Agilent Helium Leak Detector

User Manual
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2 Agilent Helium Leak Detector User Manual

 Contents

Contents

1 Instructions for Use 9

About this manual 10
Validity 10
Definitions and terminology 11
Definition of Caution, Warning and Note 11
Warning Symbols 12
Safety 14
Proper and Improper use 14
Solvents 14
Vacuum Equipment and Cleanliness 15
O-ring Care 15
Metal Seal Care 16
Equipment, General 17
Touch Panel Display 18
Radio 18
Power and Static Sensitivity 19
Spectrometer 22
Pumps 22
Protective equipment 23
Safety guideline for Helium Leak Detector 24
Product Description 25
Transport & Storage 25
Installation 26

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 Contents

Preparation for Installation 26

Unpacking 26
Installation requirements 32
Bench System Installations 33
Helium 34
Recommended Additional Service 34
Startup and Operation of the Leak Detector 35
Startup Procedure 35
Shutdown Procedure 37
Maintenance 38
Daily Maintenance 42
Sensitivity Check 42
Dry Nitrogen Vent 42
Disposal 43
Service 44

4 Agilent Helium Leak Detector User Manual

 Contents

2 Technical Information 45
Description of the Leak Detector 47
Leak Detector Configurations 49
Technical Specifications 50
Front Panel Display and Operations 52
Home Screen 53
Front Panel Display - Home Screen Display 55
Rear Panel 57
Features 61
Operating the Leak Detector 62
Screens 62
Basic Functions 62
Home Screen 63
Graphical Display Screen 69
Menus Screen 70
Calibration Screen 71
Calibration Set-Up 71
Test Configuration Screen 77
Test Configuration 77
Reject and Audio Set Points 77
Test Configuration Advanced Features 80
Transfer to Test 83
Stabilization Wait Timer 84
High Pressure Test Set-Up Procedure 84
Home Screen - Activate Gross Test 85
Application Setup 86

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 Contents

Sniff Method 87
Spray Method 89
High Sensitivity 91
Auto Sequencer 92
Auto Sequencer Set-Up 95
Rough Time Setup 95
Test Time Setup 96
Set Point 1 Setup 96
Set Point 2 Setup 96
Using Set Point 1 and 2 together (Optional) 96
Pressure Set point (High & Low Limit) - Optional 96
Split Flow 97
PPM (parts per million) Sniff Method 100
Settings Screen 110
Settings Menu 110
Main Settings 111
Configure Date and Time 113
Screen Settings 115
Analog Output 117
Remote Control 119
Password and Restrictions 120
Wireless 121
Maintenance Screen 122
Maintenance Menu 122
Software Update 123
Internal Calibrated Leak Setup 124
Manual Tuning 127

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Maintenance: Valve Control 130

Maintenance: Pump 133
Maintenance: Gauge Calibration 134
Current Setup Menu 139
Communications Protocol 143
Protocol (RS-232) 143
Communicating with RS-232 144
Windows HyperTerminal Set-Up Instructions 144
Printing with HyperTerminal 146
Customer Accessible Inputs and Outputs 157
Serial Connector 157
I/O Connector 158
Introduction to Leak Detection 161
Leak Testing—Why is it Needed? 161
Agilent's Helium Leak Detection Technologies 161
Methods of Leak Testing 163
Vacuum Testing Method (Outside-in) 164
Pressure Testing Method (Inside-out) 165
System Leak Test Methods 167
Typical Leak Detection Applications 168
Quality Control of Production Parts and Assemblies 168
Maintenance of Systems 169
System Integrated Leak Detection 170
Mass Produced Parts 170
Accessories and Spare Parts 172

Agilent Helium Leak Detector User Manual 7

 Contents

8 Agilent Helium Leak Detector User Manual

 Instructions for Use

1 Instructions for Use

About this manual 10
Validity 10
Definitions and terminology 11
Definition of Caution, Warning and Note 11
Warning Symbols 12
Safety 14
Proper and Improper use 14
Solvents 14
Vacuum Equipment and Cleanliness 15
O-ring Care 15
Metal Seal Care 16
Equipment, General 17
Touch Panel Display 18
Radio 18
Power and Static Sensitivity 19
Spectrometer 22
Pumps 22
Protective equipment 23
Safety guideline for Helium Leak Detector 24
Product Description 25
Transport & Storage 25
Installation 26
Preparation for Installation 26
Unpacking 26
Installation requirements 32
Bench System Installations 33
Helium 34
Recommended Additional Service 34
Startup and Operation of the Leak Detector 35
Startup Procedure 35
Shutdown Procedure 37
Maintenance 38
Daily Maintenance 42
Sensitivity Check 42
Dry Nitrogen Vent 42
Disposal 43
Service 44

Agilent Helium Leak Detector User Manual 9

 Instructions for Use

About this manual

Validity
This manual lists the instructions for the users of the Helium Leak Detector (HLD),
with particular reference to the notions relating to safety, operation and first level
maintenance, limited to maintenance operations for which the user is responsible.
The maintenance operations, illustrated in the specific sections, with specific
provisions relating to the higher level of maintenance (personnel specifically trained
for maintenance operations) must not be carried out by the user.
For a correct installation and start/stop, please refer to "Technical Information"
section.

NOTE 1 This manual contains useful information so that all personnel using the
Helium Leak Detector (HLD) can operate it safely and guarantee perfect
efficiency, for its entire life span.
2 Keep this manual, together with all the related publications, in an accessible
place known to all operators/maintenance personnel.

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 Instructions for Use

Definitions and terminology

Definition of Caution, Warning and Note

Some important references of this manual are highlighted and framed in
contrasting color.

CAUTION Caution messages are displayed before procedures which, if not observed, could
cause damage to the equipment.

WARNING Warning messages draw the operator's attention to a specific procedure or

practice which, if not performed correctly, could result in serious personal
injury.

NOTE Notes are intended to call attention to important information and provide more
detail regarding specific steps.

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 Instructions for Use

Warning Symbols

The following is a list of symbols that appear in conjunction with warnings on the
HLD. The hazard they describe is also shown.
A triangular symbol indicates a warning. The meanings of the symbols that may
appear alongside warnings in the documentation are as follows:

Dangerous voltages Generic hazard Protective Ground

Terminal

Alternate current (AC) Power ON Power OFF

Earth (Ground) Terminal Frame or chassis

Hot surfaces Terminal

Indoor, Dry Location

Use Only European Declaration of
Conformity Waste Electrical and
Electronic Equipment

12 Agilent Helium Leak Detector User Manual

 Instructions for Use

The following symbol may be used on warning labels attached to the instrument.
When you see this symbol, refer to the relevant operation or service manual for the
correct procedure referred to by that warning label.

The following symbols appear on the instrument for your information.

Generic Hazard

Earth (Ground) Terminal

CE certification

Waste Electrical and Electronic Equipment

Agilent Helium Leak Detector User Manual 13

 Instructions for Use

Safety
This section contains the information, prescribed by the Low Voltage Directive
2014/35/EU, which is essential for the compliance and observance of the safety
regulations both generally and in relation to the specific use of the product.
Failure to comply with these instructions and the other instructions contained in this
manual may render the safety conditions envisaged in the design phase inefficient and
cause accidents to those operating the product.
Agilent Technologies declines all responsibility for damage to the product or for the
physical safety of the operator or third parties deriving from the non-observance of the
safety rules indicated in the technical documentation.

Proper and Improper use

Solvents

WARNING The mechanical components of leak detectors are typically cleaned with
alcohol, methanol, or other solvents.
When heated, sprayed, or exposed to high-temperature equipment, these
solvents become flammable and explosive, causing serious injury or death.
Do not use these solvents near a high-temperature source. Ventilate the
working area with a blower and work in a large, well-ventilated room.
Alcohol, methanol, or other solvents are irritants, narcotics, depressants
and/or carcinogens. Their inhalation and/or ingestion may produce serious
side effects. Prolonged or continued contact with the skin results in
absorption through the skin and moderate toxicity. Always ensure that
cleaning operations are carried out in large, well-ventilated rooms, and wear
eye shields, gloves, and protective clothing.
To clean the leak detector enclosure and the Touch Panel display use only a
soft cloth slightly dampened with water or a mild soap.
DO NOT USE EXCESS WATER OR CLEANING SOLVENTS OF ANY KIND.
Avoid splashing any cleaning solvents into the unit through the ventilation
openings or Front Panel buttons. Wipe the surface with a dry lint-free cloth.

CAUTION Do not clean any aluminum parts with Alconox®. Alconox is not compatible with
aluminum and will cause damage.

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Vacuum Equipment and Cleanliness

Cleanliness is vital when servicing the leak detector or any vacuum equipment.
There are some techniques that are more important in leak detector servicing than
in general vacuum work:

CAUTION Do not use silicone oil or silicone grease.

Use powder-free butyl or gloves to prevent skin oils from getting on vacuum
surfaces

NOTE Agilent does not recommend the use of vacuum grease.

Vacuum grease absorbs helium tracer gas and releases this slowly resulting in
helium background during leak test operations. If it must be used, use it sparingly
and avoid silicone types.
Apiezon® L grease is recommended (Agilent Part No. 695400004).

O-ring Care
When removing, checking or replacing O-rings, keep in mind the following:

NOTE Agilent recommends replacing all O-rings during routine maintenance or during any
maintenance procedure requiring that O-rings be removed.

NOTE Due to the effective cleaning nature of VacuSolv solvent and its residue-free
properties, Agilent’ Component and Spectrometer Cleaning Kit (Part Number
670029096), used in accordance with the kit instructions, is recommended for
cleaning spectrometer components. The kit can also be used for fine cleaning of
other parts in the leak detector’s vacuum system such as valves and fittings. No
rinsing steps or high-temperature drying are required following cleaning with
VacuSolv. Although appropriate precautions are advised, VacuSolv is compatible
with most materials and does not contain toxic chemicals or CFCs
(chlorofluorocarbons).
Other acceptable solvents are isopropyl alcohol (IPA) or Dow Corning® OS-20.

Agilent Helium Leak Detector User Manual 15

 Instructions for Use

CAUTION Remove O-rings carefully with your fingers. Do not use metal tools for this
task; this prevents scratching of any sealing surfaces.

• Wipe all O-rings clean with a lint-free cloth before installation to ensure that no
foreign matter is present to impair the seal.
• Do not use grease or any other substance on O-rings that will come in contact
with the spectrometer.
• Do not use alcohol, methanol or other solvents on O-rings. Doing so causes
deterioration and reduces their ability to hold a vacuum.
• Agilent does not recommend the use of vacuum grease. If applicable, apply a
small amount of Apiezon® L grease and wipe the O-rings shiny dry.

Metal Seal Care

CAUTION Metal Seals must be replaced during routine maintenance or during any
maintenance procedure required. All fasteners must be installed and torqued per
assembly procedure specifications. Remove Metal Seals carefully with your
fingers. Do not use metal tools for this task, this prevents scratching of any
sealing surfaces. Wear non-powdered, ESD safe Nitride or equivalent gloves prior
to removing or replacing Metal Seals.
• All Metal Seals come in clean room condition packages. No cleaning is
required. If necessary, Metal Seals can be cleaned using alcohol or methanol.
Wipe all Metal Seals clean with a lint free cloth before installation to ensure
that no foreign matter is present to impair the seal.
• Do not use grease or any other substance on Metal Seals that will come in
contact with the spectrometer.

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 Instructions for Use

Equipment, General
Environment of intended use:
 Indoors use in an industrial and laboratory installation only.
 Altitude up to 2000m
 POLLUTION DEGREE 2, Material group III
 Operating Temperature: +12 °C to +40 °C, Relative Humidity (RH) up to 90%
max., non-condensing.
 Storage ambient conditions: RH from 0% to 95%, non-condensing, temperature:
-20°C to +60°C.

• Do not use in presence of flammable or explosive gas.

WARNING
• Do not attempt to disassemble or modify the equipment. Such action could
lead to electric shock or injury. Agilent's authorized technician will do any
repair work.
• If there is smoke or unusual smell or noise, stop the using the equipment
immediately, and contact the Agilent Service Cent.

WARNING The leak detector is not designed for use with hazardous gases.
Verify that the system to be tested has been purged of all hazardous gases
prior to using the leak detector. When testing a system that contained
hazardous gases, connect the exhaust of the leak detector to a scrubbed or
toxic containment exhaust. Exposure to hazardous gases could result in
serious injury or death.

WARNING
Equipment tightness is guaranteed for normal operating conditions when the
equipment leaves the factory. It is the user’s responsibility to maintain the
level of tightness, particularly when pumping dangerous products.

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 Instructions for Use

CAUTION The performance and operating safety of this equipment can only be guaranteed
if it is operated according to normal conditions of use.
Allow at least 2 to 3 feet of clearance adjacent to the slots at the front, sides and
back of the equipment enclosure.
Allow sufficient room for the operator to safely maneuver to perform testing.

Touch Panel Display

CAUTION Do not apply excessive pressure to the Touch Panel display as this may cause
smears.

In general, the lower the temperature, the longer it takes the Touch Panel display
to turn on. Performance of the Touch Panel display may deteriorate in low
temperature.

Radio
The Wireless Remote Control and Base Board PCB are built around Laird's, model
RM024, RF transceiver module operating in 2.4 GHz ISM band. The same type of
the RF module is built in an Agilent Technologies Helium Mass Spectrometer Leak
Detector Wireless Base Station PCB and Wireless Remote unit (see Agilent
Technologies Helium Mass Spectrometer Leak Detector Wireless Remote
Operational Manual (6999099945A).
Agency Identification Numbers for Laird, Model: RM024 AC4424-100:
 US/FCC ID: KQL-RM024
 CAN/IC: RSS-210
 EUR/ETSI EN: CE
 Taiwan: CCAI13LP3400T1, CCAI13LP3330T3
are also applied to the Agilent's Wireless Remote and Agilent Technologies Helium
Mass Spectrometer Leak Detector Wireless Base Station, when the units are used
the approved antennas.

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 Instructions for Use

WARNING The Wireless Remote complies with Part 15 of the FCC Rules. Operation is
subject to the following two conditions: (1) This device may not cause
harmful interference, and (2) This device must accept any interference
received, including interference that may cause undesired operation.
To satisfy RF exposure requirements for mobile type transmitting devices,
maintain a separation distance of 20 cm or more between the antenna of the
Wireless Remote and persons during operation.
Maintain a separation distance of 20 cm or more between the operator and
the RF antenna of the leak detector with a wireless base station.

CAUTION Use only approved type of antennas for:

• Wireless Remote: Centurion, Model WCP2400-MMCX2, www.centurion.com.
• Agilent Technologies Helium Mass Spectrometer Leak Detector Wireless Base
Station, Nearson, Model S181FL-5-RMM-2450S, www.nearson.com.

Power and Static Sensitivity

WARNING Depending on the unit configuration ordered, the mains power supply
requirements for Agilent Technologies Helium Mass Spectrometer leak
detectors are:
• 100 VAC, 50 Hz, 5 A
• 115 VAC, 60 Hz, 5 A to 9 A (G8611A)
or
• 230 VAC, 50/60 Hz, 3 A to 4 A
Before powering the unit for the first time, verify that the unit is configured to
operate for the local mains supply voltage. Need nominal current for all
models.

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 Instructions for Use

CAUTION Use surge protection to improve the immunity of the leak detector against
unidirectional transients caused by the following phenomena:
• Switching phenomena in the power network (e.g., switching of capacitor
banks, inductive loads, electrical motors, etc.)
• Faults in the power network
• Indirect lightning strokes.

CAUTION Many components of the leak detector are static sensitive.

Wear a grounding device when performing any maintenance on the leak detector,
especially when performing maintenance of static sensitive parts, such as circuit
boards and the spectrometer.

This equipment has been tested and found to comply with the limits for Class A
CAUTION digital device, pursuant to Part 15 of FCC Rules. These limits are designed to
provide reasonable protection against harmful interference when it is operated in
a commercial environment.
This equipment generates, uses, and can radiate RF energy, which if not installed
and used in accordance with the instructional manual, can cause harmful
interference to radio communications.
When this equipment is operated in a commercial environment, operation is
subject to the following two conditions:
• This equipment must not cause harmful interference.
• This equipment must accept any interference received, including interference
(RF and ESD) that may cause undesired operation.
The equipment may need to be reset after RF and/or ESD events by cycling the
Power Switch/Circuit Breaker on the back panel of the unit.
Operation of this equipment in a residential area is also likely to cause harmful
radio communications interference, in which case, the users will be required to
correct the interference at their expense.

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 Instructions for Use

CAN/CSA-C22.2 No. 61010-1-12 - Safety Requirements for Electrical

WARNING Equipment for Measurement, Control, and Laboratory Use - Part 1: General
Requirements.
UL Std. No. 61010-1, 3rd Edition - Safety Requirements for Electrical
Equipment for Measurement, Control, and Laboratory Use - Part 1: General
Requirements.
EMC Emissions and Immunity - ETSI EN 301 489-1 v2.2.0 (2017-03)
Electromagnetic Compatibility and Radio Spectrum Matters (ERM);
Electromagnetic Comparability (EMC) standard for radio equipment and
services; Part1: Common technical requirements.
• Any modifications on the part of the user are liable to cause non-compliance
with regulations or affect the EMC performance and the safety of the product.
Agilent cannot be held responsible for consequences resulting from such
intervention.
• Before powering the unit the first time, verify that the unit is configured to
operate for the local mains supply voltage.
• The equipment can be damaged by:
 Incorrect mains AC supply voltages
 Radio Frequency (RF) and Electrostatic Discharge (ESD) energy inputs
that exceed the maximum ratings
 Operating in very high temperatures or without adequate ventilation
 Immersion in liquids
 Physical abuse
• All electrical connections must be performed by a qualified electrician and
must comply with national and local codes.
• Opening the enclosure may expose hazardous voltages. Always disconnect
the power cord and interface cables before opening the enclosure. Do not
touch the power inlet’s contacts for at least 10 seconds after disconnecting
the power cord.
• Electrical installation must include the appropriate branch circuit (20 A
maximum), with a long time delay and a reliable earth ground.
• Use only the power cord that was provided with your leak detector. The use of
extension cords is not recommended and could result in damage to the
equipment and loss of warranty.
• To avoid electric shock, connect the product power cord to a grounded power
receptacle. A power cord with a grounding conductor is required.
• Allow an adequate distance (2 to 3’) from the back of the leak detector to the
power source. This ensures easy access to the power cord for connecting or
disconnecting purposes.

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 Instructions for Use

Spectrometer
Store the Ion Source/Preamplifier sub-assembly in a cool, dry area in a
WARNING tightly sealed, ESD protected container. Wear lint-free gloves when handling
the spectrometer. Wash hands thoroughly after handling the spectrometer
filaments and especially before smoking or eating.

CAUTION The spectrometer operates at a very high vacuum produced by the high vacuum
pump. Service of the spectrometer require that this vacuum be vented to the
atmosphere.

CAUTION Do not use grease or any other substance on O-rings or metal seals that will
come in contact with the spectrometer.

CAUTION If the spectrometer magnet comes in contact with a magnetic surface, the
magnet can become degraded causing the spectrometer to lose sensitivity.

Pumps

To avoid injury, use proper lifting techniques when moving pumps. Two
WARNING people may be required to move pumps safely.

The vacuum pumps are also compressors; incorrect operation may be

WARNING dangerous. Study the Mechanical Pump Operation Manual enclosed with
your pump before starting pumps.
The pumps are designed to prevent any thermal risk for user safety.
However, specific operating conditions may generate temperatures >70 °C.
Hot oil burns the skin. Service of the pumps in this area must be performed
by authorized personnel only. Stand back from a mechanical pump before
starting it.

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 Instructions for Use

To avoid injury, wait until the turbo pump is completely stopped before
WARNING disconnecting it from the vacuum system.
Check the oil level often. Do not allow oil-based mechanical pumps to run
when the oil level is below the LOW mark.
Damage to pumps can occur if operated with no oil, if the oil level is too high
or if the oil has become discolored.

Protective equipment
The protective equipment of the operators who are executing the maintenance of
the Leak Detector must always be adequate for the type of operation being
executed. Furthermore, it must comply with the safety requirements of the
legislation in force in the country in which the machine is used.
In general, the operator must wear accident-prevention shoes while handling the
Helium Leak Detector and during installation.

WARNING Danger to health by hazardous substances during maintenance or

installation.

• Depending on the process peculiarity, vacuum pumps, components or

operating fluids can be contaminated by toxic, reactive or radioactive
substances.
• Wear adequate protective equipment during maintenance and repairs or in
case of reinstallation.

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 Instructions for Use

WARNING Risk of injury through falling objects

When transporting vacuum pumps by hand, there is a danger through loads

slipping and falling down.

• Carry small and mid-size vacuum pumps two-handed.

• Any equipment heavier than 20 kg should be transported using a suitable
lifting device.

• Wear safety shoes with steel toe cap according to directive EN 347.

Safety guideline for Helium Leak Detector

WARNING To avoid damage to equipment and to prevent injuries to operating

personnel the installation instructions as given in this manual should be
strictly followed!

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 Instructions for Use

Product Description

This equipment is designed for use by trained personnel. The user should read this
instruction manual and any other additional information supplied by Agilent before
operating the equipment. Agilent will not be held responsible for any events that
occur due to non-compliance with these instructions, improper use by untrained
persons, non-authorized interference with the equipment, or any action contrary to
that provided for by specific national standards.
The following paragraphs contain all the information necessary to guarantee the
safety of the operator when using the equipment. Detailed information is supplied
in “Technical Information”.

Transport & Storage

If the leak detector is not used immediately, it can be stored as received without
special precautions. A dry, relatively dust-free area is preferred. The required
environmental conditions for storage are:
 0% to 95% relative humidity, non-condensing
 -20 °C (-4 °F) to + 60 °C (+ 140 °F) ambient temperature.

CAUTION Never leave the AA batteries in the Wireless Remote unit if it is will not be in use
for a long period of time.

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 Instructions for Use

Installation
Preparation for Installation
The following items are included in the shipment:
 Agilent Technologies leak detector configured and completely assembled as
ordered
 All necessary power cords, as ordered
 Any optional equipment ordered.

Unpacking

WARNING Unpacking the Leak Detector: Always work in a team of at least two people.
Wear personal protective equipment (PPE), including gloves, boots, and a
weight belt to avoid injury.

Remove from Skid

1 Take the entire skid and box to an open area. Remove the shipping straps and
pull the cardboard box straight up, over the leak detector. Save the box and the
skid in case you need to do a return shipment (see following figure).

ON

Figure 1 Remove from Skid

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 Instructions for Use

2 Examine the leak detector for damage (whether a mobile unit with cart and
wheels, portable, or benchtop), and remove the remaining shipping straps and
top plastic shower cap cover (see following figure).

Figure 2 Leak Detectors Unboxed

3 Unpack a mobile unit with wheels by:

 Removing the foam protective padding, propping up leak detector, placed
between the two sets of wheels by gently tilting the leak detector a few
degrees sideways and pulling the foam out. Keep castor wheels locked
until specified to unlock them.
 Removing the wooden block preventing the castor wheels from moving by
unscrewing the wing nuts (see following figure). Set the wing nuts aside.

Figure 3 Mobile Unit

 Gently rolling the leak detector off skid.

Agilent Helium Leak Detector User Manual 27

 Instructions for Use

Undo Shipping Locks

A leak detector with either an IDP-15 pump or a TS620 pump is shipped with
shipping lock bolts to secure the pump during transit. Remove these shipping locks
before powering on the leak detector to prevent excessive rattle and noise during
operation (see following figure).

Figure 4 Shipping Locks

1 Use a flat tip screwdriver to remove the side walls from the leak detector cart.
Remove the panels and set aside.
2 For the:
 IDP-15 model, also remove the rear panel of the cart, opposite of the handle
to access the rear of the pump, opposite the pump cooling fan. If any,
remove and file paperwork attached to the pump.

Figure 5 IDP-15 Rear Pump Access

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 Instructions for Use

Use the provided 4 mm T-handle Allen wrench to turn the locks clockwise
to loosen; the IDP-15 ship locks only tighten/loosen, and are not removable
(see following figure).

Figure 6 IDP-15 Shipping Locks Loosening

 For the TS620 pump, use a 10 mm driver to remove the shipping bolts (one
on each side of the pump base) (see following figure).

Figure 7 TS620 Shipping Locks Removal

Agilent Helium Leak Detector User Manual 29

 Instructions for Use

3. Adding Oil
Oil Rotary Vane Pumps must be filled with oil before operation. These include the
DS40-M, DS302, and DS602 pump model leak detectors (see following figure).

Figure 8 Oil-based Pumps

a) Use a funnel when adding oil, fill to the center of the sight glass marking.
b) For the:
 DS40-M, open the top unit of the leak detector side away from screen
(see following figure).

Figure 9 DS40-M Oil Access

 Mobile units that require oil (DS302 and DS602) units, open the bottom
cart and fill to middle of sight glass marking (see following figure).

30 Agilent Helium Leak Detector User Manual

 Instructions for Use

Figure 10 Mobile Unit Oil Fill

Powering Up
1 Ensure that the roughing pump is switched on and if applicable (IDP-15), set to
the correct voltage setting.
2 Switch the leak detector on, cover the leak detector inlet with a blank-off cap
(provided and already in place), and wait for the screen to read System Ready
before operating.

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 Instructions for Use

Installation requirements
Installation requirements are described in the following table.

Table 1 Installation Requirements

Item Requirement

Leak Detector Location • Close to its power source.

• Two to three feet clearance for proper ventilation.
• Sufficient room for the operator to safely maneuver to perform testing.

NOTE: Additional ventilation requirements for your specific application are

discussed in Section “Recommended Additional Services”.

NOTE: When installing a bench system with a mechanical pump, the power
cord for that pump, if connected to the back of the leak detector, cannot exceed
three meters. Additionally, connect the mechanical pump to the leak detector
using the shortest possible vacuum connection to maximize vacuum
performance.

Power See Table 5.

Mains Supply Voltage Fluctuations Must not exceed ±10% of the nominal voltage.

Pollution Pollution Degree 2 per EN61010-1 Standard.

Fixed Mains Socket Outlet Connect to a building protective earthing system.

32 Agilent Helium Leak Detector User Manual

 Instructions for Use

Bench System Installations

The following figure represents the process for installation of the bench system version of
the Agilent Technologies Helium Mass Spectrometer Leak Detector. The following figure
is a drawing of a Bench Mount Leak Detector with External DS302 Wet Rotary Vane
Pump, Model G8612A with individual components shown.

Figure 11 Bench Mount Leak Detector with External DS302/DS602 Wet Rotary Vane Pump,
Model G8612A\GS8612

The following figure is a drawing of a Bench Mount Leak Detector with External
TS620 Dry Scroll Pump, Model G8612B with individual components shown.

NOTE Cut the ¾” black tubing into two equal parts as shown.

Figure 12 Bench Mount Leak Detector with External TS620 Dry Scroll Pump, Model G8612

Agilent Helium Leak Detector User Manual 33

 Instructions for Use

The following figure is a drawing of a Bench Mount Leak Detector with External IDP-
15 Dry Scroll Pump, Model G8612C with individual components shown.

Figure 13 Bench Mount Leak Detector with External IDP-15 Dry Scroll Pump, Model G8612C

Helium
Welding grade helium in a standard cylinder with pressure regulating valve and
hose is required for testing products and leak checking.

Recommended Additional Service

The following additional services are recommended, based on the application:
 Connect an exhaust hose to the foreline pump and vent it outside of the room,
or to the facility’s exhaust, to reduce the particulate count and the helium
background signal.
 When using oil lubricated mechanical pumps, use an oil mist eliminator on the
exhaust port of the mechanical pump to reduce the oil mist from the exhaust.
 Oil mist eliminators can, however, become saturated with oil causing slower
pumping speeds and higher helium backgrounds in the leak detector. The
replacement time interval of the oil mist eliminator is determined by whether
the user frequently operates at elevated roughing pressures, pumps on large
volumes, or frequently cycles the system. Refer to Table 29 on page 170 and
Table 31 on page 172 for the mist eliminator and replacement cartridge part
number.
 Dry nitrogen vent to keep the test port dry (for more information see
Dry Nitrogen Vent section).
 Adequate circulation to prevent an increased helium background level.

34 Agilent Helium Leak Detector User Manual

 Instructions for Use

Startup and Operation of the Leak Detector

Startup Procedure
To start the leak detector:
1 Plug the leak detector power cord into an appropriate mains supply receptacle.
2 Move the power switch on the rear power control panel to the l position. If you
have a bench system with a separate backing/roughing pump, turn the pump
on. The Test button is disabled on start up until System Ready appears on the
Home screen. Once the leak detector boots up a startup wizard appears on the
touch panel display allowing you to change the time and language, and the
ability to scan a QR code for product registration.
3 Select choice of language, time/type (AM, PM & 24) and system setup.
The System Ready indication appears on the Home screen. If the leak detector
is being started after a long period of being off (several hours), it can take up to
five and a half minutes to stabilize and provide reliable, quantitative leak rate
readings.
4 The leak detector is capable of performing an automated calibration routine
using either an internal calibrated leak (factory installed), or an external
calibrated leak placed into the system test port. Refer Section “Calibration Set-
Up” to properly set-up the leak detector for auto-calibration.

NOTE If the system was recently calibrated before shut down, it can be used for
qualitative testing. Read the standard leak to verify accuracy. For more accurate
quantitative leak values, perform a calibration 20 minutes after start-up.
To accurately read in the most sensitive decades (E-10 and E-11), warm up the leak
detector for at least one hour prior to performing a full calibration. When leak
checking in the E-9 atm-cc/sec range or higher, you can use the leak detector prior
to one hour and verify system performance by assuring that the system can
accurately read the internal calibrated leak.
The system is shipped from Agilent with the Minimum Range function turned ON
and the bottom range set at the E-10 range (atm-cc/sec). To accurately test in the
E-11 range, careful control of materials and the environment is required, consult a
Agilent sales engineer for support.

Agilent Helium Leak Detector User Manual 35

 Instructions for Use

5 Execute a calibration routine:

 Press Test on the front panel to place the system in test mode.
 Select Menu Tab on the Home screen.
 Select Calibration option.
 Press Calibrate with Internal Leak Mode: Full.
 The system performs an automated internal calibration of the system.
External leak:
 Press VENT to vent the leak detector and then install a calibrated leak into
the system test port and press TEST on the Home screen.
 Select Calibration option from the Menus selection.
 Press Calibrate with External Leak: Defaults fast only.
 Enter external calibrated leak value.
 Press Calibrate to perform an automated calibration. Press OK to return to
the Home screen.
For calibration in the E-10 range, the vacuum system must be sufficiently pumped
to reduce helium background below the E-10 range signal level. This is required to
achieve an acceptable signal-to-noise level and ensure accurate calibration.
E-10 range calibration is performed using an external calibrated leak. If an external
calibration is selected soon after system startup, the system evaluates the helium
background and determines if the background signal is sufficiently low to give an
accurate calibration. If the:
 System has pumped out sufficiently, the calibration proceeds.
 Background is changing, indicating the system is still pumping away
background helium, a countdown timer appears (see the following figure).
The system monitors the helium background and shows the time until the
calibration begins. Should you prefer not to wait, a Cancel button permits the
calibration request to be canceled.

NOTE The firmware initially starts at a large time interval, but recalculates the required
time as the pumping continues. The new time is reflected on the timer.

NOTE Test Configuration Menu > Applications Setup > High Sensitivity automates and
walks you through the E-10 External Calibration procedure.

36 Agilent Helium Leak Detector User Manual

 Instructions for Use

Figure 14 Helium Background Timer

NOTE When calibration is complete, the leak detector reverts to Fine Test mode.

Shutdown Procedure
The system can be in any mode when shut down. When the system is shut down,
all valves in the system close. If the system is not in Vent mode, the test port
remains under vacuum and may be difficult to open:
To do a shutdown:

CAUTION A soft power shut down (CPU and Electronics and Turbo Pump) is highly
recommended before shutting off the main power switch (circuit breaker).

1 Go to the Menu Tab.

2 Select Turn Off.

NOTE Do not turn off the main power switch until the power down status bar is complete
and final power off message is accepted (OK).

To do a hard shut down of the leak detector for 24 VDC power supply and primary
pump:
Move the power switch on the rear panel to the

° position.
Agilent Helium Leak Detector User Manual 37
 Instructions for Use

Maintenance

NOTE All service must be performed by trained personnel only.

A mass spectrometer leak detector requires periodic maintenance to ensure

continued reliable operation. After prolonged use, the leak detector accumulates
contaminants from even the cleanest of products tested that eventually impair
operation. A thorough disassembly and cleaning of the entire vacuum system,
which includes the valve block and spectrometer, restores normal operation. For
heavy production use, more frequent overhauls may be needed. In most cases,
maintenance personnel do this work, but Agilent can also do this work under the
terms of a service contract.
This maintenance section covers daily and as-required maintenance. It does not
cover overhaul of the entire vacuum system. If your leak detector requires service
that is not covered in this section, contact Agilent Customer Service. See the back
cover of this manual for a listing of our sales and service offices.

NOTE Important Reminders

In addition to the safety notes at the beginning of this manual, heed the following
notes, cautions, and warnings when performing maintenance.

WARNING Disconnect power from the leak detector before performing any
maintenance procedure that requires physically disconnecting any part of
the system.
The leak detector has two battery backed clocks which use a primary (non-
rechargeable) lithium coin battery from Panasonic, P/N BR2477A/HB (3.0V,
1Ah) that is permanently soldered onto a Motherboard PCB and Panasonic's
P/N BR2032 (3.0V, 500 mAh) located on the CPU PCB.. Never replace this
battery with a rechargeable type. Use only the primary type of lithium
battery. Only a qualified technician should replace any battery. The battery
has a life of 7 to 10 years.
The leak detector uses fuses and circuit breakers that are not operator
replaceable. Only a qualified technician should replace any fuse.
Information about the fuses and circuit breakers is given in Table 4.

38 Agilent Helium Leak Detector User Manual

 Instructions for Use

Cleanliness is vital when servicing the leak detector or any vacuum equipment.
There are some techniques more important in leak detector servicing than in
general vacuum work:

CAUTION Do not use silicone oil or silicone grease.

Use powder-free butyl or polycarbonate gloves to prevent skin oils from getting
on vacuum surfaces.
Do not clean any aluminum parts with Alconox®. Alconox is not compatible with
aluminum and will cause damage.

NOTE Agilent does not recommend the use of vacuum grease. Vacuum grease absorbs
helium tracer gas and releases this slowly resulting in helium background during
leak test operations. If it must be used, use it sparingly and avoid silicone types.
Apiezon® L grease is recommended (Agilent Part No. 695400004).

When removing, checking or replacing O-rings:

CAUTION Remove O-rings carefully with your fingers. Do not use metal tools for this task.
This prevents scratching of any sealing surfaces.
Wipe all O-rings clean with a lint-free cloth before installation to ensure that no
foreign matter is present to impair the seal.
Do not use grease or any other substances on O-rings or metal seals that will
come in contact with the spectrometer.
Do not use alcohol, methanol or other solvents on O-rings as this causes
deterioration and reduces their ability to hold a vacuum.

NOTE If applicable, apply a small amount of Apiezon®L grease and wipe the
O-rings shiny dry.

NOTE Due to the effective cleaning nature of VacuSolv solvent and its residue-free
properties, Agilent’ Component and Spectrometer Cleaning Kit (Part Number
670029096), used in accordance with the kit instructions, is recommended for
cleaning spectrometer components. The kit can also be used for fine cleaning of
other parts in the leak detector’s vacuum system such as valves and fittings. No
rinsing steps or high-temperature drying are required following cleaning with
VacuSolv. Although appropriate precautions are advised, VacuSolv is compatible
with most materials and does not contain toxic chemicals or CFCs
(chlorofluorocarbons). Other acceptable solvents are isopropyl alcohol (IPA)
or Dow Corning® OS-20.

Agilent Helium Leak Detector User Manual 39

 Instructions for Use

For simplicity, the maintenance functions in this section are grouped by

recommended frequency, as shown in the following table, based on
assumed daily use.

Table 2 Scheduled Maintenance

Description Daily 12 Months 24 Months

Calibration check X

Replace the internal calibrated leak X

Replace diaphragm on DP pump (Dry scroll X

pump models only)

Replace tip seals on models: G8610B, X

G8611B, G8611C,
G8611D,G8612B,G8611C

Change Oil - Models G8610A, G8611A, X

G8611B, G8611D, G8612A

Maintenance functions that may be required on a demand basis, such as changing

a filament after filament failure, are listed in the following table.

Table 3 As-Required Maintenance

Function Most Common Symptom

Spectrometer cleaning The spectrometer is designed to operate for years without maintenance, however actual
performance depends on the leak detector operational environment. Spectrometer
cleaning restores optimum performance if the unit shows significant sensitivity loss or
high background signal.
Sensitivity loss appears as a high gain value after a calibration or failure to calibrate with a
gain too high error message.

Filament replacement Filaments are designed to operate for several years with no maintenance. When a
filament burns out, the system automatically switches to the other filament and notifies
you to recalibrate. The calibration notice also serves to inform you of a filament failure.
Agilent recommends that the burned out filament be replaced at a convenient time so
that a spare is always available during leak test operations to prevent unplanned system
down time.

Tuning adjustments If calibration is not successful or if the system is calibrated to an external leak, tuning can
maximize the helium signal.

Mechanical pump fluid change Persistent, high helium background signal. Fluid contamination (dirty brown color
indicates burnt or contaminated fluid, milky white consistency indicates high water
vapor content in fluid).

40 Agilent Helium Leak Detector User Manual

 Instructions for Use

NOTE Always perform a Full Internal Calibration after any spectrometer maintenance:
• Spectrometer header replacement
• Filament replacement
• Ion source assembly replacement or cleaning.

The following table lists the fuses and circuit breakers.

Table 4 Fuses and Circuit Breakers

Function Type, MFG, PIN Location

Circuit Breaker • Main Power Supply: 20 A, 250 V Power Entry Module

AC, SCHURTER Model EF12,
PIN EF12.2196.1110.01
• Internal Vacuum Pump: 6 A, 250 V E-T-A, Rear Panel
PIN 1110-Fl12-PIMl-6 A

Fuses (PCB overcurrent 1.85 A, 33 VDC, Raychem SMD185-2 • Motherboard (RT400)

protection) • Valve Driver (Fl)
• Ion Source (Fl)

5x20mm, T4A, 5A, 250V AC, Turbo Controller (F2)

Cooper/Bussmann S505-4A

NOTE Only a qualified technician should replace circuit breakers and fuses. Use only
circuit breakers and fuses of the same type and rating.

Agilent Helium Leak Detector User Manual 41

 Instructions for Use

Daily Maintenance

Sensitivity Check
To perform a sensitivity check:
1 Turn on the Std Leak in the Control Panel screen.
2 Compare the value on the Home screen to the value of the known calibrated
leak on the Internal Calibrated Leak screen.
3 If the values do not match, press Calibrate on the Control Panel screen to
perform an automated calibration and then repeat step 1.
If specification is still not met, Manual Tuning may be required.
See Section “Manual Tuning.

Dry Nitrogen Vent

You may want to vent the leak detector test port with dry nitrogen when the system
is vented. Venting with dry nitrogen can be helpful in very humid environments to
keep the test port as dry as possible which reduces the time required to pump
down the system.

NOTE The nitrogen supply line should have a pressure relief valve installed so that the
pressure does not exceed two psi.

1 Press down on top of fitting and remove filter (see the following figure).
2 Install 6mm tubing for Dry Nitrogen venting.

Figure 15 Dry Nitrogen Vent

42 Agilent Helium Leak Detector User Manual

 Instructions for Use

Disposal

Meaning of the "WEEE" logo found in labels.

The following symbol is applied in accordance with the EC WEEE (Waste Electrical
and Electronic Equipment) Directive.
This symbol (valid only in countries of the European Community) indicates that the
product it applies to must NOT be disposed of together with ordinary domestic or
industrial waste but must be sent to a differentiated waste collection system. The
end user is therefore invited to contact the supplier of the device, whether the
Parent Company or a retailer, to initiate the collection and disposal process after
checking the contractual terms and conditions of sale.

Figure 16 Logo "WEEE"

For more information refer to:

http://www.agilent.com/environment/product/index.shtml

Agilent Helium Leak Detector User Manual 43

 Instructions for Use

Service

Agilent offers:
 Rebuilt spectrometers on an exchange basis.
 NIST-traceable calibrated leak testing and verification services.
 Preventive maintenance services.
 Overhaul services.
 System recertification.
 Support agreements.
 On-site support.

Should a customer need an advanced exchange or repair service, please contact

local distributor or directly e-mail to:
[email protected]
[email protected]
Completion of the “Request for Return” form is required to return your product to
Agilent for service (provided at the end of this manual).

44 Agilent Helium Leak Detector User Manual

 Technical Information

2 Technical Information
Description of the Leak Detector 47
Leak Detector Configurations 49
Technical Specifications 50
Front Panel Display and Operations 52
Home Screen 53
Front Panel Display - Home Screen Display 55
Rear Panel 57
Features 61
Operating the Leak Detector 62
Screens 62
Basic Functions 62
Home Screen 63
Graphical Display Screen 69
Menus Screen 70
Calibration Screen 71
Calibration Set-Up 71
Test Configuration Screen 77
Test Configuration 77
Reject and Audio Set Points 77
Test Configuration Advanced Features 80
Transfer to Test 83
Stabilization Wait Timer 84
High Pressure Test Set-Up Procedure 84
Home Screen - Activate Gross Test 85
Application Setup 86
Sniff Method 87
Spray Method 89
High Sensitivity 91
Auto Sequencer 92
Auto Sequencer Set-Up 95
Rough Time Setup 95
Test Time Setup 96
Set Point 1 Setup 96
Set Point 2 Setup 96
Using Set Point 1 and 2 together (Optional) 96
Pressure Set point (High & Low Limit) - Optional 96
Split Flow 97
PPM (parts per million) Sniff Method 100

Agilent Helium Leak Detector User Manual 45

 Technical Information

Settings Screen 110

Settings Menu 110
Main Settings 111
Configure Date and Time 113
Screen Settings 115
Analog Output 117
Remote Control 119
Password and Restrictions 120
Wireless 121
Maintenance Screen 122
Maintenance Menu 122
Software Update 123
Internal Calibrated Leak Setup 124
Manual Tuning 127
Maintenance: Valve Control 130
Maintenance: Pump 133
Maintenance: Gauge Calibration 134
Current Setup Menu 139
Communications Protocol 143
Protocol (RS-232) 143
Communicating with RS-232 144
Windows HyperTerminal Set-Up Instructions 144
Printing with HyperTerminal 146
Customer Accessible Inputs and Outputs 157
Serial Connector 157
I/O Connector 158
Introduction to Leak Detection 161
Leak Testing—Why is it Needed? 161
Agilent's Helium Leak Detection Technologies 161
Methods of Leak Testing 163
Vacuum Testing Method (Outside-in) 164
Pressure Testing Method (Inside-out) 165
System Leak Test Methods 167
Typical Leak Detection Applications 168
Quality Control of Production Parts and Assemblies 168
Maintenance of Systems 169
System Integrated Leak Detection 170
Mass Produced Parts 170
Accessories and Spare Parts 172

46 Agilent Helium Leak Detector User Manual

 Technical Information

Description of the Leak Detector

The leak detector is a wide-range Helium Mass Spectrometer Leak Detector, which
is comprised of a turbo molecular high vacuum pump, internal mechanical rough
pump (model G8610A), internal scroll pump (model G8610B), external mechanical
rough pump (models G8611A, G8611B, G8611C, G8612A, G8612B, G8612C and
G8612D), spectrometer tube, valve block, leak detector electronics, an operator
interface (TFT-Touch Panel display and optional features, including:
 Wireless remote control that includes:
 Wireless Base PCB (P/N G8600-68001) installed in a leak detector
 Wireless Remote unit (P/N G8600-60002).
 Optional I/O PCB (P/N VSFLDIO).
Models G8611Ax, G8611Cx, G8611Bx and G8612D include an optional four-wheel cart.
All models are available in 100/115 VAC and 230 VAC configurations (see the
following table).
The wireless remote control has the following capabilities:
 RF communication between Agilent Technologies Helium Mass Spectrometer
leak detector (Base Station or Host) and the Wireless Remote unit from the
distance up to 100 m (300 ft).
 Enter the leak detector unit into Test and Hold modes from the Wireless
Remote unit keypad.
 Read the leak detector unit's leak rate in a linear and logarithmic bar graph
format with a numeric range indicator and System status in alphanumeric
format on the Wireless Remote unit Touch Panel display.
 Configure up to ten different Agilent Technologies Helium Mass Spectrometer
leak detector units for wireless control by toggling through a MAC address list
using one Wireless Remote unit.
The optional I/O PCB compromises:
 Optically isolated parallel I/O (DB25 female connector with 12 output and 8
input lines) to use with an external PLC and should be powered by the user
(+5-24 VDC) via a cable with length less than 10’ and provided by the user
(see the "I/O Connector" section).

Agilent Helium Leak Detector User Manual 47

 Technical Information

The usage of a longer cable for the parallel I/O output connection with an
CAUTION external PLC is fully responsibility of the user. Some EMC prevention measure
may be required by the user.

USB type A connector and one located on the back of the leak detector.

NOTE USB features are for updated software downloads only.

Table 5 Series Leak Detector Configurations and Part Numbers

Model Number Leak Detector Type Agilent P/N Mains Voltage 50/60 Hz (Amp)

G8610A Portable G8610-64000 115 VAC 2.0/2.3

(DS40M)
Portable G8610-64001 230 VAC 1.0/1.3

G8610B Portable G8610-64002 100 VAC 2.2/2.4

(IDP-3)
Portable G8610-64003 115 VAC 2.4/2.2

Portable G8610-64004 230 VAC 1.2/1.2

G8611A Mobile G8611-64000 115 VAC 9.0/5.4

(DS302)
Mobile G8611-64001 230 VAC 4.4/2.5

G8611B Mobile G8611-64002 115 VAC 7.7/6.8

(TS620)
Mobile G8611-64003 230 VAC 3.8/3.4

G8611C Mobile G8611-64004 115 VAC 6.0/4.2

(IDP-15)
Mobile G8611-64005 230 VAC 2.8/3.0

G8611D
Mobile G8611-64006 230 VAC 4.4/2.8
(DS602)

G8612A Benchtop G8612-64000 115 VAC 9.0/5.4

(DS302)
Benchtop G8612-64001 230 VAC 4.4/2.5

G8612B Benchtop G8612-64002 115 VAC 7.7/6.8

(TS620)
Benchtop G8612-64003 230 VAC 3.8/3.4

G8612C Benchtop G8612-64004 115 VAC 6.0/4.2

(IDP-15)
Benchtop G8612-64005 230 VAC 2.8/3.0

G8612D
(DS602) Benchtop G8612-64006 230 VAC 4.4/2.8

Outline drawings for each configuration are shown in Section “Leak Detector
Configurations”.

48 Agilent Helium Leak Detector User Manual

 Technical Information

Leak Detector Configurations

This section contains outline drawings of the leak detector configurations.
Dimensions are given in mm, below the brackets. The following figure shows the
outline drawing and physical dimensions of the portable leak detector with Internal
DS40M Wet Rotary Vane Pump, Model G8610A and the G8610B, which utilizes a
Agilent IDP-3 dry pump.

Figure 17 Portable Leak Detector with Internal DS40M Wet Rotary Vane Pump, Model G8610A,
and Portable Leak Detector with Internal IDP-3 (G8610B) Dimensions

The following figure shows the outline drawing and physical dimensions of a
mobile leak detector with Models G8611x.

764mm 572mm

Figure 18 Mobile Leak Detector with External Wet Rotary Vane Pump or Dry Scroll Pump on a Cart,
Model G8611A, G8611B and G8611C Dimensions

Agilent Helium Leak Detector User Manual 49

 Technical Information

Technical Specifications
Table 6 Leak Detector Series Specifications

Specifications Agilent Technologies Helium Mass Spectrometer Versions

Pumps Rotary Vane Dry Scroll

Fore Pump Type DS40M DS-302 TS-620 IDP-15 IDP-3

Pump Speed, l/min, 60/50 Hz 36/30 285/237 500/420 250/210 60/50

Minimum Detectable Leak, 5 x 10-12

atm-cc/sec

Internal Pump Version DS40M/IDP-3

Turbo Molecular Pump Navigator™ Turbo molecular pump specifically designed for leak detection

Leak Units atm-cc/sec, mbar-l/sec, torr-l/sec, Pa-m3/sec, std. ft3/year

Peak Pumping Speed • Contra w/IDP15 - 3.8 l/sec for N2 and He at 60 Hz

• Contra w/TS620 - 6.5 l/sec for N2 and He at 60Hz
• Contra w/ DS40M – 0.5 l/sec for N2 and He at 60Hz in Contra (.42 l/sec @ 50Hz).
• Contra w/ DS302 – 3.0 liters/sec for N2 and He at 60Hz (2.5 l/sec @ 50 Hz).
• Contra w/ IDP-3 - 1.1 l/sec (60 Hz), 1.0 l/sec (50 Hz)
• Midstage – 1.8 liters/sec for He at 50 or 60 Hz.

Helium Response Time 0.5 second, within 66% of peak reading within the given time. Per AVS 2.1.

Test Port NW-25; A 11/8" (28 mm) ID Compression Port is available as an accessory.

Recommended Operating Ambient Conditions

Installation Indoor use only. Altitude up to 2000 m (6,400’), Material Group III, POLLUTION DEGREE 2
according to EN61010-1 Standard, Class 1

Operating Temperature System: +12° C to +45° C (wet and dry pumps); Fore pump limited on the low ends and
turbo pump limited on the high ends.

Humidity Maximum relative humidity (HR) 90%

Heat Load 1000 W (+/-5%)

Air Pressure 563 Torr (75 kPa) to 795 Torr (106 kPa)

Maximum system vibration 3 G’s (Turbo Limit)

Storage Ambient Conditions Relative humidity: 0% to 95%, non-condensing. Temperature:

-20 °C (-4 °F) to +60 °C (140 °F)

Power Requirements Input Power

• 100 VAC, 50 Hz, 20 A
• 115 VAC, 60 Hz, 20 A or
• 230 VAC, 50/60 Hz, 12 A
Max. Branch Circuit Breaker: 20A with motor-rated time delay.

50 Agilent Helium Leak Detector User Manual

 Technical Information

Table 6 Leak Detector Series Specifications (Continued)

Specifications Agilent Technologies Helium Mass Spectrometer Versions

Dimensions See outline drawings ((Figure on page 49).

Weight G8610A with built in DS40M pump: 77 lb./35 kg*

G8611A w/DS-302 rotary vane pump on cart: 172 lb./78 kg*
G8611C w/IDP-15 dry scroll pump on cart: 194 lb./88 kg*
G8611B w/TS-620 dry scroll pump on cart: 192 lb./87 kg*
G8610B with IDP-3 dry pump: 77 lb./35kg*
* Add 1.0 kg if the Wireless Remote and optional I/O features are installed.

Touch Panel display 8.4 inch color TFT LCD module G084SN03 V3.
The screen format is intended to support the SVGA (800(H) x 600(V)) screen and 16.2M
(RGB 8-bits) or 262k colors (RGB 6-bits). Viewing area 175.1 mm x 132.2 mm

Regulatory CAN/CSA-C22.2 No. 61010-1-12 - Safety Requirements for Electrical Equipment for
Measurement, Control, and Laboratory Use - Part 1: General Requirements
UL Std. No. 61010-1, 3rd Edition - Safety Requirements for Electrical Equipment for
Measurement, Control, and Laboratory Use - Part 1: General Requirements
EMC Emissions and Immunity -ETSI EN 301 489-1 v2.2.0 (2017-03) Electromagnetic
Compatibility and Radio Spectrum Matters (ERM); Electromagnetic Comparability (EMC)
standard for radio equipment and services; Part1: Common technical requirements:
• ETSI EN 301489 v2.2.1 (2012-09) Electromagnetic Compatibility and Radio Spectrum
Matters (ERM); Electromagnetic Comparability (EMC) standard for radio equipment;
Part 17: Broadband Data Transmission Systems
• EN 61326-1: 2013 EMC requirements for Electrical equipment for measurement, control
and laboratory use - General Use
For particular Safety and EMC Standards see Declaration of Conformity.

Single rotation speed Turbo: 70K RPM

Leak test range E-11 to E-4

Maximum spectrometer 1E-04 Torr - Filament turns off when pressure exceeds this point
pressure

Contra cross over 10 Torr decreasing, 12 Torr increasing

Sensitivity in High Pressure 1 x 10-8 atm.cc.sec

Test mode

Agilent Helium Leak Detector User Manual 51

 Technical Information

Front Panel Display and Operations

All operator control and monitoring are achieved via the resident software accessed
using the Touch Panel Display (Table 7).
Touch Panel Display
Represents:
 Leak Rate - in a Bar Graph format with a numeric range indicator
 Leak Rate, System Status and Parameters - in alphanumeric format
 Series of screens with the soft key buttons for operator interface
Leak Rate, System Status and Parameters in alphanumeric format:
 Leak Rate is presented in a scientific notation: XXE-YY with appropriate units
 Where: X .X mantissa is a leak rate value E-Y = 10-YY exponent is a leak rate
range X and Y are any numbers from 0 to 9
 System Status and/or Mode are represented on the screen in alpha format on
the screen and an italic font in this manual
 Parameters are represented on the screen in alphanumeric format a bold font
in this manual.
Leak Rate Bar Graph
The large bar graph displays the leak rate in one of three forms:
 A linear bar graph
 A logarithmic bar graph

Figure 19 Home Screen

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 Technical Information

Home Screen
VENT The VENT button advances the leak detector to the vented state.
The red vent symbol in the middle of the switch remains red while
the leak detector is in Vent.
TEST When the system is in the Vent or Hold states, pressing the TEST
button automatically advances the leak detector through roughing,
then through the various test states, depending on the achievable
test port pressures and leak rates.
Press the TEST button while in TEST to isolate the test port from
the leak detector vacuum system.
HOLD With the leak detector in Test/Fine Test mode, press TEST again
and the leak detector goes into HOLD mode, isolating the leak
detector from the unit under test.

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The leak detector operator interface functions through a series of screens, which
are navigated as in the following figure:

Figure 20 Screen Flow

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Front Panel Display - Home Screen Display

Table 7 Screens – General Description
Screen Purpose
Home Accesses the Menu screens.
Activates the Test, Vent and Zero functions.
Activates the Gross Leak Test screen, when Gross Test is initiated via the Zero button.
Home (Menu Bar) Activates/deactivates:
• Power on/off (soft shut down)
• Zero Enable
• Graph Mode
• Speaker Volume
• Application in Use
• Home Screen Icon
Menus Accesses the following screens for tailoring leak detector operation:
Calibration
• Internal or External selection
• Read Internal Leak
• Cal Leak information
Test Configuration
• Set Points - Configures:
 Reject & Audio Set Points - Configures parameters and toggles operations on/off
for each reject set point and for the audio threshold.
• Advanced Features - Activates:
 High Pressure Test
 Fine Test Only
 Auto-Zero<0
 Gross Test
 Transfer to Test
 Stabilization Wait
• Application Setup - Activates:
 Sniff Method
 Spray Method
 High Sensitivity
 Auto Sequencer
 Split Flow
 PPM Sniff Method
Settings
• Main - Configures:
 Date & Time
 Leak Rate & Pressure Units
 Language
 Touch Sound Activation
• Screen Settings - Configures:
 Bar Graph Selection
 Range Selection
 Analog Output Selection
• Remote Control - Configures:
 Activation
 Channel Selection
• Password Restrictions - Configures
 Restriction Level Selections
 Lock and Vent Control

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Table 7 Screens – General Description (Continued)

Screen Purpose

Maintenance
• General - Configures:
 Internal Calibrated Leak Setup & Expiration
 Software Update Utility
• Manual Tuning - Configures:
 Toggles between Filament 1 & 2
 Sets Emission, Ion and Gain settings
• Valve Control - Configures:
 Access to control and monitor valves
 Monitor turbo pump parameters
• Pump - Configures:
 Fore Pump description type, operating hours and Last Service Date
 Enable Exhaust Pump
• Gauge Calibration - Configures:
 Calibrates the Test Port TC's Vacuum and ATM reference points
 Displays Test port and spectrometer pressures
• System Defaults - Configures:
 Ability to reset Turbo and Filament hours for maintenance purposes
 Ability to reset back to Factory Defaults
System Information:
• Displays part number and serial number
• Display Software Version
• Displays the status of the spectrometer and turbo pump parameters
• Current Setup
• Displays the status of active items

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Rear Panel

The rear panel of the leak detector with the wireless remote control option is shown
in the following figure.

Figure 21 Home Screen

1 Serial Connector A 9-pin male D-type connector to interface with an

external PC via RS-232 type communications protocol
for system diagnostic or control. A detailed summary
of information related to serial communication is
provided in Section A “Communications Protocol”.
2 Cover Plate or I/O PCB Access to expansion slot. This is not used when an
optional I/O PCB is installed. A rear panel of
the optional I/O PCB is shown in Figure 22.

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3 Power Entry Module Provides supply power, overcurrent and EMI

protection for the leak detector.
The Power Entry Module consists of:
 Power Input Connector - An IEC/EN60320/C20
standard, three-prong grounded Inlet connector.
 Power Switch (I/O) - A 20A rocker type Power
Switch/Thermal Circuit Breaker.
 20 A EMC line filter.
4 Fore Pump Power An IEC/EN60320/C19 standard, three-prong grounded
Connection outlet connector.
5 Analog Output DB9F connector for the analog output voltage. Pin #1
is signal (positive) and Pin #2 is return (negative).
6 Chassis (Earth) Terminal Provided for additional connection of the leak detector
to the building grounding system to improve ESD
protection.
7 Product Label A product label with part number, serial number
and rating information.
8 USB Port A standard high speed USB Port for software updates.

9 Exhaust Cover Exhaust opening for a G8610A model.

10 Oil Level Cover Oil level window for a G8610A model.

11 Oil Drain Cover Oil drain opening for a G8610A model.

12 Nitrogen Vent Port Nitrogen vent port.

13 Wireless Label A wireless info label for leak detector with an

optional Wireless Remote Control.

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The rear panel of the leak detector (Model G8610A and G8610B) is shown in the
following figure.

Figure 22 Rear Panel (with Discrete I/O PCB)

I/O Connector is a 25-pin female D-sub connector to interface with an external PLC
via a parallel cable.
 Inputs:
 Four level inputs: optically isolated, (+5 to+24) VDC.
 Four momentary inputs: optically isolated, (+5 to+24) VDC, requires 200 ms
pulse width.
All inputs are opto-isolator LEDs with a series 3300 Ohm resistor.
 Outputs: Eight optically isolated emitter followers with a 10 Ohm series
resistor, 14 mA max drive current, +24VDC max.
 Power: An external power supply is supplied by the user.

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Reference Figure 22:

1 Serial Connector A 9-pin male D-type connector to interface with an

external PC via RS-232 type communications protocol
for system diagnostic or control. A detailed summary
of information related to serial communication is
provided in Section A “Communications Protocol”.
2 25 Pin I/O • Inputs: Opto-isolated, 5 - 24 VDC 3300 Ohm
resistive load.
 All inputs are opto-isolator LEDs with series resistors.
 Momentary Inputs: Opto-isolated, 5 - 24 VDC 3300 Ohm
resistive load, requires 200 ms minimum pulse width.
 Outputs: Emitter follower with 10 Ohm series
resistor, 14 mA max drive current, 24 VDC max.
3 Power Entry Module Provides supply power, overcurrent and EMI
protection for the leak detector. The Power Entry
Module consists of:
 Power Input Connector - An IEC/EN60320/C20
standard, three-prong grounded inlet connector.
 Power Switch (I/O) - A 20A rocker type Power
Switch/Thermal Circuit Breaker.
 20 A EMC line filter.
4 Vacuum Pump Breaker A 6 A Thermal Circuit Breaker for the internal
mechanical pump.
5 Analog Output Banana type output connector for an Isolated Leak
Rate Analog reading. The Red connector is a signal
positive terminal; black is the signal negative terminal.
Signal range: From 0 to +10 VDC. Later models of the
Agilent Technologies Helium Mass Spectrometer
leak detector will be equipped with a DB9F connector
for the analog output. Pin #1 is signal (positive) and
Pin #2 is return (negative).
6 Chassis (Earth) Provided for additional connection of the leak
Terminal detector to the building grounding system to improve
ESD protection.
7 Exhaust A barbed hose fitting (OD = 12.57 mm) for exhaust of
the internal mechanical vacuum pump.
8 USB Port A standard high speed USB port for software updates.
9 Nitrogen Vent Port
A detailed summary of information related to I/O pin identifications is provided in Table 28.

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Features

The features for the leak detector are provided in the following table:

Table 8 Features

Feature Description

Calibration Fully automated tuning and calibration using the internal or external calibrated
leak. The fast calibrate feature allows calibration in less than one minute.

Zero Control Selectable mode background elimination with a unique, patented Autozero<0
feature.

Leak Indication A bar graph (linear or log) indicator displays leak rates automatically; alphanumeric
indication on Touch Panel display. A leak can also trigger an audible alarm
frequency that varies in proportion to the size of the leak, dedicated volume control
and programmable audio threshold. Analog voltage is proportional to the leak rate.

Pressure Indication Test port and spectrometer pressure with alphanumeric indication on the Touch
Panel display.

Spectrometer Sensitivity optimized design, header mounted ion source with dual Yitria-coated
iridium filament, a high sensitivity, wide dynamic range preamplifier, and vacuum
gauge.

Automatic Valve Sequencing Microprocessor-controlled valve operation provides automatic system cycling.

Safety Interlocks A valve system design that completely protects the high vacuum system under
test against pressure surge and power interruption.

Optional

Wireless Remote Control This provides:

• RF communication between the leak detector (with base station or host) and
the Wireless Remote unit from a distance up to 100 m (300 ft).
• The ability to enter the leak detector unit into Test and Hold modes from the
Wireless Remote unit's keypad.

• The ability to read the leak detector’s leak rate in a linear and logarithmic bar
graph format with a numeric range indicator and System status in
alphanumeric format on the Wireless Remote unit's Touch Panel display.
• Configuration up to 10 different leak detector unit’s for wireless control by
toggling through a MAC address list using one Wireless Remote unit

Discrete I/O Control This provides 12 outputs and 8 inputs lines, optically isolated, to control the leak
detector using an external PLC via a 25-pin DB25 female connector and a user-
provided parallel cable.

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Operating the Leak Detector

Screens
The leak detector display is used for the initial set-up and configuration of the leak
detector. Once the leak detector is set up and configured for a specific application,
basic operation is controlled primarily using the TEST and VENT buttons on the leak
detector and the Home screen Zero button (Section “Home Screen”).

Basic Functions
The following table explains the icons that appear on various screens and their
meaning.

Table 9 On-Screen Icons

Icon Meaning

Indicates a feature is locked and cannot be activated due to a higher level selection
in the setup.

Indicates the status of the internal calibrated leak: If flashing, the leak calibration
will expire within 10 days. Steady and blue indicates that the leak has expired.
Steady and red indicates a temperature sensor failure or a disconnected cable to
the calibrated leak temperature sensor.

Indicates the leak detector is in split flow.

Indicates that the split flow leak rate being entered is greater than 1000 times the
indicated leak rate; the maximum permitted.

Indicates that the unit is in communication with a wireless remote unit.

Indicates that the unit has detected a fault condition.

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Home Screen
The Home screen displays a summary of the following status and configuration settings:
 Digital Leak Rate Display
 Test Port Pressure
 Gross Test button (not shown)
 Leak Detector Status
 Condition Indication
 Reject Status Indicato
 System Ready Indicator
 Menus button
The following figure shows the screen controls.

As of February 2023
(LD01.06) the Calibration
button can be enabled on
the Home Screen from
the Calibration Menu

Figure 23 Home Screen

System must be in Test to initiate the Calibration routine.

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Hold Places the system in Hold (while in Test, press Test again to
starts Hold); keeps the test port under vacuum and does not
vent. Use Hold to keep the system under vacuum, while taking
the leak detector out of test. This is useful if you want to let the
leak detector clean up the helium background, while keeping the
system under vacuum.
Since the test port pressure gauge is located on the test port
side of the isolation valve, a subsequent rise in test pressure
can be observed while in this mode.
Digital Leak Rate Correlates directly with the log and linear bar graph leak rate
display. The units for the measurements are selected in the
Settings > Main Settings menu (see Section “Settings Menu”).
Test Port Pressure Appears on the Home screen and represents the test port
pressure as measured by a thermocouple device mounted on
the valve block just below the test port. The pressure transducer
and associated electronics are intended to protect the leak
detector from damage due to over-pressure conditions. Use an
external pressure transducer if the test process requires a more
accurate monitoring of the test object pressure.
Leak Detector Status Appears below the test port pressure reading and indicates the
current leak detector operating state. The normal operating
states are detailed in the Table 11.
Leak Detector Appears below the Leak Detector Status and indicates the
Condition current leak detector condition during abnormal conditions. See
the Table 11 for a list of leak detector conditions.
Setpoints Status Appears below the Leak Detector Condition on the left-hand
Box center of the Home screen when any of the four independent
set points are enabled and activated or de-activated.
Zero Zeroes out the helium leak indicated on the display. The Zero
button darkens while zeroing is taking place. The leak rate must
be less than 4.0E-7, while in Test, to allow a cross over to Fine
Test.
The Zero button is only active while the leak detector is in the
Test and Fine Test states of operation.
The leak detector automatically subtracts the recorded
background signal to display only the real leak rate.

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NOTE Pressing Zero while introducing helium tracer gas to the test object or while the
helium background is varying significantly could result in the suppression of a real
leak. Only use the Zero button after the helium tracer gas source has been removed.

The Zero capability allows the testing of sensitivity levels that are below the system
background. This feature also reduces test cycle times by reducing the amount of
time required for background levels to naturally clean up or by allowing testing to
begin at relatively high test pressures. It is recommended that only two decades of
signal be zeroed out.

Menus Displays the Menus screen (see the following figure

and page 70)

Figure 24 Main Menu Select

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Power Off Performs a soft shutdown procedure of the leak detector.

Applies a turbo braking routine and exits the CPU's
operating system safely. Prompts that the leak detector can
be powered down (see the following figure).

Figure 25 Power Of Dialog

Zero Enable Turns on or off the zeroed out background. This feature
excludes the background leak from the leak rate signal.
Helium background represents helium that is in the system
but does not come from the part under test. If the
background is zeroed out, a more accurate measurement
of the leak rate of the part is determined. If Zero Enable is
turned ON, the background is excluded; if it is turned OFF,
the system displays the full helium signal, including total
background

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Table 10 Leak Detector Operating States

Display Description
Calibrating Indicates that the leak detector is currently performing a calibration routine.

Indicates that the leak detector is in Test mode. When in Test mode, the Test Port valve opens
Test and the leak detector is ready for leak testing. Test leak rate range is 1E-4 to 1E-8 (MDL 5E-9).
Fine Test Indicates that the leak detector is in Fine Test mode. When in Fine Test mode, the test port
valve opens and the leak detector is ready for fine leak testing. Fine Test leak rate range is 9E-7
to 1E-11 (MDL 5E-12).
Hold Indicates that the leak detector is in Hold mode. When in Hold mode, all but the foreline valves
are closed, isolating the test port and any test objects or fixturing from the leak detector
vacuum system. Use Hold when you want to keep the test port under vacuum without venting
the test volume; this helps the system clean up.
Roughing Indicates that the leak detector is currently performing a Roughing level evacuation of the test
port and any attached test objects or fixturing attached to the test port.
Std Leak Indicates that the optional internal calibrated leak standard valve is open and that the leak
detector is reading the leak value.
Vented Indicates that the test port is vented to atmosphere. The test port and all objects attached to
the test port are isolated from the leak detector internal vacuum system.

Table 11 Leak Detector Condition States

Display Description
Backing Indicates that the leak detector is momentarily backing the foreline of the high vacuum pump
during an extended rough period. Backing occurs if the roughing time is greater than 60
minutes or if the turbo pump is not ready.
Both Filaments/ No Indicates that no filament emission is detected. This can result from a PCB or cable problem,
Emission or burned out filaments.
Cal OK Indicates that the calibration routine was executed successfully.
Calibration Prep Indicates that the leak detector is preparing for a calibration routine.
Filament 1 No Emission Indicates that filament 1 of the ion source has burnt out. Filament 2 automatically lights if it is
still good, and a flashing C appears in the leak rate exponent, indicating that a calibration
routine is required.
Filament 2 No Emission Indicates that filament 2 of the ion source has burnt out. Filament 1 automatically lights if it is
still good, and a flashing C appears in the leak rate exponent, indicating that a calibration
routine is required.
Filament Wait Indicates that the system is lighting the filament.

Flashing C On Indicates that the leak detector requires calibration.

Exponent Display

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Table 11 Leak Detector Condition States (Continued)

Display Description
Gain Too High Indicates that the gain value required to calibrate the leak detector during the calibration
routine is greater than the maximum allowable value. This is generally the result of system
sensitivity being too low, due to normal system aging.
Gain Too Low Indicates that the gain value required to calibrate the leak detector during the calibration
routine is less than the minimum allowable value. This is generally the result of a system leak.
High Background Indicates a high Helium background detected during calibration self-test. This typically,
indicates a vacuum system leak.
No Ion Peak Indicates a tuning/calibration failure due to the system not detecting an ion peak during the
auto-tuning routine.
Offset Fault Indicates an electronics failure identified during calibration self-test.
Offset Wait Indicates that the system is setting the Offset value.
Reject Indicates a test object failure during an Auto Sequencer Test cycle. See “Auto Sequencer”.
Spec-Tube Flashes red when the spectrometer pressure > 1.0E-4 Torr.
Stabilization Wait Indicates that the system is waiting for the electronics to stabilize before completing the
startup routine; up to two and a half minutes.
Std Leak Prep Indicates that the optional internal calibrated leak is being roughed before it is introduced
directly to the system for calibration verification.
Switching Filaments Indicates that the system is momentarily in the process of switching from a burnt out filament
to the next available filament.
System Pressure Wait Indicates that the system (spectrometer) pressure is too high to light the ion source filament.
System Ready Indicates that the system is ready for testing. This message appears only during the initial
startup and is cleared after the first test cycle.
Zeroing Indicates that the leak detector is in the process of Zeroing out a background signal. The Zero
routine is initiated automatically during the startup and calibration routines, or manually when
the operator presses the Zero button on the Home screen.
Zeroing Wait Indicates that the system is setting the initial zero values during the startup routine.

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Graphical Display Screen

The graphical display screen (see the following figure) represents the leak rate over time.
The graphing line appears in blue and changes to red when a reject set point is triggered.

Tapping the graph

function symbol
toggles between the
Home and graphing
display.

Figure 26 Graphical Display

Audio Speaker The audio signal increases from a low to high frequency as
Function the leak rate increases within each decade. The pitch cycles
low to high as it passes through each decade. The audio
response corresponds directly to the size of the leak.
Speaker Volume To turn the sound on/off, press the speaker button. The
volume level is restored to the level it was at prior to being
turned off.
Timer Toggles the graphing time between 120 and 720 seconds.
The timer automatically defaults to 120 seconds on leak
detector start up. Press the toggle button while graphing to
clear the current graph. The data rate for the timers are:
120 seconds - two measurements/second
720 seconds - one measurement/three seconds.
As of February 2023 (Rev. LD01.06) extended the time
base from 720 seconds (12 min) to 3600 seconds
(60 min) with a 0.3 second resolution.

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Clear Clears the plotted graph. The graph automatically clears

when the leak detector is in roughing mode or at the start
of a new test.
Zero Zeroes out the displayed helium leak. The leak rate must be less
than 4.0E-7, while in Test, to allow a cross over to Fine Test. This
button causes the leak detector to reset the leak rate display,
while the graph tracks the effect of the Zero command.

NOTE Pressing Zero while introducing helium tracer gas to the test object, or while the
helium background is varying significantly, could result in the suppression of a real
leak. Only use the Zero button after the helium tracer gas source has been removed

The Zero capability allows the testing of sensitivity levels that are below the system
background. This feature also reduces test cycle times by reducing the amount of
time required for background levels to naturally clean up or by allowing testing to
begin at relatively high test pressures. It is recommended to zero out only two
decades of signal.

Menus Screen
Press Menus on the Home screen. The Menus screen appears (see the following
figure). Use the arrow to navigate to the previous screen.
The Menus screen consists of buttons to access the lower level screens used for
application-specific configuration.

Press a
button to
access specific
configurations

Figure 27 Menus Screen

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Calibration Screen
Calibration Set-Up
 Press Calibration Menu screen.
The Calibration screen appears (see the following figure). Use this screen to:
 View the value and expiration date of the Internal Calibrated Leak
 Enter the External Calibrated leak value
 Select whether to use an Internal or external calibrated leak
 Set the calibration mode: Full or Fast Calibration
The calibration routine can only be executed while in Test/FineTest.

As of February 2023 Firmware Rev LD01.06

120822: Show Home Cal - Selection.
The Home Screen Calibration button and
Calibration Status Pop Up Messages can be
enabled from the Calibration Menu Screen.

Figure 28 Calibration Set-Up

NOTE Factory default – Show Home Cal & Show Cal Pop (not selected/not enabled).

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Calibration Status Messages – Cal Ok & Cal Failed pop up messages can be
enabled on the Home Screen (customer selectable) from the Calibration Menu.

Figure 29 Cal Pop - Selection (OK)

Figure 30 Cal Pop - Selection (Failed)

NOTE The internal leak is a factory supplied helium leak internal to the leak detector.
In order to perform an external calibration, you must supply a separate calibrated
leak and mount it on top of the leak detector.

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Calibrate Calibrates the system. Internal or External appears to

indicate which leak the system is using to calibrate.
Automated calibration is performed based on the
parameters set on the Calibration screen.
The sequence of events is:
 The leak detector exposes the internal standard leak
to the system or verifies that the test port is roughed
out and exposes the external leak to the system.
 The ion voltage is scanned to find the peak signal.
 The system notes the leak rate reading, turns the leak
off and zeros the system.
 A gain is calculated from the leak rate reading to make
the signal match the value of the calibrated leak and
returns the system to Test mode.

NOTE The following figure appears within the first twenty minutes of operation if calibrate
is selected. This message advises you that a twenty minute warm up is strongly
recommended after a cold start up. This twenty minute warm up ensures optimum
instrument calibration and peak performance.
• Select No - No calibration is performed
• Select Yes - Calibration begins.
• No action - Keeps the message displayed and the leak detector automatically
calibrates after the 20 minute timer times out.

Figure 31 20 Minute Warm-up Dialog

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Read Internal Leak Opens the Internal leak valve so the leak can be seen by the
system.
The Read Internal Leak button is only functional while the
leak detector is in Test/Fine test and activates the internal
calibrated leak, allowing verification of the system
calibration. When the system is in Std Leak mode, Std Leak
appears on the Home screen.
The Std Leak mode isolates the test port from the system
and exposes the leak to the spectrometer. This allows you
to compare the displayed leak rate value to the calibrated
leak value on the Calibration Menu screen to verify proper
system operation.
Because the test port is isolated from the fore pump in this
mode, a slight increase in test port pressure may be
indicated on the test port pressure display.
Full Calibration Performs a thorough tuning process and a system gain
(Internal Only) adjustment (calibration). The full tuning process involves
scanning the ion source chamber voltage, and optimizing
each value for a maxi- mum helium signal. Once the tuning
process is complete, system gain is adjusted to bring the
leak detector into calibration. A full calibration takes less
than three minutes.
Fast Calibration Compares the leak rate signal with the calibrated leak value
and adjusts the gain to bring the system into calibration. If
the gain value is above the upper gain limit for the working
range as defined in the following table, then the fast
calibration process is terminated and a flashing c symbol
appears on the Home screen. A fast calibration takes less
than 30 seconds.
* If the system cannot read the internal calibrated leak temperature, the system
displays the leak value and the temperature shown on the calibrated leak label. If
this happens, the calibrated leak symbol on the main screen turns red.

NOTE External Calibration defaults to Fast Mode only.

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Internal Leak Value The temperature-compensated internal leak value and

expiration date appear to the right of the Internal Leak
Value text. The actual Internal Leak Value and
Expiration Date can be modified in Section
“Maintenance Screen”.
External Leak Value Displays the value on an operational button.

To configure an external leak:

1 Press External Leak (located under Calibrate With).
2 Press the button to the right of the External Leak Value text.
The data entry pad appears.
3 Enter the leak value and press OK.
For calibration in the E-10 range, the vacuum system must be sufficiently pumped
to reduce helium background below the E-10 range signal level. This is required to
achieve an acceptable signal-to-noise level and ensure accurate calibration.
E-10 range calibration is performed using an external calibrated leak. If an external
calibration is selected soon after system startup, the system evaluates the helium
background and determines if the background signal is sufficiently low to give an
accurate calibration. If the:
 System has pumped out sufficiently, the calibration proceeds.
 Background is changing, indicating the system is still pumping away
background helium, a countdown timer appears (Figure 32). The system
monitors the helium background and shows the time until the calibration
begins. Should you prefer not to wait, a Cancel button permits the calibration
request to be canceled.

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NOTE The firmware initially starts at a large time interval, but recalculates the required
time as the pumping continues. The new time is reflected on the timer.
The new Applications Setup Menu (Test Confutations Menu) helps guides you
through the process - Select High Sensitivity.

Figure 32 Helium Background Timer

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Test Configuration Screen

Test Configuration
The Test Configuration Menu allows you to:
 Program and activate process setpoints (leak rate pressure and audio)
 Enable or disable leak detector advanced features
 Select Leak Detection specific applications with auto parameters setup with
step-by -step instructions for enhanced operation.

Reject and Audio Set Points

Reject and Audio Set Points make the acceptance and rejection of parts more
obvious. By creating a set point, you let the system indicate if the part meets
specification or not. For example, you select LEAK RATE #1, set the value to 1.0E-8,
set the reject activation to greater than > (activate when the leak rate is above that
set point), and turn the set point ON. Then when the system is put into TEST, it
indicates on the front panel that the part has not meet the set point requirement,
until it gets below the set point value and then the set point failure indication
disappears.
Multiple set points are used when you want to indicate several levels of acceptance.
There are times when you may want to assure the leak detector is working properly
by bounding the failure limit. For example, if LEAK RATE #1 were set as per above,
then any leak rate below 1.0E-8 would pass the part. Also assume that the leak
detector was not seeing helium, it would always pass parts. One way of preventing
this from happening is to periodically read the internal calibrated leak. Another way
is to place a 5.0E-10 range leak into the test port along with the part and program a
second reject set point to fail if the leak detector were to go below that value. In that
case, you would program LEAK RATE #2 to 4.7E-10, set the reject activation to less
than < (activate when the leak rate is below that set point), and turn the set point
ON. In this case, when the system is put into TEST, the system indicates a failure if
the leak rate goes below 5.0E-10.
 Press Reject & Audio Set Points on the Menus screen.
The Reject and Audio Set Points screen appears (see the following figure).
Use this screen to:
 Set the parameters to enable or disable.
 Display or change the value of the four reject set points and the audio set
point.

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Toggles these
options on/off.

Press the desired Activates the

value to access reject
its keypad the programmed
set point if below
value

Activates the
reject
the programmed
set point if above
value

Figure 33 Reject and Audio Setpoints

Reject Set Points Activate and non-activate set points appear on the
Home screen inside the Set Point Status window.
The status of the set points are also available through
the RS-232 line (see Appendix A “Communications
Protocol”). There are four possible set points. Three set
points can be programmed to a leak rate value and one
can be programmed to test port pressure.
Set points may be turned ON or OFF (enabled or
disabled) for each set point. If a Reject Set Point is ON,
then the rear panel output for that set point goes active
when its leak rate value is exceeded and an activated
red box indication appears on the Home screen.
Each set point is set to activate above or below the
programmed value. To activate the reject set point:
 Above the programmed value, select the >.
 Below the programmed value, select the <.

Audio Set Point Settings:

 On:
The audio tone rate increases proportionally with
each decade that the measured leak increases
above the set point (leak rate pass/fail
specification). The audio volume control is located
on the Home screen.

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NOTE For Plugged Probe Alarm - High Pressure Test (Sniffing Mode) see Section “Sniff
Method”.

 Off:
The audio sounds for all leak rates above zero.
Set points may be turned ON or OFF (enabled or disabled). When the Audio Set
Point is OFF, audio sounds for all leak rates above zero. When the audio set
point is ON, audio sounds only for leak rates above the audio set point.

To configure reject set points and the audio set point:

1 Press the blue check for the Reject Set Point.
2 Press the value button associated with the set point. The data entry pad
appears.
3 Enter the set point and press OK.
4 Press the < or > soft key to select whether the reject setpoint activates above or
below the programmed value.
5 Press the blue check for the Audio Set Point.
6 Press the value button associated with the audio set point. The data entry pad
appears.
7 Enter the set point and press OK.

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Test Configuration Advanced Features

Use this screen to configure the High Pressure Test, Fine Test Only, AZ<0<0, Gross
Test, Transfer to Test and Stabilization Wait Timer.

Figure 34 Test Configuration Screen

High Pressure Test Select the High Pressure Test mode. When High
Pressure Test is selected, Range Stop defaults to 10-7
atm cc/sec. High Pressure Test sensitivity mode range
is 10-4 to 10-8 atm cc/sec.
 When the leak detector is in Vent mode:
Turn the High Pressure Test feature on to start the
test cycle. This automatically locks the leak
detector into Contra-Flow™ Leak mode, and auto-
ranges through all decades down to the most
sensitive Contra-Flow range.
 When the leak detector is in Test mode:
Turn the High Pressure Test feature on to perform
the same function, with the exception of
performing the test cycle start sequence.
Fine Test Only Select the Fine Test Only switch to enable the feature.
When selected and Test is initiated on the Home
Screen the leak detector transfers from Test to Fine
Test and remains in Fine Test regardless of leak rate. If
the test port pressure is greater than 1.4E-1 Torr the
leak detector transfers back to the Roughing Mode.

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Auto-Zero<0 Active Adjusts the zero reference point automatically and

continually to the correct zero value when the helium
background level drops below the previously set zero
reference point. This feature ensures that the leak
detector maintains a correct balance value after a
previously zeroed background signal naturally cleans
up (background helium is pumped away).
When the Auto-Zero < 0 feature is in the process of re-
adjusting the zero reference point, the arrows located
on the left end of the bar graph illuminate. These
arrows indicate that the measured helium leak rate is
currently less than the minimum displayable value. The
arrows may flash briefly as the system recovers from a
leak indication and the displayable leak rate
approaches zero. If the Auto-Zero < 0 is turned on, the
arrows may also flash briefly as the system resets the
zero point to a lower value. The leak detector does not
display a leak rate while the arrows are on. If the
arrows remain on for more than a few seconds, press
Zero to set operating parameters to the correct zero
value. This situation can occur if the leak detector had
not been fully warmed up when a previous calibration
was initiated.
Auto-Zero < 0 Inactive When Auto-Zero < 0 is inactive, the leak detector does
not automatically adjust the zero reference point when
the helium background level drops below the previously
set zero reference point. In this condition, a leak less
than the previously set zero value is not indicated by
the system. Instead, the arrows remain lit, indicating
that the background level is below the previously set
zero reference point. Press Zero on the front panel to
readjust the zero reference point manually. This clears
the lights.

NOTE For High Pressure Test/Sniffing mode, de-activation (Inactive AZ<0) is highly
recommended. Manual Zeroing produces a more desirable performance, thus
eliminating false leaks due to fluctuations in test port pressure while in test.

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Gross Test Allows the operator to locate leaks while the system is
in roughing mode. The test indicates the presence of a
leak at high pressures only and does not display a leak
rate value.

Figure 35 Gross Test Screen

 Gross Test is activated in the Test Configurations > Advanced Features menu.
 Once activated, the GROSS TEST button appears on the Home screen. Press
GROSS TEST to enter the screen.
 There is an audio tone for Gross Leak testing, which increases as the leak
increases.
 Gross Test only works when the test port pressure is between 10 and 150 Torr
and remains constant (± 2% between previous and current pressure readings).
 The Gross Leak test stops if the system goes into Backing, Test or Fine TEST
mode.
 Activating the Auto Sequencer button terminates the Gross Leak test.
 The HOLD button is inactive while in Gross Leak test mode, as the system is in
roughing mode.

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Transfer to Test
The value input and hidden keypad is to the right of the Transfer to Test feature.
Use it to set the pressure at which the system goes into Test.
The Transfer to Test setting can be adjusted to lower values for specific
applications. The limit on the maximum test pressure prevents the operator from
inadvertently setting the leak detector to transfer into test at too high a pressure,
which would result in excessive spectrometer contamination or ion source filament
failure.

Press the
value to access
its keypad

Figure 36 Transfer to Test

Maximum Test Determines the test pressure cross over point at which
Pressure the system transfers from Roughing into Test and then
into the Contra-Flow Test mode. In the Contra-Flow
Test mode, the gas sample is pumped through the leak
detector and swept across the high vacuum pump
foreline. The Contra-Flow mode allows for higher sensi-
tivity testing at exceptionally high test pressures.
The maximum test port pressure is 10 Torr.

NOTE The transfer pressure from the Test mode to the Fine Test mode is set at 100
milliTorr (1.0E-1 Torr). You may wish to lower that value under certain
circumstances. The mid-stage transfer pressure limit is adjustable from 1 to 100
milliTorr via an RS-232 command (see ML-XFER and INIT-ML-XFER in Section A
“Communications Protocol”). The pressure limit is not adjustable using the display.

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Stabilization Wait Timer

The previous figure shows the Transfer Points screen.
Stabilization Wait This appears on the Home screen after a successful
startup. This timer is necessary for the spectrometer
stabilization and degassing. The factory default is 5
minutes. It is highly recommended for those
customers who infrequently use the leak detector or
expose the leak detector to aggressive applications to
select the 9 or 15 minute selection. For example: Select
9 minutes for a leak detector that is used once a week
or select fifteen minutes for a leak detector that is used
once a month or less.
High Pressure Test Set-Up Procedure
The High Pressure Test mode locks the system into contraflow, offering maximum
protection to the spectrometer. This is useful in sniffing applications or when
evacuating parts that can contaminate the system.
To configure the High Pressure Test (optional):
1 If sniffing, vent the leak detector and attach a Agilent Power Probe
(Part Number K9565306) to the test port.
2 Monitor the test port pressure reading on the display and adjust the power
probe flow valve for a test port pressure of 0.5 to 1 Torr (2 Torr maximum). This
pressure setting allows for very rapid system response.
3 High Pressure Test mode sensitivity is 10-4 to 10-8 atm cc/sec at test port
pressures between 1 and 2 Torr using the power probe.
When High Pressure Test is activated, range stop defaults to 10-7 atm cc/sec.
High Pressure Test mode sensitivity is 10-4 to 10-8 atm cc/sec at test port
pressures between 500mTorr and 2 Torr using the power probe. When High
Pressure Test is activated, range stop defaults to 10-7 atm cc/sec, but selecting
between 10-4 to 10-8 atm cc/sec is permitted.
4 Select High Pressure Test to enable the High Pressure Test mode.
5 When High Pressure Test is selected, Range Stop defaults to 10-7 atm cc/sec.
High Pressure Test sensitivity mode range is 10-4 to 10-8 atm cc/sec.
6 Wait for the leak detector to enter Vent mode.
7 Turn the High Pressure Test feature on to start the test cycle. This
automatically locks the leak detector into Contra-Flow™ Leak mode, and auto-
ranges through all decades down to the most sensitive Contra-Flow range.
8 Wait for the leak detector to be in Test mode.
9 Turn the High Pressure Test feature on to perform the same function, with the
exception of performing the test cycle start sequence.

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Home Screen - Activate Gross Test

Press to
activate
Gross Test

Figure 37 Home Screen - Activate Gross Test

Gross Test Allows the operator to locate leaks while the system is in
roughing mode. The test indicates the presence of a leak at
high pressures only and does not display a leak rate value.
1 Activate Gross Test. The GROSS TEST button appears on
the Home screen when the test port pressure is between
10 and 150 Torr.
2 Press GROSS TEST to enter the screen.
 There is an audio tone for Gross Leak testing, which
increases as the leak increases.
 Gross Test only works when the test port pressure is
between 10 and 150 Torr and remains constant (± 2%
between previous and current pressure readings).
 The Gross Leak test stops if the system goes into
Backing, Test or Fine TEST mode.
 Activating the Auto Sequencer button terminates the
Gross Leak test.
 The HOLD button is inactive while in Gross Leak test
mode, as the system is in roughing mode.

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Figure 38 Home Screen - Gross Test Active

Application Setup

Figure 39 Application Setup

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Sniff Method
Utilizing the Agilent Power Probe connected to the test port of the Helium Leak
Detector, the sniff method pinpoints the location and magnitude of leaks from
volumes that have been filled with helium. Settings available in this mode include:
 Establishing the minimum displayed range - avoids the distraction of
inconsequential leaks.
 Entering set point values for audible and visual alarms.
 Adjusting the sampling pressure for best response and clean up and
establishing an alarm should the sniffer probe become plugged.
To access:
1 Select Test Configurations > Applications Setup.
2 Select Sniff Method and press Set-Up and the following figure appears:

Figure 40 Sniff Method

At this point:
 The leak detector locks into High Pressure Test (Test only)
 Auto Zero < 0 is disabled
 Minimum Range defaults to 10-7 - This value can be adjusted from 10-8 to 10-4
Buttons and Fields
Set Point 1 Desired Alarmed Leak Rate value (> <) - This value can be
adjusted from 10-8 to 10-4. Set Point values in Sniffing
applications are usually programmed for greater than the
acceptable leak rate limits.

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Audio Set Point Desired Audio Alarmed Leak Rate Value (> <). This
value can be adjusted from 10-8 to 10-4. The Audio Set
Point triggers with its' own distinct tone if different
from Set Point 1.

NOTE The Audio Setpoint is very useful in the Sniffing Application. The programmed Audio
Set Point value can be programmed 50% < Set Point 1, which alarms the operator
that they are approaching a leak (leak location).

Plugged Probe Alarm A distinct high frequency tone different from the Audio
& Set Point.
1 This alarm is useful in alerting the operator that the
desired Power Probe/Sniffing Probe adjustment
(pressure) has changed. A High Limit can be
selected in alerting that too much flow (high test
port pressure) is present. A Low Limit trigger is
typically the norm indicating that the Power
Probe/Sniffing is blocked or the tubing is kinked or
pinched off.

Files The operator can store up to three setup

configurations:
• Sniff 1-3

The information icon provides the necessary directions

for a successful external calibration.

Calibrate External calibration/Sensitivity check: Follow the step

by step process.

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Spray Method
The spray method is for leak testing vacuum systems of all sizes. When properly
connected to the vacuum system under test, the Helium Leak Detector will locate
and indicate the relative size of leaks. Settings available in this mode include:
 Entering set point values for audible and visual alarms.
 Connecting the wireless remote - allows testing of large systems by one operator.
To access:
1 Select Test Configurations > Applications Setup.
2 Select Spray Method and press Set-Up and the following figure appears:

Figure 41 Spray Method

At this point Auto Zero < 0 is enabled.

Buttons and Fields
Set Point 1 Desired Alarmed Leak Rate value (> <) - This value can
be adjusted from 10-10 to 10-4. Set Point values in Spray
applications are usually programmed for greater than
the acceptable leak rate limits.
Audio Set Point Desired Audio Alarmed Leak Rate value (> <) - This
value can be adjusted from 10-8 to 10-4. The Audio Set
Point triggers with its' own distinct tone if different
from Set Point 1.
Remote Control The wireless handheld remote can be activated and
configured (channel selection) within this application.

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NOTE The Wireless Remote is a factory and field installed customer option.

Files The operator can store up to three setup

configurations:
• Spray 1-3

The information icon provides the necessary directions

for a successful external calibration.

Calibrate External calibration/Sensitivity check: Follow the step

by step process.

NOTE The external calibration routine for the Spray Method is typically performed on large
chamber applications for proper characterization of the leak rate measurement.

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High Sensitivity
Often, calibration to a known, external helium leak standard is required for internal
quality requirements or additional accuracy. High Sensitivity Test guides you
through this procedure. Settings available and features in this mode include:
 Establishing the minimum displayed range - avoids the distraction of
inconsequential leaks.
 Step-by-step guidance on the external calibration procedure.
 Employs additional software routines to improve stability at low leak rates.
To access:
1 Select Test Configurations > Applications Setup.
2 Select High Sensitivity and press Set-Up and the following figure appears:

Figure 42 High Sensitivity

To perform a calibration process (internal and external) for a precision 10-10 leak
rate accuracy and stability:

NOTE Minimum Range can be programmed - Default 10-10. Auto Zero < 0 is disabled.

Calibrate External calibration/Sensitivity check: Follow the step

by step process.

Files The operator can store up to three setup

configurations:
• HighS 1-3
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Auto Sequencer
The Agilent Auto Sequencer facilitates programming a repetitive test cycle for leak
testing parts that have been sealed with helium inside. This can improve
productivity and reduce testing errors. Settings available in this mode include:
 Program timers for the roughing and test modes.
 Entering set point values for audible and visual alarms.
 Establishing a lower level verification leak to improve reliability of the test.
 Setting a pressure set point that saves time by rejecting a part if the pump
down characteristics fall outside of the norm.
The auto sequencer is used to automatically perform testing on a part, to maximize
testing throughput and to reduce the chances of accidentally accepting a bad part.
The auto sequencer is used in conjunction with the reject and audio set point
settings, which provide the criteria for pass or fail conditions. Within the auto
sequencer feature, there are two variables that must be set, rough time and test
time. The ROUGH TIME setting indicates to the system the maximum time it is
allowed to be in roughing before the test fails. Ideally, the system goes into the
roughing phase and then proceeds to TEST. The TEST TIME setting tells the
system when to perform the test against the set point values. For example, you
may set 20 seconds for the TEST TIME. At the end of 20 seconds, the system
determines if the part has passed or not and then makes an indication by either
going to VENT (Pass) or going to HOLD (Fail) and displaying the reject set point
failure on the front panel
 Press Auto Sequencer Set-Up on the Menus screen.
The Auto Sequencer Set-Up screen appears (see the following figure). The leak
detector can be configured to automatically run through a complete test cycle
(Start/Rough/Test/Vent).
During the test cycle, the system ensures that during the Rough Time the user-
entered pressure transfer set points are met.
A Pass condition is indicated by the system reverting to the Vent mode upon
completion of the test cycle. A Fail condition is indicated by the system
reverting to the Hold mode, and all operating buttons being disabled except
Vent. A failed condition also results in a red activated set point box in the Set
Point window appearing on the Home screen, along with a reject set point
activation upon completion of the test cycle. The status of the reject set points
are available through the RS-232 line (see Appendix A “Communications
Protocol”). On completion of an automated test cycle, the leak detector
captures the leak rate signal measured just prior to the end of the automated
test cycle. This leak rate appears on the Home screen until the next test cycle is
initiated.

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Rough Determines the amount of time that the leak detector is allowed to
Time evacuate the test object to the Maximum Test Pressure. In Auto
Sequencer mode, the leak detector transfers into test as soon as
the specified transfer pressure is met. If the specified test transfer
pressure is not achieved within the pre-selected rough time, the
system aborts the cycle and goes into Hold mode.
The Rough Time value is determined empirically and reflects the
typical time required to rough the test object to the specified test
pressure. Failure to achieve the test pressure within the pre-
selected rough time indicates a gross leak in the test object or test
fixturing, or that the time allowed was insufficient.
The rough timer records the amount of time the system spent in
the roughing phase prior to it entering the TEST mode. The rough
timer is intended to help you set up a rough time value since it can
be difficult to predict accurately how long the system is in the
roughing phase when you cycle. Put the system into TEST mode,
the rough timer records and displays the rough time so that you
can enter a rough time value close to what was recorded. For
example, if the rough timer records a value of 12 seconds, you can
then enter a value in the rough time that is slightly longer than
what was recorded, 15 seconds for example. The rough timer only
records a time when the auto sequencer is ON.
Test Time Determines the amount of time that the leak detector remains in
test before it compares the measured leak rate with the selected
reject set point. Allow sufficient time for the leak rate reading to
stabilize before the system makes a pass/fail decision. This is a
function of the part configuration and the leak rate specification. In
Auto Sequencer mode, the leak detector remains in test for the
entire duration of the preselected test time.
To configure the auto sequencer mode:
1 Press the blue check to turn on the Auto Sequencer.
The pass/fail criterion is based on the reject set points that are enabled.
2 Press the value button associated with the Rough time.
The data entry pad appears.
3 Enter the time and press OK.
4 Press the value button associated with the Test time.
The data entry pad appears.
5 Enter the time and press OK.

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 Press TEST and let the system record the actual time spent in roughing. After the test
is complete, use the recorded rough timer value to set an appropriate rough time.
To access:
1 Select Test Configurations > Applications Setup.
2 Select Auto Sequencer and press Set-Up and the following figure appears:

Figure 43 Auto Sequencer

The auto sequencer is used to automatically perform testing on a part, to maximize

testing throughput and to reduce the chances of accidentally accepting a bad part.
The auto sequencer is used in conjunction with Set Points 1 & 2 and Pressure Set
Point settings, which provide the criteria for pass or fail conditions.
Within the auto sequencer feature, there are two variables that must be set, Rough
Time and Test Time.
Rough Time This setting indicates to the system the maximum time for the
leak detector to be in Roughing mode. If the Rough Time is
exceeded the test aborts and the system goes into Hold.
This is a failed condition. Ideally, the system goes into the
Roughing phase and then proceeds to TEST (setup below).
NOTE The Rough Time value is determined empirically and reflects the typical time
required to rough the test object to the specified test pressure. Failure to achieve
the test pressure within the pre-selected rough time indicates a gross leak in the
test object or test fixturing, or that the time allowed was insufficient.

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Test Time This setting tells the system when to perform the test against the
set point values. For example, you may set 20 seconds for the
Test Time. At the end of 20 seconds, the system determines if
the part has passed or not and then makes an indication by
either going to VENT (Pass) or going to HOLD (Fail) and
displaying the reject set point failure on the Home screen.
The final leak rate value appears on the Home screen regardless
of a pass or failed criteria. The next test cycle (pressing Test)
clears the leak rate value (setup below).

NOTE The Test, Vent and Zero functions are available in this application setup. The Test
and Vent buttons aid in setting up the Rough and Test Timers. The Zero function is
extremely helpful in zeroing out unwanted background associated with the test
fixture. The zeroing set up helps in reducing the test time.

Auto Sequencer Set-Up

Attach the test fixture with the part to be tested (known good test object) on to the
leak detector test port.

Rough Time Setup

Determines the amount of allowable time for the leak detector to evacuate the test
object to the Transfer Point - Transfer Pressure.
To test:
1 Select Test Configurations > Advanced Features > Setup.
If the transfer pressure is not achieved within the pre-selected rough time, the
system aborts the cycle and goes into Hold mode.

NOTE Factory Default - Transfer Point (Transfer to Test Pressure) is 1 Torr.

Do not activate or program any Set Points.

2 Program the Rough Timer for some unrealistic amount of time, like 200 secs.
3 Program Test Time for 30 secs and press Test. Allow the test to complete
(system vents).
4 Program the Rough Time as displayed in the Rough Time window.

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Test Time Setup

1 Program the Test Time for some value that allows for correct characterization
of the necessary test time to reach at least one decade less than that of
Setpoint 1 (reject level).
2 Input the desired Test Time.

Set Point 1 Setup

1 Input the Leak Rate value that is a failed/reject condition.
2 Typically, a greater than condition is programmed.

Set Point 2 Setup

You can choose between the two setpoints:
1 Input the Leak Rate value that is a failed/reject condition.
2 Typically, a greater than condition is programmed.

NOTE A Typical Auto Sequencer application uses either Set Point 1 or Setpoint 2 for the
desired leak rate reject set point.

Using Set Point 1 and 2 together (Optional)

Some applications utilize a reference leak during the test cycle to validate that the
leak detector is still calibrated and sensitive to helium.
 Set Point 1 is set up for the leak rate reject level (>).
 Set Point 2 is set for the reference leak (<).

NOTE If the leak rate falls below the reference leak value (Set Point 2) at the end of the test cycle,
the leak detector reports Rejected/Hold. This type of a reject is a system level failure. This
could be related to a fixturing issue, operator error or system performance.

Pressure Set point (High & Low Limit) - Optional

 High Limit - Input the high-pressure limit that must not be exceeded during the test.
 Low Limit - Input the low-pressure limit that must be maintained throughout the test.
 Files: The operator can store up to three setup configurations:
 AutoS 1-3.

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Split Flow
Activating the split flow option properly characterizes the system to an external
calibrated leak, which is influenced by additional vacuum pumping sources. These
separate vacuum pumping sources reduce the amount of helium measured by the
leak detector. The split flow option is very useful for external calibrations were
external gain factors exceed the limit of 50 due to a high helium background (Range
Stop E-8). The split flow factor is also useful for calibrating to a standard leak while
in the sniffing mode (High Pressure Test).

Figure 44 Split Flow Application

Leak detectors are frequently connected to vacuum systems in parallel with other
vacuum pumps. This can cause errors in readings when testing to a specific value
is important. Split Flow properly compensates for flow differences caused by
additional pumps. Settings available in this mode include:
 Setting the value of the installed reference leak.
 Step-by-step guidance in setting the split flow value.
 Entering set point values for audible and visual alarms.
 Enabling an Extended Split Flow routine when testing with low concentrations
of helium and/or to quantify large leak values.
Ground rules and assumptions:
 The software limits split flow to no more than 1000 times (3 decades). If the
split flow is turned ON and the leak rate entered is more than 1000 times higher
than the system leak rate, the system will not allow the split flow to turn ON
and <> appears.

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 At the main screen, the system blinks the split flow symbol when split flow
is ON.
 When split flow is turned ON, it displays the corrected leak rate but it knows the
real leak rate value.
 When ZERO is pressed with when split flow ON, the system zeros out
background up to a limit equal to the maximum split flow value.
To activate split flow:
1 Place the system into TEST mode and let the leak rate stabilize. Calibrate the
system.
2 Press the Split Flow blue check button. The leak detector prompts you to enter
the leak rate for the customer's calibrated standard leak (what the leak rate
should be).
The leak detector displays the corrected leak rate, essentially calculating a split
flow gain value. The leak detector automatically calculates the split flow factor,
turns on and calculates the range stop, based on the split flow factor.
When Split Flow is turned OFF, the system reverts back to the uncorrected leak
rate. This process must be repeated when reactivating split flow.
To setup:
1 Connect the leak detector and secondary rough pump to the test chamber as
seen in the previous figure.
2 Install the External Calibrated Leak on the test chamber.
3 Press Test on the leak detector.
4 Open valve on secondary rough pump to evacuate test chamber.
5 Select Test Configurations > Applications Setup and the following figure
appears.
6 Select Split Flow and press Setup and the following figure appears:

The information icon provides the necessary directions for a

successful external calibration.

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Figure 45 Split Flow Setup

7 Enter the value of the installed external calibrated leak.

8 Optional - Enter a Set Point 1 leak rate value.
9 Optional - Enter an Audio Set Point value.
10 Press Continue.
"Files - operator can store up to three setup configurations:
oSplit 1-3
Extended Split Flow is used in applications where the External Standard Leak values
are greater than the upper leak rate limit of the leak detector (>9.9E-4 std. cc/sec
He) but can be measured due to a large split flow condition.
Example: 5E-1 std. cc/sec He standard leak measures 5E-5 std. cc/sec He on the
Agilent Helium Leak detector. The out of range Installed Leak Value can be entered
and Extended Split Flow can be activated.

The software limits split flow to no more than 1000 times (3 decades). If the split
NOTE
flow is turned ON and the leak rate entered is more than 1000 times higher than the
system leak rate, the system will not allow the split flow to turn ON and <> appears.
At the main screen, the system blinks the split flow symbol when split flow
is ON .
When split flow is turned ON, it displays the corrected leak rate but it knows the real
leak rate value. When ZERO is pressed with when split flow ON, the system zeroes
out background up to a limit equal to the maximum split flow value.

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PPM (parts per million) Sniff Method

Certain test protocols specify parts per million (PPM) units for measuring leak rates. This
test method is only to be used with a suitable sniffer probe, it is not intended for vacuum
leak testing. Settings available and features in this mode include:
 Setting the value of helium concentration to be used for calibration.
 Step-by-step guidance to calibrate to a known concentration.
 Using a mass flow meter (optional) for accurate measurement regardless of
pressure.
 Entering set point values for audible and visual alarms.
 Establishing an alarm should the sniffer probe become plugged.

NOTE Calibrate the leak detector prior to the PPM Sniff Application.

To run this:
1 Select Test Configurations > Applications Setup.
2 Select PPM Sniff Method, press Set-Up and the following figure appears:

Figure 46 PPM Sniff Method

3 Ensure that the leak detector must be in Test and setup for a sniffing
application as shown in the following figure. The test port pressure appears in
the top left hand corner of the setup screen (see previous figure).

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Figure 47 Sniffing Setup

4 If the leak detector is vented - Press the Test button in the bottom right hand
corner. Adjust the metering valve on the Sniffing Probe until a desired value
between 5.0E-1 and 1 Torr is obtained.
In this Setup Screen the leak detector can be configured to measure PPM
concentrations of Helium from the following three methods:
 Calibrating to a known Helium PPM concentration (“Calibrating to a Known
Helium PPM Concentration”).
 Monitoring the actual flow rate in real time from a recommended Mass Flow
Meter manufacturer (Alicat Scientific) via the RS232 port to obtain the
calculated Helium PPM concentration at the adjusted test port pressure
(“Measuring PPM of Helium with an Alicat Scientific Brand Mass Flow Meter”).
 Inputting the flow rate (sccm) from any Mass Flow Meter or Mass Flow
Controller via the displayed flow rate reading/value at the adjusted test
port pressure to obtain the calculated Helium PPM concentration
(see “Measuring PPM of Helium with a non-Alicat Scientific brand Mass
Flow Meter”)

NOTE Parts per million (PPM) of helium may be measured using a helium leak detector
that is either used in conjunction with a mass flow meter, or is calibrated using a
known concentration (PPM) of helium. PPM of helium is described as the flow rate
of helium divided by the flow rate of total gas, multiplied by 100. If there are 5 moles
of helium, and 999,995 moles of other gas, then the concentration is 5 PPM helium.
This is a typical concentration of helium at sea level on earth.

The information icon provides the necessary directions for a

successful external calibration.

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Calibrating to a Known Helium PPM Concentration

 Cheapest method
 Fastest response time
 Requires calibration using a known Helium PPM gas mixture.

NOTE This requires calibrating using a known PPM mixture, such as a 50 PPM helium
mixture. To sample the gas concentration, the operator may use either the standard
power probe sniffing gun (Agilent part number K9565306), or any small ID SST
or copper tubing attached to Swagelok fine metering valve (Swagelok
part number: SS-SS4).

To do this:
1 Select Test Configurations > Applications Setup.
2 Select PPM Sniff Method > Application Setup.
3 Ensure the system is in Test and the test port pressure adjusted between
5E-1 Torr 1 Torr.
4 Enter the Helium concentration in PPM in the associated field.
5 Press the Calibrate button (see Figure 46) and follow the step-by-step
instructions. The leak detector is now ready to measure the concentration
of Helium in PPM.

Measuring PPM of Helium with an Alicat Scientific Brand Mass Flow Meter
 Scientific confidence added through accurate computation of both helium leak
rate, and gas flow rate.
 Slower response time than without using mass flow meter at all.
 Requires Alicat Scientific 1 SLM Whisper series mass flow meter.
• Alicat Scientific part number MW-1SLPM-D-DB15/5M, GAS: Air. Comes with
DC power supply & RS232 cable.
 Requires a mid E-5 std. cc/sec He calibrated standard leak.
Application Setup
1 Assemble a fine metering valve, as described in Figure 49 and follow the
assembly notes.
2 Connect the fine metering valve in series with the leak detector (see the
following figure).

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Figure 48 Metering Valve Overall Assembly

Figure 49 Metering Valve Assembly

Item A. (2X) Description: NW25 to 1/4 NPT stainless steel male pipe
adapter Make: Agilent Technologies Inc. - Agilent part
number: KAMP250250S
Item B. (2X) Description: 1/4 NPT to 1/4" tubing adapter
Make: Swagelok - Swagelok part number: SS-4-TA-1-4
Item C. (1X) Description: 316 stainless steel very fine metering valve,
1/4" swage, 0.004 max
Make: Swagelok - Swagelok part number: SS-SS4
Assembly notes:
 Apply Teflon pipe tape onto threads of item B to ensure proper seal with
minimal leakage.
 When connecting item B. to item C., push in 1/4" pipe as far into nut as can be
allowed. Then snug nut to finger tight torque. Using a 9/16" wrench, turn nut 1 and
1/4 turns (360° + 90° = 450° total) for proper crush seal with the ferrule inside.
 This fine metering valve is the same type of valve as used in the Agilent sniffing
power probe. If desired, that valve may be taken out of the power probe and
reassembled in a similar technique to the one described here.

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3 Connect the Power Probe to the mass flow meter.

4 Connect the mass flow meter RS232 serial port cable to the leak detector serial
port located in the back of the unit.
5 Place system into Test and ensure the test port pressure adjusted between
5E-1 Torr 1 Torr (750 mTorr preferred).
6 Perform an internal calibration.
7 Perform an external calibration using the sniffing probe (see the following
figure) by:
a. Selecting Calibration > Calibrate With > External Leak.
b. Entering the value of the external calibrated leak. Keep the probe at the inlet
of the standard leak.
c. Pressing Calibrate. The system performs an instant calibration in 2
seconds.

Figure 50 External Sniff Calibration Setup

8 Select Test Configurations > Applications Setup.

9 Select PPM Sniff Method > Application Setup.
10 Select the MFM option.
11 Select Serial Port - This establishes RS232 communication between the MFM
and the leak detector.

NOTE The Calibration button on the PPM Sniff application is only to calibrate using a
known PPM mixture.

The leak detector is now ready to measure the concentration of Helium in PPM.

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Mass Flow Meter Setup Configuration

The following figure depicts the connection required to use the Alicat mass flow
meter in a test setting. This setup connects from the leak detector test port to the
fine metering valve assembly, to the mass flow meter (fitted on both ends with
1/4" NPT NW25 fitting (Agilent part number KAMP250250S), to the hose. This
series is important to be fitted in this order to ensure optimal helium response time.
Instead of this setup using the purchased metering valve, the operator may choose
to use the setup outlined, though that configuration can be awkward to hold as a
probe. The mass flow meter must be kept above a metering valve, whether the
sniffer probe, or the fine metering valve described. This keeps the mass flow meter
close to atmospheric pressure, ensuring maximum accuracy.

Figure 51 Alicat Scientific Mass Flow Meter Supported Method of PPM Testing

The hose may be connected to the inlet side of the mass flow meter. One
connection technique is described here, if you desire to purchase the Agilent sniffer
power probe. 1/16" ID hose may be used alone, by itself as a sniffing probe, though
it will not have a handle.

Figure 52 Alicat Scientific Mass Flow Meter Supported Method of PPM Testing

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Agilent part number R0305, an adapter from KF25 to 3/16" ID hose may be
purchased as part of the power probe kit, Agilent part number K95565305, the
entire power probe sniffer assembly. The molded plastic casing of the power probe
may be re-purposed by removing the valve and copper tubing, and inserting plain
1/8" ID hose into the shell of the gun. Remove the screws holding the case together
using a 7/64" Allen key.
Connecting from 3/16" tubing to 1/16" tubing may be accomplished using
McMaster-Carr part number 2808K105. 1/16" tubing should be used as the long
line sniffer in this application, not the thicker 3/16" ID tubing. The thinner tubing
gives a faster response time for a helium signal. 3/16" ID tubing may be purchased
as McMaster-Carr part number 6516T53. This tubing should only be used as an
adapter section or as use if not using a mass flow meter. The mass flow meter
restricts flow speed, requiring a thinner tube to be used for a quick response time.
1/16" ID tube may be purchased as McMaster-Carr part number 6516T62.
Since a thin hose is required without a fine metering valve on the top of the system,
if the operator already has a power probe handle that is not in use, the gun portion
of the probe may be disassembled, striped of all valves and copper tubing, and
reassembled with a 1/16" hose inside. It is important, however, not to have another
metering valve in series above the mass flow meter. This is for optimizing response
time. Of course, this only provides a convenient handle. A naked hose may be used
for sniffing.

Figure 53 Re-purposing a Power Probe for Thin Hose Without a Regulator

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Measuring PPM of Helium with a non-Alicat Scientific brand Mass Flow Meter
 Scientific confidence added through accurate computation of both helium leak
rate, and gas flow rate.
 Does not require use of known PPM gas mixture (though use is suggested to
check calibration).
 Risk of choosing a mass flow meter that is not in the proper range. The mass
flow meter selected should be in the range of SUGGESTED 0 to 1 SLM
(equivalently, 0 to 1000 SCCM).

NOTE The smallest mass flow meter that may be used while still functioning. It could be
as small as 300 SCCM, though this flow rate may not be capable of reading mass
flow when measuring flows of mobile unit leak detectors (units with larger roughing
pumps).

Alternatively, if using a mass flow meter that is not supported by the leak detector
software (anything other than Alicat Scientific brand mass flow meter):
1 Attach the mass flow meter in series above the Agilent power probe sniffing
gun (Agilent part number K9565306).
2 Attach the mass flow meter to the sniffing gun through use of a KF to
compression port adapter, 1/8" to NW25 (Agilent part number KCP250125),
if using the power probe as the metering valve (see the following figure).
3 Perform an internal calibration.
4 Perform an external calibration using the sniffing probe by:
a. Selecting Calibration > Calibrate With > External Leak.
b. Entering the value of the external calibrated leak. Keep the probe at the inlet
of the standard leak.
c. Pressing Calibrate.

Figure 54 External Sniff Calibration Setup

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5 Select Test Configurations > Applications Setup.

6 Select PPM Sniff Method > Application Setup.
7 Ensure the system is in Test and the test port pressure adjusted between 5E-1
Torr 1 Torr.
8 Select the MFM option.
9 Input the flow rate - SCCM displayed from the MFM/MFC controller.
The leak detector is now ready to measure the concentration of Helium in PPM.
To make the connection between the power probe sniffing gun and the mass flow
meter:
1 Fit the mass flow meter on the low-pressure end with an NW25 vacuum fitting
(see the following figure).

Figure 55 Compression Port

Figure 56 Probe Configuration

2 Measure the flow rate. Write this number down for later.
3 Vent the system and remove the mass flow meter. If the test port pressure
remains constant, the flow rate should not change. Do not adjust the metering
valve on the back of the sniffing power probe without recalibrating.
4 Vent the leak detector and remove the mass flow meter, if desired for faster
helium signal response time.
5 Install the power probe back onto the leak detector and put the system into Test.

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Parts per Million (PPM) Application Notes

Theory
Parts per million (PPM) of helium may be measured using a helium leak detector
that is either used in conjunction with a mass flow meter, or is calibrated using a
known concentration (PPM) of helium. PPM of helium is described as the flow rate
of helium divided by the flow rate of total gas, multiplied by 100. If there are 5 moles
of helium, and 999,995 moles of other gas, then the concentration is 5 PPM helium.
This is a typical concentration of helium at sea level on earth.
A helium leak detector by itself does not measure PPM. A helium leak detector
measures a leak rate of helium in units of (atm cc)/sec which is a measure of mass
flow rate (cubic centimeter volumes filled with 1atmosphere of pressure that flows
into the leak detector inlet every second). The unit atm, atmospheres, is the same
type of unit as Torr, a measure of pressure. 1 atm = 760 Torr. Additionally, cc, cubic
centimeters, is the same type of unit as liters. 1 liter = 1000 cc.
The helium leak rate measurement taken from the leak detector by itself does not
provide enough information to describe the PPM of helium present. To get that
information, the mass flow rate of helium must be known and the mass flow rate of
total gas passing into the leak detector must be known. An external mass flow
meter may be used for this measurement. With a known mass flow rate of helium
and a known mass flow rate of total gas, a simple percentage of helium in the total
gas can be computed.

The additional 1E6 converts the fraction into a part per million.

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Settings Screen

Settings Menu
The Settings Menu configures the leak detector for a desired appearance and
functionality. The Settings Menu consist of the following:
 Main Settings - Date and Time setup, Leak Rate and Pressure Units selection
and Language selection.
 Screen& Output Settings - Bar graph appearance, Leak Rate Ranging Selections
and Analog Output selections.
 Remote Control - Wireless activation and channel selection.
 Passwords and Restrictions - Restriction level and password selection plus leak
detector control lockouts.

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Main Settings
To open this screen select Menu tab > Setting > Main Settings.
With the Settings Menu open, select the Main Settings Menu as shown below:

Figure 57 Settings: Main Settings

Vent Pop Up and Filament Status Pop Up Selections Released - LD01.07 2023

Buttons and Fields

Date & Time Display and configure the current date and time.

Units Select leak rate units:

 atm-cc/sec
 mbar-l/sec
 Torr-l/sec
 Pa-m3/sec.,
 Cubic- ft./yr.
Select pressure units:
 Torr
 Mbar
 Pascal.

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Language Selections available include:

 English
 French
 Spanish
 German
 Mandarin
 Korean
 Japanese
 Russian
 Portuguese

Figure 58 Languages Settings

Baud Rate - New Baud Rate Selection as of February 2023 (LD01.06)

 9600
 19200
 38400
 57600
 115200

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Configure Date and Time

To configure the Date and Time screen:

Figure 59 Date and Time

1 Activate a field by touching within the date and time field.

2 Scroll and select the correct date and time.
3 Press OK to exit the screen or continue with Units and Languages.
Select Touch Sound for an audible touch tone for all touch screen selections and
inputs.
See page 112 for Main Setting languages.

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Vent Pop Up – Vent confirmation message Filament Status Pop Up

Filament Status Update message

Figure 60 New Main Settings Menu (LD01.07) May, 2023

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Screen Settings
The Screen Settings is a personalized menu that configures the leak detector's bar
graph, leak rate ranging and the analog output voltage type.

Figure 61 Settings: Screen Settings

Buttons and Fields

Bar Graph Configures the bar graph:
 Linear Scale - The linear bar graph leak rate appears
across the top of all screens when selected. In the Linear
Bar Graph display mode, the bar graph display represents
the mantissa of the leak rate, spanning from 0 to 10. The
numerical display (located to the upper right of the bar
graph) indicates the leak rate exponent value. This mode
offers exceptional resolution within a decade.
 Log Scale - The log bar graph leak rate appears across
the top of all screens. In Log Bar Graph display mode, the
bar graph display represents the entire leak rate range of
the leak detector, spanning from E-11 atm cc/sec to E-4
atm cc/sec. The numerical display (located to the upper
right of the bar graph) is not lit in this mode.

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Range Configures Minimum Range (Range Stop) and Only Show Range
(Manual) Leak Rate options
 Only Show Range - Configures the leak detector so that it only
displays the pre-selected decade entered in the manual range
variable field. For example, if the manual range feature was
enabled and the manual range variable was set to E-6, then the
leak rate decade displayed on the LED bar graph during testing
would be the E-6 atm cc/sec range only. This feature is useful
when the concern is only with monitoring the leak rate
measurement within a single decade.
For example, if the Only Show Range feature was enabled and
the Only Show Range variable was set to 10-06, then the leak rate
decade displayed on the LED bar graph during testing would be
the 10-06 atm cc/sec range only.
 Minimum Range - Configures the leak detector so that it only
auto-ranges down to the pre-selected decade. To allow auto-
ranging to the maximum sensitivity of the system, turn
Maximum Range Off.
This feature is useful when a product specification is more than
one decade less stringent than the actual sensitivity of the leak
detector. If the leak detector is capable of displaying full scale <
E-11 atm cc/sec, but the test specification is only in the E-7 atm
cc/sec range, then setting the range stop to E-8 atm cc/sec
would reduce the test cycle time by eliminating the need for the
leak detector to reach its most sensitive scale during each test
cycle. Activating the Minimum Range extends the sensitivity
requirements for calibration, thus eliminating unnecessary
calibration errors.

NOTE Activating the range stop extends the sensitivity requirements for calibration, thus
eliminating unnecessary calibration errors (see the following table).

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Table 12 Range Stop/Sensitivity Requirements

Range Stop Max Gain MDL

OFF 6.9 5.00E-12

ON at

-11 6.9 5.00E-12

-10 10 5.00E-11

-9 20 5.00E-10

-8 50 5.00E-09

Analog Output

Analog Output Configures the analog outputs:

 Linear 10 V/DEC
Linear output running from 0 to 10 V for each decade.
The following figure shows the linear output voltage
as a function of leak rate.
 Log 1 V/DEC
Log output at 1 V per decade. The figure 59 shows the log
output voltage as a function of pressure.

NOTE For added accuracy add .06 to Vout

Leak Rate = 10Vout+ .06/1011.

Bar Graph Configures the bar graph:

 Linear Only
The linear bar graph leak rate appears across the top
of all screens when selected. In the Linear Bar Graph
display mode, the bar graph display represents the
mantissa of the leak rate, spanning from 0 to 10. The
numerical display (located to the upper right of the bar
graph) indicates the leak rate exponent value. This
mode offers exceptional resolution within a decade.

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Figure 62 Leak Detector Linear Output Voltage

Figure 63 Leak Detector Logarithmic Output Voltage

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Remote Control
The remote control feature is a factory or field installed wireless option that
establishes communication between the leak detector and Agilent's wireless
hand-held remote control.
Use this menu to activate the leak detector's wireless baseboard option and to
assign the RF channel number that the remote hand-held device will link with.
 Communications with the leak detector
 Control of the leak detector.

Figure 64 System Settings: Remote Settings

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Password and Restrictions

The Password and Restrictions Menu is an optional configuration that protects the setup
of the leak detector. The factory and operational setups of the leak detector significantly
affect the performance of the leak detector and must only be accessed by trained service
personnel. This menu also allows protection from unintentional calibrations and
accidental operator input while the machine is unattended or under test.

Figure 65 Systems Settings: Password and Restrictions

NOTE VENT, TEST and ZERO buttons are still accessible in all password levels.

Buttons and Fields

Restrictions Activates/deactivates the password function:
 Medium: Allows operation (Home Screen) of the Test,
Vent & Zero functions. Locks out all menu selections
other than the Calibration Menu. Allows Internal &
External Calibration.
 High:Locks out all menu selections (Home screen only.
Set Password Changes the password. Enter up to six numeric values for the
password and confirm the password selection. An empty
entry is not allowed. If no password is entered, the old
password is used. The default password from the factory is
777777. You need this when changing to a new password.

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NOTE The password can also be read through the RS-232 port in the event of a lost
password. See Section A “Communications Protocol”.

Lock Vent Control Disables the VENT button. This option prevents
accidental system venting during test while under
remote or PLC control. The Vent Lock feature is not
active when the Auto Sequencer is on.
Lock All Control Disables the Test, Vent and Zero buttons. This option
prevents accidental system venting, testing, system
hold and Zeroing during test while under remote or PLC
control.

Wireless
Information relating to wireless communications

MAC Address Two MAC addresses appear on this screen:

 The MAC address at the top of the screen is the leak
detector MAC address.
 The MAC address above the hand held button is the
MAC address of the hand held device.
SYNC Channel For informational and factory debug purposes only.

SS ID Displays the SS ID number, factory set to 086, for

informational and factory debug purposes only.
Channel Click the button and a keypad appears to configure the
channel (1-19) that the unit uses to communicate with the
wireless remote. Up to 10 wireless remotes and leak
detectors can be communicating in a common area at a
time.

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Maintenance Screen

Maintenance Menu
The Maintenance Menu allows you to view or change the settings/parameters of
the leak detector, including
 General
• Internal Calibrated Leak
 Manual Tuning
• Spectrometer tuning parameters
 Valve Control
• Valve status
 Pump
• Primary/Roughing Pump configuration
 Gauge
• Test Port TC calibration
 System Defaults
• Reset Turbo & Filament hours
This Maintenance menu (General) allows you to view and input the value and
parameters of the installed internal calibrated leak. A Software Update utility is also
now available.

Figure 66 Maintenance General

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Software Update
Contact Agilent Customer Service/Technical Support for the latest software
upgrade. The software update utility is necessary when added features and
software upgrades are needed. A USB jump drive is all that is needed. The USB port
is located in the back of the leak detector. See the following figure.

Figure 67 USB Port

1 Select the Software Update option. You are prompted to insert the USB drive
into the back of the leak detector. See the following figure.

Figure 68 Insert USB Drive

2 Inset the USB drive.

3 Select Continue. The software update takes no more than 15 seconds.
4 Power off the leak detector as instructed and power back on.
5 Verify in the System Information Menu that the correct software was installed.

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Internal Calibrated Leak Setup

Use this screen to set the Internal Leak Value, Temperature Coefficient or Expiration
Date. The Internal Calibrated Leak screen appears (see the following figure).

Figure 69 Internal Calibrated Leak

To use this screen:

1 Press/tap the underlined/highlighted field to activate its associated keypad.
A keypad appears (see the following figure).

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Figure 70 Internal Calibrated Leak Keypads

2 Enter the required values as shown on the calibrated leak label or calibration
certification.
3 Repeat step 1 and 2 for each desired item.
4 Press OK to exit the screen.
5 The value of the internal calibrated leak, as shown on the CALIBRATION Menu,
is compensated for temperature using the calibrated leak temperature sensor.
The calibrated leak is not compensated for temperature if any of the following
conditions exist:
 The temperature sensor on the calibrated leak fails or there is a cable
connection problem.
 The temperature sensor reading is out of the operating range. The
operating temperature range is from 10.0 to 45.0° C (50 to 113° F).
 The internal calibrated leak is not a E-7 or E-8 range leak.

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Figure 71 Calibrated Leak

NOTE The actual value and information of the internal calibrated can be found on the
calibration certificate that shipped with the leak detector or shipped with the field
installed calibrated leak. The label on the internal calibrated contains also contains
all the necessary information as shown in the figure above.

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Manual Tuning
 Press Manual Tuning and the Manual Spectrometer Tuning screen appears
(see the following figure).
Use this screen to view and manually adjust the parameters of the ion source in the
spectrometer for a maximum helium signal.

Select a value to change it.

Accesses the keypad to Increments/
set Gain. decrements
the selected
Accesses the keypad to
value
set Gain

Select the filament for use

Figure 72 Manual Tuning

Emission Current Displays the value of the existing Emission current of

the spectrometer Ion Source and allows for emission
current adjustment. The emission current parameter
tunes the leak detector, maximizing the leak detector
Select the output for a peak helium signal.
filament for use Typical Emission current values range from 0.6 mA
to 1.2 mA.
Ion Voltage Displays the current ion voltage value of the
spectrometer Ion Source. The ion voltage parameter
tunes the leak detector, maximizing the leak detector
output for a peak helium signal.
Typical ion voltage values range from 205 VDC to 240
VDC. The ion voltage value is automatically adjusted
and set during the full calibration routine.

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Filament Switches between Filament 1 and 2. The filament

selection can be performed manually, but occurs
automatically if the current operating filament burns
out. A calibration routine is recommended every time
the operating filament is changed. The change appears
on the Home and System Information screens and C
flashes on the Home screen to indicate that calibration
is required.
Gain Displays the current value of the Gain of the system.
Gain is used to scale the indicated value of a known
leak to agree with a known correct value. The gain
parameter is adjusted after the leak detector has been
tuned to helium. It is automatically set by the Calibrate
Procedure.
NOTE Changing Gain changes Zero by the same percentage, which can affect system
transfer points. Typical gain values range from 0.5 to 3.0. The higher the gain, the
more noise shows up in the least sensitive range.

To change a Gain parameter:

1 Press the numerical Gain value.
The numerical value has a grayed out/dimmed appearance

NOTE For all tuning parameters, press Cancel to revert back to the original value or press
Done to initiate/store the desired.

2 Press the Up or Down arrow to peak the helium signal.

3 Press Done to accept the changes and to store the new parameter value in the
leak detector memory.
4 Press OK to exit the screen and return to the Home screen.
To manually tune the leak detector:
1 Place the system in TEST mode.
2 Navigate to the Calibration and turn the Read Internal Leak - On.
3 Write down the INTERNAL CALIBRATED LEAK value. This value is temperature
compensated.

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4 Navigate to the Manual Tuning Menu and:

• Set the GAIN to 1.0.
• Set the EMISSION to between 0.600 and 0.6500.
• Adjust the ION value up or down to attain the maximum value. Ideally, the
ION value should be between 205 and 240.
• Adjust the EMISSION to attain the maximum value. Ideally, the EMISSION
value should be between 0.600 and 1.200.
• Set the GAIN so that the leak rate on the screen matches the value of the
internal leak you wrote down.
5 Navigate to the Calibration Menu and turn the Read Standard Leak – OFF.

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Maintenance: Valve Control

Use this screen to monitor and control the valves in the leak detector vacuum
system for troubleshooting purposes. See figure 75 for an illustration of the leak
detector vacuum system.

Valve Status -
color code333

Figure 73 Maintenance: Valve Control

Figure 74 Valve Control Models G8610B, G8611B, G8611C, G8612B & G8612C

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These models all contain a diaphragm pump as shown above V8.

CAUTION Manipulation of the valves using the Manual Valve Control screen must only be
performed by persons who are extremely familiar with the leak detector as
damage to critical components (e.g., spectrometer, turbo) can occur.

Press the circle corresponding to that valve to change the state of a specific valve.

Table 13 Typical HLD Maximum Starting Current and Duration

Leak Detector V1 V2/V3 V4/V5 V6 V7 V8* V8*

Operating Stat Foreline Contra-Flow Midstage Calibrate Vent Ballast Exhaust
Valve Valve Valve Fine d Leak Valve Valve Valve
Test Mode Test Mode

Vent O C C C O C O

Rough C O C C C C C

Gross Leak Test C O C C C C N/A

Contra-Flow Test O O C C C C O

Midstage Test O C O C C C O

Hold O C C C C C O

Sniff O O C C C C O

Read Std Leak O C C O C C O

O: Open C: Closed

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Figure 75 Leak Detector Vacuum System Diagram

* Normally open valve, powered closed during all operations.

** Model G8610B, G8611C, G8612C, G8611B during the roughing sequence.

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Maintenance: Pump
The Pump Menu screen displays the Fore pump type (Dry or Oil) - Factory
configured. Operating hours and Last Service are also displayed.
This menu also displays the installation of a diaphragm exhaust pump and its'
operating hours and Last Service Date.

Figure 76 Maintenance: Fore Pump

Buttons and Fields

Last Serviced Select the date on which the oil is changed or the tip
seal is replaced. The system then tracks the operating
hours since the pump was last serviced or when a new
fore pump is installed. Lists the Last Service date for
the exhaust Pump and operating hours.
Enable Exhaust This screen appears for dry pump models only. The
Pump screen service date is changeable. Exhaust Pump only for
models G8610B, G8611C, G8612C, G8611B and
G8612B.

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Fore Pump Type and Exhaust Pump Activation

The fore pump type and exhaust pump are configured at the factory or can be
configured by a service engineer.

NOTE When the Last Service date is updated/changed the Operating Hours reset to Zero.

Maintenance: Gauge Calibration

A display of <1.0E-03 indicates the pressure is less than the lowest displayable
pressure of the TC gauge, which is 1.0E-03. Use this screen to perform a calibration
on the test port thermocouple gauge. Calibrate the thermocouple gauge for the
most accurate operation.
 Select Gauge Calibration from the Maintenance Menu selection.
Use this screen to:
 Set a calibration point at atmosphere.
 Set a calibration point at a low vacuum level (<= 1E-4 Torr).

Figure 77 Maintenance: Gauge Calibration

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Buttons and Fields

Test Port Vacuum Calibrates the thermocouple gauge zero value. Do
this at or below 1E-4 Torr.

Test Port ATM Sets the thermocouple atmospheric value. Perform

this operation only when the test port is at
atmosphere

Test Port Pressure and These values appear on this screen for reference.
Spectrometer Pressure

Test Port Pressure Gauge Calibration Procedure

Calibrates the test port pressure thermocouple gauge. Perform both the Vacuum
and Atmospheric Calibration procedures in the order given.

Maintenance: System Defaults

Use this screen to reset Turbo hours plus Filaments 1and 2 hours and restore
system defaults.
This screen displays the on/time hours for the turbo pump and filaments.
When replacing a turbo pump or a filament ensure that the hours are reset. This
aids in scheduling an effective maintenance service.

Figure 78 Maintenance: System Defaults

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Buttons and Fields

Restore System Resets the system back to the original factory
Defaults configurations:
 Auto Zero<0 - Active
 Internal calibrated leak rate information will be
retained
 V-gain value as shipped will be retained
 English Language - default
 Minimum Range - E-10
 Restores Setup Wizar

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System Information
 Press System Information on the Menus screen.
The System Information screen appears (see the following figure).
This screen gives details of the installed software version, spectrometer
parameters and the turbo frequency.

Figure 79 System Information

Table 14 System Information Screen Conditions

Condition Display Description

Ion Source Filament Filament 1 Off Filament 1 is selected and not lit.
See Section “Manual
Tuning”. Filament 1 On Filament 1 is selected and lit.

Filament 2 Off Filament 2 is selected and not lit.

Filament 2 On Filament 2 is selected and lit.

Gain Gain (Gain Value) Displays the gain that applied to the leak
rate. The actual helium signal is multiplied
by the gain value to read the correct,
calibrated leak rate.

Software Version and Shows the software version of the CPU

Agilent Web site board.

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As of February 2023 Firmware Rev LD01.06 120822 Filament status check for both
Filament 1 & 2 at startup and during normal operation.
Filament good and active
Filament good and not active
Filament burnt out (No Emission)

Figure 80 System Information

Implemented February 2023 (LD01.06)

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Current Setup Menu

Details of the current leak detector setup are displayed. Reject and audio set point
status, auto sequencer status & split flow. The calibrated leak setting, leak rate
range settings and vent lock out status.

Figure 81 Current Setup Screen

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Table 15 Current Setup Screen Conditions

Condition Display Description

Audio Set Point Audio Set Point: Active Audio Set Point is active.
See Section
“Current Setup Menu”. Audio Set Point: Inactive Audio Set Point is inactive.

Auto Sequencer Auto Sequencer: On Auto Sequencer (automatic test cycle)

See Section is enabled.
“Current Setup Menu”.
Auto Sequencer: Off Auto Sequencer (automatic test cycle)
is disabled.

Calibration Set-Up Int Cal Leak System is set to calibrate to the

See Section internal standard leak.
“Calibration Screen”.
Ext Cal Leak System is set up to calibrate to an
external standard leak.

Leak Rate Range Auto Ranging System is set to auto range through
See Section the leak rate scale.
“Calibration Screen”
Manual Ranging System is set for manual range
control.

Range Stop Range Stop -[Exp] System is set to display the most
See Section sensitive leak rate range, 10-[Exp].
“Calibration Screen” The range stop line shows only if
range stop is on.

Reject Set Point Reject# 1,2,3,4 Active Reject set points displayed are active;
See Section this line is blank when all set points are
“Current Setup Menu”. disabled or inactive.

Split Flow Shows split flow, only if the feature is

See Section turned on. To change the status, go to
“Split Flow”. the Advanced Parameters screen.

Vent Lockout Status Shows the status of the vent lockout

See Section feature only if it is on. To change the
“Menus Screen”. status of the vent lockout feature, go
to the Control Panel access screen.

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Current Setup
The current setup menu displays all activated parameters including selected
applications.

Figure 82 Power Off

This feature provides a soft shut down for the CPU and turbo pump prior to turning
off the main power/circuit breaker switch.

NOTE This power off feature provides a two-minute braking procedure for the turbo pump.
This aides in turbo pump life and for safe transportation of the leak detector.

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1 Select Power Off.

2 Wait for the Status Bar to fill to 100%.
3 Press OK and turn off the power switch located in the back of the leak detector.

Figure 83 Power Off

Figure 84 Power Off Confirmation

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Communications Protocol
This section defines the technical specifications for the RS-232 protocol used with
the leak detector and describes the customer-configured inputs/output.
This section defines the technical specifications for the RS-232 protocol used with
the leak detector and describes the customer-configured inputs/outputs.

Protocol (RS-232)
S-232 ports operate at 9600 baud, 8 bits, no parity, and one stop bit.
All characters transmitted to the leak detector are echoed by the leak detector.
Commands, inquiries, and strings of both commands and inquiries must be
terminated by a carriage return <CR>; the carriage return is echoed as a space
character.
The maximum length of the input is 80 characters; if no carriage return has been
received before the 80th character, execution of the command string begins
anyway. Words that begin with:
 ? are inquiries for the controlling device to determine the current state or value
of a leak detector parameter.
 PUT- are commands for the controlling device to set the current state or value
of a volatile leak detector parameter.
 INIT- are commands for the controlling device to set non-volatile leak detector
parameters.
Other commands do not require a parameter and do not begin with any special
characters.
Successful inquiries respond with data, followed by a space, then: ok<CR><LF>, as
specified in the tables of this appendix. Unsuccessful inquiries respond with the
offending inquiry followed by a space, then: #?<CR><LF> (line feed, <LF>).
Inquiries, parameters, and commands can be concatenated. Each word or numeric
parameter is followed by one or more spaces. The string is terminated by a <CR>,
which causes execution to begin.
Successful strings respond with the specified data for the input inquiries in the
order the inquiries were issued, followed by: ok<CR><LF>.
Unsuccessful strings respond with the first offending command followed by a
space, then: #?<CR><LF>. All commands and inquiries following the failed word are
ignored; all parameters are discarded.
Tables 16-17-18-19 outline the available control and query commands.

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Communicating with RS-232

The RS-232 Protocol is intended for diagnostic purposes and initial set-up inquires.
The RS-232 connection is located on the rear D-sub 9-pin connector.
The leak detector RS-232 port is not an interrupt-driven port. It is configured as DTE
(Data Terminal Equipment), therefore the leak detector's RS-232 Protocol cannot be
sent as strings.

NOTE When programming with virtual instrumentation programs such as LabView,

TestPoint, or Visual Basic, try one the following two methods:
• Transmit the intended command one character at a time with a minimal delay
time of 50 milliseconds between each character. Terminate the command with a
carriage return (CR).
• Transmit the intended command one character at a time. Wait for an echoed
response from the leak detector before transmitting the next character.
Terminate the command with a carriage return (CR).

Windows 95 and later versions contain a serial communications program called

HyperTerminal, a useful tool in establishing communication between the leak
detector and a PC.

Windows HyperTerminal Set-Up Instructions

To set up Windows HyperTerminal:
1 Click Start.
2 Select Programs > Accessories > Communications > HyperTerminal.
3 Double-click Hypertrm.exe. The Connection Description dialog box appears.
4 Enter a name and choose an icon for the connection, for example: leak detector
RS-232.
5 Click OK. The Connect To dialog box appears.
6 Select a COM port from the Connect Using: the pull-down list.
The Com Properties/Port Setting dialog box appears.

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7 Configure the following settings:

• Bits per second (baud rate) – 9600
• Data bits: – 8
• Parity: – None
• Stop bits: – 1
• Flow Control: – None
8 Click OK.
9 Select Properties from the File menu. The Properties window appears.
10 Configure the following settings on the Connect To tab:
• Connect using – Verify the COM port is correct.
• Click Configure and verify the port settings are correct.
11 Ensure that the Settings tab is configured as follows:
• Terminal keys radio button selected.
• Ctrl+H radio button selected.
• Auto detect selected from the Emulation pull-down list.
• ANSI entered in the Telnet terminal ID.
• 500 set in the Background buffer lines field.
12 Click ASCII Set-Up. The ASCII Set-Up dialog box appears.
13 Ensure that the settings are as follows:
• Line delay – 0 milliseconds
• Character delay – 0 milliseconds
• ASCII Receiving – Wrap lines that exceed terminal width
The cursor begins blinking.
14 Type some simple commands:
• ?LEAK
• ?ALL
• ?SETUP

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Printing with HyperTerminal

The easiest way to print information captured in HyperTerminal is to choose Print
from the File menu; however, this method only prints information currently
displayed on the screen. Screen information can also be highlighted, copied and
pasted into Microsoft Word or Excel.
To capture large amounts of data that exceeds the terminal screen limits, use the
Transfer menu Capture Text option:
1 Select Transfer > Capture text.
The Capture text dialog box appears.
2 Click Browse.
The Select Capture File dialog box appears.
3 Navigate to a location, enter a file name and select a file type:
• .txt text file (Notepad)
• .doc (Word)
• .xls (Excel)
4 Click Save.
The Capture Text dialog box reappears.
5 Click Start to log data.
6 Select Transfer > Capture Text > Stop to end text capture.
7 Open the file where the data was stored and select File > Print.
Example
To use the above procedures to poll the leak detector leak rate using HyperTerminal
and capture the text:
1 Type the command: XYZZY.
If received correctly, the leak detector responds ok.
2 Type the command: ?LEAK 1 SECS CR ?ESC.
This command polls the leak rate every second. The time is set in seconds.
3 Press ESC to abort polling.
4 Select Transfer > Capture Text.
5 Browse to a folder and file using the Capture Text dialog box and click Start.
6 Select Transfer > Capture Text > Stop to abort data logging.

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The following table lists inquiries that are used to determine internal operating
parameters. All inquiries, except VER, begin with ? and end with <CR>.

Table 16 Internal Operating Parameters

Inquiry Response

?ALL Responds with four lines. Each begins with a <cr><lf>. The first line reports the ion chamber
value. The second line reports the emission value. The third line reports the value of the
offset variable. The fourth line reports the gain value.

?AZ<0 Reports the status of the Auto-zero < 0 function, ON or OFF.

?CALOK Reports the status of the last calibration.

?CL-XFER Reports the currently stored contra-flow mode crossover pressure.

?CPLOCKOUT Reports the status of the control panel lockout feature, ON or OFF.

?CURRDATE Reports the current system date and time in the following format: 3 05/25/2005
04:19:03.35 1 where 3 is the day of the week (0 = Sunday, 1 = Monday, etc), 05/25/2005
is mm/dd/yyyy (date), 04:19:03.35 is hh/mm/ss/ms (time) and 1 is PM
(0=AM, 1=PM, 2=24 hour).

?DISPLAY Reports what the display bar graph is set to, log or lin.

?EMISSION Reports the emission value.

?EXPONENT Reports the current manual-mode exponent with a two-character (minus followed by one
digit) number. The exponent is within the least sensitive range (as reported by ?RANGE) and
the three lower (more negative exponent) ranges. See also INIT-EXPONENT.

?EXTLEAK Reports the currently stored value of the external standard leak.

?GAIN Reports the system gain value by returning a three-character number consisting of a two-
digit gain factor with a decimal point after the first digit.

?INTEXT Indicates which leak, Internal or External has been selected for use during calibration.

?IOBOARD Returns the status: 0 = not installed, 1 = installed

?IO_VER Returns the software revision of the installed I/O PCB

?IONCHAMBER Reports the ion chamber value.

?LANGUAGE Reports the language that has been selected to display on the front panel (0=English,
1=French, 2=German, 3=Korean, 4=Spanish, 5=Japanese, 6=Chinese or Russian
depending on software version purchased).

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Table 16 Internal Operating Parameters (Continued)

Inquiry Response

?LEAK Reports a six-character number consisting of a two-digit leak rate mantissa with decimal
point after the first digit followed by E - then a two digit number, which is the leak rate range
exponent (e.g., 1.3E-08).

?LKEXPIRE Reports the internal calibrated leak expiration date mm/dd/yyyy.

?LEAKTEMP Reports the internal calibrated leak temperature that the factory calibration was performed
at (degrees C).

?LP Reports the current leak rate along with the test port and system pressures.

?LPV Reports the current Leak Rate, Pressures and Valve state.

?ML-XFER Reports the current Test to Fine Test crossover pressure setpoint in Torr. The response is in
exponential format (in Torr): X.XE-XX

?PREHEAT CommandtoqueryifthepreheatIonsourcePCBisinstalled A response of 0 = No, 1 = Yes

?PREHEAT-TIME A numerical response in minutes.

?PRESSURES Reports two lines. Each begins with a <cr><lf>. The first line consists of the words test port
TC followed by a number in mTorr. The second line consists of the words system TC
followed by a number in uTorr.

?PWDLEVEL Response will be a number (1, 2 or 3).

?PWDONOFF Reports status of system password (ON or OFF).

?QUICK-CAL Reports whether Fast or Full Calibration is chosen if a calibration were to be started.

?RANGESTOP Reports the value of the Range Stop variable.

?REJECT Reports the reject leak rate setpoint (e.g., 7.0E-05) (where x is a number from 1 to 4 or the
letter A).

?>xREJECT Reports the status of a reject set point (where x is a number from 1 to 4 or the letter A).

?xREJECT Reports the reject leak rate setpoint (e.g., 7.0E-05) (where x is a number from 1 to 4 or the
letter A).

?ROUGH Reports the currently stored Test Sequencer rough time used as part of setting up the Auto
Sequencer.

?RSONOFF Reports the status of the Rangestop function as Enabled or Disabled.

?SEQONOFF Reports the status of the Auto Sequencer as Enabled or Disabled.

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Table 16 Internal Operating Parameters (Continued)

Inquiry Response

?SETUP Reports seven lines, each begins with a <cr><lf>. The first line reports the turbo pump speed
with the RPM value or OFF. The second line reports the selected manual leak rate range,
and the ranging method as auto or manual. The third line reports the least sensitive leak
rate range. The fourth line reports the reject set point leak rate. The fifth line reports the
internal calibrated leak rate value. The sixth line reports the DAC output method as Linear,
Log(2V), or Log(3V). The seventh line reports the active filament status as One or Two,
followed by Lit or Out.

?SPLITFLOW Returns the status of the split flow function, ON or OFF.

?STDLEAK Reports a six-character number consisting of a two-digit calibration standard leak rate
mantissa with a decimal point after the first digit followed by E-, and then by a two-digit
exponent (e.g., 1.3E-07). This inquiry is used for reporting the calibration standard leak rate
entered using INIT-STDLEAK.

?SYSLEAK Reports the leak rate value that has been stored that relates to the split flow functionality.

?SYSPWD Reports the value of the system password.

?TEST Reports the currently stored Test Sequencer test time used as part of setting up the Auto
Sequencer.

?TEMPFACTOR Reports the internal calibrated leak temperature factor that is used as part of the
temperature correction logic (degrees C).

?TURBO Reports four lines, each begins with a <cr><lf>. The first line consists of the word turbo
followed by either READY or NOT READY. The second line consists of the word turbo
followed by either Fault or No Fault. The third line consists of the words turbo speed RPM
followed by the RPM value:

?VALVESTATE xxxxx. The fourth line consists of the words "Turbo Temp (Celsius):" followed by the bearing
temperature value: XX.

VER Reports the CPU software version in the form LC02.05 followed by a six digit hexadecimal
checksum.

?VOLUMEONOFF Reports audio as either ON or OFF.

WHYNOCAL Reports the calibration failure diagnostics.

?0ENABLE Responds with the status of the Zero Enable function, ON or OFF.

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The commands listed in the following table are used to set non-volatile operating
parameters. The current value of the operating parameter is changed to the new
value. If the leak detector is in back panel control, the response is cant.

Table 17 Non-Volatile Operating Parameters

Command Parameter

INIT-AZ<0 Preceded by 0 or 1, sets the status of Auto-zero < 0. 0 = off, 1 = on.

INIT-CL-XFER Preceded by X.XE-X, sets the value of the contra-flow mode crossover pressure in Torr.

INIT-CPLOCKOUT Sets the status of the control panel lockout. Preceded by (0) or (1), 0 = OFF, 1 = ON.

INIT-DATE Sets the system date and time. Preceded by: dow, mm dd yyyy hh mm ss AmPm 24-12
mode, Where 2 is the day of the week (dow) (0 = Sunday, 1

INIT-DISPLAY = Monday, etc), mm/dd/yyyy (date), hh:mm:ss (time) AmPm (0=AM, 1=PM)24-12 mode (0
for 24 hr, 1 for 12 hr). Examples: 2 02 12 2005 04 16

INIT-EMISSION 33 1 0 INIT-DATE(Tuesday, February 12, 2005, 4:16:33 on a 24 hr clock)2

INIT-EXPONENT Sets the range that the leak detector will operate in when Manual Range is ON. Preceded by
0 to -11.

INIT-EXTLEAK Sets the value of the external leak. Preceded by a two-digit leak rate mantissa with a
decimal point after the first digit followed by E-, and then by a two-digit leak range exponent:
the helium leak rate number in atm cc/sec of the calibration standard leak.

INIT-FILAMENT Example: 3.2E-08 INIT-EXTLEAK

INIT-GAIN Sets the value of the gain used for adjusting the helium signal to match a calibration
standard leak. Preceded by a two-digit number with a decimal point after the first digit, in
the range 1.0 to 6.0.
Note: Changing Gain changes Zero by the same ratio.

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Table 17 Non-Volatile Operating Parameters (Continued)

Command Parameter

INIT-ION Sets the ion voltage of the ion source. Preceded by a three-digit number (volts) in the range
220 to 280.

INIT-LANGUAGE Selects the language to be shown on the display. Preceded by 0-6 where (0=English,
1=French, 2=German, 3=Korean, 4=Spanish, 5=Japanese, 6=Chinese).

INIT-LINEAR Sets the leak rate analog output voltage to Linear. Not preceded by a value.

INIT-LKEXPIRE Sets the date on which the internal calibrated leak expires. Preceded by the date.
Example: mm dd yyyy INIT-LKEXPIRE.

INIT-LEAKTEMP Sets the internal calibrated leak temperature (printed on the leak label) that the factory
calibration was performed at. Preceded by 12.0 to 50.0 (degrees C).
Example: 23.5 INIT-LEAKTEMP

INIT-1LOG Sets the leak rate analog output voltage to logarithmic at 1 volt per decade. Not preceded
by a value.

INIT-ML-XFER Sets the value of the Fine Test-flow mode crossover pressure in Torr. Preceded by X.XE-XX.
The range is 1.0E-03 to 1.0E-01 Torr. The default is 1.0E-01 (100 mTorr).

INIT-PASSWORD Sets the system password. Preceded by a 1 to 6 digit password and followed by a digit
indicating the number of digits in the password. Example: 123123 6 INIT-PASSWORD.
Password is read back using the ?SYSPWD command.

X INIT-PWDLEVEL X is the password level from 1 to 3.

INIT-QUICK-CAL Sets which type of calibration will be run if the CALIBRATE command is initiated. Preceded
by 0 or 1, 0 for FULL cal, 1 for FAST cal.

INIT-RANGESTOP Sets the value of the most sensitive range exponent. Preceded by XX.

INIT-1REJECT Sets the leak rate value for Reject Set Point #1. Preceded by a two-digit leak rate mantissa
with a decimal point after the first digit followed by E-, and then by a two-digit leak range
exponent, the helium leak rate number is in atm cc/sec.
Example 3.4E-08 INIT-1REJECT

INIT-2REJECT Same as INIT-1REJECT, but for Reject Set Point #2.

INIT-3REJECT Same as INIT-1REJECT, but for Reject Set Point #3.

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Table 17 Non-Volatile Operating Parameters (Continued)

Command Parameter

INIT-4REJECT Sets the test port pressure value for Reject Set Point #4. Preceded by a two-digit leak rate
mantissa with a decimal point after the first digit followed by E-, and then by a two-digit
exponent: the test port TC pressure in millitorr.
Example 1.5E-02 INIT-4REJECT.

INIT-AREJECT Same as INIT-1REJECT, but for the Audio Reject Set Point.

HIGH-xREJECT Sets the reject set point to activate when the actual test value is higher than the set point.
Where x is a number from 1 to 4 or the letter A. For example, the reject set point is set for
7.0E-05 and the actual test value is 9.2E-05.

LOW-xREJECT Sets the reject set point to activate when the actual test value is lower than the set point.
Where x is a number from 1 to 4 or the letter A. For example, the reject set point is set for
7.0E-05 and the actual test value is 4.3E-07.

INIT-ROUGH Sets the Auto Sequencer rough time in seconds. Preceded by XX.

INIT-SYSLEAK Sets the split flow leak value, system must be in TEST and the split flow feature must be
OFF when this parameter is set. Preceded by a two-digit leak rate mantissa with a decimal
point after the first digit followed by E-, and then by a two-digit leak range exponent: the
helium leak rate number in atm cc/sec.
Example 3.4E-08 INIT-SYSLEAK.

INIT-STDLEAK Sets the value of the internal leak. Preceded by a two-digit leak rate mantissa with a decimal
point after the first digit followed by E-, and then by a two-digit leak range exponent: the
helium leak rate number in atm cc/sec.
Example: 3.2E-08 INIT-STDLEAK.

INIT-TCTPZERO Used to calibrate the low-pressure end of the test port thermocouple to a known pressure
higher than zero. Preceded by a number (XX) of mTorr representing the test port pressure at
the time of the command.

INIT-TEMPFACTOR Sets the temperature correction factor that is printed on the internal calibrated leak label.
Preceded by –10 to +10.
Example: -7 INIT-TEMPFACTOR

INIT-TEST Sets the Auto Sequencer test time in seconds. Preceded by XX.

LOCK-MS Enables the MS lock feature. If the system exceeds 150 mTorr, the system goes from Fine
test directly into Roughing mode (no Contra mode). If the leak rate exceeds the 7 range, the
over range symbol appears.

UNLOCK-MS Disables the MS lock feature.

?MS-LOCK Queries the status of the MS lock feature; either on or off appears.

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The commands listed in Table A-3 are used to cause an immediate change in the
spectrometer operating parameters. These Commands Do Not Change The Non-
Volatile Operating Parameters.

Table 18 Spectrometer Operating Parameters

Command Parameter

PUT-EXPONENT Sets the exponent leak range for Manual mode. Preceded by a two-character number
Acceptable values are 0 through -10.

PUT-ION Sets the ion value of the ion source. Preceded by a three-digit number of volts, in the range
200 to 350.

PUT-RANGESTOP Sets the Range Stop exponent. Preceded by two or three characters -XX or -X.

The commands listed in the following table are used to cause certain leak detection
actions.

Table 19 Leak Detection Actions

Command Parameter

AUTO Initiates auto-ranging mode. Success is indicated by the normal ok response.

CALIBRATE Initiates a Full or Fast calibration depending on system settings. The CPU software tunes,
then adjusts the gain so that the current helium signal causes the current leak rate
measurement to be the same as the most recently input using INIT-STDLEAK.

DECREMENT Subtracts 1 from the Manual Ranging leak rate exponent (making it more negative).
Success is indicated by the normal ok response. Does nothing in auto-ranging mode. Does
nothing upon reaching the most sensitive range.

DISABLE-0ENABLE Turns the Zero Enable function OFF.

DISABLE-APP Disables the active Applications Setup.

DISABLE-PASSWORD Turns the password function OFF.

DISABLE-xREJECT Turns the Reject Set Point OFF. Where x is a number from 1 to 4 or the letter A.

DISABLE-RANGESTOP Turns the Range Stop function OFF.

DISABLE-VOLUME Turns audio OFF.

ENABLE-0ENABLE Turns the Zero Enable function ON.

ENABLE-PASSWORD Turns the Password feature ON.

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Table 19 Leak Detection Actions (Continued)

Command Parameter

ENABLE-xREJECT Turns the Reject Set Point ON. Where x is a number from 1 to 4 or the letter A.

ENABLE-RANGESTOP Turns the Range Stop function ON.

ENABLE-SEQUENCER Turns the auto sequencer function ON.

ENABLE-SPLITFLOW Turns the split flow function ON.

ENABLE-VOLUME Turns audio ON.

EXTERNAL Sets the External Calibrated Leak (in test port) as the leak for use during calibration.

INCREMENT Adds 1 to the Manual Ranging leak rate exponent (making it less negative).
Success is indicated by the normal ok response. Does nothing in
auto-ranging mode. Does nothing upon reaching the least sensitive range.

INTERNAL Sets the Internal Calibrated Leak as the leak to be used during calibration.

KEEP Causes the leak detector to close most valves and enter the Hold state.

MANUAL Turns the Manual Ranging Mode ON. Success is indicated by the normal ok response.

NOSNIFF Turns the HIGH PRESSURE TEST function OFF.

ROUGH Causes the leak detector to begin a roughing on the test port only.

SNIFF Turns the HIGH PRESSURE TEST mode ON.

STDLEAK Turns Read Std Leak ON/OFF. Verifies calibration by exposing internal cal leak to the
system.

TPTCATM Sets the current test port thermocouple reading to represent atmospheric pressure when
the test port is exposed to atmosphere. Success is indicated by the normal ok response.

TPTCZERO Sets the current test port thermocouple reading to represent a ZERO pressure reading when
the test port pressure is less than 1.0E-04 Torr. Success is indicated by the normal ok
response.

TUNE Adjusts the ion source voltage to cause a maximum response to helium.

VENT Causes the leak detector to isolate and vent the test port to the atmosphere.

XYZZY Unlocks the system so that all RS-232 commands are accessible.

ZERO Sets the current leak rate measurement to be 0.0 atm cc/sec in the most sensitive range.

New RS232 Commands as of February 2023 (Rev. LD01.06)

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Table 20 Baud Rate Setting

Baud Rate Setting Input Baud Rate

0 9600

1 19200

2 38400

3 57600

4 115200

New RS232 Commands as of February 2023 (Rev. LD01.06)

Table 21

Command Action

XBAUDR (input 0 thru 4) X = 0 to 4

?BAUDR (return 0 thru 4)

Table 22

Command Action

?FIL1 0 Filament burnt out

?FIL2 1 Filament good/not active
2 Filament good/ active

DISMISS_NOEMISS =ok Filament No Emission Message

?READY Response Yes (System Ready)

Response No (System Ready)

?CAL_S (calibration routine status) 0 not initiated

1 in progress
2 complete

Table 23 Disable & Enable Touch Screen Display

Command Action

1 LOCK_S Locks out the touch screen display

0 LOCK_S Unlocks the touch screen display/normal operation

? LOCK_S Return: 0 (touchscreen not locked)

Return :1 (touchscreen locked)

DISMISS_CAL OK Automatically selects OK for both “Cal OK” and “Cal Failed” pop ups

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Table 24 Soft power shutdown routine via RS232 (turbo breaking)

Command Action

SOFT_S Response – Wait for 2 minutes

initiates turbo breaking shutdown procedure Response – Shut down complete

?SOFTS_C 0 (not initiated)

1 (in progress)
2 (complete)

Table 25 Calibration Required at Startup (Flashing “C”)

Command Action

1 FORCE_CALPW Calibration Required at Startup

0 FORCE_CALPW Shut off cal required at Startup

? FORCE_CALPW 0 (not initiated)

1 (initiated)

Table 26 Startup Calibration Messages – Cancel of Execute Calibration at startup (20-minute bypass)

Command Action

S_CALIBRATE Execute start up calibration message

1 DISMISS_20M Execute No/Cancel calibration request

2 DISMISS_20M Execute calibration/Yes

1 DISMISS_10R Cancels E10 range external calibration request

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Customer Accessible Inputs and Outputs

Serial Connector
Use the SERIAL connector on the Rear Panel to interface the leak detector to a PC
via an isolated RS-232 connection. Table A-5 and Figure A-1 provide details of the
connection. A typical connection from a 9-pin PC serial connector requires a
female-to-female, 9-pin, null modem cable, where pins 2 and 3 are crossed.

Table 27 Serial Connector Summary

Pin EIA Name Description

2 Received Data Data into the leak detector

3 Transmit Data Data out of the leak detector

5 Signal Common RS-232 Ground

2 3 5

Figure 85 Serial Connector Map

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I/O Connector
The following table lists the optional discrete I/O PCB (P/N# R2111501) pin signals.
This I/O connector provides a means for a controller, usually a PLC, to control or to
determine the leak detector status. The I/O is accessible via a type DB25S (female
socket) connector.
Table 28 I/O Connector Pin Signals

Pin Signal I/O Signal Description Leak Detector Behavior

No. Name

15, + VIN N/A +5 V to Customer-supplied +5VDC to

19, +24 +24VDC for Output Common pins.
23 VDC

17, VRET N/A 0 VDC Customer -supplied GND for the

21 Input Common pins.

1 CAL_OUT O Level Active HIGH when the leak Performs calibrating routine with
detector is in CALIBRATION the Internal Calibrated Leak;
mode. Zeroing routine is included.

2 ZERO_OU O Level Active HIGH when the leak Performs the Zeroing routine.
T detector is in ZEROING mode.

3 HOLD_OU O Level Active HIGH when the leak Performs a HOLD routine and
T detector is in HOLD mode. isolates the test port and any
test objects from the leak
detector vacuum system.

4 VENT_OU O Level Active HIGH when the leak Performs a VENT routine,
T detector is VENT mode. isolates the test port from the
leak detector vacuum system
and vents the test port to
atmosphere.

5 START_O O Level Active HIGH when the leak Performs a ROUGHING

UT detector is in START/ROUGH routine on the test port and
mode. any attached test objects.

6 READY_ O Level Active HIGH when the leak Indicates that the leak
OUT detector is in READY mode. detector is completing a
STARTING routine and that
the filament and turbo are OK.

7 TEST_OU O Level Active HIGH when the leak Indicates that the leak
T detector is in Test and detector is ready for fine leak
Fine Test modes. testing.

8 REJECT1_ O Level Active HIGH when the leak rate is Indicates that the value of the
OUT over set point #1. leak rate exceeds the value set
in the 1REJECT variable.

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Table 28 I/O Connector Pin Signals (Continued)

Pin Signal I/O Signal Description Leak Detector Behavior

No. Name
9 REJECT2_ O Level Active HIGH when the leak rate is Indicates that the value of the
OUT over set point #2. leak rate exceeds the value set
in the 2REJECT variable.
10 REJECT3_ O Level Active HIGH when the leak rate is Indicates that the value of the
OUT over set point #3. leak rate exceeds the value set
in the 3REJECT variable.
11 REJECT4_ O Level Active HIGH when the test port Indicates that the value of the
OUT pressure is over set point #4. test port pressure exceeds the
value set in the 4REJECT
variable.
12 CAL_OUT_ O Level Active HIGH when calibration is Indicates the calibration has
OK successful. successfully completed. Set
low on power-up or if
calibration is not successfully
completed.
13 AUTO_ I Level Active HIGH when Manual Activation causes the leak
MANUAL_ Ranging is selected. detector to change from AUTO
RANGE_IN to MANUAL ranging ;
Default is AUTO.
14 CAL_IN I > 200 ms Active HIGH pulse. Initiate CALIBRATING routine
Pulse with Internal Calibrated Leak;
Zeroing routine is included.
16 ZERO_IN I > 200 ms Active HIGH pulse. Initiate ZEROING routine.
Pulse
18 HOLD_IN I > 200 ms Active HIGH pulse. Initiate HOLD routine and
Pulse isolate the test port and any
test objects from leak detector
vacuum system.
20 VENT_IN I > 200 ms Active HIGH pulse. Initiate VENT routine and vent
Pulse the test port to atmosphere.
22 TEST_IN I Active HIGH pulse. Initiate ROUGHING routine on
the test port and any attached
test objects.
24 RDSTDLK_ I Level Active HIGH when standard leak is Initiate the INTERNAL
IN ON. STANDARD LEAK reading
routine.
25 PARALLEL_ I Level Active HIGH when ENABLE is Activation causes the leak
ENABLE_IN active. detector to take inputs only
from the rear panel I/O.
No control functions (inputs)
from the front panel, wireless
or RS232 are allowed.

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 Technical Information

The following figure shows the output circuit sketch. Level outputs are optically
isolated emitter followers with 10 Ohm series resistors, and a 14 mA max drive
current (24 VDC max).

Figure 86 Optically Isolated Output Circuit Sketch

The following figure shows the input circuit sketch. All inputs are optically isolated
3300 Ohm resistive loads in series with the LEDs of the opto-isolators and voltage
level from +5 VDC to +24 VDC. The required pulse inputs are 200 ms minimum
pulse width.

Figure 87 Optically Isolated Input Circuit Sketch

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 Technical Information

Introduction to Leak Detection

Leak Testing—Why is it Needed?

Helium is a superior choice of tracer gas used to find leaks for a multitude of
reasons. Helium is:
 Non-toxic
 Inert and non-condensable
 Normally not present in the atmosphere at more than trace amounts
 Relatively inexpensive
 Readily passes through leaks due to its small atomic size
 Non-flammable
 Available in various size cylinders
 Available in purities appropriate for medical usage.

The only molecule smaller than Helium (mass 4) is Hydrogen (mass 2), which is not
inert. Helium is much lighter than the next heavier inert molecule, Neon (mass 20)
which is much more expensive. Helium is present at a concentration of only 5 ppm
in normal atmospheric conditions.

Agilent's Helium Leak Detection Technologies

A Mass Spectrometer Leak Detector (MSLD) is a complete system for locating
and/or measuring the size of leaks into or out of a device or a container. This
method of leak detection is initiated when a tracer gas, helium, is introduced to a
test part that is connected to the MSLD system. The helium leaking from the test
part diffuses through the system, its partial pressure is measured, and results are
displayed on a meter.
The MSLD operating principle consists of ionization of the gases in a vacuum and
their acceleration across a voltage drop and a magnetic field (Figure 88). The
helium ions are separated and collected, and the resulting ion current is amplified
and indicated on the meter or display.

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A mass spectrometer leak detector consists of the following components:

 A spectrometer tuned to detect the mass of helium
 A vacuum system to maintain adequately low pressure in the spectrometer
 A mechanical pump(s) to evacuate the part to be tested.
 Valves that enable the various stages of the leak detection cycle, from
evacuation, to test, to venting
 Amplifier and readout instrumentation that monitors spectrometer output signal
 Electrical power supplies and controls that sequence valve’s, protective circuits, etc.
 Fixturing that attaches the part to be leak-tested to the leak testing equipment.

Figure 88 Magnetic Separation Principle

Our SIPD family of products is also sensitive to helium and is based on a patented
technology called Selective Ion Pump Detection (see the following figure). The
sensor technology incorporates an ion pump connected to a quartz capillary tube
and maintained under high vacuum. This membrane is heated with a coiled
platinum filament. Once heated, the membrane becomes permeable to helium. As
the partial pressure of helium in the ion pump increases, so does the current draw
of the ion pump. This current is proportional to the pressure and is therefore
representative of the helium at the test probe of the instrument.
 A selective ion pump detector consists of the following:
 An ion pump and controller
 A permeable quartz capillary
 A heater coil that surrounds the quartz capillary
 Electronics to process the signal
 Display for access to leak rate and other unit function.

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Figure 89 Selective Ion Pump Detector

Methods of Leak Testing

There are many different ways to leak test parts using helium as a tracer gas. In
general, the leak detection method is selected based on the actual working
conditions of the part being tested. It is recommended that during leak testing, the
same pressure differential be maintained and in the same direction as exists during
the actual use of the part. For example, a vacuum system is tested with a vacuum
inside the chamber, while a compressed air cylinder should be tested with a high
pressure inside the cylinder.
There are two general concerns when leak testing. One is the location of leaks and
the other is the measurement of the total leakage rate of the part, as some leakage
may be acceptable. In many cases, parts may be first tested to determine if they
pass an acceptable level, and if not, the part may be taken off line and subjected to
a second test with the intent of locating the leak. Additionally, many parts may be
tested in batches. If a batch fails, the individual parts in that batch may then be
tested separately to identify the leaking part(s).

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Vacuum Testing Method (Outside-in)

The part to be tested is evacuated with a separate pumping system for large
volumes, or with just the leak detector itself. When the appropriate cross over
pressure has been reached, the leak detector is valved-in or transfers into test and
the part is tested using one of the following methods:

Locating Leaks
To pinpoint the location of the leak(s) (but not measure the total leakage rate),
helium is administered to the suspected leak sites of the part using a spray probe
with an adjustable flow (see the following figure).

Figure 90 Locating Leaks: Outside In

Measuring Leak
To determine the total quantity of leakage (but not the number or location of leaks),
the part is connected to the leak detector and shrouded by a helium environment.
This helium environment can be contained in many methods ranging from a simple
plastic bag to more complex bell jar arrangements (see the following figure).

Mount Test
Part

Figure 91 Measuring Leaks: Outside In

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Pressure Testing Method (Inside-out)

In this technique, the part is pressurized with helium or a mixture of helium and air,
and tested by one of the following methods.

Measuring Leaks
To determine the total quantity of leakage (but not the number or location of leaks),
the part is pressurized with helium (or a mixture of helium and air or nitrogen).
This can be done by bombing or backfilling small hermetically sealed parts. Larger
parts can be actively pressurized using a hose or tubing to deliver the helium. The
part is placed in a volume that is then evacuated by the leak detector. All the helium
escaping from the part is captured and quantified (see the following figure).

Mount Test
Part

Figure 92 Measuring Leaks: Inside Ou

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 Technical Information

Locating Leaks

To pinpoint the location of the leak(s) (but not measure the total leakage), the likely
potential leak sites of the part are scanned using a Sniffer Probe connected to the
inlet of the leak detector (see the following figure).

Mount Test
Part

Figure 93

Accumulation Testing Method

This method can both locate and quantify leaks. Some type of shroud or hood is
placed in such a manner as to envelop a potential leak site. A certain amount of
time is given to allow leaking helium to accumulate in the shrouded area, increasing
the helium concentration. The leak detector is then valved-in to the shrouded
volume. If many potential leak sites exist in a manifold or if many parts are to be
tested at the same time, they can be sequentially valved-in to determine which site
is leaking (see the following figure).

Figure 94 Accumulation: Inside Out

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System Leak Test Methods

Systems, like individual parts, should be tested with the same pressure differential
and in the same direction as in actual use. Therefore, systems that are under
vacuum while in operation should be leak tested under vacuum, while pressurized
systems should be charged with helium to a pressure similar to operational
conditions when possible.

Vacuum Systems
In general, vacuum systems are tested with a portable leak detector. Typically the
leak detector is connected by means of a tee connected in between the foreline of
the high vacuum pump and the inlet of its backing pump. A system should be
capable of maintaining a foreline pressure low enough to operate the leak detector
at this location. Helium is supplied to potential leak site using a spray probe or
bagging suspected areas. If a leak exists, helium enters the system and rapidly
diffuses through it. The leak detector should respond within several seconds or
less. Leak detector sensitivity is diminished in systems with large backing pumps. If
a system is using a cryopump as a high vacuum pump, it must be valved off before
helium is introduced as cryopumps have limited helium pumping capacity
(see the following figure).

Mount Test
Part

Figure 95 Vacuum System

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 Technical Information

Pressurized Systems
Many different types of pressurized systems also need to be leak-free. These
systems can be charged with helium or some mixture of helium and another gas
such as nitrogen. If a diluted helium mixture is used, the helium signal is diminished
proportionally. For example, if a mixture of 10% helium and 90% nitrogen is used,
the signal reads 10% of the actual value of the leak, or a decade lower. This may be
acceptable in many cases as system leak checking is usually to locate rather than
quantify leaks. Once the system has been charged with an appropriate amount of
helium, leak checking can be performed by means of a sniffer probe, or by bagging
suspected leak sites so that leaking helium accumulates to a detectable level.

Typical Leak Detection Applications

Quality Control of Production Parts and Assemblies

The detection and location of leaks is critical in the production of many products
from individual components, to subassemblies, to completed systems. In many of
these cases, it is as important to know the size or rate of the leak, as it is the
location. Whether quantitative or qualitative testing is required, our leak detectors
help assure the leak integrity of your parts or assemblies. Some examples include:
Evacuated parts and assemblies
 Hermetically sealed electronic packages
 Valves and manifolding
 Feedthroughs/glass-to-metal seals
 Vacuum vessels and systems

Pressurized parts and assemblies

 Air conditioning and refrigeration assemblies
 Radiators, heat exchangers, and condensers
 Brake, fuel, and hydraulic lines
 Gas tanks
 Food storage tanks and packaging
 Body implantable medical devices
 High purity piping

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 Technical Information

Maintenance of Systems

Many vacuum process tools in fabs of all types require occasional leak checking.
This may be part of a preventative maintenance schedule or in the event of an
unexpected failure.
Downtime in either case must be minimized. A rugged, dependable, fast starting
leak detector is essential to maximize up time of production tools. Agilent Agilent
Technologies Helium Mass Spectrometer portable leak detectors keep industry
moving. Examples of some of these applications are:

Vacuum process equipment or tools

 Vacuum furnaces
 Vacuum coaters
 Beam lines
 Electron beam and ion beam process equipment
 Analytical Instrument
 Semiconductor process tools
 Laser process equipment

Pressurized systems
 Power Plants
 Underground tanks, cables, and pipes
 High purity gas handling systems
 Bioreactors and fermenters
 Liquid gas manufacturing facilities
 Fuel tanks and bladders.

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 Technical Information

System Integrated Leak Detection

Manufacturers of large, complex systems may choose to integrate into those
systems a component leak detector that can facilitate the on-going maintenance of
leak-free integrity, thereby providing additional value to their customers. This unit
provides the necessary elements for flexible integration of leak detection capability
into a large system. Examples of these systems are:
 Semiconductor process equipment
 PVD/CVD equipment
 E-beam and ion beam processing equipment.

Mass Produced Parts

Some manufacturing processes require the integration of a leak-checking device
into a multi-step process, usually with very high production rates. Component leak
detectors are designed specifically for these applications in which a vacuum
system and the control electronics may be mounted separately. This unit offers the
ultimate flexibility in a helium mass spectrometer leak detection system. The
flexibility, ruggedness and rapid response time of these units allows for accurate,
repeatable, high volume leak testing in demanding production environments. Some
examples include:
High Volume Manufactured Parts
 Automotive fuel systems
 Automotive brake components
 Cooling and refrigeration system components
 Medical devices
 Automotive airbag components
 Tire and wheel assemblie.

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Portable Sniffing Applications

Some applications require operators or technicians to look for leaks from a ladder,
outdoors, above or below ground, or in a densely constructed industrial facility or
power plant. In these cases, a mobile cart-mounted MSLD may not be practical. A
truly portable unit such as the PHD-4 is required. Some examples of such
applications are:
 Aircraft manufacturing and maintenance
 Power generating plants
 Pressurized pipelines
 Bioreactors and fermenters
 Petrochemical plants and refineries
 Underground tanks
 Large condensers or heat exchanger

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Accessories and Spare Parts

Table 29 Accessories and Spare Parts

Part Number Description

R2101501 Motherboard PCB

R2120502 Ion Source PCB

G8610-67220 Valve Driver PCB

EX9699518M001 Exchange Turbo Pump Controller PCB

G8610-60003 Touchscreen Display

G8610-69008 Spectrometer Assembly, Exchange

VSFLDHIS Ion Source Replacement Kit

VSFLDHFR Filament Replacement Kit

VSFLDMG Metal Gasket Kit

VSFLDOV Valve Block O-ring Kit

VSFLDCL Calibrated Leak, Internal

R3391301 TC Gauge

VSFLDFN Fan Assembly

VSFLDPS Power Supply

670029096 Spec Tube Cleaning Kit

VSFLDFN3 Fan, IDP3 Pump

VSFLDV9 Back to Air, Maintenance Kit (V9)

VSFLDV8 Exhaust Valve, V8

EX8699367 Turbo Pump, Exchange

R2010302 Valve (V1 to V5, V7)

G8603-60002 V6 Calibrated Leak Valve

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 Technical Information

Table 30 Primary Pumps Replacement Parts

Part Number Model Number Description

EX9699325 G8611A, G8612A DS302, Exchange Rotary Vane Pump

9499370 G8611A, G8612A DS302 Minor Maintenance Kit

X3828-69510 G8611B, G8612B TriScroll 620, Exchange Module

X3828-69500 G8611B TriScroll 620, Exchange Pump for cart

9499395 G8611, G8612 Oil Mist Eliminator (DS302 and DS602)

X3703-64003 G8610A Oil Mist Eliminator (DS40M)

X3703-64005 G8610 DS40M Maintenance Kit

X3760-64005 G8611A, G8612A, G8610A, G8611D AVF 60 Gold Mechanical Pump Oil

X3703-64000 G8610A DS40M Rotary Vane Pump, 120 V

X3703-64001 G8610A DS40M Rotary Vane Pump, 220 V

EXIDP3A41 G8610B IDP-3 Exchange Scroll Pump 220 V

EXIDP3B41 G8610B IDP-3 Exchange Scroll Pump 120 V

EXIDP3C41 G8610B IDP-3 Exchange Scroll Pump 100 V

IDP3TS G8610B IDP-3 Tip Seal Kit

VSFLDDP G8610B, G8611B, G8611B, G8612B, Diaphragm Pump Maintenance Kit

G8612C

VSFLDDPR G8610B, G8611B, G8611B, G8612B, Diaphragm Pump Replacement Kit

G8612C

695409005 G8611A, G8612A, G8610A, G8611D Elite Z Mechanical Pump Oil

X3703-64006 G8610A, G8600A AVF 20S Mechanical Pump Oil

X3815-69010 G8611C, G8612C IDP-15 Scroll Pump Exchange

PTSS0800TS G8611C, G8612C IDP-15 Tip Seal Kit

EX9499335 G8611D, G8612D DS602, Exchange Rotary Vane Pump

9499371 G8611D, G8612D DS602 Minor Maintenance Kit

X3828-64000 G8612B TriScroll 620, Exchange Pump, for Bench

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 Technical Information

Table 31 Leak Detector Accessory Item List*

Part Number Description

FLDFBNW25 Flapper Box, NW25 Flange

FLDFBCBL Flapper Box, Cable (I/O option required)

K9565306 Power Probe, 10’ (NW25 Flange)

K9565307 Power Probe, 25’ (NW25 Flange)

K9565303 Spare Tip Filters for Power Probe (Qty: 10)

R1947301 Throttle Valve (NW25 Flange)

F8473325 Calibrated Leak, 10-5, 10-6 (NW25 Flange)

F8473321 Calibrated Leak, 10-7 (NW25 Flange)

F8473322 Calibrated Leak, 10-8 (NW25 Flange)

F8473323 Calibrated Leak, 10-9 (NW25 Flange)

F8473324 Calibrated Leak, 10-10 (NW25 Flange)

VSFLDME Oil Mist Eliminator (G8610A)

VSFLDCP 1-1/8” Compression Test Port

VSFLDIO I/O Assembly, Field Installed

G8600-60002 Handheld Wireless Remote Unit

G8610-63000 Wireless Remote Base Unit, Field Installed

*Most accessories with NW25 fittings are available with 1 1/8 compression fittings.
Call technical support for more information.

174 Agilent Helium Leak Detector User Manual

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 Vacuum Products Division
Request for Return Form
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Company : Contact Name:
Address: Tel: Fax:
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Equipment
Product description Agilent PartNo Agilent Serial No Original Purchasing Reference

Failure description Type of process (for which the equipment was used)

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 In This Book
The manual describes the following:

 Instruction for Use

 Technical information

This information is subject to change without notice.

© Agilent Technologies, Inc. 2023

Agilent Technologies Italia S.p.A.

Vacuum Products Division
*G8610-90002* Edition 07/23 Via F.lli Varian, 54
*G8610-90002* Issue B.00 10040 Leinì (TO)
G8610-90002 ITALY