NEW Wide-Area 3D Measurement System

VR-3000 Series

3D SURFACE MEASUREMENTS
IN AS LITTLE AS 4 SECONDS
 ONE-SHOT 3D MEASUREMENT

JUST PLACE AND

CLICK TO COLLECT
3D DATA

NEW

Wide-Area 3D Measurement System

VR-3000 Series

2
Measure an entire area in as little as four seconds with 0.1 μm vertical resolution

Quick, accurate 3D measurements

Analyze form, contour, and roughness with 780,000 data points in a single image

Complete 3D surface analysis

XYZ traceable measurements compliant with international standards

Unmatched measurement precision

3
Comparison with conventional measuring instruments

Conventional Measuring Instruments

Ex.: Depressions on a button battery

Coordinate
measurement machine

Only collects data

at a single point

In order to obtain information

for the entire target, numerous
individual points need to be Only collects profile data
measured, which can take of a single line
a very long time.

Measurement of a specific
point is difficult, since the
probe tip needs to be placed
manually, which can lead to
variations in measurement
results.

Contact profiler

When measuring only × Measurement of specific areas is

difficult
points and lines
Typical measurement systems only provide measurement data
on the areas that they are able to contact with a probe tip.
× Measurements take a long time

×
Measuring specific locations by simply eying where to put the
probe makes the results unreliable.
Measurement results vary from
person to person

4
 Wide-Area 3D Measurement System

Data is collected over

the entire surface

Nearly 800,000 points of

data can be gathered in just
seconds, allowing users to
measure at any location and
without variations between
users.

Min. height

Max. height

Max and min heights can be

Non-contact surface ✓ reliably measured
scanning
The VR-3000 Wide-Area 3D Measurement System quickly
✓ Scans in as little as 4 seconds
scans the entire topography of a surface so that reliable
measurements can be made at any point on an object.
Repeatable and reproducible
✓ measurement results

5
 Quick, accurate 3D measurements

!
u s t click
J
Measurements in
as little as 4 seconds

6
Anyone Can Measure Quickly and Accurately
Highly-reproducible measurements with 0.1 μm z-resolution in as little as 4 seconds

Fast measurement with no need

Just place to worry about probe placement
the sample and
click one button. With conventional profile measurement systems,
a user may spend a lot of time positioning the
probe tip to touch the correct area of the target.
The VR-3000 Series makes it simple by only
requiring that the user place the sample on the
stage, and then click the Measure button to
collect data in as little as four seconds.

Scans the entire surface to ensure

that no data is missed
Detection of the
local minimum With the VR-3000 Series, 3D information for the
entire surface is obtained with a single scan.
Users can see the overall shape of the target,
including the highest and lowest points, without
having to re-scan the surface or guess-and-
check as to whether the correct location has
been measured.

With conventional profile measurement systems, set up and measurement is

time-consuming.

1
3
2

Dent measurements
Precise positioning is difficult.
Various adjustments are required, such as
selection of the sample type, stylus tip, and User-caused Extensive Difficult to
measurement parameters. In addition, it’s nearly errors are training is reproduce
impossible to tell whether measurement of the frequent. required. results.
designated point has been performed.

7
 Complete 3D surface analysis

Measure
the entire surface,
not just points or lines

With a CMM or contact profiler, it’s necessary to measure several places in order to
try to understand the shape of the surface.

With a coordinate-measuring machine… With a profile measuring instrument…

measurement is performed at a point measurement is performed in a line

8
Visualize Your Surface Like Never Before
Measure the entire surface and analyze the overall shape

Conventional measurement devices When measuring with points and

lines...
CMM
With point and line measurements, it’s hard to
know where to measure when trying to find the
difference between the highest point and the
lowest point.

Contact profiler No way to see the highest or lowest points

Difficult to measure exact locations

VR-3000 Series With one-shot 3D measurement

One-shot measurement of the entire surface is
performed, making it possible to see a target’s
overall shape and waviness.
Max. height

See highest and lowest points at a glance

Min. height

Quickly obtain the overall shape

Measure any location after just one scan

Because the VR-3000 Series shows the overall

shape of a target, including the highest and
lowest points, measurement can be done for any
targeted area. The surface data obtained can
also be reanalyzed and measured at any point in
the future.

9
 Unmatched measurement precision

Non-Contact,
High-Accuracy
Measurement

Measurement principle

Light-section method
Triangulation measurement of height
differences using structured illumination

Patterned light is emitted from the transmitter lens

and projected onto the surface of the object. When
the reflected light is viewed from a different angle
using the receiver lens, the light appears banded
and bent due to the height changes on the object’s
surface. A CMOS camera is used to capture the
reflected light, and based on triangulation, the
height and position can be calculated.

10
Highly-efficient measurement algorithms
Accurate, repeatable, and traceable results

One-shot 3D Algorithm
CMOS Light source

We combined our TMT one-shot algorithm for high-accuracy,

true color measurements with our high resolution 3D
technology to create the world’s first algorithm for instant 3D
measurement.

TMT (Telecentric Multi-Triangulation) Algorithm

By using three, double-telecentric lenses with the multi-triangulation

technology of our displacement gauges, we have created a unique
Receiver lens Transmitter lens algorithm for quick and accurate 3D measurement.

Real color 3D Technology

Object being
measured Red, green, and blue light from a dedicated lighting unit are
captured by a new high-accuracy CMOS sensor. Images
captured separately with each light color are compiled to
Calculating height create a full color image. This process produces vivid and
d
Changes in height will cause the detailed images that cannot be obtained with a standard color
patterned light to appear bent at each camera and white-light illumination.
height change. The amount of the
bend, or ‘d’ in the image to the left, is
used to calculate the height.

XYZ Traceability
Z X-Y
National standard National standard
The measurement results, obtained using the world’s first
algorithm of its type, are traceable according to international
National Institute of Advanced Industrial National Institute of Advanced Industrial
Science and Technology (AIST) Science and Technology (AIST) standards, so users can obtain highly-reliable measurements.

JCSS accredited organization JCSS accredited organization

Gauge block Standard Scale

Calibration

Height difference measurement device Coordinate measurement equipment An inspection report and calibration gauge with calibration
certificate are standard items included with each system. The
Calibration block Calibration chart
gauge uses the same reference scale used by JCSS certified
operators. Instead of hiring a technician to perform calibration,
VR-3000 users can easily do it themselves on-site.

11
 Technology designed for high-precision
Sophisticated optics and hardware

Minimal distortion over the entire

Three, Double-telecentric Lenses
measurement area. To achieve high-accuracy 3D measurement, it is crucial that the transmitter
and receiver lenses are made in such a way to minimize distortion, and
that changes in the distance between the object and lens do not alter the
size of the image. The VR-3000 contains a total of
three wide telecentric lenses, used in combination with the industry’s
largest CMOS. The advanced optical design allows high‑accuracy
one-shot 3D measurement of areas up to 3 cm 1.18".

Telecentric Lenses Improve Accuracy

When viewing object Feature size is unchanged as the lens

from above Standard lens Telecentric lens
moves through focus
When measuring objects with height differences, it is important that the
field-of-view remains constant as the lens moves in the Z direction.
By using a telecentric lens, the VR-3000 can accurately measure height
differences up to ±5 mm ±0.20" at one time.

Normal camera lens VR-3000 Series Minimizes distortion at the periphery

Distortion at the periphery Minimal distortion in the field-of-view
When measuring a wide area, stretching 30 mm 1.18" diagonally, in one
shot, telecentric lenses will result in minimal distortion throughout the entire
field-of-view. Telecentric lenses also provide clearer, sharper, and more
accurate image details.

VR-3000 Series Transmitter lens provide uniform

Uniform, even illumination
illumination
With a telecentric lens, the target is illuminated evenly throughout the entire
measurement range. This allows for high-accuracy measurement of the
target no matter where it is placed.

12
Accurate Imaging
High-accuracy CMOS sensor
The industry’s largest high-
accuracy CMOS is used,
allowing data to be obtained with
minimal noise for high-resolution
image capture.

Real color light unit

The VR-3000 has a light source
that emits red, green, and blue
light for true color reproduction.
The combination of an optical
system and optical fibers
minimizes inaccuracies when
composing the color.

No Vibration Isolation
Required
Designed to withstand large
amounts of vibration
Strength analysis was used to
create a highly-rigid frame and
remove the need for vibration
isolation equipment, such as an
air table. The image below is a
diagram of the strength analysis
on the structure of the system.

Specially designed vibration-

proof rubber
The VR-3000 is equipped with
vibration-proof rubber with
over four times the vibration
prevention of conventional
materials. The material absorbs
a wide range of vibration,
from low to high frequencies,
allowing for stable imaging
and measurement even at high
magnifications.

13
 A N A LY S I S
FUNCTIONS

Numerous measurement
and analysis functions
From shape and roughness to volume and
2D measurements

Height/width/angle/radius measurement

Profile measurement

Measurements such as height, width, cross-sectional area,

angle, and radius can be made by simply pointing and
clicking across the desired area. Up to 12 different types of
measurements can be performed.

Height difference/planarity measurement

Measure average height difference

Height differences between two surfaces can be measured

using 780,000 data points. The surface data can also be used
for performing planarity measurements.

Volume/area/counting

Measure volume and surface area

Using height data, a target’s volume, area, and the XY

dimensions of a specified height can be measured. Counting
can also be performed simultaneously.

14
 Support for a wide range of measurements, from 2D to 3D

Profile Measurement/
Roughness Meter 3D Measuring Machine Optical Comparator Measuring Microscope

Curvature, line roughness

(ISO 4287: 1997),
surface roughness (ISO 25178)

Line roughness

Calculate typical roughness parameters, such as Ra, Rz, etc.

With several measurement options available, even measurements
that are difficult to perform with contact profilers, like those on
circularly-shaped parts, can be done.

Surface roughness

Measure surface roughness in accordance with ISO 25178.

These measurements evaluate data over an area, giving more
reliable roughness results by taking into account more data
points.

2D measurement

Various 2D
measurements are
available including
distances between
points, lines, and circles,
diameter, and angle.
Users can also measure
the height at specific
points on the image by
just clicking the location
on-screen.

15
 N E W F E AT U R E

Compare and differentiate between multiple

samples simultaneously
NEW Multi-file analysis function

Sample A

Sample B

Sample C

Sample D

Measurements including cross-section, volume, area, planarity, and roughness can be performed on several files
simultaneously and under the same measurement conditions. For example, users are able to see changes in topography
or shape between prototypes that were made under different manufacturing conditions or to visualize and measure
surface wear over time. This greatly reduces the number of operations and process time required for measurement and
prevents mistakes from occurring due to changes in measurement conditions.

Position adjustment,
image processing,
and unification of
measurement details

Collective height
display setting

Collective graph
display setting

Batch analysis of multiple files: Quickly compare topography:

Auto Arrange function 3D List Display function
Auto Arrange makes it possible to batch process Visually compare 3D images from multiple
all the data through a single operation, reducing samples side-by-side for easier understanding and
analysis time and preventing measurement errors. explanation of surface changes or differences.

16
Advanced support functions for improved analysis

❚ Conventional systems
Efficient data collection:
Continuous Measurement Mode
Measure- Measure- Measure-
Analysis Analysis Analysis
ment ment ment
The VR-3000 Series incorporates a continuous
measurement mode that captures data in a more
❚ VR Series - Continuous Measurement Mode
streamlined process. Measurement can be done without
Measure- Measure- Measure- Batch moving between software, allowing work to be performed
ment ment ment analysis with greater efficiency.
Reduced man-hours

High reproducibility:
Position Adjustment & Pattern Matching

A semi-transparent master image is displayed on-screen

to be used as a reference for position alignment. Simply
place the object near the reference image and click a
button to perform automatic positioning. Additionally,
small changes in alignment can be corrected through
the use of highly-accurate pattern matching.

Pattern Matching &

Position Adjustment

Output and analyze data post-process:

Excel Data Output/CAD Output

Data collected by the VR can be output directly to Excel

exactly as it appears on the screen. In addition, all
measurement results can be exported to CAD, including
STL, STEP, and ASCII file types, giving you a wide variety
of options in how the data can be utilized.

Excel CAD

17
 N E W F E AT U R E

Visualization and quantification of

surface shape differences
NEW Profile comparison measurement function

3D CAD data VR Series measurement data

Profile comparisons between defective and non-defective parts, as well as for CAD data,
prototypes, and other targets, is easy. The overall surface shapes obtained can be used for
measuring the differences between the same locations in two different data sets.

No complex settings: Visualization of shape differences:

Auto Position Adjustment function [Subtraction] Color Display function
3D position adjustment for tilting and height Two objects can be overlaid, and areas higher than
misalignment is done automatically by taking into the reference are displayed in red while lower areas
account various elements, including reference planes. are displayed in blue. This makes it possible to check
differences visually.
* ‌VR-H2P software module is required for the data comparison
function, and VR-H2CA software module is required for CAD
comparisons.

18
Quick and easy 3D shape inspection
NEW Pass/Fail judgment function

Based on registered tolerances, pass/fail (OK/NG) judgment can be made as soon as measurements are taken. This
saves inspection time in various quality and analysis applications such as setting prototype conditions or performing
acceptance inspections.

Easy configuration of program settings: Efficient management of measurement

Program Settings function results: Statistical Analysis function
Configuring program settings is simple. No special Measurement results are automatically stored in the
training is required. Registered inspection setting files database, and trend graphs and histograms are
can also be used in other systems. automatically created. Reports to be submitted to
relevant parties can also be created automatically,
minimizing the time required for various operations
following inspection.

19
 LARGE-AREA
STITCHING

Measure form and contour over a wide area

Image stitching function

Measure over a large area with a high-speed, motorized XY stage

100 mm 3.94" [Max.]

High-speed image stitching process 200 mm 7.87" [Max.]

Precision measurement is ensured even on a stitched image.

A AFAF F
Incline correction Auto Focus mode Data recapture
Stage inclination caused by the weight of an The VR-3000 implements an Auto Focus If any area is not originally captured when
object can be accurately corrected using a function that is able to automatically adjust for stitching, it is possible to re-scan only those
built-in stage sensor. changes in an objects height when stitching specific locations, without having to re-scan
in the XY directions. the entire part again.

20
 MICROSCOPE
FUNCTION

Functions as both a 3D measurement system and

microscope

High-definition imaging
9 megapixel 9 megapixel 3 CMOS camera
Samples can be imaged under magnifications
3 CMOS camera
ranging from 12× to 160×. High resolution
Red, green, and blue data are images of up to 9 megapixels can be captured
obtained for each pixel, allowing and saved by simply pushing the Capture
for clear observation with excellent button.
color reproduction.

See more
8-bit details than
16-bit
(256-color)
Conventional
(65,536-color) conventional systems
With one click the system will HDR function 256 times more
method
capture additional color data by
varying the shutter speed
levels of color than a
conventional device
16-bit HDR function
The VR-3000 is able to capture up to
Problems Effects 16 bits of red, green, and blue color data to
• Reflective samples cannot be imaged clearly • By increasing the levels of color gradation, perform significantly more accurate imaging
due to the limited levels of color that can be samples with bright spots or dark spots can be
captured. imaged clearly.
of a sample than what can be captured with
• Details in low contrast samples cannot be seen. • Low contrast samples can be seen in high-detail. traditional 8-bit devices.

Built-in depth composition

function
When analyzing samples with a large change
in height, or when increasing the magnification,
the depth-of-field can become limited. The
VR-3000’s telecentric lenses and depth
composition function make it possible to adjust
the image so that the entire surface is in focus.
Conventional microscopes VR-3000 Series PCB (12×)

21
 A P P L I C AT I O N S

Automotive/Metal/Tooling

Trapezoidal screw (screw threading and angle)

Metal retaining material (compared with 3D-CAD data)

22
Ductile metal fracture surface (surface area/sectional area) Gear (shape)

Brake pads (planarity) Tool blade edge (shape)

23
 A P P L I C AT I O N S

Electrical/Electronics

Handy terminal (frame warpage)

Handy terminal charging stand (shape)

7-inch tablet (case waviness) Wave washer (height difference)

24
PCB (appearance, overall curvature, plating waviness)

Connector pins (pin height) IC (lead float)

BGA (fluctuations in height) Metal components (waviness, 2D measurements)

25
 A P P L I C AT I O N S

Chemical/Plastic

Defective (NG) product Comparison (OK and NG products) Comparison (CAD and NG products)

Rubber handle (Defect analysis) Comparative measurement 3D-CAD comparative measurement

function function

Optical component (resin mold sink marks) Plastic case (average groove depth)

Diaphragm (shape, distortion) Fan (height from reference)

26
 Other

Weather-stripping (line roughness, surface roughness)

Glass

Fibers

Handheld controller (button height) Dents formed between fibers

(Measured while fibers are being pressed with a glass plate.)

Original data After curvature correction Original data After curvature correction

Grain (overall grain depth) SOFC (solid oxide fuel cell) (volume)

27
 Pro duct Lineup

High-end model with

motorized XY stage
VR-3200
XY-axis motorized control

Z-axis motorized control

Color imaging

Wide-field/
high-magnification camera

Standard model with

color/high-magnification
imaging capabilities
VR-3100
XY-axis manual control

Z-axis motorized control

Color imaging

Wide-field/
high-magnification camera

Basic model Z-axis manual control

VR-3050 Wide-field camera

28
 O ptional I tems

OP-87708 100 mm 3.94" Spacer OP-87709 Tilt stage

Inserting this 100 mm 3.94" high spacer between the measurement This stage allows users to observe and measure objects from an
unit and the base allows you to measure objects up to 188 mm 7.40" * angle without having to manipulate the object by hand. The stage
in height. This extra space can be also used for setting a heated is designed so that the sample securely adheres to the stage when
stage or custom fixture. positioned at an angle.

100
mm OP-87717 Manual slider for image stitching
188 3.94" The manual slider allows measurement of a wider field, up to
mm 270 mm 10.63", when used together with the Stitching Module
7.40" (optional).

270
mm
10.63"
* When the VR-S200 is mounted, the maximum height is 170 mm 6.69".

VR-S200 Motorized XY stage Custom stages

Fully-motorized XY control using the mouse. Combined with the KEYENCE offers a variety of large-sized or special stages to meet
Stitching Module (optional), this stage enables the system to your needs. Contact us for more details.
perform image stitching with higher speed and accuracy.

29
 S ystem Configuration Diagram / D IM ENSIONS

Controller
VR-3200 VR-3100 VR-3050 VR-3000K Control PC Monitor (optional)

Head

Controller VR-3000K
Model
Head VR-3200 VR-3100 VR-3050
Motorized XY stage VR-S200 Standard Optional Optional
XYθ stage OP-87715 — Standard Optional
Manual slider for stitching OP-87717 — Optional Optional
100 mm 3.94" spacer OP-87708 Optional Optional Optional
Tilt stage OP-87709 Standard Standard Optional
Calibration standard OP-87710 Standard Standard Standard
NEW Viewer software VR-H2VE Required Required Required
NEW Analyzer software VR-H2AE Required Required Required
NEW Stitching module VR-H2J Optional Optional Optional
NEW Comparative measurement module VR-H2P Optional Optional Optional
NEW 3D-CAD comparative module VR-H2CA Optional Optional Optional

Head VR-3200 Motorized XY stage VR-S200 Unit: mm inch

2.76" 13.46"
70 342
11.42"
290 147
5.79"

0.24" 6
496
19.53"
200
225 1797.87"
8.86" 7.05"
109.5
4.31"
37
0.56" 1.46"
0.24" 6 165 165 73.5
14.1 6.50" 6.50" 2.89"

310 12.20"
330 12.99" 109.5 115.5
4.31" 4.55"
328.4 12.93" 428
16.85" 48
1.89"

Head VR-3100 Head VR-3050 Controller VR-3000K

2.76" 13.54" 2.76"
70 70 13.54"
344 344
11.42" 5.79" 11.42" 5.79"
290 147 290 147

496 496
19.53" 19.53"

228
8.98"
0.56" 0.56"
14.1 14.1

171 6.73" 150 150 5.91" 150 97 224

5.91" 5.91" 3.82" 8.82"
91 109 428 310 12.20" 428 125 328
3.58" 4.29" 16.85" 48 16.85" 48 4.92" 12.91"
310 12.20" 1.89" 343 13.50" 1.89"
328.4 12.93"
7.17"
182 25.3 1.00"
4.61"
414 16.30" 117
1.02" 8 × M6
344 13.54" 26
Depth 10 0.39"

195
228.5 3.15" 80 84 7.68"
9.00" 3.31"

(77 3.03")

35
1.38"
35 35
1.38" R180 R7.09" 1.38"

30
 Specifications

❚ VR Head/Controller
Controller VR-3000K
Model
Head VR-3200 VR-3100 VR-3050
Wide-field mode High magnification mode Wide-field mode High magnification mode Wide-field mode
Magnification on a 15" monitor 12× 25× 38× 50× 40× 80× 120× 160× 12× 25× 38× 50× 40× 80× 120× 160× 12× 25× 38× 50×
24.0 12.0 8.0 6.0 7.6 3.8 2.5 1.9 24.0 12.0 8.0 6.0 7.6 3.8 2.5 1.9 24.0 12.0 8.0 6.0
Horizontal (H): mm inch
0.94" 0.47" 0.31" 0.24" 0.30" 0.15" 0.10" 0.07" 0.94" 0.47" 0.31" 0.24" 0.30" 0.15" 0.10" 0.07" 0.94" 0.47" 0.31" 0.24"
Field-of-view
18.0 9.0 6.0 4.5 5.7 2.9 1.9 1.4 18.0 9.0 6.0 4.5 5.7 2.9 1.9 1.4 18.0 9.0 6.0 4.5
Vertical (V): mm inch
0.71" 0.35" 0.24" 0.18" 0.22" 0.11" 0.07" 0.06" 0.71" 0.35" 0.24" 0.18" 0.22" 0.11" 0.07" 0.06" 0.71" 0.35" 0.24" 0.18"
Zoom 1× to 4×
10 mm 0.39" 1 mm 0.04" 10 mm 0.39" 1 mm 0.04" 10 mm 0.39"
Measurable height * 1
(±5 mm ±0.20") (±0.5 mm ±0.02") (±5 mm ±0.20") (±0.5 mm ±0.02") (±5 mm ±0.20")
Standard scale * 2
0.1 μm 0.5 μm
Height measurement 0.5 μm
Repeatability (σ) *3
Width measurement 1 μm 0.5 μm 1 μm 0.5 μm 1 μm
Measurement Height measurement ±3 μm
accuracy *3 Width measurement ±5 μm ±2 μm ±5 μm ±2 μm ±5 μm
Full automatic (XY stage automatic control +
Manual (XY, Z)
Stitching function *4 auto focus) measurement
Auto adjustment, Auto template analysis –
XY stroke 184 × 88 mm 7.24" x 3.46" (motorized) 70 mm 2.76" *5 (200 mm *6) (manual)
Z stroke 90 mm 3.54" (motorized) 90 mm 3.54" (motorized) 88 mm 3.46" (manual)
Stage
Rotation ±180° (sample rotating stage) ±90°(θ stage) –
Tilt ±30° or more ±30° or more –
Working distance 75 mm 2.95"
Image receiving element 4 megapixel monochrome CMOS
Transmitter lens Two, double-telecentric lenses
Receiver lens Double-telecentric lens
Observation light source LED ring light (red, green, blue) LED ring light (white)
Light sources
Measurement light source White LED
Image size 1024 × 768 pixels, 2048 × 1536 pixels
Data processing Dedicated PC specified by KEYENCE (OS: Windows 7) *7
Supply voltage 100 to 240 VAC ±10%, 50/60 Hz
Power source
Power consumption 150 VA
Environmental Ambient temperature for usage 15 to 30°C 59 to 86°F
resistance Relative humidity for usage 35 to 80% (no condensation)
Controller 3.8 kg
Weight
Head *8 28.0 kg 22.5 kg 20.6 kg
*1 Wide-field ±5 mm ±0.20" and high magnification ±0.5 mm ±0.02" around the focal point position. *2 Height measurement resolution.
*3 Value obtained using KEYENCE’s specified standard gauge with measurement in KEYENCE’s specified measurement mode (ambient temperature: 23±1°C 73.4±1.8°F). *4 The stitching module (VR-H2J) is
required.
*5 The VR-3050 requires the XYθ stage (OP-87715). *6 When the OP-87717 manual slider for stitching used.
*7 Windows 7 Professional and Ultimate. *8 Weight of measurement unit: 10.8 kg

❚ Motorized XY stage VR-S200

Travel speed 10 mm 0.39"/sec (max.)
Travel range 184 × 88 mm 7.24" × 3.46"
Stage size Top surface: 215 × 165 mm 8.46" × 6.50" (rotary plate: ø140 mm ø5.51")
Weight 6.5 kg
* Optional item mountable on VR-3100 or VR-3050.

First-class customer support that only a direct service system can provide
KEYENCE employs a direct sales system that eliminates intermediaries, such as distributors and dealers, from our sales channel.
Our experienced, highly-skilled sales engineers respond quickly to customers’ inquiries, providing them with exceptional after-sales
service and support.
KEYENCE also offers free on-site inspection services and provides equipment loans free of charge in the event of a failure. With this level
of service, KEYENCE provides post-sales support you can rely on.

96M13660

Most manufacturers 1 Basic Operation

96M13
652

One-shot 3D Profile Measuring Macroscope One-shot

2 Advanced Settings of 3D Pro
file
VR-3000 VR-300
the Head
Measu
ring Ma
3
0K crosco
VR-300 /VR-3200
3D Measurement
pe 1 Getting
Started

Viewer Software 4
0K 2
Manual Image Stitching

VR-300 /VR-3100
Set-Up

VR-H2V
5
0K/VR-
Auto Image Stitching
3 Before
Measu
Stitching Module Reference Manual
3050
ring

6 Measurement Results Display

and 3D Measurement 4 Mountin
VR-H2J Device g Optional
s

7 Observation and Depth

composition 5 Mainte
nance

8 Measuring the Dimensions Append

Customer Sales company Distributor Manufacturer

ix Dimens

User’s
ions/

Reference Manual
Specifi
cations

Read this manual before use.

9 Print
Read this
Keep this manual before
Manual
Keep this manual in a safe place for future reference. manua use.
10 Calibration and Inspection l in a safe
place for
future referen
ce.
- Optional Settings
Appendix - Reinstalling

[KEYENCE]

Direct sales
Customer KEYENCE
In addition to the “Getting Started Guide” provided with
the product, a full color manual is also available.

31
 Automatically Analyze and Differentiate 3D Surfaces

3D LASER SCANNING CONFOCAL MICROSCOPE

VK-X250/X150/X120
❙ Non-contact, ultra high-accuracy 3D measurement
❙ 60x - 28800x magnification range
❙ Fully-automated measurements with just one click
❙ Works on any surface shape regardless of material
❙ Process multiple files at once for faster results
❙ Easily evaluate up to 42 different roughness parameters

The New Standard for Microscopes

DIGITAL MICROSCOPE
VHX-5000
❙ All-in-one microscope that incorporates observation,
image capture and measurement capabilities
❙ Depth-of-field 20 times greater than optical microscopes
❙ Motorized XYZ controls for simplified operation
❙ Instantly view any area entirely in focus
❙ Intuitive user interface allows everyone to perform analysis easily
❙ Advanced 2D and automated area measurement functions

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