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Overview of TCAD Sentaurus Software

This document discusses using the Synopsys Sentaurus TCAD software to simulate 2D semiconductor device structures. It describes how Sentaurus consists of process and device simulation modules. Process simulation models processing steps like etching and deposition, while device simulation computes properties like carrier concentration and electric fields. The document outlines how Sentaurus Device Editor is used to define device geometry, Sentaurus Workbench to set up and run simulations, Sentaurus Device to simulate device operation, and Sentaurus Visual for data analysis and visualization.

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shawan Chowdhury
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162 views6 pages

Overview of TCAD Sentaurus Software

This document discusses using the Synopsys Sentaurus TCAD software to simulate 2D semiconductor device structures. It describes how Sentaurus consists of process and device simulation modules. Process simulation models processing steps like etching and deposition, while device simulation computes properties like carrier concentration and electric fields. The document outlines how Sentaurus Device Editor is used to define device geometry, Sentaurus Workbench to set up and run simulations, Sentaurus Device to simulate device operation, and Sentaurus Visual for data analysis and visualization.

Uploaded by

shawan Chowdhury
Copyright
© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
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Download as PDF, TXT or read online on Scribd
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TCAD Sentaurus Software

In this class all the students are going to design 2D Device structure (such as PN-Junction diode,
MS-Junction diode, Mos Capacitor, Long-channel MOSFET, Short-channel MOSFET)and
simulate them to plot the required graphs.

About Software:
Technology Computer-Aided Design (TCAD) refers to using computer simulations to develop
and optimize semiconductor processing technologies and devices. Synopsys Sentaurus
TCAD offers a comprehensive suite of products that includes industry leading process and
device simulation tools, as well as a powerful GUI-driven simulation environment for managing
simulation tasks and analyzing simulation results. Synopsys Sentaurus TCAD is dominant
simulation software for analysis different semiconductor devices in development and
optimization of semiconductor devices in electrical properties, physical properties, and the
processing technology simulation.

Synopsys Sentaurus TCAD also provides interaction mode and the extraction tools of physical
properties and electric properties of devices, together with important parameter information of
semiconductor device performance, which bring the valuable solution for semiconductor
company research and development organizations, and academic organizations. Synopsys
Sentaurus TCAD can be used to predict the important physical and current–voltage properties of
current 3D semiconductor devices such as Fin-shaped field-effect transistor (FinFET), and these
physical properties include electrical field, electrical potential, electron density, etc.; and
electrical properties such as ON current (I on), OFF current (I off), operation voltage, threshold
voltage (V th), operation frequency (f), inverter, and SRAM circuits.
TCAD consists of two main branches: process simulation and device simulation.

Process Simulation:
In process simulation, processing steps such as etching, deposition, ion implantation, thermal
annealing, and oxidation are simulated based on physical equations, which govern the respective
processing steps.

Device Simulation:
Device simulations can be thought of as virtual measurements of the electrical behavior of a
semiconductor device, such as a transistor or diode. The device is represented as a meshed
structure. Each node of the device has properties associated with it, such as material type and
doping concentration. For each node, the carrier concentration, the current densities, the electric
field, the generation, and recombination rates, and so on are computed.
In these modules we are using device simulation

Sentaurus Device Editor (SDE):


Structure Editor is a tool for creating device geometric structure of TCAD
simulation. Structure Editor is an editor combining 2D and 3D device geometric structures, and
it is also a simulation tool developed by the TCAD-based 3D technology. Structure
Editor provides the most advanced visualization technology. The structure can be timely
examined during the establishment process. This powerful visualization software allows users to
select certain areas to be displayed while leaving other areas transparent or not displayed, thus
effectively improving the design efficiency of developers. SDE tool also allows definition of
variable parameters for subsequent adjustment on SWB, such as thickness of gate oxide, length
of gate, metal work function, and operating voltages. Other important semiconductor
technologies, such as silicide, high dielectric materials, metal gates, lightly doped drain (LDD),
and body bias, can also be easily designed and simulated in Synopsys Sentaurus TCAD.
2D cross-sectional view of Device

Simulation Project View on Sentauru Workbench


(SWB):
Sentaurus Workbench is a complete graphical environment for creating, managing, executing
and analyzing TCAD simulations. Its intuitive graphical user interface allows users to efficiently
navigate and automate the typical tasks associated with running TCAD simulations such as
managing the information flow, including preprocessing of user input files, parameterizing
projects, setting up and executing tool instances, and visualizing results with appropriate
viewers. The use of mathematical and logical expressions serves to preprocess the simulation
input dynamically.
in SWB we use sde and Sdevice tools to simulate the created device structure.

SDEVICE:
Sentaurus Device simulates advanced logic technologies such as Si FinFET and FDSOI,
including stress engineering, channel quantization effects, hot carrier effects and ballistic
transport, and many other advanced transport phenomena. Sentaurus Device also supports the
modeling of SiGe, SiSn, InGaAs, InSb, and other high-mobility channel materials and
implements highly efficient methods for modeling atomistic and process variability effects.

Sentaurus Visual:
Sentaurus Visual tool is the advanced visualization software for TCAD data analysis.
It is equipped with rich graphics capabilities for interactive composition of X–Y curves
and 2D/3D TCAD device structures and device electrical and physical properties. The
2D and 3D user interfaces of Sentaurus Visual.
Sentaurus Visual 2D user interface

Plot

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