OM86225 Rev A
OM86225 Rev A
OM86225 Rev A
GENERATORS
AX88XX
OPERATION
AND
MAINTENANCE MANUAL
90 INDUSTRIAL WAY
WILMINGTON, MA. 01887-4610 USA
(978) 284-4000
Revision History
Notice
The material contained in this manual is subject to change without notice. No part of
this manual may be reproduced or utilized in any form or by any means, electronic or
mechanical, including photocopying or electronic transmission or other means of
reproduction or distribution without prior written consent of MKS. The drawings,
specifications and other technical information contained in this manual are the
property of MKS and shall not be copied, reproduced or used in any way, in whole or
in part, as the basis of manufacture or sale of similar items without the prior written
consent of MKS.
Warranty
MKS warrants to the original purchaser for a period of one year from the date of delivery, each generator to be
free from defects in materials and workmanship. For a period of one year, MKS will, at its option, adjust, repair,
or replace defective parts, without charge to the original purchaser, so that the instrument performs according
to its specifications.
When warranty service is required, the instrument must be returned, transportation prepaid, to the factory or to
one of MKS's designated service centers. If, in our opinion, the instrument has been damaged by accident,
unreasonable use, buyer-supplied software or interfacing, improper site preparation or maintenance, or
abnormal conditions of operation, repairs will be billed at standard rates. In this case, an estimate will be
submitted before the work is started.
THIS LIMITED WARRANTY IS EXCLUSIVE AND MKS MAKES NO OTHER WARRANTIES, EXPRESS OR
IMPLIED, AND ALL OTHER EXPRESS ORAL OR WRITTEN WARRANTIES AND ALL WARRANTIES
IMPLIED BY LAW, INCLUDING ANY WARRANTIES OF MERCHANTABILITY OR FITNESS FOR A
PARTICULAR PURPOSE OR OTHER WARRANTY OF QUALITY ARE EXCLUDED AND DISCLAIMED. IN
NO EVENT SHALL MKS BE LIABLE FOR SPECIAL, INDIRECT, INCIDENTAL OR CONSEQUENTIAL
DAMAGES RESULTING FROM BREACH OF ANY WARRANTY, WHETHER EXPRESS OR IMPLIED,
INCLUDING ANY IMPLIED WARRANTY OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR
PURPOSE, OR FROM ANY CAUSE WHATSOEVER, INCLUDING NEGLIGENCE. Buyer's sole and exclusive
remedy under this warranty shall be repair or replacement as set forth above, or if MKS is unable to repair or
replace the defective part within a reasonable time, a refund of the price of the part or goods that give rise to
the warranty claim.
Disclaimer: If this equipment is used in a manner not specified by the manufacturer, then the protection
provided by the equipment may be impaired.
You will receive a RMA (Return Materials Authorization) number, the warranty status of the unit to be returned
and estimated repair charge, if any. The RMA number is your authorization number. Please type this number
on your purchase order and shipping label. After MKS receives the unit, a firm quote and estimated date of
completion will be given.
For Technical Assistance for your particular application, contact the nearest MKS Sales and Service Center for
ozone products. The following information will help us provide you with prompt and efficient service:
• All of the information contained on the unit's nameplate.
• Names and telephone numbers of important contacts.
• Detailed description (i.e. physical damage and/or performance anomalies, quantitative and/or
qualitative deviation from specifications), including miscellaneous symptoms, dates and times.
• The environment and circumstances under which the issue developed
• Supporting test data and/or records that can be provided.
• Any previous, related conversations and/or correspondence with MKS.
Product Support
800-227-8766
978-284-4000 (outside the USA),
877-464-2789 (24/7 technical support in the USA).
http://www.mksinst.com
MKS EO3-SERIES
OZONE GENERATOR
TABLE OF CONTENTS
Page
1.1Safety Summary - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -1
1.1.1 Read This Manual - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -1
1.1.2 Use Proper Wire Connections - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -1
1.1.3 Device Labeling - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -2
1.2 Oxygen - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -2
1.2.1 Oxygen Characteristics - - - - - - - - - - - - - - - - - - - - - - - - - - - - -2
1.2.2 Oxygen Safety Precautions - - - - - - - - - - - - - - - - - - - - - - - - - - -2
1.3 Ozone - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -3
1.3.1 Ozone Characteristics - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -3
1.3.2 Ozone Safety Precautions - - - - - - - - - - - - - - - - - - - - - - - - - - - -3
1.4 Ozone Generator Safety - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -4
1.4.1 Ozone Safety - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -4
1.4.2 Ozone Detectors - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -4
1.5 Electricity - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -6
1.6 Ozone First Aid - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -6
1.7 Ambient Monitoring for Ozone - - - - - - - - - - - - - - - - - - - - - - - - - - - - -7
2.0 INTRODUCTION - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -8
APPENDIX
Page
Figure Title
LIST OF TABLES
Table Title
The safety summary does not contain all of the safety statements in this manual. Other
safety statements are included within the manual text and are enhanced and defined as fol-
lows:
Prior to operating or servicing this device, this manual must be read and
understood. Keep it and other associated information near the machine for future
reference.
This manual has been prepared to provide the operator with information on the
installation, operation, maintenance, and troubleshooting of the E-Series Ozone
Generator System.
Use proper wiring and connection methods as stated in this manual and local
regulations.
Do not, under any circumstances, remove any Caution, Warning, or other descrip-
tive labels from the devices.
The E-Series Ozone Generator is a durable piece of equipment, which with prop-
er care will last for many years. Whenever possible precautionary measures have
been made to reduce the possibility of a dangerous condition. However, as a
result of misuse or improper maintenance, dangerous conditions may present
themselves. The areas of potential danger include:
• Oxygen
• Ozone
• High Voltage Electricity
1.2 Oxygen
Oxygen is used as the parent gas for the production of ozone in the E-Series Ozone
Generator. Certain precautions must be taken to ensure safety. This section discusses the
basics of oxygen safety, including oxygen characteristics and oxygen safety precautions.
This section is provided as information only. It is the owner’s responsibility to determine
and follow all national and local codes and regulations.
• Open flames
• Oil and grease
Open flames in the presence of oxygen can cause a potentially explosive situation.
Under no circumstances should smoking, welding, or any source of ignition
(sparking) be allowed in the vicinity of the oxygen producing equipment.
Oil and grease in the presence of oxygen can rapidly combust. Therefore, the
oxygen equipment must be kept free of oil and grease. This includes operator and
maintenance personal's clothing in order to reduce the potential for danger.
The E-Series Ozone Generator converts oxygen-enriched air to ozone. Certain safety pre-
cautions must be taken. This section discusses the basics of ozone safety; including ozone
characteristics and ozone safety precautions. This section is provided as information only.
It is the owner’s responsibility to determine and follow all national and local codes and
regulations.
• Toxic
• Corrosive
• Accelerates burning
• Heavier than air and oxygen
• Acrid odor
• Unstable
NOTE: Ozone can be detected by humans (by the sense of smell) at a level
as low as 0.003 ppm (odor threshold).
NOTE: The owner and/or user is responsible for compliance with all nation-
al and local regulations regarding the use of ozone.
• Follow national and local regulations and guidelines for handling ozone.
• Open flames
• Oil and grease
• Non-compatible grease
Open flames in the presence of ozone can cause a potentially explosive situation.
Under no circumstances should smoking, welding, or any source of ignition
(sparking) be allowed in the vicinity of the ozone producing equipment.
Oil and grease in the presence of ozone can rapidly combust. Therefore, the ozone
equipment must be kept free of oil and grease. This includes operator and main-
tenance personal's clothing in order to reduce the potential for danger.
The E-Series Ozone Generators are designed to operate safely. The potentially
lethal nature of ozone requires the equipment owner to follow additional safety
precautions.
• Install an electrical disconnect switch on the power feed to the ozone gener-
ator. This electrical disconnect switch should disconnect the electrical supply
to the equipment. This switch should be in an accessible location and
installed per local regulations.
• Install ozone detectors to monitor for the presence of ozone. Wire the detec-
tors into the discreet ozone generator shut down input whenever possible.
OSHA Regulations
IMPORTANT: The owner and/or user must ensure that first aid measures meet local
codes and regulations.
Following exposure to ozone, the following first aid measures must be performed
immediately.
3. Give medical-oxygen.
4. Lay victim down and keep victim calm until help arrives.
Ambient monitoring units must be installed in all areas where ozone can potentially
escape. Air currents need to be taken into consideration. Several monitoring units may
need to be installed, depending upon the size of the room.
• Wiring terminals are provided on the E-Series Ozone Generator for connecting a
safety monitor alarm output to automatically shut down the ozone generator.
Ozone (O3) is a three-atom allotrope of oxygen (O2). It is second only to fluorine in electro-neg-
ative oxidation potential. Ozone is a natural ingredient of the earth's upper atmosphere, generat-
ed by solar energy, and exists in a gaseous form at ambient conditions. Un-reacted ozone decom-
poses in a matter of hours to simple molecular oxygen and therefore it cannot efficiently be stored.
It must be produced on site. A wide variety of ozone equipment configurations and sizes are avail-
able for municipal, industrial, and laboratory applications.
Ozone is emerging as the most efficient and ecologically sound oxidant to treat both organic and
inorganic substances in air and water.
The E-Series Ozone Generator is designed to continuously generate ozone. The gen-
erator offers the user the capability to regulate the ozone output from 0 - 100% of its rated
capacity. This adjustment can be made from the local control panel or remotely via a
4-20 mA current loop.
Ozone generators produce ozone from a very dry form of oxygen. The supplied oxygen
should be dried to -62°C (-80°F) dew point, or drier, and should be particulate free to
1 micron. The oxygen should have a minimum concentration of 90%. The E-Series
Ozone Generators rated output is based on an oxygen feed of 93% purity.
Prior to entering the E-Series Ozone Generator, the clean, dry oxygen should be pressure-
regulated to between 0.62 and 1.03 barg (9 and 15 psig).
Feed gas passes through a passage that is machined between the electrodes and the dielec-
tric. This passage is known as the "dielectric gap." The dielectric gap is the point where
electrical energy is applied to the feed gas, creating ozone. By controlling the amount of
energy applied to the cell, ozone output can be controlled. Cooling passages are also
machined inside the electrodes, allowing cooling water to carry off excess heat from the
process. The entire cell is contained in a housing, which provides mechanical structure
for the cell, as well as a measure of safety for operators and maintenance personnel.
As feed gas passes through the dielectric gap, a portion of the oxygen molecules are con-
verted to ozone. An ozone output data sheet is included in this manual to assist you in
estimating the ozone output at certain machine settings.
The amount of ozone created is dependent on several factors:
The resultant ozone output can be estimated by observing operating conditions on the
front display on the front panel and comparing them to the data sheet in this manual. The
data sheet reflects test results taken at the factory on this specific generator.
Figure 2.1
Front Control Panels
2.2 Feature
Generator Power Switch Main power switch for generator. Switch illuminates
when inverter is enabled.
Emergency Stop Switch Palm press switch that quickly removes power from the
generator and stops flow of oxygen in emergency conditions.
Multi-Line Digital Display Displays operating parameters, warnings, faults, and alarms.
16 Key Keypad Allows the user to adjust settings of the generator and
change views on the display.
Gas Flow Valve Located on the bottom of the unit, adjusts gas flow through
the ozone generator cell.
Note: The total range of the valve is one turn – 360 deg.
Trying to turn it more than 360 deg will cause damage.
Electrical
Cooling Water
To prevent mineral deposits from damaging the cooling system, the cooling water
must have a low mineral content. To protect the generator, a solenoid valve (1/2
inch 220 VAC) and water flow switch (0.5 gpm) should be installed in the
cooling water supply line. Power the solenoid from terminals 35 and 36 to
energize the valve when the generator is turned on, or power the valve and
generator from a common disconnect.
2.3.2 Interfacing
Connect room ozone safety monitor and any remote alarm devices to the wiring
strip inside the cabinet.
Terminals are also provided on the wiring strip inside the cabinet for connecting
a cooling water flow switch and remote 4-20 mA control signals.
These fuses are located in the fuse holders on the main terminal strip. All current for the
ozone generator unit passes through these fuses.
Inspect the shipping carton for obvious external damage. Note on the carrier's bill-of-lad-
ing the extent of the damage, if any, and notify the carrier. Save the shipping carton until
your ozone generator is up and running.
2.6 Location
Place the ozone generator as near as possible to where ozone is to be applied to the
process. There should be a minimum of 3 feet (0.91 m) clearance below and in front of
the generator.
Your E-Series Ozone Generator must be operated in a clean, dry environment that does
not contain any corrosive or volatile airborne contaminants. Excessive moisture, dust
and/or vapors from stored chemicals, paints, or solvents will damage the generators
electronic components. Vapors from chlorine or chlorine-containing compounds are espe-
cially damaging.
2.7 Plumbing
Connect the water inlet and outlet on the ozone generator using not less than 1/4-inch
(0.635 cm) diameter tubing. The incoming water pressure must be less than 2.4 barg
(35 psig). The use of a pressure regulator and flow switch on the water source is recom-
mended (refer to Figure 2.2, Bottom View of Generator with Connections).
Do not hard p l u mb the water fittings to the generator cabinet. All plumbing c o n -
nections must be removed from the cabinet to service the generator cell.
The ozone plumbing needs to extend at least 2 feet (60 cm) above the highest water
level in the process being treated.
Do not hard plumb the gas fittings to the generator cabinet. All plumbing connec-
tions must be removed from the cabinet to service the generator cell.
To avoid water backflow, install a stainless steel check valve and shut-off valve in
the ozone piping near the injector. Close the shut-off valve when starting and shut-
ting down the treatment system. Turn the generator ON to a 0% setting to provide
oxygen flow before turning on your process water.
2.8 Electrical
A terminal strip is provided inside the enclosure for all electrical connections
(Figure 13.12, Electrical Hook-Up Drawing).
The generator needs a clean and consistent source of 200 to 240 VAC, single
phase power in 50 or 60 Hz. Fluctuations in power may affect ozone output.
Power levels outside the 200 to 240 VAC range may result in ozone generator
failure. Failures from an improper power supply are not covered under warranty.
Supply power can be: one leg of 208 V or 240 V 3-phase, opposing 115 V phas-
es, or grounded neutral 230 V, etc. Grounded neutral is acceptable, but not
required.
Connect power and ground wires to the terminals provided at the right-hand end
of the terminal strip: L1, L2, and Gnd.
This relay switches whenever the EO3 shuts down in an alarm or fault
condition. These contacts are available for customer use to signal exter-
nal equipment or alarm.
Terminal
18 - normally open
19 - common
20 - normally closed
• Terminals 16 and 17
• Rating: 5 A, 250 Vac, 1/3 Hp
• Isolated normally open relay contacts
• Closes when the following conditions are met:
- The Local/Remote menu item is set to REMOTE mode.
- The Remote Enable input signal is closed.
- No shutdown alarms are active.
• Shielded cable must be used for the 4-20 mA signal wiring. The
shield must be grounded at the source end only.
The EO3 power setting, and amount of ozone being generated, is deter-
mined by the value of the 4-20 mA signal, from 0% at 4 mA, to 100%
at 20 mA.
Open: Forces the power level to 0% and causes the Remote Ready
relay to open.
Closed: Energizes the Remote Ready relay, and the power setting
returns to the value determined by the 4-20 mA control sig-
nal.
The EO3 will do a 30-second purge if Oxygen flow was
stopped, then it will resume normal operation.
In Local Mode, the Set-Up menu item (Section 6.5.2, Remote Enable
Configuration Set-Up) can be set for:
Coolant water flow switch should be wired in series with the ambient
monitor to these terminals.
The circuit must be closed to run. To re-start the EO3, press the [ENT]
key.
On initial start-up, disconnect the ozone piping to prevent water back-up while starting up the
treatment process and injection system.
STEPS
1. Turn on the cooling water supply to the generator cabinet. Water pressure should
not exceed 2.4 barg (35 psig). Pressurize line and check plumbing for water leaks
before starting. Refer to data sheet for minimum water flow requirements.
On systems with a solenoid valve installed in the cooling water and/or air supply
lines, the air and water flow will start when the generator is turned on in Step 3.
2. Ensure that all ozone supply lines to your process are properly connected.
3. Switch the master ON/OFF switch to ON to illuminate the display screen. Then
press any key on the keypad to start oxygen flow. After 30 seconds, the green
light in the switch should come on, indicating that the generator is enabled. If the
system fails to power up, check to be sure the Emergency Stop button is released
(twist to release).
Turning the Power Switch ON turns on the ozonator and displays the "Welcome"
screen. Press Clear [CLR] to display the Operation Status display screen.
MKS EO3-Series
Ozone Generator
SF80284 Rev -X
Figure 3.3
Welcome Screen
4. Adjust cooling water pressure and flow to 0.5 to 0.8 gpm (1.9 to 3.2 Lpm). If nec-
essary, press the [ENT] key to clear alarms.
5 If using an ATF-25 oxygen concentrator, adjust the air pressure into the concen-
trator to 36 to 40 psi.
6. Press the UP or DOWN ARROW key to change the display to show gas pressure,
oxygen flow, etc. (see Section 3.3, Operation Status Display Screen).
NOTE: The total range of the valve is one turn – 360 deg. Trying to turn it
more than 360 deg will cause damage.
Since pressure affects flow, some balancing of the pressure and flow
controls may be required to stabilize flow at desired settings.
Achieving proper gas flow and pressure ensures that the generator
operates efficiently.
9. Allow the oxygen to flow through the generator for a minimum of 5 minutes if
the generator has not been operating within six (6) hours. This allows clean, dry
oxygen to flow through the generator dielectrics, purging any moisture that may
have accumulated.
CAUTION: If the generator cell contains any moisture, nitric acid will form
in the cell. Nitric acid is a strong acid and can be dangerous.
Formation of nitric acid will decrease the performance of the
generator.
11. Check that the process to be treated is filled and operating properly, and that all
ozone destruct, safety, and ventilation devices are operating.
12. Use the LEFT and RIGHT ARROW keys to adjust the generator power level to
obtain the desired amount of ozone.
13. If any faults or alarms occur during the start-up period, they will show on a flash-
ing banner on the display. Refer to Troubleshooting (Section 11.0).
The generator will not produce ozone under the following conditions:
In idle conditions, gas will flow through the system unless the solenoid valve is
programmed to shut off under certain conditions. The solenoid valve may be shut
off for the following conditions:
• In Remote Mode, if the remote enable signal input is open longer than
10 minutes.
• Alarm conditions (refer to Sections 8.5 and 11.1)
• Failure conditions
The generator is preprogrammed to stop gas flow under the following conditions:
• Door open
• High Feed pressure (oxygen)
• Inverter fault
• Room Ozone or Coolant fail
• High Temperature
Alarm Display Line: Displays any active alarms (refer to Section 11). In Remote
mode, displays “Remote Control Mode” message.
Alarm Messages
OXYGEN FLOW =
OXYGEN FLOWING
System Status
Messages
Figure 3.4
Operation Status Screen
3.4 Keypad
Enter (ENT) Use in the menus to select items and enter data.
Clear (CLR) Brings up either the Operator Menu or the Technician Menu,
depending on which Security Level is active.
When in the Menus, the [CLR] Key will exit back to the pre-
vious menu.
Scroll Keys UP and DOWN Arrow Keys select which of the operating
parameters is displayed in Operation Mode (refer to Section
3.3) or select items in the menus.
Power Control Keys LEFT and RIGHT Arrow Keys increase and decrease the
power applied to the cell from 0 to 100%, in steps of 6.25%.
These keys are ignored in “Remote Mode”.
Pressing the [CLR] Key from the main Operation status display will bring up either the
Operator Menu, or the Technician Menu, depending upon which security level is active.
Technician Mode View and adjust alarm settings, and perform diagnostics and
calibrations. To enter the Technician Mode from the Main
Operation Status screen, enter the 4-digit security code
(“5951”) using the number keys.
STEPS
1. Before applying power to the ozonator, be sure that the cooling water supply is
turned on and the oxygen supply to the generator is between 0.62 to1.03 barg
(9 to 15 psig).
On some systems the cooling water and oxygen will come on with the main
power.
2. After power is applied and any Key on the keyboard is depressed, the gas sole-
noid valve is energized. The message "OXYGEN FLOWING" will appear on the
bottom line. The oxygen flows for 30 seconds to purge the system of moisture
and any residual ozone before the ozonator power level can be brought up.
If any alarm message appears in the Alarm Display Line, clear the message by
correcting the fault condition before proceeding. Refer to Troubleshooting
(Section 11.0) for assistance.
4. Use the Flow Control Valve on the underside of the cabinet to adjust the gas flow
to the desired flow rate between 2.0 slpm (4.2 scfh) and 12.0 slpm (25 scfh),
typically around 9 - 10 sLpm.
Note: The total range of the valve is one turn – 360 deg. Trying to turn it
more than 360 deg will cause damage.
5. Thirty (30) seconds after the "OXYGEN FLOWING" message, the Inverter
Enable relay should energize. The bottom line of the display should display:
"MAKING OZONE," indicating that the generator is ready to make ozone.
6. Check for proper cooling water flow, ozone destruct and safety equipment are
operating, the process being treated is operating properly, and there are no ozone
leaks.
7. After the "MAKING OZONE" message appears, Press the RIGHT Arrow Key to
increase the Power Setting display to the desired output level. The reading will
increase by 6.25% for each press of the RIGHT Arrow Key. Press the LEFT
Arrow Key to decrease the power setting of the inverter to the desired level. The
reading will decrease by 6.25% for each press of the LEFT Arrow Key.
When operating with oxygen flow of less than 4.0 slpm, do not raise the power
level above 75%.
Remote Mode is exactly the same as Local mode, except at Step 6, check that the dis-
solved ozone monitor and 4-20 mA controller are powered on and operating.
After the “Making Ozone” message appears, the power setting will automatically increase
to the value determined by the 4-20 mA control signal.
The message “Remote Control Mode” will be flashing on the display, or “R” shows in the
% Power Display.
Press Clear [CLR] from the main Operation status display. This brings up the Operator
Menu (Figure 5.5, Operator Menu).
NOTE: If the Technician Menu (Figure 6.10, Technician Menu) comes up instead,
press the [0] key (while the Technician Menu is displayed), then select “Yes”
to drop the security level.
OPERATOR MENU
1 OPERATION
2 LOCAL/REMOTE
3 FIRMWARE VERSION
4 CLOCK
Figure 5.5
Operator Menu
Menu Selection
or,
• Using the UP and DOWN ARROW Keys to select the desired item, then
press [ENT] to select.
Press [1] or [ENT] to exit the Operator Menu and return to the main Operation Status
Screen (Section 3.3, Operation Status Display Screen).
Alarm Messages
OXYGEN FLOW =
Operating
6.36 SLPM Parameters
OXYGEN FLOWING
System Status
Messages
Figure 5.6
Operation Status Screen
Press [2] to display the “CONTROL MODE” screen. Select "LOCAL" or "REMOTE"
control of the Power setting;
In LOCAL Mode the % Power is controlled by the LEFT and RIGHT Arrow keys.
In REMOTE Mode, the generator % Power is controlled by the 4 - 20mA input signal.
CONTROL MODE
1* LOCAL
2 REMOTE
Figure 5.7
Local/Remote
Status Screen
This screen indicates the version of firmware used with your generator. This information
may be useful in future maintenance or troubleshooting situations.
MKS EO3-SERIES
OZONE GENERATOR
FIRMWARE P/N SF80284
VERSION: REV-X
Figure 5.8
Firmware Version
Menu Screen
MON
23 JUL 01
09:43:56
Figure 5.9
Day, Date, and
Time Menu Screen
Press [4] from Operator menu to bring up the Clock Menu Screen.
Press the [CLR] key at any time to exit back to the Operator Menu, leaving the clock
unchanged.
2. Use the UP and DOWN ARROW Keys until the correct weekday is dis-
played.
3. Press [ENT] to save the weekday and highlight the Day of the Month.
1. Press the Number Keys to set the numerical day of the month.
NOTE: Pressing Clear [CLR] at any time returns you to the previous
Menu and does not save any changes.
From the main Operation Status screen, enter the Password to get to the Technician Menu, refer
to Section 3.5 (Security Levels).
As an introduction, here is a graphic overview of the first level of each option in the Technician
Menu to see how it operates. Complete detail of each option is provided on the following pages.
To select a menu item, use the UP and DOWN ARROW keys to scroll to the desired item, then
press [ENT], or simply press the number key.
TECHNICIAN MENU
1. OPERATION
2 RELAYS
3 ALARMS
4 WATER METER
5 SYSTEM SETUP
6 OPERATOR MODE
1 2 3 4* 5 6
ALARM SET POINTS CONFIGURE RELAYS WATER METER TYPE SYSTEM SETUP DROP SECURITY
0.00% LEVEL TO OPERATOR
1 CELL TEMPERATURE 1 MANUAL OVERRIDE 1 CONTACTING HEAD 1 LOCAL /REMOTE ACCESS?
2 CELL PRESSURE 2 AUTO/MAN SELECT 2 PADDLE WHEEL 2 REMOTE ALM CONF.
3 FEED PRESSURE 3 AUTOTROL TURB 1 IN. 3 INITIALIZATION
OXYGEN FLOW = 4 OXYGEN FLOW 4 AUTOTROL TURB 2 IN. 4 SECURITY
6.36 SLPM 5 REMOTE 4-20 INPUT 5 DIAGNOSTICS 1 YES
6 CLOCK 2. NO
OXYGEN FLOWING
Figure 6.10
Technician Menu
Press [CLR] to return to a previous screen. Repeated use of [CLR] allows you to return all the
way back to the Technician Menu from anywhere in the program.
NOTE: Some menus return to the Operation Status screen. If desired, press the [CLR] key to
bring up the Technician Menu.
Press [0] to change to the Operator Security Mode (read-only) see Section 3.5 (Security
Levels.
Press [1] or [ENT] to return to the Operation Status Display (Section 3.3).
CONFIGURE RELAYS
1 MANUAL OVERRIDE
2 AUTO/MAN SELECT
This menu is used to manually turn the relays ON and OFF (engineering use).
The rectangle in the center column displays the status of the relay (Filled = ON,
Clear = OFF). The mode of each relay is shown on the right.
When a relay is in MAN mode, press the respective number key to switch the
relay On and Off. When the relay is in AUTO mode, pressing the number key has
no effect.
SELECT RELAY
1 OXYGEN
2 INVERTER
3 READY
4 ALARM
Select the desired relay using the number keys. Press [CLR] to go back to the
“Configure Relays” menu.
All the relays default to AUTO when the system power is removed. To set a relay
to MAN mode:
SELECT AUTO/MANUAL
1 AUTO
2 MANUAL
3. Press [CLR] to go back to the “Configure Relays” menu, then select [1]
to go to the “Relay Manual Control” menu.
To view or adjust the alarm set points, press the desired number key.
1 CELL TEMPERATURE
2 CELL PRESSURE
3 FEED PRESSURE
4 OXYGEN FLOW
5 REMOTE INPUT
NOTE: The values shown are defaults. Actual values are adjusted during final
test and calibration.
To adjust the settings, enter new value using the number keys, then press [ENT].
Press [CLR] to leave the values unchanged.
HIGH ALARM
30.0°C
LOW ALARM
8.00°C
ENT = ACCEPT CLR = EXIT
HIGH ALARM
2.00 BARG
LOW ALARM
0.30 BARG
ENT = ACCEPT CLR = EXIT
HIGH ALARM
2.00 BARG
LOW ALARM
0.37 BARG
ENT = ACCEPT CLR = EXIT
HIGH ALARM
11.50 SLPM
LOW ALARM
2.00 SLPM
ENT = ACCEPT CLR = EXIT
HIGH ALARM
20.1 MA
LOW ALARM
3.90 MA
ENT = ACCEPT CLR = EXIT
1 CONTACTING HEAD
2 PADDLE WHEEL
3 AUTOTROL TURB 1 IN.
4 AUTOTROL TURB 2 IN.
MTR1
GALLONS OR LITERS
PER CONTACT =
0100.00
MTR1
K-FACTOR =
100.00
MTR1
AUTOTROL TURB. 1 IN.
GALLONS OR LITERS
1 GALLONS
2 LITERS
MTR1
AUTOTROL TURB. 2 IN.
GALLONS OR LITERS
1 GALLONS
2 LITERS
1* YES
2 NO
From the “Technician Menu” press [5] to bring up the “System Setup” menu.
SYSTEM SETUP
1 LOCAL/REMOTE
2 REMOTE ALM CONFIG.
3 INITIALIZATION
4 SECURITY
5 DIAGNOSTICS
6 CLOCK
CONTROL MODE
1* LOCAL
2 REMOTE
* Indicates the current operating mode of the E-Series ozone generator. In Local
mode, the % ozone power is controlled by the LEFT and RIGHT ARROW
Keys. In Remote mode the % ozone power is controlled by the remote 4-20
mA signal. (This is the same as in the Operator Menu, Section 5.3.)
REMOTE CONFIGURATION
NOTE: These settings determine the action performed by the Remote Enable
input signal when the system is in LOCAL operating mode. Refer to
Section 5.3 (Local/Remote Menu)..
TIMER VALUE =
002 SEC
INITIALIZATION
1 RESTORE DEFAULTS
2 CALIBRATE PRESSURE
3 CALIBRATE GAS FLOW
4 FLOW CONSTANTS
WARNING THIS
OPTION MAY
REQUIRE YOU TO
RE-CALIBRATE THE
CONTROLLER
ARE YOU SURE?
1 YES
2* NO
* This will reset all the Alarms, Pressure, and Flow calibrations to their default
values.
NOTE: Pressure, Flows, and Alarms are calibrated at the factory. This
will cause the factory calibrations to be lost!
ENTER TO CALIBRATE
To calibrate the Pressure and Flow display, you will need a pressure
gauge (to read 14.5 psi), and a gas flowmeter (1-10 Lpm) (rotometer) is
needed.
Pressure is the most important and must be calibrated first with power set-
ting at 0%.
Flow will be within about 10% without calibration, but only after the
Pressure has been calibrated.
1. Close the T-handle needle valve (bottom of EO3), and adjust the
Pressure Regulator at the oxygen supply output to set the Feed
Pressure to 14.5 psi (1.0 bar). The needle valve may need to be
opened slightly when making small corrections of the Regulator.
ENT TO CALIBRATE
It is normal for the flow display to show an error at power settings above
0%.
2. Adjust the needle valve to get a flow of about 8.0 Lpm. Allow it
to stabilize for a minute.
Note: The total range of the valve is one turn – 360 deg.
Trying to turn it more than 360 deg will cause damage.
Adjust the Flow Alarm high or low set point to avoid getting the
alarm at higher % power settings when the Flow reading drifts.
In the Technician menu, press the “0” key, then the “1” (yes) to
return to the Operator menu (read-only).
(1) +1.687
(2) -2.870
(3) +5.227
(4) +7.966
ENT=ACCEPT CLR=EXIT
NOTE: The flow constants are factory settings and should never be changed.
The Security Code is used at the Main Operation Status Screen to return to the
Technician Mode from the Operator Mode (refer to Section 3.5, Security Levels).
OLD PASSWORD =
NEW PASSWORD =
DIAGNOSTICS
1 ANALOG I/O
2 DIGITAL I/O
3 ALARMS/CONTROL
4 CALIBRATION
NOTE: Displays the values of the analog input signals. Values shown
are typical, not actual.
SCAN COUNT
NOTE: Displays the condition of alarms. Values shown are typical, not
actual.
6.5.5.4 Calibration[4]
(From the Technician Menu - System Setup - Diagnostics)
== FLOW CONSTANTS ==
TX OFFSET: 0000
PRESSURE 77
TEMPERATURE 25.0
FLOW: 10.0
CONSTANT: 1.0
NOTE: Displays the constants used in the gas flow calculations. These
values are subject to change when the Flow Calibration is
executed. They are not adjustable from the keypad.
SUN
23 JUN 00
09:43:56
Refer to Section 5.5 for detailed instructions on adjusting the date and time.
1 = YES
2 = NO
Additional diagnostics are available in the Technician Menu, under System Setup (Section 6.5.5,
Diagnostics).
'RELAY STATES' in the Operation status Display. Use the UP and DOWN ARROW
Keys to view.
OXY - Oxygen
INV - Inverter
RDY - Ready
ALM - Alarm
• The First Line identifies the four relays (Oxygen, Inverter, Ready, and Alarm).
• The Second Line shows a graphic representation of the state (ON or OFF) of each
relay. A filled in box indicates ON.
• The Third Line reads independently of the other lines. It shows the contents of the
Alarm Latch Register (Hexadecimal value) in the left most position (under the
OXY relay symbol) (for use only by MKS engineering).
To the right of the Alarm Latch value are the: Room Ozone Timer, Inverter Fault
Timer, and the High Temperature Timer.
The alarm code that is displayed in the Alarm Latch Register is in the form of a binary
number. All alarms are displayed in plain text in the center of the screen. Refer to Section
11 and Section 6.5.5.3 for more information on alarms.
Example: Alarm code 25 means that the Inverter is disabled, the Oxygen solenoid is dis-
abled, and the Room Ozone input signal is ON [probably causing the disable
(16+8+1=25)].
1 Room Ozone
2 High Temperature
4 High Cell Pressure
8 Oxygen Disabled
16 Inverter Disabled
32 Door Open
Bits 6 & 7 Not Used
The Alarm Codes listed above are the same Alarm Messages shown on the second line
of the Main Display (Section 8.5, Shut-Down Alarms).
• Push the LEFT Arrow Key until the generator is at minimum power.
• Turn the process water off, if necessary.
• Allow the gas to purge at least two minutes.
• Turn the generator switch to the OFF position.
• Turn the cooling water off.
Should the ozone generator shutdown with a fault, the display will indicate which alarms
are active. Alarms will be displayed on the alarm banner in the middle of the display
screen. The generator will flash each alarm in a cycle. Be sure to observe all alarm con-
ditions before continuing.
Your ozone generator has been factory tested to ensure it meets performance specifications
and output. As part of the factory test procedure, your generators ozone output has been
measured using the ultraviolet absorption method of measurement at various machine set-
tings. This information is recorded on the Ozone Generator Test Data Sheet in the
Appendix of this manual. From time to time, you may have the need to estimate approxi-
mately how much ozone your generator is producing. The most accurate method would
be to purchase or rent an ozone monitor capable of measuring high concentration ozone
and re-measuring the actual output at your site.
If access to a monitor is not practical, it is possible to closely estimate your ozone output
by adjusting the machine settings to match the settings shown on the data sheet. At these
settings (and assuming that your generator has been well maintained) your ozone output
should be similar to the output indicated in the data sheet. The most critical settings to
duplicate are:
To select a specific ozone output, first set a gas flow and pressure setting suggested on the
data sheet. While referencing the ozone data sheet or output curve, apply power by push-
ing the RIGHT ARROW key until the power level is in the range that matches your
desired ozone output shown on the graph.
TIP: Your ozone system will operate most efficiently at a low gas flow. Unfortunately,
decreasing the gas flow rate limits how much ozone is created. Select the lowest
gas flow rate that still allows the generator to create the necessary amount of
ozone.
Note: The total range of the gas flow control valve is one turn – 360 deg. Trying to
turn it more than 360 deg will cause damage.
Cooling water temperature has a small effect on ozone output. Refer to the graph which
can be used to determine ozone output at your actual cooling water temperature.
NOTE: Cooling water temperature must be higher than ambient dew point to pre-
vent condensation.
1.10
Ozone Output Factor
1.05
1.00
0.95
0.90
0.85
0.80
40 50 60 70 80 90 100
Cooling WaterTemperature oF
Figure 9.11
Ozone Output vs Water Temperature
It is highly recommended that service and maintenance be performed as set forth below. There
are tables available (at the end of this section) that allow the logging of maintenance work and
daily checks as they are performed. You may want to copy these tables from the manual and keep
the copies with the ozone generator. All service should be performed and logged to ensure war-
ranty compliance.
1. Ensure all gas parameters (gas pressure, flow and temperature) are within the
specified operating limits.
2. Check cooling water flow to ensure it is in pressure and temperature ranges. See
Utility Requirements (Section 2.3.1, Utility Requirements for E-Series Ozone
Generator) for ranges.
3. Check overall system for water or gas leaks and repair as necessary.
4. Verify that the process water stream has not backed into generator.
10.2 Monthly
3. Check the filters in the oxygen supply system and replace as necessary
(if installed).
4. Optional: check ozone output with a high concentration ozone monitor. If out of
desired range (% wt.), adjust the Power Level on generator display to correct.
Some gas flow rate balancing may be required.
5. Check cooling water connections for possible scale formation and clean with cit-
ric acid solution as required.
2. Use low pressure compressed air to remove any obvious dust or lint from the
generator.
10.4 Annually
2. With power disconnected and locked out, check the tightness of all nuts and
screws including the electrical terminals and ground wires.
STEPS
3. Remove all plumbing connections from the bottom of the unit. (Ensure that the
gas and water supplies are off before disconnecting lines).
4. Disconnect the plugs and wires from the control board and the inverter.
6. Remove the two screws from the right hand front and rear corners of the inverter.
7. Remove the eight (8) screws underneath that attach the cell assembly to the
cabinet.
9. Drain as much water as possible from the assembly, then blow the rest out care-
fully, using compressed air regulated to 20 psi maximum.
STEPS
1. Reinstall the cell in reverse order of removal, paying particular attention to not dam-
age the connectors, circuit board, and tubing.
5. Do the Pressure Calibration (Section 6.5.3.2) if the transducer board was replaced.
The inverter power board requires special care in mounting the power semiconductors.
Repairs should only be done by the MKS service center [Section 14.0, Return Goods
Authorization (RGA) Procedure].
When replacing the display control board, first record the alarm settings.
After replacing the display control board or transducer board, you must do the Pressure
Calibration (Section 6.5.3.2) even if the display appears good. Otherwise the Oxygen
Flow will not be correct. Pressure Calibration must be done first, then Flow Calibration is
usually not required.
O XYG E N P R E PA R AT I O N
Semi-
Daily Monthly Quarterly Annually Annually
O Z O N E G E NE R AT O R
Semi-
Daily Monthly Quarterly Annually Annually
Feed Pressure
DATE
Oxygen Pressure
(12 - 15 psi)
Air Compressor
(service per manufacturers
recommendations)
General Cleaning
(with compressed air)
Ozone Destructor
NOTE: This is a template,. You may make copies of this sheet for your maintenance log book.
NOTE: This is a template,. You may make copies of this sheet for your maintenance log book.
This troubleshooting guide will assist you in identifying the most common operating problems
you may experience with your machine. Many of these problems are easily corrected by the oper-
ator, but with other problems or those not understood, you should contact the MKS Technical
Service Department. Have the problem and symptoms clearly defined and operating data avail-
able. Have the following information available when calling your equipment supplier:
11.1 Alarms
These alarms must be cleared by pressing [ENT], except for Inverter Fault which
can only be cleared by shutting the power off.
NOTE: If the system shuts down (green light OFF) but no alarm message is
displayed, check for fluctuations in cooling water pressure, or door
interlock switch needs adjustment.
These alarms display a warning message but do not cause shutdown. The values
for high and low limits are set in the Alarms section under the Technician Menu.
ALARM DESCRIPTION
LOW FEED PRESSURE Oxygen pressure into the EO3 is too low or zero.
HIGH CELL PRESSURE Gas pressure inside the cell chamber is too high.
LOW CELL PRESSURE Gas pressure inside the cell chamber is too low.
HIGH OXYGEN FLOW Flow Control needle valve is open too much.
REMOTE CONTROL MODE Indicates that the EO3 is being controlled by the
(not an alarm) 4-20 mA input signal, the left and right arrow
keys are disabled.
* The Remote Enable input circuit is opened (input terminals # 12 and #13).
• In LOCAL mode a menu can be set to cause: message only, ozone off, or ozone
and gas off.
• In Remote mode: ozone power goes to 0%. Gas flow will stop after 10 minutes.
• To resume operation, close #12 and #13.
If the suggested remedy fails to correct the problem, and no other malfunction can
be found, it is possible that the alarm menu setting may be incorrect, or a sensor
needs to be re-calibrated, or has failed and may need to be replaced.
This troubleshooting guide can assist you in identifying common operating problems you
may experience with your machine. The operator can easily correct many of these prob-
lems, however, for those that persist or are not understood, contact the
MKS Customer Support Center. Have the following information available when calling
the Customer Support Center:
T R O U B L E S H O O T I N G GUI DE
Ozone generator Emergency Stop button Turn the knob on the Emergency
does not turn ON pressed. Stop to release.
High Temperature Alarm The cooling water flow may Refer to data sheet for minimum
or abnormally high tem- be too low or off. cooling water flow at 29°C
perature display. (85°F) water inlet temperature.
High Temperature Alarm The oxygen flow may be too Refer to the data sheet for
or abnormally high low specific oxygen flow rate.
temperature display.
(continued)
4-20 mA signal wired Reverse 4-20 mA wires
incorrectly (+ ON 15). Shield on 4-20
mA should be grounded only
at source end.
“Room Ozone or Coolant” Not enough cooling water Check the supply of cooling
Alarm Shutdown water, check flow with bucket
(The coolant flow switch and and stopwatch. Flow must be at
safety monitor are usually least 0.5 gpm.
wired in series, either will
cause shutdown)
Failed coolant flow switch Clean or replace flow switch.
“Room Ozone or Coolant” Ozone leak Evacuate the area until safe,
Alarm Shutdown then repair the leak.
(continued)
The set point of the remote Locate the source of ozone leak
ambient ozone monitor has in plumbing, too much ozone to
been exceeded by a source of process, etc., and take correc-
ozone tive measures. Destructor
malfunction.
“Inverter Fault” Alarm Inverter Power Board failure Return to factory for repair.
(continued)
Generator turns ON, does Oxygen supply not working Check and correct oxygen sup-
not produce ozone or ply. If using an oxygen con-
produces only small centrator, ensure that the
amounts of ozone exhaust air pulse occurs about
once each second.
Pressure and/or flow Faulty ground connection Check and repair ground con-
displays fluctuate widely nections and terminals.
or stuck at zero
Flow display changes when Interference from high voltage This characteristic is normal -
power setting is raised supply adjust alarm settings as needed
above 0% to avoid alarms. Set power to
0% for accurate readings.
“High Feed Pressure” Oxygen pressure into the gen- Check the oxygen supply,
Alarm erator is high lower the pressure into the
EO3,
[1.2 barg (18 psig) maximum].
“Low Feed Not enough oxygen pressure Check for problems in oxygen
Pressure”Alarm supply. Increase oxygen pres-
sure. Adjust the alarm set
point.
“High Cell Pressure” Ozone output pressure is Check for leaking process water
Alarm too high back into generator. Ozone cell
will require replace- ment.
“Low Temperature” Cooling water to cold. Alarm Use warmer water, adjust alarm
Alarm set point incorrect. Failed set point. Transducer board
Temperature Sensor. may need to be replaced.
“Low Remote Input” 4-20 mA signal to low Faulty Check 4-20 mA wiring. Check
Alarm wiring connection connections at terminal strip.
All Alarms Alarm set point may be incorrect Check to be sure the actual
pressures and flows are within
specifications, and adjust the
alarm set points
(Technician Menu).
Generator ON, but stops There was a momentary loss of Increase the cooling water flow.
producing ozone - “Press cooling water or fluctuating pres- Ensure that the supply of cooling
any Key” message is sure (wire terminals 10 & 11). water is reliable.
displayed
1100765 REGULATOR,AIR/OXY,0.25"PF
1225129 CONCENTRATOR,OXYGEN,ATF-25
1231631 Filter Element, Air/Oil Vapor Removal (FLT, ELEMENT, AIR, OIL
VAPOR RMVL)
1231632 Filter Element, Air/Oil Removal (FLT, ELEMENT, AIR, OIL REMOVAL)
1231633 Filter Element, Air Particulate Removal (FLT, ELEMENT, AIR PARTIC, 1
MICRON)
Figure 13.12
Electrical Hook-Up Drawing
Figure 13.13
Installation Drawings
Page 63 MKS Instruments OM86225 Rev. A
E-Series Ozone Generator Manual
13.3 Electrical Schematic
Figure 13.14
Electrical Schematic
Page 64 MKS Instruments OM86225 Rev. A
E-Series Ozone Generator Manual
Ozone Material Safety
Data Sheet
Ozone has a readily identifiable odor, recognizable in extremely minute quantities.
Concentrations above 0.1 ppm can cause headache, eye irritation, respiratory problems,
dizziness, nausea, and at higher concentrations, death. See attached “Material Safety Data
Sheet No. 34 Ozone.”
It is important for the customer to install an ozone leak detector near the ozone-generating
equipment. It should be connected to the Ozone Generator interlock so that ozone generation
will be stopped if an ozone leak is detected.
WARNING!
Understand and implement the OSHA and locally
required safety laws involving the generation of
ozone using high voltages. MKS assumes no liability
for the user’s failure to comply with these
requirements.