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Design and Analysis of Experiments

This document discusses an experiment comparing the etch rates of two etching solutions used in semiconductor manufacturing. Eight wafers were etched in each solution and the etch rates were recorded. A t-test was conducted and found a p-value of 0.044, rejecting the hypothesis that the mean etch rates are equal. A 95% confidence interval on the difference in means was calculated as (-0.811832, -0.013168). Normal probability plots show the data meets the assumptions of normality and equal variance.

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1K views

Design and Analysis of Experiments

This document discusses an experiment comparing the etch rates of two etching solutions used in semiconductor manufacturing. Eight wafers were etched in each solution and the etch rates were recorded. A t-test was conducted and found a p-value of 0.044, rejecting the hypothesis that the mean etch rates are equal. A 95% confidence interval on the difference in means was calculated as (-0.811832, -0.013168). Normal probability plots show the data meets the assumptions of normality and equal variance.

Uploaded by

api-3723257
Copyright
© Attribution Non-Commercial (BY-NC)
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Download as DOC, PDF, TXT or read online on Scribd
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Design and Analysis of Experiments

Student: Nguyen Thi Hang Mark:


ID: R9605005

2.21. In semiconductor manufacturing wet chemical etching is often


used to remove silicon from the backs of wafers prior to
metallization. The etch rate is an important characteristic of this
process. Two different etching solutions are being evaluated. Eight
randomly selected wafers have been etched in each solution, and
the observed etch rates (in mils/min) are as follow.

Solution 1 Solution 2
9.9 10.2
9.4 10.0
10.0 10.7
10.3 10.5
10.6 10.6
10.3 10.2
9.3 10.4
9.8 10.3

(a) Do the data indicate that the claim that both solutions have the same
meant etch rate is valid? Use α = 0.05 and assume equal variances.

The experiment was carried out following: “two different etching


solutions are being evaluated, Eight randomly selected wafers have been
etched in each solution”, thus we can use the Two-Sample t-Test for
comparing tow treatment means.

We have two hypothesizes: H0: µ1 = µ2


H1: µ1 ≠ µ2
With α = 0.05 is used, the Minitab two-sample t-test software is applied
for this comparison, the results are shown on below table:

Two-sample T for Solution 1 vs Solution 2

N Mean StDev SE Mean


Solution 1 8 9.950 0.450 0.16
Solution 2 8 10.363 0.233 0.082

Difference = mu (Solution 1) - mu (Solution 2)


Estimate for difference: -0.412500
95% CI for difference: (-0.811832, -0.013168)
T-Test of difference = 0 (vs not =): T-Value = -2.30
P-Value = 0.044
DF = 10

From this table, we find that P - value = 0.044 < α = 0.05, it means
hypothesis H0 is rejected or solution’s mean differs.

(b) Find a 95% percent confidence interval on the difference in mean


etch rates
95% CI for difference: (-0.811832, -0.013168)

(c) Use normal probability plots to investigate the adequacy of the


assumptions of normality and equal variance.
Normal probability plots

Percent (cumulative normal probability x 100)


99
Variable
Solution1
95 Solution2

90 Mean StDev N AD P
9.95 0.4504 8 0.216 0.764
80 10.36 0.2326 8 0.158 0.919

70
60
50
40
30
20

10

1
8 9 10 11 12
rate (mils/ min)

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