BOOK (SPIE) - Field Guide To Optomechanical Design and Analysis
BOOK (SPIE) - Field Guide To Optomechanical Design and Analysis
Optomechanical
Design and
Analysis
Katie Schwertz
James H. Burge
Schwertz, Katie M.
Field guide to optomechanical design and analysis / Katie
M. Schwertz, Jim H. Burge.
p. cm. – (The field guide series)
Includes bibliographical references and index.
ISBN 978-0-8194-9161-9
1. Optical instruments–Design and construction–
Handbooks, manuals, etc. 2. Optomechanics–
Handbooks, manuals, etc. I. Burge, James H. II. Title.
TS513.S385 2012
6810.4–dc23
2012013233
Published by
SPIE
P.O. Box 10
Bellingham, Washington 98227-0010 USA
Phone: +1.360.676.3290
Fax: +1.360.647.1445
Email: [email protected]
Web: http://spie.org
Jim Burge
College of Optical Sciences
University of Arizona
Table of Contents
Precision Positioning 22
Kinematic Constraint 22
Example Constraints and Degrees of Freedom 23
Semi-Kinematic Design 24
Issues with Point Contacts 25
Precision Motion 27
Stage Terminology 28
Linear Stages 29
Rotation and Tilt Stages 30
Errors in Stage Motion 31
Table of Contents
Table of Contents
Tolerancing 110
Geometric Dimensioning and Tolerancing 110
GD&T Terminology 111
GD&T Symbology 112
ISO 10110 Standard 113
Appendices 114
Tolerance Guides 114
Clean-Room Classifications 117
Shipping Environments: Vibration 119
Shipping Environments: Drop Heights 120
Unit Conversions 121
Cost and Performance Tradeoffs for Linear
Stages 122
Torque Charts 125
Adhesive Properties 127
Glass Properties 130
Metal Properties 134
∆ xl = ∆ x i (1 − m)
∆ xl
∆θ i ∼
=
f
³ ´
∆ z l = ∆ z i 1 − m2
∆θ i = 2∆θm
∆ z i = 2∆ z m
∆ xm
∆θ i ∼
=
f
For most glass in the visible spectrum, the focus shift can
be estimated by
t
∆z ∼
=
3
Tilt of a plane parallel plate will introduce aberrations and
cause a lateral shift in the image, given by
t∆θ p ( n − 1)
∆xi =
n
Effect of Effect of
Effect of
Element axial lateral
tilt
translation translation
q
RSS error = x12 + x22 + x32 + . . . x2i
Image Orientation
Dove prism
Dove prism
tunnel diagram
Mirror Matrices
1 0 0 −1 0 0
Free space: M = 0 1 0 X Mirror: M x = 0 1 0
0 0 1 0 0 1
1 0 0 1 0 0
Y Mirror: M y = 0 −1 0 Z Mirror: M z = 0 1 0
0 0 1 0 0 −1
0. 7
k 2 = M x · k 1 = 0.7
0
1 −0.7
n̂ = 0 k 1 = 0.7
0 0
k i = [M i · · · M2 · M1 ][ k 1 ]
= Me f f · k1
Mrot = R · M · RT
where the rotation matrices are given by:
1 0 0
X Rotation: R x = 0 cos α − sin α
0 sin α cos α
cos β 0 sin β
Y Rotation: R y = 0 1 0
− sin β 0 cos β
cos γ − sin γ 0
Z Rotation: R z = sin γ cos γ 0
0 0 1
Note that a mirror normal to a given axis will be
insensitive to rotation in that axis and cause 2θ rotation
in each of the other two axes.
W = D + 2L · tan α A = E+F
W · cos α
E= G = ( A /2) − F
2sin(θ − α)
W · cos α AW
F= B = q¡ ¢
2sin(θ + α) A 2 − 4G 2
W W
W =D=B E=F= A=
2sin θ sin θ
∆z τ
γ= γ=
x G
dFshear
τ=
dA
σ dFnormal
ε= σ=
E dA
(E, G) (K , G) (G, ν)
EG 2G (1+ν)
K= 3(3G −E )
— 3(1−2ν)
— 9KG 2G (1 + ν)
E= 3K +G
G= — — —
E 3K −2G
ν= 2G − 1 2(3K +G )
—
(E, ν) (K , ν) (K , E)
E
K= 3(1−2ν)
— —
E= — 3K (1 − 2ν) —
E 3K (1−2ν) 3K E
G= 2(1+ν) 2(1+ν) 9K −E
— — 3K −E
ν= 6K
Strain-vs-Stress Curve
Safety Factor
Material Favorable
Symbol Units
property condition
Coefficient of α 10−6 Low
thermal m/m/◦ C
expansion (CTE)
Young’s modulus E GPa High
Density ρ g/cm3 Low
Poisson ratio ν — —
Thermal λ W/m-K High
conductivity
Thermal D m2 /s High
diffusivity
Specific heat Cp J/kg-K Low
capacity
Specific stiffness E/ρ N-m/kg High
Glass Strength
P f = probability of failure
Fracture
tough- Surface
Material nessp m σ0 (MPa) Pf finish
(MPa– m)
N-BK7 0.85 30.4 70.6 0 SiC 600
N-BK7 0.85 13.3 50.3 3.36 × 10−12 D4
N-BaK1 — 8.2 58.9 2.31 × 10−3 SiC 600
F2 0.55 25 57.1 0 SiC 600
SF6 0.7 5.4 49.2 2.47 × 10−5 SiC 600
Zerodur® 0.9 5.3 293.8 2.5 × 10−9 Optical
polish
Zerodur® 0.9 16 108 0 SiC 600
Stress Birefringence
Permissible OPD
Typical applications
per cm glass path
< 2 nm/cm Polarization instruments
Interference instruments
5 nm/cm Precision optics
Astronomical instruments
10 nm/cm Photographic optics
Microscope optics
20 nm/cm Magnifying glasses
Viewfinder optics
Without requirement Illumination optics
Kinematic Constraint
Semi-Kinematic Design
à !1/3
F 2 E 2e
u = 0. 8
R
a = 0.9(FRE e )1/3
µ ¶
dF ∼ RF 1/3
k= = 1.875
du E 2e
1 − ν21 1 − ν22
Ee = +
E1 E2
F
(σ c )max = 1.5
π a2
µ ¶1/2 µ ¶
F F /L 1/2
b = 2.3 RE e (σ c )max = 0.6
L RE e
(σ c )max
τmax ∼
=
3
1 1 1
= +
R R1 R2
Precision Motion
Stage Terminology
Linear Stages
Standard Hardware
Example Screws
Common screw-drive types:
Fastener Strength
English
Tensile
Head For inch
Grade strength
marking diameters
(psi)
5 1/4 to 1 120,000
Metric
Tensile
Property Head For metric
strength
class marking diameters
(psi)
Tightening Torque
Adjusters
If the thread pitches TP1 and TP2 are such that TP2 >
TP1 , then the resultant thread pitch (TP e f f ) of the
differential screw is:
TP e f f = TP2 − TP1
As an example, using 1/4 −20 (TP2 = 0.0500 ) and 1/4 −28 (TP1 =
0.03600 ) threads, each rotation moves the screw 0.0500 , but
the nut (traveling piece) only moves 0.01400 . The effective
pitch of 0.01400 is equivalent to 70 threads/in.
Shims are thin pieces of material used for one-time
spacing adjustments and are a very stable solution.
A variety of shim types exist for various functions.
Note that before deciding to use shims, a good way to
determine the required spacer thickness is needed. There
are also a variety of washer types that can provide small
adjustments or act as shims.
Liquid Pinning
µ ¶
π d p L p Ea
kr = + Ga
2 ra 1 − ν2a
d p = pin diameter
Electronic Drivers
Flexures
2a
b
b
Leaf Circular/elliptical
Toroidal
The bending stiffness κθ = ( M z /θ z ), axial stiffness k x =
(F x /δ x ), and maximum bending stress σ y are given below,
assuming t ¿ a.
Adhesives
Adhesive Properties
KA GA
k= k shear =
t t
There is a transition area be-
tween using Young’s modulus
versus the bulk modulus. When
using a bond that is neither ex-
plicitly “thick” nor “thin” com-
pared to the area of the bond, a
general axial stiffness can be de-
termined by using the effective
modulus E c :
³ ´
E c = E 1 + 2ϕS 2
Thermal Stress
Common-bore-diameter
barrel: uses spacers
to maintain element
spacing.
Stepped-diameter barrel:
uses machined seats to
place lenses.
Surface–Contact Interfaces
Prism Types
Image-Rotation Prisms
Image-Erection Prisms
The following prisms are commonly
found in binoculars and telescopes
to erect inverted images. The pre-
vious two prisms are often
combined into a system called a
Pechan–Schmidt prism or Pechan
–Schmidt roof.
x 0 y0 z 0
x0 = x
1 0 0
y0 = z 0 0 −1
z0 = y 0 1 0
W = weight of prism/window
h= prism/window thickness
Thin-Wedge Systems
(b)
When the prism apexes are adjacent to each other (a), the
maximum angular deviation is achieved. When the prism
apexes are opposite each other (b), the system acts as a
plane parallel plate and simply shifts the beam path.
An anamorphic prism pair is a pair of wedge prisms
used to magnify light in one axis (in the plane of
refraction) while leaving the beam in
the orthogonal axis unchanged. These
prisms are often used to circularize
elliptical diode laser beams.
A focus-adjusting wedge system con-
tains a pair of identical wedge prisms that
can be laterally translated individually. The
optical path through the glass can then be
varied, allowing the system to image ob-
jects at various distances onto a fixed image
plane.
Window Mounting
"µ ¶ #1
P 2 2
Clamped
h≈b ¡ a ¢4
σ ys 1 + 2
b
" #1
³π´µ 1 ¶ gEh2 2
f n− circ = ¡ ¢
4 r2 12ρ 1 − ν2
³π´µ 1 ¶" #1
1 gEh2 2
f n−rect = + ¡ ¢
2 a2 b 2 12ρ 1 − ν2
Domes
Dome Strength
¡ ¢
R 03 R 3i + 2 r 3 Usually, if the dome is
σm = σh = −P ³ ´
2r 3 R03 − R 3i a hyperhemisphere, as-
¡ ¢ sume that the merid-
R 03 r 3 − R 3i ional membrane stress
σr = −P ³ ´
r 3 R 03 − R 3i is twice the hoop mem-
brane stress.
Mirror Substrates
Glass substrates
Nonglass substrates
Aluminum 6061
• General notes: Low cost, difficult to achieve high
stability
• Polishing notes: Can be polished bare to 5 nm rms;
typically electroless nickel coated
Beryllium
• General notes: Very expensive due to complex
fabrication process
• Polishing notes: When bare polished, does not give
good finish and is 5–10× slower than glass; typically
electroless nickel coated
Copper C260
• General notes: Easy to machine
• Polishing notes: Very soft; without extreme effort,
expect low-quality finish.
Silicon
• General notes: Limited to small sizes
• Polishing notes: Can be polished to 1 nm rms
with chemo-mechanical polishing using a diamond
compound
Lightweighting Mirrors
Open-back mirror:
£ ¡ ¢¤
3 [1 − (η/2)] t4F − ηh4C /2 + ( t F + h C )4 (η/2)
hb =
t F + (η h C /2)
Sandwich mirror:
(2B + t c ) t c
h3b = (2 t F + h C )3 − (1 − η/2) h3C ; η=
(B + t c )2
t F = faceplate thickness
RMS surface
Surface error error (µm) P–V : RMS ratio
Vibration
A single-degree-of-freedom sys-
tem consists of a mass, spring,
and damper held fixed at one end.
If the mass is set into motion, it
will oscillate at its fundamental,
or natural, frequency in only one
direction.
The natural frequency of a system is the frequency at
which it resonates, given by
s
k ω0
ω0 = f0 =
m 2π
The approximate motion of a system can be found by
assuming that it only has one degree of freedom and
finding the natural frequency.
Damping is the process in which mechanical energy is
dissipated from a system and the amplitude of vibration
at resonance is reduced. It is expressed by a damping
coefficient C . Critical damping C r is the damping
coefficient that causes the system to return to its initial
position in the shortest amount of time without over-
oscillation. The damping factor is then defined as the
ratio of the damping coefficient to the value of critical
damping:
C
ζ=
Cr
Damping Factor
Isolation
Transmissibility T de-
scribes how much of any
environmental vibrations
are transmitted to the
isolated system (i.e., lower
transmissibility means
more isolation).
v
u ³ ´2
u
u 1 + 2 ff0 ζ
T =u
uµ ¶2
t ³ ´2
f2 f
1− f 02
+ 2f ζ
0
Thermal Effects
Heat Flow
· ¸(£ ¡ ¢ ¤)
P ( n − 1)s 1 + 10−8 0.601 − 9.72 · 10−3 T P
( n − 1) =
96095.43 1 + 3.661 · 10−3 T
· ¸
2406147 15998
(n − 1)s = 8342.54 + ¡ ¢+¡ ¢ · 10−8
130 − σ2 38.9 − σ2
Athermalization
Passive Athermalization
Active Athermalization
Alignment
Alignment Tools
GD&T Terminology
GD&T Symbology
Tolerance Guides
25 0.3
50 0.5
150 1
400 2
Clean-Room Classifications
Clean-room
Typical uses
classification
Class 1 and 10 Manufacturing electronic
integrated circuits
Class 100 Manufacturing hard drives
and medical implants
Class 1000 Pharmaceutical
manufacturing
Class 10,000 Hospital operating rooms,
manufacturing TV tubes
Class 100,000 Assembly of consumer
optics, manufacturing ball
bearings
1 35 7.5 3 1 —
10 350 75 30 10 —
1,000 — — — 1,000 7
10,000 — — — 10,000 70
1 10 2 – – – –
2 100 24 10 4 – –
2.37 · 1.02 ·
5 100,000 3,520 832 29
104 104
2.37 · 1.02 · 3.52 ·
6 1,000,000 8,320 293
105 105 104
3.52 · 8.32 ·
7 — — — 2,930
105 104
3.52 · 8.32 · 2.93 ·
8 — — —
106 105 104
3.52 · 8.32 · 2.93 ·
9 — — —
107 106 105
s
h
ag =
δSW EF
The deflection due
to a self-weight
equivalent force
variable δSWEF
is the amount the
packaging deflects
if the system ex-
periences a down-
ward force equiv-
alent to its own weight.
Unit Conversions
Temperature
°C (°F − 32) · 5/9
°F (°C · 9/5) + 32
K °C + 273.15 K
Term Value
00
a thousandth 0.001
00
a thou 0.001
00
a mil 0.001 (1 “milli-inch”)
00
40 thousandths 0.040
40 thousandths ≈ 1 mm
00
two-tenths 0.0002 (2/10 of 1 thousandth)
00
millionth 0.0000001 (1 millionth of an inch)
DT = dovetail
BB = ball bearing
GA = gothic arch
CR = crossed-roller bearing
Flex = flexure
Property DT BB GA CR Flex
Mid/
Cost Low Mid Mid High
High
Very
Resolution Low Mid Mid High
High
Travel Very
Large Mid Mid Mid
range Small
Load
High* Low High High High
capacity
Angular
High Mid Low Low –
deviation
Resolution No
∼10–100 ∼0.5–1 ∼1–10 ∼1–10
(µm)** limit
Coarse Gen. Gen. Fiber Fiber
Common precise precise optics optics
place-
uses place- place- place- place-
ment
ment ment ment ment
* As a class in general, dovetail stages can handle very large loads.
Stages in the example travel range (<2.5 in) are most concerned with
low cost, resulting in the low load capacities shown in the charts.
** Resolution ranges provided here are approximate. Some manual
stages offer resolution down to 0.1 µm with the proper driver.
Torque Charts
Adhesive Properties
Shear str.
Adhesive Suggested
Type at 24 °C
(Mfr.) curing time
(MPa)
Temp.
Adhesive CTE
%TML %CVCM range
(Mfr.) (×10−6 /° C)
(°C)
2115 55 NA NA −70 to
(Trabond) 100
Glass Properties
Trans- α
mission E (×10−6
Material nd range (GPa)
/° C)
(µm)
N-BK7 1.5168 0.2–2.5 82 7.1
Borofloat 33 1.4714 0.35–2.7 64 3.25
borosilicate
Calcium 1.4338 0.35–7.0 75.8 21.28
fluoride
Clearceram® - 1.546 0.5–1.5 92 0.02
Z (CCZ)
HS
Fused silica 1.4584 0.18–2.5 72 0.5
Germanium 4.004 (@ 10 2.0–14.0 102.7 6.1
µm)
Magnesium 1.3777 (n o ) 0.12–7.0 138 13.7 (∥)
fluoride 1.3895 (n e ) 8.9 (⊥)
P-SK57 1.5843 0.35–2.0 93 7.2
(after
molding)
Sapphire 1.7659 (n o ) 0.17–5.5 400 5.6 (∥)
1.7579 (n e ) 5.0 (⊥)
SF57 1.8467 0.4–2.3 54 8.3
N-SF57 1.8467 0.4–2.3 96 8.5
Silicon 3.148 1.2–15.0 131 2.6
(@ 10.6 µm)
ULE® 1.4828 0.3–2.3 67.6 0.03
(Corning
7972)
Zerodur® 1.5424 0.5–2.5 90.3 0.05
(Class
1)
Zinc 2.403 0.6–16 67.2 7.1
selenide (@ 10.6 µm)
(CVD)
Zinc 2.2008 0.4–14.0 74.5 6.5
selenide (@ 10 µm)
(Cleartran)
ρ dn/dT λ K
Material (g/ (absolute) ν (W (10−12
cm3 ) (×10−6 /°C) /mK) /Pa)
N-BK7 2.51 1.1 0.206 1.11 2.77
Borofloat 33 2.2 – 0.2 1.2 4
borosilicate
Calcium 3.18 –11.6 0.26 9.71 −1.53
fluoride @ 546
nm
( q1 −
q2 )
Clearceram® - 2.55 – 0.25 1.54 –
Z (CCZ) HS
Fused silica 2.2 11 0.17 1.35 3.5
Germanium 5.33 396 0.28 58.61 –
Magnesium 3.18 1.1 (n o ) 0.271 11.6 –
fluoride
P-SK57 3.01 1.5 0.249 1.01 2.17
Sapphire 3.97 13.1 0.27 46 –
SF57 5.51 6 0.248 0.62 0.02
N-SF57 3.53 –2.1 0.26 0.99 2.78
Silicon 2.33 130 0.279 137 –
ULE® 2.21 10.68 0.17 1.31 4.15
(Corning
7972)
Zerodur® 2.53 15.7 0.243 1.6 3
Zinc 5.27 61 @ 10.6 0.28 18 –1.6
selenide
(CVD)
Zinc 4.09 40 @ 10.6 0.28 27.2 –
selenide 54.3 @
(Cleartran) 0.632
Common
Material Pros Cons applications
Common
Material Pros Cons applications
Metal Properties
α
E ρ (g λ (W Hard-
Material (×10 ν
(GPa) −6 /°C) /cm3 ) /mK) ness
Equation Summary
(n − 1) t∆θ p ( n − 1)
∆z = t ∆xi =
n n
F V
σ= τ=
A A
∆L σ τ
ε= = γ=
L E G
E E
G= K=
2(1 + ν) 3(1 − 2ν)
K s σt
∆Wp =
λ
EA GA
k= k shear =
t t
Q 5Q
P= ≈
[D T (0.577µ M + 0.5µG )] DT
Equation Summary
d l (α m − α l )
h= (Bayar equation)
2 (α a − β m )
dl (αm − αl ) (van Bezooijen or
h= ¡ ¢
2 αa − αm + 2ν αa − αl −αm Muench equation)
1−ν 2
(1 − 2νG ) σC
σT =
3
δ = α(n − 1)
"µ ¶ #1
P 2 2
h≈b ¡ a ¢4 Clamped
σ ys 1 + 2
b
Equation Summary
³π´µ 1 ¶" #1
1 gEh2 2
f n−rect = + ¡ ¢ Rectangular
2 a2 b 2 12ρ 1 − ν2
à ! " µ ¶2 #
³ q ´ πr2 2 h
δrms = γ N 1+2
D N u
Flexural rigidity:
Eh3
D= ¡ ¢
12 1 − ν2
Natural frequency:
s
k ω0
ω0 = f0 =
m 2π
Equation Summary
Transmissibility:
v
u ³ ´2
u
u 1 + 2 ff0 ζ
T =u
uµ ¶2
t ³ ´2
f2 f
1− f 02
+ 2f ζ
0
Miles equation:
r
π
a rms = · f 0 · Q · PSD
2
∆L = αL∆T
σ = E α∆T
∆L
ε= = α∆T
L
Thermal conductivity:
QL
λ=
∆T
Thermal diffusivity:
λ
D=
ρC p
Equation Summary
∆ f = β f ∆T
1 dn rel
β = α−
n − 1 dT
φ1 ν0
= 0 1 0
φ ν1 − ν2
à !
φ2 ν0
=− 0 2 0
φ ν1 − ν2
1
ν0 =
β
Bibliography
Bibliography
Bibliography
Bibliography
References
Index
Index
Index
Index
Index
Index