ESC201T L19 Semiconductors
ESC201T L19 Semiconductors
ESC201T L19 Semiconductors
Electronics
B. Mazhari
Dept. of EE, IIT Kanpur
Tools for circuit Analysis
Fundamentals of electrical circuits--3
Transient Analysis of RLC Circuits--2
Sinusoidal Steady State Analysis--4
Analog Circuits
Semiconductors, Diodes, Circuits-----3
Transistors and Amplifiers---4
Operational Amplifier based Analog circuits -4
Digital Circuits
Logic gates, Combinational circuits ---4
Flip-flops, Sequential Circuit---4
Data Converters----3
Semiconductor
semiconductor
Conductivity (S/cm)
“Any sufficiently advanced technology is indistinguishable from
Magic”
(“Profiles of the Future: An Inquiry into the Limits of the Possible”, by Arthur C. Clarke)
Semiconductors have allowed us to perform magic
sand
Sand
Quartz
SiO2
Metallurgical Grade
Quartzite Silicon
SiO2 + C -> CO2 + Si (95-98% pure)
About 60 000 tons of quartzite (about 45 per cent silicon) and 25 000 tons of charcoal (made from 90 000 tons of timber) are
required to produce the 28 000 tons of silicon. About 13 megawatt hours of electricity to produce one ton of silicon. At the
industry standard of A$0.06 per kWh, electricity represents around 40 per cent of the market value of silicon
Metallurgical grade
Silicon
Si + 3 HCl →SiHCl3 + H2
Trichlorosilane
Vapor deposition
Electronic Grade
Polysilicon
Electronic Grade Poly-
Silicon
Silicon Wafer
~400um thick
$1400/Kg !!
A 200mm wafer cost $45 in 2006
Electronics Revolution
Silicon is a semiconductor
Conductivity (S/cm)
Silicon
Energy
3p
Electronic structure 1s22s22p63s23p2
3s
2p
2s
4 outer shell electrons from 4 covalent bonds 1s
Silicon Crystal
Energy
3p
3s Completely empty at 0K
2
2s p
1s
Completely full of electrons
Bottom most empty band is called conduction band
Top most filled band is called valence band
Conduction band
Valence band
Electrons in a completely full band cannot contribute to current
conduction !
F = qE
Energy of the electron should increase but all the higher energy states are
occupied !
Picture of Silicon Crystal at 0oK
Completely empty
1.12eV
Completely Full
Completely empty
1.12eV
Valence band has few empty
states called holes
Completely Full
Electrons in conduction and valence band can now contribute to current flow
Conduction Band
Suppose an nv number of net valence band electrons cross the area from
right to left in time t, then
Valence electrons
holes
q nv q nv
I
t t
q nv q p
I
t t
Current carried by electrons in valence band is equal to current carried by
holes if we associate positive charge with them.
For the purpose of current flow and electronics in general, we can ignore
the electrons in valence band and think only in terms of holes.
Adding small amounts of suitable impurity atom can drastically alter number of
electrons and holes in a semiconductor !
N-type : n>p
P-type : p>n
Impurity concentration : N A 1 0 1 7 cm 3
This is one of the reasons why even though sand is plentiful and ‘dirt
cheap’, electronic grade silicon is so expensive
+
N
P-Silicon
SiO2
The SiO2 acts a as a barrier
and prevents diffusion of
dopants through it . As a result
the N-type region is created
only in the region where Silicon
P-Silicon is exposed
31
G-Number
B. Mazhari, IITK
A window in SiO2 can be created by first covering the whole Silicon surface
with oxide through the oxidation process.
Next the Silicon surface is coated with an organic material which is sensitive to
light called Photoresist. A positive photoresist undergoes changes upon
exposure which makes it easier to dissolve in a developer solution
We next need a Mask which specifies the location and dimension of N-
region. It is basically a glass plate which has opaque and transparent regions.
Wherever we want the photoresist to remain, that region is opaque and
wherever we wish to remove the photoresist that region is made transparent.
Light
Mask
Photoresist
Next the whole wafer is SiO2
dipped in HF acid to Etch the
exposed oxide to obtain the
following structure: P-Silicon
SiO2
Next the photoresist is removed
to obtain the structure required for
carrying out diffusion.
P-Silicon
33
G-Number
B. Mazhari, IITK
Fabrication: simplified view
SiO2 SiO2
Poly Poly
+ + + + + +
P N N N P P
N-well
P-Silicon P-Silicon