Silicon Tetrachloride (SiCl4) Silicon Tetrachloride (SiCl4)

Description Critical Temp Odor Product Method Of Product Cylinder Contents Valve Additional Supply
A colorless, toxic, nonflammable, corrosive liquid 452.8°F 233.8°C Pungent, Suffocating Specifications Analysis Code Size Outlet Information
with a vapor pressure of 3.75 psia (26 kPa) at
3.8 Minimum Purity: 99.98% 35053 SSB 110 lbs CGA-678 Certificate of analysis
70°F (21°C). Critical Pressure DOT Name Boron 0.2 ppb/w Note #1 85053 41L 50 kg JIS-S-26-14-OR provided with each cylinder
545.4 psia 3,760 kPa Silicon Tetrachloride
Carbon 2 ppm/w G Available in bulk supply.
Applications See page C-6
Donor (P & As) 1 ppb/w Note #1
Applications of epitaxial silicon; plasma etching MSDS Reference DOT Class
Other Chlorosilanes 0.06% /w A For gas handling equipment
of metals. P-4824 8 (Corrosive Material)
Resistivity ≥100 Ohm-cm Note #4 see page E-1

Materials Compatibility EPA Hazard Categories DOT Label NOTES:

Metals Stainless Steel; Carbon Steel; Monel Immediate Health Hazard; Delayed Health Corrosive 1. Measured by
photoluminescence
Plastics Kel-F; Teflon; PVDF Hazard; Reactive Hazard spectroscopy (MDL 0.002
Elastomers Viton Cylinder Storage ppba) of an epitaxial layer
grown from silicon
TLV-TWA Guideline tetrachloride.
Molecular Weight None Established Group 4 - See Page C-11
169.90 2. Donor defined as
phosphorus and arsenic.
IDLH (ppm) DOT ID
Specific Gravity (Air=1) 100 UN 1818 3. Other chlorosilanes
analyzed from liquid phase.
5.8
Flammable Range CAS Registry No. 4. N-type. Measured via
Specific Volume Nonflammable spreading resistance
10026-04-7 probe.
2.28 ft3/lb 0.14 m3/kg

Product Shelf Life

24 Months

Cylinder Information Valve Information Materials Of Construction

Product Dimensions Pressure
Code Size Diameter X Height @70°F (21°C) Type Valve Cylinder
35053 SSB 9" X 44" 9 psig Diaphragm 316L SS Stainless Steel
85053 41L 22.9 cm X 111.8 cm 62 kPa Diaphragm 316L SS Stainless Steel

Key to Analytical Techniques Note: All expressions for concentration are for gas phase, by volume unless otherwise noted.
A. Gas Chromatograph with E. Specific Water Analyzer K. Gas Chromatograph — P. Gas Chromatograph with
Thermal Conductivity Detector F. Total Hydrocarbon Analyzer Photo Ionization Methanizer Carbonizer
For more information contact Praxair at 1-800-446-8765 (972-479-8612).
B. Gas Chromatograph with G. Infrared L. Gas Chromatograph — Q. Gas Chromatograph with
Copyright 1997, Praxair Technology, Inc. Flame Ionization Detector H. Proprietary Flame Photometric Electrolytic Conductivity
This information is offered for use by technically qualified personnel at C. Gas Chromatograph with I. Gas Chromatograph with M. Mass Spectrometry R. Gas Chromatograph with
their discretion and risk, without warranty of any kind. Ultrasonic Detector Helium Ionization Detector N. Wet Chemical Reduction Gas Analyzer
www.praxair.com D. Specific Oxygen Analyzer J. Flame Ionization with Methanizer O. Gas Chromatograph with S. Gas Chromatograph with High
Discharge Ionization Detector Frequency Discharge Detector
C-90 C-91