ঔ҂Ᏹൣ!ಒΡΫ෉!Җ୾ΟΫΟԒήУ!

HSIUPING JOURNAL VOL.20, pp.125-136 (March 2010) 125

̾ O2 ྫᇎ෌ї਽˷˅‫࡭ے‬ӽቴ˞ࠂՀ!

揭由志

ဢ!ࡌ!

‫ء‬ઔߒ‫׌‬૞ਢ‫ شܓ‬13.56 MHz հ୴᙮(RF)௜ሽᑠኙԲጟؑഇ೏։՗ഗ‫ޗ‬Δፋኙ૖

Բ‫ظ‬ᎨԬ෮⢪(PET)֗ፋጙ⢪(PC)ၞ۩।૿‫ޏ‬ᔆΔ‫᧢ޏא‬ሽᑠ‫פ‬෷֗๠෻ழၴऱֱ‫ࠐڤ‬
ᨠኘ೏։՗ഗ‫ޗ‬।૿ࢤᔆऱ᧢֏ΔՈཚඨ౨៶‫ޏڼ‬࿳೏։՗ഗ‫ޗ‬ፖ८᥆ᝳᓂၴհॵထ
ࢤΖ‫ޏ‬ᔆছ৵հ೏։՗ഗ‫ֽאޗ‬൷ᤛߡհၦྒྷᨠኘࠡᘣֽࢤհ᧢֏Δ‫଺א‬՗Ժ᧩პᢴ
(AFM)ᨠኘ।૿ษᜋ৫֗‫ݮ‬ᎎऱ‫᧢ޏ‬Δۖഗ‫ޗ‬।૿ࡴ౨ഗऱ᧢֏ঞਢ‫ شܓ‬X ٠٠ሽ՗
౨ᢜᏚ(XPS)ၞ۩ᦸࡳΖ೏։՗ഗ‫ޗ‬ᆖլ‫פٵ‬෷հ௜ሽᑠ๠෻৵Δֽ൷ᤛߡ‫૾᧩ࣔڶ‬
‫܅‬հ᝟ႨΔ᧩‫ق‬ᆖ௜ሽᑠ๠෻৵հ೏։՗।૿ᘣֽࢤᏺ‫ף‬Δۖ।૿ษᜋ৫ঞᙟሽᑠ౨
ၦհᏺ‫ۖף‬Ղ֒Ζ೏։՗ഗ‫ޗ‬।૿ᆖሽᑠ๠෻৵Δܶ௜հᄕࢤࡴ౨ഗ(C-O ֗ C=O)ֺ
෷‫᧩ࣔڶ‬ऱ‫᧢ޏ‬Ζ‫׼‬؆Δᝳထ࣍‫ޏ‬ᔆ৵೏։՗ഗ‫ޗ‬Ղհ८᥆ᓂࠠ‫ڶ‬ለ‫܅‬հׂሽॴΔۖ
८᥆ᝳᓂፖ೏։՗ഗ‫ޗ‬հॵထࢤٍ‫ॺڶ‬ൄ᧩ထऱ༼֒Ζ

ᜱᗥມȈ೏։՗ഗ‫ޗ‬Ε௜ሽᑠΕ।૿‫ޏ‬ᔆΕ൷ᤛߡΕॵထࢤΖ

༿‫ݳط‬Κଥؓ‫ݾ‬๬ᖂೃ֏ᖂՠ࿓ߓᝑஃ
‫ދ‬ᒚֲཚΚ980810ʳ ൷࠹‫ֲ࿆ע‬ཚΚ980902
126 ঔ҂Ᏹൣ!ಒΡΫ෉!Җ୾ΟΫΟԒήУ

Polymer surface modification by O2 plasma

Yu-Chih Chieh

Abstract
In this study, 13.56 MHz radio frequency O2 plasma were employed to modify the
surface of two commercial polymer substrates, polyethylene terephthalate (PET) and
polycarbonate (PC). Plasma powers and treatment times were varied to investigate the
influences on the surface properties of the substrates. Adhesion between polymer substrates
and coated metal films also expected to be improved after plasma treatment. Water contact
angle measurements were employed to investigate the hydrophilicity of polymer substrates.
Atomic force microscopy (AFM) was used to observe the surface roughness and
morphology of the substrates. The changes of chemical components of the substrate surface
were characterized by X-ray photoelectron spectroscopy (XPS). The water contact angles of
the substrates remarkably decreased indicating the hydrophilicity of polymer surface
increased when undergone different powers of O2 plasma. Surface roughness also ascended
apparently as the plasma energies increased. The components of polar oxygen functional
groups (C-O and C=O) of polymer surface also altered after O2 plasma treatment. Moreover,
metal films that coated on plasma modified substrate surfaces exhibited lower sheet
resistance. Adhesion between polymer substrates and metal films also improved noticeably
after O2 plasma treatment.

Keywords: polymer substrates, O2 plasma, surface modification, contact angle, adhesion.

Yu-Chih Chieh, Lecturer, Department of Chemical Engineering, HIT.

п P3 Ⴌዏໍ՘ାϸφߓ८‫׾‬፵ϟः‫ف‬ȈථҦ‫ע‬ 127

൧ȃࠊّ ֗ՠᄐ੺೏৫ૹီऱֱऄ[5-8]Ζሽᑠ੡௛
᧯‫ڇ‬೏ሽ໱խࢬᇞᠦۖ‫ګݮ‬հร؄ኪढ
‫ڇ‬೏։՗‫ޗ‬றխΔፋኙ૖Բ‫ظ‬ᎨԬ෮
ᔆΔࠡխ‫ܶץ‬೏౨ሽ՗Ε଺՗Εᠦ՗Ε۞
⢪(polyethylene terephthalate, PET)‫֗א‬ፋ
‫ط‬ഗ֗ᖿ࿇ኪऱ։՗Δᅝ೏։՗ഗ‫ޗ‬๠࣍
ጙ⢪(polycarbonate, PC)‫ڇ‬ԫ౳ֲൄ‫س‬੒
ሽᑠऱᛩቼխΔຍࠄ೏֘ᚨࢤऱሽᑠศ՗
‫ش‬঴ࠩ‫ٺ‬ጟՠᄐ֗᠔᛭‫ش‬ຜΔ‫ؾ࣍۟א‬ছ
ᄎ‫᧢ޏ‬ഗ‫ޗ‬।૿ऱ֏ᖂࢤᔆ֗‫ݮ‬ᎎΔၞۖ
٠ ሽ ‫ ת‬ᖄ ᧯ ข ᄐ ຟ ‫ ॺ ڶ۾‬ൄ ૹ ૞ ऱ ߡ
ሒࠩ।૿‫ޏ‬ᔆऱ‫ؾ‬ऱ[4]Ζ‫࣍ط‬ሽᑠႛᄎ
‫ۥ‬Δਢ๯ᐖऑࠌ‫ࠠ׊ش‬ઌᅝૹ૞ࢤऱ೏։
‫ ᧢ ޏ‬। ૿ ௽ ࢤ ۖ ‫ ׊‬լᄎ ᐙ ᥼ ࠩ փ ຝ ࢤ
՗ഗ‫ޗ‬ΖPET ֗ PC ݁ࠠ‫ړߜڶ‬ऱᖲඳൎ
ᔆΔۖ‫ٵאױ׊‬ழ‫᧢ޏ‬।૿ऱ֏ᖂࢤᔆ‫א‬
৫֗રᓢᚰࢤΔኙԫ౳ऱᎨᨕ෈ࠠ‫ړߜڶ‬
֗‫ݮ‬ᎎΔࢬ‫א‬ሽᑠբ๯ᐖऑᚨ‫ڇش‬೏։՗
ऱࣂ‫ࢤݼ‬Δ‫ ڂ‬PC հऱੲᑿ᠏ฝᄵ৫
‫ޗ‬றհ।૿‫ޏ‬ᔆΔ‫ޏא‬ၞࠡ।૿౨Ε٠ᖂ
(Tg=150qC)ለ PET (Tg=70qC)૞೏Δરᑷ
֘୴ࢤΕ‫س‬ढઌ୲ࢤΔ‫֗א‬ኙࠡ‫ޗה‬றհ
ࢤለࠋࠌ‫ش‬ᄵ৫ٍለᐖΖPC ࠠ‫ړߜڶ‬ऱ
൷ထࢤ[9,10]Ζ
ຘ٠ࢤΔᆖൄࠌ‫ٺڇش‬ጟ٠ᖂข঴‫ڕ‬ᢴ
Lai ࿛Գ[3]֗ Cheng ࿛Գ[11]‫א‬լ‫ٵ‬
ׂΕᢴᙰΕ‫֗א‬٠጗ׂഗ‫ޗ‬Δۖ PET ঞ
հሽᑠ๠෻೏։՗ഗ‫ޗ‬।૿৵Δ࿇෼ֽ൷
ࠠ‫ॺڶ‬ൄᚌฆऱॴ௛ࢤΔ‫ࠟڼ࣍ط‬ጟഗ‫ޗ‬
ᤛߡ(Water contact angle)݁ࣔ᧩૾‫܅‬Δ।
२‫ڣ‬ᚨ‫ױ࣍ش‬ᐹী෈དྷؓ૿᧩‫ق‬ᕴ‫ش‬ഗ
‫ࠡق‬ᘣֽࢤ༼ࣙΔۖ‫ א‬XPS ᛀྒྷᆖሽᑠ
‫[ޗ‬1,2]ۖ‫ီૹࠩ࠹ףޓ‬Ζ
‫ޏ‬ᔆհ೏։՗ഗ‫ޗ‬।૿৵Δ࿇෼ܶ௜ऱࡴ
‫࣍ط‬Օຝ։೏։՗ഗ‫ޗ‬।૿հᘣֽ
౨ ഗ (-COH, CO, C=O ࿛ ) ݁ࣔ ᧩ ᏺ
ࢤլࠋΔࢬ‫ڇא‬ᚨ‫ش‬Ղൄሖࠩԫࠄ‫ڕ‬Κᛘ
‫ף‬Δۖ Lai [3]ᎁ੡ຍࠄܶ௜ࡴ౨ഗਢഗ‫ޗ‬
ᑮࢤΕထ‫ࢤۥ‬Ε‫س‬ढઌ୲ࢤΕ‫ݼ‬ᙩሽࢤΕ
।૿ᘣֽࢤᏺ‫ף‬հ‫׌‬૞଺‫ڂ‬Δۖ C=O ࡴ
ፖฆᔆ‫ޗ‬றၴհ൷ထࢤ࿛ംᠲ[3]Δࢬ‫א‬
౨ഗঞਢࠡխᣂ᝶ऱ‫ైڂ‬Ζ‫׼‬ԫֱ૿Δ‫ڶ‬
೏։՗ഗ‫ޗ‬հ।૿‫ޏ‬ᔆ२‫ګڣ‬੡ᑷ॰ऱ
๺‫ڍ‬८᥆ፖ೏։՗ഗ‫ޗ‬ၴऱॵထࢤ‫ޏ‬࿳
ઔߒᓰᠲΔႚอֱऄխ‫אڶ‬ᖲඳઔᗣΕ‫־‬
հֱऄΔ‫܀‬ਢ‫א‬ሽᑠ‫ޏ‬ᔆհֱऄ່࠹Գૹ
ྣ๠෻Δࢨ‫א‬ൎᎨࢨൎᨕ࿛ᛘ‫֏ڤ‬ᖂֱ‫ڤ‬
ီΔBou ࿛Գ[12]ലᔱᓂ࣍ PET ഗ‫ޗ‬ՂΔ
ၞ۩‫ޏ‬ᔆΔ‫א‬ᏺၞࠡ।૿௽ࢤ֗ፖฆᔆഗ
༼‫ڶנ‬யᏺ‫ף‬ഗ‫ޗ‬।૿հ CO ࡴ౨ഗΔ
‫ޗ‬ၴऱ൷ထࢤ[4]Δ‫ֱࠄڼ܀‬ऄ‫ڇ‬๻ໂ‫ګ‬
‫ױ‬ፖ Al ‫ ګݮ‬Al--O--C(PET)Δਚ‫༼ױ‬೏ᜳ
‫֗ء‬፹࿓Ղս‫ڶ‬լ֟౒រΖឈྥ२‫ٍࠐڣ‬
ᓂፖഗ‫ޗ‬հॵထࢤΖSilvain ࿛Գ[13]ٍ༼
‫ ڕהࠡאڶ‬UV ᅃ୴Εሼ୴࿛‫ޏ‬ᔆֱऄբ
‫ོאנ‬ᠦ՗‫ؚ‬ឰ PET ഗ‫ ޗ‬C=O ᝶࿨‫א‬ᏺ
ຬᥛ๯࿇।Δ‫܀‬ሽᑠ‫ޏ‬ᔆথਢ෼վ๯ᖂ๬
128 ঔ҂Ᏹൣ!ಒΡΫ෉!Җ୾ΟΫΟԒήУ

‫ ף‬CO ᝶࿨৵Δ‫ױ‬ᏺ‫ ף‬PET ፖᔱᓂၴհ հ ൷ ᤛ ߡ ٍ ང ጩ ‫ ګ‬। ૿ ് Ժ (Surface

ॵထࢤΖLe ࿛Գ[14]ආ‫ ش‬RF 13.56 MHz tension)‫א‬ၞ۩ֺለΖ೏։՗ᇢׂ।૿‫ݮ‬
։ܑ‫ א‬O2 ሽᑠ֗ CO2 ሽᑠኙ PET ഗ‫ޗ‬ၞ ᎎፖษᜋ৫‫଺א‬՗Ժ᧩პᢴ(AFM, Veeco
۩।૿ছ๠෻Δ༼‫נ‬௜ሽᑠ๠෻հഗ‫ޗ‬ኙ / DI Tapping mode TM)ၞ۩ၦྒྷΔၦྒྷᒤ
ᔱᓂհॵထࢤለ‫ړ‬Δ‫׌‬૞଺‫ڂ‬ਢ‫ڂ‬੡௜ሽ ໮੡  ȝP u 15 ȝPΔZ ၗࡐࡳ੡ 500
ᑠ‫ڶ‬ለ೏հ֏ᖂ੒ࢤΔ‫ڶױ‬யऱᏺ‫ܶף‬௜ nm Ζ ࠌ ‫ ش‬X ٠ ٠ ሽ ՗ ౨ ᢜ Ꮪ (XPS,
հࡴ౨ഗΔ‫ڶޓױ׊‬ய෷ሒࠩ।૿ษ֏ऱ Physical Electronic ESCA PHI1600)ၞ۩
ய࣠Δၞۖᏺ‫ף‬ፖᜳᓂհॵထࢤΖ ሽᑠ๠෻৵೏։՗ᇢׂ।૿հ֏ᖂิኪ
։࣫Δࠡ X ٠ᖿ࿇ᄭ੡ $O.Į KȞ= 1486.6
ະȃᄃᡜР‫!ݳ‬
eV )Δែ୴ዓ౨ၦ੡ 3 kV ऱོᠦ՗ዓΔ
ଈ٣ΔലԲጟؑഇհ೏։՗ᜳࣨΔ ದଆߡ(take-off angle)ࡐࡳ੡ 45qΖ
PET ֗ PC(։՗࿨ዌ‫ڕ‬ቹԫࢬ‫)ق‬Δဪ֊ ‫׼‬ԫֱ૿Δ‫א‬ऴੌ጖൳ែᝳߓอ(DC
‫ ګ‬1.7 ֆ։u1.7 ֆ։հᇢׂΔലԲጟᇢׂ magnetron sputtering)Δቂ‫ޗ‬੡ొ৫ 99.99
݁௦Եๅ౟堚ੑ෈խ٦ᆜԵ၌ଃंᔼᛯ % ᔱቂ֗☒☕Δቂ‫ޗ‬ፖഗࣨ၏ᠦપ 120
ᑒၞ۩堚ੑ 10 ։ᤪΔലᇢׂ࠷‫נ‬৵‫װא‬ mmΔ‫ א‬2000W հ‫פ‬෷Δ࣍ൄᄵՀኙሽᑠ
ᠦ՗ֽ(18 k:-cm)ല।૿‫ޱ‬ੑ೓෣Δ٦‫א‬ ‫ޏ‬ᔆ৵հ೏։՗ᇢׂၞ۩ 5 min հᔱᓂ֗
ᚘᜍ़௛‫ܬ‬ೈႿᓄ।૿հֽ։Δ‫ګݙܛ‬堚 20 min հ☒ᓂᝳထΖലᝳထᔱᓂ৵ऱ PET
ੑ೯‫܂‬Ζ൷ထΔല堚ੑ৵հ೏։՗ᇢׂᆜ ᇢׂ‫ א‬ASTM D3359 հᑑᄷ(‫ۍ‬௑ऄ)ၞ
Ե ሽ ᑠ ᎖ ‫ ֏ܗ‬ᖂ ௛ ઌި ᗨ ߓ อ (Plasma ۩ᔱᓂॵထࢤᛀྒྷΔۖᝳထ☒ᓂհ PC ᇢ
enhanced chemical vapor deposition, ׂঞ‫א‬؄រ൶ಾၦྒྷ☒ᓂհׂሽॴհ᧢
PECVD)࿺᧯փΔࠌ‫ ش‬13.56 MHz հ RF
֏Ζ
ሽᑠᄭΔຏԵ 50 sccm հ௜௛Δՠ‫܂‬ᚘԺ
O O H H
൳ࠫ‫ ڇ‬0.200 torrΔ‫א‬լ‫פٵ‬෷հ௜௛ሽ
O C C O C C (a)
ᑠ(100WΕ200WΕ300W)ኙ೏։՗ᇢׂ։ n
H H
ܑၞ۩ 1Ε5Ε10 ֗ 20 ։ᤪհ।૿๠෻Ζ O CH3

ᆖሽᑠ๠෻৵հ೏։՗ᇢׂΔ‫شܓ‬ᐙ C O C O (b)
CH3 n
ቝ ‫ ڤ‬൷ ᤛ ߡ ၦ ྒྷ Ꮪ (Dynamic Contact
Angle Analyzer FTA200)ၦྒྷ‫װ‬ᠦ՗ֽ‫ڇ‬ ቹԫΕʻ˴ʼˣ˘˧ ‫֗א‬ʻ˵ʼˣ˖ ૹᓤ໢ցհ։՗
‫ٺ‬ᇢׂ।૿հ൷ᤛߡΔၦྒྷছ٣ၞ۩‫װ‬ᠦ ࿨ዌʳ
՗ֽ।૿്Ժհீ‫إ‬Δല‫ٺ‬ᇢׂࢬၦྒྷ‫נ‬
п P3 Ⴌዏໍ՘ାϸφߓ८‫׾‬፵ϟः‫ف‬ȈථҦ‫ע‬ 129

୥ȃ๗‫ݏ‬ᇅଇ፤ ֽ൷ᤛߡ‫זױ‬।‫ޗ‬ற।૿հᛘᑮࢤ
‫܂֗א‬੡ᘣֽࢤ(hydrophilicity)ࢨงֽࢤ
ԫΕ೏։՗ഗ‫ޗ‬ሽᑠ‫ޏ‬ᔆছ৵ֽ (hydrophobicity)հਐᑑΔ൷ᤛߡ။‫ז܅‬।
൷ᤛߡհ։࣫ʳ ᛘᑮࢤ။ࠋٍ।‫ق‬ᘣֽࢤ။೏Ζ‫ޗ‬ற।૿
75 ࢬྒྷ൓հ൷ᤛߡ။՛Δ।‫ޗق‬றփፋ౨။
70
ՕΔࠡ।૿്ԺՈ။ՕΖ೏։՗‫ޗ‬றհ൷
Contact angle (deg)

65
60 ᤛߡፖࠡ֏ᖂ࿨ዌ‫ڶ‬യ֊ᣂএΔԫ౳ۖ
P100W
P200W
55 P300W ߢΔ‫ޗ‬ற।૿ૉܶ‫ڕڶ‬-OH, -C=O, -COO-,
50
-OOH, -COOH, -NH2, ፖ NH ࿛ܶ௜֗ܶ
45
40 ེհᄕࢤ(polar)ࡴ౨ഗΔᄎࠌ൓ᘣֽࢤለ
35 ࠋ[15,16]Ιۖ૖ᛩ֗౟ौගհጙසࡴ౨ഗ
0 5 10 15 20
Plasma treatment time (min) ࢨᢸ݁᥆࣍ॺᄕࢤ(non-polar)ഗΔࢬ।෼
ቹԲΕˣ˘˧ ഗ‫ޗ‬ᆖլ‫פٵ‬෷௜ሽᑠ๠෻ ‫ࠐנ‬ऱ੡งֽࢤΖ‫ط‬ቹԲ֗ቹԿխ‫ױ‬઎‫נ‬
৵Δ൷ᤛߡᙟ๠෻ழၴհ᧢֏ʳ ‫آ‬ᆖሽᑠ๠෻հ଺ࡨ PC ࢬྒྷ൓հ൷ᤛߡ
90
(84.4q) ֺ PET ࢬ ྒྷ ൓ ऱ (70.5q) ࣔ ᧩ ૞
P100W
80 P200W
೏Δ।‫ ق‬PC հงֽࢤֺ PET ૞ൎΔ‫ط‬ቹ
Contact angle (deg)

P300W

70 ԫ(a)֗(b)ࢬ٨‫ נ‬PET ֗ PC ૹᓤ໢ց

(Repeat unit)հ։՗࿨ዌቹխΔ‫ױ‬ᨠኘࠩ
60
Բृឈྥઃࠠ‫ڶ‬૖ᛩ࿨ዌΔ‫܀‬ਢ PC ໢‫ۯ‬
50
࿨ዌխհ C-C ᝶࿨ᑇ੡ 16ΔC-H ᝶࿨ᑇ
40 ੡ 20Δۖ PET ໢‫ۯ‬࿨ዌխհ C-C ᝶࿨ᑇ
0 5 10 15 20
Plasma treatment time (min) ੡ 9ΔC-H ᝶࿨ᑇ੡ 8Δࣔ᧩઎‫ נ‬PC հ
ቹԿΕˣ˖ ഗ‫ޗ‬ᆖլ‫פٵ‬෷௜ሽᑠ๠෻
งֽഗհֺ෷૞ֺ PET ೏๺‫ڍ‬Δຍ‫אױ‬
৵Δ൷ᤛߡᙟ๠෻ழၴհ᧢֏
ᇞᤩ੡۶଺ࡨ PC հ൷ᤛߡ૞ֺ PET Օऱ
ቹԲ֗ቹԿ։ܑ੡ PET ֗ PC Բጟ೏ ଺‫ڂ‬Ζ‫ط‬ቹԲ֗ቹԿ‫ױ‬઎‫ נ‬PET ֗ PC ᆖ
։՗ഗ‫ޗ‬ᆖ 100W, 200W, ֗ 300W ௜ሽ 100W ֗ 200W ௜ሽᑠ๠෻৵Δ൷ᤛߡᙟ
ᑠ‫א‬լ‫ٵ‬ழၴ๠෻৵।૿്Ժհ᧢֏Ζ‫ط‬ ๠෻ழၴ᧢֏‫ܧ‬෼ऱ᝟ႨԫીΔᅝ๠෻ 5
ቹխ‫ױ‬઎‫נ‬Բጟ೏։՗ഗ‫ޗ‬ᆖ௜ሽᑠ๠ min ৵൷ᤛߡբՕ༏Հ૾ΔPET ‫ࡨ଺ط‬
෻৵ֽ൷ᤛߡઃࣔ᧩૾‫܅‬Δ‫ א܀‬100W ֗
70q૾۟ 40q-45qΔPC ‫ ࡨ଺ط‬84q૾۟
200W ๠෻৵૾‫܅‬ऱ༏৫ለՕΖ
130 ঔ҂Ᏹൣ!ಒΡΫ෉!Җ୾ΟΫΟԒήУ

45q-55qհၴΔ।‫ق‬ᆖ‫ڼ‬Բጟ‫פ‬෷հ௜ሽ
ᑠ๠෻৵ΔPET ֗ PC ।૿հᘣֽࢤࣔ᧩
ᏺ‫ף‬Δ‫܀‬๠෻ழၴᏺ‫ࠡף‬൷ᤛߡࠀ‫آ‬٦ࣔ
᧩Հ૾Ζ‫ א‬300W ௜ሽᑠ๠෻৵ PET հ
൷ᤛߡՀ૾༏৫ለ՛Δ‫ ڇ‬5min ๠෻৵ࢬ
૾‫܅‬ऱ࿓৫່ՕΔۖ๠෻ழၴᏺ९৵ࠡ൷
ᤛߡ֘ۖՂ֒Ζ‫ ڇ‬PC ֱ૿ٍ‫ܧ‬෼ᆖ 300W
(a)
ሽᑠ๠෻৵൷ᤛߡՀ૾ऱ༏৫ለ՛ऱ෼
ွΖ

ԲΕ೏։՗ഗ‫ޗ‬ሽᑠ‫ޏ‬ᔆ৵।૿
ษᜋ৫հ։࣫ʳ
ቹ ؄ ੡ (a)‫ אآ‬௜ ሽᑠ๠ ෻ հ ଺ࡨ
PET ֗ᆖ(b)200W 5min ፖ(c)300W 20
min հ௜ሽᑠ๠෻৵Δ‫ ط‬AFM ࢬྒྷ൓հ
।૿‫ݮ‬ᎎ֗(d)ᆖངጩࢬ൓।૿ษᜋ৫ (b)
հ᧢֏Ζ‫آ‬ਜ‫ף‬௜ሽᑠ๠෻հ PET ।૿
‫ܧ‬෼ለؓᄶ֗ࠠ‫ڶ‬า՛ឍศհ‫ݮ‬ᎎΔۖ
ᆖ 200W ௜ሽᑠ๠෻ 5 min ৵Δ।૿ၲ
ࡨ ‫ נ‬෼๺ ‫ ׊ ᧩ࣔ ڍ‬ᒯയ հ ՛ᙗ ण ડದ
ढ Δ ທ‫ ګ‬। ૿᧢ ൓ ֺለ լ ؓᖞ Δ ‫ڇ‬ᆖ
300W 20 min հ๠෻৵Δ।૿‫ܧ‬෼೏‫܅‬
ದ ٗ ᄕՕ ‫ڕ ڶ‬ൕ Ղ ़ଏ ઎ ಾᆺ ࣥ հী
ᎎΔ᧩‫ق‬।૿ษᜋ৫Օ༏ᏺ‫ף‬Ζ‫ط‬ቹ؄
(c)
(d)‫ ױ‬࿇ ෼ PET । ૿ษ ᜋ ৫ ፖ ௜ ሽ ᑠ
๠෻᜔౨ၦ‫ܧ‬෼‫ֺإ‬հᣂএΔᆖ 300W
௜ሽᑠ๠෻ 30 min ৵հ PET ।૿ษᜋ
৫ঞՕ༏Ղ֒۟଺ࡨ PET પ 7 ଍հ࿓
৫Ζ
п P3 Ⴌዏໍ՘ାϸφߓ८‫׾‬፵ϟः‫ف‬ȈථҦ‫ע‬ 131

80 ‫ڼګ‬෼ွ່‫׌‬૞ऱ‫ైڂ‬Ζ‫֏ڼ‬ᖂ፱ࠥ෼ွ
70 300W 30min ‫ױ‬։੡ֽؓ֗িऴֱࠟ‫ٻ‬Δۖিऴֱ‫ٻ‬հ
Roughness, Ra (nm)

60
፱ࠥਢທ‫ګ‬।૿ษᜋ৫ᏺ‫ף‬հ‫׌‬૞଺‫ڂ‬Ζ
50
ጵ‫ٽ‬೶‫֮ە‬᣸ࢬ༼‫נ‬ऱᖲዌ‫ء֗א‬
40
30 ઔߒ൷ᤛߡፖ AFM ษᜋ৫ၦྒྷհ࿨࣠
20 200W 5min ৵Δ࿇෼ PET ֗ PC ᆖ 100W ֗ 200W ሽ
10 ᑠ๠෻ 5 min ৵Δࢬၦྒྷհ൷ᤛߡ‫ܛ‬Օ༏
Untreated
0
0 1x105 2x105 3x105 4x105 ૾‫܅‬Δ᧩‫ڼאق‬යٙ๠෻৵բ‫֒༼᧩ࣔױ‬
Plasma treatment energy (J/s)
‫ࠟڼ‬ጟ೏։՗ഗ‫ޗ‬।૿հᘣֽࢤΔۖૉᏺ
(d)
‫ף‬ሽᑠ๠෻ழၴΔ൷ᤛߡࠀ‫᧢ޏ᧩ࣔآ‬Δ
ቹ ؄ Ε ʻ˴ʼ ଺ ࡨ ˣ˘˧ ‫ ֗ א‬ᆖ ʻ˵ʼ˅˃˃˪ʳ
Lai ࿛Գ[3]མ༼ࠩ‫ױ‬౨‫ڂ‬੡।૿ឰ᝶֗
ˈ̀˼́ʻ˶ʼˆ˃˃˪ʳ ˆ˃̀˼́ ௜ሽᑠ๠෻
֏ᖂ፱ࠥທ‫ګ‬ధᡏհ࿓৫Δۖፖᘣֽࢤࡴ
৵ ˔˙ˠ հ।૿‫ݮ‬ᎎ֗ʻ˷ʼ।૿ษ
౨ഗᏺ‫ף‬ข‫س‬ઌյࣂᔭທ‫ګ‬।૿ᘣֽࢤ
ᜋ৫հ᧢֏ʳ
᝟࣍ԫؓᘝणኪۖࠌ൓൷ᤛߡ᧢֏լࣔ
Amanatides ࿛Գխ[17]༼ࠩ೏։՗ ᧩Δ‫܀‬๠෻ழၴᏺ९ٍᄎᏺ‫ף‬।૿հษᜋ
ഗ‫ޗ‬।૿ᆖ௜ሽᑠհ๠෻৵ᄎข‫س‬Հ٨ ৫Ζ‫ڕ‬ছࢬ૪‫ط‬ቹԲࢬ࿇෼ PET ᆖ 300W
2+
෼ွ(1).௜ሽᑠխข‫س‬հ O*֗ O ೏౨੒ ௜ሽᑠ๠෻ 10 min ‫א‬Ղ൷ᤛߡ‫ڶ‬լ૾֘
ࢤ௜ᄎࠌ൓೏։՗।૿ข‫س‬ឰ᝶(bonds ֒հ෼ွΔኙᅃቹ؄(c)ᆖ 300W 20min ௜
broken)Ε٦࿨‫(ٽ‬recombination)‫ิૹ֗א‬ ሽᑠ๠෻৵հ PET ।૿‫ݮ‬ᎎ֗ࢬၦྒྷࢬ
(rearrangement)࿛֘ᚨΔۖ೏౨௜ፖข‫س‬ ൓հษᜋ৫Δլᣄ઎‫נ‬೏౨ሽᑠբല PET
ऱׂ੄(fragment)֗‫أ‬ጤഗ(end group)֘ ।૿ధᡏΔࠌ൓।૿᧢൓ॺൄษᜋΔۖ
ᚨข‫ڕس‬-OH, -C-O, ࢨ-C=O ࿛ܶ௜ऱࡴ Le ࿛Գ[14]Ո༼‫נ‬መ೏ऱሽᑠ‫פ‬෷ࢨ๠
౨ഗΔࠌ൓।૿հᄕࢤᏺ‫ף‬Δ‫ٵ‬ழՈ‫ױ‬౨ ෻ழၴᄎທ‫ګ‬ഗ‫ޗ‬।૿ऱ‫֏٭‬Δࠌ൓।૿
ທ‫ګ‬ຝ։࿨དྷऱ෼ွΖ(2).ሽᑠհ೏౨ၦ ᘣֽࢤ֘ۖ૾‫܅‬Δۖ‫ڼ‬መ࣍ษᜋऱ।૿ٍ
ࠌ൓೏։՗।૿ऱ։՗ᢸ‫ߩڶ‬ജ೯౨ข ‫ױ‬౨ኙ৵ᥛᝳထ࣍ࠡՂऱ८᥆ᓂທ‫ګ‬լ
‫س‬ฝ೯Δۖᏺ‫ף‬ኙ௜଺՗ࢨ௜ᠦ՗հ‫ܮ‬ ߜऱᐙ᥼Ζ‫ڼ‬؆Δ‫ط‬ቹԲ֗ቹԿհ࿨࣠࿇
‫گ‬Δຍࠄ೏౨௜ᠦ՗ᄎࠌ।૿ข‫֏س‬ᖂ፱ ෼೏։՗ഗ‫ޗ‬ᆖሽᑠ๠෻৵Δ।૿ᘣֽࢤ
ࠥ(chemical etching)ࢨਢࠌ։՗ᢸข‫س‬൷ ऱ‫ॺࠀ᧢ޏ‬ႛ࠷ެ᜔࣍ሽᑠ౨ၦΔۖՈፖ
2+
ࣤ(grafting)ऱ෼ွΔۖ O ऱ‫ڇژ‬ঞਢທ ದࡨሽᑠऱ‫פ‬෷‫ڶ‬ᣂΔ300W ऱ௜ሽᑠྤ
132 ঔ҂Ᏹൣ!ಒΡΫ෉!Җ୾ΟΫΟԒήУ

ᓵ๠෻ழၴ९࿍Δ݁ྤऄሒࠩ 100W ࢨ ല‫آ‬ᆖ๠෻հ଺ࡨ PET ፖᆖ 200W

200W ല೏։՗ഗ‫ޗ‬।૿ᏺ‫ף‬ᘣֽࢤऱ ௜ሽᑠ๠෻ 5 min հ PET ၞ۩ C-1s ፖ
ய࣠Δ‫ױڼ‬౨ਢሽᑠ‫פ‬෷֜೏ᄎՕ༏ᏺ‫ף‬ O-1s հ X ٠٠ሽ՗౨ᢜྒྷᇢΔ࿨࣠։ܑ
֏ᖂ፱ࠥऱயᚨΔࠌ൓।૿ษᜋ৫‫ڇ‬࿍ழ ‫ڕ‬ቹն(a)֗(b)ࢬ‫ق‬Ζ଺ࡨ PET հ C-1s
ၴփՕ༏༼֒հᒴਚΖ ౨ ᢜ ቹ ( ቹ ն a) խ ࠀ ႛ ࿇ ෼ პ இ ऱ ऱ
C-O(288.6 eV)֗ C=O(286.1 eV)հ௽ᐛಛ
ԿΕ೏։՗ഗ‫ޗ‬ሽᑠ‫ޏ‬ᔆ৵।૿
ᇆ୽Δۖ C-H ֗ C-C(284.6 eV)հ౨୽ൎ
˫ˣ˦ հ։࣫ʳ ৫ঞৰ೏Δઔ‫ױܒ‬౨ਢ।૿‫ۆॵܮ‬਩ढທ
C-1s C-H, C-C ‫ ګ‬C-H ֗ C-C ಛᇆመൎທ‫ګ‬ᔟᓈயᚨࢬ
C-O 284.6
ીΔ‫܀‬ൕቹն(b)հ O-1s ౨ᢜቹխঞ‫ױ‬઎
Intensity [a.u.]

C=O 286.1
288.6 PET-P
(200 W 5min) ‫᧩ࣔנ‬ऱ C-O(533.0 eV)֗ C=O(531.6 eV)
հಛᇆ౨୽Ζᆖ 200W ௜ሽᑠ๠෻ 5 min
৵հ PET ।૿ΔC-1s ౨ᢜቹխ‫נ‬෼ለࣔ
Untreated PET ᧩ऱ C-O ֗ C=O ಛᇆΔۖ O-1s հ౨ᢜ
ቹխ C-O ֗ C=O ಛᇆൎ৫ֺٍ‫آ‬๠෻ছ
290 288 286 284 282 280
Binding Energy [eV] ૞ᏺ‫ף‬๺‫ڍ‬Δ‫ڼ‬࿨࣠।‫ ق‬PET ᆖ 200W
(a)
௜ሽᑠၞ۩ 5 min ।૿‫ޏ‬ᔆ৵Δᄕࢤࡴ౨
O-1s ഗ‫᧩ࣔڶ‬ᏺ‫ף‬ऱ෼ွΖ
C-O C=O
533.0 531.6 ലቹն(a)֗(b)‫ٺ‬౨୽ᗨ։৵‫ޣ‬൓հ
Intensity [a.u.]

PET-P ૿ᗨ٨࣍।ԫΔ‫ط‬।խ C-1s հ࿨࣠‫ױ‬઎

(200 W 5 min)
‫נ‬ᆖ௜ሽᑠ๠෻৵ΔPET հ C-O ֗ C=O
౨୽૿ᗨհ᜔ࡉᏺ‫ף‬Աપԫ଍(๠෻ছΚ
Untreated PET 19.6%Δ๠෻৵Κ38.9%)Δۖ‫ ط‬O-1s հ࿨
࣠ঞ‫ױ‬࿇෼ C-O ֺࠏฃ੡ᏺ‫ף‬Δ‫ڂ଺ڼ‬
536 534 532 530 528
Binding Energy [eV] ංྒྷਢ‫ڂ‬੡।૿ᆖሽᑠ᥮ᚰข‫س‬ឰᢸΔۖ
(b)
‫ڇ‬೏౨௜ऱᛩቼխΔ௜ၞۖፖࠡ֘ᚨ‫ګس‬
ቹնΕ‫آ‬๠෻հ଺ࡨ ˣ˘˧ ፖᆖ ˅˃˃˪ʳˈ̀˼́ ᄅऱᢸࢬીΖLai ࿛Գ[3]ਐ‫ נ‬C-O ֗ C=O
௜ሽᑠ๠෻৵ʻˣ˘˧ˀˣʼհʻ˴ʼ˖ˀ˄̆ʳ˫ˣ˦ ऱܶၦᏺ‫ף‬ਢ।૿ᘣֽࢤᏺ‫ף‬հᣂ᝶଺
౨ᢜቹʻ˵ʼˢˀ˄̆ʳ˫ˣ˦ ౨ᢜቹʳ ‫ڂ‬Δ‫ ࣍ط‬C=O ࡴ౨ഗհᘣֽࢤ૞ለ C-O
п P3 Ⴌዏໍ՘ାϸφߓ८‫׾‬፵ϟः‫ف‬ȈථҦ‫ע‬ 133

૞ൎΔࢬ‫ א‬C=O ኙᘣֽࢤᏺ‫ף‬ऱಥ᣸૞ ૪հ൷ᤛߡྒྷᇢ࿨࣠ԫીΔٍ౨ᇞᤩ൷ᤛ

ֺ C-O ૞ՕΖ‫ ڼ‬XPS ౨ᢜᦸࡳ࿨࣠ፖছ ߡՕ༏Հ૾ऱ෼ွΖ

।ԫΕ‫ ࡨ଺ط‬ˣ˘˧ ፖᆖ ˅˃˃˪ʳˈ̀˼́ ௜ሽᑠ๠෻৵ʻˣ˘˧ˀˣʼհ ˖ˀ˄̆ ֗ ˢˀ˄̆ʳ˫ˣ˦ ౨ᢜቹʻቹ

ն ˴ʿʳ˵ʼխࢬ‫ٺנޣ‬౨୽հᗨ։૿ᗨ֗ࠡઌյհֺࠏᣂএʳ

functional Ratio(%)
Binding energy(eV)
groups Original PET 200W, 5min
288.6 CO 0.8 13.6
C-1s 286.1 C=O 18.8 25.3
284.6 CC(CH) 80.4 61.1

533.0 CO 53.8 54.8

O-1s
531.6 C=O 46.2 45.2

ᝳထ☒ᓂհഗ‫ޗ‬Ζ
؄Ε‫ޏ‬ᔆছ৵೏։՗ഗ‫ᝳޗ‬ထ८
ലլ‫ٵ‬ሽᑠ‫פ‬෷(50300W)๠෻ 20
᥆ᓂ৵հॵထࢤׂ֗ሽॴ։ min ৵հ PET ՂᝳထᔱᓂऱᇢׂΔ‫א‬
࣫ʳ ASTM D3359 ᑑᄷྒྷᇢᔱᓂፖ PET ഗ‫ޗ‬
‫ء‬ઔߒ‫׼‬ԫຝٝ༉ਢലᆖሽᑠ๠෻ հॵထࢤΔֱࠡ‫ڤ‬ਢ‫ྒྷڼא‬ᇢֱऄऱറ᥆
መհ PET ֗ PC ։ܑᝳထᔱᓂ(Al)֗☒ᓂ ‫ۍ‬௑Ը(ZEHNTNER 2087)Δࠡছጤ‫ׂޢ‬
(Ti)Δ‫ڇ࣍ط‬ऴੌ጖൳ែᝳመ࿓խ೏౨հ Ըׂ၏ᠦ 1 mmΔ‫ᝳڇ‬ᔱᓂᇢׂ।૿Ղ᜕
८᥆ศ՗መ࿓խ਍ᥛᐳᚰ೏։՗ഗ‫ޗ‬Δࠀ ᖩ‫ٺ‬ቤመ 1 cmΔ‫ ڇױڼڕ‬1 cm2 ऱ૿ᗨՂ
ല೯౨᠏᧢‫ګ‬ᑷ౨৵ข‫ިس‬ᗨ ข‫ س‬100 ଡ 1 mm2 ऱ௑ጻΔ‫ޢ‬ଡ௑՗խհ
(deposited)Δࢬ‫א‬ឈྥഗࣨࠀ‫ףآ‬ᄵΔഗ ८᥆ᓂ݁ፖᔣ२௑՗ऱᓂ։ၲΔ൷ထ‫א‬റ
‫ᝳڇޗ‬ထመ࿓խᄵ৫ս਍ᥛՂ֒Δᆖྒྷᇢ ‫ش‬ᓄ൅ጹയ၀‫ڇ‬բ֊໊ऱᓂᐋՂࠀঅఎ
৵࿇෼ᝳထ 20 min ৵ഗࣨᄵ৫‫ױ‬ሒࠩ ԫ‫ݠ‬ጤ Δৱ 1 ։ᤪ৵٦ല‫ݠ‬ጤ‫א‬२‫׏‬িऴ
80qC ‫א‬ՂΔ‫ڼ‬ᄵ৫բ၌መ PET ऱੲᑿ᠏ (90q)ऱߡ৫߰ຒࢮದΔૠጩᜳᓂ๯ᐺᠦ
ฝᄵ৫Δ‫܀‬ᠦ PC ऱੲᑿ᠏ฝᄵ৫ս‫ڶ‬ԫ ຝٝፖ௑ጻ೴഑հၴऱ‫ۍ‬։ֺΔ‫ܒאش‬ឰ
੄၏ᠦΖ‫ڼ‬؆Δ☒ऱᇞᠦ੒֏౨ለᔱ੡ ॵထࢤհ࿛్Ζ‫ֱڼ‬ऄԾጠ‫ۍ‬௑ऄΔ‫ڼ‬੡
೏Δ‫ڇ‬ઌ‫פٵ‬෷ՀᏁ૞ለ९ऱᝳထழၴթ ྒྷᇢᓂᐋॵထࢤ່១໢‫׊‬ൄ‫ش‬ऱֱऄΖ
౨‫ߩګݮ‬ജদ৫հᓂᐋΔഗ࣍‫ەࠄڼ‬ၦਚ ቹք੡‫ א‬ASTM D3359 ֱऄྒྷᇢᔱ
ެࡳല PET ՂᝳထᔱᓂΔۖᙇ‫ ش‬PC ‫܂‬੡ ᓂፖᆖլ‫ٵ‬ሽᑠ‫פ‬෷֗ழၴ๠෻৵ PET
134 ঔ҂Ᏹൣ!ಒΡΫ෉!Җ୾ΟΫΟԒήУ

ഗ‫ޗ‬ၴॵထࢤհ࿨࣠Δ‫ط‬ቹխ‫ױ‬઎‫آנ‬ᆖ ઎‫ נ‬PC ഗ‫ޗ‬ᆖ௜ሽᑠ๠෻৵Δᝳ࣍ࠡՂ

๠෻հ PET ࠡፖᔱᓂհॵထࢤྒྷၦ࿨࣠ ऱ☒ᓂհׂሽॴࣔ᧩ለ‫آ‬๠෻ PC Ղհ☒
੡ 0BΔ‫ܛ‬ᓄ൅‫ױ‬ല 100 ௑֊໊ऱᔱᓂ٤ ᓂ૾‫܅‬๺‫ڍ‬Δኙᅃᇢׂ؆ᨠհᨠኘ࿨࣠Δ
ຝࢸದΔ।‫ق‬ᔱᓂፖ PET հॵထࢤॺൄ ᝳထ࣍‫آ‬๠෻ PC ഗ‫ޗ‬Ղհ☒ᓂࣔ᧩‫ڶ‬๺
஁Δ‫܀‬ᆖመ 50W ‫ޏ‬ᔆ 20 min ৵ॵထࢤٍ ‫ڍ‬ါฉ‫׊‬ᓂ૿‫ܧ‬෼ࠄ๺ᣆ૿Δۖ‫ א‬100W
‫ޏ᧩ࣔڶ‬࿳Δۖ PET ᆖ 100W ֗ 200W ֗ 200W ๠෻ 5-20 min ৵հ PC ഗ‫ޗ‬Ղࢬ
௜ሽᑠ๠෻৵Δࠡᝳထऱᔱᓂ݁‫ױ‬ሒࠩ ᝳထհ☒ᓂါฉለ֟‫ܧ׊‬෼Ꭼ‫૿ॽۥ‬؆
5B ऱॵထ࿛్Δ᧩‫ق‬ᆖሽᑠ‫ޏ‬ᔆ৵հ ᨠΔ।‫ق‬೏։՗ഗ‫ޗ‬ᆖሽᑠ๠෻৵Δ‫ॵڂ‬
PET ፖᔱᓂၴऱॵထࢤբՕ༏‫ޏ‬࿳Ζ‫ڇ‬ᆖ ထࢤհ༼֒Δࠌࠡ८᥆ᝳᓂऱ౒ະ૾‫֗܅‬
300W ሽᑠ๠෻ 20 min հ PET ᝳထհᔱ ؓᖞࢤᏺ‫ף‬Δຍ‫ױ‬౨ਢׂሽॴ૾‫܅‬ऱ‫׌‬૞
ᓂॵထࢤ֘ۖՀ૾੡ 4BΖLe ࿛Գ[14]༼ ଺‫ڂ‬Ζ
‫נ‬ᅝ‫֜א‬೏ऱሽᑠ‫פ‬෷ࢨ๠෻ழၴመ९ 11.0
10.5 Untreated
հ PET ഗ‫ޗ‬Δᔱᓂհॵထࢤ֘ۖለ๠෻
Sheet Resistance (:/sq)

10.0
࣍‫פ܅‬෷Ε࿍ழၴհഗ‫ࠐޗ‬ऱ஁Ζۖ‫ء‬ઔ 9.5
ߒխՈ࿇෼ઌ‫ٵ‬ऱ࿨࣠Ζ 9.0
5 8.5
100W 200W Good 8.0
4 7.5
7.0
ASTM D3359
Adhesion [B]

3 300W 6.5
0 1x105 2x105 3x105 4x105
2 50W Plasma treatment energy (J/s)

1 ቹԮΕ☒ᓂᝳထ࣍լ‫פٵ‬෷ʻ˄˃˃ˆ˃˃˪ʼ
Untreated Poor ֗ழၴʻ˄̀˼́˅˃̀˼́ʼ๠෻৵հ ˣ˖
0
0 1x105 2x105 3x105 4x105 Ղࢬྒྷ൓հׂሽॴʳ
Plasma treatment energy (J/s)

ቹքΕ࣍լ‫פٵ‬෷֗ழၴሽᑠ๠෻հ ˣ˘˧
ഗ ‫ ޗ‬Ղ ᝳ ထ ᔱ ᓂ ৵ Δ ‫˧˦˔ א‬ˠʳ
˗ˆˆˈˌ ֱऄྒྷᇢॵထࢤհ࿨࣠ʳ
ቹԮঞ੡‫אڇ‬լ‫פٵ‬෷(100300W)
֗ழၴ(1 min20 min)๠෻৵հ PC Ղᝳ
ထհ☒ᓂׂሽิྒྷᇢ࿨࣠Δ‫ڼڇ‬ቹխբല
‫ٺ‬ሽᑠհ๠෻යٙ᠏ང‫ګ‬౨ၦΔ‫ط‬ቹխ‫ױ‬
п P3 Ⴌዏໍ՘ାϸφߓ८‫׾‬፵ϟः‫ف‬ȈථҦ‫ע‬ 135

နȃ๗፤ यᗃ
‫ء‬ઔߒ‫ א‬13.36 MHz հ୴᙮௜ሽᑠ ‫ء‬ઔߒტ᝔խᘋՕᖂ‫ܨ‬壂ᘋඒ඄༼
ኙؑഇࠟጟൄ‫ش‬ऱ೏։՗ഗ‫ޗ‬Δፋኙ૖Բ ࠎኔ᧭๻ໂ֗ᛀྒྷ։࣫ऱ࠰‫ܗ‬Ζ
‫ظ‬ᎨԬ෮⢪(PET)‫֗א‬ፋጙ⢪(PC)ၞ۩।
୥ՄНᝧ!
૿‫ޏ‬ᔆΔ࿨࣠ᢞኔΔ
[1] ‫ࡲޕ‬ᎮΔՀ‫ق᧩૿ؓז׈‬ᕴ‫ױش‬ᐹ
1.‫ڼ‬Բጟ೏։՗ഗ‫ޗ‬ᆖ 100W200W հ௜
‫ڤ‬Ⴟᓄഗ‫ݾޗ‬๬Δՠᄐ‫ޗ‬றᠧ፾169
ሽᑠ๠෻ 5-10 min ৵Δࠡፖֽհ൷ᤛߡ
(2001) pp.87-89
ࣔ᧩૾‫܅‬Δ᧩‫ق‬।૿ᛘᑮࢤ֗ᘣֽࢤᏺ
[2] ‫ݛض‬ၼΔؓ૿᧩‫ق‬ᕴ‫ױش‬ᐹ‫ڤ‬Ⴟᓄഗ
‫ף‬Ζ
‫ݾޗ‬๬ፖሎ‫ش‬Δՠᄐ‫ޗ‬றᠧ፾ 195
2.ሽᑠ๠෻৵೏։՗ഗ‫ޗ‬հ।૿ษᜋ৫ (2003) pp156-158
Ոࣔ᧩ᏺ‫ף‬Δۖᏺ‫ף‬ऱ༏৫ঞፖሽᑠհ [3] J. Lai, B. Sunderland, J. Xue, S. Yan,
౨ၦ‫ֺإګ‬Ζ‫א‬ሽᑠ‫ޏ‬ᔆ೏։՗ഗ‫ޗ‬। W.M. Folkard, B.D. Michael, and
૿ऱய࣠ፖࠌ‫ش‬ሽᑠհ‫פ‬෷‫᧩ࣔڶ‬ऱ Y.Wang , “Study on hydrophilicity of
polymer surfaces improved by plasma
ᣂএΔ‫א‬መ೏ऱሽᑠ‫פ‬෷ၞ۩।૿‫ޏ‬ᔆ
treatment,” Appl. Surf. Sci., 252 (2006)
৵‫ڂ‬ኙ।૿ჾ୭֘ۖᄎࠌᘣֽࢤ૾‫܅‬Ζ
pp.3375-3379.
3. ᆖ ௜ ሽ ᑠ ‫ ޏ‬ᔆ ৵ հ ೏ ։ ՗ ഗ ‫ ޗ‬। ૿ [4] M. A. Gilliam, Q. S. Yu, “Surface
CO ፖ C=O ࡴ౨ഗࣔ᧩ᏺ‫ף‬Δۖ‫ޏ‬ᔆ characterization of low-temperature
৵հ।૿ᘣֽࢤᏺ‫ף‬ঞፖܶ௜հࡴ౨ cascade arc plasma-treated
low-density polyethylene using
ഗհᏺ‫ڶף‬യ֊ᣂএΖ
contact angle measurements,” J. Appl.
4.࣍ᆖ௜ሽᑠ‫ޏ‬ᔆ৵հ೏։՗ഗ‫ޗ‬Ղᝳ Poly. Sci., 99 (2006) pp.2528-2541.
ထ८᥆ᓂ৵Δ८᥆ᓂፖ೏։՗ഗ‫ޗ‬ၴհ [5] M. Noeske, J. Degenhardt, and S.
ॵထࢤࣔ᧩༼ࣙΔׂۖሽॴՈࣔ᧩Հ Strudthoff, et al. “Plasma jet treatment
૾Δ‫ڼ‬ፖ೏։՗।૿ᄳᑮࢤհᏺ‫ڶף‬ of five polymers at atmospheric
pressure: surface modifications and
ᣂΔ‫܀‬መ೏ऱሽᑠ‫פ‬෷֗መ९๠෻ழၴ
the relevance for adhesion,” Int. J.
֘ۖᄎ૾‫ॵ܅‬ထࢤΖ
Adhes,. 24 (2004) pp.171-177.
[6] S. Han, Y. Lee, H. Kim, “Polymer
surface modification by plasma source
136 ঔ҂Ᏹൣ!ಒΡΫ෉!Җ୾ΟΫΟԒήУ

ion implantation,” Surf. Coat. Technol, Ehrhardt, and P. Lutgen, “XPS study
93 (1997) pp.261-264 of Al/polyethylene terephtalate
[7] N.-Y. Cui, N.M.D. Brown, interface,” Surf. Sci., 251-252 (1991)
“Modification of the surface pp.787-793
properties of a polypropylene (PP) [14] Q. T. Le, J. J. Pireaux, R. Caudano, P.
film using an air dielectric barrier Lec lere, and R. Lazzaroni,
discharge plasma,” Appl. Surf. Sci., “XPS/AFM study of the PET surface
189 (2002) pp.31-38 modified by oxygen and carbon
[8] E.E. Johnston, B.D. Ratner, “Surface dioxide plasmas: Al/PET adhesion,” J.
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(1996) pp.303-317 [15] N.V. Bhat, D.J. Upadhyay,
[9] M. Strobel, M.J. Walzak, J. M. Hill, A. “Plasma-induced surface modification
Lin, E. Karbashewski, and C. S. and adhesion enhancement of
Lyons, “Comparison of gas-phase polypropylene surface,” J. Appl.
methods of modifying polymer Polym. Sci. 86 (2002) pp.925-936
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(1995) pp.365-383 Deshmukh, S.K. Gupta, “Investigation
[10] R.J. Shishoo, “Studies of Adhesion of plasma-induced photochemical
Mechanisms Between PVC Coatings reaction on a polypropylene surface,”
and Different Substrates,” .Coated J. Phys. Chem., B107 (2003)
Fabrics 26 (1997) pp.26-32 pp.4550-4559
[11] C. Cheng, Z. Liye, R.-J. Zhan, [17] E. Amanatides, D. Mataras, M.
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fibre by the new atmospheric pressure “Plasma surface treatment of
cold plasma jet,” Surf. Coat. Technol, polyethylene terephthalate films for
200 (2006) pp.6659-6665 bacterial repellence,” Surf. Coat.
[12] M. Bou, J. M. Martin, and T. L. Technol., 200 (2006) pp.6331-6335
Mogne, “Chemistry of the interface
between aluminium and polyethylene
terephthalate by XPS,” Appl. Surf. Sci.,
47 (1991) pp.149-161
[13] J. F. Silvain, A. Arzur, M. Alnot, J. J.