CMOS MM/RF PDK Checklist

Foundry - TSMC
Process – 65nm Mixed Signal / RF
PDK Revision – Version 1.7a 09/14/12’
Page 1 of 2

PDK Support Contact

Foundry Process Documents
Document Document Number & Title Section Revision Date

T-N65-CL-DR-001 2.1 2012/04/20

T-N65-CM-DR-015 1.0 2009/10/08
Design Layout Rules
T-N65-CM-DR-012 2.0 2008/06/11
T-N65-CM-DR-011 0.1 2008/03/03
T-N65-CM-SP-007 1.7 2012/03/21
Spice Model
T-N65-CM-SP-012 1.5 2012/03/21
T-N65-CL-DR-001-C1 2.1a 2012/04/20
T-N65-CM-DR-015-C1 1.0b 2010/11/03
DRC
T-N65-CM-DR-012-C1 2.0a 2008/06/11
T-N65-CM-DR-011-C1 0.1a 2008/03/03
T-N65-CL-LS-001-C1 1.6b_pre061711
LVS
T-N65-CL-LS-001-U1 1.6b_pre060311
QRC:
T-N65-CM-SP-007-V1 1.3a 2008/07/07
T-N65-CL-SP-009-V2 1.2a 2007/05/16
T-N65-CL-SP-009-V4 1.2a 2007/05/18
Calibre:
1p6m_4X1Z 1.3 2010/03/12
Parasitic Extraction
1p7m_4X2Z 1.3 2010/03/12
1p9m_6X1Z1U 1.3 2010/03/12
StarRC:
1p6m_4X1Z 1.0 2010/11/04
1p7m_4X2Z 1.2 2008/01/31
1p9m_6X1Z1U 1.0 2012/03/02
LE T-N65-CL-LE-002 2.1a 2012/05/10
Layer Map Included in techfile

EDA Tools Supported and Verified for Use with this PDK
Versi
Type Vendor and Tool Version on
Date
Schematic Cadence Design Systems, Inc / Composer
Cadence Design Systems, Inc / Analog Design
Simulation Control IC6.1.5.500.5
Environment
Layout Editor Cadence Design Systems, Inc / Virtuoso VirtuosoXL
Circuit Simulator (A) Cadence Design Systems, Inc / Spectre 7.2.0.477.isr16
Circuit Simulator (B) Synopsys / Hspice 2008.03-SP1
Circuit Simulator (C) Mentor Graphics Corporation, Inc / Eldo 2009.2
Circuit Simulator (D) Cadence Design Systems, Inc / Verilog 08.20-s003
DRC Checker Mentor Graphics Corporation, Inc / Calibre v2009.3_15.12
LVS Checker Cadence Design Systems, Inc / Assura AV4.1USR2_HF9_615

Form Version 1.5, 3.16.04

 Mentor Graphics Corporation, Inc / Calibre v2009.3_15.12
Cadence Design Systems, Inc / Assura QRC EXT101_2_HF3
Parasitic Extractor Mentor Graphics Corporation, Inc / Calibre v2009.3_15.12
Synopsys /StarRC 2010.12-SP2

CMOS MM/RF PDK Checklist

Foundry - TSMC
Process – 65nm Mixed Signal/RF
PDK Revision –Version 1.7a 09/14/12’
Terminals Page 2 of 2

Sim-Test-A
Sim-Test-B
Spice-Mod

1/f Noise

Sim-Net-A

Sim-Net-B

Pcell Test
P-Params
Comment

DRC Test
HF Noise

LVS Test
Stat Mod

SDL Net
LVS Net
Symbol
Device

Device
Name
Type

GDS
MOS pch 4 X C M C X X X X X 52 X X X X X
pch_25ud18 4 X C M C X X X X X 52 X X X X X
pch_25 4 X C M C X X X X X 52 X X X X X
pch_25od33 4 X C M C X X X X X 52 X X X X X
pch_33 4 X C M C X X X X X 52 X X X X X
pch_hvt 4 X C M C X X X X X 52 X X X X X
pch_lvt 4 X C M C X X X X X 52 X X X X X
pch_mlvt 4 X C M C X X X X X 52 X X X X X
nch 4 X C M C X X X X X 52 X X X X X
nch_na 4 X C M C X X X X X 52 X X X X X
nch_na25 4 X C M C X X X X X 52 X X X X X
nch_na25od33 4 X C M C X X X X X 52 X X X X X
nch_na33 4 X C M C X X X X X 52 X X X X X
nch_25ud18 4 X C M C X X X X X 52 X X X X X
nch_25 4 X C M C X X X X X 52 X X X X X
nch_25od33 4 X C M C X X X X X 52 X X X X X
nch_33 4 X C M C X X X X X 52 X X X X X
nch_hvt 4 X C M C X X X X X 52 X X X X X
nch_lvt 4 X C M C X X X X X 52 X X X X X
nch_mlvt 4 X C M C X X X X X 52 X X X X X
nch_dnw 4 X C M C X X X X X 52 X X X X X
nch_25_dnwud18 4 X C M C X X X X X 52 X X X X X
nch_25_dnw 4 X C M C X X X X X 52 X X X X X
nch_25_dnwod33 4 X C M C X X X X X 52 X X X X X
nch_33_dnw 4 X C M C X X X X X 52 X X X X X
nch_hvt_dnw 4 X C M C X X X X X 52 X X X X X
nch_lvt_dnw 4 X C M C X X X X X 52 X X X X X
nch_mlvt_dnw 4 X C M C X X X X X 52 X X X X X
pchx 4 X C M C X X X X X 52 X X X X X
pch_hvtx 4 X C M C X X X X X 52 X X X X X
pch_lvtx 4 X C M C X X X X X 52 X X X X X
pch_mlvtx 4 X C M C X X X X X 52 X X X X X
Form Version 1.5, 3.16.04
 nchx 4 X C M C X X X X X 52 X X X X X
nch_hvtx 4 X C M C X X X X X 52 X X X X X
nch_lvtx 4 X C M C X X X X X 52 X X X X X
nch_mlvtx 4 X C M C X X X X X 52 X X X X X
nch_25ud18x 4 X C M C X X X X X 52 X X X X X
nch_25x 4 X C M C X X X X X 52 X X X X X
nch_25od33x 4 X C M C X X X X X 52 X X X X X
nch_33x 4 X C M C X X X X X 52 X X X X X
nch_nax 4 X C M C X X X X X 52 X X X X X
nch_na25x 4 X C M C X X X X X 52 X X X X X
nch_na33x 4 X C M C X X X X X 52 X X X X X
nch_dnwx 4 X C M C X X X X X 52 X X X X X
nch_hvt_dnwx 4 X C M C X X X X X 52 X X X X X
nch_lvt_dnwx 4 X C M C X X X X X 52 X X X X X
nch_mlvt_dnwx 4 X C M C X X X X X 52 X X X X X
nch_25_dnwud18x 4 X C M C X X X X X 52 X X X X X
nch_25_dnwx 4 X C M C X X X X X 52 X X X X X
nch_25_dnwod33x 4 X C M C X X X X X 52 X X X X X
nch_33_dnwx 4 X C M C X X X X X 52 X X X X X
pch_25ud18x 4 X C M C X X X X X 52 X X X X X
pch_25x 4 X C M C X X X X X 52 X X X X X
pch_25od33x 4 X C M C X X X X X 52 X X X X X
nch_hv25 4 X C M C X X X X X 52 X X X X X
pch_hv25 4 X C M C X X X X X 52 X X X X X
nch_hv25x 4 X C M C X X X X X 52 X X X X X
pch_hv25x 4 X C M C X X X X X 52 X X X X X
pch_33x 4 X C M C X X X X X 52 X X X X X
pmos_rf 4 X S M S X X X X X 9 X X X X X
pmos_rf_25ud18 4 X S M S X X X X X 9 X X X X X
pmos_rf_25 4 X S M S X X X X X 9 X X X X X
pmos_rf_25od33 4 X S M S X X X X X 9 X X X X X
pmos_rf_33 4 X S M S X X X X X 9 X X X X X
pmos_rf_nw 4 X S M S X X X X X 9 X X X X X
pmos_rf_25_nwud18 4 X S M S X X X X X 9 X X X X X
pmos_rf_25_nw 4 X S M S X X X X X 9 X X X X X
pmos_rf_25_nwod33 4 X S M S X X X X X 9 X X X X X
pmos_rf_33_nw 4 X S M S X X X X X 9 X X X X X
pmos_rf_5t 5 X S M S X X X X X 9 X X X X X
pmos_rf_lvt_5t 5 X S M S X X X X X 9 X X X X X
pmos_rf_hvt_5t 5 X S M S X X X X X 9 X X X X X
pmos_rf_mlvt_5t 5 X S M S X X X X X 9 X X X X X
pmos_rf_25_5t 5 X S M S X X X X X 9 X X X X X
pmos_rf_25od33_5t 5 X S M S X X X X X 9 X X X X X
pmos_rf_25ud18_5t 5 X S M S X X X X X 9 X X X X X
pmos_rf_nw_5t 5 X S M S X X X X X 9 X X X X X
pmos_rf_lvt_nw_5t 5 X S M S X X X X X 9 X X X X X
pmos_rf_hvt_nw 5t 5 X S M S X X X X X 9 X X X X X
pmos_rf_mlvt_nw_5t 5 X S M S X X X X X 9 X X X X X
pmos_rf_25_nw _5t 5 X S M S X X X X X 9 X X X X X
pmos_rf_25od33_nw _5t 5 X S M S X X X X X 9 X X X X X
pmos_rf_25ud18_nw _5t 5 X S M S X X X X X 9 X X X X X
nmos_rf 4 X S M S X X X X X 9 X X X X X
nmos_rf_25ud18 4 X S M S X X X X X 9 X X X X X
nmos_rf_25 4 X S M S X X X X X 9 X X X X X
nmos_rf_25od33 4 X S M S X X X X X 9 X X X X X
nmos_rf_33 4 X S M S X X X X X 9 X X X X X
Form Version 1.5, 3.16.04
 nmos_rf_nodnw 4 X S M S X X X X X 9 X X X X X
nmos_rf_25_nodnwud18 4 X S M S X X X X X 9 X X X X X
nmos_rf_25_nodnw 4 X S M S X X X X X 9 X X X X X
nmos_rf_25_nodnwod33 4 X S M S X X X X X 9 X X X X X
nmos_rf_33_nodnw 4 X S M S X X X X X 9 X X X X X
nmos_rf_6t 6 X S M S X X X X X 9 X X X X X
nmos_rf_lvt_6t 6 X S M S X X X X X 9 X X X X X
nmos_rf_hvt_6t 6 X S M S X X X X X 9 X X X X X
nmos_rf_mlvt_6t 6 X S M S X X X X X 9 X X X X X
nmos_rf_25_6t 6 X S M S X X X X X 9 X X X X X
nmos_rf_25od33_6t 6 X S M S X X X X X 9 X X X X X
nmos_rf_25ud18_6t 6 X S M S X X X X X 9 X X X X X
nmos_rf_33_6t 6 X S M S X X X X X 9 X X X X X
pmos_rf_33_5t_nw 5 X S M S X X X X X 9 X X X X X
pmos_rf_3_nw _5t 5 X S M S X X X X X 9 X X X X X

MOS(mac) pch_mac 4 X S M S X X X X X 52 X X X X X
pch_25ud18_mac 4 X S M S X X X X X 52 X X X X X
pch_25_mac 4 X S M S X X X X X 52 X X X X X
pch_25od33_mac 4 X S M S X X X X X 52 X X X X X
pch_33_mac 4 X S M S X X X X X 52 X X X X X
pch_hvt_mac 4 X S M S X X X X X 52 X X X X X
pch_lvt_mac 4 X S M S X X X X X 52 X X X X X
pch_mlvt_mac 4 X S M S X X X X X 52 X X X X X
nch_mac 4 X S M S X X X X X 52 X X X X X
nch_na_mac 4 X S M S X X X X X 52 X X X X X
nch_na25_mac 4 X S M S X X X X X 52 X X X X X
nch_na33_mac 4 X S M S X X X X X 52 X X X X X
nch_25ud18_mac 4 X S M S X X X X X 52 X X X X X
nch_25_mac 4 X S M S X X X X X 52 X X X X X
nch_25od33_mac 4 X S M S X X X X X 52 X X X X X
nch_33_mac 4 X S M S X X X X X 52 X X X X X
nch_hvt_mac 4 X S M S X X X X X 52 X X X X X
nch_lvt_mac 4 X S M S X X X X X 52 X X X X X
nch_mlvt_mac 4 X S M S X X X X X 52 X X X X X
nch_dnw_mac 4 X S M S X X X X X 52 X X X X X
nch_25_dnwud18_mac 4 X S M S X X X X X 52 X X X X X
nch_25_dnw_mac 4 X S M S X X X X X 52 X X X X X
nch_25_dnwod33_mac 4 X S M S X X X X X 52 X X X X X
nch_33_dnw_mac 4 X S M S X X X X X 52 X X X X X
nch_hvt_dnw_mac 4 X S M S X X X X X 52 X X X X X
nch_lvt_dnw_mac 4 X S M S X X X X X 52 X X X X X
nch_mlvt_dnw_mac 4 X S M S X X X X X 52 X X X X X
pch__macx 4 X S M S X X X X X 52 X X X X X
pch_hvt_macx 4 X S M S X X X X X 52 X X X X X
pch_lvt_macx 4 X S M S X X X X X 52 X X X X X
pch_mlvt_mac 4 X S M S X X X X X 52 X X X X X
nch_macx 4 X S M S X X X X X 52 X X X X X
nch_hvt_macx 4 X S M S X X X X X 52 X X X X X
nch_lvt_macx 4 X S M S X X X X X 52 X X X X X
nch_mlvt_macx 4 X S M S X X X X X 52 X X X X X
nch_25ud18_macx 4 X S M S X X X X X 52 X X X X X
nch_25_macx 4 X S M S X X X X X 52 X X X X X
nch_25od33_macx 4 X S M S X X X X X 52 X X X X X
nch_33_macx 4 X S M S X X X X X 52 X X X X X
nch_dnw_macx 4 X S M S X X X X X 52 X X X X X
Form Version 1.5, 3.16.04
 nch_hvt_dnw_macx 4 X S M S X X X X X 52 X X X X X
nch_lvt_dnw_macx 4 X S M S X X X X X 52 X X X X X
nch_mlvt_dnw_macx 4 X S M S X X X X X 52 X X X X X
nch_25_dnwud18_macx 4 X S M S X X X X X 52 X X X X X
nch_25_dnw_macx 4 X S M S X X X X X 52 X X X X X
nch_25_dnwod33_macx 4 X S M S X X X X X 52 X X X X X
nch_33_dnw_macx 4 X S M S X X X X X 52 X X X X X
nch_na_macx 4 X S M S X X X X X 52 X X X X X
nch_na25_macx 4 X S M S X X X X X 52 X X X X X
nch_na33_macx 4 X S M S X X X X X 52 X X X X X
pch_25ud18_macx 4 X S M S X X X X X 52 X X X X X
pch_25_macx 4 X S M S X X X X X 52 X X X X X
pch_25od33_macx 4 X S M S X X X X X 52 X X X X X
pch_33_macx 4 X S M S X X X X X 52 X X X X X
nch_hv25_mac 4 X S M S X X X X 52 X X X X X
pch_hv25_mac 4 X S M S X X X X 52 X X X X X
nch_hv25_mac x 4 X S M S X X X X 52 X X X X X
pch_hv25_mac x 4 X S M S X X X X 52 X X X X X

BJT BJT22 1 3 X X
BJT55 1 3 X X
BJT1010 1 3 X X
BJT_NPN_22 1 3 X X
BJT_NPN_55 1 3 X X
BJT_NPN_1010 1 3 X X
BJT22_MIS 1 3 X X
BJT55_MIS 1 3 X X
BJT1010_MIS 1 3 X X
BJT_NPN_22_MIS 1 3 X X
BJT_NPN_55_MIS 1 3 X X
BJT_NPN_1010_MIS 1 3 X X
BJT_NPN10_S 1 3 X X
BJT_NPN2_S 1 3 X X
BJT_NPN5_S 1 3 X X
BJT_PNP10_S 1 3 X X
BJT_PNP2_S 1 3 X X
BJT_PNP5_S 1 3 X X
BJT_NPN10_S_MIS 1 3 X X
BJT_NPN2_S_MIS 1 3 X X
BJT_NPN5_S_MIS 1 3 X X
BJT_PNP10_S_MIS 1 3 X X
BJT_PNP2_S_MIS 1 3 X X
BJT_PNP5_S_MIS 1 3 X X
npn 2 3 X C C X X X X X 2 X X X X X
npn_mis 2 3 X S S X X X X X 2 X X X X X
pnp 2 3 X C C X X X X X 2 X X X X X
pnp_mis 2 3 X S S X X X X X 2 X X X X X
npn_s 2 3 X C C X X X X X 2 X X X X X
npn_s _mis 2 3 X S S X X X X X 2 X X X X X
pnp_s 2 3 X C C X X X X X 2 X X X X X
pnp_s _mis 2 3 X S S X X X X X 2 X X X X X

Form Version 1.5, 3.16.04

Diode ndio 2 X C C X X X X X 3 X X X X X
ndio_25ud18 2 X C C X X X X X 3 X X X X X
ndio_25 2 X C C X X X X X 3 X X X X X
ndio_25od33 2 X C C X X X X X 3 X X X X X
ndio_33 2 X C C X X X X X 3 X X X X X
ndio_na 2 X C C X X X X X 3 X X X X X
ndio_na25 2 X C C X X X X X 3 X X X X X
ndio_na25od33 2 X C C X X X X X 3 X X X X X
ndio_na33 2 X C C X X X X X 3 X X X X X
nwdio 2 X C C X X X X X 3 X X X X X
pdio 2 X C C X X X X X 3 X X X X X
pdio_25ud18 2 X C C X X X X X 3 X X X X X
pdio_25 2 X C C X X X X X 3 X X X X X
pdio_25od33 2 X C C X X X X X 3 X X X X X
pdio_33 2 X C C X X X X X 3 X X X X X
ndio_hvt 2 X C C X X X X X 3 X X X X X
ndio_lvt 2 X C C X X X X X 3 X X X X X
ndio_mlvt 2 X C C X X X X X 3 X X X X X
pdio_hvt 2 X C C X X X X X 3 X X X X X
pdio_lvt 2 X C C X X X X X 3 X X X X X
pdio_mlvt 2 X C C X X X X X 3 X X X X X
ndio_hia_rf 2 X S S X X X X X 3 X X X X X
pdio_hia_rf 3 X S S X X X X X 3 X X X X X
dnwpsub 3 2 X C C X X X 3 X X X
pwdnw 3 2 X C C X X X 3 X X X
ndio_esd 3 2 X C C X X X 3 X X X
dnw_3t_diode X X X
sbd_rf 3 X S S X X X X X 3 X X X X X
sbd_rf_nw 3 X S S X X X X X 3 X X X X X

RES rm1 2 X S C X X X X X 5 X X X X X
rm2 2 X S C X X X X X 5 X X X X X
rm3 2 X S C X X X X X 5 X X X X X
rm4 2 X S C X X X X X 5 X X X X X
rm5 2 X S C X X X X X 5 X X X X X
rm6 2 X S C X X X X X 5 X X X X X
rm7 2 X S C X X X X X 5 X X X X X
rm8 2 X S C X X X X X 5 X X X X X
rm9 2 X S C X X X X X 5 X X X X X
rm10 2 X S C X X X X X 5 X X X X X
rppoly 2 X S C X X X X X 9 X X X X X
rnpoly 2 X S C X X X X X 9 X X X X X
rppolywo 2 X S C X X X X X 9 X X X X X
rnpolywo 2 X S C X X X X X 9 X X X X X
rnod 2 X S C X X X X X 9 X X X X X
rpod 2 X S C X X X X X 9 X X X X X
rnodwo 2 X S C X X X X X 9 X X X X X
rpodwo 2 X S C X X X X X 9 X X X X X
rnwod 2 X S C X X X X X 5 X X X X X
rnwsti 2 X S C X X X X X 5 X X X X X
rnod_m 3 X S C X X X X X 9 X X X X X
rpod_m 3 X S C X X X X X 9 X X X X X
rnodwo_m 3 X S C X X X X X 9 X X X X X
rpodwo_m 3 X S C X X X X X 9 X X X X X
Form Version 1.5, 3.16.04
 rnwod_m 3 X S C X X X X X 5 X X X X X
rppoly_m 3 X S C X X X X X 9 X X X X X
rnpoly_m 3 X S C X X X X X 9 X X X X X
rppolywo_m 3 X S C X X X X X 9 X X X X X
rnpolywo_m 3 X S C X X X X X 9 X X X X X
rnwsti_m 3 X S C X X X X X 5 X X X X X
rnod_mx 3 X S C X X X X X 9 X X X X X
rpod_mx 3 X S C X X X X X 9 X X X X X
rnodwo_mx 3 X S C X X X X X 9 X X X X X
rpodwo_mx 3 X S C X X X X X 9 X X X X X
rnwod_mx 3 X S C X X X X X 5 X X X X X
rnwsti_mx 3 X S C X X X X X 5 X X X X X
rppolywo_mx 3 X S C X X X X X 9 X X X X X
rnpolywo_mx 3 X S C X X X X X 9 X X X X X
rppoly_mx 3 X S C X X X X X 9 X X X X X
rnpoly_mx 3 X S C X X X X X 9 X X X X X
rppoly_rf 2 X S C X X X X X 9 X X X X X
rppolywo_rf 2 X S C X X X X X 9 X X X X X

VAR nmoscap 2 X S C X X X X X 3 X X X X X
nmoscap_18 2 X S C X X X X X 3 X X X X X
nmoscap_33 2 X S C X X X X X 3 X X X X X
moscap_rf 3 X S C X X X X X 6 X X X X X
moscap_rf25 3 X S C X X X X X 6 X X X X X
moscap_rf33 3 X S C X X X X X 6 X X X X X
moscap_rf_nw 3 X S C X X X X X 6 X X X X X
moscap_rf25_nw 3 X S C X X X X X 6 X X X X X
moscap_rf33_nw 3 X S C X X X X X 6 X X X X X
xjvar 3 X S C X X X X X 6 X X X X X
xjvar_nw 3 X S C X X X X X 6 X X X X X
pmoscap_rf 3 X S C X X X X X 6 X X X X X
pmoscap_rf25 3 X S C X X X X X 6 X X X X X

CAP mimcap 2 X S C X X X X X 8 X X X X X
mimcap_3t 3 X S C X X X X X 8 X X X X X
mimcap_um_rf 3 X S C X X X X X 8 X X X X X
mimcap_woum_rf 3 X S C X X X X X 8 X X X X X
crtmom 3 X S C X X X X X 11 X X X X X
crtmom_rf 3 X S C X X X X X 11 X X X X X
crtmom_mx 5 X S C X X X X X 13 X X X X X
mimcap_udc 2 X S C X X X X X 8 X X X X X
mimcap_udc_3t 3 X S C X X X X X 8 X X X X X
mimcap_um_udc_rf 3 X S C X X X X X 8 X X X X X
mimcap_woum_udc_rf 3 X S C X X X X X 8 X X X X X

IND spiral_std_mu_z 3 X S C X X X X X 12 X X X X X
spiral_sym_mu_z 3 X S C X X X X X 12 X X X X X
spiral_sym_ct_mu_z 4 X S C X X X X X 12 X X X X X
spiral_std_mza_a 3 X S C X X X X X 12 X X X X X
spiral_sym_mza_a 3 X S C X X X X X 12 X X X X X
spiral_sym_ct_mza_a 4 X S C X X X X X 12 X X X X X
spiral_std_mu_a 3 X S C X X X X X 12 X X X X X
spiral_sym_mu_a 3 X S C X X X X X 12 X X X X X
spiral_sym_ct_mu_a 4 X S C X X X X X 12 X X X X X

Form Version 1.5, 3.16.04

Comments
1. These devices only have layout views with fix layouts.
2. These devices only take use of fix layouts with 3 different dimensions.
3. These devices don’t have PCell layouts.

Form Version 1.5, 3.16.04