GP 475 InstructionManual
GP 475 InstructionManual
com
Series 475
® ®
Granville-Phillips Series 475 Convectron
(505)872-0037 Vacuum Measurement Controller
Instruction Manual
Instruction manual part number 475101
Revision A - November 2009
Series 475
® ®
Granville-Phillips Series 475 Convectron
Vacuum Measurement Controller
Customer Service/Support
For customer service, 24 hours per day, 7 days per week, every day of
the year including holidays, toll-free within the USA, phone
+1-800-367-4887
For customer service within the USA, 8 AM to 5 PM, Mountain Time
Zone weekdays, excluding holidays:
• Toll-free phone: +1-800-776-6543
• Phone: +1-303-652-4400
• FAX: +1-303-652-2844
• Email: [email protected]
• World Wide Web: www.brooks.com
Instruction Manual
© 2009, Brooks Automation, Inc. All rights reserved.
Granville-Phillip and Convectron are registered trademarks of Brooks Automation, Inc. All
other trademarks and registered trademarks are the properties of their respective owners.
Granville-Phillips Series 475 Convectron
Vacuum Measurement Controller
Catalog numbers for Series 475 Convectron Vacuum Measurement Controller with Graphic Display
1/8 DIN Panel Mount or Benchtop Mount
Controller:
1/8 DIN Panel Mount or Benchtop Mount 475001 - X - X
Measurement Units:
Torr T
mbar M
Pascal P
Power Supply:
Universal, CE Compliant 475008 - X
Power Cords:
North American 115 VAC & Japan 100 VAC 1
North American 240 VAC 2
Universal Europe 220 VAC 3
United Kingdom 240 VAC 4
Chapter 1 Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
1.1 Caution and Warning Statements . . . . . . . . . . . . . . . . . . . . . . 9
1.2 Reading and Following Instructions . . . . . . . . . . . . . . . . . . . . 9
1.3 System Grounding . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
1.4 Explosive Gases . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
1.5 Explosion / Implosion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
1.6 Overpressure Conditions . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
1.7 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
1.8 Damage Requiring Service . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
1.9 Customer Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
Chapter 2 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
2.1 System Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
2.2 Pre-Installation Considerations . . . . . . . . . . . . . . . . . . . . . . . . 15
2.3 Installation Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
2.4 Install Pressure Relief Devices . . . . . . . . . . . . . . . . . . . . . . . . . 16
2.5 Mount the Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
2.6 Install the Convectron Gauge . . . . . . . . . . . . . . . . . . . . . . . . . 18
Install Vacuum Chamber Fittings . . . . . . . . . . . . . . . . . . . . . . 19
Ground the Convectron Gauge . . . . . . . . . . . . . . . . . . . . . . . . 20
2.7 Connect the Wiring . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
2.8 Connectors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
2.9 Configure the Relays for the Application . . . . . . . . . . . . . . . . . 23
2.10 Requirements for Process Control Option . . . . . . . . . . . . . . . . 23
Chapter 3 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
3.1 Preparing for Pressure Measurement . . . . . . . . . . . . . . . . . . . . 25
3.2 Button Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
3.3 Initial Power Up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
3.4 Menu Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
Product Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
Keypad . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
Diagnose . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
Calibrate . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
3.5 Configure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
Setpoint Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
RS-232 Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
Analog Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
Pressure Units . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
Display Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
Gas Species . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
Pressure Filtering . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
Restore Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
Save Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
Gauge Sensor Type . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
Correction Factor Parameters . . . . . . . . . . . . . . . . . . . . . . . . . 35
3.6 Error Codes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36
3.7 Preparing For Convectron Gauge Operation . . . . . . . . . . . . . . 37
3.8 Convectron Gauge Theory of Operation . . . . . . . . . . . . . . . . . 37
Chapter 6 Diagnostics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 73
6.1 Continuous Diagnostics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 74
6.2 Diagnostics Requiring User Interaction . . . . . . . . . . . . . . . . . . 74
Analog Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 74
Measurement Circuits . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 74
6.3 Convectron Gauge Simulator . . . . . . . . . . . . . . . . . . . . . . . . . 75
Simulate a Process Operation Prior to Full System Integration . 75
Analog Output Tests . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 76
Controller Calibration Verification . . . . . . . . . . . . . . . . . . . . . 76
Index . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 85
1.1 Caution and Warning This manual contains caution and warning statements with which you must
Statements comply to prevent inaccurate measurement, property damage, or personal
injury.
CAUTION
Caution statements alert you to hazards or unsafe
practices that could result in minor personal injury or
property damage.
Each caution statement explains what you must do to
prevent or avoid the potential result of the specified
hazard or unsafe practice.
WARNING
Warning statements alert you to hazards or unsafe
practices that could result in severe personal injury or
death due to electrical shock, fire, or explosion.
Each warning statement explains what you must do
to prevent or avoid the potential result of the
specified hazard or unsafe practice.
1.2 Reading and You must comply with all instructions while you are installing, operating, or
Following Instructions maintaining the controller. Failure to comply with the instructions violates
standards of design, manufacture, and intended use of the controller.
Granville-Phillips and Brooks Automation disclaim all liability for the
customer's failure to comply with the instructions.
• Read instructions – Read all instructions before installing or operating the
controller.
• Retain instructions – Retain the instructions for future reference.
• Follow instructions – Follow all installation, operating and maintenance
instructions.
• Heed warnings and cautions – Adhere to all warnings and caution
statements on the controller and in these instructions.
• Parts and accessories – Install only those replacement parts and
accessories that are recommended by Granville-Phillips. Substitution of
parts is hazardous.
WARNING
Read these safety notices and warnings before
installing, using, or servicing this equipment. If you
have any doubts regarding the safe use of this
equipment, contact the Granville−Phillips Customer
Service department at the address listed in this user
manual.
Each warning statement explains what you must do
to prevent or avoid the potential result of the
specified hazard or unsafe practice.
1.3 System Grounding Ion producing equipment, such as ionization gauges, mass spectrometers,
sputtering systems, etc., from many manufacturers may, under some
conditions, provide sufficient electrical conduction via a plasma to couple a
high voltage electrode potential to the vacuum chamber. If exposed
conductive parts of the gauge, controller, and chamber are not properly
grounded, they may attain a potential near that of the high voltage electrode
during this coupling. Potential fatal electrical shock could then occur
because of the high voltage between these exposed conductors and ground.
All components in a vacuum system used with this or any similar high
voltage product must be maintained at Earth ground for safe operation.
Connect power cords only to properly grounded outlets or sources.
1.4 Explosive Gases Do not use the Series 475 Controller or a Series 275 Convectron Gauge in
an environment of explosive or combustible gases or gas mixtures.
Operation of any electrical instrument in such an environment constitutes a
definite safety hazard. Do not use the product to measure the pressure of
explosive gases or gas mixtures. The sensor wire of a Convectron gauge
normally operates at 125 degrees Centigrade. If a malfunction causes the
sensor wire to reach a higher temperature, it could raise the sensor wire
temperature to above the ignition point of combustible materials or gases.
Danger of explosion or inadvertent venting to atmosphere exists in all
vacuum systems which incorporate gas sources or involve processes capable
of pressuring the system above safe limits.
1.5 Explosion / Implosion Danger of injury to personnel and damage to equipment exists on all
vacuum systems that incorporate gas sources or involve processes capable
of pressuring the system above the limits it can safely withstand.
For example, danger of explosion in a vacuum system exists during
backfilling from pressurized gas cylinders because many vacuum devices
such as ionization gauge tubes, glass windows, glass belljars, etc., are not
designed to be pressurized.
1.6 Overpressure Do NOT subject Series 275 Convectron gauges to pressures above 1000
Conditions Torr.
Install suitable devices that will limit the pressure from external gas sources
to the level that the vacuum system can safely withstand. In addition, install
suitable pressure relief valves or rupture disks that will release pressure at a
level considerably below that pressure which the system can safely
withstand.
Suppliers of pressure relief valves and pressure relief disks are listed in
Thomas Register under "Valves, Relief", and "Discs, Rupture".
Confirm that these safety devices are properly installed before installing the
Series 275 Convectron gauge. In addition, check that (1) the proper gas
cylinders are installed, (2) gas cylinder valve positions are correct on manual
systems, and (3) the automation is correct on automated systems.
Using the N2 calibration to pressurize a vacuum system above 1 Torr with
certain other gases can cause dangerously high pressures which can cause
explosion of the system. See Indicated vs. True Pressure for Gases Other
Than N2 or Air on page 39.
If used improperly, Convectron gauges can supply misleading pressure
indications that can result in dangerous overpressure conditions within the
system.
1.7 Operation It is the installer's responsibility to ensure that the automatic signals provided
by the process control module are always used in a safe manner.
Carefully check manual operation of the system and the setpoint
programming before switching to automatic operation. Where an equipment
malfunction could cause a hazardous situation, always provide for fail-safe
operation. As an example, in an automatic backfill operation where a
malfunction might cause high internal pressures, provide an appropriate
pressure relief device.
1.8 Damage Requiring Turn OFF power to the controller and refer servicing to qualified service
Service personnel under the following conditions:
• If any liquid has been spilled onto, or objects have fallen into, the
controller.
• If a circuit board is faulty.
• If the Convectron gauge sensing wire is open or the gauge is
contaminated.
• If the controller has been exposed to moisture.
• If the controller does not operate normally even if you follow the operating
instructions. Adjust only those controls that are explained in this
instruction manual. Improper adjustment of other controls may result in
damage and will often require extensive work by a qualified technician to
restore the controller to its normal operation.
• If the controller has been dropped or the enclosure has been damaged.
• If the controller exhibits a distinct change in performance.
NOTES:
2.1 System Components Figure 2-1 and Figure 2-2 illustrate all available options and system
capabilities, including controllers with process control and RS-232
computer interface options.
Figure 2-1 Series 475 Convectron Controller Front and Rear Panels
2-channel process
control connector
Gauge cable
Convectron Gauge
24 Vdc power supply
cable and converter
Analog output
connector
2.2 Pre-Installation This chapter guides you through the basic setup procedures for the 475
Considerations Controller, including mounting the Controller, installing a Convectron
gauge, connecting vacuum chamber fittings, and connecting wiring.
If your application requires different settings than the factory defaults listed
in Table 2-1, see Chapters 3, 4, and 5 for instructions on changing the
settings. You can reconfigure options before or after completing the basic
setup procedures described in this chapter.
WARNING
Installing, removing, or replacing the 475 Controller
in a high-voltage environment can cause an electrical
discharge through a gas or plasma, resulting in
property damage or personal injury due to electrical
shock or fire.
Vent the vacuum chamber to atmospheric pressure
and shut off power to the controller before you install,
remove, or replace the controller.
WARNING
Exposing the controller to moisture can cause fire or
electrical shock resulting in product damage or
personal injury.
To avoid exposing the controller to moisture, install
the controller in an indoor environment. Do not
install the controller in any outdoor environment. Do
not spill any liquid onto the controller.
2.3 Installation Procedure The controller installation procedure includes the following steps:
1. Install the appropriate pressure relief devices in the vacuum system.
2. Establish the desired location and orientation for the Series 475
Controller.
3. Install the Convectron gauge that connects to the Controller.
4. Assemble and connect the Controller wiring.
5. Adjust the process control relays for the process pressures that will be
used.
2.4 Install Pressure Relief Before you install the Controller, install appropriate pressure relief devices in
Devices the vacuum system.
Granville-Phillips does not supply pressure relief valves or rupture disks.
Suppliers of pressure relief valves and rupture disks are listed in the Thomas
Register under “Valves, Relief” and “Discs, Rupture.”
CAUTION
Operating the controller above 1000 Torr (1333
mbar, 133 kPa) true pressure could cause pressure
measurement error or product failure.
To avoid measurement error or product failure due to
overpressurization, install pressure relief valves or
rupture disks in the system if pressure exceeds 1000
Torr (1333 mbar, 133 kPa).
2.5 Mount the Controller To locate and orient the Controller, refer to Figure 2-3 and follow the
instructions below.
• For greatest accuracy and repeatability, locate the Controller in a stable,
room-temperature environment. Ambient temperature should never
exceed 40 °C (104 °F) operating, non-condensing, or 85 °C (185 °F)
non-operating.
• Provide adequate ventilation for the Controller to dissipate 6 Watts.
• Locate the Controller away from internal and external heat sources and in
an area where ambient temperature remains reasonably constant.
• Do not locate the Controller where it will be exposed to corrosive gases
such as mercury vapor or fluorine.
See Install the Convectron Gauge on page 18 for Convectron gauge
installation instructions.
To mount the controller in a panel, refer to Figure 2-5 and Figure 2-6, and
follow these steps:
• Panel opening dimensions are 92 mm x 45 mm (3.6 inches x 1.77 inch).
• Panel thickness is 3 mm (1/8 inch).
• Provide a minimum of 64 mm (2.5 inch) clearance behind the controller
to allow for cables.
1. Prepare the panel opening per the dimensions listed on Figure 2-3 and
the bullet points listed above.
2. Remove the Front Panel (bezel) as shown in Figure 2-5. Hold the
Controller in your hands and use your thumbs to push on the bezel. Push
the bottom of the bezel loose, then the top.
4. Use a Phillips head screwdriver to rotate the Pawl Screw to lock the
Controller to the panel. See Figure 2-6.
5. Replace the bezel by aligning it with the keys and push the top and the
bottom of the bezel to snap it into place.
2.6 Install the Convectron To install Convectron gauges, refer to Figure 2-7 and follow the instructions
Gauge below.
• Orient the Convectron gauge to prevent condensation of process vapors
on the internal surfaces through line-of-sight access to its interior. If vapor
condensation is likely, orient the port downward to help liquids drain out.
• For proper operation above about 1 Torr, install Convectron gauges with
the gauge axis horizontal.
• Do not locate the Convectron gauge near the pump, where gauge pressure
might be lower than normal vacuum pressure.
• Do not locate the gauge near a gas inlet or other source of contamination,
where inflow of gas or particulates causes atmospheric pressure to be
higher than system atmosphere.
• Do not locate the gauge where it will be subjected to vibration, which
causes convection cooling, resulting in inaccurate high pressure readings.
• Do not locate the gauge where it will subjected to extreme temperature
fluctuations. For greatest accuracy and repeatability the gauge should be
located in a stable room temperature environment.
Install Vacuum Do not use a compression mount/quick connect fitting for positive pressure
Chamber Fittings applications. The gauge may be forcefully ejected. The gauge port fits a
standard 1/2-inch compression/quick connect mounting such as an
Ultra-Torr® fitting.
WARNING
Failure to install appropriate pressure relief devices
for high-pressure applications can cause product
damage or personal injury.
For automatic backfilling and other applications in
which malfunction or normal process conditions can
cause high pressures to occur, install appropriate
pressure relief devices.
1/8 NPT Pipe Thread The 1/8 NPT pipe thread accommodates a standard 1/8 NPT female fitting.
1. Wrap the threads of the port to the vacuum chamber with Teflon® tape.
2. Tighten the gauge just enough to achieve a seal. Do NOT over tighten.
VCR Type Fitting 1. Remove the plastic or metal bead protector cap from the fitting.
2. If a gasket is used, place the gasket into the female nut.
3. Assemble the components and tighten them to finger–tight.
4. While holding a back-up wrench stationary, tighten the female nut 1/8
turn past finger-tight on 316 stainless steel or nickel gaskets, or 1/4 turn
past finger-tight on copper or aluminum gaskets.
KF Flange The KF mounting system requires O-rings and centering rings between
mating flanges.
1. Tighten the clamp wing nut to compress the mating flanges together.
2. Seal the O-ring.
ConFlat Flange To minimize the possibility of leaks with ConFlat flanges, use high strength
stainless steel bolts and a new, clean OFHC copper gasket. Avoid scratching
the seal surfaces. To avoid contamination, install metal gaskets.
1. Finger tighten all bolts.
2. Use a wrench to continue tightening 1/8 turn at a time in criss-cross
order (1, 4, 2, 5, 3, 6) until the flange faces make contact. Further tighten
each bolt about 1/16 turn.
Ground the • If the Convectron Gauge has a VCR type fitting or ConFlat flange, it will
Convectron Gauge be properly grounded via the vacuum chamber connection.
• If the Convectron Gauge has a KF flange or an NPT fitting, use a length of
#12 AWG braided copper wire which connects to the Convectron Gauge
and to the vacuum chamber ground connection. See Figure 3.
WARNING
Improper grounding could cause product failure or
personal injury.
• Follow ground network requirements for the facility.
• Maintain all exposed conductors at earth ground.
• Make sure the vacuum port to which the gauge is
mounted is properly grounded.
2.7 Connect the Wiring The 475 Controller has connectors for Convectron gauge cable, RS-232,
setpoints, analog output cable, and power supply wiring, as illustrated in
Figure 2-9 (shown with the optional RS-232 and setpoint connectors).
Chassis
ground
connection
• Connect a #12 AWG ground wire to the chassis ground connection on the
rear of the Controller and to a known Earth ground. Do NOT connect a
ground wire from the Controller directly to the vacuum chamber or system
ground.
WARNING
Improper grounding can cause product damage or
personal injury.
Follow ground network requirements for the facility.
• Maintain all exposed conductors at earth ground.
• Connect the power cord to a properly grounded
outlet.
• Make sure the vacuum port to which the gauge is
mounted is properly grounded.
• Connect the gauge envelope to a facility ground or
shield the envelope. If necessary, use a ground lug on
the flange bolt. Ground the gauge envelope by using
a metal hose clamp on the gauge connected by a #12
AWG (minimum size) copper wire to the grounded
vacuum chamber.
• Connect the Convectron gauge cable between the gauge and the
controller. See Figure 2-9.
• Connect the power supply by inserting the power cord with the locking
tab up. See Figure 2-10.
NOTE: The 475 Controller is internally limited to 28 Vdc maximum
and 1.4 A. Do not connect the input to high voltage.
Power supply wiring depends on the power supply voltage and the type of
mounting. There are two ways to supply power to the 475 Controller:
1. Use a CE-compliant power supply: 90 to 250 VAC input, 24 Vdc output,
with connection plugs to accommodate the local AC plug type (catalog
number 475008-1 through -4 -- See page 2 of this Instruction Manual).
2. User supplied power to the controller using a wire adapter and plug to
connect to a 12 to 24 Vdc supply voltage (Granville-Phillips part number
167820). If you use the wire adapter, the wires to be connected to the
user supplied power are marked on the end of the cable:
Outside: Supply ground for 12 to 24 Vdc power supply
Center: +12 to 24 Vdc power < 0.5 A @ 12 V (i.e. < 6 Watts) continuous
(Inrush limited to <1.4 A for <7 msec)
Colored End: Safety chassis ground.
Both options accommodate the same orientation and connection plug. The
locking tab mechanism is on the top side of the connector when you plug it
into the rear panel. See Figure 2-10.
Locking Tab
2.8 Connectors The following figures illustrate the connectors on the back of the 475
Controller.
2.9 Configure the Relays • To configure the setpoint relays for the process control option, see
for the Application page 53.
• To configure the setpoint relays using the RS-232 option, see PCE Relays
on page 66.
If the controller will measure the pressure of a gas other than N2 or air, you
must adjust relay setpoints for the process gas. The true pressure of a gas
other than N2 or air may be substantially different from the pressure that the
output indicates. For example, outputs might indicate a pressure of 10 Torr
(13.3 mbar, 1.33 kPa) for argon, although the true pressure of the argon is
250 Torr (333 mbar, 33.3 kPa). Such a substantial difference between
indicated pressure and true pressure can cause over pressurization resulting
in an explosion. See Using Gases Other than N2 or Air on page 38 and Gas
Species on page 32.
WARNING
Failure to use accurate pressure conversion data for
N2 or air to other gases can cause an explosion due to
overpressurization.
If the controller will measure any gas other than N2 or
air, before putting the controller into operation,
adjust relays for the process gas that will be used.
2.10 Requirements for If you are using the process control option, you must prepare for process
Process Control control operation before turning ON the controller. See Chapter 4 for
Option complete process control setup instructions.
CAUTION
Failure to check system setup configuration before
switching to automatic operation can cause errors.
NOTES:
3.1 Preparing for Before you prepare for process measurement, make sure:
Pressure • The controller was properly set up and installed per the instructions in
Measurement Chapter 2.
• The gas in your vacuum system is air or N2. If you are using other gases
you must follow the instructions in Using Gases Other than N2 or Air on
page 38 and Indicated vs. True Pressure for Gases Other Than N2 or Air
on page 39.
• You are reasonably familiar with the general theory of operation of
thermal conductivity gauges. See Convectron Gauge Theory of Operation
on page 37.
Vacuum Fluorescent
Display Screen
3.2 Button Overview • The POWER button is press ON, press OFF. In case of power failure, the
controller will restart if it was ON when power was interrupted.
• Use the BACK button to exit menus.
• Use the UP and DOWN buttons to make menu selections and change
parameter settings.
• Use the ENTER button to enter menus and to execute parameter changes.
3.3 Initial Power Up 1. Press the Power ON/OFF button (see Figure 3-1). The display screen will
illuminate.
2. Run the self diagnostics tests to allow the 475 Controller to perform a self
diagnostics test. See Diagnose beginning on page 27 to run the tests.
Figure 3-2 Series 475 Convectron Gauge Controller System Menu Flowchart
3.4 Menu Overview All functions, settings, and options can be accessed and displayed by using
the four buttons on the front panel of the controller. Some of the displayed
settings are for information only, and others can be changed and saved. Use
either the UP or DOWN button to scroll through the menu selections.
The five main menu selections are Calibrate, Configure, Diagnose, Keypad,
and Product Info. See Figure 3-2. Each of these menu selections and their
relevant sub-selections are explained in the following sections of this
chapter.
When using a PC and the RS-232 option, additional information is provided
in the Process Control Chapter and the RS-232 Chapter.
3.4.1 Product Product information allows the user to read the product revision and
Information installed options.
1. Press the UP or DOWN button to scroll to “Product Info” and press the
ENTER button.
2. Press the UP or DOWN button to browse the product information.
3. “Code Version” displays the software part number and revision.
4. “Setpoints” displays the number of relays.
5. “Serial Number” is the same as the label on the product.
6. “NIST Calibration” displays “Yes” if the gauge and controller have been
calibrated on NIST traceable instrumentation, or displays “No” if there’s
no NIST calibration or it has been voided. See NIST Traceable System
Calibration on page 49 for more detailed information.
7. “Serial Interface” displays if the RS-232 serial interface is installed.
8. Press the BACK button a few times or wait one minute to return to
pressure display.
3.4.2 Keypad The keypad consists of five momentary switches; one is used as a power
switch, four are used for user interaction with the display menu.
The keypad can be enabled or disabled.
Disabling the keypad prevents unwanted key presses (similar to the Series
375 lock switch). When disabled, any key press (EXCEPT the Power key)
causes a "keypad disabled" notification to be shown for two seconds. The
"current pressure screen" is shown by default.
1. Press the UP or DOWN button to scroll to “Keypad” and press the
ENTER button.
2. Press the UP or DOWN button to select “Enable” or “Disable” and press
the ENTER button.
3. Press the BACK button a few times or wait one minute to return to
pressure display.
4. To re-enable the keypad, enter the sequence Up, Down, Back, Enter
within five seconds.
3.4.3 Diagnose During the diagnostics “Test Measurement” function, pressure reporting is
suspended and the Convectron simulator is switched ON. (See Convectron
Gauge Simulator beginning on page 75.) For the "Auto Test”, the Convectron
simulator simulates five different equally-spaced Analog to Digital (A/D)
voltages across the whole range (0.317 to 5.635V). These voltages are
measured and compared by the external A/D and the internal
microcontroller A/D. The Convectron simulator is switched OFF, pressure
reporting resumed, and a pass/fail is reported to the user. See Chapter 6 for
more information on the diagnostics.
The same process is used for the "Manual Test", except the user can enter
either pressure or bridge voltage and pass/fail criteria is not determined by
the microcontroller.
During the Analog Output diagnostic function, pressure reporting is
suspended to the analog output, and the analog output is tested at discrete
points between 0 V and 10.5 V.
1. Press the UP or DOWN button to scroll to “Diagnose” and press the
ENTER button.
2. Press the UP or DOWN button to select “Auto Test”, “Meas. Circuit”, or
“Analog Output” and press the ENTER button.
• Auto Test All
Performs the “Auto Test” described above.
1. Press the ENTER button to allow the 475 Controller to automatically
perform a self diagnostics test.
• Test Measurement Circuit
The “Auto Test” mode automatically tests the Measurement Circuits. In the
“Manual Test” mode, you can enter a voltage signal for the Bridge Voltage,
or a pressure rating to simulate system pressure.
1. Press the UP or DOWN button to select “Auto Test” or “Manual Test”
and press the ENTER button.
2. In the “Auto Test” mode, press the ENTER button to allow the 475
Controller to perform the diagnostics check.
3. In the “Manual Test” mode, use the UP or DOWN button to select either
Bridge Voltage or “Pressure” and press the Enter button.
4. Press the UP or Down button to enter the desired voltage in the “Bridge
Voltage” mode, or the desired pressure in the “Pressure” mode.
• Test Analog Output
The “Auto Test” mode automatically tests the Analog Output Circuits. In the
“Manual Test” mode, you can enter a voltage to apply to the Analog Output
to simulate system pressure or for system setup.
1. Press the UP or DOWN button to select “Auto Test” or “Manual Test”
and press the ENTER button.
2. In the “Auto Test” mode, press the ENTER button to allow the 475
Controller to perform the diagnostics check.
3. In the “Manual Test” mode, press the UP or Down button to enter the
desired voltage to be output.
4. Press ENTER to perform the diagnostics check.
3.4.4 Calibrate When the Calibrate function is selected, the 475 Controller reads the current
pressure in the vacuum chamber and determines whether you can calibrate
at atmosphere or vacuum based on the current pressure.
See Calibration and NIST Traceable System Calibration on page 49 for more
detailed information.
1. Press the UP or DOWN button to scroll to “Calibrate” and press the
ENTER button.
Either “Calibrate Vacuum” or “Calibrate Atmosphere” will be shown
depending on the current reported pressure.
NOTE: “Invalid Pressure for Cal” will be displayed if the pressure is
out of range to perform the calibration.
• Calibrate Atmosphere
1. Press the UP or DOWN button to select the desired calibration setting
and press the ENTER button.
2. Press the BACK button a few times or wait one minute to return to
pressure display.
• Calibrate Vacuum
1. Press the UP or DOWN button to select the desired calibration setting
and press the ENTER button.
2. Press the BACK button a few times or wait one minute to return to
pressure display.
3.5 Configure The Configure menu item allows the user to view, select, and set the control
functions of the 475 Controller. See Figure 3-2.
3.5.1 Setpoint Two process control setpoints provide control of other vacuum system
Parameters equipment such as valves, pumps, heaters, alarms, and safety interlocking.
1. Press the UP or DOWN button to scroll to “Configure” and press the
ENTER button.
2. Press the UP or DOWN button to select “Setpoint 1” or “Setpoint 2” and
press the ENTER button.
3. Press the UP or DOWN button to select “Value”, “Hysteresis”,
“Polarity”, or “Relay” and press the ENTER button.
Value
1. The indicated setting will show in reverse video. Press the UP or DOWN
button to select the desired setpoint.
2. Press the ENTER button to save the selection.
3. Press the BACK button a few times or wait one minute to return to
pressure display.
Hysteresis
1. The indicated setting will show in reverse video. Press the UP or DOWN
button to select the desired “Hysteresis” percentage.
2. Press the ENTER button to save the selection.
3. Press the BACK button a few times or wait one minute to return to
pressure display.
Polarity
1. The indicated setpoint polarity setting will show in reverse video. Press
the UP or DOWN button to select “Normal” or “Reverse”.
2. Press the ENTER button to save the selection.
3. Press the BACK button a few times or wait one minute to return to
pressure display.
Relay
1. The indicated setpoint relay setting will show in reverse video. Press the
UP or DOWN button to select “Enabled” or “Disabled”.
2. Press the ENTER button to save the selection.
3. Press the BACK button a few times or wait one minute to return to
pressure display.
3.5.2 RS-232 The RS-232 interface permits data output to, and Convectron gauge control
Parameters by, a host computer. Output control is either by a command–response
mechanism or a hardwire control line between RTS and CTS. A variety of
baud rates and byte framing options are available. See Chapter 5 for detailed
information regarding the RS-232 parameters.
1. Press the UP or DOWN button to scroll to “Configure” and press the
ENTER button.
2. Press the UP or DOWN button to select “RS-232 Parameters” and press
the ENTER button.
3. Press the UP or DOWN button to select “Baud Rate”, “Data Format”, or
“Handshake” and press the ENTER button.
Baud Rate
1. The indicated setting will show in reverse video. Use the UP and
DOWN buttons to scroll to the desired Baud Rate setting.
2. Press the ENTER button to save the selection.
3. Press the BACK button a few times or wait one minute to return to
pressure display.
Data Format
1. The indicated setting will show in reverse video. Use the UP and
DOWN buttons to scroll to the desired Data Format setting.
2. Press the ENTER button to save the selection.
3. Press the BACK button a few times or wait one minute to return to
pressure display.
Handshake
1. The indicated setting will show in reverse video. Use the UP and
DOWN buttons to select “Enable” or “Disable”.
2. Press the ENTER button to save the selection.
3. Press the BACK button a few times or wait one minute to return to
pressure display.
See RS-232 Handshake on page 58 for more detailed information on the
Handshake function.
3.5.3 Analog Output The Analog Output produces a DC voltage at the output with a range of at
least 0 to 10.5 Vdc.
You can request a voltage value on the Analog Output so you can
calibrate/verify a system. (The Controller must be in the Diagnostic menu.)
You can also apply an offset to the Analog Output.
See Convectron Gauge Analog Output Signal on page 50 for more detailed
information.
1. Press the UP or DOWN button to select “Configure” and press the
ENTER button.
2. Press the UP or DOWN button to select “Analog Output” and press the
ENTER button.
3. Press the UP or DOWN button to select “Analog Format” or “Analog
Offset” and press the ENTER button.
Analog Format
1. The indicated setting will show in reverse video. Press the UP or DOWN
button to select the desired Analog Format voltage range.
2. Press the ENTER button to save the selection.
3. Press the BACK button a few times or wait one minute to return to
pressure display.
Analog Offset
1. The indicated setting will show in reverse video. Press the UP or DOWN
button to select the desired Analog voltage offset.
2. Press the ENTER button to save the selection.
3. Press the BACK button a few times or wait one minute to return to
pressure display.
3.5.4 Pressure Units The selected pressure unit of measure will be displayed for measured
pressure and setpoint pressure values.
1. Press the UP or DOWN button to select “Configure” and press the
ENTER button.
2. Press the UP or DOWN button to select “Pressure Units” and press the
ENTER button.
3. The indicated unit will show in reverse video. Press the UP or DOWN
button to select Torr, mbar, or Pa.
4. Press the ENTER button to save the unit selection.
5. Press the BACK button a few times or wait one minute to return to
pressure display.
3.5.5 Display Options The Display Options menu allows you to select the displayed pressure
format, setpoints, and the brightness of the display screen.
Pressure Format
The Display Format affects pressure notation, which can be set to scientific
notation or Torr/mTorr notation (units dependent).
• Scientific notation provides a consistent display width.
• Torr/mTorr format is similar to that of the Series 375 Controller.
1. Press the UP or DOWN button to select “Configure” and press the
ENTER button,
2. Press the UP or DOWN button to select “Display Options” and press the
ENTER button.
3. Press the UP or DOWN button to select “Pressure Format” and press the
ENTER button.
4. Press the UP or DOWN button to select “Torr/mTorr” or “Scientific” and
press the ENTER button to save the selected format.
5. Press the BACK button a few times or wait one minute to return to the
pressure display.
Show Setpoints
The pressure display may be set so it shows pressure only or shows pressure
and setpoint status. When pressure only is selected, the font is larger and can
be seen from a greater distance. When setpoint status is shown, status and
pressure will be shown. Setpoint status is indicated by a rectangle icon that
will be filled if the relay is energized or open if the relay is not energized. See
Figure 3-3.
1. Press the UP or DOWN button to select “Configure” and press the
ENTER button.
2. Press the UP or DOWN button to select “Display Options” and press the
ENTER button.
3. Press the UP or DOWN button to select “Show Setpoints” and press the
ENTER button.
4. Press the UP or DOWN button to change the setpoint display status to
“Yes” or “No”.
5. Press the ENTER button to save the show setpoints parameter.
6. Press the BACK button a few times or wait one minute to return to
pressure display.
Brightness
The display brightness (1, 2, or 3) can be adjusted to a preferred level. Setting
the display to a lower brightness will extend the life of the display. The
factory default setting is 3.
1. Press the UP or DOWN button to select “Configure” and press the
ENTER button.
2. Press the UP or DOWN button to select “Display Options” and press the
ENTER button.
3. Press the UP or DOWN button to select “Brightness” and press the
ENTER button.
4. Press the UP or DOWN button to change the brightness of the display.
5. Press the ENTER button to save the display brightness setting.
6. Press the BACK button a few times or wait one minute to return to
pressure display.
3.5.6 Gas Species The selected gas species will be displayed and can be changed to another
type of gas.
The controller is calibrated for N2 unless otherwise displayed on the front
panel for custom applications. When a gas other than N2 is selected, the
Indicated vs. True Pressure charts listed in Indicated vs. True Pressure for
Gases Other Than N2 or Air beginning on page 39 are not required.
The 475 controller uses a lookup table of bridge voltages and pressures to
convert the voltage given from the A/D to a pressure. Lookup tables exist for
N2 (default), Ar, He, CO2, and O2. A Factory-Specified (FS) lookup table may
also exist.
In addition, a Correction Factor (CF) can be applied when a gas other than
N2 is a constant multiplication factor (rather than a curve) of N2. See the
graphs in Indicated vs. True Pressure for Gases Other Than N2 or Air on
page 39. This is only accurate at low pressures and has a range of 0.1 to 1.5
in increments of 0.1. The CF gas setting can be selected and programmed by
using the Menu buttons on the front of the controller. See Correction Factor
Parameters on page 35.
At the time the gas species is changed, a pressure high-limit is changed so
that a warning is given of possible over-pressure conditions. If a correction
factor is entered, you can enter an upper limit.
An example process:
• Switch gas species from N2 to Ar.
• Pressure conversion switches to the Ar curve.
• The over-pressure error limit is changed to reflect Ar.
3.5.7 Pressure Pressure Filtering allows additional filtering of the pressure reading. You can
Filtering set the delay time in milliseconds for the 475 Controller to display a pressure
reading, and Enable or Disable the Low-Pass Filter. “Response Delay”
provides a delayed readout of the indicated pressure.
1. Press the UP or DOWN button to select “Configure” and press the
ENTER button.
2. Press the UP or DOWN button to select “Pressure Filtering” and press
the ENTER button.
3. Press the UP or DOWN button to select “Response Delay” or “LPF”
(Low-Pass Filter).
4. Press the ENTER button to open the selection.
Response Delay
1. The indicated unit will show in reverse video. Press the UP or DOWN
button to select the desired delay time.
2. Press the ENTER button to save the time selection.
3. Press the BACK button a few times or wait one minute to return to
pressure display.
3.5.8 Restore “Restore Configuration” allows the user to switch to any of the four saved
Configuration configurations. Four different configurations (one factory default and three
user-set configurations) can be programmed and saved. Each user setting
will include unique setpoint parameters, unit of measure, analog output
setting, computer interface parameters, atmosphere and vacuum
calibrations, gas species setting, and display options. Initial user settings are
programmed to the factory defaults.
1. Press the UP or DOWN button to select “Configure” and press the
ENTER button.
2. Press the UP or DOWN button to select “Restore Config.” and press the
ENTER button.
3. The indicated unit will show in reverse video. Press the UP or DOWN
button to select 1, 2, 3, or Defaults.
4. Press the ENTER button to save the selection.
5. Press the BACK button a few times or wait one minute to return to
pressure display.
3.5.9 Save “Save Configuration” allows the user to save up to three configurations in
Configuration addition to the factory default configuration. Three different user settings can
be programmed and saved. Each user setting will include unique setpoint
parameters, unit of measure, analog output setting, computer interface
parameters, atmosphere and vacuum calibrations, gas species setting, and
display options.
1. Press the UP or DOWN button to select “Configure” and press the
ENTER button.
2. Press the UP or DOWN button to select “Save Config.” and press the
ENTER button.
3. The indicated unit will show in reverse video. Press the UP or DOWN
button to select 1, 2, or 3.
4. Press the ENTER button to save the selection.
5. Press the BACK button a few times or wait one minute to return to
pressure display.
3.5.10 Gauge Sensor “Sensor Type” allows the user to set the type of sensor in the Convectron
Type gauge. The most common type of sensor used in the Convectron gauge is
Gold-plated Tungsten. However, a Platinum sensor is used for some
applications where chemically corrosive gases such as chlorine, fluorine, or
mercury vapor are used. Check the list of Convectron gauge catalog numbers
on page 4 of this manual to determine which type of sensor is in the
Convectron gauge on your system.
1. Press the UP or DOWN button to select “Configure” and press the
ENTER button.
2. Press the UP or DOWN button to select “Gauge Sensor Type” and press
the ENTER button.
3. The indicated unit will show in reverse video. Press the UP or DOWN
button to select Gold-Tungsten or Platinum.
4. Press the ENTER button to save the selection.
5. Press the BACK button a few times or wait one minute to return to
pressure display.
3.5.11 Correction The Correction Factor is a scaling of a pressure reading to a new reading. The
Factor Parameters Correction Factor (CF) can be applied when a gas other than N2 is a constant
multiplication factor (rather than a curve) of N2. See the graphs in Indicated
vs. True Pressure for Gases Other Than N2 or Air on page 39. This is only
accurate at low pressures and has a range of 0.1 to 1.5 in increments of 0.1.
1. Press the UP or DOWN button to select “Configure” and press the
ENTER button.
2. Press the UP or DOWN button to select “Gas Species” and press the
ENTER button.
3. Press the UP or DOWN button to select “Correction Factor” and press
the ENTER button.
4. Press the ENTER button again to highlight the current CF setting.
5. Press the UP or DOWN button to select the desired Correction Factor
(0.1 to 1.5) and press the ENTER button to save the new CF setting.
6. Press the BACK button a few times or wait one minute to return to
pressure display.
Correction Factors
The Correction Factor is a scaling of a pressure reading to a new reading.
1. Press the UP or DOWN button to select “CF”.
2. Press the ENTER button to open the “Correction Factors”. Press the
ENTER button to display the current Correction Factor.
3. Press the UP or DOWN button to select the desired Correction Factor
multiplier (0.1 to 1.5) and press the ENTER button to save the new
setting.
Maximum Pressure
When a gas species is changed, a pressure high-limit must be entered so a
warning is given of possible over-pressure conditions. If a correction factor
is entered, you can enter an upper limit.
1. Press the UP or DOWN button to select “Max Pressure”.
2. Press the ENTER button to open the “Max Pressure”. Press the ENTER
button to display the current Maximum Pressure setting.
3. Press the UP or DOWN button to select the desired Maximum Pressure
Setting (1 mTorr to 999 Torr) and press the ENTER button to save the new
setting.
3.6 Error Codes A known error produces an error code that is displayed to the user. More
than one error results in a rotation of errors on the display. An error is also
reported to the user through digital communications.
When there are errors, the pressure readout is readjusted to a smaller font.
ERR 01 CGBAD OPN SNSR The Convectron gauge is Reported pressure is 999T,
either unplugged or relays off
defective
ERR 09 NVRAM Not able to retrieve
information from
EEPROM
ERR 14 CABLE SNSR UNP The cable is either Reported pressure is 999T,
unplugged or defective relays off
ERR 15 ADBAD The A/D Converter is Reported pressure is 999T,
reporting an erroneous relays off
value
ERR 16 AOBAD The Analog Output is
reporting an erroneous
value
ERR 17 OVPRS SNSR OVP The maximum pressure Reported pressure is max
limit has been reached reported pressure for gas
species (999 Torr for N2)
ERR 18 FAC CRC-16 checksum Revert to the hardcoded
verification of factory values
settings failed
ERR 19 FS CRC-16 checksum Revert to the N2 curve
verification of "FS" curve
failed
3.7 Preparing For Convectron gauge pressure is indicated on the Controller front panel display.
Convectron Gauge Install pressure limiting devices calibrated to a level that the vacuum system
Operation can safely withstand. In addition, install pressure relief valves or rupture
disks that will release pressure at a level considerably below the maximum
safe pressure level of the system. Confirm that these safety devices are
properly installed before installing the controller.
In addition, make sure:
• The proper gas cylinders are installed,
• Gas cylinder valve positions are correct on manual systems, and
• The automation settings are correct on automated gas delivery
systems.
Vacuum gauges with compression fittings may be forcefully ejected if the
vacuum system is pressurized.
3.8 Convectron Gauge The Convectron gauge transducer is represented in Figure 3-4 as R1, R2, R3,
Theory of Operation and R4. These four resistances form the legs of a bridge circuit, with R1
designating the sensor wire of the transducer. R2 is a resistive network in the
gauge tube that compensates for changes in the ambient temperature. At
bridge null, R1=R2xR3/R4. If there are no changes in ambient temperature,
the value of R1 is a constant and the bridge is balanced.
The Convectron gauge operates like a standard Pirani gauge, which employs
the principle of a Wheatstone bridge to convert pressure to voltage, but uses
convection cooling to enable accurate pressure measurement, when
properly calibrated, from 10–4 to 1000 Torr. The sensing wire is an ultra-fine
strand of gold-plated tungsten or solid platinum.
As the vacuum system pressure is decreased, there are fewer molecules in
the system to conduct the heat away from the sensor wire causing the
temperature and resistance of R1 to increase. The increased resistance of R1
causes the bridge to unbalance and a voltage is developed across the null
terminals. The bridge control circuit senses the null voltage and decreases
the voltage across the bridge until the null voltage is again zero. When the
bridge voltage is decreased, the power dissipated in the sensor wire is
decreased causing the resistance of R1 to decrease to its previous value. The
opposite events happen for a pressure increase. The bridge voltage is a
nonlinear function of pressure.
3.10 Using Gases Other The 475 Convectron Gauge Controller calculates pressure by:
than N2 or Air • balancing the Convectron bridge,
• measuring the bridge voltage,
• applying any "user calibration" settings, and
• looking up the corresponding pressure in a bridge voltage vs. pressure
table.
Among other factors, the bridge voltage vs. pressure relationship is
dependent on the gas species in the system. The gas species, and therefore
the bridge voltage vs. pressure relationship, can be changed through the
front panel of the Controller or through the RS-232 interface.
See Gas Species on page 32 to select and use correction parameters when
using Ar, He, CO2, or O2.
3.10.1 Effects on User The 475 Controller has a different user calibration for each gas species (Ar,
Calibration He, CO2, or O2) except "CF" (which uses N2 calibration) and "FS" (where the
calibration is built into the lookup-table). Switching the gas species
automatically switches the user calibration. Resetting the calibration to
factory defaults only affects the gas species currently in use.
Calibrating for each gas species provides more accurate pressure readings.
3.10.2 Indicated vs. NOTE: Use the information in this section only if you are NOT using
True Pressure for the Calibrated Gas Species function of the 475 Controller. The 475
Gases Other Than N2 Controller uses lookup tables of bridge voltages and pressures to
or Air convert the voltage given from the Analog-to-Digital converter
(A/D) to a pressure reading. Factory-programmed lookup tables
exist for N2 (default), Ar, He, CO2, and O2.
WARNING
If accurate conversion data is not used, or is improperly
used, a potential overpressure explosion hazard can be
created under certain conditions. Using the N2
calibration to pressurize a vacuum system above about 1
Torr with certain other gases can cause dangerously
high pressures which may cause explosion of the system.
You must ensure that the atmosphere adjustments for the Convectron gauge
are correctly set. (See Atmosphere Calibration on page 48.)
Figure 3-5 through Figure 3-10 show the true pressure vs. indicated pressure
for 11 commonly used gases. Table 3-2 will help to locate the proper graph.
Note that 1 mbar = 100 Pa, so the mbar charts may be used for Pascal units
by multiplying the values on the axes by 100.
A useful interpretation of these curves is, for example, that at a true pressure
of 2 x 10–2 Torr for CH4 the heat loss from the sensor is the same as at a true
pressure of 3 x 10–2 for N2 (see Figure 3-5). The curves at higher pressure
vary widely from gas to gas because thermal losses at higher pressures are
greatly different for different gases.
If you must measure the pressure of gases other than N2 or air use Figure 3-5
through Figure 3-10 to determine the maximum safe indicated pressure for
the other gas as explained in the examples that follow.
Figure 3-6 Convectron Gauge Indicated vs. True Pressure Curve; .01 to 1000 Torr
Figure 3-7 Convectron Gauge Indicated vs. True Pressure Curve; .01 to 1000 Torr
Figure 3-8 Convectron Gauge Indicated vs. True Pressure Curve; 10 –4 to 10 –1 mbar
Figure 3-9 Convectron Gauge Indicated vs. True Pressure Curve; .01 to 1000 mbar
Figure 3-10 Convectron Gauge Indicated vs. True Pressure Curve; .01 to 1000 mbar
3.11 Calibration Each Convectron gauge is individually calibrated for N2. “Zero” adjustment
of the gauge should not be necessary unless readout accuracy is required
below 1 x 10–3 Torr or the gauge has been contaminated. Adjustment of the
atmospheric indication should not be necessary unless compensating for
long cables, variations in mounting orientation, or contamination.
The Convectron gauge has a stable, temperature compensated design. Each
controller is also calibrated to provide accurate readout of N2 pressure with
any Convectron gauge when the gauge is properly installed with the gauge
axis horizontal.
3.11.1 Calibration Calibration is possible only within certain pressure ranges. The ranges are
Ranges for Different gas specific as listed below.
Gas Species
3.11.2 Vacuum Evacuate the Convectron gauge to a pressure less than 100 mTorr. If the
Calibration calibration is for 0.0, evacuate to less than 1 x 10–5 Torr and allow system to
stabilize for 15 minutes,
1. Press the UP or DOWN button until “Calibrate” is displayed and press
the ENTER button. “Calibrate VAC 0.0” is displayed.
2. If “Invalid Pressure for CAL” or “Invalid Function NIST CAL” is
displayed, calibration will not be possible.
3. Press the ENTER button to calibrate at vacuum or press the UP or
DOWN button to calibrate at any pressure between 0.0 and 100 mTorr,
then press the ENTER button to calibrate.
3.11.3 Atmosphere Allow the pressure in the Convectron gauge to rise above the Calibration
Calibration Limit shown in Table 3-3. Read the local atmospheric pressure on an
accurate barometer.
1. Press the UP or DOWN button until “Calibrate” is displayed and press
the ENTER button. “Calibrate ATM 760” (actual reading) is displayed.
2. If “Invalid Pressure for CAL” or “Invalid Function NIST CAL” is
displayed, calibration will not be possible.
3. Press the UP or DOWN button to calibrate at any pressure between 400
and 999 Torr, then press the ENTER button to calibrate.
To reset VAC and ATM back to their original factory settings, turn OFF the
Controller and hold the ENTER button while turning ON power to the
controller. “Factory CAL” is displayed for approximately three seconds. The
controller will then resume normal power–on operation.
3.11.4 Convectron During a fast pumpdown from atmosphere, thermal effects will prevent the
Gauge Use Below 10-3 Convectron gauge from tracking pressure accurately below 10–3 Torr. After
Torr waiting about 15 minutes, indications in the 10–4 range will be valid and
response will be rapid. Zero adjustment at vacuum may be performed at this
time (or sooner if readings in the 10–4 range are not needed). In the 10–4 Torr
range, the indication is resolved to about 0.1 mTorr provided the instrument
has been carefully zeroed at vacuum. For accurate use in the 10–4 range,
zeroing should be repeated frequently.
3.11.5 NIST Brooks Automation offers a calibration service for the Series 475 Convectron
Traceable System gauge controller. A controller and Convectron gauge tube are calibrated as
Calibration a system, the built–in calibration functions of the controller are locked, and
a calibration certificate is provided to the customer.
NOTE: When using a 475 Controller that is NIST calibrated for a
specific gas, selecting any function to change the gas species or
calibration will cause the display panel to indicate INVALID.
3.12 Convectron Gauge A voltage output signal proportional to the common logarithm of the
Analog Output Signal pressure indication is provided on the rear panel of the controller via a
standard 1/8 inch miniature phone jack.
If graphed on loglinear axes, the output voltage is linear in proportion to the
log of pressure (see Figure 3-11). The analog output is 1 volt per decade of
pressure with a factory adjusted output of 0 volts at 1.0 x 10–4 Torr. An
alternate analog output format that has a built-in 1 Volt offset, which has
1 V to 8 V range, can be selected.
The voltage signal is smooth and continuous throughout all the decades of
pressure measurement. This format is useful for computerized data
acquisition because a simple equation (finding the common antilogarithm)
may be programmed to calculate pressure from the voltage output.
An output voltage of 10 V indicates the gauge is unplugged or faulty.
Also, a selectable non-linear (S-curve) signal (0 to 9 V) that is backwards
compatible with older Convectron gauge controllers is available.
In addition, a programmable offset of 0.1 V to 0.5V can be entered for the
analog output signal. The offset voltage signal can be selected and
programmed by using the Menu buttons on the front of the controller.
3.12.2 Optional In some applications a 0 V output is used to indicate that the controller is off.
Analog Output of To accommodate these situations a one volt offset is available as an
1 to 8 V alternative.
For this Alternate output format, a –0.0 indication produces 0.5 V output. A
10 V output means the gauge is unplugged or faulty.
If the output is adjusted to 1V at 10–4 Torr (10–2 Pa), the output equation for
1 to 8 V is:
V–5
P = 10 Torr
V–5
P = 10 mbar
V–3
P = 10 Pa
3.12.3 Optional In some applications a 0 to 9 V output similar to the Series 275 controller
Nonlinear Analog output is desirable. To accommodate these situations a third analog output
Output “S Curve” option is available.
A 10 V output means the gauge is unplugged or faulty.
3.13 Analog Output Mode 1. Press the UP or DOWN button and select “Setup Parameters” with the
Programming ENTER button.
2. Press the UP or DOWN button and select “Analog Out Mode” with the
ENTER button.
3. The current mode will show in reverse video. Press the UP or DOWN
button to select “I V/Decade, I–8V” or “I V/Decade, 0–7V” or “S Curve,
0–9V”.
4. Press the ENTER button to save the mode.
5. Press the BACK button a few times or wait one minute to return to
pressure display.
3.14 Process Control Programming the process control setpoints is explained in Chapter 4.
Setpoints & RS-232 Configuration of the RS-232 interface is explained in Chapter 5.
4.1 Process Control Setup Before putting the controller into operation, you must perform the following
procedures:
1. Use the “Product Info” menu item to identify the process control options
installed in your unit. (See Product Information on page 27.)
2. Install the controller in accordance with the instructions in Chapter 2.
3. Use Table 4-1 to record the proposed activation and deactivation
setpoints for each relay.
Chassis
Ground
Connector
Input/Output 2-Channel
Connector Process Control
Connector
4.2 Connecting Process The process control connector, located on the rear panel of the controller, is
Control Relays marked with letters identifying each pin. See Connectors on page 22.
A mating connector (Granville-Phillips part number 0167820) is supplied in
the hardware kit.
1. Using a drawing of the process control output connector and the circuit
schematics you have prepared, make a cable to connect the various
system components to be controlled. Clearly label each lead to help
prevent costly mistakes.
2. Connect the component end of the cable to the system component to be
controlled. This is done with a small screwdriver and screw–post
connections.
3. Plug the connector into the back of the 475 Controller.
4.3 Setpoint Display and 1. On the front panel of the 475 Controller, press the UP or DOWN button
Adjustment to scroll to “Configure” and press the ENTER button.
2. Press the UP or DOWN button to select “Setpoint 1” or “Setpoint 2” and
press the ENTER button.
3. Press the UP or DOWN button to select “Value”, “Hysteresis”,
“Polarity”, or “Relay” and press the ENTER button.
Value
1. The indicated setting will show in reverse video. Press the UP or DOWN
button to select the desired setpoint.
2. Press the ENTER button to save the selection.
3. Press the BACK button a few times or wait one minute to return to
pressure display.
Hysteresis
1. The indicated setting will show in reverse video. Press the UP or DOWN
button to select the desired “Hysteresis” percentage.
2. Press the ENTER button to save the selection.
3. Press the BACK button a few times or wait one minute to return to
pressure display.
Polarity
1. The indicated setpoint polarity setting will show in reverse video. Press
the UP or DOWN button to select “Normal” or “Reverse”.
2. Press the ENTER button to save the selection.
3. Press the BACK button a few times or wait one minute to return to
pressure display.
Relay
1. The indicated setpoint relay setting will show in reverse video. Press the
UP or DOWN button to select “Enabled” or “Disabled”.
2. Press the ENTER button to save the selection.
3. Press the BACK button a few times or wait one minute to return to
pressure display.
4.4 Process Control Tips Relay actuation occurs when the pressure reading is greater than the setpoint
for reverse polarity or less than the setpoint for normal polarity. A default
10% hysteresis is programmed into each setpoint for returning pressures.
Table 4-2 exemplifies this function using an assumed setpoint pressure. The
example also assumes that the polarity is set to activate the relay when
pressure falls below the setpoint.
4.5 Process Control Table 4-4 lists the factory default the settings for the process control relays.
Factory Default
Settings
4.6 Process Control Relay The 475 Controller is shipped from the factory with the trip point relays set
Trip Points to a pressure of 1.00E-4. The relays need to be adjusted for your application.
The trip point may be set from 1 x 10–4 to 100. The pressure measurement
unit restricts the trip points at the extremes of the measurement range. A
built-in default hysteresis of 10% prevents oscillation around the trip point.
In the default mode, relays activate with decreasing pressure and deactivate
at a 10% higher pressure than the activation pressure, as illustrated in Figure
4-2.
You can reverse relay polarity, so relays activate with increasing pressure
and deactivate at a lower pressure than the activation pressure.
5.1 RS-232 Theory of The RS-232 interface option permits data output to, and Convectron gauge
Operation for the 475 control by, a host computer. Output control is by a command–response
Controller mechanism and a hardwire control line between RTS (Request To Send) and
CTS (Clear To Send). If you have this controller option, configure it to your
system requirements as directed in this chapter.
NOTE: CTS and RTS are used only if handshaking is enabled.
The DSR (Data Set Ready) line is set ‘true’ upon power up to indicate it is
on-line and is ready to receive data. When the controller receives a start bit
on the received data line, it will input and buffer a character. The controller
will continue to receive and buffer characters until the terminator (carriage
return) is received.
Upon receiving the terminator, the controller will assert the RTS line as a
holdoff to prevent the host computer from attempting to transmit further data
until the message just received has been decoded and a reply has been
output.
During output of the reply, the incoming handshake line CTS is tested prior
to beginning transmission of each character. The controller will wait until
CTS is true before beginning transmission of a character, and will not test
them again until ready to begin transmitting the next character.
After transmitting the terminator, the controller will negate RTS and wait for
the next incoming message.
Figure 5-1 Control Unit Rear Panel Showing RS-232 (I/O Output) Connector
Controller PC Cable
Connector Connector Pinout
DE9S Signal at Signal at 475
DB9S DE9P (DB9P) Computer Controller
2 2 2 (3) RXD TXD
3 3 3 (2) TXD RXD
5 5 5 (1)* Signal Ground Signal Ground
8 8 8 (5) CTS RTS
7 7 7 (4) RTS CTS
6 6 6 (6) DSR DSR
* Use metal connector shell to provide shield wire ground.
5.3 RS-232 Handshake Normal handshake control can be accomplished using the
command–response mechanism, and a hard-wired handshake by using the
RTS/CTS connection as outlined in Table 5-3. This RTS/CTS connection has
to be enabled via a separate function.
5.4 Command–Response The speed of the response from the controller varies depending on the type
Timing of command being carried out. all commands will cause a response to begin
in less than 100 msec. Depending on the selected baud rate, there will be an
additional delay as noted in Table 5-5 for the 9–character response from the
controller. The response length will vary from nine characters (see the
specific command).
5.5 Preparing the RS-232 Check the user's manual for the host computer to be sure the protocol used
Computer Interface is compatible with that established via the configuration of the RS-232
controller.
Communication with the control unit is via ASCII strings. A message consists
of a command and a command modifier, followed by a terminator. The
message may contain leading spaces, and the command and modifier may
optionally be separated by spaces or commas. No spaces may appear within
the command or the modifier, only between them.
The terminator expected by the control unit is an ASCII carriage return, the
ODhex character, denoted in this instruction manual by the ↵ symbol. The
line feed is optional, and messages terminated with only the carriage return
will be accepted. Note that the LF (line feed) terminator may be appended
automatically by the host computer's interface software to the message string
supplied by the user. This line feed will be ignored.
If extra characters are found in the message after it has been successfully
interpreted but before the terminator, they will be ignored. Characters can
be upper– or lower–case. All messages to the controller will receive a reply,
consisting of an ASCII string of upper–case letters terminated with ↵.
Pressures will be returned in the format X.XXE±XX.
5.6 RS-232 Command A command from the host must include data and a terminator
Syntax (data)(terminator). The terminator is an ASCII carriage return, the ODhex
character, denoted here by the ↵ symbol.
The data field is explained in the command descriptions. All alpha
characters can be upper or lower case.
All data fields responses will contain up to 9 upper case alphanumeric
characters. A response of “SYNTX ERR” is caused by an incorrect character
string from the host. A response of “F P ERR” is displayed when a function is
set via the front panel on the 475 Controller (See Chapter 3).
RST to
Command Description Page Change
AO Set analog output mode 62
AOO Get/Set analog output offset 62
CA Get calibration status 62
DT Perform diagnostic tests 63
FAC Set calibration to factory defaults 63
GS Modify gas species settings 64
HA Set handshaking 64 Yes
KP Enable/Disable keypad 65
LPF Enable/Disable LPF (Low-Pass Filter) 65
PC Get or set process control setpoint value 65
PCE Enable/Disable relays 66
PCH Get or set process control setpoint hysteresis 66
PCP Get or set process control setpoint polarity 66
PD Modify programmable delay settings 67
RD Read the pressure 67
RST Reset the controller 68
RU Read units of pressure 68
SB Set the baud rate 68 Yes
SN Get the serial number 68
SPE Set parity and data bits (Even) 69 Yes
SPN Set parity and data bits (None) 69 Yes
SPO Set parity and data bits (Odd) 69 Yes
ST Get/Set Convectron gauge sensor type 69
SU Set the units of pressure 69
TS Set span 70
TZ Set zero 70
UC Restore/save user configuration. 71
VC Void NIST calibration 71
VER Read code version 71
RS-232 Troubleshooting 72
RS-232 Error Messages 72
DT Diagnostics Test Definition: Perform diagnostics tests on A/D and analog out.
Modifiers: C, CS, CE, CP, CV, CD
A, A#, AD
Response: See the examples, below.
(NOTE: F P ERR↵ = Diagnostics are being
performed via the front panel.)
Examples:
Command
Root From Host Computer From 475 Controller
DT DT↵ PASS↵ Run auto test on A/D and
analog output.
FAIL↵ Both functions failed.
AD FAIL↵ A/D failed.
AO FAIL↵ Analog output failed.
DTC DTC↵ PASS↵ Run auto test on A/D.
FAIL↵ A/D failed.
DTCS↵ 1↵ Simulator enabled.
0↵ Simulator disabled.
DTCD↵ PROGM OK↵ Disable simulator.
DTCE↵ PROGM OK↵ Enable simulator.
DTCP1.00E-3↵ PROGM OK↵ Set simulator pressure.
DTCV5.534↵ PROGM OK↵ Set simulator bridge
voltage.
DTA DTA↵ PASS↵ Run auto test on analog output.
FAIL↵ Analog output test failed.
DTA5.00↵ PROGM OK↵ Set analog output voltage.
DTAD↵ PROGM OK↵ Resume pressure
reporting to analog output.
GS Gas Species Definition: Get/Set gas species commands. See Gas Species on
page 32 for a detailed explanation.
Modifiers: N2 (Nitrogen), AR (Argon), HE (Helium), CO2
(Carbon Dioxide), O2 (Oxygen) FS (Factory
Specified), CF (Correction Factor).
Response: See the examples, below.
(NOTE: F P ERR↵ = The gas species is being set
via the front panel.)
Examples:
Command
Root From Host Computer From 475 Controller
GS GS↵ N2↵ AR↵ HE↵, CO2↵, O2↵, FS↵, or
CF↵ (FS = Factory Specified curve /
CF = Correction Factor)
GSN2↵ (or AR, HE, PROGM OK↵ Set the gas species to the
CO2, O2, FS, CF) gas being used.
INVALID↵ The system is NIST
calibrated.
GSFS↵ INVALID↵ The data in memory is not
valid or the system is NIST calibrated.
GSCF↵ 1.5↵ The correction factor being
used. (CF of 1.5 in this example)
GSCF 1.0↵ PROGM OK↵ Set the gas species to a
new correction factor (0.1 to 1.5 in 0.1
increments) (this example: 1.0 CF).
GSCF 1.0, 200↵ PROGM OK↵ Set the gas species to a
new correction factor, and maximum
pressure (0.1 to 1.5 CF and 1mTorr to
999 Torr) (this example: 1.0 CF and
200 Torr).
GSCFP↵ 1.00E+2↵ Get current max pressure
setting (this example: 100 Torr).
GSCFP 150↵ PROGM OK↵ Set the gas species to the
correction factor, and maximum
pressure (1mTorr to 999 Torr) (this
example: 150 Torr).
LPF Low-Pass Filter Definition: Enables another order of low-pass filtering for the
pressure reading.
Modifiers: 1 or 0 (1 = enable, 0 = disable).
Response: PROGM OK↵
Other possible responses:
F P ERR↵ The Low-Pass Filter is being set via the front panel.
Example:
From host computer: LPF1↵ Enable Low-Pass Filter (LPF0↵ = Disable)
From 475 controller: PROGM OK↵
PCH Process Control Definition: Set the process control setpoint hysteresis.
Setpoint Modifiers: 1, or 2 (for setpoint 1 or 2).
Hysteresis
Response: PROGM OK↵
Other possible responses:
F P ERR↵ The hysteresis is being set via the front panel.
RANGE ERR↵ The value entered is <5 or >1000.
Examples:
From computer: PCH1↵ Get setpoint 1 hysteresis.
From 475 controller: 200↵ Setpoint 1 hysteresis is 200%
From host computer: PCH2 100↵ Set setpoint 2 hysteresis.
From 475 controller: PROGM OK↵ The setpoint hysteresis is 100%.
PCP Set Relay Polarity Definition: Get/Set the polarity of the relay activation (factory
default is –).
(–) relay activation = < the current pressure setting.
(+) relay activation = > the current pressure setting.
Modifiers: 1 or 2; + or –
Response: PROGM OK↵
Examples:
From host computer: PCP1↵ Get polarity setting for Relay 1.
From 475 controller: POS POL↵ or NEG POL↵
From host computer: PCP1 +↵ Set polarity to +
From 475 controller: PROGM OK↵
If the PCP command is sent while the setpoints are being changed by the 475
controller, the command is disregarded and the response is F P ERR. The
controller setting has priority over the PCP command to change the
setpoints. (See Setpoint Parameters on page 29.)
SB Set Baud Rate Definition: Set baud rate. (Factory default is 19200)
Modifiers: 1200, 2400, 4800, 9600, 19200, 38400.
Response: PROGM OK↵
Example:
From host computer: SB19200↵
From 475 controller: PROGM OK↵
The baud rate needs to be set at a valid rate, i.e., 1200, 2400, 4800, 9600,
19200, 38400. If the rate is set to an odd value, for example 2234, the
controller will stay at the present rate and respond with SYNTX ERR.
See Command–Response Timing on page 59.
The controller will continue to operate at the old baud rate setting until
power is cycled or the RST command is sent.
SN Serial Number Definition: Get the serial number of the 475 Controller.
Modifiers: None.
Response: 475A1234↵
Example:
From host computer: SN↵
From 475 controller: 475A1234↵
The serial number can be up to 16 characters long. Leading zeros are
trimmed.
SPN Set Parity to 8 Definition: Set bits/parity to 8 bits/none, 1 stop bit. (Factory
Bits/No Parity default)
Check Modifiers: None.
Response: PROGM OK↵
Example:
From host computer: SPN↵
From 475 controller: PROGM OK↵
To enable changes after sending the SPN command, cycle power or send the
RST command.
• If the controller is system calibrated, the response for this command will
be INVALID (see NIST Traceable System Calibration on page 49).
5.7 RS-232 Because the RS-232 standard is found in various configurations, the first thing
Troubleshooting to do if trouble arises is check the following configuration options.
1. Check the RS-232 setting via the front panel of the 475 Controller.
Be sure the baud rate, character format and framing, and interface protocol
are matched to the requirements of your host computer or terminal. Note
that there may be several mismatched parameters. Check the handshaking
to verify that the host computer and the 475 Controller settings match.
2. Check the interface wiring.
The pin designations for the RS-232 connector are shown in RS-232
Connector Pin Assignments on page 58. Note that the “received” and
“transmitted” data lines are defined as seen by the controller. Many
companies supply “null modems” or switch boxes for the purpose of
re–configuring the control lines for particular applications. A standard 9-pin
extension cable with a gender changer will work for many applications.
3. Check the command syntax.
Be sure the strings you send to the controller are in accordance with the
syntax defined in RS-232 Command Syntax on page 61.
5.7.1 RS-232 Error If an error is found in the incoming message, the following messages will be returned
Messages in place of the normal response.
No Response or garbled output
• Baud rate incorrect
• Character length incorrect or stop bit(s) incorrect
• Bad cable or connection
• Command does not include ODhex (↵) terminator character
OVERRUN ERROR
Returned if the incoming message overflows the controller's buffer. This may indicate
a flaw in the host software.
PARITY ERROR
Returned if the parity of a byte in the incoming message does not match that
programmed by the RS-232 setting in the 475 Controller.
SYNTAX ERROR
Returned if the message fails to parse as a valid controller command.
F P ERROR
Returned if a function is being controlled via the front panel inputs on the 475
Controller.
INVALID
Function is not valid or possible at this time.
The 475 has diagnostic functions to help determine if critical areas are
operating correctly. Some diagnostic functions are continuously running and
some require user interaction.
The Analog/Digital Converter (A/D) and the Analog Output are monitored
continuously for errors.
6.1 Continuous The External A/D and the Analog Output are both monitored by the A/D
Diagnostics on-board the micro controller automatically. Discrepancies are reported to
the user through the errors "ADBAD" and "AOBAD".
6.2 Diagnostics Requiring User-interactive diagnostics can be accessed through the front panel or the
User Interaction RS-232 interface.
Auto
Runs the Analog Output through a voltage range and verifies the voltages are
being met.
Example:
The pressure reported by the Analog Output is significantly different than the
pressure reported by the display. With the Analog Output cable attached, the
auto test reports a "FAIL". With the Analog Output cable disconnected, the
auto test reports a "PASS". The problem is most likely external to the 475
Controller.
Manual
Allows the user to set the voltage to a specific voltage.
Example:
The Analog Output cable to a DMM is causing a small voltage drop because
it is exceptionally long. Setting the manual test to 7V, the DMM reads 6.8V.
A 0.2V offset can now be added to the Analog Output.
6.2.2 Measurement
Circuits
Auto
Uses the Convectron Simulator to check the External A/D and Bridge
Amplifier through their ranges.
Example:
With the system at atmosphere, the controller is showing a "CABLE" error.
The auto test reports a "FAIL" - the problem is most likely with the controller
and not the cable or gauge.
Manual
Uses the Convectron Simulator to set a bridge voltage or a pressure
Example:
When the Analog Output of the controller gets below a certain voltage
(corresponds to a pressure), an external process is started. The vacuum
system is fairly large, requiring a long pump-down time.
The Convectron Simulator is used to set (simulate) the pressure below the
threshold to see if the Controller is working and to see if the external process
is started. This can be done without waiting to pump-down the system.
6.3 Convectron Gauge The 475 has an in-circuit Convectron Gauge Simulator that can be used for
Simulator self-diagnostics or system setup. The simulator is controlled by a
PWM-controlled voltage source similar to the Analog Output. It is calibrated
in the same manner as the Analog Output. Changing the voltage of the
simulator forces the Bridge Amplifier to change the voltage across a resistor
network - effectively simulating a Series 275 gauge. The Convectron
simulator can be operated from the front panel on the 475 Controller, or
through the RS-232 interface. “Test Mode” is displayed across the bottom of
the front panel display screen when the Convectron Simulator is enabled.
Access to the Simulator via the Controller front panel is by entering the
Diagnose functions. See the 475 Controller Menu Flowchart on page 26 in
the Operation Chapter and the Diagnostics Menu on page 73.
Two relays and an analog switch are used to switch the simulator in and out
of the Bridge Amplifier network.
NOTE: The Convectron Gauge Theory of Operation is explained in
Section 3.8 on page 37.
6.3.1 Simulate a The Test and measurement circuit can be used to test and troubleshoot the
Process Operation 475 process control outputs prior to full vacuum chamber operation. The
Prior to Full System 475 Controller can be put in the manual mode and simulated pressures
Integration entered, causing the process control channels to change state.
During the initial setup of an Analog input channel for the System Process
Controller for system process control, it may be helpful to calibrate the
process voltage input to the pressure displayed on the 475 Controller. The
display and analog outputs can be set to a specific pressure, and the system
process controller pressure input calibrated to match the pressure display of
the 475 Controller.
The voltage displayed during the simulation mode is the bridge voltage of the
Convectron gauge and not the analog output voltage from the 475
Controller. To set the 475 Controller output voltage to a specific value, see
the section on Analog Output Test.
If, during normal operation of a process, a non-functioning valve or lockout
has locked the system operation, the Convectron Simulator can be used to
override the non-functioning system component.
6.3.2 Analog Output The Analog output voltage of the 475 Controller can be set to a specific value
Tests for setting system calibration points. For instance, to calibrate the vacuum
system process controller at 10 V, set the analog output voltage of the 475
Controller to 10V and calibrate the system process controller to display 10 V.
6.3.3 Controller The voltage measurement circuit of the 475 Controller can be verified on a
Calibration yearly basis to assure the unit remains properly calibrated. The output of the
Verification Simulated Measurement Circuit can be measured using an external
voltmeter on pins 1 and 9 of the Convectron gauge 9 pin D connector on the
back of the Controller. (See Figure 2-12 on page 22.) Measurement of this
simulated bridge voltage against the pressure displayed on the front panel is
a check of the Controller's stability. This test verifies ONLY the factory
calibration - Not a user applied calibration.
Vacuum calibration services are available through Granville Phillips for
validating the accuracy of the Convectron gauge and measurement system.
Contact Customer Service for additional details.
7.2 Service Guidelines Because the 475 Controller contains static–sensitive electronic parts, the
following precautions must be followed when troubleshooting:
• Use a grounded, conductive work surface. Wear a high impedance
ground strap for personal protection.
• Use conductive or static dissipative envelopes to store or ship static
sensitive devices or printed circuit boards.
• Do not operate the controller with static sensitive devices or other
components removed from the controller.
• Do not handle static sensitive devices more than absolutely necessary,
and only when wearing a ground strap.
• Do not use an ohmmeter for troubleshooting MOS circuits. Rely on
voltage measurements.
• Use a grounded, electrostatic discharge safe soldering iron.
This controller is designed and tested to offer reasonably safe service
provided it is installed, operated, and serviced in strict accordance with
these safety instructions.
7.3 Damage Requiring Turn OFF power to the controller and refer servicing to qualified service
Service personnel under the following conditions:
• If any liquid has been spilled onto, or objects have fallen into, the
controller.
• If a circuit board is faulty.
• If the Convectron gauge sensing wire is open or the gauge is
contaminated.
• If the controller has been exposed to moisture.
• If the controller does not operate normally even if you follow the operating
instructions. Adjust only those controls that are explained in this
instruction manual. Improper adjustment of other controls may result in
damage and will often require extensive work by a qualified technician to
restore the controller to its normal operation.
• If the controller has been dropped or the enclosure has been damaged.
• If the controller exhibits a distinct change in performance.
WARNING
Substitution or modifying parts can result in product
damage or personal injury due to electrical shock or
fire.
• Install only those replacement parts that are specified
by Granville−Phillips.
• Do not install substitute parts or perform any
unauthorized modification to the controller.
• Do not use the controller if unauthorized
modifications have been made.
WARNING
Failure to perform a safety check after the controller
has been repaired can result in product damage or
personal injury due to electrical shock or fire.
If the controller has been repaired, before putting it
back into operation, make sure qualified service
personnel perform a safety check.
7.4 Error Codes and Table 7-1 lists failure symptoms and error codes, possible causes, and
Possible Solutions possible solutions.
Table 7-1 Failure Symptoms or Error Codes, Possible Causes, and Possible Solutions
Table 7-1 Failure Symptoms or Error Codes, Possible Causes, and Possible Solutions
7.5 RS-232 See RS-232 Troubleshooting on page 72 in the chapter for the RS-232
Troubleshooting interface.
7.6 Convectron Gauge The small diameter sensor wire can be damaged by even small voltages. Do
Test Procedure not perform electrical continuity tests with instruments applying in excess of
0.1 V when the gauge is at vacuum, or 2 V when at atmospheric pressure.
The Convectron gauge should show the resistances listed in Figure 7-1 (pin
numbers are embossed on the gauge cable connector).
• Pins 1 to 2: 18 to 23 ohms
• Pins 2 to 3: 50 to 60 ohms
• Pins 1 to 5: 180 to 185 ohms
If the resistance from pins 1 to 2 reads about 800 ohms,
the sensor wire in the gauge is broken. Replace the
Convectron gauge.
Note: If the resistance values shown here are
correct, but you still think the gauge is not
reading correctly, the gold plating on the
tungsten sensor wire may be eroded and the
gauge will have to be replaced.
7.7 Cleaning When the small sensor wire in the Convectron gauge is contaminated with
Contaminated oil or other films, its emissivity or its diameter may be appreciably altered
Convectron Gauges and a change of calibration will result.
Baking to clean the gauge:
The Convectron gauge may be baked to 150 °C nonoperating while under
vacuum with the cable disconnected. All materials used in the Convectron
gauge are corrosion resistant, and bakeable to 150 °C.
Chemically cleaning the gauge:
Cleaning with trichloroethylene, perchloroethylene, toluene, or acetone is
possible but it must be done very carefully to not damage the sensor wire.
WARNING
Use of flammable solvents near open flame or
energized electrical equipment can cause an explosion
or fire.
To avoid product damage or personal injury due to
explosion or fire, use flammable solvents such as
acetone and toluene only in a well–ventilated area
that exhausts to the outdoors. Do not use such
solvents near an open flame or energized electrical
equipment.
Exposure to fumes from solvents in an improperly
ventilated area can cause personal injury.
To avoid personal injury from inhaling fumes from
solvents such as trichloroethylene,
perchloroethylene, toluene, and acetone, use these
solvents only in a well–ventilated area that exhausts
to the outdoors.
Hold the gauge with the main body horizontal and the port projecting
upward at an angle of 45 degrees. Slowly fill it with solvent using a standard
wash bottle with the spout inserted in the port to the point where it touches
the screen. Let the solvent stand in the gauge for at least ten minutes. Do not
shake the gauge. Shaking the gauge with liquid inside can damage the sensor
wire. To drain the gauge, position it horizontally with the port facing
downward. Slightly warming the gauge will help dry the gauge. Allow the
gauge to dry overnight with the port vertically downward and uncapped.
Before re–installing the gauge on the system, be certain no solvent odor
remains.
7.8 Reset the Factory Follow the procedure below to return the controller to its factory default
Defaults settings:
To reset VAC and ATM back to their original factory settings, turn OFF the
Controller and hold the ENTER button while turning ON power to the
controller. “Restore Factory Calibration” is displayed for approximately three
seconds. The controller will then resume normal power–on operation.
7.9 Returning a Damaged If the Series 475 Convectron Gauge Controller must be returned to the
Controller factory for service, request a Return Authorization (RA) from Brooks
Automation / Granville-Phillips. Do not return products without first
obtaining an RA. In some cases a hazardous materials document may be
required. The Brooks Automation / Granville-Phillips Customer Service
Representative will advise you if the hazardous materials document is
required.
When returning equipment to Brooks Automation / Granville-Phillips, be
sure to package the products to prevent shipping damage. Circuit boards and
modules separated from the controller chassis must be handled using proper
anti-static protection methods and must be packaged in anti-static
packaging. Brooks Automation / Granville-Phillips will supply return
packaging materials at no charge upon request. Shipping damage on
returned products as a result of inadequate packaging is the Buyer's
responsibility.
To obtain a Return Authorization (RA) number, contact Granville-Phillips
Customer Service at:
• Phone +1-303-652-4400 or +1-800-776-6543, 8:00 AM to 5:00 PM
Mountain Time Zone weekdays, excluding holidays within the USA.
• Phone +1-800-367-GUTS (+1-800-367-4887) 24 hours per day, seven
days per week within the USA.
• Email [email protected]
7.10 Specifications
Table 7-2 Specifications for the Series 475 Convectron Controller and 275 Convectron Gauges
Measurement Range for N2 / Air 1,2 See notes 1 and 2, below
1. Measurements will change with different gases and mixtures. Correction parameters
must be used for gases other than N2 or Air.
2. Do NOT use Convectron gauges with flammable or explosive gases.
3. The 24 Vdc input power must be supplied from a power supply certified to IEC
Standard with a safety extra low voltage certified output.
NOTES:
A D
Analog Output Damage Requiring Service 11, 77
From Convectron Gauge 50 Default Settings 82
Scaling 52 Diagnostics 73
How to 27
B Display
Before You Begin Setpoints 54
Caution and Warning Statements 9
Customer Service 11 E
Damage Requiring Service 11 Error Codes
Reading and Following Instructions 9 Controller 36
Button Overview 25 Troubleshooting 79
C F
Calibrate Factory Defaults
How To 28 Controller 14
Calibration Figures
Atmosphere 48 vacuum chamber ground connections 20
NIST Traceable 49 Flowchart
Preparing for Operation 48 Menu 26
Vacuum 48
Caution and Warning Statements 9 G
Chapters Gases
Installation 13 Other than N2 or Air 38
Preparing for Operation 25
Process Control 53 I
RS-232 Interface 57 Initial Power Up 25
Safety Instructions 9 Installation
Service and Maintenance 73, 77 Configure the Relays 23
Command Syntax Connect the Wiring 20
RS-232 61 Convectron Gauge 18
Command-Response Timing Mount the Controller 16
RS-232 59 Pre-Installation Considerations 15
Controller Pressure Relief Devices 16
Error Codes 36 Requirements for Process Control Option 23
Factory Defaults 14 System Components 13
Specifications 83 Vacuum Chamber Fittings 19
Convectron Gauge
Analog Output Signal 50 M
Cleaning 81 Menu
Installation 18 Flowchart 26
Preparing for Operation 37 Overview 26
Simulator 75
Specifications 83 O
Test Procedure 81 Overview
Theory of Operation 37 buttons 25
Customer Service 11, 77
P System Components
Power Up Installation 13
Initial 25 System Menu
Preparing for Operation Flowchart 26
Analog Output Scale 52
Button Overview 25 T
Calibration 48 Theory of Operation
Convectron Gauge 37 Convectron Gauge 37
Convectron Gauge Analog Output 50 Convectron Gauge Simulator 75
Pressure Measurement 25 RS-232 57
Preparing RS-232 60 Troubleshooting
Pressure Relief Devices 16 Error Codes 79
Process Control RS-232 72, 80
Connecting Relays 54
Requirements 23 U
Setpoint Display and Adjustment 54 User Commands
Settings 55 RS-232 61
Setup 53
W
R Wiring
Reading and Following Instructions 9 RS-232 57
Relays
Configuring for Application 23
Connecting 54
Setpoint Display and Adjustment 54
Returning a Damaged Controller 82
RS-232
Command Syntax 61
Command-Response Timing 59
Handshake 58
Preparing 60
Reset to Factory Defaults 63
Theory of Operation 57
Troubleshooting 72, 80
User Commands, List of 61
Wiring 57
S
Service and Maintenance
Convectron Gauge Test Procedure 81
Customer Service 77
Damage Requiring Service 77
Factory Default Settings 82
Returning a Damaged Controller 82
Service Guidelines 77
Service Guidelines 77
Settings
Factory Default 82
Settings for Process Control 55
Simulator
Convectron Gauge 75
Specifications
Controller 83
Convectron Gauge 83
Instruction Manual
Instruction manual part number 475101
Revision A - November 2009