Handheld Probe Coordinate

Measuring Machine
NEW XM-5000

Portable, Benchtop CMM

High-accuracy measurement over a large area; on or off the system

Hole diameter: ø70.016 mm

ø2.76"

Hole distance: 2
 20.007 mm
8.66"

Flatness: 0.009 mm
0.0004"
 Overcome conventional limitations
with a new kind of CMM
High-accuracy measurement for
palm-sized parts to large applications

Benchtop
measurement for
small parts

Portable for
large part
measurement

2
Adaptable to your
workbench

In-machine measurement

3
 Your Personal Coordinate
Measuring Machine

Handheld Probe Coordinate

Measuring Machine
NEW XM-5000

4
Anyone
Built-in touch sensor for even greater ease-of-use
Easy-to-use free-angle probe

On-screen measurement guidance

Visual measurement overlay

Minimal training time

Simple interface

Anywhere
Measurement capability for any situation
Adaptable camera system

High-accuracy measurement in any environment

Ultra-robust camera and temperature compensation function

5
 Hand tools

Advantages

■ Easy to use by anyone

■ Can be used anywhere

Disadvantages

■ Unable to measure complex shapes

■ Unable to measure GD&T
■ Measurement results vary between
operators

Bridge CMM

Advantages

■ Measure complex shapes

■ GD&T measurement
■ High-accuracy

Disadvantages

■ Difficult to operate
■ Usable only in a specialized
measuring room
■ Ongoing costs

6
The XM-5000
Designed with
advantages in mind

■ As easy-to-use as calipers
■ Can be used anywhere
■ Can perform complex
measurements anywhere
■ High-accuracy measurement
by anyone

7
 Dual-camera probe marker tracking
The XM-5000 adopts a new concept with a tracking camera that captures near-infrared light emitted by
seven markers.
The probe search camera also enables measurement over a wide-area.

Probe position detection

Wide-area probe search camera
The probe search camera constantly tracks the light
emitted by the probe to instantly detect the probe
position anywhere within the wide measurement area.

Probe markers

8
Probe position measurement
High-accuracy tracking camera
The tracking camera tracks the probe to identify its
position and orientation with high accuracy.

Tilted to the left Centered Tilted to the right

9
 New measurement principle for
high-accuracy over a wide-range
High-accuracy Repeatability: ±3 µm

Capturing from the lens center for the highest accuracy

The camera unit moves to ensure the ■ Conventional camera ■ XM-5000 camera
marker is always captured from the
center of the lens for measurement
with the highest possible accuracy.

XM-5000 lens with Measurement only

distortion from the area with
correction the highest accuracy

Chart

Reference camera for

high-accuracy vertical and
horizontal rotation measurement
The internal chart and camera are used for detecting motion, allowing
for high-accuracy measurement of the vertical and horizontal rotation
Reference camera
of the tracking camera.

10
Wide-area Maximum measurement range: 2 m 6.6'

Movable camera for stable measurement even for large targets

The camera can move up to 40 degrees to the left or right and up to 25 degrees up or down, enabling
measurement over a wide area.
1 0 1

2 m 6.6'

Measurement
range in the
Maximum
horizontal
measurement range
direction (m feet)

1.2 m 3.9'

Measurement
range in the
height direction
(m feet)
Maximum measurement range

1 m 3.3'
0

11
 Anyone
Easy-to-Use Free-Angle Probe

Easy-to-use free-angle probe designed for

improved usability and accuracy
OLED display

Probe marker position

Placing markers horizontally, vertically, in a
triangle, and at different heights allows for stable
measurement accuracy.

Different height
Horizontal

Vertical

Triangle

Front Side

Wide-variety of
stylus options
Operation buttons

* C ompatible with commercially available

products.
Probe detection status
confirmation LED

12
Flexible-grip wireless probe with touch sensor for
intuitive, accurate measurement
NEW Touch sensor
The built-in touch sensor is specially designed to activate when a
certain amount of contact pressure is applied. This prevents
variations due to contact pressure.

Beep!

NEW Wireless NEW Adjustable grip

Wireless LAN connectivity makes it possible to The handheld grip can be rotated 90 degrees to
use the probe in any setting without fussing with either side, allowing for a more comfortable hold
cables. while the angle of the markers can be adjusted
to face the camera.

Free-angle probe for intuitive handling

As long as the probe is within the
camera’s field of view, measurement
locations can be approached from any
angle. The probe can be used to
measure the top surface of parts,
horizontal or angled holes, and the
rear with no part adjustment.

13
 Anyone
Visual Measurement Overlay

Image-based measurement results

for easy visualization

Small probe camera

The camera captures images of the target.

As measurement is performed...

...the measurement results are displayed in

real-time on the captured image.

Easy-to-understand
measurement results

14
On-screen visual guidance for repeated
measurements
Anyone can measure a feature the same way it was originally measured simply by placing the probe against the
location on the part displayed on the screen. The XM-5000 reduces subjectivity by automatically detecting if
measurements were taken correctly.

Measurement point instructions are Follow the instructions to perform Follow the next instruction to continue
displayed. measurement. measurement.

Continue to measure all parts without

any expertise required.

The measurement results will be displayed in a list alongside the judgment results.

Automatic creation of inspection reports with

images for easy comprehension
The XM-5000 comes standard with a
function for automatically creating
Contact
Part Report <Guidance Image>
No1 : Circle001 No2 : Circle0002

inspection reports and work

DATE TIME 20XX/11/26 13:45:02
LOT NUMBER
COUNTER 0001

procedures that include camera

CONTACT
PRODUCT
DELIVER

images. Measurement points and

FIGURE_NUMBER
PROCESS No3 : Distance001 No4 : Circle003
EQUIPMENT KEYENCE WM Series(7B0M000013)

items are laid out automatically,

Overall Result ---

<Measurement Result>

resulting in significant reductions in No. Element Name/Output Item

1 Circle001/Diameter
2 Circle0002/Diameter
Mes. Value
80.033 mm
20.031 mm
Unit Design Value
80.000
20.000
Upper Limit
0.050
0.050
Lower Limit Res.
-0.050 OK
-0.050 OK

inspection report and operating

3 Distance001/Distance 57.506 mm 57.500 0.050 -0.050 OK
4 Circle003/Diameter 20.022 mm 20.000 0.050 -0.050 OK
No5 : Circle004 No6 : Circle005
5 Circle004/Diameter 20.020 mm 20.000 0.050 -0.050 OK

instruction preparation time.

6 Circle005/Diameter 20.027 mm 20.000 0.050 -0.050 OK
7 RoundSlot001/Minor Diameter 15.020 mm 15.000 0.050 -0.050 OK
8 RoundSlot001/Major Diameter 50.028 mm 50.000 0.050 -0.050 OK
9 RoundSlot002/Minor Diameter 25.033 mm 25.000 0.050 -0.050 OK
10 RoundSlot002/Major Diameter 75.045 mm 75.000 0.050 -0.050 OK
11 Circle006/Diameter 79.972 mm 80.000 0.500 -0.500 OK
12 Cylinder003/Diameter 25.093 mm 25.000 0.100 -0.100 OK
13 CL-Spec001/Diameter 114.895 mm 115.000 0.300 -0.300 OK
14 Concentricity001/Concentricity-CL 0.274 mm 0.000 0.500 0.000 OK
15 ChamferLN001/Length 25.095 mm 25.000 0.200 -0.200 OK No7-No8 : RoundSlot001 No9-No10 : RoundSlot002
16 Circle002/Diameter - mm 0.000 0.000 0.000 ---

15
 Anyone
Simple Interface

Easy-to-use and understand,

even for first-time users
Coordinate measuring machine interfaces are often a mess of complex and unfamiliar commands.
The XM-5000, however, uses images, icons, and other tools to ensure intuitive operation for any user.

Sortable elements tree

Drag measured elements up or down
Measurement results display to change the order.

Easy-to-understand basic measurement menu

Frequently used basic measurement elements such as
planes, lines, points, circles, cylinders, cones, and spheres
are consolidated into a single tab. Each tool also comes with
video instructions.

Clicking the ▶ button on the screen will bring up a

window showing video instructions.

16
Simple interface for intuitive operation
Measurement can be performed without any complicated programming or selecting multiple
commands with just three simple steps.
The intuitive operation makes it possible even for those unfamiliar with measurement to obtain
measurement results easily.

Touch the probe to the

1 Select the elements to measure. 2 measurement location.
Click Plane from the Basic Elements
in the measurement menu.

3 Simply the items to measure.

Distance Angle Parallelism

measurement measurement measurement

Tutorial function
The tutorial function provides easy-to-understand measurement instructions with images.
This allows even first-time users to check measurement methods without having to look at the manual.

17
 Anywhere
Various Measurement Styles

Measurement capability for any situation

Worksite

Office Robotic Cell

Flexible installation
A wide-variety of available attachments to suit the installation needs of the actual worksite.
Whether in an office or on shop floors, the XM-5000 enables measurement in any setting.

❚ Stage
❚ Extension
pole

❚ Tripod
Various measurement styles

❚ Probe mounting
attachment
18
In-machine measurement

Advantages of in-machine measurement with the XM-5000

Hand tools XM-5000
■ Unable to measure complex shapes ■ High-accuracy measurement by anyone
■ Unable to measure GD&T ■ Complex measurements and GD&T
■ Measurement results vary between operators measurements
■ Measurement with a calibrated measuring
On-device measurement touch probes
instrument
■ Measurement limited to machining axis ■ Faster measurement of target locations with
■ Difficult to configure measurement settings
less processing stop loss
■ Measurement takes time, so processing takes longer

19
 Anywhere
Environmental Resistance

Install wherever
measurements are needed

20
On-site usability with no need for
a quality lab
Paying close attention to the measurement unit materials
and device design, KEYENCE wanted to make a CMM that
can be used anywhere. With no need for an
environmentally controlled measuring room, the
XM‑5000 can be installed wherever necessary.

Probe internals Specially designed

(quartz glass) ultra-robust camera

Robust design for use in

adverse environments
The XM-5000 is designed to be durable and rigid for use
even in harsh environments like manufacturing sites.

Built-in environment diagnosis function

A high-accuracy sensor in the camera unit diagnoses whether

ambient vibrations will adversely affect measurement.

Accurate measurement even with

temperature changes
The XM-5000 includes a temperature compensation function that ensures measurement targets are measured under
the same conditions, just like a climate-controlled measuring room, even if the ambient temperature is not constant.
Simply select the current temperature and the material, and the device will automatically compensate for the
standard temperature dimensions.

30°C 86°F 10°C 50°F

150.000 mm 5.91" 150.000 mm 5.91"

21
 Advanced Features

Compare with 3D CAD data Optional accessory: XM-H5C

Import CAD Measure

Comparison
measurement

Comparison / color map function

Comparative measurement of parts is possible using the shapes

from imported 3D CAD files. The points of difference between the
target and the 3D CAD data can also be displayed as a color map.

Profile measurement

A surface profile tool has been

added to GD&T measurement
elements. This tool makes it possible
to measure curved surface shapes.
Contour profile

22
CAD data export

3D CAD export of measured elements

Measured elements such as planes, circles, and cylinders

can be output accurately to 3D CAD files.

3D CAD export of free-form surfaces

The XM-5000 can measure and output 3D CAD data even with
curved objects simply by touching the probe to the part.

Actual product Measure Example of 3D export

CAD export of 2D elements

Circles and straight lines projected on a flat plane and their

dimensions can be output as 2D CAD data (DXF files).

23
 Auxiliary Functions / Support

Statistical analysis function for summarizing data

Run mode measurement results will be saved automatically to the control PC storage. Saved data can also be
extracted for use with various statistical analyses.

Verification of statistics values

Key statistics values such as pass/fail count, max. value, min. value, average, σ, 3σ, 6σ, and
Cpk for selected measurement items can be calculated automatically and displayed.

Trend graph
The trends for selected measurement items can be viewed in a graph. This allows for
visualization of such trends as increased variation, upward/downward measurement trends,
and periodic fluctuations.

Histogram
The variations for each selected measurement item can be viewed in a graph. The graph,
which shows the range of measurements as the horizontal axis and the frequency as the
vertical axis, allows users to see whether the measurements are centering on any values in
particular and how the measurements vary.

Traceability system diagram

The laser interferometer used for International
National Physical Laboratory
inspection and calibration has been standard
calibrated by a UKAS accredited
Accredited
company for a traceability system UKAS accredited contractor
organization
that meets international standards.
Reference
Iodine-stabilized HeNe laser
standard

Practical
Laser interferometer
standard

Reference
XM-5000 Handheld Probe
measuring Calibration certificate
Coordinate Measuring Machine
machine

24
Follow up support
Delivery
After the product arrives, your local system specialist will provide training and assist with
system implementation.

Practice material
Improve proficiency by using the practice materials included with the system.
Practice material

Technical support
KEYENCE employs dedicated staff who provide coordinate measuring machine support
by phone or email.

Calibration
With the XM-5000, there is no need to worry about periodic
calibration. Simply place the probe and camera in the dedicated
case and send them to KEYENCE. KEYENCE will provide
temporary replacement units (probe, camera) while the original
machine is being calibrated.

Dedicated case

Simple stylus calibration

Cone
Simply place the stylus ball tip in the
cone of the dedicated jig and measure
at least 13 different orientations to
complete calibration.

Easy calibration using the dedicated

calibration jig

25
 Application Examples

Machined and turned parts

Hole distance, circularity, XY coordinates PCD, dividing angle

Flatness, perpendicularity, parallelism Coaxiality, symmetry

26
 Stamped and plastic parts

Bending angle Distance between curved virtual lines

Taper 3D CAD comparison

27
 Advantages of the XM-5000

A small coordinate measuring machine with

the power to bring about big changes

Reduced costs through

inspection process
improvements

The ability to perform in-house inspection can help

improve initial yield rates and reduce costs. Delays
before shipping and inspection can also be
eliminated by performing prompt inspections and
quality evaluations during each process.

Improved efficiency through Inspections

Prototyping/ In-process
quick and accurate inspections development
of first
off-tool parts
inspections

Significantly reduce inspection time by empowering

any employee to measure anywhere. This allows for
more time dedicated to other critical tasks, enabling
shorter delivery times and overall improved work Incoming Pre-shipping
efficiency. Shipping
inspections inspections

28
 Improved reliability

Manufacturing instructions are becoming more

strict every year, and being able to inspect
complicated drawing locations can improve
reliability with business partners. Moreover,
inspection results issued by suppliers can also be
reviewed through in-house inspections for greater
clarity of process responsibility.

Contact
Part Report <Guidance Image>
No1 : Circle001 No2 : Circle0002

Acquisition of new customers

DATE TIME 20XX/11/26 13:45:02
LOT NUMBER
COUNTER 0001
CONTACT
PRODUCT
DELIVER
FIGURE_NUMBER
PROCESS No3 : Distance001 No4 : Circle003
EQUIPMENT KEYENCE WM Series(7B0M000013)
Overall Result ---

The more advanced a manufacturing request is, the

<Measurement Result>
No. Element Name/Output Item Mes. Value Unit Design Value Upper Limit Lower Limit Res.
1 Circle001/Diameter 80.033 mm 80.000 0.050 -0.050 OK
2 Circle0002/Diameter 20.031 mm 20.000 0.050 -0.050 OK

more important access to a coordinate measuring

3 Distance001/Distance 57.506 mm 57.500 0.050 -0.050 OK
4 Circle003/Diameter 20.022 mm 20.000 0.050 -0.050 OK
No5 : Circle004 No6 : Circle005
5 Circle004/Diameter 20.020 mm 20.000 0.050 -0.050 OK
6 Circle005/Diameter 20.027 mm 20.000 0.050 -0.050 OK
7 RoundSlot001/Minor Diameter 15.020 mm 15.000 0.050 -0.050 OK

machine is. Being able to tell customers that you

8 RoundSlot001/Major Diameter 50.028 mm 50.000 0.050 -0.050 OK
9 RoundSlot002/Minor Diameter 25.033 mm 25.000 0.050 -0.050 OK
10 RoundSlot002/Major Diameter 75.045 mm 75.000 0.050 -0.050 OK
11 Circle006/Diameter 79.972 mm 80.000 0.500 -0.500 OK
12 Cylinder003/Diameter 25.093 mm 25.000 0.100 -0.100 OK

have access to a coordinate measuring machine

13 CL-Spec001/Diameter 114.895 mm 115.000 0.300 -0.300 OK
14 Concentricity001/Concentricity-CL 0.274 mm 0.000 0.500 0.000 OK
15 ChamferLN001/Length 25.095 mm 25.000 0.200 -0.200 OK No7-No8 : RoundSlot001 No9-No10 : RoundSlot002
16 Circle002/Diameter - mm 0.000 0.000 0.000 ---

makes it possible to ensure greater quality and to

increase the number of handled projects without
having to send work to other companies.

Enjoy even more

advantages with
the XM-5000

29
 System Configuration

XM-5000

XM-5000A

30
 Main unit accessories

ø5 mm ø0.20" Stylus extension Star stylus attachment Probe stand Stylus

standard stylus OP-88658 calibration jig
OP-88421

Camera unit Camera unit Probe cable Mouse Training part

USB cable AC adapter OP-88667
OP-88420 OP-88369

External devices

Control Control
laptop PC desktop PC

Optional accessories

Probe Battery Camera unit tripod Camera mounting Camera unit Probe mounting
battery charger XM-S1 attachment extension pole attachment
XM-B1 XM-BC1 XM-AT XM-EX1 XM-RB

ø2.5 mm ø0.10" Auxiliary Small-diameter Magnetic plate M6 base plate

small stylus measurement tools stylus jig XM-MP OP-88080
OP-88701 OP-88233 OP-88550

Sticky plate Clamp set

OP-87946 972352
3D CAD import module XM-H5C
3D CAD import module (CATIA-compatible) XM-H5C2

Offline CAD software XM-H5P

Data transfer software XM-H5T

31
 Specifications

■ Camera unit
Model XM-5000 XM-5000A

Maximum 2000 × 1200 × 1000 mm 500 × 300 × 200 mm

W×D×H
measurement length 78.74" × 47.24" × 39.37" 19.69" × 11.81" × 7.87"

Indication error accuracy ±(7 + 9L/1000) µm*1 ±(7 + 9L/1000) µm*2

Repeatability ±3 µm

Distance 0.0001 mm 0.000004"

Minimum display unit
Angle 0.0001 degrees

Camera unit rotation Theta rotation ±40° ±25°

angle Tilt rotation ±25° ±20°

Weight Approx. 8 kg 17.64 lb

External input 2 inputs Maximum applied voltage: 26.4 V, ON voltage: 19 V or more, OFF current: 0.1 mA or less

7 outputs
Maximum applied voltage: 30 V, Maximum sink current: 50 mA,
External output (OK/NG/FAIL/MEASURE/
Leakage current: 0.1 mA or less, Residual voltage: 1.4 V or less (50 mA) / 1.0 V or less (20 mA)
ERROR/TOUCH/STROBE)

Number of possible
Probe 1
connections

WLAN communication IEEE 802.11b/g/n –

Communication unit USB communication USB 3.0

Infrared communication 945 nm

Power supply Supplied from dedicated AC adapter

Rated voltage 24 VDC

Rating
Current consumption 1.7 A

Operating ambient
Environmental 10 to 35°C 50 to 95°F
temperature
resistance
Operating ambient humidity 20 to 80% RH (no condensation)

*1 Refer to ISO 10360-2 (in the range of 800 × 400 × 500 mm 31.50" × 15.75" × 19.69" and when the ambient temperature is 23°C ±1°C 73.4 ±1.8°F; “L” represents the
measurement length (Unit: mm inch))
*2 Refer to ISO 10360-2 (in the range of 200 × 200 × 150 mm 7.87" × 7.87" × 5.91" and when the ambient temperature is 23°C ±1°C 73.4 ±1.8°F; “L” represents the
measurement length (Unit: mm inch))

32
■ Probe
Model XM-5000 XM-5000A

Marker Number of markers 7

Light source 870 nm

Applicable stylus M5

Display method OLED

Display
Resolution 96 × 39 pixels

Hardware keys MEASURE, OK, CANCEL, CAMERA, Trigger, Power

WLAN communication IEEE 802.11b/g/n –

Communication unit USB communication USB 2.0

Infrared communication 945 nm

Battery Dedicated lithium-ion battery pack –

Capacity 3250 mAh –

Power supply
Charging time Approx. 6 hours –

Continuous usage time Approx. 8 hours –

USB Rated voltage 5 VDC

connection Current consumption 1A
Rating
Rated voltage 3.6 VDC –
Battery
Current consumption 1.25 A –

Operating ambient
Environmental 10 to 35°C 50 to 95°F
temperature
resistance
Operating ambient humidity 20 to 80% RH (no condensation)

Weight Approx. 630 g 22.24 oz

33
 Dimensions

Measuring unit XM-5000/XM-H5000

388.6 15.30"
65.7 2.59"

518 20.39"
700 27.56"
979.8 38.57"

45 × M8 Depth: 10 0.39"
Hole distance: 50 1.97"
300 11.81"

450 17.72"

Measuring unit XM-5000A/XM-H5000A

388.6 15.30"
65.7 2.59"

330 12.99" 685 26.97"

932.4 36.71"

25 × M8 Depth: 10 0.39"
Hole distance: 50 1.97"

250 9.84"

250 9.84"

34
 Unit: mm inch

Camera unit Camera mounting attachment Camera unit tripod

XM-AT XM-S1
3 × ø6.6 ø0.26" (through-hole)

M3 × 0.5 0.02" 54
Max depth: 4 0.16" 2.13" 2 0.08"
ø159 ø6.26"
ø140 ø5.51"
297.3
11.7"

(859 33.82")
120° 120°

Camera unit extension pole

XM-EX1
M3 × 0.5 0.02"
128.6
302.4 11.91" Max depth: 3.3 0.13"
5.06"
ø124 ø4.88"

222.5 8.76"

Probe Stylus Probe mounting attachment

OP-88421 OP-88701 XM-RB
2 × R2.05 R0.08" 73.2 2.88"
ø10 ø0.39" ø10 ø0.39"
30 1.18" 19.8 0.78" 11.5 0.45"

M5 M5
4.9 0.19"
5 0.20"
30 1.18" 72.5 2.85"
ø3 ø0.12"
(through-hole) 4.1 0.16" × 5.1 0.20" hole

254.2 3 0.12" 4 × M4 × 0.7 0.03"

10.01" Max depth: 5 0.20" ø4.1 ø0.16" hole
20 0.1 32
ø3 ø0.12" 20 0.79" 0.0039" 1.26"
0.79" 5 0.20"
ø3 ø0.12"
11 (through- ø1.5
0.43" hole) ø0.06"
28.7 1.13"

ø2.5 ø0.10"
ø5 ø0.20" 2.5 0.10" 58.2 2.29"

70.5 196.2 7.72"

2.78"

Magnetic plate Sticky plate M6 base plate

8 × ø8.5 ø0.33"
XM-MP OP-87946 OP-88080 (M8 countersunk
M8 countersunk screw securing hole)
450 17.72" screw hole ø2.5 ø0.10"
2.5 0.10" 33 1.3" (4 locations) 391 × M6 8 0.31"
8 0.31" 12.5 0.49"
P50 1.97" × 8 = 400 15.75" (through-hole)
33
1.3"
200 225
150
7.87" 8.86" 5.91"
P50 1.97" × 4 = 240 250 200 7.87"
200 7.87" 9.45" 9.84"
250
300 9.84"
11.81"
200 7.87" 200 7.87"
290 11.42" 250 9.84"
300 11.81" 275 10.83"
36 × ø8.5 ø0.33" (through-hole) 4 × R10 R0.39"

9 × ø8.5 ø0.33" (through-hole)

Counterbore 15 0.59", Depth: 1.7 0.07"
35
 Your Personal Coordinate Measuring Machine

CONTACT YOUR NEAREST OFFICE FOR RELEASE STATUS

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CALL TOLL FREE

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1-888-KEYENCE
Av. Paseo de la Reforma 243, P11, Col. Cuauhtémoc, C.P. 06500, Del. Cuauhtémoc, Ciudad de México, México +52-55-8850-0100 [email protected] TO CONTACT YOUR LOCAL OFFICE

The information in this publication is based on KEYENCE’s internal research/evaluation at the time of release and is subject to change without notice. 03KA-2032-2
Company and product names mentioned in this catalog are either trademarks or registered trademarks of their respective companies.
The specifications are expressed in metric units. The English units have been converted from the original metric units. Unauthorized reproduction of this catalog is strictly prohibited.
Copyright © 2022 KEYENCE CORPORATION. All rights reserved. XM5000-KA-C-US 2122-4 611S44