ECE413/ECE514

Introduction to VLSI

VLSI Interconnects
20 SEP 2023

ECE413 Introduction to VLSI Jirjees Matti Interconnect Fall 2023

EE141
 Before We Begin…

ECE413 Introduction to VLSI Jirjees Matti Interconnect Fall 2023

EE141
 The Wire

transmitters receivers

schematics physical

ECE413 Introduction to VLSI Jirjees Matti Interconnect

3 Fall 2023
EE141
 Wire Models

All-inclusive model Capacitance-only

ECE413 Introduction to VLSI Jirjees Matti Interconnect

4 Fall 2023
EE141
 Impact of Interconnect Parasitics

q Interconnect parasitics
§ reduce reliability
§ affect performance and power consumption
q Classes of parasitics
§ Capacitive
§ Resistive
§ Inductive

ECE413 Introduction to VLSI Jirjees Matti Interconnect

5 Fall 2023
EE141
 INTERCONNECT
CAPACITANCE

ECE413 Introduction to VLSI Jirjees Matti Interconnect

6 Fall 2023
EE141
Capacitance of Wire Interconnect
VDD VDD

M2
Cdb2 Cg4 M4
Cgd12
Vin Vout Vout2

Cdb1 Cw Cg3
M1 M3
Interconnect

Fanout
Vin Vout
Simplified
Model CL

ECE413 Introduction to VLSI Jirjees Matti Interconnect

7 Fall 2023
EE141
 Interconnect Layout

ECE413 Introduction to VLSI Jirjees Matti Interconnect Fall 2023

EE141
Capacitance: The Parallel Plate Model
Current flow

W Electrical-field lines

tdi Dielectric

Substrate

e di S 1
cint = WL SCwire = =
t di S × SL SL

ECE413 Introduction to VLSI Jirjees Matti Interconnect

9 Fall 2023
EE141
 Permittivity

ECE413 Introduction to VLSI Jirjees Matti Interconnect

10 Fall 2023
EE141
Fringing Capacitance

(a)

H W - H/2

(b)

ECE413 Introduction to VLSI Jirjees Matti Interconnect

11 Fall 2023
EE141
Fringing versus Parallel Plate

(from [Bakoglu89])
ECE413 Introduction to VLSI Jirjees Matti Interconnect
12 Fall 2023
EE141
Interwire Capacitance
Current flow

W Electrical-field lines

tdi Dielectric

Substrate

fringing parallel

ECE413 Introduction to VLSI Jirjees Matti Interconnect

13 Fall 2023
EE141
Impact of Interwire Capacitance

(from [Bakoglu89])

ECE413 Introduction to VLSI Jirjees Matti Interconnect

14 Fall 2023
EE141
Wiring Capacitances (0.25 µm CMOS)

ECE413 Introduction to VLSI Jirjees Matti Interconnect

15 Fall 2023
EE141
 INTERCONNECT
RESISTANCE

ECE413 Introduction to VLSI Jirjees Matti Interconnect

16 Fall 2023
EE141
Wire Resistance

R=r L
HW

L Sheet Resistance
H Ro

R1 R2
W

ECE413 Introduction to VLSI Jirjees Matti Interconnect

17 Fall 2023
EE141
Interconnect Resistance

ECE413 Introduction to VLSI Jirjees Matti Interconnect

18 Fall 2023
EE141
 Dealing with Resistance

q SelectiveTechnology Scaling
q Use Better Interconnect Materials
§ reduce average wire-length
§ e.g. copper, silicides
q More Interconnect Layers
§ reduce average wire-length

ECE413 Introduction to VLSI Jirjees Matti Interconnect

19 Fall 2023
EE141
 Interconnect Resistance Data

ECE413 Introduction to VLSI Jirjees Matti Interconnect

20 Fall 2023
EE141
 Skin Effect

ECE413 Introduction to VLSI Jirjees Matti Interconnect

23 Fall 2023
EE141
 Skin Effect

ECE413 Introduction to VLSI Jirjees Matti Interconnect

24 Fall 2023
EE141
 INTERCONNECT
INDUCTANCE

ECE413 Introduction to VLSI Jirjees Matti Interconnect

25 Fall 2023
EE141
 INTERCONNECT INDUCTANCE

q New technology
§ Low-resistive interconnect materials
§ Increasing of switching frequencies (super-GHz)
q Inductance is more important today!
§ Ringing
§ Overshoot effects
§ Reflections of signals due to impedance mismatch
§ Inductive coupling between lines
§ Switching noise

ECE413 Introduction to VLSI Jirjees Matti Interconnect

26 Fall 2023
EE141
 INTERCONNECT INDUCTANCE

Definition of inductance

Inductance physical relationship

Inductance physical relationship

ECE413 Introduction to VLSI Jirjees Matti Interconnect

27 Fall 2023
EE141
 INTERCONNECT INDUCTANCE

ECE413 Introduction to VLSI Jirjees Matti Interconnect

28 Fall 2023
EE141
 Interconnect
Modeling

ECE413 Introduction to VLSI Jirjees Matti 29Interconnect Fall 2023

EE141
 The Lumped Model
Vout

cwi re
Driver

R d r iv e r
Vout

V in
C lu m p e d

ECE413 Introduction to VLSI Jirjees Matti Interconnect

30 Fall 2023
EE141
 The Lumped RC-Model
The Elmore Delay

ECE413 Introduction to VLSI Jirjees Matti Interconnect

31 Fall 2023
EE141
The Ellmore Delay
RC Chain

ECE413 Introduction to VLSI Jirjees Matti Interconnect

32 Fall 2023
EE141
The Ellmore Delay
RC Chain (Example)

ECE413 Introduction to VLSI Jirjees Matti Interconnect

33 Fall 2023
EE141
 Wire Model

Assume: Wire modeled by N equal-length segments

For large values of N:

ECE413 Introduction to VLSI Jirjees Matti Interconnect

34 Fall 2023
EE141
The Distributed RC-line

ECE413 Introduction to VLSI Jirjees Matti Interconnect

35 Fall 2023
EE141
 Step-response of RC wire as a
function of time and space
2.5

x= L/10
2

x = L/4
1.5
v o lta g e ( V )

x = L/2
1
x= L

0.5

0
0 0.5 1 1.5 2 2.5 3 3.5 4 4.5 5
time (nsec)

ECE413 Introduction to VLSI Jirjees Matti Interconnect

36 Fall 2023
EE141
 RC-Models

ECE413 Introduction to VLSI Jirjees Matti Interconnect

37 Fall 2023
EE141
 Design Rules of Thumb

q rc delays should only be considered when

tpRC >> tpgate of the driving gate
Lcrit >> Ö tpgate/0.38rc
q rc delays should only be considered when the
rise (fall) time at the line input is smaller than
RC, the rise (fall) time of the line
trise < RC
§ when not met, the change in the signal is slower
than the propagation delay of the wire

ECE413 Introduction to VLSI Jirjees Matti Interconnect

38 Fall 2023
EE141 © MJIrwin, PSU, 2000
 Driving an RC-line
(r w,cw,L)
R s V o ut

V in

ECE413 Introduction to VLSI Jirjees Matti Interconnect

39 Fall 2023
EE141