cell.

WARNING: SEVERE DAMAGE WILL RESULT IF WATER BACKS UP


INTO THE OZONE GENERATOR! IT IS THE CUSTOMER'S
RESPONSIBILITY TO PROVIDE AN INSTALLATION WHICH
WILL PREVENT THE BACKFLOW OF WATER INTO THE
OZONE PIPE LINE.

CAUTION: FAILURE TO FOLLOW THE ABOVE WARNING WILL VOID


WARRANTY.

To avoid water backflow, install a stainless steel check valve and shut-off valve in
the ozone piping near the injector. Close the shut-off valve when starting and shut-
ting down the treatment system. Turn the generator ON to a 0% setting to provide
oxygen flow before turning on your process water.

2.8 Electrical

A terminal strip is provided inside the enclosure for all electrical connections
(Figure 13.12, Electrical Hook-Up Drawing).

WARNING: NEVER WORK ON LIVE EQUIPMENT! INSTALLATION


MUST ADHERE TO NATIONAL AND LOCAL CODES AND BE
PERFORMED BY A QUALIFIED ELECTRICIAN.

2.8.1 Supply Power

The generator needs a clean and consistent source of 200 to 240 VAC, single
phase power in 50 or 60 Hz. Fluctuations in power may affect ozone output.
Power levels outside the 200 to 240 VAC range may result in ozone generator
failure. Failures from an improper power supply are not covered under warranty.

200 to 240 VAC, single-phase, 50/60 Hz, 3.5 amp full


load.

Supply power can be: one leg of 208 V or 240 V 3-phase, opposing 115 V phas-
es, or grounded neutral 230 V, etc. Grounded neutral is acceptable, but not
required.

Connect power and ground wires to the terminals provided at the right-hand end
of the terminal strip: L1, L2, and Gnd.

Main fuses are located inside the L1 and L2 terminal blocks.

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A single wall-mounted disconnect, or power cord, may be used to supply both the
EO3 generator and the Oxygen Prep system, if permitted by local electrical
regulations.

2.8.2 Output Signals

2.8.2.1 FAULT RELAY (alarm output)

This relay switches whenever the EO3 shuts down in an alarm or fault
condition. These contacts are available for customer use to signal exter-
nal equipment or alarm.

• Isolated form-C relay contacts


• Rating: 5 A, 250 Vac, 1/3 Hp

Terminal
18 - normally open
19 - common
20 - normally closed

2.8.2.2 REMOTE READY (output relay)

• Terminals 16 and 17
• Rating: 5 A, 250 Vac, 1/3 Hp
• Isolated normally open relay contacts
• Closes when the following conditions are met:
- The Local/Remote menu item is set to REMOTE mode.
- The Remote Enable input signal is closed.
- No shutdown alarms are active.

The Remote Ready output to external process control equipment indi-


cates that the EO3 is producing ozone based on the remote 4-20 mA
signal input. The Remote Ready output follows the condition of the
Remote Enable input for remote control applications.

2.8.3 Input Signals

2.8.3.1 REMOTE CONTROL 4-20 mA analog input

A 4-20 mA signal from external process control equipment controls the


amount of ozone being generated when the EO3 is operated in the
REMOTE mode (refer to Section 5.3).

Terminal 15 (+) 4-20 mA signal input


Terminal 14 (-) (ground in the EO3).

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• Terminal 15 has a load resistance to ground of 200 ohms. The
external source of the 4-20 mA control signal must be capable of driv-
ing a 200 ohm grounded loading a 200 ohm grounded load.

• Shielded cable must be used for the 4-20 mA signal wiring. The
shield must be grounded at the source end only.

The EO3 power setting, and amount of ozone being generated, is deter-
mined by the value of the 4-20 mA signal, from 0% at 4 mA, to 100%
at 20 mA.

2.8.3.2 REMOTE ENABLE (digital input)

Terminal 12 and 13.

Connect to isolated (“dry”) relay or switch contact in external equip-


ment to inhibit ozone production when open. Close to run.

Terminal 12 is grounded in the EO3.


Terminal 13 has a 5k-ohm resistor to +5 VDC (1 mA

DC). In Remote mode (Section 5.3, Local/Remote Menu):

Open: Forces the power level to 0% and causes the Remote Ready
relay to open.

If the Remote Enable signal remains open for longer than 10


minutes, the Oxygen Flow will also stop.

Closed: Energizes the Remote Ready relay, and the power setting
returns to the value determined by the 4-20 mA control sig-
nal.
The EO3 will do a 30-second purge if Oxygen flow was
stopped, then it will resume normal operation.

In Local Mode, the Set-Up menu item (Section 6.5.2, Remote Enable
Configuration Set-Up) can be set for:

1 Display message only (default).


2 Force power level to 0%
3 Force power level to 0%, and stop oxygen flow.

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2.8.3.3 ROOM OZONE MONITOR (shutdown digital input)

Terminal 10 and 11.

Terminal 10 is ground in the EO3.


Terminal 11 has a 5k-ohm resistor to +5 VDC (1 mA
DC).

Connect to an isolated (“dry”) relay or switch contact, such as from a


room ambient ozone monitor and/or coolant water flow switch to shut
down the E-Series Ozone Generator when the circuit is opened.

Several normally closed devices may be wired in series between termi-


nals 10 and 11. Displays the message: “Room Ozone or Coolant”.

Coolant water flow switch should be wired in series with the ambient
monitor to these terminals.

The circuit must be closed to run. To re-start the EO3, press the [ENT]
key.

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3.0 START-UP

On initial start-up, disconnect the ozone piping to prevent water back-up while starting up the
treatment process and injection system.

3.1 Generator Start-Up

STEPS

1. Turn on the cooling water supply to the generator cabinet. Water pressure should
not exceed 2.4 barg (35 psig). Pressurize line and check plumbing for water leaks
before starting. Refer to data sheet for minimum water flow requirements.
On systems with a solenoid valve installed in the cooling water and/or air supply
lines, the air and water flow will start when the generator is turned on in Step 3.

2. Ensure that all ozone supply lines to your process are properly connected.

3. Switch the master ON/OFF switch to ON to illuminate the display screen. Then
press any key on the keypad to start oxygen flow. After 30 seconds, the green
light in the switch should come on, indicating that the generator is enabled. If the
system fails to power up, check to be sure the Emergency Stop button is released
(twist to release).

Turning the Power Switch ON turns on the ozonator and displays the "Welcome"
screen. Press Clear [CLR] to display the Operation Status display screen.

MKS EO3-Series
Ozone Generator
SF80284 Rev -X

Press Any Key

Figure 3.3
Welcome Screen

4. Adjust cooling water pressure and flow to 0.5 to 0.8 gpm (1.9 to 3.2 Lpm). If nec-
essary, press the [ENT] key to clear alarms.

5 If using an ATF-25 oxygen concentrator, adjust the air pressure into the concen-
trator to 36 to 40 psi.

6. Press the UP or DOWN ARROW key to change the display to show gas pressure,
oxygen flow, etc. (see Section 3.3, Operation Status Display Screen).

7. Adjust oxygen feed pressure to the generator until it is between


0.62 - 1.03 barg (9 - 15 psig). Refer to the generator data sheet for some sug-
gested gas flow rates, as well as gas pressure vs. flow curves.

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8. Adjust the oxygen flow rate to desired setting (see data sheet) with the T-handle
needle valve at the underside of the generator while ozone generator is not pro-
ducing ozone (0.0%). 9.0 SLMP is best for most applications.

NOTE: The total range of the valve is one turn – 360 deg. Trying to turn it
more than 360 deg will cause damage.
Since pressure affects flow, some balancing of the pressure and flow
controls may be required to stabilize flow at desired settings.
Achieving proper gas flow and pressure ensures that the generator
operates efficiently.

9. Allow the oxygen to flow through the generator for a minimum of 5 minutes if
the generator has not been operating within six (6) hours. This allows clean, dry
oxygen to flow through the generator dielectrics, purging any moisture that may
have accumulated.

CAUTION: If the generator cell contains any moisture, nitric acid will form
in the cell. Nitric acid is a strong acid and can be dangerous.
Formation of nitric acid will decrease the performance of the
generator.

10. Locate and repair any leaks in the piping.

11. Check that the process to be treated is filled and operating properly, and that all
ozone destruct, safety, and ventilation devices are operating.

12. Use the LEFT and RIGHT ARROW keys to adjust the generator power level to
obtain the desired amount of ozone.

13. If any faults or alarms occur during the start-up period, they will show on a flash-
ing banner on the display. Refer to Troubleshooting (Section 11.0).

3.2 Generator Idle

3.2.1 Generator Ozone Production in Idle

The generator will not produce ozone under the following conditions:

• During the first thirty (30) seconds after start-up.


• In Manual Mode, if the generator output is set to 0%.
• In Remote Mode, if the input signal drops to 4 mA.
• In Remote Mode, if the remote enable signal input is open.

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3.2.2 Idle Conditions

In idle conditions, gas will flow through the system unless the solenoid valve is
programmed to shut off under certain conditions. The solenoid valve may be shut
off for the following conditions:
• In Remote Mode, if the remote enable signal input is open longer than
10 minutes.
• Alarm conditions (refer to Sections 8.5 and 11.1)
• Failure conditions

3.2.3 Stopping Gas Flow

The generator is preprogrammed to stop gas flow under the following conditions:
• Door open
• High Feed pressure (oxygen)
• Inverter fault
• Room Ozone or Coolant fail
• High Temperature

3.3 Operation Status Display Screen

Top Section: Displays the Power Setting of the generator as a percentage


of full power. Performance Charts are provided for the
Concentration and Lbs/day (gms/hr) of Ozone output,
based on the Power setting (%) and gas flow (slpm).

Alarm Display Line: Displays any active alarms (refer to Section 11). In Remote
mode, displays “Remote Control Mode” message.

Lower Section: Displays various operating parameters, as selected by the


Up and DOWN Arrow Keys.

Bottom Line: Displays system status messages.

0.00% Power Setting

Alarm Messages
OXYGEN FLOW =

6.36 SLPM Operating Parameters

OXYGEN FLOWING
System Status
Messages

Figure 3.4
Operation Status Screen

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The operating parameters displayed in the lower portion of the screen can be selected
using the UP and DOWN ARROW Keys:

• OXYGEN FLOW (0 - 16.0 SLPM)


• CELL PRESSURE (0 - 2.00 BARG)
• FEED PRESSURE (0 - 2.00 BARG)
• CELL TEMPERATURE (0 - 99.9°C)
• REMOTE INPUT (4 - 20 mA)
• PROCESS WATER FLOW (Not Currently Implemented)
• TIME AND DATE
• RELAYS AND TIMERS (Engineering Use)

3.4 Keypad

Enter (ENT) Use in the menus to select items and enter data.

Clear (CLR) Brings up either the Operator Menu or the Technician Menu,
depending on which Security Level is active.

When in the Menus, the [CLR] Key will exit back to the pre-
vious menu.

Scroll Keys UP and DOWN Arrow Keys select which of the operating
parameters is displayed in Operation Mode (refer to Section
3.3) or select items in the menus.

Power Control Keys LEFT and RIGHT Arrow Keys increase and decrease the
power applied to the cell from 0 to 100%, in steps of 6.25%.
These keys are ignored in “Remote Mode”.

3.5 Security Levels

Pressing the [CLR] Key from the main Operation status display will bring up either the
Operator Menu, or the Technician Menu, depending upon which security level is active.

Technician Mode View and adjust alarm settings, and perform diagnostics and
calibrations. To enter the Technician Mode from the Main
Operation Status screen, enter the 4-digit security code
(“5951”) using the number keys.

Operator Mode The Operator Mode is read-only. To enter from the


Technician Menu press the [0] key. The Operator Mode
allows adjustment of the time, date, power level, and
local/remote.

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4.0 OPERATION

To select Local or Remote mode, refer to Section 5.3 (Local/Remote Menu).

4.1 Local Mode

STEPS

1. Before applying power to the ozonator, be sure that the cooling water supply is
turned on and the oxygen supply to the generator is between 0.62 to1.03 barg
(9 to 15 psig).

On some systems the cooling water and oxygen will come on with the main
power.

2. After power is applied and any Key on the keyboard is depressed, the gas sole-
noid valve is energized. The message "OXYGEN FLOWING" will appear on the
bottom line. The oxygen flows for 30 seconds to purge the system of moisture
and any residual ozone before the ozonator power level can be brought up.

3. No alarm messages should appear in the Alarm Display Line.

If any alarm message appears in the Alarm Display Line, clear the message by
correcting the fault condition before proceeding. Refer to Troubleshooting
(Section 11.0) for assistance.

4. Use the Flow Control Valve on the underside of the cabinet to adjust the gas flow
to the desired flow rate between 2.0 slpm (4.2 scfh) and 12.0 slpm (25 scfh),
typically around 9 - 10 sLpm.
Note: The total range of the valve is one turn – 360 deg. Trying to turn it
more than 360 deg will cause damage.

5. Thirty (30) seconds after the "OXYGEN FLOWING" message, the Inverter
Enable relay should energize. The bottom line of the display should display:
"MAKING OZONE," indicating that the generator is ready to make ozone.

6. Check for proper cooling water flow, ozone destruct and safety equipment are
operating, the process being treated is operating properly, and there are no ozone
leaks.

7. After the "MAKING OZONE" message appears, Press the RIGHT Arrow Key to
increase the Power Setting display to the desired output level. The reading will
increase by 6.25% for each press of the RIGHT Arrow Key. Press the LEFT
Arrow Key to decrease the power setting of the inverter to the desired level. The
reading will decrease by 6.25% for each press of the LEFT Arrow Key.

When operating with oxygen flow of less than 4.0 slpm, do not raise the power
level above 75%.

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4.2 Remote Mode

Remote Mode is exactly the same as Local mode, except at Step 6, check that the dis-
solved ozone monitor and 4-20 mA controller are powered on and operating.

After the “Making Ozone” message appears, the power setting will automatically increase
to the value determined by the 4-20 mA control signal.

The message “Remote Control Mode” will be flashing on the display, or “R” shows in the
% Power Display.

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5.0 OPERATOR MENU

5.1 Operator Mode

Press Clear [CLR] from the main Operation status display. This brings up the Operator
Menu (Figure 5.5, Operator Menu).

NOTE: If the Technician Menu (Figure 6.10, Technician Menu) comes up instead,
press the [0] key (while the Technician Menu is displayed), then select “Yes”
to drop the security level.

OPERATOR MENU

1 OPERATION
2 LOCAL/REMOTE
3 FIRMWARE VERSION
4 CLOCK

Figure 5.5
Operator Menu

Menu Selection

Select the desired menu item by either:

• Pressing the number key corresponding to the desired item,

or,

• Using the UP and DOWN ARROW Keys to select the desired item, then
press [ENT] to select.

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5.2 Operation Status Screen [1]

Press [1] or [ENT] to exit the Operator Menu and return to the main Operation Status
Screen (Section 3.3, Operation Status Display Screen).

0.00% Power Setting

Alarm Messages
OXYGEN FLOW =
Operating
6.36 SLPM Parameters
OXYGEN FLOWING
System Status
Messages

Figure 5.6
Operation Status Screen

5.3 Local/Remote Menu [2] (from Operator Menu)

Press [2] to display the “CONTROL MODE” screen. Select "LOCAL" or "REMOTE"
control of the Power setting;

In LOCAL Mode the % Power is controlled by the LEFT and RIGHT Arrow keys.

In REMOTE Mode, the generator % Power is controlled by the 4 - 20mA input signal.

Press [CLR] to exit back to the Operator Menu.

CONTROL MODE

1* LOCAL
2 REMOTE

Figure 5.7
Local/Remote
Status Screen

* Indicates the current operating mode. Press [1] to select “LOCAL” or


[2] to select “REMOTE” Mode.

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5.4 Firmware Version Menu [3]

This screen indicates the version of firmware used with your generator. This information
may be useful in future maintenance or troubleshooting situations.

MKS EO3-SERIES
OZONE GENERATOR
FIRMWARE P/N SF80284

VERSION: REV-X

Figure 5.8
Firmware Version
Menu Screen

Press [CLR] to exit back to the Operator Menu.

5.5 Date and Time Menu [4]

MON
23 JUL 01

09:43:56

> = CHANGE CLR = EXIT

Figure 5.9
Day, Date, and
Time Menu Screen

Press [4] from Operator menu to bring up the Clock Menu Screen.

Press the [CLR] key at any time to exit back to the Operator Menu, leaving the clock
unchanged.

5.5.1 Setting the Day

1. Pressing the RIGHT ARROW Key highlights the weekday.

2. Use the UP and DOWN ARROW Keys until the correct weekday is dis-
played.

3. Press [ENT] to save the weekday and highlight the Day of the Month.

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5.5.2 Setting the Date

1. Press the Number Keys to set the numerical day of the month.

2. Press [ENT] to save the Day (highlights the month).

3. Press the UP and DOWN ARROW Keys to set the Month.

4. Press [ENT] to save the month (highlights Year).

5. Press the Number Keys to set the year.

6. Press [ENT] to save the year (highlights the Time).

5.5.3 Setting the Time

1. Use the number keys and [ENT] to set the Time.

2. Press [ENT] to save the new Date, Day, Time settings.

NOTE: Pressing Clear [CLR] at any time returns you to the previous
Menu and does not save any changes.

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6.0 TECHNICIAN MENU

From the main Operation Status screen, enter the Password to get to the Technician Menu, refer
to Section 3.5 (Security Levels).

As an introduction, here is a graphic overview of the first level of each option in the Technician
Menu to see how it operates. Complete detail of each option is provided on the following pages.

To select a menu item, use the UP and DOWN ARROW keys to scroll to the desired item, then
press [ENT], or simply press the number key.

TECHNICIAN MENU
1. OPERATION
2 RELAYS
3 ALARMS
4 WATER METER
5 SYSTEM SETUP
6 OPERATOR MODE

1 2 3 4* 5 6
ALARM SET POINTS CONFIGURE RELAYS WATER METER TYPE SYSTEM SETUP DROP SECURITY
0.00% LEVEL TO OPERATOR
1 CELL TEMPERATURE 1 MANUAL OVERRIDE 1 CONTACTING HEAD 1 LOCAL /REMOTE ACCESS?
2 CELL PRESSURE 2 AUTO/MAN SELECT 2 PADDLE WHEEL 2 REMOTE ALM CONF.
3 FEED PRESSURE 3 AUTOTROL TURB 1 IN. 3 INITIALIZATION
OXYGEN FLOW = 4 OXYGEN FLOW 4 AUTOTROL TURB 2 IN. 4 SECURITY
6.36 SLPM 5 REMOTE 4-20 INPUT 5 DIAGNOSTICS 1 YES
6 CLOCK 2. NO
OXYGEN FLOWING

Figure 6.10
Technician Menu

* The water meter option is not currently programmed for operation.

Press [CLR] to return to a previous screen. Repeated use of [CLR] allows you to return all the
way back to the Technician Menu from anywhere in the program.

NOTE: Some menus return to the Operation Status screen. If desired, press the [CLR] key to
bring up the Technician Menu.

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6.1 Security Selection

Press [0] to change to the Operator Security Mode (read-only) see Section 3.5 (Security
Levels.

Press [1] or [ENT] to return to the Operation Status Display (Section 3.3).

6.2 Relays [2] (For Engineering Use Only)

CONFIGURE RELAYS

1 MANUAL OVERRIDE
2 AUTO/MAN SELECT

Press the [CLR] key to return to the Technician menu.

NOTE: Manual Override [1] is for engineering use only.

6.2.1 Manual Override [1] (Engineering Use)

RELAY MANUAL CONTROL

(1) OXY AUTO


(2) INV AUTO
(3) RDY AUTO
(4) ALM AUTO

PRESS 1 - 4: CLR = EXIT

This menu is used to manually turn the relays ON and OFF (engineering use).

The rectangle in the center column displays the status of the relay (Filled = ON,
Clear = OFF). The mode of each relay is shown on the right.

CAUTION: This is only to be for troubleshooting external connections.


NEVER set the OXY or INV relays to MANUAL.

When a relay is in MAN mode, press the respective number key to switch the
relay On and Off. When the relay is in AUTO mode, pressing the number key has
no effect.

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6.2.2 Auto/Manual Select [2]

1. Press [CLR] to go back to the “Configure Relays” Menu.

2. Press [2] (AUTO/MAN Select).

This menu is used to bring up the “Select Relay” menu.

SELECT RELAY

1 OXYGEN
2 INVERTER
3 READY
4 ALARM

Select the desired relay using the number keys. Press [CLR] to go back to the
“Configure Relays” menu.

CAUTION: This is only to be for troubleshooting external connections.


NEVER set the OXY or INV relays to MANUAL.

All the relays default to AUTO when the system power is removed. To set a relay
to MAN mode:

1. Press the number key for the desired relay.

2. Press [1] (Auto) or [2] (Manual).

SELECT AUTO/MANUAL

1 AUTO
2 MANUAL

3. Press [CLR] to go back to the “Configure Relays” menu, then select [1]
to go to the “Relay Manual Control” menu.

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6.3 Alarms [3]

To view or adjust the alarm set points, press the desired number key.

ALARM SET POINT

1 CELL TEMPERATURE
2 CELL PRESSURE
3 FEED PRESSURE
4 OXYGEN FLOW
5 REMOTE INPUT

6.3.1 Cell Temperature [1]

NOTE: The values shown are defaults. Actual values are adjusted during final
test and calibration.

To adjust the settings, enter new value using the number keys, then press [ENT].
Press [CLR] to leave the values unchanged.

HIGH ALARM
30.0°C
LOW ALARM
8.00°C
ENT = ACCEPT CLR = EXIT

6.3.2 Cell Pressure [2]

HIGH ALARM
2.00 BARG
LOW ALARM
0.30 BARG
ENT = ACCEPT CLR = EXIT

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6.3.3 Feed Pressure [3]

HIGH ALARM
2.00 BARG
LOW ALARM
0.37 BARG
ENT = ACCEPT CLR = EXIT

6.3.4 Oxygen Flow [4]

HIGH ALARM
11.50 SLPM
LOW ALARM
2.00 SLPM
ENT = ACCEPT CLR = EXIT

6.3.5 Remote Input [5]

HIGH ALARM
20.1 MA
LOW ALARM
3.90 MA
ENT = ACCEPT CLR = EXIT

6.4 Water Meter [4]

NOTE: Water Meter [4] not currently implemented.

WATER METER TYPE

1 CONTACTING HEAD
2 PADDLE WHEEL
3 AUTOTROL TURB 1 IN.
4 AUTOTROL TURB 2 IN.

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6.4.1 Contacting Head [1]

MTR1
GALLONS OR LITERS
PER CONTACT =

0100.00

NOTE: To adjust the setting, enter another value.

6.4.2 Paddle Wheel [2]

MTR1

K-FACTOR =

100.00

6.4.3 Autotrol Turb 1-inch [3]

MTR1
AUTOTROL TURB. 1 IN.
GALLONS OR LITERS

1 GALLONS
2 LITERS

6.4.4 Autotrol Turb 2-inch [4]

MTR1
AUTOTROL TURB. 2 IN.
GALLONS OR LITERS

1 GALLONS
2 LITERS

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6.4.5 Water Meter [4] [1 - 4] (type) - [1 - 2] (parameter)

RESET TOTAL COUNT?

1* YES
2 NO

6.5 System Setup [5]

From the “Technician Menu” press [5] to bring up the “System Setup” menu.

SYSTEM SETUP

1 LOCAL/REMOTE
2 REMOTE ALM CONFIG.
3 INITIALIZATION
4 SECURITY
5 DIAGNOSTICS
6 CLOCK

Press [CLR] to return to the “Technician Menu”.

6.5.1 Local/Remote Set-Up [1]

CONTROL MODE

1* LOCAL
2 REMOTE

* Indicates the current operating mode of the E-Series ozone generator. In Local
mode, the % ozone power is controlled by the LEFT and RIGHT ARROW
Keys. In Remote mode the % ozone power is controlled by the remote 4-20
mA signal. (This is the same as in the Operator Menu, Section 5.3.)

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6.5.2 Remote Alarm Configuration Set-Up [2]
(from Technician Menu - Setup)

REMOTE CONFIGURATION

1 REMOTE ENABLE INPUT


2 03 ALARM TIMER

6.5.2.1 Remote Enable Configuration [1]

REMOTE ENABLE INPUT

1* DISPLAY MSG ONLY


2 INVERTER OFF
3 INVERTER + GAS OFF

* Indicates the current active setting.

NOTE: These settings determine the action performed by the Remote Enable
input signal when the system is in LOCAL operating mode. Refer to
Section 5.3 (Local/Remote Menu)..

6.5.2.2 Room Ozone Alarm Timer Configuration [2]

TIMER VALUE =

002 SEC

ENT = ACCEPT CLR=QUIT

6.5.3 Initialization [3]


(from Technician Menu - Setup)

INITIALIZATION

1 RESTORE DEFAULTS
2 CALIBRATE PRESSURE
3 CALIBRATE GAS FLOW
4 FLOW CONSTANTS

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6.5.3.1 Restore Defaults [1]

WARNING THIS
OPTION MAY
REQUIRE YOU TO
RE-CALIBRATE THE
CONTROLLER
ARE YOU SURE?
1 YES
2* NO

* This will reset all the Alarms, Pressure, and Flow calibrations to their default
values.

NOTE: Pressure, Flows, and Alarms are calibrated at the factory. This
will cause the factory calibrations to be lost!

6.5.3.2 Calibrate Pressure [2]


From Technician Menu - Setup - Initialization

CLOSE THE OUT-FLOW


GAS VALVE, THEN
SET FEED PRESSURE
TO 1.0 BARG (14.5 PSIG)

ENTER TO CALIBRATE

Pressure is calibrated at the factory. Pressure only needs to be calibrated


after replacing the Display circuit board, transducer circuit board, or cell
module.

To calibrate the Pressure and Flow display, you will need a pressure
gauge (to read 14.5 psi), and a gas flowmeter (1-10 Lpm) (rotometer) is
needed.

Pressure is the most important and must be calibrated first with power set-
ting at 0%.

Flow will be within about 10% without calibration, but only after the
Pressure has been calibrated.

Pressure may appear accurate but needs to be calibrated in order for


Oxygen Flow to work, because Flow uses the 3rd and 4th digits after the
decimal in Pressure, which are not displayed. To display pressure:

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STEPS

1. Close the T-handle needle valve (bottom of EO3), and adjust the
Pressure Regulator at the oxygen supply output to set the Feed
Pressure to 14.5 psi (1.0 bar). The needle valve may need to be
opened slightly when making small corrections of the Regulator.

If no pressure gauge is available, adjust the oxygen supply so the


Feed Pressure display reads “1.00 barg”.

2. Allow a minute for the pressure to stabilize at 14.5 psi (1 bar).

3. In the Technician menu (see Section 3.5) select: 5-Setup,


3-Initialization, 2-Pressure. Then press the [ENT] key to
calibrate.

Press [CLR] several times to go to the Main Operation Status


screen and check the Flow readings.

6.5.3.3 Calibrate Gas Flow [3] F


From Technician Menu - Setup - Initialization

NOTE: A reference flow meter is required to calibrate gas flow.

SET CELL PRESSURE


TO 1.0 BARG
ENTER OXYGEN FLOW
FROM 10 - 12

ENT TO CALIBRATE

NOTE: Flow is calibrated at the Factory!

Oxygen flow should not need to be calibrated in the field. Accuracy is


within 10% without calibration.

This procedure should only be done if higher accuracy is required.

It is normal for the flow display to show an error at power settings above
0%.

To calibrate the Flow (power must be at 0%):

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STEPS

1. First perform the pressure calibration.

2. Adjust the needle valve to get a flow of about 8.0 Lpm. Allow it
to stabilize for a minute.
Note: The total range of the valve is one turn – 360 deg.
Trying to turn it more than 360 deg will cause damage.

3. Multiply the rotometer Lpm reading by 1.25 to get SLPM


(at 14.5 psi).

4. In the Technician Menu select: 5-Setup, 3-Initialization 3-Flow.


Then enter the SLPM value calculated in Step 3
(i.e. 8.0 x 1.25 = 10.00).

5. Due to pulsations from the oxygen supply, the flow calibration


process may have to be repeated several times to get good results.

Press [CLR] several times to go to the Operation screen and


check the Flow readings.

Adjust the Flow Alarm high or low set point to avoid getting the
alarm at higher % power settings when the Flow reading drifts.

In the Technician menu, press the “0” key, then the “1” (yes) to
return to the Operator menu (read-only).

When operating with Flow less than approximately 4.0 SLPM,


the power level must not be set higher than 75%.

NOTE: Pressure Calibration (Section 6.5.3.2).

6.5.3.4 Flow Constant [4]

EDIT FLOW CONSTANTS

(1) +1.687
(2) -2.870
(3) +5.227
(4) +7.966

ENT=ACCEPT CLR=EXIT

NOTE: The flow constants are factory settings and should never be changed.

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6.5.4 Security [4]
From Technician Menu - System Setup

The Security Code is used at the Main Operation Status Screen to return to the
Technician Mode from the Operator Mode (refer to Section 3.5, Security Levels).

PASSWORDS ARE 4 KEYS


ENTER A NEW PASSWORD

OLD PASSWORD =
NEW PASSWORD =

This screen is used to change the security code.


(Press [CLR] to return to the Setup Menu.)

6.5.5 Diagnostics [5]


(From Technician Menu - System Setup)

DIAGNOSTICS

1 ANALOG I/O
2 DIGITAL I/O
3 ALARMS/CONTROL
4 CALIBRATION

6.5.5.1 Analog I/O [1]


(From the Technician Menu - System Setup - Diagnostics)

AD08 0 RA20 0.00


AD09 71 TMP 26.74
AD10 1886 CELL 0.879
AD11 7072 FEED 0.938
DA01 0 03% 0.00
WATER 0

SCAN COUNT: 225

NOTE: Displays the values of the analog input signals. Values shown
are typical, not actual.

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6.5.5.2 Digital I/O [2]
(From the Technician Menu - System Setup - Diagnostics)

RC4 (DOOR OPEN): ON


RC5 (REM ENABLE): ON
RC6 (REM OZONE): OFF
RA1 (INV FAULT): OFF
RG7 (INV 2 FLT): OFF

SCAN COUNT

NOTE: Displays the status of the digital input signals.

6.5.5.3 Alarms/Control [3]


(From the Technician Menu - System Setup - Diagnostics)

CELL TEMP: NORMAL


CELL PRESSURE: LOW
FEED PRESSURE: LOW
OXYGEN FLOW: LOW
REMOTE ANALOG: NORMAL
CONTROL MODE LOCAL
ALARM LATCH: 0
SCAN COUNT: 125

NOTE: Displays the condition of alarms. Values shown are typical, not
actual.

6.5.5.4 Calibration[4]
(From the Technician Menu - System Setup - Diagnostics)

== FLOW CONSTANTS ==
TX OFFSET: 0000
PRESSURE 77
TEMPERATURE 25.0
FLOW: 10.0
CONSTANT: 1.0

SCAN COUNT 255

NOTE: Displays the constants used in the gas flow calculations. These
values are subject to change when the Flow Calibration is
executed. They are not adjustable from the keypad.

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6.5.6 Date and Time [6]

SUN
23 JUN 00

09:43:56

> = CHANGE CLR=EXIT

Refer to Section 5.5 for detailed instructions on adjusting the date and time.

6.5.7 Drop Security Level to Operator Mode (View Only)


(from the Technician Menu press the “0” key)

DROP SECURITY LEVEL


TO OPERATOR ACCESS?
WARNING: PASSWORD IS
REQUIRED TO RETURN
TO TECHNICIAN MODE

1 = YES
2 = NO

To select YES or NO press the “1” or “2” key.

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7.0 RELAY OUTPUTS

NOTE: Relay Outputs for Engineering use only.

Additional diagnostics are available in the Technician Menu, under System Setup (Section 6.5.5,
Diagnostics).

7.1 Relay States

'RELAY STATES' in the Operation status Display. Use the UP and DOWN ARROW
Keys to view.

Alarm 0.00% First Line


Messages DOOR OPEN
OXY INV RDY ALM
Alarm Latch Second Line
0 0 0 0
Register
OXYGEN FLOWING
Third Line

Three lines are shown in the lower half of the display:

OXY - Oxygen
INV - Inverter
RDY - Ready
ALM - Alarm

• The First Line identifies the four relays (Oxygen, Inverter, Ready, and Alarm).

• The Second Line shows a graphic representation of the state (ON or OFF) of each
relay. A filled in box indicates ON.

• The Third Line reads independently of the other lines. It shows the contents of the
Alarm Latch Register (Hexadecimal value) in the left most position (under the
OXY relay symbol) (for use only by MKS engineering).

To the right of the Alarm Latch value are the: Room Ozone Timer, Inverter Fault
Timer, and the High Temperature Timer.

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7.2 Alarm Code

NOTE: Alarm Code for Engineering use only.

The alarm code that is displayed in the Alarm Latch Register is in the form of a binary
number. All alarms are displayed in plain text in the center of the screen. Refer to Section
11 and Section 6.5.5.3 for more information on alarms.

Example: Alarm code 25 means that the Inverter is disabled, the Oxygen solenoid is dis-
abled, and the Room Ozone input signal is ON [probably causing the disable
(16+8+1=25)].

Alarm Code Description

1 Room Ozone
2 High Temperature
4 High Cell Pressure
8 Oxygen Disabled
16 Inverter Disabled
32 Door Open
Bits 6 & 7 Not Used

The Alarm Codes listed above are the same Alarm Messages shown on the second line
of the Main Display (Section 8.5, Shut-Down Alarms).

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8.0 SHUTDOWN

8.1 Generator Emergency Shutdown

• Initiate Emergency Stop Switch. If required, evacuate the area.


• If you are able, turn generator switch to the OFF position.
• Turn the cooling water off.
• Turn the process water off if necessary.

8.2 Generator Normal “Manual” Shutdown - Local Mode

• Push the LEFT Arrow Key until the generator is at minimum power.
• Turn the process water off, if necessary.
• Allow the gas to purge at least two minutes.
• Turn the generator switch to the OFF position.
• Turn the cooling water off.

8.3 Generator Normal “Manual” Shutdown - Remote Mode

• Remote command generator to “Disable.”


• Turn the process water off, if necessary.
• Allow the gas to purge at least two minutes.
• Turn the generator switch to the OFF position.
• Turn the cooling water off.

8.4 Generator Fault Shutdown

Should the ozone generator shutdown with a fault, the display will indicate which alarms
are active. Alarms will be displayed on the alarm banner in the middle of the display
screen. The generator will flash each alarm in a cycle. Be sure to observe all alarm con-
ditions before continuing.

• Observe all alarm conditions.


• Turn the master switch to OFF.
• Consult Troubleshooting (Section 11.0).

8.5 Shut Down Alarms

• Room Ozone 1 second


• High Temperature 30 seconds
• High Feed Pressure
(Oxygen) immediate
• Door Open immediate
• Inverter Fault 60 seconds
• Remote Idle relay 10 minutes

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9.0 ESTIMATING OZONE OUTPUT

9.1 Estimating Ozone Output

Your ozone generator has been factory tested to ensure it meets performance specifications
and output. As part of the factory test procedure, your generators ozone output has been
measured using the ultraviolet absorption method of measurement at various machine set-
tings. This information is recorded on the Ozone Generator Test Data Sheet in the
Appendix of this manual. From time to time, you may have the need to estimate approxi-
mately how much ozone your generator is producing. The most accurate method would
be to purchase or rent an ozone monitor capable of measuring high concentration ozone
and re-measuring the actual output at your site.

If access to a monitor is not practical, it is possible to closely estimate your ozone output
by adjusting the machine settings to match the settings shown on the data sheet. At these
settings (and assuming that your generator has been well maintained) your ozone output
should be similar to the output indicated in the data sheet. The most critical settings to
duplicate are:

• Gas flow rate (taken from display screen).


• Generator operating pressure (from Display Screen).
• Observed power level (0 - 100%)
• Cooling water temperature and flow rate.

To select a specific ozone output, first set a gas flow and pressure setting suggested on the
data sheet. While referencing the ozone data sheet or output curve, apply power by push-
ing the RIGHT ARROW key until the power level is in the range that matches your
desired ozone output shown on the graph.

TIP: Your ozone system will operate most efficiently at a low gas flow. Unfortunately,
decreasing the gas flow rate limits how much ozone is created. Select the lowest
gas flow rate that still allows the generator to create the necessary amount of
ozone.
Note: The total range of the gas flow control valve is one turn – 360 deg. Trying to
turn it more than 360 deg will cause damage.

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9.2 Cooling Temperature Effect on Ozone Output

Cooling water temperature has a small effect on ozone output. Refer to the graph which
can be used to determine ozone output at your actual cooling water temperature.

WARNING: IF THE COOLING WATER TEMPERATURE IS TOO LOW, CON-


DENSATION MAY FORM INSIDE THE GENERATOR CABINET
AND DAMAGE INTERNAL CIRCUITRY.

NOTE: Cooling water temperature must be higher than ambient dew point to pre-
vent condensation.

OZONE OUTPUT vs WATER TEMPERATURE

1.10
Ozone Output Factor

1.05
1.00
0.95
0.90
0.85
0.80
40 50 60 70 80 90 100
Cooling WaterTemperature oF

Figure 9.11
Ozone Output vs Water Temperature

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10.0 MAINTENANCE

It is highly recommended that service and maintenance be performed as set forth below. There
are tables available (at the end of this section) that allow the logging of maintenance work and
daily checks as they are performed. You may want to copy these tables from the manual and keep
the copies with the ozone generator. All service should be performed and logged to ensure war-
ranty compliance.

WARNING: SHUT POWER OFF TO THE GENERATOR AT THE SOURCE BEFORE


PERFORMING ANY SERVICE OR MAINTENANCE INSIDE THE
CABINET.
10.1 Daily

1. Ensure all gas parameters (gas pressure, flow and temperature) are within the
specified operating limits.

2. Check cooling water flow to ensure it is in pressure and temperature ranges. See
Utility Requirements (Section 2.3.1, Utility Requirements for E-Series Ozone
Generator) for ranges.

3. Check overall system for water or gas leaks and repair as necessary.

4. Verify that the process water stream has not backed into generator.

10.2 Monthly

1. Perform a daily inspection (as above).

2. Inspect oxygen supply system.

3. Check the filters in the oxygen supply system and replace as necessary
(if installed).

4. Optional: check ozone output with a high concentration ozone monitor. If out of
desired range (% wt.), adjust the Power Level on generator display to correct.
Some gas flow rate balancing may be required.

5. Check cooling water connections for possible scale formation and clean with cit-
ric acid solution as required.

6. For air compressor, refer to manufacturer’s instructions.

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10.3 Quarterly

1. Perform a monthly inspection (as above).

2. Use low pressure compressed air to remove any obvious dust or lint from the
generator.

3. Check the oxygen feed filter (if installed).

4. Inspect gas outlet check valve (if installed).

5. Replace compressor piston rings, gaskets and seals as directed by manufacturer


(if installed).

6. Replace air filters every 6 months.

10.4 Annually

1. Perform a quarterly inspection (as above).

2. With power disconnected and locked out, check the tightness of all nuts and
screws including the electrical terminals and ground wires.

3. Inspect the interior for gas or water leaks.

10.5 Cabinet Entry and Cell Removal

WARNING: USE CARE TO PREVENT DAMAGE TO THE PLASTIC TUB-


ING AND FITTINGS ABOVE THE TRANSFORMERS.
DAMAGE WILL CAUSE OZONE GAS TO ESCAPE INTO THE
WORK AREA.

STEPS

1. Disconnect all electrical feed to unit.

2. Open the cabinet door.

3. Remove all plumbing connections from the bottom of the unit. (Ensure that the
gas and water supplies are off before disconnecting lines).

4. Disconnect the plugs and wires from the control board and the inverter.

5. Disconnect the harness to the pressure transducer board.

6. Remove the two screws from the right hand front and rear corners of the inverter.

7. Remove the eight (8) screws underneath that attach the cell assembly to the
cabinet.

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8. The manifold and cell assembly will tilt out of the cabinet. You may need to
adjust the position of the flow control knob to allow the manifold to slide through
the hole in the bottom of the cabinet.

9. Drain as much water as possible from the assembly, then blow the rest out care-
fully, using compressed air regulated to 20 psi maximum.

10.6 Cell Reinstallation in Cabinet

WARNING: USE CARE TO PREVENT DAMAGE TO THE PLASTIC TUB-


ING AND FITTINGS ABOVE THE TRANSFORMERS.
DAMAGE WILL CAUSE OZONE GAS TO ESCAPE INTO THE
WORK AREA.

STEPS

1. Reinstall the cell in reverse order of removal, paying particular attention to not dam-
age the connectors, circuit board, and tubing.

2. Make sure all wiring is reconnected correctly, and securely.

3. Connect the plumbing to the same places it was removed from.

4. Do the System Start-up as shown in Section 3.0 (Start-Up).

5. Do the Pressure Calibration (Section 6.5.3.2) if the transducer board was replaced.

10.7 Circuit Board Replacement

The inverter power board requires special care in mounting the power semiconductors.
Repairs should only be done by the MKS service center [Section 14.0, Return Goods
Authorization (RGA) Procedure].

When replacing the display control board, first record the alarm settings.

After replacing the display control board or transducer board, you must do the Pressure
Calibration (Section 6.5.3.2) even if the display appears good. Otherwise the Oxygen
Flow will not be correct. Pressure Calibration must be done first, then Flow Calibration is
usually not required.

Page 48 MKS Instruments OM86225 Rev. A


E-Series Ozone Generator Manual
Table 10.2
Suggested Maintenance Intervals

Ozone Generator E-Series Number:

O XYG E N P R E PA R AT I O N

Semi-
Daily Monthly Quarterly Annually Annually

Compressed Air Pressure Inspect

Oxygen Pressure Inspect

Pressure Relief Valves Check

Air Filters Inspect Replace

Oil Vapor Filter Inspect Replace

Compressor Air Intake Inspect & Inspect & Replace


Filters Clean Clean

Oxygen Concentrator Clean

O Z O N E G E NE R AT O R

Semi-
Daily Monthly Quarterly Annually Annually

Cooling Water Flow Inspect

Oxygen Flow Inspect

Feed Pressure

General Cleaning Clean


(with compressed air)

Ozone Check Valve & Inspect Clean Replace


Backflow Preventer

Ozone Safety Monitor Inspect Test Inspect & Calibration


Clean

Ozone Destructor Inspect Clean

Page 49 MKS Instruments OM86225 Rev. A


E-Series Ozone Generator Manual
Table 10.3
Ozone Generator
Maintenance Log

DATE

Air Pressure into Concentrator


(35 - 38 psi)

Oxygen Pressure
(12 - 15 psi)

Feed Pressure (0.6 - 1.2 bar)


(with Power at 0%)

Oxygen Flow (4 - 10 SLPM)


(with Power at 0%)

Cooling Water Flow


(0.5 - 0.8 gpm)

Cooling Water Temperature


(no condensation in EO3)

Compressed Air Filters


(replace every 6 months or
when indicator shows red)

Air Compressor
(service per manufacturers
recommendations)

General Cleaning
(with compressed air)

Ozone Safety Monitor


(test weekly)

Ozone Destructor

Dissolved Ozone (ppm)

NOTE: This is a template,. You may make copies of this sheet for your maintenance log book.

Page 50 MKS Instruments OM86225 Rev. A


E-Series Ozone Generator Manual
Table 10.4
Ozone Generator
Maintenance Chart

Customer Name: Service Contact:

Model: Serial Number: Date Installed:

Date Maintenance Performed Operators Initials

NOTE: This is a template,. You may make copies of this sheet for your maintenance log book.

Page 51 MKS Instruments OM86225 Rev. A


E-Series Ozone Generator Manual
11.0 TROUBLESHOOTING

This troubleshooting guide will assist you in identifying the most common operating problems
you may experience with your machine. Many of these problems are easily corrected by the oper-
ator, but with other problems or those not understood, you should contact the MKS Technical
Service Department. Have the problem and symptoms clearly defined and operating data avail-
able. Have the following information available when calling your equipment supplier:

1. Serial number (found on the right-hand side of front panel)


2. Daily Log Sheets
3. Description of problem

11.1 Alarms

11.1.1 Shutdown Alarms

These alarms must be cleared by pressing [ENT], except for Inverter Fault which
can only be cleared by shutting the power off.

HIGH FEED PRESSURE Oxygen pressure to the EO3 is too high.

HIGH TEMPERATURE Cooling water is to warm or not enough


(30 second delay) cooling water flow, cell overheating.

INVERTER FAULT Indicates a malfunction in the high volt-


(60 second purge) age inverter circuit board.

DOOR OPEN The cabinet door is open or interlock


switch malfunction.

ROOM OZONE OR COOLANT Not enough cooling water flow, or ambi-


(2 second delay) ent ozone safety monitor has detected an
ozone leak.

NOTE: If the system shuts down (green light OFF) but no alarm message is
displayed, check for fluctuations in cooling water pressure, or door
interlock switch needs adjustment.

Page 52 MKS Instruments OM86225 Rev. A


E-Series Ozone Generator Manual
11.1.2 Warnings

These alarms display a warning message but do not cause shutdown. The values
for high and low limits are set in the Alarms section under the Technician Menu.

ALARM DESCRIPTION

LOW FEED PRESSURE Oxygen pressure into the EO3 is too low or zero.

HIGH CELL PRESSURE Gas pressure inside the cell chamber is too high.

LOW CELL PRESSURE Gas pressure inside the cell chamber is too low.

HIGH OXYGEN FLOW Flow Control needle valve is open too much.

LOW OXYGEN FLOW Flow Control needle valve is closed, or piping is


blocked.

LOW TEMPERATURE Cooling water is too cold, or possible sensor fail-


ure.

HIGH REMOTE INPUT 4-20 mA input current is too high.

LOW REMOTE INPUT 4-20 mA input current is too low, or wiring is


bad.

REMOTE CONTROL MODE Indicates that the EO3 is being controlled by the
(not an alarm) 4-20 mA input signal, the left and right arrow
keys are disabled.

REMOTE ENABLE INPUT The Remote Enable input circuit is opened


(input terminals #12 and #13).*

* The Remote Enable input circuit is opened (input terminals # 12 and #13).

• In LOCAL mode a menu can be set to cause: message only, ozone off, or ozone
and gas off.
• In Remote mode: ozone power goes to 0%. Gas flow will stop after 10 minutes.
• To resume operation, close #12 and #13.

If the suggested remedy fails to correct the problem, and no other malfunction can
be found, it is possible that the alarm menu setting may be incorrect, or a sensor
needs to be re-calibrated, or has failed and may need to be replaced.

Page 53 MKS Instruments OM86225 Rev. A


E-Series Ozone Generator Manual
11.2 Troubleshooting Chart

This troubleshooting guide can assist you in identifying common operating problems you
may experience with your machine. The operator can easily correct many of these prob-
lems, however, for those that persist or are not understood, contact the
MKS Customer Support Center. Have the following information available when calling
the Customer Support Center:

1. Machine installation date


2. Model number
3. Serial number
4. Detailed description of problem.

T R O U B L E S H O O T I N G GUI DE

PROBLEM WHAT THIS MEANS CORRECTIVE ACTION

Ozone generator Emergency Stop button Turn the knob on the Emergency
does not turn ON pressed. Stop to release.

One or both of the Check continuity of the fuse with


fuses might be blown. a multimeter. Find cause of
blowing fuse; shorted compo-
nent, etc. (Should be accom-
plished by a qualified electri-
cian.). Spare fuses are located
inside the fuse holders.

The unit may be unplugged, Plug in unit, or reset circuit


or a remote circuit breaker breaker. Check electrical supply
might be off. voltage at L1 and L2.

High Temperature Alarm The cooling water flow may Refer to data sheet for minimum
or abnormally high tem- be too low or off. cooling water flow at 29°C
perature display. (85°F) water inlet temperature.

NOTE: Allow 10 minutes for


the ozone generator to
cool before restart.

Page 54 MKS Instruments OM86225 Rev. A


E-Series Ozone Generator Manual
T R O U B L E S H O O T I N G GUI DE

PROBLEM WHAT THIS MEANS CORRECTIVE ACTION

High Temperature Alarm The oxygen flow may be too Refer to the data sheet for
or abnormally high low specific oxygen flow rate.
temperature display.
(continued)
4-20 mA signal wired Reverse 4-20 mA wires
incorrectly (+ ON 15). Shield on 4-20
mA should be grounded only
at source end.

The inlet water temperature May have to find other source


may be to high for cooling water or add chiller
(maybe go to a closed-loop sys-
tem). Refer to Data Sheet for
specific water temperature. Too
cold water will cause condensa-
tion damage.

Clogged plumbing fitting in Check for water flow at flow


the water cooling system. meter. Filter this water prior to
entry of cooling system.

Alarm settings incorrect Verify correct settings in Alarm


Menu.

Failed temperature sensor Transducer board may need to


be replaced.

“Room Ozone or Coolant” Not enough cooling water Check the supply of cooling
Alarm Shutdown water, check flow with bucket
(The coolant flow switch and and stopwatch. Flow must be at
safety monitor are usually least 0.5 gpm.
wired in series, either will
cause shutdown)
Failed coolant flow switch Clean or replace flow switch.

Page 55 MKS Instruments OM86225 Rev. A


E-Series Ozone Generator Manual
T R O U B L E S H O O T I N G GUI DE

PROBLEM WHAT THIS MEANS CORRECTIVE ACTION

“Room Ozone or Coolant” Ozone leak Evacuate the area until safe,
Alarm Shutdown then repair the leak.
(continued)

The set point of the remote Locate the source of ozone leak
ambient ozone monitor has in plumbing, too much ozone to
been exceeded by a source of process, etc., and take correc-
ozone tive measures. Destructor
malfunction.

The set point on the monitor Refer to the monitor’s manual.


has been set too low, or a
problem exists with the moni-
tor’s program

There may be interference Smoke from cigarettes, etc., can


from other gases or smoke cause false alarm situations.
near the monitor gas sample Many chemicals can cause alarm
inlet conditions. The moni- tor’s
environment must be free of
gases, chemicals, and/or smoke.
Refer to the monitor’s manual.

Check external devices.


Any external devices that may
be wired in series with the
flow switch

Ensure door is completely


“Door Open” Alarm Door switch may be open or closed and locked. Door
Shutdown intermittent switch may need adjustment.

Check cable connectors at


“Inverter Fault” Alarm Faulty cable or connector to Display Board and at Fixed
fixed Frequency Board Frequency Board.

Page 56 MKS Instruments OM86225 Rev. A


E-Series Ozone Generator Manual
T R O U B L E S H O O T I N G GUI DE

PROBLEM WHAT THIS MEANS CORRECTIVE ACTION

“Inverter Fault” Alarm Inverter Power Board failure Return to factory for repair.
(continued)

Generator turns ON, does Oxygen supply not working Check and correct oxygen sup-
not produce ozone or ply. If using an oxygen con-
produces only small centrator, ensure that the
amounts of ozone exhaust air pulse occurs about
once each second.

Oxygen flow may be to high Adjust oxygen flow to


4 - 10 slpm

Ceramic plate cracked Check for leaking process


(not repairable) water back into generator.
Ozone cell will require
replacement.

Pressure and/or flow Faulty ground connection Check and repair ground con-
displays fluctuate widely nections and terminals.
or stuck at zero

Faulty cable connection Check wire connections at


Transducer Display Board.

Failed Pressure Transducer May need Pressure Calibration.


Transducer circuit board may
need to be replaced.

Flow display changes when Interference from high voltage This characteristic is normal -
power setting is raised supply adjust alarm settings as needed
above 0% to avoid alarms. Set power to
0% for accurate readings.

Page 57 MKS Instruments OM86225 Rev. A


E-Series Ozone Generator Manual
T R O U B L E S H O O T I N G GUI DE

PROBLEM WHAT THIS MEANS CORRECTIVE ACTION

4-20 mA display Faulty connections Check wire connections at ter-


functions minal strip and Display Board

“High Feed Pressure” Oxygen pressure into the gen- Check the oxygen supply,
Alarm erator is high lower the pressure into the
EO3,
[1.2 barg (18 psig) maximum].

NOTE: Maximum from


ATF-25 is 1.03 barg
(15 psig).

Failed Pressure Transducer Transducer Circuit Board may


need to be replaced.

“Low Feed Not enough oxygen pressure Check for problems in oxygen
Pressure”Alarm supply. Increase oxygen pres-
sure. Adjust the alarm set
point.

“High Cell Pressure” Ozone output pressure is Check for leaking process water
Alarm too high back into generator. Ozone cell
will require replace- ment.

Transducer circuit board may


Failed Pressure Transducer need to be replaced.

Check for excessive vacuum


“Low Cell Pressure” Gas pressure in cell is to low from injector or failed oxygen
Alarm Failed Oxygen valve valve (located behind fan).

Page 58 MKS Instruments OM86225 Rev. A


E-Series Ozone Generator Manual
T R O U B L E S H O O T I N G GUI DE

PROBLEM WHAT THIS MEANS CORRECTIVE ACTION

“Low Temperature” Cooling water to cold. Alarm Use warmer water, adjust alarm
Alarm set point incorrect. Failed set point. Transducer board
Temperature Sensor. may need to be replaced.

“Low Remote Input” 4-20 mA signal to low Faulty Check 4-20 mA wiring. Check
Alarm wiring connection connections at terminal strip.

Oxygen flow display This is normal Set power to 0% to read flow.


incorrect

Needs pressure calibration Calibrate pressure


(Figure 6.10, Technician Menu)

Failed Transducer Board Transducer Board may need


to be replaced.

All Alarms Alarm set point may be incorrect Check to be sure the actual
pressures and flows are within
specifications, and adjust the
alarm set points
(Technician Menu).

Oxygen Flow or Pressure This characteristic is normal -


display readings change when adjust alarm set points to avoid
power setting is raised. nuisance alarms.

Failed Transducer Transducer board may need to


be replaced - requires pressure
calibration.

Page 59 MKS Instruments OM86225 Rev. A


E-Series Ozone Generator Manual
T R O U B L E S H O O T I N G GUI DE

PROBLEM WHAT THIS MEANS CORRECTIVE ACTION

Generator ON, but stops There was a momentary loss of Increase the cooling water flow.
producing ozone - “Press cooling water or fluctuating pres- Ensure that the supply of cooling
any Key” message is sure (wire terminals 10 & 11). water is reliable.
displayed

There was a momentary alarm Repair any ozone leaks. Adjust


from room ozone monitor the monitor for latching alarm
output or increase the delay.

There was a momentary “Door Door switch may need adjust-


Open” condition ment.

Coolant flow switch Damaged adapter fitting Replace adapter fitting


leaking (usually caused by over- (P/N 1229872).
tightening)

Page 60 MKS Instruments OM86225 Rev. A


E-Series Ozone Generator Manual
12.0 SPARE AND REPLACEMENT PARTS LIST

UFO P/N DESCRIPTION

1101986 Flow Switch (SWITCH, FLOW, PP, .50GPM,ANGLE)

1100765 REGULATOR,AIR/OXY,0.25"PF

1101242 Check Valve (VALVE-CHK,316,0.25"PM,1PSI)

1222960 Power Supply (POWER-SUP,24VDC,20W,UNIVERSAL INPUT )

1225083 PCA,TRANSDUCER,EO3 GEN

1225088 PCA, INVERTER POWER BOARD,EO3 GEN

1225091 PCA, OPERATOR INTERFACE & CPU,EO3 GEN

1225129 CONCENTRATOR,OXYGEN,ATF-25

1231631 Filter Element, Air/Oil Vapor Removal (FLT, ELEMENT, AIR, OIL
VAPOR RMVL)

1231632 Filter Element, Air/Oil Removal (FLT, ELEMENT, AIR, OIL REMOVAL)

1231633 Filter Element, Air Particulate Removal (FLT, ELEMENT, AIR PARTIC, 1
MICRON)

Page 61 MKS Instruments OM86225 Rev. A


E-Series Ozone Generator Manual
13. DRAWINGS

13.1 Electrical Drawing

Figure 13.12
Electrical Hook-Up Drawing

Page 62 MKS Instruments OM86225 Rev. A


E-Series Ozone Generator Manual
13.2 Installation Drawings

Figure 13.13
Installation Drawings
Page 63 MKS Instruments OM86225 Rev. A
E-Series Ozone Generator Manual
13.3 Electrical Schematic

Figure 13.14
Electrical Schematic
Page 64 MKS Instruments OM86225 Rev. A
E-Series Ozone Generator Manual
Ozone Material Safety
Data Sheet
Ozone has a readily identifiable odor, recognizable in extremely minute quantities.
Concentrations above 0.1 ppm can cause headache, eye irritation, respiratory problems,
dizziness, nausea, and at higher concentrations, death. See attached “Material Safety Data
Sheet No. 34 Ozone.”
It is important for the customer to install an ozone leak detector near the ozone-generating
equipment. It should be connected to the Ozone Generator interlock so that ozone generation
will be stopped if an ozone leak is detected.

WARNING!
Understand and implement the OSHA and locally
required safety laws involving the generation of
ozone using high voltages. MKS assumes no liability
for the user’s failure to comply with these
requirements.

Page 65 MKS Instruments OM86225 Rev. A


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Page 66 MKS Instruments OM86225 Rev. A
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Page 67 MKS Instruments OM86225 Rev. A
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